JP6225681B2 - Manufacturing method of optical communication module - Google Patents

Description

  The present invention relates to a method for manufacturing an optical communication module on which an optical component that is required to be mounted with high accuracy is mounted.

  A wavelength division multiplexing optical transmission module (hereinafter simply referred to as an optical transmission module), which is one of optical communication modules, converts signal light emitted from a plurality of light emitting elements (LDs) into an optical lens, a wavelength selection filter, and a reflection. The optical component is wavelength-multiplexed using an optical component such as a mirror for transmission, and these optical components are mounted on a substrate together with a plurality of LDs.

  Conventionally, a method of transporting the above optical components to a predetermined position on the substrate with tweezers or the like has been taken. However, as the density of optical components increases and the size of the optical transmission module decreases, the area where tweezers are put on the substrate It has become difficult to ensure. Therefore, a method has been proposed in which an optical component is sucked and sucked using a holder called a suction collet (also called a suction collet or a vacuum collet) and transported to a predetermined position on the substrate. The suction collet is provided with a suction surface that comes into contact with the surface of the optical component and a suction port that opens to the suction surface, and sucks the surface of the optical component through the suction port to place the optical component at a predetermined position on the substrate. It is to be transported.

  The above-mentioned suction collet was originally developed for transporting electronic devices such as semiconductor elements. For example, the suction collet described in Patent Document 1 has a substantially needle shape, and its axis extends in the vertical direction. The suction surface at the tip is provided inclined at a predetermined angle θ1 with respect to the horizontal plane. The inclination angle θ1 may be in the range of 20 ° to 70 °, but is more preferably about 30 ° to 60 °.

JP 2001-77454 A

  FIG. 8 is a diagram showing the shape of a conventional suction collet and a method for conveying parts, in which 120 is a suction collet, 121 is an mPD (monitor PD), 122 is an optical component, 123 is an optical surface, and 124 is a cut surface. Indicates. FIG. 8A shows a conventional usage method in which the mPD 121 is sucked and conveyed by the suction collet 120. When transporting such an electronic component, the suction port of the suction collet 120 does not directly touch the device forming surface of the electronic component. Specifically, a recess is formed at the tip of the suction collet 120, and a suction port is provided at the innermost part of the recess. When the electronic component is adsorbed by the adsorbing collet 120, the electronic component is caught on the edge of the recess, and the device formation surface is not directly touched. When such an adsorption collet 120 is used for the optical component 122, as shown in FIG. 8B, the cut surface 124 of the optical component 122 is adsorbed, and the adsorption surface of the optical surface 123 and the adsorption collet 120 is And is affected by the verticality of the cutout.

  When such a conventional suction collet 120 is to be applied to mounting of an optical component, the optical component has a dimension of less than 1 mm 2. A conventional suction collet was originally developed for an electronic device (semiconductor chip) and has a suction port at the tip of the collet. Alternatively, an adapter (a U-shaped flat plate) conforming to the chip size is provided at the tip of the collet, and the bottom side of this U-shape is usually used as the suction port.

  However, when this suction collet is applied to the optical component mounting process, there are the following problems. The optical surfaces of each optical component (also referred to as an optical reference surface, for example, a reflection surface in the case of a WDM filter, a mirror, and a PBC, and a lens main surface in the case of a lens) are all perpendicular to the main surface of the substrate. That is, only the mPD has its optical surface (light-receiving surface) parallel to the main surface of the substrate, and all other components are pushed to have the optical surface in a vertical position. In this case, when the conventional suction collet is used, the suction surface of the component other than the mPD is other than the optical surface. For example, the upper surface in contact with the optical surface must be sucked.

  For optical components, the parallelism of the principal surface (optical surface) and the opposite surface is strictly defined. In particular, when both surfaces of the WDM filter, λ / 2 wavelength plate, and PBC are not parallel, it is not preferable because the emitted light is not parallel to the incident light. Therefore, it is strictly defined as one specification of the product. However, the orthogonality (right angle) between the main surface of the optical component and the upper surface in contact with the main surface is not normally defined. If this right angle is included in the product specifications, the product price will rise significantly. Therefore, as shown in FIG. 8B, when the upper surface with uncertain right angle is sucked by the tip of the suction collet, the right angle between the optical surface of the component and the substrate is not maintained at all.

  That is, when the upper surface of the component is sucked by the tip of the suction collet, the angle (direction) of the component optical surface with respect to the LD optical axis is not compensated at all. Depending on the state of the component at the moment of adsorption to the adsorption collet, the suction speed, etc., the angle of the component immediately after adsorption with the adsorption collet, even if an index (index) or mark about the angle is provided on the adsorption collet, The angle becomes indefinite. However, in the optical transmission module, the angle of the component optical surface with respect to the LD optical axis must be regulated most strictly.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an optical communication module manufacturing method capable of mounting an optical component with high accuracy regardless of the cutting-out accuracy of the optical component.

The present invention provides an optical communication having a plurality of light emitting elements or light receiving elements mounted on a substrate and a plurality of optical components fixed at positions corresponding to the plurality of light emitting elements or light receiving elements on the substrate. A method for manufacturing a module, comprising: an adsorption step of adsorbing an optical surface of the optical component by an adsorption means; and moving the optical component adsorbed by the adsorption means to a predetermined position of the substrate, A holding step of holding without contacting the substrate, and a fixing step of fixing the optical component at a predetermined position of the substrate by curing a resin filled in a gap between the optical component and the substrate. And the suction means is a suction collet having a reference plane formed on the side surface in the longitudinal direction of the tip portion and a suction port provided in the reference plane. A step at a predetermined distance in the longitudinal direction from the tip of the suction collet, the predetermined distance is shorter than the height of the optical component, and further has a flange portion between the reference plane and the step, In the suction step, the optical surface of the optical component is sucked into the suction port, and after the suction step, before the optical component is moved to a predetermined position of the substrate, the lower surface of the optical component is further moved to the substrate. And pressing the upper surface of the optical component into contact with the step.

  According to the above invention, by adsorbing the optical surface of the optical component, it is possible to mount the component with high accuracy and little variation without depending on the cutting accuracy of the optical component.

It is a schematic diagram which shows the structural example of the optical system vicinity of an optical transmission module. It is a bird's-eye view which shows the structural example of the optical system vicinity of an optical transmission module. It is a figure which shows an example of the transmittance | permeability of optical signal (lambda) 1-lambda4. It is a figure which shows an example of the shape of the front-end | tip part of the adsorption collet by this invention. It is a figure for demonstrating more specifically the structure of the front-end | tip part of the adsorption collet by this invention. It is a figure explaining an example of the manufacturing method of the optical transmission module using the adsorption collet by this invention. It is a figure explaining an example of the alignment process by this invention. It is a figure which shows the shape of the conventional adsorption | suction collet, and the conveyance method of components.

  First, the optical transmission module according to the present invention will be described. FIG. 1 is a schematic diagram showing a configuration example in the vicinity of an optical system of an optical transmission module, and FIG. 2 is a bird's eye view thereof. In the figure, 100 is an optical transmission module, 101 is a 4-channel driver, 102 is LD (Laser Diode × 4), 103 is a condenser lens (× 4), 104 is mPD (monitor Photo Diode × 4), and 105 is BS ( (Beam Splitter), 106 is a collimating lens, 107 is a wavelength division multiplexing filter (WDM filter), 108 is a λ / 2 wavelength plate, 109 is a mirror, 110 is a PBC (Polarization Beam Combiner), and 111 is a substrate (also called a carrier). Show.

  In the optical transmission module 100, four LDs 102 driven by a four-channel driver 101 are mounted on a substrate 111, and optical signals emitted from the four LDs 102 (λ1 to λ4: wavelengths are different). Are multiplexed and output. The wavelengths of the emitted light λ1 to λ4 conform to the CWDM standard (1310 nm, 1330 nm,..., 20 nm intervals hereinafter). When multiplexing a plurality of signal lights having such extremely small adjacent wavelength intervals, it becomes difficult for the WDM filter 107 to secure a selection ratio with respect to adjacent wavelengths.

  The signal light emitted from the four LDs 102 is once condensed by the four condenser lenses 103 and then input to the mPD 104. Referring to FIG. 2, the mPD 104 is mounted on a quadruple BS 105, and the BS 105 bisects the light from the condensing lens 103 and divides one of them in a direction perpendicular to the main surface of the substrate 111, that is, in the direction of the mPD 104. Reflect and transmit the other. The BS 105 is obtained by bonding two prisms, and the intensity ratio of the two beams is determined by the characteristics of the interface between the two prisms. For example, the ratio of reflected light: transmitted light is 1: 9.

  In the above, the transmitted light is the main component, and this is input to the next collimating lens 106. The focal point of the condensing lens 103 on the mPD 104 side and the focal point of the collimating lens 106 on the mPD 104 side generally coincide. This increases the coupling efficiency of the following optical system and facilitates alignment of each optical component. The light transmitted through the collimating lens 106 is converted into substantially collimated light (parallel light), and one group of optical signals λ3 and λ4 is totally reflected by the mirror 109, and its optical axis is bent by approximately 90 °. The other group of optical signals λ1 and λ2 are input to the WDM filter 107, respectively. In the WDM filter 107, the optical signals λ 1 and λ 2 that have traveled straight through the collimator lens 106 and the optical signals λ 3 and λ 4 reflected by the mirror 109 are combined.

  In other words, the WDM filter 107 includes a first WDM filter 107a and a second WDM filter 107b. When attention is paid to the first WDM filter 107a, the first WDM filter 107a is formed of a multilayer film having a wavelength characteristic that transmits light of λ1 and reflects light of λ3. Similarly, the second WDM filter 107b is formed of an optical multilayer film having transmission / reflection in the relationship of λ2 and λ4. In this way, by passing through the WDM filter 107, the light of λ1 and λ3 and the light of λ2 and λ4 are combined to match the optical axes.

  Next, only the light combined with λ1 and λ3 passes through the λ / 2 wavelength plate 108, and the polarization direction is rotated by 90 °. The optical transmission module 100 is assumed to be an edge-emitting LD. The polarization direction of the emitted light of this type of LD is substantially parallel to the active layer. That is, regardless of the epi-down / epi-up mounting form, the polarization direction of the emitted light in the edge-emitting LD is parallel to the chip surface (back surface). Therefore, in the present optical transmission module 100, the light of λ1 to λ4 is polarized in the direction parallel to the main surface of the substrate 111.

  Since the condensing lenses 103, BS 105, collimating lens 106, WDM filter 107, and mirror 109 do not act in the polarization direction, the polarization directions of the two combined lights emitted from the WDM filter 107 are parallel to the main surface of the substrate 111. Then, by passing the combined light of λ1 and λ3 through the λ / 2 wavelength plate 108, the polarization direction is converted into a direction perpendicular to the main surface of the substrate 111.

  By making two combined lights having the polarization components as described above incident on the PBC 110, they can be combined. Specifically, the combined light of λ1 and λ3 travels straight and enters the PBC 110. On the other hand, the combined light of λ2 and λ4 has its traveling direction converted by 90 ° by the mirror 109 and is incident on the PBC 110.

  FIG. 3 is a diagram illustrating an example of the transmittance of the optical signals λ1 to λ4, in which the vertical axis indicates the transmittance and the horizontal axis indicates the wavelength. In this optical system, the combined light of λ1 and λ3 is a p-wave, and the combined light of λ2 and λ4 corresponds to an s-wave. The PBC 110 can efficiently combine the two combined lights by giving a large difference in the reflection / transmission characteristics of the s wave and the p wave. That is, the PBC 110 of this example has a large reflectance (small transmittance) for the s-wave (λ2 + λ4) and a large transmittance (small reflectance) for the p-wave (λ1 + λ3). The light emitted from the plurality of LDs 102 can be efficiently combined and output by the optical system as described above.

  However, the optical system needs to mount many optical components on the substrate 111. That is, the eight lenses (the condensing lens 103 and the collimating lens 106), the mirror 109, the two WDM filters 107, the λ / 2 wavelength plate 108, and the PBC 110 must all be mounted on the substrate 111. The light emitted from the LD 102 is reflected / transmitted by 5 to 6 optical components and output. Accordingly, the alignment accuracy of each optical component can be given only the alignment likelihood of about ½ to ¼ with respect to a normal optical transmission module output through two to three components.

  Further, the optical system is complicated in that the mirror 109, the WDM filter 107, and the PBC 110 must be mounted on the substrate 111 while maintaining an angle of 45 ° with respect to the optical axis of the LD 102. . The light of λ3 and λ4 passes through the optical component tilted 45 ° twice.

  Further, all the optical components are mounted on one substrate 111. As a premise of this optical system, it is necessary that all the optical axes of light of λ1 to λ4 be maintained parallel to the main surface of the substrate 111. Each optical component is fixed on the substrate 111 with resin, adhesive or the like. If the tilt angle is not properly maintained when mounting an optical component, when mounting the next optical component, the distance between the component and the main surface becomes too large to fill the gap with resin. Or, the inconvenience occurs such that the optical axis approaches the main surface exceeding the component dimensions.

  Conventionally, when each component is mounted on a substrate for such an optical system, an optical component whose size is less than 1 mm 2 is adsorbed by an adsorption collet, and the optical component is preliminarily adhered to the component tray from an adhesive resin (ultraviolet curable resin). The method of carrying out optical alignment in the state which is conveyed to the mounting location to which is applied and vacuum-adsorbed, and irradiating ultraviolet rays after alignment is performed to solidify the resin.

  Hereinafter, a specific example of a method for manufacturing an optical communication module according to an embodiment of the present invention will be described with reference to the drawings. In addition, this invention is not limited to these illustrations, is shown by the claim, and intends that all the changes within the meaning and range equivalent to the claim are included.

  FIG. 4 is a view showing an example of the shape of the tip portion of the suction collet according to the present invention, FIG. 4 (A) is a view showing a state in which an optical component is sucked on the suction collet, and FIG. 4 (B) is a view of the suction collet. It is an enlarged view of a front-end | tip part. In the figure, 1 is an optical component, 2 is an optical surface, 10 is a suction collet, 11 is a side surface, 12 is a reference plane, 13 is a suction port, and 14 is a step.

  The suction collet 10, which is an example of the suction means according to the present invention, has a reference plane 12 formed on the longitudinal side surface 11 of the tip portion, and a suction port 13 provided in the reference plane 12. The optical surface 2 of the optical component 1 is configured to be adsorbed to the adsorption port 13 of the adsorption collet 10. Further, there is a step 14 at a position that is a predetermined distance in the longitudinal direction from the tip of the suction collet 10 on the reference plane 12, and the length of this predetermined distance, that is, the length in the longitudinal direction of the suction collet 10 on the reference plane 12 is It is shorter than the height of the optical component 1.

  In the suction collet 10 according to the present invention, it is necessary to provide the reference plane 12 in order to accurately determine the angle of the optical component 1. The angle of the optical component 1 is determined by gripping the optical surface 2 of the optical component 1 with the reference plane 12. However, in this case, since the optical surface 2 of the optical component 1 is directly sucked, the optical surface 2 may be mechanically damaged. Therefore, the suction collet 10 is configured such that the suction port 13 is set to be relatively large, and the entire surface of the optical surface 2 of the optical component 1 where light is actually transmitted / reflected is covered with the suction port 13. Yes. This makes it possible to prevent mechanical damage to the optical surface 2.

  FIG. 5 is a view for more specifically explaining the structure of the tip portion of the adsorption collet 10 according to the present invention. FIG. 5A is a perspective view of the tip portion of the suction collet 10, and FIG. 5B is a side view of the tip portion of the suction collet 10. The tip portion of the suction collet 10 has a reference plane 12 formed on the side surface 11 and a back surface 15 parallel to the reference plane 12. A suction port 13 is provided as a vacuum suction port at substantially the center of the reference plane 12.

  Further, a step 14 is provided at the boundary between the reference plane 12 and the side surface 11. The step 14 is parallel to the bottom surface 16 of the suction collet 10. When the optical component 1 is sucked, the upper surface of the optical component 1 is abutted against the step 14 so that zero adjustment in the height direction of the optical component 1 can be performed. That is, the step 14 functions as a stopper. As shown in FIG. 5 (B), a turn portion 17 is formed at the connection portion between the step 14 and the reference plane 12. In the case where the step 14 does not have the turning portion 17, a slope may be formed at the connection portion between the step 14 and the reference plane 12 due to processing accuracy. In such a case, there is a possibility that the optical component 1 rides on this slope and the angle of the optical component 1 does not follow the reference plane 12. Therefore, in order to prevent this, it is desirable to form the turn portion 17 at the connection portion between the step 14 and the reference plane 12 as described above.

  The length from the collet tip of the reference plane 12 to the step 14 is the length by which the attracted optical component 1 protrudes from the collet tip. That is, the length from the tip of the suction collet 10 to the step 14 is shorter than the height of the optical component 1. Here, the protruding length of the optical component 1 from the tip of the collet is determined as a distance at which the resin used when the optical component 1 is fixed to the substrate (not shown) does not contact the suction collet 10. Specifically, it is about 0.2 to 0.5 mm. If the protrusion length is too large, the suction port 13 may not be able to suck the center of the optical surface of the optical component 1, and it is desirable to set the reference plane of the suction collet 10 to an appropriate length.

  In the above, the adsorption collet 10 is not limited to a cylindrical shape, and may be, for example, a quadrangular prism shape. In the example of FIG. 5, the step 14 is formed by cutting out the side surface in the longitudinal direction of the suction collet 10, but by providing a protrusion at a predetermined distance in the longitudinal direction from the tip of the suction collet 10, A step 14 may be formed.

  In each of the following embodiments, an optical transmission module including a plurality of light emitting elements (LD) and a plurality of optical components will be described as an example of an optical communication module. However, a plurality of light receiving elements (PD) Needless to say, even an optical receiver module including a plurality of optical components can be implemented in the same manner.

(First embodiment)
FIG. 6 is a diagram illustrating an example of a method for manufacturing an optical transmission module using the suction collet 10 according to the present invention. FIG. 6A is a diagram illustrating a state in which an optical component is mounted on a substrate using the suction collet 10, and FIG. 6B is an enlarged view of the vicinity of the suction collet 10. In the figure, 1a and 1b are optical components, 2a and 2b are optical surfaces, 3 is a substrate, and 4a and 4b are ultraviolet curable resins which are examples of resins. In this example, the case where the optical component 1b is mounted will be described as an example, but the same applies to the optical component 1a and other optical components.

  The method according to the present invention can be broadly divided into an adsorption process for adsorbing the optical surface 2b of the optical component 1b by the adsorption collet 10 and an optical component 1b adsorbed by the adsorption collet 10 to a predetermined position on the substrate 3 to obtain a predetermined value. The holding step of holding the substrate 3 without contacting the substrate 3 above the position, and curing the ultraviolet curable resin 4b filled in the gap between the optical component 1b and the substrate 3, thereby bringing the optical component 1b into a predetermined position on the substrate 3. A fixing step of fixing.

  Before the optical component 1b is moved to a predetermined position on the substrate 3 in the holding step, a pressing step is further included in which the lower surface of the optical component 1b is pressed against the substrate 3 and the upper surface of the optical component 1b is brought into contact with the step 14. Also good. Further, as described in the second embodiment described later, before the ultraviolet curable resin 4b is cured in the fixing step, the alignment of the optical component 1b is further adjusted with respect to the reference plane 12 of the suction collet 10. You may make it include the alignment process performed by the centered autocollimator.

  The above method will be described more specifically. First, in the manufacturing apparatus including the suction collet 10, the rotation direction and the tilt angle of the suction collet 10 are adjusted in advance. That is, the movable direction of the suction collet 10 is set to only three directions of X, Y, and Z (S1). Next, the suction collet 10 is moved to a component pallet (not shown), and the optical surface 2b of the optical component 1b is sucked by the suction collet 10 (S2: suction step).

  Then, the suction collet 10 that has sucked the optical component 1 b is translated on the substrate 3, and is lowered at an arbitrary position to press the lower surface of the optical component 1 b against the substrate 3, thereby bringing the upper surface of the optical component 1 b into contact with the step 14. Thereby, the zero point (reference plane) adjustment in the height direction of the optical component 1b is performed (S3: pressing step).

  Then, the suction collet 10 is moved to a predetermined position where the optical component 1b is mounted with the optical component 1b being sucked (S4). For example, an approximate position can be determined by providing alignment marks (cross, L-shaped, U-shaped, etc.) on the substrate 3. The suction collet 10 is retracted upward at the XY position of the alignment mark.

  Then, the ultraviolet curable resin 4b is supplied to the gap between the optical component 1b and the substrate 3 (S5). Next, the suction collet 10 is lowered, and the optical component 1b is held in a state where the lower surface of the optical component 1b is floated by 20 to 30 μm from the substrate 3 and the gap between the optical component 1b and the substrate 3 is filled with the ultraviolet curable resin 4b ( S6: Holding step). In this way, the lower surface of the optical component 1b is not pressed against the substrate 3. If the lower surface of the optical component 1b is brought into contact with the substrate 3, the lower surface of the optical component 1b may be held parallel to the substrate 3.

  In the above, the optical surface 2b of the optical component 1b and its lower surface are not necessarily kept at a right angle. As described above, the parallelism between the optical surface 2b and the back surface thereof is defined as the component performance, but the angle between these both surfaces (the optical surface 2b and the back surface thereof) and the bottom surface is often not specified. Therefore, when the lower surface of the optical component 1b is pressed against the substrate 3, the lower surface and the main surface of the substrate become parallel, and the angle between the optical surface 2b and the substrate 3 cannot be maintained. That is, the tilt angle of the optical component 1b to be defined by the reference plane 12 of the suction collet 10 is not maintained. For this reason, the lower surface of the optical component 1b is held without being brought into contact with the execution board 3 as in S6.

  Finally, as shown in FIG. 6B, the optical component 1b is irradiated with ultraviolet light (UV light) while being held in the state of S6, the ultraviolet curable resin 4b is cured, and the optical component 1b is attached to the substrate 3. It fixes to a predetermined position (S7: fixing process).

  As described above, according to the present embodiment, by picking up the optical surface of the optical component, it is possible to mount the component with high accuracy and little variation regardless of the cutting accuracy of the optical component. In addition, by adsorbing the optical surface of the optical component, it does not depend on the cutting accuracy of the optical component, so by adjusting the rotation direction and the tilt direction of the suction collet itself, adjustment for each optical component becomes unnecessary, Mounting time can be shortened.

(Second Embodiment)
Here, it is more preferable to perform the following optical alignment (alignment process) before curing the resin. In many cases, the optical alignment of the optical component is achieved only by alignment with respect to the alignment mark. However, for more precise optical coupling, it is preferable to perform the following alignment.

  FIG. 7 is a diagram for explaining an example of the alignment step according to the present invention, in which 20 denotes an autocollimator. This makes it possible to manage the stable mounting state and shorten the mounting evaluation. Specifically, the autocollimator 20 is added to the above-described manufacturing apparatus. The autocollimator 20 includes at least a visible light source 23, a half mirror 22, and a light receiving unit (two-dimensional monitor) 21. The autocollimator 20 irradiates the object to be measured with visible light and observes the reflected light 24 to measure the object. This is a device that evaluates the amount of rotation (tilt) deviation from the position deviation of the reflected light 24 with respect to the position where the object is not rotated and tilted. That is, the light receiving unit 21 is provided with a two-dimensional monitor 25 and is adjusted so that the reflected light 24 can be seen at the monitor center 27 that is the intersection of the markers 26.

  First, a reference mirror (not shown) is attracted to the reference plane 12 of the suction collet 10, and the autocollimator 20 is adjusted so that the reflected light 24 is imaged on the monitor center (cross center) 27 on the two-dimensional monitor 25. (S11). Thereby, the autocollimator 20 is aligned with respect to the reference plane 12 of the suction collet 10. The alignment process of the autocollimator 20 is performed in advance before the optical component is sucked by the suction collet 10.

  Next, the imaging position of the reflected light 24 is observed by the two-dimensional monitor 25 in the state where the actual optical component is held on the mounting position in the above procedure instead of the reference mirror, and the imaging is performed. The rotation angle and tilt angle of the suction collet 10 are adjusted so that the position is at the monitor center 27 (S12).

  Before the substrate 3 is mounted inside the optical transmission module, the alignment of the PBC, the mirror, and the two WDM filters is performed in this order on the substrate 3 by the above method. These are components that need to be mounted at an angle of 45 ° to the optical axis of the LD. Next, in the same manner, an LD, a collimating lens, and the like are mounted on the substrate 3.

As described above, according to the present embodiment, the optical surface of the optical component is irradiated with visible light, and the reflected light is constantly monitored. Adjustments can be made to meet the standards, and yield can be improved.
In addition, by irradiating the optical surface with visible light and monitoring the reflected light at the time of mounting the optical component, measurement and evaluation can be performed at the time of mounting the component, and the mounting time can be shortened.

DESCRIPTION OF SYMBOLS 1, 1a, 1b ... Optical component, 2, 2a, 2b ... Optical surface, 3 ... Board | substrate, 4a, 4b ... Ultraviolet curable resin, 10 ... Adsorption collet, 11 ... Side surface, 12 ... Reference plane, 13 ... Adsorption port, 14 ... Step, 15 ... Back, 16 ... Bottom, 17 ... Screw part, 20 ... Auto collimator, 21 ... Light receiving part, 22 ... Half mirror, 23 ... Visible light source, 24 ... Reflected light, 25 ... 2D monitor, 26 ... Marker , 27 ... monitor center, 100 ... optical transmission module, 101 ... 4 channel driver, 102 ... LD, 103 ... condensing lens, 104 ... mPD, 105 ... BS, collimator lens, 107 ... wavelength division multiplexing filter (WDM filter) ),... Λ / 2 wavelength plate, 109, mirror, 110, PBC, 111, substrate.

Claims (2)

Method for manufacturing optical communication module, comprising: a plurality of light emitting elements or light receiving elements mounted on a substrate; and a plurality of optical components fixed at positions corresponding to each of the plurality of light emitting elements or light receiving elements on the substrate Because
An adsorption step of adsorbing the optical surface of the optical component by an adsorption means;
Holding the optical component sucked by the suction means to a predetermined position of the substrate and holding the optical component without contacting the substrate above the predetermined position;
A fixing step of fixing the optical component at a predetermined position of the substrate by curing a resin filled in a gap between the optical component and the substrate ;
The suction means is a suction collet having a reference plane formed on the side surface in the longitudinal direction of the tip portion, and a suction port provided in the reference plane,
The reference plane has a step at a predetermined distance in the longitudinal direction from the tip of the suction collet, the predetermined distance is shorter than the height of the optical component, and further, the gap is between the reference plane and the step. Part
The adsorption step adsorbs the optical surface of the optical component to the adsorption port,
After the suction step, before moving the optical component to a predetermined position on the substrate, further including pressing the lower surface of the optical component against the substrate and bringing the upper surface of the optical component into contact with the step. A method for manufacturing a communication module.   Before the resin is cured in the fixing step, the optical component further includes an alignment step of aligning with an autocollimator aligned with a reference plane of the suction collet. The manufacturing method of the optical communication module of description.

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