JP6221172B2 - Polishing pad carrying box, polishing pad housing member, and polishing pad carrying method - Google Patents

Description

  The present invention relates to a polishing pad carrying box, a polishing pad containing member, and a polishing pad carrying method, and more specifically, a polishing pad containing member containing a polishing pad manufactured by slicing and a polishing containing the polishing pad. The present invention relates to a polishing pad carrying box for carrying a pad housing member, and a polishing pad carrying method.

  Since the surfaces of materials such as hard disks, mother glass for liquid crystal displays, and semiconductor devices are required to have high precision flatness, loose abrasive polishing using a polishing pad is performed. The free abrasive grain method is a method of polishing a processed surface of an object to be polished while supplying a slurry (polishing liquid) containing abrasive grains between a polishing pad and a non-polishing object.

  For example, a polishing pad for a semiconductor device has an opening for holding abrasive grains on the surface of the polishing pad, hardness for maintaining the flatness of the surface of the semiconductor device, and elasticity for preventing scratches on the surface of the semiconductor device. Is required. A polishing pad having a polishing layer manufactured from a urethane resin foam is used as a polishing pad that meets these requirements.

  The urethane resin foam is usually cured by a reaction between a prepolymer containing a polyurethane bond-containing isocyanate compound and a curing agent and molded into a block shape (dry method). Then, by slicing the resin block into a sheet, a polishing pad having a hard polishing layer (hereinafter may be abbreviated as a hard (dry) polishing pad) is formed.

  Conventionally, the sliced polishing pads are stacked one by one, and when a predetermined number of them are stacked, they are transported together.

  However, in the conventional method of stacking polishing pads, as the number of polishing pads increases, the weight of the stacked polishing pads is applied to the underlying polishing pad. If the positions of the stacked polishing pads are displaced, there is a possibility that the polishing pad in the lower part may be deformed so that the edge portion in particular is warped. When the edge portion of the polishing pad is warped as described above, the quality of the polishing pad may be adversely affected. In order not to cause warping due to stacking of polishing pads, it is necessary to position and stack the polishing pads so that the polishing pads overlap each other accurately, so that the average weight is applied to the polishing pads below. Such accurate positioning is difficult in consideration of the manufacturing speed of the polishing pad and the positioning effort.

  Further, when manufacturing a polishing pad, a branch number is given to each product. In the conventional method of stacking polishing pads, a desired branch number is selected from a plurality of stacked polishing pads. It is difficult to perform an operation such as taking out the polishing pad. In particular, it has been difficult to selectively take out the polishing pad located on the lower side in a stacked state.

  As described above, when the polishing pad is conventionally transported, the polishing pad is stacked and then transported, so that the weight of the stacked polishing pad causes the polishing pad below the stacked polishing pad to be transported. There was a problem that it may be compressed and deformed.

  Further, it is difficult to take out a desired polishing pad from a state in which a plurality of polishing pads are stacked.

  Accordingly, the present invention has been made to solve the above-described problems, and minimizes the stacking of the manufactured polishing pads, suppresses the compression and deformation of the polishing pads, and collects a predetermined number of polishing pads. It is an object of the present invention to provide a polishing pad carrying box and a polishing pad receiving member that can be easily carried and can be easily accessed.

In order to achieve the above object, the present invention is a polishing pad carrying box, which is a storage box and a suspension for holding the polishing pad housed in the polishing pad housing member in a suspended state in the storage box. and means, possess, hanging means is characterized by having a substantially horizontally disposed rod-like members.

  In the present invention configured as described above, when the polishing pad is transported, the polishing pad housing member housing the polishing pad is suspended and transported by the suspending means. Therefore, the deformation of the polishing pad can be suppressed. Further, since the polishing pads are not stacked in the vertical direction, access to the desired polishing pad is facilitated even during transportation.

Moreover, in this invention comprised in this way, it becomes possible to suspend a polishing pad accommodation member easily.

  In the present invention, preferably, the storage box has a substantially rectangular parallelepiped outer box and a substantially rectangular parallelepiped inner box stored in the outer box, and the inner box has at least one of an upper surface and a front surface opened, The box is characterized in that at least one surface is opened and closed, and the inner box can be accommodated inside.

  In the present invention configured as described above, it is further easy to transport and store the polishing pad transport box, particularly to transport and store a plurality of polishing pad transport boxes.

  In the present invention, it is preferable that the inner box includes a connecting portion that is provided on the inner side of one side surface and the inner side of the other side surface of the inner box, and the end of the rod-like member is detachably connected. It is a feature.

  In the present invention configured as described above, a rod-like member in which a polishing pad housing member that houses a polishing pad is suspended is connected to the inner surface of the box and stored inside the box, and by transporting the box, A plurality of polishing pads can be easily transported.

The present invention also provides a polishing pad housing member that is housed in a polishing pad carrying box in a state of being hung by a hanging means provided in the polishing pad carrying box, and is detachable from the hanging means. The polishing pad housing member is a resin bag that can house the polishing pad in a deaerated state .

  In the present invention configured as described above, when the polishing pad is transported, the polishing pad housing member housing the polishing pad is suspended and transported by the suspending means. Therefore, the deformation of the polishing pad can be suppressed. Further, since the polishing pads are not stacked in the vertical direction, access to the desired polishing pad is facilitated even during transportation.

Moreover, in this invention comprised in this way, it becomes possible to accommodate a polishing pad in a polishing pad accommodating member, and to convey in a deaerated state.

  In the present invention, preferably, the engaging portion is a hanging portion provided at an edge portion of the polishing pad housing member.

  In the present invention configured as described above, the polishing pad housing member that houses the polishing pad can be easily suspended from the suspension means of the polishing pad carrying box.

  In the present invention, it is preferable that the engaging portion is a hole provided in an upper edge portion of the polishing pad housing member.

  In the present invention configured as above, the engaging portion can be provided in the polishing pad housing member without using an additional member, and the polishing pad housing member is suspended from the suspension means of the polishing pad carrying box. It becomes possible.

  In the present invention, preferably, the engaging portion has an attachment portion for attaching a hook to the polishing pad housing member, and the polishing pad housing member is suspended from the suspension means of the transport box by the hook attached to the attachment portion. It is characterized by being lowered.

  In the present invention configured as described above, it is possible to suspend the polishing pad housing member from the polishing pad carrying box suspending means using a hook without making a hole in the polishing pad housing member.

The present invention also relates to a method for transporting a polishing pad, wherein the polishing pad is accommodated in a polishing pad housing member having an engaging portion, and the engaging portion of the polishing pad housing member that houses the polishing pad is used for transporting the polishing pad. It is suspended in the box suspension means and stored in the polishing pad carrying box, and the hanging means has a rod-like member arranged substantially horizontally, and carries the polishing pad carrying box containing the polishing pad. It is a feature.

  In the present invention configured as described above, when the polishing pad is transported, the polishing pad housing member housing the polishing pad is suspended and transported by the suspending means. Therefore, the deformation of the polishing pad can be suppressed. Further, since the polishing pads are not stacked in the vertical direction, access to the desired polishing pad is facilitated even during transportation.

  According to the polishing pad carrying box, the polishing pad housing member and the polishing pad carrying method of the present invention, it is possible to suppress deformation of the polishing pad during carrying of the polishing pad, and further, desired polishing even during carrying. Access to the pad becomes easy.

It is a disassembled perspective view which shows schematically the box for polishing pad conveyance of one Embodiment of this invention. It is a perspective view which shows roughly the connection part which connects the suspension means of the polishing pad conveyance box of one Embodiment of this invention to an inner box. It is a perspective view showing roughly another example of a connection part which connects a hanging means of a polishing pad carrying box of an embodiment of the present invention to an inner box. It is a front view showing roughly an example of a polishing pad accommodation member of one embodiment of the present invention. It is a front view showing roughly other examples of the polishing pad accommodation member of one embodiment of the present invention. It is a disassembled perspective view which shows a mode that the polishing pad accommodating member is accommodated in the polishing pad conveyance box of one Embodiment of this invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a perspective view schematically showing an example of a polishing pad carrying box according to a preferred embodiment of the present invention. The polishing pad carrying box has a storage box 1, and the storage box 1 has a substantially rectangular parallelepiped outer box 2 and a substantially rectangular parallelepiped shape having a size and shape that can be stored in the internal space of the outer box 2. An inner box 3 is provided.

  The outer box 2 has a slightly larger size than the inner box 3, and the front surface 21 of the surfaces constituting the outer box 2 can be opened and closed in order to accommodate the inner box 3 therein. In order to easily store the inner box 3, the top surface, the side surface, and the back surface may be opened and closed in addition to the front surface 21. A cardboard box is preferably used as the outer box 2 from the viewpoint of cost, weight, and strength.

  The inner box 3 has a substantially rectangular parallelepiped shape, and at least one of the upper surface and the front surface of the inner box 3 is opened in order to carry a rod-like member holding a polishing pad (described later) in a suspended state into the inner box 3. It is preferred (i.e. without walls) to facilitate access to the interior of the inner box 3. In the example shown in FIG. 1, the inner box 3 does not have walls on the front surface and the upper surface, and is open in the forward and upward directions. On the other hand, the inner box 3 has four surfaces, a right surface, a left surface, a rear surface, and a bottom surface, in order to maintain strength as a storage box. In addition to using a part of the corrugated cardboard box for these four surfaces, the right surface, the left surface, the rear surface, and the bottom surface, it is also possible to configure each surface of the inner box 3 using other plate-like members or mesh members. is there. Further, for example, the rear surface may be fixed by crossing the poles diagonally and connecting the right surface, the left surface, and the bottom surface.

  A connecting portion 31 is provided on the inner side of the right surface and the inner side of the left surface of the inner box 3 so as to face each other. The connecting portion 31 holds the polishing pad housing member 4 housing the polishing pad 5 in a suspended state. This is for detachably connecting the end of the rod-shaped member 32 to the inner box 3. In the example shown in FIG. 1, two connecting portions 31 are provided on the inner side of the right side and the inner side of the left side, respectively, and two rod-like members 32 are connected to the inner side of the right side and the inner side of the left side of the inner box 3, respectively. Is possible. The inner box 3 capable of connecting two such rod-shaped members 32 is suitable for housing the polishing pad housing member 4 having two holes 42 as shown in FIG. FIG. 6 shows the actual storage.

  In the example shown in FIG. 1, two rod-shaped members 32 are connected to the inner box 3, but the number of the rod-shaped members 32 may be one depending on the shape of the polishing pad housing member 4. Further, depending on the relationship between the size of the polishing pad to be stored and the size of the inner box 3, it is possible to use three or more. In this case, the inner box 3 is provided with a number of connecting portions 31 corresponding to the number of rod-shaped members 32 housed in the inner box 3.

  FIG. 2 shows a specific example of the connecting portion 31. In the example shown in FIG. 2, the inner box 3 is configured to connect one bar-shaped member 32, and a stainless steel pole is used as the bar-shaped member 32. A rod receiving portion 33 for receiving the end portion of the rod-shaped member 32 is provided in the inner box 3. While maintaining the rod-like member 32 substantially horizontally, the rod-like member 32 is lowered from above, and the left and right ends of the rod-like member 32 are respectively placed on the rod-receiving portion 33 provided on the inner side of the left side and the inner side of the right side of the inner box 3. Engage. After engaging the end portion of the rod-shaped member 32 with the rod receiving portion 33, the end portion may be fixed with a stopper or the like (not shown).

  FIG. 3 shows another example of the connecting portion 31. In the example shown in FIG. 3, the inner box 3 is configured to connect one bar-like member 32, as in the example shown in FIG. 2, and the connecting portion 31 connects the bar-like member 32 to the inner box 3. A groove 34 is detachably connected to the inner side of the right side and the inner side of the left side. In this example, a portion corresponding to a portion to which the rod-shaped member 32 is connected is thickened on the right surface and the left surface of the inner box 3, and a groove 34 having a width slightly larger than the diameter of the rod-shaped member 32 is formed in the thick portion. A predetermined length is provided from the upper end of the box 3. The upper end of the groove 34 is open, and the end of the rod-like member 32 is guided from the opening to the end of the groove 34. The rod-like member 32 can be connected to the inner box 3 by lowering from the upper end of the inner box 3 along the groove 34 to the end point of the groove 34 while keeping the rod-like member 32 substantially horizontal. A stopper (not shown) for fixing the end of the rod-like member 32 may be provided near the end point of the groove 34.

  4 and 5 show examples of the polishing pad housing member 4 for housing the polishing pad 5 used to suspend the polishing pad 5 on the above-described suspension means (rod-like member 32). 4 and 5 both show a state in which the polishing pad 5 is stored in the polishing pad storage member 4. In these embodiments, it is preferable to use a resin bag (so-called vacuum pack bag) that can accommodate the polishing pad in a deaerated state as the polishing pad housing member 4. The sliced polishing pads are inserted into the resin bag one by one or several as a set and, for example, degassed and packed using a heat sealer sold by Fuji Impulse. The Thus, by degassing the bag and accommodating the polishing pad 5, the quality of the polishing pad 5 can be maintained and the volume of the polishing pad 5 can be reduced. By reducing the volume of the polishing pad 5, not only the transportation of the polishing pad 5 is facilitated, but also the density and rigidity of the stored polishing pad are increased, so that the deformation of the polishing pad during transportation can be further suppressed. It becomes.

  In the vicinity of the upper edge portion 41 of the polishing pad housing member 4 shown in FIG. 4, holes 42 through which the rod-like member 32 is passed are provided as engagement portions for engaging with the rod-like member 32 described above. ing. This polishing pad accommodating member 4 corresponds to an example in which two rod-shaped members 32 are connected like the inner box 3 shown in FIG. 1. By passing the rod-shaped members 32 through these holes 42, The polishing pad housing member 4 is suspended from the two rod-shaped members 32 arranged in parallel. By suspending the polishing pad housing member 4 between the two rod-shaped members 32 arranged in parallel as described above, a stable suspended state can be obtained, and shaking during the conveyance of the polishing pad carrying box 1 is suppressed. be able to.

  As a modification of the polishing pad housing member 4 shown in FIG. 4, only one hole 42 may be provided. In this case, it is preferable that the hole 42 is provided in the vicinity of the upper edge 41 and on the central axis of the housing member 4 so that the housing member 4 can be stably suspended.

  In the vicinity of the upper edge portion 41 of the polishing pad housing member 4 shown in FIG. 5, a clip hanger 43 having a hook portion 45 for hanging on the rod-like member 32 as an engagement portion for engaging with the rod-like member 32 described above. Is attached. The clip portion 44 of the clip hanger 43 sandwiches the vicinity of the upper edge 41 of the polishing pad housing member 4 at two places, and the hook portion 45 of the clip hanger 43 is hung on the rod member 32, so that the polishing pad housing member 4 is attached to the rod member 32. Can be hung.

  In order to suspend the polishing pad housing member 4 having such a clip hanger 43, only one rod-like member 32 is required. When a plurality of rod-shaped members 32 can be connected to one inner box 3, the polishing pad housing member 4 is suspended from each of the plurality of rod-shaped members 32 according to the size of the polishing pad 5 and the polishing pad housing member 4. The rod-shaped members can be connected to one inner box 3 by being lowered.

  The dimensions of the above-described polishing pad housing member are preferably set as appropriate according to the dimensions of the polishing pad 5 to be transported. For example, when the diameter of the polishing pad 5 to be transported is 775 mm, the size of the resin bag as the polishing pad housing member is 840 mm × 805 mm (vertical × horizontal), and the internal dimension is about 830 mm × 790 mm (vertical × horizontal). preferable. In this case, the two holes 42 described above are provided within 50 mm from the upper end of the resin bag in the vertical direction and within a range of 102.5 mm to 702.5 mm from one side end of the resin bag in the horizontal direction. Is preferred.

  Moreover, it is preferable to set suitably the dimension of the box 1 for polishing pad conveyance mentioned above according to the dimension and conveyance amount of the polishing pad 5 to convey. When the diameter of the polishing pad 5 to be transported is 775 mm as described above, the size of the polishing pad transport box 1 is preferably about 300 to 600 mm × 1100 mm × 1100 mm (length × width × height). About 50 polishing pads 5 described above can be accommodated and transported in the polishing pad transport box 1 having such a configuration.

  In FIG. 6, the polishing pad housing member 4 shown in FIG. 4 is suspended from two rod-like members 32 in a state where the polishing pad 5 is housed, and the two rod-like members 32 are connected to the inner box 3. The situation is shown.

  In transporting the polishing pad 5, first, the polishing pad 5 is stored in the polishing pad storage member 4, degassed and packed. Thereafter, with respect to the plurality of polishing pad housing members 4, the rod-like member 32 is passed through the hole 42, and then the rod-like member is connected to the inner box 3, whereby the polishing pad 5 is suspended from the rod-like member 32 as shown in FIG. In the lowered state, it is stored in the inner box 3 of the polishing pad carrying box 1. The inner box 3 is further slid into the outer box 2 of the polishing pad carrying box 1 and stored. After the inner box 3 is stored in the outer box 2, the front surface of the outer box 2 is closed, and the polishing pad carrying box 1 is transported with the inner box 3 stored in the outer box 2. As a result, the polishing pad 5 can be transported in a suspended state.

  Since it is not necessary to vertically overlap the polishing pad 5 as in the prior art, it is possible to prevent the polishing pad 5 from being deformed due to its own weight, which occurs when the polishing pad 5 is stacked. Further, since the polishing pad housing member 4 housing the polishing pad 5 is housed in the inner box 3 of the polishing pad carrying box 1 in a state of being suspended from the rod-shaped member 32, By shifting the polishing pad housing member 4 suspended on the left and right, a polishing pad having a desired branch number can be taken out, and access to the desired polishing pad is facilitated.

  Although the embodiment of the present invention has been described above with reference to the drawings, the present invention is not limited to this embodiment, and various modifications can be made. For example, it is possible to further provide a tab on the side edge of the polishing pad housing member 4 for use in product management.

  As described above, according to each embodiment of the present invention, when the polishing pad is transported, the polishing pad housing member housing the polishing pad is suspended and transported by the suspending means. Therefore, it is possible to suppress deformation of the polishing pad. Further, since the polishing pads are not stacked in the vertical direction, access to the desired polishing pad is facilitated even during transportation.

DESCRIPTION OF SYMBOLS 1 Polishing pad conveyance box 2 Outer box 21 Front surface 3 Inner box 31 Connecting part 32 Rod-shaped member 33 Rod receiving part 34 Groove 4 Polishing pad accommodating member 41 Upper edge part 42 Hole 43 Clip hanger 44 Clip part 45 Hook part 5 Polishing pad

Claims (8)

A polishing pad carrying box,
A storage box,
In the inside housing box, a stop device hanging to hold the polishing pad housing member suspended state accommodated abrasive pad, have a, the hanging means may have a substantially horizontally disposed rod members A polishing pad carrying box. The storage box has a substantially rectangular parallelepiped outer box and a substantially rectangular parallelepiped inner box accommodated in the outer box. The inner box has at least one of an upper surface and a front surface opened, and the outer box is at least The polishing pad carrying box according to claim 1 , wherein one surface opens and closes and the inner box can be accommodated therein. The said inner box is provided in the inner side of one side surface, and the inner side of the other side surface, respectively, The polishing pad conveyance of Claim 2 provided with the connection part to which the edge part of the said rod-shaped member is connected so that attachment or detachment is possible. For box. A polishing pad housing member that is housed in the polishing pad carrying box in a state of being suspended by a hanging means provided in the polishing pad carrying box,
A polishing pad housing member having an engaging portion detachably engageable with the suspending means , wherein the polishing pad housing member is a resin bag capable of housing the polishing pad in a deaerated state . The polishing pad housing member according to claim 4, wherein the engaging portion is a hanging portion provided at an edge of the polishing pad housing member. The polishing pad accommodating member according to claim 4, wherein the engaging portion is a hole provided in an upper edge portion of the polishing pad accommodating member. The engaging portion has an attachment portion for attaching a hook to the polishing pad housing member, and the polishing pad housing member is suspended from the suspension means of the carrying box by a hook attached to the attachment portion. The polishing pad accommodating member according to claim 4 . A method of transporting a polishing pad,
The polishing pad is housed in a polishing pad housing member having an engaging portion,
The engaging portion of the polishing pad accommodating member that accommodates the polishing pad is suspended by a hanging means of a polishing pad carrying box and housed in the polishing pad carrying box, and the hanging means is arranged substantially horizontally. A rod-shaped member,
A method for transporting a polishing pad, the method comprising transporting the polishing pad transport box containing the polishing pad.

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