JP6218110B2 - Excimer light source device - Google Patents

Description

  The present invention generates UV light that can be used in the fields of, for example, UV ozone cleaning, UV surface modification, UV curing, UV sterilization, and UV treatment, or other generated UV light. The present invention relates to an excimer light source device that simultaneously turns on a plurality of excimer lamps, which are light sources suitable for converting a wavelength into an apparatus that irradiates the device.

The excimer light source device includes an excimer lamp and a power supply device that lights the excimer lamp.
FIG. 1 shows a simplified configuration of an excimer lamp (Y). A discharge space (Yg) filled with a discharge gas is placed in a bulb (Yt) made of quartz glass or the like. It shows a state of being sealed.
A dielectric (Yb) is provided between at least one of the electrodes (Ye1, Ye2) for inducing discharge by applying a high voltage to the discharge space (Yg) and the discharge space (Yg). Intervenes.
In the drawing, the electrodes (Ye1, Ye2) are depicted as external electrodes provided on both sides of the bulb (Yt), but either one is provided inside the bulb (Yt), It is also possible to configure so as to be in contact with the discharge space (Yg).

As the discharge gas, a rare gas such as xenon or krypton, a halogen such as fluorine or chlorine, or a mixture thereof is selected and used according to the wavelength of light to be generated.
Not only when the light generated by the discharge is used directly, but also, for example, a coating film such as a phosphor is provided on the inner surface of the bulb (Yt), and the generated UV light is wavelength-converted to generate long wavelength UV light or visible light. There are also cases where it is taken out to the outside and used.
Quartz glass or the like is often used as the bulb (Yt), but when a highly reactive discharge gas such as fluorine is used, a corrosion-resistant material such as sapphire may be used.
Furthermore, when taking out light in the vacuum ultraviolet region such as xenon excimer, for example, synthetic quartz having transmittance at that wavelength is used, or light converted from UV to visible light by a phosphor is taken out, and the original UV light itself is In the case where it is not desired to radiate, a suitable material is selected by paying attention to the wavelength of generated light, such as using borosilicate glass.
Further, as shown in the figure, the bulb (Yt) often serves also as the dielectric (Yb), but the configuration is not so, for example, the electrodes (Ye1, Ye2) on the inner surface of the bulb (Yt). These electrodes may be provided, and a dielectric film may be provided between one or both of these electrodes and the discharge gas.
The electrodes (Ye1, Ye2) can be configured by depositing or forming a metal plate, a metal vapor deposition film, a metal paste or the like on the bulb (Yt). You may comprise by the transparent conductive film, a metal mesh, the solidified body of the metal paste printed on the mesh pattern, etc.

Since an excimer lamp needs to be lit at an alternating high voltage, a power supply device for lighting it usually includes a step-up transformer, and its primary side is driven by a circuit such as a half bridge. It is configured as an inverter that supplies power to the lamp connected to the next side.
In the following description, the step-up transformer is described as being included in the inverter.

In the recent increase in interest in environmental pollution problems, pollution-free treatment using UV photochemical reaction is one of the most important applications of excimer light source devices, and its use for various purposes is being studied.
Depending on the application, the excimer light source device is strongly required to increase the UV irradiation power density and widen the irradiation area.
Unlike other discharge lamps, excimer lamps have the feature that all of them can be stably lit at the same time by simply connecting a plurality of lamps in parallel to one inverter.
Therefore, it seems that it can be achieved by increasing the power consumption of the inverter and increasing the number of excimer lamps to be connected in order to meet the above-described demands for increasing the UV irradiation power density and the irradiation area (for example, JP-A-08-096766, JP-A-10-097898).

However, when it is desired to turn on the excimer lamp under conditions with high excimer luminous efficiency, it has been found that it is necessary to drive the excimer lamp with a high voltage alternating current exhibiting a waveform that undergoes a steep change (for example, Japanese Patent Laid-Open No. 11-204280). Issue gazette).
Since the excimer lamp is a capacitive load, when many of them are connected in parallel, the overall capacitance increases, and when the power of the inverter is increased, the inductance of the inverter transformer increases. Since it becomes difficult to make a rapid change in high voltage, the excimer luminous efficiency is lowered.
Therefore, in order to achieve an increase in UV irradiation power density and an increase in irradiation area while maintaining high efficiency, ideally one lamp and one inverter are used as a set, and the number of sets Is advantageous.

As a technology developed in accordance with this policy, Japanese Patent Application Laid-Open No. 11-233071 discloses a plurality of sets of dielectric barrier discharge lamps and inverters, and a DC / DC converter (commonly provided in the preceding stage of each inverter) A technique is described in which a common lighting control is performed by a step-down chopper), and the frequency of each inverter is independently adjusted, so that each lamp is dimmed independently, for example, to correct brightness variation for each lamp.
However, when adjusting the frequency of the inverters independently as described above, paying attention to a set of two arbitrarily selected from a plurality of inverters, each inverter has a frequency corresponding to the difference frequency of the operating frequencies. An event occurs in which the two switch elements to which the two belong belong to each other at almost the same time (substantially simultaneously).
When this event occurs, the two inverters try to draw current from the DC / DC converter almost simultaneously, so that the output voltage of the DC / DC converter decreases, and the DC / DC converter prevents the output voltage from decreasing. Since the correction control is performed, the control is disturbed.

There are a number of combinations of two sets to be noticed from among a plurality of inverters, and each has a different frequency difference. Therefore, electromagnetic radiation associated with almost the same on-transition or off-transition of the two switching elements described above. In addition, a phenomenon including generation of conduction noise (hereinafter simply referred to as noise) and accompanying disturbance of DC / DC converter control occurs with extremely complicated periodic repetition.
If the frequency of each inverter is adjusted independently for dimming, the periodicity of the phenomenon described above is disturbed and rather aperiodic, so that it is very difficult to take measures against noise.
In addition, when the operating frequency of each inverter is, for example, a high frequency of several tens of kHz or more, this is not audible to human ears, but the difference frequency may enter the audible range. There is a problem of emitting strange sounds that change over time.
In addition to vibrations caused by the magnetostriction of the transformer of the inverter, there are both vibrations caused by gas expansion when a discharge occurs in the discharge space of the lamp.

Generally, whether the noise is likely to be generated in the on transition or the off transition of the switch element differs depending on the formula of the inverter circuit.
For example, in the case of the push-pull method, the half-bridge method, the full-bridge method, etc., a high voltage suddenly changes at the time of ON transition, and the current in the transformer primary circuit flows rapidly, so that noise is likely to occur. .
However, in the case of the flyback method, for example, a sharp change in high voltage occurs at the time of off-transition, and the current in the primary circuit of the transformer stops abruptly, so that noise is likely to occur.

As a proposal related to this problem, Japanese Patent Application Laid-Open No. 08-146198 provides a plurality of sets of dielectric barrier discharge lamps and inverters, each having a different frequency division ratio from an oscillation signal generated by one oscillator. A technique is described in which signals having different frequencies (fixed to each other) are generated by dividing the frequency at, and each inverter is operated by this signal.
According to this, although the frequency dispersion of noise can be performed, it consists of the noise generation accompanying the above-mentioned almost simultaneous on-transition or off-transition of the two switch elements and the disturbance of the DC / DC converter control associated therewith. The problem of the phenomenon and the problem that the difference frequency falls in the audible range could not be solved.

Japanese Patent Application Laid-Open No. 2002-343592 discloses two pairs of a dielectric barrier discharge lamp and an inverter as a pair, and the two inverters included in the pair have the same frequency and a phase relationship inverted by 180 °. A technique for operating and configuring a light source by such a plurality of pairs is described.
Since two inverters included in a pair operate in opposite phases, noise can be canceled out, and as a result, low noise can be achieved. For example, this is caused by leakage magnetic flux radiated from a transformer or the like. Electromagnetic noise can be expected to cancel each other, but conversely, the simultaneous on transition or off transition of the switching elements of the two inverters will surely occur. The disturbance of the DC / DC converter control is rather aggravated and does not take into account the problem that the difference frequencies related to the operating frequencies of a plurality of pairs fall into the audible range.

Further, in Japanese Patent Laid-Open No. 2003-303694, when a plurality of excimer lamps are arranged close to each other on the same lamp tube axis and each excimer lamp is turned on, a potential difference is generated between the lamps, and undesired discharge does not occur. In order to synchronize the frequency and phase of the inverter that supplies power to each excimer lamp, each inverter is configured to operate following one reference signal, and when the frequency is changed, the reference signal is changed. The technology to be described is described.
However, as in the case of this technique, since the simultaneous on-transition or off-transition of the switching elements of the two inverters surely occurs, the noise caused by the large current accompanying this and the DC / DC converter As for control disturbance, there is a similar point that there is a concern of deterioration.

Furthermore, Japanese Patent Application Laid-Open No. 2004-207045 provides a plurality of sets of dielectric barrier discharge lamps and inverters, and connects the secondary side of the inverter transformer in parallel, or between the secondary side of the inverter transformer and the lamp. Describes a technique for lighting a plurality of lamps without flickering by synchronizing the oscillations of a plurality of sets of inverters by inserting a synchronizing transformer.
However, as in the case of this technique, since the simultaneous on-transition or off-transition of the switching elements of the two inverters surely occurs, the noise caused by the large current accompanying this and the DC / DC converter As for control disturbance, there is a similar point that there is a concern of deterioration.

JP-A-11-233071 JP 08-146198 A JP 2002-343592 A JP 2003-303694 A Japanese Patent Application Laid-Open No. 2004-207045

  The problem to be solved by the present invention is to provide an excimer light source device that can easily prevent noise and reduce audible noise even when a plurality of excimer lamps are simultaneously turned on while maintaining high excimer luminous efficiency. There is to do.

The excimer light source device of the first invention in the present invention has a discharge space (Yg) filled with a discharge gas for generating excimer molecules, and a pair of electrodes (Ye1) for inducing a discharge in the discharge gas. , Ye2) and an excimer lamp (Y1, Y2a, Y2b,...) Configured such that a dielectric (Yb) is interposed between at least one of the discharge spaces (Yg),
It has a transformer (Ltb, Ltf) and at least one switch element (Qu, Qv, Qw), generates a high voltage exhibiting a waveform that changes sharply, and generates the excimer lamps (Y1, Y2a, Y2b, ...) to be applied to the electrodes (Ye1, Ye2), separately-excited inverters (Ui1, Ui2a, Ui2b, ...);
Inverter switch control circuits (Uh1, Uh2a, Uh2b,...) For controlling the switch elements (Qu, Qv, Qw);
A plurality of excimer light source sets (U1, U2a, U2b,...) Configured to include:
Drives the inverters (Ui1, Ui2a, Ui2b,...) That define the transition timing that induces the abrupt change of the high voltage among the on-transitions and off-transitions of the switch elements (Qu, Qv, Qw). Are integrated timing generation circuits (Ft) that generate drive timing signals (St1, St2, St3,...) That are transmitted to the inverter switch control circuits (Uh1, Uh2a, Uh2b,...), Respectively. )When,
An excimer light source device comprising:
Each of the excimer light source sets (U1, U2a, U2b,...) Supplies power supplied to the excimer lamps (Y1, Y2a, Y2b,...) Included in the excimer light source sets (U1, U2a, U2b,...). ) Can be adjusted independently for each
Each of the excimer light source sets (U1, U2a, U2b,...) Belongs to one of a plurality of light source drive groups (P1, P2, P3,...), And the excimer light sources belonging to the same light source drive group. Each of the sets is configured to receive the same drive timing signal;
The integrated timing generation circuit (Ft) has the same transition timing frequency for all of the light source drive groups (P1, P2, P3,...), And the light source drive groups (P1, P2, P3, etc.). The drive timing signals (St1, St2, St3,...) That do not coincide with the transition timing described above are generated for any two of.

  In the excimer light source device according to the second aspect of the present invention, the inverter (Ui1, Ui2a, Ui2b,...) Included in the excimer light source set (U1, U2a, U2b,...) Includes a primary of the transformer (Ltb). When the switch elements (Qu, Qv) connected to the side windings (Lpu, Lpv) are turned on, the polarity inversion occurs in the secondary side winding (Ls) of the transformer (Ltb). The excimer light source set (U1, U2a, U2b,...) Is connected to a DC power source before the inverter (Ui1, Ui2a, Ui2b,...). DC / DC converter for boosting or stepping down the voltage of (Mx) and outputting it to the inverters (Ui1, Ui2a, Ui2b,...) Uc1), and the DC / DC converter (Uc1) is capable of adjusting an output voltage so that power supplied to the excimer lamp (Y1) becomes a target value. It is.

  In the excimer light source device according to a third aspect of the present invention, the inverter (Ui1, Ui2a, Ui2b,...) Has the switch element (Qw) connected to the primary winding (Lp) of the transformer (Ltb, Ltf). By connecting the magnetic energy accumulated in the ON period of the switch element (Qw) in series to the secondary winding (Ls) when the switch element (Qw) is turned off, a steep change can be achieved. The excimer light source set (U1, U2a, U2b,...) Generates an output voltage signal (So) correlated with the intensity of the high voltage pulse. ), And the integrated timing generation circuit (Ft) repeats pulses having a certain time width (Tw). As a result, the drive timing signals (St1, St2, St3,...) Are generated, and the inverter switch control circuit (Uh1, Uh2a, Uh2b,...) Generates pulses of the drive timing signals (St1, St2, St3,...). After the switch element (Qw) is turned on with a delay of a waiting period (Tx) from the start timing, the switch is synchronized with the pulse end timing of the drive timing signals (St1, St2, St3,...) The device (Qw) is configured to be turned off, includes a variable delay circuit (Ujd) in which the waiting period (Tx) is variable, and maintains the output intensity signal (So) at a predetermined magnitude. As described above, the length of the waiting period (Tx) is feedback-controlled.

  The excimer light source device according to the fourth aspect of the present invention is at least one that belongs to the light source drive group (P1, P2, P3,...) To which a plurality of the excimer light source sets (U1, U2a, U2b,...) Belong. The inverter switch control circuit (Uh1, Uh2a, Uh2b,...) Of the excimer light source set (U1, U2a, U2b,...) Has been described with respect to the drive timing signals (St1, St2, St3,...). It is characterized in that a transition timing delay circuit (Ud2B) for delaying the transition timing is provided in front.

In the excimer light source device according to the fifth aspect of the present invention, when the number of the light source drive groups (P1, P2, P3,...) Is N, the integrated timing generation circuit (Ft)
An oscillation circuit (Osc) that oscillates at a predetermined frequency to generate a clock pulse signal (Sck);
A frequency dividing circuit (Ufn) that receives the clock pulse signal (Sck) and generates a frequency-divided signal (Sdv) having a frequency obtained by dividing the frequency of the clock pulse signal (Sck) by 1 / M;
A shift having a plurality of delay flip-flops (Fs1, Fs2,..., Fs6) that receives the clock pulse signal (Sck) and shifts the divided signal (Sdv) according to the timing of the clock pulse signal (Sck). A register (Ufs);
And N different signals selected from the divided signals (Sdv) and the output signals of the respective stages of the delay flip-flops (Fs1, Fs2,..., Fs6). (St1, St2, St3,...), And M is N or more.

  An excimer light source device according to a sixth aspect of the present invention includes a drive circuit unit (Ue1, Ue2, Ue3,...) That includes a portion of the excimer light source set excluding the excimer lamp as a component. (Y1, Y2, Y3,...) And a heat sink (Bh1) for releasing the generated heat from the switching elements of the inverter included in the drive circuit unit (Ue1, Ue2, Ue3,...). , Bh2, Bh3,..., And circuit elements in the drive circuit section (Ue1, Ue2, Ue3,...) Are mounted on a printed wiring board, and the printed wiring board is mounted on the heat sink (Bh1, Bh2,. Bh3,... Fixed to the drive circuit unit (Ue1, Ue2, Ue3,...) And the heat sink (Bh1, Bh2, Bh). ,... Are formed as an integral module, and the module forms a thermal contact between the heat sink (Bh1, Bh2, Bh3,...) On the radiator (B1). It is characterized by being arranged side by side by a fixing method.

  Even when a plurality of excimer lamps are simultaneously turned on while maintaining high excimer luminous efficiency, it is possible to provide an excimer light source device that can easily take measures against noise and reduce audible noise.

The schematic diagram which simplifies and shows a part of excimer light source device of this invention is represented. The block diagram which simplifies and shows the excimer light source device of this invention is represented. The timing diagram which simplifies and shows a part of operation | movement of the excimer light source device of this invention is represented. The circuit diagram which simplifies and shows the structure of a part of excimer light source device of this invention is represented. The circuit diagram which simplifies and shows a one part structure relevant to the technique of the excimer light source device of this invention is represented. The timing diagram which simplifies and shows a part of operation | movement of the excimer light source device of this invention is represented. The circuit diagram which simplifies and shows the structure of a part of excimer light source device of this invention is represented. The timing diagram which simplifies and shows a part of operation | movement of the excimer light source device of this invention is represented. The circuit diagram which simplifies and shows the structure of a part of excimer light source device of this invention is represented. The circuit diagram which simplifies and shows the structure of a part of excimer light source device of this invention is represented. The timing diagram which simplifies and shows a part of operation | movement of the excimer light source device of this invention is represented. The circuit diagram which simplifies and shows the structure of a part of excimer light source device of this invention is represented. The timing diagram which simplifies and shows a part of operation | movement of the excimer light source device of this invention is represented. The figure which simplifies and shows one form of the Example of the excimer light source device of this invention is represented.

First, the form for implementing this invention is demonstrated using FIG. 2 which is a block diagram which simplifies and shows the excimer light source device of this invention.
The excimer light source device of the present invention includes a plurality of excimer lamps (Y1, Y2a, Y2b,...), And drives them independently corresponding to each of the excimer lamps (Y1, Y2a, Y2b,...). Inverters (Ui1, Ui2a, Ui2b,...) Are provided.
As will be described later, the inverter (Ui1, Ui2a, Ui2b,...) Has a waveform that undergoes a steep change so as to induce a discharge under conditions with high excimer luminous efficiency in the excimer lamp (Y1, Y2a, Y2b,...). Is provided with a transformer (Ltb, Ltf) and at least one switch element (Qu, Qv, Qw).
Further, inverter switch control circuits (Uh1, Uh2a, Uh2b,...) For controlling the switch elements (Qu, Qv, Qw) are provided and connected to the inverters (Ui1, Ui2a, Ui2b,...).

The excimer lamp (Y1), the inverter (Ui1), and the inverter switch control circuit (Uh1) constitute a single excimer light source set (U1).
That is, for one of the inverters (Ui1, Ui2a, Ui2b,...), The excimer lamp (Y1, Y2a, Y2b,...) Connected thereto and the inverter switch control circuit (Uh1, Uh2a, Uh2b,. Form a set, and each constitutes an excimer light source set (U1, U2a, U2b,...).
Here, the “set” of the excimer light source set is not necessarily limited to a united one, but refers to an ideal set that means “combined” functionally.
Further, the excimer light source set (U1, U2a, U2b,...) Belongs to the light source drive group (P1, P2, P3,...), And in the figure, 1 is assigned to the light source drive group (P1). An example is shown in which two excimer light source sets (U1) and two excimer light source sets (U2a, U2b) are arranged in the light source drive group (P2).

An integrated timing generation circuit (Ft) generates drive timing signals (St1, St2, St3,...) For driving the inverters (Ui1, Ui2a, Ui2b,...), And the excimer light source sets (U1, U2a,. U2b,...) Is transmitted to each of the inverter switch control circuits (Uh1, Uh2a, Uh2b,...).
The drive timing signal (St1, St2, St3,...) Is a transition that induces a steep change in the high voltage among the on-transition or off-transition timings of the switch elements (Qu, Qv, Qw). This signal defines the timing.
When the inverter switch control circuit (Uh1, Uh2a, Uh2b,...) Receives the drive timing signal (St1, St2, St3,...), The inverter switch (Ui1, Ui2a, Ui2b,...) Switch gate signals (Sh1, Sh2, Sh2 ′,...) That drive the gates of Qu, Qv, Qw) are transmitted to the inverters (Ui1, Ui2a, Ui2b,...), And the inverters (Ui1, Ui2a, Ui2b,. ) Is configured to induce the above-described steep change in the high voltage by causing the switch elements (Qu, Qv, Qw) to transition on or off immediately or after a short delay time.
When the drive timing signal (St1, St2, St3,...) Is a binary pulse signal that takes either a high level or a low level, the rising timing and the falling timing are the high voltage. The circuit of the inverter (Ui1, Ui2a, Ui2b,...) Will be described with respect to how the switch element (Qu, Qv, Qw) corresponds to the on transition or the off transition. It depends on the method and the logic of the drive timing signals (St1, St2, St3,...) (Positive logic or negative logic).

The integrated timing generation circuit (Ft) generates the drive timing signals (St1, St2, St3,...) With respect to all the light source drive groups (P1, P2, P3,...). The frequency of the transition timing for inducing the abrupt change in the high voltage is the same, and the above-mentioned steep high voltage is applied to any two of the light source drive groups (P1, P2, P3,...). A signal is generated so that transition timings that induce changes are not simultaneously performed.
This will be described below with reference to FIG. 3 which is a simplified timing diagram showing part of the operation of the excimer light source device of the present invention.

For the sake of simplicity, it is assumed that there are four light source driving groups each having one excimer light source set, and that there are a total of four excimer lamps each belonging to one of the groups. An example of the relationship between the timing signal (St1, St2, St3, St4) and the ramp voltage waveform (Vd1, Vd2, Vd3, Vd4) is shown.
At the time point (t1, t2, t3, t4), the drive timing signals (St1, St2, St3, St4) shift to high level, and the ramp voltage waveforms (Vd1, Vd2, Vd3) are received at those timings. , Vd4) each exhibit a steep voltage change.
Thereafter, the drive timing signals (St1, St2, St3, St4) once return to a low level, and again at the time points (t1 ′, t2 ′, t3 ′, t4 ′), the drive timing signals (St1, St2). , St3, St4) respectively shift to a high level, and the ramp voltage waveforms (Vd1, Vd2, Vd3, Vd4) exhibit steep voltage changes opposite to the previous ones in response to their timing.

Here, when attention is paid to the high-level transition timings of the drive timing signals (St1, St2, St3, St4), the frequencies are all the same, but the timings are all different.
As described above, the ramp voltage waveform (Vd1, Vd2, Vd3, Vd4) exhibits a steep voltage change at the high level transition timing of each of the drive timing signals (St1, St2, St3, St4). A discharge occurs in the lamp, and the current drawn from the preceding circuit by the inverter changes suddenly.
Therefore, noise is likely to occur at the moment described above, and control disturbance is likely to occur in a DC / DC converter or a DC power source, which will be described later, the circuit preceding the inverter.
However, since the moments described above are intentionally made different in all of the light source drive groups, they do not occur at the same time, and noise generation timing is distributed.
In addition, since the instantaneous generation frequency is the same in all of the light source drive groups, a state in which noise generation timing is dispersed is always maintained.

As a result, the level of generated noise is suppressed to a low level, and sudden occurrence of high level noise due to overlapping timing of noise generation is also prevented.
Furthermore, vibrations caused by sudden changes in the circuit current occurring at the moment, for example, vibrations caused by sudden changes in the magnetostriction of the core included in the inverter, which will be described later, are generated in all the light source drive groups. Since they are the same, as described above, when the frequencies are not the same, the difference frequency enters the audible range and no sound is produced.

In addition, in addition, in FIG. 3, the ramp voltage waveforms (Vd1, Vd2, Vd3, Vd4) are drawn so that the timing of the steep voltage change is delayed from the top to the bottom. However, only the ramp voltage waveform (Vd4) is drawn so that the polarity is always reversed in addition to the delay from the above.
This is because the drive timing signal (St1, St2, St3, St4) induces a steep change in the high voltage among the on-transition and off-transition of the switch elements (Qu, Qv, Qw). If the signal is of a format that specifies only the timing and does not specify the phase, it may actually occur if the initial state of the inverter is indeterminate, but there is no problem even if this happens. .
Further, the drive timing signals (St1, St2, St3, St4) are high level at both the time point (t1, t2, t3, t4) and the time point (t1 ′, t2 ′, t3 ′, t4 ′). However, for example, the signal shifts to the high level at the time point (t1, t2, t3, t4) and changes to the low level at the time point (t1 ′, t2 ′, t3 ′, t4 ′). You may comprise so that it may transfer.

The advantage that the noise generation timing, which is the feature of the present invention as described above, is always maintained, and the difference frequency does not enter the audible range and no sound is produced. (St2, St3,...)) Is not based on the frequency uniformity of the transition timing described above.
Therefore, this frequency may change or fluctuate depending on the situation.
Alternatively, the mutual time interval for each of the transition timings defined by the drive timing signals (St1, St2, St3,...) May change or fluctuate depending on the situation. Absent.

Next, a specific configuration of the excimer light source set (U1) described above based on FIG. 2 will be described with reference to FIG. 4 which is a circuit diagram showing a simplified configuration of a part of the excimer light source device of the present invention. This will be described below.
In addition, about the structure of other excimer light source sets, such as the said excimer light source set (U2a, U2b), it can carry out similarly to what is described below.

In the figure, a circuit including a step-up chopper type DC / DC converter (Uc1) is depicted as a circuit for supplying a DC voltage to the inverter (Ui1).
The DC / DC converter (Uc1) operates by receiving a voltage supply from a DC power source (Mx), and determines a voltage applied to the lamp.
In the DC / DC converter (Uc1), the gate element (Sgx) generated by the converter control circuit (Ucx) is configured so that the switching element (Qx) such as an FET repeats an ON state and an OFF state alternately. It is driven via a drive circuit (Gx).
During a period in which the switch element (Qx) is on, a current flows from the DC power source (Mx) to the inductor (Lx), magnetic energy is accumulated in the inductor (Lx), and the switch element (Qx) When transitioned off, the magnetic energy stored in the inductor (Lx) is released and charged to the smoothing capacitor (Cx) through the diode (Dx), thereby being higher than the voltage of the DC power supply (Mx). The voltage can be supplied to the nodes (T1, T2) of the subsequent inverter (Ui1).

The output voltage of the DC / DC converter (Uc1), that is, the charging voltage of the smoothing capacitor (Cx) is detected by voltage detection means (Vx) configured using a voltage dividing resistor or the like, and a chopper voltage detection signal ( Sv) is sent to the converter control circuit (Ucx).
In the converter control circuit (Ucx), for example, a voltage dividing circuit (not shown) including a trimmer resistor is provided, and a voltage correlated with the target value of the output voltage by adjusting the trimmer resistor. The converter control circuit (Ucx) compares this voltage with the voltage of the chopper voltage detection signal (Sv), and if the voltage of the chopper voltage detection signal (Sv) is lower For example, the ratio of the on-period of the switch element (Qx) is increased. Conversely, if the voltage of the chopper voltage detection signal (Sv) is higher, the ratio of the on-period of the switch element (Qx) is increased. By configuring the duty cycle ratio of the gate signal (Sgx) to be feedback controlled so as to decrease, the DC / DC converter (Uc1) It is possible to maintain the force voltage to the target value.
The DC / DC converter (Uc1) is provided for each excimer light source set and can set a voltage correlated with the target value of the output voltage, so that the power supplied to the excimer lamp (Y1) can be adjusted independently.

Here, as an example, the simplest output voltage of the DC / DC converter (Uc1) is detected by the voltage detection means (Vx) and is maintained at the target value. For example, a detecting means for detecting a peak value or an average value of the output current of the DC / DC converter (Uc1) or the output current of the excimer lamp (Y1) is provided and detected, and the target value is maintained. It can also be configured as follows.
Here, assuming that the DC power source (Mx) is, for example, a DC 24V power source commonly used in mechatronics systems, the DC / DC converter (Uc1) has been described as a step-up chopper type. When the DC power source (Mx) is, for example, a DC370V PFC directly connected to an AC200V commercial line, a step-down chopper type can be used, and the circuit system of the DC / DC converter (Uc1) is Depending on the installation environment of the excimer light source device, an appropriate one such as another chopper such as a step-up / step-down chopper or an inversion chopper, or one using a transformer and an inverter may be employed.

In FIG. 4, the push-pull method is described as the circuit method of the inverter (Ui1).
The voltage from the DC / DC converter (Uc1) and the switch elements (Qu, Qv) are connected to the primary windings (Lpu, Lpv) of the transformer (Ltb), and the gate drive circuits (Gu, Gv) are connected. ), The switching elements (Qu, Qv) are alternately controlled to repeat the on state and the off state, thereby inducing a voltage that repeats polarity reversal in the secondary winding (Ls). When the switch elements (Qu, Qv) are turned on, a high voltage having a waveform that changes sharply is generated and applied to the excimer lamp (Y1) connected to the secondary winding (Ls). Can do.
However, in general, a period during which both the switch elements (Qu, Qv) are turned off, which is called dead time, is provided between the switching of the switch elements (Qu, Qv). However, the excimer lamp (Y1 ) Is a capacitive load, the load current flows only for a short time immediately after polarity reversal, so the essential circuit operation does not depend much on the length of the dead time, and a long dead time is provided. be able to.

  In this figure, the push-pull method is described as the circuit method of the inverter (Ui1). However, when the switch element (Qu, Qv) is turned on, the secondary side of the transformer (Ltb) Any circuit system that generates a high voltage that exhibits a waveform that undergoes a steep change due to polarity reversal in the winding (Ls) can be employed. For example, the half-bridge system illustrated in FIG. Even if it is replaced with the full bridge system described in b, it operates well.

In order to cause the inverter (Ui1) to perform the operation as just described, the switch gate signal (Sh1) input to the gate driving circuit (Gu, Gv) is sent from the integrated timing generation circuit (Ft). The inverter switch control circuit (Uh1) is generated in response to the incoming drive timing signal (St1).
The drive timing signal (St1) is connected to the input terminal of the negative logic clock of the delay flip-flop (Fh). In the delay flip-flop (Fh), the inverted output Q bar of the output Q is connected to the terminal of the delay input D. Entered.
As shown in FIG. 6, which is a simplified timing diagram showing a part of the operation of the excimer light source device of the present invention for explaining the operation of the inverter switch control circuit (Uh1) and the inverter (Ui1). The output of the delay flip-flop (Fh) and the flip-flop output signal (Sd, Sd *), which is an inverted output, are inverted each time the drive timing signal (St1) falls.

The drive timing signal (St1) is connected to one input terminal of each of the AND logic gates (Hu, Hv), and the flip-flop output is connected to the other input terminal of each of the AND logic gates (Hu, Hv). When the signals (Sd, Sd *) are connected to each other, switch gate signals (Shu, Shv) by polarity that are high when both are high are output as the switch gate signal (Sh1).
As a result of the operation of the inverter (Ui1) so that the switch elements (Qu, Qv) are turned on when the switch gate signals (Shu, Shv) by polarity are at a high level, a waveform having a steep change is obtained. A ramp voltage waveform (Vd1), which is a high voltage to be exhibited, is generated.

  As can be easily seen from FIG. 6, the ramp voltage waveform (Vd1) exhibits a steep voltage change in response to the timing of the drive timing signal (St1) transitioning to a high level. It can be seen that the excimer light source set (U1) described in 4 realizes the excimer light source device of the present invention described with reference to FIGS.

Here are some important points to supplement.
In a normal application for supplying power to a resistive load or the like instead of an excimer lamp, the push-pull method, the half-bridge method, the full-bridge method, or the like described here can be used for the switching elements (Qu, Qv). The power supplied to the load can be adjusted by adjusting the ratio of the on-state period to the length of one cycle, that is, the duty cycle ratio.
However, in the excimer lamp, as described above, the load current flows only for a short time immediately after the polarity reversal. Therefore, the power supplied to the load cannot be adjusted by adjusting the duty cycle ratio.
Instead, even if the amplitude of the applied voltage waveform is not intentionally changed, the power supplied to the excimer lamp can be adjusted approximately proportionally to the frequency by changing the polarity inversion frequency of the inverter. By adjustment, for example, it is possible to correct brightness variations among lamps.
In fact, this technique is used in the apparatus described in Japanese Patent Laid-Open No. 11-233071.

However, in the excimer light source device of the present invention, the integrated timing generation circuit (Ft) defines the same inverter frequency for all the excimer light source sets, and is adjusted for each excimer light source set. Face the big problem of not being able to.
In the present invention, at the expense of cost increase, the exclusive DC / DC converter (Uc1) is provided in the excimer light source set (U1) before the inverter (Ui1), and the output voltage is set. The problem is solved by making it possible to adjust the power supplied to the excimer lamp (Y1), which is a clever point of the present invention.
In addition, about the said DC power supply (Mx), it is possible to use a common thing for all the said excimer light source sets (U1, U2a, U2b, ...).

  Incidentally, the ringing-like vibration immediately after the steep change of the high voltage seen in the ramp voltage waveform (Vd1) is caused by the primary side windings (Lpu, Lpv) and the secondary side windings of the transformer (Ltb). This is considered to be caused by LC resonance composed of the leakage inductance between the lines (Ls) and mainly the capacitance of the excimer lamp (Y1).

Next, a further specific example of the excimer light source set (U1) described above based on FIG. 2 will be described with reference to FIG. 7 which is a circuit diagram showing a simplified configuration of a part of the excimer light source device of the present invention. The configuration will be described below.
In addition, about the structure of other excimer light source sets, such as the said excimer light source set (U2a, U2b), it can carry out similarly to what is described below.

In this figure, as a circuit system of the inverter (Ui1), a switch element (Qw) is connected in series with a primary side winding (Lp) of a transformer (Ltf), and a DC power source is supplied during the ON period of the switch element (Qw). A waveform that undergoes a steep change by releasing the magnetic energy accumulated in the transformer (Ltf) by the current flowing from (Mx) to the secondary winding (Ls) when the switch element (Qw) is turned off. A flyback type that generates a high-voltage pulse exhibiting the following is described.
The excimer lamp (Y1) is connected to the secondary side of the transformer (Ltf). In order to detect the peak value of the current flowing through the excimer lamp (Y1) as an amount correlated with the intensity of the high voltage pulse. The output intensity detection circuit (Vo) is inserted in the current path.

The switch gate signal (Sh1) input to the gate drive circuit (Gw) of the switch element (Qw) receives the drive timing signal (St1) sent from the integrated timing generation circuit (Ft), and receives an inverter Generated by the switch control circuit (Uh1).
In the inverter switch control circuit (Uh1), the charge charged in the capacitor (Cj1) through the buffer (Hj1) and the diode (Dj1) during the high level period of the drive timing signal (St1) is the drive timing signal (St1). The terminal voltage of the capacitor (Cj1) is discharged through the resistor (Rj1) from the time point (tj1) when the drive timing signal (St1) falls, which is the pulse start timing of the signal (St1). The capacitor voltage signal (Sjv) decreases with an exponential time change.
This state and the state of the operation described below are shown by simplifying a part of the operation of the excimer light source device of the present invention for explaining the operation of the inverter switch control circuit (Uh1) and the inverter (Ui1). It is as described in FIG. 8 which is a timing diagram.

The comparator (Aj1) compares the capacitor voltage signal (Sjv) with a threshold voltage signal (Sjt) generated as will be described later, and the comparison signal (Sja) becomes low when the former is lower than the latter. ) Is output.
Therefore, after the time point (tj1), the waiting period (Tx) until the time point (tj2) when the comparison signal (Sja) becomes low level is variable, and becomes shorter as the threshold voltage signal (Sjt) becomes higher.
Therefore, the circuit described from the buffer (Hj1) to the comparator (Aj1) now forms a variable delay circuit (Ujd).

The switch gate signal (Sh1) is generated as an output signal of a negative logic AND gate (Hj2), and this signal is high when both the drive timing signal (St1) and the comparison signal (Sja) are at a low level. Become a level.
Therefore, after all, the switch gate signal (Sh1) is only in the standby period (Tx) from the time point (tj1) of the fall of the drive timing signal (St1) which is the pulse start timing of the drive timing signal (St1). The signal is delayed to a high level, and becomes a signal that returns to a low level at the rising edge (tj3) of the drive timing signal (St1), which is the pulse end timing of the drive timing signal (St1).
However, the low-level time width (Tw) of the drive timing signal (St1) is constant.

As described above, magnetic energy is accumulated in the transformer (Ltf) during a period when the switch gate signal (Sh1) is at a high level, and is released when the switch gate signal (Sh1) returns to a low level. A conceptual ramp voltage waveform (Vd1) in the inverter (Ui1) is generated as shown in FIG. 8 in order to generate a high voltage pulse exhibiting a waveform that changes sharply in the secondary winding (Ls). become.
As can be easily seen from this figure, the ramp voltage waveform (Vd1) exhibits a steep voltage change in response to the timing of the drive timing signal (St1) transitioning to a high level. It can be seen that the excimer light source set (U1) described in 4 realizes the excimer light source device of the present invention described with reference to FIGS.

  On the other hand, in the output intensity detection circuit (Vo), a simple peak due to a diode and a capacitor for holding the voltage generated in the shunt resistor by the current flowing in the excimer lamp (Y1) immediately after the time (tj3). A hold circuit is configured, and the held voltage is output as an output intensity signal (So).

The output intensity signal (So) is connected to the inverting input terminal of the operational amplifier (Aj2) through the resistor (Rj2).
The voltage of the voltage source (Vj) that generates a negative voltage correlated with the target value of the output intensity signal (So) is connected to the inverting input terminal of the operational amplifier (Aj2) through the resistor (Rj3). .
Further, since the output is fed back to the inverting input terminal of the operational amplifier (Aj2) via the integrating capacitor (Cj2), the threshold voltage signal (Sjt) which is the output signal of the operational amplifier (Aj2). It can be seen that it has information as an error integration signal obtained by integrating an error from the target value of the output intensity signal (So).

Therefore, if the output intensity signal (So) is smaller than the target value, the threshold voltage signal (Sjt) rises, and if it rises, the waiting period (Tx) becomes shorter.
On the other hand, the ON period (Ty) of the switch element (Qw) is equal to the high level time width of the switch gate signal (Sh1), which is from the period when the drive timing signal (St1) is at the low level to the standby period. (Tx) is subtracted.
Therefore, the shorter the waiting period (Tx) is, the longer the on period (Ty) of the switch element (Qw) is, and the magnetic energy accumulated in the transformer (Ltf) is increased. Therefore, the switch gate signal (Sh1) The pulse voltage generated when becomes low level becomes high.
As a result, the current flowing through the excimer lamp (Y1) also increases, and the output intensity signal (So) increases to approach the target value.
Naturally, when the output intensity signal (So) is larger than the target value, the reverse operation is performed, the output intensity signal (So) becomes smaller and approaches the target value, and the output intensity signal (So) It can be seen that feedback control is achieved through the length of the waiting period (Tx) so that is maintained at the target value.
However, it is necessary to set the time width (Tw) longer than the maximum value of the possible time length of the ON period (Ty).

If the circuit shown in FIG. 7 is used as it is, the operational amplifier (Aj2) is caused by the fact that the output intensity signal (So) is not detected at the time immediately before starting lighting from the lamp extinguishing state. Since the error integration signal circuit according to is saturated in the direction of increasing the intensity of the high voltage pulse, the lighting is started from the maximum power state, and thereafter, the operation is performed so as to decrease to the target power by the feedback control.
However, since this operation is not preferable, for example, a circuit that flows a current that cancels the current from the voltage source (Vj) to the inverting input terminal of the operational amplifier (Aj2) in the light-off state is added. Alternatively, when the voltage source (Vj) is turned off, a voltage corresponding to a negative value is generated as a target value of the output intensity signal (So), thereby increasing the error integration signal circuit. It is preferable to start the lighting from the lowest power state by saturating in the direction of decreasing the intensity of the voltage pulse, and then increase to the target power by feedback control.

  Incidentally, in the excimer light source set (U1) shown in FIG. 7, the output intensity signal (So) correlated with the intensity of the high voltage pulse is generated from the current flowing through the excimer lamp (Y1). However, for example, the output intensity detection circuit (Vo) detects the voltage between the source and drain of the switch element (Qw), that is, the potential of the connection node between the switch element (Qw) and the primary winding (Lp). ), And an output intensity signal (So) having a good correlation with the intensity of the high voltage pulse can be devised in view of the specific waveform of each part.

Here are some important points to supplement.
In the case of the flyback circuit, as described above, since magnetic energy is accumulated in the transformer (Ltf) during the period when the switch element (Qw) is in the on state, the power supplied to the excimer lamp (Y1) is In order to be able to adjust independently for each excimer light source set (U1), the integrated timing generation circuit (Ft), which is an external circuit, defines the timing of both the on transition and the off transition of the switch element (Qw). It is impossible.
Since a high voltage pulse having a waveform that undergoes a steep change is generated at an OFF transition timing of the switch element (Qw), this timing is determined by the drive timing signal (St1). Ft) needs to be transmitted to the excimer light source set (U1).
However, before the timing, the excimer light source set (U1) itself generates an on transition of the switch element (Qw), and at the time when just good magnetic energy is accumulated, the integrated timing generation circuit (Ft) The timing of the off-transition of the switch element (Qw) must be communicated, and at first glance, this appears to be a request that is contrary to causality.
In the present invention, the drive timing signal (St1) is a pulse having a certain time width (Tw), and the switch element (Qw) is turned on with a delay of the standby period (Tx) from the start timing. The switch element (Qw) is turned off at the pulse end timing of the drive timing signal (St1), and the standby period (Tx) is variable and automatically adjusted by feedback control. In this way, the above-mentioned seemingly impossible request is satisfied by a clever method.

In addition, although the appropriate value of the ON period (Ty) of the switch element (Qw) as described above cannot be determined in advance, the timing at which the switch element (Qw) is turned off, The advantage of the configuration that can be defined by the pulse end timing of the drive timing signals (St1, St2, St3,...) From the outside of the excimer light source set (U1) is that the drive timing signals (St1, St2, The switch element (Qw) is automatically turned on when the magnetic energy accumulated in the transformer (Ltf) becomes an appropriate value after the switch element (Qw) is turned on at the pulse start timing of St3,. If the switch element (Qw) is configured to make an OFF transition, the length of the ON period (Ty) of the switch element (Qw) When the key is large, the ON period (Ty) of a certain switch element, which has been turned on first at the pulse start timing of the drive timing signal (St1), is long, while at the pulse start timing of the drive timing signal (St2) The on-period (Ty) of the other switch elements that have been turned on later is short, and therefore, for example, it is possible to avoid the occurrence of an event in which both switch elements are turned off almost simultaneously.
Therefore, even when the inverters (Ui1, Ui2a, Ui2b,...) Are flyback circuits, the maximum variation in the length of the ON period (Ty) of the switch element (Qw) for each inverter is the drive timing. It is smaller than the minimum value of the time interval between the signals (St1, St2, St3,...). Therefore, the switch element that has been turned on first and the switch element that has been turned on later are simultaneously turned off. If not, unless there is a point that the timing of the steep change of the high voltage cannot be controlled accurately, as described above, the switch element at the pulse start timing of the drive timing signal (St1, St2, St3,...) (Qw) is turned on and then the magnetic energy accumulated in the transformer (Ltf) becomes an appropriate value. It may be configured to automatically turn off transition the switching element (Qw).

A configuration example of such an excimer light source set (U1) is shown in FIG. 9 which is a circuit diagram showing a simplified configuration of a part of the excimer light source device of the present invention, and the operation thereof is as follows.
Assuming that the drive timing signal (St1) is a low-level pulse signal having a short time width and is input to the set terminal of the RS flip-flop (Hk), the switch gate signal (Sh1) is immediately set to the high level. The switch element (Qw) is turned on via the gate drive circuit (Gw), and accumulation of magnetic energy in the transformer (Ltf) is started.
Since the stored energy correlates with the magnitude of the current flowing through the primary winding (Lp) of the transformer (Ltf), the current is detected as a current detection signal (Ski) converted into a voltage by the current detection resistor (Rk). A comparator (Ak) is provided so that it can be compared with the voltage of the threshold signal voltage source (Vk) corresponding to the specified value of the amount of energy stored in the transformer (Ltf).
When the current detection signal (Ski) exceeds the voltage of the threshold signal voltage source (Vk), the accumulation completion signal (Ske), which is the comparison result output of the comparator (Ak), becomes low level. Is input to the reset terminal of the RS flip-flop (Hk), the switch gate signal (Sh1) is immediately reset to a low level, the switch element (Qw) is turned off, and the secondary winding A high voltage pulse having a waveform that sharply changes in (Ls) is generated.

Next, the configuration of the improved excimer light source device will be described with reference to FIG. 10, which is a circuit diagram showing a simplified configuration of a part of the excimer light source device of the present invention.
The light source driving group (P2) illustrated in FIG. 2 exemplifies a case where the two excimer light source sets (U2a, U2b) are included.
Both the excimer light source sets (U2a, U2b) may have the same configuration (for example, both described in FIG. 4 or both described in FIG. 7) or different (for example, Even if one is the one shown in FIG. 4 and the other is the one shown in FIG. 7, the same drive timing signal (St2) is supplied to both from the integrated timing generation circuit (Ft). Therefore, the transition of the switch element that induces the abrupt change of the high voltage described above occurs in both of the excimer light source sets (U2a, U2b) at the same timing defined by this signal.
Even so, there is no problem as long as the resulting noise is less than the prescribed allowable level, but even in that case, it is desirable to reduce the noise level as much as possible.

FIG. 10 shows an example of a transition timing delay circuit (Ud2B) that delays the rise and fall timings of the drive timing signal (St2). The drive timing signal (St2) is received by the buffer (Bd1). This is a simple circuit that applies an analog delay to the rise and fall of a signal using a resistor (Rd1) and a capacitor (Cd1) and returns the signal to a digital signal using a Schmitt trigger buffer (Bd2).
As described with broken lines in FIG. 2, this circuit is inserted with respect to the drive timing signal (St2) input to the excimer light source set (U2b), thereby inducing a steep change in the high voltage. Regarding the switching timing of the switch element, a delay occurs in the excimer light source set (U2b) compared to that in the excimer light source set (U2b).

This state is shown in FIG. 11 which is a timing chart showing a simplified operation of a part of the excimer light source device of the present invention.
This figure corresponds to FIG. 2, and the switch gate signals (Sh1, Sh2, Sh2 ′) in the excimer light source set (U1, U2a, U2b, U3) of the light source driving group (P1, P2, P3,...). , Sh3) and ramp voltage waveforms (Vd1, Vd2a, Vd2b, Vd3).
In contrast to the switch gate signal (Sh2) in the excimer light source set (U2a), the switch gate signal (Sh2 ′) in the excimer light source set (U2b) is provided with a timing shift corresponding to the delay time (Td). As a result, the transition timings of the switch elements are shifted, and the timings of abrupt changes in the high voltage of the ramp voltage waveforms (Vd1, Vd2a, Vd2b, Vd3) are all dispersed, and the noise level can be reduced. .

Here, when two excimer light source sets belong to a light source drive group, an example in which a transition timing delay circuit is inserted into one of them is shown. For example, three excimer light sources are included in a light source drive group. If the set belongs, a transition timing delay circuit with a different delay time may be inserted into two of them, and the same configuration may be adopted even when the number increases.
The delay time provided by the transition timing delay circuit should be smaller than the time difference between adjacent ones of the drive timing signals (St1, St2, St3,...).

Next, an example of a configuration method of the integrated timing generation circuit (Ft) will be described with reference to FIG. 12 which is a circuit diagram showing a simplified configuration of a part of the excimer light source device of the present invention.
As described above, the function of the integrated timing generation circuit (Ft) has the same transition timing frequency for all of the light source drive groups (P1, P2, P3,...), And the light source drive group ( P1, P2, P3,...) For the two drive timing signals (St1, St2, St3,...) That do not have the same transition timing at the same time. If the number is up to about 4, it is easy to generate the drive timing signals (St1, St2, St3,...) By making a timer interrupt to the microprocessor.
However, if the number of light source driving groups becomes significantly larger than that, implementation by this method becomes difficult, and the configuration method described below is advantageous.

Now, assuming that the number of the light source drive groups is seven, a case where seven channel drive timing signals (St1, St2,..., St7) are generated is assumed.
At this time, T flip-flops (Fc1, Fc2, Fc3) whose outputs are inverted at the rising edge of the clock pulse signal when the T input is true (here, high level Vcc), and an AND logic gate (Hc1) are connected. By supplying a clock pulse signal (Sck) from an oscillation circuit (Osc) including a crystal resonator to the frequency dividing circuit (Ufn) having a synchronous octal counter configuration, the clock A frequency-divided signal (Sdv) obtained by dividing the pulse signal (Sck) by 8 can be generated.
Further, the clock pulse signal (Sck) is also supplied to a shift register (Ufs) constituted by connecting six stages of delay flip-flops (Fs1, Fs2,..., Fs6), whereby the divided signal (Sdv) is supplied. ) Are sequentially shifted, so that an integrated timing generation circuit (Ft) for generating the 7-channel drive timing signals (St1, St2,..., St7) can be configured.

The driving timing signals (St1, St2,..., St7) are as shown in FIG. 13, which is a simplified timing diagram showing a part of the operation of the excimer light source device of the present invention.
The rising timing (t1, t2, t3, t4, t5, t6, t7) and the timing (t1 ′, t2 ′, t3 ′, t4 ′, t5 ′, t5) of the drive timing signal (St1, St2,..., St7) t6 ′, t7 ′) and time points (t1 ″, t2 ″,...), and the drive timing signals (St1, St2,..., St7) as can be seen from the bottom chart in FIG. The rise or fall timings of are generated unevenly.
Such inequalities occur because the number of signals obtained by combining the divided signal (Sdv) and the outputs of the delay flip-flops (Fs1, Fs2,..., Fs6) is the frequency dividing circuit ( This is because the frequency division ratio is smaller than Ufn), but there is no problem even if it is uneven in this way.
If equalization is desired, the frequency dividing ratio of the frequency dividing circuit (Ufn) is set to be equal to the number of signals obtained by adding the outputs of the respective stages of the delay flip-flops (Fs1, Fs2,..., Fs6). You only have to set it.

In the above example, the frequency dividing circuit (Ufn) is composed of T flip-flops for the sake of simplification of description, other types of flip-flops may be used, and presetting is performed. An arbitrary frequency division ratio can be set by using a double counter IC.
Incidentally, the T flip-flop is equivalent to one in which the J terminal and the K terminal of the JK flip-flop are connected to form one input terminal, that is, the T terminal.
Note that the time point (t1, t2, t3, t4) and the time point (t1 ′, t2 ′, t3 ′, t4 ′) in FIG. 13 are not directly related to those of the same symbol in FIG.

Next, the configuration of the excimer light source device will be described with reference to FIG. 14 which is a diagram showing a simplified form of an embodiment of the excimer light source device of the present invention.
Excimer lamps (Y1, Y2, Y3,...) Having light-transmitting electrodes made of solidified metal paste or the like printed on the above-described net-like pattern are made of a metal plate having high light reflectance such as bright aluminum. It is arranged side by side in front of one large light reflector (B2).
The light reflector (B2) is electrically grounded, and one electrode of the excimer lamp (Y1, Y2, Y3,...) Is connected to the light reflector (B2).
The light generated by the excimer lamps (Y1, Y2, Y3,...) Is extracted outside through the window (B3).

Each of the excimer light source sets includes an electric circuit portion excluding the lamp (the inverter switch control circuit, the inverter, etc., and the DC / DC converter in the case of the system shown in FIG. 4) as components. Drive circuit portions (Ue1, Ue2, Ue3,...) Are provided corresponding to the excimer lamps (Y1, Y2, Y3,...).
However, the switch elements of the inverter included in each of the drive circuit units (Ue1, Ue2, Ue3,...) Are fixed to heat sinks (Bh1, Bh2, Bh3,...) For releasing generated heat.
All the circuit elements in the drive circuit section (Ue1, Ue2, Ue3,...) Are mounted on one printed wiring board, and are further screwed to the heat sink (Bh1, Bh2, Bh3,...). By fixing, the drive circuit unit (Ue1, Ue2, Ue3,...) And the heat sink (Bh1, Bh2, Bh3,...) Form an integrated module, and the heat sink (Bh1, Bh2, Bh3). ,... Are also particularly suitable when the number of the drive circuit units (Ue1, Ue2, Ue3,...) Is large. is there.
The module comprising the drive circuit portions (Ue1, Ue2, Ue3,...) Mounted on the heat sinks (Bh1, Bh2, Bh3,...) Is a single large radiator (B1) that also serves as a fixed plate. Above, the heat sinks (Bh1, Bh2, Bh3,...) Are arranged side by side in a strong fixing method so as to form good thermal contact.

One end of the secondary winding of the transformer included in each of the drive circuit units (Ue1, Ue2, Ue3,...) Is connected to one electrode of the excimer lamp (Y1, Y2, Y3,. Then, the other end of the secondary winding is grounded, so that a power feeding path to the excimer lamps (Y1, Y2, Y3,...) Is secured through the light reflector (B2).
A common DC power source (Mx) is installed in the entire drive circuit section (Ue1, Ue2, Ue3,...).
Further, a drive timing signal (St1, St2, St3,...) Is transmitted from the integrated timing generation circuit (Ft) to each of the drive circuit units (Ue1, Ue2, Ue3,...).

As described above, vibration caused mainly by magnetostriction of the core of the transformer is generated in the drive circuit unit (Ue1, Ue2, Ue3,...), Which is transmitted through the heat sink (Bh1, Bh2, Bh3,...). As a result, the radiator (B1) vibrates.
Further, the light reflector (B2) vibrates by transmitting vibrations generated in the discharge spaces of the excimer lamps (Y1, Y2, Y3,...) Due to steep gas expansion during discharge.
Since each of the radiator (B1) and the light reflector (B2) is a single large plate, it works like a speaker to promote vibration.

If the drive timing signals (St1, St2, St3,...) Include signals having different frequencies, the difference frequency may enter the audible range, and the sound is very harsh. Will be issued.
Further, in the case of this embodiment, as described above, there is a problem in that the phenomenon is caused by the noise generation accompanying the substantially simultaneous on transition or off transition of the two switch elements and the disturbance of the DC / DC converter control associated therewith. There is.

However, if the excimer light source device is configured according to the present invention, as described above, the drive timing signals (St1, St2, St3,...) Are supplied to all the light source drive groups (P1, P2, P3,...). Since the frequency of the transition timing described above is the same and the transition timing described above is not generated at the same time for any two of the light source drive groups (P1, P2, P3,...), It is called a difference frequency. There is no thing in the first place, and the generated vibrations are only the fundamental frequency and its harmonics, and are all higher than the audible range, so that the noise is minimized.
In addition, since the phenomenon of noise generation due to almost the same on-transition or off-transition of the two switching elements and the disturbance of the DC / DC converter control associated therewith does not occur, noise countermeasures and circuit operation stabilization Countermeasures are easy.

A supplement when realizing a practical excimer light source device using the present invention will be described.
The inverters (Ui1, Ui2a, Ui2b,...) Included in the excimer light source device of the present invention need to be separately excited as described above. Therefore, if the integrated timing generation circuit (Ft) When the drive timing signals (St1, St2, St3,...) Cannot be received normally, the inverters (Ui1, Ui2a, Ui2b,...) Do not move at all, so that the excimer light source device does not function. Depending on the conditions, the core of the transformer (Ltb, Ltf) may be magnetically saturated, an overcurrent may flow through the switch elements (Qu, Qv, Qw) and may be damaged.

  In order to avoid such a situation, as an example of a device that can be implemented as a matter within the scope of the present invention, the inverter switch control circuit (Uh1, Uh2a, Uh2b,...) Is a timer circuit that measures elapsed time. , And a timer circuit whose elapsed time information is reset when the drive timing signal (St1, St2, St3,...) Is received. When the timer circuit expires a predetermined upper limit time, the drive timing signal ( .., And when the inverter switch control circuit (Uh1, Uh2a, Uh2b,...) Performs the operation performed by the inverter switch control circuit (Uh1, Uh2a, Uh2b,...) It is configured to reset elapsed time information, and the integration timing is set as the predetermined upper limit time. The drive timing signals in the normal active adult circuit (Ft) (St1, St2, St3, ...) may be set longer than the maximum period of.

  If the inverter switch control circuit (Uh1, Uh2a, Uh2b,...) Is configured in this way, in a normal activity state of the integrated timing generation circuit (Ft), at a time interval shorter than the predetermined upper limit time. Since the drive timing signal (St1, St2, St3,...) Arrives, the timer circuit only repeats resetting the elapsed time information without expiring the timing of the predetermined upper limit time. When the timing generation circuit (Ft) stops or malfunction occurs in signal transmission, the inverter switch control circuit (Uh1, Uh2a, Uh2b,...) Is driven as if the predetermined upper limit time is a cycle. Generate the switch gate signals (Sh1, Sh2, Sh2 ′,...) As if the signals are being received; Since the inverters (Ui1, Ui2a, Ui2b,...) Operate, the excimer light source device can perform a minimum function even if it does not reach the expected performance, and at least the switching element as described above. Damage to (Qu, Qv, Qw) can be avoided.

The circuit configuration described in this specification describes the minimum necessary components for the purpose of explaining the operation, function, and operation of the light source device of the present invention.
Therefore, the details of the circuit configuration and operation described, such as signal polarity, selection, addition, omission of specific circuit elements, or ingenuity such as changes based on the convenience of obtaining elements and economic reasons Is assumed to be performed at the time of designing the actual device.

  In particular, a mechanism for protecting circuit elements such as switching elements such as FETs of the power supply device from damage factors such as overvoltage, overcurrent, and overheating, or radiation noise and conduction noise generated by the operation of circuit elements of the power supply device Mechanisms that reduce the occurrence of noise and prevent the generated noise from being output to the outside, such as snubber circuits, varistors, clamp diodes, current limiting circuits (including pulse-by-pulse systems), common mode or normal mode noise filter chokes It is assumed that a coil, a noise filter capacitor, and the like are added to each part of the circuit configuration described in the embodiment as necessary.

The configuration of the excimer light source device according to the present invention is not limited to the circuit system described in this specification, and is not limited to the waveform and timing diagram described.
In particular, the polarity of the waveform, whether the signal is positive logic or negative logic, or whether the operation timing is the rising or falling edge of the signal can be arbitrarily determined according to the design convenience. That's fine.

  In addition, it has been described that it is advantageous to drive one excimer lamp with one inverter. However, as an example of a device that can be implemented as a matter within the scope of the present invention, it is suitably driven with one inverter. Even one excimer lamp that can be used may be divided into a plurality of lamps according to circumstances such as dimensional constraints.

  The present invention generates UV (ultraviolet) light that can be used in fields such as UV ozone cleaning, UV surface modification, UV curing, UV sterilization, and UV treatment, or changes the generated UV light to other wavelengths. The present invention can be used in the industry that designs and manufactures excimer light source devices that simultaneously turn on a plurality of excimer lamps, which are light sources suitable for converting and illuminating the device.

Aj1 comparator Aj2 operational amplifier Ak comparator B1 radiator B2 light reflector B3 window Bd1 buffer Bd2 Schmitt trigger buffer Bh1 heat sink Bh2 heat sink Bh3 heat sink Cd1 capacitor Cj1 capacitor Cj2 integration capacitor Cx smoothing capacitor Dj1 diode Dx diode Fc1 T flip-flop Fc2 Flip-flop Fc3 T flip-flop Fh delay flip-flop Fs1 delay flip-flop Fs2 delay flip-flop Fs6 delay flip-flop Ft integrated timing generation circuit Gu gate drive circuit Gu ′ gate drive circuit Gv gate drive circuit Gv ′ gate drive circuit Gw gate drive circuit Gx Gate drive circuit Hc1 AND logic gate Hj1 Buffer Hj2 Negative logic AND gate Hk RS Rip-flop Hu AND logic gate Hv AND logic gate Lp Primary side winding Lpu Primary side winding Lpv Primary side winding Ls Secondary side winding Lt Transformer Ltb Transformer Ltf Transformer Lx Inductor Mx DC power supply Osc Oscillation circuit P1 Light source Drive group P2 Light source drive group P3 Light source drive group Qu Switch element Qu ′ Switch element Qv Switch element Qv ′ Switch element Qw Switch element Qx Switch element Rd1 Resistor Rj1 Resistor Rj2 Resistor Rj3 Resistor Rk Current detection resistor Sck Clock pulse signal Sd Flip-flop output Signal Sd * Flip-flop output signal Sdv Divided signal Sgx Gate signal Sh1 Switch gate signal Sh2 Switch gate signal Sh2 ′ Switch gate signal Sh3 Switch gate signal Shu Switch gate by polarity No. Shv Polarity switch gate signal Sja Comparison signal Sjt Threshold voltage signal Sjv Capacitor voltage signal Ske Accumulation completion signal Ski Current detection signal So Output intensity signal St1 Drive timing signal St2 Drive timing signal St3 Drive timing signal St4 Drive timing signal St7 Drive timing signal Sv Chopper voltage detection signal t1 time point T1 node t1 'time point t1 "time point t2 time point T2 node t2' time point t2" time point t3 time point t4 time point t4 'time point t5 time point t5' time point t6 time point t6 'time point t7 time point t7' time point Td Delay time tj1 Time point tj2 Time point tj3 Time point Tw Time width Tx Standby period Ty On period U1 Excimer light source set U2a Excimer light source set U2b Excimer light source set U3 Excimer light source set Uc1 DC converter Ucx Inverter control circuit Ud2B transition timing delay circuit Ue1 drive circuit unit Ue2 drive circuit unit Ue3 drive circuit unit Ufn frequency divider Ufs shift register Uh1 inverter switch control circuit Uh2a inverter switch control circuit Uh2b inverter switch control circuit Ui1 inverter Ui2a inverter Ui2b inverter Ujd variable Delay circuit Vd1 Ramp voltage waveform Vd2 Ramp voltage waveform Vd2a Ramp voltage waveform Vd2b Ramp voltage waveform Vd3 Ramp voltage waveform Vd4 Ramp voltage waveform Vj Voltage source Vk Threshold signal voltage source Vo Output intensity detection circuit Vx Voltage detection means Y Excimer lamp Y1 Excimer lamp Y2 Excimer lamp Y2a Excimer lamp Y2b Excimer lamp Y3 Excimer lamp Yb Dielectric Ye1 Electrode Ye2 Electrode Yg Discharge space Yt Lube

Claims (6)

It has a discharge space (Yg) filled with a discharge gas for generating excimer molecules, and at least one of a pair of electrodes (Ye1, Ye2) for inducing a discharge in the discharge gas and the discharge space ( Excimer lamps (Y1, Y2a, Y2b,...) Configured such that a dielectric (Yb) is interposed between them and Yg),
It has a transformer (Ltb, Ltf) and at least one switch element (Qu, Qv, Qw), generates a high voltage exhibiting a waveform that changes sharply, and generates the excimer lamps (Y1, Y2a, Y2b, ...) to be applied to the electrodes (Ye1, Ye2), separately-excited inverters (Ui1, Ui2a, Ui2b, ...),
Inverter switch control circuits (Uh1, Uh2a, Uh2b,...) For controlling the switch elements (Qu, Qv, Qw);
A plurality of excimer light source sets (U1, U2a, U2b,...) Configured to include:
Drives the inverters (Ui1, Ui2a, Ui2b,...) That define the transition timing that induces the abrupt change of the high voltage among the on-transitions and off-transitions of the switch elements (Qu, Qv, Qw). Are integrated timing generation circuits (Ft) that generate drive timing signals (St1, St2, St3,...) That are transmitted to the inverter switch control circuits (Uh1, Uh2a, Uh2b,...), Respectively. )When,
An excimer light source device comprising:
Each of the excimer light source sets (U1, U2a, U2b,...) Supplies power supplied to the excimer lamps (Y1, Y2a, Y2b,...) Included in the excimer light source sets (U1, U2a, U2b,...). ) Can be adjusted independently for each
Each of the excimer light source sets (U1, U2a, U2b,...) Belongs to one of a plurality of light source drive groups (P1, P2, P3,...), And the excimer light sources belonging to the same light source drive group. Each of the sets is configured to receive the same drive timing signal;
The integrated timing generation circuit (Ft) has the same transition timing frequency for all of the light source drive groups (P1, P2, P3,...), And the light source drive groups (P1, P2, P3, etc.). The excimer light source device generates the drive timing signals (St1, St2, St3,...) That do not have the same transition timing for any two of the two.   The inverters (Ui1, Ui2a, Ui2b,...) Included in the excimer light source set (U1, U2a, U2b,...) Are connected to primary windings (Lpu, Lpv) of the transformer (Ltb). When the switch elements (Qu, Qv) are turned on, a high voltage that exhibits a waveform that undergoes a steep change due to polarity reversal in the secondary winding (Ls) of the transformer (Ltb) is generated. Further, the excimer light source set (U1, U2a, U2b,...) Outputs the voltage of the DC power source (Mx) by stepping up or down the voltage before the inverter (Ui1, Ui2a, Ui2b,...). And a DC / DC converter (Uc1) for supplying the inverter (Ui1, Ui2a, Ui2b,...), And the DC / DC converter. Data (Uc1) is an excimer light source device according to claim 1, wherein the power supplied to the excimer lamp (Y1) is capable of adjusting the output voltage to be the target value.   In the inverters (Ui1, Ui2a, Ui2b,...), The switch element (Qw) is connected in series to the primary winding (Lp) of the transformer (Ltb, Ltf), and the switch element (Qw) is turned on. Flyback that generates a high voltage pulse exhibiting a waveform that undergoes a steep change by releasing the magnetic energy accumulated in the period to the secondary winding (Ls) when the switch element (Qw) is turned off. The excimer light source set (U1, U2a, U2b,...) Further includes an output intensity detection circuit (Vo) that generates an output intensity signal (So) correlated with the intensity of the high voltage pulse. The integrated timing generation circuit (Ft) includes the driving timing signal (St1, St) as a repetition of a pulse having a constant time width (Tw). , St3,..., And the inverter switch control circuit (Uh1, Uh2a, Uh2b,...) Has a waiting period (Tx) from a pulse start timing of the drive timing signal (St1, St2, St3,...). The switch element (Qw) is turned on with a delay, and then the switch element (Qw) is turned off in synchronization with the pulse end timing of the drive timing signal (St1, St2, St3,...). And a variable delay circuit (Ujd) in which the waiting period (Tx) is variable, and a length of the waiting period (Tx) so as to maintain the output intensity signal (So) at a predetermined magnitude. The excimer light source device according to claim 1, wherein the excimer light source device is feedback-controlled. At least one excimer light source set (U1, U2a, U2b,...) Belonging to the light source driving group (P1, P2, P3,...) To which a plurality of the excimer light source sets (U1, U2a, U2b,...) Belong. In the inverter switch control circuit (Uh1, Uh2a, Uh2b,...), A transition timing delay circuit (Ud2B) for delaying the transition timing with respect to the drive timing signal (St1, St2, St3,...). 4) The excimer light source device according to any one of claims 1 to 3 , wherein the excimer light source device is provided. When the number of the light source drive groups (P1, P2, P3,...) Is N, the integrated timing generation circuit (Ft) oscillates at a predetermined frequency to generate a clock pulse signal (Sck) ( Osc) and the clock pulse signal (Sck) are input, and a frequency dividing circuit (Ufn) that generates a frequency-divided signal (Sdv) having a frequency obtained by dividing the frequency of the clock pulse signal (Sck) by 1 / M. ) And the clock pulse signal (Sck) and a plurality of delay flip-flops (Fs1, Fs2,..., Fs6) that shift the divided signal (Sdv) according to the timing of the clock pulse signal (Sck). A shift register (Ufs) having the frequency division signal (Sdv) and the delay flip-flops (Fs1, Fs2,..., F 6) It is configured to generate N different signals selected from the output signals of each stage as the drive timing signals (St1, St2, St3,...), And M is N or more. The excimer light source device according to any one of claims 1 to 4 , wherein the excimer light source device is characterized in that: Drive circuit portions (Ue1, Ue2, Ue3,...) Each including a portion excluding the excimer lamp in the excimer light source set correspond to the excimer lamps (Y1, Y2, Y3,...). The switch element of the inverter included in the drive circuit section (Ue1, Ue2, Ue3,...) Is fixed to a heat sink (Bh1, Bh2, Bh3,...) For releasing generated heat, and The circuit elements in the drive circuit unit (Ue1, Ue2, Ue3,...) Are mounted on a printed wiring board, and the printed circuit board is fixed to the heat sink (Bh1, Bh2, Bh3,...) (Ue1, Ue2, Ue3,...) And the heat sink (Bh1, Bh2, Bh3,...) Are configured to form an integral module. The module is arranged on a heat radiating body (B1) side by side in a fixing method that forms a thermal contact between the heat sink and the heat sink (Bh1, Bh2, Bh3, ...). The excimer light source device according to any one of 1 to 5.

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