JP6210691B2 - Pigment dispersion and method for producing photosensitive resin composition using the same - Google Patents
Pigment dispersion and method for producing photosensitive resin composition using the same Download PDFInfo
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- JP6210691B2 JP6210691B2 JP2013023600A JP2013023600A JP6210691B2 JP 6210691 B2 JP6210691 B2 JP 6210691B2 JP 2013023600 A JP2013023600 A JP 2013023600A JP 2013023600 A JP2013023600 A JP 2013023600A JP 6210691 B2 JP6210691 B2 JP 6210691B2
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- pigment dispersion
- meth
- pigment
- photosensitive resin
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- 239000000049 pigment Substances 0.000 title claims description 128
- 239000006185 dispersion Substances 0.000 title claims description 75
- 239000011342 resin composition Substances 0.000 title claims description 62
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 150000001875 compounds Chemical class 0.000 claims description 83
- 229920005989 resin Polymers 0.000 claims description 56
- 239000011347 resin Substances 0.000 claims description 56
- 125000000962 organic group Chemical group 0.000 claims description 46
- -1 phosphino group Chemical group 0.000 claims description 41
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 29
- 239000002904 solvent Substances 0.000 claims description 25
- 239000000178 monomer Substances 0.000 claims description 21
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 15
- 125000004122 cyclic group Chemical group 0.000 claims description 14
- 239000002270 dispersing agent Substances 0.000 claims description 14
- 239000003999 initiator Substances 0.000 claims description 11
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 10
- 125000000101 thioether group Chemical group 0.000 claims description 10
- 125000005843 halogen group Chemical group 0.000 claims description 9
- 238000002156 mixing Methods 0.000 claims description 9
- 125000000018 nitroso group Chemical group N(=O)* 0.000 claims description 8
- 125000005328 phosphinyl group Chemical group [PH2](=O)* 0.000 claims description 8
- 125000001476 phosphono group Chemical group [H]OP(*)(=O)O[H] 0.000 claims description 8
- 125000005372 silanol group Chemical group 0.000 claims description 8
- 125000003808 silyl group Chemical group [H][Si]([H])([H])[*] 0.000 claims description 8
- 125000000213 sulfino group Chemical group [H]OS(*)=O 0.000 claims description 8
- 125000000020 sulfo group Chemical group O=S(=O)([*])O[H] 0.000 claims description 8
- 125000001273 sulfonato group Chemical group [O-]S(*)(=O)=O 0.000 claims description 8
- 125000003396 thiol group Chemical group [H]S* 0.000 claims description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- ABLZXFCXXLZCGV-UHFFFAOYSA-N Phosphorous acid Chemical group OP(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 claims description 5
- 125000003277 amino group Chemical group 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 5
- 238000002360 preparation method Methods 0.000 claims description 5
- 125000000656 azaniumyl group Chemical group [H][N+]([H])([H])[*] 0.000 claims description 3
- 125000000394 phosphonato group Chemical group [O-]P([O-])(*)=O 0.000 claims description 3
- 230000005654 stationary process Effects 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 55
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 36
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 30
- 125000004432 carbon atom Chemical group C* 0.000 description 29
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 24
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 24
- 125000003700 epoxy group Chemical group 0.000 description 24
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 18
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 17
- 125000002723 alicyclic group Chemical group 0.000 description 16
- 239000003822 epoxy resin Substances 0.000 description 16
- 150000002430 hydrocarbons Chemical group 0.000 description 16
- 229920000647 polyepoxide Polymers 0.000 description 16
- 230000000052 comparative effect Effects 0.000 description 15
- 239000000243 solution Substances 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 14
- 238000001308 synthesis method Methods 0.000 description 14
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 12
- HFBMWMNUJJDEQZ-UHFFFAOYSA-N acryloyl chloride Chemical compound ClC(=O)C=C HFBMWMNUJJDEQZ-UHFFFAOYSA-N 0.000 description 12
- 125000000217 alkyl group Chemical group 0.000 description 12
- 238000004440 column chromatography Methods 0.000 description 12
- OAYLNYINCPYISS-UHFFFAOYSA-N ethyl acetate;hexane Chemical compound CCCCCC.CCOC(C)=O OAYLNYINCPYISS-UHFFFAOYSA-N 0.000 description 12
- 239000000284 extract Substances 0.000 description 12
- 229910052943 magnesium sulfate Inorganic materials 0.000 description 12
- 235000019341 magnesium sulphate Nutrition 0.000 description 12
- 238000000746 purification Methods 0.000 description 12
- 229920006395 saturated elastomer Polymers 0.000 description 12
- 239000000741 silica gel Substances 0.000 description 12
- 229910002027 silica gel Inorganic materials 0.000 description 12
- 239000007787 solid Substances 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- 239000000758 substrate Substances 0.000 description 11
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 10
- 125000001424 substituent group Chemical group 0.000 description 10
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 9
- 239000006229 carbon black Substances 0.000 description 9
- 235000019241 carbon black Nutrition 0.000 description 9
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 239000011159 matrix material Substances 0.000 description 8
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 8
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 7
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 7
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 7
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 6
- 230000032683 aging Effects 0.000 description 6
- 125000003342 alkenyl group Chemical group 0.000 description 6
- 125000003118 aryl group Chemical group 0.000 description 6
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 6
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 6
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 5
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 5
- 239000002253 acid Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 229940125904 compound 1 Drugs 0.000 description 5
- 125000004093 cyano group Chemical group *C#N 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 125000005842 heteroatom Chemical group 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 5
- YBYIRNPNPLQARY-UHFFFAOYSA-N 1H-indene Chemical compound C1=CC=C2CC=CC2=C1 YBYIRNPNPLQARY-UHFFFAOYSA-N 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 4
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 4
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 4
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 4
- 125000004018 acid anhydride group Chemical group 0.000 description 4
- 125000002252 acyl group Chemical group 0.000 description 4
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 4
- 125000003710 aryl alkyl group Chemical group 0.000 description 4
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 4
- 125000000392 cycloalkenyl group Chemical group 0.000 description 4
- 125000000753 cycloalkyl group Chemical group 0.000 description 4
- 125000006575 electron-withdrawing group Chemical group 0.000 description 4
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 4
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 4
- 125000001072 heteroaryl group Chemical group 0.000 description 4
- 125000000592 heterocycloalkyl group Chemical group 0.000 description 4
- 125000002950 monocyclic group Chemical group 0.000 description 4
- 239000012860 organic pigment Substances 0.000 description 4
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical compound C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 4
- 125000003367 polycyclic group Chemical group 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 4
- 229920002554 vinyl polymer Polymers 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 3
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 150000002148 esters Chemical class 0.000 description 3
- 150000002170 ethers Chemical class 0.000 description 3
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 3
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 3
- 235000011187 glycerol Nutrition 0.000 description 3
- 125000004836 hexamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 3
- 230000001771 impaired effect Effects 0.000 description 3
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 3
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 3
- 125000004817 pentamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 3
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 3
- 230000000379 polymerizing effect Effects 0.000 description 3
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 3
- 238000007363 ring formation reaction Methods 0.000 description 3
- DTGKSKDOIYIVQL-WEDXCCLWSA-N (+)-borneol Chemical group C1C[C@@]2(C)[C@@H](O)C[C@@H]1C2(C)C DTGKSKDOIYIVQL-WEDXCCLWSA-N 0.000 description 2
- GHYOCDFICYLMRF-UTIIJYGPSA-N (2S,3R)-N-[(2S)-3-(cyclopenten-1-yl)-1-[(2R)-2-methyloxiran-2-yl]-1-oxopropan-2-yl]-3-hydroxy-3-(4-methoxyphenyl)-2-[[(2S)-2-[(2-morpholin-4-ylacetyl)amino]propanoyl]amino]propanamide Chemical compound C1(=CCCC1)C[C@@H](C(=O)[C@@]1(OC1)C)NC([C@H]([C@@H](C1=CC=C(C=C1)OC)O)NC([C@H](C)NC(CN1CCOCC1)=O)=O)=O GHYOCDFICYLMRF-UTIIJYGPSA-N 0.000 description 2
- QFLWZFQWSBQYPS-AWRAUJHKSA-N (3S)-3-[[(2S)-2-[[(2S)-2-[5-[(3aS,6aR)-2-oxo-1,3,3a,4,6,6a-hexahydrothieno[3,4-d]imidazol-4-yl]pentanoylamino]-3-methylbutanoyl]amino]-3-(4-hydroxyphenyl)propanoyl]amino]-4-[1-bis(4-chlorophenoxy)phosphorylbutylamino]-4-oxobutanoic acid Chemical compound CCCC(NC(=O)[C@H](CC(O)=O)NC(=O)[C@H](Cc1ccc(O)cc1)NC(=O)[C@@H](NC(=O)CCCCC1SC[C@@H]2NC(=O)N[C@H]12)C(C)C)P(=O)(Oc1ccc(Cl)cc1)Oc1ccc(Cl)cc1 QFLWZFQWSBQYPS-AWRAUJHKSA-N 0.000 description 2
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- CNJRPYFBORAQAU-UHFFFAOYSA-N 1-ethoxy-2-(2-methoxyethoxy)ethane Chemical compound CCOCCOCCOC CNJRPYFBORAQAU-UHFFFAOYSA-N 0.000 description 2
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 2
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- OCKQMFDZQUFKRD-UHFFFAOYSA-N 2-[(3-ethenylphenyl)methoxymethyl]oxirane Chemical compound C=CC1=CC=CC(COCC2OC2)=C1 OCKQMFDZQUFKRD-UHFFFAOYSA-N 0.000 description 2
- ZADXFVHUPXKZBJ-UHFFFAOYSA-N 2-[(4-ethenylphenyl)methoxymethyl]oxirane Chemical compound C1=CC(C=C)=CC=C1COCC1OC1 ZADXFVHUPXKZBJ-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- DZZAHLOABNWIFA-UHFFFAOYSA-N 2-butoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCCCC)C(=O)C1=CC=CC=C1 DZZAHLOABNWIFA-UHFFFAOYSA-N 0.000 description 2
- PFFPODHCZWEBKM-UHFFFAOYSA-N 3-(4-methoxy-2-nitrophenyl)-2-methylprop-2-enoyl chloride Chemical compound COc1ccc(C=C(C)C(Cl)=O)c(c1)[N+]([O-])=O PFFPODHCZWEBKM-UHFFFAOYSA-N 0.000 description 2
- BJQGRUVVLDWMDY-UHFFFAOYSA-N 3-(4-methoxy-2-nitrophenyl)prop-2-enoyl chloride Chemical compound COc1ccc(C=CC(Cl)=O)c(c1)[N+]([O-])=O BJQGRUVVLDWMDY-UHFFFAOYSA-N 0.000 description 2
- DWDBCTBHAUDNOE-UHFFFAOYSA-N 3-(4-methoxy-3-nitrophenyl)-2-methylprop-2-enoyl chloride Chemical compound COc1ccc(C=C(C)C(Cl)=O)cc1[N+]([O-])=O DWDBCTBHAUDNOE-UHFFFAOYSA-N 0.000 description 2
- YPJNCOMBJRBZND-UHFFFAOYSA-N 3-(4-methoxy-3-nitrophenyl)prop-2-enoyl chloride Chemical compound COc1ccc(C=CC(Cl)=O)cc1[N+]([O-])=O YPJNCOMBJRBZND-UHFFFAOYSA-N 0.000 description 2
- ANDLWWYCCKSGHU-UHFFFAOYSA-N 3-(4-methoxyphenyl)-2-methylprop-2-enoyl chloride Chemical compound COC1=CC=C(C=C(C)C(Cl)=O)C=C1 ANDLWWYCCKSGHU-UHFFFAOYSA-N 0.000 description 2
- CGOJOQBYEAVATL-UHFFFAOYSA-N 3-(4-methoxyphenyl)prop-2-enoyl chloride Chemical compound COC1=CC=C(C=CC(Cl)=O)C=C1 CGOJOQBYEAVATL-UHFFFAOYSA-N 0.000 description 2
- OFNISBHGPNMTMS-UHFFFAOYSA-N 3-methylideneoxolane-2,5-dione Chemical compound C=C1CC(=O)OC1=O OFNISBHGPNMTMS-UHFFFAOYSA-N 0.000 description 2
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 2
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- FFOPEPMHKILNIT-UHFFFAOYSA-N Isopropyl butyrate Chemical compound CCCC(=O)OC(C)C FFOPEPMHKILNIT-UHFFFAOYSA-N 0.000 description 2
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical class OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 2
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 2
- 150000003926 acrylamides Chemical class 0.000 description 2
- 125000004423 acyloxy group Chemical group 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 125000001931 aliphatic group Chemical group 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
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- KOZCZZVUFDCZGG-UHFFFAOYSA-N vinyl benzoate Chemical compound C=COC(=O)C1=CC=CC=C1 KOZCZZVUFDCZGG-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D295/00—Heterocyclic compounds containing polymethylene-imine rings with at least five ring members, 3-azabicyclo [3.2.2] nonane, piperazine, morpholine or thiomorpholine rings, having only hydrogen atoms directly attached to the ring carbon atoms
- C07D295/16—Heterocyclic compounds containing polymethylene-imine rings with at least five ring members, 3-azabicyclo [3.2.2] nonane, piperazine, morpholine or thiomorpholine rings, having only hydrogen atoms directly attached to the ring carbon atoms acylated on ring nitrogen atoms
- C07D295/18—Heterocyclic compounds containing polymethylene-imine rings with at least five ring members, 3-azabicyclo [3.2.2] nonane, piperazine, morpholine or thiomorpholine rings, having only hydrogen atoms directly attached to the ring carbon atoms acylated on ring nitrogen atoms by radicals derived from carboxylic acids, or sulfur or nitrogen analogues thereof
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B67/00—Influencing the physical, e.g. the dyeing or printing properties of dyestuffs without chemical reactions, e.g. by treating with solvents grinding or grinding assistants, coating of pigments or dyes; Process features in the making of dyestuff preparations; Dyestuff preparations of a special physical nature, e.g. tablets, films
- C09B67/0033—Blends of pigments; Mixtured crystals; Solid solutions
- C09B67/0041—Blends of pigments; Mixtured crystals; Solid solutions mixtures containing one azo dye
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
- G02B5/223—Absorbing filters containing organic substances, e.g. dyes, inks or pigments
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/085—Photosensitive compositions characterised by adhesion-promoting non-macromolecular additives
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials For Photolithography (AREA)
- Pigments, Carbon Blacks, Or Wood Stains (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Description
本発明は、顔料分散液及びそれを用いた感光性樹脂組成物の製造方法に関し、特に液晶パネル等のディスプレイに用いられるブラックマトリクス及び/又はカラーフィルタを形成するための感光性樹脂組成物に好適な顔料分散液及びそれを用いた感光性樹脂組成物の製造方法に関する。 The present invention relates to a pigment dispersion and a method for producing a photosensitive resin composition using the same, and particularly suitable for a photosensitive resin composition for forming a black matrix and / or a color filter used in a display such as a liquid crystal panel. The present invention relates to a pigment dispersion and a method for producing a photosensitive resin composition using the same.
液晶パネルは、画像のコントラストを強調するためのブラックマトリクスや、一般に赤(R)、緑(G)、及び青(B)の各色からなるRGBの着色層が形成されたカラーフィルタを備えている。これらのブラックマトリクスやカラーフィルタは、黒色又は各色の顔料が分散された感光性樹脂組成物を基板に塗布し、乾燥した後、得られた塗膜を露光、現像し、所望のパターンを形成することの繰り返しにより形成される。 The liquid crystal panel includes a black matrix for enhancing the contrast of an image, and a color filter in which an RGB colored layer generally composed of red (R), green (G), and blue (B) colors is formed. . In these black matrixes and color filters, a photosensitive resin composition in which black or each color pigment is dispersed is applied to a substrate and dried, and then the obtained coating film is exposed and developed to form a desired pattern. It is formed by repeating.
近年、より一層の生産性向上の観点から、このような感光性樹脂組成物としては、低露光量でも良好な形状のパターンを形成可能であることが求められている。また、製品の信頼性を確保するため、上記感光性樹脂組成物には、微小パターンを形成した場合にも基板に密着するような高い密着性を有することが求められている。 In recent years, from the viewpoint of further improving productivity, such a photosensitive resin composition is required to be able to form a pattern having a good shape even with a low exposure amount. Moreover, in order to ensure the reliability of a product, the said photosensitive resin composition is calculated | required to have high adhesiveness which closely_contact | adheres to a board | substrate, even when a micro pattern is formed.
上記感光性樹脂組成物を製造するためには、顔料を分散させた顔料分散液が用いられる。例えば、特許文献1には、顔料と、分散媒と、カルボキシル基等を有する特定の有機化合物を含有する顔料分散液が開示されている。顔料分散液は、経時後であっても顔料の分散性が良好であることが求められている。
In order to produce the photosensitive resin composition, a pigment dispersion in which a pigment is dispersed is used. For example,
本発明は、このような従来の実情に鑑みてなされたものであり、例えば数日程度の経時後における顔料の分散性が良好であり、低露光量で高密着性の微小パターンを形成可能な感光性樹脂組成物を経時後でも与えることのできる顔料分散液及びそれを用いた感光性樹脂組成物の製造方法を提供することを目的とする。 The present invention has been made in view of such a conventional situation. For example, the dispersibility of the pigment is good after several days , and a fine pattern with high adhesion can be formed with a low exposure amount. It is an object of the present invention to provide a pigment dispersion capable of giving a photosensitive resin composition even after aging and a method for producing a photosensitive resin composition using the same.
本発明者らは鋭意検討した結果、顔料分散液に特定の化合物を添加することにより、上記課題を解決できることを見出し、本発明を完成するに至った。具体的には、本発明は以下のものを提供する。 As a result of intensive studies, the present inventors have found that the above problem can be solved by adding a specific compound to the pigment dispersion, and have completed the present invention. Specifically, the present invention provides the following.
本発明の第一の態様は、顔料と、溶剤と、下記式(1)で表される化合物とを含有する顔料分散液である。 A first aspect of the present invention is a pigment dispersion containing a pigment, a solvent, and a compound represented by the following formula (1).
本発明の第二の態様は、アルカリ可溶性樹脂と、光重合性モノマーと、光重合開始剤と、上記顔料分散液とを混合する工程を含む、感光性樹脂組成物の製造方法である。 The 2nd aspect of this invention is a manufacturing method of the photosensitive resin composition including the process of mixing an alkali-soluble resin, a photopolymerizable monomer, a photoinitiator, and the said pigment dispersion.
本発明によれば、経時後における顔料の分散性が良好であり、低露光量で高密着性の微小パターンを形成可能な感光性樹脂組成物を経時後でも与えることのできる顔料分散液及びそれを用いた感光性樹脂組成物の製造方法を提供することができる。 According to the present invention, a pigment dispersion capable of providing a photosensitive resin composition having good dispersibility of a pigment after aging and capable of forming a fine pattern with a low exposure amount and high adhesion even after aging, and the pigment dispersion The manufacturing method of the photosensitive resin composition using this can be provided.
<顔料分散液>
本発明に係る顔料分散液は、顔料と、溶剤と、上記式(1)で表される化合物とを少なくとも含有する。なお、本発明に係る顔料分散液は、光重合性モノマー等の光重合性化合物や光重合開始剤を含有しない。
<Pigment dispersion>
The pigment dispersion according to the present invention contains at least a pigment, a solvent, and a compound represented by the above formula (1). The pigment dispersion according to the present invention does not contain a photopolymerizable compound such as a photopolymerizable monomer or a photopolymerization initiator.
[顔料]
本発明に係る顔料分散液は、顔料を含有する。本発明に係る顔料分散液は、顔料を含有することにより、例えば、液晶表示ディスプレイのカラーフィルタ形成用途として好ましく使用される。また、本発明に係る顔料分散液は、顔料として遮光剤を含むことにより、例えば、カラーフィルタにおけるブラックマトリクス形成用途として好ましく使用される。顔料は、単独で又は2種以上組み合わせて用いることができる。
[Pigment]
The pigment dispersion according to the present invention contains a pigment. The pigment dispersion according to the present invention is preferably used, for example, as a color filter forming application for a liquid crystal display by containing a pigment. Further, the pigment dispersion according to the present invention is preferably used, for example, as a black matrix forming application in a color filter by containing a light shielding agent as a pigment. The pigments can be used alone or in combination of two or more.
顔料としては、特に限定されないが、例えば、カラーインデックス(C.I.;The Society of Dyers and Colourists社発行)においてピグメント(Pigment)に分類されている化合物、具体的には、下記のようなカラーインデックス(C.I.)番号が付されているものを用いることが好ましい。 Although it does not specifically limit as a pigment, For example, the compound classified into the pigment (Pigment) in the color index (CI; issue of The Society of Dyers and Colorists), for example, the following color It is preferable to use an index (CI) number.
C.I.ピグメントイエロー1(以下、「C.I.ピグメントイエロー」は同様であり、番号のみを記載する。)、3、11、12、13、14、15、16、17、20、24、31、53、55、60、61、65、71、73、74、81、83、86、93、95、97、98、99、100、101、104、106、108、109、110、113、114、116、117、119、120、125、126、127、128、129、137、138、139、147、148、150、151、152、153、154、155、156、166、167、168、175、180、185;
C.I.ピグメントオレンジ1(以下、「C.I.ピグメントオレンジ」は同様であり、番号のみを記載する。)、5、13、14、16、17、24、34、36、38、40、43、46、49、51、55、59、61、63、64、71、73;
C.I.ピグメントバイオレット1(以下、「C.I.ピグメントバイオレット」は同様であり、番号のみを記載する。)、19、23、29、30、32、36、37、38、39、40、50;
C.I.ピグメントレッド1(以下、「C.I.ピグメントレッド」は同様であり、番号のみを記載する。)、2、3、4、5、6、7、8、9、10、11、12、14、15、16、17、18、19、21、22、23、30、31、32、37、38、40、41、42、48:1、48:2、48:3、48:4、49:1、49:2、50:1、52:1、53:1、57、57:1、57:2、58:2、58:4、60:1、63:1、63:2、64:1、81:1、83、88、90:1、97、101、102、104、105、106、108、112、113、114、122、123、144、146、149、150、151、155、166、168、170、171、172、174、175、176、177、178、179、180、185、187、188、190、192、193、194、202、206、207、208、209、215、216、217、220、223、224、226、227、228、240、242、243、245、254、255、264、265;
C.I.ピグメントブルー1(以下、「C.I.ピグメントブルー」は同様であり、番号のみを記載する。)、2、15、15:3、15:4、15:6、16、22、60、64、66;
C.I.ピグメントグリーン7、C.I.ピグメントグリーン36、C.I.ピグメントグリーン37;
C.I.ピグメントブラウン23、C.I.ピグメントブラウン25、C.I.ピグメントブラウン26、C.I.ピグメントブラウン28;
C.I.ピグメントブラック1、C.I.ピグメントブラック7。
C. I. Pigment Yellow 1 (hereinafter, “CI Pigment Yellow” is the same, and only the number is described) 3, 11, 12, 13, 14, 15, 16, 17, 20, 24, 31, 53 55, 60, 61, 65, 71, 73, 74, 81, 83, 86, 93, 95, 97, 98, 99, 100, 101, 104, 106, 108, 109, 110, 113, 114, 116 117, 119, 120, 125, 126, 127, 128, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 155, 156, 166, 167, 168, 175, 180 185;
C. I. Pigment Orange 1 (hereinafter, “CI Pigment Orange” is the same, and only the number is described) 5, 13, 14, 16, 17, 24, 34, 36, 38, 40, 43, 46 49, 51, 55, 59, 61, 63, 64, 71, 73;
C. I. Pigment Violet 1 (hereinafter, “CI Pigment Violet” is the same, and only the number is described), 19, 23, 29, 30, 32, 36, 37, 38, 39, 40, 50;
C. I. Pigment Red 1 (hereinafter, “CI Pigment Red” is the same, and only the number is described) 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 14 15, 16, 17, 18, 19, 21, 22, 23, 30, 31, 32, 37, 38, 40, 41, 42, 48: 1, 48: 2, 48: 3, 48: 4, 49 : 1, 49: 2, 50: 1, 52: 1, 53: 1, 57, 57: 1, 57: 2, 58: 2, 58: 4, 60: 1, 63: 1, 63: 2, 64 : 1, 81: 1, 83, 88, 90: 1, 97, 101, 102, 104, 105, 106, 108, 112, 113, 114, 122, 123, 144, 146, 149, 150, 151, 155 166, 168, 170, 171, 172, 174, 175, 176, 177, 78, 179, 180, 185, 187, 188, 190, 192, 193, 194, 202, 206, 207, 208, 209, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 242, 243, 245, 254, 255, 264, 265;
C. I. Pigment Blue 1 (hereinafter, “CI Pigment Blue” is the same, and only the number is described) 2, 15, 15: 3, 15: 4, 15: 6, 16, 22, 60, 64 66;
C. I. Pigment green 7, C.I. I. Pigment green 36, C.I. I. Pigment green 37;
C. I. Pigment brown 23, C.I. I. Pigment brown 25, C.I. I. Pigment brown 26, C.I. I. Pigment brown 28;
C. I. Pigment black 1, C.I. I. Pigment Black 7.
また、顔料を遮光剤とする場合、遮光剤としては黒色顔料を用いることが好ましい。黒色顔料としては、カーボンブラック、チタンブラック、銅、鉄、マンガン、コバルト、クロム、ニッケル、亜鉛、カルシウム、銀等の金属酸化物、複合酸化物、金属硫化物、金属硫酸塩、金属炭酸塩等、有機物、無機物を問わず各種の顔料を挙げることができる。これらの中でも、高い遮光性を有するカーボンブラックを用いることが好ましい。 Moreover, when using a pigment as a light shielding agent, it is preferable to use a black pigment as a light shielding agent. Black pigments include carbon black, titanium black, copper, iron, manganese, cobalt, chromium, nickel, zinc, calcium, silver and other metal oxides, composite oxides, metal sulfides, metal sulfates, metal carbonates, etc. Various pigments can be mentioned regardless of organic matter and inorganic matter. Among these, it is preferable to use carbon black having high light shielding properties.
カーボンブラックとしては、チャンネルブラック、ファーネスブラック、サーマルブラック、ランプブラック等の公知のカーボンブラックを用いることができるが、遮光性に優れるチャンネルブラックを用いることが好ましい。また、樹脂被覆カーボンブラックを使用してもよい。 As the carbon black, known carbon blacks such as channel black, furnace black, thermal black, and lamp black can be used, but it is preferable to use channel black having excellent light shielding properties. Resin-coated carbon black may also be used.
樹脂被覆カーボンブラックは、樹脂被覆のないカーボンブラックに比べて導電性が低いことから、液晶表示ディスプレイのブラックマトリクスとして使用した場合に電流のリークが少なく、信頼性の高い低消費電力のディスプレイを製造できる。 Resin-coated carbon black has lower electrical conductivity than carbon black without resin coating, so when used as a black matrix for liquid crystal display, it produces less current leakage and produces a highly reliable display with low power consumption. it can.
また、カーボンブラックの色調を調整するために、補助顔料として上記の有機顔料を適宜添加してもよい。 Moreover, in order to adjust the color tone of carbon black, you may add said organic pigment suitably as an auxiliary pigment.
また、無機顔料及び有機顔料は、それぞれ単独で用いてもよく、併用してもよいが、併用する場合には、無機顔料と有機顔料との総量100質量部に対して、有機顔料を10〜80質量部の範囲で用いることが好ましく、20〜40質量部の範囲で用いることがより好ましい。 In addition, the inorganic pigment and the organic pigment may be used alone or in combination, but when used in combination, the organic pigment is added in an amount of 10 to 10 parts by mass with respect to 100 parts by mass of the total amount of the inorganic pigment and the organic pigment. It is preferably used in the range of 80 parts by mass, and more preferably in the range of 20 to 40 parts by mass.
顔料の含有量は、本発明に係る顔料分散液の固形分に対して、5〜95質量%が好ましく、25〜90質量%がより好ましい。 The content of the pigment is preferably 5 to 95% by mass and more preferably 25 to 90% by mass with respect to the solid content of the pigment dispersion according to the present invention.
[溶剤]
本発明に係る顔料分散液における溶剤としては、例えば、エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、エチレングリコール−n−プロピルエーテル、エチレングリコールモノ−n−ブチルエーテル、ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、ジエチレングリコールモノ−n−プロピルエーテル、ジエチレングリコールモノ−n−ブチルエーテル、トリエチレングリコールモノメチルエーテル、トリエチレングリコールモノエチルエーテル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールモノ−n−プロピルエーテル、プロピレングリコールモノ−n−ブチルエーテル、ジプロピレングリコールモノメチルエーテル、ジプロピレングリコールモノエチルエーテル、ジプロピレングリコールモノ−n−プロピルエーテル、ジプロピレングリコールモノ−n−ブチルエーテル、トリプロピレングリコールモノメチルエーテル、トリプロピレングリコールモノエチルエーテル等の(ポリ)アルキレングリコールモノアルキルエーテル類;エチレングリコールモノメチルエーテルアセテート、エチレングリコールモノエチルエーテルアセテート、ジエチレングリコールモノメチルエーテルアセテート、ジエチレングリコールモノエチルエーテルアセテート、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート等の(ポリ)アルキレングリコールモノアルキルエーテルアセテート類;ジエチレングリコールジメチルエーテル、ジエチレングリコールメチルエチルエーテル、ジエチレングリコールジエチルエーテル、テトラヒドロフラン等の他のエーテル類;メチルエチルケトン、シクロヘキサノン、2−ヘプタノン、3−ヘプタノン等のケトン類;2−ヒドロキシプロピオン酸メチル、2−ヒドロキシプロピオン酸エチル等の乳酸アルキルエステル類;2−ヒドロキシ−2−メチルプロピオン酸エチル、3−メトキシプロピオン酸メチル、3−メトキシプロピオン酸エチル、3−エトキシプロピオン酸メチル、3−エトキシプロピオン酸エチル、エトキシ酢酸エチル、ヒドロキシ酢酸エチル、2−ヒドロキシ−3−メチル部炭酸メチル、3−メチル−3−メトキシブチルアセテート、3−メチル−3−メトキシブチルプロピオネート、酢酸エチル、酢酸n−プロピル、酢酸イソプロピル、酢酸n−ブチル、酢酸イソブチル、蟻酸n−ペンチル、酢酸イソペンチル、プロピオン酸n−ブチル、酪酸エチル、酪酸n−プロピル、酪酸イソプロピル、酪酸n−ブチル、ピルビン酸メチル、ピルビン酸エチル、ピルビン酸n−プロピル、アセト酢酸メチル、アセト酢酸エチル、2−オキソブタン酸エチル等の他のエステル類;トルエン、キシレン等の芳香族炭化水素類;N−メチルピロリドン、N,N−ジメチルホルムアミド、N,N−ジメチルアセトアミド等のアミド類等が挙げられる。溶剤は、単独で又は2種以上組み合わせて用いることができる。
[solvent]
Examples of the solvent in the pigment dispersion according to the present invention include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol-n-propyl ether, ethylene glycol mono-n-butyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, Diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether, propylene glycol Mono-n-butyl ether, dipropylene glycol (Poly) alkylene glycol monoalkyl such as monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether Ethers: (Poly) alkylene glycol monoalkyl ether acetates such as ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate Kind; di Other ethers such as tylene glycol dimethyl ether, diethylene glycol methyl ethyl ether, diethylene glycol diethyl ether, tetrahydrofuran; ketones such as methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone; methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate Alkyl lactates such as ethyl 2-hydroxy-2-methylpropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl ethoxyacetate, Hydroxyethyl acetate, 2-hydroxy-3-methyl methyl carbonate, 3-methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutylpropione , Ethyl acetate, n-propyl acetate, isopropyl acetate, n-butyl acetate, isobutyl acetate, n-pentyl formate, isopentyl acetate, n-butyl propionate, ethyl butyrate, n-propyl butyrate, isopropyl butyrate, n-butyrate Other esters such as butyl, methyl pyruvate, ethyl pyruvate, n-propyl pyruvate, methyl acetoacetate, ethyl acetoacetate and ethyl 2-oxobutanoate; aromatic hydrocarbons such as toluene and xylene; N-methyl Examples include pyrrolidone, N, N-dimethylformamide, amides such as N, N-dimethylacetamide, and the like. A solvent can be used individually or in combination of 2 or more types.
上記溶剤の中でも、プロピレングリコールモノメチルエーテル、エチレングリコールモノメチルエーテルアセテート、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート、ジエチレングリコールジメチルエーテル、ジエチレングリコールメチルエチルエーテル、シクロヘキサノン、3−メトキシブチルアセテートは、後述のアルカリ可溶性樹脂、光重合性モノマー、及び光重合開始剤、並びに上記式(1)で表される化合物に対して優れた溶解性を示すとともに、上記顔料の分散性を良好にすることができるため好ましく、プロピレングリコールモノメチルエーテルアセテート、3−メトキシブチルアセテートを用いることが特に好ましい。 Among the above solvents, propylene glycol monomethyl ether, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, diethylene glycol dimethyl ether, diethylene glycol methyl ethyl ether, cyclohexanone, and 3-methoxybutyl acetate are alkali-soluble as described below. The resin, the photopolymerizable monomer, the photopolymerization initiator, and the compound represented by the above formula (1) exhibit excellent solubility and are preferable because the dispersibility of the pigment can be improved. It is particularly preferable to use propylene glycol monomethyl ether acetate or 3-methoxybutyl acetate.
溶剤の含有量は、本発明に係る顔料分散液の固形分濃度が1〜50質量%となる量が好ましく、5〜30質量%となる量がより好ましい。 The amount of the solvent is preferably such that the solid content concentration of the pigment dispersion according to the present invention is 1 to 50% by mass, and more preferably 5 to 30% by mass.
[式(1)で表される化合物]
本発明に係る顔料分散液は、下記式(1)で表される化合物を含有する。顔料分散液は、下記式(1)で表される化合物を含有すると、経時後であっても顔料の分散性が良好となりやすい。また、下記式(1)で表される化合物を含有する顔料分散液を経時後に感光性樹脂組成物の調製に用いた場合であっても、得られる感光性樹脂組成物は、低露光量で高密着性の微小パターンを形成することができる。下記式(1)で表される化合物は、単独で又は2種以上組み合わせて用いることができる。
[Compound represented by Formula (1)]
The pigment dispersion according to the present invention contains a compound represented by the following formula (1). When the pigment dispersion contains a compound represented by the following formula (1), the dispersibility of the pigment tends to be good even after aging. Moreover, even when the pigment dispersion containing the compound represented by the following formula (1) is used for the preparation of the photosensitive resin composition after the lapse of time, the resulting photosensitive resin composition has a low exposure amount. A highly adhesive micropattern can be formed. The compounds represented by the following formula (1) can be used alone or in combination of two or more.
上記式(1)中、R1及びR2は、それぞれ独立に水素原子又は有機基を示すが、R1及びR2の少なくとも一方は有機基を示す。
R1及びR2における有機基としては、アルキル基、アルケニル基、シクロアルキル基、シクロアルケニル基、アリール基、アラルキル基等が挙げられる。この有機基は、該有機基中にヘテロ原子等の炭化水素基以外の結合や置換基を含んでいてもよい。また、この有機基は、直鎖状、分岐鎖状、環状のいずれでもよい。
この有機基は、通常は1価であるが、環状構造を形成する場合等には、2価以上の有機基となり得る。
In the above formula (1), R 1 and R 2 each independently represent a hydrogen atom or an organic group, but at least one of R 1 and R 2 represents an organic group.
Examples of the organic group in R 1 and R 2 include an alkyl group, an alkenyl group, a cycloalkyl group, a cycloalkenyl group, an aryl group, and an aralkyl group. This organic group may contain a bond or substituent other than a hydrocarbon group such as a hetero atom in the organic group. The organic group may be linear, branched or cyclic.
This organic group is usually monovalent, but can be a divalent or higher organic group when a cyclic structure is formed.
R1及びR2は、それらが結合して環状構造を形成していてもよく、ヘテロ原子の結合を更に含んでいてもよい。環状構造としては、ヘテロシクロアルキル基、ヘテロアリール基等が挙げられ、縮合環であってもよい。 R 1 and R 2 may be bonded to each other to form a cyclic structure, and may further include a hetero atom bond. Examples of the cyclic structure include a heterocycloalkyl group and a heteroaryl group, and may be a condensed ring.
R1及びR2の有機基中の炭化水素基以外の結合としては、本発明の効果が損なわれない限り特に限定されず、酸素原子、窒素原子、珪素原子等のヘテロ原子を含む結合が挙げられる。具体例としては、エーテル結合、チオエーテル結合、カルボニル結合、チオカルボニル結合、エステル結合、アミド結合、ウレタン結合、イミノ結合(−N=C(−R)−、−C(=NR)−:Rは水素原子又は有機基を示す)、カーボネート結合、スルホニル結合、スルフィニル結合、アゾ結合等が挙げられる。
耐熱性の観点から、R1及びR2の有機基中の炭化水素基以外の結合としては、エーテル結合、チオエーテル結合、カルボニル結合、チオカルボニル結合、エステル結合、アミド結合、ウレタン結合、イミノ結合(−N=C(−R)−、−C(=NR)−:Rは水素原子又は1価の有機基を示す)、カーボネート結合、スルホニル結合、スルフィニル結合が好ましい。
The bond other than the hydrocarbon group in the organic group of R 1 and R 2 is not particularly limited as long as the effect of the present invention is not impaired, and includes a bond containing a hetero atom such as an oxygen atom, a nitrogen atom, or a silicon atom. It is done. Specific examples include an ether bond, a thioether bond, a carbonyl bond, a thiocarbonyl bond, an ester bond, an amide bond, a urethane bond, an imino bond (—N═C (—R) —, —C (═NR) —: R is A hydrogen atom or an organic group), a carbonate bond, a sulfonyl bond, a sulfinyl bond, an azo bond, and the like.
From the viewpoint of heat resistance, the bond other than the hydrocarbon group in the organic group of R 1 and R 2 includes an ether bond, a thioether bond, a carbonyl bond, a thiocarbonyl bond, an ester bond, an amide bond, a urethane bond, an imino bond ( -N = C (-R)-, -C (= NR)-: R represents a hydrogen atom or a monovalent organic group), a carbonate bond, a sulfonyl bond, or a sulfinyl bond.
R1及びR2の有機基中の炭化水素基以外の置換基としては、本発明の効果が損なわれない限り特に限定されず、ハロゲン原子、水酸基、メルカプト基、スルフィド基、シアノ基、イソシアノ基、シアナト基、イソシアナト基、チオシアナト基、イソチオシアナト基、シリル基、シラノール基、アルコキシ基、アルコキシカルボニル基、カルバモイル基、チオカルバモイル基、ニトロ基、ニトロソ基、カルボキシル基、カルボキシラート基、アシル基、アシルオキシ基、スルフィノ基、スルホ基、スルホナト基、ホスフィノ基、ホスフィニル基、ホスホノ基、ホスホナト基、ヒドロキシイミノ基、アルキルエーテル基、アルケニルエーテル基、アルキルチオエーテル基、アルケニルチオエーテル基、アリールエーテル基、アリールチオエーテル基、アミノ基(−NH2、−NHR、−NRR’:R及びR’はそれぞれ独立に炭化水素基を示す)等が挙げられる。上記置換基に含まれる水素原子は、炭化水素基によって置換されていてもよい。また、上記置換基に含まれる炭化水素基は、直鎖状、分岐鎖状、及び環状のいずれでもよい。
R1及びR2の有機基中の炭化水素基以外の置換基としては、ハロゲン原子、水酸基、メルカプト基、スルフィド基、シアノ基、イソシアノ基、シアナト基、イソシアナト基、チオシアナト基、イソチオシアナト基、シリル基、シラノール基、アルコキシ基、アルコキシカルボニル基、カルバモイル基、チオカルバモイル基、ニトロ基、ニトロソ基、カルボキシル基、カルボキシラート基、アシル基、アシルオキシ基、スルフィノ基、スルホ基、スルホナト基、ホスフィノ基、ホスフィニル基、ホスホノ基、ホスホナト基、ヒドロキシイミノ基、アルキルエーテル基、アルケニルエーテル基、アルキルチオエーテル基、アルケニルチオエーテル基、アリールエーテル基、アリールチオエーテル基が好ましい。
The substituent other than the hydrocarbon group in the organic group of R 1 and R 2 is not particularly limited as long as the effect of the present invention is not impaired, and is a halogen atom, a hydroxyl group, a mercapto group, a sulfide group, a cyano group, an isocyano group. , Cyanato group, isocyanato group, thiocyanato group, isothiocyanato group, silyl group, silanol group, alkoxy group, alkoxycarbonyl group, carbamoyl group, thiocarbamoyl group, nitro group, nitroso group, carboxyl group, carboxylate group, acyl group, acyloxy Group, sulfino group, sulfo group, sulfonate group, phosphino group, phosphinyl group, phosphono group, phosphonate group, hydroxyimino group, alkyl ether group, alkenyl ether group, alkyl thioether group, alkenyl thioether group, aryl ether group, aryl thioether Group, an amino group (-NH 2, -NHR, -NRR ' : R and R' each independently represent a hydrocarbon group). The hydrogen atom contained in the substituent may be substituted with a hydrocarbon group. Further, the hydrocarbon group contained in the substituent may be linear, branched, or cyclic.
Substituents other than hydrocarbon groups in the organic groups of R 1 and R 2 include halogen atoms, hydroxyl groups, mercapto groups, sulfide groups, cyano groups, isocyano groups, cyanato groups, isocyanato groups, thiocyanato groups, isothiocyanato groups, silyl groups. Group, silanol group, alkoxy group, alkoxycarbonyl group, carbamoyl group, thiocarbamoyl group, nitro group, nitroso group, carboxyl group, carboxylate group, acyl group, acyloxy group, sulfino group, sulfo group, sulfonate group, phosphino group, A phosphinyl group, a phosphono group, a phosphonato group, a hydroxyimino group, an alkyl ether group, an alkenyl ether group, an alkyl thioether group, an alkenyl thioether group, an aryl ether group, and an aryl thioether group are preferred.
以上の中でも、R1及びR2としては、少なくとも一方が炭素数1〜12のアルキル基若しくは炭素数1〜12のアリール基であるか、互いに結合して炭素数2〜20のヘテロシクロアルキル基若しくはヘテロアリール基を形成するものであることが好ましい。ヘテロシクロアルキル基としては、ピペリジノ基、モルホリノ基等が挙げられ、ヘテロアリール基としては、イミダゾリル基、ピラゾリル基等が挙げられる。 Among the above, as R 1 and R 2 , at least one of them is an alkyl group having 1 to 12 carbon atoms or an aryl group having 1 to 12 carbon atoms, or a heterocycloalkyl group having 2 to 20 carbon atoms bonded to each other. Alternatively, it preferably forms a heteroaryl group. Examples of the heterocycloalkyl group include a piperidino group and a morpholino group, and examples of the heteroaryl group include an imidazolyl group and a pyrazolyl group.
上記式(1)中、R3は、単結合又は有機基を示す。
R3における有機基としては、アルキル基、アルケニル基、シクロアルキル基、シクロアルケニル基、アリール基、アラルキル基等から1個の水素原子を除いた基が挙げられる。この有機基は、該有機基中に置換基を含んでいてもよい。置換基としては、R1及びR2において例示したものが挙げられる。また、この有機基は、直鎖状、分岐鎖状のいずれでもよい。
In the above formula (1), R 3 represents a single bond or an organic group.
Examples of the organic group for R 3 include groups in which one hydrogen atom has been removed from an alkyl group, alkenyl group, cycloalkyl group, cycloalkenyl group, aryl group, aralkyl group, and the like. This organic group may contain a substituent in the organic group. Examples of the substituent include those exemplified for R 1 and R 2 . Further, this organic group may be either linear or branched.
以上の中でも、R3としては、単結合、又は炭素数1〜12のアルキル基若しくは炭素数1〜12のアリール基から1個の水素原子を除いた基であることが好ましい。 Among these, R 3 is preferably a single bond, or a group in which one hydrogen atom is removed from an alkyl group having 1 to 12 carbon atoms or an aryl group having 1 to 12 carbon atoms.
上記式(1)中、R4及びR5は、それぞれ独立に水素原子、ハロゲン原子、水酸基、メルカプト基、スルフィド基、シリル基、シラノール基、ニトロ基、ニトロソ基、スルフィノ基、スルホ基、スルホナト基、ホスフィノ基、ホスフィニル基、ホスホノ基、ホスホナト基、又は有機基を示す。
R4及びR5における有機基としては、R1及びR2において例示したものが挙げられる。この有機基は、R1及びR2の場合と同様に、該有機基中にヘテロ原子等の炭化水素基以外の結合や置換基を含んでいてもよい。また、この有機基は、直鎖状、分岐鎖状、環状のいずれでもよい。
In the above formula (1), R 4 and R 5 are each independently a hydrogen atom, halogen atom, hydroxyl group, mercapto group, sulfide group, silyl group, silanol group, nitro group, nitroso group, sulfino group, sulfo group, sulfonate group. A group, a phosphino group, a phosphinyl group, a phosphono group, a phosphonate group, or an organic group;
Examples of the organic group for R 4 and R 5 include those exemplified for R 1 and R 2 . As in the case of R 1 and R 2 , this organic group may contain a bond or substituent other than a hydrocarbon group such as a hetero atom in the organic group. The organic group may be linear, branched or cyclic.
以上の中でも、R4及びR5としては、それぞれ独立に水素原子、炭素数1〜10のアルキル基、炭素数4〜13のシクロアルキル基、炭素数4〜13のシクロアルケニル基、炭素数7〜16のアリールオキシアルキル基、炭素数7〜20のアラルキル基、シアノ基を有する炭素数2〜11のアルキル基、水酸基を有する炭素数1〜10のアルキル基、炭素数1〜10のアルコキシ基、炭素数2〜11のアミド基、炭素数1〜10のアルキルチオ基、炭素数1〜10のアシル基、炭素数2〜11のエステル基(−COOR、−OCOR:Rは炭化水素基を示す)、炭素数6〜20のアリール基、電子供与性基及び/又は電子吸引性基が置換した炭素数6〜20のアリール基、電子供与性基及び/又は電子吸引性基が置換したベンジル基、シアノ基、メチルチオ基であることが好ましい。より好ましくは、R4及びR5の両方が水素原子であるか、又はR4がメチル基であり、R5が水素原子である。 Among these, R 4 and R 5 are each independently a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, a cycloalkyl group having 4 to 13 carbon atoms, a cycloalkenyl group having 4 to 13 carbon atoms, or 7 carbon atoms. -16 aryloxyalkyl group, C7-20 aralkyl group, C2-C11 alkyl group having a cyano group, C1-C10 alkyl group having a hydroxyl group, C1-C10 alkoxy group , An amide group having 2 to 11 carbon atoms, an alkylthio group having 1 to 10 carbon atoms, an acyl group having 1 to 10 carbon atoms, an ester group having 2 to 11 carbon atoms (-COOR, -OCOR: R represents a hydrocarbon group. ), An aryl group having 6 to 20 carbon atoms, an electron donating group and / or an electron withdrawing group substituted with an aryl group having 6 to 20 carbon atoms, an electron donating group and / or an electron withdrawing group substituted benzyl group , Amino group is preferably a methylthio group. More preferably, both R 4 and R 5 are hydrogen atoms, or R 4 is a methyl group and R 5 is a hydrogen atom.
上記式(1)中、R6、R7、R8、及びR9は、それぞれ独立に水素原子、ハロゲン原子、水酸基、メルカプト基、スルフィド基、シリル基、シラノール基、ニトロ基、ニトロソ基、スルフィノ基、スルホ基、スルホナト基、ホスフィノ基、ホスフィニル基、ホスホノ基、ホスホナト基、アミノ基、アンモニオ基、又は有機基を示す。
R6、R7、R8、及びR9における有機基としては、R1及びR2において例示したものが挙げられる。この有機基は、R1及びR2の場合と同様に、該有機基中にヘテロ原子等の炭化水素基以外の結合や置換基を含んでいてもよい。また、この有機基は、直鎖状、分岐鎖状、環状のいずれでもよい。
In the above formula (1), R 6 , R 7 , R 8 and R 9 are each independently a hydrogen atom, halogen atom, hydroxyl group, mercapto group, sulfide group, silyl group, silanol group, nitro group, nitroso group, A sulfino group, a sulfo group, a sulfonate group, a phosphino group, a phosphinyl group, a phosphono group, a phosphonate group, an amino group, an ammonio group, or an organic group is shown.
Examples of the organic group for R 6 , R 7 , R 8 , and R 9 include those exemplified for R 1 and R 2 . As in the case of R 1 and R 2 , this organic group may contain a bond or substituent other than a hydrocarbon group such as a hetero atom in the organic group. The organic group may be linear, branched or cyclic.
なお、上記式(1)中、R6及びR7が水酸基となることはない。R6又はR7が水酸基である場合、特許文献2に記載されているとおり、電磁波照射及び加熱によって環化反応が生じる。このため、このような化合物を感光性樹脂組成物に含有させても、光エネルギが環化のために消費され、良好な微小パターニング特性を得ることができない。これに対して上記式(1)で表される化合物は、R6及びR7が水酸基となることはないため、環化反応は生じず、感光性樹脂組成物に含有させた際に良好な微小パターニング特性を得ることが可能である。
In the above formula (1), R 6 and R 7 do not become a hydroxyl group. When R 6 or R 7 is a hydroxyl group, as described in
R6、R7、R8、及びR9は、それらの2つ以上が結合して環状構造を形成していてもよく、ヘテロ原子の結合を含んでいてもよい。環状構造としては、ヘテロシクロアルキル基、ヘテロアリール基等が挙げられ、縮合環であってもよい。例えば、R6、R7、R8、及びR9は、それらの2つ以上が結合して、R6、R7、R8、及びR9が結合しているベンゼン環の原子を共有してナフタレン、アントラセン、フェナントレン、インデン等の縮合環を形成してもよい。 Two or more of R 6 , R 7 , R 8 , and R 9 may be bonded to form a cyclic structure, and may include a hetero atom bond. Examples of the cyclic structure include a heterocycloalkyl group and a heteroaryl group, and may be a condensed ring. For example, R 6, R 7, R 8, and R 9 may combine two or more of them, R 6, R 7, R 8, and share an atom of the benzene ring to which R 9 is attached A condensed ring such as naphthalene, anthracene, phenanthrene, and indene may be formed.
以上の中でも、R6、R7、R8、及びR9としては、それぞれ独立に水素原子、炭素数1〜10のアルキル基、炭素数4〜13のシクロアルキル基、炭素数4〜13のシクロアルケニル基、炭素数7〜16のアリールオキシアルキル基、炭素数7〜20のアラルキル基、シアノ基を有する炭素数2〜11のアルキル基、水酸基を有する炭素数1〜10のアルキル基、炭素数1〜10のアルコキシ基、炭素数2〜11のアミド基、炭素数1〜10のアルキルチオ基、炭素数1〜10のアシル基、炭素数2〜11のエステル基、炭素数6〜20のアリール基、電子供与性基及び/又は電子吸引性基が置換した炭素数6〜20のアリール基、電子供与性基及び/又は電子吸引性基が置換したベンジル基、シアノ基、メチルチオ基、ニトロ基であることが好ましい。
また、R6、R7、R8、及びR9としては、それらの2つ以上が結合して、R6、R7、R8、及びR9が結合しているベンゼン環の原子を共有してナフタレン、アントラセン、フェナントレン、インデン等の縮合環を形成している場合も、吸収波長が長波長化する点から好ましい。
より好ましくは、R6、R7、R8、及びR9の全てが水素原子であるか、又はR6、R7、R8、及びR9のいずれか1つがニトロ基であり、残り3つが水素原子である。
Among these, R 6 , R 7 , R 8 , and R 9 are each independently a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, a cycloalkyl group having 4 to 13 carbon atoms, or a group having 4 to 13 carbon atoms. A cycloalkenyl group, an aryloxyalkyl group having 7 to 16 carbon atoms, an aralkyl group having 7 to 20 carbon atoms, an alkyl group having 2 to 11 carbon atoms having a cyano group, an alkyl group having 1 to 10 carbon atoms having a hydroxyl group, carbon C1-C10 alkoxy group, C2-C11 amide group, C1-C10 alkylthio group, C1-C10 acyl group, C2-C11 ester group, C6-C20 Aryl group, electron donating group and / or electron withdrawing group substituted aryl group having 6 to 20 carbon atoms, electron donating group and / or electron withdrawing group substituted benzyl group, cyano group, methylthio group, nitro On the basis Preferably there is.
In addition, as R 6 , R 7 , R 8 , and R 9 , two or more of them are bonded to share a benzene ring atom to which R 6 , R 7 , R 8 , and R 9 are bonded. In the case where condensed rings such as naphthalene, anthracene, phenanthrene, and indene are formed, it is preferable from the viewpoint that the absorption wavelength becomes longer.
More preferably, all of R 6 , R 7 , R 8 , and R 9 are hydrogen atoms, or any one of R 6 , R 7 , R 8 , and R 9 is a nitro group, and the remaining 3 One is a hydrogen atom.
上記式(1)中、R10は、水素原子又は有機基を示す。
R10における有機基としては、R1及びR2において例示したものが挙げられる。この有機基は、R1及びR2の場合と同様に、該有機基中にヘテロ原子等の炭化水素基以外の結合や置換基を含んでいてもよい。また、この有機基は、直鎖状、分岐鎖状、環状のいずれでもよい。
上記式(1)で表される化合物は、ベンゼン環のパラ位に−OR10基を有するため、有機溶剤への溶解性が良好である。
In the formula (1), R 10 represents a hydrogen atom or an organic group.
Examples of the organic group for R 10 include those exemplified for R 1 and R 2 . As in the case of R 1 and R 2 , this organic group may contain a bond or substituent other than a hydrocarbon group such as a hetero atom in the organic group. The organic group may be linear, branched or cyclic.
Since the compound represented by the above formula (1) has an —OR 10 group at the para-position of the benzene ring, the solubility in an organic solvent is good.
以上の中でも、R10としては、水素原子、又は炭素数1〜12のアルキル基であることが好ましく、メチル基であることがより好ましい。 Among these, R 10 is preferably a hydrogen atom or an alkyl group having 1 to 12 carbon atoms, and more preferably a methyl group.
上記式(1)で表される化合物のうち、特に好ましい具体例としては、下記式で表される化合物が挙げられる。 Among the compounds represented by the above formula (1), particularly preferred specific examples include compounds represented by the following formulas.
上記式(1)で表される化合物の合成方法は特に限定されないが、後述する実施例に記載される方法に従って合成することが可能である。 The method for synthesizing the compound represented by the above formula (1) is not particularly limited, but it can be synthesized according to the method described in Examples described later.
本発明に係る顔料分散液において、上記式(1)で表される化合物の含有量は、本発明の目的を阻害しない範囲で特に限定されない。上記式(1)で表される化合物の含有量は、典型的には、顔料100質量部に対して、0.1〜30質量部であることが好ましく、0.5〜20質量部であることがより好ましい。上記式(1)で表される化合物の含有量をかかる範囲とすることにより、得られる顔料分散液は、経時後であっても顔料の分散性が良好となりやすい。また、上記式(1)で表される化合物の含有量が上記の範囲である顔料分散液は、低露光量で高密着性の微小パターンを形成することができる感光性樹脂組成物を調製するのに好適に用いることができる。 In the pigment dispersion according to the present invention, the content of the compound represented by the formula (1) is not particularly limited as long as the object of the present invention is not impaired. The content of the compound represented by the formula (1) is typically preferably 0.1 to 30 parts by mass, and 0.5 to 20 parts by mass with respect to 100 parts by mass of the pigment. It is more preferable. By setting the content of the compound represented by the above formula (1) in such a range, the resulting pigment dispersion is likely to have good pigment dispersibility even after aging. Moreover, the pigment dispersion liquid in which the content of the compound represented by the formula (1) is in the above range prepares a photosensitive resin composition capable of forming a fine pattern with high adhesion at a low exposure amount. It can be used suitably.
[分散剤]
本発明に係る顔料分散液は、分散剤を更に含有してもよい。上記顔料分散液が分散剤を含有すると、上記顔料分散液において、顔料が均一に分散しやすくなる。分散剤は、単独で用いてもよく、2種以上を併用してもよい。
[Dispersant]
The pigment dispersion according to the present invention may further contain a dispersant. When the pigment dispersion contains a dispersant, the pigment is easily dispersed uniformly in the pigment dispersion. A dispersing agent may be used independently and may use 2 or more types together.
分散剤としては、公知のものが挙げられ、ポリエチレンイミン系高分子分散剤、ウレタン樹脂系高分子分散剤、アクリル樹脂系高分子分散剤を用いることが好ましい。特に、顔料としてカーボンブラックを用いる場合には、分散剤としてアクリル樹脂系高分子分散剤を用いることが好ましい。 Examples of the dispersant include known ones, and it is preferable to use a polyethyleneimine polymer dispersant, a urethane resin polymer dispersant, and an acrylic resin polymer dispersant. In particular, when carbon black is used as the pigment, it is preferable to use an acrylic resin polymer dispersant as the dispersant.
本発明に係る顔料分散液において、分散剤の含有量は、顔料100質量部に対して、0.1〜30質量部であることが好ましく、0.5〜20質量部であることがより好ましい。分散剤の含有量が上記の範囲であると、本発明に係る顔料分散液における顔料の均一な分散が更に容易になる。 In the pigment dispersion according to the present invention, the content of the dispersant is preferably 0.1 to 30 parts by mass, and more preferably 0.5 to 20 parts by mass with respect to 100 parts by mass of the pigment. . When the content of the dispersant is in the above range, uniform dispersion of the pigment in the pigment dispersion according to the present invention is further facilitated.
[顔料分散液の調製方法]
本発明に係る顔料分散液は、顔料、溶剤、下記式(1)で表される化合物、及び必要に応じて分散剤を3本ロールミル、ボールミル、サンドミル等の撹拌機で混合(分散・混練)し、必要に応じて5μmメンブランフィルタ等のフィルタで濾過して調製することができる。
[Method for preparing pigment dispersion]
In the pigment dispersion according to the present invention, a pigment, a solvent, a compound represented by the following formula (1), and a dispersant as necessary are mixed (dispersed and kneaded) with a stirrer such as a three-roll mill, a ball mill, or a sand mill. And it can prepare by filtering with filters, such as a 5 micrometer membrane filter, as needed.
<感光性樹脂組成物>
本発明に係る感光性樹脂組成物の製造方法により得られる感光性樹脂組成物は、アルカリ可溶性樹脂と、光重合性モノマーと、光重合開始剤と、本発明に係る顔料分散液とを少なくとも含有する。
<Photosensitive resin composition>
The photosensitive resin composition obtained by the method for producing a photosensitive resin composition according to the present invention contains at least an alkali-soluble resin, a photopolymerizable monomer, a photopolymerization initiator, and a pigment dispersion according to the present invention. To do.
[アルカリ可溶性樹脂]
アルカリ可溶性樹脂とは、樹脂濃度20質量%の樹脂溶液(溶媒:プロピレングリコールモノメチルエーテルアセテート)により、膜厚1μmの樹脂膜を基板上に形成し、濃度0.05質量%のKOH水溶液に1分間浸漬した際に、膜厚0.01μm以上溶解するものをいう。
[Alkali-soluble resin]
The alkali-soluble resin is a resin film having a resin concentration of 20% by mass (solvent: propylene glycol monomethyl ether acetate), and a 1 μm-thick resin film is formed on the substrate and placed in a 0.05% by mass KOH aqueous solution for 1 minute. When immersed, it means a film that dissolves 0.01 μm or more in thickness.
アルカリ可溶性樹脂としては、上述のアルカリ可溶性を示す樹脂であれば特に限定されず、従来公知のアルカリ可溶性樹脂を用いることができる。アルカリ可溶性樹脂は、単独で又は2種以上組み合わせて用いることができる。 The alkali-soluble resin is not particularly limited as long as it is a resin exhibiting alkali solubility as described above, and a conventionally known alkali-soluble resin can be used. The alkali-soluble resins can be used alone or in combination of two or more.
好適なアルカリ可溶性樹脂の一例としては、(A1)カルド構造を有する樹脂が挙げられる。(A1)カルド構造を有する樹脂としては、特に限定されるものではなく、従来公知の樹脂を用いることができる。その中でも、下記式(a−1)で表される樹脂が好ましい。 An example of a suitable alkali-soluble resin is (A1) a resin having a cardo structure. (A1) The resin having a cardo structure is not particularly limited, and conventionally known resins can be used. Among these, the resin represented by the following formula (a-1) is preferable.
上記式(a−1)中、Xaは、下記式(a−2)で表される基を示す。 In the formula (a-1), X a represents a group represented by the following formula (a-2).
上記式(a−2)中、Ra1は、それぞれ独立に水素原子、炭素数1〜6の炭化水素基、又はハロゲン原子を示し、Ra2は、それぞれ独立に水素原子又はメチル基を示し、Waは、単結合又は下記式(a−3)で表される基を示す。 In the above formula (a-2), each R a1 independently represents a hydrogen atom, a hydrocarbon group having 1 to 6 carbon atoms, or a halogen atom, each R a2 independently represents a hydrogen atom or a methyl group, W a represents a single bond or a group represented by the following formula (a-3).
また、上記式(a−1)中、Yaは、ジカルボン酸無水物から酸無水物基(−CO−O−CO−)を除いた残基を示す。ジカルボン酸無水物の例としては、無水マレイン酸、無水コハク酸、無水イタコン酸、無水フタル酸、無水テトラヒドロフタル酸、無水ヘキサヒドロフタル酸、無水メチルエンドメチレンテトラヒドロフタル酸、無水クロレンド酸、メチルテトラヒドロ無水フタル酸、無水グルタル酸等が挙げられる。 In the formula (a-1), Y a represents a residue obtained by removing an acid anhydride group (—CO—O—CO—) from a dicarboxylic acid anhydride. Examples of dicarboxylic acid anhydrides include maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methylendomethylenetetrahydrophthalic anhydride, chlorendic anhydride, methyltetrahydro Examples thereof include phthalic anhydride and glutaric anhydride.
また、上記式(a−1)中、Zaは、テトラカルボン酸二無水物から2個の酸無水物基を除いた残基を示す。テトラカルボン酸二無水物の例としては、ピロメリット酸二無水物、ベンゾフェノンテトラカルボン酸二無水物、ビフェニルテトラカルボン酸二無水物、ビフェニルエーテルテトラカルボン酸二無水物等が挙げられる。
また、上記式(a−1)中、mは、0〜20の整数を示す。
Further, in the above formula (a-1), Z a represents a residue obtained by removing two acid anhydride groups from a tetracarboxylic acid dianhydride. Examples of tetracarboxylic dianhydrides include pyromellitic dianhydride, benzophenone tetracarboxylic dianhydride, biphenyl tetracarboxylic dianhydride, biphenyl ether tetracarboxylic dianhydride, and the like.
Moreover, in said formula (a-1), m shows the integer of 0-20.
(A1)カルド構造を有する樹脂の質量平均分子量は、1000〜40000であることが好ましく、2000〜30000であることがより好ましい。上記の範囲とすることにより、良好な現像性を得ながら、十分な耐熱性、膜強度を得ることができる。 (A1) The mass average molecular weight of the resin having a cardo structure is preferably 1000 to 40000, and more preferably 2000 to 30000. By setting it as the above range, sufficient heat resistance and film strength can be obtained while obtaining good developability.
また、好適なアルカリ可溶性樹脂の他の例としては、(A2)エポキシ樹脂が挙げられる。(A2)エポキシ樹脂としては、特に限定されるものではなく、従来公知のエポキシ樹脂を用いることができ、エチレン性不飽和基を有さないものであっても、エチレン性不飽和基を有するものであってもよい。 Moreover, (A2) epoxy resin is mentioned as another example of suitable alkali-soluble resin. (A2) The epoxy resin is not particularly limited, and a conventionally known epoxy resin can be used, and it has an ethylenically unsaturated group even if it does not have an ethylenically unsaturated group. It may be.
エチレン性不飽和基を有さないエポキシ樹脂としては、例えば、不飽和カルボン酸とエポキシ基含有不飽和化合物とを少なくとも共重合させて得られる樹脂(A2−1)を用いることができる。 As an epoxy resin not having an ethylenically unsaturated group, for example, a resin (A2-1) obtained by at least copolymerizing an unsaturated carboxylic acid and an epoxy group-containing unsaturated compound can be used.
不飽和カルボン酸としては、(メタ)アクリル酸、クロトン酸等のモノカルボン酸;マレイン酸、フマル酸、シトラコン酸、メサコン酸、イタコン酸等のジカルボン酸;これらジカルボン酸の無水物;等が挙げられる。これらの中でも、共重合反応性、得られる樹脂のアルカリ溶解性、入手の容易性等の点から、(メタ)アクリル酸及び無水マレイン酸が好ましい。これらの不飽和カルボン酸は、単独で又は2種以上組み合わせて用いることができる。
なお、本明細書において、「(メタ)アクリル酸」は、アクリル酸とメタクリル酸との両方を意味する。
Examples of unsaturated carboxylic acids include monocarboxylic acids such as (meth) acrylic acid and crotonic acid; dicarboxylic acids such as maleic acid, fumaric acid, citraconic acid, mesaconic acid, and itaconic acid; and anhydrides of these dicarboxylic acids; It is done. Among these, (meth) acrylic acid and maleic anhydride are preferable in terms of copolymerization reactivity, alkali solubility of the resulting resin, availability, and the like. These unsaturated carboxylic acids can be used alone or in combination of two or more.
In the present specification, “(meth) acrylic acid” means both acrylic acid and methacrylic acid.
上記樹脂(A2−1)に占める不飽和カルボン酸由来の構成単位(カルボキシル基を有する構成単位)の割合は、5〜29質量%であることが好ましく、10〜25質量%であることがより好ましい。上記範囲とすることにより、感光性樹脂組成物の現像性を適度なものとすることができる。 The proportion of the structural unit derived from the unsaturated carboxylic acid (the structural unit having a carboxyl group) in the resin (A2-1) is preferably 5 to 29% by mass, more preferably 10 to 25% by mass. preferable. By setting it as the said range, the developability of the photosensitive resin composition can be made moderate.
エポキシ基含有不飽和化合物は、脂環式エポキシ基を有さないものであっても、脂環式エポキシ基を有するものであってもよいが、脂環式エポキシ基を有するものがより好ましい。 The epoxy group-containing unsaturated compound may have no alicyclic epoxy group or may have an alicyclic epoxy group, but more preferably has an alicyclic epoxy group.
脂環式エポキシ基を有さないエポキシ基含有不飽和化合物としては、グリシジル(メタ)アクリレート、2−メチルグリシジル(メタ)アクリレート、3,4−エポキシブチル(メタ)アクリレート、6,7−エポキシヘプチル(メタ)アクリレート、3,4−エポキシシクロヘキシル(メタ)アクリレート等の(メタ)アクリル酸エポキシアルキルエステル類;α−エチルアクリル酸グリシジル、α−n−プロピルアクリル酸グリシジル、α−n−ブチルアクリル酸グリシジル、α−エチルアクリル酸6,7−エポキシヘプチル等のα−アルキルアクリル酸エポキシアルキルエステル類;o−ビニルベンジルグリシジルエーテル、m−ビニルベンジルグリシジルエーテル、p−ビニルベンジルグリシジルエーテル等のグリシジルエーテル類;等が挙げられる。これらの中でも、共重合反応性、硬化後の樹脂の強度等の点から、グリシジル(メタ)アクリレート、2−メチルグリシジル(メタ)アクリレート、6,7−エポキシヘプチル(メタ)アクリレート、o−ビニルベンジルグリシジルエーテル、m−ビニルベンジルグリシジルエーテル、及びp−ビニルベンジルグリシジルエーテルが好ましい。 Examples of the epoxy group-containing unsaturated compound having no alicyclic epoxy group include glycidyl (meth) acrylate, 2-methylglycidyl (meth) acrylate, 3,4-epoxybutyl (meth) acrylate, and 6,7-epoxyheptyl. (Meth) acrylate, 3,4-epoxycyclohexyl (meth) acrylate and other (meth) acrylic acid epoxy alkyl esters; α-ethyl acrylate glycidyl, α-n-propyl acrylate glycidyl, α-n-butyl acrylic acid Α-alkylacrylic acid epoxy alkyl esters such as glycidyl and α-ethylacrylic acid 6,7-epoxyheptyl; glycidyl ethers such as o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether and p-vinylbenzyl glycidyl ether ;etc Is mentioned. Among these, glycidyl (meth) acrylate, 2-methylglycidyl (meth) acrylate, 6,7-epoxyheptyl (meth) acrylate, o-vinylbenzyl from the viewpoints of copolymerization reactivity, strength of cured resin, and the like. Glycidyl ether, m-vinylbenzyl glycidyl ether, and p-vinylbenzyl glycidyl ether are preferred.
脂環式エポキシ基を有するエポキシ基含有不飽和化合物の脂環式基は、単環であっても多環であってもよい。単環の脂環式基としては、シクロペンチル基、シクロヘキシル基等が挙げられる。また、多環の脂環式基としては、ノルボルニル基、イソボルニル基、トリシクロノニル基、トリシクロデシル基、テトラシクロドデシル基等が挙げられる。 The alicyclic group of the epoxy group-containing unsaturated compound having an alicyclic epoxy group may be monocyclic or polycyclic. Examples of the monocyclic alicyclic group include a cyclopentyl group and a cyclohexyl group. Examples of the polycyclic alicyclic group include a norbornyl group, an isobornyl group, a tricyclononyl group, a tricyclodecyl group, and a tetracyclododecyl group.
具体的に、脂環式エポキシ基を有するエポキシ基含有不飽和化合物としては、例えば下記式(a4−1)〜(a4−16)で表される化合物が挙げられる。これらの中でも、感光性樹脂組成物の現像性を適度なものとするためには、下記式(a4−1)〜(a4−6)で表される化合物が好ましく、下記式(a4−1)〜(a4−4)で表される化合物がより好ましい。 Specifically, examples of the epoxy group-containing unsaturated compound having an alicyclic epoxy group include compounds represented by the following formulas (a4-1) to (a4-16). Among these, in order to make the developability of the photosensitive resin composition appropriate, compounds represented by the following formulas (a4-1) to (a4-6) are preferable, and the following formula (a4-1) The compound represented by (a4-4) is more preferable.
上記式中、Ra3は水素原子又はメチル基を示し、Ra4は炭素数1〜6の2価の脂肪族飽和炭化水素基を示し、Ra5は炭素数1〜10の2価の炭化水素基を示し、nは0〜10の整数を示す。Ra4としては、直鎖状又は分枝鎖状のアルキレン基、例えばメチレン基、エチレン基、プロピレン基、テトラメチレン基、エチルエチレン基、ペンタメチレン基、ヘキサメチレン基が好ましい。Ra5としては、例えばメチレン基、エチレン基、プロピレン基、テトラメチレン基、エチルエチレン基、ペンタメチレン基、ヘキサメチレン基、フェニレン基、シクロヘキシレン基、−CH2−Ph−CH2−(Phはフェニレン基を示す)が好ましい。 In the above formula, R a3 represents a hydrogen atom or a methyl group, R a4 represents a divalent aliphatic saturated hydrocarbon group having 1 to 6 carbon atoms, and R a5 represents a divalent hydrocarbon having 1 to 10 carbon atoms. Represents a group, and n represents an integer of 0 to 10. R a4 is preferably a linear or branched alkylene group such as a methylene group, an ethylene group, a propylene group, a tetramethylene group, an ethylethylene group, a pentamethylene group, or a hexamethylene group. As R a5 , for example, methylene group, ethylene group, propylene group, tetramethylene group, ethylethylene group, pentamethylene group, hexamethylene group, phenylene group, cyclohexylene group, —CH 2 —Ph—CH 2 — (Ph is A phenylene group) is preferred.
これらのエポキシ基含有不飽和化合物は、単独で又は2種以上組み合わせて用いることができる。 These epoxy group-containing unsaturated compounds can be used alone or in combination of two or more.
上記樹脂(A2−1)に占めるエポキシ基含有不飽和化合物由来の構成単位(エポキシ基を有する構成単位)の割合は、5〜90質量%であることが好ましく、15〜75質量%であることがより好ましい。上記範囲とすることにより、良好な形状のブラックカラムスペーサを形成しやすくなる。 The proportion of the structural unit derived from the epoxy group-containing unsaturated compound (structural unit having an epoxy group) in the resin (A2-1) is preferably 5 to 90% by mass, and 15 to 75% by mass. Is more preferable. By setting it as the above range, it becomes easy to form a black column spacer having a good shape.
上記樹脂(A2−1)は、脂環式基含有不飽和化合物を更に共重合させたものであることが好ましい。 The resin (A2-1) is preferably obtained by further copolymerizing an alicyclic group-containing unsaturated compound.
脂環式基含有不飽和化合物の脂環式基は、単環であっても多環であってもよい。単環の脂環式基としては、シクロペンチル基、シクロヘキシル基等が挙げられる。また、多環の脂環式基としては、アダマンチル基、ノルボルニル基、イソボルニル基、トリシクロノニル基、トリシクロデシル基、テトラシクロドデシル基等が挙げられる。 The alicyclic group of the alicyclic group-containing unsaturated compound may be monocyclic or polycyclic. Examples of the monocyclic alicyclic group include a cyclopentyl group and a cyclohexyl group. Examples of the polycyclic alicyclic group include an adamantyl group, a norbornyl group, an isobornyl group, a tricyclononyl group, a tricyclodecyl group, and a tetracyclododecyl group.
具体的に、脂環式基含有不飽和化合物としては、例えば下記式(a5−1)〜(a5−8)で表される化合物が挙げられる。これらの中でも、感光性樹脂組成物の現像性を適度なものとするためには、下記式(a5−3)〜(a5−8)で表される化合物が好ましく、下記式(a5−3)、(a5−4)で表される化合物がより好ましい。 Specifically, examples of the alicyclic group-containing unsaturated compound include compounds represented by the following formulas (a5-1) to (a5-8). Among these, in order to make the developability of the photosensitive resin composition appropriate, compounds represented by the following formulas (a5-3) to (a5-8) are preferable, and the following formula (a5-3) , (A5-4) is more preferable.
上記式中、Ra6は水素原子又はメチル基を示し、Ra7は単結合又は炭素数1〜6の2価の脂肪族飽和炭化水素基を示し、Ra8は水素原子又は炭素数1〜5のアルキル基を示す。Ra7としては、単結合、直鎖状又は分枝鎖状のアルキレン基、例えばメチレン基、エチレン基、プロピレン基、テトラメチレン基、エチルエチレン基、ペンタメチレン基、ヘキサメチレン基が好ましい。Ra8としては、例えばメチル基、エチル基が好ましい。 In the above formula, R a6 represents a hydrogen atom or a methyl group, R a7 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 6 carbon atoms, and R a8 represents a hydrogen atom or 1 to 5 carbon atoms. Represents an alkyl group. R a7 is preferably a single bond or a linear or branched alkylene group such as a methylene group, an ethylene group, a propylene group, a tetramethylene group, an ethylethylene group, a pentamethylene group, or a hexamethylene group. As R a8 , for example, a methyl group and an ethyl group are preferable.
上記樹脂(A2−1)に占める脂環式基含有不飽和化合物由来の構成単位の割合は、1〜40質量%であることが好ましく、5〜30質量%であることがより好ましい。 The proportion of the structural unit derived from the alicyclic group-containing unsaturated compound in the resin (A2-1) is preferably 1 to 40% by mass, and more preferably 5 to 30% by mass.
また、上記樹脂(A2−1)は、上記以外の他の化合物を更に共重合させたものであってもよい。このような他の化合物としては、(メタ)アクリル酸エステル類、(メタ)アクリルアミド類、アリル化合物、ビニルエーテル類、ビニルエステル類、スチレン類等が挙げられる。これらの化合物は、単独で又は2種以上組み合わせて用いることができる。 Further, the resin (A2-1) may be obtained by further copolymerizing other compounds than the above. Examples of such other compounds include (meth) acrylic acid esters, (meth) acrylamides, allyl compounds, vinyl ethers, vinyl esters, styrenes, and the like. These compounds can be used alone or in combination of two or more.
(メタ)アクリル酸エステル類としては、メチル(メタ)アクリレート、エチル(メタ)アクリレート、プロピル(メタ)アクリレート、アミル(メタ)アクリレート、t−オクチル(メタ)アクリレート等の直鎖状又は分岐鎖状のアルキル(メタ)アクリレート;クロロエチル(メタ)アクリレート、2,2−ジメチルヒドロキシプロピル(メタ)アクリレート、2−ヒドロキシエチル(メタ)アクリレート、トリメチロールプロパンモノ(メタ)アクリレート、ベンジル(メタ)アクリレート、フルフリル(メタ)アクリレート;等が挙げられる。 As (meth) acrylic acid esters, linear or branched chain such as methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, amyl (meth) acrylate, t-octyl (meth) acrylate, etc. Alkyl (meth) acrylates; chloroethyl (meth) acrylate, 2,2-dimethylhydroxypropyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, trimethylolpropane mono (meth) acrylate, benzyl (meth) acrylate, furfuryl (Meth) acrylate; etc. are mentioned.
(メタ)アクリルアミド類としては、(メタ)アクリルアミド、N−アルキル(メタ)アクリルアミド、N−アリール(メタ)アクリルアミド、N,N−ジアルキル(メタ)アクリルアミド、N,N−アリール(メタ)アクリルアミド、N−メチル−N−フェニル(メタ)アクリルアミド、N−ヒドロキシエチル−N−メチル(メタ)アクリルアミド等が挙げられる。 (Meth) acrylamides include (meth) acrylamide, N-alkyl (meth) acrylamide, N-aryl (meth) acrylamide, N, N-dialkyl (meth) acrylamide, N, N-aryl (meth) acrylamide, N -Methyl-N-phenyl (meth) acrylamide, N-hydroxyethyl-N-methyl (meth) acrylamide and the like.
アリル化合物としては、酢酸アリル、カプロン酸アリル、カプリル酸アリル、ラウリン酸アリル、パルミチン酸アリル、ステアリン酸アリル、安息香酸アリル、アセト酢酸アリル、乳酸アリル等のアリルエステル類;アリルオキシエタノール;等が挙げられる。 Examples of the allyl compound include allyl acetate, allyl caproate, allyl caprylate, allyl laurate, allyl palmitate, allyl stearate, allyl benzoate, allyl acetoacetate, allyl lactate, etc .; allyloxyethanol; Can be mentioned.
ビニルエーテル類としては、ヘキシルビニルエーテル、オクチルビニルエーテル、デシルビニルエーテル、エチルヘキシルビニルエーテル、メトキシエチルビニルエーテル、エトキシエチルビニルエーテル、クロルエチルビニルエーテル、1−メチル−2,2−ジメチルプロピルビニルエーテル、2−エチルブチルビニルエーテル、ヒドロキシエチルビニルエーテル、ジエチレングリコールビニルエーテル、ジメチルアミノエチルビニルエーテル、ジエチルアミノエチルビニルエーテル、ブチルアミノエチルビニルエーテル、ベンジルビニルエーテル、テトラヒドロフルフリルビニルエーテル等のアルキルビニルエーテル;ビニルフェニルエーテル、ビニルトリルエーテル、ビニルクロルフェニルエーテル、ビニル−2,4−ジクロルフェニルエーテル、ビニルナフチルエーテル、ビニルアントラニルエーテル等のビニルアリールエーテル;等が挙げられる。 As vinyl ethers, hexyl vinyl ether, octyl vinyl ether, decyl vinyl ether, ethyl hexyl vinyl ether, methoxyethyl vinyl ether, ethoxyethyl vinyl ether, chloroethyl vinyl ether, 1-methyl-2,2-dimethylpropyl vinyl ether, 2-ethylbutyl vinyl ether, hydroxyethyl vinyl ether , Alkyl vinyl ethers such as diethylene glycol vinyl ether, dimethylaminoethyl vinyl ether, diethylaminoethyl vinyl ether, butylaminoethyl vinyl ether, benzyl vinyl ether, tetrahydrofurfuryl vinyl ether; vinyl phenyl ether, vinyl tolyl ether, vinyl chlorophenyl ether, vinyl-2,4-dichloropheny And the like; ethers, vinyl naphthyl ether, vinyl aryl ethers such as vinyl anthranyl ether.
ビニルエステル類としては、ビニルブチレート、ビニルイソブチレート、ビニルトリメチルアセテート、ビニルジエチルアセテート、ビニルバレート、ビニルカプロエート、ビニルクロルアセテート、ビニルジクロルアセテート、ビニルメトキシアセテート、ビニルブトキシアセテート、ビニルフエニルアセテート、ビニルアセトアセテート、ビニルラクテート、ビニル−β−フェニルブチレート、安息香酸ビニル、サリチル酸ビニル、クロル安息香酸ビニル、テトラクロル安息香酸ビニル、ナフトエ酸ビニル等が挙げられる。 Vinyl esters include vinyl butyrate, vinyl isobutyrate, vinyl trimethyl acetate, vinyl diethyl acetate, vinyl valate, vinyl caproate, vinyl chloroacetate, vinyl dichloroacetate, vinyl methoxyacetate, vinyl butoxyacetate, vinyl vinyl. Examples include enyl acetate, vinyl acetoacetate, vinyl lactate, vinyl-β-phenylbutyrate, vinyl benzoate, vinyl salicylate, vinyl chlorobenzoate, vinyl tetrachlorobenzoate, vinyl naphthoate and the like.
スチレン類としては、スチレン;メチルスチレン、ジメチルスチレン、トリメチルスチレン、エチルスチレン、ジエチルスチレン、イソプロピルスチレン、ブチルスチレン、ヘキシルスチレン、シクロヘキシルスチレン、デシルスチレン、ベンジルスチレン、クロルメチルスチレン、トリフルオロメチルスチレン、エトキシメチルスチレン、アセトキシメチルスチレン等のアルキルスチレン;メトキシスチレン、4−メトキシ−3−メチルスチレン、ジメトキシスチレン等のアルコキシスチレン;クロロスチレン、ジクロロスチレン、トリクロロスチレン、テトラクロロスチレン、ペンタクロロスチレン、ブロモスチレン、ジブロモスチレン、ヨードスチレン、フルオロスチレン、トリフルオロスチレン、2−ブロモ−4−トリフルオロメチルスチレン、4−フルオロ−3−トリフルオロメチルスチレン等のハロスチレン;等が挙げられる。 Styrenes include: styrene; methyl styrene, dimethyl styrene, trimethyl styrene, ethyl styrene, diethyl styrene, isopropyl styrene, butyl styrene, hexyl styrene, cyclohexyl styrene, decyl styrene, benzyl styrene, chloromethyl styrene, trifluoromethyl styrene, ethoxy Alkyl styrene such as methyl styrene and acetoxymethyl styrene; alkoxy styrene such as methoxy styrene, 4-methoxy-3-methyl styrene and dimethoxy styrene; chlorostyrene, dichlorostyrene, trichlorostyrene, tetrachlorostyrene, pentachlorostyrene, bromostyrene, Dibromostyrene, iodostyrene, fluorostyrene, trifluorostyrene, 2-bromo-4-trifluoromethyl Styrene, halostyrenes such as 4-fluoro-3-trifluoromethyl styrene; and the like.
樹脂(A2−1)の質量平均分子量は、2000〜50000であることが好ましく、5000〜30000であることがより好ましい。上記の範囲とすることにより、感光性樹脂組成物の膜形成能、現像性のバランスがとりやすい傾向がある。 The mass average molecular weight of the resin (A2-1) is preferably 2000 to 50000, and more preferably 5000 to 30000. By setting it as the above range, there is a tendency that the film forming ability and developability of the photosensitive resin composition are easily balanced.
一方、エチレン性不飽和基を有するエポキシ樹脂としては、例えば、不飽和カルボン酸とエポキシ基含有不飽和化合物とを少なくとも重合させて得られる樹脂のカルボキシル基と、エポキシ基含有不飽和化合物のエポキシ基とを反応させて得られる樹脂(A2−2)、あるいは、不飽和カルボン酸とエポキシ基含有不飽和化合物とを少なくとも重合させて得られる樹脂のエポキシ基と、不飽和カルボン酸のカルボキシル基とを反応させて得られる樹脂(A2−3)を用いることができる。 On the other hand, as an epoxy resin having an ethylenically unsaturated group, for example, a carboxyl group of a resin obtained by polymerizing at least an unsaturated carboxylic acid and an epoxy group-containing unsaturated compound, and an epoxy group of an epoxy group-containing unsaturated compound A resin (A2-2) obtained by reacting an unsaturated carboxylic acid and an epoxy group of a resin obtained by polymerizing at least an unsaturated carboxylic acid and an epoxy group-containing unsaturated compound, and a carboxyl group of an unsaturated carboxylic acid. Resin (A2-3) obtained by reacting can be used.
不飽和カルボン酸、エポキシ基含有不飽和化合物としては、上記樹脂(A2−1)で例示した化合物が挙げられる。したがって、不飽和カルボン酸とエポキシ基含有不飽和化合物とを少なくとも重合させて得られる樹脂としては、上記樹脂(A2−1)が例示される。 As unsaturated carboxylic acid and an epoxy group containing unsaturated compound, the compound illustrated by the said resin (A2-1) is mentioned. Therefore, the resin (A2-1) is exemplified as a resin obtained by polymerizing at least an unsaturated carboxylic acid and an epoxy group-containing unsaturated compound.
上記樹脂(A2−2)、(A2−3)に占める不飽和カルボン酸由来の構成単位(カルボキシル基を有する構成単位)の割合は、5〜60質量%であることが好ましく、10〜40質量%であることがより好ましい。上記範囲とすることにより、感光性樹脂組成物の現像性を適度なものとすることができる。 The proportion of the structural unit derived from the unsaturated carboxylic acid (the structural unit having a carboxyl group) in the resins (A2-2) and (A2-3) is preferably 5 to 60% by mass, and 10 to 40% by mass. % Is more preferable. By setting it as the said range, the developability of the photosensitive resin composition can be made moderate.
また、上記樹脂(A2−2)、(A2−3)に占めるエポキシ基含有不飽和化合物由来の構成単位(エポキシ基を有する構成単位)の割合は、5〜90質量%であることが好ましく、15〜75質量%であることがより好ましい。上記範囲とすることにより、良好な形状のブラックカラムスペーサを形成しやすくなる。 Moreover, it is preferable that the ratio of the structural unit (structural unit which has an epoxy group) derived from the epoxy group containing unsaturated compound in the said resin (A2-2) and (A2-3) is 5-90 mass%, More preferably, it is 15-75 mass%. By setting it as the above range, it becomes easy to form a black column spacer having a good shape.
樹脂(A2−2)、(A2−3)の質量平均分子量は、2000〜50000であることが好ましく、5000〜30000であることがより好ましい。上記の範囲とすることにより、感光性樹脂組成物の膜形成能、現像性のバランスがとりやすい傾向がある。 The mass average molecular weight of the resins (A2-2) and (A2-3) is preferably 2000 to 50000, and more preferably 5000 to 30000. By setting it as the above range, there is a tendency that the film forming ability and developability of the photosensitive resin composition are easily balanced.
上記のほか、(A2)エポキシ樹脂としては、ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ビスフェノールS型エポキシ樹脂、フェノール又はクレゾールノボラック型エポキシ樹脂、レゾール型エポキシ樹脂、トリフェノールメタン型エポキシ樹脂、ポリカルボン酸ポリグリシジルエステル、ポリオールポリグリシジルエステル、アミンエポキシ樹脂、ジヒドロキシベンゼン型エポキシ樹脂等のエポキシ樹脂のエポキシ基と、(メタ)アクリル酸とを反応させて得られるエポキシ(メタ)アクリレート樹脂等を用いることもできる。 In addition to the above, (A2) epoxy resin includes bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, phenol or cresol novolac type epoxy resin, resol type epoxy resin, triphenolmethane type epoxy resin, An epoxy (meth) acrylate resin obtained by reacting an epoxy group of an epoxy resin such as a polycarboxylic acid polyglycidyl ester, a polyol polyglycidyl ester, an amine epoxy resin, or a dihydroxybenzene type epoxy resin with (meth) acrylic acid, etc. It can also be used.
アルカリ可溶性樹脂の含有量は、感光性樹脂組成物の固形分に対して40〜85質量%であることが好ましく、45〜75質量%であることがより好ましい。上記の範囲とすることにより、現像性のバランスをとりやすい傾向がある。 The content of the alkali-soluble resin is preferably 40 to 85% by mass and more preferably 45 to 75% by mass with respect to the solid content of the photosensitive resin composition. By setting it as the above range, there is a tendency that developability is easily balanced.
[光重合性モノマー]
光重合性モノマーとしては、特に限定されず、従来公知の単官能モノマー、多官能モノマーを用いることができる。光重合性モノマーは、単独で又は2種以上組み合わせて用いることができる。
[Photopolymerizable monomer]
It does not specifically limit as a photopolymerizable monomer, A conventionally well-known monofunctional monomer and a polyfunctional monomer can be used. A photopolymerizable monomer can be used individually or in combination of 2 or more types.
単官能モノマーとしては、(メタ)アクリルアミド、メチロール(メタ)アクリルアミド、メトキシメチル(メタ)アクリルアミド、エトキシメチル(メタ)アクリルアミド、プロポキシメチル(メタ)アクリルアミド、ブトキシメトキシメチル(メタ)アクリルアミド、N−メチロール(メタ)アクリルアミド、N−ヒドロキシメチル(メタ)アクリルアミド、(メタ)アクリル酸、フマル酸、マレイン酸、無水マレイン酸、イタコン酸、無水イタコン酸、シトラコン酸、無水シトラコン酸、クロトン酸、2−アクリルアミド−2−メチルプロパンスルホン酸、tert−ブチルアクリルアミドスルホン酸、メチル(メタ)アクリレート、エチル(メタ)アクリレート、ブチル(メタ)アクリレート、2−エチルヘキシル(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、2−ヒドロキシエチル(メタ)アクリレート、2−ヒドロキシプロピル(メタ)アクリレート、2−ヒドロキシブチル(メタ)アクリレート、2−フェノキシ−2−ヒドロキシプロピル(メタ)アクリレート、2−(メタ)アクリロイルオキシ−2−ヒドロキシプロピルフタレート、グリセリンモノ(メタ)アクリレート、テトラヒドロフルフリル(メタ)アクリレート、ジメチルアミノ(メタ)アクリレート、グリシジル(メタ)アクリレート、2,2,2−トリフルオロエチル(メタ)アクリレート、2,2,3,3−テトラフルオロプロピル(メタ)アクリレート、フタル酸誘導体のハーフ(メタ)アクリレート等が挙げられる。これらの単官能モノマーは、単独で又は2種以上組み合わせて用いることができる。 Monofunctional monomers include (meth) acrylamide, methylol (meth) acrylamide, methoxymethyl (meth) acrylamide, ethoxymethyl (meth) acrylamide, propoxymethyl (meth) acrylamide, butoxymethoxymethyl (meth) acrylamide, N-methylol ( (Meth) acrylamide, N-hydroxymethyl (meth) acrylamide, (meth) acrylic acid, fumaric acid, maleic acid, maleic anhydride, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, crotonic acid, 2-acrylamide- 2-methylpropane sulfonic acid, tert-butylacrylamide sulfonic acid, methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, 2-ethylhexyl (meth) acrylate Cyclohexyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, 2-phenoxy-2-hydroxypropyl (meth) acrylate, 2- (Meth) acryloyloxy-2-hydroxypropyl phthalate, glycerin mono (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, dimethylamino (meth) acrylate, glycidyl (meth) acrylate, 2,2,2-trifluoroethyl ( And (meth) acrylate, 2,2,3,3-tetrafluoropropyl (meth) acrylate, and half (meth) acrylate of a phthalic acid derivative. These monofunctional monomers can be used alone or in combination of two or more.
一方、多官能モノマーとしては、エチレングリコールジ(メタ)アクリレート、ジエチレングリコールジ(メタ)アクリレート、テトラエチレングリコールジ(メタ)アクリレート、プロピレングリコールジ(メタ)アクリレート、ポリプロピレングリコールジ(メタ)アクリレート、ブチレングリコールジ(メタ)アクリレート、ネオペンチルグリコールジ(メタ)アクリレート、1,6−ヘキサングリコールジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、グリセリンジ(メタ)アクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールテトラアクリレート、ジペンタエリスリトールペンタアクリレート、ジペンタエリスリトールヘキサアクリレート、ペンタエリスリトールジ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、2,2−ビス(4−(メタ)アクリロキシジエトキシフェニル)プロパン、2,2−ビス(4−(メタ)アクリロキシポリエトキシフェニル)プロパン、2−ヒドロキシ−3−(メタ)アクリロイルオキシプロピル(メタ)アクリレート、エチレングリコールジグリシジルエーテルジ(メタ)アクリレート、ジエチレングリコールジグリシジルエーテルジ(メタ)アクリレート、フタル酸ジグリシジルエステルジ(メタ)アクリレート、グリセリントリアクリレート、グリセリンポリグリシジルエーテルポリ(メタ)アクリレート、ウレタン(メタ)アクリレート(すなわち、トリレンジイソシアネート)、トリメチルヘキサメチレンジイソシアネートとヘキサメチレンジイソシアネートと2−ヒドロキシエチル(メタ)アクリレートとの反応物、メチレンビス(メタ)アクリルアミド、(メタ)アクリルアミドメチレンエーテル、多価アルコールとN−メチロール(メタ)アクリルアミドとの縮合物等の多官能モノマーや、トリアクリルホルマール等が挙げられる。これらの多官能モノマーは、単独で又は2種以上組み合わせて用いることができる。 On the other hand, as the polyfunctional monomer, ethylene glycol di (meth) acrylate, diethylene glycol di (meth) acrylate, tetraethylene glycol di (meth) acrylate, propylene glycol di (meth) acrylate, polypropylene glycol di (meth) acrylate, butylene glycol Di (meth) acrylate, neopentyl glycol di (meth) acrylate, 1,6-hexane glycol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, glycerin di (meth) acrylate, pentaerythritol triacrylate, pentaerythritol Tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, pentaerythritol di (meta Acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, 2,2-bis (4- (meth) acryloxydi Ethoxyphenyl) propane, 2,2-bis (4- (meth) acryloxypolyethoxyphenyl) propane, 2-hydroxy-3- (meth) acryloyloxypropyl (meth) acrylate, ethylene glycol diglycidyl ether di (meth) Acrylate, diethylene glycol diglycidyl ether di (meth) acrylate, diglycidyl phthalate ester di (meth) acrylate, glycerin triacrylate, glycerin polyglycidyl ether poly (Meth) acrylate, urethane (meth) acrylate (ie, tolylene diisocyanate), reaction product of trimethylhexamethylene diisocyanate, hexamethylene diisocyanate and 2-hydroxyethyl (meth) acrylate, methylenebis (meth) acrylamide, (meth) acrylamide methylene Examples thereof include polyfunctional monomers such as ethers, polyhydric alcohols and N-methylol (meth) acrylamide condensates, and triacryl formal. These polyfunctional monomers can be used alone or in combination of two or more.
光重合性モノマーの含有量は、感光性樹脂組成物の固形分に対して1〜30質量%であることが好ましく、5〜20質量%であることがより好ましい。上記の範囲とすることにより、感度、現像性、解像性のバランスがとりやすい傾向がある。 The content of the photopolymerizable monomer is preferably 1 to 30% by mass and more preferably 5 to 20% by mass with respect to the solid content of the photosensitive resin composition. By setting it as the above range, it tends to be easy to balance sensitivity, developability, and resolution.
[光重合開始剤]
光重合開始剤としては、特に限定されず、従来公知の光重合開始剤を用いることができる。光重合開始剤は、単独で又は2種以上組み合わせて用いることができる。
[Photopolymerization initiator]
It does not specifically limit as a photoinitiator, A conventionally well-known photoinitiator can be used. A photoinitiator can be used individually or in combination of 2 or more types.
光重合開始剤として具体的には、1−ヒドロキシシクロヘキシルフェニルケトン、2−ヒドロキシ−2−メチル−1−フェニルプロパン−1−オン、1−〔4−(2−ヒドロキシエトキシ)フェニル〕−2−ヒドロキシ−2−メチル−1−プロパン−1−オン、1−(4−イソプロピルフェニル)−2−ヒドロキシ−2−メチルプロパン−1−オン、1−(4−ドデシルフェニル)−2−ヒドロキシ−2−メチルプロパン−1−オン、ビス(4−ジメチルアミノフェニル)ケトン、2,4,6−トリメチルベンゾイルジフェニルホスフィンオキシド、4−ベンゾイル−4’−メチルジメチルスルフィド、4−ジメチルアミノ安息香酸、4−ジメチルアミノ安息香酸メチル、4−ジメチルアミノ安息香酸エチル、4−ジメチルアミノ安息香酸ブチル、4−ジメチルアミノ−2−エチルヘキシル安息香酸、4−ジメチルアミノ−2−イソアミル安息香酸、ベンジル−β−メトキシエチルアセタール、ベンジルジメチルケタール、1−フェニル−1,2−プロパンジオン−2−(o−エトキシカルボニル)オキシム、o−ベンゾイル安息香酸メチル、2,4−ジエチルチオキサントン、2−クロロチオキサントン、2,4−ジメチルチオキサントン、1−クロロ−4−プロポキシチオキサントン、チオキサンテン、2−クロロチオキサンテン、2,4−ジエチルチオキサンテン、2−メチルチオキサンテン、2−イソプロピルチオキサンテン、2−エチルアントラキノン、オクタメチルアントラキノン、1,2−ベンズアントラキノン、2,3−ジフェニルアントラキノン、アゾビスイソブチロニトリル、ベンゾイルパーオキシド、クメンパーオキシド、2−メルカプトベンゾイミダール、2−メルカプトベンゾオキサゾール、2−メルカプトベンゾチアゾール、2−(o−クロロフェニル)−4,5−ジフェニルイミダゾール二量体、2−(o−クロロフェニル)−4,5−ジ(メトキシフェニル)イミダゾール二量体、2−(o−フルオロフェニル)−4,5−ジフェニルイミダゾール二量体、2−(o−メトキシフェニル)−4,5−ジフェニルイミダゾール二量体、2−(p−メトキシフェニル)−4,5−ジフェニルイミダゾール二量体、2,4,5−トリアリールイミダゾール二量体、ベンゾフェノン、2−クロロベンゾフェノン、4,4’−ビスジメチルアミノベンゾフェノン(すなわち、ミヒラーズケトン)、4,4’−ビスジエチルアミノベンゾフェノン(すなわち、エチルミヒラーズケトン)、4,4’−ジクロロベンゾフェノン、3,3−ジメチル−4−メトキシベンゾフェノン、ベンジル、ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテル、ベンゾイン−n−ブチルエーテル、ベンゾインイソブチルエーテル、ベンゾインブチルエーテル、アセトフェノン、2,2−ジエトキシアセトフェノン、p−ジメチルアセトフェノン、p−ジメチルアミノプロピオフェノン、ジクロロアセトフェノン、トリクロロアセトフェノン、p−tert−ブチルアセトフェノン、p−ジメチルアミノアセトフェノン、p−tert−ブチルトリクロロアセトフェノン、p−tert−ブチルジクロロアセトフェノン、α,α−ジクロロ−4−フェノキシアセトフェノン、チオキサントン、2−メチルチオキサントン、2−イソプロピルチオキサントン、ジベンゾスベロン、ペンチル−4−ジメチルアミノベンゾエート、9−フェニルアクリジン、1,7−ビス−(9−アクリジニル)ヘプタン、1,5−ビス−(9−アクリジニル)ペンタン、1,3−ビス−(9−アクリジニル)プロパン、p−メトキシトリアジン、2,4,6−トリス(トリクロロメチル)−s−トリアジン、2−メチル−4,6−ビス(トリクロロメチル)−s−トリアジン、2−[2−(5−メチルフラン−2−イル)エテニル]−4,6−ビス(トリクロロメチル)−s−トリアジン、2−[2−(フラン−2−イル)エテニル]−4,6−ビス(トリクロロメチル)−s−トリアジン、2−[2−(4−ジエチルアミノ−2−メチルフェニル)エテニル]−4,6−ビス(トリクロロメチル)−s−トリアジン、2−[2−(3,4−ジメトキシフェニル)エテニル]−4,6−ビス(トリクロロメチル)−s−トリアジン、2−(4−メトキシフェニル)−4,6−ビス(トリクロロメチル)−s−トリアジン、2−(4−エトキシスチリル)−4,6−ビス(トリクロロメチル)−s−トリアジン、2−(4−n−ブトキシフェニル)−4,6−ビス(トリクロロメチル)−s−トリアジン、2,4−ビス−トリクロロメチル−6−(3−ブロモ−4−メトキシ)フェニル−s−トリアジン、2,4−ビス−トリクロロメチル−6−(2−ブロモ−4−メトキシ)フェニル−s−トリアジン、2,4−ビス−トリクロロメチル−6−(3−ブロモ−4−メトキシ)スチリルフェニル−s−トリアジン、2,4−ビス−トリクロロメチル−6−(2−ブロモ−4−メトキシ)スチリルフェニル−s−トリアジン、「IRGACURE OXE02」、「IRGACURE OXE01」、「IRGACURE 369」、「IRGACURE 651」、「IRGACURE 907」(商品名:BASF製)、「NCI−831」(商品名:ADEKA製)等が挙げられる。 Specific examples of the photopolymerization initiator include 1-hydroxycyclohexyl phenyl ketone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, and 1- [4- (2-hydroxyethoxy) phenyl] -2- Hydroxy-2-methyl-1-propan-1-one, 1- (4-isopropylphenyl) -2-hydroxy-2-methylpropan-1-one, 1- (4-dodecylphenyl) -2-hydroxy-2 -Methylpropan-1-one, bis (4-dimethylaminophenyl) ketone, 2,4,6-trimethylbenzoyldiphenylphosphine oxide, 4-benzoyl-4'-methyldimethylsulfide, 4-dimethylaminobenzoic acid, 4- Methyl dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, 4-dimethylaminobenzoate 4-dimethylamino-2-ethylhexylbenzoic acid, 4-dimethylamino-2-isoamylbenzoic acid, benzyl-β-methoxyethyl acetal, benzyldimethyl ketal, 1-phenyl-1,2-propanedione-2- ( o-ethoxycarbonyl) oxime, methyl o-benzoylbenzoate, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-dimethylthioxanthone, 1-chloro-4-propoxythioxanthone, thioxanthene, 2-chlorothioxanthene 2,4-diethylthioxanthene, 2-methylthioxanthene, 2-isopropylthioxanthene, 2-ethylanthraquinone, octamethylanthraquinone, 1,2-benzanthraquinone, 2,3-diphenylanthraquinone, azobisisobu Tyronitrile, benzoyl peroxide, cumene peroxide, 2-mercaptobenzoimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzothiazole, 2- (o-chlorophenyl) -4,5-diphenylimidazole dimer, 2- ( o-chlorophenyl) -4,5-di (methoxyphenyl) imidazole dimer, 2- (o-fluorophenyl) -4,5-diphenylimidazole dimer, 2- (o-methoxyphenyl) -4,5 -Diphenylimidazole dimer, 2- (p-methoxyphenyl) -4,5-diphenylimidazole dimer, 2,4,5-triarylimidazole dimer, benzophenone, 2-chlorobenzophenone, 4,4 ' -Bisdimethylaminobenzophenone (ie Michler's ketone), 4 4′-bisdiethylaminobenzophenone (ie, ethyl Michler's ketone), 4,4′-dichlorobenzophenone, 3,3-dimethyl-4-methoxybenzophenone, benzyl, benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, Benzoin-n-butyl ether, benzoin isobutyl ether, benzoin butyl ether, acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylaminopropiophenone, dichloroacetophenone, trichloroacetophenone, p-tert-butylacetophenone, p -Dimethylaminoacetophenone, p-tert-butyltrichloroacetophenone, p-tert-butyldichloroaceto Enone, α, α-dichloro-4-phenoxyacetophenone, thioxanthone, 2-methylthioxanthone, 2-isopropylthioxanthone, dibenzosuberone, pentyl-4-dimethylaminobenzoate, 9-phenylacridine, 1,7-bis- (9 -Acridinyl) heptane, 1,5-bis- (9-acridinyl) pentane, 1,3-bis- (9-acridinyl) propane, p-methoxytriazine, 2,4,6-tris (trichloromethyl) -s- Triazine, 2-methyl-4,6-bis (trichloromethyl) -s-triazine, 2- [2- (5-methylfuran-2-yl) ethenyl] -4,6-bis (trichloromethyl) -s- Triazine, 2- [2- (furan-2-yl) ethenyl] -4,6-bis (trichloromethyl)- -Triazine, 2- [2- (4-diethylamino-2-methylphenyl) ethenyl] -4,6-bis (trichloromethyl) -s-triazine, 2- [2- (3,4-dimethoxyphenyl) ethenyl] -4,6-bis (trichloromethyl) -s-triazine, 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-ethoxystyryl) -4,6 -Bis (trichloromethyl) -s-triazine, 2- (4-n-butoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine, 2,4-bis-trichloromethyl-6- (3- Bromo-4-methoxy) phenyl-s-triazine, 2,4-bis-trichloromethyl-6- (2-bromo-4-methoxy) phenyl-s-triazine, 2,4-bis -Trichloromethyl-6- (3-bromo-4-methoxy) styrylphenyl-s-triazine, 2,4-bis-trichloromethyl-6- (2-bromo-4-methoxy) styrylphenyl-s-triazine, IRGACURE OXE02 ”,“ IRGACURE OXE01 ”,“ IRGACURE 369 ”,“ IRGACURE 651 ”,“ IRGACURE 907 ”(trade name: manufactured by BASF),“ NCI-831 ”(trade name: manufactured by ADEKA), and the like.
光重合開始剤の含有量は、感光性樹脂組成物の固形分に対して0.5〜20質量%であることが好ましい。上記の範囲とすることにより、十分な耐熱性、耐薬品性を得ることができ、また塗膜形成能を向上させ、硬化不良を抑制することができる。 It is preferable that content of a photoinitiator is 0.5-20 mass% with respect to solid content of the photosensitive resin composition. By setting it as said range, sufficient heat resistance and chemical-resistance can be acquired, a coating-film formation ability can be improved, and hardening failure can be suppressed.
[顔料分散液]
本発明に係る顔料分散液の含有量は、感光性樹脂組成物の用途に応じて適宜決定すればよいが、一例として、感光性樹脂組成物における顔料の含有量が感光性樹脂組成物の固形分に対して、5〜70質量%となる量が好ましく、25〜60質量%となる量がより好ましい。
特に、感光性樹脂組成物を使用してブラックマトリクスを形成する場合には、ブラックマトリクスの膜厚1μm当たりのOD値が4以上となるように、感光性樹脂組成物における顔料分散液の量を調整することが好ましい。ブラックマトリクスにおける膜厚1μm当たりのOD値が4以上あれば、液晶表示ディスプレイのブラックマトリクスに用いた場合に、十分な表示コントラストを得ることができる。
[Pigment dispersion]
The content of the pigment dispersion according to the present invention may be appropriately determined according to the use of the photosensitive resin composition. As an example, the content of the pigment in the photosensitive resin composition is a solid content of the photosensitive resin composition. The amount of 5 to 70% by mass is preferable with respect to the minute, and the amount of 25 to 60% by mass is more preferable.
In particular, when forming the black matrix using the photosensitive resin composition, the amount of the pigment dispersion in the photosensitive resin composition is adjusted so that the OD value per 1 μm of the film thickness of the black matrix is 4 or more. It is preferable to adjust. If the OD value per 1 μm of film thickness in the black matrix is 4 or more, a sufficient display contrast can be obtained when used in the black matrix of a liquid crystal display.
更に、本発明に係る顔料分散液の含有量は、感光性樹脂組成物における、上記式(1)で表される化合物の含有量が、アルカリ可溶性樹脂と光重合性モノマーとの合計量100質量部に対して、0.01〜2.5質量部となる量が好ましく、0.01〜0.5質量部となる量がより好ましい。感光性樹脂組成物における、上記式(1)で表される化合物の含有量がかかる範囲となるように、本発明に係る顔料分散液の含有量を調整することにより、基板に対する密着性に優れる微小パターンを形成しやすくなる。 Furthermore, the content of the pigment dispersion according to the present invention is such that the content of the compound represented by the above formula (1) in the photosensitive resin composition is 100 mass in total of the alkali-soluble resin and the photopolymerizable monomer. The amount of 0.01 to 2.5 parts by mass is preferable with respect to parts, and the amount of 0.01 to 0.5 parts by mass is more preferable. By adjusting the content of the pigment dispersion according to the present invention so that the content of the compound represented by the above formula (1) in the photosensitive resin composition falls within this range, the adhesiveness to the substrate is excellent. It becomes easy to form a minute pattern.
[その他の成分]
上記感光性樹脂組成物は、必要に応じて、各種の添加剤を含有していてもよい。添加剤としては、増感剤、硬化促進剤、充填剤、密着促進剤、酸化防止剤、凝集防止剤、熱重合禁止剤、消泡剤、界面活性剤等が挙げられる。
[Other ingredients]
The said photosensitive resin composition may contain various additives as needed. Examples of the additive include a sensitizer, a curing accelerator, a filler, an adhesion promoter, an antioxidant, an aggregation inhibitor, a thermal polymerization inhibitor, an antifoaming agent, and a surfactant.
<感光性樹脂組成物の製造方法>
本発明に係る感光性樹脂組成物の製造方法は、アルカリ可溶性樹脂と、光重合性モノマーと、光重合開始剤と、本発明にかかる顔料分散液とを混合する工程を少なくとも含む。これらの成分は、例えば、3本ロールミル、ボールミル、サンドミル等の撹拌機で混合することができる。なお、製造された感光性樹脂組成物が均一なものとなるよう、5μmメンブランフィルタ等のフィルタを用いて濾過してもよい。
<Method for producing photosensitive resin composition>
The method for producing a photosensitive resin composition according to the present invention includes at least a step of mixing an alkali-soluble resin, a photopolymerizable monomer, a photopolymerization initiator, and the pigment dispersion according to the present invention. These components can be mixed with a stirrer such as a three-roll mill, a ball mill, or a sand mill. In addition, you may filter using filters, such as a 5 micrometer membrane filter, so that the manufactured photosensitive resin composition may become uniform.
本発明に係る感光性樹脂組成物の製造方法では、顔料と上記式(1)で表される化合物とを予め混ぜて顔料分散液を調製し、この顔料分散液をアルカリ可溶性樹脂等の他の成分と混合する。このような工程を経ることにより、経時後の顔料分散液を用いた場合であっても、低露光量で高密着性の微小パターンを形成することができる感光性樹脂組成物が得られる。 In the method for producing a photosensitive resin composition according to the present invention, a pigment dispersion is prepared by previously mixing a pigment and the compound represented by the above formula (1), and this pigment dispersion is mixed with another alkali-soluble resin or the like. Mix with ingredients. By passing through such a process, even if it is a case where the pigment dispersion liquid after time-lapse is used, the photosensitive resin composition which can form a highly adhesive micropattern with a low exposure amount is obtained.
以下、実施例を示して本発明を更に具体的に説明するが、本発明の範囲は、これらの実施例に限定されるものではない。 EXAMPLES Hereinafter, although an Example is shown and this invention is demonstrated further more concretely, the scope of the present invention is not limited to these Examples.
<上記式(1)で表される化合物>
上記式(1)で表される化合物としては、下記式で表される化合物1〜12を準備した。この化合物1〜12の合成法を下記に示す。
<Compound represented by the above formula (1)>
As the compound represented by the above formula (1), compounds 1 to 12 represented by the following formula were prepared. The synthesis method of these compounds 1-12 is shown below.
[化合物1の合成法]
3−(4−メトキシフェニル)アクリル酸クロリド5.90g(30mmol)を50mlの乾燥したエーテルに溶解し、トリエチルアミン4.59ml(当量比1.1)、ジエチルアミン2.41ml(当量比1.1)を加え、室温にて1時間撹拌した。水50ml、飽和NaHCO3水溶液50ml、及び1N塩酸で洗浄後、硫酸マグネシウムで乾燥し、減圧下で濃縮した。ヘキサン−酢酸エチルを展開溶媒とし、シリカゲルを支持担体としてカラムクロマトグラフィにより精製を行い、対応する化合物1(4.65g,20mmol)を得た。アクリル酸クロリド基準の収率は67%であった。
[Synthesis Method of Compound 1]
3- (4-Methoxyphenyl) acrylic acid chloride 5.90 g (30 mmol) was dissolved in 50 ml of dry ether, triethylamine 4.59 ml (equivalent ratio 1.1), diethylamine 2.41 ml (equivalent ratio 1.1). And stirred at room temperature for 1 hour. The extract was washed with 50 ml of water, 50 ml of a saturated aqueous NaHCO 3 solution, and 1N hydrochloric acid, dried over magnesium sulfate, and concentrated under reduced pressure. Purification was performed by column chromatography using hexane-ethyl acetate as a developing solvent and silica gel as a support carrier to obtain the corresponding compound 1 (4.65 g, 20 mmol). The yield based on acrylic acid chloride was 67%.
[化合物2の合成法]
2−メチル−3−(4−メトキシフェニル)アクリル酸クロリド6.32g(30mmol)を50mlの乾燥したエーテルに溶解し、トリエチルアミン4.59ml(当量比1.1)、ジエチルアミン2.41ml(当量比1.1)を加え、室温にて1時間撹拌した。水50ml、飽和NaHCO3水溶液50ml、及び1N塩酸で洗浄後、硫酸マグネシウムで乾燥し、減圧下で濃縮した。ヘキサン−酢酸エチルを展開溶媒とし、シリカゲルを支持担体としてカラムクロマトグラフィにより精製を行い、対応する化合物2(4.93g,20mmol)を得た。アクリル酸クロリド基準の収率は67%であった。
[Synthesis Method of Compound 2]
6.32 g (30 mmol) of 2-methyl-3- (4-methoxyphenyl) acrylic acid chloride was dissolved in 50 ml of dry ether, and 4.59 ml (equivalent ratio 1.1) of triethylamine, 2.41 ml (equivalent ratio) of diethylamine. 1.1) was added and stirred at room temperature for 1 hour. The extract was washed with 50 ml of water, 50 ml of a saturated aqueous NaHCO 3 solution, and 1N hydrochloric acid, dried over magnesium sulfate, and concentrated under reduced pressure. Purification was performed by column chromatography using hexane-ethyl acetate as a developing solvent and silica gel as a support carrier to obtain the corresponding compound 2 (4.93 g, 20 mmol). The yield based on acrylic acid chloride was 67%.
[化合物3の合成法]
3−(2−ニトロ−4−メトキシフェニル)アクリル酸クロリド7.25g(30mmol)を50mlの乾燥したエーテルに溶解し、トリエチルアミン4.59ml(当量比1.1)、ジエチルアミン2.41ml(当量比1.1)を加え、室温にて1時間撹拌した。水50ml、飽和NaHCO3水溶液50ml、及び1N塩酸で洗浄後、硫酸マグネシウムで乾燥し、減圧下で濃縮した。ヘキサン−酢酸エチルを展開溶媒とし、シリカゲルを支持担体としてカラムクロマトグラフィにより精製を行い、対応する化合物3(5.55g,20mmol)を得た。アクリル酸クロリド基準の収率は67%であった。
[Synthesis Method of Compound 3]
7.25 g (30 mmol) of 3- (2-nitro-4-methoxyphenyl) acrylic acid chloride was dissolved in 50 ml of dry ether, and 4.59 ml (equivalent ratio 1.1) of triethylamine, 2.41 ml (equivalent ratio) of diethylamine. 1.1) was added and stirred at room temperature for 1 hour. The extract was washed with 50 ml of water, 50 ml of a saturated aqueous NaHCO 3 solution, and 1N hydrochloric acid, dried over magnesium sulfate, and concentrated under reduced pressure. Purification was performed by column chromatography using hexane-ethyl acetate as a developing solvent and silica gel as a support carrier to obtain the corresponding compound 3 (5.55 g, 20 mmol). The yield based on acrylic acid chloride was 67%.
[化合物4の合成法]
3−(3−ニトロ−4−メトキシフェニル)アクリル酸クロリド7.25g(30mmol)を50mlの乾燥したエーテルに溶解し、トリエチルアミン4.59ml(当量比1.1)、ジエチルアミン2.41ml(当量比1.1)を加え、室温にて1時間撹拌した。水50ml、飽和NaHCO3水溶液50ml、及び1N塩酸で洗浄後、硫酸マグネシウムで乾燥し、減圧下で濃縮した。ヘキサン−酢酸エチルを展開溶媒とし、シリカゲルを支持担体としてカラムクロマトグラフィにより精製を行い、対応する化合物4(5.55g,20mmol)を得た。アクリル酸クロリド基準の収率は67%であった。
[Synthesis Method of Compound 4]
7.25 g (30 mmol) of 3- (3-nitro-4-methoxyphenyl) acrylic chloride was dissolved in 50 ml of dry ether, and 4.59 ml (equivalent ratio 1.1) of triethylamine, 2.41 ml (equivalent ratio) of diethylamine. 1.1) was added and stirred at room temperature for 1 hour. The extract was washed with 50 ml of water, 50 ml of a saturated aqueous NaHCO 3 solution, and 1N hydrochloric acid, dried over magnesium sulfate, and concentrated under reduced pressure. Purification was performed by column chromatography using hexane-ethyl acetate as a developing solvent and silica gel as a support carrier to obtain the corresponding compound 4 (5.55 g, 20 mmol). The yield based on acrylic acid chloride was 67%.
[化合物5の合成法]
2−メチル−3−(2−ニトロ−4−メトキシフェニル)アクリル酸クロリド7.67g(30mmol)を50mlの乾燥したエーテルに溶解し、トリエチルアミン4.59ml(当量比1.1)、ジエチルアミン2.41ml(当量比1.1)を加え、室温にて1時間撹拌した。水50ml、飽和NaHCO3水溶液50ml、及び1N塩酸で洗浄後、硫酸マグネシウムで乾燥し、減圧下で濃縮した。ヘキサン−酢酸エチルを展開溶媒とし、シリカゲルを支持担体としてカラムクロマトグラフィにより精製を行い、対応する化合物5(5.83g,20mmol)を得た。アクリル酸クロリド基準の収率は67%であった。
[Synthesis Method of Compound 5]
7.67 g (30 mmol) of 2-methyl-3- (2-nitro-4-methoxyphenyl) acrylic acid chloride was dissolved in 50 ml of dry ether, 4.59 ml of triethylamine (equivalent ratio 1.1),
[化合物6の合成法]
2−メチル−3−(3−ニトロ−4−メトキシフェニル)アクリル酸クロリド7.67g(30mmol)を50mlの乾燥したエーテルに溶解し、トリエチルアミン4.59ml(当量比1.1)、ジエチルアミン2.41ml(当量比1.1)を加え、室温にて1時間撹拌した。水50ml、飽和NaHCO3水溶液50ml、及び1N塩酸で洗浄後、硫酸マグネシウムで乾燥し、減圧下で濃縮した。ヘキサン−酢酸エチルを展開溶媒とし、シリカゲルを支持担体としてカラムクロマトグラフィにより精製を行い、対応する化合物6(5.83g,20mmol)を得た。アクリル酸クロリド基準の収率は67%であった。
[Synthesis Method of Compound 6]
2.67 g (30 mmol) of 2-methyl-3- (3-nitro-4-methoxyphenyl) acrylic acid chloride was dissolved in 50 ml of dry ether, 4.59 ml of triethylamine (equivalent ratio 1.1),
[化合物7の合成法]
3−(4−メトキシフェニル)アクリル酸クロリド5.90g(30mmol)を50mlの乾燥したエーテルに溶解し、トリエチルアミン4.59ml(当量比1.1)、イミダゾール2.25ml(当量比1.1)を加え、室温にて1時間撹拌した。水50ml、飽和NaHCO3水溶液50ml、及び1N塩酸で洗浄後、硫酸マグネシウムで乾燥し、減圧下で濃縮した。ヘキサン−酢酸エチルを展開溶媒とし、シリカゲルを支持担体としてカラムクロマトグラフィにより精製を行い、対応する化合物7(3.41g,15mmol)を得た。アクリル酸クロリド基準の収率は50%であった。
[Synthesis Method of Compound 7]
3- (4-Methoxyphenyl) acrylic acid chloride 5.90 g (30 mmol) was dissolved in 50 ml of dry ether, and triethylamine 4.59 ml (equivalent ratio 1.1) and imidazole 2.25 ml (equivalent ratio 1.1). And stirred at room temperature for 1 hour. The extract was washed with 50 ml of water, 50 ml of a saturated aqueous NaHCO 3 solution, and 1N hydrochloric acid, dried over magnesium sulfate, and concentrated under reduced pressure. Purification was performed by column chromatography using hexane-ethyl acetate as a developing solvent and silica gel as a support carrier to obtain the corresponding compound 7 (3.41 g, 15 mmol). The yield based on acrylic acid chloride was 50%.
[化合物8の合成法]
2−メチル−3−(4−メトキシフェニル)アクリル酸クロリド6.32g(30mmol)を50mlの乾燥したエーテルに溶解し、トリエチルアミン4.59ml(当量比1.1)、イミダゾール2.25ml(当量比1.1)を加え、室温にて1時間撹拌した。水50ml、飽和NaHCO3水溶液50ml、及び1N塩酸で洗浄後、硫酸マグネシウムで乾燥し、減圧下で濃縮した。ヘキサン−酢酸エチルを展開溶媒とし、シリカゲルを支持担体としてカラムクロマトグラフィにより精製を行い、対応する化合物8(3.62g,15mmol)を得た。アクリル酸クロリド基準の収率は50%であった。
[Synthesis Method of Compound 8]
6.32 g (30 mmol) of 2-methyl-3- (4-methoxyphenyl) acrylic acid chloride was dissolved in 50 ml of dry ether, and 4.59 ml (equivalent ratio 1.1) of triethylamine, 2.25 ml (equivalent ratio) of imidazole. 1.1) was added and stirred at room temperature for 1 hour. The extract was washed with 50 ml of water, 50 ml of a saturated aqueous NaHCO 3 solution, and 1N hydrochloric acid, dried over magnesium sulfate, and concentrated under reduced pressure. Purification was performed by column chromatography using hexane-ethyl acetate as a developing solvent and silica gel as a support carrier to obtain the corresponding compound 8 (3.62 g, 15 mmol). The yield based on acrylic acid chloride was 50%.
[化合物9の合成法]
3−(2−ニトロ−4−メトキシフェニル)アクリル酸クロリド7.25g(30mmol)を50mlの乾燥したエーテルに溶解し、トリエチルアミン4.59ml(当量比1.1)、イミダゾール2.25ml(当量比1.1)を加え、室温にて1時間撹拌した。水50ml、飽和NaHCO3水溶液50ml、及び1N塩酸で洗浄後、硫酸マグネシウムで乾燥し、減圧下で濃縮した。ヘキサン−酢酸エチルを展開溶媒とし、シリカゲルを支持担体としてカラムクロマトグラフィにより精製を行い、対応する化合物9(4.08g,15mmol)を得た。アクリル酸クロリド基準の収率は50%であった。
[Synthesis Method of Compound 9]
7.25 g (30 mmol) of 3- (2-nitro-4-methoxyphenyl) acrylic acid chloride was dissolved in 50 ml of dry ether, and 4.59 ml (equivalent ratio 1.1) of triethylamine, 2.25 ml (equivalent ratio) of imidazole. 1.1) was added and stirred at room temperature for 1 hour. The extract was washed with 50 ml of water, 50 ml of a saturated aqueous NaHCO 3 solution, and 1N hydrochloric acid, dried over magnesium sulfate, and concentrated under reduced pressure. Purification was performed by column chromatography using hexane-ethyl acetate as a developing solvent and silica gel as a support carrier to obtain the corresponding compound 9 (4.08 g, 15 mmol). The yield based on acrylic acid chloride was 50%.
[化合物10の合成法]
3−(3−ニトロ−4−メトキシフェニル)アクリル酸クロリド7.25g(30mmol)を50mlの乾燥したエーテルに溶解し、トリエチルアミン4.59ml(当量比1.1)、イミダゾール2.25ml(当量比1.1)を加え、室温にて1時間撹拌した。水50ml、飽和NaHCO3水溶液50ml、及び1N塩酸で洗浄後、硫酸マグネシウムで乾燥し、減圧下で濃縮した。ヘキサン−酢酸エチルを展開溶媒とし、シリカゲルを支持担体としてカラムクロマトグラフィにより精製を行い、対応する化合物10(4.08g,15mmol)を得た。アクリル酸クロリド基準の収率は50%であった。
[Synthesis Method of Compound 10]
7.25 g (30 mmol) of 3- (3-nitro-4-methoxyphenyl) acrylic acid chloride was dissolved in 50 ml of dry ether, and 4.59 ml (equivalent ratio 1.1) of triethylamine, 2.25 ml (equivalent ratio) of imidazole. 1.1) was added and stirred at room temperature for 1 hour. The extract was washed with 50 ml of water, 50 ml of a saturated aqueous NaHCO 3 solution, and 1N hydrochloric acid, dried over magnesium sulfate, and concentrated under reduced pressure. Purification was performed by column chromatography using hexane-ethyl acetate as a developing solvent and silica gel as a support carrier to obtain the corresponding compound 10 (4.08 g, 15 mmol). The yield based on acrylic acid chloride was 50%.
[化合物11の合成法]
2−メチル−3−(2−ニトロ−4−メトキシフェニル)アクリル酸クロリド7.67g(30mmol)を50mlの乾燥したエーテルに溶解し、トリエチルアミン4.59ml(当量比1.1)、イミダゾール2.25ml(当量比1.1)を加え、室温にて1時間撹拌した。水50ml、飽和NaHCO3水溶液50ml、及び1N塩酸で洗浄後、硫酸マグネシウムで乾燥し、減圧下で濃縮した。ヘキサン−酢酸エチルを展開溶媒とし、シリカゲルを支持担体としてカラムクロマトグラフィにより精製を行い、対応する化合物11(4.29g,15mmol)を得た。アクリル酸クロリド基準の収率は50%であった。
[Synthesis Method of Compound 11]
7.67 g (30 mmol) of 2-methyl-3- (2-nitro-4-methoxyphenyl) acrylic acid chloride was dissolved in 50 ml of dry ether, and 4.59 ml (equivalent ratio 1.1) of triethylamine,
[化合物12の合成法]
2−メチル−3−(3−ニトロ−4−メトキシフェニル)アクリル酸クロリド7.67g(30mmol)を50mlの乾燥したエーテルに溶解し、トリエチルアミン4.59ml(当量比1.1)、イミダゾール2.25ml(当量比1.1)を加え、室温にて1時間撹拌した。水50ml、飽和NaHCO3水溶液50ml、及び1N塩酸で洗浄後、硫酸マグネシウムで乾燥し、減圧下で濃縮した。ヘキサン−酢酸エチルを展開溶媒とし、シリカゲルを支持担体としてカラムクロマトグラフィにより精製を行い、対応する化合物12(3.41g,15mmol)を得た。アクリル酸クロリド基準の収率は50%であった。
[Synthesis Method of Compound 12]
7.67 g (30 mmol) of 2-methyl-3- (3-nitro-4-methoxyphenyl) acrylic acid chloride was dissolved in 50 ml of dry ether, and 4.59 ml (equivalent ratio 1.1) of triethylamine,
<顔料分散液の調製>
[実施例1]
以下の顔料及び上記式(1)で表される化合物を混合し、3−メトキシブチルアセテート(MA)/プロピレングリコールモノメチルエーテルアセテート(PM)/シクロヘキサノン(AN)=60/20/20(質量比)の混合溶剤に溶解して、固形分濃度15質量%の顔料分散液を調製した。
・顔料
カーボン分散液「CFブラック」(商品名:御国色素社製 固形分25% 溶剤:3−メトキシブチルアセテート)・・・1200質量部
・上記式(1)で表される化合物
上記化合物1・・・50質量部
<Preparation of pigment dispersion>
[Example 1]
The following pigment and the compound represented by the above formula (1) are mixed, and 3-methoxybutyl acetate (MA) / propylene glycol monomethyl ether acetate (PM) / cyclohexanone (AN) = 60/20/20 (mass ratio). A pigment dispersion having a solid content concentration of 15% by mass was prepared.
Pigment Carbon dispersion “CF black” (trade name: manufactured by Mikuni Dye Co., Ltd., solid content 25%, solvent: 3-methoxybutyl acetate): 1200 parts by mass Compound represented by the above formula (1)
[比較例1]
化合物1を用いなかったほかは、実施例1と同様にして顔料分散液を調製した。
[Comparative Example 1]
A pigment dispersion was prepared in the same manner as in Example 1 except that
[評価]
実施例1及び比較例1の顔料分散液を40℃で4日間静置した。静置後の顔料分散液について、ゼータ電位をESA9800(Matec Applied Sciences製)を用いて測定し、粒度分布及び平均粒子径をLB−550(堀場製作所製)を用いて測定した。結果を表1及び図1に示す。
[Evaluation]
The pigment dispersions of Example 1 and Comparative Example 1 were allowed to stand at 40 ° C. for 4 days. For the pigment dispersion after standing, the zeta potential was measured using ESA9800 (manufactured by Matec Applied Sciences), and the particle size distribution and average particle size were measured using LB-550 (manufactured by Horiba Seisakusho). The results are shown in Table 1 and FIG.
表1に示すとおり、ゼータ電位は、上記式(1)で表される化合物を含む実施例1の顔料分散液と上記式(1)で表される化合物を含まない比較例1の顔料分散液との間で、大きな差を示さなかった。これに対し、表1に示すとおり、平均粒子径については、実施例1の顔料分散液が比較例1の顔料分散液よりも小さな値を示した。また、粒度分布について、実施例1の顔料分散液は、単一ピークの分布を形成したのに対し、比較例1の顔料分散液は、二峰分布を形成した。以上から、上記式(1)で表される化合物を含む顔料分散液は、上記式(1)で表される化合物を含まない顔料分散液と比較して、経時後における顔料の分散性が良好であることが分かる。 As shown in Table 1, the zeta potential is the pigment dispersion of Example 1 containing the compound represented by the above formula (1) and the pigment dispersion of Comparative Example 1 not containing the compound represented by the above formula (1). Did not show any significant difference. On the other hand, as shown in Table 1, the average particle diameter of the pigment dispersion liquid of Example 1 was smaller than that of Comparative Example 1. Regarding the particle size distribution, the pigment dispersion of Example 1 formed a single peak distribution, whereas the pigment dispersion of Comparative Example 1 formed a bimodal distribution. From the above, the pigment dispersion containing the compound represented by the above formula (1) has better dispersibility of the pigment after the lapse of time compared with the pigment dispersion containing no compound represented by the above formula (1). It turns out that it is.
<感光性樹脂組成物の調製>
[実施例2]
以下の顔料及び上記式(1)で表される化合物を混合し、3−メトキシブチルアセテート(MA)/プロピレングリコールモノメチルエーテルアセテート(PM)/シクロヘキサノン(AN)=60/20/20(質量比)の混合溶剤に溶解して、固形分濃度15質量%の顔料分散液を調製した。この顔料分散液を40℃で3日間静置した。静置後の顔料分散液、アルカリ可溶性樹脂、光重合性モノマー、及び光重合開始剤を混合し、3−メトキシブチルアセテート(MA)/プロピレングリコールモノメチルエーテルアセテート(PM)/シクロヘキサノン(AN)=60/20/20(質量比)の混合溶剤に溶解して、固形分濃度15質量%の感光性樹脂組成物を調製した。
・アルカリ可溶性樹脂
樹脂(A−1)(固形分55%、溶剤:3−メトキシブチルアセテート)・・・310質量部
・光重合性モノマー
ジペンタエリスリトールヘキサアクリレート(DPHA)・・・65質量部
・光重合開始剤
「OXE−02」(商品名:BASF社製)・・・15質量部
・上記式(1)で表される化合物
上記化合物1・・・5質量部
・顔料
カーボン分散液「CFブラック」(商品名:御国色素社製 固形分25% 溶剤:3−メトキシブチルアセテート)・・・1200質量部
<Preparation of photosensitive resin composition>
[Example 2]
The following pigment and the compound represented by the above formula (1) are mixed, and 3-methoxybutyl acetate (MA) / propylene glycol monomethyl ether acetate (PM) / cyclohexanone (AN) = 60/20/20 (mass ratio). A pigment dispersion having a solid content concentration of 15% by mass was prepared. This pigment dispersion was allowed to stand at 40 ° C. for 3 days. The pigment dispersion after standing, the alkali-soluble resin, the photopolymerizable monomer, and the photopolymerization initiator are mixed, and 3-methoxybutyl acetate (MA) / propylene glycol monomethyl ether acetate (PM) / cyclohexanone (AN) = 60. / 20/20 (mass ratio) was dissolved in a mixed solvent to prepare a photosensitive resin composition having a solid content concentration of 15% by mass.
-Alkali-soluble resin Resin (A-1) (solid content 55%, solvent: 3-methoxybutyl acetate) ... 310 parts by mass-Photopolymerizable monomer dipentaerythritol hexaacrylate (DPHA) ... 65 parts by mass Photopolymerization initiator "OXE-02" (trade name: manufactured by BASF) ... 15 parts by mass-Compound represented by the above formula (1)
上記樹脂(A−1)の合成法は下記のとおりである。
まず、500ml四つ口フラスコ中に、ビスフェノールフルオレン型エポキシ樹脂(エポキシ当量235)235g、テトラメチルアンモニウムクロライド110mg、2,6−ジ−tert−ブチル−4−メチルフェノール100mg、及びアクリル酸72.0gを仕込み、これに25ml/分の速度で空気を吹き込みながら90〜100℃で加熱溶解した。次に、溶液が白濁した状態のまま徐々に昇温し、120℃に加熱して完全溶解させた。この際、溶液は次第に透明粘稠になったが、そのまま撹拌を継続した。この間、酸価を測定し、1.0mgKOH/g未満になるまで加熱撹拌を続けた。酸価が目標値に達するまで12時間を要した。そして室温まで冷却し、無色透明で固体状の下記式(a−4)で表されるビスフェノールフルオレン型エポキシアクリレートを得た。
The synthesis method of the resin (A-1) is as follows.
First, in a 500 ml four-necked flask, 235 g of bisphenolfluorene type epoxy resin (epoxy equivalent 235), 110 mg of tetramethylammonium chloride, 100 mg of 2,6-di-tert-butyl-4-methylphenol, and 72.0 g of acrylic acid Was heated and dissolved at 90 to 100 ° C. while blowing air at a rate of 25 ml / min. Next, the temperature was gradually raised while the solution was clouded, and the solution was heated to 120 ° C. to be completely dissolved. At this time, the solution gradually became transparent and viscous, but stirring was continued as it was. During this time, the acid value was measured, and heating and stirring were continued until the acid value was less than 1.0 mgKOH / g. It took 12 hours for the acid value to reach the target value. And it cooled to room temperature and obtained the bisphenol fluorene type epoxy acrylate represented by the following transparent formula (a-4) colorless and transparent.
次いで、このようにして得られた上記のビスフェノールフルオレン型エポキシアクリレート307.0gに3−メトキシブチルアセテート600gを加えて溶解した後、ベンゾフェノンテトラカルボン酸二無水物80.5g及び臭化テトラエチルアンモニウム1gを混合し、徐々に昇温して110〜115℃で4時間反応させた。酸無水物基の消失を確認した後、1,2,3,6−テトラヒドロ無水フタル酸38.0gを混合し、90℃で6時間反応させ、樹脂(A−1)を得た。酸無水物基の消失はIRスペクトルにより確認した。
なお、この樹脂(A−1)は、上記式(a−1)で表される化合物に相当する。
Next, after adding 600 g of 3-methoxybutyl acetate to 307.0 g of the bisphenolfluorene type epoxy acrylate thus obtained and dissolving, 80.5 g of benzophenonetetracarboxylic dianhydride and 1 g of tetraethylammonium bromide were added. The mixture was gradually heated and reacted at 110 to 115 ° C. for 4 hours. After confirming disappearance of the acid anhydride group, 38.0 g of 1,2,3,6-tetrahydrophthalic anhydride was mixed and reacted at 90 ° C. for 6 hours to obtain Resin (A-1). The disappearance of the acid anhydride group was confirmed by IR spectrum.
In addition, this resin (A-1) is corresponded to the compound represented by the said Formula (a-1).
[実施例3〜13]
化合物1の代わりにそれぞれ上記化合物2〜12を用いたほかは、実施例2と同様にして感光性樹脂組成物を調製した。
[Examples 3 to 13]
A photosensitive resin composition was prepared in the same manner as in Example 2 except that the
[比較例2]
化合物1を用いなかったほかは、実施例2と同様にして感光性樹脂組成物を調製した。
[Comparative Example 2]
A photosensitive resin composition was prepared in the same manner as in Example 2 except that
[比較例3〜14]
上記式(1)で表される化合物を用いずに顔料分散液を調製し、静置後の顔料分散液、アルカリ可溶性樹脂、光重合性モノマー、光重合開始剤、及び上記式(1)で表される化合物を混合したほかは、それぞれ実施例2〜13と同様にして感光性樹脂組成物を調製した。
[Comparative Examples 3 to 14]
A pigment dispersion is prepared without using the compound represented by the above formula (1), the pigment dispersion after standing, the alkali-soluble resin, the photopolymerizable monomer, the photopolymerization initiator, and the above formula (1). A photosensitive resin composition was prepared in the same manner as in Examples 2 to 13 except that the compounds represented were mixed.
[評価]
実施例2〜13、比較例2〜14の感光性樹脂組成物を、ガラス基板(100mm×100mm)上にスピンコーターを用いて塗布し、90℃で120秒間プリベークを行い、膜厚1.0μmの塗膜を形成した。次いで、ミラープロジェクションアライナー(製品名:TME−150RTO、株式会社トプコン製)を使用し、露光ギャップを50μmとして、5μmのラインパターンの形成されたネガマスクを介して、塗膜に紫外線を照射した。露光量は、10,20,40,100mJ/cm2の4段階とした。露光後の塗膜を、26℃の0.04質量%KOH水溶液で40秒間現像後、230℃にて30分間ポストベークを行うことにより、ラインパターンを形成した。
[Evaluation]
The photosensitive resin compositions of Examples 2 to 13 and Comparative Examples 2 to 14 were applied on a glass substrate (100 mm × 100 mm) using a spin coater, prebaked at 90 ° C. for 120 seconds, and a film thickness of 1.0 μm. The coating film was formed. Next, a mirror projection aligner (product name: TME-150 RTO, manufactured by Topcon Co., Ltd.) was used, the exposure gap was 50 μm, and the coating film was irradiated with ultraviolet rays through a negative mask on which a 5 μm line pattern was formed. The exposure amount was set in four stages of 10, 20, 40, and 100 mJ / cm 2 . The exposed coating film was developed with a 0.04 mass% KOH aqueous solution at 26 ° C. for 40 seconds and then post-baked at 230 ° C. for 30 minutes to form a line pattern.
また、実施例2〜13、比較例2〜14の感光性樹脂組成物を25℃で7日間静置し、静置後の感光性樹脂組成物を用いて、上記と同様にしてラインパターンを形成した。 In addition, the photosensitive resin compositions of Examples 2 to 13 and Comparative Examples 2 to 14 were allowed to stand at 25 ° C. for 7 days, and the line patterns were formed in the same manner as described above using the photosensitive resin compositions after standing. Formed.
形成されたラインパターンを光学顕微鏡により観察し、細線密着性を評価した。細線密着性は、基板から剥がれずラインパターンが形成されたものを「良好」、基板から剥がれてラインパターンが形成されなかったものを「なし」として評価した。結果を表2に示す。 The formed line pattern was observed with an optical microscope, and fine line adhesion was evaluated. The fine line adhesion was evaluated as “good” when the line pattern was formed without being peeled from the substrate, and “none” when the line pattern was not formed when peeled from the substrate. The results are shown in Table 2.
実施例2〜13の感光性樹脂組成物は、上記式(1)で表される化合物1〜12を含有する顔料分散液を40℃で3日間静置し、静置後の上記顔料分散液とアルカリ可溶性樹脂等の他の成分とを混合して得られたものである。表2から分かるように、実施例2〜13の感光性樹脂組成物を用いた場合には、10mJ/cm2という低露光量であっても、5μmのラインパターンが基板に密着した。25℃で7日間静置した実施例2〜13の感光性樹脂組成物も、同様の細線密着性を示した。
In the photosensitive resin compositions of Examples 2 to 13, the pigment
これに対して、比較例2の感光性樹脂組成物は、上記式(1)で表される化合物を含有しない顔料分散液を40℃で3日間静置し、静置後の上記顔料分散液とアルカリ可溶性樹脂等の他の成分とを混合して得られたものである。上記静置後の混合の際、上記式(1)で表される化合物は添加しなかった。表2から分かるように、比較例2の感光性樹脂組成物を用いた場合には、20mJ/cm2以上の露光量でしか、5μmのラインパターンは基板に密着しなかった。また、25℃で7日間静置した比較例2の感光性樹脂組成物を用いた場合には、100mJ/cm2以上の露光量でしか、5μmのラインパターンは基板に密着しなかった。 On the other hand, in the photosensitive resin composition of Comparative Example 2, the pigment dispersion containing no compound represented by the above formula (1) was allowed to stand at 40 ° C. for 3 days, and the pigment dispersion after standing And other components such as an alkali-soluble resin. During the mixing after the standing, the compound represented by the formula (1) was not added. As can be seen from Table 2, when the photosensitive resin composition of Comparative Example 2 was used, the 5 μm line pattern was in close contact with the substrate only at an exposure amount of 20 mJ / cm 2 or more. In addition, when the photosensitive resin composition of Comparative Example 2 that was allowed to stand at 25 ° C. for 7 days was used, the 5 μm line pattern was in close contact with the substrate only with an exposure amount of 100 mJ / cm 2 or more.
また、比較例3〜14の感光性樹脂組成物は、上記式(1)で表される化合物を含有しない顔料分散液を40℃で3日間静置し、静置後の上記顔料分散液とアルカリ可溶性樹脂等の他の成分とを混合して得られたものである。上記静置後の混合の際、上記式(1)で表される化合物を添加した。表2から分かるように、比較例3〜14の感光性樹脂組成物を用いた場合には、20mJ/cm2以上の露光量でしか、5μmのラインパターンは基板に密着しなかった。25℃で7日間静置した比較例3〜14の感光性樹脂組成物を用いた場合にも、同様の結果が得られた。 Further, the photosensitive resin compositions of Comparative Examples 3 to 14 were prepared by allowing a pigment dispersion containing no compound represented by the above formula (1) to stand at 40 ° C. for 3 days. It is obtained by mixing with other components such as an alkali-soluble resin. During mixing after standing, the compound represented by the above formula (1) was added. As can be seen from Table 2, when the photosensitive resin compositions of Comparative Examples 3 to 14 were used, the 5 μm line pattern adhered to the substrate only at an exposure amount of 20 mJ / cm 2 or more. Similar results were obtained when the photosensitive resin compositions of Comparative Examples 3 to 14 were allowed to stand at 25 ° C. for 7 days.
Claims (4)
調製した前記顔料分散液と、アルカリ可溶性樹脂と、光重合性モノマーと、光重合開始剤とを混合して、感光性樹脂組成物を得る混合工程と、
を含む、感光性樹脂組成物の製造方法。 A preparation step for preparing the pigment dispersion according to claim 1 or 2,
A mixing step of mixing the prepared pigment dispersion, alkali-soluble resin, photopolymerizable monomer, and photopolymerization initiator to obtain a photosensitive resin composition;
The manufacturing method of the photosensitive resin composition containing this.
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