JP6201131B2 - Membrane manufacturing method and multi-chamber apparatus - Google Patents

Description

  The present invention relates to a film manufacturing method and a multi-chamber apparatus for oxidizing and crystallizing a film.

A conventional method for producing Pb (Zr, Ti) O ₃ (hereinafter referred to as “PZT”) perovskite ferroelectric ceramics will be described.

A 300 nm thick SiO ₂ film is formed on a 4-inch Si wafer, and a 5 nm thick TiO _x film is formed on the SiO ₂ film. Next, a Pt film having a thickness of 150 nm, for example, oriented in (111) is formed on the TiO _X film, and a PZT sol-gel solution is spin-coated on the Pt film by a spin coater in an air atmosphere. The spin condition at this time is a condition for rotating for 30 seconds at a rotational speed of 1500 rpm and for 10 seconds at a rotational speed of 4000 rpm.

  Next, this applied PZT sol-gel solution is heated and dried in an air atmosphere for 30 seconds on a hot plate at 250 ° C., dried, and after removing moisture, is further heated for 60 seconds on a hot plate kept at a high temperature of 500 ° C. Temporary firing is performed while heating. By repeating this several times, a 150 nm thick PZT amorphous thin film is produced.

  Thereafter, RTA treatment is performed at 600 ° C. for 1 minute in a pressurized oxygen atmosphere using a pressurized lamp annealing apparatus. Details will be described below.

  A 4-inch Si wafer is introduced into the processing chamber, and oxygen gas is introduced into the processing chamber and gradually pressurized while maintaining an oxygen atmosphere. Then, the processing chamber is pressurized to a predetermined pressure of less than 1 MPa, and when the pressure is reached, the introduction of oxygen gas into the processing chamber is stopped, and the processing chamber is maintained at that pressure.

  Next, a 4 inch Si wafer is irradiated with lamp light. As a result, the PZT amorphous thin film is rapidly heated to 600 ° C. and held at a temperature of 600 ° C. for 1 minute. As a result, PZT and oxygen react quickly, and the PZT film is crystallized (see, for example, Patent Document 1).

  In the above conventional manufacturing method, since the PZT sol-gel solution is applied in an air atmosphere without controlling the temperature and humidity, the amount of evaporation of alcohol, moisture, etc. from the coating film differs for each coating, and the film thickness of the coating film May fluctuate.

  Further, in the above conventional manufacturing method, since the coating film of the highly reactive sol-gel solution is heated and held in the air atmosphere and dried, the oxidation of the coating film does not occur uniformly in the surface during drying, and the oxidation proceeds. In other words, the region where the oxidation does not proceed is mixed in the plane, and the in-plane uniformity of the oxidation is deteriorated. In addition, since nitrogen in the air atmosphere may inhibit the oxidation of the coating film being dried, the coating film is less likely to be uniformly oxidized in the plane.

Moreover, in the above-mentioned conventional pressure-type lamp annealing apparatus, since the introduction of oxygen gas into the processing chamber is stopped when the PZT amorphous thin film is rapidly heated and crystallized, it occurs when PZT reacts with oxygen. CO ₂ and H ₂ O remain and drift near the surface of the PZT amorphous thin film. Since CO ₂ and H ₂ O in the vicinity of the surface hinder the oxidation of PZT, the in-plane uniformity of the crystallized state of the PZT film is deteriorated, and a sufficient crystallization region and an insufficient region are mixed in the surface. It will be.

Japanese Patent No. 4729035

An object of one embodiment of the present invention is to suppress variation in the amount of a substance that evaporates from a film when a film is formed over the substrate by applying a sol-gel solution over the substrate.
Another object of one embodiment of the present invention is to improve in-plane uniformity of a crystallized state in a crystallized film obtained by crystallizing a film containing _a metal and C _a H _b .

Hereinafter, various aspects of the present invention will be described.
[1] A film is formed on the substrate by applying a sol-gel solution on the substrate by spin coating in an atmosphere having a first temperature and a first humidity.
A method of producing a film in which the film is oxidized and crystallized by heat-treating the film in an oxygen gas atmosphere or a mixed gas atmosphere of an oxygen gas and an inert gas and in a pressurized atmosphere;
The first temperature is within a range of 10 ° C to 40 ° C;
The method for producing a film, wherein the first humidity is 30% or less.

[2] In the above [1],
The method for producing a film, wherein the atmosphere having the first temperature and the first humidity is an air atmosphere, an inert gas atmosphere, an oxygen gas atmosphere, or a mixed gas atmosphere of oxygen gas and inert gas.

[3] In the above [1] or [2],
The method for producing a film, wherein the sol-gel solution is controlled to a second temperature, and the second temperature is in a range of 20 ° C to 100 ° C.

[4] In any one of [1] to [3] above,
When the film is oxidized and crystallized, the film is held at a third temperature and then held at a fourth temperature,
The third temperature is in the range of 100C to 450C;
The method for producing a film, wherein the fourth temperature is in a range of 451 ° C to 900 ° C.

[5] In the above [4],
One of holding the film at the third temperature and holding the film at the fourth temperature irradiates the upper surface of the substrate with lamp light,
The other method of maintaining the film at the third temperature and the other of maintaining the film at the fourth temperature irradiates the lower surface of the substrate with lamp light.

[6] In any one of [1] to [5] above,
A film obtained by oxidizing and crystallizing the film is represented by the general formula ABO ₃ , where A is Al, Y, Na, K, Rb, Cs, La, Sr, Cr, Ag, Ca, Pr, Nd, Bi. And at least one element selected from the group consisting of lanthanum series elements of the periodic table, wherein B is Al, Ga, In, Nb, Sn, Ti, Ru, Rh, Pd, Re, OSirPt, U CO, Fe, Ni, Mn, Cr, Cu, Mg, V, Nb, Ta, MO, and a film containing a perovskite material containing at least one element selected from the group consisting of W and W or a bismuth oxide layer And a perovskite type structural block, which includes a bismuth layered structure ferroelectric crystal having a structure in which the perovskite type structural block is alternately stacked. The perovskite type structural block includes Li, Na, K, Ca, Sr, and Ba. , Y, Bi, Pb and at least one element L selected from rare earth elements, and at least one element R selected from Ti, Zr, Hf, V, Nb, Ta, W, MO, Mn, Fe, Si and Ge And a method for producing a film comprising oxygen.

[7] In the above [6],
The method for producing a film, wherein the oxidized and crystallized film has a thickness of 0.5 μm or more.

[8] In any one of the above [1] to [7],
The film that oxidizes and crystallizes the film is a film containing metal and C _a H _b .
During the heat treatment, a pressurized oxygen gas or a mixed gas of an oxygen gas and an inert gas is introduced onto the film, and the atmosphere on the film is reduced when the atmosphere on the film reaches the first pressure. Then, H ₂ O or CO ₂ is removed from the film, and the atmosphere on the film is pressurized when the atmosphere on the film reaches the second pressure.
However, a and b are natural numbers.

[9] In the above [8],
The first pressure is 1 atm or more (preferably 5 atm or more, more preferably 9 atm or more),
The second pressure is a pressure of 95% or less of the first pressure (preferably a pressure of 90% or less, more preferably a pressure of 85% or less, and further preferably a pressure of 80% or less). A method for manufacturing a film.

[10] In the above [8] or [9],
The introduction of the oxygen gas or the mixed gas is stopped when the atmosphere on the film is decompressed, and the introduction of the oxygen gas or the mixed gas is started when the atmosphere on the film is pressurized. A method for producing a membrane.

[11] In any one of the above [1] to [7],
The film is a film containing _a metal and C _a H _b ,
A method for producing a film, wherein, during the heat treatment, H ₂ O or CO ₂ is removed from the film while flowing a pressurized oxygen gas or a mixed gas of an oxygen gas and an inert gas over the film. .
However, a and b are natural numbers.

[12] In the above [11],
The method for producing a film, wherein the flow rate of the oxygen gas or the mixed gas is 5 liters / min or more.

[13] In the above [11] or [12],
When the atmosphere on the film reaches the first pressure, the atmosphere on the film is depressurized to remove H ₂ O or CO ₂ from the film, and the atmosphere on the film reaches the second pressure. A method for producing a film, characterized in that the atmosphere on the film is sometimes pressurized.

[14] In [13],
The first pressure is 1 atm or more (preferably 5 atm or more, more preferably 9 atm or more),
The second pressure is a pressure of 95% or less of the first pressure (preferably a pressure of 90% or less, more preferably a pressure of 85% or less, and further preferably a pressure of 80% or less). A method for manufacturing a film.

[15] In any one of [11] to [14] above,
The method for producing a film, wherein the oxygen gas or the mixed gas flowing on the film has a turbulent flow or a Karman vortex.

[16] In any one of the above [8] to [15],
The method for producing a film, wherein the heat treatment is performed while moving the film.

[17] In the above [16],
The film movement method is characterized in that the movement is a vertical movement or a rotational movement or a combination of a vertical movement and a rotational movement.

[18] In any one of the above [1] to [7],
The film is a film containing _a metal and C _a H _b ,
A method of manufacturing a film, wherein, during the heat treatment, H ₂ O or CO ₂ is removed from the film while moving the film.
However, a and b are natural numbers.

[19] In the above [18],
The film movement method is characterized in that the movement is a vertical movement or a rotational movement or a combination of a vertical movement and a rotational movement.

[20] A spin coating chamber for forming a film on the substrate by applying a sol-gel solution on the substrate by spin coating;
A first supply mechanism for supplying a gas into the spin coat chamber so that the temperature and humidity in the spin coat chamber become the first temperature and the first humidity;
A first exhaust mechanism for exhausting the spin coat chamber;
A transfer chamber connected to the spin coat chamber via a first gate valve;
A transport mechanism for transporting the substrate, disposed in the transport chamber;
A first heat treatment chamber connected to the transfer chamber via a second gate valve and heat-treating the film in a pressurized oxygen atmosphere;
A first heating mechanism disposed in the first heat treatment chamber for heating the film;
A second supply mechanism for supplying oxygen gas or a mixed gas of oxygen gas and inert gas into the first heat treatment chamber;
A second exhaust mechanism for exhausting the first heat treatment chamber;
Comprising
The first temperature is in the range of 10 ° C to 40 ° C;
The multi-chamber apparatus, wherein the first humidity is 30% or less.

[21] In the above [20],
A third supply mechanism for supplying air into the transfer chamber so that the temperature and humidity in the transfer chamber become the first temperature and the first humidity;
A third exhaust mechanism for exhausting the transfer chamber;
A multi-chamber apparatus characterized by comprising:

[22] In the above [20],
A fourth supply mechanism for supplying an inert gas, oxygen gas, or a mixed gas of oxygen gas and inert gas into the transfer chamber;
A fourth exhaust mechanism for exhausting the transfer chamber;
A multi-chamber apparatus characterized by comprising:

[23] In any one of [20] to [22] above,
The gas supplied by the first supply mechanism is air, Ar gas, oxygen gas, or a mixed gas of oxygen gas and inert gas.

[24] In any one of [20] to [23] above,
A temperature control mechanism for controlling the temperature of the sol-gel solution so that the sol-gel solution has a second temperature, wherein the second temperature is in a range of 20 ° C. to 100 ° C. Chamber device.

[25] In any one of [20] to [24] above,
A first control unit for controlling the film heated by the first heating mechanism in the first heat treatment chamber to be held at a fourth temperature after being held at a third temperature;
The third temperature is in the range of 100C to 450C;
The multi-chamber apparatus, wherein the fourth temperature is in a range of 451 ° C to 900 ° C.

[26] In any one of the above [20] to [24],
A second heat treatment chamber that is connected to the transfer chamber via a third gate valve and heat-treats the film heat-treated in the first heat treatment chamber in a pressurized oxygen atmosphere;
A second heating mechanism disposed in the second heat treatment chamber for heating the film;
A fifth supply mechanism for supplying oxygen gas or a mixed gas of oxygen gas and inert gas into the second heat treatment chamber;
A fifth exhaust mechanism for exhausting the second heat treatment chamber;
A second control unit for controlling the film heated by the first heating mechanism in the first heat treatment chamber to be maintained at a third temperature;
A third controller for controlling the film heated by the second heating mechanism in the second heat treatment chamber to be maintained at a fourth temperature;
Have
The third temperature is in the range of 100C to 450C;
The multi-chamber apparatus, wherein the fourth temperature is in a range of 451 ° C to 900 ° C.

[27] In the above [26],
One of the first heating mechanism and the second heating mechanism has a first lamp heater that irradiates the upper surface of the substrate with lamp light,
The other of the first heating mechanism and the second heating mechanism includes a second lamp heater that irradiates a lower surface of the substrate with lamp light.

[28] In any one of [20] to [27] above,
A film obtained by oxidizing and crystallizing the film by heat-treating the film is represented by the general formula ABO ₃ , where A is Al, Y, Na, K, Rb, Cs, La, Sr, Cr, Ag, It comprises at least one element selected from the group consisting of Ca, Pr, Nd, Bi and a lanthanum series element of the periodic table, and B is Al, Ga, In, Nb, Sn, Ti, Ru, Rh, Including a perovskite substance comprising at least one element selected from the group consisting of Pd, Re, OSirPt, U, CO, Fe, Ni, Mn, Cr, Cu, Mg, V, Nb, Ta, MO, and W A film or a film containing a bismuth layer-structured ferroelectric crystal having a structure in which bismuth oxide layers and perovskite structure blocks are alternately stacked, and the perovskite structure blocks are Li , Na, K, Ca, Sr, Ba, Y, Bi, Pb and at least one element L selected from rare earth elements, Ti, Zr, Hf, V, Nb, Ta, W, MO, Mn, Fe, Si And a multi-chamber device comprising at least one element R selected from Ge and oxygen, and oxygen.

[29] In any one of the above [20] to [25],
A holding unit disposed in the first heat treatment chamber and holding a substrate;
A fourth control unit for controlling the second supply mechanism and the second exhaust mechanism;
Comprising
The fourth control unit supplies pressurized oxygen gas or a mixed gas of oxygen gas and inert gas into the first heat treatment chamber, and when the first heat treatment chamber reaches the first pressure. The first heat treatment chamber is depressurized, and when the first heat treatment chamber reaches a second pressure, the substrate is heat treated in an atmosphere in which the first heat treatment chamber is pressurized. Multi-chamber device.

[30] In the above [29],
The first pressure is 1 atm or more (preferably 5 atm or more, more preferably 9 atm or more),
The second pressure is a pressure of 95% or less of the first pressure (preferably a pressure of 90% or less, more preferably a pressure of 85% or less, and further preferably a pressure of 80% or less). Multi-chamber device.

[31] In the above [29] or [30],
The fourth control unit stops introduction of the oxygen gas or the mixed gas into the first heat treatment chamber when depressurizing the first heat treatment chamber, and pressurizes the first heat treatment chamber. The gas introduction mechanism is controlled so that the introduction of the oxygen gas or the mixed gas into the first heat treatment chamber is started.

[32] In any one of [20] to [25] above,
A holding unit disposed in the first heat treatment chamber and holding a substrate;
A fifth control unit for controlling the second supply mechanism and the second exhaust mechanism;
Comprising
The fifth control unit controls the substrate to be heat-treated in a pressurized oxygen atmosphere while flowing a pressurized oxygen gas or a mixed gas of an oxygen gas and an inert gas over the substrate. Chamber device.

[33] In the above [32],
The fifth control unit supplies pressurized oxygen gas or a mixed gas of oxygen gas and inert gas into the first heat treatment chamber, and when the first heat treatment chamber reaches the first pressure. The first heat treatment chamber is depressurized, and when the first heat treatment chamber reaches a second pressure, the substrate is heat treated in an atmosphere in which the first heat treatment chamber is pressurized. Multi-chamber device.

[34] In the above [32] or [33],
The second supply mechanism has an obstacle;
A multi-chamber apparatus characterized by forming a turbulent flow or a Karman vortex in the oxygen gas or mixed gas flowing on the substrate by the obstacle.

[35] In any one of [29] to [34] above,
A drive mechanism for moving the holding portion in the first heat treatment chamber;
The multi-chamber apparatus, wherein the heat treatment is performed while moving the substrate together with the holding portion by the driving mechanism.

[36] In any one of [20] to [25] above,
A holding unit disposed in the first heat treatment chamber and holding a substrate;
A drive mechanism for moving the holding part;
A sixth control unit that controls the drive mechanism, the second supply mechanism, and the second exhaust mechanism;
Comprising
The sixth control unit controls the substrate to be heat-treated in a pressurized oxygen atmosphere while moving the substrate together with the holding unit.

By applying one embodiment of the present invention, variation in the amount of a substance that evaporates from a film when the film is formed over the substrate by applying a sol-gel solution over the substrate can be suppressed.
In addition, by applying one embodiment of the present invention, in-plane uniformity of a crystallized state in a crystallized film obtained by crystallizing a film containing _a metal and C _a H _b can be improved.

It is a top view which shows typically the multi-chamber apparatus which concerns on 1 aspect of this invention. It is a schematic diagram which shows the spin coater apparatus provided with the spin coat chamber 104 shown in FIG. It is sectional drawing which shows typically the 1st pressurization type | mold lamp annealing apparatus provided with the 1st heat processing chamber 107 shown in FIG. It is sectional drawing which shows typically the 2nd pressurization type | mold lamp annealing apparatus provided with the 2nd heat processing chamber 108 shown in FIG. (A) ~ (C) is a cross-sectional view illustrating a crystallization process for crystallization by oxidizing the film containing metal and C _a H _b with the pressurized lamp annealing apparatus shown in FIG. 3 or FIG. 4 . (A) is a cross-sectional view schematically showing a pressure-type lamp annealing apparatus according to one embodiment of the present invention, (B) is a plan view showing a gas flow in the processing chamber shown in (A), and (C) is (B) It is a figure which shows typically the flow of the gas shown to. It is a figure which shows control of a pressurization type lamp annealing apparatus. (A) is the photograph which image | photographed the surface of the PZT film | membrane of a comparative example, (B) is the photograph which image | photographed the surface of the PZT film | membrane of an Example.

  Hereinafter, embodiments and examples of the present invention will be described in detail with reference to the drawings. However, the present invention is not limited to the following description, and it will be easily understood by those skilled in the art that modes and details can be variously changed without departing from the spirit and scope of the present invention. Therefore, the present invention should not be construed as being limited to the description of the embodiments and examples below.

(First embodiment)
≪Multi-chamber device≫
FIG. 1 is a plan view schematically illustrating a multi-chamber apparatus according to an aspect of the present invention. FIG. 2 is a schematic diagram showing a spin coater apparatus including the spin coat chamber 104 shown in FIG. FIG. 3 is a cross-sectional view schematically showing a first pressure-type lamp annealing apparatus provided with the first heat treatment chamber 107 shown in FIG. FIG. 4 is a cross-sectional view schematically showing a second pressure type lamp annealing apparatus provided with the second heat treatment chamber 108 shown in FIG. The first and second pressure-type lamp annealing apparatuses perform lamp annealing (RTA; rapid thermal anneal) in a pressurized state.

  The multi-chamber apparatus shown in FIG. 1 includes a load lock chamber 101, a transfer chamber 102, a transfer robot 103, a spin coat chamber 104, an aligner 106, a first heat treatment chamber 107, and a second heat treatment chamber 108. have.

  A vacuum pump (not shown) is connected to the load lock chamber 101, and a substrate (for example, Si substrate, Si wafer) 23 to be processed is introduced into the load lock chamber 101, and the load lock chamber 101 is filled with the vacuum pump. Is evacuated.

  The transfer chamber 102 is connected to the load lock chamber 101 via a gate valve 151. A transfer robot 103 is disposed in the transfer chamber 102. A vacuum pump (not shown) is connected to the transfer chamber 102, and the inside of the transfer chamber 102 is evacuated by the vacuum pump.

  The multi-chamber apparatus supplies a third supply for supplying gas (for example, air) into the transfer chamber 102 so that the temperature and humidity in the transfer chamber 102 become the first temperature and the first humidity described later. A mechanism and a third exhaust mechanism for exhausting the inside of the transfer chamber 102 may be provided. In the transfer chamber 102, inert gas such as Ar gas, oxygen gas, or a mixture of oxygen gas and inert gas A fourth supply mechanism that supplies gas and a fourth exhaust mechanism that exhausts the inside of the transfer chamber 102 may be provided.

<Spin coater apparatus of FIG. 2>
The spin coat chamber 104 is connected to the transfer chamber 102 via a gate valve 151.
The spin coater shown in FIG. 2 has a spin coat chamber 104 in which a film is formed on a substrate 23 by applying a sol-gel solution on the substrate 23 by spin coating, and the temperature and humidity in the spin coat chamber 104 are set as follows. A first supply mechanism for supplying gas into the spin coat chamber 104 and a first exhaust mechanism for exhausting the interior of the spin coat chamber 104 so that the temperature and the first humidity are the same. The first temperature is in the range of 10 ° C. to 40 ° C., and the first humidity is preferably 30% or less (preferably 20% or less, more preferably 10% or less).

In the first supply mechanism, an air supply source 111 is connected to the spin coat chamber 104 via a regulator 112, a refrigeration air dryer 113, a filter 114, a flow meter 115, a valve 116, a valve / needle 117 and a heat exchanger 118. It is a thing.
The first exhaust mechanism exhausts the gas in the spin coat chamber 104 to the cup through the damper 119.

  In the present embodiment, air is used as the gas supplied by the first supply mechanism. However, the present invention is not limited to this, and the gas supplied by the first supply mechanism may be Ar gas, oxygen gas, or A mixed gas of oxygen gas and inert gas may be used.

  The spin coater device also includes a thermohygrometer 120 that measures the temperature and humidity in the spin coat chamber 104, and a differential pressure meter 121 that measures the differential pressure in the first supply mechanism and the spin coat chamber 104.

  The spin coater device has a temperature control mechanism for controlling the temperature of the sol-gel solution so that the sol-gel solution becomes the second temperature. The second temperature may be in the range of 20 ° C to 100 ° C (preferably 40 ° C to 80 ° C). The set temperature of the line heater in the chemical line of the sol-gel solution is preferably 40 ° C., and the actual solution temperature when the lamp heater is heated after application of the solution is preferably 80 ° C.

<First Pressurized Lamp Annealing Apparatus in FIG. 3>
The first heat treatment chamber 107 is connected to the transfer chamber 102 via a gate valve 151.
The first pressure-type lamp annealing apparatus shown in FIG. 3 is disposed in a first heat treatment chamber 107 for heat-treating a film applied in the spin coat chamber 104 in a pressurized oxygen atmosphere, and the first heat treatment chamber 107. The lamp heater 5 as a first heating mechanism for heating the film, a second supply mechanism for supplying oxygen gas into the first heat treatment chamber 107, and a second exhaust for exhausting the interior of the first heat treatment chamber 107 An exhaust mechanism and a controller for controlling the film heated by the lamp heater 5 in the first heat treatment chamber 107 to be maintained at a third temperature are provided. The third temperature may be in the range of 100 ° C. to 450 ° C. (preferably 200 ° C. to 450 ° C.).

  The second supply mechanism is a pressure line described later. The second exhaust mechanism is a pressure adjustment line to be described later. In this embodiment, oxygen gas is used as the gas supplied by the second supply mechanism. However, the present invention is not limited to this, and oxygen gas and inert gas are supplied as the gas supplied by the second supply mechanism. You may use the mixed gas of.

<Second Pressurized Lamp Annealing Apparatus in FIG. 4>
The second heat treatment chamber 108 is connected to the transfer chamber 102 via a gate valve 151.
The second pressure-type lamp annealing apparatus shown in FIG. 4 is disposed in the second heat treatment chamber 108 and the second heat treatment chamber 108 for heat-treating the film heat-treated in the first heat treatment chamber 107 in a pressurized oxygen atmosphere. In addition, the lamp heater 5 as a second heating mechanism for heating the film, a fifth supply mechanism for supplying oxygen gas into the second heat treatment chamber 108, and a second exhaust for exhausting the inside of the second heat treatment chamber 108. And a control unit for controlling the film heated by the lamp heater 5 in the second heat treatment chamber 108 so as to be maintained at a fourth temperature. The fourth temperature may be in the range of 451 ° C to 900 ° C.

  The fifth supply mechanism is a pressure line described later. The fifth exhaust mechanism is a pressure adjustment line described later. In this embodiment, oxygen gas is used as the gas supplied by the fifth supply mechanism. However, the present invention is not limited to this, and oxygen gas and inert gas are supplied as the gas supplied by the fifth supply mechanism. You may use the mixed gas of.

<Detailed Description of First Pressurized Lamp Annealing Apparatus in FIG. 3>
The first pressure-type lamp annealing apparatus has a chamber 1 made of Al. The chamber 1 is configured to be water cooled by a cooling mechanism 7. A holding unit 3 that holds the substrate 23 is provided in the chamber 1. Quartz glasses 4 a and 4 b are arranged above the holding unit 3. The quartz glasses 4a and 4b are formed so as to withstand the pressure when the inside of the chamber is pressurized.

  A lamp heater 5 is disposed on the quartz glass 4 a and 4 b, and the lamp heater 5 is disposed inside a metal housing 6. An exhaust duct (not shown) is connected to the upper portion of the housing 6, and this exhaust duct exhausts heat in the housing 6.

  A radiation thermometer 9 is disposed below the chamber 1 located below the holding unit 3. The first heat treatment chamber 107 formed in the chamber 1 is preferably narrow. This is because the time required to pressurize to a predetermined pressure can be shortened.

The first heat treatment chamber 107 in the chamber 1 is connected to a pressurization line (pressurization mechanism) having a pressurization valve, and the pressurization line includes an inert gas supply source (for example, an argon gas supply source). pressurized line has a pressure line having an oxygen gas supply O ₂ pressure lines and a nitrogen gas supply source having a.

  The first heat treatment chamber 107 in the chamber 1 is connected to a pressure adjustment line having a valve 39, and the pressure adjustment line has an exhaust mechanism. The first heat treatment chamber 107 in the chamber 1 can be pressurized to a predetermined pressure (for example, less than 1 MPa) by the pressure adjustment line and the pressure line.

The pressurizing lamp annealing apparatus has a control unit that controls the pressurizing line and the pressure adjusting line.
The control unit introduces pressurized oxygen gas or a mixed gas of oxygen gas and inert gas into the first heat treatment chamber 107, and the first heat treatment chamber 107 reaches the first pressure when the first heat treatment chamber 107 reaches the first pressure. The inside of the heat treatment chamber 107 is depressurized to remove H ₂ O or CO ₂ from the film, and the inside of the first heat treatment chamber 107 is pressurized when the inside of the first heat treatment chamber 107 reaches the second pressure. The substrate 23 may be controlled to be heat-treated in a pressurized atmosphere (first control method). In that case, the first pressure may be 1 atm or more (preferably 5 atm or more, more preferably 9 atm or more), and the second pressure is 95% or less of the first pressure (preferably 90%). The pressure is preferably less than 85%, more preferably less than 85%, and still more preferably less than 80%. For example, when the first pressure is 1 atm or more, the second pressure may be 0.9 atm or less, and when the first pressure is 5 atm or more, the second pressure is 4 atm or less. Or, when the first pressure is 10 atm or more, the second pressure may be 9 atm or less.

  Further, the controller stops the introduction of the oxygen gas or the mixed gas into the first heat treatment chamber 107 when the pressure in the first heat treatment chamber 107 is reduced, and pressurizes the first heat treatment chamber 107. At this time, the pressurization line and the pressure adjustment line may be controlled so that introduction of the oxygen gas or the mixed gas into the first heat treatment chamber 107 is started.

Further, the control unit may control the substrate 23 to be heat-treated in a pressurized oxygen atmosphere while flowing pressurized oxygen gas or a mixed gas of oxygen gas and inert gas onto the substrate 23 (second control). Method). In that case, the flow rate of the oxygen gas or the mixed gas may be 5 liter / min or more (desirably 10 liter / min or more).
Further, the first control method and the second control method may be combined.

  Each of the housing 6 and the lamp heater 5 is connected to a dry air supply source (not shown) via a pipe. By introducing dry air from the dry air supply source into the housing and the lamp heater, heat accumulated in the housing and the lamp heater can be exhausted from the exhaust duct.

  In the present embodiment, the lamp heater 5 is disposed above the substrate 23, and the substrate 23 is heated from the upper surface by irradiating the upper surface of the substrate 23 with lamp light. However, the present invention is not limited to this. The lamp heater 5 may be disposed below the substrate 23, and the substrate 23 may be heated from the lower surface by irradiating lamp light to the lower surface of the substrate 23. The lamp heater 5 may be disposed both above and below the substrate 23. Alternatively, the substrate 23 may be heated from both sides by irradiating the upper and lower surfaces of the substrate 23 with lamp light.

  The planar shape of the first heat treatment chamber 107 in the chamber 1 is substantially circular. The gas introduced from the pressurizing line is supplied onto the substrate 23 while being dispersed in a shower shape in a direction substantially parallel to the surface of the substrate 23. The gas supplied onto the substrate 23 is exhausted from a plurality of shower-like gas passages arranged in a direction substantially parallel to the surface of the substrate 23. The shower-like gas passage is formed in the chamber 1. As described above, the gas can be supplied to the substrate 23 with good uniformity by flowing the gas in a shower-like manner and exhausting the gas through the shower-like gas passage.

  A gate valve 151 is arranged on one side of the chamber 1, and a transfer robot 103 for transferring the substrate 23 is arranged in the vicinity of the gate valve 151. With the gate valve 151 opened, the substrate 23 is carried into and out of the first heat treatment chamber 107 in the chamber by the transfer robot 103.

  The gate valve 151 has an opening for introducing the substrate 23 into the first heat treatment chamber 107, and a valve body 49c. By opening and closing the valve body 49c, the opening can be opened and closed.

<Detailed Description of Second Pressurized Lamp Annealing Apparatus in FIG. 4>
The first pressure-type lamp annealing apparatus of FIG. 3 arranges the lamp heater 5 so that the upper surface of the substrate 23 is irradiated with lamp light, whereas the second pressure-type lamp annealing apparatus of FIG. The lamp heater 5 is arranged so as to irradiate the lower surface of the lamp with lamp light. Except for this point, the second pressure-type lamp annealing device shown in FIG. 4 and the first pressure-type lamp annealing device shown in FIG.

  More specifically, the second pressure-type lamp annealing apparatus is similar to the first pressure-type lamp annealing apparatus shown in FIG. 3, the Al chamber 1, the cooling mechanism 7, and the holding unit 3 that holds the substrate 23. A quartz glass 4a, 4b disposed below the holding unit 3, a lamp heater 5 disposed under the quartz glass 4a, 4b, a metal housing 6, and an exhaust duct (not shown). , A radiation thermometer 9 located above the holding unit 3, a pressurization line (pressurization mechanism) connected to the second heat treatment chamber 108 in the chamber 1, and a pressure connected to the second heat treatment chamber 108 It has a control part which controls an adjustment line and a pressurization line and a pressure adjustment line.

≪Membrane manufacturing method≫
A film manufacturing method using the multi-chamber apparatus shown in FIG. 1 will be described.

  The substrate 23 is introduced into the load lock chamber 101, and the load lock chamber 101 is evacuated by a vacuum pump. Further, the transfer chamber 102 is evacuated by a vacuum pump. Further, the gas in the aligner 106 is exhausted.

  Next, the gate valve 151 is opened, and the transfer robot 103 transfers the substrate 23 in the load lock chamber 101 through the transfer chamber 102 into the aligner 106. Then, the gate valve 151 is closed. Next, the aligner 106 is set to a mixed gas atmosphere of an inert gas such as Ar and oxygen gas or an oxygen gas atmosphere. Next, alignment of the substrate 23 is performed by the aligner 106.

Next, the spin coat chamber 104 is exhausted by the first exhaust mechanism. Further, the transfer chamber 102 is evacuated by a vacuum pump. Next, the gate valve 151 is opened, and the substrate 23 in the aligner 106 is transferred into the spin coat chamber 104 through the transfer chamber 102 by the transfer robot 103, and the gate valve 151 is closed. The substrate 23 is, for example, a SiO ₂ film formed by thermal oxidation a 6-inch or 8-inch silicon wafer, and forming a conductive film (electrode) to the SiO ₂ film.

<Application by spin coating>
Next, air is supplied from the air supply source 111 into the spin coat chamber 104 through the regulator 112, the refrigeration air dryer 113, the filter 114, the flow meter 115, the valve 116, the valve needle 117 and the heat exchanger 118. The gas in 104 is exhausted to the cup through the damper 119 (see FIG. 2). Thereby, the temperature and humidity in the spin coat chamber 104 are adjusted to the first temperature and the first humidity. The first temperature is in the range of 10 ° C. to 40 ° C., and the first humidity is preferably 30% or less (preferably 20% or less, more preferably 10% or less).

Thus, the sol-gel solution is applied onto the substrate by spin coating in an air atmosphere having the first temperature and the first humidity. As a result, a film containing metal and C _a H _b (a, b: natural number) (hereinafter referred to as “film”) is formed on the substrate (see FIG. 2). The temperature of the sol-gel solution is controlled to the second temperature by the temperature control mechanism. The second temperature may be in the range of 20 ° C to 100 ° C (preferably 40 ° C to 80 ° C). Note that the film may be an organometallic material film.

  As described above, when the sol-gel solution is applied, the amount of the substance (alcohol, water, etc.) that evaporates from the film formed on the substrate is changed in order to obtain an air atmosphere having the first temperature and the first humidity. Can be suppressed. As a result, fluctuations in the film thickness and film quality of the film formed on the substrate can be suppressed. In addition, by controlling the temperature of the sol-gel solution to the second temperature, fluctuations in the amount of a substance (alcohol, water, etc.) that evaporates from the film formed on the substrate can be suppressed.

  In this embodiment, the atmosphere when applying the sol-gel solution is an air atmosphere, but the present invention is not limited to this, and the atmosphere when applying the sol-gel solution is an inert gas such as Ar gas or oxygen gas. Alternatively, an atmosphere of a mixed gas of oxygen gas and inert gas may be used.

<Oxidation method>
Next, the inside of the first heat treatment chamber 107 is evacuated by an exhaust mechanism, and the transfer chamber 102 is evacuated by a vacuum pump. Next, the gate valve 151 is opened, and the substrate 23 in the spin coat chamber 104 is transferred into the first heat treatment chamber 107 through the transfer chamber 102 by the transfer robot 103. Then, the gate valve 151 is closed.

  Next, RTA treatment is performed at a third temperature for a predetermined time in a pressurized oxygen atmosphere using the first pressure-type lamp annealing apparatus. The third temperature may be in the range of 100 ° C to 450 ° C, preferably 200 ° C to 450 ° C. Hereinafter, it will be described in detail with reference to FIG.

Oxygen gas is introduced into the first heat treatment chamber 107 from the oxygen gas supply source O ₂ of the pressurization line. At the same time, by gradually closing the valve 39 of the pressure adjustment line, the inside of the first heat treatment chamber 107 is gradually pressurized while maintaining an oxygen atmosphere. Then, when the inside of the first heat treatment chamber 107 reaches the first pressure, the pressure inside the first heat treatment chamber 107 is reduced by the pressure adjustment line to remove H ₂ O or CO ₂ from the film, When the inside of the heat treatment chamber 107 reaches the second pressure, the inside of the first heat treatment chamber 107 is pressurized by a pressure adjustment line. Then, when the inside of the first heat treatment chamber 107 reaches the first pressure again, the inside of the first heat treatment chamber 107 is decompressed by the pressure adjustment line. The first pressure may be 1 atm or more (preferably 5 atm or more, more preferably 9 atm or more), and the second pressure is 95% or less of the first pressure (preferably 90% or less). More preferably, the pressure is 85% or less, and further preferably 80% or less. Note that the introduction of oxygen gas may be stopped when the inside of the first heat treatment chamber 107 is decompressed, or the introduction of oxygen gas may be started when the inside of the first heat treatment chamber 107 is pressurized. .

  While repeating the above pressurization and decompression, the lamp heater 5 irradiates the film on the substrate 23 with lamp light through the quartz glasses 4a and 4b. As a result, the film is rapidly heated to the fourth temperature and held at the fourth temperature for a predetermined time. As a result, the metal and oxygen in the film react quickly and the film is oxidized.

  Then, the film is rapidly cooled by stopping the lamp heater 5. Next, the supply of oxygen from the oxygen supply source of the pressurization line is stopped, the open valve of the atmosphere release line is opened, and the inside of the first heat treatment chamber 107 is returned to atmospheric pressure.

  The above oxidation process will be described in more detail with reference to FIG. 5A to 5C are cross-sectional views illustrating a method for oxidizing the film on the substrate 23 using the pressure-type lamp annealing apparatus shown in FIG.

The metal in the film reacts with the oxygen 51 until the inside of the first heat treatment chamber 107 reaches the first pressure (for example, 10 atm) (see FIG. 5A). At that time, CO ₂ 52 and H ₂ O 53 that have reacted with C _a H _{b in the} film are generated from the film (see FIG. 5B). Next, the inside of the first heat treatment chamber 107 is depressurized, and the CO ₂ 52 that remains in the vicinity of the surface of the film and drifts until the inside of the first heat treatment chamber 107 reaches the second pressure (for example, 8.5 atmospheres). And H ₂ O 53 are exhausted from the top of the film to the outside of the first heat treatment chamber 107 (see FIG. 5C). Next, the inside of the first heat treatment chamber 107 is pressurized, and the metal in the film reacts with the oxygen 51 until the inside of the first heat treatment chamber 107 reaches the first pressure (for example, 10 atm) (FIG. 5A )reference).

In this way, when the inside of the first heat treatment chamber 107 is pressurized, fresh oxygen is supplied onto the film, and degas components such as CO ₂ 52 and H ₂ O 53 that hinder the oxidation reaction in which the metal and oxygen 51 react ( Oxygen other than O ₂ , a gas containing nitrogen, carbon, and hydrogen) is exhausted out of the first heat treatment chamber 107 when the inside of the first heat treatment chamber 107 is depressurized, and then in the first heat treatment chamber 107. Is repeatedly applied to supply fresh oxygen onto the membrane. Thereby, CO ₂ , H ₂ O, and the like that hinder the oxidation reaction that occurs when the film is oxidized can be effectively removed. As a result, the oxidation of the film can be promoted, and the in-plane uniformity of the oxidized state of the film can be dramatically improved.

<Crystalling method>
Next, the inside of the second heat treatment chamber 108 is evacuated by an exhaust mechanism, and the transfer chamber 102 is evacuated by a vacuum pump. Next, the gate valve 151 is opened, and the transfer robot 103 transfers the substrate 23 in the first heat treatment chamber 107 through the transfer chamber 102 into the second heat treatment chamber 108. Then, the gate valve 151 is closed.

  Next, an RTA treatment is performed at a fourth temperature for a predetermined time in a pressurized oxygen atmosphere using a second pressure-type lamp annealing apparatus. The fourth temperature may be in the range of 451 ° C to 900 ° C, and preferably 620 ° C to 650 ° C. Hereinafter, a detailed description will be given with reference to FIG.

By the same method as the first oxidation method described above, the inside of the second heat treatment chamber 108 is pressurized to reach the first pressure and the inside of the second heat treatment chamber 108 is depressurized so that H ₂ O or CO ₂ is reduced. The inside of the second heat treatment chamber 108 is pressurized when it is removed from the film and the second pressure is reached. Then, when the inside of the second heat treatment chamber 108 reaches the first pressure again, the pressure is reduced. The first pressure may be 1 atm or more (preferably 5 atm or more, more preferably 9 atm or more), and the second pressure is 95% or less of the first pressure (preferably 90% or less). More preferably, the pressure is 85% or less, and further preferably 80% or less.

  While repeating the pressurization and decompression, the lamp heater 5 irradiates the lower surface of the substrate 23 with the lamp light through the quartz glasses 4a and 4b. As a result, the film is rapidly heated to the fourth temperature and held at the fourth temperature for a predetermined time. As a result, the metal and oxygen in the film react quickly, and the film is oxidized and crystallized.

  Next, by the same method as the first oxidation method, the lamp heater 5 is stopped, the film is rapidly cooled to 40 ° C. or lower, the supply of oxygen is stopped, and the inside of the second heat treatment chamber 108 is atmospheric pressure. Return to.

The above crystallization process is the same as the process shown in FIG. 5. The metal in the film and the oxygen 51 react until the inside of the second heat treatment chamber 108 reaches the first pressure (for example, 10 atm). At that time, CO ₂ 52 and H ₂ O 53 reacted with C _a H _{b in the} film are generated from the film. Next, the inside of the second heat treatment chamber 108 is depressurized, and the CO ₂ 52 that remains in the vicinity of the surface of the film and floats until the inside of the second heat treatment chamber 108 reaches the second pressure (for example, 8.5 atmospheres). The H ₂ O 53 is exhausted from the second heat treatment chamber 108 from above the film. Next, the inside of the second heat treatment chamber 108 is pressurized, and the metal in the film and the oxygen 51 react until the inside of the second heat treatment chamber 108 reaches the first pressure (for example, 10 atm).

In this way, when the inside of the second heat treatment chamber 108 is pressurized, fresh oxygen is supplied onto the film, and degas components (such as CO ₂ 52 and H ₂ O 53) that hinder the oxidation reaction in which the metal and oxygen 51 react ( (A gas containing oxygen, nitrogen, carbon, and hydrogen other than O ₂ ) is exhausted out of the second heat treatment chamber 108 when the inside of the second heat treatment chamber 108 is depressurized, and then in the second heat treatment chamber 108. Is repeatedly applied to supply fresh oxygen onto the membrane. Thereby, CO ₂ , H ₂ O, and the like that hinder the oxidation reaction that occurs when the film is oxidized can be effectively removed. As a result, the crystallization of the film can be promoted, and the in-plane uniformity of the crystallization state of the film can be dramatically improved. In addition, a film with high crystallinity can be manufactured.

The crystallized film obtained by oxidizing the film as described above is represented by the general formula ABO ₃ , where A is Al, Y, Na, K, Rb, Cs, La, Sr, Cr, Ag, Ca, Comprising at least one element selected from the group consisting of Pr, Nd, Bi and a lanthanum series element of the periodic table, wherein B is Al, Ga, In, Nb, Sn, Ti, Ru, Rh, Pd, A film comprising a perovskite material comprising at least one element selected from the group consisting of Re, OSirPt, U, CO, Fe, Ni, Mn, Cr, Cu, Mg, V, Nb, Ta, MO and W; Alternatively, it is a film including a bismuth layer-structured ferroelectric crystal having a structure in which a bismuth oxide layer and a perovskite structure block are alternately stacked, and the perovskite structure block includes Li, Na, K, C At least one element L selected from a, Sr, Ba, Y, Bi, Pb and rare earth elements, and selected from Ti, Zr, Hf, V, Nb, Ta, W, MO, Mn, Fe, Si and Ge It may be composed of at least one element R and oxygen.

  The thickness of the film obtained by oxidizing and crystallizing the film as described above is preferably 0.5 μm or more (preferably 1 μm or more).

According to the present embodiment, the first heat treatment chamber 107 emits lamp light from the upper surface of the substrate 23, and the second heat treatment chamber 108 emits lamp light from the lower surface of the substrate 23. And deformation can be suppressed.
In this embodiment, after the film is oxidized in the first heat treatment chamber 107, the film is crystallized in the second heat treatment chamber 108. However, the film is oxidized in the second heat treatment chamber 108. The film may be crystallized in the first heat treatment chamber 107. Even in that case, warpage and deformation of the substrate 23 due to heat can be suppressed.

<First Modification of Oxidation Method>
The above oxidation method is a method of effectively removing CO ₂ and H ₂ O generated when the film is oxidized by repeating pressurization and decompression in the first heat treatment chamber 107, whereas oxidation is performed. In the first modification of the method, CO ₂ and H ₂ generated when the film is oxidized by exhausting the inside of the first heat treatment chamber 107 while flowing pressurized oxygen gas into the first heat treatment chamber 107. This is a method for effectively removing O. Except for this point, the first modification of the oxidation method is the same as the above oxidation method. Note that the inside of the first heat treatment chamber 107 is preferably at a constant pressure.

  The amount of oxygen gas flowing into the first heat treatment chamber 107 is preferably 5 liter / min or more (preferably 10 liter / min or more).

<First Modification of Crystallization Method>
The above crystallization method is a method of effectively removing CO ₂ and H ₂ O generated when the film is crystallized by repeating the pressurization and decompression in the second heat treatment chamber 108. In the first modification of the crystallization method, CO gas generated when the film is crystallized by evacuating the second heat treatment chamber 108 while flowing pressurized oxygen gas into the second heat treatment chamber 108. _This is a method of effectively removing ₂ and H ₂ O. Except for this point, the first modification of the crystallization method is the same as the crystallization method described above. Note that the inside of the second heat treatment chamber 108 is preferably at a constant pressure.

  The amount of oxygen gas flowing into the second heat treatment chamber 108 is preferably 5 liter / min or more (preferably 10 liter / min or more).

According to the first modification of the crystallization method, CO ₂ and H ₂ O generated when the film is crystallized can be effectively removed by flowing oxygen gas over the film. As a result, the in-plane uniformity of the crystallized state of the film can be dramatically improved. In addition, a film with high crystallinity can be manufactured.

<Second Modification of Oxidation Method>
The second modification of the oxidation method is a combination of the above oxidation method and the first modification of the above oxidation method. That is, by repeating the pressurization and decompression in the first heat treatment chamber 107 and flowing the pressurized oxygen gas into the first heat treatment chamber 107, CO ₂ and H ₂ O generated when the film is oxidized are reduced. It can be effectively removed.

<Second Modification of Crystallization Method>
The second modification of the crystallization method is a combination of the crystallization method described above and the first modification of the crystallization method described above. That is, by repeating the pressurization and decompression in the second heat treatment chamber 108 and flowing the pressurized oxygen gas into the second heat treatment chamber 108, CO ₂ or H ₂ O generated when the film is crystallized. Can be effectively removed.

  In this embodiment, oxygen gas is introduced into the first heat treatment chamber 107 and the inside of the first heat treatment chamber 107 is in a pressurized oxygen atmosphere. However, a mixed gas of oxygen gas and inert gas is used as the first gas treatment chamber 107. It may be introduced into the heat treatment chamber 107 and the inside of the first heat treatment chamber 107 may be a mixed atmosphere of pressurized oxygen gas and inert gas. In that case, the ratio between the oxygen gas and the inert gas may be appropriately selected according to the pressure in the processing chamber.

(Second Embodiment)
≪Multi-chamber device≫
The multi-chamber apparatus according to one embodiment of the present invention is the same as the multi-chamber apparatus illustrated in FIG. 1 except for the second pressure-type lamp annealing apparatus including the second heat treatment chamber 108.

≪Membrane manufacturing method≫
In the film manufacturing method according to the first embodiment, the film on the substrate is oxidized by performing the RTA process at a third temperature for a predetermined time in a pressurized oxygen atmosphere using the first pressure-type lamp annealing apparatus. After that, the film on the substrate is crystallized by performing the RTA treatment at a fourth temperature for a predetermined time in a pressurized oxygen atmosphere using the second pressurized lamp annealing apparatus. On the other hand, in the film manufacturing method according to the second embodiment, the RTA treatment at a third temperature for a predetermined time is performed in a pressurized oxygen atmosphere by using the first pressure-type lamp annealing apparatus, thereby forming the film on the substrate. After the oxidation treatment, the film on the substrate is crystallized by performing RTA treatment for a predetermined time at a fourth temperature in a pressurized oxygen atmosphere using the first pressure-type lamp annealing apparatus. . Except for this point, the film manufacturing method according to the present embodiment is the same as the film manufacturing method according to the first embodiment.

(Third embodiment)
≪Multi-chamber device≫
The multi-chamber apparatus according to one aspect of the present invention is configured by disposing the obstacle 54 shown in FIG. 6 in each of the first and second pressure lamp annealing apparatuses in the multi-chamber apparatus shown in FIG. Except for this point, the multi-chamber apparatus according to the present embodiment and the multi-chamber apparatus according to the first embodiment are the same.

<First Pressurized Lamp Annealing Device>
6A is a cross-sectional view schematically showing the first pressure-type lamp annealing apparatus, and FIG. 6B is a gas flow in the first heat treatment chamber 107 shown in FIG. 6A. FIG. 6C is a diagram schematically showing the gas flow shown in FIG. 6B.

  The first pressure lamp annealing apparatus shown in FIG. 6A includes a gas introduction mechanism having an obstacle 54.

≪Membrane manufacturing method≫
Only the differences of this embodiment from the first embodiment will be described.

<Oxidation method and crystallization method>
In the oxidation method and the crystallization method according to the present embodiment, when the pressurized oxygen gas is introduced into the first heat treatment chamber 107 or the second heat treatment chamber 108, the obstacle 54 disturbs the oxygen gas 51 flowing on the substrate 23. A flow or Karman vortex is formed. In this embodiment, the obstacle 54 is fixed. However, the present invention is not limited to this, and the obstacle may be moved in the first heat treatment chamber 107. The Karman vortex is a row of vortices that can be alternated behind an obstacle when placed in a flow or when a solid is moved in a fluid.

  Specifically, the oxidation method, the crystallization method, the first modification of the oxidation method, the first modification of the crystallization method, the second modification of the oxidation method, and the second modification of the crystallization method according to the first embodiment. In each method, when oxygen gas is introduced into the heat treatment chamber, turbulent flow or Karman vortex is formed in the oxygen gas flowing on the substrate 23 by the obstacle 54.

  In this embodiment, the same effect as that of the first embodiment can be obtained.

In the present embodiment, since turbulent flow or Karman vortex is formed in the oxygen gas flowing on the substrate 23, CO ₂ and H ₂ O generated when the film is oxidized can be more effectively removed.

(Fourth embodiment)
≪Multi-chamber device≫
In the multi-chamber apparatus according to one embodiment of the present invention, each of the first and second pressure-type lamp annealing apparatuses in the multi-chamber apparatus shown in FIG. Except for this point, the multi-chamber apparatus according to the present embodiment and the multi-chamber apparatus according to the first embodiment are the same.

≪Membrane manufacturing method≫
Only the differences of this embodiment from the first embodiment will be described.

<Oxidation method and crystallization method>
The oxidation method and the crystallization method according to the present embodiment are different from the first embodiment in that oxidation and crystallization are performed while moving the substrate together with the holding unit by the driving mechanism. It is the same.

  Specifically, the oxidation method, the crystallization method, the first modification of the oxidation method, the first modification of the crystallization method, the second modification of the oxidation method, and the second modification of the crystallization method according to the first embodiment. In each of the methods, the film is crystallized while the film on the substrate is moved together with the holding portion by the driving mechanism. This movement may be a vertical movement or rotational movement or a combination of vertical movement and rotational movement.

  In this embodiment, the same effect as that of the first embodiment can be obtained.

Further, in this embodiment, by moving the film on the substrate mechanically, CO ₂ or H ₂ O remaining in the vicinity of the surface of the film can be moved away from the surface of the film, and oxygen in the vicinity of the surface of the film can be obtained. The amount of gas can be increased. As a result, the oxidation of the film can be promoted.

  In addition, you may implement combining the 1st-4th embodiment mentioned above suitably.

[Spin coat]
Spin coating was performed using a Pb 30% excess sol-gel PZT solution (Pb / Zr / Ti = 130/55/45). This produced a PZT thin film on a 6-inch wafer. The coating amount per layer was 5 cc, and the PZT film was applied using the following spin conditions.

<Spin condition>
Increased from 0 to 50 rpm in 30 seconds with SLOPE control while performing lamp irradiation.
Increased from 0 to 500 rpm in 10 seconds with SLOPE control.
Increased to 500-2000 rpm in 10 seconds with SLOPE control (with back rinse applied).
Hold at 2000 rpm for 5 seconds.
Raise to 4500 rpm and hold for 7 seconds.
Increase to 7500 rpm and hold for 5 seconds.
SLOPE control refers to control for increasing the rotational speed stepwise, and includes control for increasing the rotational speed stepwise and control for continuously increasing the rotational speed.

[Drying / Pressurized pre-firing]
For each application, a drying process was performed for the purpose of removing the alcohol component. It was kept for 90 seconds on a hot plate heated to 200 ° C. and dried. Next, a pressure calcination step for the purpose of decomposing and removing organic components was performed. First, evacuation was performed to 10 ⁻³ Pa with a rotary pump. Thereafter, oxygen was introduced to 9.8 atm, and pressure and heat treatment were performed at 450 ° C. for 150 seconds using the pressure-type lamp annealing apparatus of FIG. 3 according to the first embodiment.

[Pressurized RTA (Rapid Thermal Anneal)]
Using the pressurized lamp annealing apparatus of FIG. 3 according to the first embodiment, a pressurized RTA treatment at 9.8 atmospheres, 650 ° C., 400 seconds was performed to promote oxidation and crystallization of the PZT film. At that time, the pressure type lamp annealing apparatus was controlled as shown in FIG.

  The above coating, drying, pressure calcination, and pressure RTA processes were repeated 5 times.

The control method shown in FIG. 7 will be described in detail below.
When the inside of the first heat treatment chamber 107 reaches a pressure of 9.8 atm, the pressure inside the first heat treatment chamber 107 is reduced by the pressure adjustment line, and when the inside of the first heat treatment chamber 107 reaches a pressure of 8.8 atm. The inside of the heat treatment chamber 107 is re-pressurized by a pressure adjustment line. When the inside of the processing chamber 55 reaches the pressure of 9.8 atm again, the inside of the first heat treatment chamber 107 is depressurized by the pressure adjustment line. Note that the introduction of the oxygen gas is stopped when the inside of the first heat treatment chamber 107 is decompressed, and the reintroduction of the oxygen gas is started when the inside of the first heat treatment chamber 107 is pressurized. Further, the substrate temperature is controlled by the lamp heater 5 as shown in FIG.

  In this way, a PZT film having a total film thickness of 1 μm was produced. A photograph of the surface of the PZT film in this example is shown in FIG.

(Comparative example)
Compare the PZT film with a total thickness of 1 μm without the pressure control that repeats pressurization and depressurization for the above-mentioned 450 ° C, 150 seconds, pressurization / heating treatment and 9.8 atm, 650 ° C, 400 sec. Made as an example. In other words, in the comparative example, the pressures of the above-described 450 ° C., 150 seconds, pressurizing / heating treatment and 9.8 atm, 650 ° C., 400 seconds of pressurized RTA treatment were kept constant, and the exhaust was stopped. Processed. Other than that, a PZT film was produced in the same manner as in the above-described example. The photograph which image | photographed the surface of the PZT film | membrane of this comparative example is shown to FIG. 8 (A).

  The surface of the PZT film of the comparative example shown in FIG. 8A is black and the in-plane uniformity of the crystallized state of the PZT film is poor, whereas the surface of the PZT film of the example shown in FIG. It can be seen that the oxidation progresses uniformly in the plane, and the in-plane uniformity of the crystallized state of the PZT film is improved.

DESCRIPTION OF SYMBOLS 1 Chamber 3 Holding part 4a, 4b Quartz glass 5 Lamp heater 6 Case 7 Cooling mechanism 9 Radiation thermometer 23 Substrate 39 Pressure adjustment line valve 49c Valve body 51 Oxygen 52 CO ₂
53 H ₂ O
54 Obstacle 101 Load lock chamber 102 Transfer chamber 103 Transfer robot 104 Spin coat chamber 106 Aligner 107 First heat treatment chamber 108 Second heat treatment chamber 111 Air supply source 112 Regulator 113 Refrigeration air dryer 114 Filter 115 Flow meter 116 Valve 117 Valve Needle 118 heat exchanger 119 damper 120 temperature / humidity meter 121 differential pressure gauge 151 gate valve

Claims (36)

A film is formed on the substrate by applying a sol-gel solution onto the substrate by spin coating in an atmosphere having a first temperature and a first humidity,
A method of producing a film in which the film is oxidized and crystallized by heat-treating the film in an oxygen gas atmosphere or a mixed gas atmosphere of an oxygen gas and an inert gas and in a pressurized atmosphere;
The first temperature is within a range of 10 ° C to 40 ° C;
The first humidity Ri der than 30%,
Said film when said oxygen gas atmosphere or the mixed gas atmosphere, turbulent or Karman vortex to the oxygen gas or the mixed gas is flowed over the film is formed by the failure of the membrane, characterized in Rukoto Production method. A film is formed on the substrate by applying a sol-gel solution onto the substrate by spin coating in an atmosphere having a first temperature and a first humidity,
A method of producing a film in which the film is oxidized and crystallized by heat-treating the film in an oxygen gas atmosphere or a mixed gas atmosphere of an oxygen gas and an inert gas and in a pressurized atmosphere;
The first temperature is within a range of 10 ° C to 40 ° C;
The first humidity Ri der than 30%,
The film that oxidizes and crystallizes the film is a film containing metal and C _a H _b .
During the heat treatment, a pressurized oxygen gas or a mixed gas of an oxygen gas and an inert gas is introduced onto the film, and the atmosphere on the film is reduced when the atmosphere on the film reaches the first pressure. Removing H ₂ O or CO ₂ from the film, and pressurizing the atmosphere on the film when the atmosphere on the film reaches a second pressure;
The first pressure is 9 atm or more;
The second pressure is 95% or less of the first pressure, and is 8.5 atmospheres or more and 9 atmospheres or less.
The introduction of the oxygen gas or the mixed gas is stopped when depressurizing the atmosphere above the membrane, and characteristics that you start the introduction of the oxygen gas or the mixed gas when pressurizing the atmosphere over the film A method for manufacturing a film.
However, a and b are natural numbers. A film is formed on the substrate by applying a sol-gel solution controlled to a second temperature of 40 ° C. to 80 ° C. by spin coating on the substrate in an atmosphere having a first temperature and a first humidity,
A method of producing a film in which the film is oxidized and crystallized by heat-treating the film in an oxygen gas atmosphere or a mixed gas atmosphere of an oxygen gas and an inert gas and in a pressurized atmosphere;
The first temperature is within a range of 10 ° C to 40 ° C;
The first humidity Ri der than 30%,
Membrane, method for producing a film, wherein the film Der Rukoto containing metal and C _a H _b to crystallize by oxidizing the film.
However, a and b are natural numbers. In any one of Claims 1 thru | or 3 ,
The method for producing a film, wherein the atmosphere having the first temperature and the first humidity is an air atmosphere, an inert gas atmosphere, an oxygen gas atmosphere, or a mixed gas atmosphere of oxygen gas and inert gas. In claim 1 or 2 ,
The method for producing a film, wherein the sol-gel solution is controlled to a second temperature, and the second temperature is in a range of 40 ° C to 80 ° C. In any one of Claims 1 thru | or 5 ,
When the film is oxidized and crystallized, the film is held at a third temperature and then held at a fourth temperature,
The third temperature is in the range of 100C to 450C;
The method for producing a film, wherein the fourth temperature is in a range of 451 ° C to 900 ° C. In claim 6 ,
One of holding the film at the third temperature and holding the film at the fourth temperature irradiates the upper surface of the substrate with lamp light,
The other method of maintaining the film at the third temperature and the other of maintaining the film at the fourth temperature irradiates the lower surface of the substrate with lamp light. In any one of Claims 1 thru | or 7 ,
A film obtained by oxidizing and crystallizing the film is represented by the general formula ABO ₃ , where A is Al, Y, Na, K, Rb, Cs, La, Sr, Cr, Ag, Ca, Pr, Nd, Bi. And at least one element selected from the group consisting of lanthanum series elements of the periodic table, wherein B is Al, Ga, In, Nb, Sn, Ti, Ru, Rh, Pd, Re, OSirPt, U CO, Fe, Ni, Mn, Cr, Cu, Mg, V, Nb, Ta, MO, and a film containing a perovskite material containing at least one element selected from the group consisting of W and W or a bismuth oxide layer And a perovskite type structural block, which includes a bismuth layered structure ferroelectric crystal having a structure in which the perovskite type structural block is alternately stacked. The perovskite type structural block includes Li, Na, K, Ca, Sr, and Ba. , Y, Bi, Pb and at least one element L selected from rare earth elements, and at least one element R selected from Ti, Zr, Hf, V, Nb, Ta, W, MO, Mn, Fe, Si and Ge And a method for producing a film comprising oxygen. In claim 8 ,
The method for producing a film, wherein the oxidized and crystallized film has a thickness of 0.5 μm or more. In claim 1 or 3 ,
The film that oxidizes and crystallizes the film is a film containing metal and C _a H _b .
During the heat treatment, a pressurized oxygen gas or a mixed gas of an oxygen gas and an inert gas is introduced onto the film, and the atmosphere on the film is reduced when the atmosphere on the film reaches the first pressure. Then, H ₂ O or CO ₂ is removed from the film, and the atmosphere on the film is pressurized when the atmosphere on the film reaches the second pressure.
However, a and b are natural numbers. In claim 10 ,
The first pressure is 1 atm or more;
The method for producing a film, wherein the second pressure is 95% or less of the first pressure. In claim 10 or 11 ,
The introduction of the oxygen gas or the mixed gas is stopped when the atmosphere on the film is decompressed, and the introduction of the oxygen gas or the mixed gas is started when the atmosphere on the film is pressurized. A method for producing a membrane. In claim 1 or 3 ,
The film is a film containing _a metal and C _a H _b ,
A method for producing a film, wherein, during the heat treatment, H ₂ O or CO ₂ is removed from the film while flowing a pressurized oxygen gas or a mixed gas of an oxygen gas and an inert gas over the film. .
However, a and b are natural numbers. In claim 13 ,
The method for producing a film, wherein the flow rate of the oxygen gas or the mixed gas is 5 liters / min or more. In claim 13 or 14 ,
When the atmosphere on the film reaches the first pressure, the atmosphere on the film is depressurized to remove H ₂ O or CO ₂ from the film, and the atmosphere on the film reaches the second pressure. A method for producing a film, characterized in that the atmosphere on the film is sometimes pressurized. In claim 15 ,
The first pressure is 1 atm or more;
The method for producing a film, wherein the second pressure is 95% or less of the first pressure. In claim 2 or 3 ,
When the previous SL oxygen gas atmosphere or a mixed gas atmosphere of the film, film, characterized in that the turbulence or Karman vortex to the oxygen gas or the mixed gas is flowed over the film by the obstacle is formed Manufacturing method. In any one of Claims 1 thru | or 17 ,
The film is a film containing _a metal and C _a H _b ,
A method of manufacturing a film, wherein, during the heat treatment, H ₂ O or CO ₂ is removed from the film while moving the film.
However, a and b are natural numbers. In claim 18,
The film movement method is characterized in that the movement is a vertical movement or a rotational movement or a combination of a vertical movement and a rotational movement. A spin coating chamber for forming a film on the substrate by applying a sol-gel solution on the substrate by spin coating;
A first supply mechanism for supplying a gas into the spin coat chamber so that the temperature and humidity in the spin coat chamber become the first temperature and the first humidity;
A first exhaust mechanism for exhausting the spin coat chamber;
A transfer chamber connected to the spin coat chamber via a first gate valve;
A transport mechanism for transporting the substrate, disposed in the transport chamber;
A first heat treatment chamber connected to the transfer chamber via a second gate valve and heat-treating the film in a pressurized oxygen atmosphere;
A first heating mechanism disposed in the first heat treatment chamber for heating the film;
A second supply mechanism for supplying oxygen gas or a mixed gas of oxygen gas and inert gas into the first heat treatment chamber;
A second exhaust mechanism for exhausting the first heat treatment chamber;
A holding unit disposed in the first heat treatment chamber and holding a substrate;
A fifth control unit for controlling the second supply mechanism and the second exhaust mechanism;
Comprising
The first temperature is in the range of 10 ° C to 40 ° C;
The first humidity Ri der than 30%,
The fifth control unit controls the substrate to be heat-treated in a pressurized oxygen atmosphere while flowing a pressurized oxygen gas or a mixed gas of an oxygen gas and an inert gas over the substrate;
The second supply mechanism has an obstacle;
Multi-chamber apparatus which is characterized that you form a turbulent or Karman vortex by the obstacle to the oxygen gas or the mixed gas flowing through the substrate. A spin coating chamber for forming a film on the substrate by applying a sol-gel solution on the substrate by spin coating;
A first supply mechanism for supplying a gas into the spin coat chamber so that the temperature and humidity in the spin coat chamber become the first temperature and the first humidity;
A first exhaust mechanism for exhausting the spin coat chamber;
A transfer chamber connected to the spin coat chamber via a first gate valve;
A transport mechanism for transporting the substrate, disposed in the transport chamber;
A first heat treatment chamber connected to the transfer chamber via a second gate valve and heat-treating the film in a pressurized oxygen atmosphere;
A first heating mechanism disposed in the first heat treatment chamber for heating the film;
A second supply mechanism for supplying oxygen gas or a mixed gas of oxygen gas and inert gas into the first heat treatment chamber;
A second exhaust mechanism for exhausting the first heat treatment chamber;
A holding unit disposed in the first heat treatment chamber and holding a substrate;
A fourth control unit for controlling the second supply mechanism and the second exhaust mechanism;
Comprising
The first temperature is in the range of 10 ° C to 40 ° C;
The first humidity Ri der than 30%,
The fourth control unit supplies pressurized oxygen gas or a mixed gas of oxygen gas and inert gas into the first heat treatment chamber, and when the first heat treatment chamber reaches the first pressure. A pressure is reduced in the first heat treatment chamber, and the substrate is heat treated in an atmosphere in which the first heat treatment chamber is pressurized when the first pressure reaches the second pressure;
The first pressure is 9 atm or more;
The second pressure is 95% or less of the first pressure, and is 8.5 atmospheres or more and 9 atmospheres or less.
The fourth control unit stops introduction of the oxygen gas or the mixed gas into the first heat treatment chamber when depressurizing the first heat treatment chamber, and pressurizes the first heat treatment chamber. said oxygen gas or to initiate introduction into the first heat treatment chamber of the gas mixture, a multi-chamber apparatus which is characterized that you control the second supply mechanism and said second exhaust mechanism. A spin coating chamber for forming a film on the substrate by applying a sol-gel solution on the substrate by spin coating;
A first supply mechanism for supplying a gas into the spin coat chamber so that the temperature and humidity in the spin coat chamber become the first temperature and the first humidity;
A first exhaust mechanism for exhausting the spin coat chamber;
A transfer chamber connected to the spin coat chamber via a first gate valve;
A transport mechanism for transporting the substrate, disposed in the transport chamber;
A first heat treatment chamber connected to the transfer chamber via a second gate valve and heat-treating the film in a pressurized oxygen atmosphere;
A first heating mechanism disposed in the first heat treatment chamber for heating the film;
A second supply mechanism for supplying oxygen gas or a mixed gas of oxygen gas and inert gas into the first heat treatment chamber;
A second exhaust mechanism for exhausting the first heat treatment chamber;
Comprising
The first temperature is in the range of 10 ° C to 40 ° C;
The first humidity Ri der than 30%,
Wherein such sol-gel solution is a second temperature, a temperature control mechanism for controlling the temperature of the sol-gel solution, the second temperature, characterized in der Rukoto the range of 40 ° C. to 80 ° C. Multi-chamber device. In any one of claims 20 to 22 ,
A third supply mechanism for supplying air into the transfer chamber so that the temperature and humidity in the transfer chamber become the first temperature and the first humidity;
A third exhaust mechanism for exhausting the transfer chamber;
A multi-chamber apparatus characterized by comprising: In any one of claims 20 to 22 ,
A fourth supply mechanism for supplying an inert gas, oxygen gas, or a mixed gas of oxygen gas and inert gas into the transfer chamber;
A fourth exhaust mechanism for exhausting the transfer chamber;
A multi-chamber apparatus characterized by comprising: In any one of claims 20 to 24 ,
The gas supplied by the first supply mechanism is air, Ar gas, oxygen gas, or a mixed gas of oxygen gas and inert gas. In claim 21 ,
A temperature control mechanism for controlling the temperature of the sol-gel solution so that the sol-gel solution has a second temperature, wherein the second temperature is in a range of 20 ° C. to 100 ° C. Chamber device. In any one of claims 20 to 26 ,
A first control unit for controlling the film heated by the first heating mechanism in the first heat treatment chamber to be held at a fourth temperature after being held at a third temperature;
The third temperature is in the range of 100C to 450C;
The multi-chamber apparatus, wherein the fourth temperature is in a range of 451 ° C to 900 ° C. In any one of claims 20 to 26 ,
A second heat treatment chamber that is connected to the transfer chamber via a third gate valve and heat-treats the film heat-treated in the first heat treatment chamber in a pressurized oxygen atmosphere;
A second heating mechanism disposed in the second heat treatment chamber for heating the film;
A fifth supply mechanism for supplying oxygen gas or a mixed gas of oxygen gas and inert gas into the second heat treatment chamber;
A fifth exhaust mechanism for exhausting the second heat treatment chamber;
A second control unit for controlling the film heated by the first heating mechanism in the first heat treatment chamber to be maintained at a third temperature;
A third controller for controlling the film heated by the second heating mechanism in the second heat treatment chamber to be maintained at a fourth temperature;
Have
The third temperature is in the range of 100C to 450C;
The multi-chamber apparatus, wherein the fourth temperature is in a range of 451 ° C to 900 ° C. In claim 28 ,
One of the first heating mechanism and the second heating mechanism has a first lamp heater that irradiates the upper surface of the substrate with lamp light,
The other of the first heating mechanism and the second heating mechanism includes a second lamp heater that irradiates a lower surface of the substrate with lamp light. 30.In any one of claims 20 to 29 .
A film obtained by oxidizing and crystallizing the film by heat-treating the film is represented by the general formula ABO ₃ , where A is Al, Y, Na, K, Rb, Cs, La, Sr, Cr, Ag, It comprises at least one element selected from the group consisting of Ca, Pr, Nd, Bi and a lanthanum series element of the periodic table, and B is Al, Ga, In, Nb, Sn, Ti, Ru, Rh, Including a perovskite substance comprising at least one element selected from the group consisting of Pd, Re, OSirPt, U, CO, Fe, Ni, Mn, Cr, Cu, Mg, V, Nb, Ta, MO, and W A film or a film containing a bismuth layer-structured ferroelectric crystal having a structure in which bismuth oxide layers and perovskite structure blocks are alternately stacked, and the perovskite structure blocks are Li , Na, K, Ca, Sr, Ba, Y, Bi, Pb and at least one element L selected from rare earth elements, Ti, Zr, Hf, V, Nb, Ta, W, MO, Mn, Fe, Si And a multi-chamber device comprising at least one element R selected from Ge and oxygen, and oxygen. In claim 20 or 22 ,
A holding unit disposed in the first heat treatment chamber and holding a substrate;
A fourth control unit for controlling the second supply mechanism and the second exhaust mechanism;
Comprising
The fourth control unit supplies pressurized oxygen gas or a mixed gas of oxygen gas and inert gas into the first heat treatment chamber, and when the first heat treatment chamber reaches the first pressure. The first heat treatment chamber is depressurized, and when the first heat treatment chamber reaches a second pressure, the substrate is heat treated in an atmosphere in which the first heat treatment chamber is pressurized. Multi-chamber device. In claim 31 ,
The first pressure is 1 atm or more;
The multi-chamber apparatus, wherein the second pressure is 95% or less of the first pressure. In claim 31 or 32 ,
The fourth control unit stops introduction of the oxygen gas or the mixed gas into the first heat treatment chamber when depressurizing the first heat treatment chamber, and pressurizes the first heat treatment chamber. The multi-chamber apparatus is characterized in that the second supply mechanism and the second exhaust mechanism are controlled so as to start introduction of the oxygen gas or the mixed gas into the first heat treatment chamber. In claim 21 or 22 ,
A holding unit disposed in the first heat treatment chamber and holding a substrate;
A fifth control unit for controlling the second supply mechanism and the second exhaust mechanism;
Comprising
The fifth control unit controls the substrate to be heat-treated in a pressurized oxygen atmosphere while flowing a pressurized oxygen gas or a mixed gas of an oxygen gas and an inert gas over the substrate. Chamber device. In claim 34 ,
The fifth control unit supplies pressurized oxygen gas or a mixed gas of oxygen gas and inert gas into the first heat treatment chamber, and when the first heat treatment chamber reaches the first pressure. The first heat treatment chamber is depressurized, and when the first heat treatment chamber reaches a second pressure, the substrate is heat treated in an atmosphere in which the first heat treatment chamber is pressurized. Multi-chamber device. In claim 34 or 35 ,
The second supply mechanism has an obstacle;
A multi-chamber apparatus characterized by forming a turbulent flow or a Karman vortex in the oxygen gas or mixed gas flowing on the substrate by the obstacle.