JP6200716B2 - Laminated structure and laminated unit - Google Patents

Laminated structure and laminated unit Download PDF

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JP6200716B2
JP6200716B2 JP2013154004A JP2013154004A JP6200716B2 JP 6200716 B2 JP6200716 B2 JP 6200716B2 JP 2013154004 A JP2013154004 A JP 2013154004A JP 2013154004 A JP2013154004 A JP 2013154004A JP 6200716 B2 JP6200716 B2 JP 6200716B2
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base portion
semiconductor module
laminated structure
spring member
extending
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JP2015026653A (en
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典拓 田島
典拓 田島
洋介 川井
洋介 川井
浩夫 今泉
浩夫 今泉
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NHK Spring Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02TCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T10/00Road transport of goods or passengers
    • Y02T10/60Other road transportation technologies with climate change mitigation effect
    • Y02T10/62Hybrid vehicles

Description

本発明は、半導体モジュールと該半導体モジュールを冷却する冷却管とを交互に積層した積層構造体および該積層構造体を備えた積層ユニットに関する。   The present invention relates to a laminated structure in which a semiconductor module and cooling pipes for cooling the semiconductor module are alternately laminated, and a laminated unit including the laminated structure.

従来、半導体モジュールと該半導体モジュールを冷却する冷却管とを交互に積層することによって構成される電力変換装置が知られている(例えば、特許文献1を参照)。この電力変換装置は、半導体モジュールと冷却管の積層方向の端部に、積層方向に沿った押圧力を発生するばね部材と、このばね部材と積層構造との間に設けられ、積層方向に均一な押圧力を発生させるための当接プレートとを備える。このような構成を有する電力変換装置によれば、ばね部材の押圧力によって隣接する半導体モジュールと冷却管が密着するため、半導体モジュールを十分に冷却することができる。   Conventionally, a power conversion device configured by alternately stacking semiconductor modules and cooling pipes for cooling the semiconductor modules is known (see, for example, Patent Document 1). This power conversion device is provided at the end of the stacking direction of the semiconductor module and the cooling pipe between the spring member that generates a pressing force along the stacking direction and the spring member and the stacking structure, and is uniform in the stacking direction. And a contact plate for generating a pressing force. According to the power conversion device having such a configuration, the adjacent semiconductor module and the cooling pipe are brought into close contact with each other by the pressing force of the spring member, so that the semiconductor module can be sufficiently cooled.

特開2007−166820号公報JP 2007-166820 A

しかしながら、上述した従来技術では、ばね部材と当接プレートが必要なことに加えて、ばね部材を電力変換装置の筐体に固定する固定ピンを設ける必要があるため、部品点数が増えて装置が大型化してしまうとともに、組み付けが難しいという問題があった。   However, in the above-described prior art, in addition to the necessity of the spring member and the contact plate, it is necessary to provide a fixing pin for fixing the spring member to the casing of the power conversion device. In addition to the increase in size, there was a problem that assembly was difficult.

本発明は、上記に鑑みてなされたものであって、半導体モジュールの冷却性能を維持しつつ、小型化に好適であるとともに組み付けも容易な積層構造体および積層ユニットを提供することを目的とする。   The present invention has been made in view of the above, and an object of the present invention is to provide a laminated structure and a laminated unit that are suitable for miniaturization and easy to assemble while maintaining the cooling performance of the semiconductor module. .

上述した課題を解決し、目的を達成するために、本発明に係る積層構造体は、半導体モジュールと、該半導体モジュールに積層されて該半導体モジュールを冷却する冷却管とを交互に積層し、積層方向に沿って前記半導体モジュールの両面に前記冷却管が配置される積層構造体であって、前記冷却管は、前記半導体モジュールとの接触部分が平板状をなす外装体と、前記外装体が囲む内部空間を前記積層方向に沿って二つの領域に分割する仕切り板と、前記二つの領域にそれぞれ設けられて前記積層方向の荷重を有する二つのばね部材と、を備え、前記ばね部材は、前記外装体に当接するまたは接合される平板状のベース部と、各々が前記ベース部から立ち上がって前記ベース部の同じ主面側に延在し、先端が前記仕切り板に接触して荷重を発生する複数の延在部と、を有することを特徴とする。   In order to solve the above-described problems and achieve the object, a laminated structure according to the present invention is obtained by alternately laminating a semiconductor module and cooling pipes laminated on the semiconductor module and cooling the semiconductor module. A laminated structure in which the cooling pipes are arranged on both surfaces of the semiconductor module along a direction, and the cooling pipe surrounds the outer package body in which a contact portion with the semiconductor module forms a flat plate shape and the outer package body A partition plate that divides an internal space into two regions along the laminating direction, and two spring members that are respectively provided in the two regions and have a load in the laminating direction. A flat plate-like base portion that comes into contact with or is bonded to the exterior body, and each of them rises from the base portion, extends to the same main surface side of the base portion, and a tip contacts the partition plate to apply a load. And having a plurality of extending portions that live.

本発明に係る積層構造体は、上記発明において、前記冷却管は、幅方向の両端部に形成され、前記ばね部材における荷重の発生に伴って変形したフランジ部を有することを特徴とする。   The laminated structure according to the present invention is characterized in that, in the above-mentioned invention, the cooling pipe has flange portions that are formed at both ends in the width direction and are deformed as a load is generated in the spring member.

本発明に係る積層構造体は、上記発明において、前記ばね部材は、前記複数の延在部が前記ベース部に対して立ち上がる方向が互いに揃っていることを特徴とする。   In the laminated structure according to the present invention as set forth in the invention described above, the spring member is characterized in that directions in which the plurality of extending portions rise with respect to the base portion are aligned with each other.

本発明に係る積層構造体は、上記発明において、前記ばね部材は、前記複数の延在部の一部が前記ベース部に対して立ち上がる方向が他の延在部と異なることを特徴とする。   The laminated structure according to the present invention is characterized in that, in the above invention, the spring member is different from the other extending portions in a direction in which a part of the plurality of extending portions rises with respect to the base portion.

本発明に係る積層構造体は、上記発明において、前記二つのばね部材がそれぞれ有する延在部は、前記積層方向に沿って互いに他のばね部材の延在部と異なる位置で各ベース部から立ち上がっていることを特徴とする。   In the laminated structure according to the present invention, in the above invention, the extending portions of the two spring members rise from the base portions at positions different from the extending portions of the other spring members along the stacking direction. It is characterized by.

本発明に係る積層構造体は、上記発明において、前記ばね部材は、前記冷却管の中央部に位置する前記延在部の前記ベース部に対する高さが他の部分に位置する前記延在部の前記ベース部に対する高さよりも高いことを特徴とする。   In the laminated structure according to the present invention as set forth in the invention described above, the spring member has a height of the extension portion positioned at a central portion of the cooling pipe with respect to the base portion of the extension portion positioned at another portion. It is characterized by being higher than the height with respect to the base part.

本発明に係る積層ユニットは、上記発明に記載の積層構造体と、前記積層構造体を収容する筐体と、前記積層構造体を前記筐体に対して固定する固定部材と、を備えたことを特徴とする。   A laminated unit according to the present invention includes the laminated structure according to the invention, a housing that houses the laminated structure, and a fixing member that fixes the laminated structure to the housing. It is characterized by.

本発明によれば、半導体モジュールの冷却性能を維持しつつ、小型化に好適であるとともに組み付けも容易な積層構造体および積層ユニットを提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, while maintaining the cooling performance of a semiconductor module, the laminated structure and laminated unit which are suitable for size reduction and easy to assemble can be provided.

図1は、本発明の一実施の形態に係る積層構造体の要部の構成を示す正面図である。FIG. 1 is a front view showing a configuration of a main part of a laminated structure according to an embodiment of the present invention. 図2は、本発明の一実施の形態に係る積層構造体の要部の構成を示す斜視図である。FIG. 2 is a perspective view showing a configuration of a main part of the laminated structure according to one embodiment of the present invention. 図3は、本発明の一実施の形態に係る積層構造体が備える冷却管の構成を示す斜視図である。FIG. 3 is a perspective view showing a configuration of a cooling pipe provided in the laminated structure according to the embodiment of the present invention. 図4は、図3のA−A線断面図である。4 is a cross-sectional view taken along line AA in FIG. 図5は、図4の部分拡大図である。FIG. 5 is a partially enlarged view of FIG. 図6は、図3のB−B線断面図である。6 is a cross-sectional view taken along line BB in FIG. 図7は、本発明の一実施の形態に係る積層構造体が備えるばね部材の構成を示す斜視図である。FIG. 7 is a perspective view showing a configuration of a spring member provided in the laminated structure according to the embodiment of the present invention. 図8は、ばね部材に荷重が発生する前後のばね部材の形状変化の概要を示す図である。FIG. 8 is a diagram showing an outline of the shape change of the spring member before and after the load is generated on the spring member. 図9は、ばね部材に荷重が発生する前後のフランジ部の形状変化の概要を示す図である。FIG. 9 is a diagram showing an outline of the shape change of the flange portion before and after the load is generated on the spring member. 図10は、本発明の一実施の形態に係る積層ユニットの構成を示す部分断面図である。FIG. 10 is a partial cross-sectional view showing the configuration of the laminated unit according to one embodiment of the present invention. 図11は、本発明の一実施の形態の変形例1に係る積層構造体が備えるばね部材の構成を示す斜視図である。FIG. 11 is a perspective view illustrating a configuration of a spring member included in the laminated structure according to the first modification of the embodiment of the present invention. 図12は、本発明の一実施の形態の変形例2に係る積層構造体が備えるばね部材の要部の構成を示す図である。FIG. 12 is a diagram illustrating a configuration of a main part of a spring member included in the laminated structure according to the second modification of the embodiment of the present invention. 図13は、本発明の一実施の形態の変形例3に係る積層構造体が備えるばね部材の要部の構成を示す平面図である。FIG. 13: is a top view which shows the structure of the principal part of the spring member with which the laminated structure which concerns on the modification 3 of one embodiment of this invention is provided.

以下、添付図面を参照して本発明を実施するための形態(以下、「実施の形態」という)を説明する。なお、図面は模式的なものであって、各部分の厚みと幅との関係、それぞれの部分の厚みの比率などは現実のものとは異なる場合もあることに留意すべきであり、図面の相互間においても互いの寸法の関係や比率が異なる部分が含まれる場合がある。   DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention (hereinafter referred to as “embodiments”) will be described with reference to the accompanying drawings. It should be noted that the drawings are schematic, and the relationship between the thickness and width of each part, the ratio of the thickness of each part, and the like may be different from the actual ones. In some cases, there may be a portion having a different dimensional relationship or ratio.

図1は、本発明の一実施の形態に係る積層構造体の要部の構成を示す正面図である。図2は、本実施の形態に係る積層構造体の要部の構成を示す斜視図である。これらの図に示す積層構造体1は、電気自動車およびハイブリッド自動車等に設けられ、バッテリの直流電力を交流電力に変換して交流モータに供給するインバータを備えたPCU(Power Control Unit)の一部を構成する。   FIG. 1 is a front view showing a configuration of a main part of a laminated structure according to an embodiment of the present invention. FIG. 2 is a perspective view showing a configuration of a main part of the laminated structure according to the present embodiment. A laminated structure 1 shown in these drawings is provided in an electric vehicle, a hybrid vehicle, or the like, and is a part of a PCU (Power Control Unit) including an inverter that converts DC power of a battery into AC power and supplies the AC motor. Configure.

積層構造体1は、略直方体状をなす半導体モジュール2と、半導体モジュール2を冷却する冷却用媒体を流通し、半導体モジュール2に密着して積層される冷却管3と、を各々定められた数ずつ備える。積層構造体1では、積層方向に沿って隣り合う冷却管3の間に二つの半導体モジュール2が積層方向と直交する方向に並列に配置されている。図1に示す積層構造体1は、2つの半導体モジュール2を並列配置した層が9層あり、合計18個の半導体モジュール2が設けられるとともに、冷却管3が10個設けられている。なお、積層構造体1における半導体モジュール2と冷却管3の個数はあくまでも一例に過ぎない。また、一つの層で並列配置される半導体モジュール2の個数も一例に過ぎない。   The laminated structure 1 includes a predetermined number of semiconductor modules 2 having a substantially rectangular parallelepiped shape and cooling pipes 3 that circulate a cooling medium that cools the semiconductor modules 2 and are stacked in close contact with the semiconductor modules 2. Prepare one by one. In the stacked structure 1, two semiconductor modules 2 are arranged in parallel in a direction orthogonal to the stacking direction between the cooling pipes 3 adjacent in the stacking direction. The laminated structure 1 shown in FIG. 1 has nine layers in which two semiconductor modules 2 are arranged in parallel, a total of 18 semiconductor modules 2 are provided, and 10 cooling pipes 3 are provided. The number of semiconductor modules 2 and cooling pipes 3 in the laminated structure 1 is merely an example. The number of semiconductor modules 2 arranged in parallel in one layer is just an example.

積層方向に沿って隣り合う冷却管3の長手方向の両端部同士は、円筒状をなす連結部材4によって連結されており、この連結部材4を介して隣り合う冷却管3の内部同士が連通している。   Both ends in the longitudinal direction of the adjacent cooling pipes 3 along the stacking direction are connected by a connecting member 4 having a cylindrical shape, and the insides of the adjacent cooling pipes 3 communicate with each other via the connecting member 4. ing.

積層方向の一方の端部(図1の下端部)に位置する冷却管3の長手方向の一端部(図1の左端部)には、外部から冷却用媒体を流入する流入管5が連結している。また、積層方向の一方の端部(図1の下端部)に位置する冷却管3の長手方向の他端部(図1の右端部)には、外部に対して冷却用媒体を流出する流出管6が連結している。   An inflow pipe 5 into which a cooling medium flows from the outside is connected to one end (left end in FIG. 1) in the longitudinal direction of the cooling pipe 3 located at one end in the stacking direction (lower end in FIG. 1). ing. Moreover, the outflow which flows out a cooling medium with respect to the exterior to the other end part (right end part of FIG. 1) of the longitudinal direction of the cooling pipe 3 located in one edge part (lower end part of FIG. 1) of a lamination direction A tube 6 is connected.

積層方向の他方の端部(図1の上端部)に位置する冷却管3の積層方向端部側には、有底の円筒状をなす蓋部材7が設けられている。   A lid member 7 having a bottomed cylindrical shape is provided on the side in the stacking direction end of the cooling pipe 3 located at the other end in the stacking direction (upper end in FIG. 1).

半導体モジュール2は、例えばIGBT(Insulated-Gate Bipolar Transistor)およびFWD(Free Wheeling Diode)の2種類のシリコンチップを並列に配置し、その両面に、導電スペーサを介してヒートスプレッダが設けられた構成を有している。   The semiconductor module 2 has a configuration in which, for example, two types of silicon chips of IGBT (Insulated-Gate Bipolar Transistor) and FWD (Free Wheeling Diode) are arranged in parallel, and heat spreaders are provided on both sides via conductive spacers. doing.

図3は、冷却管3の構成を示す斜視図である。図4は、図3のA−A線断面図であり、一部を省略した図である。図5は、図4の部分拡大図である。図6は、図3のB−B線断面図である。以下、図3〜図6を参照して、冷却管3の構成を詳細に説明する。   FIG. 3 is a perspective view showing the configuration of the cooling pipe 3. FIG. 4 is a cross-sectional view taken along the line AA in FIG. FIG. 5 is a partially enlarged view of FIG. 6 is a cross-sectional view taken along line BB in FIG. Hereinafter, the configuration of the cooling pipe 3 will be described in detail with reference to FIGS.

冷却管3は、略長円形の主面を有し扁平な形状をなす外装体31と、外装体31に囲まれた内部空間を外装体31の主面と平行な方向に貫通して該内部空間を二つの領域に分割する仕切り板32と、仕切り板32によって分割される二つの領域にそれぞれ設けられ、積層方向の荷重を発生する2つのばね部材33と、を有する。   The cooling pipe 3 has a substantially oval main surface and has a flat exterior body 31, and an internal space surrounded by the exterior body 31 in a direction parallel to the main surface of the exterior body 31. A partition plate 32 that divides the space into two regions, and two spring members 33 that are respectively provided in the two regions divided by the partition plate 32 and generate a load in the stacking direction.

外装体31は、互いに平行な2つの平板を有し、各平板の表面で積層方向に隣り合う半導体モジュール2と密着する平板部311と、平板部311の短手方向(幅方向)の両端部に形成される2つのフランジ部312と、平板部311の長手方向の両端部に設けられ、連結部材4を介して他の冷却管3と内部空間同士を連通するための開口部313が平板部311の表面にそれぞれ形成された2つの連通部314と、を有する。開口部313には、円筒状の連結部材4がロウ付け等によって接合されている。また、開口部313と連結部材4との接合部にはダイヤフラム部が設けられており、積層方向に隣り合う冷却管3との間隔を変化させることが可能である。外装体31は、良好な熱伝導性を有するアルミニウム等の金属によって構成されている。   The exterior body 31 has two flat plates parallel to each other, and a flat plate portion 311 in close contact with the semiconductor module 2 adjacent in the stacking direction on the surface of each flat plate, and both end portions in the short direction (width direction) of the flat plate portion 311 The two flange portions 312 formed on the flat plate portion 311 and the opening portions 313 are provided at both ends in the longitudinal direction of the flat plate portion 311 and communicate with the other cooling pipes 3 and the internal spaces via the connecting member 4. And two communicating portions 314 formed on the surface of 311 respectively. A cylindrical connecting member 4 is joined to the opening 313 by brazing or the like. Moreover, the diaphragm part is provided in the junction part of the opening part 313 and the connection member 4, and it is possible to change the space | interval with the cooling pipe 3 adjacent in the lamination direction. The exterior body 31 is made of a metal such as aluminum having good thermal conductivity.

仕切り板32は、二つのばね部材33と異なる表面で接触している。仕切り板32は、例えばSUS等の剛性の高い金属によって構成されている。仕切り板32はSUS以外の材料でも、強度的に問題がない材料であれば適用可能である。このような材料として、例えば熱伝導率が比較的低い材料を適用すれば、冷却管3を介して隣接する2つの半導体モジュール2の間の熱の行き来を抑制することができるのでより好ましい。   The partition plate 32 is in contact with the two spring members 33 on a different surface. The partition plate 32 is made of a highly rigid metal such as SUS. The partition plate 32 may be a material other than SUS as long as it has no problem in strength. As such a material, for example, a material having a relatively low thermal conductivity is preferably used because it is possible to suppress the transfer of heat between two adjacent semiconductor modules 2 via the cooling pipe 3.

図7は、ばね部材33の構成を示す斜視図である。ばね部材33は、平板状をなすベース部331と、ベース部331の縦横に沿って格子状に配置され、ベース部331から互いにほぼ同じに揃った方向へ立ち上がって帯状に延びる複数の延在部332と、を有する。図7に示す場合、1列に10個の延在部332が形成されたものが3列並べられているが、この行と列の数は一例に過ぎない。   FIG. 7 is a perspective view showing the configuration of the spring member 33. The spring member 33 has a flat base portion 331 and a plurality of extending portions that are arranged in a lattice shape along the length and breadth of the base portion 331 and rise from the base portion 331 in substantially the same direction and extend in a strip shape. 332. In the case shown in FIG. 7, three columns in which ten extending portions 332 are formed in one column are arranged, but the number of rows and columns is merely an example.

ベース部331は、外装体31の裏面に当接し、接触圧によって固定されている。なお、ベース部331を外装体31の裏面に対してロウ付け等によって接合してもよい。   The base portion 331 is in contact with the back surface of the exterior body 31 and is fixed by contact pressure. The base portion 331 may be joined to the back surface of the exterior body 31 by brazing or the like.

延在部332は、該延在部332がベース部331に対して延びる側をベース部331の上方とするとき、ベース部331の表面に対して下に凸な曲面をなす基端部332aと、ベース部331の表面に対して上に凸な曲面をなす先端部332bとを有する。先端部332bの先端における曲面の接線は、ベース部331と略平行である。延在部332の先端部332bは、仕切り板32に接触している。   The extending portion 332 includes a base end portion 332a having a curved surface that protrudes downward with respect to the surface of the base portion 331, when the side where the extending portion 332 extends with respect to the base portion 331 is located above the base portion 331. And a tip portion 332b having a curved surface convex upward with respect to the surface of the base portion 331. The tangent of the curved surface at the tip of the tip portion 332b is substantially parallel to the base portion 331. A distal end portion 332 b of the extending portion 332 is in contact with the partition plate 32.

ばね部材33は、りん青銅、ばね鋼、銅、ステンレス、ニッケル、ニッケル合金などの導電性材料を用いて形成される。ばね部材33を製造する際には、例えばプレス成形のみで製造することができる。また、ばね部材33を製造する際には、1枚の平板をエッチング加工して延在部332の部分の形取りを行った後、この形取った延在部332の部分にプレス成形等の塑性加工を施すことによって延在部332をベース部331に対して立ち上がらせてもよい。   The spring member 33 is formed using a conductive material such as phosphor bronze, spring steel, copper, stainless steel, nickel, nickel alloy. When the spring member 33 is manufactured, it can be manufactured only by press molding, for example. Further, when the spring member 33 is manufactured, a single flat plate is etched to form a portion of the extended portion 332, and then the formed extended portion 332 is subjected to press molding or the like. The extending portion 332 may be raised with respect to the base portion 331 by performing plastic working.

冷却管3において、二つのばね部材33は、仕切り板32の中心を通過しかつ仕切り板32の表面と平行な平面に対して鏡像対称な位置関係にあるが、これは一例に過ぎない。例えば、二つのばね部材33を、仕切り板32の中心に対して180度回転対称な位置関係となるように配置することも可能である。なお、鏡像対称性や180度回転対称性については、厳密に対称である場合のみならず、二つのばね部材33の一方を鏡像変換または180度回転したときに他方のばね部材33におおむね一致するような場合も含むものとする。   In the cooling pipe 3, the two spring members 33 pass through the center of the partition plate 32 and are in a mirror image symmetrical relationship with respect to a plane parallel to the surface of the partition plate 32, but this is only an example. For example, it is possible to arrange the two spring members 33 so as to have a 180-degree rotational symmetry with respect to the center of the partition plate 32. The mirror image symmetry and the 180 degree rotational symmetry are not limited to the case of being strictly symmetrical, but generally coincide with the other spring member 33 when one of the two spring members 33 is mirror image transformed or rotated 180 degrees. Such cases are also included.

また、延在部332の立ち上がる方向がベース部331の長手方向に沿った方向でなくてもよい。例えば、ベース部331の短手方向に沿った方向に延在部332が立ち上がるようにしてもよいし、ベース部331の主面を投影面とする平面視で長手方向および短手方向と平行ではない方向に延在部332が立ち上がるようにしてもよい。   Further, the rising direction of the extending part 332 may not be the direction along the longitudinal direction of the base part 331. For example, the extending portion 332 may rise in a direction along the short direction of the base portion 331, or may not be parallel to the longitudinal direction and the short side direction in a plan view in which the main surface of the base portion 331 is a projection surface. You may make it the extension part 332 stand up in the direction which is not.

冷却管3の内部を流通する冷却用媒体は、例えば水、エチレングリコール系の不凍液を混入した水またはアンモニア等の自然冷媒、フロリナート等のフッ化炭素系冷媒、HCFC123、HFC134a等のフロン系冷媒、メタノールまたはアルコール等のアルコール系冷媒、およびアセトン等のケトン系冷媒のいずれかである。   The cooling medium that circulates inside the cooling pipe 3 includes, for example, water, natural refrigerant such as ammonia mixed with ethylene glycol antifreeze, fluorinated refrigerant such as fluorinate, chlorofluorocarbon refrigerant such as HCFC123 and HFC134a, Either an alcohol-based refrigerant such as methanol or alcohol, or a ketone-based refrigerant such as acetone.

以上の構成を有する積層構造体1を形成する際には、複数の半導体モジュール2と複数の冷却管3を所定の規則にしたがって積層した後、積層した部分に外力を加えてばね部材33に荷重を発生させる。図8および図9は、この荷重が発生する前後における冷却管3の形状変化の概要を示す図である。具体的には、図8は、ばね部材33の形状変化の概要を示す図であり、図9は、フランジ部312の形状変化の概要を示す図である。積層部分に外力が加わると、図8に示すように、ばね部材33の延在部332がたわんで荷重を発生する。これにより、冷却管3の積層方向の厚さが小さくなる。このとき、フランジ部312は、冷却管3の積層方向の厚さの減少に追従して、図9に示すように弾塑性変形を生じる。   When the laminated structure 1 having the above configuration is formed, a plurality of semiconductor modules 2 and a plurality of cooling pipes 3 are laminated according to a predetermined rule, and then an external force is applied to the laminated portions to load the spring member 33. Is generated. 8 and 9 are diagrams showing an outline of a change in the shape of the cooling pipe 3 before and after the load is generated. Specifically, FIG. 8 is a diagram showing an outline of a shape change of the spring member 33, and FIG. 9 is a diagram showing an outline of a shape change of the flange portion 312. When an external force is applied to the stacked portion, the extension portion 332 of the spring member 33 bends and generates a load, as shown in FIG. Thereby, the thickness of the cooling pipe 3 in the stacking direction is reduced. At this time, the flange portion 312 follows the decrease in the thickness of the cooling pipe 3 in the stacking direction and undergoes elasto-plastic deformation as shown in FIG.

ばね部材33に荷重を発生させるための手段として、例えば帯状をなす金属製の束縛部材を用いることができる。この束縛部材を適用する場合、半導体モジュール2と冷却管3とを積層した後、積層した部分の一部に束縛部材を周回させ、所定の治具を用いてその束縛部材の両端部を接合することによって積層部分に所望の外力を加え、ばね部材33に荷重を発生させる。この際、冷却管3の長手方向の両端部にはダイヤフラム部が設けられているため、積層部分における冷却管3の厚さが小さくなるのに追従して、長手方向の両端部の厚さも薄くなる。なお、束縛部材は積層構造体1が完成した後に取り除いても構わない。   As a means for generating a load on the spring member 33, for example, a band-shaped metal binding member can be used. When applying this constraining member, after laminating the semiconductor module 2 and the cooling pipe 3, the constraining member is circulated around a part of the laminated portion, and both ends of the constraining member are joined using a predetermined jig. Thus, a desired external force is applied to the laminated portion, and a load is generated on the spring member 33. At this time, since the diaphragm portions are provided at both ends of the cooling pipe 3 in the longitudinal direction, the thickness of the both ends in the longitudinal direction is reduced following the decrease in the thickness of the cooling pipe 3 in the laminated portion. Become. Note that the binding member may be removed after the laminated structure 1 is completed.

図10は、以上の構成を有する積層構造体1を備えた積層ユニットの構成を示す部分断面図である。同図に示す積層ユニット100は、積層構造体1と、積層構造体1を収容する筐体11と、積層構造体1に当接して積層構造体1を筐体11に対して固定する固定部材12とを備える。図10に示す積層構造体1では、ばね部材33に荷重を発生させる手段として、上述した金属製の束縛部材に相当する束縛部材8を採用した場合を示している。   FIG. 10 is a partial cross-sectional view showing the configuration of the multilayer unit including the multilayer structure 1 having the above configuration. A laminated unit 100 shown in the figure includes a laminated structure 1, a casing 11 that houses the laminated structure 1, and a fixing member that abuts the laminated structure 1 and fixes the laminated structure 1 to the casing 11. 12. In the laminated structure 1 shown in FIG. 10, the case where the restraint member 8 equivalent to the metal restraint member mentioned above is employ | adopted as a means to generate | occur | produce a load to the spring member 33 is shown.

積層構造体1では、冷却管3内部のばね部材33による荷重によって半導体モジュール2と冷却管3とが密着した状態になっているため、積層ユニット100を組み立てる際には、筐体11に積層構造体1を取り付けた後、固定部材12によって積層構造体1を筐体11に固定するだけでよい。したがって、積層ユニット100には、例えば板ばねと、板ばねを固定する固定ピンとを有し、板ばねおよび固定ピンを収容するためのスペースを設けることにより、積層構造体1を押圧して半導体モジュール2と冷却管3を密着させるような従来の構成は不要である。   In the laminated structure 1, the semiconductor module 2 and the cooling pipe 3 are in close contact with each other due to the load of the spring member 33 inside the cooling pipe 3. After the body 1 is attached, it is only necessary to fix the laminated structure 1 to the housing 11 by the fixing member 12. Accordingly, the laminated unit 100 includes, for example, a leaf spring and a fixing pin for fixing the leaf spring, and a space for accommodating the leaf spring and the fixing pin is provided, thereby pressing the laminated structure 1 and the semiconductor module. The conventional structure which makes 2 and the cooling pipe 3 contact | adhere is unnecessary.

以上の構成を有する積層ユニット100は、半導体モジュール2に制御信号を送信する制御基板等とともにPCUを構成する。   The stacked unit 100 having the above configuration constitutes a PCU together with a control board or the like that transmits a control signal to the semiconductor module 2.

以上説明した本発明の一実施の形態によれば、冷却管3の内部にばね部材33を設け、ばね部材33に所望の荷重を発生させることで半導体モジュール2と冷却管3とを密着させているため、従来のように積層部分を押圧するための機構として、押圧用のばねを用いたり、筐体に押圧用の突起を設けたりすることなく、半導体モジュール2の冷却性能を向上させることができる。したがって、半導体モジュールの冷却性能を維持しつつ、小型化に好適であるとともに組み付けも容易な積層構造体および積層ユニットを提供することができる。   According to the embodiment of the present invention described above, the spring member 33 is provided inside the cooling pipe 3, and the semiconductor module 2 and the cooling pipe 3 are brought into close contact with each other by generating a desired load on the spring member 33. Therefore, it is possible to improve the cooling performance of the semiconductor module 2 without using a pressing spring or providing a pressing projection on the housing as a mechanism for pressing the stacked portion as in the prior art. it can. Therefore, it is possible to provide a laminated structure and a laminated unit that are suitable for downsizing and can be easily assembled while maintaining the cooling performance of the semiconductor module.

また、本実施の形態によれば、冷却管3の幅方向の両端部に形成され、ばね部材33における荷重の発生に伴って変形したフランジ部312を有するため、半導体モジュール2と冷却管3の密着性を高めるために外力を加えた時、冷却管3の幅方向の端部も含めて冷却管3の厚さを略一様に薄くすることができる。   In addition, according to the present embodiment, since the flange portion 312 is formed at both ends in the width direction of the cooling pipe 3 and deformed with the generation of the load in the spring member 33, the semiconductor module 2 and the cooling pipe 3 are When an external force is applied to enhance the adhesion, the thickness of the cooling pipe 3 including the end portion in the width direction of the cooling pipe 3 can be reduced substantially uniformly.

ここまで、本発明を実施するための形態を説明してきたが、本発明は上述した一実施の形態によってのみ限定されるべきものではない。   Up to this point, the mode for carrying out the present invention has been described, but the present invention should not be limited only by the above-described embodiment.

図11は、本実施の形態の変形例1に係る積層構造体が備えるばね部材の構成を示す斜視図である。同図に示すばね部材34は、ベース部341と、長手方向に沿って並べて配置され、同じ向きに立ち上がる第1延在部342と、長手方向に沿って並べて配置され、立ち上がる方向が第1延在部342と異なる第2延在部343とを有する。第1延在部342と第2延在部343は、ベース部341の短手方向に沿って交互に並べて配置されている。第1延在部342は、上述した延在部332と同様、基端部342aと、先端部342bとを有する。また、第2延在部343は、第1延在部342と同じ形状をなし、基端部343aと、先端部343bとを有する。   FIG. 11 is a perspective view illustrating a configuration of a spring member included in the laminated structure according to the first modification of the present embodiment. The spring member 34 shown in the figure is arranged side by side along the longitudinal direction with the base part 341, and is arranged side by side along the longitudinal direction with the first extending part 342 rising in the same direction, and the rising direction is the first extension. A second extending part 343 different from the existing part 342 is provided. The first extending part 342 and the second extending part 343 are alternately arranged along the short direction of the base part 341. The first extending portion 342 has a proximal end portion 342a and a distal end portion 342b, like the extending portion 332 described above. The second extending part 343 has the same shape as the first extending part 342, and has a base end part 343a and a distal end part 343b.

本変形例1において、2枚のばね部材34を配置する際、仕切り板32の中心を通過しかつ仕切り板32の表面と平行な平面に対して鏡像対称となるように配置してもよいし、仕切り板32の中心に対して180度回転対称となるように配置してもよい。なお、本変形例1においても、鏡像対称性や180度回転対称性は、厳密に対称である場合のみならず、二つのばね部材33の一方を鏡像変換または180度回転したときに他方のばね部材33におおむね一致するような場合も含むものとする。   In the first modification, when the two spring members 34 are arranged, they may be arranged so as to be mirror-symmetric with respect to a plane passing through the center of the partition plate 32 and parallel to the surface of the partition plate 32. Alternatively, they may be arranged so as to be 180 degrees rotationally symmetric with respect to the center of the partition plate 32. In the first modified example, the mirror image symmetry and the 180 degree rotational symmetry are not only strictly symmetrical, but also when one of the two spring members 33 is mirror image transformed or rotated 180 degrees, the other spring The case where it almost coincides with the member 33 is also included.

図12は、本実施の形態の変形例2に係る積層構造体が備えるばね部材の要部の構成を示す図である。同図に示すばね部材35は、ベース部351と、延在部352とを有する。延在部352は、該延在部352がベース部351に対して延びる側をベース部351の上方とするとき、ベース部351の表面に対して下に凸な曲面をなす基端部352aと、ベース部351の表面に対して上に凸な曲面をなす先端部352bとを有する。   FIG. 12 is a diagram illustrating a configuration of a main part of a spring member included in the laminated structure according to the second modification of the present embodiment. The spring member 35 shown in the figure has a base portion 351 and an extending portion 352. The extending portion 352 has a base end portion 352a that forms a curved surface that protrudes downward with respect to the surface of the base portion 351, when the side where the extending portion 352 extends with respect to the base portion 351 is located above the base portion 351. And a tip portion 352b having a curved surface convex upward with respect to the surface of the base portion 351.

先端部352bは、上に凸な曲面であってベース部351と平行な接線を有する部分からさらに延びている。このため、先端部352bは、仕切り板32と略線接触することとなる。このような構成を有するばね部材35は、冷却管3の内部で冷却用媒体が流通する際の抵抗を増加させたい場合に好適である。   The tip portion 352 b is a curved surface that is convex upward and further extends from a portion having a tangent line parallel to the base portion 351. For this reason, the front-end | tip part 352b will be in approximate line contact with the partition plate 32. FIG. The spring member 35 having such a configuration is suitable when it is desired to increase the resistance when the cooling medium flows inside the cooling pipe 3.

図13は、本実施の形態の変形例3に係る積層構造体が備えるばね部材の要部の構成を示す平面図である。ばね部材における延在部の別な配設態様を示す図であり、ばね部材のベース部と直交する方向から見た平面図である。同図に示すばね部材36は、ベース部361と、ベース部361から延びる複数の延在部362とを有する。延在部362は、ベース部361上で千鳥配置されている。なお、延在部362の形状は、上述したばね部材33の延在部332と同様である。   FIG. 13 is a plan view showing the configuration of the main part of the spring member provided in the laminated structure according to Modification 3 of the present embodiment. It is a figure which shows another arrangement | positioning aspect of the extension part in a spring member, and is the top view seen from the direction orthogonal to the base part of a spring member. The spring member 36 shown in the figure has a base portion 361 and a plurality of extending portions 362 extending from the base portion 361. The extending portions 362 are staggered on the base portion 361. The shape of the extending part 362 is the same as that of the extending part 332 of the spring member 33 described above.

なお、本発明において、冷却管が備える二つのばね部材がそれぞれ有する延在部は、半導体モジュールと冷却管の積層方向に沿って互いに他のばね部材の延在部と異なる位置で各ベース部から立ち上がるようにしてもよい。この場合には、仕切り板32に加わる面圧をより均一化することができる。   In the present invention, the extending portions of the two spring members included in the cooling pipe are respectively separated from the base portions at positions different from the extending portions of the other spring members along the stacking direction of the semiconductor module and the cooling pipe. You may make it stand up. In this case, the surface pressure applied to the partition plate 32 can be made more uniform.

また、本発明において、ばね部材が、冷却管の中央部に位置する延在部のベース部に対する高さが他の部分に位置する延在部のベース部に対する高さよりも高い構成を有していてもよい。この構成は、冷却管の中央部に積層方向の押圧力が多く加わって冷却管の積層方向の厚さを一様に保つのが困難な場合に特に有効である。   Further, in the present invention, the spring member has a configuration in which the height of the extending portion located in the central portion of the cooling pipe is higher than the height of the extending portion located in the other portion relative to the base portion. May be. This configuration is particularly effective when a large pressing force in the stacking direction is applied to the central portion of the cooling pipe and it is difficult to keep the thickness of the cooling pipe in the stacking direction uniform.

このように、本発明は、ここでは記載していない様々な実施の形態等を含みうるものであり、特許請求の範囲に記載された技術的思想を逸脱しない範囲内において設計変更を行うことが可能である。   As described above, the present invention can include various embodiments and the like not described herein, and the design can be changed without departing from the technical idea described in the claims. Is possible.

1 積層構造体
2 半導体モジュール
3 冷却管
4 連結部材
5 流入管
6 流出管
7 蓋部材
8 束縛部材
11 筐体
12 固定部材
31 外装体
32 仕切り板
33、34、35、36 ばね部材
100 積層ユニット
311 平板部
312 フランジ部
313 開口部
314 連通部
331、341、351、361 ベース部
332、352、362 延在部
332a、342a、343a、352a 基端部
332b、342b、343b、352b 先端部
342 第1延在部
343 第2延在部
DESCRIPTION OF SYMBOLS 1 Laminated structure 2 Semiconductor module 3 Cooling pipe 4 Connecting member 5 Inflow pipe 6 Outflow pipe 7 Lid member 8 Binding member 11 Case 12 Fixing member 31 Exterior body 32 Partition plates 33, 34, 35, 36 Spring member 100 Laminating unit 311 Flat portion 312 Flange portion 313 Opening portion 314 Communication portion 331, 341, 351, 361 Base portion 332, 352, 362 Extension portion 332a, 342a, 343a, 352a Base end portion 332b, 342b, 343b, 352b Tip portion 342 First Extension part 343 Second extension part

Claims (7)

半導体モジュールと、該半導体モジュールに積層されて該半導体モジュールを冷却する冷却管とを交互に積層し、積層方向に沿って前記半導体モジュールの両面に前記冷却管が配置される積層構造体であって、
前記冷却管は、
前記半導体モジュールとの接触部分が平板状をなす平板部を有する外装体と、
前記外装体が囲む内部空間を前記積層方向に沿って二つの領域に分割する仕切り板と、
前記二つの領域にそれぞれ設けられて前記積層方向の荷重を有する二つのばね部材と、
を備え、
前記ばね部材は、
前記平板部に当接するまたは接合される平板状のベース部と、
各々が前記ベース部から立ち上がって前記ベース部の同じ主面側に延在し、先端が前記仕切り板に接触して荷重を発生する複数の延在部と、
を有することを特徴とする積層構造体。
A laminated structure in which a semiconductor module and cooling pipes stacked on the semiconductor module and cooling the semiconductor module are alternately stacked, and the cooling pipes are arranged on both surfaces of the semiconductor module along a stacking direction. ,
The cooling pipe is
An exterior body having a flat plate portion in which the contact portion with the semiconductor module forms a flat plate shape;
A partition plate that divides the internal space surrounded by the exterior body into two regions along the stacking direction;
Two spring members respectively provided in the two regions and having a load in the stacking direction;
With
The spring member is
A flat plate-like base portion that contacts or is joined to the flat plate portion;
A plurality of extending portions each rising from the base portion and extending to the same main surface side of the base portion, the tip contacting the partition plate and generating a load;
A laminated structure comprising:
半導体モジュールと、該半導体モジュールに積層されて該半導体モジュールを冷却する冷却管とを交互に積層し、積層方向に沿って前記半導体モジュールの両面に前記冷却管が配置される積層構造体であって、
前記冷却管は、
前記半導体モジュールとの接触部分が平板状をなす外装体と、
前記外装体が囲む内部空間を前記積層方向に沿って二つの領域に分割する仕切り板と、
前記二つの領域にそれぞれ設けられて前記積層方向の荷重を有する二つのばね部材と、
を備え、
前記ばね部材は、
前記外装体に当接するまたは接合される平板状のベース部と、
各々が前記ベース部から立ち上がって前記ベース部の同じ主面側に延在し、先端が前記仕切り板に接触して荷重を発生する複数の延在部と、
を有し、
前記冷却管の中央部に位置する前記延在部の前記ベース部に対する高さが他の部分に位置する前記延在部の前記ベース部に対する高さよりも高いことを特徴とする積層構造体。
A laminated structure in which a semiconductor module and cooling pipes stacked on the semiconductor module and cooling the semiconductor module are alternately stacked, and the cooling pipes are arranged on both surfaces of the semiconductor module along a stacking direction. ,
The cooling pipe is
An exterior body in which the contact portion with the semiconductor module has a flat plate shape;
A partition plate that divides the internal space surrounded by the exterior body into two regions along the stacking direction;
Two spring members respectively provided in the two regions and having a load in the stacking direction;
With
The spring member is
A plate-like base portion that contacts or is joined to the exterior body;
A plurality of extending portions each rising from the base portion and extending to the same main surface side of the base portion, the tip contacting the partition plate and generating a load;
Have
The stacked structure according to claim 1, wherein a height of the extending portion located in a central portion of the cooling pipe with respect to the base portion is higher than a height of the extending portion located in another portion with respect to the base portion.
前記冷却管は、
幅方向の両端部に形成され、前記ばね部材における荷重の発生に伴って変形したフランジ部を有することを特徴とする請求項1または2に記載の積層構造体。
The cooling pipe is
3. The laminated structure according to claim 1, further comprising flange portions that are formed at both ends in the width direction and are deformed as a load is generated in the spring member.
前記ばね部材は、
前記複数の延在部が前記ベース部に対して立ち上がる方向が互いに揃っていることを特徴とする請求項1〜3のいずれか一項に記載の積層構造体。
The spring member is
The stacked structure according to any one of claims 1 to 3, wherein directions in which the plurality of extending portions rise with respect to the base portion are aligned with each other.
前記ばね部材は、
前記複数の延在部の一部が前記ベース部に対して立ち上がる方向が他の延在部と異なることを特徴とする請求項1〜4のいずれか一項に記載の積層構造体。
The spring member is
The stacked structure according to any one of claims 1 to 4, wherein a direction in which a part of the plurality of extending portions rises with respect to the base portion is different from that of the other extending portions.
前記二つのばね部材がそれぞれ有する延在部は、
前記積層方向に沿って互いに他のばね部材の延在部と異なる位置で各ベース部から立ち上がっていることを特徴とする請求項1〜のいずれか一項に記載の積層構造体。
The extending portions of the two spring members are respectively
Multilayer structure according to any one of claims 1 to 5, characterized in that standing up from the base portion at the extended portion and the positions different from each other other spring member along the stacking direction.
請求項1〜6のいずれか一項に記載の積層構造体と、
前記積層構造体を収容する筐体と、
前記積層構造体を前記筐体に対して固定する固定部材と、
を備えたことを特徴とする積層ユニット。
The laminated structure according to any one of claims 1 to 6,
A housing for housing the laminated structure;
A fixing member for fixing the laminated structure to the housing;
A laminated unit comprising:
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