JP6196898B2 - Charging device - Google Patents

Description

  The present invention relates to a charging apparatus that embeds abrasive grains on the surface of a lapping surface plate.

  In the manufacturing process of a semiconductor device, the surface of a substantially disk-shaped wafer is polished by a lapping apparatus, and devices such as IC and LSI are formed on the polished wafer surface. Abrasive grains are embedded on the surface of the surface plate of the lapping apparatus, and polishing is performed by rotating a workpiece such as a wafer on the surface of the surface plate. In such a lapping apparatus, the abrasive grains on the surface of the surface plate are gradually worn by the polishing process and the polishing function is lowered. Therefore, it is necessary to periodically bury the abrasive grains on the surface of the surface plate. Conventionally, an ultrasonic charging apparatus is known as an apparatus for embedding abrasive grains on a surface plate (see Patent Document 1).

  The charging apparatus described in Patent Document 1 drives abrasive grains on the surface of the surface plate by ultrasonically vibrating an abrasive embedding jig while supplying abrasive liquid containing abrasive particles to the surface of the surface plate. It is configured as follows. A plurality of pressing members that vibrate ultrasonically are provided in the jig for embedding abrasive grains, and weights that increase pressure on the surface of the surface plate are attached to the pressing members. And, the abrasive liquid enters the gap between the lower surface of the pressing member that vibrates ultrasonically and the surface of the surface plate, and the abrasive grains in the abrasive liquid are driven into the surface of the surface plate by the pressing member with a weight, so that Are effectively embedded in the surface of the surface plate.

Japanese Patent No. 5209378

  However, in the charging device described in Patent Document 1, when changing the pressing condition for the surface of the surface plate, the operation of the device must be stopped and the weight of the jig for embedding the abrasive grains must be replaced each time. Don't be. Therefore, there are problems that the operator's work is complicated and productivity is poor.

  The present invention has been made in view of these points, and an object of the present invention is to provide a charging device capable of easily adjusting the pressing condition against the surface of the surface plate.

  The charging device of the present invention is a charging device for embedding and fixing abrasive grains on the surface of a lapping surface plate for polishing a workpiece. The surface plate is rotatably supported, and the surface plate is rotated. A surface plate rotating means, an abrasive liquid supply means for supplying an abrasive liquid containing abrasive grains to the surface of the surface plate, and abrasive grains contained in the abrasive liquid supplied by the abrasive liquid supply means on the surface of the surface plate Abrasive embedding means for embedding, a rotating means for mounting the abrasive grain embedding means at the lower end and rotating the abrasive grain embedding means about a vertical rotation axis, and the rotating means relative to the surface of the surface plate The abrasive grain burying means has a pressing portion having a pressing surface facing the surface of the surface plate and a support shaft portion that supports the pressing portion from above and stands upright. A pressing member and disposed on the support shaft portion of the pressing member to apply ultrasonic waves to the pressing surface An ultrasonic vibrator, a case member attached to the lower end of the rotating means and holding the plurality of pressing members, and a power supply unit for applying AC power to the ultrasonic vibrator, the case member comprising a disk A shaft that is shaped and has a hollow area inside, and that is mounted at the lower end of the rotating means at the center that is the center of rotation, stands upward, and one or more pressing members project the pressing portion downward to support the shaft. The shaft portion and the ultrasonic transducer are disposed in a state of being accommodated in the hollow region, and the power supply portion communicates with a rotating ring electrode disposed on the upper surface of the case member and an external power source from above. A fixing member having a power supply brush disposed in contact with the ring-shaped electrode, and accommodated in the rotating case member by contact between the rotating ring-shaped electrode and the fixed power supply brush. To supply power to the ultrasonic transducer , Characterized by.

  According to this configuration, the abrasive embedding means mounted on the lower end of the rotating means is moved up and down by the vertically movable means to adjust the pressure of the abrasive embedding means against the surface of the surface plate. Is done. Then, the abrasive liquid enters the gap between the pressing surface of the pressing member of the abrasive grain embedding means and the surface of the surface plate, and ultrasonic vibration is applied to the pressing member, so that the pressing surface of the pressing member causes the inside of the abrasive liquid to enter. Abrasive grains are driven into the surface of the surface plate. As described above, the abrasive grains can be efficiently embedded in the surface of the surface plate, and the operator does not have a troublesome work when changing the pressing condition. Further, a slip ring mechanism is constituted by a ring-like electrode disposed on the upper surface of the case member of the abrasive grain embedding means and a power supply brush of a fixing member connected to an external power source. Since the power feeding system is formed by the slip ring mechanism, the shaft of the case member can be connected to the rotating means without interfering with the power feeding system. Therefore, it is possible to energize the ultrasonic vibrator while rotating the abrasive grain embedding means via the shaft by the rotating means, and further moving the abrasive grain embedding means vertically via the shaft by the vertically movable means. Can do. Moreover, since the ring-shaped electrode is provided on the upper surface of the case member, the abrasive grain embedding means can be formed thinner than the configuration using the existing slip ring mechanism.

  According to the present invention, the pressing condition for the surface of the surface plate can be easily adjusted by adjusting the pressure of the abrasive grain embedding unit with respect to the surface of the surface plate by the vertically movable means.

It is a perspective view of the charging device which concerns on this Embodiment. It is an external appearance perspective view of the abrasive grain embedding means concerning this Embodiment. It is the perspective view which abbreviate | omitted the upper cover part from the abrasive grain embedding means which concerns on this Embodiment. It is a cross-sectional schematic diagram of the abrasive grain burying means which concerns on this Embodiment. It is operation | movement explanatory drawing of the charging device which concerns on this Embodiment.

  Hereinafter, a charging apparatus according to the present embodiment will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of the charging apparatus according to the present embodiment. Note that the charging apparatus according to the present embodiment is not limited to the configuration shown in FIG. The charging device may be configured in any manner as long as the pressing condition against the surface of the surface plate can be adjusted by the vertical movement of the abrasive embedding means.

  As shown in FIG. 1, the charging apparatus 1 is configured to embed and fix abrasive grains on a surface 21 of a surface plate 11 used for polishing a workpiece. The surface plate 11 of the charging device 1 is formed in a disk shape having a center opened with a metal material such as tin, and is rotatably supported on the base 12. A surface plate rotating means 13 for rotating the surface plate 11 is provided in the base 12, and the surface plate rotating means 13 is connected to an opening of the surface plate 11 through a rotation shaft 23. On the base 12, an abrasive liquid supply means 14 for supplying an abrasive liquid containing abrasive grains to the surface 21 of the surface plate 11 is provided. The abrasive liquid contains, for example, diamond abrasive grains having a particle diameter of 0.05 μm to 1 μm.

  Abrasive grain embedding means 16 for embedding abrasive grains contained in the abrasive liquid on the surface 21 of the surface plate 11 is supported on the column part 15 behind the surface plate 11. The abrasive grain embedding means 16 is an ultrasonic vibration type abrasive grain embedding jig, and is driven into the surface 21 of the surface plate 11 by driving abrasive grains in the abrasive liquid while being brought close to the surface 21 of the surface plate 11. Buried in Further, the abrasive grain embedding means 16 is attached to the lower end of the rotating means 17 and is rotated around the rotation axis in the vertical direction (Z-axis direction) by the rotating means 17. The rotating means 17 is supported on a vertically movable means 18 provided on the support column 15 via a housing 25, and the rotating means 17 is moved up and down with respect to the surface 21 of the surface plate 11 by the vertically movable means 18.

  The vertically movable means 18 has a pair of guide rails 26 arranged in front of the support column 15 and parallel to the Z-axis direction, and a motor-driven Z-axis table 27 slidably installed on the pair of guide rails 26. doing. The rotating means 17 and the abrasive grain embedding means 16 are supported on the front surface of the Z-axis table 27 via the housing 25. A nut portion (not shown) is formed on the back side of the Z-axis table 27, and a ball screw 28 is screwed into the nut portion. When the ball screw 28 is rotationally driven by a drive motor 29 connected to one end of the ball screw 28, the abrasive grain embedding means 16 attached to the lower end of the rotating means 17 is moved along the guide rail 26 in the Z-axis direction. The

  As described above, in the charging apparatus 1, the abrasive liquid containing abrasive grains is supplied from the abrasive liquid supply means 14 to the surface 21 of the surface plate 11, and the abrasive embedding means 16 located downstream in the rotation direction of the surface plate 11. Abrasive grains are embedded in the surface 21 of the surface plate 11. At this time, the pressure (up and down position) of the abrasive grain embedding means 16 against the surface 21 of the surface plate 11 is adjusted by the up and down movable means 18. Therefore, even when the pressing condition of the abrasive grain embedding means 16 is changed, a troublesome operation is not generated for the operator, and the operation time can be shortened.

  Incidentally, in the configuration in which the pressing condition of the abrasive grain embedding means 16 is changed by the vertically movable means 18, the abrasive grain embedding means 16 is rotatably attached to the lower end of the rotating means 17. For this reason, it is necessary to supply electric power to the abrasive grain embedding means 16 while allowing the abrasive grain embedding means 16 to rotate, and a power supply system for the abrasive grain embedding means 16 becomes a problem. Further, since the abrasive burying means 16 is moved up and down together with the rotating means 17, the height dimension of the abrasive burying means 16 must be suppressed in order to reduce the size of the entire apparatus. In view of this, the abrasive burying means 16 incorporates a slip ring mechanism inside, thereby ensuring a power supply system for the abrasive burying means 16 attached to the rotating means 17 and simultaneously suppressing the height dimension.

  Hereinafter, the abrasive grain embedding means will be described with reference to FIGS. FIG. 2 is an external perspective view of the abrasive grain embedding means according to the present embodiment. FIG. 3 is a perspective view in which the upper lid portion is omitted from the abrasive grain embedding means according to the present embodiment. FIG. 4 is a schematic cross-sectional view of abrasive grain embedding means according to the present embodiment.

  As shown in FIGS. 2 and 3, the case member 31 of the abrasive grain embedding means 16 has a disc shape having a hollow region with an annular side wall portion 34 sandwiched between a circular lower lid portion 32 and an upper lid portion 33. Is formed. A shaft 35 penetrating the upper lid 33 vertically is provided at the center of rotation of the case member 31, and the case member 31 is attached to the lower end of the rotating means 17 (see FIG. 1) through the shaft 35. Three pressing members 36 are held around the shaft 35 at intervals of 120 degrees in the hollow region of the case member 31. Each pressing member 36 is equipped with an ultrasonic transducer 37, and by applying AC power (AC voltage) to each ultrasonic transducer 37, each pressing member 36 is ultrasonically vibrated in the vertical direction. .

  In addition, a power supply unit 38 that supplies power to the ultrasonic transducer 37 inside the case member 31 is provided on the upper lid portion 33. The power supply unit 38 includes two large and small ring-shaped electrodes 41 and 42 (see FIG. 4) embedded in the upper surface 39 of the case member 31 and a fixing member 43 supported above the ring-shaped electrodes 41 and 42. Is done. The two large and small ring-shaped electrodes 41 and 42 are concentrically embedded in the upper surface 39 of the upper lid portion 33, and the outer ring-shaped electrode 41 is a plus electrode and the inner ring-shaped electrode 42 is a minus electrode. Each ring-shaped electrode 41, 42 is connected to electrodes 71, 72, 73 of the ultrasonic transducer 37.

  The fixing member 43 is supported so as to face the ring-shaped electrodes 41 and 42 in the vertical direction while being blocked from the rotation of the case member 31 via the bearings 51 and 52 (see FIG. 4). The fixing member 43 supports a socket 54 to which a wiring 53 (see FIG. 1) extending from an external power source (not shown) of the charging device 1 is connected. A plurality of power supply brushes 46 and 47 that slide in the shallow grooves 44 and 45 of the ring-shaped electrodes 41 and 42 are provided on the lower surface of the fixing member 43. Each of the power supply brushes 46 and 47 is in contact with the two large and small ring electrodes 41 and 42 to supply power to the ultrasonic transducer 37 from an external power source.

  As shown in FIG. 4, the pressing member 36 is housed inside the case member 31 with the pressing surface 66 protruding from the lower lid portion 32. The pressing member 36 has a support shaft portion 63 in which a screw portion 62 protrudes upward from a circular base portion 61. An annular ultrasonic transducer 37 is mounted in two stages on the screw portion 62 of the support shaft 63, and a fixing nut 64 is fastened to the screw portion 62 protruding from the upper ultrasonic transducer 37. The ultrasonic transducer 37 is sandwiched between three electrodes, an upper electrode 71, an intermediate electrode 72, and a lower electrode 73. The upper electrode 71 and the lower electrode 73 are positive electrodes, and the intermediate electrode 72 is a negative electrode. Yes.

  For this reason, the upper electrode 71 and the lower electrode 73 are connected to the outer ring-shaped electrode 41, and the intermediate electrode 72 is connected to the inner ring-shaped electrode 42. As described above, the two-layered ultrasonic transducer 37 is screwed to the upper surface of the base portion 61 of the support shaft portion 63 while being sandwiched between the upper electrode 71, the intermediate electrode 72, and the lower electrode 73. Yes. On the other hand, on the lower surface of the base portion 61 of the support shaft portion 63, a pressing portion 65 for driving abrasive grains onto the surface 21 (see FIG. 1) of the surface plate 11 is supported. The pressing portion 65 is formed, for example, in a circular shape with ceramics, and a groove 67 that holds the abrasive liquid is formed on the pressing surface 66 that faces the surface 21 of the surface plate 11.

  In addition, a flange portion 68 is formed on the base portion 61 of the support shaft portion 63, and is held by the flange portion 68 in a state of being prevented from being detached from the lower lid portion 32. The pressing member 36 configured in this manner imparts ultrasonic vibration to the pressing surface 66 when AC power is applied to the upper electrode 71, the intermediate electrode 72, and the lower electrode 73. Thereby, abrasive grains are driven by the pressing surface 66 of the pressing member 36, and the abrasive grains are embedded in the surface 21 of the surface plate 11. The ultrasonic vibrator 37 is made of piezoelectric ceramics such as barium titanate (BaTiO3), lead zirconate titanate (Pb (Zr, Ti) O3), lithium niobate (LiNbO3), and lithium tantalate (LiTaO3). It is formed.

  Here, the power supply system of the abrasive grain embedding means will be described in more detail with reference to FIG. On the upper surface 39 of the upper lid portion 33, an annular inner peripheral convex portion 55 protrudes along the outer peripheral surface of the central shaft 35, and an annular outer peripheral convex portion 56 is attached to the radially outer side of the inner peripheral convex portion 55. . An annular groove 57 is formed on the upper surface 39 of the upper lid portion 33 by the inner peripheral convex portion 55 and the outer peripheral convex portion 56. On the bottom surface of the annular groove 57, two large and small ring-shaped electrodes 41, 42 are embedded in a state of being exposed from the top surface. A fixing member 43 is disposed on the upper surface 39 of the upper lid portion 33 so as to cover the annular groove 57. The outer peripheral portion 58 of the fixing member 43 is formed so as to enter the annular groove 57 of the upper lid portion 33, and the central portion 59 of the fixing member 43 is opened so as to allow the shaft 35 to pass therethrough.

  The outer peripheral portion 58 of the fixing member 43 is supported from the inner side on the outer peripheral surface of the inner peripheral convex portion 55 via the bearing 51, and is supported from the outer side to the outer peripheral convex portion 56 via the bearing 52. For this reason, the case member 31 rotates freely with respect to the fixing member 43, and the rotational force of the case member 31 is not transmitted to the fixing member 43. On the lower surface of the fixing member 43, power supply brushes 46 and 47 that are in contact with the ring-shaped electrodes 41 and 42 are provided. In this case, even if the ring-shaped electrodes 41 and 42 are rotated together with the case member 31, the power supply brushes 46 and 47 slide on the upper surfaces of the ring-shaped electrodes 41 and 42. 42 connections are maintained.

  An external power source is connected (communication) to the power supply brushes 46 and 47 through the wiring in the fixing member 43, and the ultrasonic transducer 37 is connected to the ring-shaped electrodes 41 and 42 through the wiring in the case member 31. Therefore, even when the case member 31 rotates, the pressing member 36 can be ultrasonically vibrated by applying AC power to the ultrasonic transducer 37 from the external electrode. As described above, the abrasive burying means 16 is formed with the slip ring mechanism by the ring-shaped electrodes 41 and 42 and the power supply brushes 46 and 47. Since this slip ring mechanism is formed by covering the annular groove 57 of the upper lid part 33 with the fixing member 43, the height of the abrasive grain embedding means 16 can be minimized and the entire apparatus can be miniaturized. It is possible.

  The slip ring mechanism is formed so as to avoid the shaft 35 standing on the case member 31. That is, since the shaft 35 extends in the vertical direction inside the ring-shaped electrodes 41 and 42 and inside the opening of the fixing member 43, the shaft 35 may interfere with the ring-shaped electrodes 41 and 42 and the fixing member 43. Absent. For this reason, the shaft 35 can be attached to the lower end of the rotating means 17 (see FIG. 1) without causing the shaft 35 to interfere with the power feeding system of the abrasive grain embedding means 16.

  The burying operation of the charging device will be described with reference to FIG. FIG. 5 is an operation explanatory diagram of the charging device according to the present embodiment.

  As shown in FIG. 5A, in the charging device 1, the rotating means 17 is supported by the vertically movable means 18 of the support column 15, and the abrasive grain embedding means 16 is attached to the lower end of the rotating means 17. The abrasive burying means 16 is brought close to the surface 21 of the surface plate 11 by the vertically movable means 18, and the pressing surfaces 66 of the pressing members 36 are brought into contact with the surface 21 of the surface plate 11. At this time, the height position of the abrasive grain embedding means 16 is finely adjusted, and the pressure of the pressing surface 66 of each pressing member 36 against the surface 21 of the surface plate 11 is adjusted. Further, a supply port 75 of the abrasive liquid supply means 14 is positioned on the opposite side of the abrasive grain embedding means 16 across the rotation center of the surface plate 11.

  As shown in FIG. 5B, the surface plate 11 is rotated around the Z axis, and an abrasive liquid containing abrasive grains is supplied to the surface 21 of the surface plate 11 from the upstream side in the rotation direction. In addition, the case member 31 of the abrasive grain embedding unit 16 is rotated by the rotating unit 17, and each pressing member 36 held by the case member 31 is revolved (revolved) around the rotation axis of the shaft 35. At this time, the rotation of the case member 31 is not transmitted to the fixing member 43 of the abrasive grain embedding means 16, and the fixing member 43 is stationary while being connected to the external power source of the charging device 1 through the wiring 53. . Then, AC power is applied from an external power source to the ultrasonic vibrator 37 (see FIG. 4) of the pressing member 36 via a slip ring mechanism formed between the fixing member 43 and the case member 31.

  As a result, the pressing member 36 is ultrasonically vibrated, and abrasive grains that have entered a slight gap between the pressing surface 66 of the pressing member 36 and the surface 21 of the surface plate 11 are driven into the surface 21 of the surface plate 11. Since the abrasive grains are efficiently embedded in the surface 21 of the surface plate 11 by the ultrasonic vibration of the pressing surface 66, the working time of the abrasive grains and the amount of the abrasive liquid are reduced. In addition, the structure which can replace | exchange the holding means which hold | maintains a workpiece instead of the abrasive grain embedding means 16 at the lower end of the rotation means 17 may be sufficient. Thereby, after embedding abrasive grains on the surface 21 of the surface plate 11, the workpiece held by the holding means can be brought into contact with the surface 21 of the surface plate 11 and lapped.

  As described above, according to the charging apparatus 1 according to the present embodiment, the abrasive burying means 16 mounted on the lower end of the rotating means 17 by the vertically movable means 18 moves up and down with respect to the surface 21 of the surface plate 11. As a result, the pressure of the abrasive grain embedding means 16 against the surface 21 of the surface plate 11 is adjusted. Then, the abrasive liquid enters the gap between the pressing surface 66 of the pressing member 36 of the abrasive grain embedding means 16 and the surface 21 of the surface plate 11, and ultrasonic vibration is applied to the pressing member 36. Abrasive grains in the abrasive liquid are driven into the surface 21 of the surface plate 11 by the pressing surface 66. As described above, the abrasive grains can be efficiently embedded in the surface 21 of the surface plate 11, and the operator does not have a troublesome work when changing the pressing condition. Further, a slip ring mechanism is constituted by the ring-shaped electrodes 41 and 42 disposed on the upper surface 39 of the case member 31 of the abrasive grain embedding means 16 and the power supply brushes 46 and 47 of the fixing member 43 connected to an external power source. ing. Since the power feeding system is formed by the slip ring mechanism, the shaft 35 of the case member 31 can be connected to the rotating means 17 without interfering with the power feeding system. Therefore, the ultrasonic vibrator 37 can be energized in a state in which the abrasive grain embedding means 16 is rotated via the shaft 35 by the rotating means 17, and the abrasive grain embedding means 16 via the shaft 35 by the vertically movable means 18. Can be moved vertically. Further, since the ring-shaped electrodes 41 and 42 are provided on the upper surface 39 of the case member 31, the abrasive embedding means 16 can be formed thinner than the configuration using the existing slip ring mechanism.

  In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  For example, the vertically movable means 18 according to the present embodiment is configured by a ball screw type moving mechanism, but is not limited to this configuration. The vertically movable means 18 only needs to be configured to be able to move the abrasive grain embedding means 16 up and down, and may be constituted by, for example, a linear motor type moving mechanism.

  Moreover, although the vertically movable means 18 which concerns on this Embodiment was set as the structure which moves the abrasive grain embedding means 16 up and down with respect to the surface 21 of the surface plate 11, it is not limited to this structure. The vertically movable means 18 may be configured in any manner as long as the abrasive grain burying means 16 is moved up and down relatively with respect to the surface 21 of the surface plate 11. For example, the surface plate 11 may be moved up and down with respect to the abrasive grain embedding means 16, or both the abrasive grain embedding means 16 and the surface plate 11 may be moved up and down.

  Moreover, although the support shaft part 63 and the press part 65 were comprised separately from the press member 36 which concerns on this Embodiment, it is not limited to this structure. The pressing member 36 only needs to be configured to be able to drive abrasive grains in the abrasive liquid. For example, the support shaft portion 63 and the pressing portion 65 may be integrally formed.

  In the power supply unit 38 according to the present embodiment, the slip ring mechanism is formed by the two large and small ring-shaped electrodes 41 and 42 and the power supply brushes 46 and 47 corresponding thereto, but the configuration is not limited to this. Any configuration can be used as long as power can be supplied to the ultrasonic transducer 37 inside the rotating case member 31. For example, three or more ring-shaped electrodes and corresponding power supply brushes can be used. A slip ring mechanism may be formed.

  As described above, the present invention has an effect that the pressing condition against the surface of the surface plate can be easily adjusted, and in particular, abrasive grains are applied to the surface of the lap surface plate used in the semiconductor device manufacturing process. Useful for embedded charging devices.

DESCRIPTION OF SYMBOLS 1 Charging apparatus 11 Surface plate 13 Surface plate rotation means 14 Abrasive liquid supply means 16 Abrasive grain embedding means 17 Rotation means 18 Vertically movable means 21 Surface of surface plate 31 Case member 35 Shaft 36 Press member 37 Ultrasonic vibrator 38 Power supply Part 39 Upper surface of case member 41, 42 Ring-shaped electrode 43 Fixing member 46, 47 Power supply brush 63 Support shaft part 65 Press part 66 Press surface

Claims (1)

A charging device for embedding and fixing abrasive grains on the surface of a lapping surface plate for polishing a workpiece,
A surface plate supported in a rotatable manner, a surface plate rotating means for rotating the surface plate, an abrasive liquid supplying means for supplying an abrasive liquid containing abrasive grains to the surface of the surface plate, and supplied by the abrasive liquid supplying means Abrasive embedding means for embedding abrasive grains contained in the polishing liquid on the surface of the surface plate, and the abrasive grain embedding means mounted on the lower end and rotating the abrasive grain embedding means about a vertical rotation axis. And rotating means for moving the rotating means up and down relative to the surface of the surface plate,
The abrasive grain burying means includes a pressing portion having a pressing surface facing the surface of the surface plate, and a pressing member having a support shaft portion that supports and presses the pressing portion from above,
An ultrasonic transducer disposed on the support shaft portion of the pressing member to apply ultrasonic waves to the pressing surface;
A case member that is attached to the lower end of the rotating means and holds the plurality of pressing members; and a power supply unit that applies AC power to the ultrasonic transducer,
The case member has a disk shape and has a hollow region inside, and a shaft mounted on the lower end of the rotating means is erected upward in the center of the rotation center, and one or more pressing members include the pressing portion. Protruding downward and disposed in a state where the support shaft and the ultrasonic transducer are accommodated in the hollow region,
The power supply unit includes a ring-shaped electrode that is disposed on the upper surface of the case member and rotates, and a fixing member that includes an electric power supply brush disposed in contact with the ring-shaped electrode from above to communicate with an external power source. Become
A charging device, characterized in that electric power is supplied to the ultrasonic transducer housed in the rotating case member by contact between the rotating ring-shaped electrode and the fixed power supply brush.

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