JP6182878B2 - Cooling tank and cooling device - Google Patents

Description

  The present invention relates to a cooling bath and a cooling device, and more particularly, a test vessel provided in a cooling test device for performing a thermal fatigue test of a specimen such as an electronic component, and a processing vessel provided in a reflow device for soldering a printed circuit board. The present invention relates to a cooling / heating tank and a cooling / heating device.

  Prior art relating to a heating / cooling test apparatus for performing a heating / cooling test of a specimen in a test tank is described in Patent Document 1 (Japanese Patent Laid-Open No. 2008-232974) and Patent Document 2 (Japanese Patent Laid-Open No. 50-114354). Yes. Patent Document 1 discloses a cooling / heating test apparatus for electronic components.

  As shown in FIG. 8, the thermal testing apparatus 800 of Patent Document 1 includes three tanks, a test tank 801, a high temperature tank 802, and a low temperature tank 803, and the test tank 801 and other tanks (high temperature tank 802, By opening and closing the damper with respect to the low temperature tank 803), the gas in the high temperature tank 802 or the low temperature tank 803 is introduced into the test tank 801, and the test substrate 804 in the test tank 801 is heated and cooled.

  In Patent Document 2, as shown in FIG. 9, a furnace body 91 provided with a burner 92 as a heating body is formed in a substantially circular cross section, and an atmospheric gas composed of a suction port 914 and a nozzle 913. A supply port and an atmospheric gas discharge port 97, the atmospheric gas supply port communicates with the atmospheric gas generation source, and the atmospheric gas discharge port 97 communicates with the circulation pump 99; and the gas supply port There is described a continuous carburizing furnace using an atmospheric gas having a configuration in which an atmospheric gas from a gas supply port is opened along the wall of the furnace body.

  In this continuous gas carburizing furnace using atmospheric gas, a burner 92 protrudes inside the furnace body 91, and a tray 94 on which a processing material 95 is mounted is placed on a rail 93 installed at the bottom. A gas supply port 96 and a gas discharge port 97 are formed in an upper side portion of the furnace body 91 and a lower side portion of the rail 93, and the supply port 96 and the discharge port 97 have a branch portion 98, a circulation pump 99, The pipe 911 communicates with the strainer 910 to form a circulation path with the furnace body 91. Further, a pipe 912 is connected to the branching portion 98 and communicates with an atmospheric gas generator (not shown). The gas supply port 96 includes a nozzle 913 that communicates with the interior of the furnace body 91 and has a suction hole 914, and the nozzle 913 is oriented so that the ambient gas that is ejected circulates along the inner wall of the furnace body 91. Yes.

  In such a configuration, first, after supplying the atmospheric gas from the atmospheric gas generation source to the inside of the furnace body 91, when the circulation pump 99 is operated and the inside of the furnace body 91 is heated by the burner 92, it is attached to the gas supply port 96. While the mixed gas of the atmosphere gas in the furnace heated by the burner 92 and the new atmosphere gas flows along the inner wall of the furnace body 91 from the nozzle 913, a part is again discharged from the discharge port 97, and the other is heated. Is increased by the levitation force due to the gas and the suction force accompanying the gas ejection from the nozzle 913, and is heated to a predetermined temperature by the burner 92 while circulating through the inner wall of the furnace body 91.

  As described above, most of the heated atmospheric gas is circulated through the inner wall of the furnace body 91 and a part is circulated through the circulation pump 99, so that the furnace inner wall is brought to a substantially uniform temperature. Further, since the radiation surface is curved, all of the radiant heat from the furnace inner wall is concentrated on the central portion (treatment material 95) of the furnace body 91, and the treatment material 95 is brought to a uniform temperature in combination with the uniformization of the furnace temperature. Will hold.

  In this way, in the continuous carburizing furnace using atmospheric gas shown in FIG. 9, the uniformity of the furnace temperature is ensured.

JP 2008-232974 A JP 50-114354 A

  However, since the apparatus described in Patent Document 1 has a large heat capacity in each tank, heating and cooling cannot be performed quickly. For example, 60 minutes are required for one cycle of heating and cooling. Further, depending on the amount and arrangement of the specimens accommodated in the test tank 801, the heating / cooling rate is different, and the test conditions cannot be made constant. In addition, there is a problem that the whole sample material cannot be heated and cooled uniformly.

  In the continuous gas carburizing furnace using the atmospheric gas described in Patent Document 2, the burner 92 for heating the gas is provided on the opposite side of the furnace in which the atmospheric gas supply port and the atmospheric gas discharge port 97 are provided. The gas that is heated and circulated in the atmosphere and the new atmospheric gas from the atmospheric gas supply port are mixed and circulated in the furnace. Therefore, heating in the furnace cannot be performed quickly, and a difference occurs between the gas temperature in the vicinity of the atmospheric gas supply port into which new atmospheric gas is introduced and the gas temperature in the vicinity of the burner 92. As a result, in the vicinity of the burner 92, the treatment material 95 continues to be supplied with a higher temperature than other places, and uniform heating of the treatment material 95 cannot be performed quickly and efficiently. Moreover, since the burner 92 is provided in the furnace, the apparatus scale becomes large.

  As described above, the techniques of Patent Documents 1 and 2 cannot quickly and uniformly heat the specimen.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a cooling / heating tank and a cooling / heating device capable of heating and cooling a specimen quickly and uniformly with a simple configuration. And

In order to achieve the above object, the cooling / heating tank of the present invention comprises a gas introduction means for introducing a gas whose temperature is adjusted outside the tank in order to heat or cool the object accommodated in the tank, and the introduced gas. A closed structure refrigeration tank comprising gas exhaust means for discharging,
The gas introducing means includes a pipe penetrating through one place of the wall body and linearly disposed along the vicinity of the inner wall in the tank, and the gas is showered in a line and in one direction on the peripheral surface of the pipe. A plurality of fine holes to be ejected in a line are provided side by side, and the introduced gas is not obstructed by the object to be treated, and between the inner wall of the cold bath and the object to be treated. The gas is introduced such that the gas is exhausted and the gas exhaust means is arranged in a distributed manner so that an angle between a gas introduction direction and a gas discharge direction by the gas introduction means is 90 ° to 180 ° The exhaust port is disposed so as to surround the gas introduction unit on each inner wall of the cold-heating tank positioned along the gas introduction direction or on an inner wall opposite to the gas introduction direction. It is characterized by that.

  In addition, the shape of the exhaust port is a slit shape or an aggregate of a plurality of micro holes.

  The gas introduction means includes a pipe arranged from one inner wall of the cooling / heating tank toward an inner wall facing the inner wall, in which a plurality of air supply holes for ejecting the gas are arranged side by side.

  Moreover, the said cold / heat tank is a tank for reflow apparatuses, and accommodates a printed circuit board as said to-be-processed object, It is characterized by the above-mentioned.

  The cooling bath is a bath for a cooling test apparatus that inspects the performance of the test specimen when heated or cooled, or the durability performance of the test specimen in a cooling cycle, and the test specimen is used as the object to be processed. It is characterized by containing.

  The cooling / heating device of the present invention includes the above-described cooling / heating tank, a first gas passage through which a first gas at room temperature flows, a second gas passage through which a second gas lower in temperature than the first gas flows, and the first A first gas flow path from the first gas flow path to the third gas flow path provided in the first gas flow path; A first on-off valve for controlling the flow; a second on-off valve for controlling the flow of the second gas from the second gas flow path to the third gas flow path provided in the second gas flow path; A heating means for heating the gas flowing in the third gas flow path, and a valve for opening at least one of the first open / close valve and the second open / close valve when controlling the temperature of the workpiece; Control means, wherein the gas introduction means is connected to the third gas flow path. , Introducing the heated first gas and said second gas in said heating means, characterized in that.

  In the above-described cooling / heating tank of the present invention, gas for heating or cooling the object to be processed accommodated in the tank is introduced by the gas introduction means so as to flow between the inner wall of the cooling / heating tank and the object to be processed, The introduced gas is discharged from the exhaust ports provided in the gas exhaust means, which are arranged in a dispersed manner so that the angle between the gas introduction direction by the gas introduction means and the gas discharge direction is 90 ° to 180 °. Further, the exhaust ports are configured to be distributed on the inner wall of the cold heat tank so as to surround the gas introduction means as seen from the gas introduction direction by the gas introduction means. By adopting such a configuration, the gas introduced into the tank by the gas introduction means and flowing between, for example, the upper inner wall of the cooling tank and the object to be processed is reversed on the inner wall of the tank, and the cooling tank Since the gas flows between the lower inner wall and the object to be processed and is discharged from the exhaust port, the gas circulates in the tank and flows so as to wrap the entire object to be processed.

  According to the present invention, the gas circulates in the tank and flows so as to wrap the entire object to be processed, and the entire object to be processed disposed in the tank can be heated and cooled uniformly. Thus, it is possible to perform uniform heating and cooling of the object to be processed with a simple configuration in which the apparatus configuration is simplified.

It is a figure which shows typically the structure of the cooling / heating apparatus provided with the cooling / heating tank which concerns on embodiment. It is a figure which shows typically the internal structure of the cooling device in FIG. 1A. It is a figure which shows typically the 1st structure of the cold / heating tank which concerns on embodiment. It is a figure which shows typically the 2nd structure of the cold storage tank which concerns on embodiment. It is a figure which shows typically the 3rd structure of the cold / heating tank which concerns on embodiment. It is a figure which shows typically the 4th structure of the cold / heating tank which concerns on embodiment. It is a figure which shows typically the structure of the cooling / heating tank in which the exhaust port is arrange | positioned improperly. It is a figure which shows the internal structure of the cold / heating tank which concerns on embodiment. It is a figure which shows typically the structure of the conventional cold-heat test apparatus. It is a figure which shows typically the structure of the conventional atmospheric gas use continuous carburizing furnace.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1A schematically shows a configuration of a cooling / heating apparatus 100 including a cooling / heating tank 10 according to an embodiment of the present invention, and FIG. 1B shows a configuration of the cooling / heating tank 10 in FIG. Is shown.

  A cooling device 100 shown in FIG. 1A supplies a temperature-controlled gas (hereinafter also referred to as a temperature control gas) to a cooling bath 10 and an object to be treated (hereinafter referred to as a specimen) placed in the cooling bath 10. (Also referred to as).

  The cold heat tank 10 is provided with a gas introduction means for supplying a gas for heating or cooling the specimen into the cold heat tank 10 and a gas exhaust means for discharging the gas out of the cold heat tank 10. It has a closed structure. In addition, as shown in FIG. 1B, a test specimen is placed in the cold heat tank 10.

  In such a cold heat tank 10, the gas introduction means supplies gas into the cold heat tank 10. In particular, as shown in FIG. 1B, the present gas introducing means has a gas jetted from one inner wall of the opposing inner wall in the cooling / heating tank 10 toward the other inner wall, and into the inner wall of the cooling / heating tank 10 and the cooling / heating tank 10. Gas is introduced to flow between the placed specimens.

  The gas exhaust means includes an exhaust port having an angle of 90 ° between the gas introduction direction by the gas introduction means and the gas discharge direction, and the exhaust port is viewed from the gas introduction direction by the gas introduction means. It distributes and arranges on the inner wall of the cold-heating tank 10 so that a gas introduction means may be enclosed.

  By adopting such a configuration, the gas introduced into the tank by the gas introduction means and flowing between the inner wall on the left side surface of the cooling / heating tank 10 and the specimen is inverted on the inner wall on the upper surface in the tank, It circulates in the tank and flows between the inner wall on the upper, lower, left and right sides of the cold water tank and the specimen, and is discharged from the exhaust port. Thereby, the gas introduced into the tank by the gas introduction means flows so as to wrap the entire specimen.

  Thus, according to the cooling / heating tank 10 of the present embodiment, the heating or cooling gas circulates in the tank and flows so as to wrap the entire specimen, and the specimen placed in the tank The whole can be heated and cooled uniformly, and this makes it possible to perform uniform heating and cooling of the specimen with a simple configuration with a simplified apparatus configuration.

  The gas exhaust means preferably includes an exhaust port having an angle between the gas introduction direction of the gas introduction means and the gas discharge direction of 90 ° to 180 °. When the angle between the gas introduction direction and the gas discharge direction is smaller than 90 °, the gas introduction direction and the gas discharge direction are close to each other, so the introduced gas is discharged immediately without circulating in the tank. Cannot be circulated in the tank. As a result, the gas cannot flow so as to wrap the specimen placed in the tank, and the whole specimen cannot be heated and cooled uniformly and rapidly.

  In addition, about the structure of the cooling / heating tank 10, it can be set as a various structure so that it may explain in detail based on the following FIGS.

  Hereinafter, the details of the cooling / heating tank of the present embodiment will be described with reference to FIGS. The first embodiment will be described in FIG. 2, the second embodiment in FIG. 3, the third embodiment in FIG. 4, and the fourth embodiment in FIG.

  The cooling / heating tank of the present embodiment is configured to uniformly heat or cool the accommodated specimen. An electronic substrate or the like is exemplified as a specimen, but such a specimen such as an electronic substrate is composed of parts having different thermal conductivities, and a conventional high-temperature gas or low-temperature gas is directly sprayed on the specimen. With technology, it has been difficult to efficiently uniformly heat or cool the whole. For example, in order to uniformly heat or uniformly cool the entire electronic substrate, there is a conventional technique in which the surface of the electronic substrate is covered with a highly heat conductive foil, and a hot gas or a low temperature gas is sprayed on a part thereof. If it is large, there will be a temperature difference between the location where the gas is directly sprayed and the location away from the location.

  For example, unlike the prior art, the cooling / heating tank of the present embodiment does not need to cover the surface of the specimen with a highly heat conductive foil, and it is only necessary to arrange the specimen as it is in the cooling / heating tank.

<First Embodiment>
In FIG. 2, FIG. 2 (A) shows the internal structure from the side surface side of the cooling / heating tank 10a, and FIG. The internal structure is shown.

  As shown in FIG. 2 (A), the main cooling / heating tank 10a is composed of a container made of a heat insulating material 61, and a high heat conductive foil 62 such as a copper foil that does not communicate with the outside of the tank is provided on the entire inner wall. . When the high heat conductive foil 62 communicates with the outside of the tank, heat escapes to the outside of the tank through the high heat conductive foil 62, so that the heat uniformity in the tank is lowered and rapid heating is not possible.

  Further, as shown in FIG. 2 (B), the gas introduction means includes a gas blowing pipe 63 arranged from one inner wall of the cooling / heating tank 10a toward the facing inner wall, and the gas blowing pipe 63 includes: A plurality of air supply holes through which gas flows are arranged side by side.

  Further, as shown in FIG. 2 (A), the gas blowing pipe 63 is arranged at one end portion in the cooling / heating tank 10a, and the gas blowing direction from each air supply hole of the gas blowing pipe 63 is the other end of the cooling / heating tank 10a. It is the direction toward the department. Here, the gas blowing pipe 63 is provided so as to reach the facing inner wall.

  A gas blowing pipe 63 serving as a gas introduction unit and an exhaust port 64 serving as a gas exhaust unit are provided, and temperature control gas is supplied to the specimen 65 to heat or cool the specimen 65. In addition, 2 mm or less is suitable for the thickness of the high heat conductive foil 62, and 0.05 mm or less is more suitable. Further, an aluminum foil may be used as the high thermal conductive foil 62, or a metal mainly composed of copper or aluminum may be used. Since copper foil has high thermal conductivity, it has the effect of improving soaking. In addition, since aluminum foil has high thermal conductivity and is difficult to oxidize, it has the advantage that it can be used at higher temperatures.

  In addition, as shown in FIG. 2B, in this cooling / heating tank 10a, the gas blowing pipe 63 is connected to the pipe in which the heater 4 is arranged, and the temperature measurement result in the cooling / heating tank 10a of the temperature sensor 11 is shown. Accordingly, the gas whose temperature is adjusted by the heater 4 whose output is adjusted by the heater control unit 13 is blown from a plurality of pores 63 a provided in the gas blowing pipe 63.

  In addition, the diameter of the pore 63a is preferably 3 mm or less, and more preferably 2 mm or less. Further, the inner diameter of the gas blowing pipe 63 is preferably at least twice the diameter of the pore 63a, more preferably at least four times. The larger the pipe inner diameter / pore diameter ratio, the more uniform the flow rate of the gas ejected from each pore, and the effect of soaking the inside of the tank.

  In this cooling / heating tank 10a, as shown in FIG. 2 (B), the gas blowing pipe 63 is arranged from one inner wall of the cooling / heating tank 10a toward the facing inner wall, and has a plurality of pores (air supply holes) for introducing gas. ) 63a are arranged side by side, and as shown in FIG. 2 (A), the gas blowing direction from each pore (air supply hole) 63a of the gas blowing pipe 63 is as shown in FIG. It is in a direction toward the other end in the cold water tank 10a. The gas blowing pipe 63 is provided so as to reach the inner wall facing the inner wall to which the heater 4 is connected.

  And the exhaust port 64 as a gas exhaust means has each inner wall of the cold-heating tank 10a extended along the gas ejection direction so that the angle between the gas ejection direction by the gas blowing pipe 63 and the gas ejection direction becomes 90 °. Are distributed.

  By disposing the gas blowing pipe 63 and the exhaust port 64 in this way, the gas ejected from the plurality of pores 63a in the gas blowing pipe 63 is not directly blocked by the specimen 65, but the inner wall of the cooling / heating tank 10a. Between the inner wall provided with the high thermal conductive foil 62 of the cooling / heating bath 10a and the test piece to circulate between the heating / cooling bath 10a. It is discharged from the exhaust port 64. Thus, by setting it as the structure which does not spray gas directly on the specimen 65, the increase in the temperature distribution which generate | occur | produces gas on the specimen 65 can be prevented by spraying gas directly on the specimen 65.

  Moreover, the height position of the gas blowing pipe 63 is the upper part in FIG. 2, and the gas is pushed out in a shower shape from each pore 63 of the gas blowing pipe 63 above the specimen 65 arranged in the center in the height direction. Then, the gas is inverted at the inner wall of the cold heat tank 10a, and the gas is allowed to flow in the opposite direction below the specimen 65 so as to be discharged from the exhaust port 64. The height position of the gas blowing pipe 63 may be the lower part in FIG.

  Thus, in the present embodiment, the flow of gas in the tank is controlled by the position and shape of the exhaust port 64. Therefore, the arrangement of exhaust ports is a very important technical feature. By adopting the position and shape of the exhaust port 64 described above, a remarkable effect is obtained that the gas is quickly and uniformly circulated in the tank and then quickly exhausted.

  Moreover, in this cooling / heating tank 10a, a high heat conductive foil 62 is provided on the inner wall made of the heat insulating material 61, and the entire inner wall is made uniform by the gas from each pore 63 of the gas blowing pipe 63 toward the inner wall of the cooling / heating tank 10a. It can be heated and cooled to any temperature. This is because the high heat conductive foil 62 automatically eliminates the temperature difference depending on the location of the inner wall. Moreover, since the heat insulating material 61 prevents heat from escaping from the high heat conductive foil 62 to the outside of the tank, the high heat conductive foil 62 can be quickly heated and cooled with a small amount of heat. It is done. Furthermore, as the temperature of the inner wall becomes uniform, the temperature of the gas flowing in the tank also becomes uniform. Thus, the specimen 65 can be heated and cooled so as to be wrapped with a gas flow having a uniform temperature, and the entire specimen 65 can be uniformly heated and cooled.

  Thus, in this cooling / heating tank 10a, the high heat conductive foil 62 such as copper foil is provided on the inner wall surface of the tank, the heat insulating material is arranged on the outside, and the gas whose temperature is adjusted by the heater 4 is attached to the tip of the heater 4. The gas is blown out in a shower from each pore 63 of the gas blowing pipe 63 into the tank, and after flowing the gas so as to wrap the specimen 65 with the gas shower, the gas is quickly discharged from the exhaust port 64 to the outside of the tank.

  In this way, by flowing the gas so as to wrap the specimen 65 in a gas shower at a uniform temperature, the heat of the gas is transmitted to the whole specimen 65 quickly and uniformly, and the whole specimen 65 is heated quickly and uniformly. Can be cooled. Further, since the gas whose temperature has changed due to heat exchange is quickly discharged from the exhaust port 64, heat exchange with the introduced gas that has just been temperature-controlled is always performed continuously, and heat transfer to the specimen 65 is performed. It can be done efficiently and quickly.

  Further, by installing the exhaust port 64 on the same side as the gas blowing pipe 63 in the tank as a slit shape or a shape of an assembly of a plurality of microholes, After the gas jetted from the hole 63 flows so as to reverse the inside of the tank and wrap the specimen 65, it can be quickly discharged from the exhaust port 64.

  The slit means an elongated gap, and if the slit width is too large, outside air enters and the heat uniformity in the tank cannot be maintained. Therefore, the width of the slit of the discharge port 64 is 3 mm or less. More preferably, the width of the slit of the discharge port 64 is desired to be 2 mm or less.

  Moreover, since the gas ejected from each pore 63 of the gas blowing pipe 63 flows while spreading radially, it collides with the tank wall and the specimen 65 and flows while exchanging heat. In particular, since a locally disturbed vortex flow is generated in the vicinity of the specimen 65 with unevenness, heat exchange is smoothly performed between the gas and the specimen 65.

  Further, in the vicinity of the inner wall surface of the tank, heat exchange occurs between the gas and the high thermal conductive foil 62 such as copper foil, but the temperature distribution of the entire tank is corrected and uniformed by the high thermal conductive foil 62. Heat exchange occurs on the inner wall surface of the tank so that the temperature distribution of the flowing gas is uniform.

  Moreover, since the heat capacity of the high heat conductive foil 62 is small and the heat radiation to the outside of the tank is blocked by the heat insulating material 61, the amount of heat necessary to equalize the temperature of the high heat conductive foil 62 is small and quickly. Soaking can be performed.

  Moreover, in this cooling / heating tank 10a, the exhaust port 64 is arrange | positioned equally in the whole outer peripheral part of a tank in order to discharge | emit the gas in a tank rapidly and uniformly. When the exhaust port 64 is arranged in a part of the outer peripheral portion of the tank, the gas flow toward the exhaust port 64 is strongly generated, and the gas flow is biased. The problem can be avoided.

  Moreover, when the area of the exhaust port 64 is too large, outside air is introduced from the exhaust port 64, and there is a possibility that the temperature uniformity of the gas temperature in the tank is hindered. For this reason, sufficient heat uniformity cannot be maintained at the exhaust port integrated into a normal one. In this cooling / heating tank 10a, the exhaust port 64 is a slit having a narrow width and is uniformly arranged on the entire outer peripheral part of the tank, and this problem is avoided.

  Note that the width of the slit is desirably set so as to prevent intrusion of outside air by discharging gas from the exhaust port 64 at an appropriate pressure. In addition, the slit has an advantage that it can easily prevent intrusion of outside air by adjusting its width and arrangement. However, as another configuration for preventing the intrusion of outside air, a large number of fine holes can be dispersed to form exhaust holes.

<Second Embodiment>
Next, the cooling / heating tank 10b shown in FIG. 3 will be described. In FIG. 3, FIG. 3 (A) shows a configuration viewed from the upper surface side of the cooling / heating bath 10b, and FIG. 3 (B) shows an internal configuration from the side surface of the cooling / heating bath 10b.

  As shown in FIG. 3 (A) and FIG. 3 (B), each surface (up and down, left and right) including the upper surface of the cooling / heating tank 10b extending along the gas ejection direction (same as the air supply direction) has a slit shape. Exhaust slits 64a similar to the cold heat tank 10a in FIG.

  Further, as shown in FIG. 3 (B), the main cooling / heating tank 10b is provided on the inner wall existing ahead of the gas blowing direction by the gas blowing pipe 63 similar to the cooling / heating tank 10a in FIG. The high heat conductive foil 62 is provided, and a temperature control gas is supplied to the specimen 65a to heat or cool the specimen 65a.

  Since the gas directly hits the wall surface facing the gas introduction direction and the temperature difference is most likely to occur, it is desirable to install the high heat conductive foil 62 at least on the inner wall of this surface. Thereby, the thermal uniformity in a tank can be improved efficiently with the minimum necessary configuration.

  In the cooling bath 10b in FIG. 3, the exhaust slits 64a are equally distributed on each surface (up and down, left and right) extending along the gas ejection direction (air supply direction). With such a configuration, in the same manner as the cooling bath 10a in FIG. 2, the gas blown without being directly blown from the gas blowing pipe 63 to the specimen 65a is circulated so as to make a round of the inside of the bath along the inner wall of the bath. The gas can be supplied so as to enclose the specimen 65a.

<Third Embodiment>
Next, the cooling / heating tank 10c shown in FIG. 4 will be described. In FIG. 4, an exhaust slit 64b similar to the exhaust slit constituting the exhaust port in the cooling bath 10a of FIG. It is configured to be evenly distributed so as to surround the gas blowing pipe 63 as viewed. As a result, the gas discharge direction from the exhaust slit 64b is 180 degrees with the gas injection direction from the gas blowing pipe 63.

  With such a configuration, in the same manner as the cooling baths 10a and 10b in FIG. 2 and FIG. 3, the gas injection pipe 63 (air supply pipe) is ejected without directly spraying the specimen 65a from the air supply holes (pores). The temperature-controlled gas thus made can be circulated between the inner wall of the tank and the specimen 65a so as to make a round of the inside of the tank, and the gas can be supplied so as to enclose the specimen 65a.

<Fourth embodiment>
Next, the cooling / heating tank 10d shown in FIG. 5 will be described. In FIG. 5, FIG. 5 (A) shows a configuration viewed from the upper surface side of the cooling / heating bath 10d, and FIG. 5 (B) shows an internal configuration from the side surface of the cooling / heating bath 10d.

  In FIG. 5, a gas blowing pipe 63b having a plurality of air supply ports (pores) arranged in one direction on both sides so as to eject gas toward each of the opposing inner walls is provided at the lower part in the tank. An exhaust slit 64c that is provided in the central portion of the gas ejection direction and that is the same as the exhaust slit constituting the exhaust port in the cooling / heating tank 10a of FIG. 2 is aligned with the position where the gas injection pipe 63b is provided. It is configured to be evenly distributed on each wall surface extending along the gas ejection direction so as to surround 63b.

  With such an arrangement, the gas discharge direction from the exhaust slit 64c is 90 degrees with the gas injection direction from the gas blowing pipe 63b. In addition, high heat conductive foils 62 similar to the cold heat tank 10a of FIG. 2 are provided on each of the inner walls of the tank facing the gas injection direction from the pores on both sides of the gas blowing pipe 63b.

  With such a configuration, in the same manner as the cooling baths 10a, 10b, and 10c in FIGS. 2 to 4, the gas ejected (supplyed) from the respective pores on both sides of the gas blowing pipe 63b is directly applied to the specimen 65a. The gas can be supplied so as to wrap around the specimen 65a by circulating between the inner wall of the tank and the specimen 65a so as not to blow around the tank.

  The vertical position of the pipe 63b in the cooling / heating tank 10d is preferably in the vicinity of the middle between the specimen 65a and the lower inner wall. If the pipe 63b is arranged at a position close to the inner wall, a large amount of gas flows near the inner wall, so that the gas near the specimen 65a is reduced, and rapid heating / cooling cannot be performed. When the specimen 65a has irregularities, the pipe 63b is arranged so that the center of the gas flow is located near the most traveled part, so that the specimen 65a can be heated and cooled more quickly. It is done.

  It is also possible to provide the gas blowing pipe 63b not at the lower part in the tank but at the central part in the gas ejection direction at the upper part. However, by adopting a configuration in which the gas blowing pipe 63b is provided in the lower part of the tank, for example, the effect that the specimen 65a can be easily replaced from the upper part by removing the upper cover of the tank is obtained.

  As described above, the gas introduction means introduces the gas for heating or cooling the specimen accommodated in the tank so as to flow between the inner wall of the cold-heating tank and the specimen, and discharges the introduced gas. The gas exhaust means surrounds the gas introduction means when viewed from the direction of gas introduction by the gas introduction means at an exhaust port whose angle between the gas introduction direction by the gas introduction means and the gas discharge direction is 90 ° to 180 °. In this way, by introducing a configuration that is distributed on the inner wall of the tank, the introduced gas flows between the inner wall of the cold heat tank and the specimen and is discharged from the exhaust port, so that the gas circulates in the tank. As a result, it flows so as to wrap the whole specimen, and the whole specimen arranged in the tank can be heated and cooled uniformly.

  On the other hand, as shown in each of FIGS. 6A to 6F, when the exhaust port is arranged at an inappropriate position with respect to the arrangement position of the gas blowing pipe, that is, the gas by the exhaust port. The discharge direction of the gas is 90 ° to 180 ° with respect to the gas introduction direction by the gas blowing pipe, and the gas blowing pipe is seen from the gas introduction direction by the gas blowing pipe. In the case where the gas is not distributed so as to surround, the gas introduced from the gas blowing pipe cannot be circulated in the tank so as to wrap the specimen.

  For example, in FIGS. 6A and 6B, the gas discharge direction from the exhaust port is 0 ° with respect to the gas introduction direction from the gas blowing pipe. Therefore, the gas introduced from the gas blowing pipe is discharged from the exhaust port without circulating in the tank so as to wrap the specimen. As a result, the specimen and the inside of the tank cannot be heated and cooled uniformly.

  6 (c) and 6 (d), the exhaust port is provided only at one location, and the gas introduced from the gas blowing pipe flows toward the exhaust port at one location. There is a bias in the flow. Therefore, there is a portion where gas does not flow in the tank, and it does not flow so as to wrap the entire specimen. For example, in the configuration shown in FIG. 6 (c), the gas introduced from the pipe does not flow to the left side of the specimen, and in the configuration shown in FIG. 6 (d), the gas introduced from the pipe is It does not flow to the front side and the back side of the specimen in the drawing, and is discharged from the exhaust port without circulating in the tank so as to wrap the whole specimen. As a result, the specimen and the inside of the tank cannot be heated and cooled uniformly.

  Moreover, in FIG.6 (e) and FIG.6 (f), the exhaust port is not arrange | positioned so that it may surround a gas blowing pipe seeing from the gas introduction direction from a gas blowing pipe. Therefore, the gas introduced from the gas blowing pipe is immediately discharged from the exhaust port without circulating in the tank so as to wrap the specimen, and as a result, the specimen and the tank are heated and cooled uniformly. I can't.

  FIG. 7 shows a configuration in which the test substrate is placed in the cooling bath 10a in FIG. 2, and the temperature is increased in a cycle of 12 minutes by introducing temperature-controlled air from each pore of the gas blowing pipe 63b. The state and cold state could be repeated.

  Each of the cooling / heating tanks 10a to 10d of the first to fourth embodiments described above can be used in a cooling / heating test apparatus. In the cooling / heating test apparatus using the cooling / heating tank according to the present invention, heating is performed quickly and uniformly in the cooling / heating tanks 10a to 10d in which printed boards, electronic components, thermal fatigue test pieces and the like are accommodated as specimens (test bodies). Or it can cool and test | inspect the performance of a test body rapidly and with high precision, or can test | inspect the durability performance of the test body in a thermal cycle rapidly and with high precision.

  Moreover, each tank shown as the cooling-heat tank 10a-10d of the above-mentioned 1st-4th embodiment can be used for the reflow apparatus of a printed circuit board. The reflow apparatus uses a tank having the same configuration as the cold heat tanks 10a to 10d, and heats the printed circuit board accommodated in the tank to perform soldering. In such a reflow apparatus using a cooling / heating tank according to the present invention, the temperature can be uniformly and rapidly controlled, so that the reliability of soldering can be improved and the productivity can be improved.

  Next, the details of the cooling / heating device 100 including the cooling / heating tank having such a characteristic configuration will be described with reference to FIG. 1A.

1A includes a pipe 1 ₀ , 2 ₀ , 3 ₀ , a heater 4 as a heating means according to the present invention, open / close valves 6 and 7 (hereinafter referred to as a first open / close valve 6 and a second open / close valve 7). And a dryer 8, a refrigerator 9, a temperature sensor 11, and a temperature controller 12. The temperature control gas is supplied to the cooling / heating tank 10 according to the present invention and is placed in the cooling / heating tank 10. A cold load test is performed on the specimen.

  The dryer 8 is for removing moisture from the compressed gas, and the refrigerator 9 is for cooling the compressed gas from which moisture has been removed.

Referred to in the pipe _{1 0,} Japanese Industrial Standards (JISZ8703) at 20 ℃ ± 15 ℃ (5-35 ℃ ) specially heated defined as a range of not also be cooled cold considerable compressed gas (hereinafter, also the first gas ) was first gas flow path 1 is formed to flow, the pipe 2 _0, water by drier 8 is removed is cooled by the refrigerator 9, the second gas flow path from the first gas flow and the second gas cold 2 is formed, the pipe 3 _0, the first gas channel 1 and the third gas flow path 3 and the second gas flow path 2 has joined is formed.

First on-off valve 6 is provided in the pipe 1 _0, opened and closed by, the first gas from the first gas flow path 1 formed in the pipe 1 ₀ to the third gas flow path 3 is formed by a pipe 3 ₀ controls the flow, second on-off valve 7, the pipe 2 ₀ provided by opening and closing, the pipe 2 ₀ second from the gas flow path 2 formed in the third gas flow path 3 formed by a pipe 3 ₀ This is for controlling the flow of the second gas.

  The temperature controller 12 is configured by a program temperature controller or the like, and controls the output (heat generation amount) of the heater 4 according to the temperature measurement result by the temperature sensor 11 and the target program temperature as a function for executing the programmed processing. A heater control unit 13 and a valve control unit 14 that controls opening and closing of the first and second on-off valves 6 and 7 according to a target temperature waveform are provided. The temperature sensor 11 measures the temperature of the specimen itself (not shown) installed in the cooling / heating tank 10 or the ambient temperature in the cooling / heating tank 10. The temperature sensor 11 is heated by the heater 4 by the temperature sensor and is supplied with the third gas. A configuration in which the temperature of the gas flowing in the flow path 3 is measured is also possible.

  In addition, the cooling / heating tank 10 can quickly and uniformly control the temperature in the tank, and the difference between the specimen and the temperature in the tank is extremely small. Therefore, the temperature of the atmosphere is detected by the temperature sensor in the tank and the heater output is controlled. Only the temperature of the specimen can be controlled.

The heater 4 is provided in the piping 3 in ₀ to form a third gas flow path 3, under the control of the heater control unit 13, the first, which is flowed from the first gas flow channel 1 or the second gas passage 2 The gas or the second gas is heated instantaneously.

  The heater control unit 13 heats the gas with the heater 4 so that the atmosphere temperature in the tank becomes a target temperature when the inside of the cooling / heating tank 10 is heated, and the atmosphere temperature in the tank becomes the target when the inside of the cooling / heating tank 10 is cooled. The heater 4 is controlled so that the gas is auxiliary heated so that the temperature becomes low.

  The valve control unit 14 includes the first opening / closing valve 6 and the second valve 6 when the inside of the cooling bath 10 is heated by the first gas heated by the heater 4 or when the inside of the cooling bath 10 is cooled by the second gas supplementarily heated by the heater 4. Control is performed so that at least one of the on-off valves 7 is opened. The valve to be opened is selected based on a target temperature during heating or cooling (hereinafter referred to as target temperature) and a cooling rate.

  That is, in the present cooling / heating device 100, by selecting the opening / closing of the first and second opening / closing valves 6, 7, an optimum gas path corresponding to the target cooling speed and temperature range is set to a simple contact using a program temperature controller or the like. Can be selected by switching operation. Further, since there is one heater 4 for one series of control, and all the gases can be temperature-controlled only by this heater 4, temperature control is possible only by controlling the output of one heater 4. . However, since the cooling rate and temperature range that can be controlled at that time depend on the type of the supply gas, the first and second modes can be used for optimal control in accordance with combinations of various temperature ranges and cooling rates. The supply gas must be selected by opening / closing the opening / closing valves 6 and 7. Therefore, it is possible to perform optimum temperature control under various cooling conditions by combining gas selection by selecting opening / closing of the first and second opening / closing valves 6 and 7 and output control of one heater 4. It becomes.

  As described above, in the present cooling / heating device 100, a wide range can be achieved with only a simple configuration of the combination of opening / closing selection of the first and second opening / closing valves 6 and 7 and control of the heater 4 according to the target cooling speed and temperature range. A remarkable effect that cannot be predicted from the combination of the prior arts that the cooling condition can be realized is obtained.

  Specifically, in the present cooling / heating device 100, the first gas at room temperature is heated by the heater 4 to quickly generate a high-temperature gas of, for example, 600 ° C., and is cooled by the refrigerator 9 to, for example, −80 ° C. By heating two gases with the heater 4, a low temperature gas (cold temperature gas) of minus 50 ° C. can be generated quickly.

  Then, for example, when the temperature is gradually increased (temperature rise) in a low temperature range, the second on-off valve 7 is opened and the first on-off valve 6 is closed. In addition, when the temperature is gradually raised from a low temperature range to around room temperature, the second opening / closing valve 7 is opened, and the first opening / closing valve 6 is closed or opened. When the temperature is raised gradually in the high temperature range, or when the temperature is gradually lowered (decrease in temperature) from the high temperature range to near room temperature, the first opening / closing valve 6 is opened and the second opening / closing valve 7 is closed or opened.

  Further, when the temperature is rapidly increased from the low temperature range to the high temperature range, or when the temperature is kept constant in the high temperature range, the first on-off valve 6 is opened and the second on-off valve 7 is closed. When the temperature is lowered quickly from the high temperature range to the low temperature range, when the temperature is gradually lowered in the low temperature range, or when the temperature is kept constant in the low temperature range, the first on-off valve 6 is closed and the second on-off valve 7 is open. Further, in the temperature control process before the temperature is quickly lowered, the second opening / closing valve 7 is opened, and the first opening / closing valve 6 is closed or opened.

  As described above, although the present cooling / heating device 100 is a simple control in which the temperature is controlled only by adjusting the output of one heater 4 for one set of control systems, the first and second open / close bubbles 6 and 6 are controlled. According to the combination of 7 open / close selection, it is predicted from the prior art that optimum temperature control with high efficiency, high accuracy and high response can be realized according to the combination of various temperature ranges and temperature control speeds described above. An extremely high performance effect that cannot be obtained.

  Such a high-performance effect is created for the first time by the combination of the opening selection control of the two types of gas systems including the first and second opening / closing valves 6 and 7 and the output adjustment of one heater 4. It is an effect that has an important significance that cannot be predicted from the combination of conventional techniques. Further, since the first and second opening / closing valves 6 and 7 are simple opening / closing mechanisms, the first and second opening / closing valves 6 and 7 can be stably operated in a wide temperature range from a very low temperature of liquid nitrogen temperature to room temperature. Thereby, for example, an effect having an important meaning that it can be used stably for a long period of time as a cooling apparatus for a thermal fatigue test that needs to be stably repeated for a long period of time and to repeat the cooling and heating cycle is obtained. In the technology using a conventional shunt or the like, there is a problem that the shunt plate freezes at an extremely low temperature and the operation becomes unstable, and there is a restriction that the lower limit temperature of use cannot be made too low. On the other hand, in the cooling / heating apparatus of the present embodiment, an epoch-making effect that cannot be predicted from the prior art is obtained that the optimum control is possible under the cooling / heating conditions with a simple configuration.

  In this cooling / heating device 100, the first gas or the second gas heated by the heater 4 and supplied to the cooling / heating tank 10 in this way is discharged outside the tank by the exhaust means provided in the cooling / heating tank 10. It is configured.

  Thus, in the cooling / heating device 100, the third gas flow after the first gas flow path 1 in which the first gas at normal temperature flows and the second gas flow path 2 in which the second gas lower in temperature than the first gas flows merges. Gas supplied to the cooling bath 10 placed at a short distance from the heater 4 by adjusting the output of the heater 4 provided in the passage 3 and controlling the opening and closing of the first and second open / close bubbles 6 and 7 by the valve control unit 14. The temperature is adjusted.

  This eliminates the need for equipment that constantly generates and circulates high-temperature gas in the first gas flow path 1 and equipment that constantly circulates low-temperature gas and preliminarily adjusts the temperature in the second gas flow path 2. With simple control only by adjusting the output of the heater at a short distance to the cooling / heating tank 10 and valve opening / closing control, the temperature control for the cooling / heating tank 10 can be performed quickly and efficiently.

  In this cooling / heating device 100, the gas supply pressure of the compressed gas to the dryer 8 and the refrigerator 9 is set to 0.1 MPa or more, the pressure dew point of the gas supplied to the refrigerator 9 is set to −60 ° C. or less, and It is assumed that the second gas path 2 through which the low-temperature gas flows is free from condensation and freezing, has no contact with the outside air, and has a sufficient heat insulation. By satisfying this condition, it is possible to continuously generate and supply a low temperature gas.

  In addition, when it is necessary to cool the inside of the cooling / heating tank 10 quickly, the second opening / closing valve 7 is opened earlier by a predetermined time before the cooling process for the cooling / heating tank 10 is started. It is desirable to heat the second gas and control it to the target temperature. As described above, the valve controller 14 controls the opening of the second opening / closing valve 7 to flow the second gas into the third gas flow path 3 before starting the cooling of the cooling bath 10, thereby 2 The on-off valve 7 and the second gas flow path 2 can be preliminarily cooled, and the cooling rate at the time of the cooling process by the second gas with respect to the cold heat tank 10 can be increased.

  Each of the first and second open / close bubbles 6 and 7 includes a plurality of open / close bubbles having different flow rates, and the valve control unit 14 sets the target cooling temperature and target temperature of the cooling bath 10. Accordingly, the opening / closing bubble of each of the first opening / closing valve 6 and the second opening / closing valve may be controlled to be selected. Although it is difficult to control the gas flow rate with high accuracy at high and low temperatures, such a configuration and control makes it possible to control the flow rate only by opening and closing the valve.

  Thus, at the time of temperature control of the cooling bath 10, by selecting the opening / closing of a plurality of opening / closing bubbles of the first opening / closing valve and the second opening / closing valve according to the target cooling rate and the target temperature, it is possible to achieve higher accuracy. The gas temperature control can be performed efficiently.

  In the cooling / heating apparatus according to the present embodiment, the temperature control of each of the heating gas and the cooling gas is instantaneously performed by only one heater 4 installed in the third gas path. It is desirable to select a high-efficiency heater in order to perform the above with high accuracy and high response. The heater used in the prior art generally has a heat generating part arranged in a heating chamber or a thick pipe, and heating to a target temperature is generally realized by circulating gas through the heater part. It is. When such a general heater is used, the gas is not heated sequentially and uniformly, and the heating is insufficient and non-uniform gas is supplied to the specimen. It is not desirable if done.

  Therefore, in the cooling / heating apparatus of the present embodiment, it is desirable to use a heater with high heat conversion efficiency that can uniformly heat a gas to a target temperature instantaneously. For example, in the cooling / heating apparatus of the present embodiment, the heat conversion efficiency of the heater 4 is desirably at least 50% or more, and more desirably 80% or more. As a result, the output adjustment of the heater 4 is instantly reflected in the amount of heat generated by the heater, so that highly accurate and highly responsive temperature control is possible.

  Note that, as described above, in the cooling / heating tank 10 of the present embodiment, gas introduction means for introducing (supplying) the temperature-controlled gas heated by the heater 4 and adjusted in temperature into the cooling / heating tank 10; Gas exhaust means for discharging the temperature control gas introduced into the cold heat tank 10 is provided, and the cold heat tank 10 has a closed structure. Moreover, it is desirable that the cooling / heating tank 10 is formed of a heat insulating container and has a high heat conductive foil provided on the inner wall.

  In addition, as shown in FIG. 1B as “A-A cross-sectional view”, in the cooling / heating tank 10, the gas introduction means includes: an inner wall of the cooling / heating tank 10 and a specimen placed in the cooling / heating tank 10. Gas is introduced so as to flow between the gas exhaust means, and the gas exhaust means includes an exhaust port having an angle of 90 ° between the gas introduction direction and the gas discharge direction by the gas introduction means. As seen from the direction of gas introduction by the means, the gas introduction means is surrounded by the inner wall of the cold heat tank 10 so as to surround the gas introduction means.

  Further, the gas introduction means includes a pipe arranged from one inner wall of the cooling / heating tank 10 toward the inner wall facing the same, and a plurality of air supply holes through which the gas flows are arranged side by side. Further, the pipe is disposed at one end portion in the cooling / heating tank 10, and the gas blowing direction from each air supply hole of the pipe is directed to the other end portion of the cooling / heating tank 10. Here, the pipe is provided so as to reach the facing inner wall.

  Further, here, as shown in FIG. 1B, the gas exhaust means is such that the exhaust port at which the angle between the gas ejection direction by the gas introduction means and the gas discharge direction is 90 ° is the gas introduction means in the cold storage tank 10. Are distributed on the same end side.

  By arranging the gas exhaust means and the gas introduction means in this way, the gas ejected from the plurality of air supply holes in the pipe of the gas introduction means is not directly blocked by the specimen, and the inner wall of the cold-heating tank 10 and the specimen Circulates between the two and the exhaust gas, and is exhausted from the exhaust port of the gas exhaust means through the entire cooling bath 10.

  For example, the gas is introduced into a shower-like shape from each of the air supply holes of the pipe above the specimen placed in the center in the height direction, with the height position of the pipe of the gas introduction means at the top, and is inverted on the inner surface of the cold water tank 10 By letting the gas flow in the opposite direction below the specimen and discharging it from the exhaust port, the gas can be flowed so as to wrap the specimen by a gas shower, and the entire specimen can be uniformly and quickly Can be heated and cooled.

  As described above with reference to the respective drawings, the cooling / heating tank of the present embodiment includes a gas introduction means for introducing a gas for heating or cooling the specimen accommodated in the tank, and discharging the introduced gas. A gas exhaust means for causing the gas to be introduced so that the introduced gas flows between the inner wall of the cold-heating tank and the specimen, and the gas exhaust means is a gas introduction means. The gas inlet means and the gas outlet direction are provided with distributed exhaust ports whose angles are 90 ° to 180 °, and the exhaust ports are viewed from the gas introducing direction by the gas introducing means. It is set as the structure arrange | positioned on the inner wall of a cold-heat tank so that it may surround.

  By adopting such a configuration, the gas introduced into the tank by the gas introduction means and flowing between, for example, the upper inner wall of the cooling bath and the specimen is reversed on the inner wall of the cooling tank, Since the gas flows between the lower inner wall and the specimen and is discharged from the exhaust port, the gas circulates in the tank and flows so as to wrap the whole specimen.

  In this way, the gas circulates in the tank and flows so as to wrap the whole specimen, and the whole specimen arranged in the tank can be heated and cooled uniformly, thereby, the apparatus configuration It is possible to perform uniform heating and cooling of the specimen with a simple configuration.

  Further, in the cooling / heating apparatus provided with such a cooling / heating tank, a first gas passage through which a first gas at room temperature flows, a second gas passage through which a second gas lower in temperature than the first gas flows, and a first gas flow A first gas channel that joins the channel and the second gas channel, and a first opening and closing that is provided in the first gas channel and controls the flow of the first gas from the first gas channel to the third gas channel A valve, a second on-off valve provided in the second gas flow path for controlling the flow of the second gas from the second gas flow path to the third gas flow path, and a third gas flow path provided in the third gas flow path. A heater for heating the first gas or the second gas flowing in the flow path, and a valve control means for opening at least one of the first on-off valve and the second on-off valve when controlling the temperature of the sample. The first opening and closing depending on the combination of temperature and speed set when heating or cooling the specimen Opened by selecting either or both of the lube and second on-off valve. The gas introduction means is connected to the third gas flow path and introduces the first gas and the second gas heated by the heater into the cold heat tank. The gas discharge means is a gas heated by the heater and supplied to the specimen. Is configured to be discharged into and out of the cold storage tank.

  With such a configuration, in the cooling apparatus of the present embodiment, an optimal gas path can be selected according to the target temperature range and the cooling speed by selecting whether the first and second opening / closing valves are opened or closed. The temperature of the gas supplied to the specimen only by adjusting the output of one heater provided at a short distance in the third gas passage after the first and second gas passages merge. Since the adjustment can be performed instantaneously, the facility for constantly generating and circulating the high temperature gas in the first gas flow path and the facility for always circulating the low temperature gas in the second gas flow path become unnecessary. By combining the selection of supply gas by the opening / closing selection of the second opening / closing valve and the output control of one heater, it is possible to perform optimum temperature control under various temperature control conditions.

  That is, in the cooling / heating apparatus of the present embodiment, for example, a valve opening / closing selection control according to a target temperature control speed (heating speed, cooling speed) and a temperature range, and one heater at a short distance to the specimen. From the simple combination of the conventional technology, it is possible to quickly and efficiently perform optimum heating and cooling of the specimen under a wide range of temperature control conditions only with a simple configuration in combination with the output control of A remarkable effect that cannot be predicted at all can be obtained.

  In this way, it is possible to quickly generate a gas that has been temperature-controlled with high accuracy to any temperature from low temperature to high temperature. In addition, the generated gas is introduced into the cold storage tank through a plurality of air supply holes like a shower. By circulating, the entire specimen can be wrapped and quickly discharged. As a result, the heat of the gas introduced into the cold storage tank can be quickly and uniformly transmitted to the entire specimen, and the specimen is extremely quickly and uniformly compared to the conventional apparatus despite the simple equipment configuration. Can be heated and cooled, and the temperature of the specimen can be controlled at high speed and with high accuracy.

  In particular, a temperature control gas (high temperature gas, low temperature gas) is introduced into a cooling bath with a high thermal conductive foil on the inner wall of the heat insulating container, and after heat exchange is performed so that the specimen is wrapped in a shower-like gas flow, it is quickly exhausted. By discharging the gas after heat exchange from the mouth, the entire specimen can be heated or cooled uniformly and rapidly.

  In addition, although the cross-sectional shape in the tank of the cooling / heating apparatus of this Embodiment is comprised by the rectangle, you may comprise an ellipse or a circle.

1 first gas path _{1 0, 2 0, 3 0} the pipe 2 second gas path 3 third gas path 4 heater 6 first on-off valve 7 second off valve 8 dryer 9 refrigerator 10,10a~10d cold bath 11 temperature Sensor 12 Temperature controller 13 Heater control unit 14 Valve control unit 61 Heat insulating material 62 High thermal conductive foil 63, 63b Gas blowing pipe 63a Fine hole 64 Exhaust port 64a, 64b, 64c Exhaust slit 65, 65a Specimen 100 Cooling device

Claims (2)

A closed structure comprising gas introduction means for introducing a gas whose temperature is adjusted outside the tank in order to heat or cool an object accommodated in the tank, and gas exhaust means for discharging the introduced gas. A cold storage tank,
The gas introducing means includes a pipe penetrating through one place of the wall body and linearly disposed along the vicinity of the inner wall in the tank, and the gas is showered in a line and in one direction on the peripheral surface of the pipe. A plurality of fine holes to be ejected in a line are provided side by side, and the introduced gas is not obstructed by the object to be treated, and between the inner wall of the cold bath and the object to be treated. The gas is introduced so that it is wrapped and flows,
The gas exhaust means includes exhaust ports arranged in a dispersed manner so that an angle between a gas introduction direction and a gas discharge direction by the gas introduction means is 90 ° to 180 °,
The exhaust port is arranged on each inner wall of the cooling bath located along the gas introduction direction, or on the inner wall opposite to the gas introduction direction so as to surround the gas introduction means,
Cold bath. A cooling / heating tank according to claim 1;
  A first gas flow path through which a normal temperature first gas flows;
  A second gas flow path through which a second gas having a temperature lower than that of the first gas flows;
  A third gas flow path where the first gas flow path and the second gas flow path merge;
  A first on-off valve that is provided in the first gas flow path and controls the flow of the first gas from the first gas flow path to the third gas flow path;
  A second on-off valve provided in the second gas flow path for controlling the flow of the second gas from the second gas flow path to the third gas flow path;
  A heating means provided in the third gas flow path for heating the gas flowing through the third gas flow path;
  Valve control means for opening at least one of the first on-off valve and the second on-off valve during temperature control of the workpiece;
  A refrigeration apparatus comprising:
  The gas introduction means of the cold heat tank is connected to the third gas flow path, and introduces the first gas and the second gas heated by the heating means,
  Refrigeration equipment.