JP6178574B2 - Tape peeling device - Google Patents

Description

  The present invention relates to a tape peeling apparatus that peels off a divided device attached to a protective tape from the protective tape and stores it in a predetermined place.

  Various electronic devices such as mobile phones and personal computers are required to be lighter and smaller, and a semiconductor device package mounted on the electronic device can be reduced in size called a chip size package (CSP). Has been developed.

  As one of the CSP technologies, a package technology called QFN (Quad Flat Non-lead Package) has been put into practical use, and a package substrate formed by this technology is cut along a planned dividing line to individually package the packages. The package device is divided into CSPs. When the package substrate is divided, the package substrate is held and transported, cutting is performed in a state of being fixed to a jig, and individual package devices formed by dividing the package substrate are accommodated in a tray. The apparatus which has is developed (for example, refer patent document 1).

  However, since the package device size is required to be reduced to 3 mm square or less, as described in Patent Document 1, when cutting is performed with the package substrate directly fixed to a jig, cutting is performed. Since the subsequent individual package device is small, it is difficult to suck and hold the package device, and the package device may be scattered or moved during processing, resulting in a product defect. Therefore, it is necessary to divide into package devices by attaching a protective tape to the back side of the rectangular substrate and cutting the cutting blade from the surface of the package substrate to the protective tape. Therefore, an apparatus has been proposed that can perform cutting with the protective tape attached to the back surface of the rectangular substrate and efficiently pick up the device from the protective tape after the rectangular substrate is divided into package devices ( For example, see Patent Document 2).

JP 2001-23936 A JP 2006-156777 A

  However, there is a problem that it takes too much time if the devices are accommodated one by one in the tray due to the miniaturization of the device size. Further, since the package device is relatively difficult to break as compared with the semiconductor chip, it is considered unnecessary to pick up and store the package devices one by one.

  The present invention has been considered in view of the above problems, and the object thereof is to peel a plurality of devices formed by cutting a rectangular substrate having a protective tape attached to the back surface with a cutting blade from the protective tape. This is to efficiently accommodate the device in a predetermined place.

According to the present invention, a protective tape is attached to the back surface of a rectangular substrate formed by dividing a plurality of devices surrounded by outer peripheral end members and formed by dividing lines formed vertically and horizontally, and previously cut along the dividing lines by a cutting blade. In this state, the device is separated into individual devices and the outer peripheral end material in the longitudinal direction is removed. A cassette stage on which a cassette containing a plurality of protective tapes is placed, a carry-out means for carrying out a protective tape having a plurality of devices attached thereto from the cassette, and a method for peeling the plurality of devices from the carried-out protective tape , The peeling stage on which the protective tape with multiple devices attached is placed and the multiple devices peeled from the protective tape in bulk A bulk accommodating means for volume, is disposed above the bulk containment means, and dropped into a table in which a plurality of devices are placed, which is dropped in bulk housing means, a plurality of devices placed on the peeling stage is adhered A device transfer unit that drops multiple devices from the peeling stage and transfers them to the table while peeling the protective tape from the protective tape, and a device drop unit that drops multiple devices transferred to the drop table to the bulk storage means The dropping unit follows the transfer of the plurality of devices while holding the plurality of devices from above when the plurality of devices are dropped from the peeling stage by the device transfer unit and transferred onto the table. Multiple devices that have moved and transferred Be dropped into the bulk accommodating means from, characterized.

  The dropping table is configured to be movable between a separation position separated from the peeling stage by a predetermined distance and an adjacent position adjacent to the peeling stage, and the bulk storage means is disposed below the separation position of the dropping table, and is transferred to the device. The means includes a gripping part that grips the outer peripheral end material in the short direction of the rectangular substrate placed on the peeling stage together with the protective tape, and lowers the gripping part below the peeling stage to gradually remove the protective tape from the back surface of the rectangular substrate. The plurality of devices are transferred from the peeling stage to the dropping table with the dropping table positioned at the adjacent position.

  The rectangular substrate is divided into a plurality of devices by an intermediate end material. Below the peeling stage, the intermediate end material of the rectangular substrate that has dropped from a predetermined interval when the dropping table is positioned at the separation position and the protection A storage box for storing the tape is provided, and the intermediate end material is peeled off from the protective tape when the protective tape is sent below the peeling stage by the device transfer means with the dropping table positioned at the separation position. Drop into the containment box.

  The dropping table is provided with an opening for dropping a plurality of devices, and the bulk accommodating means includes a device dropping member having an inclined surface formed downward from the opening, and an inclined surface of the device dropping member dropped from the opening. A device storage box for storing a plurality of devices that have slipped and dropped, an imaging means for imaging the entire inclined surface of the device dropping member, and whether the device is attached to the inclined surface by image information of the inclined surface acquired by the imaging means It is comprised from the judgment part which judges whether or not, and the alerting | reporting part which alert | reports when a judgment part judges that the device has adhered to the inclined surface.

  In the tape peeling apparatus according to the present invention, when a plurality of devices are dropped from the peeling stage by the device transfer means and transferred onto the table, the device dropping means transfers the plurality of devices while pressing the plurality of devices from above. It is possible to move a plurality of transferred devices from the drop table to the bulk storage means, so that multiple devices can be securely transferred to the drop table while keeping the device orientation constant. Can be efficiently dropped into the bulk storage means.

It is a perspective view which shows an example of a structure of a tape peeling apparatus. It is a perspective view which shows an example of a to-be-separated unit. It is a perspective view which shows the state by which the rectangular substrate before division | attachment was affixed on the protective tape. It is sectional drawing which shows schematically an example of a structure of a tape peeling apparatus. It is a top view which shows typically the motion of the to-be-peeled unit in a tape peeling apparatus. It is sectional drawing which shows schematically the state by which the to-be-separated unit was hold | maintained at the peeling stage. It is sectional drawing which shows schematically the state which drops a device from a peeling stage and transfers to a table. It is sectional drawing which shows schematically the state by which the several device which comprises one device formation part was transferred to the dropping table. It is sectional drawing which shows schematically the state which the device transferred by the dropping table contact | abuts against butting and falls from an opening. It is sectional drawing which shows schematically the state in which a device is accommodated in a bulk accommodation means through a device dropping member. It is sectional drawing which shows schematically the state which images the inclined surface of a device dropping member. It is sectional drawing which shows schematically the state by which all the devices were accommodated in the bulk accommodation means.

  The tape peeling apparatus 1 shown in FIG. 1 peels off each device D constituting the divided rectangular substrate 100 from a protective tape T attached to the back surface 100b of the divided rectangular substrate 100 shown in FIG. It is a device for bulk storage at a place. Note that bulk accommodation means that a plurality of devices are accommodated together.

  As shown in FIG. 3, in the pre-divided rectangular substrate 200, the device forming portion 201 is surrounded by an outer peripheral end member 202a in the longitudinal direction and an outer peripheral end member 202b in the shorter direction. In the device forming unit 201, a plurality of devices D are formed by being partitioned by the planned division lines L formed vertically and horizontally. The plurality of devices D are sealed with a mold resin 203. In addition, since the rectangular substrate 200 includes a plurality of (three in the illustrated example) device forming units 201, an intermediate end member 202 c exists between the adjacent device forming units 201. It is divided into the device formation part 201 for every several device by the end material 202c.

  The cutting blade is cut into the protective tape T along the planned division line L of the rectangular substrate 200 shown in FIG. 3 and cut into individual devices D, and the outer peripheral end material 202a in the longitudinal direction and When the protective tape attached to the lower part is removed by cutting, as shown in FIG. 2, the divided rectangular substrate 100 and the protective tape T attached to the back surface 100b of the divided rectangular substrate 100 are formed. The unit to be peeled 300 is formed. In the rectangular substrate 100 after the division, the shape of the device forming portion 201 is maintained after the division because the individual devices D formed by the division are attached to the surface (adhesive surface) of the protective tape T. . As the protective tape T, a type that is cured by UV irradiation is used.

  As shown in FIG. 1, the tape peeling apparatus 1 includes a cassette stage 2 on which a cassette 2a in which a plurality of peeled units 300 are accommodated is movably mounted in the Y-axis direction, and the peeled unit 300 shown in FIG. And a peeling stage 4 on which the peelable unit 300 is placed for peeling a plurality of devices from the protective tape T constituting the peeled unit 300 to be peeled. .

  The unloading means 3 holds the peeled unit 300 and can move in the X-axis direction and the Y-axis direction. A mounting table 30 on which the peeled unit 300 is placed is disposed in the movable range of the unloading means 3. The mounting table 30 includes a UV irradiator 31.

  The peeling stage 4 is also arranged in the movable range of the transport means 3. On the peeling stage 4, an outer peripheral end material feeding portion 40 that presses the outer peripheral end material 202 b in the short direction of the unit 300 to be peeled and sends it in the X-axis direction is disposed.

  As shown in FIG. 4, the outer peripheral end material feeding portion 40 includes a slide portion 400 that is in sliding contact with the peeling table 4, and the slide portion 400 has a lower surface of the unit to be peeled 300, that is, the protective tape T side. A lower support portion 401 that is supported from below and an upper support portion 402 that holds the upper surface of the unit 300 to be peeled, that is, the surface side of the divided rectangular substrate 100, and the slide portion 400 is driven by the slide drive portion 403 and It can slide in the axial direction. The slide drive unit 403 includes a belt 403a to which the slide unit 400 is fixed, a motor 403b that drives the belt 403a, and an encoder 403c that detects the rotation of the motor 403b.

  A dropping table 5 on which a plurality of devices D peeled from the protective tape T are placed is disposed on the −X direction side of the peeling stage 4. As shown in FIG. 4, a piston rod 50 is connected to the side of the dropping table 5, and the piston rod 50 is configured to be driven in the X-axis direction by a cylinder 51. The drop table 5 is driven by the cylinder 51 and moves in the X-axis direction, so that the distance between the drop table 5 and the peeling stage 4 can be adjusted. It can move between adjacent positions adjacent to the stage 4.

  Below the drop table 5, bulk accommodating means 6 for bulk accommodating a plurality of devices separated from the protective tape T is disposed. That is, the dropping table 5 is disposed above the bulk accommodating means 6.

  The drop table 5 is provided with openings 52 for dropping the plurality of devices. Further, an abutting 53 protruding upward from the upper surface of the dropping table 5 is formed on the side farther from the peeling stage 4 in the −X direction than the opening 52. On the other hand, a guide member 54 that guides the dropping of the device D is disposed on the lower surface side of the dropping table 5. In FIG. 1, the abutment 53 is not shown.

  The bulk accommodating means 6 includes a device dropping member 60 located below the opening 52. The device dropping member 60 includes an inclined surface 60a that guides a falling device. Below the device dropping member 60, a device storage box 61 for storing a plurality of devices that have slid down the inclined surface 60a of the device dropping member 60 is disposed. On the other hand, above the device dropping member 60, an imaging means 62 for imaging the entire inclined surface 60a is disposed. The imaging means 62 is movable in the X axis direction. The imaging unit 62 is connected to a determination unit 63 that determines whether or not a device is attached to the inclined surface 60 a based on the image information of the inclined surface acquired by the imaging unit 62. When it is determined that a device is attached to the inclined surface 60a, the device is connected to a notification unit 64 that performs notification. The bulk accommodation means 6 includes a device dropping member 60, a device accommodation box 61, an imaging means 62, a determination unit 63, and a notification unit 64.

  Below the peeling stage 4, there is arranged device transfer means 7 for dropping a plurality of devices from the peeling stage 4 and transferring them to the table 5 while peeling the protective tape T of the unit 300 to be peeled placed on the peeling stage 4. It is installed.

  The device transfer means 7 gradually peels the protective tape T from the rear surface 100b of the divided rectangular substrate 100 by lowering the gripping portion 70 below the peeling stage 4 by gripping the end of the peelable unit 300. It is comprised from the holding part movable part 71 which performs.

  The gripping portion 70 includes a pressing member 700 having a horizontal plate 700b bent in the horizontal direction from the upper end portion of the upright portion 700a, a rod 701 connected to the pressing member 700, and a cylinder 702 for moving the rod 701 up and down. . The cylinder 702 is fixed to a rotation support member 703 that is composed of a horizontal portion 703a and an upright portion 703b and has an L-shaped cross section.

  The gripper movable unit 71 includes a rail 710 extending in the X-axis direction, a movable member 711 slidably contacting the rail 710, and a drive unit 712 that drives the movable unit 711 in the X-axis direction. The drive unit 712 includes a belt 712a fixed to the movable unit 711 and a motor 712b that moves the belt 712a in the X-axis direction.

  The movable member 711 supports the rotation support member 703 so as to be rotatable about a rotation shaft 711a having an axis in the Y-axis direction. The movable member 711 includes an inclined surface 711b inclined toward the support member 703, and a spring 713 is interposed between the inclined surface 711b and the upright portion 703b of the support member 703. The spring 713 biases the rotation support member 703 so as to erect the standing portion 703b.

  Above the peeling stage 4 and the dropping table 5, device dropping means 8 for dropping a plurality of devices transferred to the dropping table 5 from the dropping table 5 into the bulk accommodating means 6 is disposed.

  The device dropping means 8 includes a pressing plate 80 formed in a flat plate shape, and the pressing plate 80 is driven by a drive unit 81 to be movable in the X-axis direction. The drive unit 81 includes a belt 810 fixed to the pressing plate 80 and a motor 811 that moves the belt 810 in the X-axis direction. The holding plate 80 can be moved up and down by the rotation of the ball screw 82.

  Below the peeling stage 4, an accommodation box 9 for accommodating the intermediate end member 202 c of the rectangular substrate 100 and the protective tape T is disposed.

  At least the motor 403b and the encoder 403 constituting the outer peripheral end material feeding unit 40 and the motor 811 constituting the device dropping unit 8 are connected to the control unit 10, and the motors 403b and 811 are controlled by the control unit 10. .

  Next, in the tape peeling apparatus 1 configured as described above, a process of peeling a plurality of devices D from the protective tape T of the peelable unit 300 shown in FIG. 2 will be described.

  As shown in FIG. 5, the unit to be peeled 300 is accommodated in the cassette 2 a placed on the cassette stage 2, transported to the placing table 30, and the protective tape T received UV irradiation from the UV irradiator 31. Thereafter, the device D is conveyed to the peeling stage 4, and a plurality of devices D are accommodated in the device accommodation box 61 shown in FIG. 4 by the device dropping means 5.

  As shown in FIG. 6, when the protective tape T side of the unit to be peeled 300 is placed on the peeling stage 4, the slide part 400 is dropped into the direction approaching the table 5, and the outer peripheral end material in the short direction at one end. 202b is sandwiched between the lower support part 401 and the upper support part 402 of the outer peripheral end material feeding part 40, while the horizontal plate 700b of the pressing part 700 constituting the gripping part 70 is moved above the peeling stage 4. The outer peripheral end material 202b in the short side direction at the other end is pressed together with the protective tape T from above by the pressing portion 700 and is gripped by the gripping portion 70. At this time, the dropping table 5 is located at a separation position separated from the peeling stage 4 by a predetermined distance.

  Next, as shown in FIG. 7, the dropping table 5 is moved closer to the peeling stage 4 and moved to an adjacent position adjacent to the peeling stage 4. In a state where the dropping table 5 is in such an adjacent position, a gap G between the dropping table 5 and the peeling stage 4 is smaller than the width of the device D in the X-axis direction and larger than the thickness of the protective tape T. Is formed.

  Next, the pressing plate 80 of the device dropping means 8 is positioned above the gap G and lowered, so that the pressing plate 80 is positioned immediately above the device D adjacent to the outer peripheral end member 202b in the short direction. At this time, the lower surface of the pressing plate 80 is slightly brought into contact with the upper surface of the device D, or a slight gap is provided between the lower surface of the pressing plate 80 and the upper surface of the device D.

  Further, when the gripper movable portion 71 is moved in the + X direction by driving the drive portion 712, the rotation support member 703 rotates around the rotation shaft 711a along with the movement, and resists the biasing force of the spring 713. And it inclines in the direction approaching the slope 711b. Then, since the gripping part 70 is lowered, the protective tape T and the outer peripheral end material 202b in the short direction are pulled downward. When the rotation support member 703 is inclined to a predetermined angle, the movable member 711 is moved in the + X direction by driving the motor 712b.

  When the protective tape T and the outer peripheral end material 202b in the short direction are pulled downward, the slide portion 400 that sandwiches the device D and the protective tape T on the peeling stage 4 is also pulled in the −X direction. In addition to the motor 403b constituting the material feeding unit 40, the encoder 403c detects this as a pulse fluctuation. The controller 10 pushes the peeled-off unit 300 in the −X direction by driving the motor 403b in response to the notification from the encoder 403c.

  The control unit 10 further drives a motor 811 constituting the device dropping unit 8 by a predetermined amount, and moves the pressing plate 80 in the same direction (in the −X direction) as the slide unit 400 by the same amount. By repeating the above control (control that detects that the slide part 400 is pulled in the −X direction and pushes the peelable unit 300 in the same direction and moves the pressing plate 80 in the same direction), the peeling stage 4 is moved. The holding plate 80 is moved so as to follow the movement of the plurality of devices D.

  As shown in FIG. 7, with the device dropping table 5 in the adjacent position, the device transfer means 7 pulls the protective tape T and the outer peripheral end material 202b in the short direction downward to form one row. A plurality of devices D are peeled off from the protective tape T, and the devices D are dropped and transferred to the table 5. At this time, since the pressing plate 80 moves at the same speed in the same direction as the device D and is positioned above the device D, the pressing plate 80 presses the rotation even if the device D tries to rotate in the standing direction. The device D can be transferred to the table 5 dropped from the peeling stage 4 while keeping the direction of the device D constant. In particular, for a small-sized device, it is effective that the holding plate 80 holds the device D because the device easily stands up due to the influence of static electricity.

  As shown in FIG. 8, the pressing plate 80 moves to the dropping table 5 while pressing all devices D constituting one device forming unit 201 (see FIG. 2) from above. Thus, when all the devices D constituting one device forming unit 201 are transferred to the drop table 5, the drop table 5 moves to a separation position separated from the peeling stage 4 by a predetermined interval. In this state, the device transfer means 7 continues to move in the distance + X direction corresponding to the width of the intermediate end member 202c, so that the intermediate end member 202c is in the state where the dropping table 5 is positioned at the separation position. When the protective tape T is sent to the lower side of the peeling stage 4 by the transfer means 7, it is peeled off from the protective tape T and dropped into the storage box 9 and stored.

  As shown in FIG. 9, the plurality of devices D transferred to the dropping table 5 are moved in the −X direction by the pressing plate 80 moved from the upper side by the pressing plate 80 and moved in the −X direction. It falls down one after another. At this time, the abutment 53 is formed on the traveling direction side of the device D with respect to the opening 52. Therefore, even if the device D is attached to the lower surface of the holding plate 80, the device D hits the abutment 53. The device D can be reliably dropped from the opening 52.

  The bulk accommodating means 6 is located below the dropping table 5 located at the separation position, and the plurality of devices D dropped from the opening 52 are guided by the guide member 54 as shown in FIG. 60 falls along the inclined surface 60 a and is accommodated in the device accommodation box 61. In this way, a plurality of devices D are dropped into the bulk accommodating means 6. If the device D does not slide and does not fall from the opening 52 even if the holding plate 80 is moved in the −X direction due to static electricity generated between the dropping table 5 and the device D, the holding plate 80 is slightly raised. Then, the device D that has not dropped by moving in the + X direction is moved downward, and then the device D that has not fallen by lowering the pressing plate 80 is pressed from above, so that the pressing plate 80 moves again in the −X direction. As a result, the device remaining on the dropping table 5 is dropped from the opening 52.

  As shown in FIG. 11, when the plurality of devices D slide on the inclined surface 60a of the device dropping member 60, the imaging unit 62 images the inclined surface 60a while moving in the X-axis direction. Then, the image information acquired by the imaging unit 62 is transferred to the determination unit 63. The determination unit 63 compares the reference image information acquired in a state where the device D is not attached to the inclined surface 60a and the current image information, and the pixel area that has changed becomes larger than a predetermined threshold value. If it is determined that the device is attached. When it is determined that the device is attached to the inclined surface 60a, the notification unit 64 notifies the operator to that effect. Further, a device for generating vibration is provided in the device dropping member 60, and when the determination unit 63 determines that the device is attached to the inclined surface 60a, the device D is dropped from the inclined surface 60a by vibration. Also good.

  In this way, the device 70 and the intermediate end member 202c are peeled from the protective tape T by pulling the protective tape T while the gripper 70 moves in the + X direction while moving the dropping table 5 between the adjacent position and the separated position. Then, as shown in FIG. 12, all the devices D are transferred from the peeling stage 4 to the dropping table 5 and are bulk-accommodated from the dropping table 5 into the bulk accommodating means 6. Further, the intermediate end member 202 c and the protective tape T are accommodated in the accommodation box 9.

  As described above, in the tape peeling apparatus 1, when transferring a plurality of devices from the peeling stage 4 onto the table 5 by the device transfer means 7, the device dropping means 8 holds the plurality of devices D from above. However, it is possible to move following the transfer of the plurality of devices D and drop the plurality of transferred devices D from the drop table 5 into the bulk accommodating means 6, so that the orientation of the device D is kept constant, The device D can be reliably transferred to the dropping table 5 and dropped into the bulk accommodating means 6.

300: Unit to be peeled 100: Rectangular substrate after division D: Device L: Planned division line 200: Rectangular substrate before division 201: Device forming portion 202a: Outer peripheral end material in the longitudinal direction 202b: Outer peripheral end material in the lateral direction 202c: Intermediate End material 203: Mold resin T: Protection tape 1: Tape peeling device 2: Cassette stage 3: Unloading means 30: Mounting table 31: UV irradiation unit 4: Peeling stage 40: Outer peripheral edge material feeding part 400: Slide part 401: Lower part Support section 402: Upper support section 403: Slide drive section 403a: Belt 403b: Motor 403c: Encoder 5: Dropping table 50: Piston rod 51: Cylinder 52: Opening 53: Abutment 54: Guide member 6: Bulk housing means 60: Device dropping member 60a: inclined surface 61: device receiving box 62 : Imaging means 63: Judgment part 64: Notification part 7: Device transfer means 70: Holding part 700: Holding member 700a: Upright part 700b: Horizontal plate 701: Rod 702: Cylinder 703: Rotation support member 703a: Horizontal part 703b: Standing part 71: Grasping part movable part 710: Rail 711: Movable member 711a: Rotating shaft 711b: Slope 712: Driving part 712a: Belt 712b: Motor 713: Spring 8: Device dropping means 80: Holding plate 81: Driving part 810: Belt 811: Motor 9: Storage box

Claims (4)

A plurality of devices are surrounded by outer peripheral end members, and a protective tape is attached to the back surface of the rectangular substrate formed by dividing the lines by dividing lines formed vertically and horizontally. A tape peeling device that separates the plurality of devices from the protective tape and bulk-stores them in a state where the outer peripheral end material in the longitudinal direction is removed,
A cassette stage on which a cassette containing a plurality of protective tapes having a plurality of devices attached to the surface is placed;
Unloading means for unloading the protective tape having a plurality of devices attached thereto from the cassette;
In order to peel off the plurality of devices from the carried out protective tape, a peeling stage on which the protective tape to which the plurality of devices are attached is placed;
Bulk accommodating means for bulk accommodating a plurality of devices peeled from the protective tape;
A dropping table disposed above the bulk accommodating means and on which the plurality of devices dropped into the bulk accommodating means are placed;
Device transfer means for transferring the plurality of devices from the peeling stage to the dropping table while peeling the protective tape from the protective tape to which the plurality of devices placed on the peeling stage are attached ;
Device dropping means for dropping the plurality of devices transferred to the dropping table from the dropping table into the bulk accommodating means;
Consisting of
The dropping unit follows the transfer of the plurality of devices while pressing the plurality of devices from above when the plurality of devices are transferred from the peeling stage onto the dropping table by the device transfer unit. A tape peeling apparatus, wherein the plurality of devices transferred and transferred are dropped from the drop table into the bulk accommodating means. The drop table is configured to be movable between a separation position spaced apart from the separation stage by a predetermined distance and an adjacent position adjacent to the separation stage.
The bulk accommodating means is disposed below the separation position of the dropping table,
The device transfer means includes a gripping part for gripping the outer peripheral end material in the short direction of the rectangular substrate placed on the peeling stage together with the protective tape, and lowering the gripping part below the peeling stage to form the rectangular substrate. A gripping portion movable portion that gradually peels the protective tape from the back surface of the substrate, and
2. The tape peeling apparatus according to claim 1, wherein the plurality of devices are transferred from the peeling stage to the dropping table in a state where the dropping table is positioned at the adjacent position. The rectangular substrate is partitioned for each of a plurality of devices by an intermediate end material,
Below the peeling stage, a storage box for storing the intermediate end material of the rectangular substrate dropped from the predetermined interval when the dropping table is positioned at the separation position and the protective tape is disposed,
The intermediate end material is peeled off from the protective tape and transferred to the storage box when the protective tape is sent below the peeling stage by the device transfer means with the dropping table positioned at the separation position. The tape peeling device according to claim 2, wherein the tape peeling device falls. The drop table is provided with openings for dropping the plurality of devices,
The bulk accommodating means includes a device dropping member having an inclined surface formed downward from the opening, and a device for accommodating a plurality of devices dropped from the opening and sliding on the inclined surface of the device dropping member. A storage box, an imaging unit for imaging the entire inclined surface of the device dropping member, and a determination for determining whether a device is attached to the inclined surface based on image information of the inclined surface acquired by the imaging unit; The tape peeling apparatus according to claim 1, 2, or 3, wherein the tape peeling device is configured to include a notification unit when the determination unit determines that the device is attached to the inclined surface.

Images