JP6154760B2 - Capacitive pressure sensor - Google Patents

Description

  The present invention relates to a capacitance type pressure sensor that detects a change in a diaphragm (diaphragm) that is deflected by the pressure of a fluid to be measured as a change in capacitance.

  2. Description of the Related Art Conventionally, a capacitance type pressure sensor that detects a change in a diaphragm that is bent under the pressure of a fluid to be measured as a change in capacitance has been widely known. For example, a capacitive pressure sensor is used to measure a vacuum pressure during a thin film formation process in a semiconductor manufacturing apparatus or the like, and a capacitive pressure sensor for measuring the vacuum pressure is used. This is called a diaphragm gauge.

  This diaphragm vacuum gauge is a sensor that detects a change in the capacitance of a housing that has an introduction portion of a fluid to be measured and that is deflected by the pressure of the fluid to be measured guided through the introduction portion of the housing as a change in capacitance. It has a chip and a sensor case that covers the main body of the housing that houses the sensor chip.

  In this diaphragm vacuum gauge, basically, the same material as the thin film to be processed and its by-products are deposited on the diaphragm. Hereinafter, this deposited substance is called a contaminant. When this pollutant accumulates on the diaphragm, the stress caused by them causes the diaphragm to bend, resulting in a shift (zero drift) in the output signal of the sensor. Further, since the diaphragm is apparently thick due to the accumulated contaminants, the diaphragm is difficult to bend, and the change width (span) of the output signal due to the pressure application is also smaller than the change width of the original output signal.

  Therefore, in the diaphragm vacuum gauge, there is a baffle between the introduction portion and the diaphragm that prevents the deposition of contaminants contained in the measured fluid on the diaphragm by making the plate surface perpendicular to the direction of passage of the measured fluid. Is provided. Further, by heating with a heater, the temperature in the sensor case is kept at a high temperature at which no contaminants are deposited (see, for example, Patent Document 1).

  In Patent Document 1, a heater is provided in the sensor case. For example, as shown in Patent Documents 2 and 3, a heater is wound around the outer peripheral wall of the sensor case, or a slot-shaped heater is tightened from the outside. A method such as mounting is also conceivable.

JP 2007-155500 A Japanese Patent Laid-Open No. 5-281073 JP 2007-002986 A JP 2002-1111011 A

  However, for example, when a sheath heater (an electric heater in which a spiral heating element is filled with a highly insulating powder having good heat conduction in the center of a metal pipe) is wound around the outer peripheral wall of the sensor case in a coil shape, the heating and cooling are repeated. Due to the expansion / contraction, the heater is deformed, the contact area with the object to be heated is reduced, the temperature raising efficiency is lowered, and the temperature in the sensor case may not reach the target temperature in the end. Furthermore, the problem cannot be noticed unless a controllable state such as the target temperature is not reached, and a state in which the temperature rise efficiency is lowered may be left unattended. Also, an abnormality such as a temperature sensor failure may be missed.

  The present invention has been made to solve such a problem, and the object of the present invention is to statically detect abnormalities such as a decrease in the heating efficiency of the heater and a failure of the temperature sensor at an early stage. It is to provide a capacitance type pressure sensor.

In order to achieve such an object, the present invention relates to a change in the capacitance of a housing having an introduction portion for a fluid to be measured and a diaphragm that is bent by receiving the pressure of the fluid to be measured guided through the introduction portion. A sensor chip that covers the body of the housing that houses the sensor chip, a heater that heats the inside of the sensor case, a temperature sensor that measures the temperature inside the sensor case, and the temperature inside the sensor case The heater control unit that controls the output to the heater so that the temperature becomes a predetermined temperature, and the abnormality based on the transition of the temperature in the sensor case measured by the temperature sensor and the transition of the output from the heater control unit to the heater A state determination unit for determining whether or not it has occurred is provided .

In the invention according to claim 1 of the present application , the temperature in the sensor case measured by the temperature sensor is set as the measured temperature Tpv, the predetermined temperature is set as the set temperature Tsp, and the heater is set so that the measured temperature Tpv becomes equal to the set temperature Tsp. When the output (heater output) is controlled in closed loop, it is determined whether an abnormality relating to the heater has occurred based on the heater output when the measured temperature Tpv and the set temperature Tsp are controlled to be equal. To do.

  In the closed loop control, for example, when the contact area of the heater decreases, the heater output increases when the measured temperature Tpv and the set temperature Tsp are controlled to be equal (when the temperature reaches a high temperature). In this case, it is possible to determine whether or not the contact area of the heater has decreased by comparing the heater output when reaching a high temperature with a normal value (standard value).

In the invention according to claim 2 of the present application , the temperature in the sensor case measured by the temperature sensor is set as the measured temperature Tpv, the predetermined temperature is set as the set temperature Tsp, and the heater is set so that the measured temperature Tpv becomes equal to the set temperature Tsp. When closed-loop control is performed on the output to the heater (heater output), it is determined whether an abnormality relating to the temperature sensor has occurred based on the measured temperature Tpv when the output to the heater reaches a predetermined upper limit value. Make a decision.

  In the case of closed loop control, for example, when the measured temperature Tpv drops abnormally, the heater output increases and reaches the upper limit value. In this case, it is possible to determine whether or not an abnormality has occurred in the temperature sensor by comparing the measured temperature Tpv when the heater output reaches the upper limit (at the maximum heater output) and the set temperature Tsp. It is.

In the invention according to claim 3 of the present application, when a predetermined temperature is set as the target temperature Ttp and the output to the heater is controlled in an open loop so that the temperature in the sensor case becomes the target temperature Ttp, the temperature sensor measures. Is the temperature in the sensor case taken in as the measured temperature Tpv and whether an abnormality related to the heater has occurred based on the measured temperature Tpv when the output to the heater (heater output) reaches a normal value corresponding to the target temperature Ttp It is determined whether or not .
In the invention according to claim 4 of the present application, when the predetermined temperature is set as the target temperature Ttp and the output to the heater is controlled in an open loop so that the temperature in the sensor case becomes the target temperature Ttp, the temperature sensor measures. The temperature in the sensor case is taken as the measured temperature Tpv, and an abnormality related to the temperature sensor occurs based on the measured temperature Tpv when the output to the heater (heater output) reaches a normal value corresponding to the target temperature Ttp. Whether or not it is determined.

  In the case of open loop control, for example, when the contact area of the heater decreases, the measured temperature Tpv when the output to the heater reaches the standard value corresponding to the target temperature Ttp decreases. In this case, the contact area of the heater is determined by comparing the measured temperature Tpv when the output to the heater reaches a normal value (standard value) corresponding to the target temperature Ttp (when reaching a high temperature) and the target temperature Ttp. It is possible to determine whether or not it is decreasing.

  In the case of open loop control, for example, even if the measured temperature Tpv drops abnormally, the output to the heater does not change. In this case, when the output to the heater reaches a normal value (standard value) corresponding to the target temperature Ttp (at the time of high temperature), the measured temperature Tpv is compared with the target temperature Ttp, so that there is an abnormality in the temperature sensor. It is possible to determine whether it has occurred.

  According to the present invention, it is determined whether or not an abnormality has occurred based on the transition of the temperature in the sensor case measured by the temperature sensor and the transition of the output from the heater controller to the heater. Based on the heater output when the temperature Tpv and the set temperature Tsp are controlled to be equal, it is determined whether an abnormality relating to the heater has occurred, or the output to the heater is set to a predetermined upper limit value. It is determined whether or not an abnormality relating to the temperature sensor has occurred based on the measured temperature Tpv when it has reached, or when the output to the heater has reached a normal value corresponding to the target temperature Ttp Based on the temperature Tpv, it is determined whether or not an abnormality relating to the heater or the temperature sensor has occurred. It is possible to find the abnormal at an early stage. As a result, it is possible to detect a state where the probability of occurrence of a malfunction of the capacitive pressure sensor is not low, and to improve the health of the capacitive pressure sensor itself.

It is a longitudinal cross-sectional view which shows the principal part of one Embodiment of the capacitive pressure sensor which concerns on this invention. It is a top view of the baffle used for this diaphragm vacuum gauge. It is a figure which shows the principal part of the 1st example of the heating control circuit in this diaphragm vacuum gauge. It is a time chart for demonstrating operation | movement of the 1st example of a heating control circuit. It is a figure which shows the principal part of the 2nd example of the heating control circuit in this diaphragm vacuum gauge. It is a time chart for demonstrating operation | movement of the 2nd example of a heating control circuit. It is a figure which shows the principal part of the 3rd example of the heating control circuit in this diaphragm vacuum gauge. It is a time chart for demonstrating operation | movement of the 3rd example of a heating control circuit. It is a figure which shows the principal part of the 4th example of the heating control circuit in this diaphragm vacuum gauge. It is a time chart for demonstrating operation | movement of the 4th example of a heating control circuit.

  Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 is a longitudinal sectional view showing a main part of an embodiment of a capacitive pressure sensor according to the present invention.

  This capacitive pressure sensor (diaphragm vacuum gauge) 1 includes a housing 10, a pedestal plate 20 accommodated in the housing 10, and a sensor chip 30 that is also accommodated in the housing 10 and joined to the pedestal plate 20. And an electrode lead portion 40 that is directly attached to the housing 10 and electrically connects the inside and outside of the housing 10.

  The pedestal plate 20 includes a first pedestal plate 21 and a second pedestal plate 22. The pedestal plate 20 is spaced from the housing 10 and is supported by the housing 10 only through the support diaphragm 50. .

  The housing 10 includes a lower housing 11, an upper housing 12, and a cover 13. The lower housing 11, the upper housing 12, and the cover 13 are made of Inconel, which is a corrosion-resistant metal, and are joined by welding.

  The lower edging 11 has a shape in which cylindrical bodies having different diameters are connected, the large diameter portion 11a has a joint portion with the support diaphragm 50, and the small diameter portion 11b forms an introduction portion 10A into which a fluid to be measured flows. Yes.

  The upper housing 12 has a substantially cylindrical shape, and forms an independent vacuum reference vacuum chamber 10 </ b> B in the housing 10 via the cover 13, the support diaphragm 50, the pedestal plate 20, and the sensor chip 30. The reference vacuum chamber 10B is provided with a gas adsorbing material called a getter (not shown) to maintain the degree of vacuum.

  Further, the cover 13 is made of a circular plate, and an electrode lead insertion hole 13a is formed at a predetermined position of the cover 13, and the electrode lead portion 40 is embedded through a hermetic seal 60, and the sealing performance of this portion is ensured. Has been.

  On the other hand, the support diaphragm 50 is made of an Inconel thin plate having an outer shape matched to the shape of the housing 10, and is sandwiched between the first pedestal plate 21 and the second pedestal plate 22 and its outer peripheral portion ( The peripheral edge) is sandwiched between the lower housing 11 and the upper housing 12 and joined by welding or the like.

  The thickness of the support diaphragm 50 is, for example, several tens of microns in the case of the present embodiment, and is sufficiently thinner than the pedestal plates 21 and 22. Further, a large-diameter hole 50 a that forms a slit-like space (cavity) 20 </ b> A is formed between the first pedestal plate 21 and the second pedestal plate 22 in the central portion of the support diaphragm 50.

  The first pedestal plate 21 and the second pedestal plate 22 are made of sapphire, which is a single crystal of aluminum oxide, and the first pedestal plate 21 is spaced from the inner surface of the housing 10 on the upper surface of the support diaphragm 50. The second pedestal plate 22 is bonded to the lower surface of the support diaphragm 50 while being separated from the inner surface of the housing 10.

  The first pedestal plate 21 is formed with an introduction hole 21a for a fluid to be measured that communicates with a slit-shaped space (cavity) 20A at the center thereof. The second pedestal plate 22 has a slit-like shape. A plurality of (four in this example) lead-out holes 22a are formed in the sensor chip 30 and communicated with the space (cavity) 20A.

  Each pedestal plate 21, 22 is sufficiently thick as described above with respect to the thickness of the support diaphragm 50, and has a structure in which the support diaphragm 50 is sandwiched between both pedestal plates 21, 22. ing. This prevents this portion from warping due to thermal stress generated by the difference in thermal expansion coefficient between the support diaphragm 50 and the base plate 20.

  A sensor chip 30 having a rectangular shape in a top view made of sapphire, which is a single crystal of aluminum oxide, is bonded to the second pedestal plate 22 via an aluminum oxide-based bonding material. The sensor chip 30 joining method is described in detail in Patent Document 4 and will not be described here.

  The sensor chip 30 has a size of 1 cm square or less in a top view, a spacer 31 made of a rectangular thin plate, a sensor diaphragm 32 that is bonded to the spacer 31 and generates a strain in response to application of pressure, and a sensor diaphragm. The sensor pedestal 33 is formed so as to form a vacuum capacity chamber (reference chamber) 30A. The vacuum capacity chamber 30 </ b> A and the reference vacuum chamber 10 </ b> B maintain the same degree of vacuum through a communication hole (not shown) drilled at an appropriate position of the sensor base 32.

  The spacer 31, the sensor diaphragm 32, and the sensor pedestal 33 are joined together by so-called direct joining to constitute an integrated sensor chip 30. The sensor diaphragm 32 which is a component of the sensor chip 30 corresponds to the diaphragm referred to in the present invention.

  Further, in the capacity chamber 30A of the sensor chip 30, a fixed electrode (not shown) made of a conductor such as gold or platinum is formed on the inner surface of the sensor pedestal 33, and the inner surface of the sensor diaphragm 32 facing the fixed electrode. A movable electrode (not shown) made of a conductor such as gold or platinum is formed on the (back surface). Further, contact pads 35 and 36 made of gold or platinum are formed on the upper surface of the sensor chip 30, and the fixed electrode and the movable electrode in the capacity chamber 30A are connected to the contact pads 35 and 36 by wiring (not shown).

  On the other hand, the electrode lead portion 40 includes an electrode lead pin 41 and a metal shield 42. The electrode lead pin 41 is embedded in the metal shield 42 with a hermetic seal 43 made of an insulating material such as glass, An airtight state is maintained between both end portions of the lead pin 41. One end of the electrode lead pin 41 is exposed to the outside of the housing 10 so that the output of the diaphragm vacuum gauge 1 is transmitted to an external signal processing unit through a wiring (not shown). A hermetic seal 60 is interposed between the shield 42 and the cover 13 as described above. Further, conductive contact springs 45 and 46 are connected to the other end of the electrode lead pin 41.

  Even if the support diaphragm 50 is slightly changed due to a sudden pressure increase caused by a sudden flow of the fluid to be measured from the introduction portion 10A, the contact springs 45 and 46 have a biasing force of the contact springs 45 and 46 of the sensor chip 30. It is soft enough not to affect the measurement accuracy.

  In this diaphragm vacuum gauge 1, between the sensor diaphragm 32 of the sensor chip 30 and the introduction part 10A, the plate surface is orthogonal to the measurement fluid passage direction F at the outlet of the measurement fluid from the introduction part 10A. Thus, a baffle 70 made of Inconel is disposed.

  FIG. 2 shows a plan view of the baffle 70. The baffle 70 has tabs 70 a formed at predetermined angular intervals on the outer periphery thereof, and the fluid to be measured passes through the gap 70 b between the tabs 70 a and is sent to the sensor diaphragm 32.

  Further, in the diaphragm vacuum gauge 1, the housing 10 is provided inside the cylindrical sensor case 80 so that the introduction portion (pressure guiding tube) 10A of the fluid to be measured is drawn out (downward). The upper part of the sensor case 80 is closed with a lid 80a that forms a part of the sensor case 80, that is, the body of the housing 10 that houses the sensor chip 30 is covered with the sensor case 80, and this sensor Through the lead-out hole (not shown) provided in the lid 80a of the case 80, the wiring connected to the electrode lead pin 41 is guided to an external signal processing unit.

  In the diaphragm vacuum gauge 1, a heater 90 is provided on the outer peripheral wall of the sensor case 80 so as to surround the periphery. In this example, a sheath heater is used as the heater 90. However, a slot heater may be used. Further, a metal block 100 is provided for the heater 90 so as to press down the outer surface of the heater 90.

  On the other hand, the diaphragm vacuum gauge 1 is provided with a heating control circuit 400 that controls the heating of the heater 90. The heating control circuit 400 uses a measured value (measured temperature) Tpv of the temperature in the sensor case 80 and a predetermined temperature (set temperature Tsp for feedback control, target temperature Ttp for open loop control). As an input, the output to the heater 90 for heating (heater output) is controlled.

  In this example, the temperature sensor 14 is provided outside the housing 10, and the sensor temperature detected by the temperature sensor 14 is provided on the lid 80 a of the sensor case 80 as the measured temperature Tpv in the sensor case 80. It is supposed to be sent to the heating control circuit 400 through a lead-out hole (not shown).

  In the heating control circuit 400, the set temperature Tsp (target temperature Ttp) is determined as a value of 300 ° C. or more, for example. The heating control circuit 400 is realized by hardware including a processor and a storage device, and a program that realizes various functions in cooperation with the hardware.

  In the diaphragm vacuum gauge 1, the operator measures the pressure of the fluid to be measured by measuring the pressure of the fluid to be measured by turning on the command to the heating control circuit 400 when measuring the pressure of the fluid to be measured. After the execution, the command to the heating control circuit 400 is turned OFF for energy saving.

[First example of heating control circuit (Embodiment 1): closed loop control, heater abnormality determination]
The principal part of the 1st example of the heating control circuit 400 is shown in FIG. The heating control circuit 400 (400A) includes a closed loop temperature control unit 401A, a state determination unit 402A, and an alarm signal transmission unit 403A.

  The closed loop temperature control unit 401A operates in response to an ON / OFF command from the operator. When the ON loop command is received from the operator, the measured temperature Tpv from the temperature sensor 14 becomes equal to the set temperature Tsp. When the heater output Pout to the heater 90 is closed-loop controlled and an OFF command is received from the operator, the heater output Pout to the heater 90 is set to zero. In this example, feedback control such as PID control is adopted as closed loop control.

  The state determination unit 402A receives the measured temperature Tpv from the temperature sensor 14, the heater output Pout from the closed loop temperature control unit 401A, and the set temperature Tsp, and the measured temperature Tpv and the set temperature Tsp are controlled to be equal. It is determined whether an abnormality relating to the heater 90 has occurred based on the heater output Pout.

  In the state determination unit 402A, the normal value (standard value) of the heater output Pout when the measured temperature Tpv and the set temperature Tsp are controlled to be equal is set as Pst. A threshold value used for determination of occurrence / non-occurrence is set as α.

  The alarm signal transmission unit 403A receives the determination result of the occurrence of abnormality related to the heater 90 from the state determination unit 402A, and transmits the determination result to a higher-level device (not shown).

  Hereinafter, the operation of the heating control circuit 400A will be specifically described with reference to the time chart shown in FIG. In the time chart shown in FIG. 4, FIG. 4 (a) shows a change in the measured temperature Tpv, and FIG. 4 (b) shows a change in the heater output Pout.

  At the point t1 shown in FIG. 4, the command from the operator to the heating control circuit 400A is turned OFF. Upon receiving this command, the closed loop temperature control unit 401A sets the heater output Pout to the heater 90 to 0. To do. As a result, the measured temperature Tpv that has been adjusted to the set temperature Tsp until then decreases.

  In this example, the heater 90 is not deformed until the point t1, the heater 90 gradually deforms after the point t1, and the contact area with the sensor case 80 gradually decreases. It is assumed that the temperature rise efficiency starts to decrease.

  When the command from the operator to the heating control circuit 400A is turned on in the next pressure measurement (point t2 shown in FIG. 4), the closed-loop temperature control unit 401A sets the measured temperature Tpv and the set temperature Tsp. The heater output Pout to the heater 90 for heating is controlled (closed loop control) so as to be equal.

  In this example, the contact area with the sensor case 80 is slightly reduced due to the deformation of the heater 90. For this reason, even if the heater output Pout reaches the normal value (standard value) Pst, the measured temperature Tpv is not equal to the set temperature Tsp, and the measured temperature Tpv and the set temperature are slightly exceeded when the normal value (standard value) Pst is exceeded. Tsp is equal (t3 point shown in FIG. 4). In this case, the measurement of the pressure of the fluid to be measured is performed in a state where the measurement temperature Tpv and the set temperature Tsp are controlled equally.

  When the contact area with the sensor case 80 gradually decreases due to the deformation of the heating heater 90, the normal value (standard value) of the heater output Pout when the measured temperature Tpv and the set temperature Tsp are controlled to be equal. The excess with respect to Pst increases.

  The state determination unit 402A monitors the heater output Pout when the measured temperature Tpv and the set temperature Tsp are controlled to be equal, and when the heater output Pout is higher than the normal value (standard value) Pst by a threshold value α or more, It is determined that a sign of deformation has occurred in the heating heater 90, and a determination result indicating that an abnormality has occurred in the heating heater 90 is sent to the alarm signal transmission unit 403A. The alarm signal transmission unit 403A transmits the determination result from the state determination unit 402A to the host device.

  In this manner, in the heating control circuit 400A, the heater output Pout when the measured temperature Tpv and the set temperature Tsp are controlled to be equal (at the time of reaching high temperature) is processed with data (difference from the normal value (standard value) Pst). )), It is possible to easily estimate a change with time in the deformation of the heater 90 and to detect a decrease in the heating efficiency of the heater at an early stage. As a result, it is possible to detect a state in which the probability of occurrence of the malfunction of the diaphragm vacuum gauge 1 is not low and improve the health of the diaphragm vacuum gauge 1 itself.

[Second example of heating control circuit (Embodiment 2): closed loop control, temperature sensor abnormality determination]
FIG. 5 shows a main part of a second example of the heating control circuit 400. The heating control circuit 400 (400B) of the second example includes a closed loop temperature control unit 401B, a state determination unit 402B, and an alarm signal transmission unit 403B.

  In the heating control circuit 400B, the functions of the closed loop temperature control unit 401B and the alarm signal transmitting unit 403B are the same as those of the closed loop temperature control unit 401A and the alarm signal transmitting unit 403A in the heating control circuit 400A of the first example. . In the heating control circuit 400B of the second example, only the function of the state determination unit 402B is different from the state determination unit 402A in the heating control circuit 400A of the first example.

  In the heating control circuit 400B, in the state determination unit 402B, the upper limit value of the heater output Pout is set as Pmax, and a threshold value used in determining whether or not an abnormality has occurred regarding the temperature sensor 14 is set as β. .

  Hereinafter, the operation of the heating control circuit 400B will be specifically described with reference to a time chart shown in FIG. In the time chart shown in FIG. 6, FIG. 6 (a) shows a change in the measured temperature Tpv, and FIG. 6 (b) shows a change in the heater output Pout.

  At point t1 shown in FIG. 6, the command from the operator to the heating control circuit 400B is turned OFF, and the closed loop temperature control unit 401B receives the command and sets the heater output Pout to the heater 90 to 0. To do. As a result, the measured temperature Tpv that has been adjusted to the set temperature Tsp until then decreases.

  When the command from the operator to the heating control circuit 400B is turned on at the next pressure measurement (point t2 shown in FIG. 6), the closed loop temperature control unit 401B sets the measured temperature Tpv and the set temperature Tsp. The heater output Pout to the heater 90 for heating is controlled (closed loop control) so as to be equal.

  By this closed loop control, the measured temperature Tpv becomes equal to the set temperature Tsp (point t3 shown in FIG. 6), and the heater output Pout maintains the normal value (standard value) Pst. In this case, the measurement of the pressure of the fluid to be measured is performed in a state where the measurement temperature Tpv and the set temperature Tsp are controlled equally.

  Here, for example, it is assumed that an abnormality occurs in the temperature sensor 14 and the measured temperature Tpv from the temperature sensor 14 starts to decrease (abnormally decreases) even though the temperature in the sensor case 80 is the set temperature Tsp ( T4 point shown in FIG. 6).

  In such a case, the closed loop temperature control unit 401B increases the heater output Pout so as to make the measured temperature Tpv from the temperature sensor 14 coincide with the set temperature Tsp. However, no matter how much the heater output Pout is increased, the measured temperature Tpv from the temperature sensor 14 does not increase.

  The state determination unit 402B monitors the heater output Pout, takes in the measured temperature Tpv when the heater output Pout reaches the upper limit value Pmax (at the time of the maximum heater output), and the measured temperature Tpv is compared with the set temperature Tsp. When the threshold value β is lower than the threshold value β, a determination result indicating that an abnormality such as a failure has occurred in the temperature sensor 14 is sent to the alarm signal transmitting unit 403B. The alarm signal transmission unit 403B transmits the determination result from the state determination unit 402B to the host device.

  In this way, in the heating control circuit 400B, the measured temperature Tpv at the time of maximum heater output (when the heater output Pout reaches the upper limit value Pmax) is subjected to data processing (detecting a difference from the set temperature Tsp). Thus, it is possible to simply estimate the malfunction of the temperature sensor 14 and to detect an abnormality such as a failure of the temperature sensor 14 at an early stage. As a result, it is possible to detect a state in which the probability of occurrence of the malfunction of the diaphragm vacuum gauge 1 is not low and improve the health of the diaphragm vacuum gauge 1 itself.

[Third example of heating control circuit (Embodiment 3): Open loop control, heater abnormality determination]
FIG. 7 shows a main part of a third example of the heating control circuit 400. The heating control circuit 400 (400C) of the third example includes an open loop temperature control unit 401C, a state determination unit 402C, and an alarm signal transmission unit 403C.

  In this heating control circuit 400C, the open loop temperature control unit 401C operates in response to an ON / OFF command from the operator, and when the ON command from the operator is received, the temperature in the sensor case 80 becomes the target temperature. The heater output Pout to the heating heater 90 is subjected to open loop control so as to be Ttp, and when an OFF command is received from the operator, the heater output Pout to the heating heater 90 is set to zero. As the open loop control in the heating control circuit 400C, feedforward control is adopted.

  The state determination unit 402C receives the measured temperature Tpv from the temperature sensor 14 and the heater output Pout from the open loop temperature control unit 401C, and the heater output Pout is a normal value (standard value) of the heater output Pout corresponding to the target temperature Ttp. ) Is determined based on the measured temperature Tpv when the temperature reaches ().

  In the state determination unit 402C, a normal value (standard value) of the heater output Pout corresponding to the target temperature Ttp is set as Pst, and a threshold value used for determining whether or not an abnormality has occurred in the heater 90 is γ. Is set as

  The alarm signal transmission unit 403C receives the determination result of the occurrence of abnormality related to the heater 90 from the state determination unit 402C, and transmits the determination result to a higher-level device (not shown).

  Hereinafter, the operation of the heating control circuit 400C will be specifically described with reference to a time chart shown in FIG. In the time chart shown in FIG. 8, FIG. 8A shows a change in the measured temperature Tpv, and FIG. 8B shows a change in the heater output Pout.

At the point t1 shown in FIG. 8, the command from the operator to the heating control circuit 400C is turned OFF. Upon receiving this command, the open loop temperature control unit 401C sets the heater output Pout to the heater 90 to 0. To do. As a result, the measured temperature Tpv that has reached the target temperature Ttp until then decreases.

  In this example, the heater 90 is not deformed until the point t1, the heater 90 gradually deforms after the point t1, and the contact area with the sensor case 80 gradually decreases. It is assumed that the temperature rise efficiency starts to decrease.

  When an instruction from the operator to the heating control circuit 400C is turned ON (point t2 shown in FIG. 8), the open loop temperature control unit 401C performs heating so that the temperature in the sensor case 80 becomes the target temperature Ttp. The heater output Pout to the heater 90 is controlled (open loop control). That is, in order to set the temperature in the sensor case 80 to the target temperature Ttp, the heater output Pout to the heater 90 is started to rise to a normal value (standard value) Pst corresponding to the target temperature Ttp.

  In this example, the contact area with the sensor case 80 is slightly reduced due to the deformation of the heater 90. Therefore, even if the heater output Pout reaches the normal value (standard value) Pst, the temperature in the sensor case 80, that is, the measured temperature Tpv does not become the target temperature Ttp but settles at a temperature slightly lower than the target temperature Ttp (see FIG. 8). T3 point shown). In this case, the pressure of the fluid to be measured is measured in a state where the heater output Pout has reached the normal value (standard value) Pst.

  If the contact area with the sensor case 80 gradually decreases due to the deformation of the heater 90, the measured temperature Tpv is insufficient with respect to the target temperature Ttp when the heater output Pout reaches the normal value (standard value) Pst. The minutes increase.

  The state determination unit 402C monitors the measured temperature Tpv when the heater output Pout reaches the normal value (standard value) Pst. If the measured temperature Tpv is lower than the target temperature Ttp by the threshold γ or more, the heater for heating 90, it is determined that a sign of deformation has occurred, and a determination result indicating that an abnormality has occurred in the heater 90 is sent to the alarm signal transmission unit 403C. The alarm signal transmission unit 403C transmits the determination result from the state determination unit 402C to the host device.

  In this way, in this heating control circuit 400C, the measured temperature Tpv when the heater output Pout reaches the normal value (standard value) Pst (at the time of reaching high temperature) is data-processed (a difference from the target temperature Ttp is detected). By doing so, it is possible to easily estimate a change with time in the deformation of the heater 90 for heating and to detect a decrease in the heating efficiency of the heater at an early stage. As a result, it is possible to detect a state in which the probability of occurrence of the malfunction of the diaphragm vacuum gauge 1 is not low and improve the health of the diaphragm vacuum gauge 1 itself.

[Fourth example of heating control circuit (Embodiment 4): Open loop control, temperature sensor abnormality determination]
FIG. 9 shows a main part of a fourth example of the heating control circuit 400. The heating control circuit 400 (400D) of the fourth example includes an open loop temperature control unit 401D, a state determination unit 402D, and an alarm signal transmission unit 403D.

  In the heating control circuit 400D, the functions of the open loop temperature control unit 401D, the state determination unit 402D, and the alarm signal transmission unit 403D are the same as the open loop temperature control unit 401C, the state determination unit 402C, and the heating control circuit 400C of the third example. Although the same as the alarm signal transmission unit 403C, in the state determination unit 402D, δ is set as a threshold used when determining whether or not an abnormality has occurred in the temperature sensor 14.

  Hereinafter, the operation of the heating control circuit 400D will be specifically described with reference to a time chart shown in FIG. In the time chart shown in FIG. 10, FIG. 10 (a) shows a change in measured temperature Tpv, and FIG. 10 (b) shows a change in heater output Pout.

  At the point t1 shown in FIG. 10, the command from the operator to the heating control circuit 400D is turned OFF. Upon receiving this command, the open loop temperature control unit 401D sets the heater output Pout to the heater 90 to 0. To do. As a result, the measured temperature Tpv that has reached the target temperature Ttp until then decreases.

  When the command from the operator to the heating control circuit 400D is turned on at the next pressure measurement (point t2 shown in FIG. 10), the open loop temperature control unit 401D sets the temperature in the sensor case 80 to the target. Control of the heater output Pout to the heater 90 for heating (open loop control) is started so as to reach the temperature Ttp. That is, in order to set the temperature in the sensor case 80 to the target temperature Ttp, the heater output Pout to the heater 90 is started to rise to a normal value (standard value) Pst corresponding to the target temperature Ttp.

  By this open loop control, the heater output Pout to the heater 90 becomes a normal value (standard value) Pst corresponding to the target temperature Ttp (point t3 shown in FIG. 10), and the measured temperature Tpv has reached the target temperature Ttp. Maintain state. In this case, the pressure of the fluid to be measured is measured in a state where the heater output Pout has reached the normal value (standard value) Pst.

  Here, for example, it is assumed that an abnormality occurs in the temperature sensor 14 and the measured temperature Tpv from the temperature sensor 14 starts to decrease (abnormally decreases) even though the temperature in the sensor case 80 is the target temperature Ttp ( T4 point shown in FIG. 10).

  In this case, the open loop temperature control unit 401D continues to maintain a normal value (standard value) Pst as the heater output Pout to the heater 90. For this reason, the temperature in the sensor case 80 does not rise.

  The state determination unit 402D monitors the measured temperature Tpv when the heater output Pout reaches the normal value (standard value) Pst. If the measured temperature Tpv is lower than the target temperature Ttp by the threshold δ or more, the temperature sensor 14 The determination result indicating that an abnormality such as a failure has occurred is sent to the alarm signal transmitting unit 403D. The alarm signal transmission unit 403D transmits the determination result from the state determination unit 402D to the host device.

  In this way, in the heating control circuit 400D, the measured temperature Tpv when the heater output Pout reaches the normal value (standard value) Pst (at the time of reaching high temperature) is processed (detecting a difference from the target temperature Ttp). By doing so, it is possible to simply estimate the malfunction of the temperature sensor 14 and detect an abnormality such as a failure of the temperature sensor 14 at an early stage. As a result, it is possible to detect a state in which the probability of occurrence of the malfunction of the diaphragm vacuum gauge 1 is not low and improve the health of the diaphragm vacuum gauge 1 itself.

[Extension of the embodiment]
The present invention has been described above with reference to the embodiment. However, the present invention is not limited to the above embodiment. Various changes that can be understood by those skilled in the art can be made to the configuration and details of the present invention within the scope of the technical idea of the present invention.

  DESCRIPTION OF SYMBOLS 1 ... Diaphragm gauge (capacitance type pressure sensor), 10 ... Housing, 10A ... Introduction part, 11 ... Lower housing, 12 ... Upper housing, 13 ... Cover, 14 ... Temperature sensor, 20 ... Base plate, 21 ... No. 1 pedestal plate, 22 ... second pedestal plate, 30 ... sensor chip, 31 ... sensor plate, 32 ... sensor diaphragm, 33 ... sensor pedestal, 50 ... support diaphragm, 70 ... baffle, 80 ... sensor case, 90 ... heating Heaters, 400 (400A to 400D) ... heating control circuit, 401A, 401B ... closed loop temperature control unit, 401C, 401D ... open loop temperature control unit, 402A-402D ... state determination unit, 403A-403D ... alarm transmission Department.

Claims (4)

A housing having an introduction section for a fluid to be measured;
A sensor chip that detects a change in the diaphragm that is deflected by receiving the pressure of the fluid to be measured guided through the introduction unit, as a change in capacitance;
A sensor case that covers the body of the housing that houses the sensor chip;
A heater for heating the inside of the sensor case;
A temperature sensor for measuring the temperature in the sensor case;
A heater control unit for controlling the output to the heater so that the temperature in the sensor case becomes a predetermined temperature ;
A state determination unit that determines whether an abnormality has occurred based on a change in temperature in the sensor case measured by the temperature sensor and a change in output from the heater control unit to the heater. A capacitive pressure sensor,
The heater control unit
The temperature in the sensor case measured by the temperature sensor is a measured temperature Tpv, the predetermined temperature is a set temperature Tsp, and the output to the heater is closed loop so that the measured temperature Tpv is equal to the set temperature Tsp. Control
The state determination unit
It is determined whether an abnormality relating to the heater has occurred based on an output from the heater control unit to the heater when the measured temperature Tpv and the set temperature Tsp are controlled to be equal. Capacitive pressure sensor. A housing having an introduction section for a fluid to be measured;
A sensor chip that detects a change in the diaphragm that is deflected by receiving the pressure of the fluid to be measured guided through the introduction unit, as a change in capacitance;
A sensor case that covers the body of the housing that houses the sensor chip;
A heater for heating the inside of the sensor case;
A temperature sensor for measuring the temperature in the sensor case;
A heater control unit for controlling the output to the heater so that the temperature in the sensor case becomes a predetermined temperature;
A state determination unit that determines whether an abnormality has occurred based on a change in temperature in the sensor case measured by the temperature sensor and a change in output from the heater control unit to the heater. A capacitive pressure sensor,
The heater control unit
The temperature in the sensor case measured by the temperature sensor is a measured temperature Tpv, the predetermined temperature is a set temperature Tsp, and the output to the heater is closed loop so that the measured temperature Tpv is equal to the set temperature Tsp. Control
The state determination unit
A capacitance type that determines whether or not an abnormality relating to the temperature sensor has occurred based on the measured temperature Tpv when the output to the heater has reached a predetermined upper limit value. Pressure sensor. A housing having an introduction section for a fluid to be measured;
A sensor chip that detects a change in the diaphragm that is deflected by receiving the pressure of the fluid to be measured guided through the introduction unit, as a change in capacitance;
A sensor case that covers the body of the housing that houses the sensor chip;
A heater for heating the inside of the sensor case;
A temperature sensor for measuring the temperature in the sensor case;
A heater control unit for controlling the output to the heater so that the temperature in the sensor case becomes a predetermined temperature;
A state determination unit that determines whether an abnormality has occurred based on a change in temperature in the sensor case measured by the temperature sensor and a change in output from the heater control unit to the heater. A capacitive pressure sensor,
The heater control unit
The predetermined temperature is set as the target temperature Ttp, and the output to the heater is subjected to open loop control so that the temperature in the sensor case becomes the target temperature Ttp,
The state determination unit
The temperature in the sensor case measured by the temperature sensor is taken as a measured temperature Tpv, and the heater is based on the measured temperature Tpv when the output to the heater reaches a normal value corresponding to the target temperature Ttp. A capacitance type pressure sensor characterized by determining whether or not an abnormality has occurred . A housing having an introduction section for a fluid to be measured;
A sensor chip that detects a change in the diaphragm that is deflected by receiving the pressure of the fluid to be measured guided through the introduction unit, as a change in capacitance;
A sensor case that covers the body of the housing that houses the sensor chip;
A heater for heating the inside of the sensor case;
A temperature sensor for measuring the temperature in the sensor case;
A heater control unit for controlling the output to the heater so that the temperature in the sensor case becomes a predetermined temperature;
A state determination unit that determines whether an abnormality has occurred based on a change in temperature in the sensor case measured by the temperature sensor and a change in output from the heater control unit to the heater. A capacitive pressure sensor,
The heater control unit
The predetermined temperature is set as the target temperature Ttp, and the output to the heater is subjected to open loop control so that the temperature in the sensor case becomes the target temperature Ttp,
The state determination unit
The temperature in the sensor case measured by the temperature sensor is taken as a measured temperature Tpv, and the temperature based on the measured temperature Tpv when the output to the heater reaches a normal value corresponding to the target temperature Ttp. A capacitance type pressure sensor characterized by determining whether or not an abnormality relating to the sensor has occurred .

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