JP6153460B2 - Optical scanning apparatus and endoscope apparatus - Google Patents

Description

  The present invention relates to an optical scanning device and an endoscope device that scan light.

  The endoscope apparatus has a built-in optical scanning device for scanning light in two dimensions. For example, Patent Document 1 describes that incident light is scanned two-dimensionally using two movable mirrors and one fixed mirror.

Special table 2008-514777 gazette

  However, in the technique described in Patent Document 1, the direction in which light is incident on the optical scanning device and the direction in which light is emitted from the optical scanning device toward the irradiation target are changed by about 90 °. For this reason, the operator of the optical scanning device may misunderstand the position of the irradiation target. On the other hand, in an endoscope apparatus or the like, it is necessary to reduce the thickness of the optical scanning apparatus.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to suppress an increase in radial dimension and to emit light in a direction in which light enters the optical scanning device. An object of the present invention is to provide an optical scanning device and an endoscopic device that can be matched in direction.

  In the present invention, the optical scanning device includes a first movable reflector, a second movable reflector, and an optical member. The first movable reflecting portion is rotatable. The second movable reflecting portion is arranged such that the rotation axis is in a direction intersecting with the rotation axis of the first movable reflecting portion, and is arranged side by side with the first movable reflecting portion in plan view. The optical member faces both the first movable reflective portion and the second movable reflective portion. The optical member further includes a first fixed reflecting surface, a second fixed reflecting surface, a third fixed reflecting surface, and a light transmitting surface. The first fixed reflection surface is an outer surface facing the first movable reflection portion, and is located on the opposite side of the first movable reflection portion with the first movable reflection portion interposed therebetween in plan view. The first fixed reflecting surface reflects incident light toward the first movable reflecting portion. The second fixed reflective surface is disposed between the first movable reflective portion and the second movable reflective portion in plan view, and reflects incident light reflected by the first movable reflective portion toward the second movable reflective portion. To do. The third fixed reflecting surface is disposed on the opposite side of the first movable reflecting portion across the second movable reflecting portion in plan view, and the incident light reflected by the second movable reflecting portion is the second movable reflecting portion. Reflect in the direction away from. The translucent surface is located between the first fixed reflective surface and the third fixed reflective surface. The second fixed reflecting surface is located on the opposite side of the light transmitting surface and reflects incident light incident on the inside of the optical member via the light transmitting surface.

  An endoscope apparatus according to the present invention includes a light source and the above-described optical scanning device.

  According to the present invention, in the optical scanning device, it is possible to suppress an increase in the radial dimension, and it is possible to make the direction in which light enters the optical scanning device coincide with the direction in which light is emitted.

It is sectional drawing which shows the structure of the optical scanning device which concerns on 1st Embodiment. It is a top view which shows an example of the detailed structure of a 1st movable reflection part. It is sectional drawing of an optical member. It is a figure which shows an example of the manufacturing method of an optical member. It is sectional drawing which shows the structure of the optical member of the optical scanning device concerning 2nd Embodiment. It is sectional drawing which shows the structure of the optical scanning device concerning 3rd Embodiment. It is a figure which shows the structure of the endoscope apparatus which concerns on 4th Embodiment. It is sectional drawing which shows the structure of the optical scanning device which concerns on a comparative example. It is the figure which looked at the principal part of the optical scanning device shown in FIG. 8 from the upper part.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, the same reference numerals are given to the same components, and the description will be omitted as appropriate.

(First embodiment)
FIG. 1 is a cross-sectional view illustrating a configuration of an optical scanning device 10 according to the first embodiment. The optical scanning device 10 according to the present embodiment includes a first movable reflection unit 102, a second movable reflection unit 104, and an optical member 200. The first movable reflector 102 is rotatable. The second movable reflection unit 104 has a rotation axis facing the direction intersecting with the rotation axis of the first movable reflection unit 102 and is arranged side by side with the first movable reflection unit 102 in plan view. The optical member 200 faces both the first movable reflective portion 102 and the second movable reflective portion 104.

  The optical member 200 further includes a first fixed reflecting surface 202, a second fixed reflecting surface 204, a third fixed reflecting surface 206, and a light transmitting surface 208. The first fixed reflective surface 202 is an outer surface of the optical member 200 that faces the first movable reflective portion 102, and is on the opposite side of the second movable reflective portion 104 across the first movable reflective portion 102 in plan view. positioned. The first fixed reflection surface 202 reflects light incident on the optical scanning device 10 (hereinafter referred to as incident light) toward the first movable reflection unit 102. The second fixed reflective surface 204 is disposed between the first movable reflective portion 102 and the second movable reflective portion 104 in plan view, and incident light reflected by the first movable reflective portion 102 is transmitted to the second movable reflective portion. Reflects toward 104. The third fixed reflecting surface 206 is disposed on the opposite side of the first movable reflecting portion 102 across the second movable reflecting portion 104 in plan view, and the incident light reflected by the second movable reflecting portion 104 is the first. 2 Reflects in a direction away from the movable reflecting portion 104. The translucent surface 208 is located between the first fixed reflective surface 202 and the third fixed reflective surface 206. The second fixed reflection surface 204 is located on the opposite side of the light transmission surface 208 and reflects incident light incident on the inside of the optical member 200 via the light transmission surface 208. Details will be described below.

  In the present embodiment, the first fixed reflective surface 202, the first movable reflective portion 102, the second fixed reflective surface 204, the second movable reflective portion 104, and the third fixed reflective surface 206 are along one straight line in plan view. Are arranged. Further, incident light incident on the optical scanning device 10 (that is, incident light when incident on the first fixed reflection surface 202) and outgoing light emitted from the optical scanning device 10 (that is, reflected by the second fixed reflection surface 204). Incident light) is coaxial (x direction in FIG. 1). For this reason, the width of the optical scanning device 10 is reduced.

  The first movable reflector 102 and the second movable reflector 104 are formed on the same substrate 100. The substrate 100 is, for example, a silicon substrate. The first movable reflective portion 102 and the second movable reflective portion 104 are formed by processing the substrate 100. The details of the structure of the first movable reflection unit 102 and the second movable reflection unit 104 will be described later.

  The first fixed reflection surface 202, the second fixed reflection surface 204, and the third fixed reflection surface 206 are outer surfaces of one optical member 200. Specifically, the optical member 200 is formed of a translucent material, such as glass or resin. The first fixed reflective surface 202 and the third fixed reflective surface 206 are configured by the outer surfaces of the optical member 200. On the other hand, the second fixed reflection surface 204 is constituted by a surface inside the optical member 200 among the boundary between the optical member 200 and the outside. In other words, the first fixed reflective surface 202 and the third fixed reflective surface 206 reflect light that has traveled toward the optical member 200. On the other hand, the second fixed reflecting surface 204 reflects the light that has traveled inside the optical member 200.

  The first fixed reflection surface 202, the second fixed reflection surface 204, and the third fixed reflection surface 206 are all flat surfaces, but have different directions.

Specifically, the second fixed reflecting surface 204 is parallel to the substrate 100. In the example shown in the figure, the angle θ ₁ of the first fixed reflecting surface 202 with respect to the substrate 100 is equal to the angle θ ₂ of the third fixed reflecting surface 206 with respect to the substrate 100. However, the first fixed reflective surface 202 and the third fixed reflective surface 206 face opposite sides. The angles θ ₁ and θ ₂ are, for example, not less than 10 ° and not more than 30 °. However, the angles θ ₁ and θ ₂ are not limited to this range.

  The second fixed reflective surface 204 is further away from the substrate 100 than the first fixed reflective surface 202 and the third fixed reflective surface 206. The height G of the second fixed reflective surface 204 with respect to the substrate 100 is higher than the portion of the first fixed reflective surface 202 where the incident light strikes, and the height G of the second fixed reflective surface 204 It is higher than the part where the incident light hits.

  FIG. 2 is a plan view showing an example of a detailed structure of the first movable reflecting portion 102. The first movable reflector 102 includes a movable electrode 120, a frame 110, a holding member 130, and two first fixed electrodes 140. The holding member 130 has the movable electrode 120 attached to the frame 110 and serves as a rotation axis of the movable electrode 120. The two first fixed electrodes 140 are opposed to each other via the movable electrode 120 and are arranged in a direction intersecting with the rotation axis of the movable electrode 120.

  The planar shape of the movable electrode 120 is rectangular, but the side facing the first fixed electrode 140 (side extending in the Y direction in FIG. 2) has a comb shape. The frame body 110 faces each of two sides (sides extending in the X direction in FIG. 2) that do not face the first fixed electrode 140 among the four sides of the movable electrode 120. The holding member 130 is provided for each of the two sides of the movable electrode 120 facing the frame 110. Specifically, the holding member 130 is connected to the center of the side of the movable electrode 120 facing the frame 110. A line connecting the two holding members 130 is a rotation axis of the movable electrode 120. In the present embodiment, the frame 110, the movable electrode 120, and the holding member 130 are integrally formed.

  The side of the first fixed electrode 140 that faces the movable electrode 120 has a comb-teeth shape and meshes with the comb-teeth portion of the movable electrode 120. For this reason, the area of the part which the 1st fixed electrode 140 and the movable electrode 120 mutually oppose becomes large, As a result, the driving force of the movable electrode 120 becomes large.

  Further, a part of the first fixed electrode 140 extends between the movable electrode 120 and the frame 110. The tip of the extending portion faces the holding member 130.

  The movable electrode 120 of the first movable reflecting portion 102 has, for example, a mirror surface on the upper surface. This mirror surface is formed, for example, by forming a metal film (for example, an Al film) on the upper surface of the movable electrode 120. Then, by changing the angle of the movable electrode 120, the reflection angle of the light incident on the movable electrode 120 is changed. The angle of the movable electrode 120 is controlled by the control unit 300.

  The detailed structure of the second movable reflector 104 is the same as the detailed structure of the first movable reflector 102 except that the orientation in plan view is different by 90 °.

  FIG. 3 is a cross-sectional view of the optical member 200. The optical member 200 has a base member 210 and a reflective layer 220. The base member 210 is formed using a light-transmitting material such as glass or resin, and includes a surface to be the first fixed reflective surface 202, a surface to be the second fixed reflective surface 204, and a third fixed reflective surface 206. And a translucent surface 208. The reflection layer 220 is formed on the surface of the base member 210 that becomes the first fixed reflection surface 202, the surface that becomes the second fixed reflection surface 204, and the surface that becomes the third fixed reflection surface 206. The reflective layer 220 is made of a material that reflects light, for example, a metal such as Al. The reflective layer 220 is not formed on the light transmitting surface 208 of the base member 210.

  In addition, the optical member 200 has a shape in which a bottom surface lies horizontally on a quadrangular prism. The surface corresponding to the upper base of this trapezoid (a relatively short side out of two parallel sides) is a translucent surface 208, and the lower base (a relatively long side out of the two parallel sides). ) Is a translucent surface 208. Two surfaces corresponding to trapezoidal legs are a first fixed reflecting surface 202 and a third fixed reflecting surface 206.

  FIG. 4 is a diagram illustrating an example of a method for manufacturing the optical member 200. First, as shown in FIG. 4A, a triangular prism base member 210 is prepared. Next, as shown in FIG. 4B, the reflective layer 220 is formed on the entire outer surface of the base member 210 by using, for example, a vapor deposition method or a sputtering method. Next, as shown in FIG. 4C, the side of the base member 210 where the surface serving as the first fixed reflecting surface 202 and the surface serving as the third fixed reflecting surface 206 intersect is polished. By this polishing, a light transmitting surface 208 is formed. Thus, when the optical member 200 has the structure shown in FIG. 3, the optical member 200 can be easily formed.

  Next, the effect of this embodiment will be described. According to the present embodiment, the optical scanning device 10 includes the first fixed reflection surface 202, the second fixed reflection surface 204, and the third fixed reflection surface in addition to the first movable reflection portion 102 and the second movable reflection portion 104. 206. Then, the light incident on the first fixed reflection surface 202 is reflected toward the first movable reflection unit 102. The first movable reflecting unit 102 scans the light direction in the first direction. The light reflected by the first movable reflection unit 102 enters the second movable reflection unit 104 via the second fixed reflection surface 204. The second movable reflector 104 scans the light direction in the second direction. The light reflected by the second movable reflecting portion 104 is emitted to the outside of the optical scanning device 10 via the third fixed reflecting surface 206.

For this reason, the direction of the light emitted from the optical scanning device 10 can be matched with the direction of the light incident on the optical scanning device 10. That is, the optical axis of the light emitted from the optical scanning device 10 has the same direction as the optical axis of the light incident on the optical scanning device 10. Further, since the angles θ ₁ and θ ₂ of the first fixed reflective surface 202 and the third fixed reflective surface 206 with respect to the second fixed reflective surface 204 do not need to be increased, the thickness t of the optical scanning device 10 can be reduced.

  In addition, two movable reflective portions, the first movable reflective portion 102 and the second movable reflective portion 104, are used. For this reason, it is not necessary to have two rotating shafts orthogonal to each other in one movable reflecting portion. Therefore, the radial dimension of the optical scanning device 10 can be reduced by a small amount because the rotational axis is one instead of two. Moreover, since the structure of the optical scanning device 10 is simplified, the manufacturing cost can be suppressed.

  Further, in order to reduce the thickness (or diameter) t of the optical scanning device 10, the optical member 200 may be brought close to the first movable reflective portion 102 and the second movable reflective portion 104. However, when the optical member 200 is brought closer to the first movable reflective portion 102 and the second movable reflective portion 104, the optical path between the first movable reflective portion 102 and the second movable reflective portion 104 becomes shorter. When this optical path is shortened, it becomes necessary to narrow the interval between the first movable reflective portion 102 and the second movable reflective portion 104. However, there is a limit to narrowing the interval between the first movable reflective portion 102 and the second movable reflective portion 104.

  On the other hand, in the present embodiment, the height G (see FIG. 1) to the second fixed reflecting surface 204 is larger than the height h (see FIG. 1) of the first fixed reflecting surface 202. Therefore, the optical path between the first movable reflector 102 and the second movable reflector 104 can be lengthened even if the first movable reflector 102 and the second movable reflector 104 are brought close to the optical member 200. Therefore, the thickness (or diameter) t of the optical scanning device 10 can be reduced.

  This effect will be specifically described using a comparative example shown in FIG. The optical scanning device 12 according to this comparative example has the same configuration as the optical scanning device 10 shown in FIG. 1 except that the optical member 200 has only the reflection surface 209. The reflective surface 209 is parallel to the substrate 100. The reflecting surface 209 reflects the light that has traveled toward the optical member 200. FIG. 9 is a view of the main part of the optical scanning device 12 shown in FIG. 8 as viewed from above.

The incident angle of light from the light guide 500 that guides incident light to the first movable reflector 102 is θ _IN , the distance between the first movable reflector 102 and the second movable reflector 104 is L, and the substrate 100 is When the height of the reflecting surface 209 when used as a reference is g, the following formula (1) is established.

  From equation (1), it can be seen that if g is reduced, L is also reduced. On the other hand, since the 1st movable reflection part 102 and the 2nd movable reflection part 104 have a certain amount of size, there is a limit in making distance L small. For this reason, there is a limit to reducing g, that is, reducing the width (diameter) of the optical scanning device 10.

In the comparative example shown in FIG. 8, when the tilt angle of the second movable reflector 104 is θ _T and the scanning angle θ _N by the second movable reflector 104, the following equation (2) is established.

From this equation (2), it can be seen that the scanning angle θ _N by the second movable reflector 104 is proportional to the inclination angle θ _T of the second movable reflector 104.

On the other hand, when the inclination angle of the first movable reflector 102 is θ _S and the scanning angle θ _M by the first movable reflector 102 (see FIG. 9), the following equation (3) is established.

According to this equation (3), tan θ _M is proportional to tan (π / 2−θ _IN ). Therefore, the incident angle theta _IN of the light increases, the scanning angle theta _M by the first movable reflecting portion 102 becomes small.

From formula (1), in order to increase tan (π / 2−θ _IN ), it is necessary to decrease L or increase g. There is a limit to reducing L, and when g is increased, the thickness (or diameter) t of the optical scanning device 10 is increased.

For example, when θ _S is 10 degrees, θ _M is about 18.9 degrees when θ _in is 45 degrees, and θ _M is about 3.45 degrees when θ _in is 80 degrees. In this condition, when L is 2 mm, g is 1 mm.

On the other hand, the incident angle of the incident light to the first movable reflector 102 is M, the refraction angle at the light transmitting surface 208 is N, the distance from the substrate 100 to the light transmitting surface 208 is g, and the thickness of the optical member 200 is When f is f, the following equation (4) is established.

When the refractive index of air is n _A and the refractive index of the base member 210 is n _B , the following equation (5) is established.

Here, when L is 2 mm, f is 0.5 mm, n _A is 1, n _B is 1.5, and M is 45 degrees, N is 28 degrees and g is 0.73 mm. = 1 mm). For this reason, the optical scanning device 10 according to the embodiment can reduce the thickness (or diameter) t of the optical scanning device 10 as compared with the optical scanning device 12 according to the comparative example.

(Second Embodiment)
FIG. 5 is a cross-sectional view illustrating the configuration of the optical member 200 of the optical scanning device 10 according to the second embodiment. The optical scanning device 10 according to the present embodiment has the same configuration as that of the optical scanning device 10 according to the first embodiment, except that the optical member 200 has an antireflection film 230.

  The antireflection film 230 is provided on at least the light transmitting surface 208. In the example shown in this drawing, the antireflection film 230 is provided on the first fixed reflective surface 202, the second fixed reflective surface 204, the third fixed reflective surface 206, and the light transmitting surface 208 of the optical member 200. Specifically, in the first fixed reflective surface 202, the second fixed reflective surface 204, and the third fixed reflective surface 206, the antireflection film 230 is provided on the side opposite to the base member 210 through the reflective layer 220. Yes. In the light transmitting surface 208, the antireflection film 230 is provided on the base member 210.

  According to this embodiment, the same effect as that of the first embodiment can be obtained. In addition, since the antireflection film 230 is provided on the light transmitting surface 208, the light transmittance of the light transmitting surface 208 can be increased.

(Third embodiment)
FIG. 6 is a cross-sectional view illustrating a configuration of an optical scanning device 10 according to the third embodiment. The optical scanning device 10 according to the present embodiment has the light according to the first or second embodiment except that the light transmitting surface 208 includes a first light transmitting surface 208a and a second light transmitting surface 208b. The configuration is the same as that of the scanning device 10.

When the substrate 100 is used as a reference, the first light transmitting surface 208a and the second light transmitting surface 208b are inclined in different directions. Specifically, the first light transmitting surface 208 a is inclined toward the first movable reflecting portion 102, and the second light transmitting surface 208 b is inclined toward the second movable reflecting portion 104. The first transmission surface 208a and the second transmission surface 208b has the same inclination angle _{N 1} together.

  According to this embodiment, the same effect as that of the first embodiment can be obtained. Further, as will be described below, the distance g can be further reduced as compared to the first embodiment.

ただし、ｓｉｎＣの定義は以下のとおりである。

In the present embodiment, L can be expressed by the following formula (6).

However, the definition of sinC is as follows.

Then, 2 mm and L, 1 mm to f, and _{n A} 1, the _{n B} 1.5, when a 45 ° _M, the N 1 = 10 ° in g = 0.3 mm. That is, g can be further reduced as compared with the first embodiment.

(Fourth embodiment)
FIG. 7 is a diagram illustrating a configuration of an endoscope apparatus 40 according to the fourth embodiment. The endoscope apparatus 40 according to the present embodiment is a confocal optical system endoscope apparatus, and includes an optical scanning device 10, a light source 420, a dichroic mirror 430, an optical fiber 440, a light detection unit 450, an AD conversion unit 460, and An image processing unit 470 is provided. The optical scanning device 10 is accommodated in a case 410. The case 410 constitutes the distal end portion of the endoscope apparatus 40 and has a lens 412 at the distal end. The light source 420 is, for example, a laser light source.

  In the present embodiment, the optical scanning device 10 includes a substrate 100, an optical member 200, a control unit 300, and a wiring substrate 480. The structure of the optical member 200 is the same as any one of the first to third embodiments. In the example shown in this figure, the same case as in the first embodiment is shown. In the example shown in the figure, the substrate 100 is an SOI (Silicon ON Insulator) substrate. The first movable reflective portion 102 and the second movable reflective portion 104 are formed using a silicon layer on the upper side of the substrate 100. The substrate 100 is mounted on the wiring substrate 480. A control unit 300 is also mounted on the wiring board 480. The control unit 300 is a semiconductor bare chip, for example, and is mounted on the wiring substrate 480 together with the substrate 100.

  Next, the operation of the endoscope apparatus 40 will be described. The light generated by the light source 420 is reflected by the dichroic mirror 430 and enters the optical fiber 440. The optical fiber 440 emits the incident light toward the first fixed reflection surface 202 of the optical member 200. The light incident on the first fixed reflection surface 202 passes from the lens 412 to the observation target via the first movable reflection portion 102, the second fixed reflection surface 204, the second movable reflection portion 104, and the third fixed reflection surface 206. Exit toward. At this time, the control unit 300 controls the first movable reflection unit 102 and the second movable reflection unit 104, whereby the direction of light emitted toward the observation target is controlled.

  The observation object is impregnated with phosphor molecules in advance. The phosphor molecules emit fluorescence when excited by laser light. The fluorescent light is transmitted through the lens 412 via the third fixed reflection surface 206, the second movable reflection portion 104, the second fixed reflection surface 204, the first movable reflection portion 102, and the first fixed reflection surface 202. The light enters the optical fiber 440. Light incident on the optical fiber 440 passes through the dichroic mirror 430 and is converted into an electrical signal by the light detection unit 450. This electric signal is converted into a digital signal by the AD converter 460. The image processing unit 470 generates image data based on the digital signal generated by the AD conversion unit 460.

  According to this embodiment, the optical scanning device 10 has the same structure as any one of the first to third embodiments. For this reason, the optical axis of the light emitted from the endoscope apparatus 40 can be matched with the direction in which the endoscope apparatus 40 extends (that is, the direction in which the case 410 faces). Further, the diameter r of the case 410 can be reduced.

  As mentioned above, although embodiment of this invention was described with reference to drawings, these are the illustrations of this invention, Various structures other than the above are also employable. For example, the optical scanning device 10 shown in the first to third embodiments may be used in a device other than the endoscope device 40, for example, a laser projector.

DESCRIPTION OF SYMBOLS 10 Optical scanning device 12 Optical scanning device 40 Endoscope apparatus 100 Board | substrate 102 1st movable reflective part 104 2nd movable reflective part 110 Frame 120 Movable electrode 130 Holding member 140 1st fixed electrode 200 Optical member 202 1st fixed reflective surface 204 Second fixed reflective surface 206 Third fixed reflective surface 208 Translucent surface 208a First translucent surface 208b Second translucent surface 209 Reflective surface 210 Base member 220 Reflective layer 230 Antireflection film 300 Control unit 410 Case 412 Lens 420 Light source 430 Dichroic mirror 440 Optical fiber 450 Photodetector 460 AD converter 470 Image processor 480 Wiring board 500 Light guide

Claims (5)

A first movable reflector that is rotatable;
A second movable reflector that has a rotation axis facing a direction intersecting with the rotation axis of the first movable reflector, and is arranged alongside the first movable reflector in plan view;
An optical member facing both the first movable reflective portion and the second movable reflective portion;
With
The optical member is
An outer surface facing the first movable reflecting portion, which is located on the opposite side of the second movable reflecting portion with the first movable reflecting portion sandwiched in plan view, and incident light is incident on the first movable reflecting portion A first fixed reflecting surface that reflects toward the
The first movable reflecting portion is disposed between the first movable reflecting portion and the second movable reflecting portion in a plan view, and reflects the incident light reflected by the first movable reflecting portion toward the second movable reflecting portion. 2 fixed reflective surfaces;
The second movable reflector is disposed on the opposite side of the first movable reflector in plan view, and the incident light reflected by the second movable reflector is separated from the second movable reflector. A third fixed reflecting surface that reflects in the direction;
With
The optical member further includes a translucent surface positioned between the first fixed reflective surface and the third fixed reflective surface,
The second fixed reflection surface is located on a side opposite to the light transmission surface, and reflects the incident light incident on the inside of the optical member via the light transmission surface. The optical scanning device according to claim 1,
The optical scanning device, wherein the incident light when entering the first fixed reflecting surface and the incident light reflected by the third fixed reflecting surface are coaxial. The optical scanning device according to claim 1 or 2,
The optical member is
A base member formed of a translucent material;
A reflective layer formed on a surface of the base member to be the first fixed reflective surface, the second fixed reflective surface, and the third fixed reflective surface;
An optical scanning device comprising: The optical scanning device according to claim 1,
The translucent surface is
A first translucent surface through which the incident light reflected by the first movable reflector is transmitted toward the inside of the optical member;
A second translucent surface through which the incident light reflected by the second fixed reflective surface is transmitted toward the outside of the optical member;
With
The first translucent surface is inclined toward the first movable reflecting portion;
The optical scanning device, wherein the second light transmitting surface is inclined toward the second movable reflecting portion. A light source;
An optical scanning device that scans the light incident from the light source and extracts reflected light reflected by the observation target;
With
The optical scanning device includes:
A first movable reflector that is rotatable;
A second movable reflector that has a rotation axis facing a direction intersecting with the rotation axis of the first movable reflector, and is arranged alongside the first movable reflector in plan view;
An optical member facing both the first movable reflective portion and the second movable reflective portion;
With
The optical member is
An outer surface facing the first movable reflecting portion, which is located on the opposite side of the second movable reflecting portion with the first movable reflecting portion sandwiched in plan view, and incident light is incident on the first movable reflecting portion A first fixed reflecting surface that reflects toward the
The outer surface facing the second movable reflective portion, disposed between the first movable reflective portion and the second movable reflective portion in plan view, and the input reflected by the first movable reflective portion. A second fixed reflecting surface that reflects incident light toward the second movable reflecting portion;
The second movable reflector is disposed on the opposite side of the first movable reflector in plan view, and the incident light reflected by the second movable reflector is separated from the second movable reflector. A third fixed reflecting surface that reflects in the direction;
With
The optical member further includes a translucent surface positioned between the first fixed reflective surface and the third fixed reflective surface,
The second fixed reflecting surface is an endoscope apparatus that is located on a side opposite to the light transmitting surface and reflects the incident light incident on the inside of the optical member via the light transmitting surface.

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