JP6128036B2 - Film thickness measuring device - Google Patents

Description

  The present invention relates to a film thickness measuring apparatus, for example, a film thickness measuring apparatus that measures the thickness of a belt-shaped film that is continuously conveyed.

  In the manufacturing process of the secondary battery, an electrode material is formed by applying an active material to the back and front surfaces of a film-like material. At this time, the electrode material is continuously formed in a strip shape. And in order to homogenize the quality of the secondary battery, there is a step of forming a uniform thickness by sandwiching and pressing the electrode material with a roller. In this process, since the thickness of the film-like electrode material is measured and feedback control is performed to adjust the thickness, precise measurement of the thickness of the film is important. As an apparatus for measuring the thickness of a thin material, for example, there is one described in Patent Document 1. According to this apparatus, the first distance determining means for measuring the distance from the surface of the sheet is attached at a position above the surface of the sheet. And the 2nd distance determination means which measures the distance with the back surface of a sheet | seat is attached to the position below the back surface of a sheet | seat. That is, the first distance determining means and the second distance determining means are attached so as to face each other when there is no sheet, and the thickness is measured so as to sandwich the sheet. A sensor for measuring a separation value between the first distance determining unit and the second distance determining unit facing each other is further provided. With such a configuration, the apparatus calculates the thickness of the sheet using the measurement results of the first distance determination unit and the second distance determination unit, and is calculated based on the measured value of the separation value of the sensor. Temperature compensation for sheet thickness is performed.

Special Table 2002-533661

According to the apparatus disclosed in Patent Document 1, it is possible to compensate for the influence of the temperature change in the measurement environment of the sheet thickness on the measurement result. However, if the sensor for measuring the distance is continuously measured, the measurement accuracy may deteriorate due to the influence of self-heating. In the apparatus according to Patent Document 1, the sensor measures a separation value between the first distance determining unit and the second distance determining unit facing each other, and a measurement result due to the effect of self-heating of the sensor included in the distance determining unit. It is not possible to correct the deterioration. Therefore, when the apparatus according to Patent Document 1 is applied to the manufacturing process of the electrode material of the secondary battery, there is a problem that the film thickness may not be generated accurately and uniformly.
An object of the present invention is to provide a film thickness measuring apparatus that accurately measures the film thickness by correcting the influence on the measurement result due to the heat generated by the sensor itself that measures the film thickness.

  The film thickness measurement apparatus according to one aspect of the present invention measures the thickness of a continuous film that is transported, and in the middle of a transporting means that transports the film and a transporting path that is transported from the transporting means. , A variable roller that tensions the film and fluctuates the film up and down, a measuring unit that measures a distance from the surface of the film, and a measuring unit 6 based on the measurement result of the distance that is fluctuated by the variable roller Film thickness calculating means for correcting the output value and calculating the thickness of the film.

  With this configuration, the present invention can be applied to feedback control for measuring the thickness of a belt-like film continuously conveyed by a conveying means with a measuring means with high accuracy and making the film thickness uniform. it can. That is, according to the present invention, the film that is continuously measured, which is the object to be measured, is moved up and down by a predetermined amount by the variable roller. Then, the measuring means measures the distance from the membrane that moves up and down by a specified amount. The film thickness calculation means calculates and corrects the influence of self-heating from the fluctuation amount and the measured fluctuation amount. It is possible to calculate the thickness of the film in which the influence of self-heating is corrected, and as a result, it is possible to reduce the influence on the measurement result due to the heat generated when the measuring means outputs continuously.

  According to the present invention, it is possible to accurately measure the film thickness by correcting the influence on the measurement result due to the heat generated by the sensor itself for measuring the film thickness.

It is a perspective view of the film thickness measuring device concerning a 1st embodiment. It is the schematic which showed the measuring method of the thickness of an electrode material. It is the graph which showed the change of the output value by the self-heating of a distance sensor. It is the figure which measured the vertical motion by a fluctuation | variation roller, and showed the output value. It is the figure which showed the result which correct | amended the output value of the distance sensor from the vertical motion by a fluctuation | variation roller. It is the perspective view which showed the fluctuation | variation roller. It is sectional drawing which showed a mode that the electrode material moved up and down with the fluctuation | variation roller. It is the graph which showed the amount of thermal expansion of Invar material and iron. It is the figure which showed a mode that a guide roller thermally contracted and expanded. It is the perspective view which showed the measurement means. It is the block diagram which showed the internal structure of the film thickness measuring apparatus. It is the flowchart which showed operation | movement of the film thickness measuring apparatus. It is sectional drawing which showed the film thickness measuring apparatus concerning 2nd Embodiment. It is the figure which showed the measurement means of the film thickness measuring apparatus. It is the block diagram which showed the internal structure of the film thickness measuring apparatus. It is the flowchart which showed operation | movement of the film thickness measuring apparatus. It is the figure which showed the modification of the guide roller. It is the front view which showed the modification of the mechanism which moves an electrode material up and down. It is the front view which showed the modification of the measurement means. It is the front view which showed the other modification of the measurement means.

Hereinafter, an embodiment of a film thickness measuring device according to the present invention will be described with reference to the drawings.
[First Embodiment]
As shown in FIG. 1, the film thickness measuring device 100 is a device that measures the thickness of a belt-like film continuously conveyed, for example, the electrode material 5 of a secondary battery. The film thickness measuring apparatus 100 conveys the electrode material 5 by winding the electrode material 5 fed by the feed roller 1a with the take-up roller 1b. The electrode material 5 in the middle of conveyance is brought into a tensioned state by the guide rollers 3a and 4a, and the thickness of the electrode material 5 brought into the tensioned state is measured by the measuring means 6. The film thickness measuring apparatus 100 adjusts the thickness of the electrode material 5 by adjusting the separation distance between the rolling rollers 2 a and 2 b based on the measured thickness of the electrode material 5.

  The electrode material 5 is formed by applying an active material to the front and back of a film-like material, and is wound around a feeding roller 1a. When the feeding roller 1a is rotated clockwise around the central axis, the electrode material 5 is unwound. The unwound electrode material 5 is wound up by the winding roller 1b rotating clockwise around the center time. By rotating the winding roller 1b in this manner, the electrode material 5 is continuously conveyed from the feeding roller 1a to the winding roller 1b. The feeding roller 1a and the take-up roller 1b constitute a conveying means 1. The conveying means 1 is attached to a frame or the like fixed to a floor surface (not shown).

  Sag is generated in the electrode material 5 located between the feeding roller 1a and the take-up roller 1b. In order to remove this slack, guide rollers 3a and 4a are disposed in the middle of the transport path, and the electrode material 5 being transported is tensioned. In order to measure the thickness of the electrode material 5, the measuring means 6 is attached to a position where the tensioned state of the electrode material 5 can be measured. The measuring means 6 is attached so that two distance sensors 6a and 6b that simultaneously measure the distance from the front surface of the electrode material 5 on the front surface and the back surface face each other. As the distance sensors 6a and 6b, for example, a coaxial confocal sensor, a laser sensor, an infrared sensor, an ultrasonic sensor, or the like can be used. If the distance from the distance sensor 6a to the surface of the electrode material 5 and the distance from the distance sensor 6b to the back surface of the electrode material 5 are measured, the thickness of the electrode material 5 can be calculated.

As shown in FIG. 2, assuming that the distance from the front surface is L1 and the distance from the back surface is L2, the thickness t of the electrode material 5 is L as the distance from the respective tips of the distance sensors 6a and 6b. Then, it calculates | requires by Formula (1).
t = L− (L1 + L2) (1)
Based on the thickness t of the electrode material 5 obtained here, the distance between the rolling rollers 2a and 2b is adjusted, and the electrode material 5 unwound from the feeding roller 1a is sandwiched and rolled to obtain the thickness of the electrode material 5 Adjust the height. The rolling means 2 is constituted by the rolling rollers 2a and 2b.

  As shown in FIG. 3, when the temperature rises, the output value of the distance sensor decreases. That is, if the distance sensors 6a and 6b continue to measure a substantially constant distance during distance measurement, the distance sensors 6a and 6b themselves generate heat, and the measurement result deteriorates due to the influence.

  This is because the resistance values of the circuit elements and the like inside the distance sensors 6a and 6b change due to heat generation. In addition, the measurement result also deteriorates when the temperature outside the distance sensors 6a and 6b changes. The external temperature change changes the temperature of the entire electronic component, but the internal heat generation of the distance sensors 6a and 6b generates a part of the electronic element. However, it is substantially difficult to correct the output value by measuring the temperature of each electronic element. The influence of the heat generation on the output value is larger (several μm) than the standard value (± 0.4 μm) of the film thickness variation of the electrode material 5.

  As shown in FIG. 4A, the distances that vary with time are measured in the distance sensors 6a and 6b by changing the surface position of the electrode material 5 by moving the guide rollers 3a and 4a up and down by a certain predetermined amount for a certain period. Let The vertical movement of the guide rollers 3a and 4a fluctuates in a predetermined cycle with a predetermined amount. The amount of vertical movement is a specified amount, which is sufficiently larger than the fluctuation range of the film thickness of the electrode material 5.

  As shown in FIG. 4B, the deviation of the output value due to the temperature that appears when the fluctuation amount is subtracted from the output value of the distance sensors 6a and 6b is corrected.

  As shown in FIG. 5, guide rollers 3a and 4a are attached by an eccentric shaft 3f disposed at an eccentric position between the support rollers 3b and 3c. The eccentric shaft 3f is inserted through the guide roller 3a, and the guide roller 3a rotates about the eccentric shaft 3f. When the support rollers 3b and 3c are rotated about the central axes 3d and 3e, the guide roller 3a revolves around the central axes 3d and 3e with the eccentric distance as the radius. As a result, the guide roller 3a can move up and down while rotating. The guide roller 3a, the support rollers 3b and 3c, and the central shafts 3d and 3e constitute the variable roller 3. The variable roller 4 has the same configuration as described above.

  As FIG. 6 shows, the fluctuation | variation roller 3 and the fluctuation | variation roller 4 rotate synchronously, and the electrode material 5 can be moved up and down in a tension | tensile_strength state. The variable rollers 3 and 4 are attached to the frame (not shown). The eccentric distance of the variable rollers 3 and 4 is, for example, 0.5 μm. Invar material can be used as the material of the variable rollers 3 and 4.

  As shown in FIG. 7, the invar material is a low expansion material and is made of a material that is not easily distorted even if the temperature changes, and its thermal deformation is very small. When the invar material is used, even if the temperature of the environment such as the factory where the film thickness measuring device 100 is used changes, thermal deformation of the variable rollers 3 and 4 is less likely to occur, and the thickness of the electrode material 5 can be measured. The influence can be reduced. For this reason, the measurement accuracy of the film thickness measuring apparatus 100 is improved as compared with the case where iron is used as the material.

  The linear expansion coefficient of iron is about 12.1 μm / ° C./m (a 1 m material deforms 12.1 μm at a time). For example, when there is a temperature change of about 5 to 15 ° C. day and night in a factory, a 10 cm jig is deformed by about 6 μm to 18 μm.

  As shown in FIGS. 8A and 8B, for example, when iron is used as the material of the guide rollers 3a and 4a, the material is deformed due to the influence of temperature change. In particular, the corner portions of the guide rollers 3a and 4a are easily heated and radiate heat, which adversely affects the measurement of the thickness of the electrode material 5. Due to the influence of this deformation, it is very difficult to measure the thickness of the electrode material 5 with ultrahigh accuracy in the factory. However, when the invar material is used as a member, the thickness measurement of the electrode material 5 can be performed with high accuracy in the factory. The invar material can also be used as a material for the measuring means 6.

  As shown in FIG. 9, the measuring means 6 is attached so that the distance sensors 6a and 6b face each other. When an invar material is used as the material of the support members 6c, 6d, and 6e that support the distance sensors 6a and 6b, variation in the distance between the distance sensors 6a and 6b due to thermal expansion is suppressed, and the thickness of the electrode material 5 is measured. The error can be reduced. That is, an invar material can be used for the support members 6d and 6e to which the distance sensors 6a and 6b are respectively attached, and the support member 6c that supports the support members 6d and 6e. The support member 6c is attached to the frame (not shown), and the measuring means 6 is fixed.

  In addition to the temperature change, there is an influence of vibration as a factor causing a measurement error of the thickness of the electrode material 5 in the factory. The vibration in the factory propagates to the measuring means 6 and gives an error to the measurement result of the thickness of the electrode material 5. The vibration in the factory is transmitted from the floor surface to the frame and from the frame to the support member 6c. In addition, vibrations generated by the conveying means 1, rolling means 2, variable rollers 3, 4 and the like are also transmitted from the frame to the support member 6c. In order to reduce vibration transmitted to the distance sensors 6a and 6b, vibration-proof materials 6f and 6g are attached between the support member 6c and the support member 6d and between the support member 6c and the support member 6e, respectively. As a result, vibrations transmitted to the support member 6c are absorbed by the vibration isolating materials 6f and 6g, and the vibrations are hardly transmitted to the distance sensors 6a and 6b.

  Vibrations that cannot be absorbed by the vibration isolating materials 6f and 6g are transmitted to the support members 6d and 6e, and give vibrations to the distance sensors 6a and 6b. In order to reduce the adverse effect on the measurement result of the thickness of the electrode material 5 due to the vibration, strain sensors 7a and 7b are attached to the support members 6d and 6e. For example, strain gauges can be used as the strain sensors 7a and 7b. The distortion of the support members 6d and 6e due to vibration is detected by the strain sensors 7a and 7b, and the measurement results of the distance sensors 6a and 6b are corrected based on the detection results. The correction means 7 corrects the measurement result using the output values of the strain sensors 7a and 7b. The attachment positions of the strain sensors 7a and 7b are not limited to the illustrated positions. If the supporting members 6c, 6d, and 6e have sufficiently high rigidity and are not affected by vibration, the vibration isolating materials 6f and 6g and the strain sensors 7a and 7b may not be attached to the measuring unit 6.

  Next, an outline of the internal configuration of the film thickness measuring apparatus 100 will be described.

  As shown in FIG. 10, the measuring unit 6 outputs the measured distance value between the electrode material 5 and the distance sensors 6 a and 6 b to the film thickness calculating unit 8. The film thickness calculation means 8 calculates the thickness of the electrode material 5 based on the above formula (1). At this time, the film thickness calculation unit 8 corrects the calculation result of the thickness of the electrode material 5 based on the value output from the correction unit 7. The film thickness calculation means 8 outputs the calculation result of the thickness of the electrode material 5 to the control means 9. The control means 9 adjusts the rolling means 2 based on the thickness of the electrode material 5 to adjust the thickness of the electrode material 5. In addition, the control unit 9 controls the conveyance speed of the conveyance unit 1 and the rotation period of the variable rollers 3 and 4 associated therewith. The conveying speed of the conveying means 1 is adjusted by adjusting the rotation of the winding roller 1b.

  Next, the operation of the film thickness measuring apparatus 100 will be described.

  As shown in FIG. 11, the control means 9 rotates the winding roller 1 b of the conveying means 1 and starts conveying the electrode material (film) 5. The measuring means 6 measures the distance from the surface of the electrode material 5 (S100). That is, the distance sensors 6 a and 6 b measure the distance from the front and back surfaces of the electrode material 5. The measuring means 6 outputs the measured distance value between the electrode material 5 and the distance sensors 6 a and 6 b to the film thickness calculating means 8.

  The film thickness calculation means 8 calculates the thickness of the electrode material 5 using equation (1) based on the input distance measurement result from the surface (S110). The correction means 7 detects distortion due to vibration generated in the support members 6d and 6e by the strain sensors 7a and 7b. The film thickness calculation means 8 corrects the thickness of the electrode material 5 calculated in S110 based on the detected output values of the strain sensors 7a and 7b (S130).

  The control means 9 adjusts the thickness of the electrode material 5 by adjusting the rolling means 2 based on the thickness of the electrode material 5 calculated in S130 (S140). The control means 9 controls the rotation cycle of the variable rollers 3 and 4 to move the electrode material 5 up and down at a predetermined timing, and the film thickness calculation means 8 moves the distance sensor 6a from a predetermined amount (up and down movement) known in advance. , 6b is corrected. (S150). The control means 9 determines an input for stopping the apparatus (S160). If there is an input to stop the apparatus, the control means 9 ends the process (S160: Yes). If there is no input for stopping the apparatus, the control means 9 returns to S100 and continues the process (S160: No).

  According to the film thickness measuring apparatus 100 described above, the electrode member 5 is moved up and down by the variable rollers 3 and 4 to cause the measuring means 6 to measure the distance that fluctuates over time, and the output due to self-heating of the distance sensors 6a and 6b. The measurement result of the thickness of the electrode material 5 can be improved by correcting the value. Further, the film thickness measuring apparatus 100 uses the low expansion material for the variable rollers 3 and 4 and the supporting members 6c, 6d and 6e constituting the measuring means 6, so that the electrode material can be used even if the ambient temperature changes. The adverse effect on the measurement result of the thickness of 5 can be reduced, and the measurement result can be highly accurate. That is, an expensive building such as a temperature-controlled room is not required, and the thickness of the electrode material 5 can be measured with high accuracy under the environment of a general air conditioning facility. And the film thickness measuring apparatus 100 reduces the vibration of distance sensor 6a, 6b by using the vibration isolator 6f, 6g for the measurement means 6, and makes the measurement result of the thickness of the electrode material 5 highly accurate. Can do. Furthermore, the thickness of the electrode material 5 calculated by the correction means 7 can be corrected, and the deterioration of measurement accuracy due to the influence of vibration can be reduced.

[Second Embodiment]
In the first embodiment, the film thickness measuring apparatus 100 causes the film thickness calculating means 8 to calculate the thickness of the electrode material 5 by measuring the distance from the front and back of the electrode material 5. On the other hand, in the second embodiment, the film thickness measuring apparatus 200 measures the thickness of the electrode material 5 by a method different from that of the first embodiment. In the second embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, the same names are used for members having the same roles, and the description of the overlapping parts is omitted as appropriate.

  As shown in FIG. 12, in the film thickness measuring device 200, unlike the film thickness measuring device 100, the variable roller 4 is omitted. In the film thickness measuring apparatus 200, the guide roller 3a puts the electrode material 5 in a tension state.

As shown in FIG. 13, the distance L1 from the surface of the electrode material 5 that is in tension on the guide roller 3a is measured by the sensor 15a. Then, the distance L2 from the surface of the guide roller 3a is measured by the distance sensor 15b attached at the same height as the distance sensor 15a. Thereby, the thickness t of the electrode material 5 is calculated | required by the following formula | equation (2).
t = L2-L1 (2)
Then, in order to reduce the influence of the self-heating of the distance sensors 15a and 15b, the support rollers 3b and 3c are rotated around the central axes 3d and 3e as in the first embodiment.

  The distance sensors 15a and 15b are attached to the support member 15c. The support member 15c is provided on the support members 15d and 15e via the vibration isolation materials 15f and 15g. The support members 15d and 15e are fixed to a frame (not shown) that supports the variable roller 3. In this way, the distance sensor 15a, 15b, the support members 15c, 15d, 15e, and the vibration isolating materials 15f, 15g constitute the measuring means 15. A strain sensor 16a is attached to the support member 15c. The distortion sensor 16a constitutes the correction means 16. Each support member is formed using an invar material.

  As the guide roller 3a moves up and down, the distance from the surface of the electrode material 5 also moves up and down (see FIG. 4A). When Expression (2) is used, the thickness of the electrode material 5 is calculated based on the measured value of the distance from the surface of the electrode material 5 that fluctuates and the distance from the surface of the guide roller 3a.

  Next, an outline of the internal configuration of the film thickness measuring apparatus 200 will be described.

  As shown in FIG. 14, the measuring unit 15 outputs the measured distance between the electrode material 5 and the distance sensor 15 a and the distance between the guide roller 3 a and the distance sensor 15 b to the film thickness calculating unit 17. The film thickness calculation means 17 calculates the thickness of the electrode material 5 based on the above equation (2). At this time, the film thickness calculation unit 17 corrects the calculation result of the thickness of the electrode material 5 based on the value output from the correction unit 16. The film thickness calculation means 17 outputs the calculation result of the thickness of the electrode material 5 to the control means 9. The control means 9 adjusts the rolling means 2 based on the thickness of the electrode material 5 to adjust the thickness of the electrode material 5. In addition, the control unit 9 controls the conveyance speed of the conveyance unit 1 and the rotation period of the variable roller 3 associated therewith. The conveying speed of the conveying means 1 is adjusted by adjusting the rotation of the winding roller 1b.

  Next, the operation of the film thickness measuring apparatus 200 will be described.

  As shown in FIG. 15, the control unit 9 rotates the winding roller 1 b of the transport unit 1 and starts transporting the electrode material (film) 5. The measuring means 15 measures the distance from the surface of the electrode material 5 and the distance from the guide roller 3a (S200). That is, the distance sensor 15a measures the distance from the surface of the electrode material 5, and the distance sensor 15b measures the distance from the surface of the guide roller 3a. The measuring means 15 outputs the measured distance between the electrode material 5 and the distance sensor 15 a and the distance from the surface of the guide roller 3 a to the film thickness calculating means 17.

  The film thickness calculation means 17 calculates the thickness of the electrode material 5 using the formula (2) based on the input distance measurement result from the surface (S210). The correction unit 16 detects distortion caused by vibration generated in the support members 15d and 15e by the strain sensor 16a. The film thickness calculating means 17 corrects the thickness of the electrode material 5 calculated in S210 based on the detected output value of the strain sensor 16a (S230).

  The control means 9 adjusts the thickness of the electrode material 5 by adjusting the rolling means 2 based on the thickness of the electrode material 5 calculated in S230 (S240). The control means 9 controls the rotation period of the variable roller 3 at a predetermined timing to move the electrode material 5 up and down, and the film thickness calculation means 8 outputs the output of the distance sensor 15a from a predetermined amount (up and down movement) known in advance. Correct the value. (S250). The control means 9 determines an input for stopping the apparatus (S260). When there is an input to stop the apparatus, the control means 9 ends the process (S260: Yes). If there is no input for stopping the apparatus, the control means 9 returns to S100 and continues the process (S260: No).

  According to the film thickness measuring apparatus 200 described above, the electrode material 5 is tensioned by one variable roller 3, so that the apparatus configuration can be simplified.

  Note that the present invention is not limited to the above-described embodiment, and can be changed as appropriate without departing from the spirit of the present invention.

  As shown in FIG. 16, an elliptical roller 20 may be used instead of the variable rollers 3 and 4 used in the first and second embodiments. The elliptic roller 20 is preferably used particularly when the measuring speed of the measuring means 6 and 15 is sufficiently high. When the elliptical roller 20 is used, the electrode material 5 moves up and down in conjunction with the rotation of the elliptical roller 20. Since the elliptical roller 20 rotates in accordance with the conveyance of the electrode material 5, a mechanism for controlling the elliptical roller 20 becomes unnecessary, and the apparatus configuration can be simplified.

  As shown in FIG. 17, the guide rollers 21 and 22 may be moved up and down by wedges 23 and 24 instead of the variable rollers 3 and 4 used in the first and second embodiments. In other words, wedges 23 and 24 are provided opposite to each other so as to slide toward and away from the lower portion of the frame 25 that supports the guide rollers 21 and 22. Then, the lower corners of the frame 25 are lifted up or down on the slopes of the wedges 23 and 24 to move the guide rollers 21 and 22 up and down. These materials can be Invar materials. With the above configuration, the electrode material 5 can be moved up and down.

  In the first and second embodiments, the thickness of the electrode material 5 is measured by a pair of distance sensors or one distance sensor. In these measurement methods, the thickness of a part of the electrode material 5 is measured.

  As shown in FIG. 18, in order to measure the film thickness distribution of the electrode material 5, for example, a plurality of distance sensors 30a and 30b are attached to the support members 30d and 30e in the rotation axis direction of the variable rollers 3 and 4, respectively. The support members 30d and 30e constitute the attachment measuring means 30 so as to be U-shaped with respect to the support member 30c. Then, a plurality of distances from the front and back surfaces of the electrode material 5 are measured by the measuring means 30. Thereby, distribution of the thickness of the strip-shaped electrode material 5 continuously conveyed can be measured continuously.

  In the measurement means 30 described above, a plurality of distance sensors are used.

  As shown in FIG. 19, in the measuring means 32, the support members 32c, 32d and 32e formed in a U-shape are sufficiently rigid, and the distance sensors 32a and 32b are moved so as not to generate vibrations. When the distance between the distance sensors 32a and 32b is not changed by vibration, for example, the distance sensors 32a and 32b are traversed along the major axis direction of the support members 32d and 32e, and the film thickness distribution of the electrode material 5 is achieved. (However, since the distance sensors 32a and 32b measure the surface of the electrode material 5 in a zigzag shape, the thickness of the electrode material 5 cannot be fully compensated). As a result, the thickness distribution of the electrode material 5 can be measured without increasing the number of distance sensors.

DESCRIPTION OF SYMBOLS 1 ... Conveyance means 1a ... Feeding roller 1b ... Winding roller 2 ... Rolling means 2a ... Rolling roller 2b ... Rolling roller 3, 4 ... Fluctuating roller 3a ... Guide roller 3b ... Support roller 3c ... Support roller 3d ... Center shaft 3f ... Eccentricity Axis 5 ... Electrode material (film) 6 ... Measuring means 6a, 6b ... Distance sensor 6c ... Support member 6d ... Support member 6e ... Support member 6f ... Vibration isolator 7 ... Correction means 7a, 7b ... Strain sensor 8 ... Film thickness calculation Means 9 ... Control means 15 ... Measurement means 15a ... Sensor 15a ... Distance sensor 15b ... Distance sensor 15c ... Support member 15d ... Support member 15f ... Vibration isolator 16 ... Strain sensor 16 ... Correction means 16a ... Strain sensor 17 ... Film thickness calculation Means 20 ... Elliptical roller 21, 22 ... Guide roller 23, 24 ... Wedge 25 ... Frame 30 ... Measuring means 30a, 30b ... Distance sensor Support 30c ... Support member 30d ... Support member 32 ... Measuring means 32a, 32b ... Distance sensor 32c ... Support member 32d ... Support member 100 ... Thickness measuring device 200 ... Thickness measuring device L ... Distance L1 ... Distance L2 ... Distance t ... Thickness of electrode material

Claims (1)

A film thickness measuring device that measures the thickness of a continuous belt-shaped film,
Conveying means for conveying the film;
In the middle of the conveyance path conveyed from the conveyance means, the variable roller that tensions the film and fluctuates the film up and down,
Measuring means for measuring the distance from the surface of the membrane;
A film thickness calculation unit that corrects an output value of the measurement unit based on a measurement result of the distance that varies by the variable roller, and calculates a thickness of the film;
Film thickness measuring device.

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