JP6127973B2 - IMAGING DEVICE AND IMAGING ELEMENT FOR IMAGING DEVICE - Google Patents

Description

  The present invention relates to an imaging device that captures a three-dimensional image and an imaging device for the imaging device.

  A technique is known in which a pair of light beams passing through a pair of left and right exit pupil regions of a photographic lens are incident on different photodiodes, and a stereoscopic image is formed based on output signals of these photodiodes. A microlens (so-called on-chip lens) is provided for each photodiode on the light incident side of these photodiodes, and a light beam is guided to each photodiode by each microlens.

However, in the above configuration, since the direction of the light beam collected by the lens changes depending on the incident angle to the microlens, it is difficult to allow only the light beam from a specific direction to be incident on the photodiode. There is a problem of impairing the feeling.
An object of the present invention is to provide an imaging device and an imaging device that can create a suitable stereoscopic image.

  According to the first aspect of the present invention, the imaging device receives a first lens and a second light beam respectively passing through the photographing lens and the first region and the second region of the pupil of the photographing lens. A plurality of first photoelectric conversion units and a plurality of second photoelectric conversion units on an imaging surface, and a plurality of first photoelectric conversion units and second photoelectric conversion units arranged alternately along a predetermined direction; The first reflective film, the second reflective film, and the first incident blocking film disposed in front of each of the first photoelectric conversion units, and disposed in front of each of the plurality of second photoelectric conversion units. A third reflecting film, a fourth reflecting film, and a second incident blocking film; and a first reflecting film, a second reflecting film, a third reflecting film, a fourth reflecting film, and a first reflecting film inside, A transparent medium that covers the imaging surface of the imaging unit so that the incident blocking film and the second incident blocking film are embedded, and the output of the plurality of first photoelectric conversion units. A stereoscopic image creation unit that creates a stereoscopic image based on the signal and output signals of the plurality of second photoelectric conversion units, the first reflective film reflects the first light flux in the direction of the photographic lens, The second reflection film reflects the first light beam reflected by the first reflection film toward the first photoelectric conversion unit, and the first incident blocking film causes the second light beam to enter the first photoelectric conversion unit. The third reflecting film reflects the second light flux toward the photographing lens, and the fourth reflecting film reflects the second light flux reflected by the third reflecting film to the second photoelectric conversion unit. The second incident blocking film blocks the first light flux from entering the second photoelectric conversion unit.
  According to the second aspect of the present invention, in the imaging device according to the first aspect, the second reflective film and the first incident blocking film are configured by the first common thin film, and the first common thin film. The back surface serves as a second reflective film, the front surface serves as a first incident blocking film, and the fourth reflective film and the second incident blocking film are composed of a second common thin film, The second common thin film preferably has a back surface serving as a fourth reflective film and a front surface serving as a second incident blocking film.
  According to the third aspect of the present invention, in the imaging device according to the first aspect, the first photoelectric conversion unit, the first reflection film, the second reflection film, and the first incident blocking arranged in front of the first photoelectric conversion unit. The film constitutes the first pixel, and the second photoelectric conversion unit and the third reflection film, the fourth reflection film, and the second incident blocking film arranged in front of the second photoelectric conversion unit include the second pixel. In the first pixel and the second pixel that are configured and are adjacent to each other, it is preferable that the first reflective film and the third reflective film are connected.
  According to the fourth aspect of the present invention, in the imaging device according to the first aspect, the planned focal plane of the imaging lens is located substantially on the surface of the first reflecting film with respect to the first light flux, and the second light flux. Is preferably located substantially on the surface of the third reflective film.
  According to the fifth aspect of the present invention, the imaging device for the imaging device receives a first luminous flux and a second luminous flux respectively passing through the first area and the second area of the pupil of the photographing lens, respectively. A plurality of first photoelectric conversion units and a plurality of second photoelectric conversion units on an imaging surface, and a plurality of first photoelectric conversion units and second photoelectric conversion units arranged alternately along a predetermined direction; The first reflective film, the second reflective film, and the first incident blocking film disposed in front of each of the first photoelectric conversion units, and disposed in front of each of the plurality of second photoelectric conversion units. A third reflecting film, a fourth reflecting film, and a second incident blocking film; and a first reflecting film, a second reflecting film, a third reflecting film, a fourth reflecting film, and a first reflecting film inside, And a transparent medium that covers the imaging surface of the imaging unit so that the second blocking film is embedded, and the first reflecting film is the first reflecting film. The light beam is reflected in the direction of the photographing lens, the second reflection film reflects the first light beam reflected by the first reflection film toward the first photoelectric conversion unit, and the first incident blocking film is the second reflection film. Is prevented from entering the first photoelectric conversion unit, the third reflective film reflects the second light flux toward the photographing lens, and the fourth reflective film is reflected by the third reflective film. The second light beam is reflected toward the second photoelectric conversion unit, and the second incident blocking film blocks the first light beam from entering the second photoelectric conversion unit.
  According to the sixth aspect of the present invention, in the image pickup device for the image pickup apparatus according to the fifth aspect, the second reflective film and the first incident blocking film are configured by the first common thin film, The common thin film has a back surface serving as a second reflective film, a front surface serving as a first incident blocking film, and the fourth reflective film and the second incident blocking film are a second common thin film. It is preferable that the second common thin film has a rear surface serving as a fourth reflective film and a front surface serving as a second incident blocking film.
  According to a seventh aspect of the present invention, in the imaging device for the imaging device according to the fifth aspect, the first photoelectric conversion unit, the first reflective film, the second reflective film, and the The first incident blocking film constitutes the first pixel, and the second photoelectric conversion unit, and the third reflecting film, the fourth reflecting film, and the second incident blocking film disposed in front of the second photoelectric conversion unit, In the first pixel and the second pixel that constitute two pixels and are adjacent to each other, it is preferable that the first reflective film and the third reflective film are connected.
  According to the eighth aspect of the present invention, in the imaging device for the imaging device according to the fifth aspect, the planned focal plane of the imaging lens is located substantially on the surface of the first reflective film for the first light flux, It is preferable that the second light beam is located substantially on the surface of the third reflective film.
  According to the ninth aspect of the present invention, the imaging apparatus includes a plurality of first light receiving units that receive the first light flux that passes through the first exit pupil region of the photographing lens, and the second exit pupil region of the photographing lens. An imaging unit having a plurality of second light receiving units that receive the second light beam passing therethrough on the imaging surface, a first reflecting surface that is provided closer to the object side than the first light receiving unit and reflects the first light beam, and first A second reflecting surface that reflects the first light beam reflected by the reflecting surface toward the first light receiving unit; a third reflecting surface that is provided closer to the object side than the second light receiving unit and reflects the second light beam; A film-like member having a fourth reflecting surface that reflects the second light beam reflected by the third reflecting surface toward the second light receiving unit, output signals of the plurality of first light receiving units, and a plurality of second light receiving units. And a three-dimensional image generation unit that generates a three-dimensional image using the output signal, and the film-like member is provided closer to the object side than the first light receiving unit. A fifth reflecting surface that reflects the second light beam so that the second light beam does not enter the first light receiving unit and the object side of the second light receiving unit are provided, and the first light beam does not enter the second light receiving unit. And a sixth reflecting surface that reflects the first light flux.
  According to the tenth aspect of the present invention, the imaging apparatus includes a plurality of first light receiving units that receive the first light flux that passes through the first exit pupil region of the photographing lens, and the second exit pupil region of the photographing lens. An imaging unit having a plurality of second light receiving units that receive the second light beam passing therethrough on the imaging surface, a first reflecting surface that is provided closer to the object side than the first light receiving unit and reflects the first light beam, and first A second reflecting surface that reflects the first light beam reflected by the reflecting surface toward the first light receiving unit; a third reflecting surface that is provided closer to the object side than the second light receiving unit and reflects the second light beam; A film-like member having a fourth reflecting surface that reflects the second light beam reflected by the third reflecting surface toward the second light receiving unit, output signals of the plurality of first light receiving units, and a plurality of second light receiving units. And a three-dimensional image generation unit that generates a three-dimensional image using the output signal, and the film-like member is provided closer to the object side than the first light receiving unit. The first light-absorbing surface that absorbs the second light beam so that the second light beam does not enter the first light-receiving unit, and the first light beam is incident on the second light-receiving unit. A second absorption surface that absorbs the first light flux.
  According to the eleventh aspect of the present invention, the imaging apparatus includes a plurality of first light receiving portions that receive the first light flux that passes through the first exit pupil region of the photographing lens, and the second exit pupil region of the photographing lens. An imaging unit having a plurality of second light receiving units that receive the second light beam passing therethrough on the imaging surface, a first reflecting surface that is provided closer to the object side than the first light receiving unit and reflects the first light beam, and first A second reflecting surface that reflects the first light beam reflected by the reflecting surface toward the first light receiving unit; a third reflecting surface that is provided closer to the object side than the second light receiving unit and reflects the second light beam; A film-like member having a fourth reflecting surface that reflects the second light beam reflected by the third reflecting surface toward the second light receiving unit, output signals of the plurality of first light receiving units, and a plurality of second light receiving units. And a three-dimensional image generation unit that generates a three-dimensional image using the output signal, and the film-like member is provided closer to the object side than the first light receiving unit. A first light-shielding portion that shields the second light flux so that the second light flux does not enter the first light-receiving portion, and an object side of the second light-receiving portion, and the first light flux is incident on the second light-receiving portion. And a second light-shielding portion that shields the first light flux.
  According to the twelfth aspect of the present invention, the imaging apparatus includes a plurality of first light receiving units that receive the first light flux that passes through the first exit pupil region of the photographing lens, and the second exit pupil region of the photographing lens. An imaging unit having a plurality of second light receiving units that receive the second light beam passing therethrough on the imaging surface, a first reflecting surface that is provided closer to the object side than the first light receiving unit and reflects the first light beam, and first A second reflecting surface that reflects the first light beam reflected by the reflecting surface toward the first light receiving unit; a third reflecting surface that is provided closer to the object side than the second light receiving unit and reflects the second light beam; A fourth reflecting surface that reflects the second light beam reflected by the third reflecting surface toward the second light receiving unit, and a second light beam that is provided closer to the object side than the first light receiving unit is incident on the first light receiving unit. The fifth reflecting surface that reflects the second light flux and the object side of the second light receiving section are provided so that the first light flux is incident on the second light receiving section. And a film member having a sixth reflection surface for reflecting the first light beam so as not.
  According to the thirteenth aspect of the present invention, the imaging device reflects the first light flux that reflects the first light flux that passes through a part of the exit pupil region, and the first light flux that is reflected by the first reflection face. A second reflecting surface, a light receiving portion for receiving the light reflected by the second reflecting surface, and a second light passing through an exit pupil region different from the first light flux, provided on the opposite side of the second reflecting surface. A third reflecting surface for reflecting the second light flux so that the light flux does not enter the light receiving portion.
  According to the fourteenth aspect of the present invention, the imaging device reflects the first light flux that reflects the first light flux that passes through a part of the exit pupil region and the first light flux that is reflected by the first reflection face. A second reflecting surface, a first light receiving portion for receiving the light reflected by the second reflecting surface, and a first light receiving portion that is provided on the opposite side of the second reflecting surface and passes through an exit pupil region different from the first light flux. A second reflecting surface that reflects the second light beam, a second reflecting surface that reflects the second light beam, and a second reflecting surface that is reflected by the fourth reflecting surface. A fifth reflecting surface that reflects the light beam, a second light receiving portion that receives the light reflected by the fifth reflecting surface, and an opposite side of the fifth reflecting surface, and the first light beam is incident on the second light receiving portion. And a sixth reflecting surface for reflecting the first light flux.
  According to the fifteenth aspect of the present invention, the imaging device according to the fourteenth aspect preferably includes a three-dimensional image generation unit that generates a three-dimensional image using the output of the first light receiving unit and the output of the second light receiving unit. .

  According to the imaging apparatus and imaging element of the present invention, it is possible to create a suitable stereoscopic image.

It is a block diagram which shows schematic structure of the electronic camera which concerns on the 1st Embodiment of this invention. It is an optical path diagram explaining the principle of stereoscopic image formation in the electronic camera of the first embodiment. It is sectional drawing which expands and shows the pixel of the image pick-up element for electronic cameras of 1st Embodiment. It is a fragmentary top view which shows the pixel arrangement | sequence of the image pick-up element for electronic cameras of 1st Embodiment. It is a fragmentary sectional view which illustrates the manufacturing process of the first half of the image sensor for electronic cameras of a 1st embodiment. It is a fragmentary sectional view which illustrates the latter half manufacturing process of the image sensor for electronic cameras of a 1st embodiment. It is sectional drawing which expands and shows the pixel of the image pick-up element for electronic cameras of 2nd Embodiment. It is a fragmentary top view which shows the pixel arrangement | sequence of the image pick-up element for electronic cameras of 2nd Embodiment.

An imaging apparatus (for example, an electronic camera) according to an embodiment of the present invention will be described with reference to FIGS.
-First embodiment-
<Configuration>
As shown in FIG. 1, an electronic camera 100 includes a photographing lens 1, an image sensor 2, an image processing unit 3, a RAM 4, an LCD monitor 5, a CPU 6, a nonvolatile memory 7, a card interface (I / F) 8, a communication interface (I / F) 9, and an operation member 13.

  The image processing unit 3, the RAM 4, the LCD monitor 5, the CPU 6, the nonvolatile memo 7, the card interface 8 and the communication interface 9 are connected via a bus 10.

  The photographic lens 1 is composed of a plurality of lens groups including a zoom lens and a focusing lens (not shown), and forms an image of the subject H on the imaging surface of the imaging device 2. In order to simplify FIG. 1, the photographing lens 1 is shown as a single lens.

  The imaging device 2 is configured by a CMOS image sensor or the like in which a plurality of pixels are two-dimensionally arranged, and each pixel has a photodiode having a photoelectric conversion function on its light receiving surface. The image sensor 2 photoelectrically converts an image of a subject light beam that has passed through the photographing lens 1 and outputs an analog electrical signal. This electric signal is converted into a digital signal and input to the image processing unit 3 as digital image data.

Here, the principle of capturing a three-dimensional image based on the image of the subject H formed by the photographing lens 1 will be described.
As shown in FIG. 2, the light beam emitted from one point O of the subject H passes through exit pupil regions 101 and 102 that are a pair of exit pupil regions of the photographing lens 1. The first light beam L1 that has passed through the exit pupil region 101 and the second light beam L2 that has passed through the exit pupil region 102 are incident on the imaging surface of the image sensor 2.

  The image sensor 2 has a plurality of two types of pixels, a first pixel 11 and a second pixel 12, respectively. The first pixel 11 guides the first light beam L1 to the photodiode, but acts to prevent the second light beam L2 from entering the photodiode. In contrast, the second pixel 12 guides the second light beam L2 to the photodiode, but acts to prevent the first light beam L1 from entering the photodiode.

  In FIG. 2, only the first pixel 11 and the second pixel 12 in the vicinity of the optical axis AX of the photographing lens 1 are illustrated, but actually, the first pixel 11, the second pixel 12, 2 are alternately arranged in the vertical direction of FIG. 2, and such pixel rows are also arranged in a direction perpendicular to the paper surface to form a two-dimensional array as a whole.

  FIG. 3 is an enlarged cross-sectional view showing the first pixel 11 and the second pixel 12 adjacent thereto. The first pixel 11 has a two-layer structure of a transparent layer 11e in which the first reflective film 11a and the second reflective film 11b are embedded, and a semiconductor substrate 11f in which a photodiode 11d and a circuit are provided. The first reflective film 11a and the second reflective film 11b are metal films having high reflectivity, such as aluminum, and also serve as a charge readout wiring of a photodiode or a GND wiring of a circuit. The transparent layer 11e is made of silicon oxide or transparent resin. The first reflective film 11a has a flat plate shape extending in a direction perpendicular to the paper surface in the drawing. The second reflecting film 11b has a flat plate shape extending in a direction perpendicular to the paper surface in the drawing, and has a sloped portion 111b whose tip portion is inclined upward. Between the first reflective film 11a and the second reflective film 11b, a slit-like opening 110 extending in a direction perpendicular to the paper surface in the drawing is formed. The photodiode 11d photoelectrically converts the light incident on the light receiving surface 113 and generates an electrical signal corresponding to the intensity of the incident light.

  The first reflective film 11a is arranged so that the surface side (the upper side in the figure) functions as the reflective surface 111, and this reflective surface 111 becomes the intended focal plane of the first light beam L1. In the second reflective film 11b, the back surface side (lower side in the figure) of the inclined portion 111b functions as the reflective surface 112.

  The first light beam L1 that passes through the exit pupil region 101 of the photographing lens 1 and enters the first pixel 11 obliquely from the left is first reflected to the photographing lens 1 side by the reflecting surface 111 of the first reflective film 11a. After passing through the opening 110 and further reflected by the reflecting surface 112 of the second reflecting film 11b, it enters the light receiving surface 113 of the photodiode 11d. On the other hand, the second light beam L2 that passes through the exit pupil region 102 of the photographing lens 1 and enters the first pixel 11 obliquely from the right is prevented from entering the opening 110 by the inclined portion 111b of the second reflective film 11b. The reflected light beam L11. Since the reflected light beam L11 is emitted to the outside of the first pixel 11, it cannot enter the light receiving surface 113 of the photodiode 11d. As a result, the first pixel 11 receives only the first light beam L1 that has passed through the exit pupil region 101.

  Similarly to the first pixel 11, the second pixel 12 has a transparent layer 12e in which a third reflective film 12a and a fourth reflective film 12b are embedded, and a semiconductor substrate 12f in which a photodiode 12d and a circuit are provided. And a two-layer structure. The third reflective film 12a and the fourth reflective film 12b are metal films having high reflectivity, such as aluminum, and also serve as a charge readout wiring of a photodiode or a GND wiring of a circuit. The transparent layer 12e is made of silicon oxide or transparent resin. The third reflective film 12a has a flat plate shape extending in a direction perpendicular to the paper surface in the drawing, and the fourth reflective film 12b has a flat plate shape extending in a direction perpendicular to the paper surface in the drawing, and the tip portion thereof is It has the inclined part 121b inclined upward. Between the third reflective film 12a and the fourth reflective film 12b, a slit-shaped opening 120 extending in a direction perpendicular to the paper surface in the drawing is formed. The photodiode 12d photoelectrically converts the light incident on the light receiving surface 123 to generate an electrical signal corresponding to the intensity of the incident light.

  The third reflective film 12a is arranged so that the surface side (the upper side in the figure) functions as the reflective surface 121, and this reflective surface 121 becomes the planned focal plane of the second light flux L2. In the fourth reflective film 12b, the back surface side (lower side in the figure) of the inclined portion 121b functions as the reflective surface 122.

  The second light beam L2 that passes through the exit pupil region 102 of the photographing lens 1 and enters the second pixel 12 obliquely from the right is first reflected by the reflecting surface 121 of the third reflective film 12a toward the photographing lens 1 side. After passing through the opening 120 and further reflected by the reflecting surface 122 of the fourth reflecting film 12b, it enters the light receiving surface 123 of the photodiode 12d. On the other hand, the first light beam L1 that passes through the exit pupil region 101 of the photographing lens 1 and enters the second pixel 12 obliquely from the left is prevented from entering the opening 120 by the inclined portion 121b of the fourth reflective film 12b. The reflected light beam L12. Since this reflected light beam L12 is emitted to the outside of the second pixel 12, it cannot enter the light receiving surface 123 of the photodiode 12d. As a result, the second pixel 12 receives only the second light beam L2 that has passed through the exit pupil region 102.

As described above, the first pixel 11 and the second pixel 12 have a mirror-symmetric structure on the left and right with respect to the pixel boundary surface, and the first light beam L1 and the second light beam L2 having different incident angles. It works in reverse. Therefore, the first image data is created based on the output signal of the first pixel group including the plurality of first pixels 11, and based on the output signal of the second pixel group including the plurality of second pixels 12. If the second image data is created and these image data are combined, a stereoscopic image can be obtained.
Since the first pixel 11 and the second pixel 12 have a bilaterally symmetric structure, the first reflective film 11a and the third reflective film 12a may be connected between adjacent pixels. The second reflective film 11b and the fourth reflective film 12b may be connected.

  FIG. 4 is a partial plan view of the image sensor 2 in which a plurality of first pixels 11 and a plurality of second pixels 12 are two-dimensionally arranged. In the first row, the second row, and the third row from the top in the row direction (left-right direction in the figure), the first pixels 11 and the second pixels 12 are alternately arranged. Further, from the left in the column direction (vertical direction in the drawing), only the second pixels 12 are continuously arranged in the first column, and only the first pixels 11 are continuously arranged in the second column. In the third column, only the second pixels 12 are continuously arranged. These arrangements are repeated both in the column direction and in the row direction. Of course, the arrangement of the openings 110 and 120 is similarly repeated. Note that the opening 110 and the opening 120 do not actually appear in the plan view, but are shown for convenience in FIG. 4 in order to show their existence.

  An image processing unit 3 shown in FIG. 1 generates digital image data based on an output signal from the image sensor 2, and performs various image processing (color interpolation processing, gradation conversion processing, contour enhancement) on the digital image data. Processing, white balance adjustment processing, etc.). Further, stereoscopic image data composed of the first image data and the second image data described above is generated.

  The RAM 4 is used as a work area when the CPU 6 executes a program in addition to temporarily storing digital image data in the previous process and the subsequent process when the image processing unit 3 performs image processing. The RAM 4 is a volatile memory in which stored contents disappear when the power is turned off. The LCD monitor 5 is constituted by a liquid crystal panel or the like, and displays an image, an operation icon, a menu screen, and the like according to an instruction from the CPU 6. The nonvolatile memory 7 is configured by a flash memory or the like, holds the stored contents without being lost when the power is turned off, and stores a program executed by the CPU 6.

  The CPU 6 controls the operation performed by the electronic camera 100 by executing a program stored in the nonvolatile memory 7. The card interface 8 has a connector (not shown), and a storage medium M such as a memory card is connected to the connector. The card interface 8 writes data to the connected storage medium M and reads data from the storage medium M. The storage medium M is configured by a memory card incorporating a semiconductor memory, a hard disk drive, or the like.

The communication interface 9 performs communication using, for example, a TCP / IP protocol with an external device connected to a connector (not shown). Through this communication, a command or data from an external device is received, or image data stored in the storage medium M is transmitted to the external device.
The operation member 13 includes a release button, a menu switch, and the like. The operation member 13 sends an operation signal corresponding to each operation such as a photographing operation, a mode switching operation, and an icon selection operation to the CPU 6.

The operation of the electronic camera 100 configured as described above will be described. The following operations are controlled by the CPU 6.
The “stereo shooting mode” is set by rotating a mode switching dial (not shown) constituting the operation member 13. When a shutter release button (not shown) constituting the operation member 13 is pressed, the focusing lens (not shown) of the photographic lens 1 moves to the in-focus position based on the focus position detection calculation result, and based on the exposure calculation result. The image sensor 2 accumulates electric charges for a predetermined time and executes photographing of the subject.

  The image sensor 2 outputs an output signal of the first pixel group including the plurality of first pixels 11 and an output signal of the second pixel group including the plurality of second pixels 12 to the image processing unit 3. . The image processing unit 3 creates the first image data based on the output signal of the first pixel group, and creates the second image data based on the output signal of the second pixel group. Stereoscopic image data including two pieces of image data that have passed through the pupil region is generated.

The stereoscopic image data is stored in the storage medium M as an image file. The captured image that can be viewed stereoscopically based on the stereoscopic image data is displayed on the LCD monitor 5, so that the user can check the stereoscopic image displayed on the LCD monitor 5.
These stereoscopic image data can be transmitted to an external device via the communication interface 9.

Next, the manufacturing process of the image sensor 2 will be described with reference to FIGS. Here, the second pixel 12 will be described as an example.
As shown in FIG. 5A, a transparent layer 120e is formed on a semiconductor substrate 12f provided with a photodiode 12d, an electric circuit, and the like, and then, as shown in FIG. The reflective film 12a is formed on the surface of the transparent layer 120e by vapor deposition or the like.
As shown in FIG. 5C, the left side of the third reflective film 12a is removed by etching, and then, as shown in FIG. 5D, the remaining third reflective film 12a is covered. The transparent layer 121e made of the same material as the transparent layer 120e is formed.

As shown in FIG. 6A, an inclined surface 1200a is formed on the upper surface 1200 of the transparent layer 121e by isotropic etching.
As shown in FIG. 6B, a fourth reflective film 12b is formed on the upper surface 1200 of the transparent layer 121e by vapor deposition or the like.
As shown in FIG. 6 (c), the right side of the fourth reflective film 12b is removed by etching, and then the remaining fourth reflective film 12b is covered as shown in FIG. 6 (d). A protective transparent layer 122e is formed. Since the transparent layers 120e, 121e, and 122e are the same substance, the three layers are combined to form the transparent layer 12e. As a result, the third reflective film 12a and the fourth reflective film 12b become the transparent layer 12e. It becomes a buried structure.
The first pixel 11 is also manufactured by the same manufacturing process as that of the second pixel 12 described above, and all the pixels of the image sensor 2 are manufactured simultaneously.

The electronic camera 100 according to the first embodiment has the following operational effects.
(1) The imaging device 2 receives the first light beam L1 that has passed through the exit pupil region 101 of the photographic lens 1 by the first pixel 11, and the second light beam L2 that has passed through the exit pupil region 102 is the second. The pixel 12 is configured to receive light. Further, the image processing unit 3 generates stereoscopic image data based on the output signals of the plurality of first pixels 11 and the plurality of second pixels 12. Therefore, a stereoscopic image can be created with a single lens system.
(2) In the image pickup device 2, the first pixel 11 and the second pixel 12 do not have a microlens, and guide the light beam to the photodiode by reflection of the reflection film. Only the light beam from a specific direction can enter the photodiode without changing. Therefore, it is possible to acquire a stereoscopic image with excellent stereoscopic effect.
(3) Even when the incident angle of the first light beam L1 or the second light beam L2 to the image pickup device 2 is changed, it is guided to the light receiving surface 113 or 123 by changing the inclination angle of the inclined portion 111b or 121b. be able to.

-Second Embodiment-
The electronic camera image sensor 2 of the first embodiment described above has a structure in which each pixel has a rectangular opening 110, but the electronic camera image sensor 2A of the second embodiment is an electronic camera. Compared with the image pickup device 2 for an image, the shape of the opening and the arrangement and shape of the reflection film are different. Except for such differences in pixel structure, the configuration and function of the image sensor 2A are the same as those of the image sensor 2, and the electronic camera on which the image sensor 2A is mounted is also the electronic device of the first embodiment. The same as the camera 100.

FIG. 7 is an enlarged cross-sectional view showing the first pixel 21 and the second pixel 22 adjacent thereto. The first pixel 21 has a two-layer structure of a transparent layer 21e in which a first reflective film 21a and a second reflective film 21b are embedded, and a semiconductor substrate 21f in which a photodiode 21d and the like are provided. The first reflective film 21a extends in a direction perpendicular to the paper surface in the drawing, has an opening 213, and the vicinity of the opening 213 is an inclined portion 211a inclined downward in the drawing. The surface side (upper side in the figure) of the inclined portion 211a is the reflecting surface 211, and is arranged so as to be a planned focal plane of the first light flux L1.
The second reflective film 21b extends in a direction perpendicular to the paper surface in the figure, and has a half-ring shaped opening 210 as shown in FIG. 8, and on the right side of the opening 210 of the second reflective film 21b, There is a reflective surface 212 on the back side and a recess 211b on the front side.
The first reflective film 21a and the second reflective film 21b are also used as a charge readout wiring of a photodiode or a GND wiring of a circuit.

  The first light beam L1 that passes through the exit pupil region 101 of the photographing lens 1 and enters the first pixel 21 obliquely from the left passes through the opening 210 and is reflected by the reflecting surface 211 of the first reflecting film 21a. After being reflected to the side and further reflected by the reflecting surface 212 of the second reflecting film 21b, the light passes through the opening 213 and enters the light receiving surface 214 of the photodiode 21d. On the other hand, the second light beam L2 that passes through the exit pupil region 102 of the photographing lens 1 and enters the first pixel 21 obliquely from the right enters the concave portion 211b of the second reflective film 21b, and the concave portion 211b opens the aperture 210. Is blocked from being incident on the light receiving surface, and becomes a reflected light beam L11, which cannot enter the light receiving surface 214 of the photodiode 21d. As a result, the first pixel 21 receives only the first light beam L1 that has passed through the exit pupil region 101.

Similarly to the first pixel 21, the second pixel 22 includes a transparent layer 22e in which the third reflective film 22a and the fourth reflective film 22b are embedded, a semiconductor substrate 22f provided with a photodiode 22d, and the like. It has a two-layer structure. The third reflective film 22a extends in the direction perpendicular to the paper surface in the drawing, has an opening 223, and the vicinity of the opening 223 is an inclined portion 221a inclined downward in the drawing. The surface side (upper side in the figure) of the inclined portion 221a is a reflecting surface 221, and is arranged so as to be a planned focal plane of the second light flux L2.
The fourth reflective film 22b extends in a direction perpendicular to the paper surface in the figure, and has a semi-ring shaped opening 220 as shown in FIG. 8, and on the left side of the opening 220 of the fourth reflective film 22b, There is a reflective surface 222 on the back side and a recess 221b on the front side.
The third reflection film 22a and the fourth reflection film 22b are also used as the charge readout wiring of the photodiode or the GND wiring of the circuit.

  The second light beam L2 that passes through the exit pupil region 102 of the photographing lens 1 and enters the second pixel 22 obliquely from the right passes through the opening 220 and is reflected by the reflecting surface 221 of the third reflecting film 22a. After being reflected to the side and further reflected by the reflecting surface 222 of the fourth reflecting film 22b, the light passes through the opening 223 and enters the light receiving surface 224 of the photodiode 22d. On the other hand, the first light beam L1 that passes through the exit pupil region 101 of the photographing lens 1 and enters the second pixel 22 obliquely from the left enters the concave portion 221b of the fourth reflective film 22b, and the concave portion 221b opens the aperture 220. Is blocked from being incident on the light receiving surface, and becomes a reflected light beam L12, which cannot enter the light receiving surface 224 of the photodiode 22d. As a result, the second pixel 22 receives only the second light beam L2 that has passed through the exit pupil region 102.

Thus, the first pixel 21 and the second pixel 22 have a mirror-symmetric structure on the left and right with respect to the pixel boundary surface, and with respect to the first light flux L1 and the second light flux L2 having different incident angles. It works in reverse. Therefore, the first image data is created based on the output signal of the first pixel group including the plurality of first pixels 21, and based on the output signal of the second pixel group including the plurality of second pixels 22. If the second image data is created and these image data are combined, a stereoscopic image can be obtained.
Since the first pixel 21 and the second pixel 22 have a bilaterally symmetric structure, the first reflective film 21a and the third reflective film 22a may be connected between adjacent pixels. The second reflective film 21b and the fourth reflective film 22b may be connected.

  FIG. 8 is a partial plan view of the image sensor 2A in which a plurality of first pixels 21 and a plurality of second pixels 22 are two-dimensionally arranged. In the first row, the second row, and the third row from the top in the row direction (left-right direction in the figure), the first pixels 21 and the second pixels 22 are alternately arranged. Further, from the left in the column direction (vertical direction in the figure), only the second pixels 22 are continuously arranged in the first column, and only the first pixels 21 are continuously arranged in the second column. In the column, only the second pixels 22 are continuously arranged. These arrangements are repeated both in the column direction and in the row direction. Of course, the arrangement of the openings 210 and 220 is similarly repeated. As illustrated, the opening 210 is a half-ring shaped opening bent to the left, and the opening 220 is a half-ring shaped opening bent to the right.

  The image sensor 2 </ b> A outputs the output signal of the first pixel group including the plurality of first pixels 21 and the output signal of the second pixel group including the plurality of second pixels 22 to the image processing unit 3. . The image processing unit 3 creates the first image data based on the output signal of the first pixel group, and creates the second image data based on the output signal of the second pixel group. Stereoscopic image data composed of two pieces of image data is generated.

  The electronic camera 100 of the present embodiment also has the same operational effects as the electronic camera 100 of the first embodiment. Furthermore, since the openings 210 and 220 are half ring-shaped openings, the incident angle is relatively small. It is suitable for taking in a light beam, that is, taking in a light beam from just above the surface of the image sensor.

Modifications of the first and second embodiments are as follows.
(1) In the pixel arrangement of the above embodiment, as illustrated in FIGS. 4 and 8, the first pixels 11 and the second pixels 12 are alternately arranged in the row direction, and in the column direction. The two-dimensional arrangement in which the same pixels are continuously arranged is replaced with a two-dimensional arrangement in which the first pixels 11 and the second pixels 12 are alternately arranged in both the row direction and the column direction. Also good.
(2) As illustrated in FIG. 3, in the first pixel 11, the second reflective film 11 b has the incident blocking surface on the front surface side and the reflective surface 112 on the back surface side. A member dedicated to preventing incidence may be separately provided in front of 11b. A member dedicated to preventing incidence may be separately provided in front of the fourth reflective film 12b of the second pixel 12 as well. Furthermore, a member dedicated to blocking incidence may be separately provided for the second reflective film 21b of the first pixel 21 and the fourth reflective film 22b of the second pixel 22 illustrated in FIG.
(3) The first to fourth reflective films 11a, 11b, 12a, and 12b illustrated in FIG. 3 and the first to fourth reflective films 21a, 21b, 22a, and 22b illustrated in FIG. Although it also serves as a charge readout wiring, a GND wiring, or the like, it may be provided exclusively without serving as all or part of these reflective films.

  Further, the electronic camera 100 may be a compact type or a lens exchange type camera in which the photographing lens 1 can be exchanged with the camera body. The present invention is not limited to the embodiments described above as long as the characteristics are not impaired.

The disclosure of the following priority application is hereby incorporated by reference.
Japanese Patent Application 2011-195135 (filed September 7, 2011)

Claims (15)

A taking lens,
The imaging surface includes a plurality of first photoelectric conversion units and a plurality of second photoelectric conversion units that respectively receive the first light beam and the second light beam that respectively pass through the first region and the second region of the pupil of the photographing lens. An imaging unit in which the first photoelectric conversion unit and the second photoelectric conversion unit are alternately arranged along a predetermined direction;
A first reflective film, a second reflective film, and a first incident blocking film disposed in front of each of the plurality of first photoelectric conversion units;
A third reflective film, a fourth reflective film, and a second incident blocking film disposed in front of each of the plurality of second photoelectric conversion units;
The first reflecting film, the second reflecting film, the third reflecting film, the fourth reflecting film, the first incident blocking film, and the second incident blocking film are embedded therein. A transparent medium covering the imaging surface of the imaging unit,
A stereoscopic image creation unit that creates a stereoscopic image based on the output signals of the plurality of first photoelectric conversion units and the output signals of the plurality of second photoelectric conversion units;
The first reflective film reflects the first light beam in the direction of the photographing lens, and the second reflective film converts the first light beam reflected by the first reflective film to the first photoelectric conversion. The first incident blocking film prevents the second light flux from entering the first photoelectric conversion unit, and
The third reflective film reflects the second light flux toward the photographing lens, and the fourth reflective film converts the second light flux reflected by the third reflective film to the second photoelectric conversion. An image pickup apparatus that reflects toward a portion, and wherein the second incident blocking film prevents the first light flux from entering the second photoelectric conversion portion. The imaging device according to claim 1,
The second reflective film and the first incident blocking film are configured by a first common thin film, and the back surface of the first common thin film serves as the second reflective film, and the surface thereof. Serves as the first incident blocking film,
The fourth reflective film and the second incident blocking film are constituted by a second common thin film, and the back surface of the second common thin film serves as the fourth reflective film, and the surface thereof. An imaging device that serves as the second incident blocking film. The imaging device according to claim 1,
The first photoelectric conversion unit and the first reflection film, the second reflection film, and the first incident blocking film arranged in front of the first photoelectric conversion unit constitute a first pixel,
The second photoelectric conversion unit and the third reflection film, the fourth reflection film, and the second incident blocking film disposed in front of the second photoelectric conversion unit constitute a second pixel,
The imaging device in which the first reflective film and the third reflective film are connected to each other in the first pixel and the second pixel adjacent to each other. The imaging device according to claim 1,
The planned focal plane of the imaging lens is located substantially on the surface of the first reflective film for the first light flux, and is located substantially on the surface of the third reflective film for the second light flux. Imaging device. A plurality of first photoelectric conversion units and a plurality of second photoelectric conversion units that respectively receive the first light beam and the second light beam that respectively pass through the first region and the second region of the pupil of the photographing lens are provided on the imaging surface. An imaging unit in which the first photoelectric conversion unit and the second photoelectric conversion unit are alternately arranged along a predetermined direction;
A first reflective film, a second reflective film, and a first incident blocking film disposed in front of each of the plurality of first photoelectric conversion units;
A third reflective film, a fourth reflective film, and a second incident blocking film disposed in front of each of the plurality of second photoelectric conversion units;
The first reflecting film, the second reflecting film, the third reflecting film, the fourth reflecting film, the first incident blocking film, and the second incident blocking film are embedded therein. And a transparent medium that covers the imaging surface of the imaging unit,
The first reflective film reflects the first light beam in the direction of the photographing lens, and the second reflective film converts the first light beam reflected by the first reflective film to the first photoelectric conversion. The first incident blocking film prevents the second light flux from entering the first photoelectric conversion unit, and
The third reflective film reflects the second light flux toward the photographing lens, and the fourth reflective film converts the second light flux reflected by the third reflective film to the second photoelectric conversion. An image sensor for an image pickup apparatus that reflects toward the part and the second incident blocking film prevents the first light flux from entering the second photoelectric conversion unit. In the imaging device for imaging devices according to claim 5,
The second reflective film and the first incident blocking film are configured by a first common thin film, and the back surface of the first common thin film serves as the second reflective film, and the surface thereof. Serves as the first incident blocking film,
The fourth reflective film and the second incident blocking film are constituted by a second common thin film, and the back surface of the second common thin film serves as the fourth reflective film, and the surface thereof. Is an imaging device for an imaging device that serves as the second incident blocking film. In the imaging device for imaging devices according to claim 5,
The first photoelectric conversion unit and the first reflection film, the second reflection film, and the first incident blocking film arranged in front of the first photoelectric conversion unit constitute a first pixel,
The second photoelectric conversion unit and the third reflection film, the fourth reflection film, and the second incident blocking film disposed in front of the second photoelectric conversion unit constitute a second pixel,
An imaging device for an imaging apparatus in which the first reflective film and the third reflective film are connected in the first pixel and the second pixel adjacent to each other. In the imaging device for imaging devices according to claim 5,
The planned focal plane of the imaging lens is located substantially on the surface of the first reflective film for the first light flux, and is located substantially on the surface of the third reflective film for the second light flux. An image sensor for an imaging device. A plurality of first light receiving portions that receive a first light flux that passes through a first exit pupil area of the photographing lens, and a plurality of second light that receives a second light flux that passes through a second exit pupil area of the photographing lens. An imaging unit having a light receiving unit on the imaging surface;
A first reflecting surface that is provided closer to the object than the first light receiving unit and reflects the first light beam, and reflects the first light beam reflected by the first reflecting surface toward the first light receiving unit. The second reflecting surface, the third reflecting surface provided on the object side of the second light receiving unit and reflecting the second light beam, and the second light beam reflected by the third reflecting surface. A film-like member having a fourth reflecting surface that reflects toward the two light receiving parts;
In an imaging apparatus comprising a stereoscopic image generation unit that generates a stereoscopic image using output signals of the plurality of first light receiving units and output signals of the plurality of second light receiving units .
The film-like member is provided closer to the object side than the first light receiving unit, and a fifth reflecting surface that reflects the second light beam so that the second light beam does not enter the first light receiving unit; An imaging apparatus comprising: a sixth reflecting surface that is provided closer to the object side than the two light receiving portions and reflects the first light flux so that the first light flux does not enter the second light receiving portion. A plurality of first light receiving portions that receive a first light flux that passes through a first exit pupil area of the photographing lens, and a plurality of second light that receives a second light flux that passes through a second exit pupil area of the photographing lens. An imaging unit having a light receiving unit on the imaging surface;
A first reflecting surface that is provided closer to the object than the first light receiving unit and reflects the first light beam, and reflects the first light beam reflected by the first reflecting surface toward the first light receiving unit. The second reflecting surface, the third reflecting surface provided on the object side of the second light receiving unit and reflecting the second light beam, and the second light beam reflected by the third reflecting surface. A film-like member having a fourth reflecting surface that reflects toward the two light receiving parts;
In an imaging apparatus comprising a stereoscopic image generation unit that generates a stereoscopic image using output signals of the plurality of first light receiving units and output signals of the plurality of second light receiving units .
The film-like member is provided closer to the object side than the first light receiving portion, and absorbs the second light flux so that the second light flux does not enter the first light receiving portion; An image pickup apparatus comprising: a second absorption surface that is provided closer to the object side than the two light receiving portions and absorbs the first light flux so that the first light flux does not enter the second light receiving portion. A plurality of first light receiving portions that receive a first light flux that passes through a first exit pupil area of the photographing lens, and a plurality of second light that receives a second light flux that passes through a second exit pupil area of the photographing lens. An imaging unit having a light receiving unit on the imaging surface;
A first reflecting surface that is provided closer to the object than the first light receiving unit and reflects the first light beam, and reflects the first light beam reflected by the first reflecting surface toward the first light receiving unit. The second reflecting surface, the third reflecting surface provided on the object side of the second light receiving unit and reflecting the second light beam, and the second light beam reflected by the third reflecting surface. A film-like member having a fourth reflecting surface that reflects toward the two light receiving parts;
In an imaging apparatus comprising a stereoscopic image generation unit that generates a stereoscopic image using output signals of the plurality of first light receiving units and output signals of the plurality of second light receiving units .
The film-shaped member is provided closer to the object side than the first light receiving part, and the first light shielding part shields the second light flux so that the second light flux does not enter the first light receiving part; An imaging apparatus comprising: a second light-shielding unit that is provided closer to the object than the two light-receiving units and shields the first light beam so that the first light beam does not enter the second light-receiving unit. A plurality of first light receiving portions that receive a first light flux that passes through a first exit pupil area of the photographing lens, and a plurality of second light that receives a second light flux that passes through a second exit pupil area of the photographing lens. An imaging unit having a light receiving unit on the imaging surface;
A first reflecting surface that is provided closer to the object than the first light receiving unit and reflects the first light beam, and reflects the first light beam reflected by the first reflecting surface toward the first light receiving unit. The second reflecting surface, the third reflecting surface provided on the object side of the second light receiving unit and reflecting the second light beam, and the second light beam reflected by the third reflecting surface. A fourth reflecting surface that reflects toward the two light receiving parts ;
A fifth reflecting surface that is provided closer to the object than the first light receiving portion and reflects the second light flux so that the second light flux does not enter the first light receiving portion; and an object that is closer to the object than the second light receiving portion An image pickup apparatus comprising: a film-like member provided on a side and having a sixth reflecting surface that reflects the first light flux so that the first light flux does not enter the second light receiving unit . A first reflecting surface for reflecting a first light flux passing through a part of the exit pupil region;
A second reflecting surface that reflects the first light flux reflected by the first reflecting surface;
A light receiving unit that receives light reflected by the second reflecting surface ;
A third reflection that is provided on the opposite side of the second reflecting surface and reflects the second light flux so that a second light flux that passes through an exit pupil region different from the first light flux does not enter the light receiving unit. An imaging device having a surface .   A first reflecting surface for reflecting a first light flux passing through a part of the exit pupil region;
  A second reflecting surface that reflects the first light flux reflected by the first reflecting surface;
  A first light receiving portion for receiving light reflected by the second reflecting surface;
  A second light beam that is provided on the opposite side of the second reflecting surface and reflects the second light beam so that a second light beam that passes through an exit pupil region different from the first light beam does not enter the first light receiving unit. 3 reflective surfaces;
  A fourth reflecting surface for reflecting the second light flux;
  A fifth reflecting surface for reflecting the second light flux reflected by the fourth reflecting surface;
  A second light receiving portion for receiving the light reflected by the fifth reflecting surface;
  A sixth reflection surface provided on the opposite side of the fifth reflection surface and reflecting the first light beam so that the first light beam does not enter the second light receiving unit;
An imaging apparatus having The imaging device according to claim 14 , wherein
An imaging apparatus having a stereoscopic image generation unit that generates a stereoscopic image using the output of the first light receiving unit and the output of the second light receiving unit .

Images