JP6126348B2 - Magnetic sensor and magnetic detection method thereof - Google Patents

Description

  The present invention relates to a magnetic sensor and a magnetic detection method thereof, and more particularly, a magnetic sensor that includes a magnetoresistive element and can detect magnetic fields in the X, Y, and Z axis directions on the same substrate without causing an increase in current consumption. And a magnetic detection method thereof.

In general, giant magnetoresistive (GMR) elements that detect the presence or absence of magnetism are widely known. The phenomenon in which the electrical resistivity increases when a magnetic field is applied is called the magnetoresistive effect. Although the rate of change is several percent for general substances, this GMR element reaches several tens percent, so it is widely used for hard disk heads. ing.
FIG. 1 is a perspective view for explaining the operation principle of a conventional GMR element, and FIG. 2 is a partial sectional view of FIG. In the figure, reference numeral 1 is an antiferromagnetic layer, 2 is a pinned layer (fixed layer), 3 is a Cu layer (spacer layer), and 4 is a free layer (free rotation layer). Depending on the magnetization direction of the magnetic material, the electron spin scattering changes and the resistance changes. That is, ΔR = (R _AP −R _P ) R _P (R _AP ; when the upper and lower magnetization directions are antiparallel, R _P ; when the upper and lower magnetization directions are antiparallel).
The direction of the magnetic moment of the fixed layer 2 is fixed by magnetic coupling with the antiferromagnetic layer 1. When the direction of the magnetic moment of the magnetization free rotation layer 4 changes due to the leakage magnetic field, the current flowing through the Cu layer 3 changes and the change in the leakage magnetic field can be read.

  FIG. 3 is a configuration diagram for explaining a laminated structure of a conventional GMR element. In the figure, reference numeral 11 is an insulating film, 12 is a free layer (free rotating layer), 13 is a conductive layer, and 14 is a pinned layer (fixed layer). ), 15 is composed of an antiferromagnetic layer, 16 is composed of an insulating film, the free layer (free rotation layer) 12 is a layer whose direction of magnetization is freely rotated, composed of NiFe or CoFe / NiFe, and the conductive layer 13 is composed of A layer in which current is passed and spin scattering occurs, and is composed of Cu. A pinned layer (fixed layer) 14 is a layer in which the direction of magnetization is fixed in a certain direction, and is composed of CoFe or CoFe / Ru / CoFe. The magnetic layer 15 is a layer for fixing the magnetization direction of the pinned layer 14, and is made of PtMn or IrMn. The insulating films 11 and 16 are made of Ta, Cr, NiFeCr, and AlO. The pinned layer may use a self-bias structure without using an antiferromagnetic layer.

  For example, the one described in Patent Document 1 relates to a magnetic recording system using a GMR element, and a spin valve having a fixed ferromagnetic layer improved so that the magnetostatic coupling of the free ferromagnetic layer is minimized. A magnetoresistive (MR) sensor, FIG. 4 shows a laminated structure having a free ferromagnetic layer and a fixed ferromagnetic layer.

  A magnetic sensor using a Hall element has been proposed as a geomagnetic sensor for detecting a three-dimensional magnetic field vector. This type of Hall element can detect a magnetic field in a direction perpendicular to the element surface, and can detect a magnetic field in the Z direction when the elements are arranged on a plane. For example, in Patent Document 2, cross-shaped Hall elements are arranged vertically and horizontally with respect to the center of symmetry at the lower part of a circular magnetic focusing plate, and a horizontal magnetic field extends in the Z-axis direction at the end of the magnetic focusing plate. It is shown that the magnetic field in the X, Y, and Z axis directions on the same substrate can be detected by detecting the horizontal magnetic field as well as the Z direction that is the magnetic sensing direction of the Hall element by utilizing the conversion. Has been.

  Further, for example, the one described in Patent Document 3 relates to a magnetic sensor having a magnetoresistive effect element arranged so as to intersect in a three-dimensional direction on a single substrate, and includes a pinned layer and a free layer. A magnetic sensor using a magnetoresistive element comprising: a magnetoresistive element for detecting a magnetic field in a horizontal direction, in particular, a highly sensitive magnetic sensor for measuring a magnetic field in a direction perpendicular to the surface of the magnetic sensor is described. It is proposed that the X, Y, and Z magnetic fields can be detected on the same substrate by vector decomposition of the Z magnetic field applied in the vertical direction, which cannot be detected originally, by forming on an oblique slope.

  Further, for example, the one described in Patent Document 4 relates to a three-axis magnetic sensor that has high sensitivity with respect to orientation detection, is small, and has excellent mass productivity, and is set to be parallel to the substrate surface and orthogonal to each other. A two-axis magnetic sensor unit that detects geomagnetic components in two-axis (X, Y-axis) directions, and a magnetic field that is arranged on the two-axis magnetic sensor unit and that is perpendicular to the plane that includes the two axes (Z-axis) A magnetic member, a coil is formed on the magnetoresistive element, and the direction of magnetization is controlled by a magnetic field generated by passing a current through the coil, and the direction of the magnetic field is changed by changing the direction of the magnetic field. It has been proposed that X, Y, and Z magnetic fields can be detected on the same substrate.

  Further, for example, the device described in Patent Document 5 relates to a giant magnetoresistive element that is less affected by the direction of the magnetic field and can accurately detect the magnitude of the magnetic field. The GMR chip is mounted on a substrate.

Japanese Patent Laid-Open No. 7-169026 JP 2002-71381 A JP 2004-6752 A JP 2006-3116 A JP 2003-282996 A

However, although the GMR element provided with the laminated structure which has a free ferromagnetic material layer and a fixed ferromagnetic material layer is disclosed in the patent document 1, a magnetoresistive element like the magnetic sensor of this invention is disclosed. There is no disclosure of an arrangement pattern in which the magnetic converging plate and the magnetic converging plate are combined.
Further, in the sensor described in Patent Document 2, since the sensitivity of the Hall element is low, an amplified signal processing in the subsequent stage is necessary to detect geomagnetism with high accuracy, which may increase current consumption.

In addition, since the magnetic sensors of Patent Documents 3 and 4 use a magnetoresistive element and have higher sensitivity than the Hall element, there is no need to perform complicated signal processing at a later stage. Further, mass productivity becomes an issue such as forming a coil, and Patent Document 4 is concerned about an increase in current consumption due to the coil.
In addition, although the GMR element described in Patent Document 5 is disclosed as being formed in a single polygonal pattern on the GMR chip, the magnetoresistive element such as the magnetic sensor of the present invention is disclosed. There is no disclosure of an arrangement pattern that combines a magnetic converging plate and a magnetic converging plate. Further, since it does not have a spin valve structure, the polarity of the magnetic field cannot be determined, and there is a problem that it is difficult to use as a magnetic sensor.

  The present invention has been made in view of such a problem, and an object of the present invention is to provide a magnetoresistive element and magnetic fields in the X, Y, and Z axis directions on the same substrate without causing an increase in current consumption. It is an object of the present invention to provide a magnetic sensor and a magnetic detection method thereof.

The present invention has been made to achieve such an object, and the invention according to claim 1 is a magnetic sensor capable of detecting a magnetic field in an arbitrary axial direction parallel to a substrate plane. A quadrangular magnetic material (201a) on the substrate and a quadrangular magnetic converging material (201b) having a length different from that of the magnetically sensitive portion are parallel to the substrate and formed of the magnetic material. A first magnetic detector (201) disposed horizontally so that a midline (Ma) passing through a midpoint in the longitudinal direction and a midline (Mb) in the longitudinal direction of the magnetic flux concentrator do not cross each other; A second magnetic detector (202) having the same configuration as that of the first magnetic detector, and a magnetic material of the first magnetic detector and a magnetic material of the second magnetic detector. Are sandwiched between the magnetic converging material of the first magnetic detector and the magnetic converging material of the second magnetic detector. The first magnetic detection unit and the second magnetic detection unit are arranged in a point-symmetrical positional relationship so that they do not overlap each other, and the magnetic sensitive material of the first magnetic detection unit, connection portion electrically connected in series with the sensitive磁材the second magnetic detection portion of the first arrangement pattern having a zigzag of a magnetoresistive element composed of a (211a) (211) possess, the first The positional relationship between the magnetic converging material and the magnetic sensitive material is symmetric with respect to the arrangement pattern and a line parallel to the substrate plane and parallel to the longitudinal direction of the magnetic converging material of the first arrangement pattern; characterized in that it have a first structure comprising a third arrangement pattern having the same structure as the first arrangement pattern which is arranged opposite spaced so as not to overlap each other. (Fig. 20)

According to a second aspect of the present invention, there is provided a magnetic sensor capable of detecting a magnetic field in a direction perpendicular to a substrate plane, a quadrangular magnetic material (203a) on the substrate, and the magnetic sensor portion. A mid-line (Mb) having a rectangular magnetic flux concentrating material (203b) having different lengths and parallel to the substrate and passing through the midpoint in the longitudinal direction of the magnetosensitive material so as not to cross each other. A third magnetic detection unit (203) arranged horizontally, and a fourth magnetic detection unit whose structure is line symmetric with respect to a line perpendicular to the longitudinal direction of the magnetic converging material of the third magnetic detection unit (204), and the magnetic material of the third magnetic detector is sandwiched between the magnetic converging material of the third magnetic detector and the magnetic converging material (204b) of the fourth magnetic detector. And the third magnetic detection unit and the fourth magnetic detection unit are parallel to each other, One overlap not arranged as a sensitive磁材of the third magnetic detection unit, zigzag consisting connecting portion and (212a) for electrically connected in series between sense磁材of the fourth magnetic detection unit the have a second arrangement pattern having a magnetoresistive element (212), said second arrangement pattern, and the fourth arrangement pattern having a structure similar to the arrangement pattern of the second, to the substrate plane The second arrangement pattern and the fourth arrangement pattern are parallel to each other with respect to the point Mo with respect to the point on the longitudinal direction side of the magnetic converging material of the second arrangement pattern in parallel. characterized in that it have a third structure that is opposed spaced apart so as not to overlap each other. (Fig. 21)

The invention according to claim 3 is the invention according to claim 1 , wherein the first structure (A) and the second structure (B) having the same structure as the first structure (A) are provided. ) Are not parallel to each other and do not overlap each other. (Fig. 23 )

According to a fourth aspect of the present invention, in the third aspect of the invention, the first structure (A) and the second structure (B) are arranged in a vertical positional relationship with each other. It is characterized by being. (Fig. 25)
The invention according to claim 5 is the invention according to any one of claims 1 to 4 , wherein the first structure (A) and the second structure (B), or the first structure ( A) and the third structure (C), or the second structure (B) and the third structure (C), or the first structure (A) and the second structure (B). The third structure (C) is arranged on the same plane.

The invention according to claim 6 is the invention according to any one of claims 1 to 5 , wherein each of the arrangement patterns in the first arrangement pattern (211) to the fourth arrangement pattern (214) is the same. In the above, there are a plurality of arrangement patterns having the same structure to form an arrangement pattern group, and the arrangement pattern groups are arranged in parallel with each other so as not to overlap with each other, and the magnetosensitive parts respectively having the same arrangement pattern Are electrically connected to form one series connection. (Fig. 26)

The invention according to claim 7 is the invention according to any one of claims 1 to 6 , wherein each of the magnetic flux concentrators of the first arrangement pattern (211) to the fourth arrangement pattern (214). The magnetic converging member (211c) is disposed so as to be in a T-shape on the short side of the magnetic converging material at a position far from the structural center of the arrangement pattern, and the magnetic converging member (211c) The distance (A) between adjacent magnetic flux concentrators is arranged in a positional relationship farther than the distance (B) between two magnetic flux concentrators in the arrangement pattern. (Fig. 27)
The invention according to claim 8 is the invention according to any one of claims 1 to 7 , wherein the distance (D) between the magnetic converging materials between the respective arrangement patterns is two in the arrangement patterns. It is characterized by being longer than the distance (E) between the magnetic flux concentrators. (Fig. 28)

According to a ninth aspect of the present invention, in the first aspect of the present invention, the first arrangement pattern (211) is parallel to the planar direction of the substrate, and the two arrangement patterns have the first arrangement pattern. With respect to a straight line passing through the structure center point (N) of one of the magnetic flux concentrating materials (201b, 202b) and parallel to the long side of the magnetic converging material (202b), the first In the fifth arrangement pattern (215) that is symmetrical to the arrangement pattern (211), the connecting portion (216a) that electrically connects the magnetically sensitive material (201a, 202a) has the fifth arrangement pattern (211). It has a structure (D) composed of a sixth arrangement pattern (216) arranged at the end of the magnetosensitive material (201a, 202a) opposite to the connection portion (215a) in the pattern (215). And (Fig. 29)

The invention according to claim 10 is the invention according to claim 9 , wherein the first arrangement pattern (211) and the sixth arrangement pattern (216) are alternately and repeatedly arranged, The magnetosensitive materials in the first arrangement pattern are connected by the connecting portion (211b) so as to be electrically connected in series, and the magnetosensitive materials in the sixth arrangement pattern are electrically connected to each other. Connected by the connecting portion (216b) so as to be connected in series, the distance (F1) between the magnetic flux concentrators (201b, 202b) in the first arrangement pattern, and the magnetic flux concentrator in the sixth arrangement pattern The distance (F2) between (201b, 202b) is equal to each other. (Fig. 30)

The invention according to claim 11 is the invention according to any one of claims 1 to 10 , wherein the area of each of the magnetosensitive materials (201a, 202a) constituting the two arrangement patterns in each structure. Are equal to each other. (Fig. 31)
According to a twelfth aspect of the present invention, in the invention according to any one of the first to eleventh aspects, the magnetosensitive material (201a, 202a) that is not electrically joined by the connecting portion (211a, 213a). Is characterized in that it is electrically connected to the electrode pads (P1 to P4) or the signal processing circuit. (Fig. 32)

The invention according to claim 13 is the invention according to any one of claims 1 to 12 , wherein in the single arrangement pattern (211), the single arrangement pattern is parallel to the substrate plane. A longitudinal middle line (La) of the magnetically sensitive material (201a, 202a) of the first and second magnetic sensing parts (201, 202) constituting the first and second magnetic sensing parts ( 201, 202) is arranged between a longitudinal middle line (Lb) of the magnetic flux concentrating material (201b, 202b) and a symmetry point or a symmetry line in the single arrangement pattern. (Fig. 33)
The invention according to claim 14 is the invention according to any one of claims 1 to 13 , wherein the magnetosensitive material (201a to 204a) and the magnetic flux concentrator (201b to 204b) are formed on the same substrate. The bottom surface of the magnetosensitive material is disposed below the bottom surface of the magnetic flux concentrating material. (Fig. 34)

The invention according to claim 15 is the invention according to any one of claims 1 to 14 , wherein the magnetosensitive material is a giant magnetoresistive element (GMR) or a tunnel magnetoresistive element (TMR). Features.
The invention according to claim 16 is the invention according to any one of claims 1 to 15 , wherein the width of the magnetosensitive material in the short direction is 0.1 to 20 microns. .
The invention according to claim 17 is the invention according to any one of claims 1 to 16 , wherein the magnetic flux concentrator is made of a soft magnetic material of NiFe, NiFeB, NiFeCo, CoFe.
The invention according to claim 18 is the invention according to any one of claims 1 to 17 , wherein the thickness of the magnetic flux concentrating material is 1 to 40 microns.

The invention according to claim 19 is the invention according to claim 1, wherein one of the comb-like magnetic converging plates (172) having a plurality of protruding members formed at equal intervals and the one magnetic converging A comb-like magnetic converging plate (173) provided so as to be opposed to the plate and formed with a plurality of protruding members at equal intervals, and the protruding members of the one and the other magnetic converging plates A magnetoresistive element (171 ) arranged in a zigzag manner along the outer side of one of the U-shaped portions of the magnetoresistive element (171 ) in the first arrangement pattern or the third arrangement pattern , one magnetic flux concentrator protrusion (172) (172a) is arranged on the other outer side of the U-shaped portion of the magneto-resistive element (171), the projection of the other magnetic flux concentrator (173) ( 173a) is arranged , The start has an arrangement pattern (G, H) corresponding to the magnetic convergence material in the first arrangement pattern or the third arrangement pattern . (Fig. 17 (a))

The invention described in claim 20 is characterized in that, in the invention described in claim 19 , the single arrangement patterns (G, H) are line-symmetric with each other. (Fig. 17 (a))
The invention of claim 21 is the invention according to claim 19 or 20, when removing the magnetic flux concentrator (172, 173), said projection of said magnetic flux concentrator (172, 173) is The magnetic resistance element protrudes from the magnetic resistance element. (Fig. 17 (b))

Further, the invention according to claim 22, claim 19, 20 or in the invention described in 21, the magnetic sensitive sections (171a, 171b) said one of the magnetic flux concentrator sandwiching the magnetoresistive element (171) (172 ) And the first portion (173a) of the other magnetic focusing plate (173) are narrower than the distance (F) between the magnetic focusing plates between the arrangement patterns. It is characterized by that. (Fig. 17 (b))
Further, an invention according to claim 23, in the invention of any one of claims 19 to 22, wherein the magnetic sensitive sections (171a, 171b) of the magnetoresistive element (171) is connected portions of the magnetic sensitivity surfaces It is not the same material as (171a, 171b). (Fig. 17 (c))

The invention according to claim 24 is the invention according to any one of claims 19 to 23 , wherein the first portion (172a) of the one magnetic flux concentrating plate (172) and the other magnetic converging plate ( 173) is provided with a T-shaped magnetic focusing member (172c, 173c) in the first portion (173a), and the distance (A) between the magnetic focusing member (172c, 173c) and the adjacent magnetic focusing material is It is characterized by being arranged in a positional relationship farther than the distance (B) between the two magnetic flux concentrating materials in the arrangement pattern. (Fig. 17 (d))
The invention according to claim 25 is the invention according to any one of claims 19 to 24 , wherein the single arrangement pattern (G, H) is arranged so as to be displaced in the X-axis direction. It is characterized by. (Fig. 17 (e))

According to a twenty-sixth aspect of the present invention, in the invention according to any of the nineteenth to twenty-fifth aspects, the first portion (172a) of the one magnetic focusing plate (172) and the magnetically sensitive portion (171a) and The first part (172a) of the one magnetic focusing plate (172) and the other part without contacting the first part (173a) of the other magnetic focusing plate (173) and the magnetic sensing part (171b). The first portion (173a) of the magnetic flux concentrating plate (173) is arranged at an equal distance from the magnetic sensitive portions (171a, 171b). (FIG. 18 (a))

According to a twenty-seventh aspect of the present invention, in the invention according to any of the nineteenth to twenty-sixth aspects, the magnetically sensitive portion (171a, 171b) is a cross-section of the one magnetic flux concentrating plate (172). One portion (172a) and the first portion (173a) of the other magnetic converging plate (173) are disposed below and do not exceed the middle line of the magnetic converging plate. (FIG. 18 (b))
The invention according to claim 28 is the tip shape of the first portion (172a, 173a) not connected to the magnetic flux concentrating plate (172, 173) in the invention according to any one of claims 19 to 27. Is a rectangle. (FIG. 18 (c))

The invention according to claim 29 is the invention according to claim 2, wherein one comb-like magnetic converging plate (172) having a plurality of protruding members formed at equal intervals and the one magnetic converging A comb-like magnetic converging plate (173) provided so as to be opposed to the plate and formed with a plurality of protruding members at equal intervals, and the protruding members of the one and the other magnetic converging plates along with a magnetoresistive element which is arranged in zigzag shape, wherein the inner one of the U-shaped portion of the second arrangement pattern or fourth said magnetoresistive element in the arrangement pattern (171), of the other The protrusion (173a) of the magnetic flux concentrating plate (173) is in contact, and the protrusion (172a) of the magnetic converging plate (172) is outside the other U-shaped portion of the magnetoresistive element (171). in contact, the protrusion the second arrangement Characterized in that it has an arrangement pattern corresponding to the magnetic flux concentrator material (I, J) in the turns or the fourth arrangement pattern. (FIG. 19 (a))

The invention according to claim 30 is the invention according to claim 29 , wherein the single arrangement patterns (I, J) are point-symmetric with each other. (FIG. 19 (a))
The invention according to claim 31 is the invention according to claim 29 or 30 , wherein the distance (E) between the magnetic converging plates of the single arrangement pattern is between adjacent single arrangement patterns. It is characterized by being narrower than the distance (F). (FIG. 19 (b))

Further, in the invention of claim 32 , in the invention of claim 29, 30 or 31 , when the magnetic converging plate (172, 173) is removed, the magnetic converging plate (172, 173) The protrusion protrudes from the magnetoresistive element. (FIG. 19 (c))
Further, an invention according to claim 33, in the invention described in any one of claims 29 to 32, a first portion of the one magnetic flux concentrator (172) (172a), the other magnetic flux concentrator ( 173) is provided with a T-shaped magnetic focusing member (172c, 173c) in the first portion (173a), and the distance (A) between the magnetic focusing member (172c, 173c) and the adjacent magnetic focusing material is It is characterized by being arranged in a positional relationship farther than the distance (B) between the two magnetic flux concentrating materials in the arrangement pattern. (FIG. 19 (d))

The invention according to claim 34 is the magnetic detection method of the magnetic sensor according to any one of claims 1 to 33 , wherein two of the magnetic field components in any three-axis direction different from each other in the magnetic field in space are two axes. By utilizing the fact that the magnetic field component in the above direction is bent by the magnetic converging material, the magnetic field in any axial direction in the space is independently detected.

The invention according to claim 35 is the magnetic detection method using the magnetic sensor according to any one of claims 1, 3, 4 to 8, 11 to 18 , and the first arrangement pattern and the third Using the magnetic sensor having the first structure (A) having the following arrangement pattern, the magnetic field parallel to the longitudinal direction of the magnetic converging material is respectively applied to the first arrangement pattern and the third arrangement pattern. The magnetic field perpendicular to the longitudinal direction of the magnetic converging material is converted into the same direction, and the magnetic field perpendicular to the plane direction of the magnetic converging material is converted into the magnetic sensing part adjacent in the single pattern. By calculating the difference in resistance of the magnetic sensing part of the magnetic sensor having the first arrangement pattern and the magnetic sensor having the third arrangement pattern by canceling because the magnetic field is applied to +/−, The length of the magnetic flux concentrator Characterized by so capable of calculating only the singly magnetic field parallel to the direction.

The invention according to claim 36 is the magnetic detection method using the magnetic sensor according to any one of claims 3, 4 to 8, 11 to 18 , wherein the arrangement pattern of the first structure (A) is Using the magnetic sensor having the second structure (B) that is not parallel to each other and not overlapped with each other, the magnetic field parallel to the longitudinal direction of the magnetic converging material is the same as the first arrangement pattern and the A magnetic field that is converted in opposite directions with respect to the third arrangement pattern, the magnetic field perpendicular to the longitudinal direction of the magnetic converging material is converted into the same direction, and the magnetic field perpendicular to the planar direction of the magnetic converging material is simply changed. The magnetic converging material is calculated by calculating a difference in resistance of the magnetic sensor having the second structure (B) by applying a magnetic field so as to be +/− in the adjacent magnetic sensing portion in one pattern and calculating the difference in resistance of the magnetic sensor having the second structure (B). Only the magnetic field parallel to the longitudinal direction of Characterized by so it can be calculated in Germany.

The invention according to claim 37 is the magnetic detection method using the magnetic sensor according to any one of claims 2, 5 to 8, 11 to 18 , wherein the second arrangement pattern and the fourth arrangement are used. Using a magnetic sensor having a pattern, a magnetic field parallel to the longitudinal direction of the magnetic converging material is converted into the same direction with respect to the second arrangement pattern and the fourth arrangement pattern, respectively. A magnetic field perpendicular to the longitudinal direction is converted into the same direction, and further, a magnetic field perpendicular to the plane direction of the magnetic converging material is converted to directions opposite to the second arrangement pattern and the fourth arrangement pattern, respectively. By calculating the difference in resistance between the magnetic sensor having the fourth arrangement pattern and the magnetic sensor having the second arrangement pattern, only the magnetic field perpendicular to the plane direction of the magnetic converging material is calculated alone. Characterized in that to allow the and.
Further, the invention described in claim 38 is characterized by independently detecting two-axis or three-axis magnetic field components by combining the magnetic detection methods according to any of claims 34 to 37. .

  ADVANTAGE OF THE INVENTION According to this invention, the magnetic sensor which has a magnetoresistive element and can detect the magnetic field of a X, Y, and Z-axis direction on the same board | substrate without causing the increase in current consumption, and its magnetic detection method are realizable. Further, since the output is calculated by calculating the magnetic field of each axis from the mixed signals in the X, Y, and Z axis directions, it is not necessary to form a bridge circuit, and a small magnetic sensor can be provided. In addition, high sensitivity can be achieved by the magnetic amplification effect of the magnetic focusing plate.

It is a perspective view for demonstrating the principle of operation of the conventional GMR element. It is a fragmentary sectional view of FIG. It is a block diagram for demonstrating the laminated structure of the conventional GMR element. It is a top view for demonstrating the pattern shape of GMR. (A), (b) is a block diagram for demonstrating the magnetic sensor used as the premise of the magnetic sensor which concerns on this invention, and demonstrates the arrangement pattern of a GMR element and a magnetic converging plate (magnetic field conversion of an X-axis direction). FIG. (A), (b) is a block diagram for demonstrating the magnetic sensor used as the premise of the magnetic sensor which concerns on this invention, and demonstrates the arrangement pattern of a GMR element and a magnetic converging plate (magnetic field conversion of a Y-axis direction). FIG. (A), (b) is a block diagram for demonstrating the magnetic sensor used as the premise of the magnetic sensor which concerns on this invention, and demonstrates the arrangement pattern of a GMR element and a magnetic converging plate (magnetic field conversion of a Z-axis direction). FIG. (A), (b) is a block diagram for demonstrating the magnetic sensor used as the premise of the magnetic sensor which concerns on this invention. It is a block diagram for demonstrating Embodiment 1 of the magnetic sensor which concerns on this invention. It is a block diagram for demonstrating Embodiment 1 of the magnetic sensor which concerns on this invention. It is a block diagram for demonstrating the other example of Embodiment 1 of the magnetic sensor which concerns on this invention shown in FIG. It is a block diagram for demonstrating the example of Embodiment 2 of the magnetic sensor which concerns on this invention. It is a block diagram for demonstrating the other example of Embodiment 2 of the magnetic sensor which concerns on this invention. It is a block diagram for demonstrating the sensor arrangement pattern in Example 1 of the magnetic sensor which concerns on this invention, and the detection output by the arrangement pattern. It is a block diagram for demonstrating the sensor arrangement pattern in Example 2 of the magnetic sensor which concerns on this invention. FIG. 16 is a configuration diagram for explaining still another sensor arrangement pattern of the X-axis sensor shown in FIG. 15. (A) thru | or (e) are the block diagrams for demonstrating Embodiment 3 of the magnetic sensor which concerns on this invention. (A) thru | or (c) are the block diagrams for demonstrating Embodiment 4 of the magnetic sensor which concerns on this invention. (A) thru | or (d) are the block diagrams for demonstrating Embodiment 5 of the magnetic sensor which concerns on this invention. (A) thru | or (c) are the block diagrams of the basic arrangement pattern of the magnetic sensor which detects the magnetic field of a X / Y-axis direction. (A) thru | or (d) are the block diagrams of the basic arrangement pattern of the magnetic sensor which detects the magnetic field of a Z-axis direction. It is a figure which shows the basic structure of the magnetic sensor which detects the magnetic field of a X / Y-axis direction. It is a figure which shows the basic structure of the magnetic sensor which detects the magnetic field of a Y-axis direction. It is a figure which shows the basic structure of the magnetic sensor which detects the magnetic field of a Z-axis direction. It is a figure which shows the other basic structure of the magnetic sensor which detects the magnetic field of a Y-axis direction. It is a figure which shows the basic structure of the magnetic sensor which arranged the arrangement pattern in multiple numbers. It is a figure which shows the shape of the edge of a magnetic convergence board. It is a figure for demonstrating the distance of a magnetic converging board and a magnetoresistive (GMR) element. (A) thru | or (c) is a figure which shows the shrink structure of an arrangement pattern. It is a figure which shows the arrangement | sequence of the shrink structure shown in FIG. It is a figure which shows the case where the magnetoresistive (GMR) element in each structure mentioned above has the same resistance (area). It is a figure which shows the electrical joining of an electrode pad and a signal processing circuit. It is a figure which shows the positional relationship (plane) of a magnetoresistive (GMR) element and a magnetic converging plate. It is a figure which shows the positional relationship of the height direction of a magnetic converging material and a magnetosensitive material.

First, a basic arrangement pattern of a GMR element as a magnetoresistive element of a magnetic sensor which is a premise of the magnetic sensor according to the present invention and a magnetic focusing plate will be described below.
FIG. 4 is a configuration diagram for explaining a magnetic sensor which is a premise of the magnetic sensor according to the invention, and is a configuration diagram for explaining a basic arrangement pattern of a GMR element as a magnetoresistive element and a magnetic focusing plate.

  The GMR element has a meander structure and has a structure in which a plurality of diffraction is performed. The number of times the GMR element is folded is not limited, and the resistance value is determined by the length of the GMR element. Therefore, the GMR element can be arbitrarily designed according to the target resistance value. The folded portion is folded in a U shape in the drawing, but it is also possible to add a protrusion to the tip portion or connect with a wiring layer such as a permanent magnet or Cu.

Further, the short direction of the meander-shaped GMR element is the magnetization direction of the pinned layer, the longitudinal direction is the magnetization direction of the free layer, and the magnetization direction of the pinned layer, that is, the short direction of the GMR element is the sensitivity axis direction. Become parallel.
FIGS. 5A, 5B to 7A, 7B are configuration diagrams for explaining a magnetic sensor which is a premise of the magnetic sensor according to the present invention, and a GMR element as a magnetoresistive element and It is a block diagram for demonstrating the basic arrangement pattern of a magnetic convergence board. FIGS. 5A and 5B are diagrams for explaining the state of magnetic field conversion in the X-axis direction by the magnetic focusing plate. FIGS. 6A and 6B are diagrams in the Y-axis direction by the magnetic focusing plate. FIGS. 7A and 7B are views for explaining the state of magnetic field conversion. FIGS. 7A and 7B are views for explaining the state of magnetic field conversion in the Z-axis direction by the magnetic converging plate.

The substrate on which the magnetoresistive element is formed is not particularly limited, such as a silicon substrate, a compound semiconductor substrate, or a ceramic substrate, and any circuit may be formed on the substrate.
Although the GMR element is used as the magnetoresistive element, the present invention is not limited to the GMR element, and a tunnel magnetoresistive (TMR) element or other magnetoresistive change element may be used. The magnetic converging plate may be a magnetic material exhibiting soft magnetic characteristics such as NiFe, NiFeB to NiFeCo, CoFe.

First, the state of magnetic field conversion in the X-axis direction by the magnetic converging plate will be described with reference to FIGS. FIG. 5A is a configuration diagram for explaining an arrangement pattern of the GMR element and the magnetic converging portion, and FIG. 5B is a cross-sectional view taken along the line AA in FIG. In the figure, reference numeral 21 denotes a GMR element, 22 denotes one magnetic converging portion, and the other magnetic converging plate 23 is arranged to face one magnetic converging plate 22.
In the GMR element 21, the width and length of the GMR element can be arbitrarily adjusted according to the resistance and sensitivity of the GMR element. It is preferable that it is larger than the width.

The width of the GMR element also needs to be optimized in order to determine the sensitivity of the sensor and the operating magnetic field range. The width in the pinned layer direction, which is the single-handed direction of the GMR element, is preferably 0.1 to 20 μm. However, if the width is large, the element size becomes too large, and if it is too narrow, the sensitivity decreases. A range of 1 to 10 μm is more preferable.
One magnetic converging unit 22 includes two independent magnetic converging units arranged at positions sandwiching the GMR element and a magnetic converging unit coupled orthogonally thereto. In this specification, a magnetic converging portion disposed at a position sandwiching the GMR element is defined as a comb-shaped magnetic converging plate, and a portion that is coupled orthogonally to the comb-like magnetic converging plate is defined as a beam-shaped magnetic converging plate.

  FIG. 5B shows the positional relationship between the preferred GMR element and the comb-shaped magnetic converging plate. The horizontal positional relationship between the GMR 21 (b) and the magnetic converging unit 23 is such that the right end of the GMR 21 (b) is arranged on the right side of the midpoint between the magnetic converging units 22 and 23, and the left end of the GMR 21 (b) is Although it is desirable to arrange the magnetic converging part 23 on the left side of the left end, it is more preferable that the right end of the GMR 21 (b) and the magnetic converging part 23 are in contact with each other. The positional relationship between the GMR 21 (b) and the magnetic converging portion 23 in the cross-sectional direction is preferably such that the bottom surface of the GMR 21 (b) is below the bottom surface of the magnetic converging portion 23, but the top surface of the GMR 21 (b) is the magnetic converging plate 23. It is more preferable that they are disposed below the bottom surface, and more specifically, they are more preferably disposed at a height interval of 2 microns or less.

The magnetic amplification effect can be improved as the comb-shaped magnetic converging plate is narrower and the magnetic converging plate is thicker. The aspect ratio obtained by dividing the thickness of the magnetic converging plate by the width of the magnetic converging plate is preferably 1 or more, and the width of the comb-like magnetic converging plate is preferably 1 to 40 μm.
The right direction on the paper surface is defined as the + X-axis direction, the upward direction is defined as the + Y direction, and the direction perpendicular to the paper surface is defined as the + Z direction. The resistance change when X, Y, and Z magnetic fields are applied to the GMR 21 with such a configuration will be described.

When the X magnetic field is applied, the magnetic field applied to the magnetic focusing plate 22 is bent in the -Y direction, and the GMR element 21 receives a magnetic field having a reverse polarity. The resistance change at that time has the following relational expression.
ΔRx = aHx (a is magnetic field conversion efficiency by a magnetic material)
The magnetic field conversion efficiency can be arbitrarily adjusted according to the shape of the magnetic focusing plate and the relative position between the GMR and the magnetic focusing plate, and is not particularly limited.

Next, the state of magnetic field conversion in the Y-axis direction by the magnetic converging plate will be described with reference to FIGS. FIG. 6A is a configuration diagram for explaining an arrangement pattern of the GMR element and the magnetic focusing plate, and FIG. 6B is a cross-sectional view taken along the line AA in FIG. A magnetic field in the same direction as the external magnetic field is applied to all the GMR elements 21. That is, it has the following relational expression.
ΔRy = cHy (c is the magnetic field conversion efficiency by the magnetic substance)

Next, a state of magnetic field conversion in the Z-axis direction by the magnetic converging plate will be described based on FIGS. FIG. 7A is a configuration diagram for explaining an arrangement pattern of the GMR element and the magnetic focusing plate, and FIG. 7B is a cross-sectional view taken along line AA in FIG. 7A. Although the Bz magnetic field is bent in the ± Y-axis direction by the comb-shaped magnetic focusing plate, the GMR element 21 in the immediate vicinity of the comb-shaped magnetic focusing plate detects only the magnetic field on one side (+ Y-axis direction). That is, it has the following relational expression.
ΔRz = dHz (d is the conversion efficiency of the Z-axis magnetic field)

FIGS. 8A and 8B are configuration diagrams for explaining a magnetic sensor which is a premise of the magnetic sensor according to the present invention. The arrangement pattern of the GMR element and the magnetic focusing plate is explained (X axis, Y axis, It is a block diagram for performing magnetic field conversion in the Z-axis direction. The arrangement pattern of the GMR element and the magnetic converging plate in FIG. 8 has the same structure as the arrangement pattern shown in FIG.
The magnetic detection unit composed of the GMR 31 and the magnetic converging plates 32 and 33 is R1, the magnetic detection unit composed of the GMR 41 and the magnetic converging plates 42 and 43 is R2, and the resistance value when no magnetic field is applied is R.

With such a configuration, the resistance change when the resistance of the GMR element is changed by the magnetic field is expressed by the following relational expression.
R ′ = R (1 + ΔR / R)
The difference between R1 and R2 when a magnetic field of Z / Y / Z is simultaneously applied to R1 and R2 is expressed by the following relational expression.
R1 = R (1+ (ΔRx1 + ΔRy1 + ΔRz1) / R)
R2 = R (1+ (ΔRx2 + ΔRy2 + ΔRz2) / R
ΔR = R2-R1
= R (1+ (ΔRx2 + ΔR y 2 + ΔRz2) / R)
−R (1+ (ΔRx 1 + ΔRy1 + ΔRz1) / R)
= (ΔRx2-ΔRx 1) + (ΔR y 2-ΔRy1) + (ΔRz2
-ΔRz1)

By taking the two resistance differences, the constant term disappears, and the resistance change amount can be found only by the difference in the resistance change amount due to the magnetic field. Since the output in the case of constant current driving is expressed by the following equation, the resistance change amount (= magnetic field strength) can be calculated from the output.
Vout = (ΔR / R) × R1 = ΔR × I
In this embodiment, an example of constant current driving is shown, but the driving method is not limited to this.

Hereinafter, each embodiment of the present invention will be described with reference to the drawings.
<Embodiment 1>
FIG. 9 is a configuration diagram for explaining the first embodiment of the magnetic sensor according to the present invention, and is a configuration diagram for explaining an arrangement pattern of the GMR element and the magnetic focusing plate of the X-axis magnetic sensor.
In the figure, reference numeral 50 denotes a first magnetic sensor unit, 51 denotes a GMR element, 51a denotes a first part of the GMR element 51, 51b denotes a second part of the GMR element 51, 51c denotes a third part of the GMR element 51, and 51d denotes a GMR. The fourth part of the element 51, 51e is the fifth part of the GMR element 51, 51f is the sixth part of the GMR element 51, 52 is one magnetic focusing plate, 52a is the first part of the comb teeth of one magnetic focusing plate 52 , 52b is the second portion of the comb teeth of one magnetic focusing plate 52, 52c is the third portion of the comb teeth of one magnetic focusing plate 52, 53 is the other magnetic focusing plate, and 53a is the other magnetic focusing plate 53. The first portion of the comb teeth, 53b, the second portion of the comb teeth of the other magnetic focusing plate 53, and 53c, the third portion of the comb teeth of the other magnetic focusing plate 53.

  In the figure, reference numeral 60 denotes a second magnetic sensor unit, 61 denotes a GMR element, 61a denotes a first part of the GMR element 61, 61b denotes a second part of the GMR element 61, 61c denotes a third part of the GMR element 61, 61d Is the fourth part of the GMR element 61, 61e is the fifth part of the GMR element 61, 61f is the sixth part of the GMR element 61, 62 is one of the magnetic converging plates, 62a is the comb teeth of the one of the magnetic converging plates 62. 1 part, 62b is the second part of the comb teeth of one magnetic focusing plate 62, 62c is the third part of the comb teeth of one magnetic focusing plate 62, 63 is the other magnetic focusing plate, 63a is the other magnetic focusing plate 63 indicates a first portion of the comb teeth, 63 b indicates a second portion of the comb teeth of the other magnetic focusing plate 63, and 63 c indicates a third portion of the comb teeth of the other magnetic focusing plate 63.

  One of the magnetic flux concentrating plates 52 and 62 has a plurality of comb-like magnetic converging plates formed at equal intervals from one beam-like member to one side in a direction perpendicular to the one beam-like member. The other magnetic flux concentrating plates 53 and 63 are provided so as to face the one magnetic flux converging plate 52, and a plurality of magnetic flux converging plates 53 and 63 are arranged at equal intervals from the other beam-shaped member to one side in a direction orthogonal to the other beam-shaped member. The magnetic converging plate is formed. The GMR elements 51 and 61 are arranged in a meander shape along the protruding magnetic converging plates of one and the other magnetic converging plates, and are arranged so as to be in contact with the long sides of the comb-shaped magnetic converging plates. is there.

  With such a configuration, the comb-shaped magnetic converging plate 53c is adjacent to the longitudinal direction of the GMR element 51e, which is the magnetic sensing portion, and the midpoint of the comb-shaped magnetic converging plate 53c is more than the midpoint of the GMR element 51e. Has a first magnetic sensing part arranged on the outer side, and a comb-like magnetic converging plate 53d is adjacent to the longitudinal direction of the GMR element 51f which is a magnetic sensing part, and the comb is located more than the middle point of the GMR element 51f. It has a second magnetic sensing part in which the middle point of the tooth-like magnetic converging plate 53d is arranged outside, and the first magnetic detection part and the magnetic sensing part of the second magnetic detection part are connected in series. It has the 1st pattern which is one pattern.

Further, a comb-like magnetic converging plate 62a is adjacent to the longitudinal direction of the GMR element 61a, which is a magnetically sensitive portion, at a point-symmetrical position with respect to the first pattern, and has a comb-like shape than the middle point of the GMR element 61a. The magnetic converging plate 62a has a first magnetic sensing portion disposed outside, and a comb-like magnetic converging plate 63a is adjacent to the longitudinal direction of the GMR element 61b, which is a magnetic sensing portion. Having a second magnetic sensing unit in which the midpoint of the comb-like magnetic converging plate 63a is arranged outside the midpoint of the first magnetic detection unit and the second magnetic detection unit. Have a third pattern that is a single pattern joined in series.

The first magnetic sensor unit 50 having the first pattern and the second magnetic sensor unit 60 having the second pattern are provided, and the first pattern and the second magnetic field of the first magnetic sensor unit 50 are provided. The third pattern of the sensor unit 60 is line-symmetric with each other.
Further, a plurality of first patterns can be arranged adjacent to each other in the first magnetic sensor unit 50 by connecting one end and the other end of the magnetic sensing units connected in the first pattern in series. Thus, the GMR element 51e and the GMR element 51d, and the GMR element 51c and the GMR element 51b are linearly connected.
The longitudinal length of the beam-like magnetic converging plate is arranged to be longer than the interval between the comb-like magnetic converging plates 52c and 53c. Further, the interval between the comb-shaped magnetic flux concentrating plates 52c and 53c is arranged to be shorter than the interval between the comb-shaped magnetic flux converging plates 52b and 53c.

In addition, a plurality of second patterns can be arranged adjacent to the second magnetic sensor unit 60 by connecting one end and the other end of the magnetic sensing units connected in the second pattern in series. Thus, the GMR element 61b and the GMR element 61c, and the GMR element 61d and the GMR element 61e are linearly connected.
The longitudinal length of the beam-like magnetic converging plate is arranged to be longer than the interval between the comb-like magnetic converging plates 62a and 63a. Further, the interval between the comb-shaped magnetic flux concentrating plates 62a and 63a is set shorter than the interval between the comb-shaped magnetic flux converging plates 62b and 63a.

Further, the longitudinal axis of the first magnetic sensor unit 50 and the longitudinal axis of the second magnetic sensor unit 60 are parallel to each other. In addition, the longitudinal axis of the first magnetic sensor unit 50 and the longitudinal axis of the second magnetic sensor unit 60 are provided in parallel and coaxially with each other.
That is, the X-axis magnetic sensor in the magnetic sensor according to the present invention includes the first magnetic sensor unit 50 and the second magnetic sensor unit 60, and the first magnetic sensor unit 50 and the second magnetic sensor unit 60. Is symmetric with respect to each other along the line BB, that is, when one of the first sensor unit 50 and the second magnetic sensor 60 divided into two parts with respect to the axis of symmetry BB is folded, the other is It is arranged to overlap.

Based on FIG. 9, the independent detection method of the magnetic field of a X-axis direction is demonstrated. With the above-described configuration, the resistance change when the resistance of the GMR element is changed by the magnetic field is expressed by the following relational expression. That is, assuming that the resistance change of the first magnetic sensor unit 50 in FIG. 9 is X1 and the resistance change X2 of the second magnetic sensor unit 60, the resistance change X1 of the first magnetic sensor unit 50 is expressed by the following relational expression. Have.
ΔRx = aHx
ΔRy = cHy
ΔRz = dHz−dHz = 0
X1 = ΔRx + ΔRy + ΔRz = aHx + Hy

Similarly, the resistance change X2 of the second magnetic sensor 60 has the following relational expression.
ΔRx = −aHx
ΔRy = cHy
ΔRz = dHz−dHz = 0
X2 = ΔRx + ΔRy + ΔRz = −aHx + Hy
Therefore, when X1 and X2 are calculated, X2−X1 = 2aHx.

  Thus, the Z-axis direction can be canceled by + −. It is possible to extract a signal with only the Hx component by calculating by arranging the GMR elements by skipping one bit so that the magnetic field in the X-axis direction is directed in the same direction within one element. That is, the X-axis direction, the Y-axis direction, and the Z-axis direction are converted by the comb-shaped magnetic converging plate of the magnetic sensor, and the magnetic field in the X-axis direction is a magnetic field in the opposite direction with respect to the first and second GMR elements. The Y-axis direction magnetic field is converted to the same direction, while the Z-axis direction magnetic field is converted into the first and second magnetic plates arranged inside the U-shaped magnetic converging plate. Since the magnetic field is applied so that the GMR element becomes +/−, it is canceled out, and by calculating the difference in resistance between the first GMR element and the second GMR element, the magnetic field in the Y-axis direction is eliminated, and the X-axis Amplifies the magnetic field in the direction twice.

  As for the independent detection method of the magnetic field in the Y-axis direction, the third magnetic sensor unit 70 and the fourth magnetic sensor unit 80 arranged by rotating the X-axis detection sensor by 90 degrees as shown in FIG. It is obvious that detection is possible using the Y-axis detection sensor provided. Reference numerals 71 and 81 denote GMR elements, 72 and 82 denote one magnetic converging plate, and 73 and 83 denote the other magnetic converging plate.

In addition, a third magnetic sensor unit 70 having a first pattern and a fourth magnetic sensor unit 80 having a third pattern are provided, and the first pattern and the third pattern of the third magnetic sensor unit 70 are provided. The third pattern of the magnetic sensor unit 80 is axisymmetric with each other.
Similarly, the X-axis direction, the Y-axis direction, and the Z-axis direction are converted by the comb-shaped magnetic converging plate of the magnetic sensor, and the magnetic field in the Y-axis direction is opposite to the first and second GMR elements. The magnetic field is converted so that a magnetic field is applied, and the magnetic field in the X-axis direction is converted in the same direction, whereas the magnetic field in the Z-axis direction is the first and second arranged inside the magnetic converging plate of the U-shaped portion. Since the magnetic field is applied so that the GMR element of 2 becomes +/−, it is canceled out. By calculating the difference in resistance between the first GMR element and the second GMR element, the magnetic field in the X-axis direction is eliminated, and Y Amplifies the magnetic field in the axial direction twice.

  FIG. 11 is a configuration diagram for explaining another example of the first embodiment of the magnetic sensor according to the present invention shown in FIG. 9, in which the first magnetic sensor unit 50 and the second magnetic sensor unit 60 are separated. Thus, they are arranged in parallel to each other. That is, the longitudinal axis of the first magnetic sensor unit 50 and the longitudinal axis of the second magnetic sensor unit 60 are provided parallel to each other and on different axes.

<Embodiment 2>
FIG. 12 is a configuration diagram for explaining the magnetic sensor according to the second embodiment of the present invention, and is a configuration diagram for explaining an arrangement pattern of the GMR element and the magnetic focusing plate of the Z-axis magnetic sensor. In addition, it is a diagram for explaining a Z-axis magnetic sensor.
In the figure, reference numeral 90 denotes a fifth magnetic sensor unit, 91 denotes a GMR element, 91a denotes a first part of the GMR element 91, 91b denotes a second part of the GMR element 91, 91e denotes a third part of the GMR element 91, and 91f denotes a GMR. The fourth portion of the element 91, 92 is one magnetic focusing plate, 92a is the first portion of one magnetic focusing plate 92, 92b is the second portion of one magnetic focusing plate 92, 93 is the other magnetic focusing plate, 93a Indicates the first part of the other magnetic converging plate 93, and 93 b indicates the second part of the other magnetic converging plate 93.

  In the figure, reference numeral 100 denotes a sixth magnetic sensor unit, 101 denotes a GMR element, 101a denotes a first part of the GMR element 101, 101b denotes a second part of the GMR element 101, 101e denotes a third part of the GMR element 101, 101f Is the fourth part of the GMR element 101, 102 is one magnetic focusing plate, 102a is the first part of one magnetic focusing plate 102, 102b is the second part of one magnetic focusing plate 102, and 103 is the other magnetic focusing plate. , 103a indicates a first portion of the other magnetic focusing plate 103, and 103b indicates a second portion of the other magnetic focusing plate 103.

The Z-axis magnetic sensor in the magnetic sensor according to the present invention includes a fifth magnetic sensor unit 90 and a sixth magnetic sensor unit 100. The fifth magnetic sensor unit 90 and the sixth magnetic sensor unit 100 are They have a point-symmetric (rotationally symmetric) structure at the center point P.
With such a configuration, the comb-shaped magnetic converging plate 93b is adjacent to the longitudinal direction of the GMR element 91e, which is the magnetic sensing portion, and the midpoint of the comb-shaped magnetic converging plate 93b is higher than the midpoint of the GMR element 91e. Has a third magnetic sensing portion arranged on the outer side, and a comb-like magnetic converging plate 92b is adjacent to the longitudinal direction of the GMR element 91f, which is the magnetic sensing portion, and the comb is located more than the middle point of the GMR element 91f. It has a fourth magnetic sensing unit in which the middle point of the tooth-shaped magnetic converging plate 92b is arranged outside, and the third magnetic sensing unit and the magnetic sensing unit of the fourth magnetic sensing unit are joined in series. It has the 4th pattern which is one pattern.

  With such a configuration, the comb-shaped magnetic converging plate 102a is adjacent to the longitudinal direction of the GMR element 101b, which is the magnetic sensing portion, and the comb-shaped magnetic converging plate 102a is located outside the midpoint of the GMR element 101b. A comb-like magnetic converging plate 103a is disposed adjacent to the longitudinal direction of the GMR element 101a, which is a magnetically sensitive portion, at a position symmetrical to the third magnetic sensing portion. It has a fourth magnetic sensing unit in which the midpoint of the comb-like magnetic converging plate 103a is arranged outside the midpoint of the GMR element 101a, and the sensitivity of the third magnetic sensing unit and the fourth magnetic sensing unit. The magnetic part has a second pattern which is a single pattern in which the magnetic parts are joined in series.

Further, a fifth magnetic sensor section 90 of having a fourth pattern, and a sixth magnetic sensor unit 100 of having a second pattern, the fourth fifth magnetic sensor unit 90 of the pattern and the sixth The second pattern of the magnetic sensor unit 100 is point-symmetric with each other.
Further, in the fifth magnetic sensor section 90 of having a fourth pattern, a plurality of fourth patterns by connecting the one end and the other end of the fourth connected sensitive portion in the pattern of the series GMR 91e and GMR 91b are linearly connected so that they can be arranged adjacent to each other.
The longitudinal length of the beam-like magnetic converging plate is arranged to be longer than the interval between the comb-like magnetic converging plates 91e and 91f. Further, the interval between the comb-shaped magnetic flux concentrating plates 91e and 91f is arranged to be shorter than the interval between the comb-shaped magnetic flux converging plates 91e and 91b.

Further, the second magnetic sensor unit 100 having the second pattern has a plurality of second patterns by connecting one end and the other end of the magnetic sensing units connected in the second pattern in series. GMR 101b and GMR 101e are linearly connected so that they can be arranged adjacent to each other.
The longitudinal length of the beam-like magnetic converging plate is arranged to be longer than the interval between the comb-like magnetic converging plates 102a and 103a. Further, the interval between the comb-shaped magnetic flux concentrating plates 102a and 103a is set shorter than the interval between the comb-shaped magnetic flux converging plates 102a and 103b.

With such a configuration, the resistance change Z1 in the fifth sensor unit 90 has the following relational expression.
ΔRx = cHx
ΔRy = aHy
ΔRz = −dHz
Z1 = ΔRx + ΔRy + ΔRz = Hx + aHy−dHz

Similarly, the resistance change Z2 in the sixth magnetic sensor unit 100 has the following relational expression.
ΔRx = cHx
ΔRy = aHy
ΔRz = dHz
Z2 = ΔRx + ΔRy + ΔRz = Hx + aHy + dHz
Therefore, when Z1 and Z2 are calculated, Z2−Z1 = 2 dHz.

In this way, if the protrusion-like comb-shaped portion is widened by one pitch or more in order to convert By into one direction in the X-axis direction, the signal can be extracted by the Bz component alone by calculation.
FIG. 13 is a configuration diagram for explaining another example of the magnetic sensor according to the second embodiment of the present invention. As shown in FIG. 13, it is possible to adjust the resistance of GMR by arranging GMRs 91c and 91d between GMRs 91b and 91e, or by arranging GMRs 101c and 101d between GMRs 101b and 101e.
Further, the longitudinal axis of the fifth magnetic sensor unit 90 and the longitudinal axis of the sixth magnetic sensor unit 100 may be parallel to each other and provided on different axes.

  FIG. 14 is a configuration diagram for explaining a sensor arrangement pattern and a detection output based on the arrangement pattern in the first embodiment of the magnetic sensor according to the present invention. The first embodiment and the second embodiment of the magnetic sensor according to the present invention are the same. It is a block diagram for demonstrating the sensor output pattern arrange | positioned on the plane board | substrate 110, and the detection output by the arrangement pattern. In the figure, reference numeral 110 denotes a substrate on which each axis sensor is mounted, 111 to 122 are electrode pads, and 131 to 142 are wirings for electrically connecting each GMR element to the electrode pads.

Further, 150 is an X-axis sensor composed of the first magnetic sensor unit 50 and the second magnetic sensor unit 60, 160 is a Y-axis sensor composed of the third magnetic sensor unit 70 and the fourth magnetic sensor unit 80, and 170 is The Z-axis sensor which consists of the 5th magnetic sensor part 90 and the 6th magnetic sensor part 100 is shown.
The detection output from such X, Y, and Z axis sensors can be calculated by measuring the resistance at both ends of the assembly and calculating the resistance by an IC circuit or the like at the subsequent stage.
The resistance change X1 between the electrodes 112-113 of the first magnetic sensor unit 50 of the X-axis sensor 150 is aHx + cHy, and the resistance change X2 between the electrodes 113-114 of the second magnetic sensor unit 60 of the X-axis sensor 150 is −. With aHx + cHy, the detection output of the X-axis sensor 150 becomes X2−X1 = 2aHx by calculating the difference in resistance change between the magnetic sensor units 50 and 60 with an IC or the like in the subsequent stage.

  Further, the resistance change between the electrodes 115-116 of the third magnetic sensor unit 70 of the Y-axis sensor 160 is Y1 as cHx + aHy, and the resistance change Y2 between the electrodes 117-118 of the fourth magnetic sensor unit 80 of the Y-axis sensor 160 is Y2. Is cHx−aHy, and the detection output of the Y-axis sensor 140 is Y2−Y1 = 2aHy by calculating the difference in resistance change between the magnetic sensor units 70 and 80 using an IC or the like in the subsequent stage.

  The resistance change Z1 of the electrodes 121-122 of the fifth magnetic sensor unit 90 of the Z-axis sensor 170 is cHx + aHy-dHz, and the resistance change Z2 of the electrodes 119-120 of the sixth magnetic sensor unit 100 of the Z-axis sensor 170 is With cHx + aHy + dHz, the detection output of the Z-axis sensor 170 is Z2−Z1 = 2dHz by calculating the difference in resistance change between the magnetic sensor units 90 and 100 with an IC or the like in the subsequent stage.

That is, the X-axis direction, the Y-axis direction, and the Z-axis direction are converted by the comb-shaped magnetic converging plate of the magnetic sensor, and the magnetic fields in the X-axis direction to the Y-axis direction are the same as those of the first and second GMR elements. On the other hand, the magnetic field in the Z-axis direction is converted so that a magnetic field is applied in the opposite direction to the first and second GMR elements, and the resistance of the first GMR element and the second GMR element is changed. And the difference in resistance between the third GMR element and the fourth GMR element, the magnetic fields in the X-axis direction and the Y-axis direction are erased, and the resistances of the fifth GMR element and the sixth GMR element are calculated. By calculating the difference between the two, the magnetic field in the Z-axis direction can be amplified twice.
In this embodiment, electrode pads are connected to both ends of each GMR element. However, a common terminal such as a GND terminal can be shared.

  FIG. 15 is a configuration diagram for explaining a sensor arrangement pattern in the second embodiment of the magnetic sensor according to the present invention, and shows the sensor arrangement pattern arranged on the same planar substrate 200 in the second embodiment of the magnetic sensor according to the present invention. It is a block diagram for demonstrating. Reference numerals in the figure denote chips on which the respective axis sensors are mounted, and constituent elements having the same functions as those in FIG. The X-axis sensor 180 and the Y-axis sensor 190 are different from the sensor arrangement pattern in FIG. 14, and the Z-axis sensor 170 is the same as that in FIG.

FIG. 16 is a configuration diagram for explaining still another sensor arrangement pattern of the X-axis sensor shown in FIG.
The X sensor 180, which is a diagram illustrating the structure of the X-axis sensor 180 using FIG. 16, includes the GMR element 51, one magnetic focusing plate 52, and the other magnetic focusing plate 53, and includes the first pattern. ing. Further, a GMR element 61 is disposed which passes through the structural center point of the comb-shaped magnetic converging plate 52a of the first pattern and is arranged in a line-symmetric position with respect to the structural center line of the comb-shaped magnetic converging plate 52a. Has been. The GMR element 61 is adjacent to the same magnetic converging plate 52 and the other magnetic converging plate 53 as the GMR element 62, and the GMR element 61 has a joint portion for electrically joining the GMR elements 61c and 61d as the first one. It consists of a sixth pattern arranged in the direction opposite to the pattern.

Further, as shown in FIG. 16, a plurality of first patterns and sixth patterns are alternately arranged, and the first patterns and the sixth patterns are arranged in an electrical series arrangement. ing. Further, the distance between the magnetic flux concentrating plates 52a and 53a and the distance between 52a and 53b in the first pattern are arranged to be equal. The Y-axis sensor 190 has the same structure as the X-axis sensor 180 and is composed of a magnetic sensor different from the X-axis sensor 180 rotated by 90 °.
By doing so, since the projected areas of the X-axis sensor and the Y-axis sensor are reduced, the sensor mounting area of the chip is reduced, and the magnetic sensor can be made compact.

  15, the GND terminals of the magnetic sensor units 90 and 100 are shared by the electrode pad 120, the GND terminals of the magnetic sensor units 50 and 60 are shared by the electrode pad 113, and the GND terminals of the magnetic sensor units 70 and 80 are electrodes. By sharing the pads 117, it is possible to reduce the number of electrode pads and achieve compactness.

<Embodiment 3>
FIGS. 17A to 17E are configuration diagrams for explaining the third embodiment of the magnetic sensor according to the present invention, and explain the arrangement patterns of the GMR elements and the magnetic converging plates of the X-axis and Y-axis magnetic sensors. FIG.
The single arrangement patterns G and H are arrangement patterns that are line-symmetric with each other as shown in FIG. The configuration of the single arrangement pattern G is such that the first portion 172a of the magnetic converging plate 172 is in contact with one outer side of the U-shaped portion of the GMR element (magnetic sensing portions 171a and 171b) 171. The first portion 173a of the magnetic flux concentrating plate 173 is in contact with the other outer side of the U-shaped portion. The single arrangement pattern G and the single arrangement pattern H are line-symmetric arrangement patterns with a repeating structure of two or more arrangement patterns. In addition, although the magnetic converging plate (beam) is not essential, the magnetic converging can be efficiently performed.

  FIG. 17B is a view showing the configuration excluding the magnetic flux concentrating plates (beams) 172 and 173 in FIG. 17A, and the first portion 172a of the magnetic converging plate 172 protrudes toward the magnetic converging plate 172 side. Yes. Similarly, the first portion 173a of the magnetic focusing plate 173 protrudes toward the magnetic focusing plate 173 side. The sensitivity of this single arrangement pattern is improved when a plurality of single arrangement patterns are connected. In addition, the first portion 172a of the magnetic flux concentrating plate 172 and the first portion 173a of the magnetic flux concentrating plate 173 must be positioned so as to sandwich the two magnetic sensitive portions 171a and 171b. In addition, the distance E between the first portion 172a of the magnetic flux concentrating plate 172 and the first portion 173a of the magnetic converging plate 173 sandwiching the magnetic sensing portions 171a and 171b must be smaller than the distance F between the magnetic converging plates between the arrangement patterns. I must.

  FIG. 17C is a diagram showing the single arrangement pattern shown in FIG. 17B. As shown on the left side, the first portion 172a of the magnetic flux concentrating plate 172 projects toward the magnetic converging plate 172 side. ing. Similarly, the first portion 173a of the magnetic focusing plate 173 protrudes toward the magnetic focusing plate 173 side. In this case, as shown in the drawing on the right side, the connecting portion connecting the magnetic sensing portions 171a and 171b only needs to be electrically connected, and thus does not need to be integrated with the magnetic sensing portions 171a and 171b.

In FIG. 17D, T-shaped magnetic focusing members 172c and 173c are attached to the first portion 172a of the magnetic focusing plate 172 and the first portion 173a of the magnetic focusing plate 173 in FIG. . In this case, the distance A between the magnetic flux concentrating members 172c and 173c and the adjacent magnetic flux concentrating material is arranged in a positional relationship farther than the distance B between the two magnetic converging materials in the arrangement pattern. The distance A is the shortest distance between the beam end and the comb teeth.
In FIG. 17A, the single arrangement patterns G and H are connected, but in FIG. 17E, they are arranged so as to be displaced in the X direction.

<Embodiment 4>
FIGS. 18A to 18C are configuration diagrams for explaining the magnetic sensor according to the fourth embodiment of the present invention, and explain the arrangement patterns of the GMR elements and the magnetic converging plates of the X-axis and Y-axis magnetic sensors. FIG.
In FIG. 17A, the first portion 172a of the magnetic converging plate 172 is in contact with one outer side of the U-shaped portion of the GMR element (magnetic sensing portions 171a and 171b) 171. The first portion 173a of the magnetic focusing plate 173 is in contact with the other outer side of the character-shaped portion. As shown in FIG. 18A, the first portion 172a of the magnetic focusing plate 172 and the magnetic sensing portion 171a, The first portion 173a of the magnetic flux concentrating plate 173 and the magnetic sensing part 171ba do not necessarily have to be in contact with each other. If the first portion 172a of the magnetic flux concentrating plate 172 and the first portion 173a of the magnetic flux concentrating plate 173 are arranged at the same distance from the two magnetic sensitive portions 171a and 171b, the magnetic converging plate is in contact with the magnetic sensitive portion. It does not have to be.

As shown in FIG. 18B, the two magnetic sensing portions 171a and 171b are arranged below the first portion 172a of the magnetic flux concentrating plate 172 and the first portion 173a of the magnetic converging plate 173 in the cross section. That's fine. In that case, the magnetic sensitive portions 171a and 171b must not exceed the middle line of the magnetic converging plate. By doing in this way, the space | interval of a magnetic converging plate can be widened.
As shown in FIG. 18C, the tip shape of the magnetic flux concentrating plate that is not connected to the beam may be a shape without a corner such as a semicircle, or may be a triangular shape. It need not be a rectangle (rectangle or rectangle).

<Embodiment 5>
FIGS. 19A to 19D are configuration diagrams for explaining the magnetic sensor according to the fifth embodiment of the present invention, and the configuration for explaining the arrangement pattern of the GMR element and the magnetic focusing plate of the Z-axis magnetic sensor. FIG.
The single arrangement patterns I and J are arrangement patterns that are point-symmetric with each other as shown in FIG. The configuration of the single arrangement pattern I is such that the first portion 173a of the magnetic flux concentrating plate 173 is in contact with one of the U-shaped portions of the GMR elements (magnetic sensing portions 171a and 171b) 171. The first portion 172a of the magnetic flux concentrating plate 172 is in contact with the other outer side of the U-shaped portion. The single arrangement pattern I and the single arrangement pattern J are point-symmetric arrangement patterns with a repeating structure of two or more arrangement patterns.

As shown in FIG. 19B, the adjacent magnetic sensing portion in the adjacent middle portion of the single arrangement pattern I shown in FIG. 19A can be omitted. That is, the distance B between the magnetic converging plates of the single arrangement pattern I must be smaller than the distance A between the adjacent single arrangement patterns I.
As shown in FIG. 19 (c), the magnetic converging plates (beams) 72 and 73 in FIG. 19 (a) are excluded, and the first portion 172 a of the magnetic converging plate 172 is on the magnetic converging plate 172 side. Protruding. Similarly, the first portion 173a of the magnetic focusing plate 173 protrudes toward the magnetic focusing plate 173 side. The sensitivity of this single arrangement pattern is improved when a plurality of single arrangement patterns are connected. T-shaped magnetic converging members 172c and 173c are attached to the first portion 172a of the magnetic converging plate 172 and the first portion 173a of the magnetic converging plate 173 in FIG. In this case, the distance A between the magnetic flux concentrating members 172c and 173c and the adjacent magnetic flux concentrating material is arranged in a positional relationship farther than the distance B between the two magnetic converging materials in the arrangement pattern. The distance A is the shortest distance between the beam end and the comb teeth.

Next, a basic arrangement pattern combining the magnetoresistive element and the magnetic converging plate in the present invention will be described.
FIGS. 20A to 20C are configuration diagrams of a basic arrangement pattern of a magnetic sensor that can detect a magnetic field in an arbitrary axial direction parallel to the substrate plane, on the same substrate with respect to the substrate plane. This is a magnetic sensor capable of detecting a vertical magnetic field.

  It has a quadrangular magnetic material 201a and a quadrangular magnetic converging material 201b having a length different from that of the magnetic sensitive part, and a longitudinal center line Ma of the magnetic material and a longitudinal center line of the magnetic converging material. Mb includes a first magnetic detection unit 201 arranged horizontally so as not to cross each other, and a second magnetic detection unit 202 having the same structure as the first magnetic detection unit, Both the magnetic material of the magnetic detector and the magnetic material of the second magnetic detector are sandwiched between the magnetic converging material of the first magnetic detector and the magnetic converging material of the second magnetic detector. And the first magnetic detection unit and the second magnetic detection unit are arranged so as not to overlap each other.

In addition, a first arrangement pattern 211 including a magnetically sensitive material of the first magnetic detection unit and a connection part 211a that electrically connects the magnetically sensitive material of the second magnetic detection unit in series.
FIGS. 21A to 21D are configuration diagrams of a basic arrangement pattern of a magnetic sensor capable of detecting a magnetic field in a direction perpendicular to the substrate plane, and are perpendicular to the substrate plane on the same substrate. This is a magnetic sensor capable of detecting a magnetic field.

  It has a quadrangular magnetic material 203a and a quadrangular magnetic converging material 203b having a length different from that of the magnetic sensitive part, and a longitudinal center line Ma of the magnetic material and a longitudinal center line of the magnetic converging material. Mb has a third magnetic detector 203 arranged horizontally so as not to cross each other, and a line-symmetric structure with respect to a line perpendicular to the longitudinal direction of the magnetic converging material of the third magnetic detector The magnetic sensing material of the fourth magnetic detection unit 204 and the third magnetic detection unit is sandwiched between the magnetic convergence material of the third magnetic detection unit and the magnetic convergence material 204b of the fourth magnetic detection unit. The third magnetic detection unit and the fourth magnetic detection unit are arranged in parallel with each other so as not to overlap each other.

Moreover, it has the 2nd arrangement pattern 212 which consists of the connection part 212a which electrically connects the magnetic sensitive material of a 3rd magnetic detection part, and the magnetic sensitive material of a 4th magnetic detection part in series.
FIG. 22 shows a magnetic sensor that can detect a magnetic field in any axial direction parallel to the substrate plane (in FIG. 22, an axis parallel to the substrate plane and perpendicular to the longitudinal direction of the magnetic converging material). It is a figure which shows a basic structure. The first arrangement pattern and the first arrangement arranged opposite to each other so as not to overlap each other in a line-symmetrical positional relationship parallel to the longitudinal direction of the magnetic flux concentrators 201b and 202b of the first arrangement pattern It has a first structure A composed of a third arrangement pattern 213 having the same structure as the pattern 211.

  FIG. 23 shows an arbitrary biaxial magnetic field parallel to the substrate plane (in FIG. 23, the axis parallel to the substrate plane and perpendicular to the longitudinal direction of the magnetic converging material of the structure A and the substrate plane. 2 is a diagram showing a basic structure of a magnetic sensor that detects two parallel axes that are parallel to each other and perpendicular to the longitudinal direction of a magnetic converging material having a structure B. The first structure A and the second structure B having the same structure as the first structure A are arranged so as not to be parallel to each other and to overlap each other.

  FIG. 24 is a diagram showing a basic structure of a magnetic sensor that detects a magnetic field in a direction perpendicular to the substrate plane. The second arrangement pattern 212 and the fourth arrangement pattern 214 having the same structure as the second arrangement pattern are the second arrangement pattern with respect to the point on the longitudinal direction side of the magnetic converging material of the second arrangement pattern. The arrangement pattern and the fourth arrangement pattern have a third structure C in which the arrangement pattern and the fourth arrangement pattern are point-symmetric with respect to each other and spaced apart from each other so as not to overlap each other.

  FIG. 25 shows an arbitrary biaxial magnetic field parallel to the substrate plane (in FIG. 23, the axis parallel to the substrate plane and perpendicular to the longitudinal direction of the magnetic converging material of structure A and the substrate plane). FIG. 5 is a diagram showing another basic structure of a magnetic sensor that detects a magnetic field of two parallel axes that are parallel to each other and perpendicular to the longitudinal direction of the magnetic converging material of structure B. The first structure A and the second structure B are arranged in a vertical positional relationship with each other.

The first structure A and the second structure B, or the first structure A and the third structure C, or the second structure B and the third structure C, or the first structure A and the second structure The structure B and the third structure C are arranged on the same plane.
FIG. 26 is a diagram showing a basic structure of a magnetic sensor in which a plurality of arrangement patterns are arranged. In the first arrangement pattern 211 to the fourth arrangement pattern 214, a plurality of arrangement patterns having the same structure exist in each arrangement pattern to form an arrangement pattern group, and the arrangement pattern group is parallel to each other and The magnetic sensitive parts arranged so as not to overlap and having the same arrangement pattern are electrically connected so as to form one series connection.

FIG. 27 is a diagram showing the shape of the end of the magnetic flux concentrating plate. In each of the magnetic converging materials of the first arrangement pattern 211 to the fourth arrangement pattern 214, the magnetic converging member 211c is T-shaped on the short side of the magnetic converging material farther from the structural center point of the arrangement pattern. The distance A between the magnetic flux concentrating member 211c and the adjacent magnetic flux concentrating material is arranged in a positional relationship farther than the distance B between the two magnetic flux converging materials in the arrangement pattern.
FIG. 28 is a diagram for explaining the distance between the magnetic focusing plates and the magnetoresistive (GMR) element. The distance D between the magnetic flux concentrating materials between the respective arrangement patterns is configured to be longer than the distance E between the two magnetic flux converging materials in each arrangement pattern.

  FIGS. 29A to 29C are diagrams showing a shrink structure of an arrangement pattern. It passes through the structural center point N of one of the two magnetic flux concentrating materials 201b and 202b of the first arrangement pattern 211 and the two magnetic converging materials 202b included in the first arrangement pattern, and is horizontal to the long side of the magnetic converging material 202b. In the fifth arrangement pattern 215 that is in a line-symmetrical relationship with the first arrangement pattern 211 with respect to a straight line, the connection portion 216a that electrically connects the magnetic sensitive materials 201a and 202a has the fifth arrangement pattern 215. The structure D is composed of a sixth arrangement pattern 216 arranged at the end of the magnetic sensitive material 201a, 202a opposite to the connection portion 215a.

  FIG. 30 is a diagram showing an arrangement of the shrink structure shown in FIG. A plurality of first arrangement patterns 211 and sixth arrangement patterns 216 are alternately and repeatedly arranged at the connection portion 211b so that the magnetic sensitive materials in the first arrangement pattern are electrically connected in series. The magnetically sensitive materials in the sixth arrangement pattern are connected to each other by the connecting portion 216b so as to be electrically connected in series, and the distance F1 between the magnetic flux concentrators 201b and 202b in the first arrangement pattern is connected. And the distance F2 between the magnetic flux concentrators 201b and 202b in the sixth arrangement pattern are equal to each other.

FIG. 31 is a diagram showing a case where the magnetoresistive (GMR) elements in each structure described above have the same resistance (area). The areas of the magnetic sensitive materials 201a and 202a constituting the two arrangement patterns in each structure are configured to be equal to each other.
FIG. 32 is a diagram showing an electrical connection between the electrode pad and the signal processing circuit. The ends of the magnetic sensitive materials 201a and 202a that are not electrically joined by the connecting portions 211a and 213a are electrically joined to the electrode pads (P1 to P4) or the signal processing circuit (IC).

FIG. 33 is a diagram showing a positional relationship (plane) between the magnetoresistive (GMR) element and the magnetic focusing plate. In the single arrangement pattern 211, the longitudinal middle line La of the magnetic sensitive materials 201a, 202a of the first and second magnetic sensing units 201, 202 constituting the single arrangement pattern is the first and second. Are arranged between the center line Lb in the longitudinal direction of the magnetic flux concentrators 201b and 202b of the magnetic sensing units 201 and 202 and the symmetry point or symmetry line in a single arrangement pattern.
FIG. 34 is a diagram illustrating the positional relationship between the magnetic flux concentrating material and the magnetic sensitive material in the height direction. Magnetic sensitive materials 201a to 204a and magnetic converging materials 201b to 204b are formed on the same plane substrate, and the bottom surface of the magnetic sensitive material is disposed below the bottom surface of the magnetic converging material.

As described above, the basic arrangement pattern in which the magnetoresistive element and the magnetic focusing plate in the present invention are combined has been described. The magnetoresistive element is a giant magnetoresistive element (GMR) or a tunnel magnetoresistive element (TMR). It is desirable to be.
Further, it is desirable that the width of the magnetoresistive element in the short direction is 0.1 to 20 microns. Further, it is desirable that the magnetic converging portion is made of a soft magnetic material such as NiFe, NiFeB, NiFeCo, CoFe or the like. Furthermore, the thickness of the magnetic flux concentrator is desirably 1 to 40 microns.

  Next, a magnetic detection method of the magnetic sensor will be described below. Using the magnetic sensor having the first structure A having the first arrangement pattern and the third arrangement pattern, the magnetic field (X magnetic field) parallel to the longitudinal direction of the magnetic converging material is changed between the first arrangement pattern and the third arrangement pattern. The magnetic field perpendicular to the longitudinal direction of the magnetic converging material (Y magnetic field) is converted into the same direction, and further the magnetic field perpendicular to the plane direction of the magnetic converging material (Z magnetic field). ) Is canceled because a magnetic field is applied to adjacent magnetic sensitive portions in a single pattern so as to be +/−, and the resistance difference between the magnetic sensor having the first arrangement pattern and the magnetic sensor having the third arrangement pattern is canceled out. Is calculated solely for the magnetic field (X magnetic field) parallel to the longitudinal direction of the magnetic converging material of structure A.

  In addition, a magnetic field parallel to the longitudinal direction of the magnetic converging material is obtained using a magnetic sensor having the second structure (B) in which the arrangement pattern of the first structure A is not parallel to each other and does not overlap each other. (Y magnetic field) is converted in the opposite direction with respect to the first arrangement pattern and the third arrangement pattern, and the magnetic field perpendicular to the longitudinal direction of the magnetic converging material (X magnetic field) is converted into the same direction. Further, the magnetic field perpendicular to the plane direction of the magnetic converging material (Z magnetic field) is canceled because the magnetic field is applied so as to be +/− in the adjacent magnetic sensitive part in the single pattern, and is canceled from the second structure (B). By calculating the resistance difference of the magnetic sensor, only the magnetic field (Y magnetic field) parallel to the longitudinal direction of the magnetic converging material of structure B is calculated alone.

In addition, using a magnetic sensor having the second arrangement pattern and the fourth arrangement pattern, the magnetic field (X magnetic field) parallel to the longitudinal direction of the magnetic converging material is compared to the second arrangement pattern and the fourth arrangement pattern. The magnetic field converted to the same direction, the magnetic field perpendicular to the longitudinal direction of the magnetic converging material (Y magnetic field) is converted into the same direction, and the magnetic field perpendicular to the planar direction of the magnetic converging material (Z magnetic field) Magnetic convergence is achieved by calculating the difference in resistance between the magnetic sensor having the fourth arrangement pattern and the magnetic sensor having the second arrangement pattern, which is converted in the opposite direction with respect to the arrangement pattern and the fourth arrangement pattern. Only the magnetic field perpendicular to the plane direction of the material (Z magnetic field) is calculated alone.
In addition, by combining the magnetic detection methods described above, it is possible to detect the X magnetic field, the Y magnetic field, and the Z magnetic field separately from the three-axis hybrid magnetic field on the same plane.

1 Antiferromagnetic layer 2 Pinned layer (pinned layer)
3 Cu layer (spacer layer)
4 Free layer (free rotation layer)
21, 31, 41, 51, 61, 71, 81, 91, 101, 171 GMR elements 22, 52, 62, 72, 82, 92, 102 One magnetic converging plate 23, 53, 63, 73, 83, 93 , 103 The other magnetic converging plates 32, 33, 42, 43 The magnetic converging plate 50 The first magnetic sensor unit 51a The first part 51b of the GMR element 51 The second part 51c of the GMR element 51 The third part 51d of the GMR element 51 Fourth part 51e of element 51e Fifth part 51f of GMR element 51 Sixth part 52a of GMR element 51 First part 52b of comb teeth of one magnetic focusing plate 52 Second part of comb teeth of one magnetic focusing plate 52 52c The third portion 53a of the comb teeth of one magnetic focusing plate 52 The first portion 53b of the comb teeth of the other magnetic focusing plate 53 The second portion 53c of the comb teeth of the other magnetic focusing plate 53 The other magnetic focusing plate 3rd portion 60 of the comb tooth 60 2nd magnetic sensor part 61a 1st portion 61b of GMR element 61 2nd portion 61c of GMR element 61 3rd portion 61d of GMR element 61 4th portion 61e of GMR element 61 GMR element 61 61 5th portion 61f 6th portion 62a of GMR element 61 Comb first portion 62b of one magnetic converging plate 62 Comb second portion 62c of one magnetic converging plate 62 Comb of one magnetic converging plate 62 The third portion 63a of the teeth The first portion 63b of the comb teeth of the other magnetic focusing plate 63 The second portion 63c of the comb teeth of the other magnetic focusing plate 63 The third portion 90 of the comb teeth of the other magnetic focusing plate 63 Magnetic sensor portion 91a First portion 91b of GMR element 91 Second portion 91e of GMR element 91 Third portion 91f of GMR element 91 Fourth portion 92a of GMR element 91 First portion 9 of one magnetic focusing plate 92 b Second portion 93a of one magnetic focusing plate 92 First portion 93b of the other magnetic focusing plate 93 Second portion 100 of the other magnetic focusing plate 93 Sixth magnetic sensor portion 101a First portion 101b of the GMR element 101 GMR Second portion 101e of element 101 Third portion 101f of GMR element 101 Fourth portion 102a of GMR element 101 First portion 102b of one magnetic converging plate 102 Second portion 103a of one magnetic converging plate 102 Other magnetic converging plate 103 First part 103b Second magnetic converging plate 103 second part 110, 200 Coplanar substrates 111 to 122 Electrode pads 112, 113, 115, 116, 117, 118, 119, 120, 121, 122 Electrodes 131 to 142 Wiring 150, 180 X-axis sensor 160, 190 Y-axis sensor 170 Z-axis sensor 171a, 71b Magnetic sensing portions 172, 173 Magnetic converging plate 172a First portion 173a of magnetic converging plate 172 First portion 201 of magnetic converging plate 173 First magnetic detecting portions 201a, 203a Magnetic sensitive material 201b, 203b Magnetic converging material 202 Second Magnetic detecting unit 203 Third magnetic detecting unit 204 Fourth magnetic detecting unit 204b Magnetic converging material 211 First arrangement pattern 211a, 211b, 212a, 213a, 216b Connection unit 211c Magnetic converging member 212 Second arrangement pattern 214 Fourth arrangement pattern 215 Fifth arrangement pattern 216 Sixth arrangement pattern

Claims (38)

In a magnetic sensor capable of detecting a magnetic field in an arbitrary axial direction parallel to the substrate plane,
A quadrangular magnetic material on the substrate and a quadrangular magnetic converging material having a length different from that of the magnetically sensitive portion, parallel to the substrate, and a midpoint in the longitudinal direction of the magnetic material. A first magnetic detector arranged horizontally so that a passing middle line and a longitudinal middle line of the magnetic flux concentrator do not cross each other;
A second magnetic detection unit having the same configuration as the first magnetic detection unit,
Both the magnetic material of the first magnetic detector and the magnetic material of the second magnetic detector are the same as the magnetic converging material of the first magnetic detector and the magnetism of the second magnetic detector. It is arranged in a point-symmetrical positional relationship so as to be sandwiched between the converging material and so that the first magnetic detection unit and the second magnetic detection unit do not overlap each other,
A first arrangement pattern having a zigzag-shaped magnetoresistive element comprising a magnetically sensitive material of the first magnetic detector and a connecting portion for electrically connecting the magnetically sensitive material of the second magnetic detector in series. have,
The positional relationship between the magnetic converging material and the magnetic sensitive material is symmetric with respect to a line parallel to the first arrangement pattern and a plane parallel to the longitudinal direction of the magnetic converging material of the first arrangement pattern. magnetic sensors becomes, and characterized in that it have a first structure comprising a third arrangement pattern having the same structure as the overlap so as not to apart from oppositely disposed said first array patterns on. In a magnetic sensor capable of detecting a magnetic field perpendicular to the substrate plane,
A quadrangular magnetic material on the substrate and a quadrangular magnetic converging material having a length different from that of the magnetically sensitive portion, parallel to the substrate, and a midpoint in the longitudinal direction of the magnetic material. A third magnetic detector arranged horizontally so that the passing midlines do not cross each other;
A fourth magnetic detector having a line symmetry with respect to a line perpendicular to the longitudinal direction of the magnetic converging material of the third magnetic detector; and a magnetic material of the third magnetic detector, The third magnetic detector and the fourth magnetic detector are arranged so as to be sandwiched between the magnetic converging material of the third magnetic detector and the magnetic converging material of the fourth magnetic detector. Are arranged so that they are parallel to each other and do not overlap,
A second arrangement pattern having a zigzag-shaped magnetoresistive element comprising a magnetically sensitive material of the third magnetic detector and a connecting portion that electrically connects the magnetically sensitive material of the fourth magnetic detector in series. I have a,
The second arrangement pattern and a fourth arrangement pattern having the same structure as the second arrangement pattern are parallel to the substrate plane, and are arranged on the longitudinal direction side of the magnetic converging material of the second arrangement pattern. The second arrangement pattern and the fourth arrangement pattern have a third structure in which the second arrangement pattern and the fourth arrangement pattern are arranged opposite to each other so as to be symmetrical with respect to the point Mo so as not to overlap each other. A magnetic sensor. Wherein a first structure, a second structure having a structure similar to that of the first A magnetic according to claim 1, characterized in that it is arranged so as not to overlap each other and not parallel to each other Sensor. The magnetic sensor according to claim 3 , wherein the first structure and the second structure are arranged in a vertical positional relationship with each other. The first structure and the second structure, or the first structure and the third structure, or the second structure and the third structure, or the first structure and the second structure. the magnetic sensor according to any of claims 1 to 4 and the third structure is characterized in that it is arranged on the same plane as. In the first arrangement pattern to the fourth arrangement pattern, a plurality of arrangement patterns having the same structure exist in each arrangement pattern to form an arrangement pattern group, and the arrangement pattern group is parallel to each other and is arranged non-overlapping manner, and is sensitive sections each having respective identical arrangement pattern, in any one of claims 1 to 5, characterized in that it is connected to electrically so that one series The magnetic sensor described. In each of the magnetic flux concentrating materials from the first arrangement pattern to the fourth arrangement pattern, the magnetic converging member is T-shaped on the short side of the magnetic converging material in a position far from the structural center point of the arrangement pattern. The distance (A) between the magnetic flux concentrating member and the adjacent magnetic flux converging material is arranged in a positional relationship farther than the distance between two magnetic flux converging materials in the arrangement pattern. the magnetic sensor according to any of claims 1 to 6, wherein. The magnetic sensor according to any of claims 1 to 7 the distance between the magnetic flux concentrator member, wherein longer than the distance between two magnetic convergence material within said respective arrangement patterns among the respective arrangement patterns.   The first arrangement pattern is parallel to the plane direction of the substrate and passes through the structural center point of one of the two magnetic flux concentrating materials of the first arrangement pattern, and In the fifth arrangement pattern having a symmetric positional relationship with the first arrangement pattern with respect to a straight line parallel to the long side, the connecting portion for electrically connecting the magnetically sensitive material is the fifth arrangement pattern. The magnetic sensor according to claim 1, wherein the magnetic sensor has a structure including a sixth arrangement pattern arranged at an end portion of the magnetosensitive material opposite to the connection portion. A plurality of the first arrangement pattern and the sixth arrangement pattern are alternately and repeatedly arranged, and the magnetosensitive materials in the first arrangement pattern are electrically connected in a series connection. Connected to each other so that the magnetic sensitive materials in the sixth arrangement pattern are electrically connected to each other so as to be electrically connected in series.
The magnetic sensor according to claim 9 , wherein a distance between the magnetic flux concentrating materials in the first arrangement pattern and a distance between the magnetic flux concentrating materials in the sixth arrangement pattern are equal to each other. The magnetic sensor according to any of claims 1 to 10 wherein the area of each of the sense磁材constituting two arrangement patterns in each structure, characterized in that equal to each other. End of the sense磁材which are not electrically connected by the connecting portion, of the claims 1 to 11, characterized in that it is electrically bonded to the electrode pads or the signal processing circuit according to any one Magnetic sensor. In the single arrangement pattern, the midline in the longitudinal direction of the magnetically sensitive material of the first and second magnetic sensing units constituting the single arrangement pattern is parallel to the substrate plane. a first and second magnetically sensitive portion of the magnetic flux concentrator member in the longitudinal direction of the center line, according to claim 1 to 12, characterized in that disposed between the point of symmetry or symmetry line of the said single arrangement pattern The magnetic sensor in any one of. The magnetic flux concentrator member and the feeling磁材is formed on the same substrate, either a bottom surface of the feeling磁材of claims 1 to 13, characterized in that it is arranged below the bottom surface of the magnetic flux concentrator member A magnetic sensor according to claim 1. The magnetic sensor according to any of claims 1 to 14 wherein the sense磁材, characterized in that a giant magnetoresistive element or a tunnel magneto-resistance element. The magnetic sensor according to any one of claims 1 to 15 , wherein the width of the magnetosensitive material in the short direction is 0.1 to 20 microns. It said magnetic convergence material, NiFe, NiFeB, NiFeCo, a magnetic sensor according to any one of claims 1 to 16, characterized in that it consists of a soft magnetic material CoFe. The magnetic sensor according to any one of the thickness of the magnetic flux concentrator material, according to claim 1 to 17, wherein the 1 to 40 microns. One comb-like magnetic converging plate in which a plurality of protruding members are formed at equal intervals;
The other magnetic converging plate in the shape of a comb, which is provided so as to face the one magnetic converging plate and in which the protrusions of the plural protruding members are formed at equal intervals;
Wherein with one and the other magnetoresistive element arranged in zigzag along said protruding member of the magnetic flux concentrator of
On one outer side of the U-shaped portion of the magnetoresistive element in the first arrangement pattern or the third arrangement pattern , a protrusion of the one magnetic convergence plate is arranged, and the U-shape of the magnetoresistive element A projection of the other magnetic flux concentrating plate is disposed on the other outer side of the shaped portion ,
2. The magnetic sensor according to claim 1, wherein the protrusion has an arrangement pattern corresponding to a magnetic converging material in the first arrangement pattern or the third arrangement pattern . The magnetic sensor according to claim 19 , wherein the single arrangement patterns are line-symmetric with each other. The magnetic sensor according to claim 19 or 20 , wherein when the magnetic converging plate is removed, the protrusion of the magnetic converging plate protrudes from the magnetoresistive element. The distance between the first portion of the one magnetic flux concentrating plate and the first portion of the other magnetic flux concentrating plate sandwiching the magnetic sensing part of the magnetoresistive element is narrower than the distance between the magnetic converging plates between the arrangement patterns. The magnetic sensor according to claim 19, 20 or 21 . The magnetic sensor according to any one of claims 19 to 22 , wherein a connection portion of the magnetosensitive portion of the magnetoresistive element is not made of the same material as the magnetosensitive portion. A T-shaped magnetic focusing member is provided in the first part of the one magnetic focusing plate and the first part of the other magnetic focusing plate, and the distance between the magnetic focusing member and the adjacent magnetic focusing material is The magnetic sensor according to any one of claims 19 to 23 , wherein the magnetic sensor is disposed in a positional relationship farther than a distance between two magnetic flux concentrators in the arrangement pattern. The magnetic sensor according to any one of claims 19 to 24 , wherein the single arrangement pattern is arranged so as to be displaced in the X-axis direction. The first part of the one magnetic flux concentrating plate and the magnetic sensitive part and the first part of the other magnetic converging plate and the magnetic sensitive part are not in contact with each other. the magnetic sensor according to any one of claims 19 to 25 and a first portion of the other magnetic flux concentrator, characterized in that it is disposed in the magnetic sensitivity surfaces and equidistant. The magnetically sensitive portion is disposed below the first portion of the one magnetic flux concentrating plate and the first portion of the other magnetic flux converging plate and does not exceed the midline of the magnetic converging plate in cross section. The magnetic sensor according to any one of claims 19 to 26 . The magnetic sensor according to any one of the tip shape of the first portion not connected to the magnetic flux concentrator is, claims 19 to 27, characterized in that it is rectangular. One comb-like magnetic converging plate in which a plurality of protruding members are formed at equal intervals;
The other magnetic converging plate in the shape of a comb, which is provided so as to face the one magnetic converging plate and in which the protrusions of the plural protruding members are formed at equal intervals;
Wherein with the one and the other magnetoresistive element arranged in zigzag along said protruding member of the magnetic flux concentrator of
The protrusion of the other magnetic converging plate is in contact with one of the U-shaped portions of the magnetoresistive element in the second arrangement pattern or the fourth arrangement pattern, and the U-shape of the magnetoresistive element. On the other outer side of the portion, the projection of the one magnetic flux concentrating plate is in contact,
3. The magnetic sensor according to claim 2, wherein the protrusion has an arrangement pattern corresponding to a magnetic converging material in the second arrangement pattern or the fourth arrangement pattern . 30. The magnetic sensor according to claim 29 , wherein the single arrangement pattern is point-symmetric with respect to each other. The magnetic sensor according to claim 29 or 30 , wherein a distance between the magnetic converging plates of the single arrangement pattern is narrower than a distance between adjacent single arrangement patterns. 32. The magnetic sensor according to claim 29, 30 or 31 , wherein when the magnetic converging plate is removed, the protrusion of the magnetic converging plate protrudes from the magnetoresistive element. A T-shaped magnetic focusing member is provided in the first part of the one magnetic focusing plate and the first part of the other magnetic focusing plate, and the distance between the magnetic focusing member and the adjacent magnetic focusing material is The magnetic sensor according to any one of claims 29 to 32 , wherein the magnetic sensor is disposed in a positional relationship farther than a distance between two magnetic flux concentrators in the arrangement pattern. In the magnetic detection method using the magnetic sensor in any one of Claims 1 thru | or 33 ,
By using the fact that magnetic field components in two or more directions among the magnetic field components in any three axial directions that are different from each other in the space are bent by the magnetic converging material, the magnetic field in any axial direction in the space is made independent. The magnetic detection method of the magnetic sensor characterized by detecting by carrying out. A magnetic detection method using the magnetic sensor according to any one of claims 1, 3, 4 to 8, 11 to 18 ,
Using a magnetic sensor having a first structure having the first arrangement pattern and the third arrangement pattern, a magnetic field parallel to the longitudinal direction of the magnetic converging material is applied to the first arrangement pattern and the third arrangement pattern. The magnetic field perpendicular to the longitudinal direction of the magnetic converging material is converted into the same direction, and the magnetic field perpendicular to the plane direction of the magnetic converging material is converted into a single pattern. The magnetic field is applied so as to be +/− in the adjacent magnetic sensing part, so that it is canceled out, and the resistance of the magnetic sensing part of the magnetic sensor having the first arrangement pattern and the magnetic sensor having the third arrangement pattern is reduced. A magnetic detection method for a magnetic sensor, wherein only the magnetic field parallel to the longitudinal direction of the magnetic converging material can be calculated independently by calculating the difference. In the magnetic detection method using the magnetic sensor in any one of Claim 3, 4 thru | or 8, 11 thru | or 18 ,
Using a magnetic sensor having a second structure in which the arrangement pattern of the first structure is not parallel to each other and does not overlap each other, a magnetic field parallel to the longitudinal direction of the magnetic converging material is A magnetic field perpendicular to the longitudinal direction of the magnetic converging material is converted in opposite directions with respect to one arrangement pattern and the third arrangement pattern, and further converted into the same direction, and further the planar direction of the magnetic converging material The magnetic field perpendicular to the magnetic field is canceled by the magnetic sensitive part adjacent to the single pattern in the single pattern, so that the magnetic field is canceled, and by calculating the difference in resistance of the magnetic sensor having the second structure, A magnetic detection method for a magnetic sensor, wherein only a magnetic field parallel to a longitudinal direction of a magnetic converging material can be calculated independently. In the magnetic detection method using the magnetic sensor in any one of Claim 2, 5 thru | or 8, 11 thru | or 18 ,
Using a magnetic sensor having the second arrangement pattern and the fourth arrangement pattern, the magnetic field parallel to the longitudinal direction of the magnetic converging material is different from the second arrangement pattern and the fourth arrangement pattern, respectively. The magnetic field that is converted in the same direction and is perpendicular to the longitudinal direction of the magnetic converging material is converted into the same direction, and the magnetic field that is perpendicular to the plane direction of the magnetic converging material is the second arrangement pattern and the fourth By calculating the difference in resistance between the magnetic sensor having the fourth arrangement pattern and the magnetic sensor having the second arrangement pattern. A magnetic detection method for a magnetic sensor, wherein only a magnetic field perpendicular to a plane direction can be calculated independently. By combining a magnetic detection method according to any one of claims 34 to 37, the magnetic detection method of a magnetic sensor and detecting independently the magnetic field components of the two or three axes.

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