JP6111854B2 - Pure water production equipment - Google Patents

Description

  The present invention includes a membrane separation unit as a reverse osmosis membrane module for producing permeated water and concentrated water from supply water, an electrodeionization stack for producing desalted water and concentrated water by desalting the permeated water, It is related with the pure water manufacturing apparatus provided with.

  High-purity pure water that does not contain impurities is used in the manufacture of pharmaceuticals and cosmetics, the cleaning of electronic parts and precision equipment, and the like. In the case of producing this kind of pure water, generally, raw water such as ground water and tap water is subjected to membrane separation treatment with a reverse osmosis membrane module to produce permeated water from which most of dissolved salts are removed. Thereafter, the purity is further increased by purifying the permeate with an electrodeionization stack. In the following description, the reverse osmosis membrane module is also called “RO membrane module”, the reverse osmosis membrane element is also called “RO membrane element”, and the reverse osmosis membrane used for the RO membrane element is also called “RO membrane”.

  In the pure water manufacturing apparatus provided with the RO membrane module, the flow rate of the permeated water is set in advance so as to cover the maximum amount of water consumed at the demand location. On the other hand, the RO membrane has a water permeability coefficient that varies depending on the temperature of the supplied water and the state of the membrane (pore blockage and oxidative deterioration of the material). That is, the flow rate of the permeate varies depending on the temperature of the feed water and the state of the membrane. Therefore, flow rate feedback water volume control and pressure feedback water volume control are performed as a method of operating while maintaining the flow rate of permeate water constant (see Patent Document 1). For example, in the flow rate feedback water amount control, an inverter controls the drive frequency of the pump that sends the supplied water to the RO membrane module so that the detected flow rate value of the permeated water becomes a preset target flow rate value.

JP 2005-296945 A

  In a conventional pure water production apparatus, a pump (between the RO membrane module and the electrodeionization stack) that sends permeate to the electrodeionization stack in order to reliably supply the produced pure water to the demand point. The driving frequency of the pump provided in the above was set high. Therefore, in the conventional pure water manufacturing apparatus, it is difficult to suppress the power consumption of the pump.

  Therefore, an object of the present invention is to provide a pure water production apparatus that can suppress power consumption of a pump that sends permeate to an electrodeionization stack.

  The present invention includes a reverse osmosis membrane module that separates feed water into permeate and first concentrated water, a feed water line that can feed the feed water to the reverse osmosis membrane module, and rotation according to an input drive frequency. A first pump that is driven at a speed and discharges supply water toward the reverse osmosis membrane module; a first inverter that outputs a first drive frequency corresponding to an input command signal to the first pump; An electrodeionization stack for producing desalted water and second concentrated water by desalting, a permeate line capable of sending the permeated water separated by the reverse osmosis membrane module to the electrodeionization stack, and an input A second pump that is driven at a rotational speed in accordance with the driving frequency and discharges permeate toward the electrodeionization stack, and outputs a second driving frequency corresponding to the input command signal to the second pump. You A second inverter, a flow rate detecting means for detecting the flow rate of the permeated water, a temperature detecting means for detecting the temperature of the water flowing through the apparatus, and a pressure detection for detecting the pressure of the permeated water on the outlet side of the second pump. And a first drive frequency of the first pump by a feedback control algorithm so that a detected flow rate value of the flow rate detection unit becomes a preset target flow rate value, and the calculated value of the first drive frequency is calculated. Corresponding to a pressure loss occurring at least in the deionization chamber of the electrodeionization stack and thereafter, in accordance with the detected temperature value of the temperature detection means, and a first control unit that outputs a corresponding command signal to the first inverter The target pressure value is set so as to be a pressure value to be adjusted, and the feedback control algorithm is set so that the deviation between the target pressure value and the detected pressure value of the pressure detecting means becomes zero. A second driving frequency of the second pump is calculated by Gorizumu, a second control unit for outputting a command signal corresponding to the calculated value of the second driving frequency to the second inverter, to the pure water production apparatus comprising a.

  The present invention also provides a supply water tank that stores supply water, a first reverse osmosis membrane module that separates the supply water into first permeated water and first concentrated water, and supply water stored in the supply water tank. Is supplied to the first reverse osmosis membrane module, and is supplied at a rotational speed corresponding to the input first driving frequency, and discharges the supplied water toward the first reverse osmosis membrane module. A pump, a first inverter that outputs a first drive frequency corresponding to the input command signal to the first pump, and a second reverse osmosis that separates the first permeate into second permeate and second concentrate. A membrane module, a first permeate line capable of delivering the first permeate separated by the first reverse osmosis membrane module to the second reverse osmosis membrane module, and one of the feed water stored in the feed water tank Supply to the first permeate line Auxiliary line, a second pump that is driven at a rotational speed corresponding to the input second driving frequency and discharges the first permeated water toward the second reverse osmosis membrane module, and corresponds to the input command signal A second inverter that outputs a second drive frequency to the second pump; an electrodeionization stack that produces desalted water and third concentrated water by desalting the second permeated water; and the second reverse osmosis membrane. The second permeated water separated by the module is driven at a rotation speed corresponding to the input third driving frequency, and the second permeated water is sent to the electrodeionization stack. A third pump that discharges toward the ion stack, a third inverter that outputs a third drive frequency corresponding to the input command signal to the third pump, and the water quality of the first permeated water or the second permeated water are detected. Water quality detection means A first flow rate detecting means for detecting the flow rate of the first permeated water, a second flow rate detecting means for detecting the flow rate of the second permeated water, a temperature detecting means for detecting the temperature of the water flowing through the apparatus, and the third A pressure detecting means for detecting the pressure of the second permeated water on the outlet side of the pump and a feedback control algorithm so that the first detected flow rate value of the first flow rate detecting means becomes a first target flow rate value set in advance; The first drive frequency of the first pump is calculated, a command signal corresponding to the calculated value of the first drive frequency is output to the first inverter, and the detected water quality value of the water quality detection means and a preset reference A first control unit that decreases the first target flow rate value and a second detected flow rate value of the second flow rate detection means are preset when the difference from the water quality value exceeds a preset specified value. It becomes the second target flow rate value A second control unit that calculates a second drive frequency of the second pump by a feedback control algorithm and outputs a command signal corresponding to a calculated value of the second drive frequency to the second inverter; According to the detected temperature value of the detection means, the pressure of the second permeated water discharged from the third pump is at least a pressure value corresponding to a pressure loss generated in the deionization chamber of the electrodeionization stack and thereafter. And the third drive frequency of the third pump is calculated by a feedback control algorithm so that the deviation between the target pressure value and the detected pressure value of the pressure detecting means becomes zero. A third control unit that outputs a command signal corresponding to the calculated value of the third drive frequency to the third inverter, wherein the first control unit is configured to output the first target flow. When the value is decreased, the shortage of the first permeate supplied to the second pump via the first permeate line is the first permeate from the supply water tank via the supply water auxiliary line. The present invention relates to a pure water production apparatus supplied to a permeate line.

  Further, in the first control unit, when the first target flow rate value is not decreased, the first permeate is sent to the first permeate line mainly by the discharge force of the first pump, and the first When the target flow rate value is decreased, the first permeate is sent to the first permeate line mainly by the discharge force of the first pump, and the supply water assist is made by the suction force of the second pump. It is preferable that the feed water is sent to the first permeate line through the line.

  Further, the first control unit sets the first target flow rate value in advance when the difference between the detected water quality value of the water quality detecting means and the preset reference water quality value exceeds a preset specified value. It is preferable to decrease at a set rate.

  The present invention also provides a supply water tank that stores supply water, a first reverse osmosis membrane module that separates the supply water into first permeated water and first concentrated water, and supply water stored in the supply water tank. Is supplied to the first reverse osmosis membrane module, and is supplied at a rotational speed corresponding to the input first driving frequency, and discharges the supplied water toward the first reverse osmosis membrane module. A pump, a first inverter that outputs a first drive frequency corresponding to the input command signal to the first pump, and a second reverse osmosis that separates the first permeate into second permeate and second concentrate. A membrane module, a first permeate line capable of delivering the first permeate separated by the first reverse osmosis membrane module to the second reverse osmosis membrane module, and a first permeate separated by the first reverse osmosis membrane module One part of permeate is sent to the water tank A second pump that is driven at a rotational speed corresponding to the second driving frequency inputted to the permeated water return line and discharges the first permeated water toward the second reverse osmosis membrane module, and an input command signal A second inverter that outputs a corresponding second drive frequency to the second pump, an electrodeionization stack that produces desalted water and third concentrated water by desalinating the second permeate, and the second reverse The second permeated water separated by the osmotic membrane module is driven at a rotational speed corresponding to the input third driving frequency, and the second permeated water is sent to the electrodeionization stack. A third pump that discharges toward the electrodeionization stack, a third inverter that outputs a third drive frequency corresponding to the input command signal to the third pump, and a first that detects the flow rate of the first permeate. A flow rate detecting means and a second Second flow rate detecting means for detecting the flow rate of excess water, temperature detecting means for detecting the temperature of water flowing in the apparatus, and pressure detecting means for detecting the pressure of the second permeated water on the outlet side of the second pump. And the total flow rate of the second permeated water and the second concentrated water is set as the first target flow rate value, and the first detected flow rate value of the first flow rate detection means becomes the first target flow rate value, A first control unit that calculates a first drive frequency of the first pump by a feedback control algorithm, and outputs a command signal corresponding to the calculated value of the first drive frequency to the first inverter; and the second flow rate detection means A second drive frequency of the second pump is calculated by a feedback control algorithm so that the second detected flow rate value becomes a second target flow rate value set in advance, and a finger corresponding to the calculated value of the second drive frequency is calculated. A second control unit that outputs a command signal to the second inverter, and at least the electrodeionization stack as a pressure of the second permeated water discharged from the third pump in accordance with a detected temperature value of the temperature detecting means. The target pressure value is set so that the pressure value corresponds to the pressure loss generated in the desalting chamber and thereafter, and the deviation between the target pressure value and the detected pressure value of the pressure detecting means is zero. A third control unit that calculates a third drive frequency of the third pump by a feedback control algorithm and outputs a command signal corresponding to the calculated value of the third drive frequency to the third inverter, The first permeated water that exceeds the total flow rate of the two permeated water and the second concentrated water is sent from the second permeated water line to the supply water tank via the permeated water return line. About.

  The pure water production apparatus further includes a water quality detection means for detecting the quality of the first permeated water or the second permeated water, and the first control unit is a regulation in which a detection water quality value of the water quality detection means is set in advance. When the water quality value or more, it is preferable to set the excess of the total flow rate of the second permeated water and the second concentrated water as the first target flow rate value.

  The present invention also provides a first reverse osmosis membrane module that separates supply water into a first permeate and a first concentrated water, a supply water line that can feed the supply water to the first reverse osmosis membrane module, and an input A first pump that is driven at a rotational speed according to the driven drive frequency and discharges the supplied water toward the first reverse osmosis membrane module; and a first drive frequency corresponding to an input command signal is the first pump A first inverter that outputs the first permeate, an intermediate tank that stores the first permeate, a second reverse osmosis membrane module that separates the first permeate into a second permeate and a second concentrated water, and the first reverse osmosis The first permeated water separated by the membrane module is driven at a rotational speed corresponding to the input second driving frequency and the first permeated water line capable of delivering the first permeated water to the second reverse osmosis membrane module. The second discharge is directed toward the second reverse osmosis membrane module. A pump, a second inverter that outputs a second drive frequency corresponding to the input command signal to the second pump, and electricity for desalinating the second permeate to produce desalted water and third concentrated water A deionization stack, a second permeate line that can send the second permeate separated by the second reverse osmosis membrane module to the electrodeion deionization stack, and a rotational speed that is driven according to the input drive frequency. A third pump that discharges the second permeate toward the electrodeionization stack, a third inverter that outputs a third drive frequency corresponding to the input command signal to the third pump, and a first permeate A first flow rate detecting means for detecting the flow rate of the second permeated water, a second flow rate detecting means for detecting the flow rate of the second permeated water, a temperature detecting means for detecting the temperature of the water flowing through the apparatus, and an outlet of the third pump. Second permeate on the side A first detection frequency of the first pump by a feedback control algorithm so that the first detection flow rate value of the pressure detection unit for detecting force and the first detection flow rate value of the first flow rate detection unit becomes a preset first target flow rate value. A first control unit that calculates and outputs a command signal corresponding to the calculated value of the first drive frequency to the first inverter, and a second target in which a second detected flow rate value of the second flow rate detecting means is set in advance. A second control unit that calculates a second drive frequency of the second pump by a feedback control algorithm so as to obtain a flow rate value, and outputs a command signal corresponding to the calculated value of the second drive frequency to the second inverter; The pressure of the second permeated water discharged from the third pump according to the detected temperature value of the temperature detecting means is generated at least in the desalting chamber of the electrodeionization stack and thereafter. The target pressure value is set to a pressure value corresponding to the pressure loss to be performed, and the third control is performed by the feedback control algorithm so that the deviation between the target pressure value and the detected pressure value of the pressure detecting means becomes zero. A pure water manufacturing apparatus provided with a 3rd control part which computes the 3rd drive frequency of a pump, and outputs the command signal corresponding to the computed value of the 3rd drive frequency to the 3rd inverter.

  Moreover, it is preferable to provide the decarboxylation unit which decarboxylates the said permeated water and manufactures the permeated water as decarbonated water.

  Moreover, it is preferable to provide a decarboxylation unit that decarboxylates the second permeated water to produce second permeated water as decarbonated water.

  ADVANTAGE OF THE INVENTION According to this invention, the pure water manufacturing apparatus which can suppress the power consumption of the pump which sends permeated water to an electrodeionized water tack can be provided.

1 is an overall schematic diagram of a pure water production apparatus 1 according to a first embodiment. It is the front | former part of the whole block diagram of the pure water manufacturing apparatus 1 which concerns on 1st Embodiment. It is the middle stage part of the whole block diagram of the pure water manufacturing apparatus 1 which concerns on 1st Embodiment. It is a back | latter stage part of the whole block diagram of the pure water manufacturing apparatus 1 which concerns on 1st Embodiment. It is a flowchart which shows the process sequence in the case of setting a target flow value in the 1st control part 31 of 1st Embodiment. It is a flowchart which shows the process sequence in the case of performing pressure feedback water supply pressure control in the 2nd control part 32 of 1st Embodiment. It is the whole schematic diagram of the pure water manufacturing apparatus 1A which concerns on 2nd Embodiment. It is the 1st middle stage part of the whole block diagram of the pure water manufacturing apparatus 1A which concerns on 2nd Embodiment. It is the 2nd middle stage part of the whole block diagram of the pure water manufacturing apparatus 1A which concerns on 2nd Embodiment. It is a back | latter stage part of the whole block diagram of the pure water manufacturing apparatus 1A which concerns on 2nd Embodiment. It is the whole schematic diagram of the pure water manufacturing apparatus 1B which concerns on 3rd Embodiment. It is a front | former stage part of the whole block diagram of the pure water manufacturing apparatus 1B which concerns on 3rd Embodiment. It is the 1st middle stage part of the whole block diagram of the pure water manufacturing apparatus 1B which concerns on 3rd Embodiment. It is the 2nd middle stage part of the whole block diagram of the pure water manufacturing apparatus 1B which concerns on 3rd Embodiment. It is a flowchart which shows the process sequence in the case of setting a 1st target flow value in the 1st control part 31B of 3rd Embodiment. It is the whole schematic diagram of the pure water manufacturing apparatus 1C which concerns on 4th Embodiment. It is a front | former stage part of the whole block diagram of the pure water manufacturing apparatus 1C which concerns on 4th Embodiment. It is the 1st middle stage part of the whole block diagram of the pure water manufacturing apparatus 1C which concerns on 4th Embodiment. It is a flowchart which shows the process sequence in the case of setting a 1st target flow volume value in 31 C of 1st control parts of 4th Embodiment.

Hereinafter, an embodiment of a pure water production apparatus according to the present invention will be described.
(First embodiment)
First, the pure water manufacturing apparatus 1 which concerns on 1st Embodiment is demonstrated, referring drawings. FIG. 1 is an overall schematic diagram of a pure water production apparatus 1 according to the first embodiment. FIG. 2A is a front part of the overall configuration diagram of the pure water producing apparatus 1 according to the first embodiment. FIG. 2B is a middle part of the entire configuration diagram of the pure water producing apparatus 1 according to the first embodiment. FIG. 2C is a rear part of the entire configuration diagram of the pure water producing apparatus 1 according to the first embodiment. The pure water production apparatus 1 according to the present embodiment is applied to, for example, a pure water production apparatus that produces demineralized water (deionized water) from raw water (for example, tap water). The desalinated water produced by the pure water production apparatus 1 is sent as pure water to a demand location or the like. In the pure water production apparatus 1 according to the present embodiment, supplying pure water to a demand point or the like is also referred to as “water sampling”.

  As shown in FIG. 1, the pure water production apparatus 1 according to the first embodiment includes a first option device OP1, a prefilter 4, a second option device OP2, a first pump 5, and a first inverter 6. , RO membrane module 7 as a reverse osmosis membrane module, third optional equipment OP3, second pump 17, second inverter 18, first flow path switching valve V71, and electrodeionization stack (hereinafter referred to as “EDI”). 16), second flow path switching valve V72, fourth optional device OP4, control unit 30 (first control unit 31 and second control unit 32), input operation unit 40, DC power supply The apparatus 50 and the display part 60 are provided.

  The first option device OP <b> 1 to the fourth option device OP <b> 4 are devices installed in the pure water production apparatus 1 as optional equipment that can be attached to and detached from the pure water production apparatus 1. The first optional device OP <b> 1 includes a water softener 2 and an activated carbon filter 3. The second optional device OP2 includes a hardness sensor S1 and a residual chlorine sensor S2. The third optional device OP3 includes a decarboxylation unit 15. The fourth optional device OP4 includes a second specific resistance sensor RS2, a total organic carbon sensor TOC, and a third temperature sensor TE3.

  In addition, as shown in FIG. 1, the pure water production apparatus 1 includes a supply water line L1, a permeate water line L21, an RO permeate return line L41, an RO concentrated water return line L51, and a desalted water line L3. A demineralized water return line L42, an EDI concentrated water line L52, and a water supply line L4 are provided. The “line” in the present specification is a general term for lines capable of flowing a fluid such as a flow path, a radial path, and a pipeline.

  2A to 2C, in addition to the configuration shown in FIG. 1, the pure water production apparatus 1 includes a first on-off valve V11 to a seventh on-off valve V17, a vacuum breaker valve V41, and a pressure reducing valve V42. A supply water supply valve V31, a first drain valve V32 to a third drain valve V34, a first constant flow valve V51 to a fifth constant flow valve V55, and a first check valve V61 to a fifth check valve V65. A first pressure gauge P1 to a sixth pressure gauge P6, a first pressure sensor PS1 to a fourth pressure sensor PS4, a pressure switch PSW, a first temperature sensor TE1, and a second temperature sensor TE2 as temperature detection means. And a first flow rate sensor FM1, a second flow rate sensor FM2, a first electrical conductivity sensor EC1, and a first specific resistance sensor RS1.

  In FIG. 1 and FIG. 2A to FIG. 2C, although the path of electrical connection is omitted, the control unit 30 (described later) is configured to supply water supply valve V31, first flow path switching valve V71, and second flow path switching valve V72. , First drain valve V32 to third drain valve V34, pressure switch PSW, first temperature sensor TE1 to third temperature sensor TE3, first pressure sensor PS1 to fourth pressure sensor PS4, first flow rate sensor FM1 and second flow rate. The sensor FM2, the first electrical conductivity sensor EC1, the first specific resistance sensor RS1 and the second specific resistance sensor RS2, the total organic carbon sensor TOC, the hardness sensor S1, the residual chlorine sensor S2, and the like are electrically connected.

First, the front part of the overall configuration diagram in the pure water production apparatus 1 will be described.
As shown in FIGS. 1 and 2A, the supply water W1 flows through the supply water line L1. The supply water line L1 is a line through which the supply water W1 is circulated to the RO membrane module 7. The supply water line L1 includes a first supply water line L11 and a second supply water line L12.

  The raw water W11 (supply water W1) flows through the first supply water line L11. The first supply water line L11 is a line that connects a supply source (not shown) of the raw water W11 and the water softener 2. The upstream end of the first supply water line L11 is connected to a supply source (not shown) of the raw water W11. Further, the downstream end of the first supply water line L <b> 11 is connected to the water softener 2.

  As shown in FIG. 2A, the first supply water line L11 is provided with a connecting portion J1, a first on-off valve V11, and a water softener 2 in order from the upstream side. The first on-off valve V11 is a manual valve that can be operated to open and close the first supply water line L11.

  The water softener 2 is an apparatus that manufactures the soft water W12 (feed water W1) by replacing the hardness component contained in the raw water W11 with sodium ions. The water softener 2 has an ion exchange tower containing a cation exchange resin bed in a pressure tank.

  Soft water W12 (supply water W1) flows through the second supply water line L12. The second supply water line L12 is a line through which the soft water W12 is circulated to the RO membrane module 7. The second supply water line L <b> 12 is a line that connects the water softener 2 and the RO membrane module 7. As shown in FIG. 2A, the upstream end of the second supply water line L <b> 12 is connected to the water softener 2. As shown in FIG. 2B, the downstream end of the second supply water line L12 is connected to the primary side input port (the inlet of the supply water W1) of the RO membrane module 7.

  As shown in FIG. 2A, in order from the upstream side, the second on-off valve V12, the connecting portion J2, the third on-off valve V13, the activated carbon filter 3, the fourth on-off valve V14, and the connecting portion are connected to the second supply water line L12. J3, the prefilter 4, the connection part J4, and the connection part J5 are provided. Further, after the connecting portion J5, as shown in FIG. 2B, the fifth on-off valve V15, the connecting portion J6, the pressure reducing valve V42, the supply water replenishing valve V31, the connecting portion J59, the connecting portion J51, the connecting portion J7, and the connecting portion. J8, the 1st pump 5, the connection part J9, and the RO membrane module 7 are provided. The second on-off valve V12 to the fifth on-off valve V15 are manual valves that can be operated to open and close the second supply water line L12. The supply water supply valve V31 is an automatic valve that can control the opening and closing of the second supply water line L12. The supply water supply valve V31 is electrically connected to the control unit 30. The opening and closing of the supply water replenishing valve V31 is controlled by a flow path opening / closing signal transmitted from a first control unit 31 (described later) of the control unit 30.

  The activated carbon filter 3 is a device that removes chlorine components (mainly free residual chlorine) contained in the soft water W12 (feed water W1). The activated carbon filter 3 has a filtration tower in which a filter medium bed made of activated carbon is housed in a pressure tank. The activated carbon filter 3 purifies the soft water W12 (feed water W1) by decomposing and removing the chlorine component contained in the soft water W12, adsorbing and removing organic components, and capturing suspended substances.

  The prefilter 4 is a filter that removes fine particles contained in the soft water W12 (supply water W1) purified by the activated carbon filter 3. The prefilter 4 is configured by accommodating a filter element in an internal housing. As the filter element, for example, a nonwoven fabric filter element or a thread-wound filter element having a filtration accuracy of 1 to 50 μm is used.

  The hardness sensor S1 is a device that measures the total hardness (that is, the hardness leak amount) of the supply water W1 flowing through the supply water line L1. The residual chlorine sensor S2 is a device that measures the free residual chlorine concentration (that is, chlorine leak amount) of the supply water W1 flowing through the supply water line L1. As shown in FIG. 2A, the hardness sensor S1 and the residual chlorine sensor S2 are connected to the supply water line L1 at the connection portion J5 via the measurement line L110. The connecting part J5 is disposed between the prefilter 4 and the fifth on-off valve V15 in the supply water line L1. The hardness sensor S1 and the residual chlorine sensor S2 are electrically connected to the control unit 30. The hardness leak amount measured by the hardness sensor S1 and the chlorine leak amount measured by the residual chlorine sensor S2 are transmitted as detection signals to the first control unit 31 of the control unit 30, respectively.

Next, the middle part of the overall configuration diagram in the pure water production apparatus 1 will be described.
As shown in FIG. 2B, a vacuum breaker valve V41 is connected to the connecting portion J6. The vacuum breaker valve V41 is a normally closed pressure operating valve, and when the pressure inside the supply water line L1 becomes lower than the atmospheric pressure, the valve body opens and sucks air. By providing the vacuum breaker valve V41, even if the raw water W11 (feed water W1) is cut off and the feed water line L1 becomes negative pressure, it is possible to prevent problems such as damage to the membrane of the RO membrane module 7. it can.

  The pressure reducing valve V42 is a device that adjusts the pressure of the soft water W12 that has passed through the water softener 2, the activated carbon filter 3, and the prefilter 4 to a pressure lower than the pressure of the concentrated water W3 flowing out from the RO membrane module 7. The pressure reducing valve V42 adjusts the pressure of the soft water W12 so that the pressure of the concentrated water W3 is larger than the pressure of the soft water W12 (pressure of the soft water W12 <pressure of the concentrated water W3). Thereby, a part of the concentrated water W3 is circulated to the soft water W12, and the supply water in which the concentrated water W3 is mixed with the soft water W12 is supplied to the RO membrane module 7. That is, in the RO membrane module 7, a cross-flow type separation operation for producing permeated water is performed while the supply water is circulated by the first pump 5.

  The downstream end of the desalted water return line L42 described later is connected to the connecting portion J59. The connecting portion J51 is connected to the downstream end portion of the RO permeate return line L41, which will be described later, and the downstream end portion of the RO concentrated water return line L51.

  The first pump 5 is a device that sucks the supply water W <b> 1 flowing through the supply water line L <b> 1 and discharges it toward the RO membrane module 7. The first pump 5 is supplied with driving power having a frequency converted from the first inverter 6. The first pump 5 is driven at a rotational speed corresponding to the frequency of the supplied driving power (hereinafter also referred to as “first driving frequency”).

  The first inverter 6 is an electric circuit (or a device having the circuit) that supplies the first pump 5 with driving power whose frequency has been converted. The first inverter 6 is electrically connected to the control unit 30. A command signal is input to the first inverter 6 from the first control unit 31 of the control unit 30. The first inverter 6 outputs drive power having a first drive frequency corresponding to the command signal (current value signal or voltage value signal) input by the first control unit 31 to the first pump 5.

  The RO membrane module 7 separates the supply water W1 sent from the first pump 5 into permeate water W2 from which dissolved salts have been removed and concentrated water W3 as first concentrated water from which dissolved salts have been concentrated. . The RO membrane module 7 is configured by accommodating a single or a plurality of spiral RO membrane elements in a pressure vessel (vessel). Examples of the RO membrane used for the RO membrane element include a crosslinked aromatic polyamide composite membrane. Examples of RO membrane elements composed of a crosslinked aromatic polyamide composite membrane include: Toray Industries, Inc .: model name “TMG20-400”, Eunjin Chemical Co., Ltd .: model name: “RE8040-BLF”, Nitto Denko Corporation: model name: “ESPA1” Are commercially available, and these elements can be suitably used.

  The RO concentrated water return line L51 is a line for returning a part W31 of the concentrated water W3 separated by the RO membrane module 7 to the supply water line L1. The upstream end of the RO concentrated water return line L51 is connected to the primary outlet port (the outlet of the concentrated water W3) of the RO membrane module 7. The downstream end of the RO concentrated water return line L51 is connected to the supply water line L1 at the connection J51. The RO concentrated water return line L51 is provided with a first check valve V61 and a first constant flow valve V51.

  The RO concentrated water discharge line L61 is a line for discharging the remaining portion W32 of the concentrated water W3 separated by the RO membrane module 7 from the middle of the RO concentrated water return line L51 to the outside of the apparatus. The upstream end portion of the RO concentrated water discharge line L61 is connected to the connection portion J53. The connecting portion J53 is disposed between the RO membrane module 7 and the connecting portion J52 in the RO concentrated water return line L51. The upstream end portions of the first concentrated water drain line L611, the second concentrated water drain line L612, and the third concentrated water drain line L613 are connected to the RO concentrated water discharge line L61 at the connecting portions J55 and J56.

  The first concentrated water drain line L611 to the third concentrated water drain line L613 are provided with a first drain valve V32 to a third drain valve V34, and a second constant flow valve V52 to a fourth constant flow valve V54, respectively. Yes. The second constant flow valve V52 to the fourth constant flow valve V54 are set to different flow values. The first drainage valve V32 to the third drainage valve V34 can individually open and close the first concentrated water drainage line L611 to the third concentrated water drainage line L613. By appropriately selecting the number of the first drain valve V32 to the third drain valve V34 that are opened, the drainage flow rate of the concentrated water W3 discharged to the outside of the apparatus can be adjusted. By this adjustment, the recovery rate of the permeated water W2 can be maintained at a preset value. The recovery rate of the permeated water W2 is the ratio (%) of the permeated water W2 to the flow rate of the soft water W12 supplied to the RO membrane module 7 (the supplied water W1 before the part W31 of the concentrated water W3 is mixed). Say.

  The first drain valve V32 to the third drain valve V34 are electrically connected to the control unit 30, respectively. Opening and closing of the first drain valve V32 to the third drain valve V34 is controlled by a drive signal transmitted from the first control unit 31 of the control unit 30.

  The downstream ends of the first concentrated water drainage line L611, the second concentrated water drainage line L612, and the third concentrated water drainage line L613 are connected to the upstream end of the merged drainage line L62 at the connecting portions J57 and J58. Has been. The downstream end portion of the combined drainage line L62 is connected or opened to a drainage pit (not shown), for example. A second check valve V62 is provided in the middle of the combined drainage line L62.

  The permeated water line L <b> 21 is a line through which the permeated water W <b> 2 separated by the RO membrane module 7 flows through the EDI stack 16. As shown in FIGS. 2B and 2C, the permeate water line L21 includes a front-stage permeate water line L211, a middle-stage permeate water line L212, a desalting chamber inflow line L213, and a concentration chamber inflow line L214.

  As shown in FIG. 2B, the upstream end of the front-stage permeate line L211 is connected to the secondary port (the outlet of the permeate W2) of the RO membrane module 7. As shown in FIG. 2C, the downstream end of the front-stage permeate line L211 is connected to the middle-stage permeate line L212 and the RO permeate return line L41 via the first flow path switching valve V71. .

  As shown in FIG. 2B, a upstream side permeate line L211 is provided with a third check valve V63, a connection portion J10, a connection portion J11, and a sixth on-off valve V16 in order from the upstream side. Further, after the sixth on-off valve V16, as shown in FIG. 2C, a decarboxylation unit 15, a connection portion J31, a connection portion J32, and a first flow path switching valve V71 are provided. The 6th on-off valve V16 is a manual valve which can operate opening and closing of the front | former stage side permeated water line L211.

Next, the latter part of the entire configuration diagram in the pure water production apparatus 1 will be described.
In FIG. 2C, the decarboxylation unit 15 is equipment that obtains degassed water (degassed permeated water) by degassing the free carbonic acid (dissolved carbon dioxide gas) contained in the permeated water W2 by the gas separation membrane module. . By providing the decarboxylation unit 15 on the downstream side of the RO membrane module 7, free carbon dioxide that easily permeates the RO membrane can be removed from the permeated water W2. Accordingly, it is possible to obtain the permeated water W2 having a higher purity. In the decarboxylation unit 15 of this embodiment, an external perfusion type gas separation membrane module made of a hollow fiber membrane is used, and a sweep gas such as air is introduced while the inside of the hollow fiber membrane is sucked by a vacuum pump (not shown). The free carbon dioxide is exhausted while being transferred into the sweep gas through the membrane wall. As a gas separation membrane module suitable for such an application, for example, a product name “Liqui-Cel G-521R” manufactured by Celgard Co., Ltd. may be mentioned. The vacuum pump connected to the gas separation membrane module is electrically connected to the control unit 30 (first control unit 31).

  The second pump 17 is a device that sucks the permeated water W2 flowing through the permeated water line L21 (middle stage permeated water line L212) and discharges it to the EDI stack 16. The second pump 17 is supplied with driving power whose frequency is converted from the second inverter 18. The second pump 17 is driven at a rotational speed corresponding to the frequency of the supplied driving power (hereinafter also referred to as “second driving frequency”).

  The second inverter 18 is an electric circuit (or a device having the circuit) for supplying the second pump 17 with driving power whose frequency has been converted. The second inverter 18 is electrically connected to the control unit 30. A command signal is input to the second inverter 18 from the second control unit 32 of the control unit 30. The second inverter 18 outputs drive power having a second drive frequency corresponding to the command signal (current value signal or voltage value signal) input by the second control unit 32 to the second pump 17.

  The first flow path switching valve V71 is a flow path (water sampling side flow path) for flowing the permeated water W2 separated by the RO membrane module 7 toward the EDI stack 16 via the middle permeate water line L212. The automatic valve can be switched to a flow path (circulation-side flow path) that circulates toward the supply water line L1 on the upstream side of the RO membrane module 7 via the RO permeate return line L41. The first flow path switching valve V71 is configured by, for example, an electric or electromagnetic three-way valve. The first flow path switching valve V71 is electrically connected to the control unit 30. The switching of the flow path in the first flow path switching valve V71 is controlled by a flow path switching signal transmitted from the first control unit 31 of the control unit 30.

  The RO permeated water return line L41 is a line that returns the permeated water W2 separated by the RO membrane module 7 to the supply water line L1 upstream of the RO membrane module 7. The upstream end of the RO permeate return line L41 is connected to the first flow path switching valve V71. The downstream end of the RO permeate return line L41 is connected to the RO concentrated water return line L51 at the connection J52. The connection part J52 is arrange | positioned between the connection part J53 and the connection part J51 in RO concentrated water return line L51. The portion from the connecting portion J52 to the connecting portion J51 in the RO permeate return line L41 is common to the portion from the connecting portion J52 to the connecting portion J51 in the RO concentrated water return line L51. A fourth check valve V64 is provided on the upstream side of the RO permeate return line L41.

  The upstream end of the middle permeate line L212 is connected to the first flow path switching valve V71. The downstream end of the middle permeate water line L212 is connected to the upstream end of the desalting chamber inflow line L213 and the upstream end of the concentrating chamber inflow line L214 at the branch J71.

  The downstream end of the desalting chamber inflow line L213 is connected to the primary port of the EDI stack 16 (inlet side of the desalting chamber 161). A connecting portion J33 is disposed in the desalting chamber inflow line L213. The downstream end of the concentrating chamber inflow line L214 is connected to a primary port (each inlet side of the concentrating chamber 162) of the EDI stack 16. The concentrating chamber inflow line L214 is provided with a fifth constant flow valve V55 and a connecting portion J34 in order from the upstream side.

  The EDI stack 16 is a water that obtains demineralized water W6 (deionized water) and concentrated water W7 as the second concentrated water by demineralizing the permeated water W2 separated by the RO membrane module 7 (deionized treatment). Processing equipment. The EDI stack 16 is electrically connected to a DC power supply device 50 (see FIG. 1). A DC voltage is applied to the EDI stack 16 from the DC power supply device 50 as power for desalination treatment. The EDI stack 16 is energized by the DC voltage applied from the DC power supply device 50 and operates.

  The DC power supply device 50 applies a DC voltage between the pair of electrodes of the EDI stack 16. The DC power supply device 50 is electrically connected to the control unit 30. A command signal is input to the DC power supply device 50 from a second control unit 32 (described later) of the control unit 30. The DC power supply device 50 supplies the EDI stack 16 with a DC voltage having a voltage value corresponding to the command signal input by the second control unit 32.

  In the EDI stack 16, a cation exchange membrane and an anion exchange membrane (not shown) are alternately arranged between a pair of electrodes. The inside of the EDI stack 16 is partitioned into a desalting chamber 161 and a concentration chamber 162 (including an anode chamber and a cathode chamber) by these ion exchange membranes. The desalting chamber 161 is filled with an ion exchanger (not shown). As an ion exchanger filled in the desalting chamber 161, for example, an ion exchange resin or an ion exchange fiber is used. In FIG. 2C, a plurality of desalting chambers 161 and concentration chambers 162 partitioned inside the EDI stack 16 are schematically shown.

  A desalting chamber inflow line L213 through which the permeated water W2 flows is connected to the inlet side of the desalting chamber 161. On the outlet side of the desalting chamber 161, a desalted water line L3 through which the desalted water W6 discharged from the ions in the desalting chamber 161 is discharged is connected. A concentrating chamber inflow line L214 through which the permeated water W2 flows is connected to the inlet side of the concentrating chamber 162. An EDI concentrated water line L52 for circulating the concentrated water W7 that has been concentrated and discharged is connected to the outlet side of the concentration chamber 162.

  The permeated water W2 flowing through the permeated water line L21 flows into each of the desalting chamber 161 and the concentration chamber 162. Residual ions contained in the permeated water W2 are captured by an ion exchanger (not shown) filled in the desalting chamber 161 to become desalted water W6. The desalted water W6 is sent to the demand location via the desalted water line L3 (described later). Further, residual ions captured by the ion exchanger in the desalting chamber 161 move to the concentration chamber 162 by the electric energy of the applied DC voltage. And the water containing a residual ion is sent out toward the decarboxylation unit 15 through the EDI concentrated water line L52 (after-mentioned) as the concentrated water W7. The concentrated water W7 sent to the decarbonation unit 15 is used as sealing water for a vacuum pump (not shown), and then discharged out of the apparatus via a sealing water discharge line L71 (described later).

  The desalted water line L3 is a line for sending the desalted water W6 obtained by the EDI stack 16 to the demand point as pure water. The demineralized water line L3 includes an upstream demineralized water line L31 and a downstream demineralized water line L32.

  The upstream end of the upstream demineralized water line L31 is connected to the secondary port of the EDI stack 16 (the outlet side of the demineralized chamber 161). The downstream end of the upstream demineralized water line L31 is connected to a downstream demineralized water line L32 and a demineralized water return line L42 (described later) via a second flow path switching valve V72. In the upstream demineralized water line L31, a connecting portion J36, a connecting portion J37, a connecting portion J38, a seventh on-off valve V17, and a second flow path switching valve V72 are provided in this order from the upstream side. The seventh on-off valve V17 is a manual valve that can be operated to open and close the upstream demineralized water line L31.

  The second flow path switching valve V72 is a flow path (water sampling side flow path) for sending the desalted water W6 obtained in the desalination chamber 161 of the EDI stack 16 toward the demand point via the downstream side desalted water line L32. ) Or an automatic valve that can be switched to a flow path (circulation side flow path) that circulates toward the supply water line L1 upstream of the RO membrane module 7 via the desalted water return line L42. The second flow path switching valve V72 is configured by, for example, an electric or electromagnetic three-way valve. The second flow path switching valve V72 is electrically connected to the control unit 30. Switching of the flow path in the second flow path switching valve V72 is controlled by a flow path switching signal transmitted from the first control unit 31 of the control unit 30.

  The second flow path switching valve V72 is switched to the circulation side flow path by the first control unit 31 when the operation of the pure water production apparatus 1 is started. Thereafter, when the flow rate of the permeated water W2 obtained by the RO membrane module 7 becomes constant and the water quality of the permeated water W2 exceeds the specified water quality that can be supplied to the EDI stack 16, the first control unit 31 sets the flow rate to the water sampling side flow path. Can be switched. By switching the flow path of the second flow path switching valve V72 to the water sampling side flow path, the desalted water W6 obtained by the EDI stack 16 is sent from the desalted water line L3 to the demand point.

  The upstream end of the downstream demineralized water line L32 is connected to the second flow path switching valve V72. The downstream end of the downstream demineralized water line L32 is connected to an apparatus or the like (not shown) at the demand point.

  The desalted water return line L42 is a line that returns the desalted water W6 obtained in the desalting chamber 161 of the EDI stack 16 from the middle of the desalted water line L3 to the upstream side of the RO membrane module 7 (supply water line L1). is there. In the present embodiment, the upstream end of the desalted water return line L42 is connected to the second flow path switching valve V72. The downstream end of the desalted water return line L42 is connected to the connecting portion J59. A fifth check valve V65 is provided on the upstream side of the desalted water return line L42.

  The EDI concentrated water line L52 is a line for sending the concentrated water W7 discharged from the concentration chamber 162 of the EDI stack 16 to the decarbonation unit 15. The upstream end of the EDI concentrated water line L52 is connected to the secondary port of the EDI stack 16 (the outlet side of the concentration chamber 162). The downstream end of the EDI concentrated water line L52 is connected to the decarboxylation unit 15.

  The sealed water discharge line L71 is a line for discharging the sealed water discharge W8 discharged from the decarbonation unit 15 to the outside of the apparatus. The upstream end of the sealed water discharge line L71 is connected to the decarbonation unit 15. The downstream side of the sealed water discharge line L71 is connected or opened to a drainage pit (not shown), for example.

  The first pressure gauge P1 to the sixth pressure gauge P6 are devices that measure the pressure of water flowing through each connected line. As shown in FIG. 2A, the first pressure gauge P1 to the fourth pressure gauge P4 are each connected to the supply water line L1 at the connection portions J1 to J4. As shown in FIG. 2C, the fifth pressure gauge P5 is connected to the EDI concentrated water line L52 at the connection portion J35. The sixth pressure gauge P6 is connected to the demineralized water line L3 at the connection portion J36.

  The first pressure sensor PS1 to the fourth pressure sensor PS4 and the sixth pressure sensor PS6 as pressure detection means are devices that measure the pressure of water flowing through each connected line. As shown in FIGS. 2B and 2C, the first pressure sensor PS1 is connected to the supply water line L1 at the connection portion J9. The connecting portion J9 is disposed between the first pump 5 and the RO membrane module 7 in the supply water line L1. The second pressure sensor PS2 is connected to the permeate line L21 at the connection portion J11. The connecting portion J11 is disposed between the RO membrane module 7 and the decarboxylation unit 15 in the permeate line L21. The third pressure sensor PS3 is connected to the desalting chamber inflow line L213 at the connection portion J33. The connection part J33 is arrange | positioned in the middle of the desalination chamber inflow line L213. The fourth pressure sensor PS4 is connected to the concentration chamber inflow line L214 at the connection portion J34. The connection portion J34 is disposed between the fifth constant flow valve V55 and the EDI stack 16 in the concentration chamber inflow line L214. The sixth pressure sensor PS6 is connected to the permeate line L21 at the connection portion J38. The connection part J38 is arrange | positioned between the connection part J32 and the 1st flow-path switching valve V71 in the permeated water line L21.

  The first pressure sensor PS1 to the fourth pressure sensor PS4 and the sixth pressure sensor PS6 are electrically connected to the control unit 30. The pressure of the supply water W1 or the permeated water W2 measured by the first pressure sensor PS1 to the fourth pressure sensor PS4 and the sixth pressure sensor PS6 is transmitted to the first control unit 31 of the control unit 30 as a detection signal.

  The pressure switch PSW is a device that detects that the pressure of the supply water W1 flowing through the supply water line L1 is equal to or lower than the first set pressure value or equal to or higher than the second set pressure value. As shown in FIG. 2B, the pressure switch PSW is connected to the supply water line L1 at the connection portion J7. The connection portion J7 is disposed between the connection portion J51 and the first pump 5 in the supply water line L1. A detection signal of the pressure of the supply water W <b> 1 detected by the pressure switch PSW is transmitted to the first control unit 31.

  The first temperature sensor TE1 to the third temperature sensor TE3 are devices that measure the temperature of water flowing through each connected line. The first temperature sensor TE1 is connected to the supply water line L1 at the connection portion J8. The connection portion J8 is disposed between the connection portion J51 and the first pump 5 in the supply water line L1. The second temperature sensor TE2 is connected to the permeate line L21 at the connection portion J31. The connecting part J31 is disposed between the decarbonation unit 15 and the first flow path switching valve V71 in the permeate line L21. The third temperature sensor TE3 is connected to the demineralized water line L3 at the connection portion J43. The connection part J43 is arrange | positioned at the downstream demineralized water line L32 in the downstream from the 2nd flow-path switching valve V72 in the demineralized water line L3.

  The first temperature sensor TE1 to the third temperature sensor TE3 are electrically connected to the control unit 30. The temperatures (detected water temperature values) of the supply water W1, the permeated water W2, and the desalted water W6 measured by the first temperature sensor TE1 to the third temperature sensor TE3 are the first control unit 31 and the second control unit 32 of the control unit 30. As a detection signal.

  The first flow rate sensor FM1 and the second flow rate sensor FM2 are devices that measure the flow rate of water (permeated water W2 or desalted water W6) flowing through each connected line. The first flow rate sensor FM1 is connected to the permeate line L21 at the connection portion J10. The connecting portion J10 is disposed between the RO membrane module 7 and the decarboxylation unit 15 in the permeate line L21. The second flow rate sensor FM2 is connected to the demineralized water line L3 at the connection portion J38. The connection portion J38 is disposed between the EDI stack 16 and the second flow path switching valve V72 in the desalted water line L3.

  The first flow sensor FM1 and the second flow sensor FM2 are electrically connected to the control unit 30. The flow rate of the permeated water W2 measured by the first flow rate sensor FM1 and the second flow rate sensor FM2 (hereinafter also referred to as “detected flow rate value”) is transmitted to the first control unit 31 of the control unit 30 as a detection signal.

  The first electrical conductivity sensor EC1 is a device that measures the electrical conductivity (hereinafter, also referred to as “detected EC value”) of the permeated water W2 flowing through the permeated water line L21. The first electrical conductivity sensor EC1 is connected to the permeated water line L21 at the connection portion J32. The connecting part J32 is disposed between the decarbonation unit 15 and the first flow path switching valve V71 in the permeate water line L21.

  1st specific resistance sensor RS1 and 2nd specific resistance sensor RS2 are apparatus which measures the specific resistance (electrical characteristic value) of the desalinated water W6 which distribute | circulates the desalted water line L8. 1st specific resistance sensor RS1 is connected to the desalted water line L3 in the connection part J37. The connection portion J37 is disposed between the EDI stack 16 and the second flow path switching valve V72 in the desalted water line L3. The second specific resistance sensor RS2 is connected to the demineralized water line L3 at the connection portion J41. The connection part J41 is arrange | positioned at the downstream demineralized water line L32 in the downstream from the 2nd flow-path switching valve V72 in the demineralized water line L3. Note that the first specific resistance sensor RS1 and the second specific resistance sensor RS2 incorporate a temperature sensor for temperature compensation of the measured specific resistance value. Therefore, the first specific resistance sensor RS1 and the second specific resistance sensor RS2 can measure the water temperature of the desalted water W6.

  The first electrical conductivity sensor EC1, the first specific resistance sensor RS1, and the second specific resistance sensor RS2 are electrically connected to the control unit 30. The detected EC value (electric conductivity) of the permeated water W2 measured by the first electrical conductivity sensor EC1, the specific resistance (and temperature) of the desalted water W6 measured by the first specific resistance sensor RS1, and the second specific resistance. The specific resistance (detected specific resistance value) and temperature (detected temperature value) of the desalted water W6 measured by the sensor RS2 are transmitted as detection signals to the first control unit 31 and the second control unit 32 of the control unit 30, respectively. The

  The total organic carbon sensor TOC is a device that detects the amount of organic carbon in the desalted water W6 flowing through the desalted water line L8. Organic carbon is carbon in organic matter present in water. The total organic carbon sensor TOC is connected to the demineralized water line L3 at the connection portion J42. The connection part J42 is arrange | positioned at the downstream demineralized water line L32 in the downstream from the 2nd flow-path switching valve V72 in the demineralized water line L3.

  The all organic carbon sensor TOC is electrically connected to the control unit 30. The total organic carbon amount of the demineralized water W6 detected by the total organic carbon sensor TOC is transmitted as a detection signal to the first control unit 31 of the control unit 30.

  The input operation unit 40 is an input interface that receives an input operation of a user or an administrator for selection related to the operation mode of the device (for example, selection of operation / stop, release of alarm, etc.) and various settings related to the operation condition of the device. is there. The input operation unit 40 includes an operation panel that combines a display and button switches, a touch panel that directly operates on the display, and the like. The input operation unit 40 is electrically connected to the control unit 30. Information input from the input operation unit 40 is transmitted to the first control unit 31 and the second control unit 32 of the control unit 30.

  The display unit 60 displays desired information. The display unit 60 is electrically connected to the control unit 30.

  Next, the control unit 30 will be described. The control unit 30 includes a first control unit 31 and a second control unit 32. The first control unit 31 and the second control unit 32 are configured by a microprocessor (not shown) including a CPU and a memory. The CPU of the microprocessor executes various controls described later according to a predetermined program read from the memory. Data and various programs for controlling the pure water production apparatus 1 are stored in the memory of the microprocessor. The microprocessor incorporates an integrated timer unit (hereinafter also referred to as “ITU”) that manages timekeeping and the like.

  Hereinafter, the 1st control part 31 and the 2nd control part 32 which comprise the control unit 30 are demonstrated.

  As the flow rate feedback water amount control, the first control unit 31 uses the speed type digital PID algorithm so that the first detected flow rate value of the first flow rate sensor FM1 becomes a preset first target flow rate value. The first drive frequency is calculated, and a current value signal (command signal) corresponding to the calculated value of the first drive frequency is output to the first inverter 6.

  In the first control unit 31, data relating to the above-described first target flow rate value, velocity type digital PID algorithm, and the like is stored in a memory (not shown) of the microprocessor.

  As the pressure feedback water supply pressure control, the second control unit 32 determines the demand point from the desalting chamber 161 and the desalting chamber 161 of the EDI stack 16 according to the detected water temperature value of the permeated water W2 measured by the second temperature sensor TE2. The target pressure value of the second pump 17 is set so as to become a pressure value corresponding to the pressure loss generated in the previous lines, and the deviation between the target pressure value and the detected pressure value measured by the sixth pressure sensor PS6 The second drive frequency of the second pump 17 is calculated by the speed digital PID algorithm so that becomes zero, and a current value signal (command signal) corresponding to the calculated value of the second drive frequency is calculated by the second inverter 18. Output to.

  In the memory (not shown) of the microprocessor constituting the second control unit 32, a function formula (program) that associates the detected water temperature value of the permeated water W2 with the target pressure value in the second pump 17 is stored. The second control unit 32 acquires the detected water temperature value of the second temperature sensor TE2, and calculates the target pressure value using this functional equation. And the 2nd control part 32 calculates the 2nd drive frequency of the 2nd pump 17 by a speed form digital PID algorithm so that the deviation of the target pressure value and the detected pressure value calculated by calculation may become zero, A current value signal (command signal) corresponding to the calculated value of the second drive frequency is output to the second inverter 18.

  Since the viscosity coefficient of water increases as the water temperature decreases, when the water temperature is low, the water flow resistance generated in the flow path when water is supplied at a constant flow rate increases. That is, when the water temperature of the permeated water W2 is low, the pressure loss generated in the line from the desalination chamber 161 and the desalination chamber 161 of the EDI stack 16 to the demand point increases, so the water supply pressure of the desalted water W6 decreases. Resulting in. Therefore, the above-described relational expression is programmed so that the lower the detected temperature value of the permeated water W2 is, the higher the target pressure value is, and the higher the detected temperature value of the permeated water W2 is, the lower the target pressure value is.

In the second control unit 32, a data table in which the detected water temperature value of the permeated water W2 and the target pressure value of the second pump 17 are associated with each other is stored in the memory of the microprocessor, and based on this data table. The target pressure value may be acquired. In this case, the target pressure value is set stepwise according to the detected water temperature value of the permeated water W2. In addition, when there are few steps, you may give a width | variety to a detected water temperature value. For example, when the target pressure value is set in three stages, the target pressure value P ₁ (maximum pressure value) is set when the water temperature is 5 to 14 ° C., and the target pressure value P ₂ (<P ₁ ) when the water temperature is 15 to 25 ° C. ) When the water temperature is 26 to 35 ° C., the target pressure value P ₃ (<P ₂ ) is set.

  In the second control unit 32, data related to the above-described relational expression, velocity type digital PID algorithm, and the like are stored in a memory (not shown) of the microprocessor.

  Next, flow rate feedback water amount control by the first control unit 31 will be described. FIG. 3 is a flowchart illustrating a processing procedure when the first control unit 31 executes the flow rate feedback water amount control. The process of the flowchart shown in FIG. 3 is repeatedly executed during operation of the pure water production apparatus 1.

In step ST101 shown in FIG. 3, the first control unit 31 acquires a first target flow rate value Q _p ′ of the permeated water W2. The first target flow rate value Q _p ′ is, for example, a set value input by the administrator of the pure water production apparatus 1 via a user interface (not shown). The first target flow rate value Q _p ′ is determined in consideration of the required water amount at the demand point.

In step ST 102, the first control unit 31 determines whether the time count _{t 1} by ITU reaches 100ms which is a control period (Delta] t). In this step ST 102, the first control unit 31, when the timing _{t 1} by ITU is to have reached 100 ms (YES) determination, the process proceeds to step ST 103. Further, in step ST 102, the first control unit 31, when the timing _{t 1} by ITU is determined not to reach the 100 ms (NO), the process returns to the step ST 102.

Step ST 103: In (step ST 102 YES determination), the first control unit 31 obtains the first detected flow value _{Q p} of the first flow rate sensor FM1 as a feedback value.

In step ST 104, the first control unit 31, so that the first and the detected flow value (feedback value) _{Q p} obtained in step ST 103, the deviation of the first target flow rate value _{Q p} 'obtained in step ST101 becomes zero in, it calculates the manipulated variable _{U n} by velocity type digital PID algorithm. In the speed type digital PID algorithm, the operation amount change ΔU _n is calculated every control cycle Δt (100 ms), and this is added to the operation amount U _n−1 at the previous control cycle, thereby obtaining the current operation amount U. _n is determined.

An arithmetic expression used for the velocity type digital PID algorithm is expressed by the following expressions (1a) and (1b).
_{ΔU n = K p {(e} n -e n-1) + (Δt / T i) × e n + (T d / Δt) × (e n -2e n-1 + e n-2)} (1a)
U _n = U _n-1 + ΔU _n (1b)

In Expression (1a) and Expression (1b), Δt: control period, U _n : current operation amount, U _n-1 : operation amount at the previous control period, ΔU _n : change in operation amount from the previous time to this time. Minute, e _n : magnitude of current deviation, e _n-1 : magnitude of deviation at the previous control cycle, e _n-2 : magnitude of deviation at the previous control cycle, K _p : proportional gain, T _i : integration time, T _d : differentiation time. The size e _n of the current deviation is obtained by the following formula (2).
e _n = Q _p ′ −Q _p (2)

In Step ST105, the first control unit 31 uses the current operation amount U _n , the first target flow rate value Q _p ′, and the maximum drive frequency of the first pump 5 (a set value of 50 Hz or 60 Hz), and performs predetermined processing. The first drive frequency F ₁ [Hz] of the first pump 5 is calculated by an arithmetic expression.

In step ST 106, the first control unit 31, a first calculation value of the drive frequency _{F 1,} the corresponding current value signal (command signal: 4 to 20 mA) is converted to the converted current value signal to the first inverter 6 Output. Thereby, the process of this flowchart is complete | finished (it returns to step ST101).

In step ST106, when the first control unit 31 outputs the current value signal to the first inverter 6, the first inverter 6 uses the drive power converted to the frequency specified by the input current value signal as the first value. Supply to pump 5. As a result, the first pump 5 is driven at a rotational speed corresponding to the first drive frequency F ₁ input from the first inverter 6.

  Next, pressure feedback water supply pressure control by the second control unit 32 will be described. FIG. 4 is a flowchart showing a processing procedure when pressure feedback water supply pressure control is executed in the second control unit 32. The process of the flowchart shown in FIG. 4 is repeatedly executed at predetermined time intervals during the operation of the pure water production apparatus 1.

  In step ST201 shown in FIG. 4, the second control unit 32 acquires the detected water temperature value T of the second temperature sensor TE2.

In step ST202, the second control unit 32 substitutes the detected water temperature value T acquired in step ST201 into a function expression that associates the detected water temperature value of the permeated water W2 with the target pressure value in the second pump 17, so that the target pressure The value P _d ′ is calculated.

In step ST 203, the second control unit 32 determines whether time count _{t 2} by ITU reaches 100ms which is a control period (Delta] t). In this step ST 203, the second control unit 32, when the timing _{t 2} by ITU is to have reached 100 ms (YES) determination, the process proceeds to step ST 204. Further, in step ST 203, the second control unit 32, when the timing _{t 2} by ITU is determined not to reach the 100 ms (NO), the process returns to the step ST 203.

In step ST 204, the second control unit 32 obtains the detected pressure value _{P d} of the sixth pressure sensor PS6.

In step ST205, the second control unit 32, so that the deviation between the detected pressure value obtained in step ST 204 (feedback value) _{P d} and the target pressure value _{P d} calculated in step ST 202 'is zero, velocity type PID The operation amount _Un is calculated by an algorithm. In the velocity type digital PID algorithm, the control period Delta] t (100 ms) calculates a variation .DELTA.U _n of the manipulated variables for each, which operate at the present time by adding the operation amount U _n-1 of the previous control cycle time The quantity _Un is determined. The arithmetic expression used for the velocity type digital PID algorithm is as described above. In the above formulas (1a) and the formula (1b), the size _{e n} of the current deviation is obtained by the following formula (3).
e _n = P _d ′ −P _d (3)

In step ST206, the second control unit 32 uses the current operation amount U _n , the target pressure value Pd ′, and the maximum drive frequency (set value of 50 Hz or 60 Hz) of the second pump 17 according to a predetermined arithmetic expression. The second drive frequency F ₂ [Hz] of the second pump 17 is calculated.

In step ST207, the second control unit 32, a second calculation value of the drive frequency _{F 2,} the corresponding current value signal (command signal: 4 to 20 mA) is converted to the converted current value signal to the second inverter 18 Output. Thereby, the process of this flowchart is complete | finished (it returns to step ST201).

In step ST207, when the second control unit 32 outputs the current value signal to the second inverter 18, the second inverter 18 converts the drive power converted to the frequency specified by the input current value signal to the second value. Supply to pump 17. As a result, the second pump 17 is driven at a rotational speed corresponding to the second drive frequency F ₂ input from the second inverter 18.

  According to the pure water manufacturing apparatus 1 which concerns on 1st Embodiment mentioned above, the following effects are show | played, for example.

  In the pure water production apparatus 1 according to the first embodiment, the second control unit 32 performs a line from the desalting chamber 161 and the desalting chamber 161 of the EDI stack 16 to the demand point according to the detected water temperature value of the permeated water W2. The target pressure value of the second pump 17 is set so as to be a pressure value corresponding to the pressure loss generated in step (b). According to this, in the pure water production apparatus 1, the target pressure value of the second pump 17 is set lower as the detected temperature value of the permeated water W2 becomes higher, so that the power consumption of the second pump 17 is suppressed. Can do. Further, since the target pressure value set at that time is a pressure value corresponding to a pressure loss occurring at least in the line from the desalination chamber 161 and the desalination chamber 161 to the demand point of the EDI stack 16, the desalted water W6. Can be reliably sent to the demand point. Moreover, in the pure water manufacturing apparatus 1, since the target flow rate value of the 2nd pump 17 is set to a higher target pressure value, so that the detected temperature value of the permeated water W2 becomes low, the pressure which generate | occur | produces in a line etc. by the fall of water temperature Even if the loss increases, the desalted water W6 can be more reliably delivered to the demand point.

  Moreover, since the pure water manufacturing apparatus 1 which concerns on 1st Embodiment is equipped with the decarbonation unit 15 in the downstream of the RO membrane module 7, it can remove the free carbonic acid which permeate | transmits RO membrane from the permeated water W2. Therefore, in the pure water manufacturing apparatus 1, permeated water W2 with higher purity can be obtained.

(Second Embodiment)
Next, a pure water producing apparatus 1A according to a second embodiment of the present invention will be described with reference to FIGS. 5 and 6A to 6C. FIG. 5 is an overall schematic diagram of a pure water producing apparatus 1A according to the second embodiment. FIG. 6A is a first middle portion of the overall configuration diagram of the pure water producing apparatus 1A according to the second embodiment. FIG. 6B is a second middle portion of the overall configuration diagram of the pure water producing apparatus 1A according to the second embodiment. FIG. 6C is a rear part of the entire configuration diagram of the pure water producing apparatus 1A according to the second embodiment.

  In the second embodiment, differences from the first embodiment will be mainly described. For this reason, the same code | symbol is attached | subjected about the same (or equivalent) structure as 1st Embodiment, and detailed description is abbreviate | omitted. In addition, the description of the first embodiment is appropriately applied to points that are not particularly described in the present embodiment. Moreover, in 2nd Embodiment, the structure from the upstream of the supply water line L1 to the supply water replenishment valve V31 is the same as that of 1st Embodiment. Therefore, in 2nd Embodiment, main drawings (drawing corresponding to FIG. 2A) about the structure from the upstream of the supply water line L1 in 1st Embodiment to the supply water replenishment valve V31 and its description are abbreviate | omitted.

  The pure water producing apparatus 1A according to the second embodiment is a two-stage RO membrane arranged in series, whereas the pure water producing apparatus 1 in the first embodiment includes the one-stage RO membrane module 7. The point that the modules 10 and 14 are provided, the point that the intermediate tank 11 is provided between the two RO membrane modules 10 and 14, and the configuration around these, the pure water production apparatus 1 of the first embodiment and Mainly different.

  As shown in FIG. 5, the pure water producing apparatus 1A according to the second embodiment includes a front-stage RO membrane module 10 as a first reverse osmosis membrane module, a rear-stage RO membrane module 14 as a second reverse osmosis membrane module, Is provided. Among these, the “rear-stage RO membrane module 14” corresponds to the “RO membrane module 7” in the first embodiment. Therefore, in the second embodiment, the “permeate water line L21” in the first embodiment is set as the “rear-stage RO permeate line L23”, and the permeate separated by the rear-stage RO membrane module 14 is “the latter-stage permeate water W4” (first 2 permeate). Further, the permeated water separated by the pre-stage RO membrane module 10 is referred to as “pre-stage permeate W2” (first permeate).

  In the second embodiment, the “RO permeate return line L41” in the first embodiment is referred to as the “front-stage RO permeate return line L43”, and the “RO concentrated water return line L51” in the first embodiment is referred to as the “front-stage RO. Concentrated water return line L53 ".

  In the second embodiment, the pump that discharges the supply water W1 toward the upstream RO membrane module 10 is referred to as a “first pump 8”, and an electric circuit that supplies driving power to the first pump 8 is referred to as a “first inverter”. 9 ”. In the second embodiment, the “first pump 5” in the first embodiment is a “second pump 12”, and the “first inverter 9” is a “second inverter 13”. Furthermore, in the second embodiment, the “second pump 17” in the first embodiment is referred to as a “third pump 19”, and the “second inverter 18” is referred to as a “third inverter 20”.

  In the second embodiment, the frequency of the driving power supplied to the first pump 8 is “first driving frequency”, the frequency of the driving power supplied to the second pump 12 is “second driving frequency”, The frequency of the driving power supplied to the third pump 19 is referred to as “third driving frequency”.

  As shown in FIG. 5, the pure water producing apparatus 1A according to the second embodiment includes a first optional device OP1, a prefilter 4, a second optional device OP2, a first pump 8, and a first inverter 9. The first-stage RO membrane module 10, the intermediate tank 11, the second pump 12, the second inverter 13, the second-stage RO membrane module 14, the third optional device OP3, the third pump 19, and the third inverter 20 , First flow path switching valve V71, EDI stack 16, second flow path switching valve V72, fourth optional device OP4, control unit 30A (first control unit 31A and second control unit 32A), input An operation unit 40, a DC power supply device 50, and a display unit 60 are provided.

  Moreover, as shown in FIG. 5, the pure water manufacturing apparatus 1A of the second embodiment includes a supply water line L1, a front RO permeate water line L22 as a first permeate water line, and a front RO permeate return line L43. The upstream RO concentrated water return line L53, the downstream RO permeated water line L23 as the second permeated water line, the downstream RO permeated water return line L44, the downstream RO concentrated water return line L54, the desalted water line L3, A salt water return line L45.

  Further, as shown in FIG. 5, the pure water production apparatus 1A in the second embodiment replaces the RO permeate return line L41 and the desalted water return line L42 in the first embodiment with the preceding RO permeate return line L43, The rear stage RO permeated water return line L44 and the demineralized water return line L45 are provided.

  Moreover, as shown to FIG. 6A-FIG. 6C, the pure water manufacturing apparatus 1A of 2nd Embodiment is not provided with 2nd pressure sensor PS2 in 1st Embodiment, On the other hand, 5th pressure sensor PS5, 4th A temperature sensor TE4, a fifth temperature sensor TE5, a third flow rate sensor FM3, and a second electrical conductivity sensor EC2 are further provided. Similarly to the first embodiment, the pure water manufacturing apparatus 1A of the second embodiment includes the first electrical conductivity sensor EC1 and the first specific resistance sensor RS1.

  The pre-stage RO membrane module 10 uses the feed water W1 sent from the first pump 8 as the pre-stage permeate W2 as the first permeate from which the dissolved salts have been removed, and the first concentrated water in which the dissolved salts are concentrated. Separated into concentrated water W3.

  The front-stage RO permeate line L22 is a line through which the front-stage permeate water W2 separated by the front-stage RO membrane module 10 flows to the rear-stage RO membrane module 14. As shown in FIG. 6A, the upstream end of the upstream RO permeate line L22 is connected to the secondary port of the upstream RO membrane module 10 (the outlet of the upstream permeate W2). As shown in FIG. 6B, the downstream end of the upstream RO permeate line L22 is connected to the primary inlet port (the inlet of the upstream permeate W2) of the downstream RO membrane module 14.

  As shown in FIG. 6A, the upstream RO permeate line L22 is sequentially connected from the upstream side, as shown in FIG. 6A. The connection part J54, the upstream permeate supply valve V35, the third check valve V63, the connection part J10, the connection part J12, and the connection part J13. , And a sixth on-off valve V16. In addition, after the sixth on-off valve V16, as shown in FIG. 6B, the intermediate tank 11, the seventh on-off valve V17, the connecting portion J61, the connecting portion J21, the second pump 12, the connecting portion J22, and the post-stage RO membrane module 14 is provided. As shown in FIG. 6A, the upstream end of the upstream RO permeated water return line L43 is connected to the connecting portion J54. Moreover, as shown to FIG. 6B, the downstream end part of the back | latter stage RO concentrated water return line L54 is connected to the connection part J61.

  The front-stage permeated water supply valve V35 is an automatic valve that can control the opening and closing of the front-stage RO permeated water line L22. The front stage permeated water replenishment valve V35 is electrically connected to a control unit 30A (described later). The opening and closing of the front permeate replenishment valve V35 is controlled by a flow path opening / closing signal transmitted from the first control unit 31A of the control unit 30A.

  As shown in FIG. 5, the intermediate tank 11 is provided between the front RO membrane module 10 and the rear RO membrane module 14 in the front RO permeate line L22. The intermediate tank 11 is a tank that stores the previous-stage permeated water W <b> 2 separated by the previous-stage RO membrane module 10.

  The intermediate tank 11 is provided with a water level sensor 111 as shown in FIG. 6B. The water level sensor 111 is a device that detects the water level of the upstream permeated water W2 stored in the intermediate tank 11. The water level sensor 111 is electrically connected to the control unit 30A. The water level (detected water level value) of the intermediate tank 11 measured by the water level sensor 111 is transmitted as a detection signal to the first control unit 31A of the control unit 30A.

  The second pump 12 is a device that sucks the pre-stage permeate water W <b> 2 flowing through the pre-stage RO permeate line L <b> 22 and discharges it toward the post-stage RO membrane module 14. The second pump 12 is supplied with driving power having a frequency converted from the second inverter 13. The second pump 12 is driven at a rotation speed corresponding to the frequency of the supplied driving power (second driving frequency).

  The second inverter 13 is an electric circuit (or a device having the circuit) that supplies the second pump 12 with driving power whose frequency has been converted. The second inverter 13 is electrically connected to the control unit 30A. A command signal is input to the second inverter 13 from the first control unit 31A of the control unit 30A. The second inverter 13 outputs drive power having a second drive frequency corresponding to the command signal (current value signal or voltage value signal) input by the first control unit 31 </ b> A to the second pump 12.

  The post-stage RO membrane module 14 uses the pre-stage permeated water W2 separated from the pre-stage RO membrane module 10 and delivered from the second pump 12 as the second permeate from which the dissolved salts are removed from the pre-stage permeate W2. The water W4 and the concentrated water W5 as the second concentrated water in which the dissolved salts are concentrated are separated. The post-stage RO membrane module 14 is configured by accommodating a single or a plurality of spiral RO membrane elements in a pressure vessel (vessel).

  The upstream RO permeated water return line L43 is a line that returns the upstream permeated water W2 separated by the upstream RO membrane module 10 to the upstream supply water line L1 of the upstream RO membrane module 10, as shown in FIG. 6A. . The upstream end of the upstream RO permeate return line L43 is connected to the connection J54. The downstream end of the upstream RO permeated water return line L43 is connected to the upstream RO concentrated water return line L53 at the connection portion J52. The connecting part J52 is disposed between the connecting part J53 and the connecting part J51 in the upstream RO concentrated water return line L53. In the upstream RO permeated water return line L43, the portion from the connecting portion J52 to the connecting portion J51 is common to the portion from the connecting portion J52 to the connecting portion J51 in the upstream RO concentrated water return line L53.

  As shown in FIG. 6A, a relief valve V43 is provided in the upstream RO permeate return line L43. The relief valve V43 is a normally closed pressure operating valve, and is an adjustment valve that is opened when the pressure on the primary side is higher than the pressure on the secondary side by a certain pressure or more. Specifically, the relief valve V43 is opened when the pipe pressure of the front-stage RO permeate return line L43 becomes equal to or higher than a preset pressure, and the front-stage permeate W2 flowing through the front-stage RO permeate line L22 is removed. This is a valve for flowing through the connecting portion J54 to the upstream RO permeated water return line L43.

  The pressure on the secondary side of the relief valve V43 (the pressure of the supply water W1 at the connection portion J51) is adjusted to be less than the operating pressure of the first pump 8 by the pressure reducing valve V42. When the first pump 8 is driven in a state where the front permeate supply valve V35 is controlled to be closed, the primary pressure in the relief valve V43 (the pressure of the front permeate W2 at the connection portion J54) Higher than the pressure. Thereby, the relief valve V43 is opened, and the front-stage permeate water W2 flowing through the front-stage RO permeate water line L22 can be circulated to the front-stage RO permeate return line L43.

  As shown in FIG. 6B, the rear-stage RO concentrated water return line L54 is a line that returns a portion W51 of the concentrated water W5 separated by the rear-stage RO membrane module 14 to the front-stage RO permeate water line L22. The upstream end of the rear-stage RO concentrated water return line L54 is connected to the primary-side outlet port (concentrated water outlet) of the rear-stage RO membrane module 14. The downstream end of the rear stage RO concentrated water return line L54 is connected to the connecting portion J61. The connection portion J61 is disposed between the intermediate tank 11 and the second pump 12 in the upstream RO permeate line L22.

  As shown in FIG. 6B, the rear stage RO concentrated water return line L54 is provided with a connecting portion J63, a connecting portion J62, a sixth check valve V66, a sixth constant flow valve V56, and a connecting portion J61 in this order from the upstream side. ing. The upstream end of the first second-stage RO concentrated water line L63 is connected to the connecting portion J62. The upstream end of the second second-stage RO concentrated water line L64 is connected to the connecting portion J63.

  The first second-stage RO concentrated water line L63 and the second second-stage RO concentrated water line L64 remove the remaining portion W52 of the concentrated water W5 separated by the second-stage RO membrane module 14 from the middle of the second-stage RO concentrated water return line L54. Is a line to send to The downstream end of the first second-stage RO concentrated water line L63 and the downstream end of the second second-stage RO concentrated water line L64 are connected to the upstream end of the second-stage RO concentrated water delivery line L65 at the connection J64. It is connected. The downstream end of the downstream RO concentrated water delivery line L65 is connected to the decarboxylation unit 15 as shown in FIG. 6C. The first second-stage RO concentrated water line L63 and the second second-stage RO concentrated water line L64 are provided with a first regulating valve V36 and a second regulating valve V37, and a seventh constant flow valve V57 and an eighth constant flow valve V58, respectively. It has been.

  The first adjusting valve V36 and the second adjusting valve V37 can adjust the delivery flow rate of the concentrated water W5 by individually opening and closing the first second-stage RO concentrated water line L63 and the second second-stage RO concentrated water line L64. . The first adjustment valve V36 and the second adjustment valve V37 are each electrically connected to the control unit 30A. Opening and closing of the first regulating valve V36 and the second regulating valve V37 is controlled by a drive signal transmitted from the first control unit 31A of the control unit 30A.

  An eighth open / close valve V18 is provided in the downstream RO concentrated water delivery line L65. The eighth on-off valve V18 is a manual valve that can be operated to open and close the rear-stage RO concentrated water delivery line L65.

  The post-stage RO permeate water line L23 is a line through which the post-stage permeate water W4 separated by the post-stage RO membrane module 14 flows through the EDI stack 16. The upstream end of the downstream RO permeate line L23 is connected to the secondary port of the downstream RO membrane module 14 (exit of the downstream permeate W4) as shown in FIG. 6B. As shown in FIG. 6C, the downstream end of the downstream RO permeate line L23 is connected to the EDI stack 16 via the first flow path switching valve V71.

  The rear-stage RO permeate line L23 includes a front-stage permeate line L231, a middle-stage permeate line L232, a desalting chamber inflow line L233, and a concentration chamber inflow line L234. As shown in FIG. 6B, a fourth check valve V64, a connecting portion J23, and a ninth on-off valve V19 are provided in the upstream permeate line L231 in order from the upstream side. Further, after the ninth on-off valve V19, as shown in FIG. 6C, a decarboxylation unit 15, a connection portion J31, a connection portion J32, a connection portion J38, and a first flow path switching valve V71 are provided.

  The first flow path switching valve V71 is a flow path (water sampling side flow path) for allowing the downstream permeate water W4 separated by the rear RO membrane module 14 to flow toward the EDI stack 16 via the middle permeate water line L232. Alternatively, it is a valve that can be switched to a flow path (circulation side flow path) that circulates toward the intermediate tank 11 via the rear-stage RO permeate return line L44. The first flow path switching valve V71 is configured by, for example, an electric or electromagnetic three-way valve. The first flow path switching valve V71 is electrically connected to the control unit 30A. The switching of the flow path in the first flow path switching valve V71 is controlled by a flow path switching signal transmitted from the first control unit 31A of the control unit 30A.

  The post-stage RO permeate return line L44 is a line for returning the post-stage permeate water W4 separated by the post-stage RO membrane module 14 to the intermediate tank 11 provided between the pre-stage RO membrane module 10 and the post-stage RO membrane module 14. is there. The upstream end of the downstream RO permeate return line L44 is connected to the first flow path switching valve V71 as shown in FIG. 6C. The downstream side of the rear stage RO permeate return line L44 is connected to the intermediate tank 11 as shown in FIG. 6B.

  In addition, in 2nd Embodiment shown to FIG. 6C, the structure of the downstream part from 1st flow-path switching valve V71 is "the middle stage permeate water line L212" in 1st Embodiment, and "desalination room inflow line L213." ”,“ Concentration chamber inflow line L214 ”and“ permeate water W2 ”, respectively,“ middle stage permeate water line L232 ”,“ desalination chamber inflow line L233 ”,“ concentration chamber inflow line L234 ”and“ rear stage permeate water W4 ”. " Moreover, in 2nd Embodiment, it is the structure similar to 1st Embodiment except the structure of the EDI concentrated water discharge line L72 and the desalted water return line L45 which are mentioned later. Therefore, regarding these parts, description of 1st Embodiment is used and description of 2nd Embodiment is abbreviate | omitted.

  As shown in FIG. 6C, the pure water producing apparatus 1A in the second embodiment includes an EDI concentrated water discharge line L72 in place of the EDI concentrated water line L52 in the first embodiment.

  The EDI concentrated water discharge line L72 is a line for discharging the concentrated water W7 discharged from the concentration chamber 162 of the EDI stack 16 to the outside of the apparatus. The upstream end of the EDI concentrated water discharge line L72 is connected to the secondary port of the EDI stack 16 (the outlet side of the concentration chamber 162). The downstream side of the EDI concentrated water discharge line L72 is connected or opened to a drain pit (not shown), for example.

  The second flow path switching valve V72 is a flow path (water sampling side flow path) for sending the desalted water W6 obtained in the desalination chamber 161 of the EDI stack 16 toward the demand point via the downstream side desalted water line L32. Or a valve that can be switched to a flow path (circulation side flow path) that circulates toward the intermediate tank 11 via the desalted water return line L45.

  The desalted water return line L45 is provided between the front-stage RO membrane module 10 and the rear-stage RO membrane module 14 with the desalted water W6 obtained in the desalination chamber 161 of the EDI stack 16 in the middle of the desalted water line L3. This is a line that returns to the intermediate tank 11. In the present embodiment, the upstream end of the desalted water return line L45 is connected to the second flow path switching valve V72. The downstream end of the desalted water return line L45 is connected to the intermediate tank 11.

  The fifth pressure sensor PS5 is a device that measures the pressure of the front-stage permeate water W2 that flows through the front-stage RO permeate line L22. The fifth pressure sensor PS5 is connected to the upstream RO permeated water line L22 at the connection portion J22. The connecting portion J22 is disposed between the second pump 12 and the rear RO membrane module 14 in the front RO permeate line L22. The fifth pressure sensor PS5 is electrically connected to the control unit 30A. The pressure of the pre-stage permeated water W2 measured by the fifth pressure sensor PS5 is transmitted as a detection signal to the first control unit 31A of the control unit 30A.

  The fourth temperature sensor TE4 and the fifth temperature sensor TE5 are devices that measure the temperature of the front-stage permeate water W2 that flows through the front-stage RO permeate line L22. As shown in FIG. 6A, the fourth temperature sensor TE4 is connected to the upstream RO permeate line L22 at the connection portion J12. The connecting portion J12 is disposed between the upstream RO membrane module 10 and the intermediate tank 11 in the upstream RO permeate line L22. As shown in FIG. 6B, the fifth temperature sensor TE5 is connected to the upstream RO permeated water line L22 at the connection portion J21. The connection portion J21 is disposed between the intermediate tank 11 and the second pump 12 in the upstream RO permeate line L22. The fourth temperature sensor TE4 and the fifth temperature sensor TE5 are electrically connected to the control unit 30A. The temperature of the pre-stage permeate water W2 measured by the fourth temperature sensor TE4 and the fourth temperature sensor TE4 is transmitted as a detection signal to the first control unit 31A of the control unit 30A.

  In the second embodiment, “first flow rate sensor FM1” is provided as the first flow rate detection means, and “third flow rate sensor FM3” is provided as the second flow rate detection means.

  The third flow rate sensor FM3 is a device that measures the flow rate of the rear permeate water W4 that flows through the rear RO permeate line L23. As shown in FIG. 6B, the third flow sensor FM3 is connected to the rear-stage RO permeate line L23 at the connection portion J23. The connecting part J23 is disposed between the rear RO membrane module 14 and the decarbonation unit 15 in the rear RO permeate line L23. The third flow sensor FM3 is electrically connected to the control unit 30A. The flow rate of the rear permeate water W4 measured by the third flow rate sensor FM3 is transmitted as a detection signal to the first control unit 31A and the second control unit 32A of the control unit 30A.

  The second electrical conductivity sensor EC2 is a device that measures the electrical conductivity (hereinafter also referred to as “detected EC value”) of the upstream permeated water W2 that flows through the upstream RO permeated water line L22. As shown in FIG. 6A, the second electrical conductivity sensor EC2 is connected to the upstream RO permeate line L22 at the connection portion J13. The connecting portion J13 is disposed between the upstream RO membrane module 10 and the intermediate tank 11 in the upstream RO permeate line L22. The second electrical conductivity sensor EC2 is electrically connected to the control unit 30A. The detected EC value of the pre-stage permeated water W2 measured by the second electrical conductivity sensor EC2 is transmitted as a detection signal to the first controller 31A of the control unit 30A.

  The control unit 30A includes a first control unit 31A and a second control unit 32A. 31 A of 1st control parts are speed type | mold digital PID algorithms so that the 1st detection flow volume value of 1st flow sensor FM1 may become the 1st target flow volume value preset as flow volume feedback water volume control with respect to the front | former stage RO membrane module 10 Thus, the first drive frequency of the first pump 8 is calculated, and a current value signal (command signal) corresponding to the calculated value of the first drive frequency is output to the first inverter 9.

  Further, the first control unit 31A performs velocity type digital control so that the second detected flow rate value of the third flow rate sensor FM3 becomes a preset second target flow rate value as flow rate feedback water amount control for the downstream RO membrane module 14. The second drive frequency of the second pump 12 is calculated by the PID algorithm, and a current value signal (command signal) corresponding to the calculated value of the second drive frequency is output to the second inverter 13.

  The flow rate feedback water amount control of the upstream RO membrane module 10 and the downstream RO membrane module 14 by the first control unit 31A is the same as the flow rate feedback water amount control of the RO membrane module 7 by the first control unit 31 of the first embodiment (see FIG. 3). Since it is substantially the same, description is abbreviate | omitted.

  Further, the pressure feedback water pressure control of the EDI stack 16 by the second control unit 32A is substantially the same as the pressure feedback water pressure control (see FIG. 4) of the EDI stack 16 by the second control unit 32 of the first embodiment. Since there is, explanation is omitted.

  Also in the pure water manufacturing apparatus 1A of the second embodiment described above, the same effects as the pure water manufacturing apparatus 1 of the first embodiment are exhibited. That is, in the pure water manufacturing apparatus 1A of the second embodiment, the second control unit 32A determines from the desalting chamber 161 and the desalting chamber 161 of the EDI stack 16 to the demand point according to the detected water temperature value of the rear-stage permeated water W4. The target pressure value of the third pump 19 is set so as to be a pressure value corresponding to the pressure loss generated in this line. According to this, in the pure water producing apparatus 1A, the target pressure value of the third pump 19 is set lower as the detected temperature value of the rear-stage permeated water W4 becomes higher, so that the power consumption of the third pump 19 is suppressed. be able to. Further, since the target pressure value set at that time is a pressure value corresponding to a pressure loss occurring at least in the line from the desalination chamber 161 and the desalination chamber 161 to the demand point of the EDI stack 16, the desalted water W6. Can be reliably sent to the demand point. Moreover, in the pure water manufacturing apparatus 1A, the target flow rate value of the third pump 19 is set to a higher target pressure value as the detected temperature value of the rear-stage permeated water W4 becomes lower. Even if the pressure loss increases, the desalted water W6 can be more reliably delivered to the demand point.

  Moreover, since the deionized water producing apparatus 1A according to the second embodiment includes the decarboxylation unit 15 between the post-stage RO membrane module 14 and the EDI stack 16, free carbon dioxide that easily permeates the RO membrane is obtained from the post-stage permeate water W4. Can be removed. Therefore, in the pure water manufacturing apparatus 1A, it is possible to obtain the latter-stage permeated water W4 having higher purity.

(Third embodiment)
Next, a pure water producing apparatus 1B according to a third embodiment of the present invention will be described with reference to FIGS. 7 and 8A to 8C. FIG. 7 is an overall schematic diagram of a pure water producing apparatus 1B according to the third embodiment. FIG. 8A is a front part of the entire configuration diagram of the pure water producing apparatus 1B according to the third embodiment. FIG. 8B is a first middle portion of the overall configuration diagram of the pure water producing apparatus 1B according to the third embodiment. FIG. 8C is a second middle portion of the overall configuration diagram of the pure water producing apparatus 1B according to the third embodiment.

  In the third embodiment, differences from the second embodiment will be mainly described. For this reason, the same code | symbol is attached | subjected about the same (or equivalent) structure as 2nd Embodiment, and detailed description is abbreviate | omitted. In addition, the description of the second embodiment is appropriately applied to points that are not particularly described in the present embodiment.

  The pure water production apparatus 1B according to the third embodiment is provided with the supply water tank 21 and the supply water auxiliary line L24, the point that the intermediate tank 11 according to the second embodiment is not provided, and the peripheral configuration thereof. Mainly different from the pure water producing apparatus 1A of the second embodiment.

  As shown in FIG. 7, the pure water producing apparatus 1B according to the third embodiment includes a supply water tank 21, a first optional device OP1, a prefilter 4, a second optional device OP2, and a first pump 8. The first inverter 9, the front RO membrane module 10, the second pump 12, the second inverter 13, the rear RO membrane module 14, the third optional device OP3, the third pump 19, and the third inverter 20 A first flow path switching valve V71, an EDI stack 16, a second flow path switching valve V72, a fourth optional device OP4, a control unit 30B (first control unit 31B and second control unit 32B), An input operation unit 40, a DC power supply device 50, and a display unit 60 are provided.

  In the third embodiment, as in the second embodiment, the “first flow sensor FM1” is provided as the first flow rate detection means, and the “third flow sensor FM3” is provided as the second flow rate detection means.

  Moreover, as shown in FIG. 7, the pure water manufacturing apparatus 1B of the third embodiment includes a supply water line L1, a front-stage RO permeate water line L22, a feed water auxiliary line L24, and a front-stage RO permeate return line L43. The first-stage RO concentrated water return line L53, the second-stage RO permeated water line L23, the second-stage RO permeated water return line L44, the first-stage RO concentrated water return line L54, the desalted water line L3, and the desalted water return line L45. Prepare.

  The supply water tank 21 is a tank for storing raw water W11 (supply water W1). The upstream end of the first supply water line L11 is connected to the supply water tank 21. The raw water W11 (supply water W1) stored in the supply water tank 21 is supplied to the first optional device OP1 via the first supply water line L11. The supply water tank 21 is connected to an upstream end of a supply water auxiliary line L24 (described later).

  The supply water auxiliary line L24 is a line capable of sending a part of the supply water W1 stored in the supply water tank 21 to the upstream RO permeate water line L22. When the first target flow rate of the first-stage permeated water (first permeated water) W2 is decreased in the first control unit 31B described later, it is stored in the supply water tank 21 in order to compensate for the shortage of the first-stage permeated water W2. A part of the supplied water W1 is sent to the upstream RO permeated water line L22 via the supplied water auxiliary line L24.

  As shown in FIG. 8A, the upstream end of the supply water auxiliary line L <b> 24 is connected to the supply water tank 21. Moreover, as shown to FIG. 8B, the downstream edge part of the supply water auxiliary line L24 is connected to the front | former stage RO permeated water line L22 in the connection part J65. The connecting portion J65 is disposed between the sixth on-off valve V16 and the seventh on-off valve V17 in the upstream RO permeate line L22. As shown in FIGS. 7 and 8A, a seventh check valve V67 is provided in the supply water auxiliary line L24.

  Further, as shown in FIG. 8C, the downstream end of the downstream RO permeated water return line L44 is connected to the upstream RO concentrated water return line L54 at the connection portion J66. The connecting portion J66 is disposed between the first flow path switching valve V71 and the connecting portion J61 in the upstream RO concentrated water return line L54.

  Moreover, as shown to FIG. 8C, the downstream edge part of the desalinated water return line L45 is connected to the front | former stage RO permeated water line L22 in the connection part J67. The connecting portion 67 is disposed between the connecting portion J65 and the seventh on-off valve V17 in the upstream RO permeate line L22.

  Thus, in this embodiment, the back | latter stage permeated water W4 which distribute | circulates the back | latter stage RO permeated water return line L44, and the desalted water W6 which distribute | circulates the desalted water return line L45 are returned to the front | former stage RO permeated water line L22.

  Further, as shown in FIG. 8C, a third electrical conductivity sensor EC3 as water quality detection means is connected to the rear stage RO permeate line L23. The third electrical conductivity sensor EC3 is a device that measures the electrical conductivity (hereinafter also referred to as “detected EC value”) of the downstream permeate water W4 that flows through the downstream RO permeate line L23. The third electrical conductivity sensor EC3 is connected to the subsequent stage RO permeated water line L23 at the connection portion J68. The connecting portion J68 is disposed between the ninth on-off valve V19 and the decarboxylation unit 15 in the rear stage RO permeate line L23. The third electrical conductivity sensor EC3 is electrically connected to a control unit 30B (described later). The detected EC value (electrical conductivity) of the downstream permeated water W4 measured by the third electrical conductivity sensor EC3 is transmitted as a detection signal to the first control unit 31B of the control unit 30B.

  In addition, in the pure water manufacturing apparatus 1B which concerns on 3rd Embodiment, since the structure of the back | latter stage part of a whole block diagram is substantially the same as the pure water manufacturing apparatus 1A (refer FIG. 6C) of 2nd Embodiment, it demonstrates. Omitted.

Next, the control unit 30B will be described.
The control unit 30B includes a first control unit 31B as a first control unit and a second control unit, and a second control unit 32B as a third control unit.

  The first control unit 31 </ b> B performs flow rate feedback water amount control on the upstream RO membrane module 10 and the downstream RO membrane module 14. Since the flow rate feedback water amount control by the first control unit 31B of the present embodiment is substantially the same as the flow rate feedback water amount control (see FIG. 3) by the first control unit 31A of the second embodiment, description thereof is omitted.

  In the present embodiment, in the flow rate feedback water amount control for the upstream RO membrane module 10 of the first control unit 31B, the “target flow value” in the first embodiment is set to “first target flow value”. Similarly, in the flow rate feedback water amount control for the downstream RO membrane module 14 of the first control unit 31B, the “target flow rate value” in the first embodiment is set to the “second target flow rate value”.

  The first control unit 31B of the present embodiment performs the first control in the upstream RO membrane module 10 based on the detected EC value (detected water quality value) measured by the third electrical conductivity sensor EC3 and a preset reference EC value. 1 Set the target flow rate value. Hereinafter, setting of the first target flow rate value in the first control unit 31B of the present embodiment will be described.

  The first control unit 31B sets the first target flow rate value to 100% (100% flow rate) when the detected EC value ≧ the reference EC value. When the detected EC value ≧ the reference EC value, the water quality of the subsequent-stage permeated water W4 is not good. Therefore, the first control unit 31B sets the first target flow rate value to 100% flow rate in order to improve the water quality.

  The first target flow rate value (100% flow rate) is, for example, the total flow rate value of the post-stage permeate water W4 and the concentrated water (second concentrate) W5 manufactured by the post-stage RO membrane module 14. The reference EC value is desirably set lower than the allowable EC value required in the decarboxylation unit 15, the EDI stack 16, or the demand point provided on the downstream side of the downstream RO membrane module 14. Thereby, the water quality of the latter stage permeated water W4 can always be maintained above the allowable EC value.

  Further, the first control unit 31B calculates a difference between the reference EC value and the detected EC value when the detected EC value <the reference EC value. Then, the first control unit 31B decreases the first target flow rate value when the calculated difference value exceeds a preset specified value (for example, 1 μS / cm). That is, when the detected EC value <the reference EC value, and the difference value between the reference EC value and the detected EC value exceeds the specified value, the water quality of the subsequent-stage permeate W4 is excessively good. The first control unit 31B sets the first target flow rate value lower than the 100% flow rate. In the present embodiment, the first control unit 31B decreases the first target flow rate value at a preset rate (for example, by 5% for 100% flow rate).

  If the first target flow rate value (100% flow rate) is decreased, a deficiency is generated in the amount of front-stage permeated water W2 supplied to the second pump 12 via the front-stage RO permeate water line L22. The shortage of the upstream permeated water W2 is replenished by supplying a part of the supplied water W1 stored in the supplied water tank 21 to the upstream RO permeated water line L22 through the supplied water auxiliary line L24.

  Specifically, in the first control unit 31B, when the first target flow rate value is not decreased (100% flow rate), the first supply water line L11 (second supply water) is mainly based on the discharge force of the first pump 8. The upstream permeated water W2 is sent to the line L12). On the other hand, when the first target flow rate value is decreased in the first control unit 31B, the first-stage permeate water W2 is sent to the first supply water line L11 mainly by the discharge force of the first pump 8, and the first The supply water W1 as a shortage of the pre-stage permeate water W2 is sent to the first supply water line L11 via the supply water auxiliary line L24 by the suction force of the two pumps 12.

  When the water quality of the latter-stage permeated water W4 is excessively good, the operating pressure of the first pump 8 can be lowered (the operating pressure of the former-stage RO membrane module 10 can be lowered) by reducing the first target flow rate value. Thus, the power consumption of the first pump 8 can be suppressed by reducing the operating pressure of the first pump 8. Further, when the first target flow rate value is decreased, the shortage of the front permeate water W2 is supplemented by mixing the feed water W1 with the front permeate water W2 within a range in which the water quality of the rear permeate water W4 can be maintained. be able to. The ratio of decreasing the first target flow rate value is set so that the water quality of the rear permeate water W4 can be maintained even when the feed water W1 is mixed with the front permeate water W2 when the water quality of the rear permeate water W4 is excessively good. Is done.

  Further, when the detected EC value <the reference EC value, the first control unit 31B maintains the first target flow rate value at the current value when the difference value is less than the specified value. When the detected EC value is smaller than the reference EC value and the difference value is less than the specified value, the latter-stage permeated water W4 is in a state of maintaining an acceptable water quality. Therefore, the first control unit 31B maintains the current value without changing the first target flow rate value. Control for decreasing the first target flow rate value in the first control unit 31B will be described later.

  The pressure feedback water pressure control of the EDI stack 16 by the second controller 32B is substantially the same as the pressure feedback water pressure control (see FIG. 4) of the EDI stack 16 by the second controller 32 of the first embodiment. Since there is, explanation is omitted.

  Next, a processing procedure when the first target flow rate value is set in the first control unit 31B of the present embodiment will be described with reference to FIG. FIG. 9 is a flowchart illustrating a processing procedure when the first target flow rate value is set in the first control unit 31B of the third embodiment. The process of the flowchart shown in FIG. 9 is repeatedly executed every predetermined time (10 minutes) during operation of the pure water production apparatus 1B.

In step ST301 shown in FIG. 9, the first control unit 31B determines whether the time count _{t 3} by ITU reaches 10min (minutes). In this step ST 301, the first control unit 31B, when the timing _{t 3} by ITU is determined to have reached the 10min (YES), the process proceeds to step ST 302. Further, in step ST 301, the first control unit 31B, when the timing _{t 3} by ITU is determined not to reach the 10min (NO), the process returns to the step ST 301.

Incidentally, the timing _t 3 (10min) in step ST301, after changing the first target flow rate value, the quality of the subsequent stage permeate W4 is counted as the time required to stabilize (wait time).

  In step ST302 (step ST301: YES), the first control unit 31B uses the detected EC value of the downstream permeated water W4 detected by the third electrical conductivity sensor EC3 and the reference EC value stored in the memory of the microprocessor. get.

  In step ST303, the first control unit 31B determines whether or not the detected EC value ≧ the reference EC value is satisfied. In step ST303, when the first control unit 31B determines that the detected EC value ≧ the reference EC value (YES), the process proceeds to step ST304. In step ST303, when the first control unit 31B determines that the detected EC value <the reference EC value (NO), the process proceeds to step ST305.

  In step ST304 (step ST303: YES), the first control unit 31B sets the first target flow rate value to 100% flow rate. The first target flow rate value set by the first control unit 31B is stored in the memory of the microprocessor. When the detected EC value ≧ the reference EC value, the water quality of the rear-stage permeated water W4 is not good. Therefore, in order to improve the water quality, the first target flow value is set to 100% flow rate. When the first target flow rate value is set to 100% flow rate in step ST304, the process of this flowchart ends (returns to step ST301).

  On the other hand, in step ST305 (step ST303: NO), the first control unit 31B determines whether or not the reference EC value−the detected EC value (difference value)> 1 μS / cm (specified value). In this step ST305, when the first controller 31B determines that the reference EC value−the detected EC value> 1 μS / cm (YES), the process proceeds to step ST306.

  In step ST305, if the first control unit 31B determines that reference EC value−detected EC value ≦ 1 μS / cm (NO), the process of this flowchart ends (returns to step ST301). . If the first control unit 31B determines that the reference EC value−the detected EC value ≦ 1 μS / cm (NO), the current value is maintained without changing the first target flow rate value.

  In step ST306 (step ST305: YES), the first control unit 31B decreases the first target flow rate value by 5% (5 points) from the current value, and sets the value as the first target flow rate value. For example, if the current value of the first target flow rate value is 100% flow rate, the 95% flow rate is set as the first target flow rate value. Further, if the current value of the first target flow rate value is 95% flow rate, 90% flow rate is set as the first target flow rate value. When the first target flow value is set in step ST306, the process of this flowchart ends (returns to step ST301).

In addition, in the flow rate feedback water amount control (see FIG. 3) for the upstream RO membrane module 10, the first control unit 31B uses the first target flow rate value set in step ST304 or ST306 in FIG. 9 as the target flow rate value Q _p. '(Step ST101 in FIG. 3).

  Also in the pure water manufacturing apparatus 1B of the third embodiment described above, the same effects as the pure water manufacturing apparatus 1 of the first embodiment are exhibited. That is, in the pure water production apparatus 1B of the third embodiment, the second control unit 32B moves from the desalination chamber 161 and the desalination chamber 161 of the EDI stack 16 to the demand point according to the detected water temperature value of the rear-stage permeated water W4. The target pressure value of the third pump 19 is set so as to be a pressure value corresponding to the pressure loss generated in this line. According to this, in the pure water production apparatus 1B, the target pressure value of the third pump 19 is set lower as the detected temperature value of the rear-stage permeated water W4 becomes higher, so that the power consumption of the third pump 19 is suppressed. be able to. Further, since the target pressure value set at that time is a pressure value corresponding to a pressure loss occurring at least in the line from the desalination chamber 161 and the desalination chamber 161 to the demand point of the EDI stack 16, the desalted water W6. Can be reliably sent to the demand point. In the pure water production apparatus 1B, the target flow rate value of the third pump 19 is set to a higher target pressure value as the detected temperature value of the rear-stage permeated water W4 becomes lower. Even if the pressure loss increases, the desalted water W6 can be more reliably delivered to the demand point.

  Moreover, in the pure water manufacturing apparatus 1B of the third embodiment, the first control unit 31B determines whether the reference EC value set in advance and the detected EC value of the subsequent-stage permeated water W4 detected by the third conductivity sensor EC3. When the difference exceeds a preset specified value, the first target flow rate value of the upstream RO membrane module 10 is decreased. As for the shortage of the first stage permeate water W2 due to the decrease in the first target flow rate value, a part of the feed water W1 stored in the feed water tank 21 is supplied to the first stage RO permeate line L22 through the feed water auxiliary line L24. It is replenished by.

  Therefore, in the pure water production apparatus 1B, when the difference between the reference EC value and the detected EC value exceeds the specified value, the discharge flow rate of the first pump 8 can be reduced by reducing the first target flow rate value. The power consumption of the first pump 8 can be suppressed. When the difference between the reference EC value and the detected EC value exceeds the specified value, the water quality of the rear-stage permeate water W4 is in an excessively good state, so the supply water W1 is replenished as a shortage of the front-stage permeate water W2. Even so, the water quality of the latter-stage permeated water W4 can be maintained. Further, in the pure water production apparatus 1B, the supply water W1 is supplemented as a shortage of the front-stage permeate water W2, so that the amount of front-stage permeate water W2 to be sent to the rear-stage RO membrane module 14 can be maintained.

  Therefore, according to the pure water manufacturing apparatus 1B of the present embodiment, when the water quality of the subsequent-stage permeated water W4 manufactured by the subsequent-stage RO membrane module 14 is excessively good, while maintaining the flow rate and water quality of the previous-stage permeated water W2, The power consumption of the first pump can be suppressed.

  Further, in the pure water production apparatus 1B of the present embodiment, when the first target flow rate value is not decreased, the first-stage permeate water W2 is sent to the first-stage RO permeate line L22 mainly by the discharge force of the first pump 8, When the first target flow rate value is decreased, the pre-stage permeate water W2 is sent to the pre-stage RO permeate line L22 mainly by the discharge force of the first pump 8, and the supply water is supplied by the suction force of the second pump 12. Via the auxiliary line L24, the supply water W1 as a shortage of the front stage permeate water W2 is sent to the front stage RO permeate line L22. According to this, in the pure water production apparatus 1B, a dedicated pump or the like for supplying the supply water W1 from the supply water auxiliary line L24 to the upstream RO permeate water line L22 becomes unnecessary, and thus the structure of the apparatus is simplified. can do.

  Moreover, in the pure water manufacturing apparatus 1B of the present embodiment, when the first control unit 31B decreases the first target flow value of the upstream RO membrane module 10, the first target flow value is decreased at a preset rate. Let According to this, since the first target flow rate value does not extremely decrease at one control timing, the water quality of the latter-stage permeate water W4 is low when the quality of the latter-stage permeate water W4 is excessively good. It can suppress becoming unstable.

  Also in the pure water producing apparatus 1B according to the third embodiment, since the decarboxylation unit 15 is provided between the post-stage RO membrane module 14 and the EDI stack 16, the free carbon dioxide that easily permeates the RO membrane is supplied to the post-stage permeate W4. Can be removed. Therefore, in the pure water production apparatus 1B, it is possible to obtain the later-stage permeated water W4 with higher purity.

(Fourth embodiment)
Next, a pure water producing apparatus 1C according to a fourth embodiment of the present invention will be described with reference to FIGS. 10, 11A, and 11B. FIG. 10 is an overall schematic view of a pure water producing apparatus 1C according to the fourth embodiment. FIG. 11A is a front part of an overall configuration diagram of a pure water producing apparatus 1C according to the fourth embodiment. FIG. 11B is a first middle portion of the overall configuration diagram of the pure water producing apparatus 1C according to the fourth embodiment.

  In the fourth embodiment, differences from the third embodiment will be mainly described. For this reason, the same code | symbol is attached | subjected about the same (or equivalent) structure as 3rd Embodiment, and detailed description is abbreviate | omitted. In addition, regarding the points that are not particularly described in the present embodiment, the descriptions of the second and third embodiments are appropriately applied.

  The pure water production apparatus 1C according to the fourth embodiment is provided with the permeated water return line L25 instead of the supply water auxiliary line L24 in the third embodiment, and in the configuration around it, the pure water production of the third embodiment Mainly different from the device 1B.

  As shown in FIG. 10, the pure water producing apparatus 1C according to the fourth embodiment includes a supply water tank 21, a first optional device OP1, a prefilter 4, a second optional device OP2, and a first pump 8. The first inverter 9, the front RO membrane module 10, the second pump 12, the second inverter 13, the rear RO membrane module 14, the third optional device OP3, the third pump 19, and the third inverter 20 A first flow path switching valve V71, an EDI stack 16, a second flow path switching valve V72, a fourth optional device OP4, a control unit 30C (first control unit 31C and second control unit 32C), An input operation unit 40, a DC power supply device 50, and a display unit 60 are provided.

  Moreover, as shown in FIG. 10, the pure water manufacturing apparatus 1C of the fourth embodiment includes a supply water line L1, a front-stage RO permeate line L22, a permeate return line L25, and a front-stage RO permeate return line L43. The first-stage RO concentrated water return line L53, the second-stage RO permeated water line L23, the second-stage RO permeated water return line L44, the first-stage RO concentrated water return line L54, the desalted water line L3, and the desalted water return line L45. Prepare.

  The permeate recirculation line L25 is a line through which a part of the front permeate water W2 separated in the front RO membrane module 10 can be sent to the supply water tank 21. In the present embodiment, the first-stage permeate W2 that exceeds the total flow rate of the second-stage permeate W4 that flows through the second-stage RO permeate line L23 and the concentrate W5 (second concentrate) that flows through the second-stage RO concentrate return line L54 is: It is sent (returned) from the upstream RO permeate line L22 to the feed water tank 21 via the permeate recirculation line L25.

  As shown in FIG. 11B, the upstream end of the permeate recirculation line L25 is connected to the upstream RO permeate line L22 at the connection J66. The connecting portion J66 is disposed between the sixth on-off valve V16 and the seventh on-off valve V17 in the upstream RO permeate line L22. As shown in FIGS. 10 and 11A, an eighth check valve V68 is provided in the permeate recirculation line L25. Further, as shown in FIG. 11A, the downstream end of the permeate recirculation line L25 is connected to the supply water tank 21.

  In addition, in the pure water manufacturing apparatus 1C which concerns on 4th Embodiment, since the structure of the 2nd middle stage part of a whole block diagram is substantially the same as the pure water manufacturing apparatus 1B (refer FIG. 8C) of 3rd Embodiment. Description is omitted. Moreover, in the pure water manufacturing apparatus 1C which concerns on 4th Embodiment, since the structure of the latter part of a whole block diagram is substantially the same as the pure water manufacturing apparatus 1A (refer FIG. 6C) of 2nd Embodiment, it demonstrates. Omitted.

Next, the control unit 30C will be described.
The control unit 30C includes a first control unit 31C as a first control unit and a second control unit, and a second control unit 32C as a third control unit.

  The first control unit 31 </ b> C performs flow rate feedback water amount control on the front-stage RO membrane module 10 and the rear-stage RO membrane module 14. Since the flow rate feedback water amount control by the first control unit 31C of the present embodiment is substantially the same as the flow rate feedback water amount control (see FIG. 3) by the first control unit 31A of the second embodiment, description thereof is omitted.

  The first control unit 31C of the present embodiment performs the latter stage when the detected EC value measured by the third electrical conductivity sensor EC3 is equal to or higher than a predetermined specified water quality value (hereinafter also referred to as “specified EC value”). The excess of the total flow rate of the permeated water W4 and the concentrated water W5 is set as the first target flow rate value. Here, the rear permeate water W4 is a permeate (second permeate) flowing through the rear RO permeate line L23 (see FIG. 8C for assistance). The concentrated water W5 is concentrated water (second concentrated water) that flows through the subsequent-stage RO concentrated water return line L54 (see FIG. 8C for assistance).

  In addition, when the detected EC value measured by the third electrical conductivity sensor EC3 is less than the specified EC value, the first control unit 31C sets the first target flow rate to be equal to or less than the total flow rate of the subsequent-stage permeate water W4 and the concentrated water W5. Set as a value. In the present embodiment, the first control unit 31C sets the total flow rate (100% flow rate) of the rear permeate water W4 and the concentrated water W5 as the first target flow rate value when the detected EC value is less than the specified EC value. .

  Further, the pressure feedback water pressure control of the EDI stack 16 by the second controller 32C is substantially the same as the pressure feedback water pressure control (see FIG. 4) of the EDI stack 16 by the second controller 32 of the first embodiment. Since there is, explanation is omitted.

  Next, a processing procedure in the case where the first target flow rate value is set in the first control unit 31C of the present embodiment will be described with reference to FIG. FIG. 12 is a flowchart illustrating a processing procedure when the first target flow rate value is set in the first control unit 31C of the fourth embodiment. The process of the flowchart shown in FIG. 12 is repeatedly executed every predetermined time (10 minutes) during operation of the pure water producing apparatus 1C.

In step ST401 shown in FIG. 12, the first control unit 31C determines whether the time count _{t 4} by ITU reaches 10min (minutes). In this step ST 401, the first controller 31C, when the timing _{t 4} by ITU is determined to have reached the 10min (YES), the process proceeds to step ST 402. Further, in step ST 401, the first controller 31C, when the timing _{t 4} by ITU is determined not reached 10min (NO), the process returns to the step ST 401.

Incidentally, the timing _t 4 (10min) in step ST401, after changing the first target flow rate value, the quality of the subsequent stage permeate W4 is counted as the time required to stabilize (wait time).

  In step ST402 (step ST401: YES), the first control unit 31C uses the detected EC value of the subsequent-stage permeated water W4 detected by the third conductivity sensor EC3 and the specified EC value stored in the memory of the microprocessor. get.

  In Step ST403, the first control unit 31C determines whether or not the detected EC value ≧ the specified EC value. In step ST403, when the first control unit 31C determines that the detected EC value ≧ the specified EC value (YES), the process proceeds to step ST404. In Step ST403, when the first control unit 31C determines that the detected EC value <the specified EC value (NO), the process proceeds to Step ST405.

  In step ST404 (step ST403: YES), the first control unit 31C sets an excess of the total flow rate of the post-stage permeate water W4 and the concentrated water W5 as the first target flow rate value. Here, the first target flow rate value set by the first control unit 31C is stored in the memory of the microprocessor. When the first target flow value is set in step ST404, the process of this flowchart ends (returns to step ST401).

  In step ST403, when the detected EC value ≧ the specified EC value, the water quality of the latter-stage permeate water W4 is not good. Therefore, in order to improve the water quality, the total flow rate of the latter-stage permeate water W4 and the concentrated water W5 is exceeded. Is set as the first target flow rate value. Thereby, the operating pressure of the front | former stage RO membrane module 10 will be raised, and the salt removal rate in the said module will improve. As a result, the upstream RO membrane module 14 is supplied with the upstream permeated water W2 with improved water quality, and thus the water quality of the downstream RO water W4 can be improved. In addition, in the front stage RO permeate line L22, the front stage permeate water W2 in excess of the total flow rate of the rear stage permeate water W4 and the concentrated water W5 is sent to the supply water tank 21 via the permeate recirculation line L25.

  On the other hand, in step ST405 (step ST403: NO), the first control unit 31C sets the total flow rate (100% flow rate) of the rear permeate water W4 and the concentrated water W5 as the first target flow rate value. When the first target flow value is set in step ST405, the process of this flowchart ends (returns to step ST401).

  In step ST404, if the detected EC value <the specified EC value, the water quality of the downstream permeated water W4 is in a good state, so the total flow rate of the downstream permeated water W4 and the concentrated water W5 is the first target flow rate value. Is set. Thereby, in the 1st pump 8, it can suppress that power consumption increases more than necessary.

In addition, in the flow rate feedback water amount control (see FIG. 3) for the upstream RO membrane module 10, the first control unit 31C uses the first target flow rate value set in step ST404 or ST405 in FIG. 12 as the target flow rate value Q _p. '(Step ST101 in FIG. 3).

  Also in the pure water manufacturing apparatus 1C of the fourth embodiment described above, the same effects as the pure water manufacturing apparatus 1 of the first embodiment are exhibited. That is, in the pure water manufacturing apparatus 1C of the fourth embodiment, the second control unit 32C moves from the desalination chamber 161 and the desalination chamber 161 of the EDI stack 16 to the demand point according to the detected water temperature value of the rear-stage permeated water W4. The target pressure value of the third pump 19 is set so as to be a pressure value corresponding to the pressure loss generated in this line. According to this, in the pure water producing apparatus 1C, the target pressure value of the third pump 19 is set lower as the detected temperature value of the rear-stage permeated water W4 becomes higher, and thus the power consumption of the third pump 19 is suppressed. be able to. Further, since the target pressure value set at that time is a pressure value corresponding to a pressure loss occurring at least in the line from the desalination chamber 161 and the desalination chamber 161 to the demand point of the EDI stack 16, the desalted water W6. Can be reliably sent to the demand point. Further, in the pure water producing apparatus 1C, the lower the detected temperature value of the rear-stage permeated water W4, the higher the target flow rate value of the third pump 19 is set to a higher target pressure value. Even if the pressure loss increases, the desalted water W6 can be reliably delivered to the demand point.

  Moreover, in the pure water manufacturing apparatus 1C of the fourth embodiment, the first control unit 31C sets the excess of the total flow rate of the rear-stage permeate water W4 and the concentrated water W5 as the first target flow rate value. Therefore, it is possible to improve the water quality of the post-stage permeated water W4 manufactured in the post-stage RO membrane module 14.

  In addition, when the detected EC value ≧ the specified EC value, the first control unit 31C sets the excess of the total flow rate of the rear-stage permeate water W4 and the concentrated water W5 as the first target flow rate value. Therefore, the pure water manufacturing apparatus 1C can improve the water quality of the post-stage permeated water W4 manufactured in the post-stage RO membrane module 14 more reliably when the quality of the post-stage permeate water W4 is not good.

  In addition, when the detected EC value <the specified EC value, the first control unit 31C sets the total flow rate (100% flow rate) of the subsequent-stage permeated water W4 and the concentrated water W5 as the first target flow rate value. Therefore, in the pure water manufacturing apparatus 1C, when the water quality of the latter-stage permeated water W4 is good, it is possible to suppress the power consumption of the first pump 8 from increasing more than necessary.

  The preferred embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and can be implemented in various forms.

  In the first to fourth embodiments, the example in which the driving frequency of each pump is calculated by the speed digital PID algorithm has been described as the feedback control algorithm. Not limited to this, the drive frequency of each pump may be calculated by a position type digital PID algorithm. Further, the feedback control algorithm is not limited to the PID algorithm, and the drive frequency may be calculated by a P algorithm or a PI algorithm.

  In 1st-4th embodiment, in the 2nd control part (32, 32A-32C), according to the detected water temperature value of the permeated water W2 measured by 2nd temperature sensor TE2, the desalination chamber 161 of the EDI stack 16 And the second pump 17 (first embodiment) or the third pump 19 (second to fourth embodiments) so that the pressure value corresponds to the pressure loss generated in the line from the desalting chamber 161 to the demand point. An example of setting the target pressure value has been described. Not limited to this, the second pump 17 (first embodiment) according to the detected water temperature value measured by the first temperature sensor TE1, the third temperature sensor TE3, the fourth temperature sensor TE4, the fifth temperature sensor TE5, and the like. Or it is good also as a structure which sets the target pressure value of the 3rd pump 19 (2nd-4th embodiment). That is, as long as the water temperature value is measured in the apparatus, the water to be detected and the detection position are not limited to the example of the embodiment.

  In the third embodiment, the example in which the third electrical conductivity sensor EC3 for measuring the electrical conductivity of the subsequent-stage permeated water W4 is used as the water quality detection means has been described. Not only this but the concentration sensor of various dissolved substances other than a silica concentration sensor and a hardness sensor is good also as a water quality detection means. Further, the detection target of the water quality is not limited to the downstream permeated water W4 but may be the upstream permeated water W2 or the concentrated water W3 (W5).

  In 1st-4th embodiment, the example which outputs a current value signal as a command signal to a corresponding inverter from the 1st control part (31, 31A-31C) and the 2nd control part (32, 32A-32C), respectively. Explained. Not only this but a voltage value signal (for example, 0-10V) may be outputted as a command signal to an inverter.

In the first to fourth embodiments, the time measured by the ITU (t, t _{1 to} t ₄ ) is not limited to the example of this embodiment and can be set as appropriate. Further, the specified value (1 μS / cm) in step ST305 in FIG. 9 and the amount of decrease (5%) in the first target flow rate value in step ST306 in FIG. 9 are not limited to the example of this embodiment. It can be changed as appropriate.

  In the first to fourth embodiments, the example in which the third optional device OP3 including the decarboxylation unit 15 is provided in the previous stage of the EDI stack 16 has been described. However, the present invention is not limited to this, and the pure water production apparatuses 1, 1 </ b> A to 1 </ b> C may be configured such that the third option device OP <b> 3 is not provided in the previous stage of the EDI stack 16.

  Moreover, in 1st-4th embodiment, it is good also considering the water which pre-processed raw | natural water W11 with the iron removal manganese removal apparatus, the sand filtration apparatus, the microfiltration membrane apparatus, the ultrafiltration membrane apparatus etc. as the supply water W1. Moreover, as raw | natural water W11, groundwater, a tap water, etc. can be used, for example.

1,1A, 1B, 1C Pure water production equipment 5,8 First pump 6,9 First inverter 7 RO membrane module (reverse osmosis membrane module)
10 Pre-stage RO membrane module (first reverse osmosis membrane module)
11 Intermediate tank 12, 17 Second pump 13, 18 Second inverter 14 Subsequent RO membrane module (second reverse osmosis membrane module)
15 Decarboxylation unit 16 EDI stack (Electrodeionization stack)
19 3rd pump 20 3rd inverter 21 Supply water tank FM1 1st flow sensor (1st flow detection means)
FM3 third flow rate sensor (second flow rate detection means)
TE2 Second temperature sensor (temperature detection means)
PS6 6th pressure sensor (pressure detection means)
EC3 Third electrical conductivity sensor (water quality detection means)
30, 30A, 30B, 30C Control unit 31, 31A, 31B, 31C First control unit 32, 32A Second control unit 32B, 32C Second control unit and third control unit L1 Supply water line L22 Pre-stage RO permeate water line ( First permeate line)
L23 Rear RO permeate line (second permeate line)
L24 Supply water auxiliary line L25 Permeate recirculation line W1 Supply water W2 Permeate, pre-stage permeate (first permeate)
W4 Rear permeate (second permeate)
W3, W5, W7 Concentrated water W6 Demineralized water

Claims (9)

A reverse osmosis membrane module for separating supply water into permeate and first concentrated water;
A feed water line capable of delivering feed water to the reverse osmosis membrane module;
A first pump that is driven at a rotational speed according to the input driving frequency and discharges the supplied water toward the reverse osmosis membrane module;
A first inverter that outputs a first drive frequency corresponding to an input command signal to the first pump;
An electrodeionization stack for producing desalted water and second concentrated water by desalting the permeated water;
A permeate line capable of delivering permeate separated by the reverse osmosis membrane module to the electrodeionization stack;
A second pump that is driven at a rotational speed corresponding to the input driving frequency and discharges permeate toward the electrodeionization stack;
A second inverter that outputs a second drive frequency corresponding to the input command signal to the second pump;
Flow rate detection means for detecting the flow rate of the permeated water,
Temperature detecting means for detecting the temperature of water flowing through the apparatus;
Pressure detecting means for detecting the pressure of the permeated water on the outlet side of the second pump;
A command corresponding to the calculated value of the first drive frequency is calculated by calculating the first drive frequency of the first pump by a feedback control algorithm so that the detected flow rate value of the flow rate detection means becomes a preset target flow rate value. A first control unit for outputting a signal to the first inverter;
In accordance with the detected temperature value of the temperature detection means, the target pressure value is set so as to be at least a pressure value corresponding to a pressure loss generated in the deionization chamber of the electrodeionization stack and thereafter, and the target pressure The second drive frequency of the second pump is calculated by a feedback control algorithm so that the deviation between the value and the detected pressure value of the pressure detection means becomes zero, and a command signal corresponding to the calculated value of the second drive frequency A second control unit that outputs to the second inverter;
A pure water production apparatus comprising: A supply water tank for storing supply water;
A first reverse osmosis membrane module that separates supply water into first permeate and first concentrated water;
A supply water line capable of sending the supply water stored in the supply water tank to the first reverse osmosis membrane module;
A first pump that is driven at a rotational speed corresponding to the input first driving frequency and discharges the supplied water toward the first reverse osmosis membrane module;
A first inverter that outputs a first drive frequency corresponding to an input command signal to the first pump;
A second reverse osmosis membrane module for separating the first permeate into the second permeate and the second concentrated water;
A first permeate line capable of delivering the first permeate separated by the first reverse osmosis membrane module to the second reverse osmosis membrane module;
A feed water auxiliary line capable of sending a part of the feed water stored in the feed water tank to the first permeate water line;
A second pump that is driven at a rotational speed according to the input second driving frequency and discharges the first permeated water toward the second reverse osmosis membrane module;
A second inverter that outputs a second drive frequency corresponding to the input command signal to the second pump;
An electrodeionization stack for producing desalted water and third concentrated water by desalting the second permeated water;
A second permeate line capable of delivering the second permeate separated by the second reverse osmosis membrane module to the electrodeionization stack;
A third pump driven at a rotational speed corresponding to the input third driving frequency and discharging the second permeated water toward the electrodeionization stack;
A third inverter that outputs a third drive frequency corresponding to the input command signal to the third pump;
Water quality detecting means for detecting the quality of the first permeated water or the second permeated water;
First flow rate detection means for detecting the flow rate of the first permeate,
Second flow rate detection means for detecting the flow rate of the second permeated water;
Temperature detecting means for detecting the temperature of water flowing through the apparatus;
Pressure detecting means for detecting the pressure of the second permeated water on the outlet side of the third pump;
The first drive frequency of the first pump is calculated by a feedback control algorithm so that the first detected flow rate value of the first flow rate detection means becomes a preset first target flow rate value, and the first drive frequency When the command signal corresponding to the calculated value is output to the first inverter, and the difference between the detected water quality value of the water quality detecting means and the preset reference water quality value exceeds a preset specified value, A first control unit for decreasing the first target flow rate value;
The second drive frequency of the second pump is calculated by a feedback control algorithm so that the second detected flow rate value of the second flow rate detection means becomes a preset second target flow rate value, and the second drive frequency of the second drive frequency is calculated. A second control unit that outputs a command signal corresponding to the calculated value to the second inverter;
The pressure corresponding to the pressure loss generated at least in the demineralization chamber of the electrodeionization stack and thereafter as the pressure of the second permeated water discharged from the third pump according to the detected temperature value of the temperature detecting means. The target pressure value is set to be a value, and the third drive frequency of the third pump is set by a feedback control algorithm so that the deviation between the target pressure value and the detected pressure value of the pressure detecting means becomes zero. A third control unit that calculates and outputs a command signal corresponding to the calculated value of the third drive frequency to the third inverter;
With
When the first control unit decreases the first target flow rate value, the shortage of the first permeate supplied to the second pump through the first permeate line is from the supply water tank. Supplied to the first permeate line via the feed water auxiliary line;
Pure water production equipment. In the first control unit, when the first target flow rate value is not decreased, the first permeate is sent to the first permeate line mainly by the discharge force of the first pump, and the first target flow rate When the value is decreased, the first permeate is sent to the first permeate line mainly by the discharge force of the first pump, and the supply water auxiliary line is turned by the suction force of the second pump. Supply water is sent to the first permeate line through
The pure water manufacturing apparatus according to claim 2. The first control unit is configured to preset the first target flow rate value when a difference between a detected water quality value of the water quality detection means and a preset reference water quality value exceeds a preset specified value. Decrease at a certain rate,
The pure water manufacturing apparatus according to claim 2 or 3. A supply water tank for storing supply water;
A first reverse osmosis membrane module that separates supply water into first permeate and first concentrated water;
A supply water line capable of sending the supply water stored in the supply water tank to the first reverse osmosis membrane module;
A first pump that is driven at a rotational speed corresponding to the input first driving frequency and discharges the supplied water toward the first reverse osmosis membrane module;
A first inverter that outputs a first drive frequency corresponding to an input command signal to the first pump;
A second reverse osmosis membrane module for separating the first permeate into the second permeate and the second concentrated water;
A first permeate line capable of delivering the first permeate separated by the first reverse osmosis membrane module to the second reverse osmosis membrane module;
A permeate recirculation line capable of sending a part of the first permeate separated by the first reverse osmosis membrane module to the feed water tank;
A second pump that is driven at a rotational speed according to the input second driving frequency and discharges the first permeated water toward the second reverse osmosis membrane module;
A second inverter that outputs a second drive frequency corresponding to the input command signal to the second pump;
An electrodeionization stack for producing desalted water and third concentrated water by desalting the second permeated water;
A second permeate line capable of delivering the second permeate separated by the second reverse osmosis membrane module to the electrodeionization stack;
A third pump driven at a rotational speed corresponding to the input third driving frequency and discharging the second permeated water toward the electrodeionization stack;
A third inverter that outputs a third drive frequency corresponding to the input command signal to the third pump;
First flow rate detection means for detecting the flow rate of the first permeate,
Second flow rate detection means for detecting the flow rate of the second permeated water;
Temperature detecting means for detecting the temperature of water flowing through the apparatus;
Pressure detecting means for detecting the pressure of the second permeated water on the outlet side of the second pump;
Feedback control is performed so that the total flow rate of the second permeated water and the second concentrated water is set as the first target flow rate value, and the first detected flow rate value of the first flow rate detection means becomes the first target flow rate value. A first control unit that calculates a first drive frequency of the first pump by an algorithm and outputs a command signal corresponding to a calculated value of the first drive frequency to the first inverter;
The second drive frequency of the second pump is calculated by a feedback control algorithm so that the second detected flow rate value of the second flow rate detection means becomes a preset second target flow rate value, and the second drive frequency of the second drive frequency is calculated. A second control unit that outputs a command signal corresponding to the calculated value to the second inverter;
The pressure corresponding to the pressure loss generated at least in the demineralization chamber of the electrodeionization stack and thereafter as the pressure of the second permeated water discharged from the third pump according to the detected temperature value of the temperature detecting means. The target pressure value is set to be a value, and the third drive frequency of the third pump is set by a feedback control algorithm so that the deviation between the target pressure value and the detected pressure value of the pressure detecting means becomes zero. A third control unit that calculates and outputs a command signal corresponding to the calculated value of the third drive frequency to the third inverter;
The amount of the first permeate exceeding the total flow rate of the second permeate and the second concentrated water is sent from the second permeate line to the supply water tank via the permeate return line.
Pure water production equipment. Water quality detecting means for detecting the quality of the first permeated water or the second permeated water,
The first control unit sets, as the first target flow rate value, a total flow excess of the second permeated water and the second concentrated water when the detected water quality value of the water quality detection means is equal to or higher than a preset specified water quality value. To
The pure water manufacturing apparatus according to claim 5. A first reverse osmosis membrane module that separates supply water into first permeate and first concentrated water;
A feed water line capable of delivering feed water to the first reverse osmosis membrane module;
A first pump that is driven at a rotational speed according to the input driving frequency and discharges the supplied water toward the first reverse osmosis membrane module;
A first inverter that outputs a first drive frequency corresponding to an input command signal to the first pump;
An intermediate tank for storing the first permeate,
A second reverse osmosis membrane module for separating the first permeate into the second permeate and the second concentrated water;
A first permeate line capable of delivering the first permeate separated by the first reverse osmosis membrane module to the second reverse osmosis membrane module;
A second pump that is driven at a rotational speed according to the input second driving frequency and discharges the first permeated water toward the second reverse osmosis membrane module;
A second inverter that outputs a second drive frequency corresponding to the input command signal to the second pump;
An electrodeionization stack for producing desalted water and third concentrated water by desalting the second permeated water;
A second permeate line capable of delivering the second permeate separated by the second reverse osmosis membrane module to the electrodeionization stack;
A third pump that is driven at a rotational speed corresponding to the input driving frequency and discharges the second permeated water toward the electrodeionization stack;
A third inverter that outputs a third drive frequency corresponding to the input command signal to the third pump;
First flow rate detection means for detecting the flow rate of the first permeate,
Second flow rate detection means for detecting the flow rate of the second permeated water;
Temperature detecting means for detecting the temperature of water flowing through the apparatus;
Pressure detecting means for detecting the pressure of the second permeated water on the outlet side of the third pump;
The first drive frequency of the first pump is calculated by a feedback control algorithm so that the first detected flow rate value of the first flow rate detection means becomes a preset first target flow rate value, and the first drive frequency A first control unit that outputs a command signal corresponding to a calculated value to the first inverter;
The second drive frequency of the second pump is calculated by a feedback control algorithm so that the second detected flow rate value of the second flow rate detection means becomes a preset second target flow rate value, and the second drive frequency of the second drive frequency is calculated. A second control unit that outputs a command signal corresponding to the calculated value to the second inverter;
The pressure corresponding to the pressure loss generated at least in the demineralization chamber of the electrodeionization stack and thereafter as the pressure of the second permeated water discharged from the third pump according to the detected temperature value of the temperature detecting means. The target pressure value is set to be a value, and the third drive frequency of the third pump is set by a feedback control algorithm so that the deviation between the target pressure value and the detected pressure value of the pressure detecting means becomes zero. A third control unit that calculates and outputs a command signal corresponding to the calculated value of the third drive frequency to the third inverter;
A pure water production apparatus comprising: A decarboxylation unit that decarboxylates the permeate to produce permeate as decarbonated water,
The pure water manufacturing apparatus according to claim 1. A decarboxylation unit that decarboxylates the second permeate to produce a second permeate as decarbonated water,
The pure water manufacturing apparatus as described in any one of Claims 2-7.

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