JP6110439B2 - 走査型透過荷電粒子顕微鏡の校正方法 - Google Patents

走査型透過荷電粒子顕微鏡の校正方法 Download PDF

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Publication number
JP6110439B2
JP6110439B2 JP2015137413A JP2015137413A JP6110439B2 JP 6110439 B2 JP6110439 B2 JP 6110439B2 JP 2015137413 A JP2015137413 A JP 2015137413A JP 2015137413 A JP2015137413 A JP 2015137413A JP 6110439 B2 JP6110439 B2 JP 6110439B2
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Prior art keywords
sample
scanning
detector
calibration
scanning mode
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JP2015137413A
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Japanese (ja)
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JP2016017966A (ja
JP2016017966A5 (https=
Inventor
セオドア オッテン マクシムス
セオドア オッテン マクシムス
アドリアナ マリア クック アビハエル
アドリアナ マリア クック アビハエル
フェルヘイエン マーティン
フェルヘイエン マーティン
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FEI Co
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FEI Co
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2802—Transmission microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2813—Scanning microscopes characterised by the application
    • H01J2237/2817—Pattern inspection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/282—Determination of microscope properties
    • H01J2237/2826—Calibration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP2015137413A 2014-07-10 2015-07-09 走査型透過荷電粒子顕微鏡の校正方法 Active JP6110439B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP14176529.7 2014-07-10
EP14176529.7A EP2966668B1 (en) 2014-07-10 2014-07-10 Method of calibrating a scanning transmission charged-particle microscope

Publications (3)

Publication Number Publication Date
JP2016017966A JP2016017966A (ja) 2016-02-01
JP2016017966A5 JP2016017966A5 (https=) 2016-12-08
JP6110439B2 true JP6110439B2 (ja) 2017-04-05

Family

ID=51162576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015137413A Active JP6110439B2 (ja) 2014-07-10 2015-07-09 走査型透過荷電粒子顕微鏡の校正方法

Country Status (4)

Country Link
US (1) US9396907B2 (https=)
EP (1) EP2966668B1 (https=)
JP (1) JP6110439B2 (https=)
CN (1) CN105261544B (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201715902D0 (en) * 2017-09-29 2017-11-15 Oxford Instr Plc Improved system for electron diffraction analysis
EP3531439B1 (en) * 2018-02-22 2020-06-24 FEI Company Intelligent pre-scan in scanning transmission charged particle microscopy
KR102540084B1 (ko) * 2018-03-20 2023-06-05 테스칸 템페, 엘엘씨 세차 전자 회절 데이터 매핑을 위한 주사형 투과 전자 현미경 자동 정렬 방법
EP4103994A2 (en) 2020-02-12 2022-12-21 Samantree Medical SA Systems and methods for imaging samples with reduced sample motion artifacts
US11263510B2 (en) * 2020-07-15 2022-03-01 GM Global Technology Operations LLC Method for performing measurements of dendritic structures for all magnifications and camera resolutions of microscopes
WO2023012241A1 (en) * 2021-08-04 2023-02-09 Samantree Medical Sa Systems and methods for providing live sample monitoring information with parallel imaging systems
EP4202974A1 (en) * 2021-12-22 2023-06-28 FEI Company Transmission charged particle beam apparatus, and method of aligning such a transmission charged particle beam apparatus
EP4708350A3 (en) 2022-09-30 2026-03-18 Fei Company A method of automated data acquisition for a transmission electron microscope

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6807314B1 (en) * 1999-07-02 2004-10-19 General Phosphorix, Llc Method of precision calibration of a microscope and the like
JP4434446B2 (ja) * 2000-07-21 2010-03-17 Ｏｋｉセミコンダクタ株式会社 走査型電子顕微鏡の校正方法
US6770867B2 (en) 2001-06-29 2004-08-03 Fei Company Method and apparatus for scanned instrument calibration
EP1451848B1 (en) 2001-07-13 2009-12-02 Nanofactory Instruments AB Device and method for reducing the impact of distortions in a microscope
US7164128B2 (en) * 2003-11-25 2007-01-16 Hitachi High-Technologies Corporation Method and apparatus for observing a specimen
JP4587742B2 (ja) * 2004-08-23 2010-11-24 株式会社日立ハイテクノロジーズ 荷電粒子線顕微方法及び荷電粒子線応用装置
CN101461026B (zh) * 2006-06-07 2012-01-18 Fei公司 与包含真空室的装置一起使用的滑动轴承
JP4801518B2 (ja) * 2006-07-07 2011-10-26 株式会社日立ハイテクノロジーズ 荷電粒子線顕微方法および荷電粒子線装置
JP5151277B2 (ja) * 2007-07-04 2013-02-27 富士通株式会社 試料観察装置とその補正方法
EP2166557A1 (en) 2008-09-22 2010-03-24 FEI Company Method for correcting distortions in a particle-optical apparatus
EP2197018A1 (en) 2008-12-12 2010-06-16 FEI Company Method for determining distortions in a particle-optical apparatus
EP2511936B1 (en) 2011-04-13 2013-10-02 Fei Company Distortion free stigmation of a TEM
EP2584584A1 (en) * 2011-10-19 2013-04-24 FEI Company Method for adjusting a STEM equipped with an aberration corrector
US8598527B2 (en) * 2011-11-22 2013-12-03 Mochii, Inc. Scanning transmission electron microscopy
US9188555B2 (en) 2012-07-30 2015-11-17 Fei Company Automated EDS standards calibration

Also Published As

Publication number Publication date
JP2016017966A (ja) 2016-02-01
EP2966668B1 (en) 2016-10-12
US20160013016A1 (en) 2016-01-14
EP2966668A1 (en) 2016-01-13
US9396907B2 (en) 2016-07-19
CN105261544B (zh) 2017-08-18
CN105261544A (zh) 2016-01-20

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