JP6106413B2 - Reflective mask blank and method of manufacturing reflective mask - Google Patents

Description

  The present invention relates to a reflective mask blank for EUV lithography used for manufacturing a semiconductor device and a method for manufacturing the reflective mask.

  In recent years, in the semiconductor industry, with the miniaturization of semiconductor devices, EUV lithography which is an exposure technique using extreme ultraviolet (Extreme Ultra Violet: hereinafter referred to as EUV) light is promising. Here, EUV light refers to light in the wavelength band of the soft X-ray region or the vacuum ultraviolet region, specifically, light having a wavelength of about 0.2 to 100 nm. As a mask used in this EUV lithography, for example, a reflective mask for exposure described in Patent Document 1 has been proposed.

  The reflective mask described in Patent Document 1 is such that a multilayer reflective film that reflects exposure light is formed on a substrate, and an absorber film that absorbs exposure light is formed in a pattern on the multilayer reflective film. . Light incident on the reflective mask mounted on the exposure machine (pattern transfer device) is absorbed in a part where the absorber film is present, and light reflected by the multilayer reflective film is transmitted through the reflective optical system in a part where the absorber film is not present. Transferred onto a semiconductor substrate.

  Patent Document 2 describes a phase defect correction method for a reflective mask for EUV exposure. Specifically, Patent Document 2 describes that an alignment mark (reference mark) is formed on one of the constituent thin films of the EUV mask blank, and the mark is detected using reflected light or transmitted light. Yes. A specific example in Patent Document 2 describes a technique in which a hard mask for wiring formation is formed on the upper surface of an absorber layer, and a reference mark is formed using the hard mask.

  Patent Document 3 discloses a reflective mask blank substrate for EUV lithography, wherein at least three marks satisfying a predetermined condition are formed on a film forming surface of the substrate. A mask blank substrate is described. The predetermined condition is that (1) the size of the mark is 30 to 100 nm in sphere equivalent diameter, and (2) the three marks are not placed on the same virtual straight line on the film formation surface. Patent Document 3 describes that a predetermined mark is formed by a lithography process.

Japanese Patent Publication No. 7-27198 JP 2011-249512 A International Publication No. 2008/129914 Pamphlet

  In recent years, the required level of pattern position accuracy for a transfer mask such as a reflective mask has become particularly strict. Particularly, in the case of a reflective mask for EUV lithography (also simply referred to as “reflective mask”), it is used for the purpose of forming a very fine pattern as compared with the prior art, and therefore the required level of pattern position accuracy is further increased. Strict. In order to achieve high pattern position accuracy, defects allowed in a reflective mask blank for EUV lithography (also simply referred to as “reflective mask blank”), which is an original for producing a reflective mask, become even more severe. ing. For example, in the case of a reflective mask blank, in the case of a lithography technique for producing a semiconductor device having a half pitch of 32 nm or less, it is required that there is no defect having a sphere equivalent diameter of about 30 nm or more. .

  However, it is extremely difficult to manufacture a reflective mask blank that has no sphere equivalent diameter of 30 nm. Accordingly, a method for correcting a defect of the reflective mask blank has been proposed. As a defect correcting method, a method of locally irradiating a laser beam or an electron beam has been proposed. It has also been proposed to detect the position of the defect and place the defect at a position where the absorber film pattern does not exist when the reflective mask is manufactured.

  In order to correct the defect of the reflective mask blank, it is necessary to accurately grasp the position of the defect. Therefore, in order to measure the defect position, a reference mark serving as a reference for the defect position may be arranged on the reflective mask blank or the substrate with a multilayer reflective film for manufacturing the reflective mask blank. Specific examples of the reference marks are shown in FIGS. 6 (a) and 6 (b). For example, the reference mark shown in FIG. 6A is arranged on the outside of the fine mark 82 having a size of several μm × several μm (for example, 5 μm × 5 μm), and detects the position of the fine mark 82. Auxiliary mark 84 (size is several μm × several tens μm, for example, 1 μm × 200 μm).

  Examples of the method for forming the reference mark include a method using an energy beam such as a laser beam or a focused ion beam as described in Patent Document 3, physical drawing such as indentation, and a photolithography method. ing. However, it has been difficult to use a photolithography method as a method of forming the reference mark. The reason for this difficulty is that the reference mark is formed on the peripheral edge of the substrate outside the pattern area of the substrate.

  When a resist solution is applied onto a substrate by a spin coating method, the film thickness of the resist layer tends to be thick at the peripheral edge of the substrate outside the pattern region, and bubbles and foreign substances are easily collected. Further, bubbles and foreign substances are easily collected at the peripheral edge of the substrate by spin rotation. Further, even if the reference mark is formed on the peripheral portion of the substrate by the photolithography method, the outline of the reference mark is not easily linear.

  In particular, when a resist solution is applied to the surface of a ruthenium (Ru) protective film and a multilayer reflective film in which Mo and Si are alternately laminated, the surface energy (surface to be applied) on which the resist solution is applied has a low surface energy. The wettability to the coated surface is poor, and the coated surface tends to repel the coated resist solution. When the wettability of the coated surface with respect to the resist solution is poor, the resist solution starts to dry before wetting the coated surface, and a bubble-like space may be formed between the coated surface and the resist layer. . Such a space becomes a fine defect of, for example, 10 nm or less.

  In addition, the standard mark is required to have a high level of dimensional accuracy. In the case where the reference mark has a cross shape as shown in FIG. 6B, for example, the points determined as the intersections are obtained by measuring the line widths of the vertical lines at a plurality of locations and connecting the midpoints of the line widths. It is determined from the intersection of the center line and the center line obtained by measuring the line width of the horizontal line at a plurality of locations and connecting the midpoints of the line width. For example, if a fine defect due to poor wettability of the coated surface occurs at the measurement point of the line width, the outline of the line becomes rough and the line width cannot be measured correctly, and the crossing position shifts. Occurs. Therefore, it has been very difficult to form the reference mark on the Ru protective film or the multilayer reflective film by using the photolithography method.

  Furthermore, even if the resist layer is for the purpose of forming a reference mark, there is a fact that it is not desirable that the pattern area has a defect. This is because, when a resist layer mark is developed and etched for the purpose of forming a reference mark, if there is a bubble-like defect in the pattern region, that portion is etched together with the mark. Become. That is, an accidental defect occurs in the pattern formation region.

  Therefore, the present invention relates to a reflective mask blank for EUV lithography used for manufacturing a semiconductor device and a manufacturing method of a reflective mask, in the case where a reference mark is formed using a photolithography method. An object of the present invention is to obtain a manufacturing method for forming a fiducial mark having a linear outline in which generation of defects is suppressed.

  This invention is the manufacturing method of the reflective mask blank characterized by being the following structures 1-11, and the manufacturing method of the reflective mask characterized by the following structure 12.

(Configuration 1)
Configuration 1 of the present invention is a method of manufacturing a reflective mask blank having a reflective thin film on a main surface of a mask blank substrate, wherein the reflective thin film alternately has a high refractive index layer and a low refractive index layer. In order to form a resist layer on the upper surface of the reflective thin film, the manufacturing method of the reflective mask blank includes at least a multilayer reflective film laminated, and the step of preparing the mask blank substrate having the reflective thin film A reference mark serving as a reference for a defect position in the defect information of the reflective mask blank is formed by removing at least a part of the multilayer reflective film by a resist layer forming step and a lithography process using the resist layer. A drip process in which the resist layer forming process drops and supplies a resist solution onto the upper surface of the reflective thin film. A step of uniformly spreading the dropped resist solution, and the step of dropping comprises rotating the mask blank substrate stationary or rotating the mask blank substrate. A rotational acceleration step of accelerating the rotational speed of the mask blank substrate from the rotational speed that does not substantially move by the action of the first to the rotational speed, and the uniformizing step includes the rotational speed of the mask blank substrate. Is maintained at a second rotational speed that is a rotational speed lower than the first rotational speed, and the rotational speed of the mask blank substrate is set to a first rotational speed higher than the first rotational speed. And a high rotational speed stage maintained at a rotational speed of 3.

  In the reflective mask blank manufacturing method according to Configuration 1 of the present invention, in the reflective mask blank for EUV lithography and the reflective mask manufacturing method used for manufacturing a semiconductor device or the like, a reference mark is formed using a photolithography method. In the formation, it is possible to suppress the occurrence of defects in the pattern formation region and form a reference mark having a linear outline.

(Configuration 2)
Configuration 2 of the present invention is the method for manufacturing a reflective mask blank according to Configuration 1, wherein the upper surface of the reflective thin film is the upper surface of the multilayer reflective film. Since the upper surface of the reflective thin film is the upper surface of the multilayer reflective film, the contrast of the formed reference mark can be increased.

(Configuration 3)
Configuration 3 of the present invention is characterized in that the reflective thin film includes a protective film formed on an upper surface of the multilayer reflective film, and the upper surface of the reflective thin film is an upper surface of the protective film. 1 is a method for producing a reflective mask blank according to 1. When the reflective thin film includes a protective film formed on the upper surface of the multilayer reflective film, damage to the multilayer reflective film can be prevented by the protective film during the reference mark forming step.

(Configuration 4)
According to Structure 4 of the present invention, the acceleration when the rotational speed of the mask blank substrate is accelerated in the rotational acceleration stage is a substantially constant rotational acceleration of 150 to 1500 rpm / second. It is a manufacturing method of the reflective mask blank of any one of -3. By accelerating the rotational speed of the mask blank substrate in the rotational acceleration stage within a predetermined range, it is possible to ensure that the surface to be coated is uniformly wetted with the resist solution.

(Configuration 5)
The structure 5 of the present invention is characterized in that the dropping step further includes a rotation speed maintaining step of maintaining the rotation speed of the mask blank substrate at the first rotation speed after the rotation acceleration step. It is a manufacturing method of the reflective mask blank of any one of 1-4. By further including a rotation speed maintaining step, the dropping process can ensure that the resist solution at the edge of the liquid film gradually spreads outward (periphery of the substrate), and the surface to be coated is coated with the resist solution. It can be in a more uniformly wet state.

(Configuration 6)
According to Configuration 6 of the present invention, in any one of Configurations 1 to 5, the square of the second rotation speed is ½ or less of the square of the first rotation speed. It is a manufacturing method of the reflective mask blank of description. By reducing the rotation speed of the substrate from the first rotation speed to the second rotation speed within a predetermined range, the centrifugal force applied to the peripheral portion of the coated surface becomes 50% or less. Therefore, the resist solution concentrated on the peripheral edge of the substrate can effectively return toward the center of rotation by the action of inertia.

(Configuration 7)
Configuration 7 of the present invention is a dropping in which the rotation speed of the mask blank substrate is maintained at the first rotation speed in a state where the dropping of the resist solution is stopped between the dropping process and the homogenizing process. It is a manufacturing method of the reflective mask blank of any one of the structures 1-6 characterized by further including a stop process. By further including a dropping stop step between the dropping step and the homogenizing step, the resist solution 126 at the edge of the liquid film can be more gradually spread outward (substrate peripheral portion). In addition, the coated surface can be evenly wetted by the resist solution 126.

(Configuration 8)
According to Structure 8 of the present invention, the upper surface of the reflective thin film is a surface of a layer containing at least one element selected from Mo, Nb, Ru, or Si formed by sputtering. These are the manufacturing methods of the reflective mask blank of any one of the structures 1-7. When the upper surface of the reflective thin film is the above-described predetermined layer, a reflective thin film having excellent reflectance can be obtained. In particular, in order to increase the reflectance of the reflective thin film, it is preferable that the Mo-containing layer having a large refractive index be the uppermost layer.

(Configuration 9)
A ninth aspect of the present invention is the reflective mask blank manufacturing method according to any one of the first to eighth aspects, wherein the third rotation speed is 500 rpm or more. Since the homogenization step has a high rotation speed step, the resist solution on the surface to be coated can be shaken off, and foreign matters derived from other factors can be blown outward. As a result, defects due to foreign matters in the finally obtained mask blank are also suppressed.

(Configuration 10)
According to the tenth aspect of the present invention, on the main surface of the mask blank substrate, a film thickness gradient region in which the film thickness decreases from the inner side to the outer side of the mask blank substrate at the peripheral portion of the main surface is provided. 10. The method for manufacturing a reflective mask blank according to any one of configurations 1 to 9, wherein the multilayer reflective film is formed. By forming the reference mark in the thickness gradient region where the thickness of the multilayer reflective film is small, the formation time of the reference mark can be shortened. In addition, when drawing on the resist layer for forming the reference mark, drawing defects due to the rising of the peripheral portion are less likely to occur, so that the reference mark 80 having a linear outline can be formed.

(Configuration 11)
The structure 11 of the present invention includes an absorber film forming step of forming an absorber film on the upper surface of the reflective thin film. The reflective mask blank according to any one of the structures 1 to 10, It is a manufacturing method. By providing a predetermined absorber film on the multilayer reflective film of the substrate with the multilayer reflective film for EUV lithography, a reflective mask blank for EUV lithography can be obtained.

(Configuration 12)
The present invention is characterized in that the structure 12 of the present invention includes a patterning process for patterning the absorber film of the reflective mask blank manufactured by the method for manufacturing a reflective mask blank according to the structure 11. It is a manufacturing method of a reflective mask. By using the reflective mask of the present invention and exposing and transferring a transfer pattern onto a resist film on a semiconductor substrate, a semiconductor device having a highly accurate pattern can be manufactured.

  According to the present invention, in a reflective mask blank for EUV lithography and a reflective mask manufacturing method used for manufacturing a semiconductor device or the like, when a reference mark is formed using a photolithography method, a defect in a pattern formation region is detected. It is possible to obtain a manufacturing method for suppressing the occurrence and forming a reference mark having a linear outline.

The figure which shows the relationship between time of a dripping process (S21), a uniformization process (S22), etc., and the time change of the rotational speed of a board | substrate in the reference mark formation process (S2) of the manufacturing method of the reflective mask blank of this invention. It is. It is a flowchart which shows an example of the procedure of the manufacturing method of the reflective mask blank of this invention. In the manufacturing method of the reflective mask blank of this invention, it is a flowchart which shows an example of the procedure of a reference mark formation process (S2). It is a top view which shows the formation location of a reference mark in the board | substrate with a multilayer reflective film in which the resist layer was formed. It is the top view to which the reference mark part shown in FIG. 4 was expanded. It is a schematic diagram which illustrates the reference mark which can be used for this invention. It is a side cross-sectional schematic diagram which shows an example of a resist liquid coating device (rotary coating device). It is a cross-sectional schematic diagram which shows an example of a structure of a reflection type mask blank. It is a cross-sectional schematic diagram which shows an example of a structure of a reflective mask. It is a cross-sectional schematic diagram which shows an example of the process until it manufactures a reflective mask from a reflective mask blank. It is a schematic diagram which shows schematic structure of the pattern transfer apparatus carrying a reflective mask. It is a schematic diagram which shows the glass substrate which can be used for this invention. It is a schematic diagram of the reflective mask blank which can be manufactured with the manufacturing method of this invention, Comprising: It is a schematic diagram of the reflective mask blank which has three reference marks. It is an example of the cross-sectional schematic diagram of the peripheral part of the reflective mask blank which can be manufactured with the manufacturing method of this invention. It is explanatory drawing for demonstrating forming the multilayer reflective film which has a film thickness inclination area | region by the sputtering method which provided the shielding member. It is a conceptual diagram of the film-forming apparatus by a focused ion beam sputtering method.

  The present invention is a method of manufacturing a reflective mask blank 1 having a reflective thin film on a main surface 71 of a mask blank substrate (see FIGS. 12 and 13). FIG. 13 exemplifies a portion where the reflective mask blank reference mark 80 that can be manufactured by the manufacturing method of the present invention is formed. The manufacturing method of the reflective mask blank 1 for EUV lithography according to the present invention includes a reference mark formation for forming a reference mark 80 that serves as a reference for a defect position in defect information of the reflective mask blank 1 by a lithography process using a resist layer. Process. FIG. 7 illustrates a resist solution coating apparatus (rotary coating apparatus 120) that can be used in the manufacturing method of the present invention. In the lithography process of the fiducial mark forming step, the inventors of the present invention have a relatively large surface energy if the rotational speed of the substrate is accelerated at a predetermined rotational acceleration after the resist solution 126 is dropped when the resist layer is formed. It has been found that even if the surface to be coated is low, the entire surface to be coated can be wetted with the resist solution 126, so that defects due to fine bubbles are unlikely to occur. Based on this knowledge, according to the manufacturing method of the present invention, the generation of defects in the pattern formation region can be suppressed and the reference mark 80 having a linear outline can be formed on the reflective mask blank 1 for EUV lithography. As a result, the inventors have found out that the present invention can be achieved.

  Defect information on the surface of the multilayer reflective film-coated substrate 115 indicated by reference numeral 115 in FIGS. 8 and 14 is, for example, a laser light of 266 nm UV laser or 193 nm ArF excimer laser as the wavelength of the inspection light source on the surface of the multilayer reflective film 12. Examples include an inspection method for irradiating and detecting foreign matter from the reflected light, and an at-wavelength defect inspection method for detecting defects using EUV light having the same wavelength as that used for mask pattern exposure. In the defect inspection, by using the reference mark 80 formed on the surface of the multilayer reflective film-coated substrate 115, the positional information of the defect of the multilayer reflective film-coated substrate 115 can be accurately grasped and stored.

  When performing the above-described defect inspection, when forming the absorber film pattern 22 as shown in FIG. 9, the absorber pattern mask for defining the formation position of the absorber film pattern 22 and the above-described multilayer reflection The relative position with respect to the reflective mask blank 1 using the film-coated substrate 115 can be determined based on the stored defect position information. At this time, the absorber pattern mask can be positioned so that the absorber film pattern 22 covers the defects on the reflective mask blank 1. The absorber film pattern 22 can be formed on the reflective mask blank 1 based on the determined relative position. In the reflective mask 2 in which the absorber film pattern 22 is formed in this way, the defect is hidden under the absorber film pattern 22. Therefore, adverse effects due to defects can be prevented during exposure projection onto a semiconductor substrate using the reflective mask 2.

  FIG. 8 is a schematic sectional view of an example of the reflective mask blank 1 of the present invention, and FIG. 9 is a schematic sectional view of an example of the reflective mask 2 of the present invention. FIG. 10 is a schematic sectional view showing an example of a schematic process of the manufacturing method of the reflective mask 2 of the present invention. In the reflective mask blank 1 of the present invention, the multilayer reflective film 12 that reflects the EUV light 31 is formed on the glass substrate 11. In this specification, the substrate 115 with a multilayer reflective film for EUV lithography (also simply referred to as “substrate 115 with a multilayer reflective film”) refers to the multilayer reflective film 12 that reflects the EUV light 31 on the glass substrate 11. Is formed. Further, the substrate 115 with a multilayer reflective film for EUV lithography described in this specification includes a multilayer reflective film 12 that reflects the EUV light 31 on the glass substrate 11, and a protective film 13 (capping) on the multilayer reflective film 12. Layer) is also included. By forming the protective film 13, the multilayer reflective film 12 can be protected when the absorber film pattern 22 is formed. Further, the substrate 115 with a multilayer reflective film for EUV lithography described in this specification includes those in which a resist film 19 is formed on the multilayer reflective film 12 or the protective film 13. In addition, the substrate 115 with the multilayer reflective film for EUV lithography described in the present specification is further conductive on the main surface 71 opposite to the main surface 71 provided with the multilayer reflective film 12 of the glass substrate 11. A membrane 18 can be included.

  In this specification, a substrate that is a raw material for a mask blank is referred to as a “mask blank substrate”. Further, a substrate on which the multilayer reflective film 12 or the like for manufacturing the reflective mask blank, the substrate with the multilayer reflective film 115 and the substrate on which the other predetermined thin film is formed are collectively referred to simply as “substrate”. " Further, in the substrate 115 with a multilayer reflective film, the phrase “rotation or stationary of the mask blank substrate” means that the substrate 115 with the multilayer reflective film as a whole is rotated or stationary. The “reflective thin film” refers to a thin film including at least the multilayer reflective film 12 and optionally further including the protective film 13 and / or the absorber film 16.

  An example of the reflective mask blank 1 used in the manufacturing method of the reflective mask 2 of the present invention is configured as shown in FIG. That is, in the example of FIG. 8, the multilayer reflective film 12 that reflects exposure light in a short wavelength region including the EUV region, the absorber film pattern 22, and the multilayer when the absorber film pattern 22 is corrected are sequentially formed on the glass substrate 11. A protective film 13 that protects the reflective film 12 and an absorber film 16 that absorbs exposure light in a short wavelength region including the EUV region are included. In the example shown in FIG. 8, the absorber film 16 has a lower layer as the exposure light absorber layer 14 in a short wavelength region including the EUV region, and an upper layer as a low reflection with respect to the inspection light used for the inspection of the absorber film pattern 22. The layer 15 has a two-layer structure.

  Further, as shown in FIG. 9, the reflective mask 2 obtained by the present invention has a pattern of the absorber film 16 (that is, the low reflective layer 15 and the exposure light absorber layer 14) in the reflective mask blank 1 as described above. It is formed in a shape. In the reflective mask 2 including the absorber film 16 having the laminated structure as described above, the absorber film 16 on the mask surface includes a layer that absorbs exposure light and a layer that has a low reflectance with respect to the mask pattern inspection wavelength. Further, by separating the functions from each other and forming a laminated structure, a sufficient contrast at the time of mask pattern inspection can be obtained.

  The reflective mask 2 obtained by the present invention is a lithography that uses light in a short wavelength region including the region of the EUV light 31 in order to enable transfer of a finer pattern that exceeds the transfer limit by the conventional photolithography method. It can be used as a reflective mask 2 for EUV exposure light.

  As shown in FIG. 2, the reflective mask blank 1 manufacturing method of the present invention includes a substrate preparation step (S1) for preparing a mask blank substrate having a reflective thin film, and a reference mark forming step (S2) for forming a reference mark. ). The manufacturing method of the reflective mask blank 1 of the present invention can further include a protective film forming step (S3) and an absorber film forming step (S4).

  First, the board | substrate preparation process (S1) of the manufacturing method of the reflective mask blank 1 of this invention is demonstrated.

As the substrate 11 used for the substrate 115 with a multilayer reflective film for EUV lithography, good smoothness and flatness can be obtained, and therefore the glass substrate 11 can be preferably used. Specifically, as the material of the substrate 11, the synthetic quartz glass, and low thermal expansion of _SiO 2 -TiO ₂ type glass (2-way system having the characteristics _(SiO 2 -TiO ₂₎ and ternary _(SiO 2 -TiO ₂ -SnO ₂ etc.), for example, SiO ₂ -Al ₂ O ₃ -Li ₂ O-based crystallized glass, crystallized glass on which β-quartz solid solution is precipitated, and the like.

  The glass substrate 11 preferably has a smooth surface of 0.2 nmRms or less and a flatness of 100 nm or less in order to obtain high reflectance and high transfer accuracy. In the present invention, the unit Rms indicating smoothness is the root mean square roughness, and can be measured with an atomic force microscope. Further, the flatness in the present invention is a value indicating the surface warpage (deformation amount) indicated by TIR (total indicated reading). This is because when the plane determined by the least square method based on the surface of the glass substrate 11 is a focal plane, the highest position of the surface of the glass substrate 11 above the focal plane and the lowest position below the focal plane. The absolute value of the height difference at a low position. Smoothness is indicated by smoothness in a 10 μm square area, and flatness is indicated by flatness in a 142 mm square area.

  The “main surface 71” of the glass substrate 11 refers to the surface excluding the periphery of the glass substrate 11 and the vicinity thereof (side surface 72 and chamfered surface 73), as illustrated in FIG. That is, the “main surface 71” of the glass substrate 11 refers to a surface shown as two “main surfaces 71” facing each other in FIG.

  A reflective mask blank 1 manufactured by the manufacturing method of the present invention is a multilayer reflective film in which a reflective thin film formed on a main surface 71 of a substrate 11 is formed by alternately stacking a high refractive index layer and a low refractive index layer. 12 is included. In the manufacturing method of the reflective mask blank 1 of the present invention, the upper surface of the reflective thin film is preferably the upper surface of the multilayer reflective film 12.

  The multilayer reflective film 12 formed on the main surface 71 of the glass substrate 11 is made of a material that reflects exposure light in a short wavelength region including the EUV region. The multilayer reflective film 12 is particularly preferably made of a material having a very high reflectance with respect to light in a short wavelength region such as the EUV light 31 because the contrast when used as the reflective mask 2 can be enhanced. The multilayer reflective film 12 having a structure in which a high refractive index layer and a low refractive index layer are alternately laminated has an extremely high reflectance with respect to light in a short wavelength region such as the EUV light 31, and is used when the reflective mask 2 is used. Since the contrast can be increased, it can be suitably used as the multilayer reflective film 12.

  In the manufacturing method of the reflective mask blank 1 of the present invention, the upper surface of the reflective thin film is the surface of a layer containing at least one element selected from Mo, Nb, Ru, or Si formed by sputtering. It is preferable. When the upper surface of the reflective thin film is the above-described predetermined layer, a reflective thin film having excellent reflectance can be obtained. In particular, in order to increase the reflectance of the reflective thin film, it is preferable that the Mo-containing layer having a large refractive index be the uppermost layer.

  It is preferable to use at least one material selected from the group consisting of Mo, Nb, Ru and Rh as the material of the high refractive index layer constituting the multilayer reflective film 12. Moreover, it is preferable to use at least one material selected from the group consisting of Si and Si compounds as the material of the low refractive index layer constituting the multilayer reflective film 12. In the manufacturing method of the present invention, it is preferable that the high refractive index layer of the multilayer reflective film 12 is molybdenum (Mo) and the low refractive index layer is silicon (Si). A periodic laminated film in which thin films of silicon (Si) and molybdenum (Mo) are alternately laminated can be suitably used as the multilayer reflective film 12 for EUV light 31 that is a soft X-ray region of about 12 to 14 nm. Usually, a thin film (thickness of about several nm) of a high refractive index layer and a low refractive index layer is laminated by repeating 30 to 60 cycles, preferably 40 cycles (number of layers) to form the multilayer reflective film 12. As an example of a method for producing a periodic laminated film, an ion beam sputtering method is used to form a Si layer using a Si target, and then a Mo layer is formed using a Mo target. The multilayer reflective film 12 can be obtained by laminating 60 periods, preferably 40 periods.

  Examples of other multilayer reflective films 12 used in the EUV light 31 region include Ru / Si periodic multilayer reflective films, Mo / Be periodic multilayer reflective films, Mo compound / Si compound periodic multilayer reflective films, and Si / Nb periods. Examples include multilayer reflective films, Si / Mo / Ru periodic multilayer reflective films, Si / Mo / Ru / Mo periodic multilayer reflective films, and Si / Ru / Mo / Ru periodic multilayer reflective films.

  The multilayer reflective film 12 can be formed using, for example, an ion beam sputtering method or a magnetron sputtering method. In particular, in the multilayer reflective film-coated substrate 115 used in the method for manufacturing the reflective mask blank 1 of the present invention, the multilayer reflective film 12 is preferably formed by an ion beam sputtering method. By the ion beam sputtering method, a high refractive index layer and a low refractive index layer having a predetermined thickness can be periodically formed with good reproducibility.

  In the substrate with multilayer reflective film 115 used in the method for manufacturing the reflective mask blank 1 of the present invention, the incident angle of the sputtered particles 66 for forming the high refractive index layer with respect to the normal line of the main surface 71 of the substrate 11. However, it is preferable to form the multilayer reflective film 12 so as to be larger than the incident angle of the sputtered particles 66 for forming the low refractive index layer.

FIG. 16 shows a conceptual diagram of a film forming apparatus using a focused ion beam sputtering method. FIG. 16 shows the incident angle α of the sputtered particles 66 with respect to the normal line of the main surface 71 of the substrate 11 in the focused ion beam sputtering method. In the case of the focused ion beam sputtering method, the incident angle α is an angle with respect to the normal line of the main surface 71 of the substrate 11 when the sputtered particles 66 generated when the focused ion beam 64 is incident on the target 62 are incident on the substrate 11. It is. When the incident angle α ₁ of the sputtered particles 66 for forming the high refractive index layer is larger than the incident angle α ₂ of the sputtered particles 66 for forming the low refractive index layer, the scattered particles of the high refractive index material Kinetic energy is dispersed into a component in a direction perpendicular to the surface of the substrate 11 and a component in a direction parallel to the substrate 11. Therefore, the collision energy when the scattering particles of the high refractive index material adhere to the low refractive index layer can be reduced. Thereby, it is possible to suppress the diffusion of the high refractive index material to the low refractive index layer, and it is possible to suppress the formation of the metal diffusion layer. For this reason, it is possible to obtain the multilayer reflective film 12 having a high reflectance only with the constituent material of the multilayer reflective film 12 without providing the diffusion prevention layer. In addition, by using the multilayer reflective film 12 made by such a method, the processing speed by etching when forming the reference mark 80 can be improved.

The incident angle alpha ₁ of the sputtered particles 66 for forming the high refractive index layer such as Mo is preferably less than 40 degrees than 90 degrees. Further, the incident angle alpha ₂ of the sputtered particles 66 for forming the low refractive index layer of Si or the like is preferably equal to or less than 60 degrees 5 degrees. By forming the multilayer reflective film 12 using the incident angle, the processing speed by etching when forming the reference mark 80 can be further improved.

  In the manufacturing method of the reflective mask blank 1 of the present invention, a film thickness inclined region 90 whose film thickness decreases from the inner side to the outer side of the substrate 11 at the peripheral edge of the main surface 71 is provided on the main surface 71 of the substrate 11. It is preferable that the multilayer reflective film 12 is formed as described above.

  FIG. 13 shows an example of the reflective mask blank 1 of the present invention having three reference marks 80. The number of reference marks 80 is not particularly limited. The reference mark 80 needs to be at least three (three places), but may be three or more. As shown in FIG. 13, a film thickness gradient region 90 is provided at the peripheral edge of the main surface 71 of the substrate 11. In FIG. 14, an example of the cross-sectional schematic diagram of the peripheral part of the reflective mask blank 1 of this invention is shown. As shown in FIG. 14, in the thickness gradient region 90, the thickness of the multilayer reflective film 12 decreases from the inside to the outside of the substrate 11. By forming the reference mark 80 in the film thickness inclined region 90 where the thickness of the multilayer reflective film 12 is small, the formation time of the reference mark 80 can be shortened. In the case of the substrate 115 with a multilayer reflective film, the film thickness gradient region 90 can be provided as in the reflective mask blank 1.

  In order not to affect the absorber film pattern 22 of the reflective mask 2, for example, when the size of the substrate 11 is 152 mm × 152 mm, the film thickness inclined region 90 is a region 5 mm wide from the side surface 72 of the substrate 11, That is, it is preferable to be outside the area of 142 mm × 142 mm. In this case, the width Dslope of the inclined region shown in FIG. 13 is 5 mm. Further, when the size of the substrate 11 is 152 mm × 152 mm as described above, the thickness gradient region 90 is more preferably 142 mm × 142 mm from the side surface 72 of the substrate 11 excluding the 1 mm width region. It can be a region having a size up to 150 mm × 150 mm, and more preferably a region having a size from 142 mm × 142 mm to 148 mm × 148 mm.

  In the manufacturing method of the reflective mask blank 1 of the present invention, when forming a multilayer reflective film, a shielding member 68 is provided at a peripheral portion so as to be highly refracted obliquely with respect to the normal line of the main surface 71 of the substrate 11. It is preferable to form the film by sputtering so that the refractive index layer and the low refractive index layer are deposited.

  FIG. 15 illustrates a state in which the multilayer reflective film 12 is formed by a sputtering method in which a shielding member 68 is provided apart from the periphery. Providing the shielding member 68 prevents the sputtered particles 66 from being deposited on the peripheral edge of the substrate 11. Therefore, the sputtered particles 66 are incident on and obliquely deposited with respect to the normal line of the main surface 71 of the substrate 11. As a result, the material of the multilayer reflective film 12 (high refractive index layer and low refractive index layer) is formed so that the peripheral portion of the main surface 71 has a film thickness distribution in which the film thickness decreases from the inside toward the outside of the substrate 11. It begins to accumulate. Thus, by providing the shielding member 68 apart from the peripheral edge portion, the film thickness inclined region 90 of the multilayer reflective film 12 can be easily and reliably formed. By providing the shielding member 68, the film thickness gradient region 90 can be formed by the same process as the method for forming the normal multilayer reflective film 12.

  In addition, when a resist layer is formed in a reference mark forming process to be described later, the film thickness at the peripheral edge of the substrate tends to increase. If the film thickness gradient region 90 is formed at the peripheral edge of the multilayer reflective film 12, the phenomenon of thickening the peripheral edge is offset by the inclination, so that a flat resist layer surface can be formed. Since the fiducial mark 80 is formed at the peripheral portion, when the pattern of the fiducial mark 80 is drawn on the resist layer, drawing defects due to the rising of the peripheral portion are less likely to occur. Therefore, the fiducial mark 80 having a linear outline is formed. It becomes possible to form.

  The reference mark 80 can be most clearly identified when it is etched to a depth reaching the substrate 11. However, if etching is performed until the substrate 11 is reached, the time required for the etching increases, and the resist layer also needs to be formed thick. When the region where the reference mark 80 is formed is the thickness gradient region 90 where the film thickness is small, the etching time required for forming the reference mark 80 can be shortened, and the film thickness of the resist layer can also be reduced. As a result, the reference mark 80 having a more linear contour can be formed.

  In the sputtering method provided with the shielding member 68 as shown in FIG. 15, the distance h between the main surface 71 of the substrate 11 and the shielding member 68, the shielding length L by the shielding member 68, and the normal line of the main surface 71 of the substrate 11. By adjusting the incident angle α of the sputtered particles 66 of the multilayer reflective film 12 material (the material of the high refractive index layer and the low refractive index layer), the film thickness and the tilt angle of the multilayer reflective film 12 in the film thickness tilted region 90 are controlled. can do. During film formation, the substrate 11 can be rotated by placing the substrate 11 on the rotary stage 63. Therefore, film formation at a predetermined incident angle α can be performed in accordance with the rotation of the substrate 11 in the film thickness inclined regions 90 on all sides of the square substrate 11.

  In the sputtering method provided with the shielding member 68 as shown in FIG. 15, the multilayer reflective film 12 material (with respect to the normal line of the main surface 71 of the substrate 11 ( The incident angle α of the sputtered particles 66 of the high refractive index layer and the low refractive index layer is preferably 5 degrees or more and less than 90 degrees, preferably 10 degrees or more and 80 degrees or less, 15 degrees or more and 70 degrees or less, and 20 degrees. More preferably, it is 60 degrees or less. The distance h between the main surface 71 of the substrate 11 and the shielding member 68 is preferably 0.1 mm to 1.0 mm, and more preferably 0.2 mm to 0.6 mm. The shielding length L by the shielding member 68 is preferably 0.5 mm to 4.0 mm, and more preferably 1.0 mm to 2.0 mm.

  Next, the reference mark forming step of the manufacturing method of the reflective mask blank 1 of the present invention will be described with reference to FIG.

  In the method of manufacturing the reflective mask blank 1 of the present invention, a resist layer is formed on the upper surface of the reflective thin film, and at least a part of the multilayer reflective film 12 is removed by a lithography process using the resist layer. This includes a reference mark forming step (S2) for forming a reference mark 80 serving as a reference for a defect position in the defect information of the mold mask blank 1. The reference mark forming step (S2) includes at least a dropping step (S21) and a uniformizing step (S22) in order to form a resist layer. The reference mark forming step (S2) can further include a drying step S23 for drying the shape of the resist layer obtained by the homogenizing step (S22) as it is. In order to form the fiducial mark 80 using the formed resist layer, the fiducial mark forming process may further include a pattern forming process (S24), an etching process (S25), and a resist removing process (S26).

  As shown in FIG. 3, the reference mark forming step includes at least a dropping step (S21) and a uniformizing step (S22) in order to form a resist layer.

  In the dropping step (S21), the spin coater 120 can be used to drop and supply the resist solution 126 onto the upper surface of the reflective thin film. As shown in FIG. 7, the spin coater 120 includes a spinner chuck 121 that holds a substrate 115 with a multilayer reflective film on which a light-shielding film is formed, for example, on a rectangular substrate 11, and a multilayer reflective film. After the nozzle 122 for dropping the resist solution 126 on the film-coated substrate 115 and the dropped resist solution 126 scatter outward from the multilayer reflective film-coated substrate 115 due to the rotation of the multilayer reflective film-coated substrate 115, the rotation is performed. A cup 123 for preventing scattering around the coating device 120, and an inner ring for guiding the resist solution 126 scattered outside the multilayer reflective film-coated substrate 115 to the outside lower side of the cup 123 above the cup 123. 124 and an exhaust means 130 that exhausts air so as to generate an air flow 134 toward the multilayer reflective film-coated substrate 115.

  A motor (not shown) for rotating the multilayer reflective film-coated substrate 115 is connected to the spinner chuck 121 described above, and this motor rotates the spinner chuck 121 based on a rotation condition described later.

  Also, below the cup 123, an exhaust unit 130 provided with an exhaust amount control unit for controlling the exhaust amount, and a drain for collecting and draining the resist solution 126 scattered outside the multilayer reflective film-coated substrate 115 during rotation. Liquid means (not shown) are provided.

  In the step of forming a resist layer using the spin coater 120, first, the multilayer reflective film-coated substrate 115 is transferred to the spinner chuck 121 of the spin coater 120 by a substrate transfer device (not shown). A substrate 115 with a multilayer reflective film is held on the spinner chuck 121.

  As shown in FIG. 3, the step for forming the resist layer includes a dropping step (S21) for dropping a resist solution 126 containing a resist material and a solvent onto the quadrangular multilayer reflective film-coated substrate 115. . Specifically, the resist solution 126 is dropped from the nozzle 122 of the spin coater 120 onto the surface of the thin film 14 of the multilayer reflective film-coated substrate 115. In the dropping step (S21), the resist solution 126 is dropped and supplied onto the upper surface of the reflective thin film. As shown in FIG. 1, the dropping step (S21) is performed at a rotational speed at which the rotation of the mask blank substrate is stationary or the dropped resist solution 126 is not substantially moved by the action of the rotation of the mask blank substrate. , Including a rotation acceleration step (D1) for accelerating the rotation speed of the mask blank substrate until the first rotation speed is reached.

  It can be said that the surface to be coated of the multilayer reflective film 12 formed by various sputtering methods has a uniform surface energy on the surface. When the resist solution 126 is supplied to such a surface to be coated, the resist solution 126 can naturally spread on the surface to be coated while forming a liquid film. As for the naturally expanded region, it is possible to obtain a state in which the wettability between the resist solution 126 and the surface to be coated is ensured. Since the rotation of the mask blank substrate is stationary when the dropping of the resist solution 126 is started, the resist solution 126 can be smoothly spread.

  In addition, when the dropping of the resist solution 126 is started, the mask blank substrate remains stationary even when the dropped resist solution 126 rotates at a rotational speed that does not substantially move due to the action of the rotation of the mask blank substrate. Similarly to the case where the dropping of the resist solution 126 is started, the resist solution 126 can naturally spread on the surface to be coated while forming a liquid film. Specifically, the rotational speed at which the dropped resist solution 126 does not substantially move due to the action of the rotation of the mask blank substrate is 0 to 300 rpm, preferably 0 to 100 rpm, more preferably 0 to 50 rpm. More preferably, the mask blank substrate is stationary. As a result, when the resist solution 126 is applied, it is possible to prevent the occurrence of defects due to the bubbles in the resist solution 126.

  In the dropping step (S21), the dropping of the resist solution 126 needs to include a rotation acceleration step (D1). In the rotation acceleration step (D1), the rotation speed of the mask blank substrate is stationary, or the first rotation speed is changed from the rotation speed at which the dropped resist solution 126 does not substantially move due to the action of the rotation of the mask blank substrate. The rotational speed of the mask blank substrate is accelerated until reaching R1. After the dripping is started, the resist solution 126 that naturally spreads is increased in rotational speed by the rotation acceleration stage (D1), so that the resist solution 126 at the edge of the liquid film is also gradually outward (periphery of the substrate). Can be spread out. In other words, at the initial stage of the start of rotation of the mask blank substrate, a phenomenon in which the resist solution 126 at the edge of the liquid film is blown without getting wet on the surface to be coated due to centrifugal force is unlikely to occur. As a result, when the dropping step (S21) includes the rotation acceleration step (D1), the coated surface can be uniformly wetted by the resist solution 126. As a result, generation of defects due to bubbles due to poor contact (bad wettability) between the coated surface with low surface energy and the resist solution 126 is effectively suppressed. In the homogenization step (S22) after the dropping step (S21), the resist solution 126 on the surface to be coated is shaken off by the high-speed rotation in the high rotation speed step (S22-3), resulting from other factors. Foreign matter can be blown out of the substrate. As a result, it is possible to suppress the occurrence of defects due to foreign matter on the reflective mask blank 1.

  In the dropping step (S21) in the present invention, a configuration is adopted in which the number of rotations of the substrate is gradually increased in the rotation acceleration stage (D1). According to this configuration, wetting of the entire surface to be coated can be ensured by rotating the substrate at an initial low speed. By ensuring the wetting, the occurrence of bubble-like missing defects is suppressed.

  In the dropping step (S21), the acceleration when accelerating the rotational speed of the mask blank substrate in the rotational acceleration stage (D1) is preferably a substantially constant rotational acceleration of 150 to 1500 rpm / second. In the rotation acceleration stage (D1), the time from the start of acceleration of the rotation speed of the mask blank substrate to the first rotation speed R1 is preferably at least 1 second. As a result, it can be ensured that the coated surface is uniformly wetted by the resist solution 126.

  Moreover, in the manufacturing method of the reflective mask blank of this invention, it is preferable that the square of 2nd rotational speed R2 is 1/2 or less of the square of 1st rotational speed R1. By reducing the rotation speed of the substrate 11 from the first rotation speed R1 to the second rotation speed R2 within a predetermined range, the centrifugal force applied to the peripheral portion of the coated surface becomes 50% or less. Therefore, the resist solution concentrated on the peripheral edge of the substrate 11 can effectively return toward the center of rotation by the action of the inertial force.

  In the manufacturing method of the reflective mask blank of the present invention, the dropping step (S21) maintains the rotational speed of the mask blank substrate at the first rotational speed after the rotational acceleration stage (D1) (D2). It is preferable that it is further included. As a result, the resist solution 126 at the edge of the liquid film can also be surely gradually spread outward (substrate peripheral portion), and the coated surface is wetted more uniformly by the resist solution 126. be able to.

  Note that “maintaining the rotational speed” means a fluctuation in rotational speed that does not adversely affect the application of the resist solution 126 by the method of the present invention, for example, a fluctuation in rotational speed of ± 30%, preferably ± 20. % Rotational speed variation, more preferably ± 10% rotational speed variation, and even more preferably ± 5% rotational speed variation.

  The reflective mask blank manufacturing method of the present invention is a dripping method that maintains the rotational speed of the mask blank substrate at the first rotational speed in a state where the dropping of the resist solution is stopped between the dropping process and the uniformizing process. It is preferable to further include a stopping step (S21-2). As a result, the resist solution 126 at the edge of the liquid film can also be more surely spread outward (periphery of the substrate), and the coated surface is more evenly wetted by the resist solution 126. be able to. In FIG. 1, the time change of the rotational speed when a dripping stop process (S21-2) is included is shown by the dotted line. In addition, a dripping stop process (S21-2) is not necessarily required.

  FIG. 1 illustrates some cases of the dropping step (S21) according to the present invention. Any dropping step (S21) of dropping steps A to D shown in FIG. 1 includes a rotation acceleration step (D1).

  In the dropping step A shown in FIG. 1, the start of the dropping of the resist solution 126 is started at a rotation speed at which the dropped resist solution 126 does not substantially move due to the action of the rotation of the mask blank substrate. The rotational speed of the mask blank substrate is accelerated (rotational acceleration stage (D1)). Thereafter, when the rotational speed reaches the first rotational speed R1, the first rotational speed R1 is maintained (rotational speed maintaining stage (D2)). At the end of the rotation speed maintaining step (D2), the dropping of the resist solution 126 is also ended.

  In the dropping step B shown in FIG. 1, the start of dropping of the resist solution 126 is started when the rotation of the mask blank substrate is stationary, and the rotational speed of the mask blank substrate is accelerated immediately after the start of dropping (rotation acceleration stage). (D1)). Thereafter, when the rotational speed reaches the first rotational speed R1, the first rotational speed R1 is maintained (rotational speed maintaining stage (D2)). At the end of the rotation speed maintaining step (D2), the dropping of the resist solution 126 is also ended.

  In the dropping step C shown in FIG. 1, the start of dropping of the resist solution 126 is started when the rotation of the mask blank substrate is stationary, and this state is maintained for a while. Thereafter, the rotational speed of the mask blank substrate is accelerated (rotational acceleration stage (D1)). Thereafter, when the rotational speed reaches the first rotational speed R1, the first rotational speed R1 is maintained (rotational speed maintaining stage (D2)). At the end of the rotation speed maintaining step (D2), the dropping of the resist solution 126 is also ended. In the dropping step C, the dropping of the resist solution 126 is started at a rotation speed at which the dropped resist solution 126 does not substantially move due to the action of the rotation of the mask blank substrate, and the state is maintained for a while. Further, it is possible to shift to the rotation acceleration stage (D1).

  In the dropping step D shown in FIG. 1, the resist solution 126 is dropped in the same manner as in the dropping step B, except that the rotation speed maintaining step (D2) is not performed. In this case, the first rotational speed R1 is reached by the rotational acceleration stage (D1), and the dropping of the resist solution 126 is also terminated.

  In the example shown in FIG. 1, an example is shown in which the change in the rotation speed of the substrate 11 in the rotation acceleration stage (D1) is constant (rotation acceleration is constant). However, as long as the dropping of the resist solution 126 of the present invention is not adversely affected, the rotation speed change of the substrate 11 can be a step-like speed change and other non-constant monotonically increasing speed changes.

  The step for forming the resist layer in the reference mark forming step includes a uniformizing step (S22) for uniformly spreading the dropped resist solution 126.

  As shown in FIG. 1, in the reflective mask blank manufacturing method of the present invention, the uniformizing step (S22) is such that the rotational speed of the mask blank substrate 11 is lower than the first rotational speed R1. A low rotational speed stage (D3) maintained at the second rotational speed R2, and a high rotational speed stage where the rotational speed of the mask blank substrate 11 is maintained at a third rotational speed R3 higher than the first rotational speed R1. (D4).

  In the homogenization step (S22) of the present invention, the rotation speed is reduced from the high speed rotation at the end of the dropping step (S21), and the low rotation speed stage (D3) is included. In the high-speed rotation at the end of the dropping step (S21), a strong centrifugal force is acting on the resist solution located at the periphery of the coated surface. By lowering the rotation speed of the substrate 11, the centrifugal force applied to the resist solution located at the peripheral portion is reduced, so that the resist solution gathered at the peripheral portion returns to the inside of the coated surface. Thereby, the resist solution that has gathered too much at the peripheral portion is leveled over the entire surface to be coated.

  If the resist solution 126 can sufficiently wet the coated surface in the rotation acceleration stage (D1), the effect of the present invention can be obtained to some extent. Furthermore, if the resist solution 126 is spread gently over the entire surface in the initial stage (low rotational speed stage (D3)) of the homogenizing step (S22), the rotational speed is rapidly increased by the subsequent high rotational speed stage (D4). Even in a high-speed rotation state, it is possible to maintain a state where the coated surface is sufficiently wetted by the resist solution 126. If the rotation speed of the substrate is lowered and the centrifugal force is reduced by the low rotation speed step (D3), the aggregation due to the intermolecular force of the resist liquid 126 at the edge of the liquid film is difficult to be cut. Smoothly spreads over the coated surface. Therefore, in the low rotation speed stage (D3), the surplus resist solution 126 can be sufficiently wetted to the peripheral portion of the surface to be coated, so that an environment ensuring wettability can be prepared. Thereafter, the thickness of the resist solution 126 on the coated surface can be further uniformized by the high rotation speed step (D4).

  The maximum rotation speed (third rotation speed R3) in the homogenization step (S22) is such that when there is an excess resist solution 126 on the surface to be coated, the excess resist solution 126 can be blown out of the substrate. It is set at a rotational speed at which force can be expected. The centrifugal force is a force for causing the resist solution 126 to fly beyond the agglomerated state (intermolecular force) and the adhesion force to the surface to be coated, and to fly to the outside of the substrate. Much more than the centrifugal force required to spread Therefore, as described above, the resist solution 126 is blown away or repelled without getting wet on the surface.

  During the reference mark forming step, the third rotation speed R3 of the homogenizing step (S22) is preferably 500 rpm or more.

  In the process for forming the resist layer in the reference mark forming process, the maximum rotational speed (third rotational speed R3) of the uniformizing process (S22) is reached by the high rotational speed stage (D4). The third rotation speed R3 of the homogenizing step is preferably 500 rpm or more, and more preferably 850 to 2000 rpm. When the third rotational speed R3 of the uniformizing step (S22) is equal to or higher than a predetermined rotational speed, the film thickness of the resist layer on the multilayer reflective film-coated substrate 115 can be uniformized. The third rotation speed R3 and the rotation time in the homogenization step (S22) can be appropriately selected depending on the type of the resist solution 126. The rotation time at the predetermined third rotation speed R3 in the high rotation speed stage (D4) is preferably 1 to 15 seconds. Since the homogenization step (S22) has the high rotation speed step (D4), the resist liquid 126 on the surface to be coated can be shaken off, and foreign matters derived from other factors can be blown outward. As a result, defects due to foreign matters in the finally obtained mask blank are also suppressed.

  The resist solution 126 used in the reference mark forming step is not particularly limited. For example, a high-molecular resist made of a high molecular weight resin having a viscosity exceeding 10 mPa · s and an average molecular weight of 100,000 or more, and having a viscosity of less than 10 mPa · s. Further, a novolak resist composed of a novolak resin having an average molecular weight of less than 100,000 and a dissolution inhibitor, and a chemically amplified resist composed of a polyhydroxystyrene resin and an acid generator can be used. Particularly effective in the present embodiment is a resist having a viscosity of less than 10 mPa · s and an average molecular weight of less than 100,000. Further, in the case of a resist composed of a plurality of constituent materials including a polymer, a PAG (Photo Acid Generator), and a quencher, such as a chemically amplified resist, the reflection mask blank 1 has the above-described surface. Due to the in-plane variation of the constituent materials, in-plane CD variation tends to occur. The manufacturing method of the reflective mask blank 1 of the present invention can also be applied when using a chemically amplified resist.

  For example, since chemically amplified resists and novolak resists have low viscosity (10 mPa · s or less), in the homogenization step (S22), the rotational speed (third rotational speed R3) of the high rotational speed stage (D4) is The time of the high rotation speed stage (D4) is set to 1 to 10 seconds at 850 to 2000 rpm, and the rotation speed of the substrate is set to 100 to 450 rpm in the drying step (S23). In addition, since the viscosity of the polymer resist is high (greater than 10 mPa · s), in the homogenization step (S22), the rotational speed (third rotational speed R3) of the high rotational speed stage (D4) is 850 to 2000 rpm. The time of the high rotation speed stage (D4) is set to 2 to 15 seconds, and in the drying step (S23), the rotation speed of the substrate is set to 50 to 450 rpm. The substrate rotation time in the drying step (S23) is set to the time required until the resist layer is completely dried (until the film thickness of the resist layer does not decrease even if the drying rotation is continued further).

  For example, when the size of the substrate 11 is 6 inch square (152.4 mm × 152.4 mm), the final discharge amount of the resist solution 126 in the resist coating process is preferably 1.5 to 8 ml. When the amount is less than 1.5 ml, the resist solution 126 does not sufficiently reach the surface of the substrate 11 and the film formation state may be deteriorated. If it exceeds 8 ml, the amount of the resist solution 126 that is not used for coating and splashes outward by spin rotation increases, and the consumption of the resist solution 126 increases, which is not preferable. Further, there is a concern that the scattered resist solution 126 may contaminate the inside of the spin coater 120.

  Further, the discharge speed of the resist solution 126 is preferably 0.5 to 3 ml / second. When the discharge speed is less than 0.5 ml / second, there is a problem that the time for supplying the resist solution 126 onto the substrate 11 becomes long. If the discharge speed exceeds 3 ml / second, the resist solution 126 is in strong contact with the substrate 11, and the resist solution 126 may be ejected without wetting the substrate 11.

  It is preferable that the resist solution 126 used in the reference mark forming step does not substantially contain a surfactant. Defects, which are considered to be one of the causes of generation of fine foreign matters, may occur during development, because the surfactant added to the resist solution 126 is a cause of fine foreign matters. For the reference point, the line width of the vertical line is measured at a plurality of locations of the reference mark 80, the center line obtained by connecting the midpoints of the line width, and the width of the horizontal line is measured at the plurality of locations, and the line width is measured. It is determined from the intersection with the center line obtained by connecting the midpoints. If the vertical and horizontal outlines of the reference mark 80 are linear, the reference point is clearly defined, but if a foreign object is generated during exposure, the outline may not be linear and the reference point may become unclear. .

  Therefore, since the resist solution 126 does not substantially contain a surfactant, it is possible to clearly define the reference point of the reference mark 80 by reducing the generation of foreign matter.

  In the present invention, the upper surface of the reflective thin film forming the resist layer is preferably the upper surface of the multilayer reflective film. Since the upper surface of the reflective thin film is the upper surface of the multilayer reflective film, the contrast of the formed reference mark can be increased.

  In the manufacturing method of the reflective mask blank 1 of the present invention, the exhaust means 130 for exhausting the air so as to generate the air flow 134 toward the multilayer reflective film-coated substrate 115 in the uniformizing step (S22) of the reference mark forming step. It is preferable to operate. When the application environment is positively reduced in the dropping step, the resist solution 126 is dried in a state where the resist solution 126 is dried before the resist solution 126 comes into close contact with the surface to be applied by promoting the volatilization of the solvent contained, or in a state where foreign matter is involved. Aggregation can be suppressed.

  During the uniformizing step (S22), the exhaust unit 130 provided with the exhaust amount control unit for controlling the exhaust amount is rotated on the upper surface of the multilayer reflective film-coated substrate 115 while the multilayer reflective film-coated substrate 115 is rotating. The airflow 134 can be generated so that the airflow 134 flows from the center side of the multilayer reflective film-coated substrate 115 along the outer circumferential direction. Due to the air flow 134, the liquid pool of the resist solution 126 generated at the peripheral edge of the multilayer reflective film-coated substrate 115 (the end of the main surface 71 of the substrate) can be effectively scattered outside the multilayer reflective film-coated substrate 115. Further, the air flow 134 effectively prevents the liquid pool of the resist solution 126 generated at the four corners of the multilayer reflective film-coated substrate 115 and the peripheral portion of the multilayer reflective film-coated substrate 115 from being drawn back to the central portion of the multilayer reflective film-coated substrate 115. Can be suppressed. As a result, the thick film regions of the resist layer formed at the four corners and the peripheral portion of the multilayer reflective film-coated substrate 115 can be reduced, or the rising of the film thickness in the regions can be reduced (thickening of the film thickness is suppressed). be able to. Specifically, it is preferable to control the exhaust amount so that the velocity of the airflow 134 hitting the upper surface of the multilayer reflective film-coated substrate 115 is 0.5 m / second or more and 5 m / second or less.

  Furthermore, by controlling the height (distance) from the upper surface of the substrate 115 with a multilayer reflective film to the inner ring 124 (opening 132) provided above the cup 123 and the opening diameter of the inner ring 124, multilayer reflection is achieved. It is possible to control the flow velocity of the air flow 134 that hits the peripheral portion of the multilayer reflective film-coated substrate 115 from the upper surface of the film-coated substrate 115. By this control, the pool of the resist solution 126 generated at the peripheral edge of the substrate 115 with the multilayer reflective film is effectively scattered outside the substrate 115 with the multilayer reflective film, and the four corners of the substrate 115 with the multilayer reflective film and the multilayer reflective film It is possible to maintain the flow velocity of the airflow 134 necessary for effectively suppressing the liquid pool of the resist solution 126 generated at the peripheral portion of the attached substrate 115 from being drawn back to the central portion of the substrate 115 with the multilayer reflective film. .

  The generation of the air flow 134 by the exhaust means 130 can be performed not only in the homogenization step (S22) but also in other steps, for example, the drying step (S23).

  In the manufacturing method of the reflective mask blank 1 of this invention, the process for forming a resist layer can include a drying process (S23) after a homogenization process (S22). In the drying step (S23), the thickness of the resist layer obtained in the homogenization step (S22) is obtained by rotating the substrate with multilayer reflective film 115 at a lower rotation speed than the rotation speed in the homogenization step (S22). The resist layer can be dried while maintaining the uniformity.

  In the manufacturing method of the reflective mask blank 1 of the present invention, this resist layer is used to completely evaporate the solvent contained in the resist layer formed on the multilayer reflective film-coated substrate 115 after the above-described drying step (S23). You may have the heat drying process process which heats and dries. In this heating and drying treatment step, the multilayer reflective film-coated substrate 115 on which the resist layer is formed is usually heated by a heating plate, and the multilayer reflective film-coated substrate 115 on which the resist layer is formed is cooled by a cooling plate. Process. The heating temperature and time in these heating steps and the cooling temperature and time in the cooling step are appropriately adjusted according to the type of the resist solution 126.

  In the reference mark forming step, after forming the resist layer on the upper surface of the reflective thin film as described above, at least a part of the multilayer reflective film 12 is removed by a lithography process using the resist layer, whereby a reflective mask is formed. A reference mark 80 serving as a reference for the defect position in the defect information of the blank 1 is formed. Specifically, the reference mark 80 is formed by a pattern formation step (S24), an etching step (S25), and a resist removal step (S26).

  In the pattern forming step (S24), a pattern of a predetermined reference mark 80 is drawn on the resist layer (electron beam drawing resist layer) formed as described above, and the resist pattern 21 of the reference mark 80 is formed through development. To do. Next, in the etching step (S25), the reflective thin film is etched using the resist pattern 21 of the reference mark 80 as a mask. Next, in the resist removing step (S26), the reference mark 80 can be formed by removing the resist pattern 21 of the reference mark 80. Note that the formation of the reference mark 80 in the pattern formation step (S24), the etching step (S25), and the resist removal step (S26) is the same as the step for patterning the absorber film 16 of the reflective mask blank 1. These steps can be used.

  In the manufacturing method of the reflective mask blank 1 of the present invention, during the reference mark forming step (S2), at the time of the etching step (S25), at least a part of the multilayer reflective film 12 is removed, thereby increasing the film thickness gradient. A reference mark 80 serving as a reference for the defect position in the defect information on the surface of the multilayer reflective film-coated substrate 115 is formed in the region 90.

  In the above-described etching step (S25), if sufficient contrast can be obtained without processing all the layers of the multilayer reflective film 12, it is not always necessary to remove all the layers of the multilayer reflective film 12. In the reference mark forming step (S2) of the manufacturing method of the present invention, the reference mark 80 is formed in the film thickness inclined region 90, and further the reference mark 80 is formed in a region inside the film thickness inclined region 90. You can also

  The shape of the reference mark 80 can be, for example, a shape as shown in FIGS. For example, the reference mark 80 shown in FIG. 6A includes a fine mark 82 and two auxiliary marks 84, the fine mark 82 is a square of 5 μm × 5 μm, and the two auxiliary marks 84 are a rectangle of 1 μm × 200 μm. be able to. In general, the fine mark 82 is for determining a position (reference point) serving as a reference for the defect position, and the auxiliary mark 84 is for specifying an approximate position of the fine mark 82 by defect inspection light or an electron beam. belongs to. The shape of the fine mark 82 is preferably point-symmetric and has a shape with a width of 0.2 μm or more and 10 μm or less with respect to the scanning direction of the defect inspection light or the electron beam. The fine mark 82 is not limited to a square as shown in FIG. 6A, but may have a rounded corner shape, an octagonal shape, a cross shape, or the like. The auxiliary mark 84 is preferably arranged around the fine mark 82 along the scanning direction of the defect inspection light or the electron beam. The shape of the auxiliary mark 84 is preferably a rectangular shape having a short side parallel to a long side perpendicular to the scanning direction of the defect inspection light or the electron beam. Since the auxiliary mark 84 has a rectangular shape having a short side parallel to a long side perpendicular to the scanning direction of the defect inspection light or the electron beam, it can be reliably detected by scanning with a defect inspection apparatus or an electron beam drawing machine. Therefore, the position of the fine mark 82 can be easily specified.

  Using the reference mark 80 shown in FIG. 6A, a reference point serving as a reference for the defect position can be determined as follows. The position of the fine mark 82 can be roughly specified by scanning the auxiliary mark 84 in the X direction and the Y direction with defect inspection light or an electron beam and detecting these auxiliary marks 84. Then, the fine mark 82 whose position is specified is scanned in the X direction and the Y direction by defect inspection light or an electron beam, and then the intersection point P on the fine mark 82 (usually the main mark detected by the scanning of the auxiliary mark 84). The reference point can be determined with the approximate center of the mark. In the case of a cross shape such as the reference mark 80 as shown in FIG. 6B, the center line obtained by measuring the line widths of the vertical lines at a plurality of locations and connecting the midpoints of the line widths. A reference point serving as a reference for the defect position can be determined from the intersection with the center line obtained by measuring the line width of the horizontal line at a plurality of locations and connecting the midpoints of the line widths.

  The position (center position) at which the reference mark 80 is formed is preferably disposed in the film thickness gradient region 90 so that the film thickness is 1/3 to 1/2 the film thickness of the central portion of the multilayer reflective film 12. For example, when the width Dslope of the inclined region is 5 mm, the position (center position) where the reference mark 80 is formed is preferably set to a position between 1.5 mm and 4.0 mm from the side surface 72 of the substrate 11.

  By using the reference mark 80 formed as described above for defect inspection, it is possible to accurately grasp and store the defect position information of the reflective mask blank 1.

  Next, it is preferable that the manufacturing method of the reflective mask blank 1 of this invention has a protective film formation process (S3) which forms the protective film 13 on the multilayer reflective film 12. FIG. The protective film 13 can be formed before the reference mark forming step (S2). In that case, the patterning for forming the reference mark 80 of the multilayer reflective film 12 is performed including the protective film 13. In the manufacturing method of the reflective mask blank 1 of the present invention, it is preferable to perform the protective film forming step (S3) before the reference mark forming step (S2). That is, in the manufacturing method of the reflective mask blank 1 of the present invention, the reflective thin film includes the protective film 13 formed on the upper surface of the multilayer reflective film 12, and the upper surface of the reflective thin film is the upper surface of the protective film 13. It is preferable. This is because damage to the multilayer reflective film 12 can be prevented by the protective film 13 during the reference mark forming step (S2).

  In the example of the reflective mask blank 1 shown in FIG. 8, a protective film 13 is formed between the multilayer reflective film 12 and the absorber film 16. Providing the protective film 13 prevents damage to the multilayer reflective film 12 not only when forming the pattern of the absorber film 16 but also when correcting the pattern, so that the reflectance of the multilayer reflective film 12 can be kept high. This is preferable because it becomes possible. In particular, an oxide film is formed on the protective film 13 by the protective film 13 and the resist solution 126 is easily repelled. Even in that case, the resist solution 126 can be applied to the entire surface of the substrate by the reference mark forming process used in the present invention.

  The protective film 13 can be formed using a film forming method such as an ion beam sputtering method or a magnetron sputtering method. Similar to the formation of the multilayer reflective film 12 described above, the protective film 13 is preferably formed so that the material of the protective film 13 is deposited obliquely with respect to the normal line of the main surface 71 of the substrate 11. That is, it is preferable that the protective film 13 has a film thickness distribution having a tendency similar to that of the multilayer reflective film 12. In the formation of the protective film 13, the above-described shielding member 68 can be provided and the film can be formed without the shielding member 68. From the viewpoint that the thickness of the protective film 13 can be reduced, it is preferable to form the protective film 13 by providing the shielding member 68.

  In the manufacturing method of the reflective mask blank 1 of the present invention, the material of the protective film 13 is preferably a material containing ruthenium (Ru).

  The material of the protective film 13 is an alloy of Ru, Ru and Nb, Zr, Y, B, Ti, La or Mo, an alloy of Si and Ru, Rh, Cr or B, Si, Zr, Nb, La, B And materials such as Ta can be used. Among these materials, from the viewpoint of reflectance characteristics, a material containing ruthenium (Ru), specifically, an alloy of Ru or Ru and Nb, Zr, Y, B, Ti, La and / or Mo. It is preferable to form the protective film 13 made of the material.

In the manufacturing method of the reflective mask blank 1 of the present invention, the conductive film 18 is formed on the main surface 71 (referred to as “back surface”) opposite to the main surface 71 of the glass substrate 11 on which the multilayer reflective film 12 is provided. can do. Since the reflective mask blank 1 has the conductive film 18 on the back surface, the performance of the electrostatic chuck when the reflective mask 2 is set in the pattern transfer apparatus 50 as shown in FIG. 11 can be improved. Any material can be used for the conductive film 18 as long as the electrostatic chuck can operate appropriately. For example, a metal or alloy such as chromium (Cr) or tantalum (Ta), or an oxide, nitride, carbide, oxynitride, oxycarbide, oxynitride carbide, or the like of the above metal or alloy can be used. Among these, TaBN and / or TaN are preferably used, and TaBN / Ta ₂ O ₅ or TaN / Ta ₂ O ₅ is more preferably used. The conductive film 18 may be a single layer, or may be a plurality of layers and a composition gradient film.

  In order for the electrostatic chuck to operate properly, the sheet resistance of the conductive film 18 is preferably 200Ω / □ or less, more preferably 100Ω / □ or less, still more preferably 75Ω / □ or less, and particularly preferably 50Ω / □ or less. be able to. The sheet resistance can be obtained by adjusting the composition and film thickness of the conductive film 18 to obtain the conductive film 18 having an appropriate sheet resistance.

  In the manufacturing method of the reflective mask blank 1 of this invention, the absorber film | membrane formation process which forms the absorber film | membrane 16 on the upper surface of the thin film for reflection is included.

  In FIG. 8, the cross-sectional schematic diagram of an example of the reflective mask blank 1 for EUV lithography of this invention is shown. As shown in FIG. 8, by providing a predetermined absorber film 16 on the multilayer reflective film 12 of the substrate 115 with the multilayer reflective film for EUV lithography, the reflective mask blank 1 for EUV lithography can be obtained. The reflective mask blank 1 for EUV lithography of the present invention can further have a thin film such as an electron beam drawing resist film 19 for patterning the absorber film 16 on the absorber film 16. That is, the reflective mask blank 1 for EUV lithography of the present invention has a structure in which a predetermined absorber film 16 and an electron beam drawing resist film 19 are provided on the multilayer reflective film 12 of the substrate 115 with a multilayer reflective film for EUV lithography. Can have.

  In the manufacturing method of the reflective mask blank 1 of the present invention, it is preferable to form the absorber film 16 so as not to cover the film thickness gradient region 90 in the absorber film forming step. When the reference mark 80 is formed in the film thickness inclined region 90, if the absorber film 16 is formed on the reference mark 80, the shape of the reference mark 80 may be distorted. Therefore, when the reference mark 80 is formed in the film thickness gradient region 90, the defect inspection light in the multilayer reflective film-coated substrate 115 and the absorber film 16 are formed so as not to cover the film thickness gradient region 90. It is possible to maintain a high contrast state when the reference mark 80 is detected by the electron beam. In order to prevent the absorber film 16 from covering the film thickness gradient region 90, a shielding member 68 similar to that described above can be installed at a position facing the film thickness gradient region 90 and can be formed by sputtering. .

  In the above-described method for manufacturing the reflective mask blank 1 of the present invention, the case where the reference mark 80 is formed on the multilayer reflective film 12 before the absorber film 16 is formed has been described. In the manufacturing method of the reflective mask blank 1 of the present invention described below, the reference mark 80 can be formed after the absorber film 16 is formed on the multilayer reflective film 12.

  When the reference mark 80 is formed after the absorber film 16 is formed on the multilayer reflective film 12 or the protective film 13, the reflection type having the predetermined reference mark 80 is performed by the following procedure. The mask blank 1 can be manufactured. That is, as described above, first, the multilayer reflective film 12 is formed so that the film thickness gradient region 90 is provided. Next, the absorber film 16 is formed on the multilayer reflective film 12 or the protective film 13 of the substrate 115 with the multilayer reflective film (absorber film forming step (S4)). Thereafter, by removing at least a part of the multilayer reflective film 12, a reference mark 80 serving as a reference for a defect position in the defect information on the surface of the multilayer reflective film-coated substrate 115 is formed in the film thickness inclined region 90 (reference mark formation). Step (S2)). The absorber film 16 can be formed except for the film thickness gradient region 90 of the multilayer reflective film 12. That is, when only the thickness gradient region 90 of the multilayer reflective film 12 is formed on the peripheral edge of the substrate 11, the reference mark 80 can be formed by removing only the multilayer reflective film 12. Further, when the absorber film 16 is also formed at the position where the reference mark 80 is formed, the absorber film 16 is necessarily removed when removing at least a part of the multilayer reflective film 12. Thus, the reference mark 80 can be formed.

  By using the reference mark 80 formed as described above for defect inspection, it is possible to accurately grasp and store the defect position information of the reflective mask blank 1.

  Next, the manufacturing method of the reflective mask 2 of this invention is demonstrated.

  The present invention is a method for manufacturing the reflective mask 2 including a patterning process for patterning the absorber film 16 of the reflective mask blank 1 manufactured by the above-described manufacturing method. In FIG. 9, the cross-sectional schematic diagram of an example of a structure of the reflective mask 2 of this invention is shown. With reference to FIG. 10, the manufacturing method of the reflective mask 2 of this invention is demonstrated.

  Fig.10 (a) has shown an example of a structure of the reflective mask blank 1 obtained by the manufacturing method of the above-mentioned this invention. This reflective mask blank 1 is formed on a glass substrate 11 by laminating a multilayer reflective film 12, a protective film 13, an exposure light absorber layer 14, and an inspection light low reflective layer 15 in this order. A reference mark 80 is formed in the inclined region of the multilayer reflective film 12. The reflective mask blank 1 can further have a resist film 19 (FIG. 10B). Further, the resist film 19 can be formed by the same method as that for forming a resist layer in the reference mark forming step.

  Next, a predetermined absorber film pattern 22 is formed by processing the absorber film 16 including the exposure light absorber layer 14 which is an absorber of the EUV light 31 and the inspection light low reflection layer 15. Usually, the resist film 19 for electron beam drawing is applied and formed on the surface of the absorber film 16 to prepare a reflective mask blank 1 with a resist film (FIG. 10B). Next, a predetermined pattern is drawn on the electron beam drawing resist film 19 and developed to form a predetermined resist pattern 21 ((c) in the figure). Next, the absorber film 16 is etched using the resist pattern 21 as a mask, and finally the resist pattern 21 is removed to obtain the reflective mask 2 having the absorber film pattern 22 ((d) in the figure). In the present embodiment, the absorber film 16 has a laminated structure of an exposure light absorber layer 14 constituted by an EUV light 31 absorber and a low reflection layer 15 constituted by an inspection light absorber of a mask pattern. Both are made of a material mainly composed of tantalum (Ta). In the step of etching the absorber film 16, when dry etching is performed using the same etching gas, the etching rate ratio of each layer constituting the absorber film 16 is preferably in the range of 0.1 to 10. Thereby, the etching controllability of the laminated tantalum-based absorber film 16 can be improved, and therefore the in-plane uniformity such as the pattern line width and the degree of damage to the protective film 13 can be improved.

  In the present invention, it is most preferable to use a gas containing fluorine (F) as an etching gas when the absorber film 16 having the above-described laminated structure is dry-etched. When the tantalum-based absorber film 16 having the laminated structure is dry-etched using a gas containing fluorine (F), the etching rate ratio of each layer constituting the absorber film 16 can be controlled to be within the above-described preferable range. Because it can.

Examples of the gas containing fluorine (F) include CF ₄ , CHF ₃ , C ₂ F ₆ , C ₃ F ₆ , C ₄ F ₆ , C ₄ F ₈ , CH ₂ F ₂ , CH ₃ F, and C ₃ F. ₈ , SF ₆ and F _{2 and the} like. Although such a fluorine-containing gas may be used alone, two or more kinds of mixed gases selected from the above-mentioned fluorine gas, a rare gas such as argon (Ar), or a chlorine (Cl ₂ ) gas is mixed. May be used.

  Either one of the exposure light absorber layer 14 and the low reflection layer 15 constituting the absorber film 16 is made of a material containing tantalum (Ta), boron (B), and oxygen (O), and the other is tantalum ( When the absorber film 16 is dry-etched using a gas containing fluorine in the case where the absorber film 16 is made of a material containing Ta), boron (B), and nitrogen (N), the etching rate of each layer constituting the absorber film 16 is determined. The ratio can be controlled to be in the range of 0.15 to 5.0.

  By etching the tantalum-based absorber film 16 having a laminated structure using, for example, a gas containing fluorine, the etching rate ratio of each layer constituting the absorber film 16 may be in the range of 0.1 to 10. it can. As a result, the etching controllability of the absorber film 16 can be improved, and damage to the lower layer when the absorber film 16 is etched can be minimized.

  After the absorber film 16 is etched as described above, the remaining resist pattern 21 is removed by a method such as oxygen ashing.

  When the absorber film 16 is formed, the defect is hidden under the absorber film pattern 22 based on the defect position information stored by the defect inspection of the multilayer reflective film-coated substrate 115 or the reflective mask blank 1. Moreover, the formation position of the absorber film pattern 22 can be adjusted. As a result, adverse effects caused by defects can be prevented during exposure projection onto the semiconductor substrate using the reflective mask 2.

  When the reflective mask 2 manufactured as described above is exposed to EUV light 31, the protective film 13 is absorbed in a portion where the absorber film 16 is present on the mask surface and exposed in a portion where the other absorber film 16 is removed. Further, the EUV light 31 is reflected by the multilayer reflective film 12 (see FIG. 4D), and can be used as a reflective mask 2 for lithography using the EUV light 31.

  By using the reflective mask 2 obtained by the manufacturing method of the reflective mask 2 of the present invention, the pattern transfer device 50 as shown in FIG. 11 exposes and transfers the transfer pattern to the resist film on the semiconductor substrate 34. A semiconductor device can be manufactured. A pattern transfer apparatus 50 as shown in FIG. 11 has a laser plasma X-ray source 32 and a reduction optical system 33. A semiconductor device having a highly accurate pattern can be manufactured by exposing and transferring a transfer pattern onto a resist film on a semiconductor substrate using the reflective mask 2 described above.

  Hereinafter, the embodiment of the present invention will be described more specifically with reference to examples.

Example 1
The substrate 11 used in Example 1 is a SiO ₂ —TiO ₂ glass substrate 11 (6 inch square [152.4 mm × 152.4 mm], thickness is 6.3 mm). By mechanically polishing the glass substrate 11, a smooth surface having a surface roughness Rms (root mean square roughness) of 0.15 nm (measurement region: 1 μm × 1 μm, measured with an atomic force microscope), 0.05 μm A glass substrate 11 having the following flatness was obtained.

  Next, the Mo / Si film periodic multilayer reflective film 12 was formed on the main surface 71 of the substrate 11 to produce the multilayer reflective film-coated substrate 115 of Example 1.

  More specifically, the main surface 71 of the above-described substrate 11 is stacked by 40 cycles, with an Si film (4.2 nm) and a Mo film (2.8 nm) as one cycle, by ion beam sputtering. A film / Si film periodic multilayer reflective film 12 (total film thickness 280 nm) was formed. In addition, in order to form the film thickness inclination area | region 90 in the peripheral part of the board | substrate 11, the shielding member 68 as shown in FIG. 15 was provided, and the multilayer reflection film 12 was formed into a film. When the shielding length L by the shielding member 68 is 1.3 mm and the distance h between the main surface 71 of the substrate 11 and the shielding member 68 is 0.3 mm, the width Dslope of the film thickness inclined region 90 is 2.5 mm. became. Further, in the Mo film / Si film periodic multilayer reflective film, the incident angle of the sputtered particles 66 of the Si film is 5 degrees and the incident angle of the sputtered particles 66 of the Mo film is 65 with respect to the normal line of the main surface 71 of the substrate 11. The film was formed so that

  Next, the reference mark 80 having the shape shown in FIGS. 4 and 5 was formed in the thickness gradient region 90 of the substrate with multilayer reflective film 115 of Example 1 described above by the reference mark forming step shown in FIG.

In the reference mark forming step shown in FIG. 3, the reference mark 80 is formed by a lithography method. First, a resist solution 126 was spin-coated on the multilayer reflective film-coated substrate 115 by a resist coating process to form a resist layer on the surface of the thin film 14. The following resists and solvents contained in the resist solution 126 were used.
Resist: Positive chemically amplified resist FEP171 (Fuji Film Electronics Materials)
Solvent: Mixed solvent of PGMEA (propylene glycol monomethyl acetate) and PGME (propylene glycol monomethyl ether)

  Table 1 shows the dropping step (S21) for dropping the resist solution 126 and the homogenizing step (S22) for making the dropped resist solution 126 uniform in the reference mark forming step (S2) of Example 1. The time change of the rotational speed of a board | substrate is shown. The “start time” and “end time” in Table 1 indicate 0 seconds when the dropping of the resist solution 126 is started. “Duration” indicates the time from the start time to the end time of each process. The resist solution 126 is dropped from the start of the rotation acceleration stage (D1) (time: t = 0.0 seconds) to the end of the rotation speed maintenance stage (D2) (time: t = 4.0 seconds). Went up. Further, when the rotation speed of the substrate was different between each process and each stage, the rotation speed was changed in 0.05 seconds at the beginning of the subsequent process or stage. For example, in the case of Table 1, the rotational speed of 1000 rpm was reduced to 250 rpm in 0.05 seconds immediately after the start of the drying step (S23). This change in rotational speed is the same for other examples and comparative examples.

  In the homogenization step (S22) and the drying step (S23), while the substrate with multilayer reflection film 115 is rotating, forced exhaust is continuously performed, and the multilayer reflection film is formed along the upper surface of the substrate with multilayer reflection film 115. The air flow 134 was generated so that the air flow 134 flows from the center side of the attached substrate 115 toward the outer periphery. Therefore, the pool of the resist solution 126 generated in the peripheral portion of the multilayer reflective film-coated substrate 115 (the end of the main surface 71 of the substrate 11) by the rotation of the multilayer reflective film-coated substrate 115 is effectively reduced. It was scattered outside. Further, it is possible to effectively suppress the pool of the resist solution 126 generated at the four corners of the multilayer reflective film-coated substrate 115 and the peripheral portion of the multilayer reflective film-coated substrate 115 from being drawn back to the central portion of the multilayer reflective film-coated substrate 115. did it. Moreover, the thick film area | region of the resist layer formed in the four corners and peripheral part of the board | substrate 115 with a multilayer reflecting film was able to be reduced. In addition, the rising of the film thickness in the region could be reduced (thickening of the film thickness was suppressed).

  Next, the board | substrate 115 with a multilayer reflecting film in which the resist layer was formed was conveyed to the heat drying apparatus and the cooling device, the predetermined heat drying process was performed, and the resist layer was dried (drying process (S23)).

  Next, the reference mark 80 having the shape shown in FIGS. 4 and 5 was formed on the resist layer by laser drawing, and a resist pattern 21 (first resist pattern 21) was formed by development (pattern formation step (S24)). FIG. 4 is a plan view showing a location where the reference mark 80 is formed on the multilayer reflective film-coated substrate 115 on which a resist layer is formed. FIG. 5 is an enlarged plan view of the reference mark 80 portion. Note that the dimensions in FIG. 4 are X4 = Y4 = 136.000 mm, X5 = Y5 = 8 mm, X6 = Y6 ≦ 2.700 mm, and X5 = Y5 ≦ 5.700. The dimensions in FIG. 5 are X1 = Y1 = 1.500 mm, X2 = Y2 = 0.550 mm and X3 = Y3 = 0.1 mm. The numbers in parentheses next to the dimensions in FIGS. 4 and 5 indicate the number of the same dimensions.

Next, using the resist pattern 21 as a mask, the Mo film / Si film periodic multilayer reflective film 12 is etched by a dry etching method using a fluorine-based gas (CF ₄ ) as an etching gas, thereby forming a reference mark 80. (Etching step (S25)). The etching depth at this time was about 280 nm, and all the layers of the multilayer reflective film 12 were etched.

  Next, the resist pattern 214 was peeled off by a known method (resist removal step (S26)).

  Further, a Ru protective film 13 (2.5 nm) was formed on the Mo film / Si film periodic multilayer reflective film 12 by ion beam sputtering (protective film forming step (S3)).

  Next, a semi-transmissive film of a TaN layer (Ta: N = 70%: 30% atomic ratio) having a thickness of 28 nm was formed as the absorber film 16 on the protective film 13 by DC magnetron sputtering (absorber film formation). Step (S4)). Nitrification of tantalum was performed by a reactive sputtering method using a tantalum target 62 and a gas obtained by adding 40% nitrogen to Ar. As described above, the reflective mask blank 1 on which the reference mark 80 of Example 1 was formed was manufactured.

(Example 2)
A reflective mask blank 1 of Example 2 was manufactured under the same conditions as in Example 1 except that the fiducial mark forming process (S2) was performed after the protective film forming process (S3).

(Comparative Example 1)
In Comparative Example 1, a reflective mask blank was manufactured under the same conditions as in Example 1 except that the reference mark forming step (S2) was different. Table 2 shows a substrate rotation schedule in the reference mark forming step (S2) of Comparative Example 1.

  In the case of Comparative Example 1, the substrate is kept stationary in the dropping step (S21), and then the uniformizing step (S22) is performed at a low rotational speed stage (D1) of 300 rpm for 3 seconds, and the low speed is reduced. Immediately after the rotation, a high-speed rotation stage (D3) of 1500 rpm was carried out for 3.5 seconds.

<Evaluation>
For Example 1 and Comparative Example 1, the number of defects at the end of the drying step (S23) of the reference mark forming step (S2) was determined using a defect inspection apparatus with a sensitivity of 60 nm using a laser interference confocal optical system (M6640 manufactured by Lasertec Corporation). And counted for each defect size. Table 3 shows the measurement results of the number of defects.

  As shown in Table 3, in the case of Examples 1 and 2 in which the dropping step (S21) includes the rotation acceleration stage (D1) and the rotation maintenance stage (D2), a defect exceeding 1 μm does not occur, and a finer defect There were very few. As a result, the reference mark 80 having a straight pattern edge could be formed by a photolithography method. Moreover, since there were few defects in the resist layer, it was possible to suppress the occurrence of accidental defects in the multilayer reflective film 12 in the mask pattern formation region in the etching step (S25).

  On the other hand, in Comparative Example 1, a defect was also formed in the reference mark formation region, and the result was that the pattern edge of the reference mark 80 had roughness due to the defect. In addition, since there was a defect in the mask pattern formation region, a secondary defect occurred due to etching of a part of the multilayer reflective film 12 in the etching step (S25).

1 reflective mask blank 2 reflective mask 11 substrate (glass substrate)
DESCRIPTION OF SYMBOLS 12 Multilayer reflecting film 13 Protective film 14 Exposure light absorber layer 15 Low reflection layer 16 Absorber film 18 Conductive film 19 Resist film for electron beam drawing 21 Resist pattern 22 Absorber film pattern 31 EUV light 32 Laser plasma X-ray source 33 Reduction Optical system 34 Semiconductor substrate 50 Pattern transfer device 60 Ion beam sputtering device 61 Focused ion beam generator 62 Target 63 Rotating stage 64 Focused ion beam 66 Sputtered particles 68 Shielding member 71 Main surface 72 Side surface 73 Chamfered surface 80 Reference mark 82 Fine mark 84 Auxiliary mark 90 Thickness gradient region 115 Substrate with multilayer reflective film 120 Spin coater 121 Spinner chuck 122 Nozzle 123 Cup 124 Inner ring 126 Resist liquid 130 Exhaust means 132 Opening 134 Angle of incidence of the width α sputtered particles flow Dslope thickness gradient zone

Claims (12)

A method of manufacturing a reflective mask blank having a reflective thin film on the main surface of a mask blank substrate,
The reflective thin film includes at least a multilayer reflective film in which a high refractive index layer and a low refractive index layer are alternately laminated,
A manufacturing method of the reflective mask blank,
Preparing the mask blank substrate having the reflective thin film;
A resist layer forming step for forming a resist layer on the upper surface of the reflective thin film;
By removing at least a part of the multilayer reflective film at the peripheral edge of the mask blank substrate by a lithography process using the resist layer, a reference mark serving as a reference for the defect position in the defect information of the reflective mask blank A reference mark forming step for forming
The resist layer forming step includes
A dropping step of dropping and supplying a resist solution on the upper surface of the reflective thin film;
A homogenizing step for uniformly spreading the dropped resist solution;
Including
In the dropping step, the rotation of the mask blank substrate is stationary or the dripped resist solution is changed from a rotation speed at which the mask blank substrate does not substantially move due to the rotation of the mask blank substrate to a first rotation speed. The rotational acceleration step of accelerating the rotational speed of the mask blank substrate,
The uniformizing step maintains a rotational speed of the mask blank substrate at a second rotational speed that is lower than the first rotational speed, and a rotational speed of the mask blank substrate. And a high rotation speed stage that maintains a third rotation speed higher than the first rotation speed.   2. The method of manufacturing a reflective mask blank according to claim 1, wherein the upper surface of the reflective thin film is the upper surface of the multilayer reflective film.   The reflection type according to claim 1, wherein the reflective thin film includes a protective film formed on an upper surface of the multilayer reflective film, and the upper surface of the reflective thin film is an upper surface of the protective film. Mask blank manufacturing method.   The acceleration when accelerating the rotational speed of the mask blank substrate in the rotational acceleration stage is a substantially constant rotational acceleration of 150 to 1500 rpm / second. The manufacturing method of the reflective mask blank of description.   5. The method according to claim 1, wherein the dropping step further includes a rotation speed maintaining step of maintaining a rotation speed of the mask blank substrate at the first rotation speed after the rotation acceleration step. A method for producing a reflective mask blank according to item 1.   6. The reflective mask blank according to claim 1, wherein a square of the second rotational speed is ½ or less of a square of the first rotational speed. 7. Manufacturing method.   The method further includes a dropping stop step of maintaining the rotation speed of the mask blank substrate at the first rotation speed in a state where the dropping of the resist solution is stopped between the dropping step and the homogenization step. The manufacturing method of the reflective mask blank of any one of Claims 1-6 characterized by the above-mentioned.   The upper surface of the reflective thin film is a surface of a layer containing at least one element selected from Mo, Nb, Ru, or Si formed by sputtering. The manufacturing method of the reflective mask blank of any one of Claims 1.   The method for manufacturing a reflective mask blank according to any one of claims 1 to 8, wherein the third rotation speed is 500 rpm or more.   The multilayer reflective film is formed on the main surface of the mask blank substrate so as to provide a film thickness gradient region in which the film thickness decreases from the inner side to the outer side of the mask blank substrate at a peripheral portion of the main surface. The method for producing a reflective mask blank according to any one of claims 1 to 9, wherein:   The method of manufacturing a reflective mask blank according to any one of claims 1 to 10, further comprising an absorber film forming step of forming an absorber film on an upper surface of the reflective thin film.   A method for producing a reflective mask, comprising a patterning step of patterning the absorber film of the reflective mask blank produced by the method for producing a reflective mask blank according to claim 11.