JP6094816B2 - Sheet glass cutting method - Google Patents

Description

  The present invention relates to laser fusing that cuts a plate glass by irradiating the plate glass with laser and removing molten glass melted by heating with the laser.

  Laser fusing is known as one of methods for cutting plate glass. This laser fusing is a method of cutting a plate glass by irradiating the plate glass to be cut with a laser and removing the molten glass melted by heating with the laser by spraying an assist gas or the like.

  By the way, when the plate glass is cut by this laser cutting, there are the following difficulties. That is, when cutting progresses, the plate glass is rapidly heated by the heat of the laser and then rapidly cooled by natural cooling, so that residual strain is generated at the cut end portion formed in the plate glass by cutting. Due to this, when a defect occurs in the cut end due to an impact or the like, the plate glass may be broken due to cracking or the like.

  Patent Document 1 discloses a method for solving such a problem caused by residual strain. In this document, the sheet glass is cut by a fusing laser focused on the plate glass, and the defocused grading is performed so as to include the irradiation region of the fusing laser and straddle the irradiation region before and after the cutting progress direction. A method for irradiating a plate glass with a cooling laser is disclosed.

  According to the method disclosed in Patent Document 1, as shown in FIG. 3, a region W <b> 1 existing in front of the cutting progress direction X with respect to the irradiation region V of the fusing laser in the irradiation region W of the slow cooling laser. Since the plate glass G is preheated by this, rapid heating of the plate glass G is prevented. Furthermore, since the plate glass G is gradually cooled by the region W2 existing behind the cutting progress direction X, the plate glass G is prevented from being rapidly cooled. Thereby, generation | occurrence | production of the residual distortion in the cutting | disconnection edge part Gc can be avoided suitably.

JP 2013-75817 A

  However, even the method disclosed in Patent Document 1 still has the following problems to be solved.

  That is, as shown in FIG. 4, the defocused slow cooling laser L <b> 2 irradiated on the plate glass G heats the periphery of the irradiation region of the fusing laser L <b> 1 condensed on the plate glass G. Further, since the slow cooling laser L2 is irradiated from the upper surface Ga side of the plate glass G, the upper surface Ga side of the upper and lower surfaces Ga and Gb of the plate glass G receives heat energy from the slow cooling laser L2 more than the lower surface Gb side. Absorb much.

  Thereby, in the irradiation region of the slow cooling laser L2, a temperature difference is generated between the upper surface Ga side and the lower surface Gb side of the plate glass G, and a difference occurs in the degree of thermal expansion of the plate glass G between both sides (upper surface Ga). Side expands more than the lower surface Gb side). Due to this difference, the flat glass G that is in a flat state as indicated by a two-dot chain line in the figure is deformed into a curved state so that the upper surface Ga side is convex. Then, due to the deformation of the plate glass G, the positional relationship between the focal point F1 of the fusing laser L1 and the plate glass G may be unduly changed.

  When such a situation occurs, the glass L is irradiated with the defocused fusing laser L1. As a result, the amount of molten glass that is melted by heating by the fusing laser L1 becomes excessive, the shape of the cut end is deteriorated, the heat energy for cutting is insufficient, and cutting of the plate glass G itself is not performed. There was a problem that could be possible.

  The present invention made in view of the above circumstances is a smooth plate glass that suppresses deformation of the plate glass when the plate glass is cut by the fusing laser and the annealing laser is irradiated to the region including the irradiation region of the fusing laser. It is a technical problem to enable cutting of the substrate.

  The present invention, which was created to solve the above problems, irradiates a cutting glass by irradiating a cutting laser along a planned cutting line, and irradiates a region including the irradiation region of the fusing laser with a slow cooling laser. The sheet glass cutting method is characterized by irradiating the first slow cooling laser from one side of the surface of the plate glass and irradiating the second slow cooling laser from the other side.

  According to such a method, the plate glass is heated from both one side and the other side by the first slow cooling laser and the second slow cooling laser. For this reason, compared with the case where a plate glass is heated only from the single side | surface side, it becomes difficult to produce a difference in the grade of the thermal expansion of a plate glass between the one surface side and the other surface side. As a result, deformation of the plate glass is suppressed in the irradiation region of the slow cooling laser including the irradiation region of the fusing laser, and therefore the occurrence of a situation in which the positional relationship between the focal point of the fusing laser and the plate glass changes inappropriately. Can be suppressed. As a result, the plate glass can be cut smoothly.

  In the above method, the area of the overlapping region where the irradiation region of the first slow cooling laser and the irradiation region of the second slow cooling laser overlap each other through the plate glass is, It is preferably 20% or more of the area of the wider region.

  In this way, the area of the overlapping region where the irradiation region of the first slow cooling laser and the irradiation region of the second slow cooling laser overlap with each other via the plate glass is ensured. This makes it easy to equalize the degree of thermal expansion of the plate glass between the one side and the other side of the plate glass. Accordingly, it is possible to more suitably suppress the deformation of the plate glass.

  In the above method, when the diameter in the irradiation region of the first slow cooling laser is D1 and the diameter in the irradiation region of the second slow cooling laser is D2, the optical axis of the first slow cooling laser is A separation distance S at which the intersection point with one surface of the plate glass and the intersection point between the optical axis of the second slow cooling laser and the other surface of the plate glass are separated along the surface of the plate glass is 0 ≦ (2S /(D1+D2))≦0.3 is preferably satisfied. Here, the “diameter in the irradiation region of the first (second) slow cooling laser” means the diameter of a circle having an area equal to the area of the irradiation region of the first (second) slow cooling laser. For example, when the shape of the irradiation region of the first (second) slow cooling laser is an ellipse, it means the diameter of a circle having the same area as the ellipse.

  When the output of the first slow cooling laser is P1, and the output of the second slow cooling laser is P2, the ratio of the outputs of the two slow cooling lasers (P1 / P2) is 0. It is preferable to satisfy 5 ≦ (P1 / P2) ≦ 2.0. Furthermore, it is preferable that the value of the ratio of the diameters of the two irradiation areas (D2 / D1) satisfies 0.5 ≦ (D2 / D1) ≦ 2.0.

  In this way, it is possible to further equalize the degree of thermal expansion of the plate glass between the one surface side and the other surface side of the plate glass (for details, refer to Examples described later).

  In the above method, the plate glass is melted into a product part and a non-product part with the planned cutting line as a boundary, and an irradiation area of the first slow cooling laser and an irradiation area of the second slow cooling laser Is preferably biased toward the product part side rather than the non-product part side.

  In this way, since the product part side is preferentially cooled by the first and second slow cooling lasers, the residual strain can be reliably reduced at the cut end formed in the product part by cutting. Is possible.

  In the above method, it is preferable that the irradiation region of the first slow cooling laser and the irradiation region of the second slow cooling laser are elongated in a direction perpendicular to the planned cutting line.

  In this way, the residual strain can be further reliably reduced at the cut end formed on the plate glass by cutting.

  In the above method, it is preferable that the optical axis of the first slow cooling laser and the optical axis of the second slow cooling laser are inclined with respect to the surface of the plate glass.

  In this way, there is a situation where the light of the lasers for slow cooling irradiated to the plate glass is reflected on the surface of the plate glass and enters the irradiator for irradiating these lasers. Since it can avoid, it becomes possible to prevent suitably that the said irradiator is damaged.

  In the above method, it is preferable that the optical axis of the first slow cooling laser and the optical axis of the second slow cooling laser are not on the same straight line.

  In this way, among the irradiators for irradiating both slow cooling lasers, the laser light emitted from one side is formed on the plate glass by the light transmitted through the plate glass or by the progress of cutting. It is possible to avoid the occurrence of a situation in which light that has passed through the opening including the cutting groove (the portion from which the molten glass has been removed) enters the other. Therefore, these irradiators can be prevented from being damaged.

  As described above, according to the present invention, when a plate glass is cut by a fusing laser, deformation of the plate glass can be suppressed when a region including the irradiation region of the fusing laser is irradiated with a slow cooling laser. Therefore, it becomes possible to cut the flat glass smoothly.

It is a front view which shows the sheet glass fusing apparatus used for the cutting method of the plate glass which concerns on embodiment of this invention. It is a top view which shows the irradiation aspect of each laser irradiated to the plate glass used as the object of cutting. It is a top view which shows the cutting method of the plate glass in the past. It is a front view which shows the cutting method of the plate glass in the past.

  Hereinafter, the cutting method of the plate glass which concerns on embodiment of this invention is demonstrated with reference to attached drawing. In addition, it is preferable to use the cutting method of the plate glass demonstrated below for the cutting of the plate glass whose thickness is 10 [micrometers]-500 [micrometers]. Further, it is more preferably used for cutting a plate glass having a thickness of 10 [μm] to 300 [μm], and most preferably used for cutting a plate glass having a thickness of 10 [μm] to 200 [μm].

  First, with reference to FIG.1 and FIG.2, the structure of the sheet glass fusing apparatus used for the cutting method of the plate glass which concerns on embodiment of this invention is demonstrated. FIG. 1 is a front view showing a sheet glass fusing device, and FIG. 2 is a plan view showing an irradiation mode of each laser irradiated on the plate glass to be cut (in FIG. 2, a plate glass fusing device). (The illustration of the components is omitted).

  As shown in FIGS. 1 and 2, the sheet glass fusing device is a cutting line CL (extending in a direction perpendicular to the paper surface in FIG. 1) serving as a boundary between the product part G1 and the non-product part G2 of the sheet glass G. The laser irradiation device 1 for irradiating the glass sheet G with the laser L1 for fusing along with the laser beam L1 for gradual cooling that irradiates the glass glass G with the defocused first and second slow cooling lasers L21 and L22. Machines 21 and 22, an assist gas injector 3 for injecting an assist gas A toward the irradiation region V of the fusing laser L1, and a process (not shown) for moving the placed plate glass G in parallel with the planned cutting line CL The stand is the main element.

  The processing table is composed of two movable tables arranged in parallel to each other. Each of the two movable tables supports an end portion of the plate glass G parallel to the planned cutting line CL from below. And it is the structure which moves the plate glass G mounted on the table in parallel with the cutting projected line CL. Note that the plate glass G may be moved by a conveyor belt or the like instead of the processing table.

  The fusing laser irradiator 1 is installed on the upper surface Ga side of the plate glass G in a state of being fixed at a fixed point. In this embodiment, a carbon dioxide gas laser with a wavelength of 10.6 [μm] is used as the fusing laser L1, and the output of the fusing laser L1 is the processing speed (cutting speed) and thickness of the plate glass G. What is necessary is just to adjust according to the beam diameter etc. of the laser L1 for fusing.

  The fusing laser L1 emitted from the fusing laser irradiator 1 is irradiated so that its optical axis Z1 extends perpendicularly to the surface (upper surface Ga and lower surface Gb) of the plate glass G. The focal point F1 of the fusing laser L1 is positioned within the thickness range of the plate glass G, and the fusing laser L1 is focused on the plate glass G.

  Then, by moving the processing table on which the plate glass G is placed in parallel with the planned cutting line CL, as shown in FIG. 2, the irradiation region V of the fusing laser L1 is relatively aligned along the planned cutting line CL. Move in the X direction. Thereby, the glass is sequentially melted along the planned cutting line CL by heating with the laser L1 for fusing, and the glass sheet G is cut into the product part G1 and the non-product part G2 by removing the molten glass. (Fused out).

  Each of the slow-cooling laser irradiators 21 and 22 is installed in a state of being fixed to a fixed point in the same manner as the fusing laser irradiator 1. The slow cooling laser irradiator 21 is disposed on the upper surface Ga side of the plate glass G, and the slow cooling laser irradiator 22 is disposed on the lower surface Gb side of the plate glass G. In the present embodiment, carbon dioxide gas lasers having a wavelength of 10.6 [μm] are used as the first slow cooling laser L21 and the second slow cooling laser L22. The outputs P1 and P2 of the slow cooling lasers L21 and L22 may be adjusted according to the processing speed (cutting speed) and thickness of the plate glass G, the beam diameter of each of the slow cooling lasers L21 and L22, and the like. .

  The first slow cooling laser L21 irradiated from the slow cooling laser irradiator 21 has its optical axis Z21 inclined at an angle θa with respect to the upper surface Ga of the plate glass G and orthogonal to the planned cutting line CL in plan view. Irradiated to extend in the direction of. Similarly, the second slow cooling laser L22 irradiated from the slow cooling laser irradiator 22 has its optical axis Z22 inclined at an angle θb with respect to the lower surface Gb of the glass sheet G, and a planned cutting line in plan view. Irradiation extends in a direction perpendicular to CL. The inclination angle θa at which the optical axis Z21 is inclined with respect to the upper surface Ga of the glass sheet G is preferably 20 [°] to 80 [°]. Moreover, it is preferable that inclination | tilt angle (theta) b with which the optical axis Z22 inclined with respect to the lower surface Gb of the plate glass G is 20 [degrees]-80 [degrees].

  The focal point F21 of the first slow cooling laser L21 is located between the slow cooling laser irradiator 21 and the plate glass G, and the focal point F22 of the second slow cooling laser L22 is the slow cooling laser irradiator. 22 and the glass sheet G. That is, the focal points F21 and F22 of the two slow cooling lasers L22 are positioned so as to be out of the thickness range of the plate glass G, unlike the focal point F1 of the fusing laser L1.

  As a result, the defocused both slow cooling lasers L21 and L22 are irradiated onto the plate glass G, and the irradiation areas Wa and Wb of both the slow cooling lasers L21 and L22 are long in a direction perpendicular to the planned cutting line CL. It is formed in an oval shape.

  In addition, the laser irradiators 21 and 22 for both slow cooling are irradiated with the laser L1 for fusing each of the irradiation region Wa of the first slow cooling laser L21 and the irradiation region Wb of the second slow cooling laser L22. The glass plate G is irradiated with both the slow cooling lasers L21 and L22 so as to include the region V. That is, the irradiation region Wa and the irradiation region Wb have an overlapping region that overlaps each other via the plate glass G, and the overlapping region includes the irradiation region V of the fusing laser L1.

  In addition, the laser irradiators 21 and 22 for both slow cooling use both the lasers L21 and Sb for the slow cooling so that each of the irradiation regions Wa and Wb is biased to the product part G1 side rather than the non-product part G2 side of the plate glass G The sheet glass G is irradiated with L22.

  Further, the intersection Ta between the optical axis Z21 of the first slow cooling laser L21 and the upper surface Ga of the plate glass G and the intersection Tb between the optical axis Z22 of the second slow cooling laser L22 and the lower surface Gb of the plate glass G are: Are separated along the surface (upper surface Ga and lower surface Gb). Thereby, the irradiation area Wb is biased toward the product part G1 by the distance S between the intersection Ta and the intersection Tb with respect to the irradiation area Wa. In the present embodiment, the intersection Ta and the intersection Tb are separated from each other, but the intersection Ta and Tb may be overlapped with each other through the glass sheet G (separation distance S = 0).

  Then, the processing table on which the glass sheet G is placed moves in parallel with the planned cutting line CL, so that the irradiation areas Wa and Wb of the lasers L21 and L22 for both slow cooling become the planned cutting line as shown in FIG. It moves in the X direction relatively along CL. Thereby, the cutting | disconnection edge part Gc formed in the plate glass G (product part G1 and non-product part G2) by the cutting | disconnection (melting | fusing) by the laser L1 for fusing is annealed.

  In this embodiment, the focal points F21 and F22 of the slow cooling lasers L21 and L22 are both positioned between the slow cooling laser irradiators 21 and 22 and the glass sheet G. Absent. It is good also as a structure which arrange | positions the plate glass G between the laser irradiators 21 and 22 for both slow cooling, and these focus F21 and F22, and irradiates the plate glass G with the laser L21 and L22 which were defocused. . Further, the optical axes Z21 and Z22 of the slow cooling lasers L21 and L22 do not necessarily have to be inclined with respect to the surface of the plate glass G.

  Here, the area of the overlapping region where the irradiation region Wa of the first slow cooling laser L21 and the irradiation region Wb of the second slow cooling laser L22 overlap with each other via the plate glass G is the two irradiation regions Wa, It is preferable that it is 20% or more of the area of the wider region of Wb.

  Further, when the diameter in the irradiation region Wa is D1 and the diameter in the irradiation region Wb is D2, the intersection Ta between the optical axis Z21 and the upper surface Ga of the glass sheet G, and the intersection Tb between the optical axis Z22 and the lower surface Gb of the glass sheet G However, the separation distance S separated along the surface of the glass sheet G preferably satisfies the relationship 0 ≦ (2S / (D1 + D2)) ≦ 0.3, and 0 ≦ (2S / (D1 + D2)) ≦ 0.15. Is more preferable, and it is most preferable that the relationship 0 ≦ (2S / (D1 + D2)) ≦ 0.1 is satisfied. The “diameter D1 (D2) in the irradiation region Wa (Wb)” means the diameter of a circle having an area equal to the area of the irradiation region Wa (Wb) (hereinafter the same). That is, in the present embodiment, it means the diameter of a circle having an area equal to the area of the irradiation area Wa (Wb) having an elliptical shape.

  Further, the ratio of the diameter (D2 / D1) between the diameter D1 in the irradiation region Wa of the first slow cooling laser L21 and the diameter D2 in the irradiation region Wb of the second slow cooling laser L22 is 0.5 ≦ It is preferable to satisfy (D2 / D1) ≦ 2.0, more preferably 0.7 ≦ (D2 / D1) ≦ 1.5, and 0.9 ≦ (D2 / D1) ≦ 1.1. Most preferred.

  In addition, the ratio of the output (P1 / P2) between the output P1 of the first slow cooling laser L21 and the output P2 of the second slow cooling laser L22 is 0.5 ≦ (P1 / P2) ≦ 2. 0.0, preferably 0.7 ≦ (P1 / P2) ≦ 1.5, and most preferably 0.9 ≦ (P1 / P2) ≦ 1.1.

  The assist gas injector 3 is installed in a state of being fixed at a fixed point in the same manner as the laser irradiator 1 for fusing and the laser irradiators 21 and 22 for both slow cooling. The nozzle of the assist gas injector 3 is installed in parallel with the upper surface Ga of the plate glass G and extends in a direction perpendicular to the planned cutting line CL.

  And the assist gas A injected from the assist gas injector 3 is injected from the product part G1 side of the plate glass G toward the non-product part G2 side along the upper surface Ga of the plate glass G, and the laser L1 for fusing It passes over the irradiation area V. Thereby, the molten glass melted in the irradiation region V of the fusing laser L1 is scattered to the non-product part G2 side, and the cutting (melting) of the plate glass G is assisted. In addition, the injection amount of the assist gas A is preferably 10 [l / min] to 100 [l / min]. Moreover, the structure installed in both the upper surface Ga side and the lower surface Gb side may be sufficient as the assist gas injector 3. FIG.

  Here, the plate glass G has the same degree of ease of thermal energy accumulation between the upper surface Ga side and the lower surface Gb side due to the cutting mode of the plate glass G, the surrounding environment, and the like. It may be different. That is, the plate glass G has (1) the case where the easiness of thermal expansion is comparable between the upper surface Ga side and the lower surface Gb side, and (2) the upper surface Ga side is more likely to thermally expand, There are cases where the Ga side is easily deformed so as to be convex, and (3) the lower surface Gb side is likely to be thermally expanded, and the lower surface Gb side is likely to be deformed.

  For example, in the present embodiment, the assist gas A is injected from the assist gas injector 3 only on the upper surface Ga side. Therefore, the upper surface Ga side is more easily cooled by the assist gas A than the lower surface Gb side, so that heat energy is difficult to accumulate, and the plate glass G is placed in a state where it is easily deformed so that the lower surface Gb side is convex. (Corresponding to the case of (3) above).

  In the case of (1), the outputs P1 and P2 of the lasers L21 and L22 for both slow cooling and the diameters D1 and D2 of the irradiation areas Wa and Wb are substantially equal between the lasers L21 and L22 for both slow cooling. Therefore, it is preferable to make the values uniform. In the case of (2) or (3) above, of the output value of the slow cooling laser arranged on the side that tends to be convex and the value of the diameter of the irradiation region of the slow cooling laser It is preferable to make at least one smaller than the side that is difficult to be convex. However, also in this case, the ratio of the outputs of the lasers L21 and L22 for slow cooling (P1 / P2) and the ratio of the diameters of the irradiation areas Wa and Wb (D2 / D1) are within the above-described preferable values. Adjust to fit inside.

  Moreover, even if the plate glass G is deformed due to the cutting mode of the plate glass G, the surrounding environment, or the like, the plate glass G can only be deformed so that the upper surface Ga side is convex, or (5) the lower surface In some cases, the deformation can be made only so that the Gb side is convex. In other words, in the case of the above (4), even if both the slow cooling lasers L21 and L22 are irradiated to the plate glass G under the condition that the lower surface Gb side is intentionally deformed, the lower surface Gb side is Does not deform convexly. Similarly, in the case of (5) above, even if both slow cooling lasers L21 and L22 are irradiated to the glass sheet G under the condition that the upper surface Ga side is intentionally deformed, the upper surface Ga side is convex. It will not be deformed.

  For example, in the sheet glass fusing device according to the present embodiment, when the plate glass G is placed on a surface plate instead of the processing table, the lower surface Gb side of the plate glass G is deformed to be convex due to the presence of the surface plate. Therefore, even if the plate glass G is deformed, the plate glass G is placed in a state where it can only be deformed so that the upper surface Ga side is convex (corresponding to the case of (4) above).

  And in the case of said (4) or (5), among the value of the output of the laser for slow cooling arrange | positioned at the side which cannot deform | transform into a convex, and the value of the diameter of the irradiation area | region of the said laser for slow cooling , At least one may be larger than the side that can be deformed into a convex shape. However, also in this case, the ratio of the outputs of the lasers L21 and L22 for slow cooling (P1 / P2) and the ratio of the diameters of the irradiation areas Wa and Wb (D2 / D1) are within the above-described preferable values. Adjust to fit inside.

  Next, the operation and effect of the method for cutting plate glass according to the embodiment of the present invention using the above-described sheet glass fusing device will be described.

  According to this cutting method of the glass sheet, the glass sheet G is heated from both the upper surface Ga side and the lower surface Gb side by the first slow cooling laser L21 and the second slow cooling laser L22. For this reason, compared with the case where the plate glass G is heated only from the upper surface Ga side or the lower surface Gb side, it becomes difficult to produce a difference in the degree of thermal expansion of the plate glass G between the upper surface Ga side and the lower surface Gb side. . Accordingly, since the deformation of the plate glass G is suppressed in the irradiation regions Wa and Wb of the laser annealing lasers L21 and L22 including the irradiation region V of the fusing laser L1, the focal point F1 of the fusing laser L1 and the plate glass G are reduced. It is possible to suppress the occurrence of a situation where the positional relationship changes unjustly.

  Further, the area of the overlapping region where the irradiation region Wa of the first slow cooling laser L21 and the irradiation region Wb of the second slow cooling laser L22 overlap each other through the plate glass G is defined as both irradiation regions Wa and Wb. Of these, when the area of the wider region is 20% or more, a large area of the overlapping region is secured. Therefore, it becomes easy to equalize the degree of thermal expansion of the plate glass G between the upper surface Ga side and the lower surface Gb side of the plate glass G. Accordingly, it is possible to more suitably suppress the deformation of the plate glass G.

  Further, (1) a separation distance S where an intersection Ta between the optical axis Z21 and the upper surface Ga of the plate glass G and an intersection Tb between the optical axis Z22 and the lower surface Gb of the plate glass G are separated along the surface of the plate glass G; (2) Diameter ratio (D2 / D1) between the diameter D1 in the irradiation region Wa of the first slow cooling laser L21 and the diameter D2 in the irradiation region Wb of the second slow cooling laser L22, and (3) first If (1) to (3) of the output ratio (P1 / P2) between the output P1 of the slow cooling laser L21 and the output P2 of the second slow cooling laser L22 are set to the preferable values as described above, Further, the deformation of the glass sheet G can be further suppressed (for details, refer to Examples described later).

  From the above, according to the cutting method of the plate glass according to the present embodiment, the plate glass G is cut by the fusing laser L1, and the region including the irradiation region V of the fusing laser L1 includes the upper surface Ga side and the lower surface Gb side. The deformation of the glass sheet G can be suppressed by irradiating the slow cooling lasers L21 and L22 from both. Thereby, the smooth cutting | disconnection of the plate glass G is attained. Moreover, according to this cutting method of plate glass, the following effects can be further obtained.

  That is, both slow cooling lasers L21 and L22 are applied to the sheet glass G so that each of the irradiation regions Wa and Wb is biased toward the product part G1 side rather than the non-product part G2 side of the plate glass G. Therefore, the product part G1 side is preferentially cooled by both slow cooling lasers L21 and L22, so that residual strain can be reliably reduced at the cut end Gc formed in the product part G1 by cutting. It becomes. This effect is further enhanced by the fact that the irradiation regions Wa and Wb of the slow cooling lasers L21 and L22 are elongated in the direction orthogonal to the planned cutting line CL.

  Further, both the optical axis Z21 of the first slow cooling laser L21 and the optical axis Z22 of the second slow cooling laser L22 are inclined with respect to the surface (upper surface Ga and lower surface Gb) of the plate glass G. Thereby, the light of the lasers L21 and L22 for both slow cooling irradiated to the plate glass G is reflected by the surface of the plate glass G, and the laser irradiators 21 and 22 for both slow cooling which have irradiated these lasers L21 and L22. It is possible to avoid the occurrence of a situation where the light is incident on the screen. For this reason, it becomes possible to prevent suitably that both the irradiation devices 21 and 22 are damaged.

  In addition, the optical axis Z21 of the first slow cooling laser L21 and the optical axis Z22 of the second slow cooling laser L22 do not exist on the same straight line. For this reason, out of the laser light irradiated from one of the laser irradiators 21 and 22 for both slow cooling, the light transmitted through the plate glass G or the cutting groove formed in the plate glass G by the progress of cutting It is possible to avoid the occurrence of a situation in which light that has passed through the included opening (the portion from which the molten glass has been removed) is incident on the other. As a result, it is possible to more suitably prevent both of the slow cooling laser irradiators 21 and 22 from being damaged.

  Here, the cutting method of the plate glass which concerns on this invention is not limited to the aspect demonstrated by the above-mentioned embodiment. In said embodiment, in the state which fixed the position of the laser irradiation device 1 for fusing, the laser irradiation devices 21 and 22 for both slow cooling, and the assist gas injector 3, the plate glass G is moved and the said glass plate G is cut | disconnected. However, this is not a limitation. For example, the cutting glass irradiator 1, the two slow cooling laser irradiators 21, 22, and the assist gas injector 3 move in synchronization with the plate glass G whose position is fixed, thereby cutting the plate glass G. It is good also as a mode which performs. Moreover, it is good also as an aspect which cut | disconnects the plate glass G by moving together the plate glass G, the laser irradiation device 1 for fusing, the laser irradiation devices 21 and 22 for both slow cooling, and the assist gas injector 3. FIG.

  Moreover, in said embodiment, although it becomes an aspect irradiated with the laser L1 for fusing from the upper surface Ga side of the plate glass G, it is good also as an aspect irradiated from the lower surface Gb side. In the above embodiment, the optical axis Z1 of the fusing laser L1 extends vertically with respect to the surface of the plate glass G. However, it may be inclined with respect to the surface of the plate glass G. The optical axis Z1 may extend in any direction as long as it points to the planned cutting line CL.

  Furthermore, in said embodiment, although it has become the aspect by which both laser irradiators 21 and 22 for slow cooling are arrange | positioned on the product part G1 side on the basis of the cutting projected line CL of the plate glass G, it is on the non-product part G2 side. You may arrange | position and may arrange | position one of the laser irradiators 21 and 22 for both slow cooling to the product part G1 side, and the other to the non-product part G2 side. Further, in the above embodiment, the optical axes Z21 and Z22 of the lasers for slow cooling L21 and L22 extend in a direction perpendicular to the planned cutting line CL in plan view, but this is not a limitation. As long as the slow cooling lasers L21 and L22 are irradiated to the region including the irradiation region V of the fusing laser L1, each of the optical axes Z21 and Z22 may extend in an arbitrary direction.

  Examples of the present invention will be described below. In addition, in description of an Example, about the element which has the same function as the element already demonstrated with the cutting method of the plate glass which concerns on embodiment mentioned above, or an element, the same code | symbol is used for the explanatory note for demonstrating an Example. The overlapping explanation is omitted by adding.

  As an example of the present invention, three types of tests are performed, the glass sheet G is cut by the fusing laser L1, and the regions Wa and Wb including the irradiation region V of the fusing laser L1 are irradiated with the slow cooling lasers L21 and L22. did. And in each test, it verified about the curvature (deformation) which generate | occur | produces in the plate glass G when cutting | disconnection advances.

  First, implementation conditions common to all three types of tests will be described.

  The sheet glass fusing device used in the examples of each test differs from the plate glass fusing device used in the plate glass cutting method according to the above-described embodiment only in the following points. That is, the optical axis Z22 of the second slow cooling laser L22 extends vertically with respect to the lower surface Gb of the plate glass G (θb = 90 [°]). Thereby, the shape of the irradiation region Wb of the second slow cooling laser L22 is not elliptical but circular. About another structure, it is all the same as the sheet glass fusing apparatus used for the cutting method of the plate glass which concerns on embodiment. Moreover, in the comparative example of each test, the plate glass fusing apparatus of the same structure as what was used for the Example was used, without irradiating the plate glass G with the laser L22 for 2nd slow cooling.

  As plate glass G to be cut, OA-10G (thickness: 100 [μm]) manufactured by Nippon Electric Glass Co., Ltd. was used. The power of the fusing laser L1 was 21.5 [W], and the diameter of the irradiation region V of the fusing laser L1 was 120 [μm]. Furthermore, the speed (processing speed) at which the irradiation region V of the fusing laser L1 moves in the X direction relative to the plate glass G was set to 60 [mm / s]. The injection amount of the assist gas A was 20 [l / min].

  About the curvature which generate | occur | produces in the plate glass G when cutting | disconnection advances, the quality was determined visually. In addition, as shown in the following Tables 1 to 3, the determination of the warpage was performed in four stages of 、, ○, Δ, and × in order from the one with the best result.

  Next, the implementation conditions unique to each of the three types of tests will be described.

  In the first test, the output P1 of the first slow cooling laser L21 was 70 [W]. In addition, the angle θa at which the optical axis Z21 of the first slow cooling laser L21 is inclined with respect to the surface of the plate glass G is 45 [°]. Furthermore, the shape of the irradiation region Wa of the first slow cooling laser L21 was an ellipse having a major axis × minor axis of 14 [mm] × 9 [mm]. That is, the diameter D1 in the irradiation region Wa is the diameter of a circle having the same area as this ellipse. The output P2 of the second slow cooling laser L22 was 70 [W]. The diameter D2 in the irradiation region Wb (circular shape) of the second slow cooling laser L22 was 12 [mm].

  In the first test, as shown in the deviation mode in Table 1 below, with respect to the position of the intersection Ta between the optical axis Z21 and the upper surface Ga of the plate glass G, the optical axis Z22 and the lower surface Gb of the plate glass G The plate glass G was cut while changing the position taken by the intersection Tb. The meaning of this deviation mode is as follows. “No deviation” means that the separation distance S between the intersection Ta and the intersection Tb along the surface of the glass sheet G is S = 0 [mm] (the intersection Ta and the intersection Tb are the glass sheets G). Are overlapping). “Upstream side deviation” means that the position of the intersection point Tb is deviated from the position of the intersection point Ta by a separation distance S forward in the X direction. The “downstream side deviation” means that the position of the intersection point Tb is displaced by the separation distance S in the rear in the X direction with respect to the position of the intersection point Ta. “Product side deviation” means that the position of the intersection Tb is shifted from the position of the intersection Ta by the separation distance S toward the product part G1 in the direction orthogonal to the X direction. “Non-product side deviation” means that the position of the intersection point Tb is displaced from the position of the intersection point Ta by the separation distance S toward the non-product part G2 in the direction orthogonal to the X direction.

  In the second test, the angle θa at which the optical axis Z21 of the first slow cooling laser L21 was inclined with respect to the surface of the plate glass G was 45 [°]. The shape of the irradiation region Wa of the first slow cooling laser L21 was an ellipse having a major axis × minor axis of 14 [mm] × 9 [mm]. Furthermore, the diameter D2 of the irradiation region Wb (circular) of the second slow cooling laser L22 was set to 12 [mm]. Furthermore, a separation distance S at which the intersection Ta between the optical axis Z21 and the upper surface Ga of the glass sheet G and the intersection Tb between the optical axis Z22 and the lower surface Gb of the glass sheet G are separated along the surface of the glass sheet G is S = 0 [mm (The intersection Ta and the intersection Tb overlap with each other through the glass sheet G).

  In the second test, as shown in the deviation mode in Table 2 below, the glass sheet G is changed while changing the output P1 of the first slow cooling laser L21 and the output P2 of the second slow cooling laser L22. Was cut. The meaning of this deviation mode is as follows. “Upper large” means that the output P1 of the first slow cooling laser L21 is larger than the output P2 of the second slow cooling laser L22. “Same as upper and lower” means that the output P1 of the first slow cooling laser L21 is equal to the output P2 of the second slow cooling laser L22. “Lower large” means that the output P2 of the second slow cooling laser L22 is larger than the output P1 of the first slow cooling laser L21.

  In the third test, the output P1 of the first slow cooling laser L21 was 70 [W]. In addition, the angle θa at which the optical axis Z21 of the first slow cooling laser L21 is inclined with respect to the surface of the plate glass G is 45 [°]. Furthermore, the shape of the irradiation region Wa of the first slow cooling laser L21 was an ellipse having a major axis × minor axis of 14 [mm] × 9 [mm]. In addition, the separation distance S at which the intersection Ta between the optical axis Z21 and the upper surface Ga of the plate glass G and the intersection Tb between the optical axis Z22 and the lower surface Gb of the plate glass G are separated along the surface of the plate glass G is S = 0 [ mm] (the intersection Ta and the intersection Tb overlap with each other through the plate glass G).

  In the third test, as shown in the deviation mode in Table 3 below, the irradiation of the second slow cooling laser L22 with respect to the size of the diameter D1 in the irradiation region Wa of the first slow cooling laser L21. The plate glass G was cut while changing the size of the diameter D2 in the region Wb. The meaning of this deviation mode is as follows. “Equal” means that the diameter D1 in the irradiation region Wa and the diameter D2 in the irradiation region Wb are substantially equal. “Large” means that the diameter D2 in the irradiation region Wb is larger than the diameter D1 in the irradiation region Wa. “Small” means that the diameter D2 in the irradiation region Wb is smaller than the diameter D1 in the irradiation region Wa. The energy density shown in Table 3 represents the energy density on the lower surface Gb of the plate glass G of the second slow cooling laser L22.

  The results of the first, second, and third tests are shown in Table 1, Table 2, and Table 3, respectively.

  As shown in Tables 1 to 3, it can be seen that in any of the first to third tests, the results of the examples are better than the comparative examples. In the comparative example, the plate glass G is heated only from the upper surface Ga side, whereas in the example, the plate glass G is moved from the upper surface Ga side by the first slow cooling laser and the L21 second slow cooling laser L22. Heating is performed from both the lower surface Gb side. Thereby, since it becomes difficult to produce a difference in the degree of thermal expansion of the glass sheet G between the upper surface Ga side and the lower surface Gb side, it is presumed that such a result was obtained.

  Further, as a result of the first test, the intersection Ta between the optical axis Z21 and the upper surface Ga of the plate glass G and the intersection Tb between the optical axis Z22 and the lower surface Gb of the plate glass G are separated along the surface of the plate glass G. It can be seen that good results are obtained when the separation distance S satisfies the relationship of 0 ≦ (2S / (D1 + D2)) ≦ 0.3. It can also be seen that particularly good results are obtained when the separation distance S satisfies the relationship of 0 ≦ (2S / (D1 + D2)) ≦ 0.1.

  Further, from the result of the second test, the value of the output ratio (P1 / P2) between the output P1 of the first slow cooling laser L21 and the output P2 of the second slow cooling laser L22 is 0.5 ≦ It can be seen that good results are obtained when (P1 / P2) ≦ 2.0.

  Further, from the result of the third test, the ratio of the diameter D1 in the irradiation region Wa of the first slow cooling laser L21 and the diameter D2 in the irradiation region Wb of the second slow cooling laser L22 (D2 / D1). It can be seen that particularly good results are obtained when the value of satisfies the following condition: 0.9 ≦ (D2 / D1) ≦ 1.1.

CL cutting line G plate glass G1 plate glass product part G2 plate glass non-product part Ga plate glass upper surface Gb plate glass lower surface L1 fusing laser V fusing laser irradiation region L21 first slow cooling laser P1 first slow cooling laser Output Wa First irradiation area of laser for annealing D1 Diameter of irradiation area of first annealing laser Z21 Optical axis of first annealing laser Ta Optical axis of first annealing laser and upper surface of plate glass Intersection L22 Second slow cooling laser P2 Output of second slow cooling laser Wb Irradiation area of second slow cooling laser D2 Diameter of second slow cooling laser irradiation area Z22 Optical axis of second slow cooling laser Tb Intersection between the optical axis of the second slow cooling laser and the upper surface of the plate glass S Separation distance

Claims (9)

In the cutting method of the plate glass, irradiating the cutting glass along the planned cutting line to melt the plate glass, and irradiating the slow cooling laser to the region including the irradiation region of the cutting laser,
A method for cutting a plate glass, wherein the first slow cooling laser is irradiated from one side of the surface of the plate glass and the second slow cooling laser is irradiated from the other side.   The area of the overlapping region where the irradiation region of the first slow cooling laser and the irradiation region of the second slow cooling laser overlap with each other via the plate glass is the larger of the two irradiation regions. It is 20% or more of an area, The cutting method of the plate glass of Claim 1 characterized by the above-mentioned. When the diameter in the irradiation region of the first slow cooling laser is D1, and the diameter in the irradiation region of the second slow cooling laser is D2,
The intersection of the optical axis of the first slow cooling laser and one surface of the plate glass, and the intersection of the optical axis of the second slow cooling laser and the other surface of the plate glass are along the surface of the plate glass. The method for cutting plate glass according to claim 1, wherein the separated distance S satisfies a relationship of 0 ≦ (2S / (D1 + D2)) ≦ 0.3.   When the output of the first slow cooling laser is P1, and the output of the second slow cooling laser is P2, the ratio of the outputs of both slow cooling lasers (P1 / P2) is 0.5 ≦ The plate glass cutting method according to claim 1, wherein (P1 / P2) ≦ 2.0 is satisfied.   When the diameter in the irradiation region of the first slow cooling laser is D1 and the diameter in the irradiation region of the second slow cooling laser is D2, the value of the ratio of the diameters of both irradiation regions (D2 / D1) is The plate glass cutting method according to claim 1, wherein 0.5 ≦ (D2 / D1) ≦ 2.0 is satisfied.   The sheet glass is melted into a product portion and a non-product portion with the planned cutting line as a boundary, and the irradiation region of the first slow cooling laser and the irradiation region of the second slow cooling laser are changed to the non-product. The method for cutting a plate glass according to any one of claims 1 to 5, wherein the product is biased toward the product part rather than the part.   The irradiation region of the first slow cooling laser and the irradiation region of the second slow cooling laser are elongated in a direction orthogonal to the planned cutting line. The cutting method of the plate glass as described in 2.   The plate glass according to claim 1, wherein the optical axis of the first slow cooling laser and the optical axis of the second slow cooling laser are inclined with respect to the surface of the plate glass. Cutting method.   The method for cutting plate glass according to any one of claims 1 to 8, wherein the optical axis of the first slow cooling laser and the optical axis of the second slow cooling laser are not on the same straight line.

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