JP6087668B2 - 半導体装置の作製方法 - Google Patents

半導体装置の作製方法 Download PDF

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Publication number
JP6087668B2
JP6087668B2 JP2013044499A JP2013044499A JP6087668B2 JP 6087668 B2 JP6087668 B2 JP 6087668B2 JP 2013044499 A JP2013044499 A JP 2013044499A JP 2013044499 A JP2013044499 A JP 2013044499A JP 6087668 B2 JP6087668 B2 JP 6087668B2
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Prior art keywords
oxide semiconductor
oxide
insulating film
transistor
substrate
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Expired - Fee Related
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JP2013044499A
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Japanese (ja)
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JP2014175360A (ja
JP2014175360A5 (es
Inventor
秋元　健吾
健吾 秋元
寛暢 高橋
寛暢 高橋
肇 徳永
肇 徳永
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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JP2013044499A 2013-03-06 2013-03-06 半導体装置の作製方法 Expired - Fee Related JP6087668B2 (ja)

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JP2013044499A JP6087668B2 (ja) 2013-03-06 2013-03-06 半導体装置の作製方法

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JP2013044499A JP6087668B2 (ja) 2013-03-06 2013-03-06 半導体装置の作製方法

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JP2014175360A JP2014175360A (ja) 2014-09-22
JP2014175360A5 JP2014175360A5 (es) 2016-02-18
JP6087668B2 true JP6087668B2 (ja) 2017-03-01

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9758434B2 (en) 2015-06-01 2017-09-12 Saint-Gobain Ceramics & Plastics, Inc. Refractory articles and methods for forming same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113875022B (zh) * 2019-06-04 2024-05-14 堺显示器制品株式会社 薄膜晶体管及其制造方法以及显示装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102052293B1 (ko) * 2010-07-26 2019-12-04 닛산 가가쿠 가부시키가이샤 아모르퍼스 금속 산화물 반도체층 형성용 전구체 조성물, 아모르퍼스 금속 산화물 반도체층 및 그 제조 방법 그리고 반도체 디바이스
KR101885691B1 (ko) * 2010-07-27 2018-08-06 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
JP5671911B2 (ja) * 2010-09-27 2015-02-18 凸版印刷株式会社 薄膜トランジスタアレイ及び画像表示装置並びに薄膜トランジスタアレイの製造方法
TWI565067B (zh) * 2011-07-08 2017-01-01 半導體能源研究所股份有限公司 半導體裝置及其製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9758434B2 (en) 2015-06-01 2017-09-12 Saint-Gobain Ceramics & Plastics, Inc. Refractory articles and methods for forming same

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JP2014175360A (ja) 2014-09-22

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