JP6078155B2 - Fine particle knife and cutting apparatus using the fine particle knife - Google Patents

Description

  The present invention relates to a tool / device used for micro-cutting, and more particularly to a fine particle knife used for micro-cutting and a cutting device that performs processing using the fine particle knife.

  With the development of society, miniaturization of industrial products has become an important feature of high quality, and the point to realize the shift to miniaturization of products is the improvement of the level of micro component processing technology.

  At present, in various micro component processing technologies, micro cutting has become one of the important means. Micro cutting mainly includes micro turning, micro milling and micro special machining. Above all, in micro structure manufacturing and material removal processing, micro milling has a very high potential for development, and it has the disadvantage that it cannot process complex 3D micro parts with a single silicon micro structure processing material. In addition to overcoming the above, it has become an effective means to realize micro machining for small structural parts of various materials such as metals, alloys, composite materials, ceramics, glass, silicon, etc. In particular, it has a greater advantage in processing precision micro parts having a feature size of 0.01 μm to 1 mm. However, in micro milling, when the cutting layer thickness reaches several micrometer to sub-micron level, the cutting edge of the micro milling cutter is subjected to a very large stress, and a very large amount of heat is generated per unit area. The demand for milling used for micro milling is very high because the temperature is very high locally.

  Currently, countries such as the United States, Germany, Japan, etc. have developed a series of micro milling cutters that simply reduce the overall size or local feature size compared to traditional milling cutters. Instead, it is a kind of special cutting tool tailored to the characteristics and processing principles of micro milling. For example, Tokyo Electro-Communication University of Japan created a micro milling cutter with a diameter of 0.2 mm using single crystal diamond by a polishing method. The German University of Karlsruhe has created a micro milling cutter with a diameter of φ100 μm using hard alloy tools by ion beam sputtering and laser beam forming. In addition, the diameter of a micro milling cutter obtained by the ion beam sputtering method using M42 high-speed steel and C2 hard alloy material by Sandia National Laboratories and Louisiana Institute of Technology can reach φ25 μm. However, micro milling cutters still have complicated processing steps, high manufacturing costs, a small number of products, strict requirements for use conditions, limited service life, etc. Can not meet the demands of cutting tools.

  On the other hand, micro-cutting is a rapid and low-cost micro-part machining method that is not subject to processing material limitations, and the processing quality of parts (eg, accuracy, surface roughness, etc.) Dynamic characteristics, etc.). Machine tool performance is mainly related to the spindle, workbench and control system, the diameter of the cutting tool used in micro cutting is very small, and the spindle rotation in the micro cutting machine to improve machining efficiency The speed is very fast.

  In order to meet the torque requirements, conventional micro-cutting devices usually employ a bearing with a mixed angle contact with the electric spindle, and such a bearing undergoes thermal expansion due to frictional heat, and typically has a maximum rotational speed of 6 Does not exceed 10,000 rpm. Air bearings should be used when the rotational speed is higher, but the torque provided by the air bearing is slightly smaller, and the maximum rotational speed of the main shaft by the air bearing can now reach 200,000 rpm. In order to obtain a slightly higher cutting speed, the taper angle of the spindle and the taper angle of the high-speed cutting hilt (pattern) coincide. The work table of a precision machine tool for micro cutting is usually driven by a linear motor. Compared to the normal drive by, for example, a ball screw, the linear motor drive system has no accumulated error caused by friction and electromagnetic coupling, and is caused by wear. There is no loss of accuracy, there is no gap, a relatively large acceleration can be provided, and the accuracy of the linear motor drive system can reach ± 1 μm. Precision machine tools for micro cutting. Although it is excellent in rigidity and vibration is small, many are equipped with various sensors and actuators, and the control requirements for the surrounding environment are severe, so the processing cost of micro parts is relatively high.

  As mentioned above, the cutting devices currently used for micromachining are too complex in structure, or the production and manufacturing costs are too high, and the environmental requirements during operation are relatively high. It is not so easy and cannot meet the demands of large-scale production.

  The first technical problem to be solved by the present invention is to provide a fine particle knife having a simple structure and easy to process, which can be used for micro cutting in view of the current state of the existing technology.

  The second technical problem to be solved by the present invention is to provide a cutting apparatus that is simple in overall structure, low in manufacturing cost, and easy to operate in view of the current state of the existing technology.

Means for Solving the Invention

  In order to solve the first technical problem described above, the technical solution adopted by the present invention is as follows. A fine particle knife, wherein the fine particle knife includes a knife body and a knife head, the knife head is provided on an outer surface of the knife body so as to protrude outward, and a geometric size of the knife head is 10 nm to 1 mm. It is characterized by being.

  Preferably, the knife head is designed to have a convex pointed shape, and only one knife head can be provided on the outer surface of the knife body. The knife body may have a regular three-dimensional geometric structure, for example, a spherical or elliptical shape, or may have an irregular arbitrary shape.

  In order to improve cutting efficiency, more preferably, the knife head is designed to have a convex pointed shape, and a plurality of the knife heads distributed at intervals can be provided on the outer surface of the knife body. .

  In order to maintain the knife head in a downward state and the knife head consistently contacts the cutting surface, a counterweight block is preferably provided in the knife body for deflecting the knife head downward from start to finish.

  In order to solve the second technical problem described above, the technical solution adopted by the present invention is as follows. A cutting device, the cutting device comprising a fine particle knife, a cutting work table, a micro jet nozzle located above the work table, and a hydraulic device for supplying a spray liquid to the micro jet nozzle, Relative linear movement is performed between the cutting work table and the micro jet nozzle. The fine particle knife includes a knife body and a knife head, and the knife head is provided on the outer surface of the knife body so as to protrude outward. The knife head has a geometric size of 10 nm to 1 mm, a counter weight block for deflecting the knife head in the knife body downward is provided in the knife body, and the microjet nozzle has the hydraulic device. An injection chamber connectable to the liquid discharge line, and an injection port is installed at the bottom of the injection chamber. An annular flow is formed, the particulate knife is collected by the annular flow, and the outer diameter of the particulate knife corresponds to the inner diameter of the annular flow.

  Preferably, the cutting work table can be installed so as to perform a linear movement, and the microjet nozzle is fixedly installed so as not to move.

  More preferably, the work table can be installed so as not to move while being fixed, and the microjet nozzle is installed to perform linear movement.

  More preferably, the cutting work table and the microjet nozzle can be installed so as to perform linear movement along the opposite directions at the same time.

  Preferably, the microjet nozzle includes a nozzle base and a spray head to form a stable annular flow while facilitating processing and assembly, and the nozzle base has a through-hole penetrating along the axial direction. The spray head is connected to the bottom of the nozzle base, the spray head is provided with a plurality of injection small holes distributed in a ring shape along the circumferential direction at a position corresponding to the through hole, The plurality of injection small holes form the injection port.

As a more preferable method, the cutting apparatus of the present invention can be realized by adopting the following structure. A cutting device comprising a fine particle knife, a cutting work table, a micro jet nozzle located above the work table, and a hydraulic device for supplying a jet liquid to the micro jet nozzle, including the cutting work table and the cutting work table Relative linear movement is performed with respect to the micro jet nozzle, and the fine particle knife includes a knife body and a knife head, and the knife head is provided on an outer surface of the knife body so as to protrude outward, and the knife head The microjet nozzle is provided with an injection chamber that can be connected to the liquid discharge line of the hydraulic device, and an injection port is installed at the bottom of the injection chamber. In which an annular flow is formed, the inner diameter of the annular flow corresponds to the outer diameter of the particulate knife, and at the same time the center of gravity of the particulate knife is away from the centerline of the annular flow The following initial conditions are satisfied between the fine particle knife and the microjet nozzle.

Where k is the coefficient of action, r is the distance from the center of gravity of the particle knife to the point of action of the microjet in the particle knife, ρ is the density of the microjet liquid, and v ₀ is the microjet's density. The velocity at the injection port of the micro jet nozzle, g is the acceleration of gravity, h is the height from the bottom of the micro jet nozzle to the contact point between the micro jet and the fine particle knife, f is the coefficient of static friction, and m is the coefficient of static friction. The mass of the fine particle knife, θ is the depression angle between the connecting line from the point of action of the vertical component force of the microjet to the fine particle knife to the center of the circle and the vertical outer diameter of the fine particle knife. Therefore, in a situation where the fine particle knife is rotating, the work table can be linearly moved with respect to the microjet nozzle at the same time, and cutting is realized by the rotation of the fine particle knife.

  Preferably, the cutting work table can move linearly, and the microjet nozzle is fixed and does not move.

  More preferably, the cutting work table can be fixed and cannot move, and the micro jet nozzle performs linear movement.

  More preferably, the cutting work table and the microjet nozzle can be installed so as to perform linear movement along the opposite directions at the same time.

  Preferably, the microjet nozzle includes a nozzle base and a spray head, and the nozzle base is provided with a through-hole penetrating along an axial direction, and the spray head is connected to a bottom portion of the nozzle base, and the spray base is provided. The head is provided with a plurality of injection small holes distributed in a ring shape along the circumferential direction at a position corresponding to the through hole, and the plurality of injection small holes form the injection port. The structure of the micro jet nozzle described above is easy to process and assemble, and since the spray liquid sprayed from the spray port can form a stable annular flow, the work stability and processing accuracy of the fine particle knife are guaranteed. Is done.

  Compared with the prior art, the fine particle knife of the present invention has the following advantages.

  A knife head is installed on the outer surface of the fine particle knife body. The size range of the knife head is 10nm to 1mm (micrometer level or nanometer level), and the cutting edge of the knife head is extremely thin, realizing nanometer level cutting. can do. The whole structure of the fine particle knife is simple and easy to process and manufacture. Since the fine particle knife does not need to be attached to the spindle of a machine tool and driven by the rotation of the spindle unlike the conventional cutting tool, the cutting apparatus using the fine particle knife does not need the spindle and has a simple structure.

  The cutting device of the present invention has the following advantages.

  First, since the cutting edge in the knife head of the fine particle knife is extremely thin and has reached the micrometer level or nanometer level, it is possible to realize nanometer level cutting. Next, micro-cutting is performed by rotating the micro-knife with a micro jet or by “pinching” the micro-knife, so that the micro-jet is attached to the spindle of a machine tool like a conventional cutting tool. There is no need to drive by rotation of the main shaft, and the main shaft is unnecessary in the cutting apparatus. Thus, the overall structure is simpler. In addition, the microbeam can take away the energy generated in the cutting process in a timely manner, thereby greatly reducing the non-uniform deformation field generated by the heat-force coupling action, resulting in dimensional effects in the micro-cut deformation region, non-uniformity This is a kind of new micro-cutting method that reduces the influence of strain and dislocation on shear deformation stress and shear deformation, and guarantees the quality and work efficiency of micro-cutting.

1 is a structural diagram of a fine particle knife according to an embodiment of the present invention. FIG. 2 is a three-dimensional sectional view of the fine particle knife shown in FIG. 2 is a cutting device employing the fine particle knife shown in FIG. It is a stress-analysis figure of the fine particle knife which concerns on the Example of this invention. It is an effective action area calculation figure under the jet action of the fine particle knife which concerns on the Example of this invention. It is nozzle sectional drawing of the cutting device which concerns on the Example of this invention. FIG. 7 is a bottom view of the nozzle shown in FIG. It is the cutting device of the other kind of fine particle knife structure employ | adopted as the Example of this invention.

  Hereinafter, the present invention will be described in more detail with reference to the drawings and examples.

  Embodiments of the present invention relate to a micro cutting tool and a micro cutting technique. Unlike normal cutting, the depth of cutting when performing micro cutting is typically from the micrometer level to the nanometer level. Since the size of the crystal grain of the general material is several micrometers, this means that the micro cutting is performed inside the crystal grain, and the cutting process cuts each crystal grain. This inevitably results in a sharp increase in cutting stress per unit area, which generates a significant amount of heat per unit area of the blade, raising the temperature of the cutting edge, resulting in high temperature, high stress working conditions. End up.

  In order to solve the above-described problems in the micro-cutting process, as shown in FIGS. 1 to 8, a new cutting apparatus is provided in this embodiment. The cutting device includes a fine particle knife, a cutting work table 3, a micro jet nozzle 4 located above the cutting work table 3, and a hydraulic device for supplying a jet liquid to the micro jet nozzle 4. Is provided with an injection chamber, a liquid inlet is provided at the top of the injection chamber, and the liquid inlet is connected to the liquid outlet line of the liquid outlet. An injection port is installed at the bottom of the injection chamber, the injection port forms an annular flow, and the outer diameter of the fine particle knife 1 corresponds to the inner diameter of the annular flow. The micro jet nozzle 4 includes a nozzle base 41 and a spray head 42. The nozzle base 41 is provided with a through-hole 411 penetrating along the axial direction. The spray head 42 is connected to the bottom of the nozzle base 41, and the spray head 42 is provided with a plurality of injection small holes 421 distributed in a ring shape along the circumferential direction at positions corresponding to the through holes.

  The cutting apparatus of the present embodiment performs cutting by employing a fine particle knife as a cutting tool. As shown in FIGS. 1 and 2, the fine particle knife 1 includes a knife body 11 and a knife head 12, and the knife head 12 has a convex pointed shape. On the outer surface of the knife body 11, one or a plurality of knife heads 12 distributed at intervals can be installed. The geometric size of the knife body 11 is usually at the millimeter or micrometer level, preferably the size range can be selected between 20 μm and 10 mm. The knife head 12 is placed on the outer surface of the knife body 11 so as to protrude outwardly, the geometric size of the knife head 12 must be smaller than the geometric size of the knife body, and the geometric size range of the knife head 12 is preferably Is on the micrometer or nanometer level from 10 nm to 1 mm. The knife body of the fine particle knife according to the present embodiment may have a regular solid geometric structure such as a spherical shape or an oval shape, and the knife body may have other irregular solid shapes such as FIG. An irregular crystal structure or the like may be used as in the knife body 1 ′ shown.

  Among them, the following several types of movement methods can be provided between the fine particle knife 1, the micro jet nozzle 4 and the cutting work table 3. In the first type, the micro jet nozzle 4 is fixedly installed, the fine particle knife 1 is fixedly stored in the micro jet nozzle 4, and the cutting work table 3 can perform linear movement with respect to the micro jet nozzle 4. . In the second type, the cutting worktable 3 is fixedly installed, the fine particle knife 1 is fixedly stored in the microjet nozzle 4, and the microjet nozzle 4 can move linearly with respect to the cutting worktable 3. . In the third type, the fine particle knife 1 is fixedly accommodated in the microjet nozzle 4, and the microjet nozzle 4 and the cutting work table 3 simultaneously move linearly along opposite directions. In the fourth type, the cutting work table 3 is fixedly installed, the fine particle knife 1 rotates, and the microjet nozzle 4 moves linearly. In the fifth type, the fine particle knife 1 rotates, the microjet nozzle 4 is fixedly installed, and the cutting work table 3 moves linearly with respect to the microjet nozzle 4. In the sixth type, the fine particle knife 1 performs rotational movement, and the microjet nozzle 4 and the cutting work table 3 simultaneously perform linear movement along opposite directions.

  When employing the first, second, and third types of motion methods described above, a counterweight block 2 is provided in the knife body 11 of the fine particle knife, and the counterweight block 2 is located in the knife body 11. The knife head 12 is deflected downward all the time and is brought into contact with the cutting surface. During processing, the spray head of the micro jet nozzle forms an annular flow using the liquid as a medium, and the annular flow acts on the surface of the fine particle knife, and an inward horizontal component force and a downward vertical component force are applied to the fine particle knife surface. And generate The inward horizontal component has the effect of “pinching” the fine particle knife, and, like tweezers, firmly “pinches” the fine particle knife below the microjet nozzle. When the downward vertical component force and the counterweight block both act on the fine particle knife so that the knife head 12 faces downward from time to time and relative movement occurs between the cutting work table and the microjet nozzle. Cutting on the workpiece can be realized.

  When employing the fourth, fifth and sixth types of motion methods described above, the fine particle knife must be subjected to the action of a single torque in order to achieve rotation of the fine particle knife at the water potential. Therefore, the fine particle knife is placed on the material surface to be processed, the symmetrical centerline of the jet water flow is separated from the rotation center of the fine particle knife, and part of the fine particle knife is in contact with the water jet beam and the other part is not in contact with it. To. This contact portion is referred to as an action area. The working area is subjected to the pressure action of the water beam. Since the non-contact area is not subjected to pressure action, the pressure is zero. Due to the presence of this differential pressure, rotational torque is generated and the fine particle knife can be rotated. When the gravity line of the fine particle knife and the jet center line overlap and the contact area on both sides of the jet and fine particle knife is equal, the pressure is distributed symmetrically, so net torque is not generated for the fine particle knife. The particle knife does not rotate due to the water potential. When the center of gravity of the particle knife and the jet center line do not overlap, that is, when the particle knife center of gravity is placed away from the center line of the microjet nozzle, there is a pressure difference between the two sides of the particle knife in the water potential. The pressure difference exists and produces a rotational torque in the particulate knife, which can rotate about its axis. As a result, the fine particle knife rotates under the torque action, and when the micro jet nozzle moves horizontally at the same time, the fine particle knife rotates while moving, and the relative movement between the work table and the micro jet nozzle cuts the workpiece. To complete.

Specifically, when adopting the fourth type, fifth type and sixth type of movement method for the fine particle knife 1 and the cutting work table 3, in order to realize the rotation of the fine particle knife, the fine particle knife and the micro jet nozzle In addition, the following initial conditions must be satisfied.

In the above equation, k is the coefficient of action, r is the distance from the center of gravity of the fine particle knife to the point of action of the microjet at the fine particle knife, ρ is the density of the microjet liquid, and v ₀ is the microjet. Of the microjet nozzle, g is the acceleration of gravity, h is the height from the bottom of the microjet nozzle to the contact point of the microjet and the fine particle knife, f is the coefficient of static friction, m is The mass of the fine particle knife, θ is a depression angle between the connecting line from the point of action of the vertical component force of the microjet to the fine particle knife to the center of the circle and the vertical outer diameter of the fine particle knife.

  The initial conditions described above are derived from the following dynamic analysis. If the shape of the fine particle knife is set to be almost spherical and this fine particle knife is the object of research, the stress distribution is as shown in FIG.

により、

を得ることができる。 When stationary, the fine particle knife is in equilibrium,

By

Can be obtained.

により、もし、微粒子ナイフが回転すると、α＞0でなければならず、即ち、

である。式(2)、式(3)、式(4)を式(6)に代入して解くと、

が得られる。もし、F_yが存在するならば、sinθ−f ＞0でなければならず、即ち、

である。微粒子ナイフが回転する初期状態の時、F_x=0で、式(7)を下記のように単純化する。

Momentum moment theorem

If the fine particle knife rotates, α> 0 must be satisfied, ie

It is. Substituting equation (2), equation (3), and equation (4) into equation (6),

Is obtained. If F _y is present, sin θ−f> 0 must be satisfied, ie

It is. In the initial state where the fine particle knife rotates, with F _x = 0, Equation (7) is simplified as follows.

である。 When the jet strikes the particle knife, the pressure created on the surface of the particle knife is as shown in Figure 3

It is.

  As shown in FIG. 5, the hatched portion is the area where the jet is maximally acting on the fine particle knife, ie, a 1/4 spherical surface (though represented by a semicircle in the figure). The best effect.

で、式(12)を式(9)に代入すると、

になる。式(13)は微粒子ナイフが回転し、且つ切削加工を行う初期条件である。 If the area of action of the jet against the fine particle knife is S,

And substituting equation (12) into equation (9),

become. Expression (13) is an initial condition for rotating the fine particle knife and performing cutting.

Among them, π, r, ρ, g, f, and m are known, and k, v ₀ , h, and θ are changing parameters.

  Hereinafter, the relationship between k and θ is determined.

であることが分かる。
式(11)と式(14)とをまとめると、

となり、整理して

が得られる。kとθは互いに関連する変数で、ジェット、微粒子のサイズ、両者間の相対的な位置等に関連している。図4によると、θの値の範囲は

で、式(17)を式(16)に代入してkの値域は

となる。上述のように、微粒子ナイフが回転し、且つ切削を行う初期条件は

である。上述した式(1)から式(19)における符号の定義は下記の通りである。
F_x：微粒子ナイフに対する液体の水平合力
F_y：微粒子ナイフに対する液体の垂直合力
F_f：微粒子ナイフとワークピース表面との摩擦力
F_N：微粒子ナイフに対するワークピース表面の支持力
f：静摩擦係数
r：微粒子ナイフの半径
m：微粒子ナイフの質量
g：重力加速度
e：F_y作用点から微粒子ナイフ円心までの水平距離
J：微粒子ナイフの質量中心に対する回転慣性
P：微粒子ナイフの表面に対するジェットの圧力
h：ノズルの底部からジェット及び微粒子ナイフの接触点までの高さ
k：作用係数
S：微粒子ナイフに対するジェットの作用面積
ρ：ジェット液体の密度
θ：F_yの作用点と円心を結ぶ連結線と垂直方向の夾角
α：角加速度
v₀：ジェットのノズル出口における速度 When the jet strikes the fine particle knife, the projection of its working area (the area in contact with each other) is arcuate. Based on theoretical mechanics teaching material, the area S is

It turns out that it is.
Summarizing Equation (11) and Equation (14),

Be organized

Is obtained. k and θ are variables related to each other, and are related to the jet, the size of the fine particles, the relative position between the two, and the like. According to Fig. 4, the range of the value of θ is

Then, substituting equation (17) into equation (16), the range of k is

It becomes. As described above, the initial condition for rotating and cutting the fine particle knife is

It is. The definitions of the symbols in the above formulas (1) to (19) are as follows.
F _x : Horizontal resultant force of the liquid against the fine particle knife
F _y : normal force of liquid against fine particle knife
F _f : Frictional force between fine particle knife and workpiece surface
F _N : Support force of workpiece surface against fine particle knife
f: Static friction coefficient
r: Radius of the particle knife
m: Mass of fine particle knife
g: Gravity acceleration
e: Horizontal distance from F _y action point to the particle knife circle center
J: Rotational inertia with respect to the center of mass of the fine particle knife
P: Pressure of the jet against the surface of the fine particle knife
h: Height from the bottom of the nozzle to the contact point of the jet and fine particle knife
k: coefficient of action
S: active area of the jet with respect to particulate Knife [rho: the density of the jet liquid theta: F included angle connecting line and in the vertical direction connecting the working point and the circle center of the _y alpha: angular acceleration
v ₀ : Speed at the nozzle exit of the jet

  Therefore, if the presence of the rotational torque is maintained, the fine particle knife rotates without stopping, thereby realizing the rotation of the fine particle knife with water. In other words, the rotation of the fine particle knife produces a rotational torque by the jet pressure acting on the fine particle knife so that the wind turns the windmill, thereby rotating the fine particle knife. In fact, wind power is similar to the action on a windmill, and the particulate knife or “windmill” rotates due to the action of the “wind” generated by the jet stream. In addition, the rotation direction of the fine particle knife is determined by the initial position of the water potential and the shape of the fine particle knife itself (the initial position is the water of the fine particle knife at the moment when the water potential succeeds in collecting the fine particle knife. Position in potential).

  By adopting a method of micro-cutting by rotating the fine particle knife with water or sandwiching the fine particle knife with water, the micro beam can take away the energy generated in the cutting process in a timely manner, and thereby the heat-force coupling action Significantly reduce the generated non-uniform deformation field, and reduce the effect of shear deformation stress and shear deformation energy such as dimensional effects, inhomogeneous strain, and dislocation on the micro cutting deformation area, and improve cutting efficiency and quality ing.

  In the actual work process (particulate knife is rotating), we can select single crystal silicon as the experimental material, adopting the spherical structure particulate knife 1 as shown in Fig. 1 and Fig. 2. Then, experiment with micrometer cutting and nanometer cutting, respectively. Since single crystal silicon is a brittle material, there is a brittle-ductile transition when processing brittle materials based on the principle of fracture mechanics. Cutting the cutting edge changes the potential energy of the cutting edge atoms on the workpiece surface and results in a sudden increase in the atomic kinetic energy of the silicon. A phase transfer to a disordered state is caused. Such a disordered state is located below the front edge of the cutting edge and as it progresses in the cutting direction, a cavity is then formed at the front, which is driven by the energy provided by the high strain energy of the cutting edge. . When strain energy is converted to kinetic energy, the cavity expands and eventually develops into a distinct crack. The chemical reaction energy between the air and the crystal increases the kinetic energy of the atoms, intensifies the kinetics of the atoms, lengthens the distance between the atoms, extends the cracks, causes delamination in the material, and creates chips. Formed and completes the cutting process.

Claims (12)

A fine particle knife (1),
The microparticles knife (1) is provided with a knife body (11) Na Ifuheddo (12) and,
The knife head (12) is provided on the outer surface of the knife body (11) so as to protrude outward,
The geometric size of the knife head (12) is 10 nm to 1 mm,
The knife head (12) has a convex cusp shape,
In the knife body (11), there is provided a counterweight block that deflects the knife head (12) in the knife body (11) downward all the time.
A fine particle knife (1) characterized in that The outer surface of the knife body (11) is provided with a plurality of the knife heads (12) distributed at intervals.
The fine particle knife (1) according to claim 1, characterized in that The fine particle knife (1) according to claim 1, a cutting work table (3), a micro jet nozzle (4) located above the cutting work table (3), and a jet liquid on the micro jet nozzle (4) A cutting device comprising a hydraulic device for supplying
Among them, a relative linear movement is performed between the cutting work table (3) and the micro jet nozzle (4),
The micro jet nozzle (4) is provided with an injection chamber that can be connected to the liquid discharge line of the hydraulic device, and an injection port is installed at the bottom of the injection chamber, and the injection port forms an annular flow. ,
The particulate knife (1) is collected by the annular flow, and the outer diameter of the particulate knife (1) corresponds to the inner diameter of the annular flow;
The cutting apparatus characterized by the above-mentioned. The cutting work table (3) performs linear movement, and the micro jet nozzle (4) is fixed and does not move.
The cutting apparatus according to claim 3 , wherein: The cutting work table (3) is fixed and does not move, and the micro jet nozzle (4) performs linear movement,
The cutting apparatus according to claim 3 , wherein: The cutting work table (3) and the micro jet nozzle (4) perform linear movement along opposite directions at the same time.
The cutting apparatus according to claim 3 , wherein: The micro jet nozzle (4) includes a nozzle base (41) and a spray head (42),
The nozzle base (41) is provided with a through hole (411) penetrating along the axial direction,
The spray head (42) is connected to the bottom of the nozzle base (41),
The spray head (42) is provided with a plurality of injection small holes (421) distributed in a ring shape along the circumferential direction at a position corresponding to the through hole (411),
The plurality of injection small holes (421) form the injection port,
The cutting device according to any one of claims 3 to 6 , wherein The fine particle knife (1) according to claim 1 , a cutting work table (3), a micro jet nozzle (4) located above the cutting work table (3), and a jet liquid to the micro jet nozzle (4). A cutting device provided with a hydraulic device to supply ,
Relative linear movement is performed between the previous SL cutting worktable (3) and microjet nozzle (4),
The micro jet nozzle (4) is provided with an injection chamber that can be connected to the liquid discharge line of the hydraulic device, and an injection port is installed at the bottom of the injection chamber, and an annular flow is formed at the injection port. The inner diameter of the annular flow corresponds to the outer diameter of the fine particle knife (1),
And, the center of gravity line of the fine particle knife (1) is set away from the center line of the annular flow, the following initial conditions between the fine particle knife (1) and the microjet nozzle (4)

The filling,
Where k is the coefficient of action, r is the distance from the center of gravity of the particulate knife (1) to the point of action of the microjet in the particulate knife (1), ρ is the density of the microjet liquid, v ₀ is the velocity at the injection port of the microjet nozzle (4), g is the gravitational acceleration, h is the contact point between the microjet and the fine particle knife (1) from the bottom of the microjet nozzle (4) F is the coefficient of static friction, m is the mass of the fine particle knife (1), θ is the connecting line from the point of action of the vertical component force of the microjet to the fine particle knife (1) to the center of the circle. The depression angle between the vertical outer diameters of the fine particle knife (1),
The cutting apparatus characterized by the above-mentioned. The cutting work table (3) performs linear movement, and the micro jet nozzle (4) is fixed and does not move.
The cutting apparatus according to claim 8 , wherein The cutting work table (3) is fixed and does not move, and the micro jet nozzle (4) performs linear movement,
The cutting apparatus according to claim 8 , wherein The cutting work table (3) and the micro jet nozzle (4) perform linear movement along opposite directions at the same time.
The cutting apparatus according to claim 8 , wherein The micro jet nozzle (4) includes a nozzle base (41) and a spray head (42),
The nozzle base (41) is provided with a through hole (411) penetrating along the axial direction,
The spray head (42) is connected to the bottom of the nozzle base (41),
The spray head (42) is provided with a plurality of injection small holes (421) distributed in a ring shape along the circumferential direction at a position corresponding to the through hole (411),
The plurality of injection small holes (421) form the injection port,
The cutting apparatus according to any one of claims 8 to 11, wherein the cutting apparatus is characterized in that:

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