JP6069617B2 - 窒化アルミニウム部分を除去した素子 - Google Patents

窒化アルミニウム部分を除去した素子 Download PDF

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Publication number
JP6069617B2
JP6069617B2 JP2012170932A JP2012170932A JP6069617B2 JP 6069617 B2 JP6069617 B2 JP 6069617B2 JP 2012170932 A JP2012170932 A JP 2012170932A JP 2012170932 A JP2012170932 A JP 2012170932A JP 6069617 B2 JP6069617 B2 JP 6069617B2
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Japan
Prior art keywords
substrate
aln substrate
heterostructure
layer
light
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JP2012170932A
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English (en)
Japanese (ja)
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JP2013046062A (ja
JP2013046062A5 (https=
Inventor
クリストファー・エル・チュア
ブレント・エス・クルーサー
トーマス・ウンデラー
ノーブル・エム・ジョンソン
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Palo Alto Research Center Inc
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Palo Alto Research Center Inc
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01—Manufacture or treatment
    • H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
    • H10H20/018—Bonding of wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/536—Shapes of wire connectors the connected ends being ball-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/5363—Shapes of wire connectors the connected ends being wedge-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/851—Dispositions of multiple connectors or interconnections
    • H10W72/874—On different surfaces
    • H10W72/879—Bump connectors and bond wires
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]

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  • Led Devices (AREA)
  • Semiconductor Lasers (AREA)
  • Weting (AREA)
JP2012170932A 2011-08-25 2012-08-01 窒化アルミニウム部分を除去した素子 Expired - Fee Related JP6069617B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/217,844 US9064980B2 (en) 2011-08-25 2011-08-25 Devices having removed aluminum nitride sections
US13/217,844 2011-08-25

Publications (3)

Publication Number Publication Date
JP2013046062A JP2013046062A (ja) 2013-03-04
JP2013046062A5 JP2013046062A5 (https=) 2015-09-17
JP6069617B2 true JP6069617B2 (ja) 2017-02-01

Family

ID=47076081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012170932A Expired - Fee Related JP6069617B2 (ja) 2011-08-25 2012-08-01 窒化アルミニウム部分を除去した素子

Country Status (3)

Country Link
US (1) US9064980B2 (https=)
EP (1) EP2562826B1 (https=)
JP (1) JP6069617B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9444224B2 (en) * 2014-12-08 2016-09-13 Palo Alto Research Center Incorporated Nitride laser diode with engineered non-uniform alloy composition in the n-cladding layer
KR102742153B1 (ko) * 2016-10-21 2024-12-12 삼성전자주식회사 갈륨 질화물 기판의 제조 방법
US10170312B2 (en) * 2017-04-20 2019-01-01 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor substrate and manufacturing method of the same
WO2019079239A1 (en) * 2017-10-16 2019-04-25 Crystal Is, Inc. ELECTROCHEMICAL REMOVAL OF ALUMINUM NITRIDE SUBSTRATES FOR ELECTRONIC AND OPTOELECTRONIC DEVICES
US10483430B1 (en) 2018-05-01 2019-11-19 Facebook Technologies, Llc Micron-sized light emitting diode designs
JP7570424B2 (ja) * 2020-09-17 2024-10-21 日機装株式会社 窒化物半導体紫外線発光素子

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5739945A (en) 1995-09-29 1998-04-14 Tayebati; Parviz Electrically tunable optical filter utilizing a deformable multi-layer mirror
FR2765347B1 (fr) 1997-06-26 1999-09-24 Alsthom Cge Alcatel Reflecteur de bragg en semi-conducteur et procede de fabrication
US6841808B2 (en) * 2000-06-23 2005-01-11 Toyoda Gosei Co., Ltd. Group III nitride compound semiconductor device and method for producing the same
US7638346B2 (en) * 2001-12-24 2009-12-29 Crystal Is, Inc. Nitride semiconductor heterostructures and related methods
US6831302B2 (en) * 2003-04-15 2004-12-14 Luminus Devices, Inc. Light emitting devices with improved extraction efficiency
FR2859312B1 (fr) 2003-09-02 2006-02-17 Soitec Silicon On Insulator Scellement metallique multifonction
TW200610150A (en) * 2004-08-30 2006-03-16 Kyocera Corp Sapphire baseplate, epitaxial substrate and semiconductor device
US20070045638A1 (en) * 2005-08-24 2007-03-01 Lumileds Lighting U.S., Llc III-nitride light emitting device with double heterostructure light emitting region
TWI307175B (en) * 2006-01-11 2009-03-01 Ind Tech Res Inst Non-substrate light emitting diode and fabrication method thereof
US7452739B2 (en) 2006-03-09 2008-11-18 Semi-Photonics Co., Ltd. Method of separating semiconductor dies
US7560364B2 (en) * 2006-05-05 2009-07-14 Applied Materials, Inc. Dislocation-specific lateral epitaxial overgrowth to reduce dislocation density of nitride films
US7872272B2 (en) * 2006-09-06 2011-01-18 Palo Alto Research Center Incorporated Nitride semiconductor ultraviolet LEDs with tunnel junctions and reflective contact
US7700962B2 (en) * 2006-11-28 2010-04-20 Luxtaltek Corporation Inverted-pyramidal photonic crystal light emitting device
TWI370555B (en) 2006-12-29 2012-08-11 Epistar Corp Light-emitting diode and method for manufacturing the same
CN101652832B (zh) * 2007-01-26 2011-06-22 晶体公司 厚的赝晶氮化物外延层
US8110425B2 (en) * 2007-03-20 2012-02-07 Luminus Devices, Inc. Laser liftoff structure and related methods
US20080303033A1 (en) 2007-06-05 2008-12-11 Cree, Inc. Formation of nitride-based optoelectronic and electronic device structures on lattice-matched substrates
US20090278233A1 (en) * 2007-07-26 2009-11-12 Pinnington Thomas Henry Bonded intermediate substrate and method of making same
US20110018104A1 (en) 2008-01-16 2011-01-27 Toru Nagashima METHOD FOR PRODUCING A LAMINATED BODY HAVING Al-BASED GROUP-III NITRIDE SINGLE CRYSTAL LAYER, LAMINATED BODY PRODUCED BY THE METHOD, METHOD FOR PRODUCING Al-BASED GROUP-III NITRIDE SINGLE CRYSTAL SUBSTRATE EMPLOYING THE LAMINATED BODY, AND ALUMINUM NITRIDE SINGLE CRYSTAL SUBSTRATE
US7960743B2 (en) * 2008-12-05 2011-06-14 Jds Uniphase Corporation Multi-electrode light emitting device
US7749782B1 (en) * 2008-12-17 2010-07-06 Palo Alto Research Center Incorporated Laser roughening to improve LED emissions
US8124993B2 (en) * 2008-12-17 2012-02-28 Palo Alto Research Center Incorporated Selective decomposition of nitride semiconductors to enhance LED light extraction
US8227791B2 (en) * 2009-01-23 2012-07-24 Invenlux Limited Strain balanced light emitting devices
US8178427B2 (en) * 2009-03-31 2012-05-15 Commissariat A. L'energie Atomique Epitaxial methods for reducing surface dislocation density in semiconductor materials
TW201118946A (en) * 2009-11-24 2011-06-01 Chun-Yen Chang Method for manufacturing free-standing substrate and free-standing light-emitting device

Also Published As

Publication number Publication date
JP2013046062A (ja) 2013-03-04
EP2562826B1 (en) 2017-06-28
US9064980B2 (en) 2015-06-23
EP2562826A1 (en) 2013-02-27
US20130049005A1 (en) 2013-02-28

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