JP6058610B2 - 多結晶シリコン破砕物、多結晶シリコン破砕物の製造方法および多結晶シリコン塊破砕装置 - Google Patents

多結晶シリコン破砕物、多結晶シリコン破砕物の製造方法および多結晶シリコン塊破砕装置 Download PDF

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JP6058610B2
JP6058610B2 JP2014210124A JP2014210124A JP6058610B2 JP 6058610 B2 JP6058610 B2 JP 6058610B2 JP 2014210124 A JP2014210124 A JP 2014210124A JP 2014210124 A JP2014210124 A JP 2014210124A JP 6058610 B2 JP6058610 B2 JP 6058610B2
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polycrystalline silicon
crushed material
particle size
crushed
crushing
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Japanese (ja)
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JP2016079053A5 (enExample
JP2016079053A (ja
Inventor
一博 川口
一博 川口
藤井　正美
正美 藤井
近藤　学
学 近藤
美文 三戸
美文 三戸
信昭 義松
信昭 義松
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Tokuyama Corp
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Tokuyama Corp
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Priority to JP2014210124A priority Critical patent/JP6058610B2/ja
Application filed by Tokuyama Corp filed Critical Tokuyama Corp
Priority to US15/518,637 priority patent/US10307763B2/en
Priority to KR1020177007285A priority patent/KR101817047B1/ko
Priority to CN201580054867.8A priority patent/CN106794992B/zh
Priority to EP15850909.1A priority patent/EP3208236B9/en
Priority to MYPI2017000556A priority patent/MY182043A/en
Priority to PCT/JP2015/078723 priority patent/WO2016060076A1/ja
Priority to SG11201703107QA priority patent/SG11201703107QA/en
Priority to TW104133472A priority patent/TWI686352B/zh
Publication of JP2016079053A publication Critical patent/JP2016079053A/ja
Publication of JP2016079053A5 publication Critical patent/JP2016079053A5/ja
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Publication of JP6058610B2 publication Critical patent/JP6058610B2/ja
Priority to US16/385,816 priority patent/US11590509B2/en
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JP2014210124A 2014-10-14 2014-10-14 多結晶シリコン破砕物、多結晶シリコン破砕物の製造方法および多結晶シリコン塊破砕装置 Active JP6058610B2 (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP2014210124A JP6058610B2 (ja) 2014-10-14 2014-10-14 多結晶シリコン破砕物、多結晶シリコン破砕物の製造方法および多結晶シリコン塊破砕装置
SG11201703107QA SG11201703107QA (en) 2014-10-14 2015-10-09 Polycrystalline silicon fragment, method for manufacturing polycrystalline silicon fragment, and polycrystalline silicon block fracture device
CN201580054867.8A CN106794992B (zh) 2014-10-14 2015-10-09 多晶硅破碎物、其制造方法及多晶硅块破碎装置
EP15850909.1A EP3208236B9 (en) 2014-10-14 2015-10-09 Polycrystalline silicon fragment, method for manufacturing polycrystalline silicon fragment, and polycrystalline silicon block fracture device
MYPI2017000556A MY182043A (en) 2014-10-14 2015-10-09 Polycrystalline silicon fragment, method for manufacturing polycrystalline silicon fragment, and polycrystalline silicon block fracture device
PCT/JP2015/078723 WO2016060076A1 (ja) 2014-10-14 2015-10-09 多結晶シリコン破砕物、多結晶シリコン破砕物の製造方法および多結晶シリコン塊破砕装置
US15/518,637 US10307763B2 (en) 2014-10-14 2015-10-09 Polycrystalline silicon fragment, method for manufacturing polycrystalline silicon fragment, and polycrystalline silicon block fracture device
KR1020177007285A KR101817047B1 (ko) 2014-10-14 2015-10-09 다결정 실리콘 파쇄물, 다결정 실리콘 파쇄물의 제조 방법 및 다결정 실리콘 덩어리 파쇄 장치
TW104133472A TWI686352B (zh) 2014-10-14 2015-10-13 多結晶矽破碎物、多結晶矽破碎物的製造方法及多結晶矽塊破碎裝置
US16/385,816 US11590509B2 (en) 2014-10-14 2019-04-16 Method for manufacturing polycrystalline silicon fragment and polycrystalline silicon block fracture device

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JP2014210124A JP6058610B2 (ja) 2014-10-14 2014-10-14 多結晶シリコン破砕物、多結晶シリコン破砕物の製造方法および多結晶シリコン塊破砕装置

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JP2016079053A5 JP2016079053A5 (enExample) 2016-12-08
JP6058610B2 true JP6058610B2 (ja) 2017-01-11

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW202440236A (zh) * 2023-02-14 2024-10-16 日商德山股份有限公司 多晶矽破碎混合物的風選裝置及使用該裝置從多晶矽破碎混合物產出塊狀物、片狀物或粉狀物的製造方法
CN119406533A (zh) * 2024-12-19 2025-02-11 乐山新天源太阳能科技有限公司 一种多晶硅破碎料包装防水分残留水淬系统

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JPH06144822A (ja) * 1992-10-30 1994-05-24 Tonen Chem Corp 高純度微細シリコン粒子の製造方法及び高純度微細シリコン粒子を用いた高純度多結晶シリコンの製造方法
JP4658453B2 (ja) * 2002-11-14 2011-03-23 ヘムロック・セミコンダクター・コーポレーション 流動性チップ、それを製造する方法及び使用する方法並びにその方法の実施に用いる装置
US7291222B2 (en) * 2004-06-18 2007-11-06 Memc Electronic Materials, Inc. Systems and methods for measuring and reducing dust in granular material
DE102004048948A1 (de) * 2004-10-07 2006-04-20 Wacker Chemie Ag Vorrichtung und Verfahren zum kontaminationsarmen, automatischen Brechen von Siliciumbruch
DE102010039752A1 (de) * 2010-08-25 2012-03-01 Wacker Chemie Ag Polykristallines Silicium und Verfahren zu dessen Herstellung

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