JP6028574B2 - Shape measuring device, structure manufacturing system, and structure manufacturing method - Google Patents

Description

  The present invention relates to a shape measuring device, a structure manufacturing system, and a structure manufacturing method.

  A measuring device capable of measuring the surface shape of a recess such as a hole or a groove in a non-contact manner is known (for example, described in Patent Document 1). These measuring devices, for example, a light transmitting unit that transmits light in the depth direction of the hole, a conversion unit that converts the direction of the light in a direction substantially orthogonal to the depth direction of the hole, and the direction changed in the conversion unit And a detector that detects light reflected from the inner surface of the hole. These measuring devices can measure the surface shape of the hole based on, for example, an image of the inner surface of the hole detected by the detection unit.

US Pat. No. 5,895,927

However, the following problems exist in the conventional technology as described above.
When measuring a recess having a bottom, there is a possibility that a part of the probe collides with the bottom when a probe such as a probe is inserted into the recess. Further, not only the bottom part but also a part of the measuring element may collide with the side wall of the recess. These collisions can adversely affect measurement accuracy.

  The present invention has been made in consideration of the above points, and provides a shape measuring device, a structure manufacturing system, and a structure manufacturing method capable of suppressing a decrease in measurement accuracy related to information on the inner surface shape of a recess. With the goal.

  According to a first aspect of the present invention, there is provided a shape measuring device for measuring the shape of the surface of a hole, the image sensor for irradiating the surface of the hole with light and detecting the light reflected by the surface of the hole. Including the shape acquisition unit including the signal, the calculation unit that calculates the shape of the surface of the hole using the signal detected by the shape acquisition unit, and the contact with the surface of the hole are arranged to be inserted into the optical path of the shape acquisition unit A shape measuring device including a contact detection unit is provided.

  According to the second aspect of the present invention, a molding apparatus that molds a structure based on design information related to the shape of the structure, and a shape measurement of the first aspect that measures the shape of the structure molded by the molding apparatus. There is provided a structure manufacturing system including an apparatus and a control device that compares design information with shape information indicating the shape of the structure measured by the shape measuring device.

  According to the third aspect of the present invention, the structure is molded based on the design information related to the shape of the structure, and the shape of the molded structure is measured by the shape measuring apparatus according to the first aspect. And a method of manufacturing the structure including comparing the shape information indicating the shape of the structure measured by the shape measuring apparatus with the design information.

  In this invention, the fall of the measurement precision regarding the information of the inner surface shape of a recessed part can be suppressed, and the improvement of a shape measurement precision can be aimed at.

The figure which shows the external appearance of 1 A of shape measuring apparatuses which concern on 1st Embodiment. The figure which shows schematic structure of the same shape measuring apparatus 1A. The figure which shows operation | movement of the same shape measuring apparatus 1A. It is a conceptual diagram which shows the example of a captured image. The flowchart in case the detection part 40 becomes a light-shielding position. The figure which shows the other form of the detection part. The figure which shows the other form of the detection part. The figure which shows the shape measuring apparatus which concerns on 2nd Embodiment. The figure which shows the shape measuring apparatus which concerns on 3rd Embodiment. The figure which shows the shape measuring apparatus which concerns on 4th Embodiment. The block block diagram of the structure manufacturing system 200. FIG. The flowchart which showed the flow of the process by the structure manufacturing system 200. FIG.

Embodiments of a shape measuring apparatus, a structure manufacturing system, and a structure manufacturing method according to the present invention will be described below with reference to FIGS.
In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be described with reference to this XYZ orthogonal coordinate system. The Z-axis direction is set, for example, in the vertical direction, and the X-axis direction and the Y-axis direction are set, for example, in directions that are parallel to the horizontal direction and orthogonal to each other. Further, the rotation (inclination) directions around the X axis, Y axis, and Z axis are the θX, θY, and θZ directions, respectively.

(First embodiment)
FIG. 1 is a diagram showing an appearance of a shape measuring apparatus 1A according to the first embodiment. FIG. 2 is a diagram showing a schematic configuration of the shape measuring apparatus 1A of the present embodiment. The shape measuring apparatus 1A measures the three-dimensional shape of the object M to be measured using, for example, a light cutting method.

  The shape measuring apparatus 1A includes a shape information acquisition unit (shape acquisition unit) 5 including a moving device 2, a control unit 4, and an optical probe 3. In the shape measuring apparatus 1 </ b> A, the moving device 2 holds the object M, and the optical probe 3 images the object M held by the moving device 2. The moving device 2 relatively moves the object M and the optical probe 3 so that the imaging range (field of view) of the optical probe 3 scans the object M. The control device 4 controls each part of the shape measuring device 1 </ b> A and acquires shape information of the object M based on the imaging result of the optical probe 3.

  In the present embodiment, the shape information is information indicating at least one of the shape, size, uneven distribution, surface roughness, and position (coordinates) of a point on the measurement target surface regarding at least a part of the object M to be measured. including. The shape measuring apparatus 1A can acquire, for example, shape information related to the hole (hole) Ma of the object M to be measured. The hole of the object M to be measured may be a through hole or a hole having a bottom.

  The moving device 2 is a stage device that can hold an object M to be measured, for example. The moving device 2 includes a first holding unit 7 that holds the object M and a second holding unit 8 that holds the optical probe 3. In the moving device 2, the second holding unit 8 holding the optical probe 3 can be moved relative to the first holding unit 7 holding the object M.

  The first holding unit 7 of the present embodiment holds the object M and can rotate in the θZ direction. The object M to be measured is held by the first holding unit 7 when the inner side of the hole Ma is measured, for example, with the opening of the hole Ma facing the + Z side. In the present embodiment, when the hole portion penetrates the object, the depth direction (extending direction) of the hole portion connects one opening of the hole portion and the other opening along the inside of the hole portion. The direction. When the hole Ma does not penetrate the object M, the depth direction of the hole is a direction connecting the opening and the bottom of the hole along the inside of the hole. For example, the depth direction of the hole Ma of the object M is substantially parallel to the Z-axis direction when the object M is held by the first holding unit 7 with the opening of the hole Ma facing the + Z side (upward). It is.

  The second holding unit 8 of the present embodiment is disposed on the + Z side (upward) with respect to the first holding unit 7. The second holding portion 8 is attached so that the longitudinal direction of the optical probe 3 and the Z-axis direction substantially coincide with each other. The second holding unit 8 holds the optical probe 3 and can move in each of the X-axis direction, the Y-axis direction, and the Z-axis direction. When the second holding portion 8 moves in the Z-axis direction during measurement of the hole portion Ma, the optical probe 3 moves forward and backward with respect to the formation direction of the hole portion Ma formed in the object M. The moving device 2 includes the second holding unit 8 so that at least a part of the optical probe 3 held by the second holding unit 8 is inserted into the hole Ma of the object M held by the first holding unit. Can be moved.

  As shown in FIG. 2, the moving device 2 includes a drive unit 10 and a position information acquisition unit 11. The drive unit 10 includes an actuator such as an electric motor, and drives the first holding unit 7 and the second holding unit 8. The position information acquisition unit 11 includes a position measurement sensor such as an encoder, and acquires position information regarding the position of the optical probe 3.

In the present embodiment, the control device 4 controls each part of the shape measuring device 1 </ b> A, and stores the position information acquired by the movement control unit 6 that controls the driving unit 10 of the moving device 2 and the position information acquisition unit 11. A storage device 9 and an arithmetic device (arithmetic unit) 12.
For example, the control device 4 controls the relative position between the optical probe 3 and the object M by controlling the driving unit 10 of the moving device 2. In addition, the control device 4 controls the optical probe 3 to cause the optical probe 3 to image the measurement region Ma (the inner surface of the hole) on the object M.

  Moreover, the control apparatus 4 is provided with the calculating apparatus 12 for acquiring the shape information of a measuring object. The arithmetic device 12 acquires the position information of the optical probe 3 from the position information acquisition unit 11 of the moving device 2, and acquires data (captured image data) indicating an image obtained by imaging the measurement region from the optical probe 3. The calculation device 12 calculates shape information related to the three-dimensional shape of the measurement target by associating the position of the surface of the object M obtained from the captured image data corresponding to the position of the optical probe 3 with the position of the optical probe 3. And get.

  The control device 4 of the present embodiment includes an interface capable of executing communication between a computer system having a CPU and the like and a device external to the computer system. The control device 4 can execute at least one of various processes such as image processing, interpolation processing, statistical processing, and display processing related to the measurement result.

  The control device 4 may include a logic circuit such as an ASIC that executes various processes required for controlling each part of the shape measuring device 1A, and may not include a computer system. The control device 4 may be connected to an input device that can input a signal to the control device 4. This input device may be one type or two or more types of communication devices capable of inputting data from input devices such as a keyboard and a mouse, or a device external to the computer system. The control device 4 may include a display device such as a liquid crystal display, or may be connected to the display device. The control device 4 may be a device external to the shape measuring device 1A.

  The shape information acquisition unit 5 includes the optical probe 3, the arithmetic device 12 provided in the control device 4, and a detection unit (contact detection unit) 40. In the present embodiment, the optical probe 3 is an optical device for shape measurement, and is incident on the measurement region Ma on the object M to be measured (in this embodiment, the inner peripheral surface (front surface) of the hole) by epi-illumination. Take an image. The optical probe 3 shown in FIG. 2 projects (irradiates) the illumination light beam L1 emitted from the light source 14 onto the measurement region on the object M via the imaging optical system 19 and the reflecting member 16, thereby reflecting the measurement region. An illumination optical system IL, an imaging optical system 19, a reflecting member (tip optical member) 16, an imaging unit 17, and a lens barrel 25 are provided.

  The imaging unit 17 (imaging device) includes an imaging element 18. The image sensor 18 is constituted by, for example, a CCD sensor or a CMOS sensor. The image sensor 18 includes, for example, a photodiode that is disposed in each of a plurality of pixels and converts incident light into electric power (charge), and a readout circuit that reads out charges generated by the photodiode. For example, the photodiodes are two-dimensionally arranged on the light receiving surface 18 a of the image sensor 18.

The illumination optical system IL irradiates an illumination light beam L1 onto an object surface 19a (described later). The illumination optical system IL includes a light source 14 and a light guide member 20, and a propagation path 15 through which the illumination light beam L1 emitted from the light source 14 is propagated. I have.
In the present embodiment, the light source 14 includes a laser diode (solid light source), and emits laser light as the illumination light beam L1. The light source 14 may include a solid light source such as a light emitting diode (LED), or may include a lamp light source such as a high pressure mercury lamp.

  The light guide member 20 guides the illumination light beam L1 emitted from the light source to the imaging optical system 19, and includes a half mirror, for example, and is disposed in the optical path between the imaging element 18 and the imaging optical system 19. Yes. The light guide member 20 has a surface 20a disposed at a position where the illumination light beam L1 emitted from the light source 14 enters. The surface 20a is inclined with respect to the optical axis AX (described later) of the imaging optical system 19. The angle formed by the surface 20a and the optical axis AX of the imaging optical system 19 is set to 45 °, for example.

  The illumination light beam L1 emitted from the light source 14 is incident on the surface 20a of the light guide member 20, and at least part of the light is reflected by the surface 20a and is incident on the imaging optical system 19. The illumination light beam L1 incident on the imaging optical system 19 via the light guide member 20 travels along the optical axis AX of the imaging optical system 19. In the present embodiment, the propagation path 15 includes the optical path of the illumination light beam L <b> 1 in the imaging optical system 19. That is, the optical axis AX of the imaging optical system 19 is set on the propagation path 15.

  The imaging optical system 19 forms an object surface 19a conjugate with the light receiving surface 18a (image surface) of the image sensor 18. In the present embodiment, the object plane 19a includes a plane that is substantially orthogonal to the advancing / retreating direction (Z-axis direction) of the optical probe 3. A light beam emitted from each point on the object surface 19a (hereinafter referred to as an imaging light beam L2) converges on each point on the light receiving surface 18a of the image sensor 18.

  The imaging optical system 19 of the present embodiment is a refractive optical system and includes a plurality of optical members (lenses). At least one of the optical members of the imaging optical system 19 is an axially symmetric optical member. Here, the symmetry axis (center axis) of the optical member is referred to as the optical axis AX of the imaging optical system 19. The imaging optical system 19 may be either a reflective optical system or a catadioptric optical system.

  The reflecting member 16 is formed of, for example, a conical prism mirror having a reflecting surface 16a formed around the optical axis AX, and the reflecting surface 16a is formed at a position where the illumination light beam L1 passing through the imaging optical system 19 is incident. Has been placed. As the reflective surface 16a, for example, a reflective film formed by a vapor deposition method or the like is used. In addition, the optical path of the imaging optical system 19 may be formed in the reflecting member 16.

  The imaging element 18, the imaging optical system 19, the reflection member 16, and the light guide member 20 are held by a lens barrel 25. In the lens barrel 25, a direction parallel to the optical axis AX (Z-axis direction) of the imaging optical system 19 is a long direction, and a direction orthogonal to the optical axis AX (XY direction) is a short direction. The lens barrel 25 is provided so as to surround the propagation path 15, and at least a portion around the propagation path 15 is a cylindrical shape that is axisymmetric with respect to the optical axis AX of the imaging optical system 19.

  The lens barrel 25 emits from the region including the object surface 19a, the optical path of the illumination light beam L1 reflected by the reflecting member 16 (reflecting surface 16a) and directed to the measurement region Ma, and the respective points on the object surface 19a, and the imaging optics. The range positioned in the optical path of the imaging light beam L2 toward the system 19 is a passing portion 25b through which the illumination light beam L1 and the imaging light beam L2 can pass (transmit), and the other range has the illumination light beam L1 and the connection. The light shielding portion 25c shields the image light beam L2, and is configured to suppress adverse effects due to stray light.

  The detection unit 40 detects contact between the shape information acquisition unit 5 (optical probe 3) and the measurement region Ma (object M), and includes a cylindrical member 41 and a support member 42. The cylindrical member 41 is made of a material that reflects the illumination light beam L1, and is formed around the optical axis AX and includes a cylindrical portion 43 and a bottom portion 44. The cylinder portion 43 is formed with a diameter so that a gap is formed between the outer periphery of the lens barrel 25 and a gap is also formed between the cylinder portion 43 and the measurement region Ma. The bottom portion 44 is disposed so as to close the end portion (lower end portion) on the −Z side of the cylindrical portion 43. On the surface (lower surface) on the −Z side of the bottom portion 44, a protrusion 45 formed in a hemispherical shape with an elastic material such as rubber is provided on the optical axis AX in order to alleviate the impact at the time of contact with the object M. It has been. In the present embodiment, one protrusion 45 is provided, but a plurality of protrusions 45 may be provided. Further, the bottom 44 may have the function of the protrusion 45 without providing the protrusion 45.

  The support member 42 suspends and supports the tube member 41 coaxially with the lens barrel 25 so as to be movable in the Z-axis direction. In the present embodiment, the support member 42 is formed of an elastic body such as a coil spring. Yes. The length of the support member 42 is such that when the cylinder member 41 suspended from the lens barrel 25 is not in contact with the object M, the cylinder portion 43 is separated from the object plane 19a to the −Z side as shown in FIG. Thus, when the illumination light beam L1 toward the measurement region Ma is not shielded (hereinafter referred to as a non-shielding position), and the cylindrical member 41 suspended from the lens barrel 25 comes into contact with the bottom of the object M, FIG. As shown, the cylindrical portion 43 is inserted between the object surface 19a and the measurement region Ma in the optical path of the illumination light beam L1, and is a position for shielding the illumination light beam L1 toward the measurement region Ma (hereinafter referred to as a light shielding position). Is set to a length.

  Next, an operation of measuring the shape of the measurement region Ma in the object M by the shape measuring apparatus 1A having the above configuration will be described with reference to FIG. FIG. 4 is a conceptual diagram illustrating an example of a captured image captured by the image sensor 18.

First, the case where the detection unit 40 is in the non-light-shielding position (see FIG. 2) will be described.
After the optical probe 3 is inserted into the hole of the object M, the illumination light beam L1 emitted from the light source 14 and reflected by the surface 20a of the light guide member 20 enters the imaging optical system 19. The illumination light beam L1 emitted from the imaging optical system 19 and reflected by the reflecting surface 16a of the reflecting member 16 propagates along the object surface 19a and is reflected and scattered by the measurement region Ma. The imaging light beam L2 reflected and scattered in the measurement region Ma enters the imaging optical system 19 through the passage portion 25b of the lens barrel 25. At least a part of the imaging light beam L2 incident on the imaging optical system 19 enters the light receiving surface 18a of the image sensor 18 through the light guide member 20 (half mirror).

  Here, since the light receiving surface 18a and the object surface 19a are optically conjugate, the image of the intersection line 26 between the object surface 19a and the surface that is the measurement region Ma of the object M is focused on the light receiving surface 18a. It will be. Therefore, an intersection line 26 between the object surface 19a and the surface of the object M becomes a bright line 27 in the captured image Im shown in FIG. Each point on the bright line 27 corresponds one-to-one with any point on the intersection line 26. For example, when the intersection line 26 has an annular shape, the bright line 27 has an annular shape. 2 calculates the position information of each point on the bright line 27 in the captured image Im as shown in FIG. 4, thereby obtaining the position information of the point on the object M corresponding to each point. calculate.

The arithmetic unit 12 calculates the position information of each point on the bright line 27 of the captured image Im as described above, so that the portion of the surface of the object M that intersects the object plane 19a (intersection line 26 shown in FIG. 2). ) Position information is calculated. In addition, the arithmetic unit 12 similarly responds to the position of the optical probe 3 in the Z direction (hereinafter referred to as the Z position) for each of a plurality of captured images captured while the optical probe 3 changes the position in the Z direction. Position information of the surface of the object M in the measurement region Ma is calculated. The arithmetic unit 12 associates the position of the optical probe 3 with the position information of the object M calculated based on the captured image captured at this position, thereby indicating the shape information indicating the three-dimensional shape of the object M. To get.
The arithmetic device 12 may be arranged separately from the shape measuring device 1A. In this case, the calculation device 12 may be a calculation device such as a PC disposed in the shape measuring device 1A. Further, the arithmetic device 12 may be arranged integrally with the shape device 1A. For example, the arithmetic unit 12 and the optical probe 3 may be arranged integrally.
The calculation device 12 calculates position information of each point of the bright line 27 in the captured image Im, but the target of the calculation is not limited to the captured image Im. For example, a part of signals detected and detected by the image sensor 18 may be used. In this case, only the information related to the bright line 27 is extracted from the image sensor 18, and the information around the other bright lines 27 is not extracted, but only the extracted information is used. The position information may be calculated.

  Next, the case where the detection unit 40 is in the light shielding position (see FIG. 3) will be described with reference to the flowchart shown in FIG. As described above, the optical probe 3 is inserted into the hole, and the measurement area Ma that is the test surface is imaged at a predetermined Z position (step S101), and the surface position information is acquired (step S102). The probe 3 is sequentially and repeatedly moved to the predetermined amount −Z side, but information (X position, Y position, Z position) of each imaging position is stored in the storage device 9.

  When the detection unit 40 comes into contact with the object M when the optical probe 3 is lowered to the −Z side, as shown in FIG. 3, the lowering of the cylindrical member 41 is stopped while the lens barrel 25 is lowered. Therefore, the cylindrical member 41 moves relative to the + Z side against the elastic restoring force of the support member 42 with respect to the lens barrel 25, and the cylindrical portion 43 is in contact with the object surface 19a (the reflecting member 16) in the optical path of the illumination light beam L1. It is inserted between the measurement area Ma and becomes a position for shielding the illumination light beam L1 toward the measurement area Ma.

  At this time, the illumination light beam L1 reflected by the reflecting surface 16a of the reflecting member 16 and traveling toward the measurement region Ma propagates along the object surface 19a and is reflected and scattered by the inner peripheral surface of the cylindrical portion 43. The imaging light beam L2 reflected and scattered by the inner peripheral surface of the cylindrical portion 43 enters the imaging optical system 19 through the passage portion 25b of the lens barrel 25. At least a part of the imaging light beam L2 incident on the imaging optical system 19 enters the light receiving surface 18a of the image sensor 18 through the light guide member 20 (half mirror).

In this case, the image of the intersection line 26 ′ between the object surface 19 a and the inner peripheral surface of the cylindrical portion 43 is in focus on the light receiving surface 18 a, but in the captured image Im, the inner peripheral surface of the cylindrical portion 43. Corresponds to the diameter of the bright line 27 ′ having a diameter smaller than that of the surface of the object M.
Accordingly, when the calculation device 12 calculates the position information of each point on the bright line 27 ′ of the captured image Im and obtains a result of changing the diameter to be smaller than the bright line 27, the calculation device 12 determines that the cylindrical member 41, the object M, and Is detected (step S103), and a warning signal is output. As the warning signal, for example, voice can be used. Thereby, the contact between the cylindrical member 41 and the object M can be detected without observing the captured image.

  Further, when detecting the contact between the cylindrical member 41 and the object M, the arithmetic device 12 obtains a movement route to the contact from information on each imaging position stored in the storage device 9, and based on the movement route, A save route is generated as a route generation unit (step S104) and stored in the storage device 9. Then, the moving device 2 retracts the optical probe 3 from the hole of the object M based on the stored retract path (step S105).

  As described above, in the present embodiment, the detection unit 40 that detects the contact between the detection unit 40 and the object surface Ma of the object M is provided. In the present embodiment, the detection unit 40 and the object surface Ma are in contact with each other before the optical probe 3 and the object surface Ma are in contact with each other. Therefore, the contact between the optical probe 3 and the object Ma can be suppressed by detecting the contact between the detection unit 40 and the object surface Ma. Therefore, damage to the optical probe 3 due to contact between the optical probe 3 and the object Ma can be suppressed. In the present embodiment, the imaging element 18 captures the fact that the cylindrical member 41 supported so as to be movable in the Z direction with respect to the lens barrel 25 shields the illumination light beam from contact between the detection unit 40 and the object plane Ma. Detect based on the results. In addition, when the optical probe 3 moves in the Z-axis direction, the protrusion 45 of the detection unit 40 is provided near the object M in the movement direction. Contact with the object surface Ma. Further, in the present embodiment, the protrusion 45 is made of an elastic material that is more elastic than the object surface Ma of the object M, so that damage to the object M due to contact of the protrusion 45 can be suppressed. In the present embodiment, when the detection unit 40 and the object plane Ma are in contact with each other, the optical path of the optical probe changes, and the imaging result of the optical probe changes. Therefore, since the imaging result of the optical probe changes due to the contact of the detection unit 40, it is not necessary to directly detect the contact between the detection unit 40 and the object surface Ma. Therefore, it is not necessary to provide a mechanism for detecting contact with the object surface Ma using only the detection unit 40. Therefore, it is not necessary to provide wiring for a mechanism for detecting contact of the detection unit 40 in this embodiment.

  Furthermore, in this embodiment, the arithmetic unit 12 can store the movement path of the optical probe 3. Therefore, based on the stored movement path at the time of measuring the object M, the retreat path when the optical probe 3 is retreated from the object M can be calculated. Thereby, it is possible to calculate the retreat route. For example, even if the optical probe 3 and the object M are in contact with each other during measurement, a movement path that suppresses contact with the object M can be calculated from the stored movement path. Further, for example, the movement path stored at the time of measuring the object M may be used for an object M different from the object M measured at the time of storing. For example, the object M is a case where a plurality of objects M having the same shape such as mass-produced products are measured.

  In the above-described embodiment, the configuration in which the cylindrical member 41 of the detection unit 40 shields the illumination light beam L1 over the entire circumference at the time of contact with the object M is illustrated, but the present invention is not limited to this. 6 (A) and 6 (B), a plurality of groove portions 43a extending in the radial direction on the + Z side surface of the cylindrical portion 43 of the cylindrical member 41 are spaced apart around the optical axis AX (four in FIG. 6). 6B, when the cylindrical member 41 contacts the object M and moves relatively in the Z direction, the illumination light beam L1 that has passed through the groove 43a is not shielded and is not shielded, as shown in FIG. 6B. The other illumination light beam L1 may be reflected by the cylindrical member 41.

  In this configuration, as shown in FIG. 6C, in the captured image Im, the bright line 27 corresponding to the surface of the object M and the bright line 27 ′ corresponding to the inner peripheral surface of the cylindrical portion 43 correspond to the groove 43a. Are alternately arranged around the optical axis AX. Therefore, in this configuration, the bright lines 27 and 27 ′ having different diameters are present in the same image. For example, even when the diameter difference between the bright lines 27 and 27 ′ is small, the change in the image is reliably detected. Thus, it is possible to detect contact between the detection unit 40 and the object M.

In addition to the configuration in which the captured image of the imaging element 18 is changed by the light shielding / non-shielding of the illumination light beam L1 at the time of contact between the detection unit 40 and the object M, the difference in transmittance of the detection unit 40 with respect to the illumination light beam L1. It is also possible to adopt a configuration that causes a change in the captured image.
Specifically, as shown in FIGS. 7A and 7B, the cylindrical portion 43 of the cylindrical member 41 has a transmission portion 43b that transmits the illumination light beam L1 at a transmittance of about 100%, and a transmittance of about 50%. The transmission part 43c that transmits the illumination light beam L1 is arranged around the optical axis AX, for example, at intervals of 90 °.

  In this configuration, the illumination light beam L1 is transmitted through the cylindrical portion 43 both when the detection unit 40 and the object M are in contact with each other, and therefore, the intersection line 26 between the object surface 19a and the surface of the object M is As shown in FIG. 7C, continuous bright lines appear in the captured image Im. As shown in FIG. 7B, when the detection unit 40 and the object M are in contact with each other, the amount of the illumination light beam L1 transmitted through the transmission unit 43c is reduced. Therefore, in the captured image Im, the transmission unit 43b Corresponding high intensity bright lines 27 and low intensity bright lines 27 ′ corresponding to the transmission part 43 c are continuous. Therefore, in this configuration, the bright lines 27 and 27 ′ having different intensities exist in the same image. For example, even when the diameter difference between the bright lines 27 and 27 ′ is small, the change in the image is reliably detected. Thus, it is possible to detect contact between the detection unit 40 and the object M.

(Second Embodiment)
Next, a second embodiment of the shape measuring apparatus 1A will be described with reference to FIG.
In this figure, the same components as those of the first embodiment shown in FIGS. 1 to 7 are denoted by the same reference numerals, and the description thereof is omitted.

  In the shape measuring apparatus 1A of the present embodiment, as shown in FIGS. 8A and 8B, a groove 43d is provided on the surface of the tubular member 41 on the + Z side of the tubular portion 43. The groove 43d is formed in a V-shape in a front view in which the width around the optical axis AX is gradually increased toward the + Z side. More specifically, in the drawing for forming the groove 43d, the surface on the + X side extends in the direction of the optical axis AX. In the drawing, the surface on the −X side is formed to be inclined with respect to the optical axis AX.

  In the shape measuring apparatus 1A having the above configuration, as shown in FIG. 6B, when the tubular member 41 contacts the object M and moves relatively in the Z direction, the illumination light beam L1 passing through the groove 43d is shielded. Without reaching the measurement area Ma, the other illumination light beam L1 is reflected and scattered by the cylindrical portion 43. As shown in FIG. 8C, in the captured image Im, the bright line 27 corresponding to the surface of the object M and the bright line 27 ′ corresponding to the inner peripheral surface of the cylindrical portion 43 are the surface of the object M and Imaging is performed with a diameter corresponding to the inner peripheral surface of the cylindrical portion 43. At this time, the peripheral length of the bright line 27 changes according to the relative position in the Z direction between the groove 43d and the object plane 19a. That is, the illumination light beam L1 reaches the measurement region Ma at an angle in the direction around the optical axis AX corresponding to the width of the groove 43d (the length in the direction around the optical axis AX) at the Z position of the object plane 19a. Since the image is incident and imaged, the peripheral length (angle in the direction around the optical axis AX) of the bright line 27 corresponds to the relative position in the Z direction between the groove 43d and the object plane 19a. Since the relative position between the groove 43d and the object surface 19a and the amount of change in the width of the groove 43d when the cylindrical member 41 is not in contact with the object M are known, for example, by calculating and calculating the angle of the bright line 27, The relative position of the object surface 19a with respect to the groove 43d is obtained, and as a result, the position where the cylindrical member 41 contacts the object M can be detected in the Z direction.

In the present embodiment, the relative position in the Z direction between the tubular member 41 and the optical probe 3 can be estimated. Further, the position of the object plane Ma can be estimated by the contact of the detection unit 40. In particular, the distance to the bottom surface of the object surface M can be estimated.
In the present embodiment, the deformation amount of the support member 42 (see FIG. 2) from the position where the cylindrical member 41 and the object M are not in contact to the position where contact is detected, and the spring constant of the support member 42. Based on the above, for example, the arithmetic device 12 as the stress calculation unit can also determine the load (stress) applied to the optical probe 3 and the cylindrical member 41 as the elastic restoring force of the support member 42.

(Third embodiment)
Next, a third embodiment of the shape measuring apparatus 1A will be described with reference to FIG.
In this figure, the same components as those of the first embodiment shown in FIGS. 1 to 7 are denoted by the same reference numerals, and the description thereof is omitted.
In the above embodiment, the case where the detection unit 40 contacts the bottom of the hole in the object M has been described. In the present embodiment, the case where the detection unit 40 contacts the side surface of the hole will be described.

  As shown in FIG. 9A, the cylindrical portion 43 in the present embodiment is provided with protrusions 43e and 43f that protrude to a position including the object surface 19a around the optical axis AX, for example, in a positional relationship of 90 °. ing.

  In the shape measuring apparatus 1A of the present embodiment, as shown in FIG. 9A, if the cylindrical portion 43 is not in contact with the side wall of the object M, the projections 43e and 43f are not shielded from light and irradiate the measurement region Ma. As shown in FIG. 9C, the illuminated light beam L1 becomes a bright line 27 over a range other than the protrusions 43e and 43f in the captured image Im. Further, the range in which the illumination light beam L1 is scattered and reflected by the protrusions 43e and 43f is the bright line 27a corresponding to the diameter of the inner peripheral surface of the cylindrical portion 43. On the other hand, as shown in FIG. 9B, the optical axis AX and the axis of the hole of the object M are decentered, and the side wall (measurement region Ma) of the object M and the outer peripheral surface of the cylindrical portion 43 are in contact with each other. Since the distance between the side wall of the object M and the cylindrical portion 43 (protrusions 43e and 43f) is short, the outer diameter of the range in which the illumination light beam L1 is scattered and reflected by the protrusions 43e and 43f in the captured image Im. The bright line 27 'has moved to the side.

Therefore, in the present embodiment, the detection is performed on the side wall of the object M by detecting that the diameter (position) has changed from the bright line 27a to the bright line 27 ′ in the range in which the illumination light beam L1 is scattered and reflected by the protrusions 43e and 43f. It is possible to detect that the unit 40 has come into contact. Therefore, in the present embodiment, it is possible to detect not only the bottom of the hole in the object M but also the contact of the side surface.
Therefore, in the present embodiment, a hole having a bottom of the hole in the object M may be a through hole without a bottom of the hole in the object M.

(Fourth embodiment)
Next, a fourth embodiment of the shape measuring apparatus 1A will be described with reference to FIG.
In this figure, the same components as those of the first embodiment shown in FIGS. 1 to 7 are denoted by the same reference numerals, and the description thereof is omitted.
In the above embodiment, the case where the detection unit 40 contacts the bottom of the hole in the object M has been described. In the present embodiment, the case where the lens barrel 25 contacts will be described.

  In the present embodiment, the lens barrel 25 includes a lens barrel body 25A and a detection unit 25B that is suspended from the lens barrel body 25A via the support member 42 so as to be relatively movable in the Z direction. A reflection member 16 is provided on the surface on the + Z side of the detection unit 25B so as to face the imaging optical system 19. Further, a protrusion 45 is provided on the surface on the −Z side of the detection unit 25B.

The lens barrel main body 25A is provided with a tube portion 43 around the optical axis AX on the outer peripheral side of the detection portion 25B. The position of the distal end portion of the cylindrical portion 43 is set to a position that is separated slightly from the object plane 19a toward the + Z side when the detecting portion 25B is suspended from the lens barrel main body 25A without contact with the object M. .
Other configurations are the same as those of the first embodiment.

In the shape measuring apparatus 1A having the above configuration, if the detection unit 25B is not in contact with the object M, the illumination light beam L1 is irradiated to the measurement region Ma without being shielded by the cylindrical portion 43, and as shown in FIG. In the picked-up image Im, it becomes the bright line 27 according to the shape and diameter of the measurement region Ma. On the other hand, as shown in FIG. 10B, when the detection unit 25B comes in contact with the object M, the detection unit 25B moves relative to the lens barrel body 25A, and the tube unit 43 is on the optical path of the illumination light beam L1 toward the measurement region Ma. To position. Thereby, the illumination light beam L1 is scattered and reflected by the inner peripheral surface of the cylindrical portion 43, and as shown in FIG. 4, in the captured image Im, the diameter of the inner peripheral surface of the cylindrical portion 43 corresponds to the diameter of the object M. The bright line 27 ′ has a diameter smaller than that of the surface.
Thus, also in this embodiment, the same operation and effect as the first embodiment can be obtained.

Next, a structure manufacturing system including the above-described shape measuring apparatus will be described with reference to FIG.
FIG. 11 is a block configuration diagram of the structure manufacturing system 200. The structure manufacturing system 200 of this embodiment includes a shape measuring device 201, a design device 202, a forming device 203, a control device (inspection device) 204, and a repair device 205 as described in the above embodiment. Prepare. The control device 204 includes a coordinate storage unit 210 and an inspection unit 211.

  The design device 202 creates design information related to the shape of the structure, and transmits the created design information to the molding device 203. In addition, the design apparatus 202 stores the created design information in the coordinate storage unit 210 of the control apparatus 204. The design information includes information indicating the coordinates of each position of the structure.

  The molding apparatus 203 produces the above structure based on the design information input from the design apparatus 202. The molding of the molding apparatus 203 includes, for example, casting, forging, cutting, and the like. The shape measuring device 201 measures the coordinates of the manufactured structure (measurement object) and transmits information (shape information) indicating the measured coordinates to the control device 204.

  The coordinate storage unit 210 of the control device 204 stores design information. The inspection unit 211 of the control device 204 reads design information from the coordinate storage unit 210. The inspection unit 211 compares information (shape information) indicating coordinates received from the shape measuring apparatus 201 with design information read from the coordinate storage unit 210. The inspection unit 211 determines whether or not the structure has been molded according to the design information based on the comparison result. In other words, the inspection unit 211 determines whether or not the created structure is a non-defective product. The inspection unit 211 determines whether or not the structure can be repaired when the structure is not molded according to the design information. When the structure can be repaired, the inspection unit 211 calculates a defective portion and a repair amount based on the comparison result, and transmits information indicating the defective portion and information indicating the repair amount to the repair device 205.

  The repair device 205 processes the defective portion of the structure based on the information indicating the defective portion received from the control device 204 and the information indicating the repair amount.

  FIG. 12 is a flowchart showing the flow of processing by the structure manufacturing system 200. In the structure manufacturing system 200, first, the design device 202 creates design information related to the shape of the structure (step S101). Next, the molding apparatus 202 produces the structure based on the design information (step S102). Next, the shape measuring apparatus 201 measures the shape of the manufactured structure (step S103). Next, the inspection unit 211 of the control device 204 compares the shape information obtained by the shape measuring device 201 with the design information described above to inspect whether or not the structure is created according to the integrity design information ( Step S104).

  Next, the inspection unit 211 of the control device 204 determines whether or not the created structure is a good product (step S105). When the inspection unit 211 determines that the created structure is a non-defective product (YES in step S105), the structure manufacturing system 200 ends the process. If the inspection unit 211 determines that the created structure is not a non-defective product (NO in step S105), the inspection unit 211 determines whether the created structure can be repaired (step S106).

  In the structure manufacturing system 200, when the inspection unit 211 determines that the created structure can be repaired (YES in step S106), the repair device 205 performs reworking of the structure (step S107), and processing in step S103 Return to. When the inspection unit 211 determines that the created structure cannot be repaired (No in step S106), the structure manufacturing system 200 ends the process. As described above, the structure manufacturing system 200 ends the processing of the flowchart shown in FIG.

  The structure manufacturing system 200 of the present embodiment can determine whether or not the created structure is a non-defective product because the shape measuring apparatus in the above embodiment can accurately measure the coordinates of the structure. it can. In addition, the structure manufacturing system 200 can repair the structure by reworking the structure when the structure is not a good product.

  Note that the repair process executed by the repair device 205 in the present embodiment may be replaced with a process in which the molding device 203 re-executes the molding process. In that case, when it determines with the test | inspection part 211 of the control apparatus 204 being able to repair, the shaping | molding apparatus 203 re-executes a shaping | molding process (forging, cutting, etc.). Specifically, for example, the molding apparatus 203 cuts a portion that should be originally cut but not cut in the structure. Thereby, the structure manufacturing system 200 can create a structure correctly.

  As described above, the preferred embodiments according to the present invention have been described with reference to the accompanying drawings, but the present invention is not limited to the examples. Various shapes, combinations, and the like of the constituent members shown in the above-described examples are examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.

  For example, the shape measuring apparatus 1A is not limited to the hole portion Ma, and can also measure the inner surface (measurement region) of the groove (concave portion). The shape measuring apparatus 1A can also move the optical probe 3 in the extending direction of the groove when measuring the inner surface of the groove with respect to the object in which the groove extending in a predetermined direction is formed. The extending direction of the grooves may be, for example, a direction parallel to the XY plane or a direction intersecting the XY plane. Moreover, the shape measuring apparatus according to the above-described embodiment can measure, for example, a cliff portion of a step. Moreover, the measuring method by the shape measuring apparatus 1A is not limited to the light cutting method, and may be, for example, a confocal method or an SFF method.

  Moreover, in the said embodiment, although the cylinder part 43 of the detection part 40 was set as the structure which reflects the illumination light beam L1 or permeate | transmits with a predetermined | prescribed transmittance | permeability, for example, as a structure which absorbs the illumination light beam L1, for example Good. In this configuration, the illumination light beam L1 incident on the cylindrical portion 43 is not emitted and is no longer picked up by the image pickup device 18, so that it is possible to detect a change in the image and detect contact between the detection portion 40 and the object M. It becomes possible.

Furthermore, in the above embodiment, the case where the cylindrical member 41 relatively moves along the Z-axis direction or the XY plane when the cylindrical member 41 contacts the object M has been described. The contact with the object M can be detected even when 41 is inclined with respect to the Z axis.
Specifically, when the cylindrical member 41 is tilted with respect to the Z axis, the traveling direction of the illumination light beam L1 is changed on one side of the tilt direction across the optical axis AX, and the traveling direction of the illumination light beam L1 is changed on the other side of the tilt direction. Since it is not changed, in the captured image Im, since the bright lines have different diameters on one side and the other side across the optical axis AX, contact between the cylindrical member 41 and the object M can be detected.

  In the above embodiment, the illumination light beam L1 introduced and reflected by the reflecting member 16 is reflected and scattered in the measurement region Ma, and the imaging light beam L2 reflected and scattered in the measurement region Ma is incident on the imaging optical system 19 and then imaged. Although the structure that enters the element 18 has been described, the present invention is not limited to this. For example, the imaging light beam L2 that has a large hole diameter of the object M and is reflected and scattered by the measurement region Ma enters the imaging optical system 19. In such a case, the imaging light beam L2 reflected and scattered in the measurement region Ma is reflected by the reflecting member 16, and is reflected by the imaging element 18 via the imaging optical system 19 and the light guide member 20. It can be incident (introduced). Therefore, even if the diameter of the hole of the object M is large, the shape of the measurement region Ma in the object M can be measured smoothly.

  In the above embodiment, the optical path of the illumination light beam L1 (the optical path of the illumination light beam L1 emitted from the light source 14 and directed to the measurement region Ma through the light guide member 20, the imaging optical system 19, and the reflection member 16) and the imaging light beam The optical path of L2 (reflected and scattered in the measurement area Ma and reflected and scattered in the optical path of the imaging light beam L2 directed to the image sensor 18 through the imaging optical system 19 and the light guide member 20, or reflected and scattered in the measurement area Ma, the reflecting member 16 and the imaging The detection unit 40 is inserted into the optical path of the illumination light beam L1 toward the measurement region Ma via the reflection member 16 in the optical path of the imaging light beam L2 toward the image sensor 18 via the optical system 19 and the light guide member 20. Although the configuration is exemplified, the present invention is not limited to this, and if the optical path is as described above, for example, the detection unit 40 is reflected in the optical path of the imaging light beam L2 that is reflected and scattered in the measurement region Ma and travels toward the imaging optical system 19. In the inserted configuration It may be.

  Moreover, in the said embodiment, although the object surface 19a illustrated the structure which is planar shape, it is not limited to this, For example, an object surface may be conical surface shape, on such a conical surface As a configuration including a tip optical member that changes the traveling direction of the imaging light beam L2 from the object surface 19a toward the image sensor 18 so that the light beam emitted from each point is converged to almost one point on the planar image surface. Also good. When the tip optical member belongs to the coupling optical system, the tip optical member is arranged closest to the object plane among the optical members constituting the coupling optical system. Further, when the tip optical member belongs to the illumination optical system, the tip optical member is disposed closest to the object plane among the optical members constituting the illumination optical system.

In the above-described embodiment, the shape measuring apparatus 1A may use a method of measuring the object plane of the object M by using the optical probe 3 with an image. For example, US Patent Publication No. 5469254 may be used.
In the above-described embodiment, the optical probe 3 generates projection light in an annular shape and measures the object plane Ma. However, the optical probe 3 is rotated and the object plane Ma around the optical probe 3 is measured. I do not care. For example, Japanese Patent Publication No. Hei 11-281582 may be used.
In the above-described embodiment, the optical probe 3 may be a method of measuring the object surface Ma around the optical probe 3 by interference. For example, Japanese Patent Publication No. 2008-309652 may be used.
Note that the requirements of the above-described embodiments can be combined as appropriate. Some components may not be used. In addition, as long as it is permitted by law, the disclosure of all published publications and US patents related to the shape measuring devices and the like cited in the above embodiments and modifications are incorporated herein by reference.

  DESCRIPTION OF SYMBOLS 1A ... Shape measuring device, 2 ... Moving device, 5 ... Shape information acquisition part (shape acquisition part), 9 ... Memory | storage device, 12 ... Calculation apparatus (calculation part), 16 ... Reflective member (tip optical member), 12 ... Calculation Device (path generation unit), 17 ... imaging unit, 18 ... imaging element, 19 ... imaging optical system, 25 ... barrel, 25B, 40 ... detection unit (contact detection unit), 42 ... support member (connection unit, elasticity) Body), 203 ... molding device, 204 ... control device, IL ... illumination optical system

Claims (13)

A shape measuring device for measuring the shape of the surface of a hole,
A shape acquisition unit including an image sensor that irradiates light on the surface of the hole and detects light reflected on the surface of the hole;
An arithmetic unit that calculates the shape of the surface of the hole using a signal detected by the shape acquisition unit;
A shape measuring apparatus comprising: a contact detection unit arranged to be inserted into an optical path of the shape acquisition unit in accordance with contact with a surface of the hole.   The shape measurement apparatus according to claim 1, wherein the contact detection unit is disposed in an optical path between the shape acquisition unit and the surface of the hole along with the contact. The shape acquisition unit
An optical system having an optical member for introducing light reflected by the surface of the hole into the imaging surface of the imaging element;
A lens barrel that houses the optical member;
The distance at which the contact detection unit is inserted in an optical path between the shape acquisition unit and the surface of the hole changes according to a difference in relative position between the lens barrel and the contact detection unit. The shape measuring device described in 1.   The shape measuring apparatus according to claim 3, further comprising a stress calculating unit that calculates a force acting on the contact detecting unit due to contact with the surface of the hole, using a distance at which the contact detecting unit is inserted.   In the optical system, along the optical path to be introduced into the image sensor, the contact detection unit is associated with the contact with the optical path between the tip optical member that makes the light incident on the surface of the hole and the surface of the hole. The shape measuring apparatus according to claim 4, wherein   The shape measurement apparatus according to claim 5, wherein the shape acquisition unit further includes an illumination optical system that irradiates the surface of the hole.   The shape measuring apparatus according to claim 6, wherein the tip optical member introduces light irradiated to the surface of the hole and introduces light reflected by the surface of the hole into the imaging element. The contact detection unit includes a reflection unit that reflects light applied to the surface of the hole,
The shape measurement apparatus according to claim 1, wherein the reflection unit is inserted between the shape acquisition unit and the image sensor, and the reflected light from the reflection unit is imaged by the image sensor.   The shape measuring device according to any one of claims 1 to 8, wherein the contact detection unit has different transmittances of light applied to the surface of the hole in a circumferential direction.   The shape measuring device according to any one of claims 1 to 9, wherein the contact detection unit has a different transmittance of light applied to the surface of the hole according to the inserted distance. A moving device for moving the shape acquisition unit and the contact detection unit;
11. A storage device that stores a movement path between the shape acquisition unit and the contact detection unit until contact between the contact detection unit and the surface of the hole is detected. The shape measuring device described in 1. A molding apparatus for molding the structure based on design information relating to the shape of the structure;
The shape measuring device according to any one of claims 1 to 11, which measures the shape of the structure formed by the forming device,
A structure manufacturing system comprising: a control device that compares shape information indicating the shape of the structure measured by the shape measuring device with the design information. Molding the structure based on design information regarding the shape of the structure;
Measuring the shape of the molded structure by the shape measuring device according to any one of claims 1 to 11,
A structure manufacturing method comprising: comparing shape information indicating the shape of the structure measured by the shape measuring apparatus with the design information.

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