JP6004615B2 - 裏面照射型固体撮像素子 - Google Patents
裏面照射型固体撮像素子 Download PDFInfo
- Publication number
- JP6004615B2 JP6004615B2 JP2011172023A JP2011172023A JP6004615B2 JP 6004615 B2 JP6004615 B2 JP 6004615B2 JP 2011172023 A JP2011172023 A JP 2011172023A JP 2011172023 A JP2011172023 A JP 2011172023A JP 6004615 B2 JP6004615 B2 JP 6004615B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- layer
- element layer
- type impurity
- illuminated solid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
2、3、4 N型不純物層
5、6、7 P型不純物層
8、9、10、11 P型不純物層
12 P型不純物層
13 層間絶縁膜
14 配線層
15 層間絶縁膜
16、17、18、19、20、21 配線層
22 層間絶縁膜
23 層間膜
31 赤画素
32 緑画素
33 青画素
34、35、36 低反射率膜
37 層間絶縁膜
Claims (3)
- 赤色、緑色、青色の光に感度を有するフォトダイオードによる画素が形成される素子層と、この素子層から電荷を転送するための配線構成を備える配線層と、前記素子層の側方に前記素子層間を分離するために設けられる不純物層とを備える裏面照射型固体撮像素子において、
前記素子層と前記配線層との間に、前記素子層側から到来する光の反射を抑制する低反射率の膜であって、当該膜により反射された光が前記素子層に入射した場合に光電変換に寄与しない光強度とすると共に、前記1画素の領域に対応し且つ前記素子層間分離用の不純物層側へ広がった大きさの膜を形成したことを特徴とする裏面照射型固体撮像素子。 - 低反射率の膜は、タングステンまたはタングステンシリサイドにより構成されていることを特徴とする請求項1に記載の裏面照射型固体撮像素子。
- 低反射率の膜を、前記素子層に隣接して形成される層間絶縁膜の上に形成することを特徴とする請求項1または2に記載の裏面照射型固体撮像素子。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011172023A JP6004615B2 (ja) | 2011-08-05 | 2011-08-05 | 裏面照射型固体撮像素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011172023A JP6004615B2 (ja) | 2011-08-05 | 2011-08-05 | 裏面照射型固体撮像素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013038176A JP2013038176A (ja) | 2013-02-21 |
JP6004615B2 true JP6004615B2 (ja) | 2016-10-12 |
Family
ID=47887517
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011172023A Expired - Fee Related JP6004615B2 (ja) | 2011-08-05 | 2011-08-05 | 裏面照射型固体撮像素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6004615B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021215299A1 (ja) * | 2020-04-21 | 2021-10-28 | ソニーセミコンダクタソリューションズ株式会社 | 撮像素子および撮像装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08288484A (ja) * | 1995-04-20 | 1996-11-01 | Sony Corp | 固体撮像素子の製造方法 |
JP4867152B2 (ja) * | 2004-10-20 | 2012-02-01 | ソニー株式会社 | 固体撮像素子 |
JP2007129192A (ja) * | 2005-10-07 | 2007-05-24 | Victor Co Of Japan Ltd | 固体撮像装置 |
JP4525671B2 (ja) * | 2006-12-08 | 2010-08-18 | ソニー株式会社 | 固体撮像装置 |
US7989859B2 (en) * | 2008-02-08 | 2011-08-02 | Omnivision Technologies, Inc. | Backside illuminated imaging sensor with silicide light reflecting layer |
US7820498B2 (en) * | 2008-02-08 | 2010-10-26 | Omnivision Technologies, Inc. | Backside illuminated imaging sensor with light reflecting transfer gate |
JP2010045083A (ja) * | 2008-08-09 | 2010-02-25 | Nikon Corp | 固体撮像素子 |
JP2010098219A (ja) * | 2008-10-20 | 2010-04-30 | Toshiba Corp | 裏面照射型固体撮像装置 |
JP2010118412A (ja) * | 2008-11-11 | 2010-05-27 | Panasonic Corp | 固体撮像装置及びその製造方法 |
JP2011129627A (ja) * | 2009-12-16 | 2011-06-30 | Panasonic Corp | 半導体装置 |
JP5810575B2 (ja) * | 2011-03-25 | 2015-11-11 | ソニー株式会社 | 固体撮像装置、および、その製造方法、電子機器 |
-
2011
- 2011-08-05 JP JP2011172023A patent/JP6004615B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2013038176A (ja) | 2013-02-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI694603B (zh) | 影像感測器裝置 | |
US9786704B2 (en) | CMOS image sensor structure with crosstalk improvement | |
JP4866656B2 (ja) | 光電変換膜積層型カラー固体撮像装置 | |
US8976282B2 (en) | Solid-state image sensor, method of manufacturing the same and camera | |
JP5468133B2 (ja) | 固体撮像装置 | |
TWI669813B (zh) | 單光子崩潰二極體影像感測器和單光子崩潰二極體影像感測器製造方法 | |
JP5745866B2 (ja) | 固体撮像素子 | |
JP4751865B2 (ja) | 裏面照射型固体撮像素子及びその製造方法 | |
US11322536B2 (en) | Image sensor and method of fabricating the same | |
JP2015002340A (ja) | 固体撮像装置及びその製造方法 | |
JP2014086551A (ja) | 撮像装置及びカメラ | |
JP2009081169A (ja) | 固体撮像素子 | |
US20210327930A1 (en) | Image sensor and method for fabricating the same | |
JP5429208B2 (ja) | 固体撮像素子、カメラモジュール及び電子機器モジュール | |
US20110001207A1 (en) | Solid state image sensor and manufacturing method thereof | |
JP6274729B2 (ja) | 固体撮像装置およびカメラ | |
KR102581170B1 (ko) | 후면 조사형 이미지 센서 및 그 제조 방법 | |
KR102524998B1 (ko) | 후면 조사형 이미지 센서 및 그 제조 방법 | |
JP2016152265A (ja) | 固体撮像素子 | |
JP2005353626A (ja) | 光電変換膜積層型固体撮像素子及びその製造方法 | |
KR102153147B1 (ko) | 이미지 센서 및 그 제조 방법 | |
JP6004615B2 (ja) | 裏面照射型固体撮像素子 | |
KR20220040848A (ko) | 이미지 센서 | |
JP2008153500A (ja) | 固体撮像装置及びカメラ | |
US20230361142A1 (en) | Image sensor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140716 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150513 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150602 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150723 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160209 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160411 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160906 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160906 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6004615 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |