JP5995595B2 - Control valve and control valve assembly method - Google Patents

Description

The present invention relates to a control valve having a resin flow channel block in which a flow channel is formed, and a method for assembling the control valve.

  A fluid supply device that supplies fluid from a fluid pressure source to a fluid pressure device or a workpiece to which liquid is applied has a control valve for opening and closing a flow path and controlling pressure. used. Control valves used for such applications include an inlet flow path, that is, a primary flow path to which a primary side pipe connected to a fluid pressure source is connected, and a fluid pressure device and a work piece for guiding fluid to the workpiece. It has an outlet channel to which the secondary side pipe is connected, that is, a secondary side channel, and both channels are provided in the channel block. The control valve is provided with a communication chamber that communicates the primary side flow path and the secondary side flow path, and the control valve is provided to open and close the communication chamber and adjust the opening degree of the communication chamber. Is provided with a valve body. A drive block for driving the valve body is attached to the flow path block by a screw member or the like.

  For example, in a control valve used in a liquid supply device for applying a chemical solution such as a photoresist solution to a semiconductor wafer, the flow path block is formed of a resin such as a fluororesin so as not to cause a chemical reaction with the chemical solution. . Since the drive block for driving the valve body does not come into direct contact with the liquid, it is made of resin or metal.

  Patent Document 1 describes a control valve called a constant pressure regulator for keeping the secondary fluid pressure constant even when the primary fluid pressure fluctuates. The regulator body in which the path is formed is made of a fluororesin such as PTFE. A lid body as a drive block is attached to the regulator body, and the lid body, that is, the drive block drives a diaphragm as a valve body. The lid is also made of a fluororesin.

JP 2003-186546 A

  As described above, in a control valve having a resin flow channel block in which a primary flow channel and a secondary flow channel are formed, and a drive block provided with a drive mechanism for driving a valve body The flow path block and the drive block are fastened by the screw member. When a fastening force is applied as an external force to the flow path block by a screw member, the flow path block is distorted and remains as a residual strain. When an external force is applied to the resin channel block by a screw member, a phenomenon in which distortion increases, that is, a creep phenomenon occurs in a short time even with a small external force, as compared with a metal channel block. When the creep phenomenon occurs in the flow path block, the outer dimensions are slightly shortened, and a gap may be generated between the flow path block and the drive block, so that there is a possibility that the fluid leaks outside through the gap. For this reason, in order to assemble a control valve having a resin-made flow path block, the screw member is loosened after the flow path block and the drive block are fastened by the screw member. It is necessary to perform tightening work.

  Thus, in the control valve having a resin member, the screw member is tightened in two stages, that is, the screw member tightening operation and the retightening operation after a predetermined time has elapsed, and the control valve is used. In the process, it is necessary to prevent gaps from occurring due to the creep phenomenon. For this reason, there exists a problem that the assembly workability | operativity of a control valve is bad.

  An object of the present invention is to provide a control valve that does not loosen even when the control valve having a resin member creeps due to long-term use or thermal cycle.

  The objective of this invention is improving the assembly property of the control valve which has a resin-made member.

  The object of the present invention is to eliminate the screw member that fastens the flow path block and the drive block in the control valve having a resin member, and eliminate the torque management and retightening work of the screw to improve the assemblability of the control valve. It is to improve.

The control valve of the present invention is disposed on the surface side of the flow path block, a resin flow path block formed with a primary flow path to which a fluid is supplied and a secondary flow path for discharging the fluid, A drive block provided with a valve body drive mechanism for driving the valve body and provided with a pin fitting portion having a pin fitting hole, and a fastening formed with a pin fixing hole and disposed on the bottom surface side of the flow path block A block, a fastening portion provided protruding from the bottom surface side of the flow channel block, and having a pin through hole formed therein; a fastening pin inserted into the pin fitting hole, the pin fixing hole, and the pin through hole; The flow path block is fastened to the drive block and the fastening block by the fastening pin . The control valve assembly method of the present invention includes a resin-made flow channel block in which a primary flow channel to which fluid is supplied and a secondary flow channel for discharging fluid are formed, and is attached to the surface side of the flow channel block. And a drive block provided with a pin fitting portion having a pin fitting hole and a valve body driving mechanism for driving the valve body, and a pin fixing hole are formed and arranged on the bottom side of the flow path block. A control block having a fastening block and a fastening portion provided protruding from the bottom surface side of the flow path block and having a pin through hole, the flow path block, the drive block, and An external force is applied to the fastening block in a combined state, and the pin fitting hole, the pin fixing hole, and the pin through hole are in a state where the central axes are coaxial. Fixing holes and Insert the fastening pin into the through hole, characterized in that fastening the channel block, said driving block, and the fastening block.

  In this control valve, a drive block for driving the on-off valve body is attached to the surface side of the flow path block, and a fastening block is attached to the bottom surface side of the flow path block. An external force is applied so as to sandwich the flow path block between the drive block and the fastening block, and the flow path block is compressed and deformed, and the pin fixing hole formed in the fastening block and the pin fitting portion of the drive block are formed. The fastening pin is passed through the pin fitting hole. When the external force is released, a compressive force is applied to the flow path block, and even if the strain generated in the flow path block increases due to the creep phenomenon, the contact surface between the flow path block and the drive block is secured. Thus, the generation of a gap is prevented.

  Therefore, the tightness of the abutment surfaces of the flow path block and the drive block can be maintained without fastening the flow path block and the drive block with the screw member, so that the tightening work of the screw member is not required and control is performed. The assembling workability of the valve can be improved. Furthermore, even if the resin flow path block creeps due to long-term use or thermal cycle, the desired operation characteristics can be maintained for a long time without loosening the connection between the flow path block and the drive block. .

It is the longitudinal cross-sectional view which looked at an example of the control valve from the front side. FIG. 2 is a sectional view taken along line 2-2 in FIG. FIG. 3 is a sectional view taken along line 3-3 in FIG. 1. It is a right view of FIG. It is the exploded view of the control valve which looked at the control valve from the right side. FIG. 6 is a sectional view taken along line 6-6 in FIG. It is a 7-7 line arrow directional view in FIG. It is a partially cutaway right view of a control valve in the state before attaching a fastening pin. It is an expanded sectional view of 10 parts in FIG. It is sectional drawing which shows the modification of a control valve. It is a top view which shows the conventional control valve.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. As shown in FIG. 1, the control valve has a flow path block 10a made of fluororesin. The flow path block 10a has a substantially rectangular parallelepiped shape as a whole. In FIG. 1, the upper surface is the surface and the lower surface is the bottom surface. A primary side flow path 11 and a secondary side flow path 12 are formed in the flow path block 10a. The primary side flow path 11 is connected to a liquid supply source having a liquid storage tank (not shown) and a pump for discharging the liquid therein, and the secondary side flow path 12 is connected to a liquid discharge tool such as an application nozzle (not shown). . For example, when this control valve is used in a process of applying a liquid such as a chemical solution to a workpiece, the liquid supplied from the pump is discharged to the liquid discharge tool by the control valve.

  A primary joint 13 projects from one end of the flow path block 10a, and a secondary joint 14 projects from the other end. Both joints 13, 14 are coaxial. ing. The joint portion 13 is provided with a primary side port 13a that communicates with a primary side pipe connected to a liquid supply source such as a pump, and the joint portion 14 has a secondary port connected to a liquid discharge tool such as an application nozzle. A secondary side port 14a communicating with the side pipe is provided. The primary side flow path 11 has a primary main flow path 11a that communicates with the primary side port 13a, and the secondary side flow path 12 has a secondary side main flow path 12a that communicates with the secondary side port 14a, both The main flow paths 11a and 12a are coaxial. In the flow path block 10a, the main flow path 11a communicates with the surface of the flow path block 10a via the primary side communication flow path 11b, and the communication flow path 11b extends in a direction substantially perpendicular to the main flow path 11a. . Further, the main flow path 12a communicates with the surface of the flow path block 10a via the secondary side communication flow path 12b. The communication channel 12b extends in a direction substantially perpendicular to the main channel 12a, and is parallel to the communication channel 11b.

  A diaphragm type on-off valve body 15 is arranged on the surface of the flow path block 10a where the respective communication flow paths 11b and 12b are opened. The on-off valve body 15 is made of a fluororesin, and has an on-off portion 15a that abuts on a valve seat 16 provided at an opening of the communication flow path 12b, and an annular base portion 15b. The on-off portion 15a and the annular base portion An elastically deforming portion 15c is provided between 15b and 15b. The annular base portion 15b of the on-off valve body 15 is sandwiched between the flow path block 10a and the drive block 10b attached thereto. The drive block 10b is made of a hard material such as a hard resin or an aluminum alloy having a higher hardness than the fluororesin. A communication chamber 18 is defined by the on-off valve body 15 and the flow path block 10 a, and the communication chamber 18 communicates the primary side flow path 11 and the secondary side flow path 12.

  A drive rod 20 as a valve drive member is mounted in the guide hole 19 formed in the drive block 10b so as to be capable of reciprocating in the axial direction, and an opening / closing portion 15a of the opening / closing valve body 15 is attached to the tip of the drive rod 20. A shaft portion 15d provided integrally is screwed. A piston 22 provided integrally with the base end portion of the drive rod 20 is mounted in a cylinder hole 21 formed in the drive block 10b so as to be continuous with the guide hole 19 so as to reciprocate in the axial direction. A spring chamber 23 is formed in the drive block 10b, and a compression coil spring 24 is disposed in the spring chamber 23. The compression coil spring 24 biases the spring force toward the valve seat 16 against the opening / closing portion 15 a of the opening / closing valve body 15 via the drive rod 20.

  A pneumatic chamber 25 is defined by the piston 22 and the cylinder hole 21, and a supply / discharge port 26 communicating with the pneumatic chamber 25 is formed in the drive block 10b. When compressed air is supplied from the supply / exhaust port 26, the drive rod 20 moves backward against the spring force, and the opening / closing part 15 a moves away from the valve seat 16. Thereby, the primary side flow path 11 and the secondary side flow path 12 will be in a communication state via the communication chamber 18, and a control valve will be in a valve opening state. On the other hand, when the air in the pneumatic chamber 25 is discharged to the outside, the drive rod 20 moves forward toward the valve seat 16 by the spring force of the compression coil spring 24, and the opening / closing portion 15 a comes into contact with the valve seat 16. Thereby, the communication between the primary side flow path 11 and the secondary side flow path 12 is cut off, and the on-off valve body 15 is closed. A breathing hole 27 that allows the spring chamber 23 to communicate with the outside and a breathing hole 28 that allows the pneumatic chamber 25 to communicate with the outside are formed in the drive block 10b.

  The piston 22 is driven in the backward direction by compressed air supplied to the pneumatic chamber 25, and is a single-acting type that is driven in the forward direction by spring force when the air in the pneumatic chamber 25 is discharged. On the other hand, when the spring chamber 23 is used as a pneumatic chamber and the piston 22 is driven in the forward direction by air pressure, the piston 22 is a double-acting type. The drive block 10b may have a two-part structure of a main body part in which the cylinder hole 21 is formed and a lid part assembled to the main body part.

  A recess 31 is formed on the bottom surface of the flow path block 10a, and the outer side of the recess 31 is a substantially quadrangular fastening portion 32 surrounding the recess 31 as shown in FIG. As shown in FIG. 4, the channel block 10a protrudes toward the bottom surface side. The fastening block 10c is abutted against the abutting surface 33 provided on the bottom surface of the fastening portion 32, and the fastening block 10c is attached to the bottom surface side of the flow path block 10a. The fastening block 10c is formed of a hard material such as a hard resin or an aluminum alloy having a hardness higher than that of the fluororesin. An abutting surface 34 that abuts against the abutting surface 33 of the fastening portion 32 is provided on the inner peripheral surface of the fastening block 10 c, and a pin fixing portion 35 that enters the recess 31 is fastened inside the abutting surface 34. It protrudes from the inner surface of the block 10c. The protruding height of the pin fixing portion 35 is shorter than the depth of the recess 31. When the fastening block 10c is attached to the flow path block 10a, there is a gap between the bottom surface 31a of the recess 31 and the pin fixing portion 35. 36 is formed.

  As shown in FIG. 1 and FIG. 2, two pin fixing holes 37 are formed in the pin fixing portion 35, and a fastening pin 38 is attached to each pin fixing hole 37. As shown in FIG. 2, the pin fixing hole 37 extends in the front-rear direction perpendicular to the protruding direction of the joint portions 13, 14, assuming the left-right direction. However, the pin fixing hole 37 may be provided in the pin fixing portion 35 in parallel with the joint portions 13 and 14. As shown in FIG. 2, a pin through hole 39 through which the fastening pin 38 passes is formed in the fastening portion 32 of the flow path block 10 a, and each of the pin through holes 39 has two fastening pins 38. The end penetrates.

  As shown in FIGS. 2 and 3, the drive block 10 b is provided with a cover portion that covers both side surfaces of the flow path block 10 a, and the cover portion is a pin fitting portion 41. The end of the fastening pin 38 is fitted into the pin fitting hole 42 formed in the pin fitting portion 41. The diameters of the pin fixing hole 37, the pin through hole 39, and the pin fitting hole 42 shown in the figure are substantially the same as the outer diameter of the fastening pin 38.

  As shown in FIG. 5, the control valve is assembled by assembling the flow path block 10a, the drive block 10b, and the fastening block 10c. In order to assemble the flow path block 10a and the drive block 10b, the flow path block 10a is inserted between the left and right pin fitting portions 41 of the drive block 10b.

  8 and 9 show a state where the fastening block 10c is abutted against the bottom surface side of the flow path block 10a and the flow path block 10a is assembled to the drive block 10b. Under this state, the abutment surface 34 of the fastening block 10c is abutted against the abutment surface 33 of the flow path block 10a. At this time, as shown in FIG. 9, the center axis O2 of the pin through hole 39 of the fastening portion 32 is shifted by E1 to the surface side of the flow path block 10a with respect to the center axis O1 of the pin fixing hole 37 of the pin fixing portion 35. ing. Further, the center axis O3 of the pin fitting hole 42 of the pin fitting portion 41 is shifted E2 to the surface side of the flow path block 10a with respect to the center axis O2. A pin fixing hole 37, a pin through hole 39, and a pin fitting hole 42 are previously formed in the flow path block 10a, the drive block 10b, and the fastening block 10c so that the respective central axes have the above-described positional relationship. The

  As shown in FIG. 8, the fastening block 10c and the drive block 10b sandwich the flow path block 10a in a state where the three blocks such as the flow path block 10a are combined, and the deviations E1 and E2 in FIG. 9 are zero. External force is applied so that The flow path block 10a is distorted by receiving a compressive force due to the external force. When the central axes of the pin fixing hole 37, the pin through hole 39, and the pin fitting hole 42 become coaxial by this external force, the fastening pin 38 is inserted.

  When the fastening pin 38 is fitted in the pin fitting hole 42, the flow path block 10a is not distorted by receiving the compressive force from the fastening block 10c even after the applied external force is removed, and remains distorted. Become. In this way, the fastening block 10c and the drive block 10b are manufactured by decentering the pin fixing hole 37 and the pin fitting hole 42, and the fastening pin 38 is moved under the state where the flow path block 10a is compressed and deformed. The flow path block 10a is maintained in the state in which the compressive strain is caused so that the pin fixing hole 37 and the pin fitting hole 42 are coaxially fixed while being fixed to the pin fitting hole 42 and the pin through hole 39. Let As a result, under the state where the fastening pin 38 is inserted into the pin fixing hole 37 and the pin fitting hole 42, a tightening force in the compression direction, that is, a compressive force is applied to the flow path block 10a. Even if the distortion of 10a increases due to the creep phenomenon, a gap is prevented from being generated between the flow path block 10a and the drive block 10b.

  The fastening pin 38 is provided with a constricted portion 43, and the diameter of the pin through hole 39 is substantially the same as the outer diameter of the fastening pin 38 as described above. Therefore, by attaching the fastening pin 38 to the pin fixing hole 37 of the flow path block 10a, when the fastening pin 38 is passed through the pin through hole 39, the fastening pin 38 is in close contact with the inner surface of the pin through hole 39, and is made of resin. A part of the flow path block 10a enters the constricted portion 43 due to distortion. Thereby, the fastening pin 38 is prevented from coming off. In a form in which a part of the flow path block 10 a is not bitten into the constricted portion 43, the diameter of the pin through hole 39 can be made larger than the outer diameter of the fastening pin 38. As shown in FIGS. 4 and 5, a protrusion 44 is provided at the tip of the pin fitting portion 41 of the drive block 10 b, and the protrusion 45 is provided on both sides of the fastening block 10 c so as to face the protrusion 44. . The contact of both the protrusions 44 and 45 prevents the fastening block 10c from being displaced from the drive block 10b.

  FIG. 11 is a plan view of a conventional control valve, and FIG. 11 shows a portion corresponding to the upper surface of the control valve shown in FIG. When the drive block 10b and the flow path block 10a are fastened by the screw member 17 attached to the drive block 10b as in the prior art, after the drive block 10b and the flow path block 10a are assembled by the screw member 17, It was necessary to retighten the screw member 17 after a while.

  On the other hand, in the control valve shown in FIG. 1, when the fastening block 10c is assembled to the flow path block 10a and the drive block 10b by the fastening pin 38, the flow path block 10a is fastened to the drive block 10b as described above. The block 10c is in a state where a compressive strain generated by the compressive force is generated. As a result, it is not necessary to fasten the flow path block 10a and the drive block 10b using a screw member, management of the tightening torque of the screw member and retightening work are not required, and the assembly of the control valve is easy with fewer work steps. Can be done.

  As described above, the central portion of the fastening pin 38 is fixed to the fastening block 10c, and both end portions of the fastening pin 38 pass through the pin through hole 39, so that an external force in an inclined direction is not applied to the fastening pin 38. Both ends of the fastening pin 38 may be fixed to the fastening block 10c, and the central portion in the axial direction of the fastening pin 38 may pass through the flow path block 10a.

  FIG. 10 is a cross-sectional view showing a modified control valve, and shows a portion corresponding to FIG. 3 in the above-described control valve. In FIG. 10, members that are the same as those in the control valve described above are given the same reference numerals. In the control valve shown in FIG. 10, a fastening portion 32 protrudes from the central portion of the bottom of the flow path block 10a, and a recessed portion 31 into which the fastening portion 32 enters is provided in the fastening block 10c. The fastening pin 38 has a central portion in the axial direction passing through a pin through hole 39 formed in the fastening portion 32 of the flow path block 10a, and both end portions of the fastening pin 37 formed in the pin fixing portion 35 of the fastening block 10c. Fixed to.

  As described above, the concavo-convex relationship between the fastening portion 32 provided in the flow path block 10a and the pin fixing portion 35 provided in the fastening block 10c may be the form shown in FIG. 3 or the form shown in FIG. .

  The number of fastening pins 38 provided in the control valve may be two or more or one, but if the number is increased, residual strain can be distributed over a wide range of the flow path block 10a.

  The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the invention. For example, the on-off valve body 15 is a diaphragm type, but a poppet type on-off valve body may be provided. The control valve shown in the figure is an on-off valve that switches the primary side flow path and the secondary side flow path between the communication state and the cutoff state, but the primary side flow is changed by changing the opening of the valve body. The present invention can also be applied as a valve for controlling the flow rate and pressure of the fluid flowing into the secondary flow path from the passage.

10a Flow path block 10b Drive block 10c Fastening block 11 Primary flow path 12 Secondary flow path 15 On-off valve element 16 Valve seat 17 Screw member 20 Drive rod 22 Piston 24 Compression coil spring 25 Pneumatic chamber 31 Recess 32 Fastening part 35 Pin Fixing portion 36 Clearance 37 Pin fixing hole 38 Fastening pin 39 Pin through hole 41 Pin fitting portion 42 Pin fitting hole 43 Constricted portion

Claims (7)

A flow path block made of resin in which a primary flow path to which fluid is supplied and a secondary flow path for discharging fluid are formed;
A drive block disposed on the surface side of the flow path block, provided with a valve body driving mechanism for driving the valve body and provided with a pin fitting portion having a pin fitting hole;
A fastening block in which a pin fixing hole is formed and disposed on the bottom side of the flow path block;
A fastening portion provided to protrude from the bottom surface side of the flow path block and having a pin through hole formed therein;
Fastening pins inserted into the pin fitting holes, the pin fixing holes, and the pin through holes,
Have
The control valve, wherein the flow path block is fastened to the drive block and the fastening block by the fastening pin. 2. The control valve according to claim 1 , wherein the drive block and the fastening block are formed of a material having a hardness higher than that of the flow path block made of resin. According to claim 1 or 2 control valve, wherein the fastening block and the flow path block, control valve, characterized in that incorporated within the pin engaging portion. The control valve according to any one of claims 1 to 3 , wherein a constriction part into which the flow path block bites into the fastening pin is provided. A flow path made of resin in which a primary flow path for supplying fluid and a secondary flow path for discharging fluid are formed, and a valve body drive that is attached to the surface side of the flow path block and drives the valve body A driving block provided with a pin fitting portion having a mechanism and a pin fitting hole; a fastening block in which a pin fixing hole is formed and disposed on a bottom surface side of the flow channel block; and A fastening portion provided protruding from the bottom side and having a pin through hole formed thereon,
A control valve assembly method comprising:
Apply external force in a combined state to the flow path block, the drive block, and the fastening block,
A fastening pin is inserted into the pin fitting hole, the pin fixing hole and the pin through hole under a state where the central axes of the pin fitting hole, the pin fixing hole and the pin through hole are coaxial. ,
A method of assembling a control valve, wherein the flow path block, the drive block, and the fastening block are fastened. 6. The method of assembling a control valve according to claim 5 , wherein when the fastening block is abutted and combined with the flow path block in which the drive block is assembled, the pin fitting is more than the pin fixing hole and the pin through hole. The hole is shifted to the surface side of the flow path block,
A control valve characterized in that a compression force is applied to the flow path block by the drive block and the fastening block by the fastening pin inserted into the pin fitting hole, the pin fixing hole, and the pin through hole. Assembly method. 6. The method of assembling a control valve according to claim 5 , wherein when the fastening block is abutted and combined with the flow path block in which the drive block is assembled, the pin fitting is more than the pin fixing hole and the pin through hole. The hole is shifted to the surface side of the flow path block,
Under the state where the fastening pin is inserted into the pin fixing hole, the pin through hole, and the pin fitting hole, the fastening pin is brought into close contact with the pin through hole, and a constriction formed on the fastening pin A method for assembling a control valve, wherein the flow path block is bitten.

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