JP5995335B2 - シリコン結晶基板を成長するための装置および方法 - Google Patents
シリコン結晶基板を成長するための装置および方法 Download PDFInfo
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- JP5995335B2 JP5995335B2 JP2014541072A JP2014541072A JP5995335B2 JP 5995335 B2 JP5995335 B2 JP 5995335B2 JP 2014541072 A JP2014541072 A JP 2014541072A JP 2014541072 A JP2014541072 A JP 2014541072A JP 5995335 B2 JP5995335 B2 JP 5995335B2
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- crucible
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/06—Non-vertical pulling
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/007—Pulling on a substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/206—Controlling or regulating the thermal history of growing the ingot
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
- C30B15/305—Stirring of the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
Description
米国政府は、本発明における一括払いライセンス、および、限られた状況において、米国エネルギー省により授与された契約番号DE−EE0000595の条項に従って与えられる合理的な条項に関して、他者にライセンス供与するよう特許権者に対して要求する権利を有する。
本願開示の実施例はシリコン結晶成長の分野に関する。より具体的には、本発明は、シリコン結晶成長を制御するための、異方性の材料を用いた熱負荷平準化に関する。
Claims (20)
- 熱源と、
前記熱源の上方に配置され、上面が成長界面として定義される溶融シリコンを収容できるるつぼと、
前記熱源と前記るつぼとの間に配置され、前記熱源により生じる温度および熱流束の変動を均一化できる異方性熱負荷平準化部材と、
前記るつぼの上方に位置され、前記溶融シリコンからの熱を吸収し、前記溶融シリコンをシリコン結晶基板に結晶化させる冷却板部材と、
前記溶融シリコン内に全体が浸かる上面と、前記るつぼの底の上方に配置された下面とを有しており、前記るつぼの内壁から延びたバッフル構造と、を備え、
前記バッフル構造は、前記溶融シリコンが、前記バッフル構造の上面の上を当該上面に沿って第1の方向に流れるとともに、前記バッフル構造の下面の下を当該下面に沿って前記第1の方向と逆方向の第2の方向に流れるようにさせる、
シリコン結晶基板を成長させる装置。 - 前記第1の方向は、前記シリコン結晶基板を前記るつぼから引っ張る方向と同じである、請求項1に記載の装置。
- 前記異方性熱負荷平準化部材は、前記るつぼの表面に沿う第1方向における第1熱伝導率と、前記るつぼの表面に垂直な第2方向における第2熱伝導率とを有し、
前記第1熱伝導率は前記第2熱伝導率よりも大きい請求項1または2に記載の装置。 - 前記シリコン結晶基板は、前記成長界面から垂直下向きの方向に成長する請求項1から3のいずれか1項に記載の装置。
- 前記るつぼは、前記異方性熱負荷平準化部材によって実質的に囲まれる請求項1から4のいずれか1項に記載の装置。
- 前記異方性熱負荷平準化部材は、熱分解グラファイトを含む受動部材である請求項1から5のいずれか1項に記載の装置。
- 前記熱分解グラファイトは厚さが10mmである請求項6に記載の装置。
- 前記るつぼは石英を含む請求項1から7のいずれか1項に記載の装置。
- 前記石英は厚さが5mmである請求項8に記載の装置。
- 前記るつぼの端部近傍に配置され、前記シリコン結晶基板が前記るつぼから引っ張られる間に前記シリコン結晶基板を支持する支持テーブルをさらに備える請求項1から9のいずれか1項に記載の装置。
- 前記るつぼ内に収容され、前記溶融シリコンの流れを前記るつぼ内の前記バッフル構造の周りに向けることのできるポンプデバイス
をさらに備える請求項1から10のいずれか1項に記載の装置。 - 上面の一部分が成長表面を定義する溶融シリコンによりるつぼを満たす段階と、
熱源を用いて前記るつぼを加熱する段階と、
前記熱源と前記るつぼとの間に配置された受動熱負荷平準化異方性材料により、前記熱源から前記るつぼの表面に入射される熱を制御する段階と、
前記成長表面の上方の領域を冷却することにより、前記溶融シリコンの前記成長表面において均一な熱流束を維持する段階と、
前記溶融シリコン内に全体が浸かる上面と、前記るつぼの底の上方に配置された下面とを有しており、前記るつぼの内壁から延びたバッフル構造の周りに前記溶融シリコンをポンプで送り込む段階と、備え、
前記バッフル構造は、前記溶融シリコンが、前記バッフル構造の上面の上を当該上面に沿って第1の方向に流れるとともに、前記バッフル構造の下面の下を当該下面に沿って前記第1の方向と逆方向の第2の方向に流れるようにさせる、
シリコン結晶基板を成長させる方法。 - 成長している前記シリコン結晶基板を、前記るつぼから遠ざかるように、一定の引っ張り速度で引っ張る段階をさらに備える請求項12に記載の方法。
- 前記第1の方向は、前記シリコン結晶基板を前記るつぼから引っ張る方向と同じである、請求項13に記載の方法。
- 前記受動熱負荷平準化異方性材料は熱分解グラファイトを含む請求項12から14のいずれか1項に記載の方法。
- 前記シリコン結晶基板の厚さを測定する段階と、
前記シリコン結晶基板の測定された前記厚さが容認される許容値内にあるかを決定する段階と、をさらに備える請求項13または14に記載の方法。 - 前記シリコン結晶基板の測定された前記厚さが前記容認される許容値内にない場合に、前記熱源から前記るつぼの前記表面に入射される前記熱の量を変更する段階をさらに備える請求項16に記載の方法。
- 前記シリコン結晶基板の測定された前記厚さが前記容認される許容値内にない場合に、前記成長表面の上方の前記領域を冷却する速度を変更する段階をさらに備える請求項16または17に記載の方法。
- 前記シリコン結晶基板の測定された前記厚さが前記容認される許容値内にない場合に、前記るつぼから遠ざかる前記引っ張り速度を変更する段階をさらに備える請求項16から18のいずれか1項に記載の方法。
- 前記シリコン結晶基板の測定された前記厚さが前記容認される許容値内にない場合に、前記溶融シリコンの量によって前記るつぼを満たす段階を変更する段階をさらに備える請求項16から19のいずれか1項に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/292,410 | 2011-11-09 | ||
US13/292,410 US9464364B2 (en) | 2011-11-09 | 2011-11-09 | Thermal load leveling during silicon crystal growth from a melt using anisotropic materials |
PCT/US2012/059236 WO2013070363A1 (en) | 2011-11-09 | 2012-10-08 | Thermal load leveling using anisotropic materials |
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JP2014534158A JP2014534158A (ja) | 2014-12-18 |
JP5995335B2 true JP5995335B2 (ja) | 2016-09-21 |
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JP2014541072A Expired - Fee Related JP5995335B2 (ja) | 2011-11-09 | 2012-10-08 | シリコン結晶基板を成長するための装置および方法 |
Country Status (6)
Country | Link |
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US (2) | US9464364B2 (ja) |
JP (1) | JP5995335B2 (ja) |
KR (1) | KR101963611B1 (ja) |
CN (1) | CN104011270B (ja) |
TW (1) | TWI548786B (ja) |
WO (1) | WO2013070363A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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US9587324B2 (en) | 2014-05-12 | 2017-03-07 | Varian Semiconductor Equipment Associates, Inc. | Apparatus for processing a melt |
US10030317B2 (en) * | 2014-10-17 | 2018-07-24 | Varian Semiconductor Equipment Associates, Inc. | Apparatus and method for controlling thickness of a crystalline sheet grown on a melt |
TWI668442B (zh) * | 2014-10-17 | 2019-08-11 | 美商瓦里安半導體設備公司 | 薄片形成設備、用於測量熔體表面的薄片的厚度的系統及用於在薄片形成設備中測定材料界面的位置的方法 |
US10526720B2 (en) * | 2015-08-19 | 2020-01-07 | Varian Semiconductor Equipment Associates, Inc. | Apparatus for forming crystalline sheet from a melt |
CN107217296B (zh) * | 2017-04-28 | 2019-05-07 | 常州大学 | 一种硅片水平生长设备和方法 |
JP2022543358A (ja) * | 2019-08-09 | 2022-10-12 | リーディング エッジ イクウィップメント テクノロジーズ インコーポレイテッド | 酸素濃度の低い領域を有するリボンまたはウェハの製造 |
US11719619B2 (en) * | 2020-02-26 | 2023-08-08 | United States Of America As Represented By The Secretary Of The Army | System and method for testing adhesion of brittle materials |
US11421340B2 (en) * | 2020-02-26 | 2022-08-23 | United States Of America As Represented By The Secretary Of The Army | Vertical draw system and method for surface adhesion of crystalline materials |
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US3798007A (en) * | 1969-12-05 | 1974-03-19 | Ibm | Method and apparatus for producing large diameter monocrystals |
JPS5215485A (en) * | 1975-07-28 | 1977-02-05 | Toyo Silicon Kk | Process for growth of ribbon crystals by lateral pulling |
DE2633961C2 (de) * | 1975-07-28 | 1986-01-02 | Mitsubishi Kinzoku K.K. | Verfahren zum Ziehen eines dünnen Halbleiter-Einkristallbandes |
JPS5261180A (en) | 1975-11-14 | 1977-05-20 | Toyo Shirikon Kk | Horizontal growth of crystal ribbons |
US4217165A (en) * | 1978-04-28 | 1980-08-12 | Ciszek Theodore F | Method of growing a ribbon crystal particularly suited for facilitating automated control of ribbon width |
JPS5580798A (en) | 1978-12-09 | 1980-06-18 | Agency Of Ind Science & Technol | Ribbon crystal growing method by lateral pulling |
US4251206A (en) | 1979-05-14 | 1981-02-17 | Rca Corporation | Apparatus for and method of supporting a crucible for EFG growth of sapphire |
US4599132A (en) | 1985-01-18 | 1986-07-08 | Energy Materials Corporation | Guidance system for low angle silicon ribbon growth |
US4747774A (en) * | 1987-02-09 | 1988-05-31 | Westinghouse Electric Corp. | Conforming crucible/susceptor system for silicon crystal growth |
JP3769800B2 (ja) * | 1996-01-12 | 2006-04-26 | 株式会社Sumco | 単結晶引上装置 |
FR2884834B1 (fr) * | 2005-04-22 | 2007-06-08 | Solarforce Soc Par Actions Sim | Procede de tirage de rubans de semi-conducteur de faible epaisseur |
US7855087B2 (en) * | 2008-03-14 | 2010-12-21 | Varian Semiconductor Equipment Associates, Inc. | Floating sheet production apparatus and method |
US7998224B2 (en) * | 2008-10-21 | 2011-08-16 | Varian Semiconductor Equipment Associates, Inc. | Removal of a sheet from a production apparatus |
US9050652B2 (en) | 2008-11-14 | 2015-06-09 | Carnegie Mellon University | Methods for casting by a float process and associated apparatuses |
US9267219B2 (en) * | 2010-05-06 | 2016-02-23 | Varian Semiconductor Equipment Associates, Inc. | Gas-lift pumps for flowing and purifying molten silicon |
JP2012025616A (ja) * | 2010-07-22 | 2012-02-09 | Solar Silicon Technology Corp | 排ガス凝縮方法及び排ガス凝縮装置 |
-
2011
- 2011-11-09 US US13/292,410 patent/US9464364B2/en active Active
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2012
- 2012-10-08 JP JP2014541072A patent/JP5995335B2/ja not_active Expired - Fee Related
- 2012-10-08 CN CN201280064149.5A patent/CN104011270B/zh not_active Expired - Fee Related
- 2012-10-08 KR KR1020147015266A patent/KR101963611B1/ko active IP Right Grant
- 2012-10-08 WO PCT/US2012/059236 patent/WO2013070363A1/en active Application Filing
- 2012-10-19 TW TW101138709A patent/TWI548786B/zh not_active IP Right Cessation
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2016
- 2016-10-04 US US15/284,767 patent/US10106911B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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JP2014534158A (ja) | 2014-12-18 |
US10106911B2 (en) | 2018-10-23 |
US9464364B2 (en) | 2016-10-11 |
CN104011270A (zh) | 2014-08-27 |
WO2013070363A1 (en) | 2013-05-16 |
CN104011270B (zh) | 2017-05-10 |
US20130112135A1 (en) | 2013-05-09 |
US20170037535A1 (en) | 2017-02-09 |
KR20140090239A (ko) | 2014-07-16 |
TWI548786B (zh) | 2016-09-11 |
TW201323672A (zh) | 2013-06-16 |
KR101963611B1 (ko) | 2019-03-29 |
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