JP5975683B2 - Fixed support base for ingot cutting - Google Patents

Description

  The present invention relates to a cutting support base for fixing an ingot when the ingot is cut.

  2. Description of the Related Art Conventionally, in the semiconductor manufacturing field and the solar cell manufacturing field, a semiconductor wafer and a photomask substrate are formed by using a device as shown in FIG. 2 in a slicing step of cutting a slice of a predetermined thickness from an ingot such as silicon or quartz. The A wire saw device 11 in FIG. 2 is a device that is generally used in a slicing process, and has wires 14 wound around a plurality of guide rollers 13 at a constant pitch interval. The ingot 12 serving as a workpiece to be cut is bonded to a cutting fixed support base 15. The cutting fixed support base 15 has a substantially planar rectangular shape, and the bonding surface of the cutting fixed support base 15 to the ingot 12 is formed following the shape of the ingot 12. Is formed slightly longer than the length of the ingot 12. The ingot 12 is bonded to the cutting support base 15, and the cutting support base 15 prevents the section from being damaged due to contact between the sections when the section is cut out from the ingot 12. Hold the section after cutting. When cutting out the ingot 12, the wire 14 is pressed against the ingot 12 to cut the ingot 12. At this time, in order to cut the ingot 12 completely, the cutting support 16 is cut into the intimate contact with the ingot 12 as shown in FIG.

  Conventionally, the fixed support base 15 for cutting the ingot 12 includes one formed from a graphite material or an epoxy resin molding material. The fixed cutting support 15 for cutting formed from these molding materials has a characteristic that it is easy to cut, but on the other hand, it has low strength and rigidity and is fragile, and thus breakage such as cracking and chipping occurs during handling. Cheap. Further, when the ingot 12 is cut with the wire 14, the portion of the fixed cutting support 15 for cutting 15 where the notch 16 is attached breaks or swings, so that the sliced ingot slices come into contact with other sliced pieces. May damage the surface of the section.

  As an improvement in the strength and rigidity of the cutting support base 15 for cutting, there is a cutting support base 15 formed from a phenol resin molding material, which is a general-purpose thermosetting resin having strength and rigidity (for example, patents). Reference 1). This cutting support base 15 is formed by molding a molding material in which a glass fiber or a filler is blended with a phenol resin. When cutting a section from the ingot 12 using the characteristics of the phenol resin that is excellent in strength and rigidity. In addition, the strength and rigidity are improved so that the portion of the cutting support base 15 to which the notch 16 is attached is not damaged.

Japanese Patent Laid-Open No. 10-119034

  The fixing support base 15 for cutting molded with a molding material in which glass fiber or filler is blended with phenolic resin has sufficient strength and rigidity because phenolic resin is excellent in strength and rigidity. . However, on the other hand, it is difficult to cut, and a large force is required when cutting the cutting support base 15 for cutting, and the cutting time may be long. Further, since the cutting support base 15 is difficult to cut, the cutting tool is likely to be damaged, such as wear, disconnection, and bending, and the amount of cutting oil used and the frequency of changing the cutting tool are easily increased. In addition, the section may be easily damaged when the ingot 12 is cut by continuing to use the damaged cutting tool.

  An object of the present invention is to provide a fixed support base for cutting an ingot that improves the cutting property, that is, the cutting property, of the phenol resin molding material and is excellent in the cutting property.

According to the invention of claim 1, it is a fixed support for cutting an ingot formed by molding a phenol resin molding material containing a phenol resin and a mineral having a Mohs hardness of 2.5 or less as essential components , For cutting an ingot, wherein the phenol resin molding material contains 20 to 70% by mass of a phenol resin and 3 to 75% by mass of a mineral having a Mohs hardness of 2.5 or less . A fixed support is provided.

That is, in the invention of claim 1, the fixed support base for cutting an ingot is molded from a phenol resin molding material in which a phenol resin and a mineral having a Mohs hardness of 2.5 or less are blended in a blending ratio within a predetermined range. Therefore, a fixed support base for cutting an ingot having better cutting properties and moldability is provided.

  In the present invention, the ingot is an ingot used in the semiconductor field and the solar cell field, and examples of the material of the ingot include silicon, silicon carbide, sapphire, gallium arsenide, gallium nitride, quartz, and the like. Not.

  In the present invention, the cutting property indicates the ease of cutting of the cutting support base itself. Since the cutting support base having good cutting performance can cut the cutting support base in a short time even with a small force, the ingot slicing step can be performed efficiently. In addition, the cutting fixed support base with good cutting performance can suppress breakage such as wear, disconnection, and bending of the cutting tool, thereby reducing the frequency of maintenance and improving productivity.

  In the present invention, Mohs hardness is one of the mechanical properties of a material and is a measure of hardness that has been widely used for minerals since ancient times, and indicates how hard it is to scratch when it is scratched. It is. As for the Mohs hardness, the hardness that is most difficult to be damaged is defined as a hardness of 10, that is, a mineral having a low value of the Mohs hardness is a mineral that is easily damaged.

  In the present invention, a mineral is a naturally occurring substance, which is a homogeneous substance having a substantially constant chemical composition and atomic arrangement.

According to the invention of claim 2, wherein the phenol resin molding material, cutting the fixed support of the ingot according to claim 1, characterized in that glass fibers are additionally blended in an amount of 5 to 50 mass% A stand is provided.

That is, in the invention of claim 2, the fixed support base for cutting an ingot is molded from a phenol resin molding material in which a phenol resin, a mineral having a Mohs hardness of 2.5 or less, and a glass fiber are blended at a blend ratio within a predetermined range. Therefore, there is provided a fixed support base for cutting an ingot that has excellent strength and rigidity, excellent cutting properties, and prevents damage such as wear of a cutting tool.

According to the invention of claim 3, the fixed support base for cutting an ingot according to claim 1 or 2 , wherein the mineral having a Mohs hardness of 2.5 or less is talc, graphite, or clay. Provided.

That is, in the invention of claim 3 , by using talc, graphite, and clay for the mineral having a Mohs hardness of 2.5 or less, a fixed support base for cutting an ingot having better cutting properties is provided.

According to the first to third aspects of the invention, it is possible to provide a fixed support base for cutting an ingot that improves the cutting property, that is, the cutting property, of the phenol resin molding material and is excellent in the cutting property and the molding property .

It is a schematic diagram for demonstrating the micro cutting machine used for the cutting property evaluation test of this invention. It is a schematic diagram for demonstrating the wire saw apparatus used at the slice process of the conventional ingot. It is a schematic diagram of the fixed support stand for the cutting | disconnection of the ingot separated from the ingot after being used at the slice process of the conventional ingot.

  In the present invention, the phenol resin may be any of novolak type phenol resin, resol type phenol resin, and other known phenol resins, and is not particularly limited. The blending ratio of the phenol resin is preferably 20 to 70% by mass, more preferably 25 to 50% by mass with respect to the phenol resin molding material. In order to suppress variations in the shape, physical properties, and moldability of the molded product, the blending ratio of the phenol resin is preferably 20% by mass or more and 70% by mass or less. In addition, in order to manufacture phenol resin molding materials using general-purpose equipment and mold molded products, the blending ratio of phenol resin is more preferably 25% by mass or more, and the balance between cutting property, strength and rigidity is achieved. For this purpose, the blending ratio of the phenol resin is more preferably 50% by mass or less.

  In the present invention, the mineral is blended in order to improve the cutting performance of the fixed support base for cutting, and for that purpose, it is desirable that the Mohs hardness of the mineral blended in the phenol resin molding material is 2.5 or less. . Examples of minerals having a Mohs hardness of 2.5 or less include graphite, talc, clay, asphalt, calcium sulfate, cocoon, hydrous aluminum silicate, and the like. In order to improve the efficiency, talc, graphite and clay are preferred. In addition, talc, graphite, and clay are preferable because they are highly versatile and easily available in sizes and shapes suitable for molding conditions. The size and shape of the mineral are not particularly limited and can be appropriately selected depending on the purpose and molding conditions. These minerals may be used alone or in combination of two or more.

  Moreover, it is preferable that the compounding ratio of the mineral which has the hardness of Mohs hardness 2.5 or less is 3-75 mass% with respect to a phenol resin molding material, and it is still more preferable that it is 5-50 mass%. The blending ratio of minerals having a Mohs hardness of 2.5 or less is preferably 3% by mass or more in order to effectively improve the cutting property and shorten the cutting time of the slicing process. In order to ensure the strength and rigidity that can be used, and 75% by mass or less is preferable in order to ensure moldability. Further, in order to further improve the cutting property and shorten the cutting time of the slicing process and thereby reduce the wear of the cutting tool, 5% by mass or more is further preferable, and the cost is reduced and the phenol resin molding material In order to give flexibility to the blending ratio of components other than minerals having a Mohs hardness of 2.5 or less and to easily meet the purpose and molding conditions, 50% by mass or less is more preferable.

  In this invention, glass fiber is mix | blended in order to improve the intensity | strength and rigidity of the fixed support stand for cutting, and the compounding quantity of glass fiber has preferable 5-50 mass% with respect to a phenol resin molding material. In order to effectively improve the strength and rigidity, it is preferably 5% by mass or more, and in order to ensure moldability and reduce wear of the cutting tool, it is preferably 50% by mass or less. Moreover, the thickness, length, and shape of the glass fiber are not particularly limited, and can be appropriately selected depending on the purpose and molding conditions.

  In the present invention, glass fibers are used to improve the strength and rigidity of the fixed support for cutting. In addition to glass fibers, known reinforcing fibers such as metal fibers, carbon fibers, mineral fibers, and organic fibers. Can be used.

  Moreover, in the glass fiber which is inorganic reinforcement fiber, in order to improve the adhesiveness of glass fiber and resin, you may perform the coupling process which mixes a coupling agent uniformly with the glass fiber before using it previously. . Examples of the coupling agent include silane and titanate, and are not particularly limited. If you want to improve the cutting performance of the fixed support base for cutting or reduce the cost, you do not need to perform the coupling process, but if you want to improve the strength and rigidity of the fixed support base for cutting, use the coupling. Processing may be performed.

  The phenol resin molding material of the present invention may be blended with a filler used in conventional phenol resin molding materials as an extender, as desired, for example, to reduce costs or increase bulk. As the filler, known inorganic fillers such as calcium carbonate, silica, barium sulfate, barium carbonate, magnesium oxide, and known organic fillers such as wood powder, cotton chip, and cotton powder can be used, and particularly limited. However, calcium carbonate is preferred in that it is relatively inexpensive and is readily available in preferred sizes and shapes. The size and shape of the inorganic filler are not particularly limited, and can be appropriately selected depending on the purpose and molding conditions.

  The phenol resin molding material of the present invention includes various additives used in conventional phenol resin molding materials as desired, for example, a curing agent, a curing catalyst, a mold release agent such as zinc stearate and calcium stearate, and a coupling. Agents, pigments, solvents and the like can be blended.

  The method for producing the phenolic resin molding material of the present invention is not particularly limited, but the kneaded material heated and kneaded with a pressure kneader, a mixing roll, a twin screw extruder or the like is formed into a sheet, and pulverized using a pelletizer, a power mill, or the like. Manufactured. The molding material thus obtained can be applied to any of injection molding, transfer molding, compression molding and the like.

  EXAMPLES The present invention will be specifically described with reference to examples, but the present invention is not limited to these examples. Moreover, when describing a compounding ratio using the mass% in this specification, it describes as mass% with respect to a phenol resin molding material.

<Example 1>
As shown in Table 1, 35% by mass of phenol resin, 10% by mass of mineral having a Mohs hardness of 2.5 or less, 15% by mass of glass fiber, and 40% by mass of calcium carbonate as a filler And mixed uniformly. Thereafter, the mixture was heated and kneaded uniformly with a hot roll to form a sheet, cooled and pulverized with a power mill to obtain a granulated molding material. In this example, talc having a Mohs hardness of 1 is used as a mineral having a Mohs hardness of 2.5 or less.

  The obtained molding material was molded with an injection molding machine to obtain test pieces used in various tests. The injection molding conditions were as follows.

(Injection molding conditions)
Cylinder temperature: front 85 ° C, rear 60 ° C
Mold temperature: 160 ° C
Curing time: 60 seconds

  Using the obtained test piece, the bending strength and the bending elastic modulus were measured and evaluated. Various characteristic evaluation tests were evaluated by the following test methods. The results are shown in Table 1.

(1) Bending strength Bending strength was measured according to JIS K 6911 standard.
(2) Flexural modulus The flexural modulus was measured according to JIS K 6911 standard.

  Moreover, cutting property was evaluated using the obtained test piece. Cutting property was evaluated by the following test method. The results are shown in Table 1.

(Cutting property)
The cutting property evaluation test was performed by cutting a test piece which is the workpiece 4 under the following conditions using the micro cutting machine shown in FIG. 1 and measuring the cutting time. Here, the micro cutting machine is composed of a band 1 for cutting the workpiece 4, a translation table 2 for fixing the workpiece 4, and a weight 3 for moving the translation table 2, and is fixed to the translation table 2. The workpiece 4 can be cut by bringing the workpiece 4 into contact with the band 1 and moving the translation table 2 by the load of the weight 3. The band 1 has a loop shape and is coated with a diamond tip on the edge. Further, the load when cutting the workpiece 4 can be adjusted by the weight 3. The evaluation of cutting performance is based on the time required to cut a test piece containing a mineral having a Mohs hardness of 2.5 or less, and a standard not containing a mineral having a Mohs hardness of 2.5 or less. This was done by comparing the time taken to cut the test piece. The test piece used as a reference | standard was created for every compounding ratio of the phenol resin, and the cutting property was compared between the test pieces with the same compounding ratio of the phenol resin. Cutting with a short cutting time and improved cutting performance compared to the cutting time of the standard test piece, △, cutting with a shorter cutting time and further improved cutting performance, cutting with a very short cutting time Those having excellent properties are indicated by ◎, and those having a long cutting time and poor cutting properties are indicated by ×.

(Cutting property test conditions)
Test apparatus: Micro-cutting machine BS-300CL (made by Meiwa Forsys)
Band type: MD90 (made by Meiwa Forsys)
Band speed: 400m / min
Band thickness: 200 μm
Load: 500g
Cooling method: Water circulation method Workpiece: Plate-shaped test piece having a width of 100 mm, a length of 100 mm, and a thickness of 15 mm

<Examples 1 to 14, Comparative Examples 1 and 7>
Table 1 shows the blending ratio of various components of Examples 1 to 14, Comparative Example 1, and Comparative Example 7. Except that the blending ratio was changed as shown in Table 1, it was the same as Example 1, a molding material was produced by the same method as Example 1, and various evaluation tests were performed by the same method as Example 1.

  From Table 1, when comparing Example 1, Example 10, Example 11, Example 12, Example 13, Example 14 with Comparative Example 1 and Comparative Example 7, a mineral having a Mohs hardness greater than 2.5 In Comparative Example 7 containing No, the cutting property is worse compared to Comparative Example 1 containing no mineral. On the other hand, Example 1, Example 10, Example 11, Example 12, Example 13, and Example 14 containing a mineral having a Mohs hardness of 2.5 or less have improved cutting properties compared to Comparative Example 1. doing. In addition, Example 1, Example 10, Example 11, Example 12, Example 13, and Example 14 had comparable bending strength and flexural modulus as Comparative Example 1 compared to Comparative Example 1. From this, it was shown that the cutting property was improved while maintaining excellent strength and rigidity by blending a phenol resin molding material with a mineral having a Mohs hardness of 2.5 or less.

  Moreover, since Example 1, Example 10, Example 11, Example 12, Example 13, Example 14, and Example 14 differ in the kind of each compounded mineral, regardless of the kind of mineral, phenol resin molding It has been shown that the cutting property is improved by adding a mineral having a Mohs hardness of 2.5 or less to the material. Moreover, since the Mohs hardness of Example 1, Example 10, Example 11, Example 12, Example 13, Example 13 and Example 14 is different in each of the blended minerals, regardless of the magnitude of the Mohs hardness, the Mohs It was shown that the cutting property is improved by adding a mineral having a hardness of 2.5 or less.

  Here, the reason why the cutting property can be improved while maintaining excellent strength and rigidity by blending a phenol resin molding material with a mineral having a Mohs hardness of 2.5 or less is as follows. It seems that minerals having a hardness of 5 or less are easily damaged. That is, the lower the Mohs hardness of the mineral, the more easily the mineral is scratched, and when the mineral that is easily scratched is dispersed in the phenolic resin molding material, when cutting the molded product with a cutting tool, Since the cutting tool comes into contact with easily scratched minerals, the molded product can be cut in a short time even with a small force. Therefore, it seems that cutting property can be improved while maintaining the excellent strength and rigidity of the phenol resin molding material.

  From Table 1, when comparing Example 1, Example 2, Example 3, Example 4, Example 5, Example 6, Example 7, Example 8, and Example 9, the Mohs hardness is 2.5 or less. When the blending ratio of the minerals increases, the cutting property tends to be improved, and when the blending ratio of the mineral having a Mohs hardness of 2.5 or less is 3% by mass or more, the cutting property is effectively improved. Therefore, the blending ratio of the mineral having a Mohs hardness of 2.5 or less is preferably 3% by mass or more in order to effectively improve the cutting property and shorten the cutting time of the slicing process. Moreover, in order to ensure the strength and rigidity which can be used as a fixed support for cutting an ingot, the blending ratio of the mineral having a Mohs hardness of 2.5 or less is preferably 75% by mass or less. Further, when the mixing ratio of the mineral having a Mohs hardness of 2.5 or less is 5% by mass or more, the cutting property is further improved. Therefore, the blending ratio of minerals having a Mohs hardness of 2.5 or less is effective in improving the cutting performance, thereby efficiently performing the ingot slicing process and suppressing the wear of the cutting tool. Is more preferably 5% by mass or more. When the blending ratio of the mineral having a Mohs hardness of 2.5 or less in the phenol resin molding material is increased, the cutting property is improved. However, when the blending ratio of the mineral having a Mohs hardness of 2.5 or less is set to a high ratio When blending other ingredients, the combination of blending is limited. Accordingly, in order to facilitate blending in accordance with various purposes and specifications such as strength, rigidity, cost, and moldability, the blending ratio of minerals having a Mohs hardness of 2.5 or less is more preferably 50% by mass or less. .

<Examples 1, 15-19, Comparative Examples 1-6>
Table 2 shows the blending ratios of various components of Examples 1, 15 to 19 and Comparative Examples 1 to 6. These were the same as in Example 1 except that the blending ratio was changed as shown in Table 2. The molding material was produced in the same manner as in Example 1, and various evaluation tests were performed in the same manner as in Example 1. It was.

  From Table 2, Example 1, Example 15, Example 16, Example 17, Example 18, Example 19, and Comparative Example 1, Comparative Example 2, Comparative Example 3, Comparative Example 4, Comparative Example 5, Comparative Example 5, and Comparative Example Comparison with Example 6 shows that, by blending a mineral having a Mohs hardness of 2.5 or less, cutting performance is improved while maintaining excellent strength and rigidity at any blending ratio of phenolic resins. . In the phenol resin molding material, when the blending ratio of the phenol resin is low, other components are not uniformly dispersed, the connection between the components is lowered, and the variation in physical properties tends to increase. Moreover, when the compounding ratio of the phenol resin is high, the amount of gas during molding and the dimensional change after molding tend to increase. Therefore, the blending ratio of the phenol resin is preferably 20% by mass or more and 70% by mass or less in order to suppress variations in the shape, physical properties, and moldability of the molded product within a possible range. Moreover, in order to manufacture phenol resin molding materials and mold molded products with general-purpose production equipment, the blending ratio of phenol resin is more preferably 25% by mass or more, and a balance between cutting property, strength and rigidity is achieved. Therefore, the blending ratio of the phenol resin is more preferably 50% by mass or less.

<Examples 20, 20 to 24, Comparative Example 1>
Table 3 shows the blending ratios of the various components of Examples 1, 20 to 24 and Comparative Example 1. These were the same as in Example 1 except that the blending ratio was changed as shown in Table 3. The molding material was produced in the same manner as in Example 1, and various evaluation tests were performed in the same manner as in Example 1. It was. Moreover, about Example 1,20-24, the influence of the abrasion to a cutting tool was confirmed by visually observing the diamond chip | tip etc. of the cutting tool after a cutting | disconnection. Abrasion and peeling of diamond chips, etc. that are considered to be extremely difficult to wear when cutting a fixed support base for cutting with little wear and peeling of diamond chips, etc. are standard and for cutting ○, which seems to be difficult to wear the cutting tool when cutting the fixed support base, wear and peeling of diamond chips, etc. is seen, there is concern about the impact on the cutting tool when cutting the fixed support base for cutting What is supposed to be done is represented by Δ.

  From Table 3, when Example 1, Example 20, Example 21, Example 22, Example 23, Example 24 and Comparative Example 1 are compared, the phenol resin molding material has a Mohs hardness of 2.5 or less. By blending a mineral having a high cutting ability, an excellent cutting property was obtained regardless of the blending ratio of the glass fibers. Strength and rigidity tend to increase as the blending ratio of the glass fibers increases, and cutting performance is effectively improved when the blending ratio of the glass fibers is 5% by mass or more. On the other hand, when the blending ratio of the glass fibers increases, the glass fibers are likely to come into contact with the cutting tool, so that the wear of the cutting tool tends to increase. When the blending ratio of the glass fibers is 55% by mass or more, the cutting tool is affected. Concerned. Accordingly, in order to effectively reinforce the strength and rigidity, the blending ratio of the glass fibers is preferably 5% by mass or more, and in order to suppress the contact between the cutting tool and the glass fiber and to suppress the wear of the cutting tool, The blending ratio is preferably 50% by mass or less.

  The ingot fixing support base for cutting an ingot according to the present invention can be used in a process of cutting an ingot into a block having a size that can be easily processed, a process of cutting a thin section from the ingot, and a process of cutting a thin section into smaller pieces. However, it is preferably used in the process of cutting a thin section from an ingot.

  In the present invention, the cutting tool for cutting the ingot is not particularly limited, and a known cutting tool such as a wire saw, a dicing saw, an inner peripheral blade, a blade saw or the like can be appropriately selected according to the application and process.

  The shape of the fixing support base for cutting the ingot of the present invention is not particularly limited as long as the ingot can be stably placed and firmly bonded and fixed, but the upper surface of the plane rectangular plate, that is, the ingot A shape with a curved adhesive surface is preferred. Further, fine irregularities or the like may be formed on the upper surface of the cutting support base to increase the adhesive strength. Further, a plurality of cutting fixed support bases may be used.

DESCRIPTION OF SYMBOLS 1 Band 2 Translation table 3 Weight 4 Workpiece 11 Wire saw apparatus 12 Ingot 13 Guide roller 14 Wire 15 Fixed support stand 16 for cutting

Claims (3)

A fixed support for cutting an ingot formed by molding a phenol resin molding material containing a phenol resin and a mineral having a Mohs hardness of 2.5 or less as an essential component ,
For cutting an ingot, wherein the phenol resin molding material contains 20 to 70% by mass of a phenol resin and 3 to 75% by mass of a mineral having a Mohs hardness of 2.5 or less . Fixed support base. 2. The fixed support base for cutting an ingot according to claim 1, wherein the phenol resin molding material further contains glass fiber in a proportion of 5 to 50 mass%. The fixed support base for cutting an ingot according to claim 1 or 2 , wherein the mineral having a Mohs hardness of 2.5 or less is talc, graphite, or clay.

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