JP5956911B2 - Shape measuring device, shape measuring method, and shape measuring program - Google Patents

Description

  The present invention relates to a shape measuring device, a shape measuring method, and a shape measuring program.

  In a triangulation type shape measuring apparatus, light is irradiated on the surface of a measurement object, and the reflected light is received by a light receiving element having pixels arranged one-dimensionally or two-dimensionally. The height of the surface of the measurement object can be measured based on the peak position of the received light amount distribution obtained by the light receiving element. Thereby, the shape of the measurement object can be measured.

  Non-Patent Document 1 proposes a shape measurement by a triangulation system that combines encoded light and a phase shift method. Further, Non-Patent Document 2 proposes a shape measurement using a triangulation system in which encoded light and striped light are combined. In these methods, the accuracy of the shape measurement of the measurement object can be improved.

Toni F. Schenk, "Remote Sensing and Reconstruction for Three-Dimensional Objects and Scenes", Proceedings of SPIE, Volume 2572, pp. 1-9 (1995) Sabry F. El-Hakim and Armin Gruen, "Videometrics and Optical Methods for 3D Shape Measurement", Proceedings of SPIE, Volume 4309, pp. 219-231 (2001)

  In the shape measurement by the triangulation method, it often includes a portion where accurate shape measurement is impossible or difficult, such as a portion where a shadow occurs or a portion where multiple reflection of light occurs. Therefore, the posture of the measurement object must be appropriately adjusted so that the position to be measured of the measurement object can be measured. However, depending on the shape of the measurement object, it is not easy to appropriately adjust the posture of the measurement object in a short time.

  An object of the present invention is to provide a shape measuring device, a shape measuring method, and a shape measuring program capable of easily adjusting the posture of a measuring object to a state suitable for shape measurement before measuring the shape of the measuring object. That is.

  (1) The shape measuring apparatus according to the first invention irradiates the stage on which the measurement object is placed and the first light for posture confirmation from above or obliquely above the measurement object placed on the stage. A light projecting unit configured to irradiate the measurement object placed on the stage with the second light for shape measurement from obliquely above, and the measurement object placed on the stage and placed above the stage By changing the relative distance between the light receiving unit configured to receive the light reflected by the object and output a light receiving signal indicating the amount of light received, and the optical axis direction of the light receiving unit The relative distance changing unit that changes the relative distance between the light receiving unit and the measurement target, and the relative distance changing unit relative to the light receiving unit and the measurement target when the measurement target is irradiated with the first light. If the actual distance is changed, A first data generation unit that generates first three-dimensional shape data indicating a three-dimensional shape of the measurement object based on a relative distance between the light reception unit and the measurement object in a state where each of the light reception units is in focus. And second solid shape data indicating the three-dimensional shape of the measurement object by the triangulation method based on the light reception signal output from the light receiving unit when the measurement object is irradiated with the second light. A second data generation unit configured as described above, a display unit that displays an image of the measurement object based on the first three-dimensional shape data as a posture adjustment image, and a measurement on the posture adjustment image displayed on the display unit An image orientation adjustment unit operated by the user to designate a change in the orientation of the target object, and an orientation adjustment image displayed on the display unit in response to the designation of the orientation change by the image orientation adjustment unit. An image orientation changing unit for changing the orientation of the measurement object; Before the shape measurement, the projection unit and the first data generation unit are controlled so as to irradiate the measurement object with the first light and generate the first three-dimensional shape data, and the generated first three-dimensional shape An attitude adjustment image based on the data is displayed on the display unit, the attitude of the measurement object is adjusted to correspond to the attitude of the measurement object on the attitude adjustment image displayed on the display unit, and the second light When the measurement object is assumed to be irradiated, the second data generation unit estimates the defective portion of the second three-dimensional shape data, and the estimated defective portion can be identified. The display unit is controlled to display the posture adjusting image, and the light projecting unit, the light receiving unit, and the second solid shape data are generated while irradiating the measurement object with the second light during shape measurement. Control unit for controlling second data generation unit Is provided.

  In the shape measuring apparatus, the first measurement object is irradiated with the first light before the shape measurement, and the relative distance change unit changes the relative distance between the light receiving unit and the measurement target. First three-dimensional shape data indicating the three-dimensional shape of the measurement target is generated based on the relative distance between the light receiving unit and the measurement target in a state where the light receiving unit is focused on a plurality of portions of the target. .

  Before shape measurement, an image for posture adjustment based on the first three-dimensional shape data is displayed on the display unit. The change of the posture of the measurement object on the displayed posture adjustment image is designated by the image posture adjustment unit. In response to the designation of the change of posture, the posture of the measurement object on the posture adjustment image displayed on the display unit is changed by the image posture changing unit.

  Shape measurement when it is assumed that the posture of the measurement object is adjusted to correspond to the posture of the measurement object on the posture adjustment image displayed on the display unit and the second light is irradiated to the measurement object. A defective portion of the second three-dimensional shape data that is sometimes generated is estimated. An image for adjusting the posture of the measurement object is displayed on the display unit so that the estimated defective portion can be identified.

  At the time of shape measurement, the second light is irradiated onto the measurement object, the light reflected by the measurement object is received by the light receiving unit, and a light reception signal indicating the amount of received light is output from the light receiving unit. Based on the output light reception signal, second solid shape data indicating the three-dimensional shape of the measurement object is generated by the triangulation method.

  Hereinafter, a portion where accurate shape measurement is impossible or difficult is referred to as a measurement difficult portion. Examples of the measurement difficult part include a part where a shadow is generated, a part where multiple reflection of light occurs, a part where light with high intensity is reflected toward the light receiving part, and a part where light enters and diffuses. The portion of the three-dimensional shape data corresponding to the measurement difficulty portion becomes a defective portion such as a data missing portion or a data inaccurate portion. Thereby, the user can change the posture of the measurement object on the posture adjustment image before measuring the shape, and the measurement difficult part when the measurement object is irradiated with the second light in the changed posture. Can be easily recognized. Therefore, when the position where the measurement object is to be measured is included in the measurement difficult part, the user can easily make the posture of the measurement object suitable for shape measurement before measuring the shape of the measurement object. Can be adjusted.

  (2) The light projecting unit is configured to irradiate the measurement object with the first light and the second light source is configured to irradiate the measurement object with the second light. The first light projecting section is inclined by a first angle that is greater than 0 degree and smaller than 90 degrees with respect to the optical axis of the light receiving section or parallel to the optical axis of the light receiving section. The second light projecting unit is arranged so as to emit the first light having a uniform light amount distribution in the measured direction, and the second light projecting unit emits the light and the light emitted from the measurement light source is a pattern for shape measurement. And a pattern generator that generates the second light by converting the light into the second light in a direction inclined by a second angle larger than the first angle with respect to the optical axis of the light receiving unit. May be arranged so as to emit light.

  In this case, the second light projecting unit emits the second light in a direction inclined by a second angle larger than the first angle with respect to the optical axis of the light receiving unit. Accordingly, the second three-dimensional shape data can be easily generated by the triangulation method in a state where the second light is irradiated on the measurement object. In addition, the first light projecting unit emits the first light in a direction inclined by a first angle smaller than the second angle with respect to the optical axis of the light receiving unit, thereby suppressing the generation of shadows. The measurement object can be irradiated with the first light. Therefore, it is possible to obtain a posture adjustment image with few shadow portions.

  (3) The light receiving unit is further configured to image the measurement target, and the control unit displays the image of the measurement target imaged by the light receiving unit together with the posture adjustment image before the shape measurement. The unit may be controlled.

  In this case, before the shape measurement, the user adjusts the posture of the measurement target so that the posture of the measurement target image captured by the light receiving unit approaches the posture of the measurement target on the posture adjustment image. be able to. Thereby, adjustment of the posture of the measurement object is further facilitated.

  (4) The shape measuring apparatus may further include a first posture adjusting unit operated by a user so as to adjust the posture of the measurement object.

  In this case, the user can easily adjust the posture of the measurement object by operating the first posture adjustment unit while confirming the posture adjustment image.

  (5) The shape measurement device is configured to be controllable by the control unit, and further includes a second posture adjustment unit that adjusts the posture of the measurement object, and the control unit has a posture of the measurement object on the posture adjustment image. The second posture adjustment unit may be controlled so as to correspond to the posture of the measurement object.

  In this case, the posture of the measurement object is automatically adjusted so as to correspond to the posture of the measurement object on the posture adjustment image. Thereby, it is not necessary to perform a complicated operation for adjusting the posture of the measurement object.

  (6) The image posture adjustment unit may be configured to be able to adjust the posture of the measurement target so as to correspond to the posture of the measurement target on the posture adjustment image displayed on the display unit.

  In this case, by operating the image posture adjustment unit, the posture of the measurement object on the posture adjustment image is adjusted and the actual posture of the measurement object is also adjusted. Therefore, the user can adjust the posture of the measurement object while recognizing the measurement difficulty portion at the time of shape measurement while looking at the posture adjustment image.

  (7) In the shape measuring method according to the second invention, before the shape measurement, the measurement object placed on the stage by the light projecting unit is irradiated with the first light for posture confirmation from above or obliquely above, When the relative distance between the light receiving unit and the measurement object is changed by changing the relative distance between the light receiving unit and the stage in the optical axis direction of the light receiving unit, Generating first three-dimensional shape data indicating a three-dimensional shape of the measurement object based on a relative distance between the light receiving unit and the measurement object in a state where each of the light receiving units is in focus; A step of causing the display unit to display an image of the measurement object based on the generated first three-dimensional shape data as a posture adjustment image, and a measurement target on the posture adjustment image displayed on the display unit before the shape measurement. A step of accepting designation of a change in the posture of the object; If there is a change in the posture of the measurement object on the displayed posture adjustment image before the shape measurement, the posture adjustment image displayed on the display unit is displayed in response to the posture change designation. The step of changing the posture of the measurement object and the shape measurement, the measurement object placed on the stage by the light projecting unit is irradiated with the second light for shape measurement obliquely from above and reflected by the measurement object. Receiving the received light by the light receiving unit, and generating second solid shape data indicating the three-dimensional shape of the measurement object by the triangulation method based on the light reception signal indicating the amount of light received output from the light receiving unit. And the step of displaying the posture adjustment image on the display unit adjusts the posture of the measurement object so as to correspond to the posture of the measurement target on the posture adjustment image displayed on the display unit before measuring the shape. And the second light is the object to be measured Estimate the defective part of the second three-dimensional shape data that will be generated at the time of shape measurement assuming that it has been irradiated, and display the posture adjustment image of the measurement object on the display unit so that the estimated defective part can be identified It includes a step of displaying.

  In the shape measurement method, a plurality of portions of the measurement object are obtained when the measurement object is irradiated with the first light and the relative distance between the light receiving unit and the measurement object is changed before the shape measurement. First three-dimensional shape data indicating the three-dimensional shape of the measurement target is generated based on the relative distance between the light receiving unit and the measurement target in a state where the light receiving unit is in focus.

  Before shape measurement, an image for posture adjustment based on the first three-dimensional shape data is displayed on the display unit. The posture of the measurement object on the posture adjustment image displayed on the display unit in response to the designation of the posture change when the posture change of the measurement target on the displayed posture adjustment image is designated. Is changed.

  Shape measurement when it is assumed that the posture of the measurement object is adjusted to correspond to the posture of the measurement object on the posture adjustment image displayed on the display unit and the second light is irradiated to the measurement object. A defective portion of the second three-dimensional shape data that is sometimes generated is estimated. An image for adjusting the posture of the measurement object is displayed on the display unit so that the estimated defective portion can be identified.

  At the time of shape measurement, the second light is irradiated onto the measurement object, the light reflected by the measurement object is received by the light receiving unit, and a light reception signal indicating the amount of received light is output from the light receiving unit. Based on the output light reception signal, second solid shape data indicating the three-dimensional shape of the measurement object is generated by the triangulation method.

  Hereinafter, a portion where accurate shape measurement is impossible or difficult is referred to as a measurement difficult portion. Examples of the measurement difficult part include a part where a shadow is generated, a part where multiple reflection of light occurs, a part where light with high intensity is reflected toward the light receiving part, and a part where light enters and diffuses. The portion of the three-dimensional shape data corresponding to the measurement difficulty portion becomes a defective portion such as a data missing portion or a data inaccurate portion. Thereby, the user can change the posture of the measurement object on the posture adjustment image before measuring the shape, and the measurement difficult part when the measurement object is irradiated with the second light in the changed posture. Can be easily recognized. Therefore, when the position where the measurement object is to be measured is included in the measurement difficult part, the user can easily make the posture of the measurement object suitable for shape measurement before measuring the shape of the measurement object. Can be adjusted.

  (8) The shape measurement program according to the third invention is a shape measurement program that can be executed by the processing device, and is above or obliquely above the measurement object placed on the stage by the light projecting unit before the shape measurement. The first light for posture confirmation is emitted from the light source, and the relative distance between the light receiving unit and the stage changes in the optical axis direction of the light receiving unit, so that the relative distance between the light receiving unit and the measurement object changes. In this case, the first shape indicating the three-dimensional shape of the measurement object based on the relative distance between the light receiving unit and the measurement object when the light reception unit is focused on each of the plurality of parts of the measurement object. Processing for generating three-dimensional shape data, processing for displaying an image of a measurement object based on the generated first three-dimensional shape data on the display unit as an image for posture adjustment before shape measurement, and display before shape measurement On the posture adjustment image displayed on the screen Responds to the posture change specification when the processing to accept the change of the posture of the fixed object and the change of the posture of the measurement object on the displayed posture adjustment image before the shape measurement And processing for changing the posture of the measurement object on the posture adjustment image displayed on the display unit, and for measuring the shape from the obliquely upper side to the measurement object placed on the stage by the light projecting unit at the time of shape measurement. The three-dimensional shape of the measurement object is measured by the triangulation method based on the received light signal indicating the amount of light received from the light receiving unit. The processing for generating the second 3D shape data indicating, and the processing for displaying the posture adjustment image on the display unit are performed on the posture adjustment image displayed on the display unit before the shape measurement. Measurement target to correspond to the posture of the measurement target When the posture of the object is adjusted and the second light is assumed to be irradiated to the measurement object, a defective portion of the second three-dimensional shape data to be generated at the time of shape measurement is estimated, and the estimated defective portion Including a process of displaying an image for adjusting the posture of the measurement object on the display unit so as to be identifiable.

  According to the shape measurement program, when the first light is irradiated onto the measurement object before the shape measurement and the relative distance between the light receiving unit and the measurement object is changed, a plurality of measurement objects are measured. First three-dimensional shape data indicating the three-dimensional shape of the measurement target is generated based on the relative distance between the light receiving unit and the measurement target in a state where the light receiving unit is focused on each part.

  Before shape measurement, an image for posture adjustment based on the first three-dimensional shape data is displayed on the display unit. The posture of the measurement object on the posture adjustment image displayed on the display unit in response to the designation of the posture change when the posture change of the measurement target on the displayed posture adjustment image is designated. Is changed.

  Shape measurement when it is assumed that the posture of the measurement object is adjusted to correspond to the posture of the measurement object on the posture adjustment image displayed on the display unit and the second light is irradiated to the measurement object. A defective portion of the second three-dimensional shape data that is sometimes generated is estimated. An image for adjusting the posture of the measurement object is displayed on the display unit so that the estimated defective portion can be identified.

  At the time of shape measurement, the second light is irradiated onto the measurement object, the light reflected by the measurement object is received by the light receiving unit, and a light reception signal indicating the amount of received light is output from the light receiving unit. Based on the output light reception signal, second solid shape data indicating the three-dimensional shape of the measurement object is generated by the triangulation method.

  Hereinafter, a portion where accurate shape measurement is impossible or difficult is referred to as a measurement difficult portion. Examples of the measurement difficult part include a part where a shadow is generated, a part where multiple reflection of light occurs, a part where light with high intensity is reflected toward the light receiving part, and a part where light enters and diffuses. The portion of the three-dimensional shape data corresponding to the measurement difficulty portion becomes a defective portion such as a data missing portion or a data inaccurate portion. Thereby, the user changes the posture of the measurement object on the posture adjustment image before the shape measurement, and the measurement that occurs when the measurement object is irradiated with the second light in the changed posture. Difficult parts can be easily recognized. Therefore, when the position where the measurement object is to be measured is included in the measurement difficult part, the user can easily make the posture of the measurement object suitable for shape measurement before measuring the shape of the measurement object. Can be adjusted.

  According to the present invention, it is possible to easily adjust the posture of a measurement object to a state suitable for shape measurement before measuring the shape of the measurement object.

It is a block diagram which shows the structure of the shape measuring apparatus which concerns on one embodiment of this invention. It is a schematic diagram which shows the structure of the measurement part of the shape measuring apparatus of FIG. It is a schematic diagram of the measuring object in the state irradiated with light. It is a schematic diagram of the measuring object in the state irradiated with light. It is a figure which shows an example of GUI which displays an image on 2 screens. It is a figure for demonstrating the principle of a triangulation system. It is a figure for demonstrating the 1st pattern of measurement light. It is a figure for demonstrating the 2nd pattern of measurement light. It is a figure for demonstrating the 3rd pattern of measurement light. It is a figure which shows the relationship between the timing (number) by which the image in the specific part of the measuring object was image | photographed, and the intensity | strength of the received light. It is a figure for demonstrating the 4th pattern of measurement light. It is a figure which shows an example of GUI of the display part at the time of operation mode selection. It is a figure which shows an example of GUI of the display part at the time of operation mode selection. It is a figure which shows an example of GUI of the display part after shape measurement processing execution. It is a typical side view of a measuring object for explaining an all-focus texture image. It is a figure which shows the relationship between the focus position of a light-receiving part, and the definition of a texture image. It is an omnifocal texture image of the measuring object based on generated omnifocal texture image data. It is a synthesized image of the measurement object based on the synthesized data. It is a figure which shows an example of the GUI of the display part at the time of selection of the kind of texture image. It is a figure for demonstrating correction | amendment of the main solid shape data by substereoscopic shape data. It is a figure for demonstrating correction | amendment of the main solid shape data by substereoscopic shape data. It is a figure for demonstrating correction | amendment of the main solid shape data by substereoscopic shape data. It is a flowchart which shows the procedure of preparation for shape measurement. It is a flowchart which shows the detail of the 1st adjustment in the preparation procedure of shape measurement. It is a flowchart which shows the detail of the 1st adjustment in the preparation procedure of shape measurement. It is a schematic diagram which shows the light-receiving part of FIG. 2 seen from the X direction. It is a flowchart which shows the detail of the 2nd adjustment in the procedure of a preparation for shape measurement. It is a flowchart which shows the detail of the 2nd adjustment in the procedure of a preparation for shape measurement. It is a figure which shows an example of the GUI of the display part at the time of execution of 2nd adjustment. It is a flowchart which shows the procedure of a shape measurement process. It is a flowchart which shows the procedure of a shape measurement process. It is a flowchart which shows the procedure of a shape measurement process. It is a figure for demonstrating adjustment of the attitude | position of a measurement object. It is a perspective view which shows an example of the measuring object for demonstrating the measurement conditions in a shape measurement process. It is a figure which shows the example of a display of the substereoscopic shape image on which the defective partial image was superimposed by the auxiliary | assistant function of attitude | position adjustment. FIG. 36 is a diagram illustrating a display example of a sub-stereoscopic shape image when a change in posture of the measurement target is designated on the sub-stereoscopic shape image of FIG. 35. FIG. 37 is a diagram illustrating a display example of a sub-stereoscopic shape image when a change in posture of the measurement target is designated on the sub-stereoscopic shape image of FIG. 36. It is a figure which shows one display example of the live image obtained by irradiating illumination light to a measuring object before a shape measurement process. It is a figure which shows the example of a display of the live image on which the sub-stereoscopic shape image was superimposed. It is a figure which shows one example of a display of the 2nd image display area | region of FIGS. It is a figure which shows the other example of a substereoscopic shape image at the time of adjustment of the attitude | position of a measurement object, and another display example of a live image. It is a figure which shows the further another example of a display of a substereoscopic shape image at the time of adjustment of the attitude | position of a measurement object, and a live image. It is a flowchart which shows an example of an attitude | position adjustment auxiliary | assistant measurement process. It is a flowchart which shows an example of an attitude | position adjustment auxiliary | assistant measurement process. It is a flowchart which shows an example of an attitude | position adjustment auxiliary | assistant measurement process. It is a flowchart which shows the other example of an attitude | position adjustment auxiliary | assistant measurement process. It is a flowchart which shows the further another example of a posture adjustment auxiliary | assistant measurement process. It is a figure which shows the other example of a display of the 2nd image display area of FIGS.

[1] Configuration of Shape Measuring Device FIG. 1 is a block diagram showing a configuration of a shape measuring device according to an embodiment of the present invention. FIG. 2 is a schematic diagram illustrating a configuration of a measurement unit of the shape measuring apparatus 500 of FIG. Hereinafter, the shape measuring apparatus 500 according to the present embodiment will be described with reference to FIGS. 1 and 2. As shown in FIG. 1, the shape measuring apparatus 500 includes a measuring unit 100, a PC (personal computer) 200, a control unit 300, and a display unit 400.

  As illustrated in FIG. 1, the measurement unit 100 is a microscope, for example, and includes a light projecting unit 110, a light receiving unit 120, an illumination light output unit 130, a stage 140, and a control board 150. The light projecting unit 110 includes a measurement light source 111, a pattern generation unit 112, and a plurality of lenses 113, 114, and 115. The light receiving unit 120 includes a camera 121 and a plurality of lenses 122 and 123. The optical axis of the light receiving unit 120 is formed by the plurality of lenses 122 and 123. On the stage 140, the measuring object S is placed.

  The light projecting unit 110 is disposed obliquely above the stage 140. The measuring unit 100 may include a plurality of light projecting units 110. In the example of FIG. 2, the measurement unit 100 includes two light projecting units 110. Hereinafter, when distinguishing the two light projecting units 110, one light projecting unit 110 is referred to as a light projecting unit 110A, and the other light projecting unit 110 is referred to as a light projecting unit 110B. The light projecting units 110 </ b> A and 110 </ b> B are arranged symmetrically across the optical axis of the light receiving unit 120.

  The measurement light source 111 of each of the light projecting units 110A and 110B is, for example, a halogen lamp that emits white light. The measurement light source 111 may be another light source such as a white LED (light emitting diode) that emits white light. Light emitted from the measurement light source 111 (hereinafter referred to as measurement light) is appropriately condensed by the lens 113 and then enters the pattern generation unit 112.

  The pattern generation unit 112 is a DMD (digital micromirror device), for example. The pattern generation unit 112 may be an LCD (Liquid Crystal Display), LCOS (Liquid Crystal on Silicon), or a mask. The measurement light incident on the pattern generation unit 112 is converted into a preset pattern and a preset intensity (brightness) and emitted. The measurement light emitted from the pattern generation unit 112 is converted into light having a diameter larger than the dimension of the measurement object S by the plurality of lenses 114 and 115 and then irradiated to the measurement object S on the stage 140. .

  The light receiving unit 120 is disposed above the stage 140. The measurement light reflected above the stage 140 by the measurement object S is collected and imaged by the plurality of lenses 122 and 123 of the light receiving unit 120 and then received by the camera 121.

  The camera 121 is, for example, a CCD (Charge Coupled Device) camera including an image sensor 121a and a lens. The image sensor 121a is, for example, a monochrome CCD (charge coupled device). The image sensor 121a may be another image sensor such as a CMOS (complementary metal oxide semiconductor) image sensor. From each pixel of the image sensor 121a, an analog electrical signal (hereinafter referred to as a light reception signal) corresponding to the amount of received light is output to the control board 150.

  Unlike a color CCD, a monochrome CCD does not need to be provided with pixels that receive red wavelength light, pixels that receive green wavelength light, and pixels that receive blue wavelength light. Therefore, the measurement resolution of the monochrome CCD is higher than the resolution of the color CCD. Further, unlike a color CCD, a monochrome CCD does not require a color filter for each pixel. Therefore, the sensitivity of the monochrome CCD is higher than that of the color CCD. For these reasons, the camera 121 in this example is provided with a monochrome CCD.

  In this example, the illumination light output unit 130 emits red wavelength light, green wavelength light, and blue wavelength light to the measurement object S in a time-sharing manner. According to this configuration, a color image of the measuring object S can be taken by the light receiving unit 120 using a monochrome CCD.

  On the other hand, when the color CCD has sufficient resolution and sensitivity, the image sensor 121a may be a color CCD. In this case, the illumination light output unit 130 does not need to irradiate the measurement object S with red wavelength light, green wavelength light, and blue wavelength light in a time-sharing manner, and irradiates the measurement object S with white light. Therefore, the configuration of the illumination light source 320 can be simplified.

  On the control board 150, an A / D converter (analog / digital converter) and a FIFO (First In First Out) memory (not shown) are mounted. The light reception signal output from the camera 121 is sampled at a constant sampling period by the A / D converter of the control board 150 and converted into a digital signal based on the control by the control unit 300. Digital signals output from the A / D converter are sequentially stored in the FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the PC 200 as pixel data.

  As shown in FIG. 1, the PC 200 includes a CPU (Central Processing Unit) 210, a ROM (Read Only Memory) 220, a work memory 230, a storage device 240, and an operation unit 250. The operation unit 250 includes a keyboard and a pointing device. A mouse or a joystick is used as the pointing device.

  The ROM 220 stores a system program. The working memory 230 includes a RAM (Random Access Memory), and is used for processing various data. The storage device 240 is composed of a hard disk or the like. The storage device 240 stores an image processing program and a shape measurement program. The storage device 240 is used for storing various data such as pixel data supplied from the control board 150.

  The CPU 210 generates image data based on the pixel data given from the control board 150. The CPU 210 performs various processes on the generated image data using the work memory 230 and causes the display unit 400 to display an image based on the image data. Further, the CPU 210 gives a driving pulse to a stage driving unit 146 to be described later. The display unit 400 is configured by, for example, an LCD panel or an organic EL (electroluminescence) panel.

  In FIG. 2, two directions orthogonal to each other within a plane (hereinafter referred to as a placement surface) on the stage 140 on which the measurement object S is placed are defined as an X direction and a Y direction, and arrows X and Y respectively. Show. A direction orthogonal to the mounting surface of the stage 140 is defined as a Z direction and is indicated by an arrow Z. A direction rotating around an axis parallel to the Z direction is defined as a θ direction, and is indicated by an arrow θ.

  The stage 140 includes an XY stage 141, a Z stage 142, a θ stage 143, and a tilt stage 144. The XY stage 141 has an X direction moving mechanism and a Y direction moving mechanism. The Z stage 142 has a Z direction moving mechanism. The θ stage 143 has a θ direction rotation mechanism. The tilt stage 144 has a mechanism that can rotate around an axis parallel to the mounting surface (hereinafter referred to as a tilt rotation mechanism). The XY stage 141, the Z stage 142, the θ stage 143, and the tilt stage 144 constitute a stage 140. The stage 140 further includes a fixing member (clamp) (not shown) that fixes the measuring object S to the placement surface.

  Here, a plane located at the focal point of the light receiving unit 120 and perpendicular to the optical axis of the light receiving unit 120 is referred to as a focal plane of the light receiving unit 120. As shown in FIG. 2, the relative positional relationship among the light projecting units 110A and 110B, the light receiving unit 120, and the stage 140 is such that the optical axis of the light projecting unit 110A, the optical axis of the light projecting unit 110B, and the optical axis of the light receiving unit 120. Are set so as to cross each other at the focal plane of the light receiving unit 120. In the present embodiment, the optical axis of the light receiving unit 120 extends in a direction parallel to the Z direction.

  A plane that is located at the focal point of the light projecting unit 110 (the point where the pattern of the measurement light is imaged) and is perpendicular to the optical axis of the light projecting unit 110 is referred to as a focal plane of the light projecting unit 110. Each of the light projecting units 110 </ b> A and 110 </ b> B is configured such that the focal plane of the light projecting unit 110 </ b> A and the focal plane of the light projecting unit 110 </ b> B intersect at a position including the focal point of the light receiving unit 120.

  The center of the rotation axis of the θ stage 143 in the θ direction coincides with the optical axis of the light receiving unit 120. Therefore, when the θ stage 143 is rotated in the θ direction, the measuring object S can be rotated within the field of view around the rotation axis without removing the measuring object S from the field of view. Further, the XY stage 141, the θ stage 143, and the tilt stage 144 are supported by the Z stage 142.

  That is, even if the θ stage 143 is rotated in the θ direction or the tilt stage 144 is rotated in the tilt direction, the center axis of the light receiving unit 120 and the movement axis of the Z stage 142 do not shift. It is configured. Here, the tilt direction is a rotation direction about an axis parallel to the placement surface. With this configuration, even when the position or orientation of the measurement object S is changed, the stage 140 is moved in the Z direction to synthesize a plurality of images respectively captured at a plurality of different focal positions of the light receiving unit 120. It becomes possible.

  Stepping motors are used for the X direction moving mechanism, the Y direction moving mechanism, the Z direction moving mechanism, the θ direction rotating mechanism, and the tilt rotating mechanism of the stage 140, respectively. The X direction moving mechanism, the Y direction moving mechanism, the Z direction moving mechanism, the θ direction rotating mechanism, and the tilt rotating mechanism of the stage 140 are driven by the stage operation unit 145 or the stage driving unit 146 in FIG.

  The user manually operates the stage operation unit 145 to move the mounting surface of the stage 140 in the X direction, the Y direction, or the Z direction relative to the light receiving unit 120, or the θ direction or tilt. Can be rotated in the direction. The stage driving unit 146 moves the stage 140 relative to the light receiving unit 120 in the X direction, the Y direction, or the Z direction by supplying current to the stepping motor of the stage 140 based on the driving pulse given from the PC 200. Or can be rotated in the θ direction or the tilt direction.

  An encoder is attached to a stepping motor used for each of the X direction moving mechanism, Y direction moving mechanism, Z direction moving mechanism, θ direction rotating mechanism, and tilt rotating mechanism of the stage 140. The output signal of each encoder is given to the CPU 210, for example. Based on the signal given from each encoder of the stage 140, the CPU 210 has a position in the X direction (X position), a position in the Y direction (Y position), a position in the Z direction (Z position), The change amount of the rotation angle in the θ direction (θ rotation angle) or the rotation angle in the tilt direction (tilting angle) can be calculated. In the following description, the X position, the Y position, the Z position, the θ rotation angle, and the tilt angle calculated by the CPU 210 are collectively referred to as stage information as appropriate.

  In the present embodiment, stage 140 is an electric stage that can be driven by a stepping motor and can be manually operated, but is not limited thereto. The stage 140 may be an electric stage that can be driven only by a stepping motor, or may be a manual stage that can be operated only manually.

  The control unit 300 includes a control board 310 and an illumination light source 320. A CPU (not shown) is mounted on the control board 310. The CPU of the control board 310 controls the light projecting unit 110, the light receiving unit 120, and the control board 150 based on a command from the CPU 210 of the PC 200.

  The illumination light source 320 includes, for example, three LEDs that emit red light, green light, and blue light. By controlling the luminance of the light emitted from each LED, light of an arbitrary color can be generated from the illumination light source 320. Light generated from the illumination light source 320 (hereinafter referred to as illumination light) is output from the illumination light output unit 130 of the measurement unit 100 through a light guide member (light guide). Note that the illumination light source 320 may be provided in the measurement unit 100 without providing the illumination light source 320 in the control unit 300. In this case, the illumination light output unit 130 is not provided in the measurement unit 100.

  The illumination light output unit 130 of FIG. 2 has an annular shape and is disposed above the stage 140 so as to surround the light receiving unit 120. Thereby, illumination light is irradiated to the measuring object S from the illumination light output unit 130 so that no shadow is generated. 3 and 4 are schematic views of the measuring object S in a state irradiated with light. In the example of FIGS. 3 and 4, the measuring object S has a hole Sh at the approximate center of the upper surface. 3A, 3C, and 4A, the shadow Ss is represented by hatching.

  FIG. 3A is a plan view of the measuring object S in a state irradiated with measurement light from one of the light projecting units 110A in FIG. 2, and FIG. 3B is a cross-sectional view taken along line AA in FIG. It is line sectional drawing. As shown in FIGS. 3A and 3B, when the measurement object S is irradiated with the measurement light from one light projecting unit 110A, the measurement light may reach the bottom of the hole Sh depending on the depth of the hole Sh. The shadow Ss is generated without reaching. Therefore, a part of the measuring object S cannot be observed.

  FIG. 3C is a plan view of the measuring object S in a state irradiated with the measurement light from the other light projecting unit 110B in FIG. 2, and FIG. 3D is a cross-sectional view taken along line BB in FIG. It is line sectional drawing. As shown in FIGS. 3C and 3D, when the measurement object S is irradiated with the measurement light from the other light projecting unit 110B, the measurement light may reach the bottom of the hole Sh depending on the depth of the hole Sh. The shadow Ss is generated without reaching. Therefore, a part of the measuring object S cannot be observed.

  FIG. 4A is a plan view of the measurement object S in a state where measurement light from both the light projecting units 110A and 110B is irradiated, and FIG. 4B is a CC line in FIG. 4A. It is sectional drawing. As shown in FIGS. 4A and 4B, when the measurement object S is irradiated with the measurement light from both the light projecting units 110A and 110B, the measurement light is applied from one of the light projecting units 110A and 110B. Compared with the case where S is irradiated, the measurement light that does not reach the bottom of the hole Sh is reduced, so that the generated shadow Ss is reduced. Therefore, the portion of the measuring object S that can be observed increases.

  FIG. 4C is a plan view of the measuring object S in a state irradiated with illumination light from the illumination light output unit 130 in FIG. 2, and FIG. 4D is a DD line in FIG. It is sectional drawing. As shown in FIGS. 4C and 4D, since the illumination light is irradiated from substantially right above the measurement object S, the illumination light reaches the bottom of the hole Sh regardless of the depth of the hole Sh. To do. Therefore, most of the measuring object S can be observed.

  Displayed on the display unit 400 so that the image of the measuring object S irradiated with the measuring light from one light projecting unit 110A and the image of the measuring object S irradiated with the measuring light from the other light projecting unit 110B are aligned ( (2 screen display). FIG. 5 is a diagram illustrating an example of a GUI (Graphical User Interface) that displays an image on two screens.

  As shown in FIG. 5, the display unit 400 is provided with two image display areas 491 and 492 arranged side by side. When displaying two images on the screen, the measurement light is alternately irradiated from the light projecting units 110 </ b> A and 110 </ b> B so that the measurement light S is switched. In the image display area 491, an image of the measurement object S when the measurement light is irradiated from one light projecting unit 110A is displayed. In the image display area 492, an image of the measurement object S when the measurement light is irradiated from the other light projecting unit 110B is displayed. Thereby, the user can distinguish and recognize the image of the measuring object S when each of the light projecting units 110A and 110B is irradiated with the measurement light.

  In this example, the frequency of switching the measurement light from the light projecting units 110A and 110B is, for example, several Hz. Note that the frequency of switching the measurement light from the light projecting units 110A and 110B may be set to a value (for example, 100 Hz) that cannot be recognized by the user. In this case, the user observes that the measuring object 100 is simultaneously irradiated with the measuring light from both the light projecting units 110 </ b> A and 110 </ b> B in the measuring unit 100.

  Two light amount setting bars 493 and 494 are displayed on the display unit 400. The light amount setting bar 493 includes a slider 493s that can move in the horizontal direction. The light amount setting bar 494 includes a slider 494s that can move in the horizontal direction. Hereinafter, the measurement light emitted from one light projecting unit 110A is referred to as one measurement light, and the measurement light emitted from the other light projection unit 110B is referred to as the other measurement light. The position of the slider 493s on the light amount setting bar 493 corresponds to the light amount of the light receiving unit 120 when receiving one measurement light (hereinafter referred to as the light amount of one measurement light). The position of the slider 494s on the light amount setting bar 494 corresponds to the light amount of the light receiving unit 120 when receiving the other measurement light (hereinafter referred to as the light amount of the other measurement light).

  The user can change the light amount of one measurement light by operating the operation unit 250 of the PC 200 of FIG. 1 and moving the slider 493s of the light amount setting bar 493 in the horizontal direction. The light quantity of one measurement light is changed by changing the brightness of one measurement light or the exposure time of the light receiving unit 120 when receiving one measurement light. Similarly, the user can change the light amount of the other measurement light by operating the operation unit 250 and moving the slider 494s of the light amount setting bar 494 in the horizontal direction. The light quantity of the other measurement light is changed by changing the brightness of the other measurement light or the exposure time of the light receiving unit 120 when receiving the other measurement light.

  As described above, in the image display areas 491 and 492, images of the measurement object S when the measurement light is irradiated by each of the light projecting units 110A and 110B are displayed so as to be aligned. Therefore, the user moves the positions of the sliders 493 s and 494 s of the light amount setting bars 493 and 494 while viewing the images of the measurement object S displayed in the image display areas 491 and 492, respectively. The amount of measurement light can be adjusted appropriately.

  In addition, when there is a correlation between the light quantity of one and the other measurement light and the light quantity of the light receiving unit 120 when receiving the illumination light emitted from the illumination light output unit 130 (hereinafter referred to as illumination light quantity) There is. In this case, the light quantity of the one and the other measurement light may be automatically adjusted based on the light quantity of the illumination light. Or based on the light quantity of illumination light, the adjustment guide for making the light quantity of one and the other measurement light suitable may be displayed on the display part 400. FIG. In this case, the user can appropriately adjust the light quantity of one and the other measurement light by moving the positions of the sliders 493s and 494s of the light quantity setting bars 493 and 494 based on the adjustment guide.

  If the light irradiation direction is different, the light reflection direction is also different. Therefore, even in the same portion of the measurement object S, the brightness of the image irradiated with one measurement light is different from the brightness of the image irradiated with the other measurement light. That is, the amount of light suitable for shape measurement varies depending on the irradiation direction.

  In the present embodiment, it is possible to individually adjust the brightness of each image when the measurement light is irradiated from the light projecting units 110A and 110B. Therefore, it is possible to set an appropriate amount of light according to the light irradiation direction. Further, the image whose light amount is being adjusted is displayed in the image display areas 491 and 492 while being updated. Thereby, the user can adjust the light amount while confirming the image.

  In this case, the PC 200 can display, in the image display areas 491 and 492, in an image display area 491 and 492, a portion in which an overexposure occurs because the image is too bright, or a portion where an overexposure occurs because the image is too dark. Thereby, the user can easily confirm whether or not the light amount is appropriately adjusted.

[2] Shape Measurement of Measurement Object (1) Shape Measurement by Triangular Distance Measurement In the measurement unit 100, the shape of the measurement object S is measured by the triangular distance measurement method. FIG. 6 is a diagram for explaining the principle of the triangulation system. As shown in FIG. 6, an angle α between the optical axis of the measurement light emitted from the light projecting unit 110 and the optical axis of the measurement light incident on the light receiving unit 120 (the optical axis of the light receiving unit 120) is set in advance. The The angle α is larger than 0 degree and smaller than 90 degrees.

  When the measurement object S is not placed on the stage 140, the measurement light emitted from the light projecting unit 110 is reflected by the point O on the placement surface of the stage 140 and enters the light receiving unit 120. On the other hand, when the measuring object S is placed on the stage 140, the measuring light emitted from the light projecting unit 110 is reflected by the point A on the surface of the measuring object S and enters the light receiving unit 120.

  When the distance in the X direction between the point O and the point A is d, the height h of the point A of the measuring object S with respect to the mounting surface of the stage 140 is given by h = d ÷ tan (α). The CPU 210 of the PC 200 in FIG. 1 measures the distance d between the point O and the point A in the X direction based on the pixel data of the measurement object S given by the control board 150. Further, the CPU 210 calculates the height h of the point A on the surface of the measuring object S based on the measured distance d. By calculating the heights of all points on the surface of the measuring object S, the three-dimensional shape of the measuring object S is measured.

  In order to irradiate measurement light to all points on the surface of the measurement object S, measurement light having various patterns is emitted from the light projecting unit 110 in FIG. The pattern of the measurement light is controlled by the pattern generation unit 112 in FIG. Hereinafter, the pattern of the measurement light will be described.

(2) First Pattern of Measurement Light FIG. 7 is a diagram for explaining the first pattern of measurement light. FIG. 7A shows a state in which the measuring object S on the stage 140 is irradiated with the measuring light from the light projecting unit 110. FIG. 7B shows a plan view of the measuring object S irradiated with the measuring light. As shown in FIG. 7A, as the first pattern, measurement light having a linear cross section parallel to the Y direction (hereinafter referred to as linear measurement light) is emitted from the light projecting unit 110. In this case, as shown in FIG. 7B, the portion of the line-shaped measurement light irradiated on the stage 140 and the portion of the line-shaped measurement light irradiated on the surface of the measurement object S are the same as those of the measurement object S. They are shifted from each other in the X direction by a distance d corresponding to the height h of the surface. Therefore, the height h of the measuring object S can be calculated by measuring the distance d.

  When a plurality of portions along the Y direction on the surface of the measuring object S have different heights, the height h of the plurality of portions along the Y direction is measured by measuring the distance d for each portion. Can be calculated.

  Further, the CPU 210 in FIG. 1 measures the distance d for a plurality of portions along the Y direction at one position in the X direction, and then scans the line-shaped measurement light parallel to the Y direction in the X direction. The distance d is measured for a plurality of portions along the Y direction at other positions in the direction. Thereby, the height h of the several part of the measuring object S along the Y direction in the several position of a X direction is calculated. By scanning the line-shaped measurement light in the X direction in a range wider than the dimension in the X direction of the measurement object S, the height h of all points on the surface of the measurement object S can be calculated. Thereby, the three-dimensional shape of the measuring object S can be measured.

(3) Second Pattern of Measuring Light FIG. 8 is a diagram for explaining the second pattern of measuring light. As shown in FIG. 8, as the second pattern, measurement light having a linear cross section parallel to the Y direction and having a pattern in which the intensity changes sinusoidally in the X direction (hereinafter referred to as sinusoidal measurement light). ) Is emitted from the light projecting unit 110 a plurality of times (in this example, four times).

  FIG. 8A shows sinusoidal measurement light emitted for the first time. The intensity of the sinusoidal measurement light emitted for the first time has an initial phase φ at an arbitrary portion P0 on the surface of the measurement object S. When the sinusoidal measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the measuring object S. The intensity of the light reflected by the portion P0 on the surface of the measuring object S is I1.

  FIG. 8B shows sinusoidal measurement light emitted for the second time. The intensity of the sinusoidal measurement light emitted for the second time has a phase (φ + π / 2) at the portion P0 on the surface of the measurement object S. When the sinusoidal measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the measuring object S. The intensity of the light reflected by the portion P0 on the surface of the measuring object S is I2.

  FIG. 8C shows sinusoidal measurement light emitted for the third time. The intensity of the sinusoidal measurement light emitted for the third time has a phase (φ + π) at a portion P0 on the surface of the measurement object S. When the sinusoidal measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the measuring object S. The intensity of the light reflected by the portion P0 on the surface of the measuring object S is I3.

  FIG. 8D shows sinusoidal measurement light emitted for the fourth time. The intensity of the fourth sinusoidal measurement light has a phase (φ + 3π / 2) at the portion P0 on the surface of the measurement object S. When the sinusoidal measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the measuring object S. The intensity of the light reflected by the portion P0 on the surface of the measuring object S is assumed to be I4.

The initial phase φ is given by φ = tan ⁻¹ [(I1−I3) / (I2−I4)]. A height h of an arbitrary portion of the measuring object S is calculated from the initial phase φ. According to this method, the initial phase φ of all portions of the measuring object S can be calculated at high speed and easily by measuring the intensity of light four times. Note that the initial phase φ can be calculated by emitting measurement light having different phases at least three times and measuring the intensity of the received light. By calculating the height h of all the parts on the surface of the measuring object S, the three-dimensional shape of the measuring object S can be measured.

(4) Third Pattern of Measurement Light FIG. 9 is a diagram for explaining the third pattern of measurement light. As shown in FIG. 9, as the third pattern, a plurality of measurement lights having a linear cross section parallel to the Y direction and aligned in the X direction (hereinafter referred to as striped measurement light) are emitted from the light projecting unit 110. It is emitted once (in this example, 16 times).

  That is, in the striped measurement light, a linear bright portion parallel to the Y direction and a linear dark portion parallel to the Y direction are periodically arranged in the X direction. Here, when the pattern generation unit 112 is a DMD, the dimension of the micromirror is set to one unit. The width of each bright portion of the striped measurement light in the X direction is, for example, 3 units, and the width of each dark portion of the striped measurement light in the X direction is, for example, 13 units. In this case, the period of the striped measurement light in the X direction is 16 units. The unit of the bright part and the dark part differs depending on the configuration of the pattern generation unit 112 in FIG. For example, when the pattern generation unit 112 is a liquid crystal, one unit is the size of one pixel.

  When the first striped measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the first captured image of the measuring object S. FIG. 9A is a first photographed image of the measuring object S corresponding to the first striped measurement light.

  The second striped measurement light has a pattern in which the bright portion and the dark portion are moved by one unit in the X direction from the first striped measurement light. When the second striped measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the second captured image of the measuring object S.

  The third striped measurement light has a pattern in which the bright part and the dark part are moved by one unit in the X direction from the second striped measurement light. By emitting the third striped measurement light, the light reflected by the surface of the measuring object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the third captured image of the measuring object S.

  By repeating the same operation, the intensity of the light corresponding to the 4th to 16th striped measurement light is measured based on the pixel data of the 4th to 16th captured images of the measuring object S, respectively. The striped measurement light whose period in the X direction is 16 units is emitted 16 times, so that the entire surface of the measurement object S is irradiated with the striped measurement light. FIG. 9B is a seventh captured image of the measuring object S corresponding to the seventh striped measurement light. FIG. 9C is a thirteenth captured image of the measuring object S corresponding to the thirteenth striped measurement light.

  FIG. 10 is a diagram illustrating a relationship between the timing (number) at which an image of a specific portion of the measurement object S is captured and the intensity of received light. The horizontal axis in FIG. 10 indicates the order of images, and the vertical axis indicates the intensity of received light. As described above, the first to sixteenth captured images are generated for each part of the measuring object S. In addition, the intensity of light corresponding to each pixel of the generated first to sixteenth captured images is measured.

  As shown in FIG. 10, a scatter diagram is obtained by illustrating the light intensity of each pixel of the captured image corresponding to the number of the captured image. For example, by fitting a Gaussian curve, a spline curve, or a parabola to the obtained scatter diagram, the number (number) of the photographed image when the light intensity becomes maximum can be estimated with an accuracy of less than one. In the example of FIG. 10, it is presumed that the light intensity is maximized in the virtual 9.38th photographed image between the ninth and tenth by the curve shown by the fitted dotted line. .

  Further, the maximum value of the light intensity can be estimated from the fitted curve. The height h of each part of the measurement object S can be calculated based on the number of the photographed image that maximizes the light intensity estimated in each part of the measurement object S. According to this method, the three-dimensional shape of the measuring object S is measured based on the intensity of light having a sufficiently large S / N (signal / noise) ratio. Thereby, the precision of the shape measurement of the measuring object S can be improved.

  In the measurement of the shape of the measurement object S using measurement light having a periodic pattern shape such as sinusoidal measurement light or striped measurement light, the relative height of each portion of the surface of the measurement object S is measured. (Relative height) is measured. This is because each of a plurality of straight lines (stripes) parallel to the Y direction forming the pattern cannot be identified, and there is an uncertainty corresponding to an integral multiple of one period (2π) of the plurality of straight lines. This is because the absolute phase cannot be obtained. Therefore, a known unwrapping process is performed on the measured height data based on the assumption that the height of one part of the measuring object S and the height of the part adjacent to the part continuously change. It may be done.

(5) Fourth Pattern of Measurement Light FIG. 11 is a diagram for explaining the fourth pattern of measurement light. As shown in FIG. 11, as the fourth pattern, measurement light having a linear cross section parallel to the Y direction and having a bright portion and a dark portion aligned in the X direction (hereinafter referred to as code-like measurement light) is used. Light is emitted from the light projecting unit 110 a plurality of times (in this example, four times). The ratio of the bright part and the dark part of the code-like measurement light is 50%.

  In this example, the surface of the measuring object S is divided into a plurality of regions (16 in the example of FIG. 11) in the X direction. Hereinafter, the areas of the measurement object S in the X direction divided into a plurality of parts are referred to as first to sixteenth areas, respectively.

  FIG. 11A shows the code-like measurement light emitted for the first time. The code-shaped measurement light emitted for the first time has a bright portion that is irradiated onto the first to eighth regions of the measurement object S. Moreover, the code-shaped measurement light emitted for the first time has a dark part irradiated on the ninth to sixteenth regions of the measuring object S. Thereby, in the code-like measurement light emitted for the first time, the bright portion and the dark portion are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright part and the dark part of the code-like measurement light emitted for the first time is 50%.

  FIG. 11B shows the code-like measurement light emitted for the second time. The code-like measurement light emitted for the second time has a bright portion that is irradiated onto the fifth to twelfth regions of the measurement object S. Moreover, the code-like measurement light emitted for the second time has dark portions that are irradiated to the first to fourth and thirteenth to sixteenth regions of the measuring object S. Thereby, in the code-like measurement light emitted for the second time, the bright part and the dark part are parallel to the Y direction and aligned in the X direction. Moreover, the ratio of the bright part and the dark part of the code-like measurement light emitted for the second time is 50%.

  FIG. 11C shows the code-like measurement light emitted for the third time. The code-like measurement light emitted for the third time has bright portions that are irradiated on the first, second, seventh to tenth, fifteenth and sixteenth regions of the measurement object S. Moreover, the code-like measurement light emitted for the third time has dark portions that are irradiated on the third to sixth and the eleventh to fourteenth regions of the measurement object S. Thereby, in the code-like measurement light emitted for the third time, the bright part and the dark part are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright part and the dark part of the code-like measurement light emitted for the third time is 50%.

  FIG. 11D shows the code-like measurement light emitted for the fourth time. The coded measurement light emitted for the fourth time has a bright portion that is irradiated on the first, fourth, fifth, eighth, ninth, twelfth, thirteenth, and sixteenth regions of the measurement object S. . In addition, the coded measurement light emitted for the fourth time is a dark portion irradiated on the second, third, sixth, seventh, tenth, eleventh, fourteenth and fifteenth regions of the measuring object S. Have Thereby, in the code-like measurement light emitted for the fourth time, the bright part and the dark part are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright part and the dark part of the code-like measurement light emitted for the fourth time is 50%.

  Logic “1” is assigned to the bright part of the code-like measurement light, and logic “0” is assigned to the dark part of the code-like measurement light. In addition, the logic arrangement of the first to fourth code-like measurement lights irradiated on each region of the measurement object S is referred to as a code. In this case, the first region of the measurement object S is irradiated with the code-shaped measurement light with the code “1011”. As a result, the first region of the measuring object S is encoded to the code “1011”.

  The second area of the measurement object S is irradiated with code-shaped measurement light with a code “1010”. As a result, the second region of the measuring object S is encoded to the code “1010”. The third region of the measuring object S is irradiated with code-shaped measurement light with a code “1000”. As a result, the third region of the measuring object S is encoded with the code “1000”. Similarly, the 16th region of the measuring object S is irradiated with the code-shaped measurement light with the code “0011”. Thus, the sixteenth region of the measuring object S is encoded with the code “0011”.

  In this way, between the adjacent regions of the measurement object S, the code-shaped measurement light is irradiated to the measurement object S a plurality of times so that any digit of the code differs by “1”. That is, the code-shaped measurement light is applied to the measurement object S a plurality of times so that the bright portion and the dark portion change into a gray code shape.

  Light reflected by each region on the surface of the measuring object S is received by the light receiving unit 120. By measuring the sign of the received light, a sign that has changed due to the presence of the measurement object S is obtained for each region of the measurement object S. A distance corresponding to the distance d in FIG. 6 can be calculated by obtaining a difference between the obtained code and the code when the measurement object S does not exist for each region. Here, the absolute value of the distance d is calculated from the feature of the measurement method using the code-like measurement light that the code appears only once in the X-axis direction in the image. Thereby, the absolute height (absolute value of the height) of the region of the measuring object S is calculated. By calculating the height of all regions on the surface of the measuring object S, the three-dimensional shape of the measuring object S can be measured.

In the above description, the surface of the measuring object S is divided into 16 regions in the X direction, and the code-shaped measurement light is emitted from the light projecting unit 110 four times. However, the present invention is not limited to this. The surface of the measurement object S may be divided into 2 ^N regions (N is a natural number) in the X direction, and the code-shaped measurement light may be emitted N times from the light projecting unit 110. In the above description, N is set to 4 for easy understanding. In the shape measurement process in the present embodiment, N is set to 8, for example. Therefore, the surface of the measuring object S is divided into 256 regions in the X direction.

  In the shape measurement of the measuring object S using the code-like measurement light, the distance that can be identified by separating the code-like measurement light, that is, the distance corresponding to one pixel is the minimum resolution. Therefore, when the number of pixels in the field of view in the X direction of the light receiving unit 120 is 1024 pixels, a measurement object S having a height of, for example, 10 mm can be measured with a resolution of 10 mm ÷ 1024≈10 μm. Measurement by combining shape measurement using code-shaped measurement light with low resolution but capable of calculating absolute value and shape measurement using sinusoidal measurement light or striped measurement light that cannot calculate absolute value but has high resolution The absolute value of the height of the object S can be calculated with higher resolution.

  In particular, in the shape measurement of the measuring object S using the striped measurement light in FIG. 9, the resolution can be 1/100 pixels. The resolution of 1/100 pixels is that the surface of the measuring object S is divided into about 100,000 areas in the X direction when the number of pixels of the field of view in the X direction of the light receiving unit 120 is 1024 pixels (that is, N≈ 17). Therefore, the absolute value of the height of the measuring object S can be calculated with higher resolution by combining the shape measurement using the cord-shaped measurement light and the shape measurement using the striped measurement light.

  A method of scanning the above-described line-shaped measurement light on the measurement object S is generally called a light cutting method. On the other hand, the method of irradiating the measuring object S with sinusoidal measurement light, striped measurement light or code-like measurement light is classified as a pattern projection method. Among the pattern projection methods, the method of irradiating the measuring object S with sinusoidal measuring light or the striped measuring light is classified as a phase shift method, and the method of irradiating the measuring object S with code-like measuring light is a spatial code. Classified into law.

  In the phase shift method, when a sinusoidal measurement light or a striped measurement light that is a periodic projection pattern is emitted, the calculation is based on the amount of light received reflected from the reference height position when the measurement object S does not exist. The height of the measuring object S is obtained from the phase difference between the phase thus calculated and the phase calculated based on the received light amount reflected from the surface of the measuring object S when the measuring object S exists. In the phase shift method, individual periodic fringes cannot be distinguished, and there is an uncertainty corresponding to an integer multiple of one fringe period (2π), so that there is a drawback that the absolute phase cannot be obtained. However, since the number of images to be acquired is smaller than that of the light cutting method, the measurement time is relatively short and the measurement resolution is high.

  On the other hand, in the spatial code method, for each region of the measurement object S, a code that is changed due to the presence of the measurement object S is obtained. The absolute height of the measurement object S can be obtained by obtaining the difference between the obtained code and the code when the measurement object S does not exist for each region. The spatial code method also has an advantage that measurement can be performed with a relatively small number of images, and an absolute height can be obtained. However, the measurement resolution is limited compared to the phase shift method.

  Each of these projection methods has its advantages and disadvantages, but both use the principle of triangulation. Therefore, it is impossible to measure a shadow portion that is not irradiated with the measurement light by any measurement method.

(6) Measurable range of light receiving unit In the shape measurement of the above-described triangulation method, the light receiving unit 120 is moved from the measuring object S as the position of the surface of the measuring object S moves away from the focus of the light receiving unit 120 in the optical axis direction. The degree of blurring of light incident on the imaging element 121a increases. Similarly, as the position of the surface of the measuring object S is closer to the focal point of the light receiving unit 120, the degree of blur of light incident on the image sensor 121a of the light receiving unit 120 from the measuring object S increases. The degree of blurring of light incident on the image sensor 121a of the light receiving unit 120 varies depending on, for example, the magnification of a lens of an optical system that constitutes at least a part of the light projecting unit 110 and the light receiving unit 120.

  When the degree of blur of light incident on the light receiving unit 120 from the measurement object S increases, the measurement accuracy of the height of the surface of the measurement object S decreases. Therefore, in the present embodiment, the range in the optical axis direction of the light receiving unit 120 considered to be able to obtain a certain measurement accuracy when the measuring object S is located is the range of the light projecting unit 110 and the light receiving unit 120. It is predetermined for each shape measuring apparatus 500 according to the configuration. In the following description, the range in the Z direction of the light receiving unit 120 determined in advance in this way is referred to as a measurable range in the Z direction of the light receiving unit 120. The measurable range is incident on the image sensor 121a of the light receiving unit 120, for example, when the measurement target S is moved in the optical axis direction of the light receiving unit 120 while the surface of the measurement target S is irradiated with the striped measurement light. The degree of blurring of the light is determined in a range that does not exceed a predetermined threshold.

[3] Microscope Mode and Shape Measurement Mode The shape measurement apparatus 500 according to the present embodiment can operate in the microscope mode and in the shape measurement mode. 12 and 13 are diagrams illustrating an example of the GUI of the display unit 400 when the operation mode is selected. As shown in FIGS. 12 and 13, an image display area 550 and setting change areas 570 and 580 are displayed on the display unit 400. In the image display area 550, an image of the measuring object S captured by the light receiving unit 120 is displayed.

  In the setting change area 570, a brightness selection field 571, a brightness setting bar 572, a display switching field 573, a magnification switching field 574, a magnification selection field 575, and a focus adjustment field 576 are displayed. The brightness setting bar 572 includes a slider 572s that can move in the horizontal direction.

  The user can switch the exposure time method of the light receiving unit 120 between auto (automatic) and manual by selecting the exposure time method of the light receiving unit 120 in the brightness selection field 571. When manual is selected as the exposure time method of the light receiving unit 120, the user operates the operation unit 250 of the PC 200 to move the slider 572 s of the brightness setting bar 572 in the horizontal direction, whereby the light receiving unit 120. The exposure time can be adjusted. The user can switch the image display type between color and monochrome by selecting the image display type from the display switching field 573.

  As shown in FIG. 26 described later, the light receiving unit 120 includes a camera 121A and a camera 121B having different lens magnifications as the camera 121. In this example, for example, one camera 121A is called a low-magnification camera, and the other camera 121B is called a high-magnification camera. The user can switch the camera 121 of the light receiving unit 120 between the high magnification camera and the low magnification camera by selecting the magnification of the camera in the magnification switching field 574. In the shape measuring apparatus 500 according to the present embodiment, the measurable range of the light receiving unit 120 corresponding to the high magnification camera and the measurable range of the light receiving unit 120 corresponding to the low magnification camera are individually determined with different sizes. It has been.

  The light receiving unit 120 has a digital zoom function. In this example, by combining the two cameras 121 and the digital zoom function, the magnification of the camera 121 can be substantially changed to two or more types. The user can set the magnification of the camera 121 of the light receiving unit 120 by selecting the magnification in the magnification selection field 575. When the digital zoom function is used, the measurable range determined for each type of camera (high magnification camera and low magnification camera) may be corrected based on the amount of change in magnification.

  The user can change the focus position of the light receiving unit 120 in the Z direction by a distance corresponding to the input numerical value by inputting a numerical value in the focus adjustment field 576. The focus position of the light receiving unit 120 is changed by changing the position of the Z stage 142 of the stage 140, that is, the relative distance in the Z direction between the light receiving unit 120 and the measurement object S.

  In the setting change area 580, a microscope mode selection tab 580A and a shape measurement mode selection tab 580B are displayed. When the microscope mode selection tab 580A is selected, the shape measuring apparatus 500 operates in the microscope mode. In the microscope mode, the measurement object S is irradiated with illumination light from the illumination light output unit 130. In this state, the enlarged observation of the measuring object S can be performed.

  As shown in FIG. 12, when the microscope mode selection tab 580A is selected, a tool selection field 581 and a shooting button 582 are displayed in the setting change area 580. The user can capture (capture) an image of the measurement object S displayed in the image display area 550 by operating the capture button 582.

  The tool selection field 581 displays a plurality of icons for selecting a plurality of execution tools. The user operates one of the plurality of icons in the tool selection field 581 to perform planar measurement of the image of the measurement object S being observed, insertion of a scale in the image, depth synthesis, and comment on the image. Execution tools such as insertion or image improvement can be executed.

  For example, when execution of plane measurement is selected, a measurement tool display field 581a and an auxiliary tool display field 581b are displayed below the tool selection field 581. The measurement tool display field 581a is used for measuring the distance between two points, measuring the distance between two parallel lines, measuring the diameter or radius of a circle, and measuring the angle formed by two straight lines. Multiple icons are displayed. In the auxiliary tool display field 581b, a plurality of icons for executing auxiliary drawing such as dots, lines or circles on the image in the image display area 550 are displayed.

  When the shape measurement mode selection tab 580B is selected, the shape measurement apparatus 500 operates in the shape measurement mode. As shown in FIG. 13, when the shape measurement mode selection tab 580B is selected, a measurement button 583 is displayed in the setting change area 580. The user can execute the shape measurement process by operating the measurement button 583 after the preparation for the shape measurement is completed.

[4] Texture Image (1) Composite Image In the measurement unit 100, the measurement object 100 is irradiated with illumination light from the illumination light output unit 130 or measurement light having a uniform pattern from the light projection unit 110. Data indicating an image of the surface state is generated. The surface state includes, for example, a pattern or a color. Hereinafter, the image of the surface state of the measuring object S is referred to as a texture image, and the data indicating the texture image is referred to as texture image data.

  The generated texture image data and the 3D shape data generated in the shape measurement process are combined to generate combined data. The display unit 400 displays a combined image of the three-dimensional shape and surface state of the measurement object S based on the combined data. Hereinafter, the solid shape data generated in the shape measurement process is referred to as main solid shape data. An image displayed based on the main stereoscopic shape data is referred to as a main stereoscopic shape image.

  FIG. 14 is a diagram illustrating an example of the GUI of the display unit 400 after execution of the shape measurement process. As shown in FIG. 14, an image of the measuring object S is displayed in the image display area 550 based on the composite data generated in the shape measurement process. The user can confirm the measurement result of the measurement object S or perform simple measurement on the composite image.

  Here, even if the entire surface of the measuring object S is located in the measurable range in the optical axis direction (in the present embodiment, the Z direction) of the light receiving unit 120, the entire surface of the measuring object S is used. Is not within the range of the depth of field, all or part of the texture image is not clearly displayed. Therefore, when the dimension in the Z direction of the measuring object S is larger than the range of the depth of field of the light receiving unit 120, while changing the relative distance between the light receiving unit 120 and the measuring object S, Texture image data of the measurement object S located within the range of the depth of field of the light receiving unit 120 is acquired. By synthesizing the acquired plurality of texture image data, texture image data (hereinafter referred to as omnifocal texture image data) that can be clearly displayed over the entire surface of the measurement object S is generated.

  FIG. 15 is a schematic side view of the measuring object S for explaining the omnifocal texture image. The measuring object S in FIG. 15 has a configuration in which an electrolytic capacitor Sc is mounted on a circuit board Sb. Further, letters are attached to the upper surface of the circuit board Sb and the electrolytic capacitor Sc. As shown in FIG. 15, the dimension of the measuring object S in the Z direction (in this example, the dimension from the lower surface of the circuit board Sb to the upper surface of the electrolytic capacitor Sc) is larger than the measurable range of the light receiving unit 120 in the Z direction. Is smaller than the range of depth of field.

  FIG. 16 is a diagram illustrating the relationship between the focal position of the light receiving unit 120 and the sharpness of the texture image. FIGS. 16A, 16C, and 16E are side views of the measuring object S in FIG. In FIG. 16A, the light receiving unit 120 is focused on the position a on the upper surface of the electrolytic capacitor Sc of the measurement object S. In FIG. 16B, the light receiving unit 120 is focused on a position b intermediate between the upper surface of the electrolytic capacitor Sc of the measurement object S and the upper surface of the circuit board Sb. In FIG. 16C, the light receiving unit 120 is focused on the position c of the upper surface of the circuit board Sb of the measurement object S.

  FIG. 16B shows a texture image of the measuring object S based on the texture image data acquired in the state of FIG. In this case, since the position “a” on the upper surface of the electrolytic capacitor Sc is located within the range r1 of the depth of field of the light receiving unit 120, the characters attached to the upper surface of the electrolytic capacitor Sc are shown in FIG. It is displayed clearly. However, the position c of the upper surface of the circuit board Sb is not located within the range r1 of the depth of field of the light receiving unit 120. Therefore, the characters attached to the upper surface of the circuit board Sb are displayed unclearly. Further, the position c on the upper surface of the circuit board Sb is not located within the measurable range r2 in the Z direction of the light receiving unit 120. Therefore, when the height of the stage 140 is adjusted to the position of FIG. 16E, the height of the position a on the upper surface of the electrolytic capacitor Sc cannot be calculated, or the reliability of the calculated height is lowered. .

  FIG. 16D shows a texture image of the measuring object S based on the texture image data acquired in the state of FIG. In this case, an intermediate position b between the upper surface of the electrolytic capacitor Sc and the upper surface of the circuit board Sb is located within the range r1 of the depth of field of the light receiving unit 120. However, since the upper surface of the electrolytic capacitor Sc and the upper surface of the circuit board Sb are located outside the range of depth of field r1 of the light receiving unit 120 and within the measurable range r2 in the Z direction, as shown in FIG. The characters attached to the upper surface of the electrolytic capacitor Sc and the characters attached to the upper surface of the circuit board Sb are displayed slightly unclear.

  FIG. 16F shows a texture image of the measuring object S based on the texture image data acquired in the state of FIG. In this case, since the position c on the upper surface of the circuit board Sb is located within the range r1 of the depth of field of the light receiving unit 120, the characters attached to the upper surface of the circuit board Sb are displayed as shown in FIG. It is displayed clearly. However, the position a on the upper surface of the electrolytic capacitor Sc is not located within the range r1 of the depth of field of the light receiving unit 120. Therefore, characters attached to the upper surface of the electrolytic capacitor Sc are displayed unclearly. Further, the position a on the upper surface of the electrolytic capacitor Sc is not located within the measurable range r2 in the Z direction of the light receiving unit 120. Accordingly, when the height of the stage 140 is adjusted to the position of FIG. 16A, the height of the position c on the upper surface of the circuit board Sb cannot be calculated, or the reliability of the calculated height is lowered. .

  The omnifocal texture image data is generated by synthesizing the texture image data at the positions a to c. FIG. 17 is an omnifocal texture image of the measuring object S based on the generated omnifocal texture image data. In the omnifocal texture image, as shown in FIG. 17, characters attached to the upper surface of the electrolytic capacitor Sc are clearly displayed, and characters attached to the upper surface of the circuit board Sb are clearly displayed.

  Thus, by changing the relative position of the light receiving unit 120 and the stage 140 in the Z direction, the height at which the light receiving unit 120 is focused with respect to the measurement object S is changed. For this reason, a plurality of texture images captured by changing the focus of the light receiving unit 120 even if the measurement object S has a height difference that cannot be accommodated in the range r1 of the depth of field of the light receiving unit 120 at one time. By synthesizing, an omnifocal texture image in which the entire image is in focus can be acquired. Note that the depth of field has a unique width of the shape measuring apparatus 500 that varies depending on the magnification of the lens of the light receiving unit 120.

  When generating an omnifocal texture image, a plurality of texture images are acquired by changing the relative position in the Z direction between the light receiving unit 120 and the stage 140 within a predetermined range at predetermined intervals. The range and interval in which the light receiving unit 120 and the stage 140 are relatively moved in the Z direction at this time are unique values of the shape measuring apparatus 500. However, the shape of the measuring object S is known, for example, when the shape measuring process of the measuring object S is executed in advance or when data indicating the shape of the measuring object S (for example, CAD data) is held in advance. In some cases, the optimal movement range and interval may be determined based on this data.

  For example, a range slightly wider than the range defined by the upper and lower limits of the height of the measuring object S may be set as the movement range. Further, the interval may be changed according to the gradient of the height shape of the measuring object S. When acquiring an all-focus texture image, the above-described parameter that defines the relative movement in the Z direction between the stage 140 and the light receiving unit 120 may be arbitrarily set by the user.

  The omnifocal texture image data is generated by synthesizing a plurality of texture image data for the portion included in the range of depth of field r1 of the light receiving unit 120 among all the portions of the measurement object S. The Further, when acquiring the texture image data of each part of the measurement object S, the light receiving unit 120 and the measurement object S in a state in which the light reception unit 120 is focused on a plurality of parts of the measurement object S, respectively. The height of each part of the measuring object S is calculated on the basis of the relative distance. In the present embodiment, the state in which the light receiving unit 120 is focused on each of the plurality of portions of the measurement target S is, for example, the range of the depth of field of the light reception unit 120 in each of the plurality of portions of the measurement target S. The state when it is included in r1.

  By combining the heights calculated for all parts of the measurement object S, data indicating the three-dimensional shape of the measurement object S is generated. Data indicating the three-dimensional shape of the measuring object S is referred to as sub-three-dimensional shape data. The synthesized data is generated by synthesizing the omnifocal texture image data and the main stereoscopic shape data.

  FIG. 18 is a composite image of the measuring object S based on the composite data. FIG. 18A shows an image of the main stereoscopic shape of the measuring object S based on the main stereoscopic shape data. The synthesized data is generated by synthesizing the main stereoscopic shape data indicating the main stereoscopic shape of FIG. 18A and the omnifocal texture image data. FIG. 18B is a composite image based on the generated composite data. As shown in FIG. 18B, even when the dimension in the Z direction of the measurement object S is larger than the range r1 of the depth of field of the light receiving unit 120, the measurement object S has different heights. The surface condition of the part is clearly displayed.

  The value of each pixel in the main stereoscopic shape data indicates the height data at the position of the pixel. On the other hand, the value of each pixel of the omnifocal texture image data indicates texture information (surface state information) including color and luminance at the position of the pixel. Therefore, the composite image shown in FIG. 18B can be generated by combining the information of corresponding pixels.

  In addition, although mentioned later for details, the shape measurement of the measuring object S is normally performed by one process. For example, in the example of FIG. 16A, since the upper surface c of the circuit board Sb is not within the measurable range r2 of the light receiving unit 120, the height of the upper surface c of the circuit board Sb cannot be calculated. Therefore, as shown in FIG. 16C, the relative distance in the Z direction between the light receiving unit 120 and the stage 140 so that the entire measurement object S is within the measurable range r2 in the Z direction of the light receiving unit 120 as much as possible. Need to be adjusted.

  On the other hand, in the process of generating the omnifocal texture image, imaging is performed a plurality of times by changing the relative distance between the light receiving unit 120 and the stage 140 in the Z direction, so that the entire measurement object S is received by one imaging. It is not necessary to previously adjust the relative distance between the light receiving unit 120 and the stage 140 so as to be within the range r1 of the depth of field of the unit 120. Therefore, the user does not measure the object within the measurable range r2 in the Z direction of the light receiving unit 120 for performing the shape measurement process, instead of the range r1 of the depth of field of the light receiving unit 120 when acquiring the texture image. The relative distance in the Z direction between the light receiving unit 120 and the stage 140 is adjusted in consideration of whether S is within the range.

  When the shape measurement process is performed at the position of the stage 140 shown in FIG. 16A, the height of the upper surface c of the circuit board Sb cannot be calculated, or the reliability of the calculated height becomes low. On the other hand, in the omnifocal texture image generation process, imaging is performed a plurality of times by changing the relative distance between the light receiving unit 120 and the stage 140 in the Z direction. A matched texture image can be obtained. Therefore, even if height data is missing in a part of a texture image or a pixel with low reliability exists, it is possible to give texture information of omnifocal texture image data to that pixel.

  In the shape measurement process using the triangulation in the present invention, the measurable range r2 in the Z direction of the light receiving unit 120 is generally wider than the range r1 of the depth of field of the light receiving unit 120. This is because in the triangulation, it is possible to measure the shape of the measuring object S even if some blur occurs in the image. However, the range r1 of the depth of field of the light receiving unit 120 is a subjective range that seems to be in focus for the user. Further, the measurable range r2 in the Z direction of the light receiving unit 120 is a unique value of the shape measuring apparatus 500 determined by the light projecting unit 110 and the light receiving unit 120, but is within the measurable range r2 in the Z direction of the light receiving unit 120. A measurement object S that does not exist is not necessarily impossible to measure.

  Further, when the height difference of the measuring object S is large, the entire measuring object S can be measured at a time, no matter how the relative distance in the Z direction between the light receiving unit 120 and the stage 140 is adjusted. There are cases where it is not possible. In that case, when performing the shape measurement process, the relative distance in the Z direction between the light receiving unit 120 and the stage 140 is changed, and the shape measurement process is performed a plurality of times. It is also possible to acquire a three-dimensional shape constituted by the data. In this case, the entire measurement object S having a height difference exceeding the measurable range r2 in the Z direction of the light receiving unit 120 can be measured, and the entire three-dimensional shape of the measurement object S having a large height difference can be measured. Thus, texture information can be added.

  In the example of FIG. 18, the texture image is synthesized with the measurement object S displayed three-dimensionally, but the present invention is not limited to this. For example, texture information may be superimposed and displayed on a two-dimensional image in which the height of the measuring object S is expressed by a change in color. In this case, for example, by allowing the user to adjust the ratio between the two-dimensional image indicating the height and the texture information, an image having an intermediate color and brightness between the two-dimensional image indicating the height and the texture image. Can also be generated and displayed.

  In the above description, the omnifocal texture image data and the sub-stereoscopic shape data are respectively generated based on the texture image data and the height at the three positions a to c for easy understanding. It is not limited. The omnifocal texture image data and the sub-stereoscopic shape data may be respectively generated based on the texture image data and the height at two or less positions or four or more positions.

  In this example, the position of the measuring object S in the Z direction moves from the upper limit to the lower limit of the measurable range r2 in the Z direction of the light receiving unit 120 at an interval smaller than the depth of field range r1 of the light receiving unit 120. Or from the lower limit to the upper limit. All-focus texture image data and sub-stereoscopic shape data are generated based on the texture image data and height at each position in the Z direction.

  Alternatively, when the main stereoscopic shape data of the measuring object S is generated before the generation of the omnifocal texture image data and the sub-stereoscopic shape data, the upper end in the Z direction of the measuring object S based on the main stereoscopic shape data And the lower end can be calculated. Therefore, the position of the measuring object S in the Z direction is smaller than the depth of field range r1 of the light receiving unit 120, and the measuring object S has a dimension in the Z direction from the upper end toward the lower end or from the lower end. It may be changed toward the upper end. All-focus texture image data and sub-stereoscopic shape data are generated based on the texture image data and height at each position in the Z direction.

  In this case, the texture image data can be acquired in the minimum range for generating the omnifocal texture image data and the sub-stereoscopic shape data of the measurement object S, and the height can be calculated. Thereby, all-focus texture image data and sub-stereoscopic shape data can be generated at high speed.

(2) Type of texture image The user can select the type of texture image in acquiring the texture image data. The types of texture images include, for example, normal texture images, omnifocal texture images, high dynamic range (HDR) texture images, or combinations thereof. When an omnifocal texture image is selected, the above omnifocal texture image data is generated. When an HDR texture image is selected, texture image data subjected to a known high dynamic range (HDR) composition is generated.

  When the difference in reflectance of a plurality of portions on the surface of the measuring object S or the difference in brightness due to color is small and the dimension of the measuring object S in the Z direction is larger than the depth of field of the light receiving unit 120, the user Selects an all-focus texture image. Thereby, the texture image data which clearly shows the surface state of the measuring object S can be generated in a short time. When the surface of the measuring object S includes a portion having a high reflectance and a portion having a low reflectance, or when a difference in brightness due to color is large, the user selects an HDR texture image. Thereby, it is possible to generate texture image data that clearly shows the surface state of the measuring object S that does not include blackout and overexposure.

  In a normal texture image, the texture image is not synthesized. In this case, one texture image data is generated based on the light reception signal output from the light receiving unit 120 with the focus position of the light receiving unit 120 fixed. When the difference in reflectance or the brightness difference due to color of a plurality of portions on the surface of the measurement object S is small and the dimension of the measurement object S in the Z direction is smaller than the range of the depth of field of the light receiving unit 120, The user selects a normal texture image. Thereby, the texture image data which clearly shows the surface state of the measuring object S can be generated in a shorter time.

  When the HDR texture image is selected, a plurality of texture image data is generated under different imaging conditions at one position in the Z direction. Here, the imaging conditions include the exposure time of the light receiving unit 120. Alternatively, the imaging condition may include the intensity (brightness) of illumination light from the illumination light output unit 130 or the intensity (brightness) of uniform measurement light from the light projecting unit 110. In these cases, the CPU 210 can easily generate a plurality of texture image data under a plurality of imaging conditions.

  The plurality of generated texture image data are combined (HDR combined) so that the texture image at the position in the Z direction does not include blackout and overexposure. As a result, the dynamic range of the texture image is expanded. An HDR texture image is displayed based on the HDR synthesized texture image data (hereinafter referred to as HDR texture image data).

  When a combination of an omnifocal texture image and an HDR texture image (hereinafter referred to as an HDR omnifocal texture image) is selected, the position of the measuring object S is changed for each position in the Z direction while being changed. A plurality of texture image data under the imaging condition is acquired. A plurality of texture image data acquired at each position in the Z direction is HDR-synthesized so that the dynamic range of the image at the position in the Z direction is expanded, thereby generating HDR texture image data.

  Moreover, the surface of the measuring object S is obtained by synthesizing a plurality of HDR texture image data of the parts included in the range of the depth of field of the light receiving unit 120 among all the parts of the measuring object S. HDR texture image data that can be displayed throughout (hereinafter referred to as HDR omnifocal texture image data) is generated. An HDR omnifocal texture image is displayed based on the HDR omnifocal texture image data.

  As described above, the surface of the measuring object S includes a portion having a high reflectance and a low reflectance, or the brightness difference due to the color is large, and the dimension of the measuring object S is larger than the depth of field of the light receiving unit. If so, the user selects an HDR omnifocal texture image. Thereby, the texture image data which shows the surface state of the measuring object S clearly can be produced | generated.

  FIG. 19 is a diagram illustrating an example of the GUI of the display unit 400 when a texture image type is selected. As shown in FIG. 19, when selecting the type of texture image, a texture image selection field 584 is displayed in the setting change area 580 of the display unit 400. In the texture image selection field 584, three check boxes 584a, 584b and 584c are displayed.

  The user can select a normal texture image, HDR texture image, and omnifocal texture image by designating check boxes 584a to 584c, respectively. Further, the user can select the HDR all-focus texture image by designating the check boxes 584b and 584c.

(3) Correction of main stereoscopic shape data The accuracy of sub stereoscopic shape data is lower than the accuracy of main stereoscopic shape data. However, since the main stereoscopic shape data is generated based on the triangulation method, in order to generate the main stereoscopic shape data, the measurement object S is irradiated with light from an angle different from the optical axis of the light receiving unit 120. There is a need. Therefore, the main stereoscopic shape data often includes a defective portion corresponding to a region where the shape of the measuring object S cannot be accurately measured. Here, the defective portion includes blank data corresponding to the shadow portion of the image, noise data corresponding to the noise portion, or false shape data corresponding to the false shape portion of the measuring object S due to multiple reflection or the like. .

  On the other hand, in order to generate sub-stereoscopic shape data, it is not necessary to irradiate the measurement object S from an angle different from the optical axis of the light receiving unit 120, and measurement is performed from an angle substantially equal to the optical axis of the light receiving unit 120. The object S can be irradiated. In this case, the sub-stereoscopic shape data includes almost no defective portion. Therefore, by using illumination light emitted from the illumination light output unit 130 disposed substantially above the measurement object S, sub-stereoscopic shape data that hardly includes a defective portion can be generated.

  A defective portion of the main stereoscopic shape data is determined based on the sub stereoscopic shape data. In this example, the sub stereoscopic shape data and the main stereoscopic shape data for the same measurement object S are compared. Thereby, it is possible to easily determine a defective portion in the main stereoscopic shape data. Further, in the shape measurement process, when the contrast of the pattern of the measurement light is partially reduced, the reliability of the part of the main stereoscopic shape data corresponding to that part is lowered.

  Even in this case, it is possible to determine a portion with low reliability of the main stereoscopic shape data based on the sub stereoscopic shape data and the main stereoscopic shape data. In this example, the sub stereoscopic shape data and the main stereoscopic shape data are compared. The difference between each part of the sub-stereoscopic shape data and each part of the main stereoscopic shape data is calculated, and it is determined that the part of the main stereoscopic shape data whose difference is larger than a predetermined threshold is low in reliability. .

  In this way, it is determined that the portion of the plurality of portions of the main stereoscopic shape data whose deviation from the sub stereoscopic shape data is larger than the threshold value has low reliability. The threshold value may be a fixed value or a variable value that can be arbitrarily adjusted by the user operating a slider or the like. Hereinafter, a portion of the main stereoscopic shape data that has been determined to be low in reliability is referred to as a reliability-decreasing portion of the main stereoscopic shape data.

  The defective part or the reduced reliability part of the main stereoscopic shape data may be corrected by replacement or interpolation by the corresponding sub stereoscopic shape data part. Thereby, the user can observe an image or a composite image of the main three-dimensional shape of the measuring object S that does not include a defective portion or a reduced reliability portion on the display unit 400. Further, it is possible to improve the reliability of the portion of the main stereoscopic shape data whose reliability is reduced. In the correction of the main stereoscopic shape data, the defective portion or the reduced reliability portion of the main stereoscopic shape data may be interpolated by the surrounding main stereoscopic shape data portion.

  20, FIG. 21, and FIG. 22 are diagrams for explaining the correction of the main stereoscopic shape data by the sub stereoscopic shape data. FIGS. 20A and 20B show a main stereoscopic image and a composite image of the measuring object S, respectively. FIGS. 21A and 21B show a sub-stereoscopic shape image and a composite image of the measuring object S, respectively. FIGS. 22A and 22B show a corrected main stereoscopic image and a corrected combined image of the measuring object S, respectively.

  As shown in FIGS. 20A and 20B, the main stereoscopic image and the composite image include a shadow Ss based on blank data and a false shape Sp based on false shape data. On the other hand, as shown in FIGS. 21A and 21B, the sub-stereoscopic shape image and the composite image are not affected by shadows.

  The shadow Ss and the false shape Sp in the main stereoscopic shape image and the composite image in FIGS. 20A and 20B are the sub-stereo shape image and the omnifocal texture image in FIGS. 21A and 21B. It is corrected by the corresponding part. As a result, as shown in FIGS. 22A and 22B, it is possible to observe a main stereoscopic image and a synthesized image that are not affected by a shadow.

  When displaying the main stereoscopic shape image or the texture image on the display unit 400, the defective portion or the reduced reliability portion of the main stereoscopic shape data is not corrected, and corresponds to the defective portion or the reduced reliability portion of the main stereoscopic shape data. A three-dimensional image or texture image portion may be highlighted. Alternatively, when displaying the corrected main stereoscopic shape image on the display unit 400, the defective portion or the reduced reliability of the main stereoscopic shape data in a state where the defective portion or the reduced reliability portion of the main stereoscopic shape data is corrected. A portion of the corrected three-dimensional image corresponding to the portion may be highlighted. As a result, the user can easily and reliably recognize a defective portion or a reduced reliability portion of the main stereoscopic shape data. The defective part or the reduced reliability part of the main stereoscopic shape data may be treated as invalid data in measurement or analysis of the measurement position in the shape measurement process.

  In the shape measurement process, when the main stereoscopic shape data is generated using measurement light from both the light projecting units 110A and 110B, the main stereoscopic shape data based on the measurement light from each of the light projecting units 110A and 110B is appropriate. The main three-dimensional shape data is generated by combining with appropriate weighting. Here, when the main stereoscopic shape data based on one measurement light includes a defective portion or a reliability reduction portion, the weight of the synthesis of the main stereoscopic shape data based on one measurement light is reduced in that portion. The weight of the synthesis of the main stereoscopic shape data based on the other measurement light may be increased.

(4) Efficiency improvement of shape measurement process In the shape measurement process of FIGS. 30 to 32 described later, the measurement light S is irradiated with the code-shaped measurement light (see FIG. 11) and the stripe measurement is performed. Light (see FIG. 9) is irradiated. In this case, the absolute value of the height of each part of the measuring object S is calculated based on the code-shaped measuring light, and the relative value of the height of each part of the measuring object S is calculated based on the striped measuring light. Calculated with high resolution. Thereby, the absolute value of the height of each part of the measuring object S is calculated with high resolution. That is, the absolute value of the height calculated based on the striped measurement light is determined by the height calculated based on the code-shaped measurement light.

  Instead, the absolute value of the height calculated based on the striped measurement light may be determined based on the height of each part in the sub-stereoscopic shape data. In this case, it is not necessary to irradiate the measurement object S from the light projecting unit 110 with the code-shaped measurement light in the shape measurement process. Thereby, the shape measurement process can be executed in a short time and efficiently while calculating the absolute value of the height of each part of the measuring object S with high resolution.

[5] Shape Measurement Processing (1) Preparation for Shape Measurement Before executing the shape measurement processing of the measurement object S, the user prepares for shape measurement. FIG. 23 is a flowchart showing a procedure for preparing for shape measurement. Hereinafter, a procedure for preparing for shape measurement will be described with reference to FIGS. 1, 2, and 23. First, the user places the measuring object S on the stage 140 (step S1). Next, the user irradiates the measurement object S with illumination light from the illumination light output unit 130 (step S2). Thereby, the image of the measuring object S is displayed on the display unit 400. Subsequently, the user adjusts the light amount of the illumination light, the focus of the light receiving unit 120, and the position and orientation of the measurement object S (hereinafter referred to as the first object) while viewing the image of the measurement object S displayed on the display unit 400. Is called (step S3).

  Next, the user stops the irradiation of the illumination light and irradiates the measurement object S with the measurement light from the light projecting unit 110 (step S4). Thereby, the image of the measuring object S is displayed on the display unit 400. Subsequently, the user adjusts the light amount of the measurement light, the focal point of the light receiving unit 120, and the position and orientation of the measurement object S (hereinafter referred to as the second) while viewing the image of the measurement object S displayed on the display unit 400. Is called (step S5). In step S5, when no shadow is generated at the position to be measured of the measurement object S, the user adjusts the focus of the light receiving unit 120 and the position and orientation of the measurement object S as the second adjustment. There is no need to adjust the amount of measurement light.

  Thereafter, the user stops the irradiation of the measurement light and irradiates the measurement object S from the illumination light output unit 130 again with the illumination light (step S6). Thereby, the image of the measuring object S is displayed on the display unit 400. Next, the user confirms the image of the measuring object S displayed on the display unit 400 (step S7). Here, from the image of the measuring object S displayed on the display unit 400, the user appropriately determines the amount of light, the focus of the light receiving unit 120, and the position and orientation of the measuring object S (hereinafter referred to as an observation state). It is determined whether or not (step S8).

  If it is determined in step S8 that the observation state is not appropriate, the user returns to the process in step S2. On the other hand, when it is determined in step S8 that the observation state is appropriate, the user finishes preparation for shape measurement.

  In the above description, the second adjustment is performed after the first adjustment, but the present invention is not limited to this. The first adjustment may be performed after the second adjustment. In this case, in step S6, the measurement object S is irradiated with the measurement light instead of the illumination light. In step S5, when the focus of the light receiving unit 120 and the position and orientation of the measurement object S are not adjusted in the second adjustment, the user omits the steps S6 to S8. The preparation for shape measurement may be completed.

(2) First Adjustment FIGS. 24 and 25 are flowcharts showing details of the first adjustment in the procedure for the preparation for shape measurement. Hereinafter, the details of the first adjustment in the procedure for the preparation of the shape measurement will be described with reference to FIGS. 1, 2, 24 and 25. First, the user adjusts the amount of illumination light (step S11). The adjustment of the amount of illumination light is performed by adjusting the brightness of the illumination light emitted from the illumination light source 320 of the control unit 300 or the exposure time of the light receiving unit 120. Next, the user determines whether or not the amount of illumination light applied to the measurement object S is appropriate based on the image of the measurement object S displayed on the display unit 400 (step S12). .

  If it is determined in step S12 that the amount of illumination light is not appropriate, the user returns to the process in step S11. On the other hand, if it is determined in step S12 that the amount of illumination light is appropriate, the user adjusts the focus of the light receiving unit 120 (step S13). The focus of the light receiving unit 120 is adjusted by changing the position of the Z stage 142 of the stage 140 and adjusting the relative distance in the Z direction between the light receiving unit 120 and the measuring object S. Next, the user determines whether or not the focus of the light receiving unit 120 is appropriate based on the image of the measurement object S displayed on the display unit 400 (step S14).

  If it is determined in step S14 that the focus of the light receiving unit 120 is not appropriate, the user returns to the process of step S13. On the other hand, when it determines with the focus of the light-receiving part 120 being appropriate in step S14, a user adjusts the position and attitude | position of the measuring object S (step S15). The position and orientation of the measuring object S are adjusted by changing the position of the XY stage 141 and the angle of the θ stage 143 of the stage 140.

  Next, the user determines whether or not the position and orientation of the measurement object S are appropriate based on the image of the measurement object S displayed on the display unit 400 (step S16). Here, when the measurement position of the measurement object S is included in the visual field range of the light receiving unit 120, the user determines that the position and orientation of the measurement object S are appropriate. On the other hand, when the measurement position of the measurement object S is not included in the visual field range of the light receiving unit 120, the user determines that the position and orientation of the measurement object S are not appropriate.

  If it is determined in step S16 that the position and orientation of the measurement object S are not appropriate, the user returns to the process of step S15. On the other hand, if it is determined in step S16 that the position and orientation of the measuring object S are appropriate, the user adjusts the visual field size (step S17). The adjustment of the visual field size is performed by changing the magnification of the lens of the camera 121 of the light receiving unit 120, for example.

  Next, the user determines whether or not the visual field size is appropriate based on the image of the measurement object S displayed on the display unit 400 (step S18). If it is determined in step S18 that the field of view size is not appropriate, the user returns to the process of step S17. On the other hand, if it is determined in step S18 that the visual field size is appropriate, the user selects the type of texture image (step S19), and the first adjustment is terminated. By performing the first adjustment, an optimal illumination light amount condition for generating texture image data is set.

  In step S <b> 17, the light receiving unit 120 may include a plurality of cameras 121 having different lens magnifications, and the lens magnification may be changed by switching the cameras 121. Alternatively, one lens 121 that can switch the lens magnification may be included, and the lens magnification may be changed by switching the lens magnification. Alternatively, the visual field size may be adjusted by the digital zoom function of the light receiving unit 120 without changing the magnification of the lens.

  FIG. 26 is a schematic diagram showing the light receiving unit 120 of FIG. 2 viewed from the X direction. As shown in FIG. 26, the light receiving unit 120 includes cameras 121 </ b> A and 121 </ b> B as a plurality of cameras 121. The lens magnification of the camera 121A and the lens magnification of the camera 121B are different from each other. The light receiving unit 120 further includes a half mirror 124.

  The light that has passed through the plurality of lenses 122 and 123 is separated into two lights by the half mirror 124. One light is received by the camera 121A, and the other light is received by the camera 121B. By switching the camera 121 that outputs a light reception signal to the control board 150 in FIG. 1 between the camera 121A and the camera 121B, the magnification of the lens can be changed. Switching between the camera 121A and the camera 121B is performed by selecting the magnification of the camera in the magnification switching field 574 of FIG.

(3) Second Adjustment FIGS. 27 and 28 are flowcharts showing details of the second adjustment in the procedure for preparing for shape measurement. Hereinafter, the details of the second adjustment in the procedure for the preparation of the shape measurement will be described with reference to FIGS. 1, 2, 27, and 28. First, the user adjusts the amount of one measurement light (step S21).

  Next, the user determines whether or not the position and orientation of the measurement object S are appropriate based on the image of the measurement object S displayed on the display unit 400 (step S22). Here, when a shadow is not generated at the measurement position of the measurement object S, the user determines that the position and orientation of the measurement object S are appropriate. On the other hand, when a shadow is generated at the measurement position of the measurement object S, the user determines that the position and orientation of the measurement object S are not appropriate.

  If it is determined in step S22 that the position and orientation of the measurement object S are not appropriate, the user adjusts the position and orientation of the measurement object S (step S23). The position and orientation of the measuring object S are adjusted by changing the position of the XY stage 141 and the angle of the θ stage 143 of the stage 140. Thereafter, the user returns to the process of step S22.

  On the other hand, when it is determined in step S22 that the position and orientation of the measurement target S are appropriate, the user irradiates the measurement target S based on the image of the measurement target S displayed on the display unit 400. It is determined whether or not the amount of one of the measured light is appropriate (step S24).

  If it is determined in step S24 that the light amount of one measurement light is not appropriate, the user adjusts the light amount of one measurement light (step S25). Thereafter, the user returns to the process of step S24.

  On the other hand, if it is determined in step S24 that the amount of the one measurement light is appropriate, the user is appropriately focused on the light receiving unit 120 based on the image of the measurement object S displayed on the display unit 400. It is determined whether or not there is (step S26).

  If it is determined in step S26 that the focus of the light receiving unit 120 is not appropriate, the user adjusts the focus of the light receiving unit 120 (step S27). The focus of the light receiving unit 120 is adjusted by changing the position of the Z stage 142 of the stage 140 and adjusting the relative distance in the Z direction between the light receiving unit 120 and the measuring object S. Thereafter, the user returns to the process of step S26.

  On the other hand, when it is determined in step S26 that the focus of the light receiving unit 120 is appropriate, the user determines whether or not the observation state is appropriate from the image of the measurement object S displayed on the display unit 400. (Step S28).

  If it is determined in step S28 that the observation state is not appropriate, the user returns to the process in step S23, step S25, or step S27. Specifically, when it is determined that the position and orientation of the measurement object S are not appropriate in the observation state, the user returns to the process of step S23. If it is determined that the amount of light (one measurement light) is not appropriate in the observation state, the user returns to the process of step S25. When it is determined that the focus of the light receiving unit 120 is not appropriate in the observation state, the user returns to the process of step S27.

  On the other hand, when it is determined in step S28 that the observation state is appropriate, the user stops the irradiation of one measurement light and irradiates the measurement object S with the measurement light from the other light projecting unit 110B ( Step S29). Thereby, the image of the measuring object S is displayed on the display unit 400. Subsequently, the user adjusts the light quantity of the other measurement light while viewing the image of the measurement object S displayed on the display unit 400 (step S30).

  Thereafter, the user determines whether or not the amount of the other measurement light is appropriate based on the image of the measurement object S displayed on the display unit 400 (step S31). If it is determined in step S31 that the amount of the other measurement light is not appropriate, the user returns to the process of step S30. On the other hand, if it is determined in step S31 that the amount of the other measurement light is appropriate, the user ends the second adjustment. By performing the second adjustment, an optimal light quantity condition for one and the other measurement light is set in order to generate the main stereoscopic shape data. In addition, when not using the other light projection part 110B, the user may abbreviate | omit the procedure of step S29-S31 after the process of step S28, and may complete | finish 2nd adjustment.

  FIG. 29 is a diagram illustrating an example of the GUI of the display unit 400 when the second adjustment is performed. As shown in FIG. 29, when the second adjustment is performed, light amount setting bars 493 and 494 similar to those in FIG. 5 are displayed in the setting change area 580 of the display unit 400. The user can change the light quantity of one measurement light by operating the operation unit 250 and moving the slider 493s of the light quantity setting bar 493 in the horizontal direction. Similarly, the user can change the light amount of the other measurement light by operating the operation unit 250 and moving the slider 494s of the light amount setting bar 494 in the horizontal direction.

  When the second adjustment is performed, the display unit 400 is provided with three image display areas 550a, 550b, and 550c. In the image display area 550a, an image of the measurement object S when one and the other measurement light is irradiated is displayed. In the image display area 550b, an image of the measurement object S when one measurement light is irradiated is displayed. In the image display area 550c, an image of the measurement object S when the other measurement light is irradiated is displayed.

  Here, the image is displayed in the image display areas 550a to 550c so that a portion where overexposure occurs because it is too bright and a portion where blackout occurs because it is too dark can be identified. In the example of FIG. 29, the overexposed part is highlighted by the dot pattern because it is too bright. In addition, a portion that is blackened due to being too dark is highlighted by a hatching pattern.

(4) Shape measurement process After the preparation of the shape measurement of FIG. 23, the shape measurement process of the measuring object S is executed. 30, 31 and 32 are flowcharts showing the procedure of the shape measurement process. Hereinafter, the procedure of the shape measurement process will be described with reference to FIGS. 1, 2, and 30 to 32. The user instructs the CPU 210 to start the shape measurement process after completing the preparation for the shape measurement. The CPU 210 determines whether or not the user has instructed the start of the shape measurement process (step S41).

  If the start of the shape measurement process is not instructed in step S41, the CPU 210 waits until the start of the shape measurement process is instructed. The user can prepare for shape measurement until instructing the start of the shape measurement process. On the other hand, when the start of the shape measurement process is instructed in step S41, the CPU 210 irradiates the measurement object S with the measurement light from the light projecting unit 110 according to the light amount condition set in the second adjustment, and the measurement object. An image obtained by projecting the measurement light pattern onto S (hereinafter referred to as a pattern image) is acquired (step S42). The acquired pattern image is stored in the work memory 230.

  Next, the CPU 210 generates main three-dimensional shape data indicating the three-dimensional shape of the measuring object S by processing the acquired pattern image with a predetermined measurement algorithm (step S43). The generated main stereoscopic shape data is stored in the work memory 230. Subsequently, the CPU 210 displays an image of the main stereoscopic shape of the measuring object S on the display unit 400 based on the generated main stereoscopic shape data (step S44).

  Thereafter, the CPU 210 determines whether or not a three-dimensional shape of a position to be measured (hereinafter referred to as a measurement position) is displayed based on a user instruction (step S45). The user views the image of the main three-dimensional shape of the measuring object S displayed on the display unit 400 and instructs the CPU 210 whether or not the three-dimensional shape at the measurement position is displayed.

  If it is determined in step S45 that the three-dimensional shape of the measurement position is not displayed, the CPU 210 returns to the process of step S41. Thus, the CPU 210 waits until the start of the shape measurement process is instructed, and the user prepares for shape measurement so that the three-dimensional shape of the measurement position is displayed until the user instructs the start of the shape measurement process again. Can do. On the other hand, if it is determined in step S45 that the three-dimensional shape of the measurement position is displayed, the CPU 210 determines whether or not a normal texture image has been selected by the user in step S19 of the first adjustment in FIG. (Step S46).

  Here, when the check box 584a of the texture image selection field 584 of FIG. 19 is designated, the CPU 210 determines that a normal texture image has been selected. Further, the CPU 210 determines that a normal texture image has been selected even when none of the check boxes 584a to 584c in the texture image selection field 584 of FIG. 19 is designated.

  If it is determined in step S46 that a normal texture image has been selected, the CPU 210 irradiates the measurement object S with illumination light from the illumination light output unit 130 according to the light amount condition set in the first adjustment, and the measurement object. Normal texture image data of S is generated (step S47). Thereafter, the CPU 210 proceeds to the process of step S55.

  If it is determined in step S46 that the normal texture image has not been selected, the CPU 210 determines whether or not the omnifocal texture image has been selected by the user in step S19 of the first adjustment in FIG. 25 (step S48). ). Here, when the check box 584c of the texture image selection field 584 in FIG. 19 is designated, the CPU 210 determines that the omnifocal texture image has been selected.

  If it is determined in step S48 that the omnifocal texture image has been selected, the CPU 210 irradiates the measurement object S with illumination light from the illumination light output unit 130 according to the light amount condition set in the first adjustment, and the measurement object. S omnifocal texture image data is generated (step S49). On the other hand, if it is determined in step S48 that the omnifocal texture image has not been selected, the CPU 210 proceeds to the process of step S50.

  Next, the CPU 210 determines whether or not the HDR texture image has been selected by the user in the first adjustment step S19 of FIG. 25 (step S50). Here, when the check box 584b of the texture image selection field 584 in FIG. 19 is designated, the CPU 210 determines that the HDR texture image has been selected.

  If it is determined in step S50 that the HDR texture image has been selected, the CPU 210 irradiates the measurement object S with illumination light from the illumination light output unit 130 according to the light amount condition set in the first adjustment, and the measurement object S HDR texture image data is generated (step S51). If the omnifocal texture image data has been generated in step S49, the CPU 210 generates HDR omnifocal texture image data instead of the HDR texture image data in step S51. On the other hand, if it is determined in step S50 that the HDR texture image has not been selected, the CPU 210 proceeds to the process of step S52.

  The user can instruct the CPU 210 to display a texture image based on the generated texture image data on the display unit 400. CPU 210 determines whether display of a texture image has been instructed (step S52). If it is determined in step S52 that the display of the texture image has not been instructed, the CPU 210 proceeds to the process of step S55. On the other hand, if it is determined in step S52 that display of a texture image has been instructed, the CPU 210 causes the display unit 400 to display a texture image based on the generated texture image data (step S53).

  Next, the CPU 210 determines whether or not the texture image is appropriate based on a user instruction (step S54). The user looks at the texture image displayed on the display unit 400 and instructs the CPU 210 whether or not the texture image is appropriate.

  If it is determined in step S54 that the texture image is not appropriate, the CPU 210 returns to the process of step S48. Thereby, the processing of steps S48 to S54 is repeated until it is determined that the texture image is appropriate. The user can cause the CPU 210 to generate appropriate texture image data by changing the type of texture image to be selected.

  If it is determined in step S54 that the texture image is appropriate, the CPU 210 generates composite data (step S55). The combined data is generated by combining the texture image data generated in step S47, step S49 or step S51 with the main stereoscopic shape data generated in step S43.

  Subsequently, the CPU 210 causes the display unit 400 to display a composite image of the measurement object S based on the generated composite data (step S56). Thereafter, the CPU 210 performs measurement or analysis of the measurement position based on a user instruction (step S57). This completes the shape measurement process. With such shape measurement processing, the CPU 210 can perform measurement or analysis of the measurement position on the composite image based on the user's instruction.

  In step S42 described above, when the measurement object S is irradiated with the measurement object S from both the light projecting units 110A and 110B, one pattern image corresponding to the measurement light from the one light projecting unit 110A is acquired. The other pattern image corresponding to the measurement light from the other light projecting unit 110B is acquired.

  In step S43, one main stereoscopic shape data corresponding to the measurement light from one light projecting unit 110A is generated, and the other main stereoscopic shape data corresponding to the measurement light from the other light projecting unit 110B is generated. Is done. One main stereoscopic shape data is generated by combining one main stereoscopic shape data and the other main stereoscopic shape data with appropriate weighting.

  In steps S47, S49, and S51 described above, the illumination light is applied to the measurement object S from the illumination light output unit 130, and the texture image data of the measurement object S is generated. However, the present invention is not limited to this. In steps S47, S49, and S51, texture image data of the measurement object S may be generated by irradiating the measurement object S with the measurement light from the light projecting unit 110. In this case, since the shape measuring apparatus 500 does not need to include the illumination light output unit 130, the shape measuring apparatus 500 can be downsized. Moreover, the manufacturing cost of the shape measuring apparatus 500 can be reduced.

  In the shape measurement process described above, it is determined whether an HDR image is selected after it is determined whether an omnifocal texture image is selected, but the present invention is not limited to this. It may be determined whether an omnifocal image has been selected after determining whether an HDR texture image has been selected.

  In the shape measurement process, the texture image data generation process (steps S46 to S54) is executed after the main stereoscopic shape data generation process (steps S42 to S45), but the present invention is not limited to this. Either the texture image data generation process or the main stereoscopic shape data generation process may be executed first, and a part of the texture image data generation process and the main stereoscopic shape data generation process are executed simultaneously. May be.

  For example, after the process of generating texture image data (steps S46 to S54) is performed, the process of generating main stereoscopic shape data (steps S42 to S45) may be performed. Even in this case, the CPU 210 can generate composite data in the process of step S55. In step S54, while the user looks at the texture image displayed on the display unit 400 and determines whether the texture image is appropriate, the process of generating the main stereoscopic shape data is performed. Can be executed. Therefore, the shape measurement process can be executed efficiently in a short time.

  In addition, when the texture image data generation process is performed before the main stereoscopic shape data generation process, the upper and lower ends of the dimension in the Z direction of the measuring object S can be calculated based on the sub stereoscopic shape data. Become. Therefore, in the process of generating the main stereoscopic shape data, the focus of the light receiving unit 120 can be automatically adjusted to the center of the measurement object S in the Z direction. In this case, the accuracy of the main stereoscopic shape data can be further improved.

  On the other hand, when the process of generating the main stereoscopic shape data is performed before the process of generating the texture image data as in the shape measurement process of FIGS. 30 to 32, the measurement object S is measured based on the main stereoscopic shape data. It becomes possible to calculate the upper and lower ends of the dimension in the Z direction. Therefore, in the process of generating the texture image data, when generating the omnifocal texture image data, the movement range of the stage 140 with respect to the light receiving unit 120 in the Z direction can be minimized and the movement interval can be set appropriately. Thereby, omnifocal texture image data can be generated at high speed.

(5) Effect In the shape measuring apparatus 500 according to the present embodiment, main three-dimensional shape data indicating the three-dimensional shape of the measuring object S is generated with high accuracy by the triangulation method. Further, the omnifocal texture image data is generated by synthesizing the texture image data of the measurement object S when each part of the measurement object S is located within the range of the depth of field of the light receiving unit 120. . Therefore, the omnifocal texture image data clearly shows the surface state over the entire surface of the measuring object S.

  Thereby, the synthesized data obtained by synthesizing the main stereoscopic shape data and the omnifocal texture image data shows the stereoscopic shape of the measuring object S measured with high accuracy and clearly shows the surface state of the measuring object S. A composite image based on the composite data is displayed on the display unit 400. As a result, the user can clearly observe the surface state of the measuring object S while measuring the shape of the measuring object S with high accuracy.

  In the shape measuring apparatus 500 according to the present embodiment, the light quantity condition of one and the other measurement light suitable for generating main stereoscopic shape data and the light quantity of illumination light suitable for generating texture image data Conditions are set individually. As a result, it is possible to generate the main stereoscopic shape data with higher accuracy, and it is possible to generate texture image data that shows the surface state over the entire surface of the measuring object S more clearly. As a result, the surface state of the measuring object S can be observed more clearly while measuring the shape of the measuring object S with higher accuracy.

[6] Auxiliary function of posture adjustment (1) Outline In the second adjustment in preparation for shape measurement, the posture of the measuring object S is adjusted. FIG. 33 is a diagram for explaining the adjustment of the posture of the measuring object S. FIG. 33A and 33C show a state in which the measuring object S on the stage 140 is irradiated with the measuring light from the light projecting unit 110. FIG. 33 (b) and 33 (d) show images displayed on the display unit 400 when the measurement object S is imaged by the light receiving unit 120 of FIGS. 33 (a) and 33 (c), respectively.

  In the example of FIG. 33, the measuring object S is a block having an L-shaped cross section having two upper surfaces having different heights. In the example of FIG. 33A, the measurement light from the light projecting unit 110 is blocked by the upper surface of the measurement object S. In this case, as shown in FIG. 33B, a shadow Ss is generated at the measurement position on the upper surface of the lower stage of the measurement object S. Therefore, the shape of the measurement position of the measuring object S cannot be measured.

  In the example of FIG. 33 (c), the posture of the measurement object S is adjusted by changing the direction of the measurement object S. In this case, as shown in FIG. 33 (d), no shadow Ss occurs at the measurement position on the upper surface of the lower stage of the measurement object S. Thereby, the shape of the measurement position of the measuring object S can be measured.

  FIG. 34 is a perspective view showing an example of the measurement object S for explaining measurement conditions in the shape measurement process. As shown in FIG. 34, in the measuring object S, two prismatic members Sx and one quadrangular pyramid member Sy are formed on the plate member Sw. The height of the two prismatic members Sx is larger than the height of the quadrangular pyramid member Sy. In this case, a shadow is likely to occur around the two prismatic members Sx. Therefore, when there is a measurement position in the vicinity of the two prismatic members Sx, there is a possibility that the shape of the measurement object S at the measurement position cannot be measured accurately.

  Further, the measurement light irradiated between the two prismatic members Sx is reflected (multiple reflection) a plurality of times at a plurality of portions of the two prismatic members Sx and received by the light receiving unit 120 in FIG. There is. In this case, in the display unit 400 of FIG. 1, a false image of the measurement light that has been multiple-reflected is superimposed on the image of the measurement object S and displayed. As described above, there is a possibility that the shape of the measuring object S at the measurement position cannot be accurately measured by the multiple reflected measurement light.

  Further, since one surface Sya of the quadrangular pyramid member Sy has a predetermined inclination with respect to the optical axis of the light projecting unit 110, the high-intensity measurement light that is regularly reflected by the one surface Sya of the quadrangular pyramid member Sy. May be received. In this case, the portion of the light reception signal corresponding to one surface Sya of the quadrangular pyramid member Sy is likely to be saturated. Therefore, even when the measurement position is on one surface Sya that regularly reflects the measurement light to the light receiving unit 120, the shape of the measurement object S at the measurement position may not be accurately measured.

  On the other hand, the occurrence of a shadow on a part of the measuring object S, the occurrence of multiple reflection, and the occurrence of regular reflection are natural phenomena. Therefore, even if shadows, multiple reflections, or high-intensity light reflections occur at the measurement position, the user may not notice them. Hereinafter, a region where a shadow is generated in the measurement object S, a region where accurate measurement cannot be performed due to multiple reflection, and a region where measurement light is reflected with high intensity toward the light receiving unit 120 are referred to as a measurement difficulty region. The part of the main stereoscopic shape data corresponding to the difficult measurement area becomes a defective part such as a data missing part or a data inaccurate part.

  Therefore, the shape measuring apparatus 500 according to the present embodiment places the measurement object S in a posture in which the measurement difficulty region can be reduced as much as possible, or in a posture in which a desired portion is not included in the measurement difficulty region. A function to assist (hereinafter referred to as a posture adjustment assist function) is provided.

  In the auxiliary function of posture adjustment, for example, the measurement target S is irradiated with illumination light from the illumination light output unit 130 of FIG. At this time, the measurement object S is not irradiated with the measurement light. In this state, as described above, a plurality of texture image data of the measuring object S is acquired while the relative distance between the light receiving unit 120 and the measuring object S is changed, and the omnifocal texture image data and the sub-focus texture image data are obtained. Three-dimensional shape data is generated.

  A sub-stereoscopic shape image of the measurement object is displayed on the screen of the display unit 400 based on the generated sub-stereoscopic shape data. In the present embodiment, the position of the light projecting unit 110 in the measuring unit 100 is kept constant. Therefore, when the stage 140 is at a predetermined reference position, the relative position of the stage 140 with respect to the light projecting unit 110 is known. Thereby, even when the position of the stage 140 changes, the relative position of the surface of the measuring object S with respect to the light projecting unit 110 can be known based on the stage information of the stage 140 and the sub-stereoscopic shape data.

  In this example, based on the stage information and sub-stereoscopic shape data, the measurement difficulty region when the measurement light is irradiated from the light projecting unit 110 of FIG. 2 to the measurement object S is estimated by simulation, and the estimated measurement difficulty The defective partial image corresponding to the region is superimposed on the sub-stereoscopic shape image.

  Further, in the posture adjustment auxiliary function of this example, for example, when the user operates the operation unit 250 of the PC 200 in FIG. 1, the posture of the measurement object S on the sub-stereoscopic shape image displayed on the display unit 400. Can be changed. In this case, the measurement difficulty region when the measurement light is irradiated from the light projecting unit 110 of FIG. 2 to the measurement object S with the posture of the measurement object S changed on the sub-stereoscopic shape image is estimated by simulation, and estimated. The defective partial image corresponding to the measured difficulty region is superimposed on the sub-stereoscopic shape image. Thereby, the user can change the posture of the measuring object S on the sub-stereoscopic shape image while reducing the measurement difficulty region as much as possible, or the posture where the desired location is not included in the measurement difficulty region, etc. It can be easily recognized.

(2) Display Example of Substereoscopic Shape Image by Posture Adjustment Auxiliary Function FIG. 35 is a diagram showing a display example of a substereoscopic shape image on which a defective partial image is superimposed by the posture adjustment auxiliary function. In the example of FIG. 35, first and second image display areas 450 and 460 are set on the screen of the display unit 400. A sub-stereoscopic shape image in which the defective partial image is superimposed on the first image display area 450 is displayed. In the first image display area 450, the defective partial image is highlighted by a hatching pattern. Stage information is mainly displayed in the second image display area 460.

  In this state, the user can specify a change in the posture of the measurement object S on the sub-stereoscopic shape image by operating the operation unit 250 of the PC 200 in FIG. 1, for example.

  The CPU 210 changes the posture of the measurement object S on the sub-stereoscopic shape image in response to the designation of the posture change. Thereby, the sub-stereoscopic shape image of the measuring object S whose posture has been changed is displayed on the display unit 400. Further, the CPU 210 is difficult to measure when it is assumed that the posture of the measurement object S is adjusted to correspond to the posture of the measurement object S on the sub-stereoscopic shape image and the measurement light is irradiated to the measurement object S. The region is estimated again by simulation. Thereafter, the CPU 210 superimposes the estimated defective partial image on the sub-stereoscopic shape image.

  FIG. 36 is a diagram illustrating a display example of the sub-stereoscopic shape image when the change of the posture of the measurement object S is designated on the sub-stereoscopic shape image of FIG. For example, when the change of the posture of the measurement object S is designated as indicated by the white arrow on the sub-stereoscopic shape image of FIG. 35, the sub-solid displayed on the display unit 400 as shown in FIG. The posture of the measuring object S on the shape image is changed. Further, the position of the defective partial image on the measuring object S is also changed along with the change of the posture.

  FIG. 37 is a diagram illustrating a display example of the sub-stereoscopic shape image when the change of the posture of the measurement object S is designated on the sub-stereoscopic shape image of FIG. For example, when the change of the posture of the measuring object S is designated as indicated by the white arrow on the sub-stereoscopic shape image of FIG. 36, the sub-solid displayed on the display unit 400 as shown in FIG. The posture of the measuring object S on the shape image is changed. Further, the position of the defective partial image on the measuring object S is also changed along with the change of the posture.

  Thus, the user can easily change the position of the measurement target S on the sub-stereoscopic shape image displayed on the display unit 400 to easily locate the defective partial image of the measurement target S in an arbitrary posture. Can be recognized. In particular, the user can easily recognize the portion of the measuring object S (for example, the hole Sh2 in FIGS. 35 to 37) that becomes the measurement difficult region regardless of the posture.

(3) Display example of live image by posture adjustment auxiliary function In the posture adjustment auxiliary function of this example, after the posture of the measuring object S at the time of the shape measurement processing is determined by the user, before the shape measurement processing The measurement object S is irradiated with illumination light. In this state, texture image data is generated at a predetermined cycle, and texture images (live images) based on the latest generated texture image data are sequentially displayed on the display unit 400.

  FIG. 38 is a diagram illustrating a display example of a live image obtained by irradiating the measurement object S with illumination light before the shape measurement process. In FIG. 38, a live image of the measurement object S is displayed in the first image display area 450, and stage information is mainly displayed in the second image display area 460. As shown in FIG. 38, in the live image of this example, since the measurement object S is irradiated with illumination light, the light also reaches the inside of the hole Sh2 of the measurement object S.

  For example, when the posture of the measurement object S shown in FIG. 36 is the posture at the time of the shape measurement process determined by the user, the user can display the live image of the measurement object S in FIG. 36 before the shape measurement process. It is necessary to operate the stage operation unit 145 so as to match the sub-stereoscopic shape image shown.

  However, as shown in FIG. 38, when only the live image is displayed on the display unit 400, the user determines how to operate the stage operation unit 145 in order to bring the measuring object S into the determined posture. It is difficult to recognize.

  Therefore, in this example, when the user operates the stage operation unit 145, the sub-stereoscopic shape image of the measuring object S in the posture determined by the user is superimposed on the live image.

  FIG. 39 is a diagram illustrating a display example of a live image on which a sub-stereoscopic shape image is superimposed. In the example of FIG. 39, the sub-stereoscopic shape image and the live image of the measuring object S are displayed in the first image display area 450, and the stage information is displayed in the second image display area 460. In the example of FIG. 39, the defective partial image is superimposed on the live image together with the sub-stereoscopic shape image. The sub-stereoscopic shape image and the defective partial image are indicated by dotted lines. In this case, the user operates the stage operation unit 145 so that the live image of the measurement object S overlaps the sub-stereoscopic shape image. Thereby, the user can adjust the attitude | position of the measuring object S correctly and easily. The defective partial image may not be superimposed on the live image.

(4) Display Contents in Second Image Display Area 460 in FIGS. 35 to 38 FIG. 40 is a diagram showing a display example of the second image display area 460 in FIGS. As shown in FIG. 40, the second image display area 460 includes, for example, a target X position display frame 461a, a current X position display frame 461b, a target Y position display frame 462a, a current Y position display frame 462b, and a target Z position display. A frame 463a, a current Z position display frame 463b, a target θ rotation angle display frame 464a, a current θ rotation angle display frame 464b, a target tilt angle display frame 465a, a current tilt angle display frame 465b, a stage adjustment start button 466, and a measurement button 467 Is displayed.

  In the target X position display frame 461a, the assumed X position of the stage 140 corresponding to the posture of the measuring object S on the sub-stereoscopic shape image displayed on the display unit 400 is displayed as a numerical value or the like. On the other hand, the actual X position of the current stage 140 is displayed as a numerical value or the like in the current X position display frame 461b.

  In the target Y position display frame 462a, the assumed Y position of the stage 140 corresponding to the posture of the measuring object S on the sub-stereoscopic shape image displayed on the display unit 400 is displayed as a numerical value or the like. On the other hand, the actual Y position of the current stage 140 is displayed as a numerical value or the like in the current Y position display frame 462b.

  In the target Z position display frame 463a, the assumed Z position of the stage 140 corresponding to the posture of the measuring object S on the sub-stereoscopic shape image displayed on the display unit 400 is displayed as a numerical value or the like. On the other hand, the current Z position display frame 463b displays the actual Z position of the current stage 140 as a numerical value or the like.

  In the target θ rotation angle display frame 464a, the assumed θ rotation angle of the stage 140 corresponding to the posture of the measuring object S on the sub-stereoscopic shape image displayed on the display unit 400 is displayed as a numerical value or the like. On the other hand, the current θ rotation angle display frame 464b displays the actual θ rotation angle of the current stage 140 as a numerical value or the like.

  In the target tilt angle display frame 465a, the assumed tilt angle of the stage 140 corresponding to the posture of the measuring object S on the sub-stereoscopic shape image displayed on the display unit 400 is displayed as a numerical value or the like. On the other hand, the current tilt angle display frame 465b displays the actual tilt angle of the current stage 140 as a numerical value or the like.

  In the display state of the display unit 400 shown in FIGS. 35 to 37, the user designates a part of the measuring object S on the sub-stereoscopic shape image with a pointer (not shown) and performs a drag operation. It is possible to specify a change in the posture of the measuring object S on the sub-stereoscopic shape image. In addition, the user can display the target X position display frame 461a, the target Y position display frame 462a, the target Z position display frame 463a, the target θ rotation angle in the display state of the display unit 400 shown in FIGS. By inputting desired values into the display frame 464a and the target tilt angle display frame 465a, it is possible to specify the change in the posture of the measurement object S on the sub-stereoscopic shape image. In response to the designation of the posture change by the user, the posture of the measuring object S on the sub-stereoscopic shape image is changed.

  The stage adjustment start button 466 is operated by the user after the posture of the measuring object S during the shape measurement process is determined based on the sub-stereoscopic shape image. Thereby, as shown in the example of FIG. 39, a live image of the measurement object S is displayed in the first image display area 450, and a sub-stereoscopic shape image of the measurement object S in the determined posture is displayed. It is superimposed on the live image.

  In this state, the user views the target X position display frame 461a, the current X position display frame 461b, the target Y position display frame 462a, the current Y position display frame 462b, and the target Z position while viewing the live image and the sub-stereoscopic shape image. The stage operation unit while confirming the display contents of the display frame 463a, the current Z position display frame 463b, the target θ rotation angle display frame 464a, the current θ rotation angle display frame 464b, the target tilt angle display frame 465a, and the current tilt angle display frame 465b. 145 can be operated.

  The measurement button 467 is operated by the user after the posture of the measuring object S is adjusted to the posture determined by the user. When the measurement button 467 is operated, the shape measuring apparatus 500 enters a standby state for the shape measuring process of the measuring object S. Note that the shape measurement process may be started by operating the measurement button 467. In the shape measurement process, the shape of the measuring object S is measured with higher accuracy than when illumination light is used.

  In addition to the example of FIG. 39, when the posture of the measurement object S is adjusted to the determined posture, the sub-stereoscopic shape image and the live image may be displayed on the display unit 400 as follows.

  FIG. 41 is a diagram illustrating another display example of the sub-stereoscopic shape image and the live image when the posture of the measurement target S is adjusted. In the example of FIG. 41, the first image display area 450 is divided into two image display areas 411 and 412. The sub-stereoscopic shape image of the measuring object S in the posture determined by the user is displayed in one image display area 411. A live image is displayed in the other image display area 412.

  Thus, the sub-stereoscopic shape image of the measurement object S having the determined posture and the live image are displayed so that the user can adjust the posture of the measurement object S accurately and easily. it can.

  FIG. 42 is a diagram illustrating still another display example of the sub-stereoscopic shape image and the live image when the posture of the measurement object S is adjusted. In the example of FIG. 42, a live image is displayed in the first image display area 450, and a child window 480 smaller than the first image display area 450 is displayed in the first image display area 450. In the child window 480, the sub-stereoscopic shape image of the measuring object S in the posture determined by the user is displayed.

  Even in this case, the live image of the measuring object S is displayed and the sub-stereoscopic shape image of the measuring object S in the determined posture is displayed, so that the user can accurately and accurately determine the posture of the measuring object S. It can be adjusted easily.

(5) Example of posture adjustment auxiliary measurement process Hereinafter, the shape measurement process using the posture adjustment auxiliary function is abbreviated as posture adjustment auxiliary measurement process. 43 to 45 are flowcharts illustrating an example of posture adjustment auxiliary measurement processing. In the present embodiment, the display unit 400 displays, for example, a posture adjustment assist button. The user can instruct the CPU 210 to start the posture adjustment auxiliary measurement process by operating the posture adjustment auxiliary button using the keyboard and pointing device of the PC 200 of FIG.

  First, the CPU 210 determines whether or not the start of the posture adjustment auxiliary measurement process has been instructed (step S116). By instructing the start of the posture adjustment auxiliary measurement process, the CPU 210 controls the stage driving unit 146, the light receiving unit 120, the illumination light output unit 130, and the illumination light source 320, thereby omnifocal texture image data and sub-stereoscopic shape data. Is generated (step S117), and a sub-stereoscopic shape image based on the generated sub-stereoscopic shape data is displayed on the display unit 400 (step S118).

  At this time, in addition to the sub-stereoscopic shape image, the CPU 210 may display stage information corresponding to the posture of the measuring object S on the sub-stereoscopic shape image on the display unit 400 as assumed stage information. The assumed stage information is information displayed in the target X position display frame 461a, the target Y position display frame 462a, the target Z position display frame 463a, the target θ rotation angle display frame 464a, and the target tilt angle display frame 465a of FIG. Equivalent to.

  Next, the CPU 210 estimates a measurement difficulty region when it is assumed that the measurement light is irradiated on the measurement object S based on the actual stage information and sub-stereoscopic shape data of the stage 140 (step S119). The defective partial image corresponding to the measured difficulty region is superimposed on the sub-stereoscopic shape image (step S120). In this state, the user can specify a change in the posture of the measurement object S on the sub-stereoscopic shape image by operating the operation unit 250 of the PC 200 in FIG. 1, for example.

  Next, the CPU 210 determines whether or not a change in the posture of the measurement object S on the sub-stereoscopic shape image displayed on the display unit 400 has been designated (step S121). When the change of the posture of the measurement object S is not designated, the CPU 210 proceeds to the process of step S125 described later. On the other hand, when the change of the posture of the measuring object S on the sub-stereoscopic shape image is designated, the CPU 210 changes the posture of the measuring object S on the sub-stereoscopic shape image in response to the designation (step S122). . Thereby, the sub-stereoscopic shape image of the measuring object S whose posture has been changed is displayed on the display unit 400.

  Further, the CPU 210 is difficult to measure when it is assumed that the posture of the measurement object S is adjusted to correspond to the posture of the measurement object S on the sub-stereoscopic shape image and the measurement light is irradiated to the measurement object S. The region is estimated again by simulation (step S123). Thereafter, the CPU 210 superimposes the defective partial image corresponding to the estimated measurement difficulty region on the sub-stereoscopic shape image (step S124). Also in this case, the CPU 210 may cause the display unit 400 to display assumed stage information in addition to the sub-stereoscopic shape image.

  Thereafter, CPU 210 determines whether or not an instruction to start adjustment of stage 140 has been received (step S125). In the present embodiment, CPU 210 determines that an instruction to start adjustment of stage 140 is received when the user operates stage adjustment start button 466 in FIG. 40, and when stage adjustment start button 466 is not operated. It is determined that an instruction to start adjustment of the stage 140 has not been received. When the instruction to start the adjustment of the stage 140 is not received, the CPU 210 returns to the process of step S121.

  When receiving an instruction to start adjustment of the stage 140, the CPU 210 causes the display unit 400 to simultaneously display the sub-stereoscopic shape image and the live image displayed on the display unit 400 when the instruction is received (step S126). ). In this case, the CPU 210 may cause the display unit 400 to display a live image on which the sub-stereoscopic shape image is superimposed, as shown in FIG. Alternatively, the CPU 210 may individually display the sub-stereoscopic shape image and the live image on the display unit 400 as illustrated in FIGS. 41 and 42.

  At this time, in addition to the sub-stereoscopic shape image and the live image, the CPU 210 may cause the display unit 400 to display the actual stage information of the stage 140 together with the assumed stage information. The actual stage information is information displayed in the current X position display frame 461b, the current Y position display frame 462b, the current Z position display frame 463b, the current θ rotation angle display frame 464b, and the current tilt angle display frame 465b of FIG. It corresponds to.

  Next, the CPU 210 superimposes the defective partial image corresponding to the sub-stereoscopic shape image displayed in step S126 on the sub-stereoscopic shape image (step S127). Note that the processing in step S127 may not be performed.

  At this point, the user can adjust the actual posture of the measuring object S by adjusting the stage 140 by operating the stage operation unit 145 of FIG. 1 while viewing the sub-stereoscopic shape and the live image. .

  Next, the CPU 210 determines whether or not the state of the stage 140 has changed, that is, whether or not the stage 140 has been adjusted (step S128). Specifically, CPU 210 determines whether or not the state of stage 140 has changed based on signals given from the encoders of stage 140.

  If the state of the stage 140 does not change in step S128, the CPU 210 proceeds to the process of step S130 described later. On the other hand, when the state of the stage 140 changes, the CPU 210 updates the actual stage information based on the signal given from each encoder of the stage 140 (step S129).

  Next, the CPU 210 determines whether or not the posture of the measuring object S is appropriate (step S130). In step S130, for example, when the measurement button 467 of FIG. 40 is operated by the user, the CPU 210 may determine that the posture of the measurement object S is appropriate in response to the operation. Alternatively, the CPU 210, for example, when the actual stage information is within a predetermined error range with respect to the assumed stage information at the time when the instruction to start the adjustment of the stage 140 is received in step S125, It may be determined that the posture is appropriate.

  In step S130, when the posture of the measuring object S is not appropriate, the CPU 210 returns to the process of step S128. On the other hand, when the posture of the measuring object S is appropriate, the CPU 210 performs the shape measurement process of FIGS. 30 to 32 (step S131). Main three-dimensional shape data generated by the shape measurement process is stored in the work memory 230. A main stereoscopic shape image based on the generated main stereoscopic shape data is displayed on the display unit 400. Thereafter, the CPU 210 ends the process.

  In the above step S130, when the CPU 210 determines that the posture of the measurement object S is appropriate based on the assumed stage information and the actual stage information, the CPU 210 determines the measurement object S before the process of step S131. An image indicating that the posture is appropriately adjusted may be displayed on the display unit 400. Further, for example, when the audio output unit is connected to the PC 200 of FIG. 1, the CPU 210 may cause the audio output unit to output a sound indicating that the posture of the measurement object S has been appropriately adjusted. In this case, the user can easily recognize that the posture of the measuring object S has been appropriately adjusted.

(6) Other Examples of Posture Adjustment Auxiliary Measurement Processing In the posture adjustment auxiliary measurement processing of FIGS. 43 to 45, after the posture of the measuring object S is determined by the sub-stereoscopic shape image, the user operates the stage operation unit 145. By operating, the actual posture of the measuring object S is adjusted. However, the adjustment of the posture of the measuring object S may be automatically adjusted by the CPU 210.

  In this case, the CPU 210 performs the following processing instead of the processing of steps S126 to S130 in FIG. FIG. 46 is a flowchart illustrating another example of the posture adjustment auxiliary measurement process.

  In step S125 of FIG. 44, when receiving an instruction to start adjustment of the stage 140, the CPU 210 corresponds to the posture of the measurement object S on the currently displayed sub-stereoscopic shape image as shown in FIG. The stage 140 is adjusted based on the assumed stage information (step S141). Specifically, the CPU 210 sets the X position, the Y position, the Z position, the θ rotation angle, and the tilt angle of the stage 140 so that the actual stage information matches the assumed stage information at the time of step S125. A signal to be adjusted is given to the stage drive unit 146 of FIG. At this time, the stage 140 may be controlled in a closed loop manner.

  Further, the CPU 210 updates actual stage information based on signals given from the encoders of the stage 140 (step S142). Thereafter, the CPU 210 performs the shape measurement process of FIGS. 30 to 32 (step S131) and ends the process.

  In this example, after the posture of the measuring object S is determined on the sub-stereoscopic shape image, the actual posture of the measuring object S is adjusted to the automatically determined posture. Therefore, the user can easily adjust the posture of the measuring object S without performing complicated operations.

  Further, in this example, while the stage 140 is automatically adjusted, the sub-stereoscopic shape image and the live image of the determined posture may be continuously displayed on the display unit 400. In this case, the user can easily recognize the adjustment state of the posture of the measuring object S.

(7) Still Another Example of Posture Adjustment Auxiliary Measurement Processing The CPU 210 may perform the following processing instead of the processing in step S121 in FIG. 44 to step S129 in FIG. FIG. 47 is a flowchart illustrating still another example of the posture adjustment auxiliary measurement process.

  In step S120 in FIG. 44, after the defective partial image corresponding to the estimated measurement difficulty region is superimposed on the sub-stereoscopic shape image, the CPU 210 adjusts whether or not the state of the stage 140 has changed, that is, the stage 140 is adjusted. It is determined whether or not (step S151). Specifically, the CPU 210 determines whether or not the state of the stage 140 has changed based on signals given from the encoders of the stage 140 when the user operates the stage operation unit 145.

  If the state of the stage 140 does not change in step S151, the CPU 210 proceeds to the process of step S130. On the other hand, when the state of the stage 140 changes, the CPU 210 updates the actual stage information based on the signal given from each encoder of the stage 140 (step S152).

  Next, the CPU 210 changes the posture of the measuring object S on the sub-stereoscopic shape image based on the actual stage information of the stage 140 and the sub-stereoscopic shape data generated in step S117 (step S153). In step S153, the CPU 210 may cause the display unit 400 to display a live image together with or in place of the sub-stereoscopic shape image.

  Next, the CPU 210 estimates by simulation the measurement difficulty region when it is assumed that the measurement light is irradiated on the measurement object S based on the actual stage information and sub-stereoscopic shape data of the stage 140 (step S154). The defective partial image corresponding to the measured difficulty region is superimposed on the sub-stereoscopic shape image (step S155). In step S153, when a live image is displayed on the display unit 400 instead of the sub-stereoscopic shape image, the CPU 210 superimposes the defective partial image on the live image.

  Next, the CPU 210 determines whether or not the posture of the measuring object S is appropriate (step S130). For example, the CPU 210 determines that the posture of the measurement object S is appropriate when the measurement button 467 of FIG. 40 is operated by the user, and the measurement object when the measurement button 467 of FIG. 40 is not operated by the user. It is determined that the posture of S is not appropriate.

  When the posture of the measuring object S is not appropriate, the CPU 210 returns to the process of step S151. On the other hand, when the posture of the measuring object S is appropriate, the CPU 210 performs the shape measurement process of FIGS. 30 to 32 (step S131) and ends the process.

  In this example, the measurement difficult region when it is assumed that the measurement light is irradiated onto the measurement object S every time the posture of the actual measurement object S is changed by operating the stage operation unit 145 by the user. A defective partial image corresponding to the estimated measurement difficult region is superimposed on the sub-stereoscopic shape image or the live image. Thereby, the user can determine the posture of the measuring object S by operating the stage operation unit 145 while viewing the defective partial image displayed on the screen. In this case, compared with the example of FIGS. 43-45, the operation procedure at the time of posture adjustment by the user can be reduced.

(8) Effect In shape measuring apparatus 500 according to the present embodiment, illumination light is irradiated onto measurement object S before shape measurement, and all-focus texture image data and sub-stereoscopic shape data are generated. A sub-stereoscopic shape image is displayed based on the sub-stereoscopic shape data. By specifying the change of the posture of the measuring object S on the sub-stereoscopic shape image, the posture of the measuring object S on the sub-stereoscopic shape image is changed.

  The posture of the measuring object S is adjusted so as to correspond to the posture of the measuring object S on the sub-stereoscopic shape image, and a measurement difficulty region is estimated when it is assumed that the measuring light is irradiated to the measuring object S. . A defective partial image corresponding to the estimated measurement difficulty region is superimposed on the sub-stereoscopic shape image.

  Thereby, the user changes the posture of the measuring object S on the sub-stereoscopic shape image before the shape measurement, and the measurement that occurs when the measuring object S is irradiated with the measuring light with the changed posture. Difficult parts can be easily recognized. Therefore, the user can easily adjust the posture of the measuring object S to a state suitable for the shape measurement process while referring to the sub-stereoscopic shape image.

  In the shape measurement process, main stereoscopic shape data having higher accuracy or a larger data amount than the sub stereoscopic shape data is generated. Thereby, the shape of the measuring object S can be measured with high accuracy.

  In the posture adjustment auxiliary function according to the present embodiment, the sub-stereoscopic shape data is generated based on the relative distance between the light receiving unit 120 and the measurement object S. The sub-stereoscopic shape data is generated in order to obtain a defective part image and a sub-stereoscopic shape image for allowing the user to recognize a difficult-to-measure part of the measuring object S. Therefore, high measurement accuracy is not required for the sub-stereoscopic shape data. Therefore, when the sub-stereoscopic shape data is generated, the distance of the stage 140 that moves in the Z direction every time a texture image is acquired (the movement interval of the stage 140) can be increased. As a result, the sub-stereoscopic shape data can be generated quickly with a small number of imaging.

  On the other hand, the main three-dimensional shape data is a light reception signal output from the light receiving unit 120 in a state where each measurement object S is irradiated with a plurality of types of measurement light having a pattern, and each measurement light is irradiated on the measurement object S. Is generated based on The main three-dimensional shape data is used for detailed measurement or analysis of the measurement position. Therefore, high measurement accuracy is required for the main stereoscopic shape data. As a result, when the main stereoscopic shape data is generated, a large number of measurement lights are applied to the measurement object S, so that the number of times of imaging increases. Therefore, there is a limit to speeding up the generation of main stereoscopic shape data.

  As described above, the sub-stereoscopic shape data is generated in a shorter time than the main stereoscopic shape data generated by the triangulation method during the shape measurement process. Thereby, since the sub-stereoscopic shape image for adjusting the posture of the measuring object S is displayed in a short time, the user can quickly adjust the posture of the measuring object S.

  When the sub-stereoscopic shape data is generated, the measurement object S is irradiated with illumination light instead of measurement light. As a result, sub-stereoscopic shape data is generated without being affected by shadows or multiple reflections as compared with the case of using measurement light.

[7] Other Embodiments (1) In the above embodiment, the target X position display frame 461a, the target Y position display frame 462a, the target Z position display frame 463a displayed in the second image display area 460, In the target θ rotation angle display frame 464a and the target inclination angle display frame 465a, the assumed X position, Y position, Z position, θ rotation angle, and tilt inclination angle are respectively displayed as numerical values. Instead, the assumed X position, Y position, Z position, θ rotation angle, and tilt angle may be displayed by a seek bar and a slider, respectively.

  Similarly, in the above embodiment, the current X position display frame 461b, the current Y position display frame 462b, the current Z position display frame 463b, the current θ rotation angle display frame 464b, which are displayed in the second image display area 460, In addition, the actual X position, Y position, Z position, θ rotation angle, and tilt angle of the stage 140 are displayed as numerical values in the current tilt angle display frame 465b. Instead, the actual X position, Y position, Z position, θ rotation angle, and tilt angle may be displayed by a seek bar and a slider, respectively.

  FIG. 48 is a diagram showing another display example of the second image display area 460 of FIGS. 35 to 39. As shown in FIG. 48, in this example, the target X position display frame 461a, the current X position display frame 461b, the target Y position display frame 462a, the current Y position display frame 462b, the target Z position display frame 463a of FIG. Instead of the Z position display frame 463b, the target θ rotation angle display frame 464a, the current θ rotation angle display frame 464b, the target inclination angle display frame 465a, and the current inclination angle display frame 465b, ten seek bars 471a, 471b, 472a, 472b are used. , 473a, 473b, 474a, 474b, 475a, 475b and 10 sliders SL respectively corresponding to 10 seek bars.

  In the seek bar 471a, the assumed X position is indicated by the position of the slider SL. In seek bar 472a, the assumed Y position is indicated by the position of slider SL. In seek bar 473a, the assumed Z position is indicated by the position of slider SL. In seek bar 474a, the assumed θ rotation angle is indicated by the position of slider SL. In seek bar 475a, an assumed tilt angle is indicated by the position of slider SL.

  On the other hand, in the seek bar 471b, the actual X position is indicated by the position of the slider SL. In the seek bar 472b, the actual Y position is indicated by the position of the slider SL. In the seek bar 473b, the actual Z position is indicated by the position of the slider SL. In the seek bar 474b, the actual θ rotation angle is indicated by the position of the slider SL. In seek bar 475b, the actual tilt angle is indicated by the position of slider SL.

  As shown in FIG. 48, the assumed stage information and the actual stage information are displayed by the seek bar and the slider, so that the user can easily recognize, for example, the direction in which the stage 140 should be moved and the amount of movement or rotation. be able to.

  In this example, when the user operates the slider SL corresponding to the assumed stage information, the CPU 210 measures the measurement target on the sub-stereoscopic shape image displayed on the display unit 400 in response to the operation of the slider SL by the user. The posture of the object S may be changed.

  When the user operates the slider SL corresponding to the actual stage information, the CPU 210 may adjust the stage 140 by controlling the stage drive unit 146 in response to the operation of the slider SL.

  (2) In the above embodiment, the posture of the measuring object S is adjusted to correspond to the posture of the measuring object S on the sub-stereoscopic shape image and the measurement light is measured by the auxiliary function of the posture adjustment. A measurement difficulty region when it is assumed that the object S is irradiated is estimated by simulation, and a defective partial image corresponding to the estimated measurement difficulty region is superimposed on the sub-stereoscopic shape image.

  Here, when the position of the light projecting unit 110 is adjustable with respect to the measurement target S, for example, the measurement target S is held at a fixed position and the position of the light projecting unit 110 is changed. The measurement difficult region when it is assumed that the measurement light is irradiated onto the measurement object S may be estimated by simulation. In addition, a defective partial image corresponding to the estimated measurement difficulty region may be superimposed on the sub-stereoscopic shape image.

  In this case, the user can easily recognize the measurement difficult region when the emission position of the measurement light changes. Therefore, the position of the light projecting unit 110 can be easily adjusted to an appropriate state.

  Even when the position of the light projecting unit 110 is not adjustable with respect to the measuring object S, it is assumed that the measuring object S is irradiated with the measuring light with the position of the light projecting unit 110 changed. The measurement difficult region in this case may be estimated by simulation. In addition, a defective partial image corresponding to the estimated measurement difficulty region may be superimposed on the sub-stereoscopic shape image.

  (3) In the above-described embodiment, the sub-stereoscopic shape data is generated by synthesizing the height with the omnifocal texture image data for all portions of the measuring object S. However, the present invention is not limited to this, and the sub-stereoscopic shape data may be composed of data indicating only the heights of all the parts of the measuring object S. In this case, the sub-stereoscopic shape image does not include a pattern.

  (4) In the above embodiment, the omnifocal texture image data and the sub-stereoscopic shape data are generated in step S117 of FIG. 43, but the omnifocal texture image data may not be generated.

  (5) In the above embodiment, the encoder is attached to the stepping motor used for the X direction moving mechanism, the Y direction moving mechanism, the Z direction moving mechanism, the θ direction rotating mechanism, and the tilt rotating mechanism of the stage 140.

  The position of the stage 140 in the X direction relative to a predetermined reference position (X position) is not limited to this, and the X direction moving mechanism, the Y direction moving mechanism, the Z direction moving mechanism, the θ direction rotating mechanism, and the tilt rotating mechanism of the stage 140 When a scale indicating the position in the Y direction (Y position), the position in the Z direction (Z position), the rotation angle in the θ direction (θ rotation angle), or the tilt angle (tilt tilt angle) with respect to the XY plane is provided In addition, an encoder may not be attached to the stage 140.

  In this case, the current X position display frame 461b, the current Y position display frame 462b, the current Z position display frame 463b, the current θ rotation angle display frame 464b, and the current tilt angle display frame 465b of FIG. 40 are not displayed. Also, the seek bars 431b, 432b, 433b, 434b, and 435b in FIG. 48 are not displayed.

  Even in such a case, the user, for example, of the target X position display frame 461a, the target Y position display frame 462a, the target Z position display frame 463a, the target θ rotation angle display frame 464a, and the target inclination angle display frame 465a of FIG. It is possible to adjust the posture of the measuring object S by operating the stage operation unit 145 while checking the display while looking at the scale of the stage 140.

  (6) In the above embodiment, in the auxiliary function of posture adjustment, after the user determines the posture of the measuring object S on the sub-stereoscopic shape image, the sub-stereoscopic shape image and the live image are simultaneously displayed on the display unit. 400. In the posture adjustment auxiliary function, the display form of the live image and the sub-stereoscopic shape image may be switchable.

  For example, the user can display a display form in which the sub-stereoscopic shape image is superimposed on the live image (FIG. 39), and a display form in which the sub-stereoscopic shape image and the live image are displayed in two image display areas 411 and 412 adjacent to each other. (FIG. 41) and a display form (FIG. 42) in which a live image is displayed in the first image display area 450 (parent window) and a sub-stereoscopic shape image is displayed in the child window 480 can be switched more easily. In addition, the posture of the measuring object S can be adjusted.

  (7) In the above embodiment, the measurement object S is irradiated with the illumination light when generating the omnifocal texture image data and the sub-stereoscopic shape data. Not limited to this, at the time of generating all-focus texture image data and sub-stereoscopic shape data, illumination light and measurement light may be simultaneously irradiated on the measurement object S, or only measurement light is irradiated on the measurement object S. Also good.

  However, when the measurement light S is irradiated with the illumination light, it is possible to reduce the shadows generated compared to the case where the measurement light is irradiated onto the measurement target S. Therefore, it is preferable to irradiate the measurement object S with at least illumination light when generating the omnifocal texture image data and the sub-stereoscopic shape data.

  (8) In the above embodiment, as an example of the measurement difficult region of the measuring object S in the shape measurement of the triangulation method, an area where a shadow occurs in the measuring object S, or an area where accurate measurement cannot be performed due to multiple reflection In addition, a region where the measurement light is reflected with high intensity toward the light receiving unit 120 can be given. Not limited to these examples, the following area of the measuring object S is also a measurement difficulty area when measuring the shape of the triangulation system.

  For example, when the measurement object S includes a portion having a high transmittance (translucent portion), the measurement light is easily transmitted through the translucent portion of the measurement object S when measuring the shape of the triangulation method. In addition, there is a possibility that the measurement light may enter and diffuse into the translucent portion of the measurement object S during the shape measurement by the triangulation method.

  Furthermore, when the measurement object S includes a portion having a very high reflectance (high reflectance portion), the measurement light reflected by the high reflectance portion of the measurement object S during shape measurement by the triangulation method is used. High strength. Thereby, when the light receiving unit 120 receives the measurement light reflected by the high reflectance portion, the portion of the received light signal corresponding to the high reflectance portion is likely to be saturated.

  Thus, the measurement difficulty region of the measurement object S is generated not only by the shape of the measurement object S but also by the transmittance, surface state, reflectance, and the like of the measurement object S. Therefore, when the transmittance, surface state, and reflectance of the measuring object S are known, the transmittance, surface state, and reflectance of the measuring object S are taken into account along with the sub-stereoscopic shape data during the posture adjustment auxiliary measurement process. Thus, the measurement difficulty region may be estimated.

[8] Correspondence between each component of claim and each part of embodiment The following describes an example of a correspondence between each component of the claim and each part of the embodiment. It is not limited.

  The shape measuring apparatus 500 is an example of a shape measuring apparatus, the stage 140 is an example of a stage, the measuring object S is an example of a measuring object, the illumination light is an example of first light, and the measuring light is It is an example of the second light, the light projecting unit 110, the illumination light output unit 130, and the illumination light source 320 are examples of the light projecting unit, the light receiving unit 120 is an example of the light receiving unit, and the measurement light source 111 is the measurement light source. It is an example and the pattern generation part 112 is an example of a pattern generation part.

  Further, the light projecting unit 110 is an example of a second light projecting unit, the illumination light output unit 130 and the illumination light source 320 are examples of a first light projecting unit, and the stage driving unit 146 is an example of a relative distance changing unit. The display unit 400 is an example of the display unit.

  The operation unit 250 and the stage operation unit 145 are examples of an image posture adjustment unit, and the CPU 210 is an example of a first data generation unit, a second data generation unit, an image posture change unit, a control unit, and a processing device. .

  Further, the sub stereoscopic shape data is an example of the first stereoscopic shape data, the sub stereoscopic shape image is an example of the posture adjustment image, the main stereoscopic shape data is an example of the second stereoscopic shape data, and the defective portion The portion of the main stereoscopic shape data corresponding to the image is an example of a defective portion, the stage operation unit 145 is an example of a first posture adjustment unit, and the stage driving unit 146 is an example of a second posture adjustment unit.

  As each constituent element in the claims, various other elements having configurations or functions described in the claims can be used.

  The present invention can be effectively used for various shape measuring apparatuses, shape measuring methods, and shape measuring programs.

DESCRIPTION OF SYMBOLS 100 Measurement part 110 Light projection part 111 Measurement light source 112 Pattern production | generation part 113-115,122,123 Lens 120 Light reception part 121,121A, 121B Camera 121a Image pick-up element 124 Half mirror 130 Illumination light output part 140 Stage 141 XY stage 142 Z stage 143 θ stage 144 Tilt stage 145 Stage operation unit 146 Stage drive unit 150, 310 Control board 200 PC
210 CPU
220 ROM
230 Working Memory 240 Storage Device 250 Operation Unit 300 Control Unit 320 Illumination Light Source 400 Display Unit 411, 412, 491, 492 Image Display Area 450 First Image Display Area 460 Second Image Display Area 461a Target X Position Display Frame 461b Current X position display frame 462a Target Y position display frame 462b Current Y position display frame 463a Target Z position display frame 463b Current Z position display frame 464a Target θ rotation angle display frame 464b Current θ rotation angle display frame 465a Target tilt angle display frame 465b Current tilt angle display frame 466 Stage adjustment start button 467 Measurement button 471a, 471b, 472a, 472b, 473a, 473b, 474a, 474b, 475a, 475b Seek bar 480 Child window 493, 494 Light quantity setting bar 493s, 494s, SL Slider 500 Shape measuring device 550 Image display area 550a, 550b, 550c Image display area 570, 580 Setting change area 571 Brightness selection field 572 Brightness setting bar 573 Display switching field 574 Magnification switching field 575 Magnification selection field 576 Focus adjustment field 572s Slider 580A Microscope mode selection tab 580B Shape measurement mode selection tab 581 Tool selection field 581a Measurement tool display field 581b Auxiliary tool display field 582 Shooting button 583 Measurement button 584 Texture image selection field 584a, 584b, 584c Check box S Measurement object Sb circuit Substrate Sc Electrolytic capacitor Sh, Sh2 Hole Ss Shadow Sw Plate member Sx Square column member Sy Square pyramid member Sya One surface r1 Depth of field range r2 Measurable range

Claims (8)

A stage on which a measurement object is placed;
The measurement object placed on the stage is irradiated with first light for posture confirmation from above or obliquely from above, and the second light for shape measurement from obliquely above to the measurement object placed on the stage. A light projecting unit configured to irradiate
A light receiving unit arranged above the stage, configured to receive light reflected by the measurement object placed on the stage and to output a light reception signal indicating the amount of light received;
A relative distance changing unit that changes a relative distance between the light receiving unit and the measurement object by changing a relative distance between the light receiving unit and the stage in an optical axis direction of the light receiving unit;
When the relative distance between the light receiving unit and the measurement target is changed by the relative distance changing unit during the irradiation of the first light to the measurement target, the plurality of portions of the measurement target are respectively A first data generation unit that generates first three-dimensional shape data indicating a three-dimensional shape of the measurement object based on a relative distance between the light reception unit and the measurement object in a state where the light reception unit is in focus; ,
When irradiating the measurement object with the second light, second solid shape data indicating the three-dimensional shape of the measurement object is generated by a triangulation method based on the light reception signal output from the light receiving unit. A second data generator configured to:
A display unit that displays an image of the measurement object based on the first three-dimensional shape data as an image for posture adjustment;
An image posture adjustment unit operated by a user to specify a change in posture of the measurement object on the posture adjustment image displayed on the display unit;
In response to designation of the change of posture by the image posture adjustment unit, an image posture change unit that changes the posture of the measurement object on the posture adjustment image displayed on the display unit;
Before the shape measurement, the first light generated by controlling the light projecting unit and the first data generation unit to irradiate the measurement object with the first light and generate the first three-dimensional shape data. The posture adjustment image based on the three-dimensional shape data is displayed on the display unit, and the posture of the measurement target is adjusted so as to correspond to the posture of the measurement target on the posture adjustment image displayed on the display unit. In addition, when it is assumed that the measurement object is irradiated with the second light, the defective portion of the second solid shape data to be generated by the second data generation unit is estimated, and the estimated defect The display unit is controlled to display the posture adjustment image of the measurement object so that the portion can be identified, and the second light is irradiated to the measurement object during shape measurement and second solid shape data is obtained. Said floodlight to produce The light receiving unit and a control unit for controlling the second data generation unit, the shape measuring device. The light projecting unit is configured to irradiate the measurement object with the first light, and the second light projecting unit is configured to irradiate the measurement object with the second light. And a light projecting part of
The first light projecting unit is uniform in a direction parallel to an optical axis of the light receiving unit or a direction inclined by a first angle greater than 0 degree and smaller than 90 degrees with respect to the optical axis of the light receiving unit. Arranged to emit the first light having a light quantity distribution;
The second light projecting unit includes a measurement light source that emits light, and a pattern generation unit that generates the second light by converting the light emitted from the measurement light source into light having a pattern for shape measurement. The shape measurement according to claim 1, wherein the second light is emitted in a direction inclined by a second angle larger than the first angle with respect to the optical axis of the light receiving unit. apparatus. The light receiving unit is further configured to image a measurement object;
The shape measuring apparatus according to claim 1, wherein the control unit controls the display unit to display an image of a measurement object imaged by the light receiving unit together with the posture adjustment image before measuring the shape. . The shape measuring apparatus according to claim 1, further comprising a first posture adjusting unit operated by a user so as to adjust the posture of the measurement object. The control unit is configured to be controllable, and further includes a second posture adjustment unit that adjusts the posture of the measurement object,
The said control part controls a said 2nd attitude | position adjustment part so that the attitude | position of a measurement object may correspond to the attitude | position of the measurement object on the said image for attitude | position adjustment. The shape measuring apparatus described. The said image attitude | position adjustment part was comprised so that adjustment of the attitude | position of a measurement object was possible so that it might respond | correspond to the attitude | position of the measurement object on the said image for attitude | position adjustment displayed on the said display part. The shape measuring apparatus as described in any one of Claims. Before measuring the shape, the light projecting unit irradiates the measurement target placed on the stage with the first light for posture confirmation from above or obliquely above, and the relative distance between the light receiving unit and the stage is the light receiving unit. When the relative distance between the light receiving unit and the measurement target is changed by changing in the optical axis direction of the unit, the light receiving unit is focused on each of the plurality of parts of the measurement target. Generating first three-dimensional shape data indicating a three-dimensional shape of the measurement object based on a relative distance between the light receiving unit and the measurement object;
Displaying the image of the measurement object based on the generated first three-dimensional shape data on the display unit as a posture adjustment image before the shape measurement;
A step of accepting designation of a change in posture of the measurement object on the posture adjustment image displayed on the display unit before shape measurement;
The posture adjustment displayed on the display unit in response to the designation of the posture change when the posture change of the measurement object on the displayed posture adjustment image is designated before the shape measurement. Changing the posture of the measurement object on the image for use;
At the time of shape measurement, the measurement object placed on the stage by the light projecting unit is irradiated with the second light for shape measurement from obliquely above, and the light reflected by the measurement object is received by the light receiving unit, Generating second solid shape data indicating a three-dimensional shape of an object to be measured by a triangulation method based on a light reception signal indicating a light reception amount output from the light receiving unit,
In the step of displaying the posture adjustment image on the display unit, the posture of the measurement target is set so as to correspond to the posture of the measurement target on the posture adjustment image displayed on the display unit before the shape measurement. Assuming that the second light is adjusted and the measurement object is irradiated with the second light, the defective portion of the second solid shape data to be generated at the time of shape measurement is estimated, and the estimated defective portion is A shape measuring method including the step of displaying the posture adjustment image of the measurement object on the display unit in a distinguishable manner. A shape measurement program executable by a processing device,
Before measuring the shape, the light projecting unit irradiates the measurement target placed on the stage with the first light for posture confirmation from above or obliquely above, and the relative distance between the light receiving unit and the stage is the light receiving unit. When the relative distance between the light receiving unit and the measurement target is changed by changing in the optical axis direction of the unit, the light receiving unit is focused on each of the plurality of parts of the measurement target. Generating first three-dimensional shape data indicating a three-dimensional shape of the measurement object based on a relative distance between the light receiving unit and the measurement object;
Before the shape measurement, a process for displaying an image of the measurement object based on the generated first three-dimensional shape data on the display unit as an attitude adjustment image;
A process of accepting designation of a change in posture of the measurement object on the posture adjustment image displayed on the display unit before shape measurement;
The posture adjustment displayed on the display unit in response to the designation of the posture change when the posture change of the measurement object on the displayed posture adjustment image is designated before the shape measurement. Processing to change the posture of the measurement object on the image for use,
At the time of shape measurement, the measurement object placed on the stage by the light projecting unit is irradiated with the second light for shape measurement from obliquely above, and the light reflected by the measurement object is received by the light receiving unit, Based on the light reception signal indicating the amount of light received output from the light receiving unit, the processing device executes the process of generating second solid shape data indicating the three-dimensional shape of the measurement object by the triangulation method,
In the process of displaying the posture adjustment image on the display unit, the posture of the measurement object is adjusted so as to correspond to the posture of the measurement object on the posture adjustment image displayed on the display unit before measuring the shape. Assuming that the second light is adjusted and the measurement object is irradiated with the second light, the defective portion of the second solid shape data to be generated at the time of shape measurement is estimated, and the estimated defective portion is A shape measurement program including a process for displaying the image for posture adjustment of a measurement object on the display unit in an identifiable manner.

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