JP6161253B2 - Shape measuring device, shape measuring method, and shape measuring program - Google Patents

Description

  The present invention relates to a shape measuring device, a shape measuring method, and a shape measuring program.

  In a triangulation type shape measuring apparatus, light is irradiated on the surface of a measurement object, and the reflected light is received by a light receiving element having pixels arranged one-dimensionally or two-dimensionally. The height of the surface of the measurement object can be measured based on the peak position of the received light amount distribution obtained by the light receiving element. Thereby, the shape of the measurement object can be measured.

  Non-Patent Document 1 proposes a shape measurement by a triangulation system that combines encoded light and a phase shift method. Further, Non-Patent Document 2 proposes a shape measurement using a triangulation system in which encoded light and striped light are combined. In these methods, the accuracy of the shape measurement of the measurement object can be improved.

Toni F. Schenk, "Remote Sensing and Reconstruction for Three-Dimensional Objects and Scenes", Proceedings of SPIE, Volume 2572, pp. 1-9 (1995) Sabry F. El-Hakim and Armin Gruen, "Videometrics and Optical Methods for 3D Shape Measurement", Proceedings of SPIE, Volume 4309, pp. 219-231 (2001)

  In order to measure the shape of the measurement object with high accuracy, it is necessary to position the measurement object within the range that can be measured by the focus of the light receiving unit or the light receiving unit. However, it is not easy to appropriately position the measurement object within the focus of the light receiving unit or the range measurable by the light receiving unit.

  An object of the present invention is to provide a shape measuring device, a shape measuring method, and a shape measuring method capable of appropriately and easily positioning a measuring object within a range that can be measured by the focal point of the light receiving unit or the light receiving unit in measuring the shape of the measuring object. It is to provide a shape measurement program.

(1) a first shape measuring apparatus according to the invention, to illuminate a stage for placing the measured object, the illumination light having an upper person or al uniform light quantity distribution on the measurement object mounted on the stage a first light projecting portion of the second light projecting portion configured to illuminate a plurality of times a measurement light having a different pattern from the obliquely above the measuring object placed on the stage configured, It is arranged above the stage so as to receive light reflected by the measurement object placed on the stage, output a light reception signal indicating the amount of received light , and image the measurement object placed on the stage. And a relative distance changing unit that changes a relative distance between the light receiving unit and the measurement object by changing a relative distance between the light receiving unit and the stage in the optical axis direction of the light receiving unit. Measurement from the second light projecting part to the measurement object Mainly showing at least a part of the three-dimensional shape of the measurement object in the first range measurable in the optical axis direction of the light receiving unit by the triangulation method based on the light receiving signal output from the light receiving unit during light irradiation The main three-dimensional shape data generating unit that generates the three-dimensional shape data, the illumination light is irradiated from the first light projecting unit to the measurement object, and the relative distance changing unit determines the relative distance between the light receiving unit and the measurement object. The measurement object is imaged a plurality of times by the light receiving unit while being changed, so that a plurality of image data is generated based on a light reception signal output from the light receiving unit for each imaging, and based on the generated plurality of image data each of the plurality of portions of the measuring object by obtaining a relative distance between the light receiving portion in a state in which the focal point of the light receiving portion suits the measurement object Te, first in the direction of the optical axis of the light receiving portion based on the distance obtained From the range of 1 Big and the second sub-three-dimensional shape data showing the three-dimensional shape of the measuring object in the range of capable of generating a sub-three-dimensional shape data generating unit, an image-focus confirmation image of the measuring object based on the sub-three-dimensional shape data And controlling the first light projecting unit, the light receiving unit , the relative distance changing unit, and the sub-stereoscopic shape data generating unit so as to generate the sub- stereoscopic shape data before generating the main stereoscopic shape data , after generation of the sub-three-dimensional shape data, measuring a first range in the optical axis direction of the focus or the light receiving portion of the light receiving portion based on the relative distance and the sub-stereoscopic shape data generated in the measurement object and the light receiving portion Calculates the positional relationship with the object, controls the display unit to display the in-focus confirmation image so that the calculated positional relationship can be identified, and generates the main stereoscopic shape data after displaying the in-focus confirmation image The second floodlight, And a control unit that controls the light receiving unit and the main three-dimensional shape data generation unit.

In the shape measuring apparatus, before the main stereoscopic shape data is generated , when the measurement object is irradiated with illumination light and the relative distance between the light receiving unit and the measurement object is changed, a plurality of measurement objects are obtained. Sub- stereoscopic shape data indicating the three-dimensional shape of the measurement target is generated based on the relative distance between the light receiving unit and the measurement target in a state where the light reception unit is focused on each of the portions.

Based on the relative distance between the light receiving unit and the measurement object after the generation of the sub three-dimensional shape data and before the generation of the main three-dimensional shape data, and the focus of the light receiving unit or the light receiving unit based on the generated sub three-dimensional shape data. The positional relationship between the measurable first range and the measurement object in the optical axis direction is calculated. An in-focus confirmation image is displayed on the display unit so that the calculated positional relationship can be identified.

After that , based on the light reception signal output from the light receiving unit in a state where the measurement object is irradiated with the measurement light , main stereoscopic shape data indicating the three-dimensional shape of the measurement target is generated with high accuracy by the triangulation method. .

In this case, the user confirms the in-focus confirmation image displayed on the display unit before generating the main stereoscopic shape data, and the measurement object is within the first range that can be measured by the focus of the light receiving unit or the light receiving unit. Can be positioned appropriately and easily.

(2) The control unit obtains the main stereoscopic shape data in a state where a part of the plurality of portions of the measurement target is located within the first range in the optical axis direction of the light receiving unit after the in-focus confirmation image is displayed. the second light projecting portion as generated, after controlling the light receiving portion and main stereoscopic shape data generating unit, Rukoto alter the relative distance between the light receiving unit to control the relative distance changing unit and the measurement object The second light projecting unit, the light receiving unit, and the main three-dimensional shape data generation so as to generate the main three-dimensional shape data in a state where the other parts of the plurality of parts are located within the first range in the optical axis direction of the light receiving unit. The main stereoscopic shape data corresponding to a part of the plurality of parts and the other part may be synthesized.

In this case, the main three-dimensional shape data is generated in a state where some of the plurality of portions of the measurement object are located within a first measurable range in the optical axis direction of the light receiving unit. Further, the main three-dimensional shape data is generated in a state where the other portions of the plurality of portions are located within a first measurable range in the optical axis direction of the light receiving unit. Main three-dimensional shape data corresponding to some of the plurality of parts and other parts is synthesized. Thereby, even when the range of the plurality of portions of the measuring object in the optical axis direction of the light receiving unit is larger than the first measurable range in the optical axis direction of the light receiving unit, it is high over a wide range of the measuring object. The three-dimensional shape of the measurement object can be measured with high accuracy.

(3) The shape measuring device is operated by the user to specify at least a part of the plurality of portions of the measurement object on the in-focus confirmation image displayed on the display unit after the generation of the sub stereoscopic shape data. A control unit that controls the portion specified by the specification operation unit in the optical axis direction of the light receiving unit when at least a part of the plurality of parts of the measurement object is specified by the specification operation unit. It is determined whether the range is equal to or less than the first range in the optical axis direction of the light receiving unit, and the range of the specified portion in the optical axis direction of the light receiving unit is equal to or less than the first range in the optical axis direction of the light receiving unit. in some cases, specified portion controls the relative distance changing unit to lie within a first range in the optical axis direction of the light receiving portion, designated portion of the first in the direction of the optical axis of the light receiving portion main stereoscopic shape data in a state located in the range The second light projecting portion so as to generate, it may control the light receiving portion and main stereoscopic shape data generation unit.

In this case, after generating the sub-stereoscopic shape data, at least some of the plurality of portions of the measuring object on the focus confirmation image displayed on the display unit is designated. It is determined whether or not the range of the portion designated in the optical axis direction of the light receiving unit is equal to or less than the first measurable range in the optical axis direction of the light receiving unit.

If the range specified portion is less than a first range measurable in the optical axis direction of the light receiving portion, located in specified portion is within a first range measurable in the optical axis direction of the light receiving portion After the relative distance changing unit is controlled as described above, main stereoscopic shape data is generated. Accordingly, the user can quickly measure the three-dimensional shape of the measurement object with high accuracy for the designated portion.
(4) The shape measuring apparatus further includes an operation command receiving unit that receives an operation command of a relative distance changing unit for changing a relative distance between the light receiving unit and the stage, and the control unit The relative distance changing unit can be controlled so that the relative distance between the light receiving unit and the stage is changed by the distance corresponding to the received operation command in response to the operation command received by the operation command receiving unit. In addition, an in-focus confirmation image as a positional relationship in which a positional relationship image indicating the focal point of the light receiving unit at the time when the relative distance between the light receiving unit and the stage changes or the first range in the optical axis direction of the light receiving unit is calculated. The display unit may be controlled so as to be displayed at the corresponding position above.

(5) a second shape measuring apparatus according to the invention, to illuminate a stage for placing the measured object, the illumination light having an upper person or al uniform light quantity distribution on the measurement object mounted on the stage a first light projecting portion of the second light projecting portion configured to illuminate a plurality of times a measurement light having a different pattern from the obliquely above the measuring object placed on the stage configured, It is arranged above the stage so as to receive light reflected by the measurement object placed on the stage, output a light reception signal indicating the amount of received light , and image the measurement object placed on the stage. And a relative distance changing unit that changes a relative distance between the light receiving unit and the measurement object by changing a relative distance between the light receiving unit and the stage in the optical axis direction of the light receiving unit. Measurement from the second light projecting part to the measurement object Mainly showing at least a part of the three-dimensional shape of the measurement object in the first range measurable in the optical axis direction of the light receiving unit by the triangulation method based on the light receiving signal output from the light receiving unit during light irradiation The main three-dimensional shape data generating unit that generates the three-dimensional shape data, the illumination light is irradiated from the first light projecting unit to the measurement object, and the relative distance changing unit determines the relative distance between the light receiving unit and the measurement object. The measurement object is imaged a plurality of times by the light receiving unit while being changed, so that a plurality of image data is generated based on a light reception signal output from the light receiving unit for each imaging, and based on the generated plurality of image data in the relative distance and obtains the optical axis direction of the light receiving portion based on the obtained distance between the light receiving portion and the measuring object in a plurality of states respectively focus the light receiving portion to the portion of the measuring object Te First range A second range in the sub-three-dimensional shape data generating unit that can generate a sub-stereoscopic shape data showing the three-dimensional shape of the measuring object greater, before generating the main stereoscopic shape data to generate a sub-three-dimensional shape data the first light projecting portion as the light receiving unit, to control the relative distance changing unit and the sub-stereoscopic shape data generation unit, after the generation of the sub-three-dimensional shape data, the relative distance and the generation of a measuring object and a light receiving portion It has been based on the sub-three-dimensional shape data to calculate the positional relationship between the first range and the measurement object in the optical axis direction of the focus or the light receiving portion of the light receiving portion, of the measuring object based on the calculated out positional relationship The relative distance changing unit is controlled so that at least a part is located within the first range in the optical axis direction of the light receiving unit, and then at least a part of the measurement object is in the first range in the optical axis direction of the light receiving unit. The main three-dimensional shape data And a control unit for controlling the second light projecting unit, the light receiving unit, and the main three-dimensional shape data generating unit so as to generate the data.

In the shape measuring apparatus, before the main stereoscopic shape data is generated , when the measurement object is irradiated with illumination light and the relative distance between the light receiving unit and the measurement object is changed, a plurality of measurement objects are obtained. Sub- stereoscopic shape data indicating the three-dimensional shape of the measurement target is generated based on the relative distance between the light receiving unit and the measurement target in a state where the light reception unit is focused on each of the portions.

Based on the relative distance between the light receiving unit and the measurement object after the generation of the sub three-dimensional shape data and before the generation of the main three-dimensional shape data, and the focus of the light receiving unit or the light receiving unit based on the generated sub three-dimensional shape data. The positional relationship between the measurable first range and the measurement object in the optical axis direction is calculated.

Thereafter, the relative distance changing unit so that at least a portion is located within the first range measurable in the optical axis direction of the light receiving portion of the measuring object based on the calculated out positional relationship is controlled. Based on a light reception signal output from the light receiving unit in a state where at least a part of the measurement target is located within a first measurable range in the optical axis direction of the light receiving unit and the measurement light is irradiated on the measurement target. The main three-dimensional shape data indicating the three-dimensional shape of the measurement object is generated with high accuracy by the triangulation method.

In this case, the relative distance between the light receiving unit and the measurement target is automatically adjusted so that at least a part of the measurement target is located within the first measurable range in the optical axis direction of the light receiving unit. The Therefore, the user can appropriately and easily position the measurement object within the first range that can be measured by the focal point of the light receiving unit or the light receiving unit.

(6) control unit, the light receiving portion range of the plurality of portions of our Keru measuring object in the optical axis direction is equal to or less than a first range in the direction of the optical axis of the light receiving section, the light receiving portion If the range of a plurality of portions in the optical axis direction is less than a first range in the optical axis direction of the light receiving portion, relative to portions of the multiple is located within a first range in the optical axis direction of the light receiving portion The second light projecting unit, the light receiving unit, and the main three-dimensional shape so as to generate the main three-dimensional shape data in a state in which the distance changing unit is controlled and the plurality of portions are located within the first range in the optical axis direction of the light receiving unit. The data generation unit may be controlled.

In this case, it is determined whether or not the range of the plurality of portions of the measurement object in the optical axis direction of the light receiving unit is equal to or less than the first measurable range in the optical axis direction of the light receiving unit. If the range of the plurality of parts is less than a first range measurable in the optical axis direction of the light receiving portion, a plurality of portions of the measurement object within a first range measurable in the optical axis direction of the light receiving portion After the relative distance changing unit is controlled so as to be located at the position, main stereoscopic shape data is generated. Accordingly, the user can quickly measure the three-dimensional shape of the measurement object with high accuracy for a plurality of portions of the measurement object.

(7) The control unit, when the range of a plurality of portions in the optical axis direction of the light receiving portion is larger than the first range in the optical axis direction of the light receiving portion, a part of the portion of the multiple optical axis of the light receiving portion The relative distance changing unit is controlled so as to be located within the first range in the direction, and the main three-dimensional shape data is generated in a state where some of the plurality of portions are located within the first range in the optical axis direction of the light receiving unit The second light projecting unit, the light receiving unit, and the main three-dimensional shape data generating unit are controlled to change the relative distance so that the other parts of the plurality of parts are located within the first range in the optical axis direction of the light receiving unit. The second light projecting unit, the light receiving unit, and the main three-dimensional object so as to generate main three-dimensional shape data in a state where the other parts of the plurality of parts are located within the first range in the optical axis direction of the light receiving unit. the main three-dimensional shape by controlling the shape data generation unit corresponds to a part and other part of the plurality of parts The chromatography data may be synthesized.

In this case, if the range of the plurality of portions of the measuring object is larger than the first range measurable in the optical axis direction of the light receiving portion, a part of the portion of the multiple can be measured in the optical axis direction of the light receiving portion The relative distance changing unit is controlled so as to be within the first range , and main stereoscopic shape data is generated. In addition, the relative distance changing unit is controlled such that the other part of the plurality of parts is located within the first measurable range in the optical axis direction of the light receiving unit, and main stereoscopic shape data is generated. Main three-dimensional shape data corresponding to some of the plurality of parts and other parts is synthesized. Thereby, even when the range of the plurality of parts of the measurement object is larger than the first range that can be measured in the optical axis direction of the light receiving unit, the user can extend over a wide range of the plurality of parts of the measurement object. The three-dimensional shape of the measurement object can be measured quickly with high accuracy.

(8) the shape measuring apparatus includes a display unit displaying an image of the measuring object based on the sub-three-dimensional shape data as the focused check image, after the generation of the sub-three-dimensional shape data, the focal point for confirmation displayed on the display unit A designation operation unit that is operated by a user to designate at least some of the plurality of parts of the measurement object on the image, and the control unit includes at least one of the plurality of parts of the measurement object by the designation operation unit. When a part is designated, it is determined whether the range of the part designated by the designated operation unit in the optical axis direction of the light receiving unit is equal to or less than the first range in the optical axis direction of the light receiving unit , and the light receiving unit range specified portion in the optical axis direction when it is less than the first range in the optical axis direction of the light receiving portion, specified portion is located within a first range in the optical axis direction of the light receiving portion of the Control the relative distance changing part The second light projecting portion as specified portion generates a main stereoscopic shape data in a state located in the first range in the optical axis direction of the light receiving portion, the light receiving unit and controls the main stereoscopic shape data generating unit May be.

In this case, after generating the sub-stereoscopic shape data, an image of the measuring object based on the sub-three-dimensional shape data generated is displayed on the display unit as the focus confirmation image. At least some of the plurality of portions of the measuring object on the focus confirmation image displayed in Table radical 113 is designated. It is determined whether or not the range of the portion designated in the optical axis direction of the light receiving unit is equal to or less than the first measurable range in the optical axis direction of the light receiving unit.

If the range specified portion is less than a first range measurable in the optical axis direction of the light receiving portion, located in specified portion is within a first range measurable in the optical axis direction of the light receiving portion After the relative distance changing unit is controlled as described above, main stereoscopic shape data is generated. Accordingly, the user can quickly measure the three-dimensional shape of the measurement object with high accuracy for the designated portion.

(9) When the range of the specified part in the optical axis direction of the light receiving unit is larger than the first range in the optical axis direction of the light receiving unit, the control unit determines that a part of the specified part is light of the light receiving unit. The main three-dimensional shape data in a state in which the relative distance changing unit is controlled so as to be positioned within the first range in the axial direction and a part of the designated portion is positioned within the first range in the optical axis direction of the light receiving unit. The second light projecting unit, the light receiving unit, and the main three-dimensional shape data generating unit are controlled so that the other part of the designated portion is positioned within the first range in the optical axis direction of the light receiving unit. The second light projecting unit and the light receiving unit are configured to control the relative distance changing unit and generate the main three-dimensional shape data in a state where the other part of the designated part is located within the first range in the optical axis direction of the light receiving unit. It controls parts and main stereoscopic shape data generating unit, a part of the specified portion and Main stereoscopic shape data corresponding to the part may be synthesized.

In this case, when the range of the designated portion is larger than the first measurable range in the optical axis direction of the light receiving unit, a part of the designated portion can be measured in the optical axis direction of the light receiving unit. The relative distance changing unit is controlled so as to be located within the range, and main stereoscopic shape data is generated. In addition, the relative distance changing unit is controlled so that the other part of the designated portion is located within the first measurable range in the optical axis direction of the light receiving unit, and main stereoscopic shape data is generated. Main three-dimensional shape data corresponding to a part of the designated part and the other part is synthesized. Thereby, even when the range of the designated portion is larger than the first measurable range in the optical axis direction of the light receiving unit, the user can quickly measure the measurement target with high accuracy over a wide range of the designated portion. The three-dimensional shape of an object can be measured.
(10) The shape measuring apparatus may further include a range setting unit that sets a second range in the optical axis direction of the light receiving unit.
(11) The measurement object placed on the stage has a height in the optical axis direction of the light receiving unit, and the range setting unit measures the measurement object in the optical axis direction of the light receiving unit when generating the sub three-dimensional shape data. The second range may be set to include a range from the upper limit to the lower limit.
(12) When the sub-stereoscopic shape data is generated, the control unit changes the relative distance between the light receiving unit and the measurement target so that the light receiving unit is focused on all parts of the measurement target. While controlling the relative distance changing unit, the sub-stereoscopic shape data generating unit may be controlled such that sub-stereoscopic shape data indicating the entire three-dimensional shape of the measurement target is generated.
(13) The plurality of image data generated by the sub-stereoscopic shape data generation unit is texture image data indicating the surface state of the measurement object, and the control unit outputs the texture image data after generating the main stereoscopic shape data. By combining with the generated main three-dimensional shape data, composite data indicating an image in which the surface state of the measurement object is combined with the three-dimensional shape of the measurement object may be generated.
(14) The control unit generates the main stereoscopic shape data generated based on the main stereoscopic shape data generated by the main stereoscopic shape data generation unit and the sub stereoscopic shape data generated by the sub stereoscopic shape data generation unit. Of these, the part corresponding to the area where the shape of the measurement object cannot be measured accurately is determined as a defective part, and the data determined as the defective part is replaced or supplemented using the data of the corresponding part of the sub-stereoscopic shape data. May be.
(15) The control unit generates the main stereoscopic shape data generated based on the main stereoscopic shape data generated by the main stereoscopic shape data generation unit and the sub stereoscopic shape data generated by the sub stereoscopic shape data generation unit. the out portion unreliable determined as reliability reducing moiety may be substituted or supplemented with a is determined reliability decreases partial data data of the corresponding portion of the sub-three-dimensional shape data.

(16) In the shape measuring method according to the third aspect of the invention, the measuring object placed on the stage is irradiated with the measuring light having different patterns from obliquely above a plurality of times, and the light reflected by the measuring object is received. Mainly showing at least a part of the three-dimensional shape of the measurement object in the first range measurable in the optical axis direction of the light receiving unit by the triangulation method based on the light receiving signal output from the light receiving unit and output from the light receiving unit generating a three-dimensional shape data, prior to generating the main stereoscopic shape data is irradiated with illumination light having an upper person or al uniform light quantity distribution on the measurement object mounted on the stages, a light receiving portion and the stage A plurality of image data is generated based on the light reception signal output from the light receiving unit for each imaging by performing imaging of the measurement object by the light receiving unit a plurality of times while changing the relative distance of the light receiving unit in the optical axis direction. And generate Is based on a plurality of image data obtains the relative distance between the measurement object and the light receiving portion in a state in focus were each light receiving portion into a plurality of portions of the measuring object was, based on the distance obtained generating a sub-three-dimensional shape data showing the three-dimensional shape of the measuring object in the second range greater than the first range in the optical axis direction of the light receiving portion, of the product after and main stereoscopic shape data of the sub-three-dimensional shape data Prior to generation , the position of the measurement object and the first range in the optical axis direction of the focal point of the light receiving unit or the light receiving unit based on the relative distance between the light receiving unit and the measurement target and the generated sub- stereoscopic shape data calculating the relationship is the image of the measuring object based on identifiably sub-stereoscopic shape data the calculated positional relationship in which and displaying on the display unit as the focus confirmation image.

In the shape measurement method, a plurality of measurement objects are obtained when illumination light is irradiated onto the measurement object and the relative distance between the light receiving unit and the measurement object is changed before the main stereoscopic shape data is generated. Sub- stereoscopic shape data indicating the three-dimensional shape of the measurement target is generated based on the relative distance between the light receiving unit and the measurement target in a state where the light reception unit is focused on each of the portions.

Based on the relative distance between the light receiving unit and the measurement object after the generation of the sub three-dimensional shape data and before the generation of the main three-dimensional shape data, and the focus of the light receiving unit or the light receiving unit based on the generated sub three-dimensional shape data. The positional relationship between the measurable first range and the measurement object in the optical axis direction is calculated. An in-focus confirmation image is displayed on the display unit so that the calculated positional relationship can be identified.

Thereafter , the measurement light is irradiated onto the measurement object, and the light reflected by the measurement object is received by the light receiving unit. Based on the light reception signal output from the light receiving unit, main three-dimensional shape data indicating the three-dimensional shape of the measurement object is generated with high accuracy by the triangulation method.

In this case, the user confirms the in-focus confirmation image displayed on the display unit before generating the main three-dimensional shape data, whereby the measurement object can be measured by the focal point of the light receiving unit or the light receiving unit . It can be positioned appropriately and easily within the range .

(17) In the shape measuring method according to the fourth aspect of the invention, the measuring object placed on the stage is irradiated with the measuring light having different patterns from the oblique upper side a plurality of times, and the light reflected by the measuring object is received. Mainly showing at least a part of the three-dimensional shape of the measurement object in the first range measurable in the optical axis direction of the light receiving unit by the triangulation method based on the light receiving signal output from the light receiving unit and output from the light receiving unit generating a three-dimensional shape data, prior to generating the main stereoscopic shape data is irradiated with illumination light having an upper person or al uniform light quantity distribution on the measurement object mounted on the stages, a light receiving portion and the stage A plurality of image data is generated based on the light reception signal output from the light receiving unit for each imaging by performing imaging of the measurement object by the light receiving unit a plurality of times while changing the relative distance of the light receiving unit in the optical axis direction. And generate Is based on a plurality of image data obtains the relative distance between the measurement object and the light receiving portion in a state in focus were each light receiving portion into a plurality of portions of the measuring object was, based on the distance obtained generating a sub-three-dimensional shape data showing the three-dimensional shape of the measuring object in the second range greater than the first range in the optical axis direction of the light receiving portion, of the product after and main stereoscopic shape data of the sub-three-dimensional shape data Prior to generation , the position of the measurement object and the first range in the optical axis direction of the focal point of the light receiving unit or the light receiving unit based on the relative distance between the light receiving unit and the measurement target and the generated sub- stereoscopic shape data and a step of calculating a relationship, generating a main stereoscopic shape data, at least a portion of the measurement object on the basis of the positional relationship calculated by the step of calculating the positional relationship in the optical axis direction of the light receiving portion Receiving unit so as to be located within one of the ranges as to adjust the relative distance between the measurement object, then at least a portion of the measurement object is positioned within the first range in the optical axis direction of the light receiving portion And irradiating the measurement object with the measurement light a plurality of times .

In the shape measurement method, a plurality of measurement objects are obtained when illumination light is irradiated onto the measurement object and the relative distance between the light receiving unit and the measurement object is changed before the main stereoscopic shape data is generated. Sub- stereoscopic shape data indicating the three-dimensional shape of the measurement target is generated based on the relative distance between the light receiving unit and the measurement target in a state where the light reception unit is focused on each of the portions.

Based on the relative distance between the light receiving unit and the measurement object after the generation of the sub three-dimensional shape data and before the generation of the main three-dimensional shape data, and the focus of the light receiving unit or the light receiving unit based on the generated sub three-dimensional shape data. The positional relationship between the measurable first range and the measurement object in the optical axis direction is calculated.

Then, relative to the at least partially a measuring object light receiving unit so as to be located within a first range measurable in the optical axis direction of the light receiving portion of the measuring object based on the calculated out positional relationship The distance is adjusted. In a state where at least a part of the measurement object is located within the first measurable range in the optical axis direction of the light receiving unit, the measurement light is irradiated onto the measurement object, and the light reflected by the measurement object is received by the light receiving unit. Is received. Based on the light reception signal output from the light receiving unit, main three-dimensional shape data indicating the three-dimensional shape of the measurement object is generated with high accuracy by the triangulation method.

In this case, the relative distance between the light receiving unit and the measurement target is automatically adjusted so that at least a part of the measurement target is located within the first measurable range in the optical axis direction of the light receiving unit. The Therefore, the user can appropriately and easily position the measurement object within the first range that can be measured by the focal point of the light receiving unit or the light receiving unit.

(18) A shape measurement program according to a fifth invention is a shape measurement program that can be executed by a processing device, and a plurality of measurement beams having different patterns from a diagonally upper side are applied to a measurement object placed on a stage a plurality of times. Irradiated light reflected by the measurement object is received by the light receiving unit, and based on the light reception signal output from the light receiving unit, the first range measurable in the optical axis direction of the light receiving unit by the triangulation method Processing for generating main three-dimensional shape data indicating at least a part of the three-dimensional shape of the measurement object, and illumination having a uniform light amount distribution from above on the measurement object placed on the stage before generating the main three-dimensional shape data Output from the light receiving unit for each imaging by irradiating light and performing imaging of the measurement object by the light receiving unit multiple times while changing the relative distance between the light receiving unit and the stage in the optical axis direction of the light receiving unit A plurality of image data based on the received light signal, and the light receiving unit and the measurement object in a state where the light receiving unit is focused on the plurality of parts of the measurement object based on the generated plurality of image data, respectively. Processing for generating sub-stereoscopic shape data indicating the three-dimensional shape of the measurement object in a second range larger than the first range in the optical axis direction of the light receiving unit based on the acquired distance And after generating the sub three-dimensional shape data and before generating the main three-dimensional shape data, based on the relative distance between the light receiving unit and the measurement object and the generated sub three-dimensional shape data, the focus of the light receiving unit or the light receiving unit A positional relationship between the first range in the optical axis direction and the measurement target is calculated, and an image of the measurement target based on the sub-stereoscopic shape data is displayed on the display unit as an in-focus confirmation image so that the calculated positional relationship can be identified. Process to display It is intended to be executed by the management apparatus.

According to the shape measurement program, the illumination object is irradiated with the illumination light and the relative distance between the light receiving unit and the measurement object is changed before the main stereoscopic shape data is generated . Sub- stereoscopic shape data indicating the three-dimensional shape of the measurement target is generated based on the relative distance between the light receiving unit and the measurement target in a state where the light reception unit is focused on each of the plurality of portions.

Based on the relative distance between the light receiving unit and the measurement object after the generation of the sub three-dimensional shape data and before the generation of the main three-dimensional shape data, and the focus of the light receiving unit or the light receiving unit based on the generated sub three-dimensional shape data. The positional relationship between the measurable first range and the measurement object in the optical axis direction is calculated. An in-focus confirmation image is displayed on the display unit so that the calculated positional relationship can be identified.

Thereafter , the measurement light is irradiated onto the measurement object, and the light reflected by the measurement object is received by the light receiving unit. Based on the light reception signal output from the light receiving unit, main three-dimensional shape data indicating the three-dimensional shape of the measurement object is generated with high accuracy by the triangulation method.

In this case, the user confirms the in-focus confirmation image displayed on the display unit before generating the main three-dimensional shape data, whereby the measurement object can be measured by the focal point of the light receiving unit or the light receiving unit . It can be positioned appropriately and easily within the range .

(19) A shape measurement program according to a sixth invention is a shape measurement program that can be executed by a processing device, and a plurality of measurement lights having different patterns from a diagonally upper side on a measurement object placed on a stage a plurality of times. Irradiated light reflected by the measurement object is received by the light receiving unit, and based on the light reception signal output from the light receiving unit, the first range measurable in the optical axis direction of the light receiving unit by the triangulation method Processing for generating main three-dimensional shape data indicating at least a part of the three-dimensional shape of the measurement object, and illumination having a uniform light amount distribution from above on the measurement object placed on the stage before generating the main three-dimensional shape data Output from the light receiving unit for each imaging by irradiating light and performing imaging of the measurement object by the light receiving unit multiple times while changing the relative distance between the light receiving unit and the stage in the optical axis direction of the light receiving unit A plurality of image data based on the received light signal, and the light receiving unit and the measurement object in a state where the light receiving unit is focused on the plurality of parts of the measurement object based on the generated plurality of image data, respectively. Processing for generating sub-stereoscopic shape data indicating the three-dimensional shape of the measurement object in a second range larger than the first range in the optical axis direction of the light receiving unit based on the acquired distance And after generating the sub three-dimensional shape data and before generating the main three-dimensional shape data, based on the relative distance between the light receiving unit and the measurement object and the generated sub three-dimensional shape data, the focus of the light receiving unit or the light receiving unit a form measuring program order to execute the processing for calculating the positional relationship between the first range in the optical axis direction and the measurement object to the processing unit, the processing of generating the main stereoscopic shape data, the positional relationship Processing to calculate The relative distance between the light receiving unit and the measurement target is adjusted so that at least a part of the measurement target is positioned within the first range in the optical axis direction of the light receiving unit based on the calculated positional relationship, Thereafter, the measurement object is irradiated with the measurement light a plurality of times in a state where at least a part of the measurement object is located within the first range in the optical axis direction of the light receiving unit.

According to the shape measurement program, the illumination object is irradiated with the illumination light and the relative distance between the light receiving unit and the measurement object is changed before the main stereoscopic shape data is generated . Sub- stereoscopic shape data indicating the three-dimensional shape of the measurement target is generated based on the relative distance between the light receiving unit and the measurement target in a state where the light reception unit is focused on each of the plurality of portions.

Based on the relative distance between the light receiving unit and the measurement object after the generation of the sub three-dimensional shape data and before the generation of the main three-dimensional shape data, and the focus of the light receiving unit or the light receiving unit based on the generated sub three-dimensional shape data. The positional relationship between the measurable first range and the measurement object in the optical axis direction is calculated.

Thereafter, relative to at least part of the measuring object light receiving unit so as to be located within a first range measurable in the optical axis direction of the light receiving portion of the measuring object based on the calculated out positional relationship The distance is adjusted. In a state where at least a part of the measurement object is located within the first measurable range in the optical axis direction of the light receiving unit, the measurement light is irradiated onto the measurement object, and the light reflected by the measurement object is received by the light receiving unit. Is received. Based on the light reception signal output from the light receiving unit, main three-dimensional shape data indicating the three-dimensional shape of the measurement object is generated with high accuracy by the triangulation method.

In this case, the relative distance between the light receiving unit and the measurement target is automatically adjusted so that at least a part of the measurement target is located within the first measurable range in the optical axis direction of the light receiving unit. The Therefore, the user can appropriately and easily position the measurement object within the first range that can be measured by the focal point of the light receiving unit or the light receiving unit.

  ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to position a measuring object appropriately and easily in the range which can be measured with the focus of a light-receiving part, or a light-receiving part in the measurement of the shape of a measuring object.

It is a block diagram which shows the structure of the shape measuring apparatus which concerns on one embodiment of this invention. It is a schematic diagram which shows the structure of the measurement part of the shape measuring apparatus of FIG. It is a schematic diagram of the measuring object in the state irradiated with light. It is a schematic diagram of the measuring object in the state irradiated with light. It is a figure which shows an example of GUI which displays an image on 2 screens. It is a figure for demonstrating the principle of a triangulation system. It is a figure for demonstrating the 1st pattern of measurement light. It is a figure for demonstrating the 2nd pattern of measurement light. It is a figure for demonstrating the 3rd pattern of measurement light. It is a figure which shows the relationship between the timing (number) by which the image in the specific part of the measuring object was image | photographed, and the intensity | strength of the received light. It is a figure for demonstrating the 4th pattern of measurement light. It is a figure which shows an example of GUI of the display part at the time of operation mode selection. It is a figure which shows an example of GUI of the display part at the time of operation mode selection. It is a figure which shows an example of GUI of the display part after shape measurement processing execution. It is a typical side view of a measuring object for explaining an all-focus texture image. It is a figure which shows the relationship between the focus position of a light-receiving part, and the definition of a texture image. It is an omnifocal texture image of the measuring object based on generated omnifocal texture image data. It is a synthesized image of the measurement object based on the synthesized data. It is a figure which shows an example of the GUI of the display part at the time of selection of the kind of texture image. It is a figure for demonstrating correction | amendment of the main solid shape data by substereoscopic shape data. It is a figure for demonstrating correction | amendment of the main solid shape data by substereoscopic shape data. It is a figure for demonstrating correction | amendment of the main solid shape data by substereoscopic shape data. It is a flowchart which shows the procedure of preparation for shape measurement. It is a flowchart which shows the detail of the 1st adjustment in the preparation procedure of shape measurement. It is a flowchart which shows the detail of the 1st adjustment in the preparation procedure of shape measurement. It is a schematic diagram which shows the light-receiving part of FIG. 2 seen from the X direction. It is a flowchart which shows the detail of the 2nd adjustment in the procedure of a preparation for shape measurement. It is a flowchart which shows the detail of the 2nd adjustment in the procedure of a preparation for shape measurement. It is a figure which shows an example of the GUI of the display part at the time of execution of 2nd adjustment. It is a flowchart which shows the procedure of a shape measurement process. It is a flowchart which shows the procedure of a shape measurement process. It is a flowchart which shows the procedure of a shape measurement process. It is a figure for demonstrating an example which the user adjusts the position of a measurement object manually based on the auxiliary | assistant function of a focus adjustment. It is a figure for demonstrating the other example in which the user adjusts the position of a measurement object manually based on the auxiliary | assistant function of a focus adjustment. It is a figure for demonstrating an example in which the position of a measuring object is adjusted automatically based on the auxiliary | assistant function of focus adjustment. It is a figure for demonstrating the other example by which the position of a measuring object is adjusted automatically based on the auxiliary | assistant function of focus adjustment. (A) is a figure which shows the example of a display of a substereoscopic shape three-dimensional image, (b) is a figure which shows the example of a display of a substereoscopic shape two-dimensional image. (A) is a figure which shows the example of a display of the substereoscopic shape three-dimensional image on which the positional relationship image was superimposed, (b) shows the example of a display of the substereoscopic shape two-dimensional image displayed with a positional relationship image. FIG. FIG. 38A is a display example of a sub-stereoscopic shape three-dimensional image and a positional relationship image displayed after the stage has moved downward by a predetermined distance from the display state of FIG. 38A, and FIG. This is a display example of a sub-stereoscopic shape two-dimensional image and a positional relationship image displayed after the stage has moved downward by a predetermined distance from the display state. (A) is a display example of a sub-stereoscopic shape three-dimensional image and a positional relationship image displayed after the stage has moved upward by a predetermined distance from the display state of FIG. 38 (a), and (b) is a display example of FIG. This is a display example of a sub-stereoscopic shape two-dimensional image and a positional relationship image that are displayed after the stage has moved upward by a predetermined distance from the display state. (A) is a figure which shows the other display example of the substereoscopic shape three-dimensional image on which the positional relationship image was superimposed, (b) is another display example of the substereoscopic shape two-dimensional image displayed with a positional relationship image. FIG. It is a figure which shows the example of a display of the omnifocal texture image displayed with a positional relationship image. It is a figure which shows an example of the image displayed on a display part, when the measurement object part in a measurement object is designated before shape measurement. It is a figure which shows the other example of the image displayed on a display part, when the measurement object part in a measurement object is designated before shape measurement. It is one display example of the image which shows the suitable part of a measuring object, and the focus of a light-receiving part. It is a flowchart which shows an example of the operation procedure of the shape measuring apparatus in the case of using the auxiliary function of focus adjustment. It is a flowchart which shows an example of the sub-stereoscopic shape data generation process performed based on a user's manual operation. It is a flowchart which shows an example of the sub-stereoscopic shape data generation process performed automatically. It is a flowchart which shows an example of the shape measurement process using the auxiliary function of focus adjustment. It is a flowchart which shows an example of the shape measurement process using the auxiliary function of focus adjustment. It is a flowchart which shows an example of the shape measurement process using the auxiliary function of focus adjustment.

[1] Configuration of Shape Measuring Device FIG. 1 is a block diagram showing a configuration of a shape measuring device according to an embodiment of the present invention. FIG. 2 is a schematic diagram illustrating a configuration of a measurement unit of the shape measuring apparatus 500 of FIG. Hereinafter, the shape measuring apparatus 500 according to the present embodiment will be described with reference to FIGS. 1 and 2. As shown in FIG. 1, the shape measuring apparatus 500 includes a measuring unit 100, a PC (personal computer) 200, a control unit 300, and a display unit 400.

  As illustrated in FIG. 1, the measurement unit 100 is a microscope, for example, and includes a light projecting unit 110, a light receiving unit 120, an illumination light output unit 130, a stage 140, and a control board 150. The light projecting unit 110 includes a measurement light source 111, a pattern generation unit 112, and a plurality of lenses 113, 114, and 115. The light receiving unit 120 includes a camera 121 and a plurality of lenses 122 and 123. The optical axis of the light receiving unit 120 is formed by the plurality of lenses 122 and 123. On the stage 140, the measuring object S is placed.

  The light projecting unit 110 is disposed obliquely above the stage 140. The measuring unit 100 may include a plurality of light projecting units 110. In the example of FIG. 2, the measurement unit 100 includes two light projecting units 110. Hereinafter, when distinguishing the two light projecting units 110, one light projecting unit 110 is referred to as a light projecting unit 110A, and the other light projecting unit 110 is referred to as a light projecting unit 110B. The light projecting units 110 </ b> A and 110 </ b> B are arranged symmetrically across the optical axis of the light receiving unit 120.

  The measurement light source 111 of each of the light projecting units 110A and 110B is, for example, a halogen lamp that emits white light. The measurement light source 111 may be another light source such as a white LED (light emitting diode) that emits white light. Light emitted from the measurement light source 111 (hereinafter referred to as measurement light) is appropriately condensed by the lens 113 and then enters the pattern generation unit 112.

  The pattern generation unit 112 is a DMD (digital micromirror device), for example. The pattern generation unit 112 may be an LCD (Liquid Crystal Display), LCOS (Liquid Crystal on Silicon), or a mask. The measurement light incident on the pattern generation unit 112 is converted into a preset pattern and a preset intensity (brightness) and emitted. The measurement light emitted from the pattern generation unit 112 is converted into light having a diameter larger than the dimension of the measurement object S by the plurality of lenses 114 and 115 and then irradiated to the measurement object S on the stage 140. .

  The light receiving unit 120 is disposed above the stage 140. The measurement light reflected above the stage 140 by the measurement object S is collected and imaged by the plurality of lenses 122 and 123 of the light receiving unit 120 and then received by the camera 121.

  The camera 121 is, for example, a CCD (Charge Coupled Device) camera including an image sensor 121a and a lens. The image sensor 121a is, for example, a monochrome CCD (charge coupled device). The image sensor 121a may be another image sensor such as a CMOS (complementary metal oxide semiconductor) image sensor. From each pixel of the image sensor 121a, an analog electrical signal (hereinafter referred to as a light reception signal) corresponding to the amount of received light is output to the control board 150.

  Unlike a color CCD, a monochrome CCD does not need to be provided with pixels that receive red wavelength light, pixels that receive green wavelength light, and pixels that receive blue wavelength light. Therefore, the measurement resolution of the monochrome CCD is higher than the resolution of the color CCD. Further, unlike a color CCD, a monochrome CCD does not require a color filter for each pixel. Therefore, the sensitivity of the monochrome CCD is higher than that of the color CCD. For these reasons, the camera 121 in this example is provided with a monochrome CCD.

  In this example, the illumination light output unit 130 emits red wavelength light, green wavelength light, and blue wavelength light to the measurement object S in a time-sharing manner. According to this configuration, a color image of the measuring object S can be taken by the light receiving unit 120 using a monochrome CCD.

  On the other hand, when the color CCD has sufficient resolution and sensitivity, the image sensor 121a may be a color CCD. In this case, the illumination light output unit 130 does not need to irradiate the measurement object S with red wavelength light, green wavelength light, and blue wavelength light in a time-sharing manner, and irradiates the measurement object S with white light. Therefore, the configuration of the illumination light source 320 can be simplified.

  On the control board 150, an A / D converter (analog / digital converter) and a FIFO (First In First Out) memory (not shown) are mounted. The light reception signal output from the camera 121 is sampled at a constant sampling period by the A / D converter of the control board 150 and converted into a digital signal based on control by the control unit 300. Digital signals output from the A / D converter are sequentially stored in the FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the PC 200 as pixel data.

  As shown in FIG. 1, the PC 200 includes a CPU (Central Processing Unit) 210, a ROM (Read Only Memory) 220, a work memory 230, a storage device 240, and an operation unit 250. The operation unit 250 includes a keyboard and a pointing device. A mouse or a joystick is used as the pointing device.

  The ROM 220 stores a system program. The working memory 230 includes a RAM (Random Access Memory), and is used for processing various data. The storage device 240 is composed of a hard disk or the like. The storage device 240 stores an image processing program and a shape measurement program. The storage device 240 is used for storing various data such as pixel data supplied from the control board 150.

  The CPU 210 generates image data based on the pixel data given from the control board 150. The CPU 210 performs various processes on the generated image data using the work memory 230 and causes the display unit 400 to display an image based on the image data. Further, the CPU 210 gives a driving pulse to a stage driving unit 146 to be described later. The display unit 400 is configured by, for example, an LCD panel or an organic EL (electroluminescence) panel.

  In FIG. 2, two directions orthogonal to each other within a plane (hereinafter referred to as a placement surface) on the stage 140 on which the measurement object S is placed are defined as an X direction and a Y direction, and arrows X and Y respectively. Show. A direction orthogonal to the mounting surface of the stage 140 is defined as a Z direction and is indicated by an arrow Z. A direction rotating around an axis parallel to the Z direction is defined as a θ direction, and is indicated by an arrow θ.

  The stage 140 includes an XY stage 141, a Z stage 142, a θ stage 143, and a tilt stage 144. The XY stage 141 has an X direction moving mechanism and a Y direction moving mechanism. The Z stage 142 has a Z direction moving mechanism. The θ stage 143 has a θ direction rotation mechanism. The tilt stage 144 has a mechanism that can rotate around an axis parallel to the mounting surface (hereinafter referred to as a tilt rotation mechanism). The XY stage 141, the Z stage 142, the θ stage 143, and the tilt stage 144 constitute a stage 140. The stage 140 further includes a fixing member (clamp) (not shown) that fixes the measuring object S to the placement surface.

  Here, a plane located at the focal point of the light receiving unit 120 and perpendicular to the optical axis of the light receiving unit 120 is referred to as a focal plane of the light receiving unit 120. As shown in FIG. 2, the relative positional relationship among the light projecting units 110A and 110B, the light receiving unit 120, and the stage 140 is such that the optical axis of the light projecting unit 110A, the optical axis of the light projecting unit 110B, and the optical axis of the light receiving unit 120. Are set so as to cross each other at the focal plane of the light receiving unit 120. In the present embodiment, the optical axis of the light receiving unit 120 extends in a direction parallel to the Z direction.

  A plane that is located at the focal point of the light projecting unit 110 (the point where the pattern of the measurement light is imaged) and is perpendicular to the optical axis of the light projecting unit 110 is referred to as a focal plane of the light projecting unit 110. Each of the light projecting units 110 </ b> A and 110 </ b> B is configured such that the focal plane of the light projecting unit 110 </ b> A and the focal plane of the light projecting unit 110 </ b> B intersect at a position including the focal point of the light receiving unit 120.

  The center of the rotation axis of the θ stage 143 in the θ direction coincides with the optical axis of the light receiving unit 120. Therefore, when the θ stage 143 is rotated in the θ direction, the measuring object S can be rotated within the field of view around the rotation axis without removing the measuring object S from the field of view. Further, the XY stage 141, the θ stage 143, and the tilt stage 144 are supported by the Z stage 142.

  That is, even if the θ stage 143 is rotated in the θ direction or the tilt stage 144 is rotated in the tilt direction, the center axis of the light receiving unit 120 and the movement axis of the Z stage 142 do not shift. It is configured. Here, the tilt direction is a rotation direction about an axis parallel to the placement surface. With this configuration, even when the position or orientation of the measurement object S is changed, the stage 140 is moved in the Z direction to synthesize a plurality of images respectively captured at a plurality of different focal positions of the light receiving unit 120. It becomes possible.

  Stepping motors are used for the X direction moving mechanism, the Y direction moving mechanism, the Z direction moving mechanism, the θ direction rotating mechanism, and the tilt rotating mechanism of the stage 140, respectively. The X direction moving mechanism, the Y direction moving mechanism, the Z direction moving mechanism, the θ direction rotating mechanism, and the tilt rotating mechanism of the stage 140 are driven by the stage operation unit 145 or the stage driving unit 146 in FIG.

  The user manually operates the stage operation unit 145 to move the mounting surface of the stage 140 in the X direction, the Y direction, or the Z direction relative to the light receiving unit 120, or the θ direction or tilt. Can be rotated in the direction. The stage driving unit 146 moves the stage 140 relative to the light receiving unit 120 in the X direction, the Y direction, or the Z direction by supplying current to the stepping motor of the stage 140 based on the driving pulse given from the PC 200. Or can be rotated in the θ direction or the tilt direction.

  An encoder is attached to a stepping motor used for each of the X direction moving mechanism, Y direction moving mechanism, Z direction moving mechanism, θ direction rotating mechanism, and tilt rotating mechanism of the stage 140. The output signal of each encoder is given to the CPU 210, for example. Based on the signal given from each encoder of the stage 140, the CPU 210 has a position in the X direction (X position), a position in the Y direction (Y position), a position in the Z direction (Z position), The amount of change in the rotation angle in the θ direction (θ rotation angle) or the rotation angle in the tilt direction can be calculated.

  In the present embodiment, stage 140 is an electric stage that can be driven by a stepping motor and can be manually operated, but is not limited thereto. The stage 140 may be an electric stage that can be driven only by a stepping motor, or may be a manual stage that can be operated only manually.

  The control unit 300 includes a control board 310 and an illumination light source 320. A CPU (not shown) is mounted on the control board 310. The CPU of the control board 310 controls the light projecting unit 110, the light receiving unit 120, and the control board 150 based on a command from the CPU 210 of the PC 200.

  The illumination light source 320 includes, for example, three LEDs that emit red light, green light, and blue light. By controlling the luminance of the light emitted from each LED, light of an arbitrary color can be generated from the illumination light source 320. Light generated from the illumination light source 320 (hereinafter referred to as illumination light) is output from the illumination light output unit 130 of the measurement unit 100 through a light guide member (light guide). Note that the illumination light source 320 may be provided in the measurement unit 100 without providing the illumination light source 320 in the control unit 300. In this case, the illumination light output unit 130 is not provided in the measurement unit 100.

  The illumination light output unit 130 of FIG. 2 has an annular shape and is disposed above the stage 140 so as to surround the light receiving unit 120. Thereby, illumination light is irradiated to the measuring object S from the illumination light output unit 130 so that no shadow is generated. 3 and 4 are schematic views of the measuring object S in a state irradiated with light. In the example of FIGS. 3 and 4, the measuring object S has a hole Sh at the approximate center of the upper surface. 3A, 3C, and 4A, the shadow Ss is represented by hatching.

  FIG. 3A is a plan view of the measuring object S in a state irradiated with measurement light from one of the light projecting units 110A in FIG. 2, and FIG. 3B is a cross-sectional view taken along line AA in FIG. It is line sectional drawing. As shown in FIGS. 3A and 3B, when the measurement object S is irradiated with the measurement light from one light projecting unit 110A, the measurement light may reach the bottom of the hole Sh depending on the depth of the hole Sh. The shadow Ss is generated without reaching. Therefore, a part of the measuring object S cannot be observed.

  FIG. 3C is a plan view of the measuring object S in a state irradiated with the measurement light from the other light projecting unit 110B in FIG. 2, and FIG. 3D is a cross-sectional view taken along line BB in FIG. It is line sectional drawing. As shown in FIGS. 3C and 3D, when the measurement object S is irradiated with the measurement light from the other light projecting unit 110B, the measurement light may reach the bottom of the hole Sh depending on the depth of the hole Sh. The shadow Ss is generated without reaching. Therefore, a part of the measuring object S cannot be observed.

  FIG. 4A is a plan view of the measurement object S in a state where measurement light from both the light projecting units 110A and 110B is irradiated, and FIG. 4B is a CC line in FIG. 4A. It is sectional drawing. As shown in FIGS. 4A and 4B, when the measurement object S is irradiated with the measurement light from both the light projecting units 110A and 110B, the measurement light is applied from one of the light projecting units 110A and 110B. Compared with the case where S is irradiated, the measurement light that does not reach the bottom of the hole Sh is reduced, so that the generated shadow Ss is reduced. Therefore, the portion of the measuring object S that can be observed increases.

  FIG. 4C is a plan view of the measuring object S in a state irradiated with illumination light from the illumination light output unit 130 in FIG. 2, and FIG. 4D is a DD line in FIG. It is sectional drawing. As shown in FIGS. 4C and 4D, since the illumination light is irradiated from substantially right above the measurement object S, the illumination light reaches the bottom of the hole Sh regardless of the depth of the hole Sh. To do. Therefore, most of the measuring object S can be observed.

  Displayed on the display unit 400 so that the image of the measuring object S irradiated with the measuring light from one light projecting unit 110A and the image of the measuring object S irradiated with the measuring light from the other light projecting unit 110B are aligned ( (2 screen display). FIG. 5 is a diagram illustrating an example of a GUI (Graphical User Interface) that displays an image on two screens.

  As shown in FIG. 5, the display unit 400 is provided with two image display areas 491 and 492 arranged side by side. When displaying two images on the screen, the measurement light is alternately irradiated from the light projecting units 110 </ b> A and 110 </ b> B so that the measurement light S is switched. In the image display area 491, an image of the measurement object S when the measurement light is irradiated from one light projecting unit 110A is displayed. In the image display area 492, an image of the measurement object S when the measurement light is irradiated from the other light projecting unit 110B is displayed. Thereby, the user can distinguish and recognize the image of the measuring object S when each of the light projecting units 110A and 110B is irradiated with the measurement light.

  In this example, the frequency of switching the measurement light from the light projecting units 110A and 110B is, for example, several Hz. Note that the frequency of switching the measurement light from the light projecting units 110A and 110B may be set to a value (for example, 100 Hz) that cannot be recognized by the user. In this case, the user observes that the measuring object 100 is simultaneously irradiated with the measuring light from both the light projecting units 110 </ b> A and 110 </ b> B in the measuring unit 100.

  Two light amount setting bars 493 and 494 are displayed on the display unit 400. The light amount setting bar 493 includes a slider 493s that can move in the horizontal direction. The light amount setting bar 494 includes a slider 494s that can move in the horizontal direction. Hereinafter, the measurement light emitted from one light projecting unit 110A is referred to as one measurement light, and the measurement light emitted from the other light projection unit 110B is referred to as the other measurement light. The position of the slider 493s on the light amount setting bar 493 corresponds to the light amount of the light receiving unit 120 when receiving one measurement light (hereinafter referred to as the light amount of one measurement light). The position of the slider 494s on the light amount setting bar 494 corresponds to the light amount of the light receiving unit 120 when receiving the other measurement light (hereinafter referred to as the light amount of the other measurement light).

  The user can change the light amount of one measurement light by operating the operation unit 250 of the PC 200 of FIG. 1 and moving the slider 493s of the light amount setting bar 493 in the horizontal direction. The light quantity of one measurement light is changed by changing the brightness of one measurement light or the exposure time of the light receiving unit 120 when receiving one measurement light. Similarly, the user can change the light amount of the other measurement light by operating the operation unit 250 and moving the slider 494s of the light amount setting bar 494 in the horizontal direction. The light quantity of the other measurement light is changed by changing the brightness of the other measurement light or the exposure time of the light receiving unit 120 when receiving the other measurement light.

  As described above, in the image display areas 491 and 492, images of the measurement object S when the measurement light is irradiated by each of the light projecting units 110A and 110B are displayed so as to be aligned. Therefore, the user moves the positions of the sliders 493 s and 494 s of the light amount setting bars 493 and 494 while viewing the images of the measurement object S displayed in the image display areas 491 and 492, respectively. The amount of measurement light can be adjusted appropriately.

  In addition, when there is a correlation between the light quantity of one and the other measurement light and the light quantity of the light receiving unit 120 when receiving the illumination light emitted from the illumination light output unit 130 (hereinafter referred to as illumination light quantity) There is. In this case, the light quantity of the one and the other measurement light may be automatically adjusted based on the light quantity of the illumination light. Or based on the light quantity of illumination light, the adjustment guide for making the light quantity of one and the other measurement light suitable may be displayed on the display part 400. FIG. In this case, the user can appropriately adjust the light quantity of one and the other measurement light by moving the positions of the sliders 493s and 494s of the light quantity setting bars 493 and 494 based on the adjustment guide.

  If the light irradiation direction is different, the light reflection direction is also different. Therefore, even in the same portion of the measurement object S, the brightness of the image irradiated with one measurement light is different from the brightness of the image irradiated with the other measurement light. That is, the amount of light suitable for shape measurement varies depending on the irradiation direction.

  In the present embodiment, it is possible to individually adjust the brightness of each image when the measurement light is irradiated from the light projecting units 110A and 110B. Therefore, it is possible to set an appropriate amount of light according to the light irradiation direction. Further, the image whose light amount is being adjusted is displayed in the image display areas 491 and 492 while being updated. Thereby, the user can adjust the light amount while confirming the image.

  In this case, the PC 200 can display, in the image display areas 491 and 492, in an image display area 491 and 492, a portion in which an overexposure occurs because the image is too bright, or a portion where an overexposure occurs because the image is too dark. Thereby, the user can easily confirm whether or not the light amount is appropriately adjusted.

[2] Shape Measurement of Measurement Object (1) Shape Measurement by Triangular Distance Measurement In the measurement unit 100, the shape of the measurement object S is measured by the triangular distance measurement method. FIG. 6 is a diagram for explaining the principle of the triangulation system. As shown in FIG. 6, an angle α between the optical axis of the measurement light emitted from the light projecting unit 110 and the optical axis of the measurement light incident on the light receiving unit 120 (the optical axis of the light receiving unit 120) is set in advance. The The angle α is larger than 0 degree and smaller than 90 degrees.

  When the measurement object S is not placed on the stage 140, the measurement light emitted from the light projecting unit 110 is reflected by the point O on the placement surface of the stage 140 and enters the light receiving unit 120. On the other hand, when the measuring object S is placed on the stage 140, the measuring light emitted from the light projecting unit 110 is reflected by the point A on the surface of the measuring object S and enters the light receiving unit 120.

  When the distance in the X direction between the point O and the point A is d, the height h of the point A of the measuring object S with respect to the mounting surface of the stage 140 is given by h = d ÷ tan (α). The CPU 210 of the PC 200 in FIG. 1 measures the distance d between the point O and the point A in the X direction based on the pixel data of the measurement object S given by the control board 150. Further, the CPU 210 calculates the height h of the point A on the surface of the measuring object S based on the measured distance d. By calculating the heights of all points on the surface of the measuring object S, the three-dimensional shape of the measuring object S is measured.

  In order to irradiate measurement light to all points on the surface of the measurement object S, measurement light having various patterns is emitted from the light projecting unit 110 in FIG. The pattern of the measurement light is controlled by the pattern generation unit 112 in FIG. Hereinafter, the pattern of the measurement light will be described.

(2) First Pattern of Measurement Light FIG. 7 is a diagram for explaining the first pattern of measurement light. FIG. 7A shows a state in which the measuring object S on the stage 140 is irradiated with the measuring light from the light projecting unit 110. FIG. 7B shows a plan view of the measuring object S irradiated with the measuring light. As shown in FIG. 7A, as the first pattern, measurement light having a linear cross section parallel to the Y direction (hereinafter referred to as linear measurement light) is emitted from the light projecting unit 110. In this case, as shown in FIG. 7B, the portion of the line-shaped measurement light irradiated on the stage 140 and the portion of the line-shaped measurement light irradiated on the surface of the measurement object S are the same as those of the measurement object S. They are shifted from each other in the X direction by a distance d corresponding to the height h of the surface. Therefore, the height h of the measuring object S can be calculated by measuring the distance d.

  When a plurality of portions along the Y direction on the surface of the measuring object S have different heights, the height h of the plurality of portions along the Y direction is measured by measuring the distance d for each portion. Can be calculated.

  Further, the CPU 210 in FIG. 1 measures the distance d for a plurality of portions along the Y direction at one position in the X direction, and then scans the line-shaped measurement light parallel to the Y direction in the X direction. The distance d is measured for a plurality of portions along the Y direction at other positions in the direction. Thereby, the height h of the several part of the measuring object S along the Y direction in the several position of a X direction is calculated. By scanning the line-shaped measurement light in the X direction in a range wider than the dimension in the X direction of the measurement object S, the height h of all points on the surface of the measurement object S can be calculated. Thereby, the three-dimensional shape of the measuring object S can be measured.

(3) Second Pattern of Measuring Light FIG. 8 is a diagram for explaining the second pattern of measuring light. As shown in FIG. 8, as the second pattern, measurement light having a linear cross section parallel to the Y direction and having a pattern in which the intensity changes sinusoidally in the X direction (hereinafter referred to as sinusoidal measurement light). ) Is emitted from the light projecting unit 110 a plurality of times (in this example, four times).

  FIG. 8A shows sinusoidal measurement light emitted for the first time. The intensity of the sinusoidal measurement light emitted for the first time has an initial phase φ at an arbitrary portion P0 on the surface of the measurement object S. When the sinusoidal measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the measuring object S. The intensity of the light reflected by the portion P0 on the surface of the measuring object S is I1.

  FIG. 8B shows sinusoidal measurement light emitted for the second time. The intensity of the sinusoidal measurement light emitted for the second time has a phase (φ + π / 2) at the portion P0 on the surface of the measurement object S. When the sinusoidal measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the measuring object S. The intensity of the light reflected by the portion P0 on the surface of the measuring object S is I2.

  FIG. 8C shows sinusoidal measurement light emitted for the third time. The intensity of the sinusoidal measurement light emitted for the third time has a phase (φ + π) at a portion P0 on the surface of the measurement object S. When the sinusoidal measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the measuring object S. The intensity of the light reflected by the portion P0 on the surface of the measuring object S is I3.

  FIG. 8D shows sinusoidal measurement light emitted for the fourth time. The intensity of the fourth sinusoidal measurement light has a phase (φ + 3π / 2) at the portion P0 on the surface of the measurement object S. When the sinusoidal measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the measuring object S. The intensity of the light reflected by the portion P0 on the surface of the measuring object S is assumed to be I4.

The initial phase φ is given by φ = tan ⁻¹ [(I1−I3) / (I2−I4)]. A height h of an arbitrary portion of the measuring object S is calculated from the initial phase φ. According to this method, the initial phase φ of all portions of the measuring object S can be calculated at high speed and easily by measuring the intensity of light four times. Note that the initial phase φ can be calculated by emitting measurement light having different phases at least three times and measuring the intensity of the received light. By calculating the height h of all the parts on the surface of the measuring object S, the three-dimensional shape of the measuring object S can be measured.

(4) Third Pattern of Measurement Light FIG. 9 is a diagram for explaining the third pattern of measurement light. As shown in FIG. 9, as the third pattern, a plurality of measurement lights having a linear cross section parallel to the Y direction and aligned in the X direction (hereinafter referred to as striped measurement light) are emitted from the light projecting unit 110. It is emitted once (in this example, 16 times).

  That is, in the striped measurement light, a linear bright portion parallel to the Y direction and a linear dark portion parallel to the Y direction are periodically arranged in the X direction. Here, when the pattern generation unit 112 is a DMD, the dimension of the micromirror is set to one unit. The width of each bright portion of the striped measurement light in the X direction is, for example, 3 units, and the width of each dark portion of the striped measurement light in the X direction is, for example, 13 units. In this case, the period of the striped measurement light in the X direction is 16 units. The unit of the bright part and the dark part differs depending on the configuration of the pattern generation unit 112 in FIG. For example, when the pattern generation unit 112 is a liquid crystal, one unit is the size of one pixel.

  When the first striped measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the first captured image of the measuring object S. FIG. 9A is a first photographed image of the measuring object S corresponding to the first striped measurement light.

  The second striped measurement light has a pattern in which the bright portion and the dark portion are moved by one unit in the X direction from the first striped measurement light. When the second striped measurement light is emitted, the light reflected by the surface of the measurement object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the second captured image of the measuring object S.

  The third striped measurement light has a pattern in which the bright part and the dark part are moved by one unit in the X direction from the second striped measurement light. By emitting the third striped measurement light, the light reflected by the surface of the measuring object S is received by the light receiving unit 120. The intensity of the received light is measured based on the pixel data of the third captured image of the measuring object S.

  By repeating the same operation, the intensity of the light corresponding to the 4th to 16th striped measurement light is measured based on the pixel data of the 4th to 16th captured images of the measuring object S, respectively. The striped measurement light whose period in the X direction is 16 units is emitted 16 times, so that the entire surface of the measurement object S is irradiated with the striped measurement light. FIG. 9B is a seventh captured image of the measuring object S corresponding to the seventh striped measurement light. FIG. 9C is a thirteenth captured image of the measuring object S corresponding to the thirteenth striped measurement light.

  FIG. 10 is a diagram illustrating the relationship between the timing (number) at which an image of a specific portion of the measurement object S is taken and the intensity of received light. The horizontal axis in FIG. 10 indicates the order of images, and the vertical axis indicates the intensity of received light. As described above, the first to sixteenth captured images are generated for each part of the measuring object S. In addition, the intensity of light corresponding to each pixel of the generated first to sixteenth captured images is measured.

  As shown in FIG. 10, a scatter diagram is obtained by illustrating the light intensity of each pixel of the captured image corresponding to the number of the captured image. For example, by fitting a Gaussian curve, a spline curve, or a parabola to the obtained scatter diagram, the number (number) of the photographed image when the light intensity becomes maximum can be estimated with an accuracy of less than one. In the example of FIG. 10, it is presumed that the light intensity is maximized in the virtual 9.38th photographed image between the ninth and tenth by the curve shown by the fitted dotted line. .

  Further, the maximum value of the light intensity can be estimated from the fitted curve. The height h of each part of the measurement object S can be calculated based on the number of the photographed image that maximizes the light intensity estimated in each part of the measurement object S. According to this method, the three-dimensional shape of the measuring object S is measured based on the intensity of light having a sufficiently large S / N (signal / noise) ratio. Thereby, the precision of the shape measurement of the measuring object S can be improved.

  In the measurement of the shape of the measurement object S using measurement light having a periodic pattern shape such as sinusoidal measurement light or striped measurement light, the relative height of each portion of the surface of the measurement object S is measured. (Relative height) is measured. This is because each of a plurality of straight lines (stripes) parallel to the Y direction forming the pattern cannot be identified, and there is an uncertainty corresponding to an integral multiple of one period (2π) of the plurality of straight lines. This is because the absolute phase cannot be obtained. Therefore, a known unwrapping process is performed on the measured height data based on the assumption that the height of one part of the measuring object S and the height of the part adjacent to the part continuously change. It may be done.

(5) Fourth Pattern of Measurement Light FIG. 11 is a diagram for explaining the fourth pattern of measurement light. As shown in FIG. 11, as the fourth pattern, measurement light having a linear cross section parallel to the Y direction and having a bright portion and a dark portion aligned in the X direction (hereinafter referred to as code-like measurement light) is used. The light is emitted from the light projecting unit 110 a plurality of times (in this example, four times). The ratio of the bright part and the dark part of the code-like measurement light is 50%.

  In this example, the surface of the measuring object S is divided into a plurality of regions (16 in the example of FIG. 11) in the X direction. Hereinafter, the areas of the measurement object S in the X direction divided into a plurality of parts are referred to as first to sixteenth areas, respectively.

  FIG. 11A shows the code-like measurement light emitted for the first time. The code-shaped measurement light emitted for the first time has a bright portion that is irradiated onto the first to eighth regions of the measurement object S. Moreover, the code-shaped measurement light emitted for the first time has a dark part irradiated on the ninth to sixteenth regions of the measuring object S. Thereby, in the code-like measurement light emitted for the first time, the bright portion and the dark portion are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright part and the dark part of the code-like measurement light emitted for the first time is 50%.

  FIG. 11B shows the code-like measurement light emitted for the second time. The code-like measurement light emitted for the second time has a bright portion that is irradiated onto the fifth to twelfth regions of the measurement object S. Moreover, the code-like measurement light emitted for the second time has dark portions that are irradiated to the first to fourth and thirteenth to sixteenth regions of the measuring object S. Thereby, in the code-like measurement light emitted for the second time, the bright part and the dark part are parallel to the Y direction and aligned in the X direction. Moreover, the ratio of the bright part and the dark part of the code-like measurement light emitted for the second time is 50%.

  FIG. 11C shows the code-like measurement light emitted for the third time. The code-like measurement light emitted for the third time has bright portions that are irradiated on the first, second, seventh to tenth, fifteenth and sixteenth regions of the measurement object S. Moreover, the code-like measurement light emitted for the third time has dark portions that are irradiated on the third to sixth and the eleventh to fourteenth regions of the measurement object S. Thereby, in the code-like measurement light emitted for the third time, the bright part and the dark part are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright part and the dark part of the code-like measurement light emitted for the third time is 50%.

  FIG. 11D shows the code-like measurement light emitted for the fourth time. The coded measurement light emitted for the fourth time has a bright portion that is irradiated on the first, fourth, fifth, eighth, ninth, twelfth, thirteenth, and sixteenth regions of the measurement object S. . In addition, the coded measurement light emitted for the fourth time is a dark portion irradiated on the second, third, sixth, seventh, tenth, eleventh, fourteenth and fifteenth regions of the measuring object S. Have Thereby, in the code-like measurement light emitted for the fourth time, the bright part and the dark part are parallel to the Y direction and aligned in the X direction. Further, the ratio of the bright part and the dark part of the code-like measurement light emitted for the fourth time is 50%.

  Logic “1” is assigned to the bright part of the code-like measurement light, and logic “0” is assigned to the dark part of the code-like measurement light. In addition, the logic arrangement of the first to fourth code-like measurement lights irradiated on each region of the measurement object S is referred to as a code. In this case, the first region of the measurement object S is irradiated with the code-shaped measurement light with the code “1011”. As a result, the first region of the measuring object S is encoded to the code “1011”.

  The second area of the measurement object S is irradiated with code-shaped measurement light with a code “1010”. As a result, the second region of the measuring object S is encoded to the code “1010”. The third region of the measuring object S is irradiated with code-shaped measurement light with a code “1000”. As a result, the third region of the measuring object S is encoded with the code “1000”. Similarly, the 16th region of the measuring object S is irradiated with the code-shaped measurement light with the code “0011”. Thus, the sixteenth region of the measuring object S is encoded with the code “0011”.

  In this way, between the adjacent regions of the measurement object S, the code-shaped measurement light is irradiated to the measurement object S a plurality of times so that any digit of the code differs by “1”. That is, the code-shaped measurement light is applied to the measurement object S a plurality of times so that the bright portion and the dark portion change into a gray code shape.

  Light reflected by each region on the surface of the measuring object S is received by the light receiving unit 120. By measuring the sign of the received light, a sign that has changed due to the presence of the measurement object S is obtained for each region of the measurement object S. A distance corresponding to the distance d in FIG. 6 can be calculated by obtaining a difference between the obtained code and the code when the measurement object S does not exist for each region. Here, the absolute value of the distance d is calculated from the feature of the measurement method using the code-like measurement light that the code appears only once in the X-axis direction in the image. Thereby, the absolute height (absolute value of the height) of the region of the measuring object S is calculated. By calculating the height of all regions on the surface of the measuring object S, the three-dimensional shape of the measuring object S can be measured.

In the above description, the surface of the measuring object S is divided into 16 regions in the X direction, and the code-shaped measurement light is emitted from the light projecting unit 110 four times. However, the present invention is not limited to this. The surface of the measurement object S may be divided into 2 ^N regions (N is a natural number) in the X direction, and the code-shaped measurement light may be emitted N times from the light projecting unit 110. In the above description, N is set to 4 for easy understanding. In the shape measurement process in the present embodiment, N is set to 8, for example. Therefore, the surface of the measuring object S is divided into 256 regions in the X direction.

  In the shape measurement of the measuring object S using the code-like measurement light, the distance that can be identified by separating the code-like measurement light, that is, the distance corresponding to one pixel is the minimum resolution. Therefore, when the number of pixels in the field of view in the X direction of the light receiving unit 120 is 1024 pixels, a measurement object S having a height of, for example, 10 mm can be measured with a resolution of 10 mm ÷ 1024≈10 μm. Measurement by combining shape measurement using code-shaped measurement light with low resolution but capable of calculating absolute value and shape measurement using sinusoidal measurement light or striped measurement light that cannot calculate absolute value but has high resolution The absolute value of the height of the object S can be calculated with higher resolution.

  In particular, in the shape measurement of the measuring object S using the striped measurement light in FIG. 9, the resolution can be 1/100 pixels. The resolution of 1/100 pixels is that the surface of the measuring object S is divided into about 100,000 areas in the X direction when the number of pixels of the field of view in the X direction of the light receiving unit 120 is 1024 pixels (that is, N≈ 17). Therefore, the absolute value of the height of the measuring object S can be calculated with higher resolution by combining the shape measurement using the cord-shaped measurement light and the shape measurement using the striped measurement light.

  A method of scanning the above-described line-shaped measurement light on the measurement object S is generally called a light cutting method. On the other hand, the method of irradiating the measuring object S with sinusoidal measurement light, striped measurement light or code-like measurement light is classified as a pattern projection method. Among the pattern projection methods, the method of irradiating the measuring object S with sinusoidal measuring light or the striped measuring light is classified as a phase shift method, and the method of irradiating the measuring object S with code-like measuring light is a spatial code. Classified into law.

  In the phase shift method, when a sinusoidal measurement light or a striped measurement light that is a periodic projection pattern is emitted, the calculation is based on the amount of light received reflected from the reference height position when the measurement object S does not exist. The height of the measuring object S is obtained from the phase difference between the phase thus calculated and the phase calculated based on the received light amount reflected from the surface of the measuring object S when the measuring object S exists. In the phase shift method, individual periodic fringes cannot be distinguished, and there is an uncertainty corresponding to an integer multiple of one fringe period (2π), so that there is a drawback that the absolute phase cannot be obtained. However, since the number of images to be acquired is smaller than that of the light cutting method, the measurement time is relatively short and the measurement resolution is high.

On the other hand, Oite the space code method is, for each area of the measuring object S, the code is obtained which is changed by the measuring object S is present. The absolute height of the measurement object S can be obtained by obtaining the difference between the obtained code and the code when the measurement object S does not exist for each region. The spatial code method also has an advantage that measurement can be performed with a relatively small number of images, and an absolute height can be obtained. However, the measurement resolution is limited compared to the phase shift method.

  Each of these projection methods has its advantages and disadvantages, but both use the principle of triangulation. Therefore, it is impossible to measure a shadow portion that is not irradiated with the measurement light by any measurement method.

(6) Measurable range of light receiving unit In the shape measurement of the above-described triangulation method, the light receiving unit 120 is moved from the measuring object S as the position of the surface of the measuring object S moves away from the focus of the light receiving unit 120 in the optical axis direction. The degree of blurring of light incident on the imaging element 121a increases. Similarly, as the position of the surface of the measuring object S is closer to the focal point of the light receiving unit 120, the degree of blur of light incident on the image sensor 121a of the light receiving unit 120 from the measuring object S increases. The degree of blurring of light incident on the image sensor 121a of the light receiving unit 120 varies depending on, for example, the magnification of a lens of an optical system that constitutes at least a part of the light projecting unit 110 and the light receiving unit 120.

  When the degree of blur of light incident on the light receiving unit 120 from the measurement object S increases, the measurement accuracy of the height of the surface of the measurement object S decreases. Therefore, in the present embodiment, the range in the optical axis direction of the light receiving unit 120 considered to be able to obtain a certain measurement accuracy when the measuring object S is located is the range of the light projecting unit 110 and the light receiving unit 120. It is predetermined for each shape measuring apparatus 500 according to the configuration. In the following description, the range in the Z direction of the light receiving unit 120 determined in advance in this way is referred to as a measurable range in the Z direction of the light receiving unit 120. The measurable range is incident on the image sensor 121a of the light receiving unit 120, for example, when the measurement target S is moved in the optical axis direction of the light receiving unit 120 while the surface of the measurement target S is irradiated with the striped measurement light. The degree of blurring of the light is determined in a range that does not exceed a predetermined threshold.

[3] Microscope Mode and Shape Measurement Mode The shape measurement apparatus 500 according to the present embodiment can operate in the microscope mode and in the shape measurement mode. 12 and 13 are diagrams illustrating an example of the GUI of the display unit 400 when the operation mode is selected. As shown in FIGS. 12 and 13, an image display area 550 and setting change areas 570 and 580 are displayed on the display unit 400. In the image display area 550, an image of the measuring object S captured by the light receiving unit 120 is displayed.

  In the setting change area 570, a brightness selection field 571, a brightness setting bar 572, a display switching field 573, a magnification switching field 574, a magnification selection field 575, and a focus adjustment field 576 are displayed. The brightness setting bar 572 includes a slider 572s that can move in the horizontal direction.

  The user can switch the exposure time method of the light receiving unit 120 between auto (automatic) and manual by selecting the exposure time method of the light receiving unit 120 in the brightness selection field 571. When manual is selected as the exposure time method of the light receiving unit 120, the user operates the operation unit 250 of the PC 200 to move the slider 572 s of the brightness setting bar 572 in the horizontal direction, whereby the light receiving unit 120. The exposure time can be adjusted. The user can switch the image display type between color and monochrome by selecting the image display type from the display switching field 573.

  As shown in FIG. 26 described later, the light receiving unit 120 includes a camera 121A and a camera 121B having different lens magnifications as the camera 121. In this example, for example, one camera 121A is called a low-magnification camera, and the other camera 121B is called a high-magnification camera. The user can switch the camera 121 of the light receiving unit 120 between the high magnification camera and the low magnification camera by selecting the magnification of the camera in the magnification switching field 574. In the shape measuring apparatus 500 according to the present embodiment, the measurable range of the light receiving unit 120 corresponding to the high magnification camera and the measurable range of the light receiving unit 120 corresponding to the low magnification camera are individually determined with different sizes. It has been.

  The light receiving unit 120 has a digital zoom function. In this example, by combining the two cameras 121 and the digital zoom function, the magnification of the camera 121 can be substantially changed to two or more types. The user can set the magnification of the camera 121 of the light receiving unit 120 by selecting the magnification in the magnification selection field 575. When the digital zoom function is used, the measurable range determined for each type of camera (high magnification camera and low magnification camera) may be corrected based on the amount of change in magnification.

  The user can change the focus position of the light receiving unit 120 in the Z direction by a distance corresponding to the input numerical value by inputting a numerical value in the focus adjustment field 576. The focus position of the light receiving unit 120 is changed by changing the position of the Z stage 142 of the stage 140, that is, the relative distance in the Z direction between the light receiving unit 120 and the measurement object S.

  In the setting change area 580, a microscope mode selection tab 580A and a shape measurement mode selection tab 580B are displayed. When the microscope mode selection tab 580A is selected, the shape measuring apparatus 500 operates in the microscope mode. In the microscope mode, the measurement object S is irradiated with illumination light from the illumination light output unit 130. In this state, the enlarged observation of the measuring object S can be performed.

  As shown in FIG. 12, when the microscope mode selection tab 580A is selected, a tool selection field 581 and a shooting button 582 are displayed in the setting change area 580. The user can capture (capture) an image of the measurement object S displayed in the image display area 550 by operating the capture button 582.

  The tool selection field 581 displays a plurality of icons for selecting a plurality of execution tools. The user operates one of the plurality of icons in the tool selection field 581 to perform planar measurement of the image of the measurement object S being observed, insertion of a scale in the image, depth synthesis, and comment on the image. Execution tools such as insertion or image improvement can be executed.

  For example, when execution of plane measurement is selected, a measurement tool display field 581a and an auxiliary tool display field 581b are displayed below the tool selection field 581. The measurement tool display field 581a is used for measuring the distance between two points, measuring the distance between two parallel lines, measuring the diameter or radius of a circle, and measuring the angle formed by two straight lines. Multiple icons are displayed. In the auxiliary tool display field 581b, a plurality of icons for executing auxiliary drawing such as dots, lines or circles on the image in the image display area 550 are displayed.

  When the shape measurement mode selection tab 580B is selected, the shape measurement apparatus 500 operates in the shape measurement mode. As shown in FIG. 13, when the shape measurement mode selection tab 580B is selected, a measurement button 583 is displayed in the setting change area 580. The user can execute the shape measurement process by operating the measurement button 583 after the preparation for the shape measurement is completed.

[4] Texture Image (1) Composite Image In the measurement unit 100, the measurement object 100 is irradiated with illumination light from the illumination light output unit 130 or measurement light having a uniform pattern from the light projection unit 110. Data indicating an image of the surface state is generated. The surface state includes, for example, a pattern or a color. Hereinafter, the image of the surface state of the measuring object S is referred to as a texture image, and the data indicating the texture image is referred to as texture image data.

  The generated texture image data and the 3D shape data generated in the shape measurement process are combined to generate combined data. The display unit 400 displays a combined image of the three-dimensional shape and surface state of the measurement object S based on the combined data. Hereinafter, the solid shape data generated in the shape measurement process is referred to as main solid shape data. An image displayed based on the main stereoscopic shape data is referred to as a main stereoscopic shape image.

  FIG. 14 is a diagram illustrating an example of the GUI of the display unit 400 after execution of the shape measurement process. As shown in FIG. 14, an image of the measuring object S is displayed in the image display area 550 based on the composite data generated in the shape measurement process. The user can confirm the measurement result of the measurement object S or perform simple measurement on the composite image.

  Here, even if the entire surface of the measuring object S is located in the measurable range in the optical axis direction (in the present embodiment, the Z direction) of the light receiving unit 120, the entire surface of the measuring object S is used. Is not within the range of the depth of field, all or part of the texture image is not clearly displayed. Therefore, when the dimension in the Z direction of the measuring object S is larger than the range of the depth of field of the light receiving unit 120, while changing the relative distance between the light receiving unit 120 and the measuring object S, Texture image data of the measurement object S located within the range of the depth of field of the light receiving unit 120 is acquired. By synthesizing the acquired plurality of texture image data, texture image data (hereinafter referred to as omnifocal texture image data) that can be clearly displayed over the entire surface of the measurement object S is generated.

  FIG. 15 is a schematic side view of the measuring object S for explaining the omnifocal texture image. The measuring object S in FIG. 15 has a configuration in which an electrolytic capacitor Sc is mounted on a circuit board Sb. Further, letters are attached to the upper surface of the circuit board Sb and the electrolytic capacitor Sc. As shown in FIG. 15, the dimension of the measuring object S in the Z direction (in this example, the dimension from the lower surface of the circuit board Sb to the upper surface of the electrolytic capacitor Sc) is larger than the measurable range of the light receiving unit 120 in the Z direction. Is smaller than the range of depth of field.

  FIG. 16 is a diagram illustrating the relationship between the focal position of the light receiving unit 120 and the sharpness of the texture image. FIGS. 16A, 16C, and 16E are side views of the measuring object S in FIG. In FIG. 16A, the light receiving unit 120 is focused on the position a on the upper surface of the electrolytic capacitor Sc of the measurement object S. In FIG. 16B, the light receiving unit 120 is focused on a position b intermediate between the upper surface of the electrolytic capacitor Sc of the measurement object S and the upper surface of the circuit board Sb. In FIG. 16C, the light receiving unit 120 is focused on the position c of the upper surface of the circuit board Sb of the measurement object S.

  FIG. 16B shows a texture image of the measuring object S based on the texture image data acquired in the state of FIG. In this case, since the position “a” on the upper surface of the electrolytic capacitor Sc is located within the range of the depth of field of the light receiving unit 120, the letters attached to the upper surface of the electrolytic capacitor Sc are clear as shown in FIG. Is displayed. However, the position c on the upper surface of the circuit board Sb is not located within the range of the depth of field of the light receiving unit 120. Therefore, the characters attached to the upper surface of the circuit board Sb are displayed unclearly. Further, the position c on the upper surface of the circuit board Sb is not located within the measurable range of the light receiving unit 120 in the Z direction. Therefore, when the height of the stage 140 is adjusted to the position of FIG. 16E, the height of the position a on the upper surface of the electrolytic capacitor Sc cannot be calculated, or the reliability of the calculated height is lowered. .

  FIG. 16D shows a texture image of the measuring object S based on the texture image data acquired in the state of FIG. In this case, an intermediate position b between the upper surface of the electrolytic capacitor Sc and the upper surface of the circuit board Sb is located within the range of the depth of field of the light receiving unit 120. However, since the upper surface of the electrolytic capacitor Sc and the upper surface of the circuit board Sb are located outside the range of the depth of field of the light receiving unit 120 and within the measurable range in the Z direction, as shown in FIG. The characters attached to the top surface of Sc and the characters attached to the top surface of the circuit board Sb are displayed slightly unclear.

  FIG. 16F shows a texture image of the measuring object S based on the texture image data acquired in the state of FIG. In this case, since the position c of the upper surface of the circuit board Sb is located within the range of the depth of field of the light receiving unit 120, the characters attached to the upper surface of the circuit board Sb are clear as shown in FIG. Is displayed. However, the position a on the upper surface of the electrolytic capacitor Sc is not located within the range of the depth of field of the light receiving unit 120. Therefore, characters attached to the upper surface of the electrolytic capacitor Sc are displayed unclearly. Further, the position a of the upper surface of the electrolytic capacitor Sc is not located within the measurable range of the light receiving unit 120 in the Z direction. Accordingly, when the height of the stage 140 is adjusted to the position of FIG. 16A, the height of the position c on the upper surface of the circuit board Sb cannot be calculated, or the reliability of the calculated height is lowered. .

  The omnifocal texture image data is generated by synthesizing the texture image data at the positions a to c. FIG. 17 is an omnifocal texture image of the measuring object S based on the generated omnifocal texture image data. In the omnifocal texture image, as shown in FIG. 17, characters attached to the upper surface of the electrolytic capacitor Sc are clearly displayed, and characters attached to the upper surface of the circuit board Sb are clearly displayed.

  Thus, by changing the relative position of the light receiving unit 120 and the stage 140 in the Z direction, the height at which the light receiving unit 120 is focused with respect to the measurement object S is changed. Therefore, even if the measurement object S has a height difference that cannot be within the range of the depth of field of the light receiving unit 120 at a time, a plurality of texture images captured by changing the focus of the light receiving unit 120 are combined. By doing so, it is possible to obtain an omnifocal texture image in which the whole is in focus. Note that the depth of field has a unique width of the shape measuring apparatus 500 that varies depending on the magnification of the lens of the light receiving unit 120.

  When generating an omnifocal texture image, a plurality of texture images are acquired by changing the relative position in the Z direction between the light receiving unit 120 and the stage 140 within a predetermined range at predetermined intervals. The range and interval in which the light receiving unit 120 and the stage 140 are relatively moved in the Z direction at this time are unique values of the shape measuring apparatus 500. However, the shape of the measuring object S is known, for example, when the shape measuring process of the measuring object S is executed in advance or when data indicating the shape of the measuring object S (for example, CAD data) is held in advance. In some cases, the optimal movement range and interval may be determined based on this data.

  For example, a range slightly wider than the range defined by the upper and lower limits of the height of the measuring object S may be set as the movement range. Further, the interval may be changed according to the gradient of the height shape of the measuring object S. When acquiring an all-focus texture image, the above-described parameter that defines the relative movement in the Z direction between the stage 140 and the light receiving unit 120 may be arbitrarily set by the user.

  The all-focus texture image data is generated by synthesizing a plurality of texture image data for the portions included in the depth of field of the light receiving unit 120 among all the portions of the measurement object S. . Further, when acquiring the texture image data of each part of the measurement object S, the light receiving unit 120 and the measurement object S in a state in which the light reception unit 120 is focused on a plurality of parts of the measurement object S, respectively. The height of each part of the measuring object S is calculated on the basis of the relative distance. In the present embodiment, the state in which the light receiving unit 120 is focused on each of the plurality of portions of the measurement target S is, for example, the range of the depth of field of the light reception unit 120 in each of the plurality of portions of the measurement target S. The state when it is included.

  By combining the heights calculated for all parts of the measurement object S, data indicating the three-dimensional shape of the measurement object S is generated. Data indicating the three-dimensional shape of the measuring object S is referred to as sub-three-dimensional shape data. The synthesized data is generated by synthesizing the omnifocal texture image data and the main stereoscopic shape data.

  FIG. 18 is a composite image of the measuring object S based on the composite data. FIG. 18A shows an image of the main stereoscopic shape of the measuring object S based on the main stereoscopic shape data. The synthesized data is generated by synthesizing the main stereoscopic shape data indicating the main stereoscopic shape of FIG. 18A and the omnifocal texture image data. FIG. 18B is a composite image based on the generated composite data. As shown in FIG. 18B, even when the dimension of the measurement object S in the Z direction is larger than the range of the depth of field of the light receiving unit 120, the measurement object S has different heights. The state of the surface of is clearly displayed.

  The value of each pixel in the main stereoscopic shape data indicates the height data at the position of the pixel. On the other hand, the value of each pixel of the omnifocal texture image data indicates texture information (surface state information) including color and luminance at the position of the pixel. Therefore, the composite image shown in FIG. 18B can be generated by combining the information of corresponding pixels.

  In addition, although mentioned later for details, the shape measurement of the measuring object S is normally performed by one process. For example, in the example of FIG. 16A, since the upper surface c of the circuit board Sb is not within the measurable range of the light receiving unit 120, the height of the upper surface c of the circuit board Sb cannot be calculated. Therefore, as shown in FIG. 16C, the relative distance in the Z direction between the light receiving unit 120 and the stage 140 is set so that the entire measurement object S is within the measurable range of the light receiving unit 120 in the Z direction as much as possible. It needs to be adjusted.

  On the other hand, in the process of generating the omnifocal texture image, imaging is performed a plurality of times by changing the relative distance between the light receiving unit 120 and the stage 140 in the Z direction, so that the entire measurement object S is received by one imaging. It is not necessary to previously adjust the relative distance between the light receiving unit 120 and the stage 140 so as to be within the range of the depth of field of the unit 120. Therefore, the user does not place the measurement object S within the measurable range in the Z direction of the light receiving unit 120 for performing the shape measurement process, not in the range of the depth of field of the light receiving unit 120 when acquiring the texture image. The relative distance in the Z direction between the light receiving unit 120 and the stage 140 is adjusted in consideration of whether or not it is within the range.

  When the shape measurement process is performed at the position of the stage 140 shown in FIG. 16A, the height of the upper surface c of the circuit board Sb cannot be calculated, or the reliability of the calculated height becomes low. On the other hand, in the omnifocal texture image generation process, imaging is performed a plurality of times by changing the relative distance between the light receiving unit 120 and the stage 140 in the Z direction, so that the focus of the light receiving unit 120 is on the upper surface c of the circuit board Sb. A matched texture image can be obtained. Therefore, even if height data is missing in a part of a texture image or a pixel with low reliability exists, it is possible to give texture information of omnifocal texture image data to that pixel.

  In the shape measurement process using triangulation in the present invention, the measurable range in the Z direction of the light receiving unit 120 is generally wider than the range of the depth of field of the light receiving unit 120. This is because in the triangulation, it is possible to measure the shape of the measuring object S even if some blur occurs in the image. However, the range of the depth of field of the light receiving unit 120 is a subjective range that seems to be in focus for the user. Further, the measurable range in the Z direction of the light receiving unit 120 is a unique value of the shape measuring apparatus 500 determined by the light projecting unit 110 and the light receiving unit 120, but is not within the measurable range in the Z direction of the light receiving unit 120. The object S is not necessarily impossible to measure.

  Further, when the height difference of the measuring object S is large, the entire measuring object S can be measured at a time, no matter how the relative distance in the Z direction between the light receiving unit 120 and the stage 140 is adjusted. There are cases where it is not possible. In that case, when performing the shape measurement process, the relative distance in the Z direction between the light receiving unit 120 and the stage 140 is changed, and the shape measurement process is performed a plurality of times. It is also possible to acquire a three-dimensional shape constituted by the data. In this case, the entire measurement object S having a height difference exceeding the measurable range in the Z direction of the light receiving unit 120 can be measured, and the entire three-dimensional shape of the measurement object S having a large height difference can be measured. Texture information can be added.

  In the example of FIG. 18, the texture image is synthesized with the measurement object S displayed three-dimensionally, but the present invention is not limited to this. For example, texture information may be superimposed and displayed on a two-dimensional image in which the height of the measuring object S is expressed by a change in color. In this case, for example, by allowing the user to adjust the ratio between the two-dimensional image indicating the height and the texture information, an image having an intermediate color and brightness between the two-dimensional image indicating the height and the texture image. Can also be generated and displayed.

  In the above description, the omnifocal texture image data and the sub-stereoscopic shape data are respectively generated based on the texture image data and the height at the three positions a to c for easy understanding. It is not limited. The omnifocal texture image data and the sub-stereoscopic shape data may be respectively generated based on the texture image data and the height at two or less positions or four or more positions.

  In this example, the position of the measuring object S in the Z direction is smaller than the range of the depth of field of the light receiving unit 120, toward the lower limit from the upper limit of the measurable range of the light receiving unit 120 in the Z direction. Or it is changed from the lower limit to the upper limit. All-focus texture image data and sub-stereoscopic shape data are generated based on the texture image data and height at each position in the Z direction.

  Alternatively, when the main stereoscopic shape data of the measuring object S is generated before the generation of the omnifocal texture image data and the sub-stereoscopic shape data, the upper end in the Z direction of the measuring object S based on the main stereoscopic shape data And the lower end can be calculated. Therefore, the position of the measuring object S in the Z direction is smaller than the range of the depth of field of the light receiving unit 120, and the dimension of the measuring object S in the Z direction is from the upper end to the lower end or from the lower end to the upper end. May be changed. All-focus texture image data and sub-stereoscopic shape data are generated based on the texture image data and height at each position in the Z direction.

  In this case, the texture image data can be acquired in the minimum range for generating the omnifocal texture image data and the sub-stereoscopic shape data of the measurement object S, and the height can be calculated. Thereby, all-focus texture image data and sub-stereoscopic shape data can be generated at high speed.

(2) Type of texture image The user can select the type of texture image in acquiring the texture image data. The types of texture images include, for example, normal texture images, omnifocal texture images, high dynamic range (HDR) texture images, or combinations thereof. When an omnifocal texture image is selected, the above omnifocal texture image data is generated. When an HDR texture image is selected, texture image data subjected to a known high dynamic range (HDR) composition is generated.

  When the difference in reflectance of a plurality of portions on the surface of the measuring object S or the difference in brightness due to color is small and the dimension of the measuring object S in the Z direction is larger than the depth of field of the light receiving unit 120, the user Selects an all-focus texture image. Thereby, the texture image data which clearly shows the surface state of the measuring object S can be generated in a short time. When the surface of the measuring object S includes a portion having a high reflectance and a portion having a low reflectance, or when a difference in brightness due to color is large, the user selects an HDR texture image. Thereby, it is possible to generate texture image data that clearly shows the surface state of the measuring object S that does not include blackout and overexposure.

  In a normal texture image, the texture image is not synthesized. In this case, one texture image data is generated based on the light reception signal output from the light receiving unit 120 with the focus position of the light receiving unit 120 fixed. When the difference in reflectance or the brightness difference due to color of a plurality of portions on the surface of the measurement object S is small and the dimension of the measurement object S in the Z direction is smaller than the range of the depth of field of the light receiving unit 120, The user selects a normal texture image. Thereby, the texture image data which clearly shows the surface state of the measuring object S can be generated in a shorter time.

  When the HDR texture image is selected, a plurality of texture image data is generated under different imaging conditions at one position in the Z direction. Here, the imaging conditions include the exposure time of the light receiving unit 120. Alternatively, the imaging condition may include the intensity (brightness) of illumination light from the illumination light output unit 130 or the intensity (brightness) of uniform measurement light from the light projecting unit 110. In these cases, the CPU 210 can easily generate a plurality of texture image data under a plurality of imaging conditions.

  The plurality of generated texture image data are combined (HDR combined) so that the texture image at the position in the Z direction does not include blackout and overexposure. As a result, the dynamic range of the texture image is expanded. An HDR texture image is displayed based on the HDR synthesized texture image data (hereinafter referred to as HDR texture image data).

  When a combination of an omnifocal texture image and an HDR texture image (hereinafter referred to as an HDR omnifocal texture image) is selected, the position of the measuring object S is changed for each position in the Z direction while being changed. A plurality of texture image data under the imaging condition is acquired. A plurality of texture image data acquired at each position in the Z direction is HDR-synthesized so that the dynamic range of the image at the position in the Z direction is expanded, thereby generating HDR texture image data.

  Moreover, the surface of the measuring object S is obtained by synthesizing a plurality of HDR texture image data of the parts included in the range of the depth of field of the light receiving unit 120 among all the parts of the measuring object S. HDR texture image data that can be displayed throughout (hereinafter referred to as HDR omnifocal texture image data) is generated. An HDR omnifocal texture image is displayed based on the HDR omnifocal texture image data.

  As described above, the surface of the measuring object S includes a portion having a high reflectance and a low reflectance, or the brightness difference due to the color is large, and the dimension of the measuring object S is larger than the depth of field of the light receiving unit. If so, the user selects an HDR omnifocal texture image. Thereby, the texture image data which shows the surface state of the measuring object S clearly can be produced | generated.

  FIG. 19 is a diagram illustrating an example of the GUI of the display unit 400 when a texture image type is selected. As shown in FIG. 19, when selecting the type of texture image, a texture image selection field 584 is displayed in the setting change area 580 of the display unit 400. In the texture image selection field 584, three check boxes 584a, 584b and 584c are displayed.

  The user can select a normal texture image, HDR texture image, and omnifocal texture image by designating check boxes 584a to 584c, respectively. Further, the user can select the HDR all-focus texture image by designating the check boxes 584b and 584c.

(3) Correction of main stereoscopic shape data The accuracy of sub stereoscopic shape data is lower than the accuracy of main stereoscopic shape data. However, since the main stereoscopic shape data is generated based on the triangulation method, in order to generate the main stereoscopic shape data, the measurement object S is irradiated with light from an angle different from the optical axis of the light receiving unit 120. There is a need. Therefore, the main stereoscopic shape data often includes a defective portion corresponding to a region where the shape of the measuring object S cannot be accurately measured. Here, the defective portion includes blank data corresponding to the shadow portion of the image, noise data corresponding to the noise portion, or false shape data corresponding to the false shape portion of the measuring object S due to multiple reflection or the like. .

  On the other hand, in order to generate sub-stereoscopic shape data, it is not necessary to irradiate the measurement object S from an angle different from the optical axis of the light receiving unit 120, and measurement is performed from an angle substantially equal to the optical axis of the light receiving unit 120. The object S can be irradiated. In this case, the sub-stereoscopic shape data includes almost no defective portion. Therefore, by using illumination light emitted from the illumination light output unit 130 disposed substantially above the measurement object S, sub-stereoscopic shape data that hardly includes a defective portion can be generated.

  A defective portion of the main stereoscopic shape data is determined based on the sub stereoscopic shape data. In this example, the sub stereoscopic shape data and the main stereoscopic shape data for the same measurement object S are compared. Thereby, it is possible to easily determine a defective portion in the main stereoscopic shape data. Further, in the shape measurement process, when the contrast of the pattern of the measurement light is partially reduced, the reliability of the part of the main stereoscopic shape data corresponding to that part is lowered.

  Even in this case, it is possible to determine a portion with low reliability of the main stereoscopic shape data based on the sub stereoscopic shape data and the main stereoscopic shape data. In this example, the sub stereoscopic shape data and the main stereoscopic shape data are compared. The difference between each part of the sub-stereoscopic shape data and each part of the main stereoscopic shape data is calculated, and it is determined that the part of the main stereoscopic shape data whose difference is larger than a predetermined threshold is low in reliability. .

  In this way, it is determined that the portion of the plurality of portions of the main stereoscopic shape data whose deviation from the sub stereoscopic shape data is larger than the threshold value has low reliability. The threshold value may be a fixed value or a variable value that can be arbitrarily adjusted by the user operating a slider or the like. Hereinafter, a portion of the main stereoscopic shape data that has been determined to be low in reliability is referred to as a reliability-decreasing portion of the main stereoscopic shape data.

  The defective part or the reduced reliability part of the main stereoscopic shape data may be corrected by replacement or interpolation by the corresponding sub stereoscopic shape data part. Thereby, the user can observe an image or a composite image of the main three-dimensional shape of the measuring object S that does not include a defective portion or a reduced reliability portion on the display unit 400. Further, it is possible to improve the reliability of the portion of the main stereoscopic shape data whose reliability is reduced. In the correction of the main stereoscopic shape data, the defective portion or the reduced reliability portion of the main stereoscopic shape data may be interpolated by the surrounding main stereoscopic shape data portion.

  20, FIG. 21, and FIG. 22 are diagrams for explaining the correction of the main stereoscopic shape data by the sub stereoscopic shape data. FIGS. 20A and 20B show a main stereoscopic image and a composite image of the measuring object S, respectively. FIGS. 21A and 21B show a sub-stereoscopic shape image (sub-stereoscopic shape three-dimensional image described later) and a composite image of the measuring object S, respectively. FIGS. 22A and 22B show a corrected main stereoscopic image and a corrected combined image of the measuring object S, respectively.

  As shown in FIGS. 20A and 20B, the main stereoscopic image and the composite image include a shadow Ss based on blank data and a false shape Sp based on false shape data. On the other hand, as shown in FIGS. 21A and 21B, the sub-stereoscopic shape image and the composite image are not affected by shadows.

  The shadow Ss and the false shape Sp in the main stereoscopic shape image and the composite image in FIGS. 20A and 20B are the sub-stereo shape image and the omnifocal texture image in FIGS. 21A and 21B. It is corrected by the corresponding part. As a result, as shown in FIGS. 22A and 22B, it is possible to observe a main stereoscopic image and a synthesized image that are not affected by a shadow.

  When displaying the main stereoscopic shape image or the texture image on the display unit 400, the defective portion or the reduced reliability portion of the main stereoscopic shape data is not corrected, and corresponds to the defective portion or the reduced reliability portion of the main stereoscopic shape data. A three-dimensional image or texture image portion may be highlighted. Alternatively, when displaying the corrected main stereoscopic shape image on the display unit 400, the defective portion or the reduced reliability of the main stereoscopic shape data in a state where the defective portion or the reduced reliability portion of the main stereoscopic shape data is corrected. A portion of the corrected three-dimensional image corresponding to the portion may be highlighted. As a result, the user can easily and reliably recognize a defective portion or a reduced reliability portion of the main stereoscopic shape data. The defective part or the reduced reliability part of the main stereoscopic shape data may be treated as invalid data in measurement or analysis of the measurement position in the shape measurement process.

  In the shape measurement process, when the main stereoscopic shape data is generated using measurement light from both the light projecting units 110A and 110B, the main stereoscopic shape data based on the measurement light from each of the light projecting units 110A and 110B is appropriate. The main three-dimensional shape data is generated by combining with appropriate weighting. Here, when the main stereoscopic shape data based on one measurement light includes a defective portion or a reliability reduction portion, the weight of the synthesis of the main stereoscopic shape data based on one measurement light is reduced in that portion. The weight of the synthesis of the main stereoscopic shape data based on the other measurement light may be increased.

(4) Efficiency improvement of shape measurement process In the shape measurement process of FIGS. 30 to 32 described later, the measurement light S is irradiated with the code-shaped measurement light (see FIG. 11) and the stripe measurement is performed. Light (see FIG. 9) is irradiated. In this case, the absolute value of the height of each part of the measuring object S is calculated based on the code-shaped measuring light, and the relative value of the height of each part of the measuring object S is calculated based on the striped measuring light. Calculated with high resolution. Thereby, the absolute value of the height of each part of the measuring object S is calculated with high resolution. That is, the absolute value of the height calculated based on the striped measurement light is determined by the height calculated based on the code-shaped measurement light.

  Instead, the absolute value of the height calculated based on the striped measurement light may be determined based on the height of each part in the sub-stereoscopic shape data. In this case, it is not necessary to irradiate the measurement object S from the light projecting unit 110 with the code-shaped measurement light in the shape measurement process. Thereby, the shape measurement process can be executed in a short time and efficiently while calculating the absolute value of the height of each part of the measuring object S with high resolution.

[5] Shape Measurement Processing (1) Preparation for Shape Measurement Before executing the shape measurement processing of the measurement object S, the user prepares for shape measurement. FIG. 23 is a flowchart showing a procedure for preparing for shape measurement. Hereinafter, a procedure for preparing for shape measurement will be described with reference to FIGS. 1, 2, and 23. First, the user places the measuring object S on the stage 140 (step S1). Next, the user irradiates the measurement object S with illumination light from the illumination light output unit 130 (step S2). Thereby, the image of the measuring object S is displayed on the display unit 400. Subsequently, the user adjusts the light amount of the illumination light, the focus of the light receiving unit 120, and the position and orientation of the measurement object S (hereinafter referred to as the first object) while viewing the image of the measurement object S displayed on the display unit 400. Is called (step S3).

  Next, the user stops the irradiation of the illumination light and irradiates the measurement object S with the measurement light from the light projecting unit 110 (step S4). Thereby, the image of the measuring object S is displayed on the display unit 400. Subsequently, the user adjusts the light amount of the measurement light, the focal point of the light receiving unit 120, and the position and orientation of the measurement object S (hereinafter referred to as the second) while viewing the image of the measurement object S displayed on the display unit 400. Is called (step S5). In step S5, when no shadow is generated at the position to be measured of the measurement object S, the user adjusts the focus of the light receiving unit 120 and the position and orientation of the measurement object S as the second adjustment. There is no need to adjust the amount of measurement light.

  Thereafter, the user stops the irradiation of the measurement light and irradiates the measurement object S from the illumination light output unit 130 again with the illumination light (step S6). Thereby, the image of the measuring object S is displayed on the display unit 400. Next, the user confirms the image of the measuring object S displayed on the display unit 400 (step S7). Here, from the image of the measuring object S displayed on the display unit 400, the user appropriately determines the amount of light, the focus of the light receiving unit 120, and the position and orientation of the measuring object S (hereinafter referred to as an observation state). It is determined whether or not (step S8).

  If it is determined in step S8 that the observation state is not appropriate, the user returns to the process in step S2. On the other hand, when it is determined in step S8 that the observation state is appropriate, the user finishes preparation for shape measurement.

  In the above description, the second adjustment is performed after the first adjustment, but the present invention is not limited to this. The first adjustment may be performed after the second adjustment. In this case, in step S6, the measurement object S is irradiated with the measurement light instead of the illumination light. In step S5, when the focus of the light receiving unit 120 and the position and orientation of the measurement object S are not adjusted in the second adjustment, the user omits the steps S6 to S8. The preparation for shape measurement may be completed.

(2) First Adjustment FIGS. 24 and 25 are flowcharts showing details of the first adjustment in the procedure for the preparation for shape measurement. Hereinafter, the details of the first adjustment in the procedure for the preparation of the shape measurement will be described with reference to FIGS. 1, 2, 24 and 25. First, the user adjusts the amount of illumination light (step S11). The adjustment of the amount of illumination light is performed by adjusting the brightness of the illumination light emitted from the illumination light source 320 of the control unit 300 or the exposure time of the light receiving unit 120. Next, the user determines whether or not the amount of illumination light applied to the measurement object S is appropriate based on the image of the measurement object S displayed on the display unit 400 (step S12). .

  If it is determined in step S12 that the amount of illumination light is not appropriate, the user returns to the process in step S11. On the other hand, if it is determined in step S12 that the amount of illumination light is appropriate, the user adjusts the focus of the light receiving unit 120 (step S13). The focus of the light receiving unit 120 is adjusted by changing the position of the Z stage 142 of the stage 140 and adjusting the relative distance in the Z direction between the light receiving unit 120 and the measuring object S. Next, the user determines whether or not the focus of the light receiving unit 120 is appropriate based on the image of the measurement object S displayed on the display unit 400 (step S14).

  If it is determined in step S14 that the focus of the light receiving unit 120 is not appropriate, the user returns to the process of step S13. On the other hand, when it determines with the focus of the light-receiving part 120 being appropriate in step S14, a user adjusts the position and attitude | position of the measuring object S (step S15). The position and orientation of the measuring object S are adjusted by changing the position of the XY stage 141 and the angle of the θ stage 143 of the stage 140.

  Next, the user determines whether or not the position and orientation of the measurement object S are appropriate based on the image of the measurement object S displayed on the display unit 400 (step S16). Here, when the measurement position of the measurement object S is included in the visual field range of the light receiving unit 120, the user determines that the position and orientation of the measurement object S are appropriate. On the other hand, when the measurement position of the measurement object S is not included in the visual field range of the light receiving unit 120, the user determines that the position and orientation of the measurement object S are not appropriate.

  If it is determined in step S16 that the position and orientation of the measurement object S are not appropriate, the user returns to the process of step S15. On the other hand, if it is determined in step S16 that the position and orientation of the measuring object S are appropriate, the user adjusts the visual field size (step S17). The adjustment of the visual field size is performed by changing the magnification of the lens of the camera 121 of the light receiving unit 120, for example.

  Next, the user determines whether or not the visual field size is appropriate based on the image of the measurement object S displayed on the display unit 400 (step S18). If it is determined in step S18 that the field of view size is not appropriate, the user returns to the process of step S17. On the other hand, if it is determined in step S18 that the visual field size is appropriate, the user selects the type of texture image (step S19), and the first adjustment is terminated. By performing the first adjustment, an optimal illumination light amount condition for generating texture image data is set.

  In step S <b> 17, the light receiving unit 120 may include a plurality of cameras 121 having different lens magnifications, and the lens magnification may be changed by switching the cameras 121. Alternatively, one lens 121 that can switch the lens magnification may be included, and the lens magnification may be changed by switching the lens magnification. Alternatively, the visual field size may be adjusted by the digital zoom function of the light receiving unit 120 without changing the magnification of the lens.

  FIG. 26 is a schematic diagram showing the light receiving unit 120 of FIG. 2 viewed from the X direction. As shown in FIG. 26, the light receiving unit 120 includes cameras 121 </ b> A and 121 </ b> B as a plurality of cameras 121. The lens magnification of the camera 121A and the lens magnification of the camera 121B are different from each other. The light receiving unit 120 further includes a half mirror 124.

  The light that has passed through the plurality of lenses 122 and 123 is separated into two lights by the half mirror 124. One light is received by the camera 121A, and the other light is received by the camera 121B. By switching the camera 121 that outputs a light reception signal to the control board 150 in FIG. 1 between the camera 121A and the camera 121B, the magnification of the lens can be changed. Switching between the camera 121A and the camera 121B is performed by selecting the magnification of the camera in the magnification switching field 574 of FIG.

(3) Second Adjustment FIGS. 27 and 28 are flowcharts showing details of the second adjustment in the procedure for preparing for shape measurement. Hereinafter, the details of the second adjustment in the procedure for the preparation of the shape measurement will be described with reference to FIGS. 1, 2, 27, and 28. First, the user adjusts the amount of one measurement light (step S21).

  Next, the user determines whether or not the position and orientation of the measurement object S are appropriate based on the image of the measurement object S displayed on the display unit 400 (step S22). Here, when a shadow is not generated at the measurement position of the measurement object S, the user determines that the position and orientation of the measurement object S are appropriate. On the other hand, when a shadow is generated at the measurement position of the measurement object S, the user determines that the position and orientation of the measurement object S are not appropriate.

  If it is determined in step S22 that the position and orientation of the measurement object S are not appropriate, the user adjusts the position and orientation of the measurement object S (step S23). The position and orientation of the measuring object S are adjusted by changing the position of the XY stage 141 and the angle of the θ stage 143 of the stage 140. Thereafter, the user returns to the process of step S22.

  On the other hand, when it is determined in step S22 that the position and orientation of the measurement target S are appropriate, the user irradiates the measurement target S based on the image of the measurement target S displayed on the display unit 400. It is determined whether or not the amount of one of the measured light is appropriate (step S24).

  If it is determined in step S24 that the light amount of one measurement light is not appropriate, the user adjusts the light amount of one measurement light (step S25). Thereafter, the user returns to the process of step S24.

  On the other hand, if it is determined in step S24 that the amount of the one measurement light is appropriate, the user is appropriately focused on the light receiving unit 120 based on the image of the measurement object S displayed on the display unit 400. It is determined whether or not there is (step S26).

  If it is determined in step S26 that the focus of the light receiving unit 120 is not appropriate, the user adjusts the focus of the light receiving unit 120 (step S27). The focus of the light receiving unit 120 is adjusted by changing the position of the Z stage 142 of the stage 140 and adjusting the relative distance in the Z direction between the light receiving unit 120 and the measuring object S. Thereafter, the user returns to the process of step S26.

  On the other hand, when it is determined in step S26 that the focus of the light receiving unit 120 is appropriate, the user determines whether or not the observation state is appropriate from the image of the measurement object S displayed on the display unit 400. (Step S28).

  If it is determined in step S28 that the observation state is not appropriate, the user returns to the process in step S23, step S25, or step S27. Specifically, when it is determined that the position and orientation of the measurement object S are not appropriate in the observation state, the user returns to the process of step S23. If it is determined that the amount of light (one measurement light) is not appropriate in the observation state, the user returns to the process of step S25. When it is determined that the focus of the light receiving unit 120 is not appropriate in the observation state, the user returns to the process of step S27.

  On the other hand, when it is determined in step S28 that the observation state is appropriate, the user stops the irradiation of one measurement light and irradiates the measurement object S with the measurement light from the other light projecting unit 110B ( Step S29). Thereby, the image of the measuring object S is displayed on the display unit 400. Subsequently, the user adjusts the light quantity of the other measurement light while viewing the image of the measurement object S displayed on the display unit 400 (step S30).

  Thereafter, the user determines whether or not the amount of the other measurement light is appropriate based on the image of the measurement object S displayed on the display unit 400 (step S31). If it is determined in step S31 that the amount of the other measurement light is not appropriate, the user returns to the process of step S30. On the other hand, if it is determined in step S31 that the amount of the other measurement light is appropriate, the user ends the second adjustment. By performing the second adjustment, an optimal light quantity condition for one and the other measurement light is set in order to generate the main stereoscopic shape data. In addition, when not using the other light projection part 110B, the user may abbreviate | omit the procedure of step S29-S31 after the process of step S28, and may complete | finish 2nd adjustment.

  FIG. 29 is a diagram illustrating an example of the GUI of the display unit 400 when the second adjustment is performed. As shown in FIG. 29, when the second adjustment is performed, light amount setting bars 493 and 494 similar to those in FIG. 5 are displayed in the setting change area 580 of the display unit 400. The user can change the light quantity of one measurement light by operating the operation unit 250 and moving the slider 493s of the light quantity setting bar 493 in the horizontal direction. Similarly, the user can change the light amount of the other measurement light by operating the operation unit 250 and moving the slider 494s of the light amount setting bar 494 in the horizontal direction.

  When the second adjustment is performed, the display unit 400 is provided with three image display areas 550a, 550b, and 550c. In the image display area 550a, an image of the measurement object S when one and the other measurement light is irradiated is displayed. In the image display area 550b, an image of the measurement object S when one measurement light is irradiated is displayed. In the image display area 550c, an image of the measurement object S when the other measurement light is irradiated is displayed.

  Here, the image is displayed in the image display areas 550a to 550c so that a portion where overexposure occurs because it is too bright and a portion where blackout occurs because it is too dark can be identified. In the example of FIG. 29, the overexposed part is highlighted by the dot pattern because it is too bright. In addition, a portion that is blackened due to being too dark is highlighted by a hatching pattern.

(4) Shape measurement process After the preparation of the shape measurement of FIG. 23, the shape measurement process of the measuring object S is executed. 30, 31 and 32 are flowcharts showing the procedure of the shape measurement process. Hereinafter, the procedure of the shape measurement process will be described with reference to FIGS. 1, 2, and 30 to 32. The user instructs the CPU 210 to start the shape measurement process after completing the preparation for the shape measurement. The CPU 210 determines whether or not the user has instructed the start of the shape measurement process (step S41).

  If the start of the shape measurement process is not instructed in step S41, the CPU 210 waits until the start of the shape measurement process is instructed. The user can prepare for shape measurement until instructing the start of the shape measurement process. On the other hand, when the start of the shape measurement process is instructed in step S41, the CPU 210 irradiates the measurement object S with the measurement light from the light projecting unit 110 according to the light amount condition set in the second adjustment, and the measurement object. An image obtained by projecting the measurement light pattern onto S (hereinafter referred to as a pattern image) is acquired (step S42). The acquired pattern image is stored in the work memory 230.

  Next, the CPU 210 generates main three-dimensional shape data indicating the three-dimensional shape of the measuring object S by processing the acquired pattern image with a predetermined measurement algorithm (step S43). The generated main stereoscopic shape data is stored in the work memory 230. Subsequently, the CPU 210 displays an image of the main stereoscopic shape of the measuring object S on the display unit 400 based on the generated main stereoscopic shape data (step S44).

  Thereafter, the CPU 210 determines whether or not a three-dimensional shape of a position to be measured (hereinafter referred to as a measurement position) is displayed based on a user instruction (step S45). The user views the image of the main three-dimensional shape of the measuring object S displayed on the display unit 400 and instructs the CPU 210 whether or not the three-dimensional shape at the measurement position is displayed.

  If it is determined in step S45 that the three-dimensional shape of the measurement position is not displayed, the CPU 210 returns to the process of step S41. Thus, the CPU 210 waits until the start of the shape measurement process is instructed, and the user prepares for shape measurement so that the three-dimensional shape of the measurement position is displayed until the user instructs the start of the shape measurement process again. Can do. On the other hand, if it is determined in step S45 that the three-dimensional shape of the measurement position is displayed, the CPU 210 determines whether or not a normal texture image has been selected by the user in step S19 of the first adjustment in FIG. (Step S46).

  Here, when the check box 584a of the texture image selection field 584 of FIG. 19 is designated, the CPU 210 determines that a normal texture image has been selected. Further, the CPU 210 determines that a normal texture image has been selected even when none of the check boxes 584a to 584c in the texture image selection field 584 of FIG. 19 is designated.

  If it is determined in step S46 that a normal texture image has been selected, the CPU 210 irradiates the measurement object S with illumination light from the illumination light output unit 130 according to the light amount condition set in the first adjustment, and the measurement object. Normal texture image data of S is generated (step S47). Thereafter, the CPU 210 proceeds to the process of step S55.

  If it is determined in step S46 that the normal texture image has not been selected, the CPU 210 determines whether or not the omnifocal texture image has been selected by the user in step S19 of the first adjustment in FIG. 25 (step S48). ). Here, when the check box 584c of the texture image selection field 584 in FIG. 19 is designated, the CPU 210 determines that the omnifocal texture image has been selected.

  If it is determined in step S48 that the omnifocal texture image has been selected, the CPU 210 irradiates the measurement object S with illumination light from the illumination light output unit 130 according to the light amount condition set in the first adjustment, and the measurement object. S omnifocal texture image data is generated (step S49). On the other hand, if it is determined in step S48 that the omnifocal texture image has not been selected, the CPU 210 proceeds to the process of step S50.

  Next, the CPU 210 determines whether or not the HDR texture image has been selected by the user in the first adjustment step S19 of FIG. 25 (step S50). Here, when the check box 584b of the texture image selection field 584 in FIG. 19 is designated, the CPU 210 determines that the HDR texture image has been selected.

  If it is determined in step S50 that the HDR texture image has been selected, the CPU 210 irradiates the measurement object S with illumination light from the illumination light output unit 130 according to the light amount condition set in the first adjustment, and the measurement object S HDR texture image data is generated (step S51). If the omnifocal texture image data has been generated in step S49, the CPU 210 generates HDR omnifocal texture image data instead of the HDR texture image data in step S51. On the other hand, if it is determined in step S50 that the HDR texture image has not been selected, the CPU 210 proceeds to the process of step S52.

  The user can instruct the CPU 210 to display a texture image based on the generated texture image data on the display unit 400. CPU 210 determines whether display of a texture image has been instructed (step S52). If it is determined in step S52 that the display of the texture image has not been instructed, the CPU 210 proceeds to the process of step S55. On the other hand, if it is determined in step S52 that display of a texture image has been instructed, the CPU 210 causes the display unit 400 to display a texture image based on the generated texture image data (step S53).

  Next, the CPU 210 determines whether or not the texture image is appropriate based on a user instruction (step S54). The user looks at the texture image displayed on the display unit 400 and instructs the CPU 210 whether or not the texture image is appropriate.

  If it is determined in step S54 that the texture image is not appropriate, the CPU 210 returns to the process of step S48. Thereby, the processing of steps S48 to S54 is repeated until it is determined that the texture image is appropriate. The user can cause the CPU 210 to generate appropriate texture image data by changing the type of texture image to be selected.

  If it is determined in step S54 that the texture image is appropriate, the CPU 210 generates composite data (step S55). The combined data is generated by combining the texture image data generated in step S47, step S49 or step S51 with the main stereoscopic shape data generated in step S43.

  Subsequently, the CPU 210 causes the display unit 400 to display a composite image of the measurement object S based on the generated composite data (step S56). Thereafter, the CPU 210 performs measurement or analysis of the measurement position based on a user instruction (step S57). This completes the shape measurement process. With such shape measurement processing, the CPU 210 can perform measurement or analysis of the measurement position on the composite image based on the user's instruction.

  In step S42 described above, when the measurement object S is irradiated with the measurement object S from both the light projecting units 110A and 110B, one pattern image corresponding to the measurement light from the one light projecting unit 110A is acquired. The other pattern image corresponding to the measurement light from the other light projecting unit 110B is acquired.

  In step S43, one main stereoscopic shape data corresponding to the measurement light from one light projecting unit 110A is generated, and the other main stereoscopic shape data corresponding to the measurement light from the other light projecting unit 110B is generated. Is done. One main stereoscopic shape data is generated by combining one main stereoscopic shape data and the other main stereoscopic shape data with appropriate weighting.

  In steps S47, S49, and S51 described above, the illumination light is applied to the measurement object S from the illumination light output unit 130, and the texture image data of the measurement object S is generated. However, the present invention is not limited to this. In steps S47, S49, and S51, texture image data of the measurement object S may be generated by irradiating the measurement object S with the measurement light from the light projecting unit 110. In this case, since the shape measuring apparatus 500 does not need to include the illumination light output unit 130, the shape measuring apparatus 500 can be downsized. Moreover, the manufacturing cost of the shape measuring apparatus 500 can be reduced.

  In the shape measurement process described above, it is determined whether an HDR image is selected after it is determined whether an omnifocal texture image is selected, but the present invention is not limited to this. It may be determined whether an omnifocal image has been selected after determining whether an HDR texture image has been selected.

  In the shape measurement process, the texture image data generation process (steps S46 to S54) is executed after the main stereoscopic shape data generation process (steps S42 to S45), but the present invention is not limited to this. Either the texture image data generation process or the main stereoscopic shape data generation process may be executed first, and a part of the texture image data generation process and the main stereoscopic shape data generation process are executed simultaneously. May be.

  For example, after the process of generating texture image data (steps S46 to S54) is performed, the process of generating main stereoscopic shape data (steps S42 to S45) may be performed. Even in this case, the CPU 210 can generate composite data in the process of step S55. In step S54, while the user looks at the texture image displayed on the display unit 400 and determines whether the texture image is appropriate, the process of generating the main stereoscopic shape data is performed. Can be executed. Therefore, the shape measurement process can be executed efficiently in a short time.

  In addition, when the texture image data generation process is performed before the main stereoscopic shape data generation process, the upper and lower ends of the dimension in the Z direction of the measuring object S can be calculated based on the sub stereoscopic shape data. Become. Therefore, in the process of generating the main stereoscopic shape data, the focus of the light receiving unit 120 can be automatically adjusted to the center of the measurement object S in the Z direction. In this case, the accuracy of the main stereoscopic shape data can be further improved.

  On the other hand, when the process of generating the main stereoscopic shape data is performed before the process of generating the texture image data as in the shape measurement process of FIGS. 30 to 32, the measurement object S is measured based on the main stereoscopic shape data. It becomes possible to calculate the upper end and the lower end of the dimension in the Z direction. Therefore, in the process of generating the texture image data, when generating the omnifocal texture image data, the movement range of the stage 140 with respect to the light receiving unit 120 in the Z direction can be minimized and the movement interval can be set appropriately. Thereby, omnifocal texture image data can be generated at high speed.

(5) Effect In the shape measuring apparatus 500 according to the present embodiment, main three-dimensional shape data indicating the three-dimensional shape of the measuring object S is generated with high accuracy by the triangulation method. Further, the omnifocal texture image data is generated by synthesizing the texture image data of the measurement object S when each part of the measurement object S is located within the range of the depth of field of the light receiving unit 120. . Therefore, the omnifocal texture image data clearly shows the surface state over the entire surface of the measuring object S.

  Thereby, the synthesized data obtained by synthesizing the main stereoscopic shape data and the omnifocal texture image data shows the stereoscopic shape of the measuring object S measured with high accuracy and clearly shows the surface state of the measuring object S. A composite image based on the composite data is displayed on the display unit 400. As a result, the user can clearly observe the surface state of the measuring object S while measuring the shape of the measuring object S with high accuracy.

  In the shape measuring apparatus 500 according to the present embodiment, the light quantity condition of one and the other measurement light suitable for generating main stereoscopic shape data and the light quantity of illumination light suitable for generating texture image data Conditions are set individually. As a result, it is possible to generate the main stereoscopic shape data with higher accuracy, and it is possible to generate texture image data that shows the surface state over the entire surface of the measuring object S more clearly. As a result, the surface state of the measuring object S can be observed more clearly while measuring the shape of the measuring object S with higher accuracy.

[6] Auxiliary Function for Focus Adjustment (1) Outline of Auxiliary Function for Focus Adjustment In the second adjustment in the preparation for shape measurement, the focus of the light receiving unit 120 is adjusted, whereby the measuring object S is received by the light receiving unit 120. It is located within the measurable range in the Z direction. Thereby, the shape of the measuring object S can be measured accurately. Here, when the measuring object S is located near the center of the range of the depth of field of the light receiving unit 120 and the measurable range of the light receiving unit 120 in the Z direction, that is, near the focal point of the light receiving unit 120, The shape can be measured more accurately.

  However, even when the Z stage 142 is adjusted to move the measuring object S in the Z direction within the range of the depth of field, the image of the measuring object S displayed on the display unit 400 hardly changes. For example, it is assumed that the depth of field is 5 mm and the visual field size is 25 mm × 25 mm. In this case, the measurement object S is observed to be at the focal position of the light receiving unit 120 in the entire range of the depth of field of 5 mm. For this reason, it is considered that a deviation of about several mm may occur in the focus adjustment. Thus, it is difficult to position the measuring object S near the focal point of the light receiving unit 120.

  Further, when the upper surface of the measuring object S has a plurality of portions having different heights, even if one portion of the plurality of portions is located at the focal point of the light receiving unit 120, the other portion is the light receiving unit 120. May be out of the measurable range in the Z direction.

  Therefore, the shape measuring apparatus 500 according to the present embodiment is provided with a function that assists in appropriately positioning the measuring object S near the focal point of the light receiving unit 120 (hereinafter referred to as an auxiliary function for focus adjustment). .

  In the focus adjustment auxiliary function, when the focus of the light receiving unit 120 is adjusted, the measurement object S on the stage 140 is first irradiated with illumination light from the illumination light output unit 130 of FIG. When the measurement object S is irradiated with illumination light, the position of the stage 140 moves in the Z direction, so that a plurality of portions of the measurement object S are positioned within the depth of field of the light receiving unit 120, respectively. In this state, texture image data is generated. Based on the plurality of texture image data generated in this manner, omnifocal texture image data is generated.

  When a plurality of texture image data respectively corresponding to a plurality of portions of the measurement object S is generated, the light receiving unit 120 and the measurement in a state where the light reception unit 120 is focused on the plurality of portions of the measurement object S, respectively. Based on the relative distance to the object S, the height of each part of the measurement object S is calculated. By substituting the heights calculated for all the parts of the measuring object S, sub-stereoscopic shape data is generated.

  As described above, according to the omnifocal texture image data, when the upper surface of the measuring object S has a plurality of parts having different heights, the omnifocal texture image in which each of those parts is in focus is obtained. It can be displayed on the display unit 400. Further, according to the sub-stereoscopic shape data, a sub-stereoscopic shape image indicating the heights of the plurality of portions of the measurement object S can be displayed on the display unit 400. In the present embodiment, the sub-stereoscopic shape image includes a sub-stereoscopic shape three-dimensional image in which the measuring object S is three-dimensionally represented and a sub-stereoscopic shape two-dimensional image in which the measuring object S is two-dimensionally represented. Including images. Details of the sub-stereoscopic shape three-dimensional image and the sub-stereoscopic shape two-dimensional image will be described later.

  According to the focus adjustment auxiliary function of this example, the user adjusts the position of the measuring object S based on the generated sub-stereoscopic shape data after the sub-stereoscopic shape data is generated as described above. can do.

  FIG. 33 is a diagram for explaining an example in which the user manually adjusts the position of the measuring object S based on the focus adjustment auxiliary function. FIGS. 33A and 33B are side views of the measuring object S placed on the stage 140. FIG.

As shown in FIG. 33A, the measuring object S of this example has three upper surfaces SH1, SH2, and SH3 formed in a step shape. The upper surface SH2 is higher than the upper surface SH1, and the upper surface SH3 is higher than the upper surface SH2. Further, the distance between the lowest upper surface SH1 and the highest upper surface SH3, that is, the range MD of the plurality of upper surfaces SH1 to SH3 in the optical axis direction of the light receiving unit 120 is larger than the measurable range DF of the light receiving unit 120 in the Z direction. small.

According to the auxiliary function of the focus adjustment, the above-described sub-stereoscopic shape data is generated for the measuring object S, so that the generated sub-stereoscopic shape data and the relative distance between the light receiving unit 120 and the measuring object S are set. Based on this, the positional relationship between the focus of the light receiving unit 120 or the measurable range DF of the light receiving unit 120 in the Z direction and the measurement object S is calculated. A sub-stereoscopic shape image is displayed on the display unit 400 of FIG. 1 so that the calculated positional relationship can be identified. A display example of the sub-stereoscopic shape image will be described later.

The user operates the stage operation unit 145 while viewing the sub-stereoscopic shape image displayed on the display unit 400. In this case, in the display unit 400, whenever the stage operation unit 145 is operated and the position of the stage 140 in the Z direction changes, the measurable range DF in the Z direction of the light receiving unit 120 at the time of change and the measurement object S. The sub-stereoscopic shape image is displayed so that the positional relationship between and can be identified.

Accordingly, the user moves the stage 140 in the Z direction so that the upper surfaces SH1, SH2, and SH3 are located within the measurable range DF in the Z direction of the light receiving unit 120, as shown in FIG. In this way, the user can appropriately and easily position the measuring object S at the focal point of the light receiving unit 120. Thereafter, the entire upper surface of the measuring object S can be measured with high accuracy by measuring the shape of the triangulation method.

  FIG. 34 is a diagram for explaining another example in which the user manually adjusts the position of the measuring object S based on the focus adjustment auxiliary function. 34A to 34C are side views of the measuring object S placed on the stage 140. FIG.

As shown in FIG. 34A, the measurement object S of the present example has a range MD of the plurality of upper surfaces SH1 to SH3 in the optical axis direction of the light receiving unit 120 that is larger than the measurable range DF in the Z direction of the light receiving unit 120. Except for the large point, it has the same configuration as the measuring object S of FIG.

Also in this example, the sub-stereoscopic shape data is generated for the measuring object S by the focus adjustment auxiliary function. Based on the generated sub-stereoscopic shape data and the relative distance between the light receiving unit 120 and the measuring object S, the measurable range DF in the Z direction of the focus of the light receiving unit 120 or the light receiving unit 120 and the measuring object S are compared. The positional relationship is calculated. A sub-stereoscopic shape image is displayed on the display unit 400 of FIG. 1 so that the calculated positional relationship can be identified.

In this case, the user can measure the range MD of the plurality of upper surfaces SH1 to SH3 in the optical axis direction of the light receiving unit 120 in the Z direction of the light receiving unit 120 by looking at the sub-stereoscopic shape image displayed on the display unit 400. It can be easily recognized that it is larger than the range DF .

As in this example, when the range of the plurality of upper surfaces SH1 to SH3 in the optical axis direction of the light receiving unit 120 is larger than the measurable range DF in the Z direction of the light receiving unit 120, some upper surfaces (for example, upper surfaces SH1 and SH2) Even if the stage 140 is adjusted so as to be positioned within the measurable range DF , the upper surface (for example, the upper surface SH3) of the other part is out of the measurable range DF . In this state, even if all the upper surfaces SH1 to SH3 of the measuring object S are simultaneously measured by the shape measurement of the triangulation method, the measurement accuracy for the portion outside the measurable range DF is significantly lowered.

Therefore, while viewing the sub-stereoscopic shape image, the user locates a part of the upper surface (upper surface SH1, SH2) within the measurable range DF in the Z direction of the light receiving unit 120, for example, as shown in FIG. Then, the stage 140 is moved in the Z direction. In this state, the upper surface of a part of the measuring object S is measured with high accuracy by the shape measurement of the triangulation method.

Subsequently, the user moves the stage 140 in the Z direction so that the upper surface (upper surface SH3) of the other part is located within the measurable range DF in the Z direction of the light receiving unit 120, for example, as shown in FIG. Move. In this state, the upper surface of the other part of the measuring object S is measured with high accuracy by the shape measurement of the triangulation method.

  As described above, when a plurality of main three-dimensional shape data respectively corresponding to a part and other parts of the measurement object S are generated, a plurality of main objects respectively corresponding to a part and other parts of the measurement object S are generated. Synthesize 3D shape data.

Specifically, a part of the measuring object S (upper surface SH1, SH2) is within the measurable range DF of the main stereoscopic shape data obtained in a state located in the measurement range DF in the Z direction of the light receiving portion 120 Extract data corresponding to the part located in. Further, another portion of the other part of the measuring object S (upper surface SH3) is positioned within the measurable range DF of the main stereoscopic shape data obtained in a state located in the measurement range DF in the Z direction of the light receiving portion 120 Extract data corresponding to. Synthesize the extracted data. Thereby, the user can obtain main three-dimensional shape data measured with high accuracy for the entire upper surface (the upper surfaces SH1, SH2, and SH3).

  The adjustment of the position of the measuring object S shown in FIGS. 33 and 34 may be performed automatically. FIG. 35 is a diagram for explaining an example in which the position of the measuring object S is automatically adjusted based on the focus adjustment auxiliary function. 35A to 35C are side views of the measuring object S placed on the stage 140. FIG.

As shown in FIG. 35 (a), the measurement object S of this example has the same configuration as the measurement object S of FIG. 33 (a). Also in this example, the sub-stereoscopic shape data is generated for the measuring object S by the focus adjustment auxiliary function. Based on the generated sub-stereoscopic shape data and the relative distance between the light receiving unit 120 and the measuring object S, the measurable range DF in the Z direction of the focus of the light receiving unit 120 or the light receiving unit 120 and the measuring object S are compared. The positional relationship is calculated.

In this case, the CPU 210 of FIG. 1 determines that the range MD of the plurality of upper surfaces SH1 to SH3 in the optical axis direction of the light receiving unit 120 is based on the generated sub-stereoscopic shape data before measuring the shape of the triangulation method. It is determined whether or not the measurable range DF is 120 or less in the Z direction.

When the range MD of the plurality of upper surfaces SH1 to SH3 is equal to or less than the measurable range DF in the Z direction of the light receiving unit 120 as in this example, the CPU 210 performs light of the light receiving unit 120 as illustrated in FIG. An average position Zc1 of the plurality of upper surfaces SH1, SH2, SH3 on the measuring object S in the axial direction is calculated.

Subsequently, the CPU 210 moves the stage 140 in the Z direction so that the average position Zc1 of the measuring object S is located at the focal point of the light receiving unit 120 based on the calculated average position Zc1 and the calculated positional relationship. Let As a result, as shown in FIG. 35C, the upper surfaces SH1, SH2, and SH3 are located within the measurable range DF in the Z direction of the light receiving unit 120. In this way, the position of the measuring object S with respect to the focal point of the light receiving unit 120 is automatically adjusted. Thereafter, the entire upper surface of the measuring object S is measured with high accuracy by measuring the shape of the triangulation method.

  In this example, since the position of the measuring object S is automatically adjusted, the sub-stereoscopic shape image may not be displayed on the display unit 400 in FIG.

  FIG. 36 is a diagram for explaining another example in which the position of the measuring object S is automatically adjusted based on the focus adjustment auxiliary function. 36A to 36D show side views of the measuring object S placed on the stage 140. FIG.

As shown in FIG. 36 (a), the measurement object S of this example has the same configuration as the measurement object S of FIG. 34 (a). Also in this example, the sub-stereoscopic shape data is generated for the measuring object S by the focus adjustment auxiliary function. Based on the generated sub-stereoscopic shape data and the relative distance between the light receiving unit 120 and the measuring object S, the measurable range DF in the Z direction of the focus of the light receiving unit 120 or the light receiving unit 120 and the measuring object S are compared. The positional relationship is calculated.

Similar to the example of FIG. 35, the CPU 210 of FIG. 1 determines the plurality of upper surfaces SH1 to SH3 in the optical axis direction of the light receiving unit 120 based on the generated sub-stereoscopic shape data before measuring the shape of the triangulation method. It is determined whether or not the range MD is less than or equal to the measurable range DF in the Z direction of the light receiving unit 120.

As in this example, when the range MD of the plurality of upper surfaces SH1 to SH3 is larger than the measurable range DF in the Z direction of the light receiving unit 120, the CPU 210, for example, based on the calculated positional relationship, The stage 140 is moved in the Z direction so that the lowest upper surface SH1 of S is positioned at the focal point of the light receiving unit 120. As a result, as shown in FIG. 36B, some upper surfaces (upper surfaces SH1 and SH2) are positioned within the measurable range DF in the Z direction of the light receiving unit 120. In this state, the measuring object S is measured by the shape measurement of the triangulation method.

Next, the CPU 210 calculates the positional relationship between the focal point of the light receiving unit 120 or the measurable range DF of the light receiving unit 120 in the Z direction and the measurement target S, and the measurement target S of the measurement target S is calculated based on the calculated positional relationship. It is determined whether or not the highest upper surface SH3 is within the measurable range DF of the light receiving unit 120 in the Z direction.

When the upper surface SH3 is not within the measurable range DF in the Z direction of the light receiving unit 120, the CPU 210 moves the stage 140 downward by a predetermined interval. Thereby, as shown in FIG. 36C, the portion of the measuring object S located within the measurable range DF in the Z direction of the light receiving unit 120 is changed. In this state, the measuring object S is measured by the shape measurement of the triangulation method.

  At this time, the range and interval in which the stage 140 moves in the Z direction are the same as the range and interval in which the light receiving unit 120 and the stage 140 are relatively moved in the Z direction when generating an all-focus texture image. A unique value of 500. The interval at which the stage 140 moves in the Z direction may be set to a value smaller than the range of the depth of field.

  Note that the shape of the measurement object S is known, for example, when the shape measurement process of the measurement object S is executed in advance or when data indicating the shape of the measurement object S (for example, CAD data) is held in advance. In some cases, the optimal movement range and interval may be determined based on this data. Further, the interval may be changed according to the height-shaped gradient of the measuring object S. Further, in the focus adjustment auxiliary function, the above-mentioned parameter defining the relative movement in the Z direction between the stage 140 and the light receiving unit 120 may be arbitrarily set by the user.

Next, the CPU 210 calculates again the positional relationship between the focus of the light receiving unit 120 or the measurable range DF of the light receiving unit 120 in the Z direction and the measurement target S, and the measurement target S based on the calculated positional relationship. It is determined whether or not the highest upper surface SH3 is within the measurable range DF . The CPU 210 repeats the above series of operations. As a result, as shown in FIG. 36D, when the upper surface SH3 is positioned within the measurable range DF in the Z direction of the light receiving unit 120, the downward movement of the stage 140 is stopped.

  Thereafter, the CPU 210 synthesizes a plurality of main stereoscopic shape data generated by moving the stage 140 a plurality of times. Thereby, the user can obtain main three-dimensional shape data generated with high accuracy for the entire upper surface (upper surfaces SH1, SH2, SH3).

  Also in this example, since the position of the measuring object S is automatically adjusted as in the example of FIG. 35, the sub-stereoscopic shape image may not be displayed on the display unit 400 of FIG.

(2) Display example of sub-stereoscopic shape image As described above, for example, when the user manually adjusts the position of the measuring object S, the focus of the light receiving unit 120 or the measurable range DF in the Z direction of the light receiving unit 120 A sub-stereoscopic shape image is displayed on the display unit 400 in FIG. 1 so that the positional relationship with the measurement object S can be identified. In this case, an image indicating the above positional relationship (hereinafter referred to as a positional relationship image) is displayed on the screen of the display unit 400 so as to be superimposed on the substereoscopic shape image or together with the substereoscopic shape image. The

  A display example of the sub-stereoscopic shape image will be described. FIG. 37A shows a display example of a sub-stereoscopic shape three-dimensional image. In the sub-stereoscopic shape three-dimensional image of FIG. 37A, the surface shape of the measuring object S is indicated by a plurality of different colors depending on the height. In the example of FIG. 37A, the height of the surface shape of the measuring object S is indicated by a plurality of different types of hatching instead of a plurality of types of colors. A portion with a higher hatching density indicates that the surface of the measuring object S is at a higher position in the Z direction, and a part with a lower hatching density indicates that the surface of the measuring object S is at a lower position in the Z direction. In this case, the user can easily recognize the surface shape of the measuring object S by viewing the sub-stereoscopic shape three-dimensional image.

  FIG. 37B is a diagram illustrating a display example of the sub-stereoscopic shape two-dimensional image. Also in the sub-stereoscopic shape two-dimensional image of FIG. 37B, the surface shape of the measuring object S is displayed in a plurality of different colors depending on the height. In the example of FIG. 37B, as in the example of FIG. 37A, the height of the surface shape of the measuring object S is indicated by a plurality of different types of hatching instead of a plurality of types of colors. The user can easily recognize the surface shape of the measuring object S by viewing the sub-stereoscopic shape two-dimensional image.

  FIG. 38A is a diagram illustrating a display example of the sub-stereoscopic shape three-dimensional image on which the positional relationship image is superimposed. Also in the sub-stereoscopic shape three-dimensional image of FIG. 38A, the surface shape of the measuring object S is displayed in a plurality of different colors depending on the height, as in the example of FIG. Furthermore, in the example of FIG. 38A, the upper limit surface UL and the lower limit surface BL are displayed as the positional relationship image on the sub-stereoscopic shape three-dimensional image of the measurement object S.

The upper limit surface UL represents the upper limit of the measurable range DF of the light receiving unit 120 in the Z direction (the optical axis direction of the light receiving unit 120). The lower limit plane BL represents the lower limit of the measurable range DF of the light receiving unit 120 in the Z direction (the optical axis direction of the light receiving unit 120). Thereby, in the sub-stereoscopic shape three-dimensional image of FIG. 38A, the range from the upper limit surface UL to the lower limit surface BL is shown as the measurable range DF in the Z direction of the light receiving unit 120.

The user can easily recognize the surface shape of the measuring object S by looking at the sub-stereoscopic shape three-dimensional image of FIG. 38A, and can also measure the measurable range DF in the Z direction of the light receiving unit 120 and the measuring object. The positional relationship with S can be easily recognized.

For example, the user can easily recognize whether or not the entire upper surface of the measuring object S is within the measurable range DF of the light receiving unit 120 in the Z direction. Alternatively, the user can easily recognize whether or not a desired portion of the measuring object S is within the measurable range DF in the Z direction of the light receiving unit 120.

  FIG. 38B is a diagram illustrating a display example of the sub-stereoscopic shape two-dimensional image displayed together with the positional relationship image. In the example of FIG. 38B, first, second, and third display areas 410, 420, and 430 are set on the screen of the display unit 400.

In the first display area 410, a sub-stereoscopic shape two-dimensional image is displayed. In the sub-stereoscopic shape two-dimensional image of the present example, only the shape of the portion of the surface of the measuring object S within the measurable range DF in the Z direction of the light receiving unit 120 is different from each other according to the height. Displayed in color.

  In the second display area 420, a histogram indicating the height distribution of the surface of the measuring object S is displayed. In the histogram displayed in the second display area 420, the vertical axis represents the height, and the horizontal axis represents the number of pixels of the light receiving unit 120.

In the histogram of the second display area 420, an upper limit cursor UC and a lower limit cursor BC are displayed as positional relationship images. The upper limit cursor UC represents the upper limit of the measurable range DF in the Z direction of the light receiving unit 120 in the Z direction (the optical axis direction of the light receiving unit 120). The lower limit cursor BC represents the lower limit of the measurable range DF of the light receiving unit 120 in the Z direction (the optical axis direction of the light receiving unit 120). Thereby, in the sub-stereoscopic shape two-dimensional image of FIG. 38B, the range from the upper limit cursor UC to the lower limit cursor BC is shown as the measurable range DF in the Z direction of the light receiving unit 120.

In the histogram of this example, a color indicating the measurable range DF in the Z direction of the light receiving unit 120 is further applied on the region from the upper limit cursor UC to the lower limit cursor BC. In the second display area 420 of FIG. 38B, the measurable range DF in the Z direction of the light receiving unit 120 is indicated by hatching.

The third display area 430 includes an upper limit display unit 431, a center display unit 432, a width display unit 433, and a lower limit display unit 434. The upper limit display unit 431 displays a height value corresponding to the upper limit of the measurable range DF in the Z direction of the light receiving unit 120. The center display unit 432 displays a height value corresponding to the center of the measurable range DF in the Z direction of the light receiving unit 120 (the focal point of the light receiving unit 120). The width display unit 433 displays the distance (the size of the measurable range DF ) from the upper limit to the lower limit of the measurable range DF in the Z direction of the light receiving unit 120. The lower limit display unit 434 displays a height value corresponding to the lower limit of the measurable range DF in the Z direction of the light receiving unit 120.

  The height values displayed on the upper limit display unit 431, the center display unit 432, and the lower limit display unit 434 are calculated by the CPU 210 based on, for example, a signal provided from the encoder of the stage 140.

The user easily recognizes the surface shape of the measuring object S by viewing the images and information displayed in the first, second, and third display areas 410, 420, and 430 in FIG. In addition, the positional relationship between the measurable range DF in the Z direction of the light receiving unit 120 and the measurement object S can be easily recognized.

As described above, in the present embodiment, the user adjusts the position of the measuring object S by operating the stage operation unit 145 while viewing the sub-stereoscopic shape image and the positional relationship image displayed on the display unit 400. To do. For example, when the sub-stereoscopic shape image and the positional relationship image of FIG. 38A or FIG. 38B are displayed on the display unit 400, the user operates the stage operation unit 145 of FIG. Moves in the Z direction. In this case, the positional relationship between the focus of the light receiving unit 120 or the measurable range DF in the Z direction of the light receiving unit 120 and the measurement object S changes. That is, the part of the measuring object S located within the measurable range DF in the Z direction of the light receiving unit 120 changes.

  FIG. 39A shows a display example of the sub-stereoscopic shape three-dimensional image and the positional relationship image displayed after the stage 140 moves downward by a predetermined distance from the display state of FIG. FIG. 39B shows a display example of the sub-stereoscopic shape two-dimensional image and the positional relationship image displayed after the stage 140 moves downward by a predetermined distance from the display state of FIG. 38B.

According to the sub-stereoscopic shape image and the positional relationship image in FIGS. 39A and 39B, the user moves the stage 140 and moves the measurement within the measurable range DF in the Z direction of the light receiving unit 120. It can be easily recognized that the part of the object S has changed from the central part of the object S to the upper part of the object S to be measured. Further, the user can easily recognize that, for example, the lower end portion of the measuring object S is out of the measurable range DF of the light receiving unit 120 in the Z direction.

  On the other hand, FIG. 40A shows a display example of the sub-stereoscopic shape three-dimensional image and the positional relationship image displayed after the stage 140 has moved upward by a predetermined distance from the display state of FIG. FIG. 40B shows a display example of the sub-stereoscopic shape two-dimensional image and the positional relationship image displayed after the stage 140 has moved upward by a predetermined distance from the display state of FIG. 38B.

According to the sub-stereoscopic shape image and the positional relationship image of FIGS. 40A and 40B, the user moves the stage 140 and moves the measurement within the measurable range DF in the Z direction of the light receiving unit 120. It can be easily recognized that the part of the object S has changed from the central part of the measurement object S to the lower part of the measurement object S. Further, the user can easily recognize that, for example, the upper end portion of the measuring object S is out of the measurable range DF of the light receiving unit 120 in the Z direction.

  FIG. 41A is a diagram illustrating another display example of the sub-stereoscopic shape three-dimensional image on which the positional relationship image is superimposed. In the example of FIG. 41A, the focal plane FL is displayed as the positional relationship image in addition to the upper limit plane UL and the lower limit plane BL of FIG. The focal plane FL is located between the upper limit plane UL and the lower limit plane BL and represents the position of the focal point of the light receiving unit 120 in the Z direction (the optical axis direction of the light receiving unit 120).

  FIG. 41B is a diagram illustrating another display example of the sub-stereoscopic shape two-dimensional image displayed together with the positional relationship image. In the second display area 420 of FIG. 41B, the focal line FC is displayed as a positional relationship image in addition to the upper limit cursor UC and the lower limit cursor BC of FIG. The focal line FC is located between the upper limit cursor UC and the lower limit cursor BC on the histogram, and represents the position of the focus of the light receiving unit 120 in the Z direction (the optical axis direction of the light receiving unit 120).

  As shown in FIGS. 41A and 41B, the index (focal plane FL and focal line FC) indicating the focal position of the light receiving unit 120 is displayed on the screen of the display unit 400, so that the user can It is possible to immediately recognize which part of the measuring object S is located at the focal point of the light receiving unit 120.

The display unit 400 displays a positional relationship image indicating the positional relationship between the focus of the light receiving unit 120 or the measurable range DF in the Z direction of the light receiving unit 120 and the measurement object S together with the above-described all-focus texture image. Good.

  FIG. 42 is a diagram illustrating a display example of the omnifocal texture image displayed together with the positional relationship image. In the example of FIG. 42, an omnifocal texture image display area 440 and a profile shape display area 450 are set on the screen of the display unit 400.

  An omnifocal texture image is displayed in the omnifocal texture image display area 440. In this example, a line segment 441 is displayed on the omnifocal texture image. The user can draw a line segment 441 at a desired location on the omnifocal texture image, for example, by operating the operation unit 250 of the PC 200 of FIG.

  The profile shape display area 450 includes a horizontal axis indicating the length of the line segment on the measurement object S corresponding to the line segment 441 on the all-focus texture image, and a vertical axis indicating the height of the surface of the measurement object S. Is displayed, and the surface shape 451 of the measuring object S along the line segment 441 is displayed as a sub-stereoscopic shape image.

In the profile shape display area 450, an upper limit line 452, a lower limit line 453, and a focal line 454 are further displayed as positional relationship images. The upper limit line 452 represents the upper limit of the measurable range DF of the light receiving unit 120 in the Z direction (the optical axis direction of the light receiving unit 120). A lower limit line 453 represents the lower limit of the measurable range DF of the light receiving unit 120 in the Z direction (the optical axis direction of the light receiving unit 120). The focal line 454 is located between the upper limit line 452 and the lower limit line 453 and represents the position of the focal point of the light receiving unit 120 in the Z direction (the optical axis direction of the light receiving unit 120).

  As described above, the image data of the surface shape 451 displayed in the profile shape display area 450 is generated by the CPU 210 based on the sub-stereo shape data and the position of the line segment 441 drawn on the omnifocal texture image.

  The user can clearly observe the surface state of the measuring object S by viewing the omnifocal texture image of FIG. In addition, the user draws a line segment 441 at a desired position on the omnifocal texture image while observing the surface state of the measurement object S, so that the surface shape 451 of the desired part of the measurement object S is a profile shape. It can be displayed on the display area 450.

Further, the user views the positional relationship image (upper limit line 452, lower limit line 453, and focal line 454 in this example) displayed together with the surface shape 451 of the measurement object S on the profile shape display area 450. The positional relationship between the current measurable range DF of the light receiving unit 120 in the Z direction and the measurement object S can be easily recognized.

When the composite data is generated by combining the sub-stereoscopic shape data and the omnifocal texture image data, the positional relationship image may be displayed on the display unit 400 together with the image based on the generated composite data. . In this case, the user observes the current positional relationship between the measurable range DF in the Z direction of the light receiving unit 120 and the measuring object S while viewing the synthesized image of the three-dimensional shape and the surface state of the measuring object S. It can be easily recognized.

(3) Image for designating the measurement target portion in the measurement target object As described above, when the adjustment of the position of the measurement target object S is automatically performed, the adjustment of the position of the measurement target object S is performed. In addition, the measurement target portion of the measurement target S may be specified by the user. In this case, for example, after the sub-stereoscopic shape image is displayed together with the positional relationship image on the display unit 400, the user designates the measurement target portion in the measurement target S, whereby the designated measurement target portion is the light receiving unit 120. The position of the measuring object S may be automatically adjusted so as to be within the measurable range DF in the Z direction.

  FIG. 43 is a diagram illustrating an example of an image displayed on the display unit 400 when a measurement target portion in the measurement target S is designated before shape measurement. As shown in FIGS. 43A and 43B, in this example, an object display area 460 and a button display area 470 are set on the screen of the display unit 400.

  In the example of FIG. 43A, an omnifocal texture image is displayed in the object display area 460, and in the example of FIG. 43B, a sub-stereoscopic shape two-dimensional image is displayed in the object display area 460. Also, a plurality of designation buttons 471, an OK button 472, and a cancel button 473 are displayed in the button display area 470 of FIGS. 43 (a) and 43 (b).

  The plurality of designation buttons 471 are a plurality of types for designating the measurement target portion of the measurement target S on the all-focus texture image of FIG. 43A or the sub-stereoscopic shape two-dimensional image of FIG. 43B. Each method is assigned.

  For example, the user can designate the entire measurement object S as the measurement object portion by operating the designation button 471 to which “all areas” is assigned. In addition, after the user operates the designation button 471 to which “rectangle” is assigned, the user selects a desired rectangular region on the all-focus texture image or the sub-stereoscopic shape two-dimensional image by a drag operation or the like. Thereby, the user can designate the part of the measuring object S corresponding to the selected rectangular area as the measuring object part. 43A and 43B show a state where two rectangular areas 461 and 462 are selected on the all-focus texture image and the sub-stereoscopic shape two-dimensional image, respectively.

  The user selects the OK button 472 or the cancel button 473 after designating the measurement target portion. When the OK button 472 is selected, the specification of the measurement target portion is completed.

  FIG. 44 is a diagram illustrating another example of an image displayed on the display unit 400 when a measurement target portion in the measurement target S is designated before shape measurement. In the example of FIG. 44A, a sub-stereoscopic shape three-dimensional image is displayed on the screen of the display unit 400 and two cursors CU are displayed. A circular virtual surface is displayed below each cursor CU so as to be in contact with the surface of the measuring object S on the sub-stereoscopic shape three-dimensional image. The user moves the virtual plane corresponding to each cursor CU by operating each cursor CU on the screen of the display unit 400. Thereby, the user can designate the part of the measuring object S where the virtual planes overlap as the measuring object part.

  In the example of FIG. 44B, the sub-stereoscopic shape three-dimensional image is displayed on the screen of the display unit 400, and the upper limit surface ULS and the lower limit surface BLS are displayed. The upper limit surface ULS and the lower limit surface BLS in FIG. 44B represent the upper limit and the lower limit of the measurement range SU of the measurement object S in the Z direction, respectively. The upper limit plane ULS in FIG. 44B includes a cursor UCU, and the lower limit plane BLS includes a cursor BCU. The user operates the cursors UCU and BCU on the screen of the display unit 400 to move the upper limit surface ULS and the lower limit surface BLS to desired positions, respectively. Thereby, the user can designate the part of the measuring object S located within the range from the upper limit plane ULS to the lower limit plane BLS as the measurement target part.

In the above example, after the measurement target portion of the measurement target S is specified by the user, the position of the measurement target S is automatically adjusted. Not limited to this, when a measurement target portion is specified, it is assumed that the specified measurement target portion is in the measurable range DF of the light receiving unit 120 in the Z-direction measurable range DF . An image showing a part of the measuring object S to be positioned (hereinafter referred to as an appropriate part) and an image showing the focus of the light receiving unit 120 may be displayed on the display unit 400. The appropriate part of the measurement object S is, for example, the average position of the measurement object part in the optical axis direction of the light receiving unit 120.

FIG. 45 is a display example of an image showing an appropriate portion of the measuring object S and the focal point of the light receiving unit 120. In the example of FIG. 45A, on the sub-stereoscopic three-dimensional image of the measurement object S, an appropriate surface FS indicating an appropriate part of the measurement object S and a focal plane RS indicating the focus of the light receiving unit 120 are shown. It is. In this case, the user operates the stage operation unit 145 of FIG. 1 and moves the stage 140 in the Z direction so that the appropriate plane FS and the focal plane RS coincide. Accordingly, the user can easily position the measurement target portion within the measurable range DF in the Z direction of the light receiving unit 120.

In the example of FIG. 45B, the sub-stereoscopic shape two-dimensional image is displayed in the first display area 410 on the display unit 400, and the measurement object is displayed on the histogram displayed in the second display area 420. A dotted line TF indicating an appropriate portion of S and a solid line RF indicating the focus of the light receiving unit 120 are shown. In this case, the user operates the stage operation unit 145 of FIG. 1 and moves the stage 140 in the Z direction so that the dotted line TF and the solid line RF coincide with each other. Accordingly, the user can easily position the measurement target portion within the measurable range DF in the Z direction of the light receiving unit 120.

(4) Operation Procedure when Using Focus Adjustment Auxiliary Function FIG. 46 is a flowchart showing an example of the operation procedure of the shape measuring apparatus 500 when using the focus adjustment auxiliary function. In the initial state of this flowchart, the brightness of the illumination light, the brightness of the measurement light, and the posture of the measurement object S are adjusted in advance.

  When adjusting the focus of the light receiving unit 120 with the focus adjustment auxiliary function, the user instructs the generation of the sub-stereoscopic shape data by operating the operation unit 250 of the PC 200, for example (step S101). In this case, the CPU 210 generates sub stereoscopic shape data in response to an instruction from the user. Thereafter, for example, as illustrated in FIGS. 38 to 42, the CPU 210 generates the sub-stereoscopic shape image and the positional relationship image based on the generated sub-stereoscopic shape data and the relative distance between the light receiving unit 120 and the measuring object S. It is displayed on the display unit 400. Details of the operation of the CPU 210 when receiving an instruction to generate sub-stereoscopic shape data will be described later.

Next, the user confirms the sub-stereoscopic shape image and the positional relationship image displayed on the display unit 400 (step S102), thereby determining the measurement object S and the measurable range DF in the Z direction of the light receiving unit 120. Recognize relationships.

  Next, the user instructs display of an image for designating a measurement target portion by operating the operation unit 250 of the PC 200 (step S103). In response to an instruction to display an image by the user, the CPU 210 causes the display unit 400 to display an image for designating a measurement target portion in the measurement target S, for example, as shown in FIGS.

  Next, the user designates a measurement target portion in the measurement target S on the screen of the display unit 400 by operating the operation unit 250 of the PC 200 (step S104). In this case, the CPU 210 displays an image indicating the measurement target portion designated by the user on the display unit 400.

  The user adjusts the position of the measurement object S by operating the stage operation unit 145 while viewing the sub-stereoscopic shape image, the positional relationship image, and the measurement target part image displayed on the display unit 400 (step S105).

Subsequently, the user determines whether or not the measurement target portion of the measurement target S is within the measurable range DF of the light receiving unit 120 in the Z direction, that is, whether or not the position of the measurement target S is appropriate. (Step S106). The user repeats the operations of steps S105 and S106, thereby appropriately positioning the measuring object S at the focal point of the light receiving unit 120. Thereafter, the user instructs the execution of the shape measurement process by operating the operation unit 250 of the PC 200.

  In response to the operation in step S101 described above, the CPU 210 may generate omnifocal texture image data together with the sub stereoscopic shape data. The user does not have to perform the operations in steps S103 and S104.

  When the measurement target portion in the measurement target S is designated in step S104, the CPU 210 may calculate an appropriate portion of the measurement target S based on the sub-stereoscopic shape data corresponding to the designated measurement target portion. . Further, the CPU 210 may display an image indicating the calculated appropriate part on the display unit 400 as shown in FIG. Further, the CPU 210 may move the stage 140 by controlling the stage driving unit 146 so that the calculated appropriate portion is positioned at the focal point of the light receiving unit 120. In this case, the user does not need to perform the operations of steps S105 and S106.

(5) Sub-stereoscopic shape data generation processing In step S101 of FIG. 46, when receiving an instruction to generate sub-stereoscopic shape data, the CPU 210 generates sub-stereoscopic shape data by the following sub-stereoscopic shape data generation processing.

  The sub-stereoscopic shape data generation process may be executed based on a manual operation by the user, or may be automatically executed by the CPU 210.

  FIG. 47 is a flowchart illustrating an example of the sub-stereoscopic shape data generation process executed based on a manual operation by the user.

  First, the CPU 210 determines whether or not the user has instructed imaging of the measurement object S (step S111). When the imaging of the measuring object S is instructed, the CPU 210 irradiates the measuring object S with illumination light and images the measuring object S to generate texture image data (step S112). The generated texture image data is stored in the work memory 230 of FIG. 1 together with information on the relative distance between the light receiving unit 120 and the measuring object S in the optical axis direction of the light receiving unit 120.

  Next, the CPU 210 determines whether or not the user has instructed generation of sub-stereoscopic shape data (step S113). When the generation of the sub-stereoscopic shape data is not instructed, the CPU 210 determines whether or not the focus of the light receiving unit 120 has been adjusted (step S114). Specifically, the light receiving unit 120 determines whether or not the Z position of the stage 140 has changed. When the focus of the light receiving unit 120 is adjusted, the CPU 210 returns to the process of step S111.

  By repeating the processes in steps S111 to S114 a plurality of times, the work memory 230 receives a plurality of texture image data obtained by imaging the measurement object S at a plurality of positions in the Z direction. The information is stored together with information on the relative distance between the unit 120 and the measuring object S.

When generation of sub-stereoscopic shape data is instructed in step S <b> 113, the CPU 210 includes a plurality of texture image data stored in the work memory 230 and information on the relative distance between the light receiving unit 120 and the measurement object S. Based on this, sub-stereoscopic shape data is generated (step S115). Thereafter, the CPU 210 can measure the focal point of the light receiving unit 120 or the Z direction of the light receiving unit 120 based on the generated sub-stereoscopic shape data and the relative distance between the light receiving unit 120 and the measurement object S at that time. The positional relationship between the range DF and the measuring object S is calculated (step S116). In addition, the CPU 210 causes the display unit 400 to display the sub-stereoscopic shape image and the positional relationship image based on the generated sub-stereoscopic shape data and the calculated positional relationship (step S117).

  When the position of the measuring object S with respect to the light receiving unit 120 is automatically adjusted before shape measurement by the subsequent triangulation method based on the calculated positional relationship, in step S117, the CPU 210 determines that the sub-solid shape is The image and the positional relationship image may not be displayed on the display unit 400.

  FIG. 48 is a flowchart illustrating an example of sub-stereoscopic shape data generation processing that is automatically executed. The sub-stereoscopic shape data generation process of FIG. 48 is started when the CPU 210 responds to the instruction for generating the sub-stereoscopic shape data by the user in step S101 of FIG. Once the sub-stereoscopic shape data generation processing is started, a series of processing from the first step to the final step is automatically executed.

  In this example, the Z position of the stage 140 at the start of the sub-stereoscopic shape data generation process is stored in advance in the work memory 230 of FIG. Further, the Z position of the stage 140 at the end of the sub-stereoscopic shape data generation process is stored in advance in the work memory 230 of FIG. 1 as the end position. Further, the interval at which the stage 140 should be moved in the Z direction and the moving direction of the stage 140 for each imaging of the measurement object S for generating texture image data are stored in advance in the work memory 230 of FIG. The range and interval in which the stage 140 moves in the Z direction when generating the sub-stereoscopic shape data is the same as the above-described interval in which the light receiving unit 120 and the stage 140 are relatively moved in the Z direction when generating the omnifocal texture image. Is set.

  First, the CPU 210 determines whether or not the stage 140 is at the start position (step S121). If the stage 140 is not at the start position, the CPU 210 controls the stage drive unit 146 to move the stage 140 to the start position (step S122).

  When the stage 140 is at the start position in step S121, or after the stage 140 is moved to the start position in step S122, the CPU 210 irradiates the measurement object S with illumination light and images the measurement object S to obtain a texture. Image data is generated (step S123). The generated texture image data is stored in the work memory 230 of FIG. 1 together with information on the relative distance between the light receiving unit 120 and the measuring object S in the optical axis direction of the light receiving unit 120.

  Subsequently, the CPU 210 determines whether or not the stage 140 is at the end position (step S124). When the stage 140 is not at the end position, the CPU 210 controls the stage driving unit 146 to adjust the focal position of the light receiving unit 120 by the stored interval (step S125). Specifically, the light receiving unit 120 controls the stage driving unit 146 to change the Z position of the stage 140 from the start position toward the end position by a predetermined interval, and with respect to the focus of the light receiving unit 120. The position of the measuring object S is adjusted. Thereafter, the CPU 210 returns to the process of step S123.

  By repeating the processes of steps S123, S124, and S125 a plurality of times, the work memory 230 has a plurality of texture image data obtained by imaging the measurement object S at a plurality of positions in the Z direction. The information is stored together with information on the relative distance between the light receiving unit 120 and the measuring object S.

  In step S124, when the stage 140 is at the end position, the CPU 210 determines that the sub image is based on the plurality of texture image data stored in the work memory 230 and information on the relative distance between the light receiving unit 120 and the measuring object S. Solid shape data is generated (step S126).

Thereafter, the CPU 210 can measure the focal point of the light receiving unit 120 or the Z direction of the light receiving unit 120 based on the generated sub-stereoscopic shape data and the relative distance between the light receiving unit 120 and the measurement object S at that time. The positional relationship between the range DF and the measurement object S is calculated (step S127). Further, the CPU 210 causes the display unit 400 to display the sub-stereoscopic shape image and the positional relationship image based on the generated sub-stereoscopic shape data and the calculated positional relationship (step S128).

  Also in this example, when the position of the measuring object S with respect to the light receiving unit 120 is automatically adjusted at the time of the subsequent shape measurement by the triangulation method based on the calculated positional relationship, in step S128, the CPU 210 performs the sub-measurement. The three-dimensional shape image and the positional relationship image may not be displayed on the display unit 400.

As described above, in this example, the sub-stereoscopic shape data generation timing (processing timing in step S126) is determined based on whether or not the stage 140 is at the end position. Not limited to this, the CPU 210 determines whether or not at least a part of the measurement object S is located within the measurable range DF in the Z direction of the light receiving unit 120 based on the texture image data generated immediately before, When it is determined that all parts of the measuring object S are outside the measurable range DF in the Z direction of the light receiving unit 120, the process of step S126 may be performed.

(6) Shape Measurement Process Using Auxiliary Function for Focus Adjustment FIGS. 49 to 51 are flowcharts showing an example of a shape measurement process using the auxiliary function for focus adjustment. In the shape measurement process of this example, at least a part of steps S131 to S138 and S141 to S145 described later is executed instead of the processes of steps S41 to S45 of the shape measurement process of FIGS.

  As shown in FIG. 49, the CPU 210 first executes the sub-stereoscopic shape data generation process of FIG. 47 or 48 in response to an instruction from the user (step S131).

  Next, the CPU 210 sets a measurement target portion in the measurement target S (step S132). Specifically, when the measurement target portion is designated by the user, the CPU 210 calculates the position of the measurement target portion in the optical axis direction of the light receiving unit 120 for each designated measurement target portion. When the measurement target portion is not specified by the user, the CPU 210 may calculate the entire range of the measurement target S in the optical axis direction of the light receiving unit 120 using the entire measurement target S as the measurement target portion. The calculated range of the measurement target portion is stored in the work memory 230.

Subsequently, the CPU 210 determines the range of the measurement target portion in the optical axis direction of the light receiving unit 120 (when a plurality of measurement target portions are set, the light receiving unit 120 in the Z direction from the position closest to the light receiving unit 120 in the Z direction). It is determined whether or not the range in the Z direction up to the farthest position is within the measurable range DF in the Z direction of the light receiving unit 120 (step S133). When the range of the measurement target part is equal to or less than the measurable range DF in the Z direction of the light receiving unit 120, the CPU 210 calculates the average position of the measurement target part in the optical axis direction of the light receiving unit 120 as the position of the appropriate part (step S134). ).

Next, the CPU 210 measures the measurement object S based on the positional relationship calculated in step S131 (the positional relationship between the focus of the light receiving unit 120 or the measurable range DF in the Z direction of the light receiving unit 120 and the measurement target S). The stage 140 is moved so that the appropriate portion of the light is located at the focal point of the light receiving unit 120 (step S135). Thereafter, the CPU 210 generates main stereoscopic shape data by performing shape measurement using a triangulation method (step S136). The generated main stereoscopic shape data is stored in the work memory 230. Subsequently, the CPU 210 displays an image of the main stereoscopic shape of the measuring object S on the display unit 400 based on the generated main stereoscopic shape data (step S137).

  Thereafter, the CPU 210 determines whether or not a three-dimensional shape of a position to be measured (hereinafter referred to as a measurement position) is displayed based on an instruction from the user (step S138). The user views the image of the main three-dimensional shape of the measuring object S displayed on the display unit 400 and instructs the CPU 210 whether or not the three-dimensional shape at the measurement position is displayed.

  In step S138, the three-dimensional shape of the measurement position is displayed, and the CPU 210 proceeds to the process of step S46. The processing of steps S46 to S57 is the same as steps S46 to S57 of the shape measurement processing of FIGS.

  Thereby, CPU210 performs measurement or analysis of a measurement position based on a user's directions (Step S57). This completes the shape measurement process.

In step S135, the CPU 210 further determines the focal point of the light receiving unit 120 or the Z direction of the light receiving unit 120 based on the sub-stereoscopic shape data and the relative distance between the light receiving unit 120 and the measurement object S at that time. The positional relationship between the measurable range DF and the measuring object S may be calculated again.

In step S133, when the range of the measurement target portion is larger than the measurable range DF in the Z direction of the light receiving unit 120, the CPU 210 determines, based on the positional relationship calculated in step S131, the lowest portion (or the measurement target portion). The stage 140 is moved so that the highest portion is located at the focal point of the light receiving unit 120, and the positional relationship between the focal point of the light receiving unit 120 or the measurable range DF in the Z direction of the light receiving unit 120 and the measuring object S is calculated again. (Step S141). Thereafter, the CPU 210 generates main stereoscopic shape data by performing shape measurement using a triangulation method (step S142). The generated main stereoscopic shape data is stored in the work memory 230 together with information on the relative distance between the light receiving unit 120 and the measurement object S.

Next, the CPU 210 determines whether or not there is a portion (hereinafter referred to as an unmeasured portion) where shape measurement is not performed within the measurable range DF in the Z direction of the light receiving unit 120 among the measurement target portions. (Step S143).

If there is an unmeasured part, the CPU 210 moves the stage 140 so that the lowest part (or highest part) of the unmeasured parts is located at the focal point of the light receiving unit 120 based on the positional relationship calculated again in step S141. In addition, the positional relationship between the focus of the light receiving unit 120 or the measurable range DF of the light receiving unit 120 in the Z direction and the measurement object S is calculated again (step S144). Thereafter, the CPU 210 returns to the process of step S142.

  By repeating the processes of steps S142 to S144 a plurality of times, the work memory 230 receives a plurality of main stereoscopic shape data respectively generated in a state where the measurement object S is at a plurality of positions in the Z direction. The information is stored together with information on the relative distance between the unit 120 and the measuring object S.

  If there is no unmeasured portion in step S143, the CPU 210 synthesizes a plurality of main stereoscopic shape data stored in the work memory 230 (step S145). The synthesized main stereoscopic shape data is stored in the work memory 230. Thereafter, the CPU 210 proceeds to the process of step S137 described above.

  In this example, instead of automatically moving the stage 140 in steps S135, S141, and S144, the CPU 210 displays, on the display unit 400, an image indicating the position to which the measurement object S should be moved, for example, as shown in FIG. It may be displayed. In this case, the user may manually adjust the position of the stage 140.

  As described above, at the time of the sub-stereoscopic shape data generation process in step S131, one or a plurality of texture image data, together with information on the relative distance between the light receiving unit 120 and the measuring object S in the optical axis direction of the light receiving unit 120. It is stored in the work memory 230 of FIG. Therefore, the CPU 210 captures the texture stored in the work memory 230 instead of generating the texture image data by irradiating the illumination light and capturing the measurement object S during the processes of steps S47, S49, and S51 (FIG. 31). Image data may be read out. In this case, at the time of processing of steps S47, S49, and S51, it is possible to reduce the number of times that the measurement object S is imaged by irradiating illumination light. Or it becomes unnecessary to irradiate illumination light and to image the measuring object S at the time of processing of Steps S47, S49, and S51.

(7) Effects (7-1) In the shape measuring apparatus 500 according to the present embodiment, the illumination light is irradiated to the measurement object S before the shape measurement, and the light receiving unit 120 is connected to the light receiving unit 120 in the optical axis direction of the light receiving unit 120. The relative distance to the measuring object S is changed. At this time, based on the relative distance between the light receiving unit 120 and the measurement target S in a state where each of the plurality of portions of the measurement target S is located within the measurable range DF in the Z direction of the light receiving unit 120, Sub-stereoscopic shape data indicating the three-dimensional shape of the measuring object S is generated.

Based on the relative distance between the light receiving unit 120 and the measuring object S after the generation of the sub three-dimensional shape data and before the shape measurement, and the focus of the light receiving unit 120 or the light receiving unit 120 based on the generated sub three-dimensional shape data. The positional relationship between the measurable range DF in the Z direction and the measuring object S is calculated. Based on the sub-stereoscopic shape data and the calculated positional relationship, the sub-stereoscopic shape image and the positional relationship image are displayed on the screen of the display unit 400.

  Thereafter, at the time of shape measurement, based on the light reception signal output from the light receiving unit 120 in a state in which the measurement light is irradiated on the measurement object S, the three-dimensional shape of the measurement object S is shown with high accuracy by the triangulation method. Three-dimensional shape data is generated.

  In this case, the user confirms the sub-stereoscopic shape image and the positional relationship image displayed on the display unit 400 before measuring the shape, and the measurement object S is within a range that can be measured by the focus of the light receiving unit 120 or the light receiving unit 120. Can be positioned appropriately and easily.

(7-2) In the shape measuring apparatus 500 according to the present embodiment, the illumination light is irradiated onto the measurement object S before the shape measurement, and the light receiving unit 120 and the measurement object S in the optical axis direction of the light receiving unit 120. The relative distance between and is changed. At this time, based on the relative distance between the light receiving unit 120 and the measurement target S in a state where each of the plurality of portions of the measurement target S is located within the measurable range DF in the Z direction of the light receiving unit 120, Sub-stereoscopic shape data indicating the three-dimensional shape of the measuring object S is generated.

Based on the relative distance between the light receiving unit 120 and the measuring object S after the generation of the sub three-dimensional shape data and before the shape measurement, and the focus of the light receiving unit 120 or the light receiving unit 120 based on the generated sub three-dimensional shape data. The positional relationship between the measurable range DF in the Z direction and the measuring object S is calculated.

Thereafter, at the time of shape measurement, the stage 140 is controlled so that at least a part of the measuring object S is positioned within the measurable range DF in the Z direction of the light receiving unit 120 based on the calculated positional relationship. Based on a light reception signal output from the light receiving unit 120 in a state where at least a part of the measurement target S is located within the measurable range DF in the Z direction of the light receiving unit 120 and the measurement light is irradiated on the measurement target S. The main three-dimensional shape data indicating the three-dimensional shape of the measuring object S is generated with high accuracy by the triangulation method.

In this manner, the relative distance between the light receiving unit 120 and the measurement target S is automatically adjusted so that at least a part of the measurement target S is located within the measurable range DF in the Z direction of the light receiving unit 120. Is done. Therefore, the user can appropriately and easily position the measuring object S within the focus of the light receiving unit 120 or the range measurable by the light receiving unit 120.

[7] Other Embodiments (1) In the above embodiment, the relative distance between the light receiving unit 120 and the measuring object S changes as the stage 140 moves in the Z direction. In addition to this, in order to change the relative distance between the light receiving unit 120 and the measuring object S, the light receiving unit 120 may be configured to be movable in the Z direction. In this case, the user may adjust the position of the measuring object S with respect to the focal point of the light receiving unit 120 by moving the light receiving unit 120 in the Z direction instead of moving the stage 140 in the Z direction.

  (2) In the above embodiment, the encoder is attached to the stepping motor used for the X direction moving mechanism, Y direction moving mechanism, Z direction moving mechanism, and θ direction rotating mechanism of the stage 140, but the stage 140 is the CPU 210. In the case where the operation is performed only by this control, the stage 140 may not be provided with an encoder. In this case, when controlling the stage 140, the CPU 210 can calculate the amount of change in the X position, Y position, Z position, or θ rotation angle of the stage 140 based on the drive pulse applied to the stage drive unit 146.

  (3) In the above embodiment, the illumination object is irradiated with the illumination light when generating the sub-stereoscopic shape data. However, the measurement object S may be irradiated with the illumination light and the measurement light at the same time, or only the measurement light may be irradiated with the measurement light S.

  However, when the measurement light S is irradiated with the illumination light, it is possible to reduce the shadows generated compared to the case where the measurement light is irradiated onto the measurement target S. Therefore, it is preferable to irradiate the measuring object S with at least illumination light when generating the sub-stereoscopic shape data.

[8] Correspondence between each component of claim and each part of embodiment The following describes an example of a correspondence between each component of the claim and each part of the embodiment. It is not limited.

An example of a shape measuring device 500 is the shape measuring apparatus, an example of the measuring object S is a measurement object, an example of the illumination light illuminating light, Ri example der of measurement light measurement light, light receiving portion 120 is an example of a light receiving portion.

Further, the stage 140 is an example of a stage, the illumination light output unit 130 is an example of a first light projecting unit, the light projecting unit 110 is an example of a second light projecting unit, and the stage driving unit 146 is It is an example of a relative distance change part, and the display part 400 is an example of a display part.

The CPU 210 is an example of a sub stereoscopic shape data generation unit, a main stereoscopic shape data generation unit, a control unit , a range setting unit, and a processing device, and the operation unit 250 of the PC 200 is an example of a designation operation unit.

Further, the sub-three-dimensional shape data is an example of a sub-three-dimensional shape data, an example of the main stereoscopic shape data main stereoscopic shape data, sub-three-dimensional shape image and the positional relationship image is an example of a focus confirmation image, measured The possible range DF is an example of the first range, and the range in which the sub-stereoscopic shape data is generated by changing the relative position of the light receiving unit 120 and the stage 140 in the optical axis direction of the light receiving unit 120 is the second range. This is an example of the range . Further, the stage operation unit 145, the stage drive unit 146, the display unit 400, and the operation unit 250 of the PC 200 are examples of the operation command receiving unit, and the positional relationship image is an example of the positional relationship image.

  As each constituent element in the claims, various other elements having configurations or functions described in the claims can be used.
[9] Reference form
(1) The shape measuring apparatus according to the first reference embodiment has a stage on which a measurement object is placed, and first light for in-focus confirmation from above or obliquely above the measurement object placed on the stage. A light projecting unit configured to irradiate and irradiate the measurement target placed on the stage with the second light for shape measurement from obliquely above, and placed on the stage and placed on the stage. The relative distance between the light receiving unit configured to receive the light reflected by the measurement object and output a light reception signal indicating the amount of light received, and the optical axis direction of the light receiving unit is changed. Accordingly, the relative distance changing unit that changes the relative distance between the light receiving unit and the measurement target, and the relative distance changing unit between the light receiving unit and the measurement target when the first light is irradiated onto the measurement target. Multiple parts of the object to be measured when the relative distance is changed A first data generation unit that generates first three-dimensional shape data indicating a three-dimensional shape of the measurement object based on a relative distance between the light reception unit and the measurement object in a state where each of the light reception units is in focus And second solid shape data indicating the three-dimensional shape of the measurement object by the triangulation method based on the light reception signal output from the light receiving unit when the measurement object is irradiated with the second light. The second data generation unit, a display unit that displays an image of the measurement object based on the first three-dimensional shape data as an in-focus confirmation image, and the first three-dimensional shape data so as to generate the first three-dimensional shape data before the shape measurement. 1 light projecting unit, light receiving unit, and first data generating unit are controlled, and the relative distance and generation between the light receiving unit and the measurement object at the time after the generation of the first three-dimensional shape data and before the shape measurement The focus of the light receiving unit based on the first three-dimensional shape data Or, calculate the positional relationship between the measurable range in the optical axis direction of the light receiving unit and the measurement object, and control the display unit to display the in-focus confirmation image so that the calculated positional relationship can be identified, And a control unit that controls the second light projecting unit, the light receiving unit, and the second data generating unit so as to generate second solid shape data at the time of shape measurement.
In the shape measuring apparatus, the first object is irradiated with the first light before the shape measurement, and when the relative distance between the light receiving unit and the measuring object is changed, a plurality of parts of the measuring object are measured. Based on the relative distance between the light receiving unit and the measurement target in a state where the light receiving unit is in focus, first three-dimensional shape data indicating the three-dimensional shape of the measurement target is generated.
Based on the relative distance between the light receiving unit and the measurement object after the generation of the first three-dimensional shape data and before the shape measurement, and the focus of the light receiving unit or the light receiving unit based on the generated first three-dimensional shape data. The positional relationship between the measurable range in the optical axis direction and the measurement object is calculated. An in-focus confirmation image is displayed on the display unit so that the calculated positional relationship can be identified.
After that, during shape measurement, the second shape indicating the three-dimensional shape of the measurement object with high accuracy by the triangulation method based on the light reception signal output from the light receiving unit in a state where the second light is irradiated on the measurement object. The three-dimensional shape data is generated.
In this case, the user appropriately and easily positions the object to be measured within the focus of the light receiving unit or the range measurable by the light receiving unit while checking the in-focus confirmation image displayed on the display unit before measuring the shape. be able to.
(2) At the time of shape measurement, the control unit generates the second three-dimensional shape data in a state where some of the plurality of portions of the measurement object are located within a measurable range in the optical axis direction of the light receiving unit. After the second light projecting unit, the light receiving unit, and the second data generating unit are controlled, the relative distance changing unit changes the relative distance between the light receiving unit and the measurement object, so that other parts Controlling the second light projecting unit, the light receiving unit, and the second data generating unit so as to generate the second three-dimensional shape data in a state where the unit is located within a measurable range in the optical axis direction of the light receiving unit, You may synthesize | combine the 2nd solid-shape data corresponding to a part of several part and another part.
In this case, the second three-dimensional shape data is generated in a state where some of the plurality of portions of the measurement object are located within a measurable range in the optical axis direction of the light receiving unit. Further, the second three-dimensional shape data is generated in a state where the other portions of the plurality of portions are located within a measurable range in the optical axis direction of the light receiving portion. Second solid shape data corresponding to a part of the plurality of parts and the other part is synthesized. As a result, even when the range of multiple parts of the measurement target in the optical axis direction of the light receiving unit is larger than the measurable range in the optical axis direction of the light receiving unit, measurement is performed with high accuracy over a wide range of the measurement target. The three-dimensional shape of the object can be measured.
(3) The shape measuring apparatus designates at least a part of the plurality of portions of the measurement object on the in-focus confirmation image displayed on the display unit after the generation of the first three-dimensional shape data and before the shape measurement. The control unit further includes a designation operation unit operated by the user for the designation operation in the optical axis direction of the light receiving unit when at least a part of the plurality of parts of the measurement object is designated by the designation operation unit. It is determined whether or not the range of the part specified by the light receiving unit is less than or equal to the measurable range in the optical axis direction of the light receiving unit. In some cases, at the time of shape measurement, the relative distance changing unit is controlled so that the specified part is within a measurable range in the optical axis direction of the light receiving unit, and the specified part is in the optical axis direction of the light receiving unit. Position within measurable range That the second light projecting portion to generate a second three-dimensional shape data in the state, may control the light receiving unit and the second data generation unit.
In this case, after the generation of the first three-dimensional shape data and before the shape measurement, at least some of the plurality of portions of the measurement object are designated on the in-focus confirmation image displayed on the display unit. It is determined whether or not the range of the portion designated in the optical axis direction of the light receiving unit is equal to or less than the measurable range in the optical axis direction of the light receiving unit.
When the range of the specified part is less than the measurable range in the optical axis direction of the light receiving unit, the specified part is positioned within the measurable range in the optical axis direction of the light receiving unit when measuring the shape. After the relative distance changing unit is controlled, second solid shape data is generated. Accordingly, the user can quickly measure the three-dimensional shape of the measurement object with high accuracy for the designated portion.
(4) When the range of the specified part is larger than the measurable range in the optical axis direction of the light receiving unit, the control unit may have a part of the specified part in the optical axis direction of the light receiving unit during shape measurement. The relative distance changing unit is controlled so as to be located within the measurable range, and the second three-dimensional shape data is obtained in a state where a part of the designated portion is located within the measurable range in the optical axis direction of the light receiving unit. The second light projecting unit, the light receiving unit, and the second data generating unit are controlled so as to generate, and relative to each other so that the other part of the designated portion is located within a measurable range in the optical axis direction of the light receiving unit. A second light projecting unit configured to control the distance changing unit and generate the second three-dimensional shape data in a state where the other part of the designated part is located within a measurable range in the optical axis direction of the light receiving unit; Control the light receiving unit and the second data generation unit, Second three-dimensional shape data corresponding to the parts and other portions may be synthesized.
In this case, when the range of the specified part is larger than the measurable range in the optical axis direction of the light receiving unit, a part of the specified part can be measured in the optical axis direction of the light receiving unit during shape measurement. The relative distance changing unit is controlled so as to be located inside, and second solid shape data is generated. In addition, the relative distance changing unit is controlled so that the other part of the designated part is located within a measurable range in the optical axis direction of the light receiving unit, and second solid shape data is generated. Second solid shape data corresponding to a part of the designated part and the other part is synthesized. As a result, even when the range of the specified part is larger than the measurable range in the optical axis direction of the light receiving unit, the user can quickly and accurately measure the three-dimensional object to be measured over a wide range of the specified part. The shape can be measured.
(5) The shape measuring apparatus according to the second embodiment is configured to apply a first light for in-focus confirmation from above or obliquely upward to a measurement object placed on the stage and a measurement object placed on the stage. A light projecting unit configured to irradiate and irradiate the measurement target placed on the stage with the second light for shape measurement from obliquely above, and placed on the stage and placed on the stage. The relative distance between the light receiving unit configured to receive the light reflected by the measurement object and output a light reception signal indicating the amount of light received, and the optical axis direction of the light receiving unit is changed. The relative distance changing unit that changes the relative distance between the light receiving unit and the measurement object, and the relative distance changing unit relative to the light receiving unit and the measurement object when the measurement object is irradiated with the first light. Parts of the object to be measured when the general distance is changed A first data generating unit that generates first three-dimensional shape data indicating a three-dimensional shape of the measurement object based on a relative distance between the light receiving unit and the measurement object in a state where the light receiving unit is in focus; The second three-dimensional shape data indicating the three-dimensional shape of the measurement object is generated by the triangulation method based on the light reception signal output from the light receiving unit when the measurement object is irradiated with the second light. A second data generation unit configured to control the first light projecting unit, the light receiving unit, and the first data generation unit so as to generate first three-dimensional shape data before the shape measurement; Based on the relative distance between the light receiving unit and the measurement object at the time after the generation of the three-dimensional shape data and before the shape measurement, and the focal point of the light receiving unit or the optical axis direction of the light receiving unit based on the generated first three-dimensional shape data Calculate the positional relationship between the measurable range and the measurement object. Then, during the shape measurement, the relative distance changing unit is controlled based on the calculated positional relationship so that at least a part of the measurement object is located within a measurable range in the optical axis direction of the light receiving unit, and the measurement object The second light projecting unit, the light receiving unit, and the second data generating unit are configured to generate the second three-dimensional shape data in a state where at least a part of the second solid shape data is located within a measurable range in the optical axis direction of the light receiving unit. And a control unit for controlling.
In the shape measuring apparatus, the first object is irradiated with the first light before the shape measurement, and when the relative distance between the light receiving unit and the measuring object is changed, a plurality of parts of the measuring object are measured. Based on the relative distance between the light receiving unit and the measurement target in a state where the light receiving unit is in focus, first three-dimensional shape data indicating the three-dimensional shape of the measurement target is generated.
Based on the relative distance between the light receiving unit and the measurement object after the generation of the first three-dimensional shape data and before the shape measurement, and the focus of the light receiving unit or the light receiving unit based on the generated first three-dimensional shape data. The positional relationship between the measurable range in the optical axis direction and the measurement object is calculated.
Thereafter, at the time of shape measurement, the relative distance changing unit is controlled so that at least a part of the measurement object is located within a measurable range in the optical axis direction of the light receiving unit based on the calculated positional relationship. Based on a light reception signal output from the light receiving unit in a state where at least a part of the measurement target is located within a measurable range in the optical axis direction of the light receiving unit and the second light is irradiated on the measurement target, Second solid shape data indicating the solid shape of the measurement object is generated with high accuracy by the triangulation method.
In this case, the relative distance between the light receiving unit and the measurement target is automatically adjusted so that at least a part of the measurement target is located within a measurable range in the optical axis direction of the light receiving unit. Therefore, the user can appropriately and easily position the measuring object within the range measurable by the focal point of the light receiving unit or the light receiving unit.
(6) The control unit determines whether or not the range of the plurality of parts of the measurement object in the optical axis direction of the light receiving unit is equal to or less than the measurable range in the optical axis direction of the light receiving unit, and the range of the plurality of parts Is less than or equal to the measurable range in the optical axis direction of the light receiving unit, the relative distance changing unit is controlled so that a plurality of parts are located within the measurable range in the optical axis direction of the light receiving unit when measuring the shape. The second light projecting unit, the light receiving unit, and the second data generating unit are configured to generate the second three-dimensional shape data in a state where the plurality of parts are located within a measurable range in the optical axis direction of the light receiving unit. You may control.
In this case, it is determined whether or not the range of the plurality of portions of the measurement object in the optical axis direction of the light receiving unit is equal to or less than the measurable range in the optical axis direction of the light receiving unit. When the range of the plurality of parts is less than or equal to the measurable range in the optical axis direction of the light receiving unit, the plurality of parts of the measurement object are located within the measurable range in the optical axis direction of the light receiving unit during the shape measurement. Thus, after the relative distance changing unit is controlled, second solid shape data is generated. Accordingly, the user can quickly measure the three-dimensional shape of the measurement object with high accuracy for a plurality of portions of the measurement object.
(7) When the range of multiple parts is larger than the measurable range in the optical axis direction of the light receiving unit, the control unit can measure part of the multiple parts in the optical axis direction of the light receiving unit during shape measurement The relative distance changing unit is controlled so as to be located within a range, and the second three-dimensional shape data is generated in a state where a part of the plurality of portions is located within a measurable range in the optical axis direction of the light receiving unit. The second light projecting unit, the light receiving unit, and the second data generating unit are controlled, and the relative distance changing unit is set so that the other parts of the plurality of parts are located within a measurable range in the optical axis direction of the light receiving unit. And controlling the second light projecting unit, the light receiving unit, and the second light so as to generate the second three-dimensional shape data in a state where other parts of the plurality of parts are located within a measurable range in the optical axis direction of the light receiving unit. Controls the data generation unit and handles part of multiple parts and other parts 2 of the three-dimensional shape data may be synthesized.
In this case, when the range of multiple parts of the measurement object is larger than the measurable range in the optical axis direction of the light receiving unit, some of the multiple parts can be measured in the optical axis direction of the light receiving unit during shape measurement. The relative distance changing unit is controlled so as to be located within the range, and second solid shape data is generated. Further, the relative distance changing unit is controlled such that the other part of the plurality of parts is located within a measurable range in the optical axis direction of the light receiving unit, and second solid shape data is generated. Second solid shape data corresponding to a part of the plurality of parts and the other part is synthesized. Accordingly, even when the range of the plurality of parts of the measurement object is larger than the measurable range in the optical axis direction of the light receiving unit, the user can accurately detect the wide range of the plurality of parts of the measurement object. The three-dimensional shape of the measurement object can be measured quickly.
(8) The shape measurement apparatus displays a display unit that displays an image of the measurement object based on the first three-dimensional shape data as an in-focus confirmation image, and displays the first three-dimensional shape data after the generation and before the shape measurement. And a designation operation unit operated by a user to designate at least a part of the plurality of parts of the measurement object on the in-focus confirmation image displayed on the unit, and the control unit is controlled by the designation operation unit. When at least a part of a plurality of parts of the measurement object is specified, the range of the part specified by the specifying operation unit in the optical axis direction of the light receiving unit is less than the measurable range in the optical axis direction of the light receiving unit. If the range of the specified part is less than or equal to the measurable range in the optical axis direction of the light receiving unit, the specified part can be measured in the optical axis direction of the light receiving unit when measuring the shape. To be within range The second light projecting unit and the light receiving unit are configured to control the relative distance changing unit and generate the second three-dimensional shape data in a state where the designated portion is located within a measurable range in the optical axis direction of the light receiving unit. The second data generation unit may be controlled.
In this case, the image of the measurement object based on the generated first three-dimensional shape data is displayed on the display unit as the in-focus confirmation image after the generation of the first three-dimensional shape data and before the shape measurement. After the generation of the first three-dimensional shape data and before the shape measurement, at least some of the plurality of portions of the measurement object are designated on the in-focus confirmation image displayed on the display unit. It is determined whether or not the range of the portion designated in the optical axis direction of the light receiving unit is equal to or less than the measurable range in the optical axis direction of the light receiving unit.
When the range of the specified part is less than the measurable range in the optical axis direction of the light receiving unit, the specified part is positioned within the measurable range in the optical axis direction of the light receiving unit when measuring the shape. After the relative distance changing unit is controlled, second solid shape data is generated. Accordingly, the user can quickly measure the three-dimensional shape of the measurement object with high accuracy for the designated portion.
(9) When the range of the designated part is larger than the measurable range in the optical axis direction of the light receiving unit, the control unit may have a part of the designated part in the optical axis direction of the light receiving unit during shape measurement. The relative distance changing unit is controlled so as to be located within the measurable range, and the second three-dimensional shape data is obtained in a state where a part of the designated portion is located within the measurable range in the optical axis direction of the light receiving unit. The second light projecting unit, the light receiving unit, and the second data generating unit are controlled so as to generate, and relative to each other so that the other part of the designated portion is located within a measurable range in the optical axis direction of the light receiving unit. A second light projecting unit configured to control the distance changing unit and generate the second three-dimensional shape data in a state where the other part of the designated part is located within a measurable range in the optical axis direction of the light receiving unit; Control the light receiving unit and the second data generation unit, Second three-dimensional shape data corresponding to the parts and other portions may be synthesized.
In this case, when the range of the specified part is larger than the measurable range in the optical axis direction of the light receiving unit, a part of the specified part can be measured in the optical axis direction of the light receiving unit during shape measurement. The relative distance changing unit is controlled so as to be located inside, and second solid shape data is generated. In addition, the relative distance changing unit is controlled so that the other part of the designated part is located within a measurable range in the optical axis direction of the light receiving unit, and second solid shape data is generated. Second solid shape data corresponding to a part of the designated part and the other part is synthesized. As a result, even when the range of the specified part is larger than the measurable range in the optical axis direction of the light receiving unit, the user can quickly and accurately measure the three-dimensional object to be measured over a wide range of the specified part. The shape can be measured.
(10) The light projecting unit is configured to irradiate the measurement object with the first light and the second light source is configured to irradiate the measurement object with the second light. The first light projecting section is inclined by a first angle that is greater than 0 degree and smaller than 90 degrees with respect to the optical axis of the light receiving section or parallel to the optical axis of the light receiving section. The second light projecting unit is arranged so as to emit the first light having a uniform light amount distribution in the measured direction, and the second light projecting unit emits the light and the light emitted from the measurement light source is a pattern for shape measurement. And a pattern generator that generates the second light by converting the light into the second light in a direction inclined by a second angle larger than the first angle with respect to the optical axis of the light receiving unit. May be arranged so as to emit light.
In this case, the second light projecting unit emits the second light in a direction inclined by a second angle larger than the first angle with respect to the optical axis of the light receiving unit. Accordingly, the second three-dimensional shape data can be easily generated by the triangulation method in a state where the second light is irradiated on the measurement object. In addition, the first light projecting unit emits the first light in a direction inclined by a first angle smaller than the second angle with respect to the optical axis of the light receiving unit, thereby suppressing the generation of shadows. The measurement object can be irradiated with the first light.
(11) In the shape measuring method according to the third embodiment, before measuring the shape, the measurement target placed on the stage is irradiated with the first light for confirming the in-focus point from above or obliquely above, and the light receiving unit When the relative distance between the light receiving unit and the measurement target changes due to the relative distance between the stage and the stage changing in the optical axis direction of the light receiving unit, the light is received by multiple parts of the measurement target. Generating first three-dimensional shape data indicating a three-dimensional shape of the measurement object based on a relative distance between the light receiving unit and the measurement object in a state where the unit is in focus, and the first three-dimensional shape data Can be measured in the focal point of the light receiving unit or in the optical axis direction of the light receiving unit based on the relative distance between the light receiving unit and the measurement object and the generated first three-dimensional shape data at the time before the shape measurement and before the shape measurement Calculate the positional relationship between the target range and the measurement object. A step of displaying an image of the measurement object based on the first three-dimensional shape data on the display unit as an in-focus confirmation image so that the determined positional relationship can be identified, and the measurement object placed on the stage at the time of shape measurement The second measuring light is irradiated obliquely from above, the light reflected by the measuring object is received by the light receiving unit, and the measuring object is measured by the triangulation method based on the received light signal output from the light receiving unit. Generating second solid shape data indicating the three-dimensional shape.
In the shape measurement method, a plurality of portions of the measurement object are obtained when the measurement object is irradiated with the first light and the relative distance between the light receiving unit and the measurement object is changed before the shape measurement. Based on the relative distance between the light receiving unit and the measurement target in a state where the light receiving unit is in focus, first three-dimensional shape data indicating the three-dimensional shape of the measurement target is generated.
Based on the relative distance between the light receiving unit and the measurement object after the generation of the first three-dimensional shape data and before the shape measurement, and the focus of the light receiving unit or the light receiving unit based on the generated first three-dimensional shape data. The positional relationship between the measurable range in the optical axis direction and the measurement object is calculated. An in-focus confirmation image is displayed on the display unit so that the calculated positional relationship can be identified.
Thereafter, at the time of shape measurement, the second light is irradiated onto the measurement object, and the light reflected by the measurement object is received by the light receiving unit. Based on the light reception signal output from the light receiving unit, second solid shape data indicating the three-dimensional shape of the measurement object is generated with high accuracy by the triangulation method.
In this case, the user confirms the in-focus confirmation image displayed on the display unit before measuring the shape, so that the measurement object can be appropriately and easily within the range that can be measured by the focus of the light receiving unit or the light receiving unit. Can be positioned.
(12) In the shape measuring method according to the fourth reference embodiment, before measuring the shape, the measurement object placed on the stage is irradiated with the first light for in-focus confirmation from above or obliquely above, and the light receiving unit When the relative distance between the light receiving unit and the measurement target changes due to the relative distance between the stage and the stage changing in the optical axis direction of the light receiving unit, the light is received by multiple parts of the measurement target. Generating first three-dimensional shape data indicating a three-dimensional shape of the measurement object based on a relative distance between the light receiving unit and the measurement object in a state where the unit is in focus, and the first three-dimensional shape data Can be measured in the focal point of the light receiving unit or in the optical axis direction of the light receiving unit based on the relative distance between the light receiving unit and the measurement object and the generated first three-dimensional shape data at the time before the shape measurement and before the shape measurement Calculate the positional relationship between the target range and the object to be measured. During measurement, the relative distance between the light receiving unit and the measurement target is adjusted so that at least a part of the measurement target is located within the measurable range in the optical axis direction of the light receiving unit based on the calculated positional relationship. Then, in a state where at least a part of the measurement object is located within a measurable range in the optical axis direction of the light receiving unit, the second light for shape measurement is applied to the measurement object placed on the stage from obliquely above. Irradiated light reflected by the measuring object is received by the light receiving unit, and second solid shape data indicating the three-dimensional shape of the measuring object is obtained by the triangulation method based on the light reception signal output from the light receiving unit. Generating.
In the shape measurement method, a plurality of portions of the measurement object are obtained when the measurement object is irradiated with the first light and the relative distance between the light receiving unit and the measurement object is changed before the shape measurement. Based on the relative distance between the light receiving unit and the measurement target in a state where the light receiving unit is in focus, first three-dimensional shape data indicating the three-dimensional shape of the measurement target is generated.
Based on the relative distance between the light receiving unit and the measurement object after the generation of the first three-dimensional shape data and before the shape measurement, and the focus of the light receiving unit or the light receiving unit based on the generated first three-dimensional shape data. The positional relationship between the measurable range in the optical axis direction and the measurement object is calculated.
Thereafter, at the time of shape measurement, the relative relationship between the light receiving unit and the measurement target is set so that at least a part of the measurement target is located within the measurable range in the optical axis direction of the light receiving unit based on the calculated positional relationship. The distance is adjusted. In a state where at least a part of the measurement object is located within a measurable range in the optical axis direction of the light receiving unit, the second light is irradiated onto the measurement object, and the light reflected by the measurement object is received by the light receiving unit. Received light. Based on the light reception signal output from the light receiving unit, second solid shape data indicating the three-dimensional shape of the measurement object is generated with high accuracy by the triangulation method.
In this case, the relative distance between the light receiving unit and the measurement target is automatically adjusted so that at least a part of the measurement target is located within a measurable range in the optical axis direction of the light receiving unit. Therefore, the user can appropriately and easily position the measuring object within the range measurable by the focal point of the light receiving unit or the light receiving unit.
(13) The shape measurement program according to the fifth reference embodiment is a shape measurement program that can be executed by the processing device, and is focused on the measurement object placed on the stage from above or obliquely from above before the shape measurement. By irradiating the first light for confirmation, and the relative distance between the light receiving unit and the stage is changed in the optical axis direction of the light receiving unit, the relative distance between the light receiving unit and the measurement object is changed. In this case, the first three-dimensional shape showing the three-dimensional shape of the measurement object based on the relative distance between the light receiving unit and the measurement object in a state where the plurality of parts of the measurement object are respectively in focus. Light reception based on the process of generating data, the relative distance between the light receiving unit and the measurement object at the time after the generation of the first three-dimensional shape data and before the shape measurement, and the generated first three-dimensional shape data In the direction of the focal point of the The positional relationship between the measurable range and the measurement target is calculated, and the image of the measurement target based on the first three-dimensional shape data is displayed on the display unit as the in-focus confirmation image so that the calculated positional relationship can be identified. Processing, and at the time of shape measurement, the measurement object placed on the stage is irradiated with the second light for shape measurement from obliquely above, and the light reflected by the measurement object is received by the light receiving unit. And processing for generating second solid shape data indicating the three-dimensional shape of the measurement object by the triangulation method based on the light reception signal output from the processing unit.
According to the shape measurement program, when the first light is irradiated onto the measurement object before the shape measurement and the relative distance between the light receiving unit and the measurement object is changed, a plurality of measurement objects are measured. Based on the relative distance between the light receiving unit and the measurement target in a state where the light receiving unit is focused on each part, first three-dimensional shape data indicating the three-dimensional shape of the measurement target is generated.
Based on the relative distance between the light receiving unit and the measurement object after the generation of the first three-dimensional shape data and before the shape measurement, and the focus of the light receiving unit or the light receiving unit based on the generated first three-dimensional shape data. The positional relationship between the measurable range in the optical axis direction and the measurement object is calculated. An in-focus confirmation image is displayed on the display unit so that the calculated positional relationship can be identified.
Thereafter, at the time of shape measurement, the second light is irradiated onto the measurement object, and the light reflected by the measurement object is received by the light receiving unit. Based on the light reception signal output from the light receiving unit, second solid shape data indicating the three-dimensional shape of the measurement object is generated with high accuracy by the triangulation method.
In this case, the user confirms the in-focus confirmation image displayed on the display unit before measuring the shape, so that the measurement object can be appropriately and easily within the range that can be measured by the focus of the light receiving unit or the light receiving unit. Can be positioned.
(14) The shape measurement program according to the sixth embodiment is a shape measurement program that can be executed by the processing device, and is focused on the measurement object placed on the stage from above or obliquely from above before the shape measurement. By irradiating the first light for confirmation, and the relative distance between the light receiving unit and the stage is changed in the optical axis direction of the light receiving unit, the relative distance between the light receiving unit and the measurement object is changed. In this case, the first three-dimensional shape showing the three-dimensional shape of the measurement object based on the relative distance between the light receiving unit and the measurement object in a state where the plurality of parts of the measurement object are respectively in focus. Light reception based on the process of generating data, the relative distance between the light receiving unit and the measurement object at the time after the generation of the first three-dimensional shape data and before the shape measurement, and the generated first three-dimensional shape data In the direction of the focal point of the The positional relationship between the measurable range and the measurement object is calculated, and at the time of shape measurement, at least a part of the measurement object is within the measurable range in the optical axis direction of the light receiving unit based on the calculated positional relationship. Adjust the relative distance between the light receiving unit and the measurement target so that it is positioned, and place it on the stage with at least a part of the measurement target positioned within the measurable range in the optical axis direction of the light receiving unit. The measured measurement object is irradiated with the second light for shape measurement obliquely from above, the light reflected by the measurement object is received by the light receiving unit, and the triangulation is performed based on the light reception signal output from the light receiving unit. The processing device executes processing for generating second solid shape data indicating the solid shape of the measurement object by the distance method.
According to the shape measurement program, when the first light is irradiated onto the measurement object before the shape measurement and the relative distance between the light receiving unit and the measurement object is changed, a plurality of measurement objects are measured. Based on the relative distance between the light receiving unit and the measurement target in a state where the light receiving unit is focused on each part, first three-dimensional shape data indicating the three-dimensional shape of the measurement target is generated.
Based on the relative distance between the light receiving unit and the measurement object after the generation of the first three-dimensional shape data and before the shape measurement, and the focus of the light receiving unit or the light receiving unit based on the generated first three-dimensional shape data. The positional relationship between the measurable range in the optical axis direction and the measurement object is calculated.
Thereafter, at the time of shape measurement, the relative relationship between the light receiving unit and the measurement target is set so that at least a part of the measurement target is located within the measurable range in the optical axis direction of the light receiving unit based on the calculated positional relationship. The distance is adjusted. In a state where at least a part of the measurement object is located within a measurable range in the optical axis direction of the light receiving unit, the second light is irradiated onto the measurement object, and the light reflected by the measurement object is received by the light receiving unit. Received light. Based on the light reception signal output from the light receiving unit, second solid shape data indicating the three-dimensional shape of the measurement object is generated with high accuracy by the triangulation method.
In this case, the relative distance between the light receiving unit and the measurement target is automatically adjusted so that at least a part of the measurement target is located within a measurable range in the optical axis direction of the light receiving unit. Therefore, the user can appropriately and easily position the measuring object within the range measurable by the focal point of the light receiving unit or the light receiving unit.

  The present invention can be effectively used for various shape measuring apparatuses, shape measuring methods, and shape measuring programs.

DESCRIPTION OF SYMBOLS 100 Measurement part 110,110A, 110B Light projection part 111 Measurement light source 112 Pattern generation part 113-115,122,123 Lens 120 Light reception part 121,121A, 121B Camera 121a Image pick-up element 124 Half mirror 130 Illumination light output part 140 Stage 141 X -Y stage 142 Z stage 143 θ stage 144 Tilt stage 145 Stage operation unit 146 Stage drive unit 150, 310 Control board 200 PC
210 CPU
220 ROM
230 Working Memory 240 Storage Device 250 Operation Unit 300 Control Unit 320 Illumination Light Source 400 Display Unit 410 First Display Area 420 Second Display Area 430 Third Display Area 431 Upper Limit Display Unit 432 Center Display Unit 433 Width Display Unit 434 Lower limit display section 440 All-focus texture image display area 441 Line segment 450 Profile shape display area 451 Surface shape 452 Upper limit line 453 Lower limit line 454 Focal line 460 Object display area 470 Button display area 471 Specify button 472 OK button 473 Cancel button 491 492 Image display area 493, 494 Light quantity setting bar 493s, 494s, 572s Slider 500 Shape measuring device 550 Image display area 550a, 550b, 550c Image display area 570, 580 Setting change area 571 Brightness Selection field 572 Brightness setting bar 573 Display switching field 574 Magnification switching field 575 Magnification selection field 576 Focus adjustment field 572s Slider 580A Microscope mode selection tab 580B Shape measurement mode selection tab 581 Tool selection field 581a Measurement tool display field 581b Auxiliary tool display field 582 Shooting button 583 Measurement button 584 Texture image selection field 584a, 584b, 584c Check box BC Lower limit cursor BL, BLS Lower limit plane CU, UCU, BCU cursor
DF measurable range FC focal line FL focal plane FS appropriate plane MD distance RS focal plane RF solid line S measurement object SH1, SH2, SH3 top surface Sh hole Ss shadow TF dotted line UC upper limit cursor UL, ULS upper limit plane Zc1 Average position

Claims (19)

A stage on which a measurement object is placed;
A first light projecting unit configured to irradiate the measurement object placed on the stage with illumination light having a uniform light amount distribution from above;
A second light projecting unit configured to irradiate the measurement object placed on the stage a plurality of times with measurement light having different patterns from obliquely above;
It receives light reflected by the measurement object placed on the stage and placed on the stage, outputs a received light signal indicating the amount of received light, and images the measurement object placed on the stage. A light receiving portion configured to:
A relative distance changing unit that changes a relative distance between the light receiving unit and the measurement object by changing a relative distance between the light receiving unit and the stage in an optical axis direction of the light receiving unit;
When the measurement light is irradiated from the second light projecting unit to the measurement object, the measurement can be performed in the optical axis direction of the light receiving unit by the triangulation method based on the light reception signal output from the light receiving unit. A main three-dimensional shape data generating unit that generates main three-dimensional shape data indicating at least a part of the three-dimensional shape of the measurement object in a range of 1;
The measurement object by the light receiving unit is irradiated with the illumination light from the first light projecting unit and the relative distance changing unit changes the relative distance between the light receiving unit and the measurement target. Is performed a plurality of times to generate a plurality of image data based on the received light signal output from the light receiving unit for each imaging, and a plurality of portions of the measurement object based on the generated plurality of image data And obtaining a relative distance between the light receiving unit and the measurement object in a state where the light receiving unit is in focus, and based on the acquired distance, the first range in the optical axis direction of the light receiving unit. A sub-stereoscopic shape data generation unit capable of generating sub-stereoscopic shape data indicating the three-dimensional shape of the measurement object in a second range that is greater than
A display unit that displays an image of the measurement object based on the sub-stereoscopic shape data as an in-focus confirmation image;
Before generating the main three-dimensional shape data, the first light projecting unit, the light receiving unit, the relative distance changing unit, and the sub three-dimensional shape data generating unit are controlled so as to generate sub three-dimensional shape data. After the generation of the shape data, the first range in the optical axis direction of the light receiving unit or the focus of the light receiving unit based on the relative distance between the light receiving unit and the measurement object and the generated sub-stereoscopic shape data And calculating the positional relationship between the measurement object and the object to be measured, and controlling the display unit to display the focus confirmation image so that the calculated positional relationship can be identified, and after displaying the focus confirmation image, A shape measuring apparatus comprising: a control unit that controls the second light projecting unit, the light receiving unit, and the main three-dimensional shape data generating unit so as to generate main three-dimensional shape data. The controller is configured to display main stereoscopic shape data in a state where a part of the plurality of portions of the measurement object is located within the first range in the optical axis direction of the light receiving unit after the focus confirmation image is displayed. After controlling the second light projecting unit, the light receiving unit, and the main three-dimensional shape data generating unit, the relative distance changing unit is controlled to make the relative relationship between the light receiving unit and the measurement object. By changing the distance, the second light projecting unit generates the main stereoscopic shape data in a state in which the other part of the plurality of parts is located within the first range in the optical axis direction of the light receiving unit. The shape measuring apparatus according to claim 1, wherein the light receiving unit and the main three-dimensional shape data generating unit are controlled to synthesize main three-dimensional shape data corresponding to a part of the plurality of parts and another part. A designation operation unit operated by a user to designate at least a part of the plurality of portions of the measurement target on the in-focus confirmation image displayed on the display unit after the generation of the sub-stereoscopic shape data Further comprising
When at least a part of the plurality of parts of the measurement object is designated by the designation operation unit, the control unit has a range of the part designated by the designation operation unit in the optical axis direction of the light receiving unit. It is determined whether or not it is equal to or less than the first range in the optical axis direction of the light receiving unit, and the range of the specified portion in the optical axis direction of the light receiving unit is the first range in the optical axis direction of the light receiving unit. The relative distance changing unit is controlled so that the specified portion is located within the first range in the optical axis direction of the light receiving unit when the range is equal to or less than the range, and the specified portion is the light receiving unit The second light projecting unit, the light receiving unit, and the main three-dimensional shape data generating unit are controlled so as to generate main three-dimensional shape data in a state of being located within the first range in the optical axis direction of 1 or 2 shape Constant apparatus. An operation command receiving unit that receives an operation command of the relative distance changing unit for changing a relative distance between the light receiving unit and the stage;
The control unit responds to an operation command in which a relative distance between the light receiving unit and the stage is received in response to reception of the operation command by the operation command receiving unit when the in-focus confirmation image is displayed. The relative distance changing unit can be controlled so as to change by the distance to be changed, and the focal point of the light receiving unit or the optical axis direction of the light receiving unit at the time when the relative distance between the light receiving unit and the stage changes. 4. The display unit according to claim 1, wherein the display unit is controlled so that a positional relationship image indicating a first range is displayed at a corresponding position on the in-focus confirmation image as the calculated positional relationship. The shape measuring device according to item. A stage on which a measurement object is placed;
A first light projecting unit configured to irradiate the measurement object placed on the stage with illumination light having a uniform light amount distribution from above;
A second light projecting unit configured to irradiate the measurement object placed on the stage a plurality of times with measurement light having different patterns from obliquely above;
It receives light reflected by the measurement object placed on the stage and placed on the stage, outputs a received light signal indicating the amount of received light, and images the measurement object placed on the stage. A light receiving portion configured to:
A relative distance changing unit that changes a relative distance between the light receiving unit and the measurement object by changing a relative distance between the light receiving unit and the stage in an optical axis direction of the light receiving unit;
When the measurement light is irradiated from the second light projecting unit to the measurement object, the measurement can be performed in the optical axis direction of the light receiving unit by the triangulation method based on the light reception signal output from the light receiving unit. A main three-dimensional shape data generating unit that generates main three-dimensional shape data indicating at least a part of the three-dimensional shape of the measurement object in a range of 1;
The measurement object by the light receiving unit is irradiated with the illumination light from the first light projecting unit and the relative distance changing unit changes the relative distance between the light receiving unit and the measurement target. Is performed a plurality of times to generate a plurality of image data based on the received light signal output from the light receiving unit for each imaging, and a plurality of portions of the measurement object based on the generated plurality of image data The first distance in the optical axis direction of the light receiving unit is acquired based on the acquired distance, and a relative distance between the light receiving unit and the measurement object in a state where each of the light receiving units is in focus is acquired. A sub-stereoscopic shape data generation unit capable of generating sub-stereoscopic shape data indicating the three-dimensional shape of the measurement object in a second range larger than
Before generating the main three-dimensional shape data, the first light projecting unit, the light receiving unit, the relative distance changing unit, and the sub three-dimensional shape data generating unit are controlled so as to generate sub three-dimensional shape data. After the generation of the shape data, the first range in the optical axis direction of the light receiving unit or the focus of the light receiving unit based on the relative distance between the light receiving unit and the measurement object and the generated sub-stereoscopic shape data And the relative distance so that at least a part of the measurement object is located within the first range in the optical axis direction of the light receiving unit based on the calculated positional relation. The second light projection is performed so as to generate the main stereoscopic shape data in a state in which at least a part of the measurement object is located within the first range in the optical axis direction of the light receiving unit. And the light receiving unit And a control unit for controlling the fine the main stereoscopic shape data generation unit, the shape measuring device. The control unit determines whether a range of the plurality of portions of the measurement object in the optical axis direction of the light receiving unit is equal to or less than the first range in the optical axis direction of the light receiving unit, and the light receiving unit When the range of the plurality of parts in the optical axis direction is equal to or less than the first range in the optical axis direction of the light receiving unit, the plurality of parts are within the first range in the optical axis direction of the light receiving unit. The relative distance changing unit is controlled so as to be positioned at the second position, and the second three-dimensional shape data is generated in a state where the plurality of portions are positioned within the first range in the optical axis direction of the light receiving unit. The shape measuring device according to claim 5, which controls the light projecting unit, the light receiving unit, and the main three-dimensional shape data generating unit. When the range of the plurality of portions in the optical axis direction of the light receiving unit is larger than the first range in the optical axis direction of the light receiving unit, a part of the plurality of portions is the light receiving unit. The relative distance changing unit is controlled so as to be located within the first range in the optical axis direction, and a part of the plurality of portions is located within the first range in the optical axis direction of the light receiving unit. The second light projecting unit, the light receiving unit, and the main three-dimensional shape data generating unit are controlled so as to generate main three-dimensional shape data in a state, and the other parts of the plurality of portions are in the optical axis direction of the light receiving unit. The relative three-dimensional shape is controlled in such a manner that the relative distance changing portion is controlled to be located within the first range, and the other portions of the plurality of portions are located within the first range in the optical axis direction of the light receiving portion. The second light projecting unit so as to generate data; Light unit and controls the main stereoscopic shape data generating unit synthesizes the main stereoscopic shape data corresponding to a part and other part of the plurality of portions, the shape measuring apparatus according to claim 6, wherein. A display unit that displays an image of the measurement object based on the sub-stereoscopic shape data as an in-focus confirmation image;
A designation operation unit operated by a user to designate at least a part of the plurality of portions of the measurement target on the in-focus confirmation image displayed on the display unit after the generation of the sub-stereoscopic shape data And further comprising
When at least a part of the plurality of parts of the measurement object is designated by the designation operation unit, the control unit has a range of the part designated by the designation operation unit in the optical axis direction of the light receiving unit. It is determined whether or not it is equal to or less than the first range in the optical axis direction of the light receiving unit, and the range of the specified portion in the optical axis direction of the light receiving unit is the first range in the optical axis direction of the light receiving unit. The relative distance changing unit is controlled so that the specified portion is located within the first range in the optical axis direction of the light receiving unit when the range is equal to or less than the range, and the specified portion is the light receiving unit The second light projecting unit, the light receiving unit, and the main three-dimensional shape data generating unit are controlled so as to generate main three-dimensional shape data in a state of being located within the first range in the optical axis direction of Any one of 5-7 Shape measuring apparatus according. When the range of the specified portion in the optical axis direction of the light receiving unit is larger than the first range in the optical axis direction of the light receiving unit, the control unit determines that a part of the specified portion is The relative distance changing unit is controlled so as to be located within the first range in the optical axis direction of the light receiving unit, and a part of the designated portion is within the first range in the optical axis direction of the light receiving unit. The second light projecting unit, the light receiving unit, and the main three-dimensional shape data generating unit are controlled so as to generate main three-dimensional shape data in a state of being located at The relative distance changing unit is controlled so as to be located within the first range in the optical axis direction, and the other part of the designated portion is located within the first range in the optical axis direction of the light receiving unit. Before generating the main 3D shape data in the state The second light projecting portion, the light receiving unit and controls the main stereoscopic shape data generating unit synthesizes the main stereoscopic shape data corresponding to a part and other part of the designated portions, according to claim 3 or 8, wherein Shape measuring device.   The shape measuring apparatus according to claim 1, further comprising a range setting unit that sets the second range in the optical axis direction of the light receiving unit. The measurement object placed on the stage has a height in the optical axis direction of the light receiving unit,
The said range setting part sets the said 2nd range so that the range from the upper limit of the measuring object in the optical axis direction of the said light-receiving part to the minimum may be included at the time of the production | generation of substereoscopic shape data. Shape measuring device.   When the sub-stereoscopic shape data is generated, the control unit is configured such that the relative distance between the light receiving unit and the measurement target changes, so that the light receiving unit is focused on all parts of the measurement target. The sub-stereoscopic shape data generation unit is controlled such that the sub-stereoscopic shape data indicating the entire three-dimensional shape of the measurement object is generated. The shape measuring apparatus according to one item. The plurality of image data generated by the sub-stereoscopic shape data generation unit is texture image data indicating a state of the surface of the measurement object,
The controller combines the texture image data with the generated main three-dimensional shape data after generating the main three-dimensional shape data, so that the state of the surface of the measurement object is combined with the three-dimensional shape of the measurement object. The shape measuring device according to any one of claims 1 to 12, which generates composite data indicating a captured image.   The control unit generates the main stereoscopic shape data generated based on the main stereoscopic shape data generated by the main stereoscopic shape data generation unit and the sub stereoscopic shape data generated by the sub stereoscopic shape data generation unit. Among these, the portion corresponding to the region where the shape of the measurement object cannot be measured accurately is determined as a defective portion, and the data determined as the defective portion is used using the data of the corresponding portion of the sub-stereoscopic shape data. The shape measuring apparatus according to claim 1, wherein the shape measuring apparatus is replaced or complemented. The control unit generates the main stereoscopic shape data generated based on the main stereoscopic shape data generated by the main stereoscopic shape data generation unit and the sub stereoscopic shape data generated by the sub stereoscopic shape data generation unit. the low reliability portion was determined as reduction in reliability portion of a substituted or complemented with data of the corresponding portion of the is determined that the reliability decreases partial data the sub-stereoscopic shape data, claim 1 The shape measuring device according to claim 14. A light receiving signal output from the light receiving unit by irradiating the measurement target mounted on the stage with measurement light having different patterns from obliquely above a plurality of times, and receiving the light reflected by the measurement target by the light receiving unit. A step of generating main three-dimensional shape data indicating a three-dimensional shape of at least a part of the measurement object in a first range measurable in the optical axis direction of the light receiving unit by a triangulation method;
Before generating the main three-dimensional shape data, the measurement object placed on the stage is irradiated with illumination light having a uniform light amount distribution from above, and the relative distance between the light receiving unit and the stage is received. A plurality of image data are generated based on the light reception signal output from the light receiving unit for each imaging by performing imaging of the measurement object by the light receiving unit a plurality of times while changing in the optical axis direction of the unit. Based on the plurality of image data, obtain a relative distance between the light receiving unit and the measurement target in a state where the light receiving unit is focused on a plurality of parts of the measurement target, and based on the acquired distance Generating sub-stereoscopic shape data indicating the three-dimensional shape of the measurement object in a second range larger than the first range in the optical axis direction of the light receiving unit;
After the generation of the sub stereoscopic shape data and before the generation of the main stereoscopic shape data, based on the relative distance between the light receiving portion and the measurement object and the generated sub stereoscopic shape data, The positional relationship between the first range and the measurement object in the optical axis direction of the light receiving unit is calculated, and the image of the measurement object based on the sub-stereoscopic shape data is confirmed to be in focus so that the calculated positional relationship can be identified And displaying the image on the display unit as an image for use. A light receiving signal output from the light receiving unit by irradiating the measurement target mounted on the stage with measurement light having different patterns from obliquely above a plurality of times, and receiving the light reflected by the measurement target by the light receiving unit. A step of generating main three-dimensional shape data indicating a three-dimensional shape of at least a part of the measurement object in a first range measurable in the optical axis direction of the light receiving unit by a triangulation method;
Before generating the main three-dimensional shape data, the measurement object placed on the stage is irradiated with illumination light having a uniform light amount distribution from above, and the relative distance between the light receiving unit and the stage is received. A plurality of image data are generated based on the light reception signal output from the light receiving unit for each imaging by performing imaging of the measurement object by the light receiving unit a plurality of times while changing in the optical axis direction of the unit. Based on the plurality of image data, obtain a relative distance between the light receiving unit and the measurement target in a state where the light receiving unit is focused on a plurality of parts of the measurement target, and based on the acquired distance Generating sub-stereoscopic shape data indicating the three-dimensional shape of the measurement object in a second range larger than the first range in the optical axis direction of the light receiving unit;
After the generation of the sub stereoscopic shape data and before the generation of the main stereoscopic shape data, based on the relative distance between the light receiving portion and the measurement object and the generated sub stereoscopic shape data, Calculating the positional relationship between the first range and the measurement object in the optical axis direction of the light receiving unit,
In the step of generating the main stereoscopic shape data, at least a part of the measurement object is within the first range in the optical axis direction of the light receiving unit based on the positional relationship calculated by the step of calculating the positional relationship. Adjusting the relative distance between the light receiving unit and the measurement target so as to be positioned, and then in a state where at least a part of the measurement target is located within the first range in the optical axis direction of the light receiving unit, A shape measurement method comprising irradiating the measurement object with the measurement light a plurality of times. A shape measurement program executable by a processing device,
A light receiving signal output from the light receiving unit by irradiating the measurement target mounted on the stage with measurement light having different patterns from obliquely above a plurality of times, and receiving the light reflected by the measurement target by the light receiving unit. A process of generating main three-dimensional shape data indicating a three-dimensional shape of at least a part of the measurement object in a first range measurable in the optical axis direction of the light receiving unit by a triangulation method;
Before generating the main three-dimensional shape data, the measurement object placed on the stage is irradiated with illumination light having a uniform light amount distribution from above, and the relative distance between the light receiving unit and the stage is received. A plurality of image data are generated based on the light reception signal output from the light receiving unit for each imaging by performing imaging of the measurement object by the light receiving unit a plurality of times while changing in the optical axis direction of the unit. Based on the plurality of image data, obtain a relative distance between the light receiving unit and the measurement target in a state where the light receiving unit is focused on a plurality of parts of the measurement target, and based on the acquired distance Processing for generating sub-stereoscopic shape data indicating the three-dimensional shape of the measurement object in a second range larger than the first range in the optical axis direction of the light receiving unit;
After the generation of the sub stereoscopic shape data and before the generation of the main stereoscopic shape data, based on the relative distance between the light receiving portion and the measurement object and the generated sub stereoscopic shape data, The positional relationship between the first range and the measurement object in the optical axis direction of the light receiving unit is calculated, and the image of the measurement object based on the sub-stereoscopic shape data is confirmed to be in focus so that the calculated positional relationship can be identified A shape measurement program for causing the processing device to execute processing for displaying on a display unit as an image for use. A shape measurement program executable by a processing device,
A light receiving signal output from the light receiving unit by irradiating the measurement target mounted on the stage with measurement light having different patterns from obliquely above a plurality of times, and receiving the light reflected by the measurement target by the light receiving unit. A process of generating main three-dimensional shape data indicating a three-dimensional shape of at least a part of the measurement object in a first range measurable in the optical axis direction of the light receiving unit by a triangulation method;
Before generating the main three-dimensional shape data, the measurement object placed on the stage is irradiated with illumination light having a uniform light amount distribution from above, and the relative distance between the light receiving unit and the stage is received. A plurality of image data are generated based on the light reception signal output from the light receiving unit for each imaging by performing imaging of the measurement object by the light receiving unit a plurality of times while changing in the optical axis direction of the unit. Based on the plurality of image data, obtain a relative distance between the light receiving unit and the measurement target in a state where the light receiving unit is focused on a plurality of parts of the measurement target, and based on the acquired distance Processing for generating sub-stereoscopic shape data indicating the three-dimensional shape of the measurement object in a second range larger than the first range in the optical axis direction of the light receiving unit;
After the generation of the sub stereoscopic shape data and before the generation of the main stereoscopic shape data, based on the relative distance between the light receiving portion and the measurement object and the generated sub stereoscopic shape data, a form measuring program order to execute the processing for calculating the positional relationship between the first range and the measurement object in the optical axis direction of the light receiving portion to the processing unit,
In the process of generating the main three-dimensional shape data, at least a part of the measurement object is within the first range in the optical axis direction of the light receiving unit based on the positional relationship calculated by the process of calculating the positional relationship. Adjusting the relative distance between the light receiving unit and the measurement target so as to be positioned, and then in a state where at least a part of the measurement target is located within the first range in the optical axis direction of the light receiving unit, A shape measurement program comprising irradiating a measurement object with the measurement light a plurality of times.

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