JP5956112B2 - Cutting equipment - Google Patents

Description

  The present invention relates to a cutting apparatus that cuts a workpiece using a rotating cutting blade.

  A wafer formed on the surface by dividing a plurality of devices such as IC and LSI by a division line is divided into individual devices by a cutting machine equipped with a rotatable cutting blade, and is used for various electronic devices. Yes.

  The cutting apparatus includes a holding unit that holds a workpiece and a cutting unit that is configured by mounting a cutting blade on a spindle, and the holding unit and the cutting unit are relatively moved in a processing feed direction and an index feed direction. Thus, cutting is performed by cutting into a workpiece by a cutting blade that rotates while the holding unit and the cutting unit move relative to each other in the processing feed direction, and is divided into individual chips.

  However, when the wafer held by the holding means and the cutting blade vibrate due to the vibration of the cutting means due to the rotation of the spindle, there is a problem that many chips are generated in the cutting groove and the quality of the device is lowered. .

  Therefore, the present applicant has developed a technology for shifting the resonance point by attaching a weight to the cutting means so that the cutting means does not resonate with vibration caused by rotation of the spindle, and applied for a patent (see Patent Document 2). .

JP 2001-298002 A JP 2010-188433 A

  However, in the factory where the cutting device is installed, inherent vibration occurs, and even if the manufacturer that manufactures the cutting device is equipped with an appropriate weight and shifts the resonance point, the environment of the factory or the like where the cutting device is installed There is a problem that vibrations occur in the cutting device in combination with vibrations caused by.

  The present invention is to provide a cutting apparatus that does not resonate with vibrations caused by the environment in which the cutting apparatus is installed even if such a problem is considered.

The present invention relates to a holding means for holding a workpiece, a cutting means having a cutting blade for cutting the workpiece held by the holding means, and cutting for relatively cutting and feeding the holding means and the cutting means. The present invention relates to a cutting apparatus including a feeding means, and an indexing feeding means for relatively indexing and feeding the holding means and the cutting means, the holding means having a holding surface for holding a workpiece, and a holding table A support base coupled to the support base, a fixed base that rotatably supports the support base, a drive unit that rotates the support base, and a weight unit that is mounted on the support base and suppresses vibrations. The base includes a cylindrical portion formed in a cylindrical shape and a convex portion protruding upward, and the weight portion can be attached to or detached from either or both of the cylindrical portion and the outer peripheral side of the convex portion.
A frame fixing portion for fixing a frame that supports the workpiece is provided on the outer peripheral side of the holding table. The frame fixing portion includes a guide bar that extends in the radial direction of the support base. It is good to provide the through-hole for making it fit in a part, and the notch part for avoiding a contact with a guide bar.
Further, the weight portion may be constituted by two half ring-shaped members, and the two half ring-shaped members may be fixed to each other so as to be attached to the cylinder portion in a ring shape.

  In the present invention, since the weight portion is mounted on the support base constituting the holding means for holding the workpiece, the vibration caused by the rotation of the spindle and the vibration caused by the environment of the factory where the cutting apparatus is installed are combined. The resonance point can be shifted so as not to resonate with the generated vibration. Accordingly, it is possible to prevent the workpiece from being chipped and the quality from being deteriorated. Moreover, since it can select from the weight part which has 2 or more types of weight, a resonance point can be shifted according to the environment of the user of a cutting device.

It is a perspective view which shows an example of the external appearance of a cutting device. It is a perspective view which shows an example of the internal structure of a cutting device. It is a disassembled perspective view which shows an example of a structure of a holding means. It is sectional drawing which shows a holding table, a frame fixing | fixed part, a support base, a fixed base, and a cover member schematically. It is sectional drawing which shows a holding means schematically. It is a perspective view which shows the 1st example of a weight part, and a holding means. It is a perspective view which shows the state which mounted | wore the holding means with the weight part of the 1st example. It is a perspective view which shows the 2nd example of a weight part, and a holding means. It is a perspective view which shows the state which mounted | wore the holding means with the weight part of the 2nd example.

  A cutting apparatus 1 shown in FIG. 1 is an apparatus that performs cutting with a cutting means 3 on a workpiece held by a holding means 2.

  On the front side of the cutting apparatus 1, a cassette 40 that houses a workpiece is placed. In addition, a loading / unloading means 41 for unloading the workpiece from the cassette 40 and loading the workpiece into the cassette 40 is disposed behind the cassette 40. A temporary placement area 42 is provided between the cassette 40 and the carry-in / out means 41, and workpieces are unloaded from the cassette 40 and carried into the cassette 40 by the carry-in / out means 41 via the temporary placement area 42. Done.

  In the vicinity of the temporary placement area 42, first transport means 43a for transporting the workpiece between the temporary placement area 42 and the holding means 2 is disposed.

  The holding means 2 moves in a horizontal direction between an attachment / detachment area A where the workpiece is attached / detached by the first conveying means 43a and a cutting area B where the workpiece is cut by the cutting means 3. It is possible. Hereinafter, the moving direction of the holding means 2 is assumed to be the X direction.

  Above the movement path of the holding means 2, an imaging means 44 for imaging and detecting the position where the workpiece is to be cut is disposed.

  The cutting means 3 is disposed in the cutting region B, and includes a rotatable cutting blade 31 attached to the tip of the spindle 30 and a cutting water nozzle 32 that supplies cutting water to the workpiece during cutting. ing.

  On the rear side of the attachment / detachment region A, cleaning means 45 for cleaning the workpiece after cutting is disposed. Above the cleaning means 45, a second transport means 43b for transporting the workpiece from the holding means 2 to the cleaning means 45 is disposed. The direction of horizontal movement of the second transport means 43b is a direction perpendicular to the X direction in the horizontal direction, and this direction is the Y direction. A direction orthogonal to the X direction and the Y direction is taken as a Z direction.

  As shown in FIG. 2, the holding means 2 is driven in the cutting direction (X direction in FIG. 1) by the cutting feed means 5. On the other hand, the cutting means 3 is driven in the index feed direction (Y direction in FIG. 1) by the index feed means 6 and driven in the cut feed direction (Z direction in FIG. 1) by the cut feed means 7. ing. The cutting feed means 5, the index feed means 6 and the cutting feed means 7 are only required to be able to relatively cut, feed and cut the holding means 2 and the cutting means 3, respectively. It is not limited to. Therefore, for example, the cutting feed unit may move the cutting unit 3 in the X direction, the index feeding unit may move the holding unit 2 in the Y direction, and the cutting feed unit may move the holding unit 2 in the Z direction.

  The cutting feed means 5 includes a ball screw 50 having an axis in the X-axis direction, a pair of guide rails 51 arranged in parallel to the ball screw 50, a servo motor 52 connected to one end of the ball screw 50, and the ball screw 50. A base portion 53 having a nut (not shown) to be screwed therein and a lower portion in sliding contact with the guide rail 51 is driven, and the base portion 53 is moved to the guide rail as the ball screw 50 is rotated by being driven by the servo motor 52. 51 is slid in the X-axis direction, and the holding means 2 moves in the X-axis direction along with this.

  The index feeding means 6 includes a ball screw 60 having an axis in the Y-axis direction, a pair of guide rails 61 arranged in parallel to the ball screw 60, a servo motor 62 connected to one end of the ball screw 60, and the ball screw 60. It has a nut (not shown) that is screwed inside, and a lower portion is composed of a slide portion 63 that is slidably contacted with the guide rail 61. The slide portion 63 is driven by the servo motor 62 and the ball screw 60 is rotated. 61 is slid in the Y-axis direction, and the cutting means 3 is also moved in the Y-axis direction along with this.

  The cutting feed means 7 includes a ball screw 70 having an axis in the Z-axis direction, a pair of guide rails 71 disposed in parallel to the ball screw 70, a servo motor 72 connected to one end of the ball screw 70, and the ball screw 70. It has an internal nut (not shown) that is screwed together, and a side portion is formed by an elevating portion 73 that is in sliding contact with the guide rail 71 and supports the cutting means 3, and is driven by the servo motor 72 to rotate the ball screw 70. The support portion 73 is guided by the guide rail 71 and moves up and down in the Z-axis direction, and accordingly, the cutting means 3 is also moved up and down in the Z-axis direction.

  As shown in FIGS. 3 and 4, the holding means 2 rotates a holding table 20 having a holding surface 20 a for holding a workpiece, a support base 21 connected to the holding table 20, and the support base 21. A fixed base 22 that supports the support base 21 and a drive unit 23 that rotates the support base 21 and rotates the workpiece held on the holding table 20 are provided. A plurality of frame fixing portions 24 for fixing a frame that supports the workpiece are disposed on the outer peripheral side of the holding table 20.

  As shown in FIG. 4, an umbrella portion 26 is fixed to the upper portion of the support base 21 via a ring-shaped ceramic plate 25. The umbrella portion 26 includes a convex portion 260 that protrudes upward, and a cover portion 261 whose end portion protrudes outward and the end portion hangs downward.

  The frame fixing part 24 is fixed to the umbrella part 26. Each frame fixing portion 24 includes a pair of guide bars 240 extending in the radial direction of the support base 21 and a movable portion 241 movable along the guide bars 240. The movable portion 241 includes a sliding portion 241a that is formed in a flat upper portion and slides on the guide bar 240, and a rotating portion 241b that can rotate with respect to the 241a.

  As shown in FIG. 4, the upper portion of the holding table 20 is formed of a porous member, and a suction path 20b communicating with the holding surface 20a is formed inside the holding table 20. The suction path 20b communicates with an air flow path 26a formed inside the umbrella 26, and the air flow path 26a communicates with a rotary joint 27 that communicates with a suction source (not shown).

  As shown in FIG. 4, the support base 21 includes a cylindrical portion 210 formed in a cylindrical shape, and a hollow portion 211 is formed on the inner peripheral side thereof. A protruding portion 212 having a diameter larger than the cylindrical portion 210 on the outer peripheral side is formed at the central portion in the vertical direction of the cylindrical portion 210. A bearing housing portion 213 for housing the bearing is formed on the inner peripheral surface of the cylindrical portion 210.

  From the upper end of the cylinder part 210, the collar part 214 is formed in the state which faced the inner peripheral side. A rotary scale 215 is fixed to the lower surface of the collar portion 214. On the other hand, a driven pulley 216 around which a driving belt is wound is formed at the lower end of the cylindrical portion 210.

The support base 21 is inserted into a through hole 217 a formed in the cover member 217. Also,
The fixed base 22 is accommodated in the hollow portion 211.

  The upper part of the projecting part 212 constitutes a cylindrical first small-diameter part 218 a having a smaller diameter than the projecting part 212, and the lower part of the projecting part 212 and the upper part of the driven pulley 216 are from the projecting part 212. This also constitutes a cylindrical second small diameter portion 218b having a small diameter.

  As shown in FIGS. 4 and 5, the fixed base 22 is formed in a cylindrical shape and is fixed to the base portion 53 of the cutting feed means 5 shown in FIG. A scale head 220 facing the rotary scale 215 is disposed on the upper surface of the fixed base 22, and a bearing accommodating portion 221 for accommodating a bearing is formed on the outer peripheral surface of the fixed base 22. As shown in FIGS. 3 and 5, support bars 530 extending upward are formed to protrude from the four corners of the base portion 53. The support bar 530 supports the cover member 217 from below. In FIG. 3, only one support bar 530 is shown. In FIG. 4, the support rod 530 is not shown.

  The drive unit 23 is also disposed on the base unit 53. The drive unit 23 includes a servo motor 230, a drive pulley 231 connected to the servo motor 230, and a belt 232 shown in FIG. The belt 232 is wound around the driven pulley 216 of the support base 21.

  As shown in FIG. 5, a bearing 28 is accommodated in a space formed between the bearing accommodating portions 213 and 221, and the fixed base 22 rotatably supports the support base 21 via the bearing 28.

  As shown in FIG. 6, when the holding table 20 is removed from the support base 21, the umbrella part 26 is exposed. Then, the weight part 10 can be placed on the exposed umbrella part 26. The weight portion 10 includes a main body portion 100 having a predetermined weight and a mounting portion 101 that is mounted on the support base 21. A plurality of types of weight portions 10 including body portions 100 having various weights are prepared.

  The mounting portion 101 includes a through hole 101a for fitting with the convex portion 260 and a notch portion 101b for avoiding contact with the guide bar 240 constituting the frame fixing portion 24. The notch 101b is formed with a clearance groove 101c for accommodating the guide bar 240 constituting the frame fixing part 24. In addition, the weight portion 10 is formed with a connecting hole 101d for inserting a bolt for connecting the plurality of weight portions 10 and a screw hole 101e for passing a bolt for fixing the weight portion 10 to the support base 21. ing. A female screw hole 26b is formed in the support base 21 at a position corresponding to the screw hole 101e, and the weight 10 is supported by screwing a bolt inserted into the screw hole 101e into the female screw hole 26b. It can be fixed to the base 21.

  One or two or more weight parts 10 can be placed on the umbrella part 26. In a state where the weight part 10 is placed, the convex part 260 is fitted into the through hole 101a. Since the through hole 101a is provided in the weight part 10 and the convex part 260 is fitted into the through hole 101a, the weight part 10 is formed in the air flow path 26a (see FIGS. 4 and 5) formed in the convex part 260. Therefore, even if the weight 10 is mounted on the support base 21, the workpiece can be held by applying a suction force to the holding surface 20a via the air flow path 26a.

  A cutout portion 101b is formed in the weight portion 10, and a relief groove 101c for accommodating the guide bar 240 is formed in the cutout portion 101b, so that the weight portion 10 is attached to the umbrella portion 26 as shown in FIG. In this case, since the weight portion 10 does not rest on the guide bar 240, the mounting state of the weight portion 10 on the support base 21 is stabilized. When two or more weight parts 10 are mounted, the two or more weight parts 10 are stacked on the support base 21.

  As shown in FIG. 8, a weight portion 10 a made up of two half-ring members 11 can also be used. Each half ring-shaped member 11 includes a main body portion 110 formed in a half ring shape, and a flat surface portion 111 projecting in the normal direction from an end portion of the main body portion 110. A hole is formed. As shown in FIG. 8, when the flat portions 111 face each other and are fixed by screws 112, a ring-shaped weight portion 10a is formed. As shown in FIG. 9, the weight portion 10a may be wound and fixed around the second small diameter portion 218b of the support base 21, or may be fixed around the first small diameter portion 218a. .

  Further, the weight portion 10 shown in FIGS. 6 and 7 and the weight portion 10a shown in FIGS. For example, the weight portion 10 can be attached to the first small diameter portion 218a, and the weight portion 10a can be attached to the second small diameter portion 218b.

  As shown in FIG. 1, the workpiece W to be cut is held by the holding means 2 in a state of being attached to the tape T and supported by the ring-shaped frame F. 2 is driven by the cutting feed means 5 shown in FIG. 2, and the holding means 2 is moved in the X-axis direction. The imaging means 44 images the surface of the workpiece and detects the position to be cut. Positioning in the Y-axis direction with the cutting blade 31 is performed. Next, the holding means 2 further moves in the X-axis direction, and the cutting feed means 7 lowers the cutting means 3 while rotating the cutting blade 31 at a high speed, whereby the detected position is cut. Further, the index feeding means 6 performs the same cutting while indexing and feeding the cutting means 3 at predetermined intervals. Further, when the same cutting is performed after the holding means 2 is rotated 90 degrees, the workpiece W is divided into individual chips.

  During cutting performed in this way, vibration is generated in the cutting means 3 due to the rotation of the spindle 30 that rotates the cutting blade 31, and also vibration due to a specific environment such as a factory in which the cutting apparatus 1 is installed, These vibrations are also transmitted to the holding means 2. However, since the natural frequency of the holding means 2 can be adjusted by mounting the weight parts 10 and 10a on the support base 21 of the holding means 2, the weight parts 10 and 10a can be adjusted according to the user's environment. By adjusting the height, the resonance point can be shifted and the occurrence of resonance can be suppressed. By suppressing the resonance in this way, it is possible to prevent the workpiece from being chipped or cracked during cutting.

  As the weight portions 10 and 10a, there are main body portions having two or more kinds of weights, which can be appropriately selected and used. Therefore, the resonance point is shifted in accordance with the environment of the user of the cutting apparatus 1. Can do.

1: Cutting device A: Removable area B: Cutting area 2: Holding means 20: Holding table 20a: Holding surface 20b: Suction path 21: Support base 210: Tube portion 211: Cavity portion 212: Protruding portion 213: Bearing housing portion 214: collar portion 215: rotary scale 216: driven pulley 217: cover member 217a: through hole 218a: first small diameter portion 218b: second small diameter portion 22: fixed base 220: scale head 221: bearing housing portion 23: Drive part 230: Servo motor 231: Drive pulley 232: Belt 24: Frame fixing part 240: Guide bar 241: Movable part 241a: Sliding part 241b: Rotating part 25: Ceramic plate 26: Umbrella part 26a: Air flow path 26b : Female screw hole 260: Convex part 261: Cover part 27: Rotary joint 28: Bearing 3 Cutting means 30: Spindle 31: Cutting blade 32: Cutting water nozzle 40: Cassette 41: Loading / unloading means 42: Temporary storage area 43a: First conveying means 43b: Second conveying means 44: Imaging means 45: Cleaning means 5 : Cutting feed means 50: Ball screw 51: Guide rail 52: Servo motor 53: Base part 530: Support rod 6: Split feed means 60: Ball screw 61: Guide rail 62: Servo motor 63: Slide part 7: Cut feed means 70 : Ball screw 71: Guide rail 72: Servo motor 73: Elevating part 10: Weight part 100: Main body part 101: Mounting part 101a: Through hole 101b: Notch part 101c: Escape groove 101d: Connection hole 101e: Screw hole 10a: Weight Part 11: Semi-ring-shaped member 110: Main body part 111: Plan view 112: Screw

Claims (3)

A holding means for holding a workpiece, a cutting means having a cutting blade for cutting the workpiece held by the holding means, and a cutting feed means for relatively cutting and feeding the holding means and the cutting means And an indexing feeding means for indexing and feeding the holding means and the cutting means relative to each other,
The holding means includes a holding table having a holding surface for holding a workpiece, a support base coupled to the holding table, a fixed base that rotatably supports the support base, and the support base A drive unit that rotates the weight, a weight unit that is attached to the support base and suppresses vibration,
Including
The support base includes a cylindrical portion formed in a cylindrical shape, and a convex portion protruding upward.
The weighting part is a cutting device that can be attached to and detached from either or both of the cylindrical part and the outer peripheral side of the convex part. Provided on the outer peripheral side of the holding table is a frame fixing portion for fixing a frame that supports the workpiece;
The frame fixing portion includes a guide bar extending in a radial direction of the support base,
The cutting device according to claim 1, wherein the weight portion includes a through hole for fitting the convex portion and a notch portion for avoiding contact with the guide bar. The cutting device according to claim 1, wherein the weight portion is configured by two half ring-shaped members, and the two half ring-shaped members are fixed to each other so as to be attached to the cylindrical portion in a ring shape.

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