JP5911699B2 - 電子ビームパルス出射装置および電子顕微鏡 - Google Patents
電子ビームパルス出射装置および電子顕微鏡 Download PDFInfo
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- JP5911699B2 JP5911699B2 JP2011247257A JP2011247257A JP5911699B2 JP 5911699 B2 JP5911699 B2 JP 5911699B2 JP 2011247257 A JP2011247257 A JP 2011247257A JP 2011247257 A JP2011247257 A JP 2011247257A JP 5911699 B2 JP5911699 B2 JP 5911699B2
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- 238000010894 electron beam technology Methods 0.000 title claims description 32
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Description
20 電子バンチ制御部
100 電子源
110 電子バンチ伸張器
120 電子バンチ圧縮器
200 電子ビームパルス出射装置
300 電子顕微鏡
310 電子加速器
320 イメージング部
Claims (5)
- 第1パルスレーザ光を用いて発生させた第1レーザ航跡場によって加速された電子バンチを生成する電子バンチ生成部と、
第2パルスレーザ光を用いて発生させた第2レーザ航跡場によって前記電子バンチを制御する電子バンチ制御部と
を有する電子源と、
前記電子源から発せられた前記電子バンチの時間幅を広げるとともに前記電子バンチのエネルギーの時間分散関係を反転させる電子バンチ伸張器と
を備える、電子ビームパルス出射装置。 - 前記電子バンチ制御部は、前記電子バンチの位相回転を行う、請求項1に記載の電子ビームパルス出射装置。
- 前記第1レーザ航跡場を形成する第1ガス、および前記第2レーザ航跡場を形成する第2ガスを噴出するノズルをさらに備える、請求項1または2に記載の電子ビームパルス出射装置。
- 前記電子バンチ伸張器によって広がった前記電子バンチの時間幅を狭くする電子バンチ圧縮器をさらに備える、請求項1から3に記載の電子ビームパルス出射装置。
- 請求項1から4に記載の電子ビームパルス出射装置を有する電子加速器と、
イメージング部と
を備える、電子顕微鏡。
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Publications (2)
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JP2013105559A JP2013105559A (ja) | 2013-05-30 |
JP5911699B2 true JP5911699B2 (ja) | 2016-04-27 |
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JP (1) | JP5911699B2 (ja) |
Family Cites Families (1)
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JP3879990B2 (ja) * | 2002-05-17 | 2007-02-14 | 独立行政法人放射線医学総合研究所 | スラッシュガスターゲットの製造方法とその装置 |
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