JP5900289B2 - Device manufacturing method and device manufacturing apparatus - Google Patents

Description

  The present invention relates to a method for manufacturing an element using a roll-shaped mold having a fine concavo-convex shape for transferring a pattern such as an optical element, and an element manufacturing apparatus used for manufacturing the element.

  As a manufacturing method for optical films and the like, resin is applied by directly applying a resin composition onto a molding surface along a generatrix of a cylindrical molding die, and supplying a sheet-like support so as to be in contact with the molding surface of the molding die. There exists a product obtained by curing by light irradiation while spreading a composition on a molding surface, and transferring a microstructured surface to a support to obtain a product (see Patent Document 1). In this method, by applying the resin composition in stripes, various groove patterns on a molding surface such as a mesh shape can be transferred onto a support.

  As a method for producing a film having an uneven pattern, a UV curable resin layer is applied thickly on a base film, and the base film is supplied while pressing around the mold roll so as to sandwich the UV curable resin layer. There is one that forms a cured shape transfer layer on a base film by irradiating ultraviolet rays from the back side of the base film wound around (see Patent Document 2). In this method, degassing is ensured by retaining the resin in the meeting portion between the mold roll and the push roll so as to spread from the center to the periphery.

  By the way, when transferring a ring-shaped diffraction pattern such as a circle or an ellipse, bubbles are likely to stop at a specific location such as a groove, bubble defects are likely to occur, and it is not easy to increase the rotation speed of the transfer roll.

JP-T-2004-529791 JP 2006-21538 A

  The present invention has been made in view of the above-described background art, and even when transferring a ring-shaped diffraction pattern, an element manufacturing method and an element An object is to provide a manufacturing apparatus.

In order to achieve the above object, a method for manufacturing an element according to the present invention is a method for manufacturing an element having a diffractive shape, and includes a plurality of transfer portions formed with a plurality of annular grooves for transferring the diffractive shape. The roll-shaped mold is rotated, the resin is supplied onto the roll-shaped mold, and the resin base material is sandwiched between the resin base material and the transfer portion, and the resin base material is pressed against the transfer portion via the resin. A curing process for solidifying the resin by irradiating the resin with curing light and molding an element assembly including a plurality of elements , a mold release process for releasing the element assembly from the roll mold, and an element assembly And a cutting step of cutting out the individual elements from the body, and at least a part of the outer side of the plurality of ring-shaped grooves formed in the transfer portion extends substantially parallel to the rotation axis of the roll-shaped mold. On the side of There spaced, between the transfer section adjacent, is provided with at least the boundary portion is one of a concave and convex shape.

In the manufacturing method described above, at least a part of the outer side of the plurality of ring-shaped grooves formed in the transfer part is separated from the side part of the transfer part. , Bubbles easily escape from the ring-shaped groove to the periphery, and defects in the diffractive shape are less likely to occur. In addition, since the roll-shaped mold has a plurality of transfer portions, it is possible to perform molding or transfer in parallel by the plurality of transfer portions, but trap the bubbles in the concave or convex shape provided at the boundary of the transfer portions. It is possible to suppress the bubbles from remaining in the transfer portion.

  In a specific aspect of the present invention, in the manufacturing method described above, at least a part of the plurality of ring-shaped grooves is separated from the side of the transfer portion that extends substantially parallel to the rotation axis of the roll-shaped mold. . In this case, since the grooves are separated on the terminal side in the resin flow direction, the removal of the bubbles is ensured.

  In another aspect of the present invention, the plurality of ring-shaped grooves are constituted by any of a plurality of circular grooves, a plurality of elliptical grooves, and a plurality of square grooves. Since these circular grooves, elliptical grooves, and quadrangular grooves are ring-shaped, air bubbles tend to naturally accumulate during transfer, but such problems can be avoided by separating at least the outer grooves.

  In still another aspect of the present invention, the boundary portion of the roll-shaped mold has a saddle shape of at least one of a triangular cross section and a trapezoidal cross section between adjacent transfer portions. In this case, the transfer portion can be formed in the recess, and the transfer pattern is protected.

  In still another aspect of the present invention, the boundary part of the roll-shaped mold has a groove shape of at least one of a V-shaped cross section and a trapezoidal cross section between adjacent transfer parts. In this case, the transferred pattern can be formed in the recess, and the transferred pattern is protected.

  In yet another aspect of the present invention, the element released by the press nip roll having a recess larger than the outer shape of the element is conveyed to the outside. In this case, the resin base material can be appropriately pressed against the roll-shaped mold, and it becomes easy to expel air bubbles and to quickly carry out the resin base material. At this time, since the concave portion provided in the pressing nip roll has a larger outer shape than the element, it is possible to reduce the influence of the element being deformed by the pressing nip roll.

Multiple order to achieve the above object, apparatus for manufacturing a device according to the present invention is directed to an apparatus for producing a device for manufacturing a device having a diffractive shape, forming a plurality of annular grooves for transferring the diffraction shape comprising a roll-shaped mold having a transfer portion, a portion of at least the outer of the plurality of annular grooves formed on the transfer portion, the side portion of the transfer portion extending substantially parallel to the axis of rotation of the roll-like mold A boundary portion that is at least one of a concave shape and a convex shape is provided between adjacent transfer portions that are separated from each other .

In the above manufacturing apparatus, since at least a part of the outer side of the plurality of ring-shaped grooves formed in the transfer part is separated at the side part of the transfer part extending substantially parallel to the rotation axis of the roll-shaped mold, Even when the diffractive shape is transferred, the bubbles are likely to escape from the ring-shaped groove to the periphery, and the diffractive shape is less likely to be defective. In addition, since the roll-shaped mold has a plurality of transfer portions, it is possible to perform molding or transfer in parallel by the plurality of transfer portions, but trap the bubbles in the concave or convex shape provided at the boundary of the transfer portions. It is possible to suppress the bubbles from remaining in the transfer portion.

  In a specific aspect of the present invention, in the manufacturing apparatus, the plurality of ring-shaped grooves include any of a plurality of circular grooves, a plurality of elliptic grooves, and a plurality of square grooves.

  In another aspect of the present invention, a press nip roll that conveys the element to the outside is provided, and the press nip roll has a recess that is larger than the outer shape of the element.

It is a perspective view explaining the external appearance of the roll-shaped mold used by 1st Embodiment of this invention. It is a conceptual diagram explaining the manufacturing apparatus incorporating the roll-shaped mold of FIG. It is an expanded view explaining the transfer pattern formed in the roll-shaped mold. It is a figure explaining one unit transcription | transfer area | region formed in the roll-shaped mold, and respond | corresponds to the optical element obtained by a roll-shaped mold. (A) is sectional drawing of the surface side of a roll-shaped mold, (B) is a partial expanded sectional view of (A). (A) is sectional drawing explaining the boundary part provided between a pair of pattern parts, (B) is sectional drawing explaining the modification of the boundary part of (A). (A)-(G) is a figure explaining the manufacturing procedure of the roll-shaped mold of FIG. (A)-(F) is a figure explaining the manufacturing procedure of the element using a roll-shaped mold. It is an expanded view explaining the transfer pattern formed in the roll-shaped mold which concerns on 2nd Embodiment. (A) And (B) is a figure explaining the transfer pattern formed in the roll-shaped mold concerning 3rd Embodiment. (A) is a figure explaining the shape of the transfer part and boundary part in the roll-shaped mold which concerns on 4th Embodiment, (B) demonstrates the shape of the transfer part and boundary part in the roll-shaped mold of a modification. It is a figure to do. (A) And (B) is a figure explaining the roll surface of the nip roll provided in the conveyance system of the manufacturing apparatus of the roll mold which concerns on 5th Embodiment. It is a figure explaining the modification of the roll surface of the nip roll provided in the conveyance system. It is a figure explaining another modification of the roll surface of the nip roll provided in the conveyance system.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of an element manufacturing method and apparatus according to the present invention will be described. In the following embodiment, a roll mold applied to a cylindrical roll as a support member will be described.

[First Embodiment]
As shown in FIG. 1, the roll mold 100 includes a film mold 10 and a cylindrical roll 20. The roll mold 100 can transfer the pattern of the optical element 200 (see FIG. 3), which is a diffractive element, to the target by rotating the mold 100 around a rotation axis AX by a driving device described later. In the present embodiment, one film mold 10 is attached to the surface 20 a of the cylindrical roll 20. A large number of unit transfer regions 18, that is, a large number of transfer portions 10 t, which are two-dimensionally arranged, are formed on the surface 10 a of the film mold 10, so that a large number of optical elements 200 can be formed in a lump. Yes.

  An element manufacturing apparatus 30 shown in FIG. 2 is an apparatus for collectively molding a large number of optical elements 200, and includes a roll-shaped mold 100, a supply system 31, a discharge system 32, a drive control device 33, A resin supply device 34, a UV irradiation device 35, and a decompression device 36 are provided.

  The supply system 31 includes a plurality of touch rolls 31 a and 31 b and a nip roll 31 d, and enables the sheet-like resin base material 2 to be supplied to the roll-shaped mold 100. The nip roll 31d can adjust the pressing force when the resin substrate 2 is pressed against the film mold 10 fixed on the roll mold 100, and the thickness of the resin covering the surface 10a of the film mold 10 can be adjusted. Makes it possible to adjust. The discharge system 32 includes a touch roll 32a, a drive roll 32c, and a nip roll 32e, and allows the resin base material 2 after shape transfer to be pulled out from the roll-shaped mold 100 with a desired tension. The drive roll 32c and the nip roll 32e cooperate to draw out the resin base material 2 wound around the roll mold 100. The drive control device 33 can rotate the roll-shaped mold 100 at a desired speed by operating the drive device 38a. The drive control device 33 rotates the drive roll 32c of the discharge system 32 by operating the drive device 38a. The sheet-like element assembly 80 provided with the shape transfer layer 21 (see FIG. 8C) on the material 2 can be pulled out with a desired tension. The resin supply device 34 has a nozzle 34 a associated therewith, and the ultraviolet curable resin is linearly formed on the surface 10 a of the film mold 10 on the roll mold 100 along the generatrix of the roll mold 100. Supply. The UV irradiation device 35 cures the ultraviolet curable resin sandwiched between the film mold 10 and the resin base material 2 by irradiating the ultraviolet light UV that is the curing light through the light transmissive resin base material 2. Let The decompression device 36 sucks air from the surface 20a of the cylindrical roll 20 to attach and fix the film mold 10 to the surface 20a of the cylindrical roll 20 in a detachable manner. The film mold 10 is a rectangular thin flexible plate that is not wound around the cylindrical roll 20.

  FIG. 3 is a development view illustrating a transfer pattern formed on the surface 10a of the film-like mold 10 of FIG. The surface 10a of the film mold 10 is partitioned into a large number of rectangular unit transfer regions 18 that are continuously repeated in an axial direction AB parallel to the rotation axis AX and a circumferential direction CD perpendicular thereto. In each unit transfer region 18, a transfer portion 10t that enables transfer of a three-dimensional shape is provided, and a unit transfer pattern 19 having a rectangular outline is formed. That is, the transfer pattern 10c formed on the film-like mold 10 is a pattern in a grid pattern, and a large number of unit transfer patterns 19 are continuously repeated in the axial direction AB and the circumferential direction CD. Yes. A band-shaped boundary portion 12 is provided between a pair of adjacent unit transfer regions 18. The boundary portion 12 is not particularly provided with a pattern, and is a protrusion-like portion in the present embodiment.

  FIG. 4 is a view for explaining one unit transfer region 18 formed on the surface 10a of the film mold 10 of FIG. 3, and the shape of the unit transfer region 18 corresponds to the shape of the optical element 200 as the final product. It is supposed to be. That is, a shape obtained by inverting the unit transfer pattern 19 formed in the unit transfer region 18 is formed on the surface of the optical element 200.

  As shown in the drawing, each unit transfer region 18 has an annular groove structure as the transfer portion 10t. That is, each unit transfer region 18 has a unit transfer pattern 19 including a number of concentric grooves 18g corresponding to the diffractive shape. Each groove 18g constituting the unit transfer pattern 19 is an elliptical groove extending along an elliptical path centering on the rotation axis AX. However, each unit transfer region 18 has a plurality of closed grooves 18ga in the central portion 18a, but has a plurality of open grooves 18gb in the peripheral portion 18b corresponding to the four sides. That is, the peripheral portion 18b has a plurality of groove portions 18s separated by the grooves 18gb because they are cut by the rectangular outer edge 18d. A set of spaced apart groove portions 18s or grooves 18gb, when extended, become a closed ellipse. That is, each groove 18g has a symmetrical shape with respect to the axial direction AB and the circumferential direction CD about the central axis OA in both the central portion 18a and the peripheral portion 18b.

  As shown in FIG. 5A, a plurality of unit transfer regions 18 that are uneven patterns are repeatedly formed on the surface 10a of the film mold 10 along the peripheral surface 10b. As shown in FIG. 5B, the transfer portion 10t provided in one unit transfer region 18 is generally recessed, and the transfer portion 10t has a large number of V-shaped cross sections corresponding to the diffractive shape. A groove 18g is formed. A boundary portion 12 provided between a pair of adjacent transfer portions 10t has a flat upper portion. The depth of the recess in the unit transfer region 18 is d1, and the thickness of the pattern in the unit transfer region 18 is d2. Here, d1> d2, and the pattern in the unit transfer region 18 is lower than the boundary portion 12, and does not protrude on the peripheral surface 10b. D1 is set to be not more than 5 times d2. Moreover, d1 can be made smaller than d2 under the condition that there is little deterioration of the pattern after molding, for example, 0.5 times or more of d2.

5B, the film-shaped mold 10 has a pattern portion 11 and a glass base material portion 15. As shown in FIG. A protective film 13 and a release film 14 are formed on the surface of the pattern portion 11. The protective film 13 is interposed between the pattern portion 11 and the release film 14, and the release film 14 forms the outermost surface of the film mold 10. By providing the release film 14, the sheet-shaped element assembly 80 can be easily released from the roll-shaped mold 100 when the optical element 200 described later is manufactured. By providing the protective film 13, the adhesion of the release film 14 can be improved and the release film 14 can be prevented from being peeled off from the pattern portion 11. The pattern part 11 is formed of an ultraviolet curable resin. As the ultraviolet curable resin, for example, an acrylic resin or an epoxy resin is used. It is preferable to use a heat-resistant epoxy resin. The release film 14 is formed of, for example, a fluorine compound or a hydrocarbon compound. The protective film 13 is formed of an inorganic compound that has good compatibility with the glass substrate portion 15. For example, SiO ₂ is used as the inorganic compound. The thickness of the protective film 13 is an optimum thickness for maintaining the durability, and is, for example, 5 nm to 100 nm, preferably 10 nm to 50 nm.

  As shown in FIG. 6A, a boundary portion 12 having a trapezoidal cross section is provided between the pair of unit transfer regions 18 or the transfer portion 10t. The upper end of the boundary portion 12 is a flat surface 12a, and stepped depressions 12b are formed on both sides. That is, the boundary part 12 is a hook-shaped protrusion.

  Returning to FIG. 4, one side 18 f on the downstream side of the unit transfer region 18 is coated with an ultraviolet curable resin on the surface of the unit transfer region 18 at the time of transfer or molding, that is, between the resin substrate 2. When sandwiched between the two, the resin flow G of the ultraviolet curable resin that flows along the unit transfer pattern 19 gathers. Here, the side portion 18f has a boundary portion 12 that is a bowl-shaped projection shown in FIG. 6A, and the resin flow G that flows along the plurality of grooves 18gb opened in the peripheral portion 18b. In the case of including bubbles, there is an effect of trapping the resin flow G.

  FIG. 6B is a modified example of the boundary portion 12 shown in FIG. In this case, the boundary portion 12 is a hook-shaped protrusion having a triangular cross section. The upper end of the boundary portion 12 is an edge 12c, and stepped depressions 12b are formed on both sides. The depression 12b can enhance the effect of trapping bubbles. The inclination angles of both slopes sandwiching the edge 12c are, for example, about 20 ° to 60 °. Also in this case, at the time of transfer or molding, the boundary portion 12 traps bubbles entrained in the ultraviolet curable resin.

Hereinafter, the manufacturing method of the roll mold 100 will be described with reference to FIGS. 7 (A) to 7 (G).
First, as shown in FIG. 7A, the ultraviolet curable resin JS1 is applied to one surface side of the flat glass substrate portion 15 (application step). As a coating method, a dispenser, spin coating, die coating or the like is used. In the process including this step and the subsequent steps, the glass substrate portion 15 is supported on a flat support table by suction or the like.

  Next, as shown in FIG. 7B, the shape of the master mold 50 is imparted to the ultraviolet curable resin JS1 by imprint molding (pattern part forming step). Specifically, the mold surface of the master mold 50 is pressed against the ultraviolet curable resin JS1 on the glass substrate portion 15, and the ultraviolet curable resin JS1 is cured by irradiating the ultraviolet ray UV. After curing, the ultraviolet curable resin JS1 is released from the master mold 50 together with the glass base material portion 15. Thereby, the pattern part 11 is formed on the glass base material part 15, as shown in FIG.7 (C). Thereafter, post-curing is performed to completely cure the ultraviolet curable resin JS1. As described above, the film mold 10 having the product shape reversed is obtained. Although simplified in the drawing, the master mold 50 is provided with a plurality of pattern shapes corresponding to the optical element 200 which is a product shape. As the master mold 50, for example, a metal (electroforming) mold, a glass mold, a Si mold, or the like is used.

  Next, as shown in FIG. 7D, an inorganic compound to be the protective film 13 is formed on the surface of the pattern portion 11 (protective film forming step). At this time, since the base material is made of glass, it is relatively difficult to bend and can withstand high temperatures, so that processing at high temperatures is possible. For example, a CVD method is used to form the protective film 13. The film-shaped mold 10 is fixed in the chamber 60 of the CVD apparatus to form a film.

  Next, as shown in FIG. 7E, for example, a fluorine-based compound that becomes the release film 14 is formed and formed on the surface of the protective film 13 (release film forming step). Thereby, the film-shaped mold 10 subjected to the mold release treatment shown in FIG. Although not shown, a large number of unit transfer regions 18 are formed on the surface 10a of the film-shaped mold 10, and unit transfer patterns 19 are formed on each of them (see FIG. 5B). For example, a dipping method is used to form the release film 14. Specifically, the film-shaped mold 10 having the protective film 13 formed therein is immersed in the fluorine-based compound placed in the container 70. As a method for forming the release film 14, a spin coating method, a spray method, a vapor deposition method, or the like may be used. Usually, after applying a fluorine compound, the solvent is evaporated by natural drying to form a dry coating film.

  Finally, as shown in FIG. 7 (G), the other surface (back surface) side of the film mold 10 on which the pattern part 11 is not formed is attached and fixed to the cylindrical roll 20 (fixing step). When pasting by a vacuum chuck, the decompression device 36 in FIG. 2 is operated and pasted by suction.

Hereinafter, a method for manufacturing the optical element 200 will be described with reference to FIGS. 8 (A) to 8 (F).
First, as shown in FIG. 8A, the resin base material 2 is supplied by winding the resin base material 2 around the roll-shaped mold 100 that rotates by receiving the supply of the ultraviolet curable resin JS2. The ultraviolet curable resin JS2 is applied on the resin base material 2 so as to be sandwiched between the film mold 10 (application process). As a result, the shape of the roll mold 100 is transferred to the ultraviolet curable resin JS2. That is, by pressing the roll-shaped mold 100 described above on the ultraviolet curable resin JS2 on the resin substrate 2, a pattern in which the transfer pattern 10c of the film-shaped mold 10 is inverted is formed on the ultraviolet curable resin JS2 (pressing step). ).

  In the above, the transfer pattern 10c formed on the surface 10a of the film mold 10 has the unit transfer pattern 19 including a number of concentric grooves 18g in each unit transfer region 18 as shown in FIG. Since the grooves 18g are spaced apart and opened around the pattern 19, bubbles are less likely to remain in the grooves 18g of the unit transfer pattern 19 when the ultraviolet curable resin JS2 is applied. Further, since the peripheral boundary portion 12 is higher than the unit transfer region 18, air bubbles can be trapped in the boundary portion 12 and its periphery, and bubbles are prevented from remaining in the unit transfer pattern 19. it can.

  Thereafter, as shown in FIG. 8B, the shape transfer layer 21 is formed on the resin substrate 2 by locally irradiating the resin substrate 2 with ultraviolet rays (curing light) to cure the ultraviolet curable resin JS2. Is formed (curing step). In the curing process, the roll mold 100 is rotated, and the ultraviolet curable resin JS2 or the shape transfer layer 21 on which the pattern is transferred on the resin substrate 2 is moved to the position of the UV irradiation device 35 in FIG. Is done.

  Thereafter, as shown in FIG. 8C, the sheet-like element in which the shape transfer layer 21 is laminated on the resin substrate 2 by releasing the shape transfer layer 21 together with the resin substrate 2 from the roll-shaped mold 100. The assembly 80 is obtained (mold release step). The release process is performed when the roll-shaped mold 100 rotates and the shape transfer layer 21 made of the ultraviolet curable resin JS2 cured on the resin substrate 2 moves to the position of the touch roll 32a in FIG. It is.

  Thus, by supplying the resin base material 2 so as to be wound around the rotating roll-shaped mold 100, the application of the ultraviolet curable resin JS2, the transfer of the pattern by pressing, the curing of the pattern, and the mold release are continuously performed. be able to.

  The manufactured element structure is transported from the periphery of the roll mold 100 to the outside. By the above, the pattern part 11 of the roll-shaped mold 100 is transferred to the ultraviolet curable resin JS2 on the resin base material 2, and a plurality of the resin parts 2 of a predetermined size are formed on the resin base material 2 as shown in FIG. An element assembly 80 in which the pattern 219 of the optical element 200 is formed in a block shape and arranged in a matrix is obtained. A pattern 219 formed on each optical element 200 constituting the element assembly 80 is a diffraction pattern 219a (see FIG. 8E).

Finally, as shown in FIG. 8F, the element assembly 80 is cut along a broken line and separated into pieces. Thereby, a large number of optical elements 200 having the same pattern 219 can be manufactured in a lump. As a cutting method, cutting with a punching blade, cutting with a CO ₂ laser, dicing cut, or the like is used. Depending on the product, the product may be delivered to the customer without being separated into individual pieces. In this case, the element assembly 80 is not cut.

  As is clear from the above description, in the element manufacturing method according to the present embodiment, at least a part of the plurality of ring-shaped grooves 18g formed in the transfer portion 10t (specifically, the plurality of grooves 18gb). Are spaced apart at the side portion 18f of the transfer portion 10t extending substantially parallel to the rotation axis AX of the roll-shaped mold 100. Therefore, even when the diffraction shape is transferred, the bubbles are surrounded by the annular groove 18g. It is easy to escape, and defects in the diffraction shape are not easily generated.

[Second Embodiment]
Hereinafter, the roll-shaped mold etc. which concern on 2nd Embodiment are demonstrated. Note that the roll-shaped mold and the like according to the second embodiment are obtained by partially changing the roll-shaped mold and the like of the first embodiment, and parts that are not particularly described are the same as those of the first embodiment.

  As shown in FIG. 9, a large number of unit transfer regions 18 are formed in a staggered arrangement on the surface 10a of the film mold 10 fixed to the roll mold of this embodiment. As described above, the arrangement pattern of the unit transfer regions 18 is not limited to the lattice shape and can be various.

[Third Embodiment]
Hereinafter, the roll-shaped mold etc. which concern on 3rd Embodiment are demonstrated. Note that the roll-shaped mold and the like according to the third embodiment are obtained by partially changing the roll-shaped mold and the like of the first embodiment, and parts that are not particularly described are the same as those of the first embodiment.

  As shown in FIG. 10A, a unit transfer region 18 composed of multiple grooves 18g extending in a circle is formed on the surface 10a of the film mold 10 fixed to the roll mold of the present embodiment. That is, the unit transfer region 18 is composed of a number of circular grooves. Also in this case, the groove 18g is open at the peripheral portion, and bubbles are less likely to remain in the groove 18g.

  As shown in FIG. 10B, on the surface 10a of the film-shaped mold 10 fixed to the roll-shaped mold of the modification of the present embodiment, a unit transfer region 18 composed of multiple grooves 18g extending in a diamond shape is formed. ing. That is, the unit transfer region 18 is composed of a number of rectangular grooves. Also in this case, the groove 18g is open at the peripheral portion, and bubbles are less likely to remain in the groove 18g. Note that the pattern formed in the unit transfer region is not limited to a rectangular groove, and a polygonal groove pattern such as a hexagon is also possible. Furthermore, a composite groove pattern combining ellipses and polygons is also possible. These patterns can be arranged concentrically, but can also be arranged non-concentrically.

[Fourth Embodiment]
Hereinafter, the roll-shaped mold etc. which concern on 4th Embodiment are demonstrated. Note that the roll-shaped mold and the like according to the fourth embodiment are obtained by partially changing the roll-shaped mold and the like of the first embodiment, and parts not specifically described are the same as those of the first embodiment.

  As shown in FIG. 11B, a boundary portion 12 that is a groove having a V-shaped cross section is provided between the pair of unit transfer regions 18 or the transfer portion 10t. The boundary portion 12 has no bottom surface, and its side surface is a slope 12k. The inclination angles of both slopes 12k are set to a range of about 20 ° to 60 °, for example.

[Fifth Embodiment]
Hereinafter, the roll-shaped mold etc. which concern on 5th Embodiment are demonstrated. Note that the roll-shaped mold and the like according to the fifth embodiment are obtained by partially changing the roll-shaped mold and the like of the first embodiment, and parts that are not particularly described are the same as those of the first embodiment.

  As shown in FIG. 6A and the like, when the boundary portion 12 is a convex portion, the periphery of the pattern 219 of the optical element 200 is surrounded by a groove in the obtained element assembly 80. In this case, in the element manufacturing apparatus 30 shown in FIG. 2, although depending on various conditions of shape transfer, the surface 32ea of the nip roll 32e provided in the discharge system 32 and the pattern 219 of the element assembly 80 come into contact with each other. There is a possibility that deterioration of the element such as deformation occurs.

  12 (A) and 12 (B) show a concavo-convex pattern formed on the surface 32ea of the nip roll 32e in consideration of such circumstances. As shown in the developed view of FIG. 12A and the cross-sectional view of FIG. 12B, the surface 32ea of the nip roll 32e has a large number of recesses 32s arranged in a periodic stripe pattern. These recesses 32s extend in the axial direction AB perpendicular to the feed direction, and are arranged at regular intervals along the circumferential direction CD. The length of the recess 32 s in the axial direction AB is ensured to be equal to or greater than the width perpendicular to the sheet feeding direction of the element assembly 80, and the width in the circumferential direction CD of the recess 32 s is the pattern 219 or the transfer portion 10 t of the unit transfer region 18. This corresponds to the width in the feed direction, and the arrangement period (distance) in the circumferential direction CD of the recesses 32 s corresponds to the arrangement period of the pattern 219 or the unit transfer region 18. The depth of the recess 32s is, for example, 120 to 200 μm with a margin when the projection of the pattern 219 or the transfer portion 10t is 100 μm. When the nip roll 32e and the element assembly 80 are positioned and the element assembly 80 is fed, a convex frame provided around the outer periphery 9 of the pattern 219 and the recess 32s of the element assembly 80. The top surface 32sa of 32t abuts to support the element assembly 80, and the separated state between the recess 32s and the pattern 219 (corresponding to the transfer portion 10t) is maintained, and the pattern 219 of the element assembly 80 and the surface of the nip roll 32e Contact with 32ea or deformation associated therewith is avoided.

  FIG. 13 shows a modification of the surface shape of the nip roll 32e shown in FIG. In the case of the nip roll 32e shown in FIG. 13, the recesses 32s formed on the surface 32ea of the nip roll 32e extend along the circumferential direction CD parallel to the feed direction, and are arranged at regular intervals in the axial direction AB. The width of the recess 32s in the axial direction AB corresponds to the width in the direction perpendicular to the feed direction of the transfer portion 10t of the pattern 219 or the unit transfer region 18, and the arrangement period (distance) of the recess 32s in the axial direction AB. ) Corresponds to the arrangement period of the pattern 219 or the transfer portion 10t. Also in this case, the contact between the pattern 219 of the element assembly 80 and the surface 32ea of the nip roll 32e or the accompanying deformation is avoided by the recess 32s.

  FIG. 14 shows a modification of the surface shape of the nip roll 32e shown in FIG. In the case of the nip roll 32e shown in FIG. 14, the recessed part 32u formed in the surface 32ea of the nip roll 32e is a rectangle. The width of the recess 32u in the axial direction AB corresponds to twice the width of the pattern 219 or the unit transfer region 18 in the direction perpendicular to the feeding direction of the transfer portion 10t, and the width of the recess 32u in the circumferential direction CD. Corresponds to twice the width of the pattern 219 or the transfer portion 10t in the feed direction. In this case, the confronting state of the concave portion 32u and the four patterns 219 is maintained, and contact between the pattern 219 of the element assembly 80 and the surface 32ea of the nip roll 32e or deformation associated therewith is avoided. The shape of the recess 32u can be changed according to the number and arrangement of the patterns 219 to be opposed. For example, the shape of the recess 32u can correspond to one pattern 219.

  As described above, the present invention has been described according to the embodiment, but the present invention is not limited to the above embodiment. For example, in the above embodiment, the film-shaped mold 10 having the product shape inverted is produced. However, a master mold having the product shape inverted is prepared, the sub master mold having the product shape is duplicated, and further transferred again. A sub-sub-master type in which is inverted may be created.

  Further, the arrangement direction of the unit transfer regions 18 or the transfer portions 10t is not limited to the circumferential direction CD and the axial direction AB, and can be a direction inclined with respect to these. At this time, if the unit transfer region 18 is rectangular, the unit transfer region 18 is inclined in the circumferential direction CD or the resin flow direction.

  DESCRIPTION OF SYMBOLS 9 ... Outer periphery, 10 ... Film-shaped mold, 10a ... Surface, 10c ... Transfer pattern, 10t ... Transfer part, 11 ... Pattern part, 12 ... Boundary part, 15 ... Glass base material part, 18 ... Unit transfer area, 18a ... Center Part, 18b ... peripheral part, 18d ... outer edge, 18f ... side part, 18g ... groove, 18s ... groove part, 19 ... unit transfer pattern, 20 ... cylindrical roll, 21 ... shape transfer layer, 30 ... manufacturing apparatus, 31 ... Supply system, 31d ... nip roll, 32 ... discharge system, 32c ... drive roll, 32e ... nip roll, 32s, 32u ... concave, 32t ... convex frame part, 33 ... drive control device, 34 ... resin supply device, 35 ... UV irradiation device 80: Element assembly 100: Roll mold 200: Optical element 219: Pattern AB: Axial direction AX: Rotation , AX ... shaft, CD ... circumferential direction, G ... resin flow, JS1, JS2 ... UV curable resin

Claims (9)

A method for manufacturing an element having a diffractive shape,
Rotating a roll-shaped mold having a plurality of transfer portions formed with a plurality of ring-shaped grooves for transferring the diffractive shape, supplying a resin onto the roll-shaped mold, and passing a resin base material through the resin Application pressing step to press against the transfer portion,
A curing step of solidifying the resin by irradiating the resin sandwiched between the resin base material and the transfer portion to solidify the resin and forming an element assembly including a plurality of elements;
A mold release step of releasing the element assembly from the roll-shaped mold ;
A cutting step of cutting out the individual elements from the element assembly ,
At least a part of the outer side of the plurality of ring-shaped grooves formed in the transfer part is separated at a side part of the transfer part ,
A device manufacturing method, wherein a boundary portion that is at least one of a concave shape and a convex shape is provided between the adjacent transfer portions .   2. The at least one portion of the plurality of ring-shaped grooves is separated at a side portion of the transfer portion that extends substantially parallel to a rotation axis of the roll-shaped mold. Device manufacturing method.   The plurality of ring-shaped grooves are formed of any one of a plurality of circular grooves, a plurality of elliptical grooves, and a plurality of quadrangular grooves. The manufacturing method of the element of description. Boundary of the rolled mold, in any one of claims 1, characterized in that it comprises at least one ridge-shaped cross-section triangular and trapezoidal cross-section between the transfer section adjacent to the 3 The manufacturing method of the element of description. The boundary part of the said roll-shaped mold has at least any one groove shape of a cross-section V character shape and a cross-sectional trapezoid shape between the said adjacent transfer parts, The any one of Claim 1 to 3 characterized by the above-mentioned. The manufacturing method of the element as described in any one of. The element manufacturing method according to any one of claims 1 to 5 , wherein the element released by a press nip roll having a recess larger than an outer shape of the element is conveyed to the outside. An element manufacturing apparatus for manufacturing an element having a diffractive shape,
A roll-shaped mold having a plurality of transfer portions formed with a plurality of annular grooves for transferring the diffraction shape;
At least a part of the outer side of the plurality of ring-shaped grooves formed in the transfer part is separated at a side part of the transfer part extending substantially parallel to the rotation axis of the roll-shaped mold ,
A device manufacturing apparatus , wherein a boundary portion that is at least one of a concave shape and a convex shape is provided between the adjacent transfer portions . The device manufacturing apparatus according to claim 7 , wherein the plurality of ring-shaped grooves include any of a plurality of circular grooves, a plurality of elliptical grooves, and a plurality of square grooves. A pressing nip roll for conveying the element to the outside;
Said pressing nip roll manufacturing apparatus of the device according to any one of claims 7 and 8, characterized in that it has a larger recess than the outer shape of the element.

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