JP5897393B2 - Resistance measuring device - Google Patents

Description

  The present invention measures a voltage generated when a measurement current (DC current) is passed through a measurement object, and based on the measured voltage value and the current value of the measurement current, the DC resistance of the measurement object is measured. The present invention relates to a resistance measuring device for measuring a value.

  As this type of resistance measuring apparatus, a resistance measuring apparatus (insulation withstand voltage test apparatus having an insulation resistance measuring function) disclosed in the following patent document is known. This resistance measuring device applies a DC voltage to a measurement object (test object), obtains a DC resistance value according to Ohm's law from the voltage value of the DC voltage and the current value of the current flowing through the measurement object. The quality of the insulation resistance of the measurement object is determined based on the DC resistance value.

  In this resistance measuring apparatus, in order to apply a test DC voltage to a measurement object, it is necessary to bring a voltage application probe into contact with each electrode terminal of the measurement object. In this case, when a disconnection of this probe or a contact failure of this probe occurs, there is a situation in which a measurement object to be judged as defective is judged as a non-defective product due to the fact that no DC voltage is applied to the measurement object. Therefore, the resistance measuring device is provided with a contact detection (contact check) function of the voltage application probe.

  The following patent documents disclose several configurations for realizing the contact detection function. One of the configurations disclosed as background art includes a pair of disconnection detections in addition to a pair of voltage application probes that are in contact with each electrode terminal in order to measure the voltage between the electrode terminals of the measurement object. A probe is brought into contact with each electrode terminal, and a voltage is applied between the voltage application probe and the disconnection detection probe that are in contact with the same electrode terminal. When this voltage is applied, the voltage application probe and the disconnection detection probe are applied. It is the structure which detects whether an electric current flows between. According to this configuration, when a current flows between the voltage application probe and the disconnection detection probe when a voltage is applied, the voltage application probe has no disconnection or contact failure, and no current flows. It can be determined that at least one of disconnection and poor contact has occurred in the application probe.

  Another configuration disclosed as background art includes the above-described pair of disconnection detection probes that contact each electrode terminal and a high-voltage power source that outputs a high voltage, and each electrode terminal includes a pair of disconnection detection probes. In a state where the probe and the pair of voltage application probes are in contact, a high voltage is applied between the electrode terminals from the high voltage power source via the pair of voltage application probes, and the voltage is applied via the pair of disconnection detection probes. It is the structure which measures the voltage between each electrode terminal with a meter. According to this configuration, if the measured voltage is the same voltage as the applied high voltage, the pair of voltage application probes are free from disconnection and contact failure, and if the voltage is different, the pair of voltage application probes It can be determined that at least one of disconnection and poor contact has occurred.

  However, the former configuration has a problem that it is impossible to detect disconnection and contact failure occurring in a pair of voltage application probes during the test, and a configuration for performing contact detection before the test. There is a problem that the test time becomes longer. In the latter configuration, the presence or absence of disconnection can be monitored even during the test, and this eliminates the problem of prolonging the test time. However, since the voltmeter is connected to the measurement object in parallel, the voltmeter Therefore, there is a problem that it is inappropriate for measuring the resistance of the measuring object.

  In order to solve these problems, in the following patent document, the applicant of the present application connects a contact detection circuit (Hi-side disconnection voltage detection unit, Lo-side disconnection current detection unit) to each electrode terminal of the measurement object. Has been proposed, and a resistance measuring device for a measurement object that can monitor the presence or absence of disconnection even during a test is proposed.

JP 2007-171069 A (page 3-7, Fig. 1-4)

  However, the resistance measuring apparatus has the following problems to be improved. That is, since this resistance measuring device employs a configuration in which a contact detection circuit is connected to each electrode terminal of the measurement object, there is a problem to be improved that the device configuration becomes complicated.

  The present invention has been made in order to improve such a problem, and does not have a dedicated circuit for detecting contact between the probe and the measurement object, and can prevent disconnection and poor contact of the probe during the measurement process on the measurement object. The main object is to provide a resistance measuring device that can be detected.

  In order to achieve the above object, the resistance measuring apparatus according to claim 1 includes a power supply unit that outputs a measurement current to the measurement object via a probe that is in contact with the measurement object including a capacitance component, and a current of the measurement current. A current measuring unit that measures a value, and a voltage measuring unit that measures a voltage value of a voltage generated in the measurement object by flowing the measurement current to the measurement object via a probe in contact with the measurement object And a processing unit that executes a resistance calculation process for calculating a resistance value of the measurement object based on the current value and the voltage value, and the processing unit is caused by the capacitance component and the voltage value and The resistance calculation process is executed at an inspection time included in a transient period in which at least one of the current values gradually changes toward a convergence value immediately after the output of the measurement current by the power supply unit is started. Based on whether or not the calculated resistance value is included in a predetermined determination range, the disconnection of each probe and the quality of the contact state between each probe and the measurement object are inspected. The resistance value calculated at the time of the inspection when the disconnection contact inspection process to be performed is in a state where neither the disconnection of each probe nor the contact failure between each probe and the measurement object has occurred. The range to be determined is executed as the determination range.

  The resistance measurement apparatus according to claim 2, wherein a power supply unit that outputs a measurement current to the measurement object via a probe that is in contact with the measurement object including a capacitance component, and a current measurement that measures a current value of the measurement current A voltage measuring unit that measures a voltage value of a voltage generated in the measurement object by flowing the measurement current to the measurement object through a probe in contact with the measurement object; the current value; A processing unit that executes a resistance calculation process that calculates a resistance value of the measurement object based on the voltage value, and the processing unit is caused by at least one of the voltage value and the current value due to the capacitance component. In the inspection point included in the transient period that gradually changes toward the convergence value from immediately after the output of the measurement current by the power supply unit, the resistance calculation process is performed and the resistance value is calculated. Based on whether or not the calculated resistance value is included in a predetermined determination range, the disconnection contact inspection process for inspecting the disconnection of each probe and the quality of the contact state between each probe and the measurement object Is calculated at the time of the inspection when at least one of the disconnection of any of the probes and the poor contact between any of the probes and the measurement object occurs. A range including the resistance value is executed as the determination range.

  The resistance measuring device according to claim 3 is the resistance measuring device according to claim 1 or 2, wherein a plurality of the inspection time points are defined during the transient period, and a plurality of the determinations respectively corresponding to the plurality of inspection time points. A range is stored in a storage unit, and when one of the plurality of inspection time points is specified, the processing unit reads the determination range corresponding to the specified inspection time point from the storage unit and The calculation process and the disconnection contact inspection process are executed.

  The resistance measuring device according to claim 4 is the resistance measuring device according to claim 1 or 2, wherein a plurality of the determination ranges are stored in a storage unit corresponding to each of the inspection time points, and the processing unit includes the plurality of determination units. When one of the determination ranges is specified, the specified determination range is read from the storage unit, and the resistance calculation process and the disconnection contact inspection process are executed.

  In the resistance measuring apparatus according to claim 1, in a state in which the processing unit starts measuring the resistance value, the resistance calculating process is performed by executing a resistance calculating process at an inspection time included in the transient period, and the resistance Based on whether the value is included in the determination range, a disconnection contact inspection process for inspecting the disconnection of each probe and the quality of the contact state between each probe and the measurement object is executed.

  Therefore, according to these resistance measurement devices, disconnection and contact failure of each probe are detected during measurement of the resistance value with respect to the measurement object without providing a dedicated circuit for detecting contact between each probe and the measurement object. be able to.

  Moreover, according to the resistance measuring apparatus of Claim 3 or 4, since it is possible to specify any one of a plurality of determination ranges and cause the processing unit to execute the disconnection contact inspection process, different types of measurement The final resistance value of the object can be measured while performing the disconnection contact inspection process.

1 is a configuration diagram showing a configuration of a resistance measuring device 1. FIG. FIG. 6 is an explanatory diagram for explaining the operation of the resistance measuring apparatus 1. FIG. 6 is another explanatory diagram for explaining the operation of the resistance measuring apparatus 1. FIG. 10 is still another explanatory diagram for explaining the operation of the resistance measuring apparatus 1. 3 is a flowchart for explaining the operation of the resistance measuring apparatus 1;

  Hereinafter, embodiments of a resistance measuring device will be described with reference to the accompanying drawings.

  First, the configuration of the resistance measuring apparatus 1 will be described with reference to the drawings.

  As shown in FIG. 1, the resistance measuring apparatus 1 includes a pair of probes 2 and 3, a power supply unit 4, a current measuring unit 5, a voltage measuring unit 6, a processing unit 7, a storage unit 8, and an output unit 9, and is to be measured. The resistance value (DC resistance value) R of the body 11 can be measured. In this example, an example in which a capacitor is a measurement object 11 and the resistance value (insulation resistance value) R thereof is measured will be described.

  One end of the probe 2 is connected to the output terminal of the power supply unit 4 and one input terminal of the voltage measuring unit 6, and the other end is configured to be able to contact one electrode terminal 11 a of the measurement object 11. One end of the probe 3 is connected to a reference potential (ground potential) through the current measuring unit 5 and is connected to the other input terminal of the voltage measuring unit 6, and the other end is connected to the other electrode terminal of the measurement object 11. It is comprised so that contact to 11b is possible.

  The power supply unit 4 includes a current source or a voltage source (in this example, a voltage source (constant voltage source as an example)). In addition, the power supply unit 4 has a ground potential in a state where the probes 2 and 3 are in contact with the measurement object 11 (a state in which the electrode terminal 11b of the measurement object 11 is regulated to the ground potential via the probe 3). And a measurement current I is output to the measurement object 11 by applying a voltage via the probe 2 between the measurement object 11 and the electrode terminal 11 a of the measurement object 11. Further, the power supply unit 4 is controlled by the processing unit 7 to turn on / off the output of the voltage to the probe 2 (that is, on / off of the output of the measurement current I).

  The current measuring unit 5 is arranged between the probe 3 and the reference potential as described above, and the current value Ia of the measurement current I flowing to the reference potential via the probe 3 is set to a predetermined sampling period (described later). And a current data Di indicating the current value Ia is output to the processing unit 7.

  The voltage measuring unit 6 is connected to the electrode terminals 11a and 11b of the measurement object 11 via a pair of probes 2 and 3 connected to a pair of input terminals. In addition, the voltage measuring unit 6 sets a voltage value Va of the voltage V generated between the electrode terminals 11a and 11b of the measurement target body 11 when the measurement current I flows through the measurement target body 11 to a predetermined sampling period (an example). In the same sampling cycle as that of the current measuring unit 5), measurement is performed via the pair of probes 2 and 3 in contact with the measurement object 11, and voltage data Dv indicating the voltage value Va is output to the processing unit 7. As described above, in this example, since the probe 3 is configured (connected) to the reference potential (ground potential), the configuration is such that the other input terminal of the voltage measuring unit 6 is connected to the probe 3. Thus, it is also possible to employ a configuration in which the voltage value Va of the voltage V is measured by connecting directly to the ground potential.

  With the above configuration, each of the probes 2 and 3 functions as a current probe that supplies the measurement current I to the measurement object 11, and also functions as a voltage probe that detects the voltage V generated in the measurement object 11. Although not shown, a configuration using a pair of current probes and voltage probes (that is, a configuration using four probes) is employed, and the resistance value R of the measurement object 11 is determined using a four-terminal method. A configuration for measuring can also be adopted.

  The processing unit 7 includes a CPU as an example, and controls the power supply unit 4 and the current value Ia indicated by the current data output from the current measurement unit 5 and the voltage data output from the voltage measurement unit 6. The measurement process 50 (refer FIG. 5) which measures resistance value R of the measuring object 11 based on voltage value Va shown by FIG. The processing unit 7 also executes time measurement processing.

  The storage unit 8 is configured by using a semiconductor memory such as a RAM or a ROM as an example. The storage unit 8 includes an operation program for the processing unit 7, determination data D <b> 1 indicating a determination range used by the processing unit 7 in the measurement processing 50, and measurement of the final resistance value R for the measurement object 11. Time tb is stored in advance. The storage unit 8 also functions as a work memory for the processing unit 7 and stores voltage data Dv and current data Di.

  In this case, the capacitor as the measuring object 11 is connected to a known equivalent circuit (capacitance component, equivalent series resistance component connected in series to the capacitance component, and parallel to the capacitance component. The circuit is composed of an insulation resistance component). Note that the equivalent series resistance component has a very small resistance value (several Ω to several tens of Ω) compared to the insulation resistance component, and is ignored below (assumed to be zero Ω).

  For this reason, when each probe 2 and 3 is not disconnected and each probe 2 and 3 is normally in contact with each electrode terminal 11a and 11b of the measurement object 11, the contact resistance is very small and good. 2 (ie, when no contact failure occurs), the resistance value R of the capacitor measured by the processing unit 7 is equal to the equivalent series resistance component as shown by the solid line in FIG. With the resistance value (zero Ω in this example) as an initial value, according to the progress of charging of the capacitor (in response to the current value Ia of the measurement current I gradually decreasing toward the convergence value (nearly zero) And gradually changing and finally changing the curve X to reach the resistance value of the insulation resistance component.

  In this case, even if the capacitors are of the same type and have the same capacitance, the respective curves X (temporal changes in the resistance value R) are not completely the same but are different from each other. On the other hand, as long as each capacitor is a non-defective product, each calculated resistance value R is, as shown in FIG. 2, when the measurement time tb elapses from the start of voltage application by the power supply unit 4 (t = 0). Reaches a convergence value included in a range of non-defective product standard values (generally, a value defined as “several thousand M ohms or more (for example, 10,000 M ohms or more)”). In addition, as indicated by a curve X, the resistance value R is a resistance value G from the start of voltage application (t = 0) by the power supply unit 4 to the non-defective product standard value (for example, 100% of the good product standard value). , A period until a predetermined value (for example, 90%) is reached (that is, a period from when the time t is 0 to a predetermined time ta. Hereinafter, “transient” In the term “period”), it gradually changes toward the convergence value with a change amount sufficiently larger than the change amount after the time ta. In this example, since the power supply unit 4 is configured by a constant voltage source, the current value Ia of the measurement current I is changed from the value limited by the resistance value of the equivalent series resistance component to the convergence value (zero) during this transition period. It gradually changes toward. On the other hand, when the power supply unit 4 is constituted by a constant current source, the voltage value Va of the voltage V gradually changes from zero toward the convergence value during this transition period.

  Further, even during this transition period, the curve X of each capacitor is not completely the same and differs from capacitor to capacitor. However, as long as each capacitor is a non-defective product, a predetermined time t1 (inspection time or inspection timing) included in the transition period is included. The resistance values R calculated in (1) are all included in the range of the resistance value A1 to the resistance value A2. For this reason, in this example, a range of the resistance value A1 or more and the resistance value A2 or less is obtained in advance by experiment or simulation, and the resistance value range in which the resistance value A1 is the lower limit value and the resistance value A2 is the upper limit value is determined. As a range, data indicating the determination range is stored in the storage unit 8 as the determination data D1 together with the time t1.

  For example, the output unit 9 is configured by a display device such as a liquid crystal display, and displays the result of the measurement process 50 executed by the processing unit 7 on the screen. In addition, it can replace with a display apparatus and can comprise with the interface apparatus which performs data communication with an external apparatus, and the structure which outputs the result of the measurement process 50 to this external apparatus is also employable.

  Next, the operation of the resistance measuring apparatus 1 will be described with reference to the drawings. For each of the probes 2 and 3, it is assumed that the probe 2 is in contact with the electrode terminal 11 a of the measurement object 11 and the probe 3 is in contact with the electrode terminal 11 b of the measurement object 11.

  In the resistance measuring apparatus 1, the current measuring unit 5 and the voltage measuring unit 6 each have a predetermined sampling period, the current value Ia of the measuring current I flowing through the measuring object 11, and each electrode terminal 11a of the measuring object 11. The voltage value va of the voltage V generated between 11b is measured, and the current data Di indicating the current value Ia and the voltage data Dv indicating the voltage value Va are output to the processing unit 7.

  In this state, the processing unit 7 executes the measurement process 50 shown in FIG. In the measurement process 50, the processing unit 7 first executes a control process on the power supply unit 4 to start applying a voltage to the measurement object 11 by shifting the power supply unit 4 from the off state to the on state. (That is, the output of the measurement current I to the measurement object 11 is started). The processing unit 7 also starts a time measurement process in synchronization with the start of the control process for the power supply unit 4 and measures an elapsed time (time t) from the start of output of the measurement current I (step 51). .

  The processing unit 7 executes a process of comparing the measured time t with the time t1 stored as the determination data D1 in the storage unit 8 (step 52), and when the time t reaches the time t1 (disconnection). When the contact inspection time (inspection timing) arrives, resistance calculation processing is executed (step 53). In this resistance calculation process, the processing unit 7 includes the current value Ia indicated by the current data Di acquired from the current measurement unit 5 at time t1 and the voltage value indicated by the voltage data Dv acquired from the voltage measurement unit 6 at time t1. Based on Va, the resistance value R of the measurement object 11 (hereinafter, the resistance value R at this time is also referred to as “resistance value R1”) is calculated.

  Subsequently, the processing unit 7 executes a disconnection contact inspection process (step 54). In this disconnection contact inspection process, the processing unit 7 determines the resistance value R1 calculated in the resistance calculation process in step 53 and the determination range at the time t1 stored as the determination data D1 in the storage unit 8 (the lower limit of the resistance value A1). Value and a range in which the resistance value A2 is the upper limit value). At this time, as shown in FIG. 2, when the resistance value R1 is included in this determination range, the measurement current I is normally flowing through the measurement object 11. For this reason, the processing unit 7 has a good contact state between the probes 2 and 3 and the electrode terminals 11a and 11b of the measurement object 11, and no disconnection occurs in either of the probes 2 and 3. It is determined that it is in a state (that is, the inspection result in the disconnection contact inspection process is good), and the disconnection contact inspection process is terminated.

  On the other hand, at least one abnormal state of contact failure between the probe 2 and the electrode terminal 11a of the measurement object 11, contact failure between the probe 3 and the electrode terminal 11b of the measurement object 11, disconnection of the probe 2, and disconnection of the probe 3 Since the measurement current I does not flow to the measurement object 11 when the is generated, the processing unit 7 calculates an extremely high resistance value R1. Therefore, in this case, as shown in FIG. 3, the resistance value R1 reaches a non-defective value within a very short time from the start of the output of the voltage V by the power supply unit 4 (time t = 0). It becomes a constant value. For this reason, when the resistance value R1 is not included in the determination range, the processing unit 7 determines that the abnormal state has occurred (that is, the inspection result in the disconnection contact inspection process is poor). And the disconnection contact inspection process is terminated.

  When the inspection result in the disconnection contact inspection process is good (when the resistance value R changes while drawing the curve X shown in FIG. 2), the processing unit 7 then stores the measurement time t. While executing the process of comparing with the measurement time tb stored in the unit 8 (step 55), when the time t reaches the measurement time tb (when the measurement time tb arrives), the resistance calculation process is executed. (Step 56). In this resistance calculation process, the processing unit 7 is indicated by the current value Ia indicated by the current data Di acquired from the current measurement unit 5 at the measurement time tb and the voltage data Dv acquired from the voltage measurement unit 6 at the measurement time tb. Based on the voltage value Va, the final resistance value R of the measurement object 11 (hereinafter, the resistance value R at this time is also referred to as “resistance value R2”) is calculated and stored in the storage unit 8, The resistance calculation process in step 56 is terminated.

  Subsequently, after the end of the resistance calculation process, the processing unit 7 executes an output process (step 57) to display the resistance value R2 stored in the storage unit 8 on the output unit 9. Thereby, the measurement process 50 is complete | finished.

  On the other hand, when the inspection result in the disconnection contact inspection process in step 54 is defective, the processing unit 7 proceeds to step 58 and executes the output process, thereby the probe 2 and the electrode terminal 11a of the measurement object 11 Are displayed on the output unit 9 to indicate that at least one abnormal state of contact failure, contact failure between the probe 3 and the electrode terminal 11b of the measurement object 11, disconnection of the probe 2, and disconnection of the probe 3 has occurred. Thereby, the measurement process 50 is complete | finished.

  As described above, in the resistance measuring apparatus 1, the resistance calculation process is executed at the time t1 (inspection timing) included in the transient period in a state where the measurement process 50 is started, and the resistance value R1 is calculated. Based on whether or not R1 is included in the determination range indicated by the determination data D1, the presence or absence of disconnection in each of the probes 2 and 3, the contact state between the probe 2 and the electrode terminal 11a, and the probe 3 and the electrode terminal 11b The disconnection contact inspection process which inspects the quality of the contact state with is performed.

  Therefore, according to the resistance measuring apparatus 1, the measurement process 50 for the measurement object 11 is not performed without providing a dedicated circuit for detecting contact between the probes 2 and 3 and the electrode terminals 11a and 11b of the measurement object 11. In this case, disconnection and contact failure of the probes 2 and 3 can be detected.

  In the resistance measuring apparatus 1 described above, when none of the disconnection of the probes 2 and 3, the poor contact between the probe 2 and the electrode terminal 11 a, and the poor contact between the probe 3 and the electrode terminal 11 b occur. In this case, a configuration in which the range including the resistance value R1 calculated at time t1 (detection timing) is used as the determination range is employed. However, the probe 2 is disconnected, the probe 3 is disconnected, and the probe 2 is in contact with the electrode terminal 11a. When at least one of the failure and the contact failure between the probe 3 and the electrode terminal 11b has occurred, that is, any one of the probes 2, 3 is disconnected, and any one of the probes 2, 3 is detected. A range including a resistance value calculated at time t1 (detection timing) when at least one of the poor contact with the measurement object 11 occurs. When the calculated resistance value is included in this determination range as a fixed range (for example, two ranges of resistance value A1 or less and resistance value A2 or more in FIG. 4), the disconnection of the probe 2 and the probe At least one of the disconnection 3, the contact failure between the probe 2 and the electrode terminal 11 a, and the contact failure between the probe 3 and the electrode terminal 11 b has occurred, and the calculated resistance value is included in this determination range. A configuration is adopted in which it is determined that none of the disconnection of each of the probes 2 and 3, the poor contact between the probe 2 and the electrode terminal 11 a, and the poor contact between the probe 3 and the electrode terminal 11 b have occurred. You can also.

  Further, the resistance measuring apparatus 1 employs a configuration in which only one determination range (a range from the resistance value A1 to the resistance value A2) at one time t1 during the transition period is defined as the determination range. A configuration in which a plurality of determination ranges are provided can also be employed. Hereinafter, a specific example will be described with reference to FIG.

  In this example, in addition to the above-described determination range (range of resistance value A1 or more and resistance value A2 or less), another determination range (range of resistance value A3 or more and resistance value A4 or less) is defined at time t1 during the transition period. In addition, at a time t2 (> t1) different from the time t1, another two determination ranges (a resistance value B1 or more and a resistance value B2 or less) and a determination range (a resistance value B3 or more and a resistance value B4 or less). Range) and determination data D1 indicating these are stored in the storage unit 8.

  In this configuration, for the measurement object 11 in which the curve X that reaches the final resistance value R2 (resistance value of the insulation resistance component) is indicated by a solid line, this curve X is within the determination range (resistance value A3 or higher resistance value A4). In order to pass through the following range), for this measurement object 11, the determination range is designated and the processing unit 7 is subjected to the disconnection contact inspection process, while the final resistance value R2 (insulation resistance component) For the measurement object 11 in which the curve X leading to the resistance value of the measurement object 11 is indicated by a one-dot chain line, the curve X passes through the determination range (the resistance value B3 or more and the resistance value B4 or less range). Designate and cause the processing unit 7 to execute a disconnection contact inspection process.

  Although not shown, for a measurement object that changes while drawing a curve in which the resistance value R passes through the determination range (the range of the resistance value A1 or more and the resistance value A2 or less), the measurement unit is designated to specify the measurement range. On the other hand, for a measurement object that changes while drawing a curve in which the resistance value R passes through the determination range (the range of the resistance value B1 or more and the resistance value B2 or less), the measurement range is set as follows. Designate and cause the processing unit 7 to execute a disconnection contact inspection process. Therefore, by adopting this configuration, a plurality of determination ranges can be properly used (any one of the plurality of determination ranges can be designated and the processing unit 7 can execute the disconnection contact inspection process). Therefore, it is possible to measure final resistance values for different types of measurement objects while performing the disconnection contact inspection process.

  Further, in addition to the above-described times t1 and t2, a configuration is adopted in which one or a plurality of other inspection timings (inspection time points) are defined within the transition period, and further determination ranges are defined corresponding to the inspection timings. You can also. Further, it is possible to adopt a configuration in which the inspection timing is limited to one time (for example, only the above-described time t1), and a plurality of determination ranges are defined as described above corresponding to this time t1.

  Of course, the upper limit resistance value and the lower limit resistance value defining each determination range may be arbitrarily set. By adopting this configuration, it is possible to measure the final resistance value R2 for many types of measurement objects 11 while performing the disconnection contact inspection process.

DESCRIPTION OF SYMBOLS 1 Resistance measuring apparatus 2,3 Probe 4 Power supply part 5 Current measuring part 6 Voltage measuring part 7 Processing part 11 Measurement object

Claims (4)

A power supply unit that outputs a measurement current to the measurement object via a probe that is in contact with the measurement object including a capacitive component;
A current measurement unit for measuring a current value of the measurement current;
A voltage measuring unit that measures a voltage value of a voltage generated in the measurement object by flowing the measurement current to the measurement object through a probe in contact with the measurement object;
A processing unit that executes a resistance calculation process that calculates a resistance value of the measurement object based on the current value and the voltage value;
The processing unit includes an inspection included in a transient period in which at least one of the voltage value and the current value gradually changes toward a convergence value immediately after the output of the measurement current by the power supply unit due to the capacitance component. Based on whether or not the calculated resistance value is included in a predetermined determination range, the resistance calculation process is performed at the time, and the resistance value is calculated. The disconnection contact inspection process for inspecting the quality of the contact state with the measurement object is in a state where neither the disconnection of each probe nor the contact failure between each probe and the measurement object has occurred. A resistance measuring apparatus that executes a range including the resistance value calculated at the time of the inspection as the determination range. A power supply unit that outputs a measurement current to the measurement object via a probe that is in contact with the measurement object including a capacitive component;
A current measurement unit for measuring a current value of the measurement current;
A voltage measuring unit that measures a voltage value of a voltage generated in the measurement object by flowing the measurement current to the measurement object through a probe in contact with the measurement object;
A processing unit that executes a resistance calculation process that calculates a resistance value of the measurement object based on the current value and the voltage value;
The processing unit includes an inspection included in a transient period in which at least one of the voltage value and the current value gradually changes toward a convergence value immediately after the output of the measurement current by the power supply unit due to the capacitance component. Based on whether or not the calculated resistance value is included in a predetermined determination range, the resistance calculation process is performed at the time, and the resistance value is calculated. The disconnection contact inspection process for inspecting the quality of the contact state with the measurement object is the disconnection of any of the probes, and the contact failure between any of the probes and the measurement object. A resistance measuring apparatus that executes, as the determination range, a range including the resistance value calculated at the time of the inspection when at least one is generated. A plurality of the inspection time points are defined during the transition period, and a plurality of the determination ranges respectively corresponding to the plurality of inspection time points are stored in the storage unit,
When one of the plurality of inspection time points is designated, the processing unit reads the determination range corresponding to the designated inspection time point from the storage unit, and performs the resistance calculation process and the disconnection contact inspection process. The resistance measuring device according to claim 1 or 2, wherein A plurality of the determination ranges are stored in the storage unit in correspondence with the inspection time points,
The processing unit reads the specified determination range from the storage unit and executes the resistance calculation process and the disconnection contact inspection process when one of the plurality of determination ranges is specified. Or the resistance measuring apparatus of 2.

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