JP5862857B2 - エンコーダ装置、光学装置、及び露光装置 - Google Patents

エンコーダ装置、光学装置、及び露光装置 Download PDF

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Publication number
JP5862857B2
JP5862857B2 JP2011156740A JP2011156740A JP5862857B2 JP 5862857 B2 JP5862857 B2 JP 5862857B2 JP 2011156740 A JP2011156740 A JP 2011156740A JP 2011156740 A JP2011156740 A JP 2011156740A JP 5862857 B2 JP5862857 B2 JP 5862857B2
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diffraction grating
light
angle
measurement
measurement light
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JP2013026272A (ja
JP2013026272A5 (enrdf_load_stackoverflow
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劉　志強
志強 劉
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Nikon Corp
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Nikon Corp
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2011156740A 2011-07-15 2011-07-15 エンコーダ装置、光学装置、及び露光装置 Active JP5862857B2 (ja)

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JP2011156740A JP5862857B2 (ja) 2011-07-15 2011-07-15 エンコーダ装置、光学装置、及び露光装置

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JP2011156740A JP5862857B2 (ja) 2011-07-15 2011-07-15 エンコーダ装置、光学装置、及び露光装置

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JP2013026272A JP2013026272A (ja) 2013-02-04
JP2013026272A5 JP2013026272A5 (enrdf_load_stackoverflow) 2014-10-09
JP5862857B2 true JP5862857B2 (ja) 2016-02-16

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014006935A1 (ja) * 2012-07-06 2014-01-09 株式会社ニコン 位置計測装置、ステージ装置、露光装置、およびデバイス製造方法
CN112799162B (zh) * 2021-02-02 2024-11-08 廊坊市莱格光电仪器有限公司 一种激光直刻金属柱面光栅光刻机

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0660808B2 (ja) * 1986-08-01 1994-08-10 日本電信電話株式会社 微小変位測定方法および微小変位測定装置
JP2683098B2 (ja) * 1989-05-12 1997-11-26 キヤノン株式会社 エンコーダー
JPH032504A (ja) * 1989-05-30 1991-01-08 Nikon Corp 位置合わせ装置
JPH085324A (ja) * 1994-06-16 1996-01-12 Mitsutoyo Corp 格子干渉型変位検出装置
JP4023923B2 (ja) * 1998-07-02 2007-12-19 ソニーマニュファクチュアリングシステムズ株式会社 光学式変位測定装置
JP2005026614A (ja) * 2003-07-02 2005-01-27 Nikon Corp 露光装置
SG174102A1 (en) * 2006-09-01 2011-09-29 Nikon Corp Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

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