JP5855429B2 - 荷電粒子光学装置における試料キャリアの温度を測定する方法 - Google Patents
荷電粒子光学装置における試料キャリアの温度を測定する方法 Download PDFInfo
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- JP5855429B2 JP5855429B2 JP2011248867A JP2011248867A JP5855429B2 JP 5855429 B2 JP5855429 B2 JP 5855429B2 JP 2011248867 A JP2011248867 A JP 2011248867A JP 2011248867 A JP2011248867 A JP 2011248867A JP 5855429 B2 JP5855429 B2 JP 5855429B2
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
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- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000011889 copper foil Substances 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910002367 SrTiO Inorganic materials 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical group [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 2
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 2
- 239000010408 film Substances 0.000 description 2
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- 229910001195 gallium oxide Inorganic materials 0.000 description 2
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- 238000010884 ion-beam technique Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910018871 CoO 2 Inorganic materials 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
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- 229910052763 palladium Inorganic materials 0.000 description 1
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- 229910052697 platinum Inorganic materials 0.000 description 1
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K5/00—Measuring temperature based on the expansion or contraction of a material
- G01K5/48—Measuring temperature based on the expansion or contraction of a material the material being a solid
- G01K5/56—Measuring temperature based on the expansion or contraction of a material the material being a solid constrained so that expansion or contraction causes a deformation of the solid
- G01K5/62—Measuring temperature based on the expansion or contraction of a material the material being a solid constrained so that expansion or contraction causes a deformation of the solid the solid body being formed of compounded strips or plates, e.g. bimetallic strip
- G01K5/64—Details of the compounds system
- G01K5/68—Shape of the system
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/20—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using thermoluminescent materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24571—Measurements of non-electric or non-magnetic variables
- H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature
Description
Claims (1)
- 荷電粒子光学装置において試料キャリアの温度を決定する方法であり、荷電粒子のビームを用いて該試料キャリアを観測するステップを含み、
該観測は、該試料キャリアの温度に関する情報を与え、
前記観測は、前記試料キャリアの2つの部分の相対的位置の情報をもたらし、該相対的位置は、1つ以上の固体の熱膨張又は収縮の結果として温度依存性で、
前記試料キャリアの一部分は、異なる膨張係数を持つ少なくとも2つの材料で構成され、その結果として前記一部分は、温度依存性変形を示す、
ことを特徴とする方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP10192354.8 | 2010-11-24 | ||
EP10192354A EP2458354A1 (en) | 2010-11-24 | 2010-11-24 | Method of measuring the temperature of a sample carrier in a charged particle-optical apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012114087A JP2012114087A (ja) | 2012-06-14 |
JP5855429B2 true JP5855429B2 (ja) | 2016-02-09 |
Family
ID=43896805
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2011248867A Active JP5855429B2 (ja) | 2010-11-24 | 2011-11-14 | 荷電粒子光学装置における試料キャリアの温度を測定する方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8757873B2 (ja) |
EP (2) | EP2458354A1 (ja) |
JP (1) | JP5855429B2 (ja) |
CN (1) | CN102539006A (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3062082B1 (en) * | 2015-02-25 | 2018-04-18 | Fei Company | Preparation of sample for charged-particle microscopy |
EP3739615A1 (en) * | 2019-05-14 | 2020-11-18 | Universiteit Maastricht | Sample carrier for electron microscopy |
US20210299665A1 (en) * | 2020-03-30 | 2021-09-30 | Fei Company | Method for temperature monitoring in cryo-electron microscopy |
JP7476043B2 (ja) * | 2020-09-07 | 2024-04-30 | 東芝テック株式会社 | 変色装置 |
CN113029380B (zh) * | 2021-03-10 | 2021-12-14 | 南京航空航天大学 | 工业密闭空间内温度场的在线动态检测方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4114559A (en) * | 1974-09-23 | 1978-09-19 | Nicoa Corporation | Temperature monitoring |
JPS55122124A (en) * | 1979-03-16 | 1980-09-19 | Toshiba Corp | Optical thermometer |
JPS59130053A (ja) * | 1983-01-17 | 1984-07-26 | Nec Corp | 電子顕微鏡 |
JPS60254615A (ja) * | 1984-05-30 | 1985-12-16 | Toshiba Mach Co Ltd | 電子ビーム露光における温度測定方法 |
US5366292A (en) * | 1989-02-01 | 1994-11-22 | Leybold Ag | Sensor formed from a deformation heat recoverable material having a predetermined range of temperatures in which recovery occurs and used for measuring a physical characteristic of a system |
JP2758939B2 (ja) * | 1989-09-13 | 1998-05-28 | 日本電子株式会社 | 電子顕微鏡試料の局所温度計測方法 |
DE69424190T2 (de) * | 1994-09-12 | 2000-11-23 | Ibm | Elektromechanischer wandler |
WO1998028776A2 (en) | 1996-12-23 | 1998-07-02 | Koninklijke Philips Electronics N.V. | Particle-optical apparatus including a low-temperature specimen holder |
TW418332B (en) * | 1999-06-14 | 2001-01-11 | Ind Tech Res Inst | Optical fiber grating package |
JP3924616B2 (ja) * | 2003-06-30 | 2007-06-06 | 独立行政法人物質・材料研究機構 | 微小サイズの温度感知素子を用いる温度計測方法 |
EP1852888A1 (en) | 2006-05-01 | 2007-11-07 | FEI Company | Particle-optical apparatus with temperature switch |
US7604398B1 (en) * | 2007-03-26 | 2009-10-20 | Akers Jeffrey W | Remote indicating cumulative thermal exposure monitor and system for reading same |
WO2008141147A1 (en) * | 2007-05-09 | 2008-11-20 | Protochips, Inc. | Microscopy support structures |
US7513685B2 (en) | 2007-07-05 | 2009-04-07 | DEUTSCHES ZENTRUM FüR LUFT-UND RAUMFAHRT E.V. | Temperature sensitive paint for an extended temperature range |
WO2009116696A1 (en) * | 2008-03-21 | 2009-09-24 | Korea Basic Science Institute | An apparatus for measuring the temperature of cyro em-holder specimen cradle and a method using it |
CN102262996B (zh) * | 2011-05-31 | 2013-06-12 | 北京工业大学 | 透射电镜用双轴倾转的原位力、电性能综合测试样品杆 |
-
2010
- 2010-11-24 EP EP10192354A patent/EP2458354A1/en not_active Withdrawn
-
2011
- 2011-11-14 JP JP2011248867A patent/JP5855429B2/ja active Active
- 2011-11-23 EP EP11190235A patent/EP2458355A3/en not_active Withdrawn
- 2011-11-23 US US13/304,181 patent/US8757873B2/en active Active
- 2011-11-24 CN CN2011103779837A patent/CN102539006A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
EP2458355A3 (en) | 2012-08-08 |
CN102539006A (zh) | 2012-07-04 |
US8757873B2 (en) | 2014-06-24 |
EP2458355A2 (en) | 2012-05-30 |
US20120128028A1 (en) | 2012-05-24 |
EP2458354A1 (en) | 2012-05-30 |
JP2012114087A (ja) | 2012-06-14 |
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