JP5834500B2 - Stage apparatus, processing apparatus, and processing method - Google Patents

Description

  The present invention relates to a stage apparatus, a processing apparatus, a processing method, and the like.

Some processing apparatuses that perform various processes on a workpiece such as a substrate have a stage device for supporting and holding the workpiece.
Conventionally, such a stage apparatus is known which is divided into a plurality of components (see, for example, Patent Document 1).

International Publication No. WO2007 / 105455 Pamphlet

  According to Patent Document 1, one stage apparatus is assembled by connecting (combining) a plurality of components. Since the stage device adopting such a divided structure can be divided into a plurality of components, the stage device is transported as compared to a case where a stage device of the same size is configured integrally (hereinafter referred to as an integrated structure). Can be easier.

  Some stage apparatuses are configured such that a table for supporting and holding a workpiece is movable. And in the processing apparatus which has such a stage apparatus, the process which is an area which supplies a workpiece | work to a table or removes a workpiece | work from a table, and is an area which processes a workpiece | work The table can be configured to be movable between areas. Furthermore, if a plurality of tables are provided, a plurality of tables are alternately reciprocated between the processing area and the supply / discharge material area, so that the workpieces in the processing area can be fed while being processed. It is possible to feed and unload other workpieces in the material removal area. With this configuration, this processing apparatus can easily improve the processing efficiency.

In a stage device that is configured to be movable (hereinafter referred to as a movable table configuration), from the viewpoint of processing efficiency, when a workpiece is supplied to the table in the supply / discharge material area, workpiece alignment processing is also performed. It is preferable to keep it.
The workpiece alignment processing is processing for adjusting the position and posture of the workpiece with respect to the stage device within a predetermined accuracy. By the alignment processing, the position accuracy and posture accuracy of the workpiece with respect to the stage device can be grasped, and the accuracy of the processing to be performed on the workpiece can be ensured.

By the way, when the above-described division structure is applied to the stage device having the movable table configuration, it is conceivable that the division device can be divided between the supply / discharge material area and the processing area. In this case, when the workpiece subjected to the alignment process is moved from the feed / dispensing material area to the processing area, the table gets over the joint between the constituent members. And when a table gets over a joint, the position and attitude | position of the workpiece | work with respect to a stage apparatus may shift | deviate. For this reason, work alignment processing must be performed in the processing area. As a result, it becomes difficult to improve the processing efficiency in the processing apparatus.
That is, the conventional stage apparatus has a problem that it is difficult to improve the processing efficiency.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A table that supports a workpiece, a first guide part that guides movement of the table, a second guide part that is connected to the first guide part and extends a movement path of the table, In a state where the first guide part and the second guide part joined together are provided closer to the first guide part than the joint, and the table is located closer to the first guide part than the joint, A first detection device that detects the positional accuracy of the workpiece relative to the table; and a state in which the table is located closer to the second guide part than the joint, and the table is located closer to the second guide part than the joint And a second detection device for detecting a positional accuracy of the workpiece with respect to the table.

The stage device of this application example includes a table, a first guide unit, a second guide unit, a first detection device, and a second detection device.
The table supports the workpiece.
The first guide part guides the movement of the table.
The second guide part is joined to the first guide part. The second guide part extends the moving path of the table.
In this stage apparatus, the first detection device is provided closer to the first guide portion than the joint between the first guide portion and the second guide portion, and more than the joint between the first guide portion and the second guide portion. A second detection device is provided on the second guide portion side. Accordingly, it is possible to grasp a difference between the positional accuracy of the workpiece on the first guide portion side with respect to the joint and the positional accuracy of the workpiece on the second guide portion side with respect to the joint. For this reason, for example, when the table moves over the joint, the position of the workpiece with respect to the table may be adjusted only when the positional accuracy of the workpiece deviates beyond an allowable range. As a result, it is possible to easily improve the workpiece processing efficiency.

  Application Example 2 In the above stage apparatus, the second table supporting the workpiece is connected to the second guide part on the side opposite to the first guide part side of the second guide part, A third guide portion for guiding the second table to the second guide portion from a side opposite to the first guide portion side of the second guide portion; the third guide portion and the second guide portion joined together; The position accuracy of the workpiece relative to the second table is detected in a state in which the second table is located closer to the third guide part than the joint. And a third detection device.

The stage device of this application example includes a second table, a third guide unit, and a third detection device.
The second table supports the workpiece.
The third guide part is joined to the second guide part on the opposite side of the second guide part from the first guide part side. The third guide part guides the second table to the second guide part from the side opposite to the first guide part side of the second guide part.
The third detection device is provided closer to the third guide portion than the joint between the joined third guide portion and the second guide portion. A 3rd detection apparatus detects the position accuracy with respect to the 2nd table of a workpiece | work in the state in which the 2nd table is located in the 3rd guide part side rather than a joint.
In this stage device, the third detection device is provided on the third guide portion side of the joint between the third guide portion and the second guide portion, and more than the joint between the third guide portion and the second guide portion. A second detection device is provided on the second guide portion side. Accordingly, it is possible to grasp the difference between the positional accuracy of the workpiece on the second guide side relative to the joint and the positional accuracy of the workpiece on the second guide portion side relative to the joint. For this reason, for example, the position of the workpiece with respect to the second table only needs to be adjusted when the position accuracy of the workpiece deviates beyond an allowable range when the second table passes over the joint. As a result, it is possible to easily improve the workpiece processing efficiency.
Furthermore, since this stage apparatus is provided with a table and a second table, for example, one of the table and the second table is positioned on the second guide portion side by reciprocating them alternately. Sometimes, it becomes possible to feed and unload the workpiece with respect to the other of the table and the second table. Thereby, in this stage apparatus, the processing efficiency of a workpiece | work can be improved further easily.

  Application Example 3 In the stage device described above, the table and the second table are each provided with a reference mark, and the first detection device and the second detection device are respectively the reference device. By detecting the position of the work with respect to the mark, the position accuracy of the work with respect to the table is detected, and the third detection device and the second detection device detect the position of the work with respect to the reference mark, respectively. Thus, the stage apparatus detects the positional accuracy of the workpiece with respect to the second table.

In this application example, a reference mark is provided on each of the table and the second table. Each of the first detection device and the second detection device detects the position accuracy of the workpiece with respect to the table by detecting the position of the workpiece with respect to the reference mark. Each of the third detection device and the second detection device detects the position accuracy of the workpiece with respect to the second table by detecting the position of the workpiece with respect to the reference mark.
As described above, the position accuracy of the workpiece with respect to the table can be detected by each of the first detection device and the second detection device. Moreover, the position accuracy of the workpiece with respect to the second table can be detected by each of the third detection device and the second detection device.

  Application Example 4 In the above-described stage device, the table is provided with a reference mark, and the first detection device and the second detection device respectively indicate the position of the workpiece with respect to the reference mark. A stage apparatus characterized by detecting the positional accuracy of the workpiece with respect to the table.

In this application example, a reference mark is provided on the table. Each of the first detection device and the second detection device detects the position accuracy of the workpiece with respect to the table by detecting the position of the workpiece with respect to the reference mark.
As described above, the position accuracy of the workpiece with respect to the table can be detected by each of the first detection device and the second detection device.

  Application Example 5 A process characterized by including the stage device described above, and a processing unit that performs processing on the work supported by the table and the work supported by the second table. apparatus.

The processing apparatus of this application example includes the above-described stage apparatus and a processing unit. The processing unit performs processing on the work supported by the table and the work supported by the second table.
In this processing apparatus, the processing efficiency of the workpiece can be easily improved.

  Application Example 6 A processing apparatus including the stage device described above and a processing unit that performs processing on the workpiece supported by the table.

The processing apparatus of this application example includes the above-described stage apparatus and a processing unit. The processing unit performs processing on the work supported by the table.
In this processing apparatus, the processing efficiency of the workpiece can be easily improved.

  Application Example 7 The first guide portion of a stage apparatus having a first guide portion that guides the movement of a table that supports a workpiece, and a second guide portion joined to the first guide portion via a joint. A first feeding step for feeding the workpiece to the table, and a first detection step for detecting a positional accuracy of the workpiece relative to the table in the first guide portion after the feeding step; A transporting step of transporting the work to a region of the second guide portion by moving the table from the first guide portion to the second guide portion after the first detection step after the first detection step; And a second detection step of detecting the positional accuracy of the workpiece with respect to the table in the area of the second guide portion after the transport step. Processing method.

The processing method of this application example includes a material supply process, a first detection process, a transport process, and a second detection process.
In the material supply process, a region of the first guide portion of the stage apparatus having a first guide portion that guides the movement of the table that supports the workpiece, and a second guide portion that is joined to the first guide portion via a joint. In step 2, the work is supplied to the table.
After the material supply process, in the first detection process, the position accuracy of the workpiece with respect to the table is detected in the region of the first guide portion.
After the first detection step, in the transfer step, the work is transferred to the area of the second guide portion by moving the table from the first guide portion to the second guide portion over the joint.
In the second detection step after the carrying step, the position accuracy of the workpiece with respect to the table is detected in the region of the second guide portion.
In this processing method, since the positional accuracy of the workpiece with respect to the table is detected in both the first guide portion region and the second guide portion region of the stage apparatus, the position of the workpiece with respect to the table on the first guide portion side relative to the joint. The difference between the accuracy and the positional accuracy of the workpiece with respect to the table on the second guide portion side with respect to the joint can be grasped. For this reason, for example, when the table moves over the joint, the position of the workpiece with respect to the table may be adjusted only when the positional accuracy of the workpiece deviates beyond an allowable range. As a result, it is possible to easily improve the workpiece processing efficiency.

FIG. 2 is a perspective view illustrating a schematic configuration of a droplet discharge device according to the present embodiment. The front view when the carriage in this embodiment is seen in the A viewing direction in FIG. FIG. 6 is a bottom view of the ejection head in the present embodiment. Sectional drawing in the BB line in FIG. The perspective view which shows the structure of the outline of the workpiece conveyance apparatus in this embodiment.

  Embodiments will be described with reference to the drawings, taking a droplet discharge device as an example. In addition, in each drawing, in order to make each structure the size which can be recognized, the structure and the scale of a member may differ.

As shown in FIG. 1, which is a perspective view showing a schematic configuration, the droplet discharge device 1 in the present embodiment includes a work transfer device 3, a carriage 7, a carriage transfer device 11, a first detection device 14, A second detection device 15 and a third detection device 16 are included.
A head unit 18 is provided on the carriage 7.
In the droplet discharge device 1, the liquid material is discharged from the head unit 18 as droplets while changing the relative position of the head unit 18 and the workpiece W such as a substrate in a plan view. A desired pattern can be drawn (recorded). That is, the droplet discharge device 1 is one of processing devices that perform drawing (recording) processing on the workpiece W. In the figure, the Y direction indicates the moving direction of the workpiece W, and the X direction indicates a direction orthogonal to the Y direction in plan view. A direction orthogonal to the XY plane defined by the X direction and the Y direction is defined as the Z direction. Further, the direction of rotation about the axis along the Z direction is defined as the θ direction.

Such a droplet discharge device 1 can be applied to drawing (recording) processing on various workpieces W.
The droplet discharge device 1 can be applied to, for example, the manufacture of color filters used for liquid crystal display panels and the like, and the manufacture of organic EL (Electro Luminescence) devices.
In the case of a color filter having three color filter elements of red, green, and blue, the droplet discharge device 1 can be suitably used, for example, in a process of forming red, green, and blue colored layers on a substrate. In this case, each liquid corresponding to each colored layer is ejected as droplets from the head unit 18 to the work W, whereby the patterns of the red, green and blue filter elements are drawn on the work W.
Further, in the manufacture of an organic EL device, for example, it can be suitably used in a step of forming a functional layer (organic layer) corresponding to each color for each of red, green and blue pixels. In this case, the liquids corresponding to the functional layers of the respective colors are ejected as droplets from the head unit 18 to the work W, whereby the patterns of the red, green, and blue functional layers are drawn on the work W. .

Here, the details of each component of the droplet discharge device 1 will be described.
As shown in FIG. 1, the work transfer device 3 includes a base portion 21, a guide rail 23, a guide rail 24, a work table 25, and a work table 27.
The base portion 21 is made of a material that hardly changes with time, such as stone, and is placed so as to extend along the Y direction.
Each of the guide rail 23 and the guide rail 24 is made of a material that hardly changes with time, such as stone, and is disposed on the upper surface 22 of the base portion 21. Each of the guide rail 23 and the guide rail 24 extends along the Y direction. The guide rail 23 and the guide rail 24 are lined up with a gap in the X direction.

  The work table 25 and the work table 27 are provided in a state of facing the upper surface 22 of the base portion 21 with the guide rail 23 and the guide rail 24 interposed therebetween, respectively. The work table 25 and the work table 27 are respectively placed on the guide rail 23 and the guide rail 24 in a state of floating from the base portion 21. That is, the work table 25 and the work table 27 coexist on the guide rail 23 and the guide rail 24. The work table 25 and the work table 27 are opposed to each other in the Y direction.

The work table 25 has a placement surface 25a that is a surface on which the workpiece W is placed. The work table 27 has a placement surface 27a that is a surface on which the workpiece W is placed. In the following, when the work W placed on the work table 25 and the work W placed on the work table 27 are distinguished from each other, the work W placed on the work table 25 is the work W1. And the workpiece W placed on the workpiece table 27 is denoted as workpiece W2.
The placement surface 25a and the placement surface 27a are each directed to the side (upper side) opposite to the base portion 21 side. The work table 25 and the work table 27 are guided along the Y direction by the guide rail 23 and the guide rail 24, respectively, and are configured to be able to reciprocate along the Y direction on the base portion 21.

The work table 25 and the work table 27 are configured to reciprocate independently (individually) in the Y direction by a moving mechanism and a power source (not shown), respectively. As the moving mechanism, for example, a mechanism in which a ball screw and a ball nut are combined, a linear motor mechanism, or the like can be adopted. In the present embodiment, a work transfer motor is employed as a power source for moving each of the work table 25 and the work table 27 along the Y direction. As the work transfer motor, various motors such as a stepping motor, a servo motor, and a linear motor can be adopted.
The power from the work transport motor is transmitted to each of the work table 25 and the work table 27 via the moving mechanism. Thereby, the work table 25 and the work table 27 can individually reciprocate along the guide rail 23 and the guide rail 24, that is, along the Y direction, respectively. That is, the workpiece transfer device 3 can reciprocate the workpiece W placed on the placement surface 25a of the workpiece table 25 along the Y direction. In addition, the work transfer device 3 can reciprocate the work W placed on the placement surface 27a of the work table 27 along the Y direction.

In the present embodiment, the work table 25 and the work table 27 are configured to reciprocate independently (individually) in the X direction by a moving mechanism and a power source (not shown), respectively. As the moving mechanism, for example, a mechanism in which a ball screw and a ball nut are combined, a linear motor mechanism, or the like can be adopted. As a power source for moving each of the work table 25 and the work table 27 along the X direction, various motors such as a stepping motor, a servo motor, and a linear motor may be employed.
In the present embodiment, the work table 25 and the work table 27 are configured to be reciprocally rotatable in the θ direction independently (individually) by a rotation mechanism and a power source (not shown), respectively. As the rotation mechanism, for example, a rotation ring or the like can be adopted. As a power source for rotating each of the work table 25 and the work table 27 along the θ direction, various motors such as a stepping motor and a servo motor can be employed.
With the above configuration, in the droplet discharge device 1, the workpiece W1 can be aligned by driving the workpiece table 25 in each of the X direction, the Y direction, and the θ direction. Similarly, in the droplet discharge device 1, the work W2 can be aligned by driving the work table 27 in each of the X direction, the Y direction, and the θ direction.

The head unit 18 includes a head plate 31 and an ejection head 33 as shown in FIG. 2 which is a front view when the carriage 7 is viewed in the A viewing direction in FIG.
As shown in FIG. 3 which is a bottom view, the discharge head 33 has a nozzle surface 35. A plurality of nozzles 37 are formed on the nozzle surface 35. In FIG. 3, the nozzles 37 are exaggerated and the number of the nozzles 37 is reduced in order to easily show the nozzles 37.
In the ejection head 33, the plurality of nozzles 37 constitute a nozzle row 39 arranged along the Y direction. In the nozzle row 39, the plurality of nozzles 37 are formed at a predetermined nozzle interval P along the Y direction.

The ejection head 33 includes a nozzle plate 46, a cavity plate 47, a diaphragm 48, and a plurality of drive elements 49, as shown in FIG. 4 which is a cross-sectional view taken along the line BB in FIG. doing. In the present embodiment, a longitudinal vibration type piezoelectric element is employed as the drive element 49.
The nozzle plate 46 has a nozzle surface 35. The plurality of nozzles 37 are provided on the nozzle plate 46.
The cavity plate 47 is provided on the surface opposite to the nozzle surface 35 of the nozzle plate 46. A plurality of cavities 51 are formed in the cavity plate 47. Each cavity 51 is provided corresponding to each nozzle 37 and communicates with each corresponding nozzle 37. The functional liquid 53 is supplied to each cavity 51 from a tank (not shown).

The diaphragm 48 is provided on the surface of the cavity plate 47 opposite to the nozzle plate 46 side. The vibration plate 48 vibrates in the Z direction (longitudinal vibration), thereby enlarging or reducing the volume in the cavity 51.
The plurality of drive elements 49 are respectively provided on the surface of the diaphragm 48 opposite to the cavity plate 47 side. Each drive element 49 is provided corresponding to each cavity 51 and faces each cavity 51 with the diaphragm 48 interposed therebetween. Each drive element 49 expands based on the drive signal. Thereby, the diaphragm 48 reduces the volume in the cavity 51. At this time, pressure is applied to the functional liquid 53 in the cavity 51. As a result, the functional liquid 53 is discharged as droplets 55 from the nozzle 37. The method of discharging the droplet 55 by the discharge head 33 is one of ink jet methods. The ink jet method is one of coating methods.

As shown in FIG. 2, the ejection head 33 having the above configuration is supported by the head plate 31 with the nozzle surface 35 protruding from the head plate 31.
The carriage 7 supports a head unit 18 as shown in FIG. Here, the head unit 18 is supported by the carriage 7 with the nozzle surface 35 facing downward in the Z direction.
As described above, the functional liquid 53 can be applied to the workpiece W from the ejection head 33.
In this embodiment, a longitudinal vibration type piezoelectric element is used as the drive element 49, but the drive element 49 for applying pressure to the functional liquid 53 is not limited to this, and for example, the lower electrode Also, a bending deformation type piezoelectric element in which a piezoelectric layer and an upper electrode are laminated may be employed. As the drive element 49, a so-called electrostatic actuator that generates static electricity between the diaphragm and the electrode, deforms the diaphragm by electrostatic force, and discharges droplets from the nozzle can be employed. Furthermore, the structure which generate | occur | produces a bubble in a nozzle using a heat generating body, and gives a pressure to a functional liquid with the bubble may be employ | adopted.

As shown in FIG. 1, the carriage transport device 11 includes a gantry 61 and a guide rail 63.
The gantry 61 extends in the X direction and straddles the work transfer device 3 in the X direction. The gantry 61 is opposite to the base portion 21 side of the work table 25 and faces the work transfer device 3. The gantry 61 is supported by a pair of support columns 67. The pair of struts 67 are provided at positions facing each other in the X direction across the base portion 21.
In the following, when identifying each of the pair of columns 67, the notations of columns 67a and columns 67b are used. The support 67a and the support 67b protrude upward in the Z direction from the work table 25 and the work table 27, respectively. Thereby, a gap is maintained between the gantry 61 and each of the work table 25 and the work table 27.

The guide rail 63 is provided on the base portion 21 side of the gantry 61. The guide rail 63 extends along the X direction, and is provided across the width of the gantry 61 in the X direction.
The carriage 7 described above is supported by the guide rail 63. In a state where the carriage 7 is supported by the guide rail 63, the nozzle surface 35 of the discharge head 33 faces the work table 25 and the work table 27 in the Z direction. The carriage 7 is guided along the X direction by the guide rail 63, and is supported by the guide rail 63 so as to be able to reciprocate in the X direction. In a plan view, in a state where the carriage 7 is overlapped with each of the work table 25 and the work table 27, the nozzle surface 35 and the mounting surface 25a and the mounting surface 27a are in a state of keeping a gap from each other. opposite.

The carriage 7 is configured to reciprocate in the X direction by a moving mechanism and a power source (not shown). As the moving mechanism, for example, a mechanism in which a ball screw and a ball nut are combined, a linear motor mechanism, or the like can be adopted. In the present embodiment, a carriage transport motor (not shown) is employed as a power source for moving the carriage 7 along the X direction. As the carriage conveyance motor, various motors such as a stepping motor, a servo motor, and a linear motor can be employed.
The power from the carriage transport motor is transmitted to the carriage 7 through the moving mechanism. Thus, the carriage 7 can reciprocate along the guide rail 63, that is, along the X direction. That is, the carriage transport device 11 can reciprocate the head unit 18 supported by the carriage 7 along the X direction.

Details of the work transfer device 3 will be described.
In the present embodiment, the workpiece transfer device 3 is divided into a first standby area 71, a processing area 73, and a second standby area 75 along the Y direction, as shown in FIG.
The base portion 21, the guide rail 23, and the guide rail 24 are configured to be split via a joint 77 and a joint 79, respectively. The first standby area 71 and the processing area 73 are divided with a seam 77 as a boundary. Further, the processing area 73 and the second standby area 75 are divided with a seam 79 as a boundary.
The base portion 21 is configured to be divided into a first base portion 21a, a second base portion 21b, and a third base portion 21c.

The first base portion 21a and the second base portion 21b can be divided from each other with a joint 77 as a boundary. The second base portion 21b and the third base portion 21c can be divided from each other with the joint 79 as a boundary. That is, the first base portion 21a and the second base portion 21b are connected to each other via the joint 77. Further, the second base portion 21 b and the third base portion 21 c are connected to each other through a joint 79.
In the present embodiment, the second base portion 21b is sandwiched in the Y direction by the first base portion 21a and the third base portion 21c. The first base portion 21 a corresponds to the first standby area 71, the second base portion 21 b corresponds to the processing area 73, and the third base portion 21 c corresponds to the second standby area 75.
Here, the gantry 61 of the carriage transport device 11 straddles the second base portion 21b in the X direction as shown in FIG. That is, the ejection head 33 can face the mounting surface 25 a of the work table 25 and the mounting surface 27 a of the work table 27 in the processing region 73.

As shown in FIG. 5, the guide rail 23 is configured to be divided into a first guide rail 23a, a second guide rail 23b, and a third guide rail 23c. The guide rail 24 is also configured to be divided into a first guide rail 24a, a second guide rail 24b, and a third guide rail 24c.
In the present embodiment, the first guide rail 23 a and the first guide rail 24 a correspond to the first standby area 71. The second guide rail 23 b and the second guide rail 24 b correspond to the processing area 73, and the third guide rail 23 c and the third guide rail 24 c correspond to the second standby area 75.
The first guide rail 23 a and the second guide rail 23 b are connected to each other through a joint 77. The second guide rail 23 b and the third guide rail 23 c are connected to each other through a joint 79.
Further, the first guide rail 24 a and the second guide rail 24 b are connected to each other through a joint 77. The second guide rail 24 b and the third guide rail 24 c are connected to each other through a joint 79.

In the present embodiment, the first base portion 21a, the first guide rail 23a, and the first guide rail 24a constitute the first guide portion 81. The second base portion 21b, the second guide rail 23b, and the second guide rail 24b constitute a second guide portion 82. Further, the third base portion 21c, the third guide rail 23c, and the third guide rail 24c constitute a third guide portion 83. The first guide part 81 corresponds to the first standby area 71, the second guide part 82 corresponds to the processing area 73, and the third guide part 83 corresponds to the second standby area 75.
In the present embodiment, the work table 25 can move over an area including the first standby area 71 and the processing area 73. That is, an area including the first standby area 71 and the processing area 73 is set as a movable area of the work table 25.
In addition, the work table 27 can move over an area including the second standby area 75 and the processing area 73. That is, an area including the second standby area 75 and the processing area 73 is set as a movable area of the work table 27.

In the first standby area 71, the material for feeding and unloading the work W1 with respect to the work table 25 and the alignment process for the work W1 are performed.
When the workpiece W1 is fed (supplied) to the workpiece table 25 (feeding step), the alignment process for the workpiece W1 is performed in the first standby area 71.
The alignment process is a process for adjusting the position and posture of the workpiece W with respect to the workpiece transfer device 3 within a predetermined accuracy. By the alignment process, the position accuracy and posture accuracy of the workpiece W with respect to the workpiece conveyance device 3 are grasped, and the accuracy of the processing to be performed on the workpiece W can be ensured.
The alignment process for the workpiece W1 is performed by detecting the position and orientation of the workpiece W1 with respect to the workpiece conveyance device 3 via the first detection device 14 (first detection step).
The work table 25 transports the work W1 to the processing area 73 after the alignment process for the work W1 is performed in the first standby area 71 (FIG. 5) (conveying step).

In the processing area 73, a drawing process is performed on the work W1 placed on the work table 25 (processing step). In the droplet discharge device 1, a pattern is drawn on the workpiece W by a drawing process.
In the present embodiment, the position and orientation of the workpiece W1 relative to the workpiece conveyance device 3 are detected in the processing area 73 after the workpiece W1 is conveyed to the processing area 73 and before the pattern is drawn on the workpiece W1. The process (2nd detection process) to perform is implemented. This second detection step will be described later.
In the droplet discharge device 1, the droplet 55 is discharged from the discharge head 33 while the discharge head 33 and the workpiece W are relatively reciprocated while the discharge head 33 is opposed to the workpiece W. A pattern is drawn on W.
The workpiece W1 that has been subjected to the drawing processing is transported from the processing area 73 to the first standby area 71 by the work table 25.
The workpiece W1 conveyed to the first standby area 71 by the work table 25 is removed from the work table 25 in the first standby area 71. The work table 25 is supplied with a new work W1.

On the other hand, in the second standby area 75, the material for feeding and unloading the work W2 with respect to the work table 27, and the alignment process for the work W2.
When the workpiece W2 is fed (supplied) to the workpiece table 27 (feeding step), the alignment processing for the workpiece W2 is performed in the second standby area 75. The alignment process for the workpiece W2 is performed by detecting the position and orientation of the workpiece W2 with respect to the workpiece conveyance device 3 via the third detection device 16 (FIG. 1) (first detection step).
The work table 27 transports the work W2 to the processing area 73 after the alignment process is performed on the work W2 in the second standby area 75 (FIG. 5) (conveying process).
In the processing area 73, a drawing process is performed on the work W2 placed on the work table 27 (processing step).

In the present embodiment, the position and orientation of the workpiece W2 relative to the workpiece conveyance device 3 are detected in the processing area 73 after the workpiece W2 is conveyed to the processing area 73 and before the pattern is drawn on the workpiece W2. The process (2nd detection process) to perform is implemented. This second detection step will be described later.
The workpiece W <b> 2 that has been subjected to the drawing process is conveyed from the processing area 73 to the second standby area 75 by the work table 27.
The workpiece W2 transferred to the second standby area 75 by the work table 27 is removed from the work table 27 in the second standby area 75. Then, a new work W2 is supplied to the work table 27.

As shown in FIG. 1, the first detection device 14 is provided in the first standby area 71. In the present embodiment, the first detection device 14 is provided on the opposite side of the first standby area 71 from the processing area 73 side.
In the first standby area 71, the first detection device 14 is provided on the placement surface 25a and at least two alignment marks (not shown) of the workpiece W1 placed on the placement surface 25a of the work table 25. A reference mark (not shown) is detected. The first detection device 14 includes a camera 91 that captures an alignment mark and a reference mark, and a coaxial incident illumination (not shown). The camera 91 has an image sensor (not shown). For example, a CCD (Charge Coupled Device) may be employed as the imaging element.
The coaxial epi-illumination illuminates the work W side coaxially with the optical axis of the camera 91. Imaging of the alignment mark and the reference mark by the camera 91 is performed with the coaxial epi-illumination turned on.

The camera 91 is suspended from the beam portion 93a of the column 93 downward in the Z direction.
The support column 93 is provided in the first standby area 71 and straddles the first base portion 21a in the X direction in plan view.
The camera 91 is provided at a position overlapping the first base portion 21a in the first standby area 71 in plan view. Note that a gap is maintained between the work table 25 and the camera 91 in a state where the work table 25 and the camera 91 are superimposed on each other in plan view.
With the above configuration, the work table 25 can be superimposed on the camera 91 in plan view. For this reason, the alignment mark provided on the workpiece W1 and the reference mark provided on the placement surface 25a can be imaged via the camera 91.

The first detection device 14 can detect the position accuracy and posture accuracy of the alignment mark of the workpiece W1 with respect to the reference mark of the workpiece table 25 (first detection step). As a result, the position accuracy and posture accuracy of the workpiece W1 relative to the workpiece transfer device 3 can be grasped.
Then, based on the result of the position accuracy and posture accuracy of the workpiece W1 with respect to the workpiece transfer device 3, the alignment processing of the workpiece W1 is performed when the position accuracy and posture accuracy exceed the allowable range. In this alignment process, by adjusting the work table 25 in the X direction, the Y direction, and the θ direction, the positional accuracy and posture accuracy of the workpiece W1 with respect to the workpiece conveying device 3 are within an allowable range.
Thereby, the alignment process with respect to the workpiece W1 is completed.

The third detection device 16 is provided in the second standby area 75. In the present embodiment, the third detection device 16 is provided on the opposite side of the second standby area 75 from the processing area 73 side.
In the second standby area 75, the third detection device 16 is provided on the placement surface 27a and at least two alignment marks (not shown) of the workpiece W2 placed on the placement surface 27a of the work table 27. A reference mark (not shown) is detected. The third detection device 16 includes a camera 95 that images the alignment mark and the reference mark, and a coaxial incident illumination (not shown). The camera 95 has an image sensor (not shown). For example, a CCD or the like may be employed as the imaging element.
The coaxial epi-illumination illuminates the work W side coaxially with the optical axis of the camera 95. Imaging of the alignment mark and the reference mark by the camera 95 is performed in a state where the coaxial epi-illumination is turned on.

The camera 95 is suspended from the beam portion 97a of the support column 97 downward in the Z direction.
The support column 97 is provided in the second standby region 75 and straddles the third base portion 21c in the X direction in plan view.
The camera 95 is provided at a position overlapping the third base portion 21c in the second standby area 75 in plan view. Note that a gap is maintained between the work table 27 and the camera 95 in a state where the work table 27 and the camera 95 overlap each other in plan view.
With the above configuration, the work table 27 can be superimposed on the camera 95 in plan view. For this reason, the alignment mark provided on the workpiece W2 and the reference mark provided on the placement surface 27a can be imaged via the camera 95.

The third detection device 16 can detect the position accuracy and posture accuracy of the alignment mark of the work W2 with respect to the reference mark of the work table 27. As a result, the position accuracy and posture accuracy of the workpiece W2 relative to the workpiece transfer device 3 can be grasped (first detection step).
Then, based on the result of the position accuracy and posture accuracy of the workpiece W2 with respect to the workpiece transfer device 3, when the position accuracy and posture accuracy exceed the allowable range, the alignment processing of the workpiece W2 is performed. In this alignment process, by adjusting the work table 27 in the X direction, the Y direction, and the θ direction, the positional accuracy and posture accuracy of the workpiece W2 with respect to the workpiece transfer device 3 are within an allowable range.
Thereby, the alignment process with respect to the workpiece | work W2 is complete | finished.

The second detection device 15 is provided in the processing area 73. In the present embodiment, the second detection device 15 includes a detection device 101 and a detection device 103.
The detection device 101 is provided closer to the first standby region 71 than the carriage transport device 11 in the processing region 73. On the other hand, the detection device 103 is provided in the processing region 73 closer to the second standby region 75 than the carriage transport device 11.

In the processing area 73, the detection apparatus 101 detects the alignment mark of the work W1 placed on the work table 25 and the reference mark provided on the placement surface 25a (second detection step).
The detection apparatus 101 includes a camera 105 that captures an alignment mark and a reference mark, and a coaxial incident illumination (not shown). The camera 105 has an image sensor (not shown). For example, a CCD or the like may be employed as the imaging element.
The coaxial epi-illumination illuminates the work W side coaxially with the optical axis of the camera 105. Imaging of the alignment mark and the reference mark by the camera 105 is performed with the coaxial epi-illumination turned on.

The camera 105 is suspended from the beam portion 107a of the support column 107 downward in the Z direction.
The support column 107 is provided in the processing area 73, and straddles the second base portion 21 b in the X direction in a plan view on the first standby area 71 side from the carriage conveyance device 11.
The camera 105 is provided at a position overlapping the second base portion 21b in the processing region 73 in plan view. Note that a gap is maintained between the work table 25 and the camera 105 in a state where the work table 25 and the camera 105 overlap each other in plan view.
With the above configuration, the work table 25 can be superimposed on the camera 105 in plan view. For this reason, the alignment mark provided on the workpiece W1 and the reference mark provided on the placement surface 25a can be imaged via the camera 105.

The detection device 101 can detect the position accuracy and posture accuracy of the alignment mark of the workpiece W1 with respect to the reference mark of the workpiece table 25. As a result, the position accuracy and posture accuracy of the workpiece W1 relative to the workpiece transfer device 3 can be grasped.
In the present embodiment, based on the position accuracy and posture accuracy results detected by the detection device 101, it is possible to determine whether the position accuracy and posture accuracy exceed an allowable range. That is, it is possible to monitor whether or not the position accuracy and posture accuracy of the workpiece W1 subjected to the alignment process in the first standby area 71 are changed in the process of being transferred to the processing area 73.
When the position accuracy and the posture accuracy exceed the allowable range, the workpiece W1 alignment process is performed. In this alignment process, by adjusting the work table 25 in the X direction, the Y direction, and the θ direction, the positional accuracy and posture accuracy of the workpiece W1 with respect to the workpiece conveying device 3 are within an allowable range. After this alignment process, a drawing process for the workpiece W1 is performed.
On the other hand, when the position accuracy and the posture accuracy are within the allowable range, a drawing process for the workpiece W1 is performed.

In the processing area 73, the detection device 103 detects the alignment mark of the work W2 placed on the work table 27 and the reference mark provided on the placement surface 27a (second detection step).
The detection device 103 includes a camera 111 that images the alignment mark and the reference mark, and a coaxial incident illumination (not shown). The camera 111 has an image sensor (not shown). For example, a CCD or the like may be employed as the imaging element.
The coaxial epi-illumination illuminates the work W side coaxially with the optical axis of the camera 111. Imaging of the alignment mark and the reference mark by the camera 111 is performed in a state where the coaxial epi-illumination is turned on.

The camera 111 is suspended from the beam portion 113a of the column 113 downward in the Z direction.
The support column 113 is provided in the processing area 73, and straddles the second base portion 21 b in the X direction in a plan view on the second standby area 75 side of the carriage transport device 11.
The camera 111 is provided at a position overlapping the second base portion 21b in the processing region 73 in plan view. It should be noted that a gap is maintained between the work table 27 and the camera 111 in a state where the work table 27 and the camera 111 are superimposed on each other in plan view.
With the above configuration, the work table 27 can be superimposed on the camera 111 in plan view. For this reason, the alignment mark provided on the workpiece W2 and the reference mark provided on the placement surface 27a can be imaged via the camera 111.

The position accuracy and posture accuracy of the alignment mark of the workpiece W2 with respect to the reference mark of the workpiece table 27 can be detected by the detection device 103. As a result, the position accuracy and posture accuracy of the workpiece W2 with respect to the workpiece transfer device 3 can be grasped.
In the present embodiment, it is possible to grasp whether the position accuracy or posture accuracy exceeds the allowable range based on the result of the position accuracy or posture accuracy detected by the detection device 103. That is, it is possible to monitor whether or not the position accuracy and posture accuracy of the workpiece W <b> 2 that has been subjected to the alignment process in the second standby area 75 are changed in the process of being transferred to the processing area 73.
When the position accuracy and posture accuracy exceed the allowable range, the workpiece W2 alignment process is performed. In this alignment process, by adjusting the work table 27 in the X direction, the Y direction, and the θ direction, the positional accuracy and posture accuracy of the workpiece W2 with respect to the workpiece transfer device 3 are within an allowable range. After this alignment process, a drawing process is performed on the workpiece W2.
On the other hand, when the position accuracy and the posture accuracy are within the allowable range, a drawing process for the workpiece W2 is performed.

In the present embodiment, the droplet discharge device 1 corresponds to a processing device, the workpiece transfer device 3 corresponds to a stage device, and the discharge head 33 corresponds to a processing unit. The work table 25 corresponds to the table, and the work table 27 corresponds to the second table.
In this embodiment, while the drawing process is performed in the processing area 73 on the work W placed on one of the work table 25 and the work table 27, the work W for the other of the work table 25 and the work table 27 is processed. The feed material and the alignment process are performed. For this reason, in this embodiment, the efficiency of the drawing process can be easily improved.

  Further, in the present embodiment, the base portion 21, the guide rail 23, and the guide rail 24 each include a plurality of areas for each of the first standby area 71, the processing area 73, and the second standby area 75 along the Y direction. A division structure that can be divided into components is adopted. For this reason, compared with the case where the integral structure is employ | adopted as the base part 21, the guide rail 23, and the guide rail 24, respectively, the workpiece conveyance apparatus 3 can be made easy to transport.

On the other hand, when the divided structure is adopted as the base portion 21, the guide rail 23, and the guide rail 24, respectively, the position accuracy and posture accuracy of the workpiece W with respect to the workpiece transfer device 3 are likely to be shifted as compared with the integrated structure. it is conceivable that. If the position accuracy and posture accuracy of the workpiece W with respect to the workpiece conveyance device 3 are deviated, it is conceivable that the processing accuracy for the workpiece W decreases. Deviations in the position accuracy and posture accuracy of the workpiece W with respect to the workpiece conveyance device 3 are likely to occur when the work table 25 gets over the joint 77 or when the work table 27 gets over the joint 79.
In contrast to this, in the present embodiment, the second detection device 15 can monitor the displacement of the position accuracy and posture accuracy of the workpiece W with respect to the workpiece conveyance device 3, thereby suppressing a decrease in processing accuracy for the workpiece W. It can be made easier.
Further, in the present embodiment, only when the position accuracy or posture accuracy of the workpiece W has deviated beyond an allowable range as a result of monitoring the positional accuracy or posture accuracy of the workpiece W with respect to the workpiece conveyance device 3, the workpiece W What is necessary is just to adjust the position accuracy and posture accuracy. For this reason, it is possible to further improve the efficiency of the drawing process.

In the present embodiment, the second detection device 15 includes two detection devices 101 and a detection device 103. However, the configuration of the second detection device 15 is not limited to this. As the configuration of the second detection device 15, for example, a configuration having only one of the detection device 101 and the detection device 103 may be employed. In the case of this configuration, one of the detection device 101 and the detection device 103 detects both the alignment marks of the workpiece W1 and the workpiece W2 and the reference marks of both the workpiece table 25 and the workpiece table 27.
However, the configuration in which the second detection device 15 includes the two detection devices 101 and 103 is preferable in that the efficiency of the drawing process can be easily improved. This is because the time required for processing can be shortened by detecting the position accuracy and posture accuracy of the workpiece W1 by the detection device 101 and detecting the position accuracy and posture accuracy of the workpiece W2 by the detection device 103.
In addition, as the configuration of the second detection device 15, for example, a configuration in which another detection device is added in addition to the detection device 101 and the detection device 103 may be employed.
Furthermore, for the configurations of the first detection device 14 and the third detection device 16, for example, a configuration in which another detection device is added may be employed.

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge apparatus, 3 ... Work conveying apparatus, 7 ... Carriage, 11 ... Carriage conveying apparatus, 14 ... 1st detection apparatus, 15 ... 2nd detection apparatus, 16 ... 3rd detection apparatus, 21 ... Base part, 21a ... 1st base part, 21b ... 2nd base part, 21c ... 3rd base part, 23 ... Guide rail, 23a ... 1st guide rail, 23b ... 2nd guide rail, 23c ... 3rd guide rail, 24 ... Guide rail 24a ... first guide rail, 24b ... second guide rail, 24c ... third guide rail, 25 ... work table, 27 ... work table, 33 ... discharge head, 53 ... functional liquid, 55 ... droplet, 71 ... first 1 standby area, 73 ... processing area, 75 ... 2nd standby area, 77 ... seam, 79 ... seam, 81 ... 1st guide part, 82 ... 2nd guide part, 83 ... 3rd guide part, 91 ... camera, 9 ... camera, 101 ... detector, 103 ... detector, 105 ... camera, 111 ... camera, W, W1, W2 ... workpiece.

Claims (7)

A table that supports the workpiece;
A first guide part for guiding the movement of the table;
A second guide part connected to the first guide part and extending a moving path of the table;
In a state where the first guide part and the second guide part joined together are provided closer to the first guide part than the joint, and the table is located closer to the first guide part than the joint, A first detection device for detecting a positional accuracy of the workpiece with respect to the table;
A second detection device that is provided closer to the second guide portion than the joint, and detects the positional accuracy of the workpiece relative to the table in a state where the table is located closer to the second guide portion than the joint. When,
A second table for supporting the workpiece;
The second guide portion is connected to the second guide portion on the opposite side of the second guide portion from the first guide portion side, and the second guide portion from the opposite side of the second guide portion to the first guide portion side. A third guide portion for guiding the second table;
A state in which the second guide portion is provided closer to the third guide portion than the joint between the joined third guide portion and the second guide portion, and the second table is located closer to the third guide portion than the joint. And a third detection device that detects the positional accuracy of the workpiece with respect to the second table .
A stage apparatus characterized by that. Each of the table and the second table is provided with a reference mark,
The first detection device and the second detection device each detect the position accuracy of the workpiece with respect to the table by detecting the position of the workpiece with respect to the reference mark,
The third detection device and the second detection device each detect the position accuracy of the workpiece relative to the second table by detecting the position of the workpiece relative to the reference mark.
The stage apparatus according to claim 1 , wherein: A table that supports the workpiece;
A first guide part for guiding the movement of the table;
A second guide part connected to the first guide part and extending a moving path of the table;
In a state where the first guide part and the second guide part joined together are provided closer to the first guide part than the joint, and the table is located closer to the first guide part than the joint, A first detection device for detecting a positional accuracy of the workpiece with respect to the table;
A second detection device that is provided closer to the second guide portion than the joint, and detects the positional accuracy of the workpiece relative to the table in a state where the table is located closer to the second guide portion than the joint. When,
Have
The table is provided with a reference mark,
The first detection device and the second detection device each detect the position accuracy of the workpiece with respect to the table by detecting the position of the workpiece with respect to the reference mark.
A stage apparatus characterized by that. The stage apparatus according to claim 1 or 2 ,
A processing unit that performs processing on the work supported by the table and the work supported by the second table;
The processing apparatus characterized by the above-mentioned. A stage apparatus according to claim 3 ;
A processing unit that performs processing on the workpiece supported by the table,
The processing apparatus characterized by the above-mentioned. A first guide part that guides the movement of the table that supports the workpiece, a second guide part joined to the first guide part via a seam, and the second guide part opposite to the first guide part side A third guide portion that is connected to the second guide portion on the side, and that guides a second table that supports the workpiece on the second guide portion from the opposite side of the second guide portion to the first guide portion side. And, in the region of the first guide part of the stage device having , a feeding process of feeding the work to the table,
A first detection step of detecting a positional accuracy of the workpiece relative to the table in the region of the first guide portion after the material supply step;
After the first detection step, the table is moved from the first guide part to the second guide part over the joint, thereby conveying the work to the area of the second guide part;
A second detection step of detecting the positional accuracy of the workpiece relative to the table in the region of the second guide portion after the transport step;
A drawing process step of drawing on the workpiece after the second detection step;
A second feeding step of feeding the workpiece to the second table in the region of the third guide portion during the drawing processing step;
A third detection step of detecting the positional accuracy of the workpiece relative to the second table in the region of the third guide portion during the drawing processing step;
Having
A processing method characterized by the above. The first stage unit having a first guide part that supports a workpiece and guides movement of a table on which a reference mark is provided , and a second guide part that is joined to the first guide part via a joint. In a region of one guide part, a feeding process for feeding the workpiece to the table;
A first detection step of detecting a positional accuracy of the workpiece with respect to the reference mark of the table in the region of the first guide portion after the material supply step;
After the first detection step, the table is moved from the first guide part to the second guide part over the joint, thereby conveying the work to the area of the second guide part;
A second detection step of detecting a positional accuracy of the workpiece with respect to the reference mark of the table in the region of the second guide portion after the transport step;
A processing method characterized by the above.