JP5826542B2 - Brazing jig and brazing method - Google Patents
Brazing jig and brazing method Download PDFInfo
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- JP5826542B2 JP5826542B2 JP2011156854A JP2011156854A JP5826542B2 JP 5826542 B2 JP5826542 B2 JP 5826542B2 JP 2011156854 A JP2011156854 A JP 2011156854A JP 2011156854 A JP2011156854 A JP 2011156854A JP 5826542 B2 JP5826542 B2 JP 5826542B2
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- 238000005219 brazing Methods 0.000 title claims description 120
- 238000000034 method Methods 0.000 title claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 115
- 239000002184 metal Substances 0.000 claims description 115
- 238000003825 pressing Methods 0.000 claims description 72
- 239000000463 material Substances 0.000 claims description 16
- 239000003302 ferromagnetic material Substances 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000005096 rolling process Methods 0.000 claims description 3
- 230000004308 accommodation Effects 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 description 23
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 23
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 239000012809 cooling fluid Substances 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 239000011162 core material Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/71—Means for bonding not being attached to, or not being formed on, the surface to be connected
- H01L24/72—Detachable connecting means consisting of mechanical auxiliary parts connecting the device, e.g. pressure contacts using springs or clips
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
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- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Description
この発明は、複数の被ろう付部材を、隣り合う被ろう付部材どうしの間に所定大きさの平面が面接触した面接触部分を有するように積層した状態でろう付する際に用いられるろう付治具、およびこのろう付治具を用いたろう付方法に関する。 This invention will be used when brazing a plurality of brazed members in a state of being laminated such that a plane of a predetermined size has a surface contact portion in surface contact between adjacent brazed members. The present invention relates to a brazing jig and a brazing method using the brazing jig.
この明細書において、「アルミニウム」という用語には、「純アルミニウム」と表現する場合を除いて、純アルミニウムの他にアルミニウム合金を含むものとする。また、この明細書において、「純アルミニウム」という用語は、純度９９．００質量％以上の純アルミニウムを意味するものとする。 In this specification, the term “aluminum” includes aluminum alloys in addition to pure aluminum, except when expressed as “pure aluminum”. Further, in this specification, the term “pure aluminum” means pure aluminum having a purity of 99.00% by mass or more.
たとえば、車両用の半導体冷却装置、液晶ディスプレイ、ソーラーパネルなどにおいては、複数の被ろう付部材を、隣り合う被ろう付部材どうしの間に所定大きさの平面が面接触した面接触部分を有するように積層した状態でろう付した部品が使用される。 For example, in a semiconductor cooling device for a vehicle, a liquid crystal display, a solar panel, etc., a plurality of brazed members have a surface contact portion in which a plane of a predetermined size is in surface contact between adjacent brazed members. Parts that are brazed in such a stacked state are used.
複数の被ろう付部材を、隣り合う被ろう付部材どうしの間に所定大きさの平面が面接触した面接触部分を有するように積層した状態でろう付する際には、隣り合う被ろう付部材の平面どうしの面接触を保つために、ろう付治具を用いて被ろう付部材を加圧し続ける必要がある。特に、被ろう付部材がアルミニウム製の場合、面接触部に存在する酸化皮膜やボイドを排出するためにも、ろう付の際にろう付治具を用いて被ろう付部材を加圧し続ける必要がある。 When brazing a plurality of brazed members in a state of being laminated such that a plane having a predetermined size is in surface contact between adjacent brazed members, adjacent brazed members In order to maintain the surface contact between the flat surfaces of the member, it is necessary to continue to pressurize the member to be brazed using a brazing jig. In particular, when the brazed member is made of aluminum, it is necessary to continue to pressurize the brazed member using a brazing jig during brazing in order to discharge the oxide film and voids present in the surface contact portion. There is.
従来、上述したような複数の被ろう付部材のろう付に用いられるろう付治具として、被ろう付部材を支持する支持部材と、支持部材に支持された被ろう付部材上に載せられる押圧板と、支持部材の上方に間隔をおいて上下動自在に配置される加圧部材と、押圧板と加圧部材との間に配置されかつ加圧部材が下降した際に圧縮されるとともに、圧縮された際の反発力を押圧板に伝えるコイルばねとを備えたものが知られている（特許文献１参照）。 Conventionally, as a brazing jig used for brazing a plurality of brazed members as described above, a support member that supports the brazed member, and a pressure that is placed on the brazed member supported by the support member A plate, a pressurizing member disposed above and below the support member so as to freely move up and down, and disposed between the press plate and the pressurizing member and compressed when the pressurizing member is lowered, A device including a coil spring that transmits a repulsive force when compressed to a pressing plate is known (see Patent Document 1).
しかしながら、特許文献１記載のろう付治具の場合、加圧部材を下降させた際にコイルばねに偏荷重がかかったり、コイルばねに軸線周りの回転力が生じたりすることがあり、コイルばねにかかった偏荷重や、コイルばねに生じた軸線周りの回転力によって、押圧板がずれることになって上端の被ろう付部材がろう付中に比較的大きく位置ずれするおそれがある。その結果、上端の被ろう付部材が比較的大きく位置ずれしたままでろう付されることになって、得られたろう付製品の寸法精度が低下する。
However, in the case of the brazing jig described in
この発明の目的は、上記問題を解決し、ろう付中の被ろう付部材の位置ずれを抑制しうるろう付治具およびろう付方法を提供することにある。 An object of the present invention is to provide a brazing jig and a brazing method capable of solving the above-described problems and suppressing the displacement of a brazed member during brazing.
本発明は、上記目的を達成するために以下の態様からなる。 In order to achieve the above object, the present invention comprises the following aspects.
1)複数の被ろう付部材を、隣り合う被ろう付部材どうしの間に所定大きさの平面が面接触した面接触部分を有するように積層した状態でろう付する際に用いられるろう付治具であって、
被ろう付部材を支持する支持部材と、支持部材に支持された被ろう付部材上に載せられる押圧板と、支持部材の上方に間隔をおいて上下動自在に配置される加圧部材と、押圧板と加圧部材との間に配置されかつ加圧部材が下降した際に圧縮されるとともに、圧縮された際の反発力を押圧板に伝えるコイルばねと、押圧板とコイルばねとの間に配置されている球体とを備えており、加圧部材に、垂直状のロッドが加圧部材に対して上下動自在に配置され、ロッドの周囲にコイルばねが配置され、コイルばねの下端がロッドの下端に設けられたばね受けに受けられ、ばね受けに球体が保持されているろう付治具。
1) Brazing treatment used when brazing a plurality of brazed members in a state of being laminated such that a plane of a predetermined size has a surface contact portion in surface contact between adjacent brazed members. Tools,
A support member that supports the member to be brazed, a pressing plate that is placed on the member to be brazed supported by the support member, and a pressure member that is disposed above and below the support member so as to be vertically movable, A coil spring disposed between the pressing plate and the pressing member and compressed when the pressing member descends, and transmits a repulsive force when compressed to the pressing plate, and between the pressing plate and the coil spring and a sphere is arranged, the pressure member, the vertical shape of the rod is disposed vertically movably with respect to the pressure member, a coil spring is disposed around the rod, the lower end of the coil spring A brazing jig which is received by a spring receiver provided at the lower end of the rod, and a sphere is held by the spring receiver.
2)ばね受けが、ロッドの下端に外方に張り出すように設けられかつコイルばねの下端を受けるばね受け本体と、ロッドに着脱自在に取り付けられ、かつばね受け本体の下面に沿う部分を有するとともに下面が平坦面となっている球体保持部材とを備えており、球体保持部材におけるばね受け本体の下面に沿う部分に上下方向に貫通した球体収容空間が形成されるとともに球体収容空間内に球体が入れられ、球体収容空間の上端開口がばね受け本体により閉鎖され、球体収容空間の下端開口の大きさが球体の脱落を防止しうる大きさとなり、球体の一部が球体保持部材の下面よりも下方に突出している上記1)記載のろう付治具。 2) A spring receiver is provided so as to project outward from the lower end of the rod and receives the lower end of the coil spring; and a portion that is detachably attached to the rod and that extends along the lower surface of the spring receiver body And a spherical body holding member having a flat bottom surface, and a spherical housing space penetrating in the vertical direction is formed in a portion of the spherical body holding member along the lower surface of the spring receiving body, and the spherical body is formed in the spherical housing space. The upper end opening of the sphere housing space is closed by the spring receiving body, and the size of the lower end opening of the sphere housing space is such that the sphere can be prevented from falling off. The brazing jig according to 1) above, which also protrudes downward.
3)球体保持部材に、平面から見て曲率の等しい複数の円弧状球体収容空間が、同一円周上に位置するように形成され、各球体収容空間内に球体が入れられており、球体収容空間の径方向内側面と同外側面との間隔が球体の直径よりも大きく、球体収容空間の径方向内側面と同外側面の下側部分が下方に向かって他の側面側に傾斜するとともに、径方向内側面と同外側面の下端間の間隔が球体の直径よりも小さくなっている上記2)記載のろう付治具。 3) A plurality of arc-shaped sphere containing spaces having the same curvature as viewed from above are formed on the sphere holding member so as to be positioned on the same circumference, and the spheres are placed in the respective sphere containing spaces. The space between the radially inner side surface and the outer side surface of the space is larger than the diameter of the sphere, and the lower part of the radially inner side surface and the outer side surface of the spherical housing space is inclined downward to the other side surface side. The brazing jig according to 2) above, wherein the gap between the radially inner side surface and the lower end of the outer side surface is smaller than the diameter of the sphere.
4)ばね受けが、ロッドの下端に着脱自在に取り付けられ、かつロッドの下端から外方に張り出す外方張り出し部を有するばね受け本体と、ばね受け本体に上下動自在に吊持され、かつばね受け本体の下面を覆うとともに下面が平坦面となっている球体保持部材とを備えており、球体保持部材に上方に開口した球体収容溝が形成されるとともに球体収容溝内に球体が入れられ、球体収容溝の深さが球体の直径よりも小さくなっていて、球体の一部が球体保持部材の上面よりも上方に突出している上記1)記載のろう付治具。 4) A spring receiver is detachably attached to the lower end of the rod, and has a spring receiver body having an outward projecting portion projecting outward from the lower end of the rod; A sphere holding member that covers the lower surface of the spring receiving body and has a flat lower surface. A sphere receiving groove that opens upward is formed in the sphere holding member, and the sphere is placed in the sphere receiving groove. The brazing jig according to 1) above, wherein the depth of the sphere housing groove is smaller than the diameter of the sphere, and a part of the sphere protrudes above the upper surface of the sphere holding member.
5)球体収容溝が円環状である上記4)記載のろう付治具。 5) The brazing jig according to 4) above, wherein the spherical body accommodating groove is annular.
6)球体が強磁性体からなり、ばね受けが、ロッドの下端に着脱自在に取り付けられ、かつロッドの下端から外方に張り出してコイルばねの下端を受ける外方張り出し部を有するばね受け本体と、ばね付け本体に取り付けられた磁石とを備え、ばね受け本体の下面が平坦面であり、球体が磁石によりばね受け本体の下面に吸着されている上記1)記載のろう付治具。 6) a spring receiving body having a spherical body made of a ferromagnetic material, a spring receiver detachably attached to the lower end of the rod, and an outward projecting portion that projects outward from the lower end of the rod and receives the lower end of the coil spring; The brazing jig according to 1) , further comprising a magnet attached to the spring-attached body, wherein the lower surface of the spring receiver body is a flat surface, and a sphere is adsorbed to the lower surface of the spring receiver body by the magnet.
7)複数の被ろう付部材を、隣り合う被ろう付部材どうしの間に所定大きさの平面が面接触した面接触部分を有するように積層した状態でろう付する際に用いられるろう付治具であって、
被ろう付部材を支持する支持部材と、支持部材に支持された被ろう付部材上に載せられる押圧板と、支持部材の上方に間隔をおいて上下動自在に配置される加圧部材と、押圧板と加圧部材との間に配置されかつ加圧部材が下降した際に圧縮されるとともに、圧縮された際の反発力を押圧板に伝えるコイルばねと、押圧板とコイルばねとの間に配置されている球体とを備えており、加圧部材に、垂直状のロッドが加圧部材に対して上下動自在に配置され、ロッドの周囲にコイルばねが配置され、コイルばねの下端がロッドの下端に設けられたばね受けに受けられ、押圧板に球体が保持されているろう付治具。
7) Brazing treatment used when brazing a plurality of brazed members in a state of being laminated such that a plane of a predetermined size has a surface contact portion between the adjacent brazed members. Tools,
A support member that supports the member to be brazed, a pressing plate that is placed on the member to be brazed supported by the support member, and a pressure member that is disposed above and below the support member so as to be vertically movable, A coil spring disposed between the pressing plate and the pressing member and compressed when the pressing member descends, and transmits a repulsive force when compressed to the pressing plate, and between the pressing plate and the coil spring A vertical rod is disposed on the pressure member so as to be movable up and down relative to the pressure member, a coil spring is disposed around the rod, and the lower end of the coil spring is A brazing jig that is received by a spring receiver provided at the lower end of the rod, and a spherical body is held on the pressing plate.
8)ばね受けが、ロッドの下端に着脱自在に取り付けられ、かつロッドの下端から外方に張り出してコイルばねの下端を受ける外方張り出し部を有する円板からなり、円板の下面が平坦面となされるとともに、押圧板に保持された球体が転動する球体転動面となっており、押圧板に、上方に開口した球体収容凹所が形成されるとともに球体収容凹所内に球体が入れられ、球体収容凹所の深さが球体の直径よりも小さくなっていて、球体の一部が押圧板の上面よりも上方に突出している上記7)記載のろう付治具。 8) The spring receiver is detachably attached to the lower end of the rod, and includes a disc having an outward projecting portion that projects outward from the lower end of the rod and receives the lower end of the coil spring, and the lower surface of the disc is a flat surface. And a spherical rolling surface on which the sphere held by the pressing plate rolls. The pressing plate is formed with a spherical housing recess that opens upward, and the sphere is placed in the spherical housing recess. The brazing jig according to 7) above, wherein the depth of the spherical housing recess is smaller than the diameter of the spherical body, and a part of the spherical body protrudes above the upper surface of the pressing plate.
9)球体の直径が０．１〜１００ｍｍである上記1)〜8)のうちのいずれかに記載のろう付治具。 9) The brazing jig according to any one of 1) to 8) above, wherein the sphere has a diameter of 0.1 to 100 mm .
10)上記1)〜9)のうちのいずれかに記載のろう付治具を使用し、複数の被ろう付部材を、隣り合う被ろう付部材どうしの間に所定大きさの平面が面接触した面接触部分を有するように支持部材上に積層し、上端の被ろう付部材上にろう付治具の押圧板を配置し、加圧部材を下降させてコイルばねを圧縮し、圧縮されたコイルばねの反発力を押圧板に伝えて、押圧板により被ろう付部材を押圧することを特徴とするろう付方法。 10) Using the brazing jig according to any one of the above 1) to 9) , a plurality of brazed members are in surface contact with a plane having a predetermined size between adjacent brazed members. Was laminated on the support member so as to have the surface contact portion, the pressure plate of the brazing jig was placed on the brazed member at the upper end, the pressure member was lowered, and the coil spring was compressed and compressed A brazing method comprising transmitting a repulsive force of a coil spring to a pressing plate and pressing a member to be brazed by the pressing plate.
11)支持部材上に、第１金属板、絶縁板および第２金属板を、第１金属板が上側に来るようにこの順序で積層し、第１金属板をろう付治具の押圧板により下方に押圧しつつ、絶縁板と両金属板とをろう付する上記10)記載のろう付方法。 11) On the support member, the first metal plate, the insulating plate, and the second metal plate are laminated in this order so that the first metal plate is on the upper side, and the first metal plate is laminated by the pressure plate of the brazing jig. The brazing method according to 10) above, wherein the insulating plate and the two metal plates are brazed while pressing downward.
12)支持部材上に、第１金属板、絶縁板、第２金属板および冷却器を、第１金属板が上側に来るようにこの順序で積層し、第１金属板をろう付治具の押圧板により下方に押圧しつつ、絶縁板と両金属板および第２金属板と放熱材とをろう付する上記10)記載のろう付方法。 12) On the support member, the first metal plate, the insulating plate, the second metal plate, and the cooler are laminated in this order so that the first metal plate is on the upper side, and the first metal plate is placed on the brazing jig. The brazing method according to 10) above, wherein the insulating plate, both metal plates, the second metal plate, and the heat dissipation material are brazed while being pressed downward by the pressing plate.
上記1)〜9)のろう付治具によれば、被ろう付部材を支持する支持部材と、支持部材に支持された被ろう付部材上に載せられる押圧板と、支持部材の上方に間隔をおいて上下動自在に配置される加圧部材と、押圧板と加圧部材との間に配置されかつ加圧部材が下降した際に圧縮されるとともに、圧縮された際の反発力を押圧板に伝えるコイルばねとを備えており、押圧板とコイルばねとの間に球体が配置されているので、加圧部材を下降させた際にコイルばねに偏荷重がかかったり、コイルばねに軸線周りの回転力が生じたりしたとしても、球体の働きによって、コイルばねにかかった偏荷重や、コイルばねに生じた軸線周りの回転力により押圧板がずれることが抑制される。したがって、押圧板のずれに起因する上端の被ろう付部材の位置ずれが低減され、得られたろう付製品の寸法精度が低下する。 According to the brazing jigs 1) to 9) above, a support member that supports the brazed member, a pressing plate that is placed on the brazed member supported by the support member, and a gap above the support member The pressure member is disposed between the pressure plate and the pressure plate, and is compressed when the pressure member descends and presses the repulsive force when compressed. Since the sphere is arranged between the pressing plate and the coil spring, an uneven load is applied to the coil spring when the pressure member is lowered, or the coil spring has an axis line. Even if the surrounding rotational force is generated, the action of the sphere suppresses the pressing plate from being displaced by the eccentric load applied to the coil spring or the rotational force around the axis generated in the coil spring. Therefore, the positional deviation reduction of the brazing member at the upper end due to the displacement of the press plate, the dimensional accuracy of the obtained brazed product is low down.
上記2)〜6)のろう付治具によれば、比較的簡単な構成で、ばね受けに球体を保持させることができる。 According to the brazing jigs 2) to 6) described above , the sphere can be held by the spring receiver with a relatively simple configuration.
上記8)のろう付治具によれば、比較的簡単な構成で、押圧板に球体を保持させることができる。 According to the brazing jig of 8) above, the spherical body can be held on the pressing plate with a relatively simple configuration.
上記9)のろう付治具によれば、コイルばねにかかった偏荷重や、コイルばねに生じた軸線周りの回転力により押圧板がずれることを効果的に抑制することができる。 According to the brazing jig of the above 9), it is possible to effectively suppress the pressing plate from being displaced due to a biased load applied to the coil spring or a rotational force around the axis generated in the coil spring .
上記10)〜12)のろう付方法によれば、加圧部材を下降させた際にコイルばねに偏荷重がかかったり、コイルばねに軸線周りの回転力が生じたりしたとしても、球体の働きによって、コイルばねにかかった偏荷重や、コイルばねに生じた軸線周りの回転力により押圧板がずれることが抑制される。したがって、押圧板のずれに起因する上端の被ろう付部材の位置ずれが低減され、得られたろう付製品の寸法精度が低下する。 According to the brazing method of the above 10) to 12) , even if an unbalanced load is applied to the coil spring when the pressurizing member is lowered or a rotational force around the axis is generated in the coil spring, the function of the sphere Therefore, it is possible to suppress the displacement of the pressing plate due to the eccentric load applied to the coil spring and the rotational force around the axis generated in the coil spring. Therefore, the positional shift of the brazed member at the upper end due to the shift of the pressing plate is reduced, and the dimensional accuracy of the obtained brazed product is lowered.
以下、この発明の実施形態を、図面を参照して説明する。 Embodiments of the present invention will be described below with reference to the drawings.
なお、以下の説明において、図１の上下、左右を上下、左右というものとする。 In the following description, the upper and lower sides and the left and right sides in FIG.
また、全図面を通じて同一部分および同一物には同一符号を付して重複する説明を省略する。 Moreover, the same code | symbol is attached | subjected to the same part and the same thing through all drawings, and the overlapping description is abbreviate | omitted.
図１はこの発明によるろう付治具の概略構成を示す正面図である。 FIG. 1 is a front view showing a schematic configuration of a brazing jig according to the present invention.
図１において、ろう付治具(10)は、第１金属板(1)、絶縁板(2)および第２金属板(3)を、第１金属板(1)と絶縁板(2)との間、および絶縁板(2)と第２金属板(3)との間に所定大きさの平面が面接触した面接触部分を有するとともに、第１金属板(1)が上側に来るように積層した状態で支持する支持部材(11)と、第１金属板(1)上に載せられる押圧板(12)と、支持部材(11)の上方に間隔をおいて上下動自在に配置される加圧部材(13)と、押圧板(12)と加圧部材(13)との間に配置されかつ加圧部材(13)が下降した際に圧縮されるとともに、圧縮された際の反発力を押圧板(12)に伝えるコイルばね(14)と、押圧板(12)とコイルばね(14)との間に配置された複数の球体(15)とを備えている。 In FIG. 1, a brazing jig (10) includes a first metal plate (1), an insulating plate (2) and a second metal plate (3), and a first metal plate (1) and an insulating plate (2). And between the insulating plate (2) and the second metal plate (3), there is a surface contact portion where a plane of a predetermined size is in surface contact so that the first metal plate (1) is on the upper side. A support member (11) that supports the stacked state, a pressing plate (12) that is placed on the first metal plate (1), and a support member (11) that is disposed above and below the support member (11) so as to be vertically movable. The pressure member (13) is disposed between the pressing plate (12) and the pressure member (13) and is compressed when the pressure member (13) is lowered, and the repulsive force when compressed. And a plurality of spheres (15) disposed between the pressing plate (12) and the coil spring (14).
支持部材(11)上に、加圧部材(13)を上下動自在に案内する垂直状ガイド柱(16)が複数立設されており、図示しない駆動手段により加圧部材(13)がガイド柱(16)に沿って上下動させられるようになっている。加圧部材(13)には、垂直状のロッド(17)が加圧部材(13)に対して上下動自在に配置されており、ロッド(17)の周囲にコイルばね(14)が装着されている。コイルばね(14)の上端は加圧部材(13)に取り付けられ、同じく下端はロッド(17)の下端に設けられたばね受け(18)に受けられている。 On the support member (11), a plurality of vertical guide columns (16) for vertically guiding the pressure member (13) are erected, and the pressure member (13) is guided by a driving means (not shown). It can be moved up and down along (16). A vertical rod (17) is arranged on the pressure member (13) so as to be movable up and down with respect to the pressure member (13), and a coil spring (14) is mounted around the rod (17). ing. The upper end of the coil spring (14) is attached to the pressure member (13), and the lower end is received by a spring receiver (18) provided at the lower end of the rod (17).
押圧板(12)としては、第１金属板(1)、絶縁板(2)および第２金属板(3)をろう付する温度よりも融点が高い金属であるステンレス鋼や、あるいはセラミックにより形成される。球体(15)は、第１金属板(1)、絶縁板(2)および第２金属板(3)をろう付する温度よりも融点が高い金属であるJIS ＳＵＪなどの軸受鋼やステンレス鋼、あるいはセラミックにより形成される。球体(15)の直径は０．１〜１００ｍｍであることが好ましい。 The pressing plate (12) is made of stainless steel or ceramic, which has a higher melting point than the temperature at which the first metal plate (1), the insulating plate (2) and the second metal plate (3) are brazed. Is done. The sphere (15) is made of bearing steel such as JIS SUJ or stainless steel, which has a melting point higher than the temperature at which the first metal plate (1), the insulating plate (2) and the second metal plate (3) are brazed. Alternatively, it is formed of ceramic. The diameter of the sphere (15) is preferably 0.1 to 100 mm.
図２および図３に示すように、ばね受け(18)は、ロッド(17)の下端に外方に張り出すように一体に設けられかつコイルばね(14)の下端を受けるばね受け本体(20)と、ロッド(17)に着脱自在に取り付けられ、かつばね受け本体(20)の下面に沿う部分を有するとともに下面が平坦面となっている円盤状の球体保持部材(21)とを備えており、球体(15)はばね受け(18)に保持されている。 As shown in FIGS. 2 and 3, the spring receiver (18) is provided integrally with the lower end of the rod (17) so as to project outward and receives the lower end of the coil spring (14). ) And a disc-shaped sphere holding member (21) which is detachably attached to the rod (17) and has a portion along the lower surface of the spring receiving body (20) and the lower surface is a flat surface. The sphere (15) is held by the spring receiver (18).
ロッド(17)には下端面から上方にのびるめねじ穴(17a)が形成されている。球体保持部材(21)の上面には、軸線が球体保持部材(21)の中心線と一致したおねじ部(22)が上方突出状に一体に設けられており、おねじ部(22)がロッド(17)のめねじ穴(17a)にねじ嵌められることによって、球体保持部材(21)がロッド(17)に着脱自在に取り付けられている。 The rod (17) has a female screw hole (17a) extending upward from the lower end surface. On the upper surface of the spherical body holding member (21), an external thread portion (22) whose axis line coincides with the center line of the spherical body holding member (21) is integrally provided so as to protrude upward, and the external thread portion (22) is provided. The spherical body holding member (21) is detachably attached to the rod (17) by being screwed into the female screw hole (17a) of the rod (17).
球体保持部材(21)におけるおねじ部(22)の周りの部分でかつばね受け本体(20)の下面に沿う部分に、平面から見て曲率の等しい複数の円弧状球体収容空間(23)が、同一円周上に位置するとともに周方向に間隔をおき、かつ球体保持部材(21)を上下方向に貫通するように形成されている。球体収容空間(23)内に球体(15)が入れられるとともに、球体収容空間(23)の上端開口がばね受け本体(20)により閉鎖されている。球体収容空間(23)の径方向内側面と同外側面との間隔は球体(15)の直径(D)よりも大きくなっている。また、球体収容空間(23)の径方向内側面と同外側面の下側部分が下方に向かって他の側面側に傾斜するとともに、径方向内側面と同外側面の下端間の間隔が球体(15)の直径(D)よりも小さくなっており、これにより球体収容空間(23)の下端開口の大きさが球体(15)の脱落を防止しうる大きさとなっている。また、球体保持部材(21)の厚み、すなわち球体収容空間(23)の上下方向の深さ(a)は球体(15)の直径(D)よりも小さく、球体(15)の一部が、常に球体保持部材(21)の下面よりも下方に突出するようになっている。 A plurality of arcuate sphere accommodating spaces (23) having the same curvature as viewed from the plane are formed in a portion around the external thread portion (22) in the sphere holding member (21) and along the lower surface of the spring receiving body (20). Further, they are formed on the same circumference and spaced in the circumferential direction so as to penetrate the spherical body holding member (21) in the vertical direction. The sphere (15) is placed in the sphere housing space (23), and the upper end opening of the sphere housing space (23) is closed by the spring receiving body (20). The distance between the radially inner side surface and the outer side surface of the spherical housing space (23) is larger than the diameter (D) of the spherical body (15). In addition, the radial inner side surface and the lower side portion of the outer side surface of the spherical housing space (23) are inclined downward to the other side surface, and the gap between the lower side of the radial inner side surface and the outer side surface is This is smaller than the diameter (D) of (15), so that the size of the lower end opening of the sphere housing space (23) is such that the sphere (15) can be prevented from falling off. Further, the thickness of the sphere holding member (21), that is, the depth (a) in the vertical direction of the sphere containing space (23) is smaller than the diameter (D) of the sphere (15), and a part of the sphere (15) It always projects downward from the lower surface of the spherical body holding member (21).
次に、ろう付治具を用いて第１金属板(1)、絶縁板(2)および第２金属板(3)をろう付する方法について説明する。 Next, a method for brazing the first metal plate (1), the insulating plate (2) and the second metal plate (3) using a brazing jig will be described.
第１金属板(1)、絶縁板(2)および第２金属板(3)をろう付したろう付製品は、図５に示すように、たとえばIGBT（Insulated Gate Bipolar Transistor）などの半導体素子からなるパワーデバイスを備えたパワーモジュールにおいて、絶縁回路基板として用いられる。 The brazed product obtained by brazing the first metal plate (1), the insulating plate (2) and the second metal plate (3) is made of a semiconductor element such as an IGBT (Insulated Gate Bipolar Transistor) as shown in FIG. In a power module provided with a power device, it is used as an insulated circuit board.
パワーモジュール(30)は、絶縁回路基板(32)および絶縁回路基板(32)の下面にろう付されかつ複数の冷却流体通路(34)を有するアルミニウム製冷却器(33)からなるパワーモジュール用ベース(31)と、パワーモジュール用ベース(31)に実装されたパワーデバイス(35)とよりなる。なお、図示の例では、冷却器(33)は全体が一体に形成されているが、これに限定されるものではなく、上下方向に並ぶとともに相互にろう付され、かつ内部に冷却流体通路を有する中空体を備えたものが用いられることもある。 The power module (30) is a base for a power module comprising an insulated circuit board (32) and an aluminum cooler (33) brazed to the lower surface of the insulated circuit board (32) and having a plurality of cooling fluid passages (34). (31) and a power device (35) mounted on the power module base (31). In the illustrated example, the cooler (33) is integrally formed as a whole, but is not limited thereto, and is arranged in the vertical direction and brazed to each other, and has a cooling fluid passage inside. What is provided with the hollow body which has may be used.
絶縁回路基板(32)は、方形のセラミックス製絶縁板(2)、絶縁板(2)の上面にろう付された方形のアルミニウム製第１金属板(1)、および絶縁板(2)の下面にろう付された方形のアルミニウム製熱第２金属板(3)からなる。 The insulated circuit board (32) includes a rectangular ceramic insulating plate (2), a square aluminum first metal plate (1) brazed to the upper surface of the insulating plate (2), and a lower surface of the insulating plate (2). It consists of a square aluminum heat second metal plate (3) brazed.
絶縁回路基板(32)の絶縁板(2)は、必要とされる電気絶縁特性、熱伝導率および機械的強度を満たしていれば、どのようなセラミックから形成されていてもよいが、たとえばＡｌＮ、Ａｌ2Ｏ3、ＳｉＣ、Ｓｉ3Ｎ4およびＢｅＯよりなる群から選ばれた１種の材料から形成されていることが好ましい。第１金属板(1)は、上面が電子素子搭載部(36)を有する配線面(37)となる回路板として用いられている。この場合、第１金属板(1)は、アルミニウムにより形成されることが好ましいが、電気伝導率および熱伝導率が高く、変形能が高い純アルミニウム、たとえば純度９９．９９質量％以上の純アルミニウムにより形成されていることが望ましい。第２金属板(3)は、熱伝導板または熱伝導性を有する応力緩和板として用いられる。この場合、第２金属板(3)は、アルミニウムにより形成されることが好ましいが、熱伝導率が高く、しかも変形能が高い純アルミニウム、たとえば純度９９．９９質量％以上の純アルミニウムにより形成されていることが好ましい。また、第２金属板(3)が熱伝導板として用いられる場合、第２金属板(3)は銅および銅合金から形成されることもある。 The insulating plate (2) of the insulating circuit board (32) may be formed of any ceramic as long as it satisfies the required electrical insulation characteristics, thermal conductivity, and mechanical strength. For example, AlN It is preferably formed of one material selected from the group consisting of Al 2 O 3 , SiC, Si 3 N 4 and BeO. The first metal plate (1) is used as a circuit board whose upper surface is a wiring surface (37) having an electronic element mounting portion (36). In this case, the first metal plate (1) is preferably formed of aluminum, but pure aluminum having high electrical conductivity and thermal conductivity and high deformability, for example, pure aluminum having a purity of 99.99% by mass or more. It is desirable to be formed by. The second metal plate (3) is used as a heat conduction plate or a stress relaxation plate having heat conductivity. In this case, the second metal plate (3) is preferably formed of aluminum, but is formed of pure aluminum having high thermal conductivity and high deformability, for example, pure aluminum having a purity of 99.99% by mass or more. It is preferable. When the second metal plate (3) is used as a heat conductive plate, the second metal plate (3) may be formed of copper and a copper alloy.
パワーデバイス(35)は、絶縁回路基板(32)の第１金属板(1)の配線面(37)における電子素子搭載部(36)上にはんだ付けされており、これによりパワーモジュール用ベース(31)に実装されている。パワーデバイス(35)から発せられる熱は、第１金属板(1)、絶縁板(2)および第２金属板(3)を経て冷却器(33)に伝えられ、冷却流体通路(34)内を流れる冷却流体に放熱されるようになっている。 The power device (35) is soldered onto the electronic element mounting portion (36) on the wiring surface (37) of the first metal plate (1) of the insulated circuit board (32), and thereby the power module base ( It is implemented in 31). The heat generated from the power device (35) is transferred to the cooler (33) through the first metal plate (1), the insulating plate (2), and the second metal plate (3), and in the cooling fluid passage (34). The heat is dissipated to the cooling fluid flowing through.
第１金属板(1)、絶縁板(2)および第２金属板(3)をろう付して絶縁回路基板(32)を製造するにあたり、まず図１に示すように、ろう付治具(10)の支持部材(11)上に、第１金属板(1)、絶縁板(2)および第２金属板(3)を上側からこの順序で配置する。第２金属板(3)の上面全体が絶縁板(2)と下面に面接触するとともに、第１金属板(1)の下面全体が絶縁板(2)の上面に面接触しており、第２金属板(3)と絶縁板(2)との間に第２金属板(3)の大きさの平面が面接触した面接触部分があり、第１金属板(1)と絶縁板(2)との間に第１金属板(1)の大きさの平面が面接触した面接触部分がある。 In manufacturing an insulated circuit board (32) by brazing the first metal plate (1), the insulating plate (2) and the second metal plate (3), first, as shown in FIG. The first metal plate (1), the insulating plate (2), and the second metal plate (3) are arranged in this order from the upper side on the support member (11) of 10). The entire upper surface of the second metal plate (3) is in surface contact with the insulating plate (2) and the lower surface, and the entire lower surface of the first metal plate (1) is in surface contact with the upper surface of the insulating plate (2). Between the two metal plates (3) and the insulating plate (2), there is a surface contact portion where the plane of the size of the second metal plate (3) is in surface contact, and the first metal plate (1) and the insulating plate (2 ) Is a surface contact portion where the plane of the size of the first metal plate (1) is in surface contact.
ついで、第１金属板(1)上にろう付治具(10)の押圧板(12)を載せた後、加圧部材(13)を下降させてコイルばね(14)を圧縮し、圧縮されたコイルばね(14)の反発力を押圧板(12)に伝えて、押圧板(12)により第１金属板(1)、絶縁板(2)および第２金属板(3)を下方に押圧し、これにより第１金属板(1)、絶縁板(2)および第２金属板(3)を仮止めする。図示は省略したが、このとき、第１金属板(1)と絶縁板(2)との間および第２金属板(3)と絶縁板(2)との間にはそれぞれアルミニウムろう材層を設けておく。ろう材層は、たとえばＳｉ１０質量％、Ｍｇ１質量％を含み、残部Ａｌおよび不可避不純物からなるアルミニウムろう材からなる。ろう材層は、アルミニウムろう材からなる箔や、心材の両面にろう材層が形成されたアルミニウムブレージングシートからなる。また、ろう材層は第１金属板(1)の下面および第２金属板(3)の上面に予めクラッドされていてもよい。
Next, after placing the pressing plate (12) of the brazing jig (10) on the first metal plate (1), the pressing member (13) is lowered to compress the coil spring (14) and compressed. The repulsive force of the coil spring (14) is transmitted to the pressing plate (12), and the first metal plate (1), the insulating plate (2) and the second metal plate (3) are pressed downward by the pressing plate (12). Thus, the first metal plate (1), the insulating plate (2) and the second metal plate (3) are temporarily fixed. Although illustration is omitted, at this time, an aluminum brazing material layer is provided between the first metal plate (1) and the insulating plate (2) and between the second metal plate (3) and the insulating plate (2). Keep it. The brazing material layer is made of an aluminum brazing material containing, for example,
その後、ろう付治具により仮止めされた第１金属板(1)、絶縁板(2)、第２金属板(3)を真空雰囲気とされた加熱炉中に入れ、適当な温度に適当な時間加熱し、絶縁板(2)と第１金属板(1)および第２金属板(3)とをろう付することにより絶縁回路基板(32)を製造する。 After that, the first metal plate (1), the insulating plate (2), and the second metal plate (3) temporarily fixed by the brazing jig are put in a heating furnace in a vacuum atmosphere, and an appropriate temperature is set. The insulating circuit board (32) is manufactured by heating for a period of time and brazing the insulating plate (2) with the first metal plate (1) and the second metal plate (3).
なお、上述した絶縁回路基板(32)の製造と同時に、第２金属板(3)の下面に冷却器(33)をろう付することにより、パワーモジュール用ベース(31)を製造してもよい。この場合、ろう付治具(10)の支持部材(11)上に、冷却器(33)、第１金属板(1)、絶縁板(2)および第２金属板(3)を上側からこの順序で配置し、上述した絶縁回路基板(32)の製造の場合と同様に、冷却器(33)、第２金属板(3)、絶縁板(2)および第１金属板(1)を下方に加圧しつつろう付治具(10)により仮止めする。このとき、第２金属板(3)の下面全体が冷却器(33)の上面に面接触しており、冷却器(33)と第２金属板(3)との間に第２金属板(3)の大きさの平面が面接触した面接触部分がある。また、冷却器(33)と第２金属板(3)との間に上述したようなアルミニウムろう材層を設けておく。ろう材層は、アルミニウムろう材からなる箔や、心材の両面にろう材層が形成されたアルミニウムブレージングシートからなる。冷却器(33)が複数の構成部材からなる中空体を備えている場合には、支持部材(11)上に複数の構成部材を載せ、その上に第２金属板(3)、絶縁板(2)および第１金属板(1)を載せるようにする。 The power module base (31) may be manufactured by brazing the cooler (33) to the lower surface of the second metal plate (3) simultaneously with the manufacture of the insulating circuit board (32). . In this case, the cooler (33), the first metal plate (1), the insulating plate (2) and the second metal plate (3) are placed on the support member (11) of the brazing jig (10) from above. As in the case of manufacturing the insulated circuit board (32) described above, the cooler (33), the second metal plate (3), the insulating plate (2), and the first metal plate (1) are arranged downward. Temporarily fix it with a brazing jig (10) while applying pressure to it. At this time, the entire lower surface of the second metal plate (3) is in surface contact with the upper surface of the cooler (33), and the second metal plate (between the cooler (33) and the second metal plate (3)). There is a surface contact portion where the plane of size 3) is in surface contact. Further, an aluminum brazing material layer as described above is provided between the cooler (33) and the second metal plate (3). The brazing material layer is made of a foil made of aluminum brazing material or an aluminum brazing sheet in which a brazing material layer is formed on both sides of the core material. When the cooler (33) includes a hollow body composed of a plurality of constituent members, the plurality of constituent members are placed on the support member (11), and the second metal plate (3) and the insulating plate ( 2) and the first metal plate (1) are placed.
以下、図１〜図４に示すろう付治具を使用し、図５に示す絶縁回路基板(32)を製造した実験例について、比較実験例とともに説明する。
実験例
純度９９．９９質量％の純アルミニウムからなり、かつ厚み：０．６mm、縦：２６mm、横：３１mmの第１金属板(1)および第２金属板(3)と、ＡｌＮからなり、かつ厚み：０．６mm、縦：２８mm、横：３３mmの絶縁板(2)と、Ｓｉ１０質量％、Ｍｇ１質量％を含み、残部Ａｌおよび不可避不純物からなる合金により形成され、かつ厚み：３０μｍ、縦：２６mm、横：３１mmのろう材箔とを用意した。また、ろう付治具(10)のばね受け(18)の球体保持部材(21)には３つの球体収容空間(23)を形成しておき、各球体収容空間(23)内に、JIS ＳＵＳ３０４からなり、かつ直径４mmの球体(15)を１個ずつ配置しておいた。
Hereinafter, an experimental example in which the brazed jig shown in FIGS. 1 to 4 is used to manufacture the insulated circuit board (32) shown in FIG. 5 will be described together with a comparative experimental example.
Experimental Example The first metal plate (1) and the second metal plate (3) having a purity of 99.99% by mass pure aluminum and having a thickness of 0.6 mm, a length of 26 mm, and a width of 31 mm, and AlN, In addition, the insulating plate (2) having a thickness of 0.6 mm, a length of 28 mm, and a width of 33 mm, an alloy containing 10% by mass of Si and 1% by mass of Mg, the balance being Al and inevitable impurities, and a thickness of 30 μm, : 26 mm, width: 31 mm brazing material foil. In addition, three sphere housing spaces (23) are formed in the sphere holding member (21) of the spring receiver (18) of the brazing jig (10), and JIS SUS304 is formed in each sphere housing space (23). One sphere (15) having a diameter of 4 mm was arranged.
そして、ろう付治具(10)の支持部材(11)上に、第１金属板(1)、絶縁板(2)および第３金属板(3)を、第１金属板(1)が上側に来るようにこの順序で配置した。第１金属板(1)と絶縁板(2)との間、および絶縁板(2)と第２金属板(3)との間にはそれぞれろう材箔を配置し、第１金属板(1)上にろう付治具(10)の押圧板(12)を載せた後、加圧部材(13)を下降させてコイルばね(14)を圧縮し、圧縮されたコイルばね(14)の反発力を押圧板(12)に伝えて、押圧板(12)により第１金属板(1)、絶縁板(2)および第２金属板(3)を下方に押圧し、これにより第１金属板(1)、絶縁板(2)および第２金属板(3)を仮止めした。 Then, the first metal plate (1), the insulating plate (2) and the third metal plate (3) are placed on the support member (11) of the brazing jig (10), and the first metal plate (1) is on the upper side. Arranged in this order to come in. A brazing material foil is disposed between the first metal plate (1) and the insulating plate (2) and between the insulating plate (2) and the second metal plate (3). ) After placing the pressing plate (12) of the brazing jig (10) on top, the pressing member (13) is lowered to compress the coil spring (14), and the compressed coil spring (14) is repelled. The force is transmitted to the pressing plate (12), and the pressing plate (12) presses the first metal plate (1), the insulating plate (2), and the second metal plate (3) downward, thereby the first metal plate. (1) The insulating plate (2) and the second metal plate (3) were temporarily fixed.
その後、ろう付治具(10)により第１金属板(1)、絶縁板(2)および第２金属板(3)を加圧状態で仮止めしたものを真空雰囲気とされた加熱炉中に入れ、６００℃で１０分間加熱した後冷却した。こうして、絶縁板(2)と第１金属板(1)および第２金属板(3)とをろう付することにより、３つの絶縁回路基板(32)を製造した。
比較実験例
ばね受け(18)が球体(15)を保持した球体保持部材(21)を有さないろう付治具を用いたことを除いては、上記実験例と同様にして、３つの絶縁回路基板(32)を製造した。
評価試験
上記実験例および比較実験例において、絶縁板(2)と第１金属板(1)および第２金属板(3)とのろう付の前に、予め、ろう付治具(10)により仮止めされた第１金属板(1)における２６mmの長さ（＝Ａ）を有する２つの短辺と、絶縁板(2)における第１金属板(1)の各短辺に近接した２８mmの長さを有する２つの短辺との距離ｂ、ｄ、および第１金属板(1)における３１mmの長さ（＝Ｂ）を有する２つの長辺と、絶縁板(2)における第１金属板(1)の各長辺に近接した３３mmの長さを有する２つの長辺との距離ａ、ｃを測定した。
After that, the first metal plate (1), the insulating plate (2), and the second metal plate (3) temporarily fixed by the brazing jig (10) in a pressurized state are placed in a heating furnace in a vacuum atmosphere. And heated at 600 ° C. for 10 minutes and then cooled. Thus, three insulating circuit boards (32) were manufactured by brazing the insulating plate (2), the first metal plate (1), and the second metal plate (3).
Comparative Experimental Example Three insulations were made in the same manner as in the above experimental example, except that the spring receiver (18) used a brazing jig that did not have the spherical body holding member (21) holding the spherical body (15). A circuit board (32) was manufactured.
Evaluation Test In the above experimental example and comparative experimental example, before brazing the insulating plate (2) with the first metal plate (1) and the second metal plate (3), the brazing jig (10) is used in advance. Two short sides having a length (= A) of 26 mm in the temporarily fixed first metal plate (1) and 28 mm in proximity to each short side of the first metal plate (1) in the insulating plate (2) Distances b and d between two short sides having a length, two long sides having a length (= B) of 31 mm in the first metal plate (1), and the first metal plate in the insulating plate (2) The distances a and c between two long sides having a length of 33 mm close to each long side of (1) were measured.
また、絶縁板(2)と第１金属板(1)および第２金属板(3)とのろう付の後に、第１金属板(1)における２つの短辺の長さＡ１mmおよび２つの長辺の長さＢ１mmを測定し、第１金属板(1)における短辺と平行な方向の熱膨張量：（Ａ１−Ａ）mm、および長辺と平行な方向の熱膨張量：（Ｂ１−Ｂ）mmを求めた。 In addition, after brazing the insulating plate (2) with the first metal plate (1) and the second metal plate (3), the length A1mm of the two short sides and the two lengths of the first metal plate (1) The side length B1 mm is measured, the amount of thermal expansion in the direction parallel to the short side in the first metal plate (1): (A1-A) mm, and the amount of thermal expansion in the direction parallel to the long side: (B1- B) mm was determined.
さらに、絶縁板(2)と第１金属板(1)および第２金属板(3)とのろう付の後に、第１金属板(1)におけるＡ１mmの長さを有する２つの短辺と、絶縁板(2)における第１金属板(1)の各短辺に近接した２８mmの長さを有する２つの短辺との距離ｂ’、ｄ’、および第１金属板(1)におけるＢ１mmの長さを有する２つの長辺と、絶縁板(2)における第１金属板(1)の各長辺に近接した３３mmの長さを有する２つの長辺との距離ａ’、ｃ’を測定した。
Furthermore, after brazing the insulating plate (2) with the first metal plate (1) and the second metal plate (3), two short sides having a length of A1 mm in the first metal plate (1), Distances b ′ and d ′ between two short sides having a length of 28 mm close to each short side of the first metal plate (1) in the insulating plate (2) and B1 mm in the first metal plate (1) Measure distances a ′ and c ′ between two long sides having a length and two long sides having a length of 33 mm close to each long side of the
そして、各絶縁回路基板(32)における（ａ−ａ’）−（Ａ１−Ａ）／２・・・値(i)、（ｃ−ｃ’）−（Ａ１−Ａ）／２・・・値(ii)、（ｂ−ｂ’）−（Ｂ１−Ｂ）／２・・・値(iii)、（ｄ−ｄ’）−（Ｂ１−Ｂ）／２・・・値(iv)を求めた。各絶縁回路基板(32)における上述した４つの値(i)〜(iv)のうちの最大値を表１に示す。 And (aa ')-(A1-A) / 2 ... value (i), (cc')-(A1-A) / 2 ... value in each insulated circuit board (32). (ii), (bb ')-(B1-B) / 2 ... value (iii), (dd')-(B1-B) / 2 ... value (iv) were determined. . Table 1 shows the maximum value of the four values (i) to (iv) described above for each insulated circuit board (32).
表１に示す結果から、押圧板(12)とコイルばね(14)との間に球体(15)が配置されているろう付治具(10)を用いてろう付を行った場合には、押圧板(12)とコイルばね(14)との間に球体(15)が配置されていないろう付治具を用いてろう付を行った場合に比べて、第１金属板(1)の位置ずれが著しく低減されていることが分かる。 From the results shown in Table 1, when brazing was performed using a brazing jig (10) in which a sphere (15) was placed between the pressing plate (12) and the coil spring (14), The position of the first metal plate (1) compared to the case where brazing is performed using a brazing jig in which the sphere (15) is not disposed between the pressing plate (12) and the coil spring (14). It can be seen that the deviation is significantly reduced.
図７〜図９は、ろう付治具の他の実施形態を示す。 7 to 9 show other embodiments of the brazing jig.
図７に示すろう付治具(40)の場合、ばね受け(18)は、ロッド(17)の下端に着脱自在に取り付けられ、かつロッド(17)の下端から外方に張り出す外方張り出し部(41a)を有する円板状のばね受け本体(41)と、ばね受け本体(41)に上下動自在に吊持され、かつばね受け本体(41)の下面に沿う部分を有するとともに下面が平坦面となっている円盤状の球体保持部材(42)とを備えており、球体(15)はばね受け(18)に保持されている。 In the case of the brazing jig (40) shown in FIG. 7, the spring receiver (18) is detachably attached to the lower end of the rod (17) and projects outward from the lower end of the rod (17). A disc-shaped spring receiver body (41) having a portion (41a), a spring receiver body (41) suspended vertically and having a portion along the lower surface of the spring receiver body (41), and a lower surface And a disk-shaped sphere holding member (42) which is a flat surface, and the sphere (15) is held by a spring receiver (18).
ばね受け本体(41)の上面には、軸線がばね受け本体(41)の中心線と一致したおねじ部(43)が、上方突出状に一体に設けられており、おねじ部(43)がロッド(17)のめねじ穴(17a)にねじ嵌められることによって、ばね受け本体(41)がロッド(17)に着脱自在に取り付けられている。おねじ部(43)は上端が開口した円筒状であり、その外周面にねじが形成されている。ばね受け本体(41)の中心部でかつおねじ部(43)により囲まれた部分には上下方向にのびる貫通穴(44)が形成されている。 On the upper surface of the spring receiver body (41), an external thread portion (43) whose axis line coincides with the center line of the spring receiver body (41) is integrally provided so as to protrude upward, and the external thread portion (43) Is fitted into the female screw hole (17a) of the rod (17), so that the spring receiver body (41) is detachably attached to the rod (17). The male thread portion (43) has a cylindrical shape with an open upper end, and a screw is formed on the outer peripheral surface thereof. A through hole (44) extending in the vertical direction is formed at a center portion of the spring receiving body (41) and surrounded by the external thread portion (43).
球体保持部材(42)の上面の中心部には上方に突出したピン(45)が固定されており、ピン(45)がばね受け(18)の貫通穴(44)にばね受け(18)に対して上下動自在に通されている。ピン(45)の上端部には貫通穴(44)の穴径よりも大きい頭部(45a)が一体に形成され、これにより球体保持部材(42)がばね受け本体(41)に上下動自在に吊持されるとともに、ばね受け本体(41)からの脱落が防止されている。球体保持部材(42)におけるピン(45)の周りの部分でかつばね受け本体(41)の下面に沿う部分に、上方に開口しかつピン(45)を中心とした円環状の球体収容溝(46)が形成されており、球体収容溝(46)内に複数の球体(15)が入れられている。球体収容溝(46)の径方向内側面と同外側面との間隔は球体(15)の直径よりも大きくなっている。また、球体収容溝(46)の深さは球体(15)の直径よりも小さくなっており、球体(15)の一部が、常に球体保持部材(42)の上面よりも上方に突出するようになっている。 A pin (45) protruding upward is fixed to the center of the upper surface of the spherical body holding member (42), and the pin (45) is connected to the through hole (44) of the spring receiver (18) to the spring receiver (18). On the other hand, it can be moved up and down. A head (45a) larger than the hole diameter of the through hole (44) is integrally formed at the upper end of the pin (45), so that the spherical body holding member (42) can be moved up and down on the spring receiving body (41). And is prevented from falling off the spring receiver body (41). An annular sphere receiving groove (opening upward and centering on the pin (45) in a portion around the pin (45) in the sphere holding member (42) and along a lower surface of the spring receiving body (41) ( 46) is formed, and a plurality of spheres (15) are placed in the sphere housing groove (46). The distance between the radially inner side surface and the outer side surface of the spherical body accommodation groove (46) is larger than the diameter of the spherical body (15). Further, the depth of the sphere receiving groove (46) is smaller than the diameter of the sphere (15), and a part of the sphere (15) always protrudes upward from the upper surface of the sphere holding member (42). It has become.
図８に示すろう付治具(50)の場合、ばね受け(18)は、ロッド(17)の下端に着脱自在に取り付けられ、かつロッド(17)の下端から外方に張り出してコイルばね(14)の下端を受ける外方張り出し部(51a)を有するとともに下面が平坦面となっているばね受け本体(51)と、ばね受け本体(51)に取り付けられかつ球体(15)を吸着する永久磁石(52)とを備えており、強磁性体からなる複数の球体(15)がばね受け本体(51)の下面に吸着されている。 In the case of the brazing jig (50) shown in FIG. 8, the spring receiver (18) is detachably attached to the lower end of the rod (17), and protrudes outward from the lower end of the rod (17) to form a coil spring ( 14) a spring receiving body (51) having an outward projecting portion (51a) for receiving the lower end of 14) and a flat bottom surface, and a permanent attached to the spring receiving body (51) and adsorbing the sphere (15) And a plurality of spheres (15) made of a ferromagnetic material are adsorbed on the lower surface of the spring receiving body (51).
ばね受け本体(51)の上面には、軸線がばね受け本体(51)の中心線と一致したおねじ部(53)が、上方突出状に一体に設けられており、おねじ部がロッド(17)のめねじ穴(17a)にねじ嵌められることによって、ばね受け本体(51)がロッド(17)に着脱自在に取り付けられている。おねじ部(53)は上端が開口した円筒状であり、その外周面にねじが形成されている。おねじ部(53)内に永久磁石(52)が配置されている。そして、球体(15)が、永久磁石(52)によりばね受け本体(51)の下面に吸着されている。 On the upper surface of the spring receiver body (51), a male thread portion (53) whose axis line coincides with the center line of the spring receiver body (51) is integrally provided in an upward projecting manner, and the male thread portion is a rod ( The spring receiver body (51) is detachably attached to the rod (17) by being screwed into the female screw hole (17a) of 17). The male thread portion (53) has a cylindrical shape with an open upper end, and a screw is formed on the outer peripheral surface thereof. A permanent magnet (52) is disposed in the male thread portion (53). The spherical body (15) is attracted to the lower surface of the spring receiving body (51) by the permanent magnet (52).
図９に示すろう付治具(60)の場合、ばね受け(18)は、ロッド(17)の下端に着脱自在に取り付けられ、かつロッド(17)の下端から外方に張り出してコイルばね(14)の下端を受ける外方張り出し部(61a)を有する円板(61)からなる。円板(61)の下面は平坦面となっており、円板(61)が球体転動部を兼ねている。 In the case of the brazing jig (60) shown in FIG. 9, the spring receiver (18) is detachably attached to the lower end of the rod (17) and protrudes outward from the lower end of the rod (17) to the coil spring ( It comprises a disc (61) having an outwardly projecting portion (61a) for receiving the lower end of 14). The lower surface of the disc (61) is a flat surface, and the disc (61) also serves as a sphere rolling part.
また、押圧板(12)は、上面の中央部に上方に開口した凹所(62a)を有する押圧板本体(62)と、押圧板本体(62)の凹所(62a)内に嵌め入れられた球体保持部材(63)とを備えており、球体(15)は押圧板(12)に保持されている。球体保持部材(63)は、上下方向に貫通した穴(64a)を有するリング(64)と、リング(64)の穴(64a)の下端開口を閉鎖する閉鎖板(65)とよりなり、これにより球体保持部材(63)に上方に開口した球体収容凹所(66)が形成されて、球体収容凹所(66)内に複数の球体(15)が入れられている。球体収容凹所(66)の内周面、すなわちリング(64)の穴(64a)の内周面の上側部分は、上方に向かって径方向内方に傾斜している。また、球体保持部材(63)の厚み、すなわち球体収容凹所(66)の上下方向の深さは球体(15)の直径よりも小さく、球体(15)の一部が、常に球体保持部材(63)の上面よりも上方に突出するようになっている。 Further, the pressing plate (12) is fitted into the pressing plate main body (62) having a recess (62a) opened upward at the center of the upper surface, and the recess (62a) of the pressing plate main body (62). And a spherical body holding member (63), and the spherical body (15) is held by the pressing plate (12). The spherical body holding member (63) includes a ring (64) having a hole (64a) penetrating in the vertical direction and a closing plate (65) for closing the lower end opening of the hole (64a) of the ring (64). Thus, a spherical housing recess (66) opened upward is formed in the spherical body holding member (63), and a plurality of spherical bodies (15) are placed in the spherical housing recess (66). The inner peripheral surface of the spherical body accommodating recess (66), that is, the upper portion of the inner peripheral surface of the hole (64a) of the ring (64) is inclined inward in the radial direction. In addition, the thickness of the sphere holding member (63), that is, the depth in the vertical direction of the sphere receiving recess (66) is smaller than the diameter of the sphere (15), and a part of the sphere (15) is always a sphere holding member ( It protrudes upward from the upper surface of 63).
この発明によるろう付治具は、絶縁回路基板を製造する場合のように、複数の被ろう付部材を、隣り合う被ろう付部材どうしの間に所定大きさの平面が面接触した面接触部分を有するように積層した状態でろう付する際に好適に用いられる。 A brazing jig according to the present invention is a surface contact portion in which a plurality of members to be brazed are in surface contact with a plane of a predetermined size between adjacent brazed members, as in the case of manufacturing an insulated circuit board. It is suitably used when brazing in a laminated state so as to have.
(1)：第１金属板（被ろう付部材）
(2)：絶縁板（被ろう付部材）
(3)：第２金属板（被ろう付部材）
(10)(40)(50)(60)：ろう付治具
(11)：支持部材
(12)：押圧板
(13)：加圧部材
(14)：コイルばね
(15)：球体
(17)：ロッド
(18)：ばね受け
(20)：ばね受け本体
(21)：球体保持部材
(23)：球体収容空間
(41)：ばね受け本体
(41a)：外方張り出し部
(42)：球体保持部材
(46)：球体収容溝
(51)：ばね受け本体
(51a)：外方張り出し部
(52)：永久磁石
(61)：円板
(61a)：外方張り出し部
(66)：球体収容凹所
(1): 1st metal plate (brazed member)
(2): Insulating plate (brazed member)
(3): Second metal plate (brazed member)
(10) (40) (50) (60): Brazing jig
(11): Support member
(12): Press plate
(13): Pressure member
(14): Coil spring
(15): Sphere
(17): Rod
(18): Spring support
(20): Spring support body
(21): Sphere holding member
(23): Sphere containing space
(41): Spring support body
(41a): Outward projecting part
(42): Sphere holding member
(46): Sphere receiving groove
(51): Spring support body
(51a): Outward projecting part
(52): Permanent magnet
(61): Disc
(61a): Outward projecting part
(66): Sphere receiving recess
Claims (12)
被ろう付部材を支持する支持部材と、支持部材に支持された被ろう付部材上に載せられる押圧板と、支持部材の上方に間隔をおいて上下動自在に配置される加圧部材と、押圧板と加圧部材との間に配置されかつ加圧部材が下降した際に圧縮されるとともに、圧縮された際の反発力を押圧板に伝えるコイルばねと、押圧板とコイルばねとの間に配置されている球体とを備えており、加圧部材に、垂直状のロッドが加圧部材に対して上下動自在に配置され、ロッドの周囲にコイルばねが配置され、コイルばねの下端がロッドの下端に設けられたばね受けに受けられ、ばね受けに球体が保持されているろう付治具。 A brazing jig used when brazing a plurality of brazed members in a state of being laminated so that a plane of a predetermined size has a surface contact portion between the adjacent brazed members. There,
A support member that supports the member to be brazed, a pressing plate that is placed on the member to be brazed supported by the support member, and a pressure member that is disposed above and below the support member so as to be vertically movable, A coil spring disposed between the pressing plate and the pressing member and compressed when the pressing member descends, and transmits a repulsive force when compressed to the pressing plate, and between the pressing plate and the coil spring A vertical rod is disposed on the pressure member so as to be movable up and down relative to the pressure member, a coil spring is disposed around the rod, and the lower end of the coil spring is A brazing jig which is received by a spring receiver provided at the lower end of the rod, and a sphere is held by the spring receiver .
被ろう付部材を支持する支持部材と、支持部材に支持された被ろう付部材上に載せられる押圧板と、支持部材の上方に間隔をおいて上下動自在に配置される加圧部材と、押圧板と加圧部材との間に配置されかつ加圧部材が下降した際に圧縮されるとともに、圧縮された際の反発力を押圧板に伝えるコイルばねと、押圧板とコイルばねとの間に配置されている球体とを備えており、加圧部材に、垂直状のロッドが加圧部材に対して上下動自在に配置され、ロッドの周囲にコイルばねが配置され、コイルばねの下端がロッドの下端に設けられたばね受けに受けられ、押圧板に球体が保持されているろう付治具。 A brazing jig used when brazing a plurality of brazed members in a state of being laminated so that a plane of a predetermined size has a surface contact portion between the adjacent brazed members. There,
A support member that supports the member to be brazed, a pressing plate that is placed on the member to be brazed supported by the support member, and a pressure member that is disposed above and below the support member so as to be vertically movable, A coil spring disposed between the pressing plate and the pressing member and compressed when the pressing member descends, and transmits a repulsive force when compressed to the pressing plate, and between the pressing plate and the coil spring A vertical rod is disposed on the pressure member so as to be movable up and down relative to the pressure member, a coil spring is disposed around the rod, and the lower end of the coil spring is A brazing jig that is received by a spring receiver provided at the lower end of the rod, and a spherical body is held on the pressing plate .
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| CN106475690B (en) * | 2016-10-31 | 2018-05-04 | 广东华电科技产业有限公司 | A kind of pinpoint circuit board cutting clamping device |
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| KR102168084B1 (en) * | 2020-07-31 | 2020-10-20 | (주)휴디즈 | Mobile cover glass handling apparatus and etching system with the same |
| CN114012197A (en) * | 2021-11-04 | 2022-02-08 | 成都凯天电子股份有限公司 | Brazing clamp for high-temperature environment |
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