JP5824436B2 - 光電変換素子及びそれを用いた撮像素子 - Google Patents
光電変換素子及びそれを用いた撮像素子 Download PDFInfo
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- JP5824436B2 JP5824436B2 JP2012216558A JP2012216558A JP5824436B2 JP 5824436 B2 JP5824436 B2 JP 5824436B2 JP 2012216558 A JP2012216558 A JP 2012216558A JP 2012216558 A JP2012216558 A JP 2012216558A JP 5824436 B2 JP5824436 B2 JP 5824436B2
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- photoelectric conversion
- fullerene
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- 238000006243 chemical reaction Methods 0.000 title claims description 200
- 238000003384 imaging method Methods 0.000 title description 23
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 claims description 89
- 125000005842 heteroatom Chemical group 0.000 claims description 83
- 229910003472 fullerene Inorganic materials 0.000 claims description 82
- 230000000903 blocking effect Effects 0.000 claims description 79
- 239000000463 material Substances 0.000 claims description 35
- 150000001875 compounds Chemical class 0.000 claims description 28
- 239000004065 semiconductor Substances 0.000 claims description 26
- 125000004432 carbon atom Chemical group C* 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 11
- 125000001434 methanylylidene group Chemical group [H]C#[*] 0.000 claims description 9
- 238000002156 mixing Methods 0.000 claims description 9
- 239000010410 layer Substances 0.000 description 384
- 238000007789 sealing Methods 0.000 description 47
- 239000010408 film Substances 0.000 description 42
- 238000000034 method Methods 0.000 description 42
- 125000001424 substituent group Chemical group 0.000 description 26
- 239000000758 substrate Substances 0.000 description 26
- -1 quinolidine ring Chemical group 0.000 description 21
- 239000010409 thin film Substances 0.000 description 21
- 125000003118 aryl group Chemical group 0.000 description 19
- 230000000052 comparative effect Effects 0.000 description 17
- 125000000623 heterocyclic group Chemical group 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 15
- 230000031700 light absorption Effects 0.000 description 13
- 125000000217 alkyl group Chemical group 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 12
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 12
- 206010047571 Visual impairment Diseases 0.000 description 11
- 238000000231 atomic layer deposition Methods 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 11
- 230000035945 sensitivity Effects 0.000 description 11
- 125000000732 arylene group Chemical group 0.000 description 9
- 230000006866 deterioration Effects 0.000 description 9
- 125000001624 naphthyl group Chemical group 0.000 description 9
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 8
- 230000005684 electric field Effects 0.000 description 8
- 230000004298 light response Effects 0.000 description 8
- 239000011368 organic material Substances 0.000 description 8
- HNYOPLTXPVRDBG-UHFFFAOYSA-N barbituric acid Chemical class O=C1CC(=O)NC(=O)N1 HNYOPLTXPVRDBG-UHFFFAOYSA-N 0.000 description 7
- 239000000872 buffer Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 150000004767 nitrides Chemical class 0.000 description 7
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 7
- 230000002829 reductive effect Effects 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 229910044991 metal oxide Inorganic materials 0.000 description 6
- 150000004706 metal oxides Chemical class 0.000 description 6
- 150000002894 organic compounds Chemical class 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 6
- 230000003247 decreasing effect Effects 0.000 description 5
- QNXSIUBBGPHDDE-UHFFFAOYSA-N indan-1-one Chemical class C1=CC=C2C(=O)CCC2=C1 QNXSIUBBGPHDDE-UHFFFAOYSA-N 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 229910010272 inorganic material Inorganic materials 0.000 description 5
- 239000011147 inorganic material Substances 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 238000001771 vacuum deposition Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- ADHAJDDBRUOZHJ-UHFFFAOYSA-N 1-benzothiophen-3-one Chemical class C1=CC=C2C(=O)CSC2=C1 ADHAJDDBRUOZHJ-UHFFFAOYSA-N 0.000 description 4
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical group C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical group C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 125000003342 alkenyl group Chemical group 0.000 description 4
- 125000005577 anthracene group Chemical group 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 238000010549 co-Evaporation Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical group C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical class N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 4
- 229910001887 tin oxide Inorganic materials 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 239000011787 zinc oxide Substances 0.000 description 4
- ZOBPZXTWZATXDG-UHFFFAOYSA-N 1,3-thiazolidine-2,4-dione Chemical class O=C1CSC(=O)N1 ZOBPZXTWZATXDG-UHFFFAOYSA-N 0.000 description 3
- RVBUGGBMJDPOST-UHFFFAOYSA-N 2-thiobarbituric acid Chemical compound O=C1CC(=O)NC(=S)N1 RVBUGGBMJDPOST-UHFFFAOYSA-N 0.000 description 3
- CAAMSDWKXXPUJR-UHFFFAOYSA-N 3,5-dihydro-4H-imidazol-4-one Chemical class O=C1CNC=N1 CAAMSDWKXXPUJR-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical group C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- FZWLAAWBMGSTSO-UHFFFAOYSA-N Thiazole Chemical group C1=CSC=N1 FZWLAAWBMGSTSO-UHFFFAOYSA-N 0.000 description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000004305 biphenyl Substances 0.000 description 3
- SKOLWUPSYHWYAM-UHFFFAOYSA-N carbonodithioic O,S-acid Chemical compound SC(S)=O SKOLWUPSYHWYAM-UHFFFAOYSA-N 0.000 description 3
- 229940125904 compound 1 Drugs 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- GVEPBJHOBDJJJI-UHFFFAOYSA-N fluoranthene Chemical class C1=CC(C2=CC=CC=C22)=C3C2=CC=CC3=C1 GVEPBJHOBDJJJI-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000005525 hole transport Effects 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 3
- DZVCFNFOPIZQKX-LTHRDKTGSA-M merocyanine Chemical class [Na+].O=C1N(CCCC)C(=O)N(CCCC)C(=O)C1=C\C=C\C=C/1N(CCCS([O-])(=O)=O)C2=CC=CC=C2O\1 DZVCFNFOPIZQKX-LTHRDKTGSA-M 0.000 description 3
- 239000012044 organic layer Substances 0.000 description 3
- 125000002971 oxazolyl group Chemical group 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical group C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- DNTVKOMHCDKATN-UHFFFAOYSA-N pyrazolidine-3,5-dione Chemical class O=C1CC(=O)NN1 DNTVKOMHCDKATN-UHFFFAOYSA-N 0.000 description 3
- 150000003219 pyrazolines Chemical class 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- XBYRMPXUBGMOJC-UHFFFAOYSA-N 1,2-dihydropyrazol-3-one Chemical class OC=1C=CNN=1 XBYRMPXUBGMOJC-UHFFFAOYSA-N 0.000 description 2
- UHKAJLSKXBADFT-UHFFFAOYSA-N 1,3-indandione Chemical class C1=CC=C2C(=O)CC(=O)C2=C1 UHKAJLSKXBADFT-UHFFFAOYSA-N 0.000 description 2
- FCEHBMOGCRZNNI-UHFFFAOYSA-N 1-benzothiophene Chemical group C1=CC=C2SC=CC2=C1 FCEHBMOGCRZNNI-UHFFFAOYSA-N 0.000 description 2
- 125000004105 2-pyridyl group Chemical group N1=C([*])C([H])=C([H])C([H])=C1[H] 0.000 description 2
- GCSVNNODDIEGEX-UHFFFAOYSA-N 2-sulfanylidene-1,3-oxazolidin-4-one Chemical compound O=C1COC(=S)N1 GCSVNNODDIEGEX-UHFFFAOYSA-N 0.000 description 2
- QWZAOSKLFKAEOK-UHFFFAOYSA-N 3,3-dimethyl-2h-inden-1-one Chemical compound C1=CC=C2C(C)(C)CC(=O)C2=C1 QWZAOSKLFKAEOK-UHFFFAOYSA-N 0.000 description 2
- XVTQSYKCADSUHN-UHFFFAOYSA-N 3-methyl-2,3-dihydroinden-1-one Chemical compound C1=CC=C2C(C)CC(=O)C2=C1 XVTQSYKCADSUHN-UHFFFAOYSA-N 0.000 description 2
- ONKCIMOQGCARHN-UHFFFAOYSA-N 3-methyl-n-[4-[4-(3-methylanilino)phenyl]phenyl]aniline Chemical compound CC1=CC=CC(NC=2C=CC(=CC=2)C=2C=CC(NC=3C=C(C)C=CC=3)=CC=2)=C1 ONKCIMOQGCARHN-UHFFFAOYSA-N 0.000 description 2
- UJOBWOGCFQCDNV-UHFFFAOYSA-N 9H-carbazole Chemical compound C1=CC=C2C3=CC=CC=C3NC2=C1 UJOBWOGCFQCDNV-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
- 239000005751 Copper oxide Substances 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N Furan Chemical group C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- SIKJAQJRHWYJAI-UHFFFAOYSA-N Indole Chemical compound C1=CC=C2NC=CC2=C1 SIKJAQJRHWYJAI-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 2
- NRCMAYZCPIVABH-UHFFFAOYSA-N Quinacridone Chemical class N1C2=CC=CC=C2C(=O)C2=C1C=C1C(=O)C3=CC=CC=C3NC1=C2 NRCMAYZCPIVABH-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000007983 Tris buffer Substances 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 2
- 125000001931 aliphatic group Chemical group 0.000 description 2
- 125000004453 alkoxycarbonyl group Chemical group 0.000 description 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 150000001601 aromatic carbocyclic compounds Chemical class 0.000 description 2
- 125000005161 aryl oxy carbonyl group Chemical group 0.000 description 2
- 150000007656 barbituric acids Chemical class 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 235000010290 biphenyl Nutrition 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229940126214 compound 3 Drugs 0.000 description 2
- 229910000431 copper oxide Inorganic materials 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
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- 239000000428 dust Substances 0.000 description 2
- 239000000975 dye Substances 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 2
- WJRBRSLFGCUECM-UHFFFAOYSA-N hydantoin Chemical compound O=C1CNC(=O)N1 WJRBRSLFGCUECM-UHFFFAOYSA-N 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 2
- 125000002883 imidazolyl group Chemical group 0.000 description 2
- 125000002183 isoquinolinyl group Chemical group C1(=NC=CC2=CC=CC=C12)* 0.000 description 2
- 125000004957 naphthylene group Chemical group 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- WCPAKWJPBJAGKN-UHFFFAOYSA-N oxadiazole Chemical group C1=CON=N1 WCPAKWJPBJAGKN-UHFFFAOYSA-N 0.000 description 2
- 150000004880 oxines Chemical class 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 125000003373 pyrazinyl group Chemical group 0.000 description 2
- BBEAQIROQSPTKN-UHFFFAOYSA-N pyrene Chemical compound C1=CC=C2C=CC3=CC=CC4=CC=C1C2=C43 BBEAQIROQSPTKN-UHFFFAOYSA-N 0.000 description 2
- 125000000714 pyrimidinyl group Chemical group 0.000 description 2
- 150000003233 pyrroles Chemical class 0.000 description 2
- 125000002943 quinolinyl group Chemical group N1=C(C=CC2=CC=CC=C12)* 0.000 description 2
- KIWUVOGUEXMXSV-UHFFFAOYSA-N rhodanine Chemical compound O=C1CSC(=S)N1 KIWUVOGUEXMXSV-UHFFFAOYSA-N 0.000 description 2
- 150000003967 siloles Chemical group 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- VJYJJHQEVLEOFL-UHFFFAOYSA-N thieno[3,2-b]thiophene Chemical group S1C=CC2=C1C=CS2 VJYJJHQEVLEOFL-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 150000003852 triazoles Chemical group 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- BLSQLHNBWJLIBQ-ZEQKJWHPSA-N (2S,4R)-terconazole Chemical class C1CN(C(C)C)CCN1C(C=C1)=CC=C1OC[C@H]1O[C@](CN2N=CN=C2)(C=2C(=CC(Cl)=CC=2)Cl)OC1 BLSQLHNBWJLIBQ-ZEQKJWHPSA-N 0.000 description 1
- 125000004178 (C1-C4) alkyl group Chemical group 0.000 description 1
- UWRZIZXBOLBCON-VOTSOKGWSA-N (e)-2-phenylethenamine Chemical class N\C=C\C1=CC=CC=C1 UWRZIZXBOLBCON-VOTSOKGWSA-N 0.000 description 1
- LXCYNALXWGQUIK-UHFFFAOYSA-N 1,1-dioxo-1-benzothiophen-3-one Chemical compound C1=CC=C2C(=O)CS(=O)(=O)C2=C1 LXCYNALXWGQUIK-UHFFFAOYSA-N 0.000 description 1
- UGUHFDPGDQDVGX-UHFFFAOYSA-N 1,2,3-thiadiazole Chemical group C1=CSN=N1 UGUHFDPGDQDVGX-UHFFFAOYSA-N 0.000 description 1
- OCKYCCVSWVDVAL-UHFFFAOYSA-N 1,2-dimethylpyrazolidine-3,5-dione Chemical compound CN1N(C)C(=O)CC1=O OCKYCCVSWVDVAL-UHFFFAOYSA-N 0.000 description 1
- XDPKQGKEOCYMQC-UHFFFAOYSA-N 1,2-diphenylpyrazolidine-3,5-dione Chemical compound O=C1CC(=O)N(C=2C=CC=CC=2)N1C1=CC=CC=C1 XDPKQGKEOCYMQC-UHFFFAOYSA-N 0.000 description 1
- JGRCHNVLXORPNM-UHFFFAOYSA-N 1,2-oxazol-4-one Chemical class O=C1CON=C1 JGRCHNVLXORPNM-UHFFFAOYSA-N 0.000 description 1
- FLBAYUMRQUHISI-UHFFFAOYSA-N 1,8-naphthyridine Chemical group N1=CC=CC2=CC=CN=C21 FLBAYUMRQUHISI-UHFFFAOYSA-N 0.000 description 1
- VERMWGQSKPXSPZ-BUHFOSPRSA-N 1-[(e)-2-phenylethenyl]anthracene Chemical class C=1C=CC2=CC3=CC=CC=C3C=C2C=1\C=C\C1=CC=CC=C1 VERMWGQSKPXSPZ-BUHFOSPRSA-N 0.000 description 1
- IANQTJSKSUMEQM-UHFFFAOYSA-N 1-benzofuran Chemical group C1=CC=C2OC=CC2=C1 IANQTJSKSUMEQM-UHFFFAOYSA-N 0.000 description 1
- MVWPVABZQQJTPL-UHFFFAOYSA-N 2,3-diphenylcyclohexa-2,5-diene-1,4-dione Chemical class O=C1C=CC(=O)C(C=2C=CC=CC=2)=C1C1=CC=CC=C1 MVWPVABZQQJTPL-UHFFFAOYSA-N 0.000 description 1
- STTGYIUESPWXOW-UHFFFAOYSA-N 2,9-dimethyl-4,7-diphenyl-1,10-phenanthroline Chemical compound C=12C=CC3=C(C=4C=CC=CC=4)C=C(C)N=C3C2=NC(C)=CC=1C1=CC=CC=C1 STTGYIUESPWXOW-UHFFFAOYSA-N 0.000 description 1
- FQJQNLKWTRGIEB-UHFFFAOYSA-N 2-(4-tert-butylphenyl)-5-[3-[5-(4-tert-butylphenyl)-1,3,4-oxadiazol-2-yl]phenyl]-1,3,4-oxadiazole Chemical compound C1=CC(C(C)(C)C)=CC=C1C1=NN=C(C=2C=C(C=CC=2)C=2OC(=NN=2)C=2C=CC(=CC=2)C(C)(C)C)O1 FQJQNLKWTRGIEB-UHFFFAOYSA-N 0.000 description 1
- UXGVMFHEKMGWMA-UHFFFAOYSA-N 2-benzofuran Chemical group C1=CC=CC2=COC=C21 UXGVMFHEKMGWMA-UHFFFAOYSA-N 0.000 description 1
- BSKHPKMHTQYZBB-UHFFFAOYSA-N 2-methylpyridine Chemical compound CC1=CC=CC=N1 BSKHPKMHTQYZBB-UHFFFAOYSA-N 0.000 description 1
- HONWGFNQCPRRFM-UHFFFAOYSA-N 2-n-(3-methylphenyl)-1-n,1-n,2-n-triphenylbenzene-1,2-diamine Chemical compound CC1=CC=CC(N(C=2C=CC=CC=2)C=2C(=CC=CC=2)N(C=2C=CC=CC=2)C=2C=CC=CC=2)=C1 HONWGFNQCPRRFM-UHFFFAOYSA-N 0.000 description 1
- FTCOWMWIZNVSPP-UHFFFAOYSA-N 2-phenyl-4h-pyrazol-3-one Chemical compound O=C1CC=NN1C1=CC=CC=C1 FTCOWMWIZNVSPP-UHFFFAOYSA-N 0.000 description 1
- YNVBZLLLSMLFGT-UHFFFAOYSA-N 2-propylsulfanyl-1,4-dihydroimidazol-5-one Chemical compound CCCSC1=NCC(=O)N1 YNVBZLLLSMLFGT-UHFFFAOYSA-N 0.000 description 1
- UGWULZWUXSCWPX-UHFFFAOYSA-N 2-sulfanylideneimidazolidin-4-one Chemical class O=C1CNC(=S)N1 UGWULZWUXSCWPX-UHFFFAOYSA-N 0.000 description 1
- SOXFTCCVYBFENS-UHFFFAOYSA-N 3,3-diphenyl-2h-inden-1-one Chemical compound C12=CC=CC=C2C(=O)CC1(C=1C=CC=CC=1)C1=CC=CC=C1 SOXFTCCVYBFENS-UHFFFAOYSA-N 0.000 description 1
- IKQROFBYABVNTB-UHFFFAOYSA-N 3-ethyl-1,3-thiazolidine-2,4-dione Chemical compound CCN1C(=O)CSC1=O IKQROFBYABVNTB-UHFFFAOYSA-N 0.000 description 1
- ZILKBTSQUZJHOI-UHFFFAOYSA-N 3-ethyl-2-sulfanylidene-1,3-oxazolidin-4-one Chemical compound CCN1C(=O)COC1=S ZILKBTSQUZJHOI-UHFFFAOYSA-N 0.000 description 1
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- MABNMNVCOAICNO-UHFFFAOYSA-N selenophene Chemical group C=1C=C[se]C=1 MABNMNVCOAICNO-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 125000004469 siloxy group Chemical group [SiH3]O* 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 125000003808 silyl group Chemical group [H][Si]([H])([H])[*] 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- PJANXHGTPQOBST-UHFFFAOYSA-N stilbene Chemical class C=1C=CC=CC=1C=CC1=CC=CC=C1 PJANXHGTPQOBST-UHFFFAOYSA-N 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 125000005504 styryl group Chemical group 0.000 description 1
- 125000000020 sulfo group Chemical group O=S(=O)([*])O[H] 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 229940042055 systemic antimycotics triazole derivative Drugs 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 150000003518 tetracenes Chemical class 0.000 description 1
- 125000001935 tetracenyl group Chemical group C1(=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C12)* 0.000 description 1
- VELSFHQDWXAPNK-UHFFFAOYSA-N tetracontacyclo[25.6.5.516,28.44,32.35,11.321,34.28,10.212,15.222,35.229,31.113,20.124,38.02,6.014,19.017,25.018,23.030,37.033,36.547,54.446,53.448,58.126,51.150,52.03,45.07,42.09,61.039,40.041,43.044,63.049,76.055,78.056,62.057,68.059,64.060,67.065,69.066,71.070,73.072,75.074,77]octaheptaconta-1,3(45),4(48),5(61),6,8,10,12,14,16,18,20,22,24(39),25,27(38),28,30,32,34(42),35(40),36,41(43),44(63),46,49(76),50(77),51,53,55(78),56(62),57,59,64,66,68,70(73),71,74-nonatriacontaene Chemical compound c12c3c4c5c6c1c1c7c8c2c2c3c3c9c4c4c5c5c%10c%11c%12c%13c%14c%15c%12c%12c%16c%17c%18c%19c%20c%21c%17c%17c%22c%21c%21c%23c%20c%20c%19c%19c%24c%18c%16c%15c%15c%24c%16c(c7c%15c%14c1c6c5%13)c8c1c2c2c3c3c(c%21c5c%22c(c%11c%12%17)c%10c4c5c93)c%23c2c%20c1c%19%16 VELSFHQDWXAPNK-UHFFFAOYSA-N 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- GVIJJXMXTUZIOD-UHFFFAOYSA-N thianthrene Chemical group C1=CC=C2SC3=CC=CC=C3SC2=C1 GVIJJXMXTUZIOD-UHFFFAOYSA-N 0.000 description 1
- 125000004149 thio group Chemical group *S* 0.000 description 1
- ANRHNWWPFJCPAZ-UHFFFAOYSA-M thionine Chemical class [Cl-].C1=CC(N)=CC2=[S+]C3=CC(N)=CC=C3N=C21 ANRHNWWPFJCPAZ-UHFFFAOYSA-M 0.000 description 1
- 229930192474 thiophene Natural products 0.000 description 1
- 150000003577 thiophenes Chemical class 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- 125000005259 triarylamine group Chemical class 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- 125000005580 triphenylene group Chemical group 0.000 description 1
- 150000004961 triphenylmethanes Chemical class 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 125000001834 xanthenyl group Chemical group C1=CC=CC=2OC3=CC=CC=C3C(C12)* 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K39/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic radiation-sensitive element covered by group H10K30/00
- H10K39/30—Devices controlled by radiation
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/20—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising organic-organic junctions, e.g. donor-acceptor junctions
- H10K30/211—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising organic-organic junctions, e.g. donor-acceptor junctions comprising multiple junctions, e.g. double heterojunctions
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/30—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising bulk heterojunctions, e.g. interpenetrating networks of donor and acceptor material domains
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K39/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic radiation-sensitive element covered by group H10K30/00
- H10K39/30—Devices controlled by radiation
- H10K39/32—Organic image sensors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
- H10K85/621—Aromatic anhydride or imide compounds, e.g. perylene tetra-carboxylic dianhydride or perylene tetracarboxylic di-imide
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/631—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
- H10K85/633—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine comprising polycyclic condensed aromatic hydrocarbons as substituents on the nitrogen atom
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/649—Aromatic compounds comprising a hetero atom
- H10K85/657—Polycyclic condensed heteroaromatic hydrocarbons
- H10K85/6572—Polycyclic condensed heteroaromatic hydrocarbons comprising only nitrogen in the heteroaromatic polycondensed ring system, e.g. phenanthroline or carbazole
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- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
Description
光電変換層と一方の電極との間に備えられた電子ブロッキング層を有し、
光電変換層が、フラーレンとp型有機半導体とが混合されてなる複数層のバルクへテロ層からなり、
複数層のバルクへテロ層は、電子ブロッキング層側の層ほどフラーレンの含有率が高くなるように積層されてなり、
電子ブロッキング層に隣接するバルクへテロ層のフラーレンの含有率が70体積%以上であり、且つ、隣接するバルクへテロ層同士のフラーレンの含有率の差が15体積%以下であることを特徴とするものである。
図面を参照して、本発明にかかる一実施形態の光電変換素子について説明する。図1は、本実施形態の光電変換素子の構成を示す概略断面図である。本明細書の図面において、視認しやすくするため、各部の縮尺は適宜変更して示してある。
バルクへテロ層中のフラーレンの含有率は、40%〜80%が好ましい。
可視領域に吸収ピーク波長を有するp型有機半導体の量が少ないと、入射光の吸収量が低下する。従って、充分な入射光吸収量を得るためにはp型有機半導体をバルクへテロ層中に充分混入する必要がある。
光電変換層32で発生した光キャリアのうち正孔は、電子ブロッキング層31を経由して正孔捕集電極20で捕集される。本発明者は、電子ブロッキング層と隣接する光電変換層のフラーレンの含有率が高い程、界面の正孔輸送速度が速くなり、高速応答速度を実現しうることを見出した。
光電変換素子1を撮像素子等の光センサに用いる場合、デバイス化するために、カラーフィルターの形成や、ワイヤーボンディング工程等を行う必要がある。これらの工程で、撮像デバイスは200℃以上に加熱されるため、撮像デバイスに用いる有機光電変換膜には200℃以上の耐熱性が必要となる。
一般式(1)中、Z1は、少なくとも2つの炭素原子を含む環であって、5員環、6員環、又は、5員環及び6員環の少なくともいずれかを含む縮合環を表す。5員環、6員環、又は、5員環及び6員環の少なくともいずれかを含む縮合環としては、通常メロシアニン色素で酸性核として用いられるものが好ましく、その具体例としては例えば以下のものが挙げられる。
(b)ピラゾリノン核:例えば1−フェニル−2−ピラゾリン−5−オン、3−メチル−1−フェニル−2−ピラゾリン−5−オン、1−(2−ベンゾチアゾイル)−3−メチル−2−ピラゾリン−5−オン等。
(c)イソオキサゾリノン核:例えば3−フェニル−2−イソオキサゾリン−5−オン、3−メチル−2−イソオキサゾリン−5−オン等。
(d)オキシインドール核:例えば1−アルキル−2,3−ジヒドロ−2−オキシインドール等。
(e)2,4,6−トリケトヘキサヒドロピリミジン核:例えばバルビツール酸又は2−チオバルビツール酸及びその誘導体等。誘導体としては例えば1−メチル、1−エチル等の1−アルキル体、1,3−ジメチル、1,3−ジエチル、1,3−ジブチル等の1,3−ジアルキル体、1,3−ジフェニル、1,3−ジ(p−クロロフェニル)、1,3−ジ(p−エトキシカルボニルフェニル)等の1,3−ジアリール体、1−エチル−3−フェニル等の1−アルキル−1−アリール体、1,3−ジ(2―ピリジル)等の1,3位ジヘテロ環置換体等が挙げられる。
(f)2−チオ−2,4−チアゾリジンジオン核:例えばローダニン及びその誘導体等。誘導体としては例えば3−メチルローダニン、3−エチルローダニン、3−アリルローダニン等の3−アルキルローダニン、3−フェニルローダニン等の3−アリールローダニン、3−(2−ピリジル)ローダニン等の3位ヘテロ環置換ローダニン等が挙げられる。
(h)チアナフテノン核:例えば3(2H)−チアナフテノン−1,1−ジオキサイド等。
(i)2−チオ−2,5−チアゾリジンジオン核:例えば3−エチル−2−チオ−2,5−チアゾリジンジオン等。
(j)2,4−チアゾリジンジオン核:例えば2,4−チアゾリジンジオン、3−エチル−2,4−チアゾリジンジオン、3−フェニル−2,4−チアゾリジンジオン等。
(k)チアゾリン−4−オン核:例えば4−チアゾリノン、2−エチル−4−チアゾリノン等。
(l)2,4−イミダゾリジンジオン(ヒダントイン)核:例えば2,4−イミダゾリジンジオン、3−エチル−2,4−イミダゾリジンジオン等。
(m)2−チオ−2,4−イミダゾリジンジオン(2−チオヒダントイン)核:例えば2−チオ−2,4−イミダゾリジンジオン、3−エチル−2−チオ−2,4−イミダゾリジンジオン等。
(n)イミダゾリン−5−オン核:例えば2−プロピルメルカプト−2−イミダゾリン−5−オン等。
(o)3,5−ピラゾリジンジオン核:例えば1,2−ジフェニル−3,5−ピラゾリジンジオン、1,2−ジメチル−3,5−ピラゾリジンジオン等。
(p)ベンゾチオフェンー3−オン核:例えばベンゾチオフェンー3−オン、オキソベンゾチオフェンー3−オン、ジオキソベンゾチオフェンー3−オン等。
(q)インダノン核:例えば1−インダノン、3−フェニルー1−インダノン、3−メチルー1−インダノン、3,3−ジフェニルー1−インダノン、3,3−ジメチルー1−インダノン等。
D21が表すアリーレン基としては、D1が表すアリーレン環基と同義であり、その好ましい例も同様である。
Z3としては、A−2が好ましく、D32、及びD33はC−1、C−2、C−15、C−16から選択されることが好ましく、D31はB−1又はB−9であることが好ましい。
<基板及び電極>
基板10としては特に制限なく、シリコン基板、ガラス基板等を用いることができる。
受光層30は、少なくとも電子ブロッキング層31と既に述べた光電変換層32を含む層である。
電子ブロッキング層31は、正孔捕集電極20から光電変換層32に電子が注入されるのを抑制するための層である。有機材料単独膜で構成されてもよいし、複数の異なる有機材料あるいは無機材料の混合膜で構成されていてもよい。
<<光電変換層>>
複数層のバルクへテロ層からなる光電変換層32については既に述べたとおりであるのでここでは説明を省略する。
<<正孔ブロッキング層>>
光電変換素子1において、正孔ブロッキング層33は、外部電圧印加時に電子捕集電極40からの正孔注入を抑制する層であり、上に形成する層(本実施形態では電子捕集電極40)の形成時、光電変換層32を保護して成膜ダメージを抑制する機能を有する。
封止層50は、光電変換素子1、もしくは後記する撮像素子100の作製後に、水分子や酸素分子などの光電変換材料を劣化させる因子の侵入を阻止して、長期間の保存/使用にわたって、光電変換層の劣化を防止するための層である。また、封止層50は、封止層成膜後の撮像素子100の作製工程において溶液、プラズマなどに含まれる光電変換層を劣化させる因子の侵入を阻止して光電変換層を保護するための層でもある。
次に、光電変換素子1を備えた撮像素子100の構成について、図2を参照して説明する。図2は、本発明の一実施形態を説明するための撮像素子の概略構成を示す断面模式図である。この撮像素子は、デジタルカメラ、デジタルビデオカメラ等の撮像装置、電子内視鏡、携帯電話機等の撮像モジュール等に搭載して用いられる。
対向電極電圧供給部115と読み出し回路116が形成された回路基板上に、接続部105,106、複数の接続電極103、複数の画素電極104、及び絶縁層102を形成する。複数の画素電極104は、絶縁層102の表面に例えば正方格子状に配置する。
基板として、ガラス基板を用意し、基板上に、TiN正孔捕集電極(15nm厚)をスパッタ法により成膜し、次いで、真空蒸着法により電子ブロッキング層(上記化合物10)を成膜した(50nm厚)。
バルクへテロ層のフラーレン(C60)含有率又は第1のバルクへテロ層の膜厚を変化させた以外は実施例1と同様にして、各例の光電変換素子を作製し、実施例1と同様にして光電変換効率及び光応答速度を評価した。評価結果は、各例の電子ブロッキング層及びバルクへテロ層(光電変換層)の条件と共に表1に示した。表1において、光電変換効率は実施例1の光電変換効率を1とした場合の相対感度にて示してある。
バルクへテロ層(光電変換層)のp型有機半導体を化合物2に変更し、種々のフラーレン(C60)含有率又は第1のバルクへテロ層の膜厚にて各例の光電変換素子を作製し、実施例1と同様にして光電変換効率及び光応答速度を評価した。評価結果は、各例の電子ブロッキング層及びバルクへテロ層(光電変換層)の条件と共に表3に示した。表3において、光電変換効率は実施例10の光電変換効率を1とした場合の相対感度にて示してある。
10,101 基板
20 正孔捕集電極(電極)
30 受光層
31 電子ブロッキング層
32 光電変換層(バルクへテロ層)
32a 第1のバルクへテロ層
32b 第2のバルクへテロ層
33 正孔ブロッキング層
40 電子捕集電極(電極)
50 封止層
100 撮像素子
106 信号読み出し回路
120 回路基板
Claims (7)
- 一対の電極と、前記一対の電極に挟持された少なくとも光電変換層を含む受光層を有する有機光電変換素子であって、
前記光電変換層と一方の前記電極との間に備えられた電子ブロッキング層を有し、
前記光電変換層が、フラーレンとp型有機半導体とが混合されてなる複数層のバルクへテロ層からなり、
前記複数層のバルクへテロ層は、前記電子ブロッキング層側の層ほど前記フラーレンの含有率が高くなるように積層されてなり、
前記電子ブロッキング層に隣接する前記バルクへテロ層の前記フラーレンの含有率が70体積%以上であり、且つ、隣接するバルクへテロ層同士の前記フラーレンの含有率の差が15体積%以下であり、
前記電子ブロッキング層に隣接する前記バルクヘテロ層の膜厚が50nm以下であり、
前記p型有機半導体材料は、下記一般式(1)で表される化合物を含むことを特徴とする光電変換素子。
- 前記バルクへテロ層のフラーレンの混合比率が最も低い層の前記フラーレンの含有率が50体積%以上であることを特徴とする請求項1に記載の光電変換素子。
- 前記複数層のバルクへテロ層が2層からなることを特徴とする請求項1または2に記載の光電変換素子。
- 他方の電極が、受光側に配された透明電極であることを特徴とする請求項1〜3のいずれかに記載の光電変換素子。
- 前記一対の電極に外部から印加される電圧を前記一対の電極間の距離で割った値が1×105V/cm〜1×107V/cmであることを特徴とする請求項1〜4のいずれかに記載の光電変換素子。
- 複数の、請求項1〜5のいずれかに記載の光電変換素子と、
前記光電変換素子の前記光電変換層で発生した電荷に応じた信号を読み出す信号読出し回路が形成された回路基板とを備えてなることを特徴とする光センサ。 - 撮像素子であることを特徴とする請求項6に記載の光センサ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2012216558A JP5824436B2 (ja) | 2012-09-28 | 2012-09-28 | 光電変換素子及びそれを用いた撮像素子 |
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