JP5822437B2 - Retainer - Google Patents

Description

  The present invention relates to a holder for holding an object using the Bernoulli principle of fluid.

2. Description of the Related Art Conventionally, a holder that holds a workpiece using a negative pressure generated by Bernoulli's principle related to a fluid is known.
For example, as shown in FIG. 7, in Patent Document 1, a circular recess 2 is formed in the center of a plate member 1 having a circular holding surface 1a, and a surface continuous with the recess 2 is tapered. The tapered surface 2a is smoothly and continuously connected to the holding surface 1a.
A nozzle member 3 is incorporated in the recess 2.
The nozzle member 3 has one surface 3a at the same level as the holding surface 1a and forms a relay chamber 4 for supplying pressure fluid therein. A plurality of throttle outlets 5 continuing to the relay chamber 4 are formed radially.

The throttle nozzle 5 is formed so that the fluid ejection direction is parallel to the holding surface 1 a, and the diameter thereof is smaller than that of the relay chamber 4. By restricting the flow paths in this way, the total flow area of the plurality of throttle outlets 5 is made smaller than the flow area of the relay chamber 4.
A supply passage 6 formed in the plate member 1 is communicated with the relay chamber 4, and a pipe for guiding a fluid such as air is connected to the supply passage 6. When air is guided to the relay chamber 4 through this pipe, the air is guided to the plurality of throttle outlets 5. At this time, the total flow channel area of the plurality of throttle jets 5, that is, the effective cross-sectional area of the flow channel is made smaller than the effective cross-sectional area of the flow channel of the relay chamber 4, so In the process of passing through, the flow velocity accelerates from several times to ten times. The fluid sufficiently accelerated in this manner is sprayed onto the tapered surface 2a.

The air blown to the taper surface 2a is guided to the taper surface 2a by the Coanda effect, and is then guided from the taper surface 2a to the holding surface 1a.
Further, the fluid guided along the holding surface 1 a further flows along the holding surface 1 a and is discharged along the outer edge of the plate member 1.

  When the fluid accelerated and accelerated as described above flows along the holding surface 1a, a sufficient negative pressure is generated on the holding surface 1a due to the Bernoulli effect of the fluid. If this negative pressure is utilized, the workpiece | work W used as the to-be-held body placed in the predetermined distance from the holding surface 1a can be hold | maintained and conveyed in a non-contact state.

The work is kept in a non-contact state according to the following principle.
When holding the workpiece W from above with the holding surface 1a facing downward, the workpiece W is held at a position where gravity and the suction force by the negative pressure balance.
Further, when the work W is held from below with the holding surface 1a facing upward, the work W is balanced by the balance between the thrust that pushes up the work when the ejected fluid hits the work and the gravity acting on the work W. Will be held.

Further, as shown in FIG. 7, a pad 7 protruding from the holding surface 1 a can be provided, and the vicinity of the outer periphery of the workpiece W can be held in contact with the pad 7.
When the pad 7 is provided, the tip position of the pad 7 that contacts the workpiece W is provided in a region where the suction force formed by the negative pressure acts. Thus, the work W can be held by the suction force.

  Unlike a device that holds the workpiece in between, such a holder can hold the workpiece in a non-contact state or in a state where only a part is lightly touched. Can be held without. Therefore, for example, it is suitable for holding and transporting a workpiece that does not like holding marks or scratches, such as a semiconductor wafer.

International Publication No. 2002/047155

The holder as described above preferably includes a holding surface 1a that is substantially equal to or larger than the size of the workpiece W such as a semiconductor wafer to be held. The reason will be described below.
For example, when the workpiece W is larger than the holding surface 1a, the workpiece W held by the suction force based on the negative pressure generated by the jet flow from the throttle outlet 5 is held by the holding surface 1a as shown in FIG. It protrudes outside from the outer periphery.

Thus, even when the workpiece W protrudes, the workpiece W can be sucked and held if the suction force by the negative pressure is larger than the gravity of the workpiece W. However, when the holding tool is moved in the direction of the arrow x1 in order to transport the held work W, that is, upward in the drawing, the work W is subjected to the wind in the direction opposite to the moving direction, that is, in the direction of the arrow x2. become. The wind in the direction of the arrow x2 acts as a force for pulling the workpiece W away from the holding surface 1a, and the workpiece W may fall off the holder unless the suction force is significantly increased.
On the other hand, in order to increase the suction force, it is necessary to increase the speed of the fluid flowing along the holding surface 1a, which causes a problem that the fluid supply means is increased in size and noise is generated.
Therefore, it is preferable to maintain a dimensional relationship in which the workpiece W does not protrude from the holding surface 1a.

Therefore, it is practical to prepare and use an appropriate size holder for each workpiece size, and if various sizes of holders are required, it is natural that the cost will increase accordingly. .
Moreover, it is necessary to form the holding surface 1a having high flatness by, for example, machining, and manufacturing costs are required to form the large holding surface 1a.
An object of the present invention is to provide a holder that can be adapted to workpieces of various sizes at a low cost.

This invention presupposes a holder that holds a workpiece on a holding surface provided on a main body by utilizing Bernoulli's principle.
1st invention presupposes the said holding | maintenance tool, provided with the windscreen member which protrudes from the external shape of the said holding surface, and provided with the said windscreen member detachably with respect to a main body, and this windscreen member and holding | maintenance The entire workpiece held on the surface faces . In this way, with the windshield member and the workpiece facing each other, the entire workpiece is covered with the entire windshield member. And the attachment part of the windshield member with respect to this main body was located on the opposite side to the workpiece | work with the said holding surface as a boundary, It is characterized by the above-mentioned.

2nd invention presupposes the said 1st invention, the front-end | tip of the said wind-shield member is located in the workpiece | work surface hold | maintained on the said holding surface, or the outer periphery vicinity, and between a workpiece | work and a wind-shield member. It is characterized by preventing wind from being caught .

According to the 1st- 2nd invention, the workpiece | work of various magnitude | sizes can be hold | maintained now by providing the detachable big windshield member. Since the windshield member is not required to have a flat surface accuracy like the holding surface, it does not require machining and the manufacturing cost can be reduced.
Also, there is a problem that the main body of the holder having a large holding surface formed by machining is heavy and difficult to handle, but the windshield member can be reduced in weight, and the weight of the whole holder can be increased. Absent.
Furthermore, since all the windbreak members protruding from the holder main body are opposed to all the workpieces protruding from the main body, it is possible to reliably prevent receiving wind pressure when the holder main body is moved.
In particular, according to the second aspect of the invention, it is possible to prevent the wind from being caught between the held work and the windbreak member, and to maintain a more stable holding state.

It is sectional drawing of 1st Embodiment. It is a bottom view of a 1st embodiment. It is the figure which showed the state when the holder of 1st Embodiment hold | maintains and conveys a workpiece | work. It is sectional drawing of 2nd Embodiment. It is sectional drawing of 3rd Embodiment. It is sectional drawing of 4th Embodiment. It is sectional drawing of the holder of a prior art example. It is the figure which showed the state when the holder of a prior art example hold | maintains and conveys a workpiece | work.

In the first embodiment shown in FIGS. 1 and 2, the main body is constituted by the nozzle member 3 and the plate member 1 in the same manner as the conventional holder shown in FIG. 7. The configuration of the main body is the same as that of the conventional example. Accordingly, the same reference numerals are used for the same components as in the conventional example.
The holder according to the first embodiment is different from the conventional example in that a windbreak member 8 is provided on a surface 1b opposite to the holding surface 1a of the plate member 1. The windshield member 8 is a disk-shaped member having a diameter equivalent to that of the workpiece W to be held by the holder, and is attached to the surface 1b of the plate member 1 by screws 9. A circular opening 8 a is provided in the center of the windbreak member 8 so that an air pipe (not shown) can be connected to the supply passage 6.

In the holder of the first embodiment configured as described above, when a compressed fluid such as air is supplied from the supply passage 6, a negative pressure is formed by the jet air from the throttle outlet 5. The work W is held in contact with the pad 7.
FIG. 3 shows a state in which the workpiece W is held by the holder. Thus, when the workpiece | work W is hold | maintained, the part of the workpiece | work W which protruded from the outer periphery of the holder main body opposes the said windshield member 8, and is covered.
Therefore, even if the holder body is moved in the direction of the arrow x1 shown in FIG. 3, the wind pressure in the direction of the arrow x2 does not directly act on the workpiece W, and the held workpiece W can be prevented from falling off due to the wind pressure. .

  And since the said windshield member 8 should just be able to cover the upper surface of the workpiece | work W, exact | strict flatness is not requested | required like the plate member 1 which comprises a main body, processing cost is not bulky and weight reduction. be able to. Therefore, according to the holder of this embodiment, it is possible to stably hold and transport a large workpiece W that protrudes outward from the main body of the holding portion at low cost.

In the second embodiment shown in FIG. 4, the shape of the windshield member 10 is different from that of the windshield member 8 of the first embodiment, but other configurations are the same as those of the first embodiment. Therefore, the same reference numerals as those in FIG. 1 are used for the same components as those in the first embodiment, and the description of each component is also omitted.
The windshield member 10 is a member composed of a disk portion 10a and a ring portion 10b having a taper continuous to the outer periphery thereof, and the surface of the plate member 1 constituting the disk body 10a by a screw 9 constituting the main body of the holder. It is fixed to 1b.
An opening 10c is formed at the center of the plate portion 10a.
Further, the front end of the ring portion 10b is positioned in the vicinity of the outer periphery of the held workpiece W, and the outer periphery of the workpiece W is surrounded by the ring portion 10b.

  Also in the holder of the second embodiment, when the work W is held on the holding surface 1a side in the same manner as in the first embodiment, the windshield member 10 holds the work W protruding from the outer periphery of the main body of the holder. Will cover. Therefore, it is possible to prevent the wind pressure in the direction of the arrow x2 generated according to the movement of the holder body in the direction of the arrow x1 does not directly act on the work W, and the held work W is prevented from falling off by the wind pressure.

In particular, in the second embodiment, since the tip of the ring portion 10b is positioned in the vicinity of the outer periphery of the held workpiece W, it is difficult to wind the workpiece W and the windbreak member 10, and the workpiece W It is possible to maintain a more stable holding state during the conveyance.
Moreover, since the ring portion 10b of the windbreak member 10 is in a position that completely covers the outer periphery of the workpiece W, it is possible to prevent the workpiece W from shifting in the left-right direction in FIG.
However, when the ring portion 10b covers the outer periphery of the workpiece W as in the third embodiment, if the space between the outer periphery of the workpiece W becomes too narrow, the fluid ejected from the nozzle member 3 is difficult to flow to the outside. Thus, it may be difficult to form a negative pressure along the holding surface 1a. For this reason, an appropriate gap is formed between the inner wall of the ring portion 10b and the outer periphery of the workpiece W.
Alternatively, the ring member 10b may be formed with a vent hole for guiding the fluid ejected from the nozzle member 3 to the outside.

The third embodiment shown in FIG. 5 is the same as the first embodiment except that a plurality of guide members 11 are provided on the windshield member 8 of the first embodiment, and this guide member 11 is used. It is. Therefore, the same reference numerals as those in FIG. 1 are used for the same components as those in the first embodiment, and the description of each component is also omitted.
The guide member 11 is a rod-shaped member, and a plurality of the guide members 11 are provided along the outer periphery of the windbreak member 8 with a predetermined interval.
Then, the tip of the guide member 11 is positioned in the vicinity of the outer periphery of the held work W and on the opposite side of the holding surface 1a with respect to the work W, and the guide member 11 surrounds the outer periphery of the work W. It is configured.
That is, the holder of the third embodiment is for application to a workpiece W that is smaller than the windshield member 8 and fits inside the plurality of guide members 11.

Also in the holder of the third embodiment, when the workpiece W is held on the holding surface 1a side in the same manner as in the first embodiment, the windshield member 8 holds the workpiece W protruding from the outer periphery of the main body of the holder. Will cover. Therefore, it is possible to prevent the wind pressure in the direction of the arrow x2 generated according to the movement of the holder body in the direction of the arrow x1 does not directly act on the work W, and the held work W is prevented from falling off by the wind pressure.
Further, since the guide member 11 is positioned in the vicinity of the outer periphery of the held workpiece W to cover the workpiece W, it is possible to prevent the workpiece W from shifting in the left-right direction in FIG.

The fourth embodiment shown in FIG. 6 is different from the above-described other embodiments in that the ring-shaped windbreak member 12 is attached to the side surface of the plate member 1 constituting the holder body, but the other configurations are other. This is the same as the embodiment. Therefore, the same reference numerals are used for the same components as those in the above-described embodiment, and description of each component is also omitted.
The windshield member 12 is attached to the side surface of the plate member 1 via a ring-shaped attachment member 13 having an L-shaped cross section.

In this embodiment, the windbreak member 12 is attached to the attachment member 13 with the screw 9, and the attachment member 13 is fixed to the side surface of the plate member 1 with the screw 9.
However, the attachment method of the windshield member 12 is not restricted to this. For example, the plate member 1 may be press-fitted and fixed in the center of the attachment member 13 to which the windshield member 12 is fixed. Further, the windshield member 12 may be bonded to the attachment member 13. Alternatively, the windshield member 12 may be directly fixed to the plate member 1.

  Also in the holder of the fourth embodiment configured as described above, when the workpiece W is held on the holding surface 1a side in the same manner as in the first embodiment, the workpiece W protruding from the outer periphery of the main body of the holder is blown by the wind. The brush member 12 is covered. Therefore, it is possible to prevent the wind pressure in the direction of the arrow x2 generated according to the movement of the holder body in the direction of the arrow x1 does not directly act on the work W, and the held work W is prevented from falling off by the wind pressure.

In particular, in the fourth embodiment, by providing the windshield member 12 on the side surface of the plate member 1, compared to the case where the windshield member is provided on the surface 1b of the plate member as in the first embodiment. And the space | interval of the windshield member 12 and the workpiece | work W can be made small.
Therefore, it is possible to make it difficult for the wind to be caught between the workpiece W and the windbreak member 12, and it is possible to maintain a more stable holding state during conveyance.
In the fourth embodiment, instead of the pad 7 provided on the holding surface 1a, a pad for keeping the distance from the work W on the windshield member 12 may be provided. In particular, if a pad is provided in the vicinity of the outer periphery of the windshield member 12 at a position facing the vicinity of the outer periphery of the workpiece W, the pad contacts the vicinity of the outer periphery of the workpiece W. Suitable for holding workpieces that do not like contact.

The holders of the first to fourth embodiments stably hold and transport large workpieces that protrude from the outer periphery of the holder body while keeping costs low by providing a windshield member on the body. To be able to.
Moreover, since the windshield member is sufficient as a plate-like member, the total weight of the holder can be kept light compared to the case where the holder body is enlarged.

In the first to fourth embodiments, all of the windbreak member projecting from the holder body, it is to be opposed to the whole of the workpiece W protruding from the body.
Thus, if there is no portion protruding from the windbreak member on the surface of the workpiece W, it is possible to prevent securely to receive wind pressure when moving the holder main body.

In the first to fourth embodiments, a plurality of pads 7 are provided on the holding surface 1a, and a suction force based on a negative pressure formed by ejection of a fluid such as air acts on the tip position of the pad 7. It is provided in the area.
The region where the suction force acts is in the vicinity of the holding surface of the holder, and the total of the forces on the surface of the surface parallel to the holding surface and corresponding to the workpiece is negative pressure. Is the area where the plane becomes. That is, a suction force acts on the work W located in this region in contact with the pad 7 as a whole.
However, the pad 7 is not essential, and the work W may be held without contact without providing the pad 7. Even in that case, the wind shielding members 8, 10, and 12 can block the wind pressure acting on the workpiece W and prevent the workpiece W from falling off.

Moreover, the structure of the main body in the holder of this invention is not restricted to the structure of the said embodiment.
For example, the plate member 1 and the nozzle member 3 may be integrated without being separate members, or the structure of the nozzle member 3 may be different. Further, a slit may be adopted instead of the throttle outlet 5 from which the high-speed fluid is ejected.
In short, any configuration that can hold the workpiece W on the holding surface side using the Bernoulli principle of fluid can be used as the main body of the present invention.
Further, the windshield member is not limited to the above-described embodiment as long as it can prevent the wind pressure acting in the falling direction on the held work W.

And the attachment method of the windshield member with respect to the main body of a holder is not specifically limited. Any method may be used as long as the windbreak member is directly or indirectly attached to the main body of the holder and the attachment portion is positioned on the side opposite to the workpiece with the holding surface 1a as a boundary.
However, if the windshield member is detachably attached to the main body, the windshield member can be replaced according to the workpiece W. Thus, if the windshield member can be easily replaced, it is not necessary to always provide a large windshield member. When holding a small work W, an unnecessary windbreak member does not get in the way.

  The holder of the present invention can be applied to a semiconductor wafer or the like whose diameter tends to increase.

DESCRIPTION OF SYMBOLS 1 (The body is comprised) Plate member 1a Holding surface 3 (The body is comprised) Nozzle member 8 Wind shield member 9 Screw 10 Wind shield member 10a Disk part 10b Ring part 11 Guide member 12 Wind shield member 13 Attachment member W Work

Claims (2)

A holder for holding a workpiece on a holding surface provided on the main body using Bernoulli's principle, comprising a windscreen member projecting from the outer shape of the holding surface, wherein the windscreen member is detachably provided on the main body. In addition, when the windshield member and the work held on the holding surface are opposed to each other, the windshield member is sized so that the entire work is covered with the entire windshield member, and the windshield member with respect to the main body is protected. A holder in which a mounting portion of a member is positioned on the side opposite to the workpiece with the holding surface as a boundary.   The holder according to claim 1, wherein a tip of the windbreak member is positioned in the vicinity of a work surface or an outer periphery held on the holding surface to prevent wind from being caught between the work and the windbreak member. .

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