JP5821443B2 - Manufacturing method of glass base material and sintering furnace for manufacturing glass base material - Google Patents

Manufacturing method of glass base material and sintering furnace for manufacturing glass base material Download PDF

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JP5821443B2
JP5821443B2 JP2011196791A JP2011196791A JP5821443B2 JP 5821443 B2 JP5821443 B2 JP 5821443B2 JP 2011196791 A JP2011196791 A JP 2011196791A JP 2011196791 A JP2011196791 A JP 2011196791A JP 5821443 B2 JP5821443 B2 JP 5821443B2
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glass
base material
deposit
heat shield
jig
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JP2012082127A (en
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浩二 楠
浩二 楠
智哉 鈴木
智哉 鈴木
幹太 八木
幹太 八木
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Sumitomo Electric Industries Ltd
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/14Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1484Means for supporting, rotating or translating the article being formed

Description

本発明は、ガラス微粒子堆積体を加熱炉内で加熱焼結させるガラス母材の製造方法およびガラス母材を製造する焼結炉に関する。   The present invention relates to a method for producing a glass base material in which a glass particulate deposit is heated and sintered in a heating furnace, and a sintering furnace for producing a glass base material.

従来、ガラス母材を製造する焼結炉には、例えば、特許文献1に記載されているようなものが知られている。図8に示すように、焼結炉である焼結装置100は、蓋109を有する炉心管106と、炉心管106の周囲に配置され熱源104を有する加熱炉105とを備えている。焼結装置100は、種棒である出発棒112にガラス微粒子を堆積させたガラス微粒子堆積体である多孔質ガラス母材111を炉心管106内に挿入して、多孔質ガラス母材111を回転させながら降下させて加熱炉105により焼結させる。焼結装置100は、炉心管106の下端にHeガス等を供給する不活性ガス導入管102を備え、炉心管106の上方に排気装置108を備えている。   Conventionally, for example, a sintering furnace for producing a glass base material as described in Patent Document 1 is known. As shown in FIG. 8, a sintering apparatus 100 as a sintering furnace includes a core tube 106 having a lid 109 and a heating furnace 105 having a heat source 104 disposed around the core tube 106. The sintering apparatus 100 inserts a porous glass preform 111, which is a glass particulate deposit body obtained by depositing glass particulates on a starting rod 112, which is a seed rod, into the core tube 106, and rotates the porous glass preform 111. Then, it is lowered and sintered by the heating furnace 105. The sintering apparatus 100 includes an inert gas introduction pipe 102 that supplies He gas or the like to the lower end of the furnace core tube 106, and an exhaust device 108 above the furnace core tube 106.

上記焼結装置100では、多孔質ガラス母材111の上方に上部熱遮蔽具107を設置して、多孔質ガラス母材111の焼結完了部位116である下方に下部熱遮蔽具103が設置されている。上部熱遮蔽具107は多孔質ガラス母材111の上方のコーン体113に載っており、下部熱遮蔽具103は炉心管106に固定されている。上部熱遮蔽具107及び下部熱遮蔽具103は、石英ガラスからなり、多孔質ガラス母材111の上下に設置されることで、コーン体113からの輻射熱の逃散を制御して炉心管106の温度ムラや自然対流を抑制している。   In the sintering apparatus 100, the upper heat shield 107 is installed above the porous glass base material 111, and the lower heat shield 103 is installed below the sintering completion part 116 of the porous glass base material 111. ing. The upper heat shield 107 is placed on the cone body 113 above the porous glass base material 111, and the lower heat shield 103 is fixed to the furnace core tube 106. The upper heat shield 107 and the lower heat shield 103 are made of quartz glass, and are installed above and below the porous glass base material 111 to control the escape of radiant heat from the cone body 113 to control the temperature of the core tube 106. It suppresses unevenness and natural convection.

特開2000−219519号公報JP 2000-219519 A

多孔質ガラス母材111を焼結させる工程では、熱がうまく伝わらなかったり散逸することにより多孔質ガラス母材111の上部が未焼結となったり、逆に必要以上に熱せられることにより出発棒112が引き伸ばされることがある。多孔質ガラス母材111の上端部が未焼結であると、焼結部との収縮の違いにより割れが入り、多孔質ガラス母材111が落下してしまうことがある。また、後工程の線引き工程で未焼結部分が焼結され、多孔質ガラス母材111が線引き炉内で曲がったりする。また、未焼結部のスス粉が落下して焼結部に付着することで線引き時に断線することもある。その他、火炎研磨時にも、未焼結部と焼結部の境界で、熱膨張率の差により割れて落下するなどの問題が生じる。   In the step of sintering the porous glass base material 111, the heat is not transferred well or dissipated, so that the upper part of the porous glass base material 111 becomes unsintered, or conversely, it is heated more than necessary. 112 may be stretched. If the upper end portion of the porous glass base material 111 is unsintered, cracks may occur due to the difference in shrinkage from the sintered portion, and the porous glass base material 111 may fall. In addition, the unsintered portion is sintered in the subsequent drawing step, and the porous glass preform 111 is bent in the drawing furnace. In addition, the soot powder in the unsintered part may fall and adhere to the sintered part, thereby breaking the wire during drawing. In addition, problems such as cracking and dropping due to the difference in coefficient of thermal expansion occur at the boundary between the unsintered part and the sintered part during flame polishing.

また、必要以上に多孔質ガラス母材111の上部が熱せられると、出発棒112に過度に熱が加わり、出発棒112が引き伸ばされる。出発棒112に引き伸びが生じると、多孔質ガラス母材111の曲がりや落下などの問題が生じる。なお、多孔質ガラス母材111は、大型化の傾向にあり、重量が重くなって出発棒112の引き伸びが発生し易くなっている。   If the upper portion of the porous glass base material 111 is heated more than necessary, the starting rod 112 is excessively heated and the starting rod 112 is stretched. When the starting bar 112 is stretched, problems such as bending and dropping of the porous glass base material 111 occur. Note that the porous glass base material 111 tends to increase in size, and the weight of the porous glass base material 111 is increased, so that the starting rod 112 is easily stretched.

特許文献1に記載の焼結装置100では、上部熱遮蔽具107によりコーン体113からの輻射熱の逃散を制御しているが、多孔質ガラス母材111を炉心管106内へ挿着する前に、少なくとも上部熱遮蔽具107を多孔質ガラス母材111の上方から貫入してコーン体113に載せる必要がある。この取付け作業時に、熱遮蔽具107とスス体が接触するため、多孔質ガラス母材111を傷付けるなどの不具合が生じる可能性がある。   In the sintering apparatus 100 described in Patent Document 1, the escape of radiant heat from the cone body 113 is controlled by the upper heat shield 107, but before the porous glass base material 111 is inserted into the core tube 106. At least the upper heat shield 107 needs to penetrate from above the porous glass base material 111 and be placed on the cone body 113. During this mounting operation, the heat shield 107 and the soot body come into contact with each other, which may cause problems such as damage to the porous glass base material 111.

また、上記焼結装置100では、多孔質ガラス母材111によって熱遮蔽具107の設置位置が固定されてしまい、ヒートゾーンに対する熱遮蔽具103,107の位置調整が母材毎にはできないので、焼結時の出発棒112の引き伸びや多孔質ガラス母材111の上端部の未焼結の防止を完全に解決するのは難しい。   In the sintering apparatus 100, the installation position of the heat shield 107 is fixed by the porous glass base material 111, and the position adjustment of the heat shields 103 and 107 with respect to the heat zone cannot be performed for each base material. It is difficult to completely solve the elongation of the starting bar 112 during sintering and the prevention of unsintering of the upper end portion of the porous glass base material 111.

本発明の目的は、上述した事情に鑑みてなされたものであり、未焼結部を無くすとともに、種棒の過度の加熱を防止して引き伸びを無くすことができるガラス母材の製造方法およびガラス母材を製造する焼結炉を提供することにある。   The object of the present invention is made in view of the above-described circumstances, and is a method for producing a glass base material that eliminates unsintered portions and prevents excessive heating of the seed rod and eliminates elongation. It is providing the sintering furnace which manufactures a glass base material.

上記課題を解決することができる本発明に係るガラス母材の製造方法は、出発種棒にガラス微粒子を堆積させ、種棒部、テーパ状ガラス微粒子堆積部、ガラス微粒子定常堆積部からなるガラス微粒子堆積体をヒートゾーンからの熱により加熱焼結させるガラス母材の製造方法であって、前記ガラス微粒子堆積体上部の前記テーパ状ガラス微粒子堆積部の上部近傍に、前記ガラス微粒子堆積体の長手方向に位置調整が可能な遮熱治具を配置することにより、前記ヒートゾーン及び前記ガラス母材から前記種棒部へ伝わる熱を遮熱しながら、前記ガラス微粒子堆積体を焼結することを特徴としている。   The method for producing a glass base material according to the present invention capable of solving the above-mentioned problem is to deposit glass fine particles on a starting seed rod, and to form glass fine particles comprising a seed rod portion, a tapered glass fine particle deposition portion, and a glass fine particle steady deposition portion A method for producing a glass base material in which a deposit is heated and sintered by heat from a heat zone, the longitudinal direction of the glass particulate deposit near the upper portion of the tapered glass particulate deposit on the glass particulate deposit By disposing a heat shielding jig whose position can be adjusted, the glass particulate deposit is sintered while heat transmitted from the heat zone and the glass base material to the seed rod portion is shielded. Yes.

このように構成されたガラス母材の製造方法によれば、位置調整可能な遮熱治具をガラス微粒子堆積体上部のテーパ状ガラス微粒子堆積部の上部近傍に配置するので、種棒部をヒートゾーンぎりぎりまで近づけても種棒部側へ伝わる熱を遮熱できる。これにより、種棒部の引き伸びを確実に防止できるとともに、ガラス微粒子堆積体の上端部の未焼結部の領域を小さくすることができる。また、遮熱治具は、ガラス微粒子堆積体の長手方向に位置調整できるので、ガラス微粒子堆積体に接触することなく、ガラス微粒子堆積体毎に遮熱治具の位置調整を行うことができる。   According to the manufacturing method of the glass base material configured as described above, the heat shielding jig whose position can be adjusted is disposed in the vicinity of the upper portion of the tapered glass fine particle depositing portion on the upper portion of the glass fine particle depositing body. Even if it is close to the zone, the heat transmitted to the seed rod side can be shielded. As a result, it is possible to reliably prevent the seed rod portion from being stretched and to reduce the area of the unsintered portion at the upper end portion of the glass fine particle deposit. Further, since the position of the heat shield jig can be adjusted in the longitudinal direction of the glass particulate deposit, the position of the heat shield jig can be adjusted for each glass particulate deposit without contacting the glass particulate deposit.

上記課題を解決することができる本発明に係るガラス母材を製造する焼結炉は、出発種棒にガラス微粒子を堆積させ、種棒部、テーパ状ガラス微粒子堆積部、ガラス微粒子定常堆積部からなるガラス微粒子堆積体を収容する炉心管と、前記ガラス微粒子堆積体を加熱焼結させる加熱炉と、を有し、前記ガラス微粒子堆積体上部の前記テーパ状ガラス微粒子堆積部の上部近傍に、前記ガラス微粒子堆積体の長手方向に位置調整が可能な遮熱治具を設けたことを特徴としている。   The sintering furnace for producing the glass base material according to the present invention capable of solving the above-mentioned problems is to deposit glass fine particles on a starting seed rod, and from the seed rod portion, the tapered glass fine particle accumulation portion, and the glass fine particle steady accumulation portion. A furnace core tube containing the glass fine particle deposit, and a heating furnace for heating and sintering the glass fine particle deposit, and in the vicinity of the upper portion of the tapered glass fine particle deposit portion on the glass fine particle deposit, A heat shielding jig capable of adjusting the position in the longitudinal direction of the glass fine particle deposit is provided.

このように構成されたガラス母材を製造する焼結炉によれば、位置調整可能な遮熱治具をガラス微粒子堆積体上部のテーパ状ガラス微粒子堆積部の上部近傍に配置したので、種棒部をヒートゾーンぎりぎりまで近づけても種棒部側へ伝わる熱を遮熱できる。これにより、種棒部の引き伸びを確実に防止することができる。また、ガラス微粒子堆積体の上端部の未焼結部の領域を小さくすることができる。また、遮熱治具は、ガラス微粒子堆積体の長手方向に位置調整できるので、ガラス微粒子堆積体に接触することなく、ガラス微粒子堆積体毎に遮熱治具の位置調整を行うことができる。   According to the sintering furnace for producing the glass base material configured in this way, the heat shielding jig whose position can be adjusted is disposed in the vicinity of the upper portion of the tapered glass fine particle depositing portion on the upper portion of the glass fine particle depositing body. Even if the part is brought close to the heat zone, the heat transmitted to the seed bar part side can be shielded. Thereby, the elongation of the seed rod part can be reliably prevented. Moreover, the area | region of the unsintered part of the upper end part of a glass particulate deposit can be made small. Further, since the position of the heat shield jig can be adjusted in the longitudinal direction of the glass particulate deposit, the position of the heat shield jig can be adjusted for each glass particulate deposit without contacting the glass particulate deposit.

前記ガラス母材を製造する焼結炉において、前記遮熱治具は、前記炉心管又は前記種棒部に固定されていることが好ましい。   In the sintering furnace for manufacturing the glass base material, it is preferable that the heat shield jig is fixed to the furnace core tube or the seed rod part.

前記構成のガラス母材を製造する焼結炉によれば、遮熱治具は、例えば、炉心管の一部である上蓋や種棒部を嵌合させる支持棒、嵌合部、又は種棒部自体に固定され、ガラス微粒子堆積体自体には接触することがないので、ガラス微粒子堆積体を傷付けるなどの不具合を確実に防ぐことができる。   According to the sintering furnace for producing the glass base material having the above-described configuration, the heat shield jig is, for example, a support rod, a fitting portion, or a seed rod for fitting an upper lid or a seed rod portion that is a part of the core tube. Since it is fixed to the part itself and does not come into contact with the glass fine particle deposit, the glass fine particle deposit can be reliably prevented from being damaged.

本発明に係るガラス母材の製造方法およびガラス母材を製造する焼結炉によれば、位置調整可能な遮熱治具をガラス微粒子堆積体上部のテーパ上部近傍に配置するので、遮熱治具をテーパ状ガラス微粒子堆積部と種棒部との間の最適な位置に調整することができる。したがって、種棒部をヒートゾーンぎりぎりまで近づけても種棒部側へ伝わる熱を遮熱治具で確実に遮熱することができ、種棒部の引き伸びを確実に防止できるとともに、ガラス微粒子堆積体の上端部の未焼結部の領域を小さくすることができる。   According to the method for producing a glass base material and the sintering furnace for producing the glass base material according to the present invention, the position-adjustable heat shield jig is disposed in the vicinity of the upper tapered portion of the glass fine particle deposit. The tool can be adjusted to an optimum position between the tapered glass fine particle deposition portion and the seed rod portion. Therefore, the heat transmitted to the seed rod part side can be reliably shielded by the heat shield jig even if the seed rod part is close to the heat zone, and it is possible to reliably prevent the seed rod part from being stretched. The area | region of the unsintered part of the upper end part of a deposit can be made small.

また、遮熱治具は、ガラス微粒子堆積体の長手方向に位置調整できるので、ガラス微粒子堆積体に接触することなく、ガラス微粒子堆積体毎に遮熱治具の位置調整を行うことができるとともに、ガラス微粒子堆積体を傷付けるなどの不具合を防ぐことができる。   In addition, since the position of the heat shield jig can be adjusted in the longitudinal direction of the glass particulate deposit body, the position of the heat shield jig can be adjusted for each glass particulate deposit body without contacting the glass particulate deposit body. It is possible to prevent problems such as damaging the glass particulate deposit.

本発明に係るガラス母材を製造する焼結炉の第1実施形態を示す概略図である。It is the schematic which shows 1st Embodiment of the sintering furnace which manufactures the glass base material which concerns on this invention. 図1の遮熱治具周辺の要部拡大図である。It is a principal part enlarged view of the heat shield jig periphery of FIG. 図2の下部治具の嵌合前の状態を示し、(a)は平面図、(b)は側面図である。The state before fitting of the lower jig | tool of FIG. 2 is shown, (a) is a top view, (b) is a side view. 図2の下部治具の嵌合後の状態を示し、(a)は平面図、(b)は側面図である。The state after the lower jig | tool of FIG. 2 is fitted is shown, (a) is a top view, (b) is a side view. 図2の下部治具の変形例を示し、(a)は嵌合前の平面図、(b)は嵌合後の平面図である。2 shows a modification of the lower jig in FIG. 2, (a) is a plan view before fitting, and (b) is a plan view after fitting. FIG. 図2の上部治具であり、(a)は平面図であり、(b)は側面図である。2 is an upper jig in FIG. 2, (a) is a plan view, and (b) is a side view. FIG. 本発明に係るガラス母材を製造する焼結炉の第2実施形態を示す遮熱治具周辺の要部拡大図である。It is a principal part enlarged view of the heat shield jig periphery which shows 2nd Embodiment of the sintering furnace which manufactures the glass base material which concerns on this invention. 従来のガラス母材の焼結炉を示す概略図である。It is the schematic which shows the sintering furnace of the conventional glass base material.

以下、本発明に係るガラス母材の製造方法およびガラス母材を製造する焼結炉の実施形態について、図1〜図7を参照して詳細に説明する。   Hereinafter, embodiments of a method for producing a glass base material and a sintering furnace for producing the glass base material according to the present invention will be described in detail with reference to FIGS.

(第1実施形態)
図1に示すように、本発明の第1実施形態であるガラス母材を製造する焼結炉10は、上部を蓋部13により閉塞され、出発種棒3にガラス微粒子を堆積させたガラス微粒子堆積体1を収容する炉心管11と、炉心管11の外周側にガラス微粒子堆積体1を加熱焼結させる熱源であるヒータ12とを備えている。
(First embodiment)
As shown in FIG. 1, the sintering furnace 10 for producing the glass base material according to the first embodiment of the present invention has a glass fine particle in which the upper part is closed by a lid part 13 and glass fine particles are deposited on a starting seed bar 3. A core tube 11 that houses the deposit 1 and a heater 12 that is a heat source for heating and sintering the glass particulate deposit 1 on the outer peripheral side of the core 11 are provided.

ガラス微粒子堆積体1は、円柱状のガラス微粒子定常堆積部4と、ガラス微粒子定常堆積部4の上下端部にテーパ状ガラス微粒子堆積部2,5と、上部のテーパ状ガラス微粒子堆積部2の上部部分でガラス微粒子が堆積されていない種棒部8と、を有し、連結部材14によって炉心管11内に吊り下げられている。炉心管11の下部には、Heガス等の不活性ガスを供給するガス供給部15と、上部にガス排出部16を備えている。   The glass fine particle deposit 1 includes a cylindrical glass fine particle deposition unit 4, tapered glass particle deposition units 2 and 5 at the upper and lower ends of the glass fine particle deposition unit 4, and an upper tapered glass particle deposition unit 2. A seed rod portion 8 in which glass fine particles are not deposited in the upper portion, and is suspended in the core tube 11 by a connecting member 14. A gas supply unit 15 that supplies an inert gas such as He gas and a gas discharge unit 16 are provided at the lower portion of the core tube 11 and the upper portion thereof.

図2に示すように、焼結炉10は、ガラス微粒子堆積体1上部のテーパ状ガラス微粒子堆積部2近傍に、該ガラス微粒子堆積体1の長手方向の位置調整が可能なカーボン製の遮熱治具20を備えている。遮熱治具20は、出発種棒3の所定位置に固定される上部治具21と、遮熱機能を有する円板状の下部治具22と、3本の吊りボルト23と、各吊りボルト23に螺合された調整ナット26A,26Bと、から構成されている。上部治具21を固定する出発種棒3の中間部には、上部治具21を係合する種棒段部7を有している。   As shown in FIG. 2, the sintering furnace 10 is a heat shield made of carbon capable of adjusting the position of the glass fine particle deposit 1 in the longitudinal direction in the vicinity of the tapered glass fine particle deposit 2 at the top of the glass fine particle deposit 1. A jig 20 is provided. The heat shield jig 20 includes an upper jig 21 fixed to a predetermined position of the starting seed bar 3, a disk-shaped lower jig 22 having a heat shield function, three suspension bolts 23, and each suspension bolt. And adjustment nuts 26 </ b> A and 26 </ b> B screwed to 23. A seed bar stepped portion 7 for engaging the upper jig 21 is provided at an intermediate portion of the starting seed bar 3 for fixing the upper jig 21.

遮熱治具20の外径D1は、炉心管11の内径をD0とすると、0.3D0<D1<0.98D0の範囲内に収まる外径寸法に設定されている。例えば、内径D0が210mmであると、略外径D1は、63mm〜206mmの範囲内に設定される。遮熱治具20の高さH1は、下部治具22の位置H0が出発種棒3の上端から例えば300mmであると、約200mm程度に設定される。   The outer diameter D1 of the heat shield jig 20 is set to an outer diameter dimension that falls within a range of 0.3D0 <D1 <0.98D0, where D0 is the inner diameter of the core tube 11. For example, when the inner diameter D0 is 210 mm, the substantially outer diameter D1 is set within a range of 63 mm to 206 mm. The height H1 of the heat shield jig 20 is set to about 200 mm when the position H0 of the lower jig 22 is, for example, 300 mm from the upper end of the starting seed bar 3.

図3の(a)及び(b)に示すように、下部治具22は、切欠部27を有する第1遮熱板24と、第1遮熱板24に嵌合する第2遮熱板25と、から構成されている。第1遮熱板24は、その中央部に種棒部8が貫通する種棒貫通孔28を有し、種棒部8への取り付け時用の切欠部27と、吊りボルト23を挿通する3つのボルト貫通孔29とを有している。切欠部27は、種棒部8への取り付け時に、第2遮熱板25を取り外すことで、この切欠部27から種棒部8を種棒貫通孔28内に配置させるためのものであり、両端縁に嵌合用の第1段差部24Aを有している。   As shown in FIGS. 3A and 3B, the lower jig 22 includes a first heat shield plate 24 having a notch 27 and a second heat shield plate 25 fitted to the first heat shield plate 24. And is composed of. The first heat shield plate 24 has a seed rod through-hole 28 through which the seed rod portion 8 penetrates at the center thereof, and a notch portion 27 for attachment to the seed rod portion 8 and the suspension bolt 23 are inserted through the first heat shield plate 24. There are two bolt through holes 29. The notch portion 27 is for disposing the seed rod portion 8 from the notch portion 27 in the seed rod through hole 28 by removing the second heat shield plate 25 when attached to the seed rod portion 8. A first step portion 24A for fitting is provided at both end edges.

第2遮熱板25は、第1遮熱板24の切欠部27の上方から嵌合させることで切欠部27を覆うような、例えば扇形状となっている。切欠部27の切欠形状は、扇形状に限らず、例えば、図5(a)のように、切欠部27が略長方形であっても良い。第2遮熱板25は、第1遮熱板24上の切欠部27の両端部に載るように切欠部27より幅広に形成され、両端縁に第2段差部25Aを有している。この第2段差部25Aが第1遮熱板24の第1段差部24Aに嵌め合わされることで、第2遮熱板25が第1遮熱板24に固定される。   The second heat shield plate 25 has, for example, a fan shape so as to cover the notch portion 27 by being fitted from above the notch portion 27 of the first heat shield plate 24. The cutout shape of the cutout portion 27 is not limited to a fan shape, and the cutout portion 27 may be substantially rectangular as shown in FIG. The second heat shield 25 is formed wider than the notch 27 so as to be placed on both ends of the notch 27 on the first heat shield 24, and has second step portions 25A at both edges. The second heat shield plate 25 is fixed to the first heat shield plate 24 by fitting the second step portion 25 </ b> A to the first step portion 24 </ b> A of the first heat shield plate 24.

なお、第1段差部24Aの一部に凹部24Bを作成し、第2段差部25Aと嵌め合わせる際、この凹部24Bに相当する第2段差部25Aの位置に凸部25Bを作成することにより、第2遮熱板25が滑り落ちることのないように固定することができる。この凹凸部24B,25Bの位置は、図3(a)に示すような切欠部27の端部に作成しても良いし、図5(a)に示すような切欠部27の中央部付近にあっても良い。中央部付近であれば、前後方向にも固定できるので、より強固に固定することができる。   In addition, when creating the recess 24B in a part of the first step 24A and fitting with the second step 25A, by creating the projection 25B at the position of the second step 25A corresponding to the recess 24B, The second heat shield plate 25 can be fixed so as not to slide down. The positions of the concavo-convex portions 24B and 25B may be created at the end of the notch 27 as shown in FIG. 3A, or near the center of the notch 27 as shown in FIG. There may be. Since it can be fixed in the front-rear direction as long as it is near the center, it can be fixed more firmly.

切欠部27が扇形状の場合、第1遮熱板24の切欠部27の切欠角度θ1は、例えば130°程度であり、第2遮熱板25の中心角度θ2は、切欠角度θ1より広角(θ2>θ1)の例えば、135°〜140°の範囲に設定される。   When the notch 27 has a fan shape, the notch angle θ1 of the notch 27 of the first heat shield 24 is, for example, about 130 °, and the center angle θ2 of the second heat shield 25 is wider than the notch angle θ1 ( For example, θ2> θ1) is set in a range of 135 ° to 140 °.

図4の(a)及び(b)に示すように、第1遮熱板24上に第2遮熱板25を嵌合させた状態では、円形の種棒貫通孔28が形成され、切欠部27が完全に覆われる。下部治具22の外径D2は、遮熱治具20の外径D1に等しく、種棒貫通孔28の内径D3との比D2/D3は、1.25<D2/D3<5となる範囲内に設定され、好ましくは3≦D2/D3≦4が最適である。例えば、外径D2が200mmであると、種棒貫通孔28の内径D3は、約50mm〜66mmの範囲内に設定される。   As shown in FIGS. 4A and 4B, in the state where the second heat shield plate 25 is fitted on the first heat shield plate 24, a circular seed rod through hole 28 is formed, and a notch portion is formed. 27 is completely covered. The outer diameter D2 of the lower jig 22 is equal to the outer diameter D1 of the heat shield jig 20, and the ratio D2 / D3 with the inner diameter D3 of the seed rod through hole 28 is in a range where 1.25 <D2 / D3 <5. And preferably 3 ≦ D2 / D3 ≦ 4. For example, when the outer diameter D2 is 200 mm, the inner diameter D3 of the seed rod through hole 28 is set within a range of about 50 mm to 66 mm.

図6(a)に示すように、上部治具21は、3方に延設され、各々先端部近傍にボルト貫通孔33を有する3本の連結片31と、出発種棒3に直接固定するための取付孔32を中心に有している。各連結片31の両側には、熱の逃げ空間が形成されており、種棒部8付近に熱がこもらず、炉心管11の上方にヒータ12からの熱を逃がすようになっている。図6(b)に示すように、取付孔32は、上側が小径で下側が大径である取付孔段部34を有しており、この取付孔段部34が上記出発種棒3の種棒段部7に係合することで、遮熱治具20が出発種棒3の所定位置に固定される。   As shown in FIG. 6A, the upper jig 21 extends in three directions, and is directly fixed to the three connecting pieces 31 each having a bolt through hole 33 in the vicinity of the tip and the starting seed rod 3. It has a mounting hole 32 for the center. A heat escape space is formed on both sides of each connecting piece 31 so that heat does not accumulate in the vicinity of the seed bar portion 8 and heat from the heater 12 is released above the core tube 11. As shown in FIG. 6 (b), the mounting hole 32 has a mounting hole step portion 34 having a small diameter on the upper side and a large diameter on the lower side. By engaging with the rod step portion 7, the heat shield jig 20 is fixed at a predetermined position of the starting seed rod 3.

次に、遮熱治具20のガラス微粒子堆積体1への取り付け手順を説明する。   Next, a procedure for attaching the heat shield jig 20 to the glass fine particle deposit 1 will be described.

(遮熱治具の組立)
図2〜図6に示すように、先ず、下部治具22の第1遮熱板24の下方側から3本の吊りボルト23を貫入させる。次に、第1調整ナット26Aを各吊りボルト23に螺合させ、上部治具21のボルト貫通孔33に吊りボルト23を貫入させる。さらにその後、第2調整ナット26Bを各吊りボルト23に螺合させる。調整ナット26A,26Bの螺合位置は、遮熱治具20を出発種棒3に係合させたときに、下端の第1遮熱板24がガラス微粒子堆積体1上部のテーパ状ガラス微粒子堆積部2の上部近傍に配置されるように調整される。
(Assembly of heat shield jig)
As shown in FIGS. 2 to 6, first, three suspension bolts 23 are inserted from the lower side of the first heat shield plate 24 of the lower jig 22. Next, the first adjustment nut 26 </ b> A is screwed into each suspension bolt 23, and the suspension bolt 23 is inserted into the bolt through hole 33 of the upper jig 21. Thereafter, the second adjustment nut 26B is screwed into each suspension bolt 23. The screwing positions of the adjusting nuts 26A and 26B are such that when the heat shield jig 20 is engaged with the starting seed rod 3, the first heat shield plate 24 at the lower end deposits the tapered glass particles on the glass particle deposit 1. It is adjusted so as to be arranged in the vicinity of the upper part of the part 2.

(遮熱治具の取付)
次に、組み立てた遮熱治具20を持ち上げ、第2遮熱板25を外した状態で上部治具21の取付孔32に下方側から種棒部8の上端部6を挿入させる。ガラス微粒子堆積体1は重いため、これを連結部材14にセットする際、バランサーなどで種棒部8を保持しながらセットする必要があるが、このとき、第1遮熱板24の切欠部27を種棒部8側に向けて、第1遮熱板24をガラス微粒子堆積体1に接触させないように種棒部8側に移動させる。これにより、種棒部8の下方を、バランサーなどでガラス微粒子堆積体1を保持した状態でも、第1遮熱板24の切欠部27から種棒貫通孔28内に配置させることができる。その後、遮熱治具20をガラス微粒子堆積体1のガラス微粒子定常堆積部4側に下降させることで、上部治具21が出発種棒3の種棒段部7に係合する。
(Installation of heat shield jig)
Next, the assembled heat shield jig 20 is lifted, and the upper end portion 6 of the seed rod portion 8 is inserted into the attachment hole 32 of the upper jig 21 from below with the second heat shield plate 25 removed. Since the glass particulate deposit 1 is heavy, when setting it on the connecting member 14, it is necessary to set it while holding the seed bar portion 8 with a balancer or the like. At this time, the cutout portion 27 of the first heat shield plate 24 is required. The first heat shield plate 24 is moved to the seed rod portion 8 side so as not to contact the glass fine particle deposit 1 with the seed rod portion 8 side facing. As a result, the lower portion of the seed rod portion 8 can be disposed in the seed rod through hole 28 from the cutout portion 27 of the first heat shield plate 24 even when the glass particulate deposit 1 is held by a balancer or the like. Then, the upper jig 21 is engaged with the seed rod step 7 of the starting seed rod 3 by lowering the heat shield jig 20 toward the glass particulate steady deposition portion 4 side of the glass particulate deposit 1.

このとき、ガラス微粒子堆積体1上部のテーパ状ガラス微粒子堆積部2と種棒部8との境界部分に、第1遮熱板24が水平に配置されるように3組の調整ナット26A,26Bを調整して位置決めする。最後に、第1遮熱板24上に第2遮熱板25を嵌合させることで、遮熱治具20の取付けが完了する。   At this time, three sets of adjustment nuts 26A and 26B are arranged so that the first heat shield plate 24 is horizontally disposed at the boundary portion between the tapered glass particle depositing portion 2 and the seed rod portion 8 above the glass particle depositing body 1. Adjust the position. Finally, by fitting the second heat shield plate 25 on the first heat shield plate 24, the mounting of the heat shield jig 20 is completed.

(ガラス微粒子堆積体の取付)
この後、遮熱治具20を取り付けたガラス微粒子堆積体1を連結部材14に連結し、焼結炉10内に吊り下げる。
(Installation of glass particulate deposit)
Thereafter, the glass particulate deposit 1 to which the heat shield jig 20 is attached is connected to the connecting member 14 and suspended in the sintering furnace 10.

次に、ガラス母材の製造方法として、ガラス微粒子堆積体の焼結工程について説明する。   Next, as a method for manufacturing a glass base material, a sintering process of a glass fine particle deposit will be described.

(ガラス微粒子堆積体の焼結工程)
ヒータ12により炉心管11内を約1600℃に加熱することで、ガラス微粒子堆積体1を焼結して透明化する。このとき、ガラス微粒子堆積体1上部のテーパ状ガラス微粒子堆積部2と種棒部8との境界部分に、遮熱治具20の下部治具22が配置される。これにより、ヒータ12及び透明化されたガラス母材などから種棒部8へ伝わる熱を遮熱しながら、ガラス微粒子堆積体1を焼結する。
(Sintering process of glass particulate deposits)
By heating the inside of the furnace tube 11 to about 1600 ° C. by the heater 12, the glass fine particle deposit 1 is sintered and made transparent. At this time, the lower jig 22 of the heat shield jig 20 is disposed at the boundary portion between the tapered glass fine particle deposition portion 2 and the seed rod portion 8 above the glass fine particle deposit body 1. As a result, the glass fine particle deposit 1 is sintered while heat transmitted from the heater 12 and the transparent glass base material to the seed rod portion 8 is shielded.

これにより、ヒータ12の熱による出発種棒3の引き伸びを確実に防止することができるとともに、ガラス微粒子堆積体1上部の未焼結部の領域を小さくすることができる。また、遮熱治具20の下部治具22は、ガラス微粒子堆積体1の長手方向に調整ナット26によって位置調整できるので、ガラス微粒子堆積体1に接触することなく、各々ガラス微粒子堆積体1毎に下部治具22の位置調整ができる。   Thereby, the elongation of the starting seed bar 3 due to the heat of the heater 12 can be reliably prevented, and the area of the unsintered portion on the upper part of the glass fine particle deposit 1 can be reduced. Further, since the position of the lower jig 22 of the heat shield jig 20 can be adjusted by the adjusting nut 26 in the longitudinal direction of the glass fine particle deposit 1, each glass fine particle deposit 1 does not contact the glass fine particle deposit 1. In addition, the position of the lower jig 22 can be adjusted.

上述したように本実施形態のガラス母材の製造方法およびガラス母材を製造する焼結炉によれば、位置調整可能な下部治具22を有する遮熱治具20を直接種棒部8に固定して、下部治具22をガラス微粒子堆積体1上部のテーパ状ガラス微粒子堆積部2の上部近傍に配置した。これにより、下部治具22の上方側へ、ヒータ12などからの熱が種棒部8へ伝わらないように遮熱できるので、種棒部8の引き伸びを確実に防止することができる。また、下部治具22の下方側では、テーパ状ガラス微粒子堆積部2の上部をヒートゾーンに近づけることができるので、ガラス微粒子堆積体1の上端部の未焼結部の領域を小さくすることができる。   As described above, according to the manufacturing method of the glass base material and the sintering furnace for manufacturing the glass base material of the present embodiment, the heat shield jig 20 having the position-adjustable lower jig 22 is directly attached to the seed rod portion 8. The lower jig 22 was fixed and arranged in the vicinity of the upper portion of the tapered glass particle deposition portion 2 on the glass particle deposition body 1. Thereby, since heat from the heater 12 or the like can be shielded from being transmitted to the upper portion of the lower jig 22 so as not to be transmitted to the seed rod portion 8, the elongation of the seed rod portion 8 can be reliably prevented. In addition, on the lower side of the lower jig 22, the upper portion of the tapered glass fine particle deposition portion 2 can be brought close to the heat zone, so that the area of the unsintered portion at the upper end portion of the glass fine particle deposit 1 can be reduced. it can.

また、下部治具22は、ガラス微粒子堆積体1の長手方向に位置調整できるので、ガラス微粒子堆積体1に接触させることなく、ガラス微粒子堆積体1毎に最適な位置へ、遮熱板の位置調整を行うことができる。   Further, since the position of the lower jig 22 can be adjusted in the longitudinal direction of the glass fine particle deposit 1, the position of the heat shield plate can be adjusted to the optimum position for each glass fine particle deposit 1 without contacting the glass fine particle deposit 1. Adjustments can be made.

(第2実施形態)
次に、本発明の第2実施形態であるガラス母材の製造方法およびガラス母材を製造する焼結炉を図7に基づいて説明する。なお、上記第1実施形態と同一構成の部材には同一符号を付すことで、詳細な説明は省略する。また、遮熱治具の組立と焼結工程は第1実施形態と同じなので説明は省略する。
(Second Embodiment)
Next, the manufacturing method of the glass base material which is 2nd Embodiment of this invention, and the sintering furnace which manufactures a glass base material are demonstrated based on FIG. In addition, detailed description is abbreviate | omitted by attaching | subjecting the same code | symbol to the member of the same structure as the said 1st Embodiment. Further, the assembly and sintering steps of the heat shield jig are the same as those in the first embodiment, so that the description thereof is omitted.

(遮熱治具の取付)
図7に示すように、第2実施形態の焼結炉40は、遮熱治具50が出発種棒3を接続する連結部材41に固定される点が第1実施形態と異なっている。遮熱治具50は、連結部材41が炉心管11内に貫入される前に、予め連結部材41に固定される。上部治具51は、取付孔52が段部を有さないストレート孔である以外は第1実施形態と同じ構成である。連結部材41は、遮熱治具50を係合する係止部42を有している。上部治具51の取付孔52が連結部材41の上方から係止部42に係合される。
(Installation of heat shield jig)
As shown in FIG. 7, the sintering furnace 40 of the second embodiment is different from the first embodiment in that the heat shield jig 50 is fixed to a connecting member 41 that connects the starting seed bar 3. The heat shield jig 50 is fixed to the connecting member 41 in advance before the connecting member 41 penetrates into the core tube 11. The upper jig 51 has the same configuration as that of the first embodiment except that the mounting hole 52 is a straight hole having no stepped portion. The connecting member 41 has a locking portion 42 that engages the heat shield jig 50. The mounting hole 52 of the upper jig 51 is engaged with the locking portion 42 from above the connecting member 41.

(ガラス微粒子堆積体の取付)
本実施形態の焼結炉40は、予め遮熱治具50が連結部材41に固定されている状態で、ガラス微粒子堆積体1を炉心管11内に吊り下げる。即ち、下部治具22の第2遮熱板25は外れており、連結部材41に出発種棒3と一体のガラス微粒子堆積体1が連結され、炉心管11内に吊り下げられる。
(Installation of glass particulate deposit)
In the sintering furnace 40 of the present embodiment, the glass particulate deposit 1 is suspended in the furnace core tube 11 with the heat shield jig 50 fixed to the connecting member 41 in advance. That is, the second heat shield plate 25 of the lower jig 22 is detached, and the glass particulate deposit 1 integrated with the starting seed rod 3 is connected to the connecting member 41 and suspended in the core tube 11.

このとき、ガラス微粒子堆積体1上部のテーパ状ガラス微粒子堆積部2と種棒部8との境界部分は、予め炉心管11内に係合されている第1遮熱板24の切欠部27付近に配置される。第1遮熱板24がガラス微粒子堆積体1に接触せず、且つ境界部分に正確に配置されるように、3組の調整ナット26A,26Bによって位置調整を行う。最後に、第1遮熱板24上に第2遮熱板25を嵌合させて、焼結前のガラス微粒子堆積体1の取付けが完了する。   At this time, the boundary portion between the tapered glass particulate depositing portion 2 and the seed rod portion 8 on the upper portion of the glass particulate depositing body 1 is in the vicinity of the notch portion 27 of the first heat shield plate 24 engaged in the reactor core tube 11 in advance. Placed in. Position adjustment is performed by the three sets of adjustment nuts 26A and 26B so that the first heat shield plate 24 does not contact the glass particulate deposit 1 and is accurately disposed at the boundary portion. Finally, the second heat shield plate 25 is fitted onto the first heat shield plate 24 to complete the attachment of the glass particulate deposit 1 before sintering.

ガラス微粒子堆積体1の取り外し時は、第2遮熱板25を取り外すことができるので、遮熱治具50を取り付けたままの状態で、ガラス微粒子堆積体1を連結部材41から取り外すことができる。   When removing the glass particulate deposit 1, the second heat shield plate 25 can be removed, so that the glass particulate deposit 1 can be removed from the connecting member 41 with the thermal shield 50 attached. .

遮熱治具50の寸法は、焼結炉40及びガラス微粒子堆積体1によって決まる。例えば、下部治具22の位置H0が出発種棒3の上端から300mmであると、遮熱治具50の高さH1は、約400mm程度となる。それ以外の寸法は、第1実施形態と同じなので説明は省略する。   The size of the heat shield jig 50 is determined by the sintering furnace 40 and the glass particulate deposit 1. For example, when the position H0 of the lower jig 22 is 300 mm from the upper end of the starting seed bar 3, the height H1 of the heat shield jig 50 is about 400 mm. Since other dimensions are the same as those of the first embodiment, description thereof is omitted.

上述したように第2実施形態のガラス母材の製造方法およびガラス母材を製造する焼結炉によれば、位置調整可能な下部治具22を有する遮熱治具50を連結部材41に固定して、下部治具22をガラス微粒子堆積体1上部のテーパ状ガラス微粒子堆積部2の上部近傍に配置した。これにより、下部治具22の上方側へ、ヒータ12などからの熱が種棒部8へ伝わらないように遮熱できるので、種棒部8の引き伸びを確実に防止することができる。また、下部治具22の下方側では、ガラス微粒子堆積体1の上部をヒートゾーンに近づけることができるので、ガラス微粒子堆積体1の上端部の未焼結部の領域を小さくすることができる。   As described above, according to the glass base material manufacturing method and the sintering furnace for manufacturing the glass base material of the second embodiment, the heat shield jig 50 having the position-adjustable lower jig 22 is fixed to the connecting member 41. Then, the lower jig 22 was disposed in the vicinity of the upper portion of the tapered glass fine particle deposition portion 2 above the glass fine particle deposit body 1. Thereby, since heat from the heater 12 or the like can be shielded from being transmitted to the upper portion of the lower jig 22 so as not to be transmitted to the seed rod portion 8, the elongation of the seed rod portion 8 can be reliably prevented. Further, on the lower side of the lower jig 22, the upper part of the glass fine particle deposit 1 can be brought close to the heat zone, so that the area of the unsintered portion at the upper end of the glass fine particle deposit 1 can be reduced.

また、下部治具22は、ガラス微粒子堆積体1の長手方向に位置調整できるので、ガラス微粒子堆積体1に接触させることなく、ガラス微粒子堆積体1毎に最適な位置へ、下部治具22の位置調整を行うことができる。   Further, since the position of the lower jig 22 can be adjusted in the longitudinal direction of the glass fine particle deposit 1, the lower jig 22 can be moved to the optimum position for each glass fine particle deposit 1 without contacting the glass fine particle deposit 1. Position adjustment can be performed.

なお、本発明は、上述した各実施形態に限定されるものではなく、適宜、変形、改良等が自在である。その他、上述した実施形態における各構成要素の材質、形状、寸法、数値、形態、数、配置場所等は本発明を達成できるものであれば任意であり、限定されない。   In addition, this invention is not limited to each embodiment mentioned above, A deformation | transformation, improvement, etc. are possible suitably. In addition, the material, shape, dimension, numerical value, form, number, location, and the like of each component in the above-described embodiment are arbitrary and are not limited as long as the present invention can be achieved.

例えば、上記実施形態では焼結工程について説明したが、線引工程での線引炉にも適用することができる。また、遮熱治具の取付位置は、出発種棒や連結部材以外に、焼結炉の炉心管や蓋部であっても良い。   For example, although the sintering process has been described in the above embodiment, it can also be applied to a drawing furnace in the drawing process. Further, the mounting position of the heat shield jig may be a core tube or a lid part of a sintering furnace in addition to the starting seed bar and the connecting member.

次に、本発明に係るガラス母材の製造方法の作用効果を確認するために行った実施例について説明する。   Next, the Example performed in order to confirm the effect of the manufacturing method of the glass base material which concerns on this invention is described.

使用焼結炉の内径D0:210mm
使用多孔質ガラス母材:外径180mmのガラス微粒子堆積体
焼結温度:1600℃
(実施例)
使用遮熱治具:出発種棒に直接固定するカーボン製タイプ(第1実施形態を参照)
遮熱治具の外径D1:200mm
遮熱治具の高さH1:220mm
下部治具の位置H0:出発種棒の上端から320mm
下部治具の外径D2:200mm、内径D3:55mm
(比較例)
使用遮熱治具:なし
Inner diameter D0 of used sintering furnace: 210mm
Used porous glass base material: Glass fine particle deposit with an outer diameter of 180 mm Sintering temperature: 1600 ° C
(Example)
Heat shielding jig used: Carbon type that is fixed directly to the starting seed rod (see the first embodiment)
Heat shield jig outer diameter D1: 200mm
Heat shield jig height H1: 220mm
Lower jig position H0: 320 mm from the upper end of the starting seed bar
Lower jig outer diameter D2: 200 mm, inner diameter D3: 55 mm
(Comparative example)
Heat shield jig used: None

遮熱治具を取り付けた状態で、1ヶ月間ガラス微粒子堆積体を焼結炉内で焼結した実施例と、遮熱治具を取り付けない状態で、1ヶ月間ガラス微粒子堆積体を焼結炉内で焼結した比較例とで、焼結、線引き及び火研時に不良事態(母材の落下、母材上端の偏芯、ファイバ断線、母材クラック)が発生する頻度を集計した。結果を表1に示す。   An example in which a glass particulate deposit was sintered in a sintering furnace for 1 month with a heat shield attached, and a glass particulate deposit for 1 month without a heat shield attached. In the comparative example sintered in the furnace, the frequency of occurrence of defects (base material falling, eccentricity of the upper end of the base material, fiber disconnection, base material crack) during sintering, wire drawing and pyrotechnics was tabulated. The results are shown in Table 1.

Figure 0005821443
Figure 0005821443

表1に示すように、実施例では、母材の落下及び母材クラックが全く発生しなかった。また、母材上端の偏芯及びファイバ断線も低く抑えることができた。これは、遮熱治具の下部治具より下方側では、下部治具を最適な位置に調整できたことにより、ガラス微粒子堆積体の上端部が確実に焼結され、また、下部治具より上方側へは、遮熱治具により遮熱されたため、種棒部の引き伸びが抑えられたことによると推察できる。なお、上記第2実施形態に記載の遮熱治具を使用した場合も、ほぼこれと同じ結果が得られた。   As shown in Table 1, in the examples, the base material dropped and the base material crack did not occur at all. In addition, the eccentricity of the upper end of the base material and the fiber breakage could be kept low. This is because the lower jig can be adjusted to the optimum position on the lower side of the lower jig of the heat shield jig, so that the upper end of the glass particulate deposit is surely sintered. It can be inferred that the upper side was shielded by the heat shield jig, so that the elongation of the seed rod portion was suppressed. Even when the heat shield jig described in the second embodiment was used, substantially the same result was obtained.

これに対して比較例では、母材の落下及び母材クラックが発生しており、母材上端の偏芯及びファイバ断線も実施例の発生頻度に比べて10倍以上多く発生していることがわかる。したがって、遮熱治具を取り付けることによる顕著な効果を確認することができた。   On the other hand, in the comparative example, the base material dropped and the base material crack occurred, and the eccentricity of the upper end of the base material and the fiber breakage occurred more than 10 times as much as the occurrence frequency of the example. Recognize. Therefore, the remarkable effect by attaching a heat shield jig | tool was able to be confirmed.

1…ガラス微粒子堆積体、2…テーパ状ガラス微粒子堆積部、3…出発種棒、8…種棒部、10,40…焼結炉、11…炉心管、12…ヒータ、14,41…連結部材、20,50…遮熱治具、21,51…上部治具、22…下部治具、23…吊りボルト、24…第1遮熱板、25…第2遮熱板、26…調整ナット、27…切欠部、28…種棒貫通孔、31…連結片、32,52…取付孔
DESCRIPTION OF SYMBOLS 1 ... Glass fine particle deposit body, 2 ... Tapered glass fine particle deposition part, 3 ... Starting seed rod, 8 ... Seed rod part, 10,40 ... Sintering furnace, 11 ... Core tube, 12 ... Heater, 14, 41 ... Connection Members, 20, 50 ... heat shield jig, 21, 51 ... upper jig, 22 ... lower jig, 23 ... suspension bolt, 24 ... first heat shield plate, 25 ... second heat shield plate, 26 ... adjustment nut , 27 ... Notch, 28 ... Seed bar through hole, 31 ... Connecting piece, 32, 52 ... Mounting hole

Claims (3)

出発種棒にガラス微粒子を堆積させ、種棒部、テーパ状ガラス微粒子堆積部、ガラス微粒子定常堆積部からなるガラス微粒子堆積体をヒートゾーンからの熱により加熱焼結させるガラス母材の製造方法であって、
前記ガラス微粒子堆積体上部の前記テーパ状ガラス微粒子堆積部の上部近傍に、前記ガラス微粒子堆積体毎に長手方向に位置調整が可能となる遮熱治具を配置することにより、前記ヒートゾーン及び前記ガラス母材から前記種棒部へ伝わる熱を遮熱しながら、前記ガラス微粒子堆積体を焼結することを特徴とするガラス母材の製造方法。
A glass base material manufacturing method in which glass particulates are deposited on a starting seed rod, and a glass particulate deposit comprising a seed rod portion, a tapered glass particulate deposition portion, and a glass particulate stationary deposition portion is heated and sintered by heat from a heat zone. There,
Near the top of the tapered glass particle deposition portion of the soot glass deposit body top, by arranging the heat shielding jig that enables position adjustment in the longitudinal direction for each of the glass particles deposit, said heat zone and the A method for producing a glass base material, comprising: sintering the glass fine particle deposit while shielding heat transmitted from the glass base material to the seed rod part.
出発種棒にガラス微粒子を堆積させ、種棒部、テーパ状ガラス微粒子堆積部、ガラス微粒子定常堆積部からなるガラス微粒子堆積体を収容する炉心管と、
前記ガラス微粒子堆積体を加熱焼結させる加熱炉と、を有し、
前記ガラス微粒子堆積体上部の前記テーパ状ガラス微粒子堆積部の上部近傍に、前記ガラス微粒子堆積体毎に長手方向に位置調整が可能となる遮熱治具を設けたことを特徴とするガラス母材の焼結炉。
A core tube for depositing glass particulates on a starting seed rod and containing a glass particulate deposit comprising a seed rod portion, a tapered glass particulate deposition portion, and a glass particulate stationary deposition portion;
A heating furnace for heating and sintering the glass particulate deposit,
Near the top of the tapered glass particle deposition portion of the soot glass deposit body top, the glass base material, characterized in that a heat shield jig that enables position adjustment in the longitudinal direction for each of the glass particles deposit Sintering furnace.
前記遮熱治具は、前記種棒部に固定されていることを特徴とする請求項2に記載のガラス母材の焼結炉。 The thermal barrier jig sintering furnace of the glass base material according to claim 2, characterized in that it is fixed to the front Symbol seed rod portion.
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