JP5817476B2 - Batch processing control method and batch processing control system - Google Patents

Description

  The present invention relates to a batch processing control method and a batch processing control system that collectively process a plurality of lots such as semiconductor wafers in a manufacturing process with a processing facility.

  A batch processing control method and a batch processing control system that collectively process a plurality of lots in the manufacturing process with a processing facility are disclosed in, for example, Japanese Patent Laid-Open Nos. 9-7912 (Patent Document 1) and 2003-173204 ( It is disclosed in Patent Document 2).

  In the production control device disclosed in Patent Document 1, the standing time from the processing end time of the first processing device (for example, the cleaning device) to the processing start time of the second processing device (for example, the diffusion device) is less than the limit. Is a semiconductor substrate production control device required for each processing lot, based on the time required for the second transfer from the first processing device to the second processing device and the time required for processing of the second processing device, The scheduled processing start time and scheduled processing end time of the first processing device, and the scheduled processing start time and scheduled processing end time of the second processing device are set for each scheduled delivery lot so that the leaving time of each processing lot is less than the limit. And is stored as reservation information. And based on this reservation information, the conveyance operation which permits the 1st conveyance from a 1st storage station (store) to a 1st processing apparatus is controlled. As a result, even in a production system in which lots for which a standing time limit is required between processing steps are mixed, manufacturing efficiency can be improved without degrading quality.

  In addition, the allocation method to the processing apparatus disclosed in Patent Document 2 arrives within a set waiting allowable time in the allocation method to the processing apparatus that allocates a plurality of lots to the processing apparatus that processes these lots. For the lot and the arrived lot, an evaluation value obtained by multiplying each lot size by the priority is calculated, and a lot having a large calculated evaluation value is selected. As a result, the lots can be efficiently allocated to the processing apparatus for processing these lots.

Japanese Patent Laid-Open No. 9-7912 JP 2003-173204 A

  The production control device disclosed in Patent Document 1 targets conveyance control between a continuous first storage station (store), a first processing device (for example, a cleaning device), and a second processing device (for example, a diffusion device). Yes. The above-described control method by the production control apparatus is, in other words, a method in which a batch group is formed in consideration of the standing time limit for lots waiting in a store, and processing is performed by making a reservation in the next cleaning apparatus and diffusion apparatus. It is. However, lots scheduled to be loaded into the first storage station are not necessarily loaded as planned, and may arrive late or may not arrive due to problems such as quality abnormalities. In such a case, the number of lots constituting the batch group is reduced, the batch efficiency is lowered, and the production capacity is lowered.

  On the other hand, in the allocation method to processing apparatuses disclosed in Patent Document 2, not only lots that have already arrived at the processing apparatuses but also lots that arrive within a set waiting time are set as constituents of a batch group. . However, the scheduled arrival lot is not always delivered as planned, and may arrive late or may not arrive due to a problem such as quality abnormality. Although the waiting time is set in the allocation method of Patent Document 2, if the arrival of the lot becomes later than the waiting time, the batch efficiency is lowered and the production capacity is lowered.

  The present invention has been made in view of the above circumstances, and is a new batch processing control method and batch processing control system that replace the conventional method, and not only lots that have arrived at the processing equipment but also unarrived lots of the batch group. The object is to provide a batch processing control method and a batch processing control system having a high production capacity that can suppress a decrease in batch efficiency even if there is a delay or trouble with respect to the initial plan of an unarrived lot. It is said.

The invention according to claim 1 is a batch processing control method for collectively processing a plurality of lots made of carriers loaded with one or more workpieces in a processing facility, and the store has arrived at the store as the processing facility. A first processing facility into which the plurality of lots are loaded, and a second processing facility into which the plurality of lots are loaded after processing at the first processing facility. In the previous stage where the processing is performed , batch group candidate groups having the same processing conditions that can be collectively processed by the second processing facility are selected from the lots waiting in the store and the lots that have not arrived at the store . Select according to the predetermined priority given to each lot, repeatedly create at a predetermined time interval, and finally the batch composition that is created when the processing equipment can be processed Batch set group in which the group based on, is characterized by performing the work-in-progress indication.

  In the batch processing control method described above, multiple lots such as semiconductor wafers mounted on a carrier and flowing one after another in a manufacturing process are processed together by a diffusion facility (batch processing), and lot control is performed when performing batch processing. Is the method.

  In the batch processing control method described above, when forming a batch group of a plurality of lots to be processed together in the processing facility, not only the lot that has arrived at the processing facility and is in a waiting state, but also the lot that has not arrived at the processing facility. It is targeted for configuration. That is, in the batch processing control method described above, batch group candidate groups having the same processing conditions that can be collectively processed by the processing facility are classified into lots waiting in the processing facility and lots that have not arrived at the processing facility. It is selected according to a predetermined priority assigned to the lot, and is repeatedly created at a predetermined time interval shorter than the processing time in the processing facility. Then, when the processing facility becomes processable, an in-process instruction is given with the batch group candidate group finally created as a batch group.

  Therefore, the batch group candidate groups are updated one after another at predetermined time intervals. For this reason, even if a lot that has not arrived at the processing facility does not arrive due to a trouble in the middle or is delayed, the batch group candidate group is updated to the latest lot structure at the creation timing that repeats at a predetermined time interval. Updated. When the processing facility becomes processable, an in-process instruction is given as a batch group to the latest batch group candidate group.

  As described above, according to the batch processing control method described above, the batch group candidate group is updated (reconfiguration of the lot structure) until immediately before the processing facility is in process, and the optimum lot at the time when the processing facility can be processed. An in-process instruction is given to the batch group candidate group having the configuration. For this reason, according to the said batch processing control method, the fall of the batch efficiency by the middle trouble of an arrival arrival lot can be suppressed. Therefore, the batch processing control method described above is a batch processing control method that configures a batch group only with lots that have arrived at a conventional processing facility, or a lot configuration that does not arrive at a processing facility even if a batch that has not arrived at the processing facility is incorporated into the batch group. Compared to the conventional batch processing control method that has not been updated, it has a high production capacity.

  In addition, since the batch processing control method searches and prepares the batch group candidate group in advance, compared to the conventional batch processing control method that searches for the batch group at the time when the processing facility becomes processable, The control load at the time of in-process instruction can also be reduced. In other words, in the conventional batch processing control method that does not have a function of searching for a batch group candidate group in advance, it may take time to determine a batch group to perform an in-process instruction, and unnecessary waiting time may occur. . According to the batch processing control method, it is possible to eliminate such a waiting time.

  As described above, the batch processing control method described above is a new batch processing control method that replaces the conventional method, and not only lots that have arrived at the processing facility but also unarrived lots are included in the batch group. Even if there is a delay or trouble with respect to the initial plan of the arrival lot, it is possible to provide a batch processing control method having a high production capacity that can suppress a decrease in batch efficiency.

The creation of the batch group candidate group in the batch processing control method as described in claim 2 is a search for a reference lot in which a lot waiting in the store is searched and the obtained lot is determined as a reference lot. A priority reference lot determining step for determining the highest priority lot as the priority reference lot from among the reference lots, and batch processing with the same processing conditions as the priority reference lot from among the reference lots. A batch group reference lot determination step for searching a lot that can be combined and determining the obtained lot as a batch group reference lot, and batch processing can be performed from the unarrived lots with the same processing conditions as the priority reference lot. A batch group candidate lot search step for searching a lot and determining the obtained lot as a batch group candidate lot; If the batch group reference lots are grouped together with the priority reference lots according to the priorities and the grouping does not satisfy the maximum number of workpieces that can be processed in the processing facility, the batch group candidate lots are determined according to a predetermined incorporation rule. It is preferable to include a batch group candidate group determining step for determining a batch group candidate group by incorporating the group into the group.

  In the above configuration, when creating a batch group candidate group, the batch group candidate group is assembled around the priority standard lot having the highest priority among the standard lots that have arrived at the processing facility.

  When the priority standard lot is determined, the processing conditions are determined, and therefore, among the standard lots that have already arrived at the processing facility, list the batch standard batches as batches that can be batched with the same processing conditions as the priority standard lot. Can do. In addition, from among the lots that have not arrived at the processing facility, batch set candidate lots can be listed as batches that can be batch set with the same processing conditions as the priority reference lot. The list of batch set reference lots and batch set candidate lots may be equal to or greater than the maximum number of workpieces that can be processed in the processing facility. Then, the batch group reference lot is first grouped together with the priority standard lot according to the priority, and when the grouping reaches the maximum processable number of workpieces in the processing facility, it is determined as a batch group candidate group. . If the grouping does not satisfy the maximum number of workpieces that can be processed in the processing facility, batch candidate batches that have not arrived are incorporated into a group according to a predetermined incorporation rule to determine a batch candidate group.

  As a rule for incorporating the batch set candidate lots, the batch set candidate lots may be set according to the priorities in the same manner as the batch set reference lots that have already arrived at the processing facility. However, for batch set candidate lots that have not arrived, there may be a delay or trouble with respect to the initial plan.

In consideration of the above possibility, as described in claim 3, a batch processing control method for processing a plurality of lots made of carriers loaded with one or more workpieces together in a processing facility, wherein the batch is controlled in the processing facility The batch group candidate group having the same processing conditions that can be processed in this manner is selected according to a predetermined priority assigned to each lot from among the lots waiting in the processing facility and the lots that have not arrived at the processing facility. When the processing equipment can be processed repeatedly at a predetermined time interval, an in-process instruction is given to the batch group based on the batch group candidate group that is finally created, The batch group candidate group is created by searching for a waiting lot in the processing facility and determining the obtained lot as a reference lot. A priority reference lot determining step for determining the highest priority lot as a priority reference lot from among the reference lots, and searching for a lot that can be batch-assembled from the reference lot with the same processing conditions as the priority reference lot. And a batch group reference lot search step for determining the obtained lot as a batch group reference lot, and a lot that can be batch-set from the unarrived lots with the same processing conditions as the priority standard lot. A batch assembly candidate lot search step for determining the obtained lot as a batch assembly candidate lot, and the batch assembly reference lot is grouped together with the priority reference lot according to the priority, and the maximum of the workpieces in the processing facility by the grouping If the number that can be processed is less, the batch candidate lot is assigned to the group according to a predetermined incorporation rule. Incorporated in-loop, will have a determining step in the batch set candidate group to determine the batch set candidate group, the incorporation rules, said the batch set candidate lot, scheduled time required to arrive at the processing facility And a predetermined reference time to determine the perspective with respect to the processing facility, and the batch rule candidate lots that the scheduled required time is smaller than the reference time are incorporated into the group according to the priority, It is preferable that the batch set candidate lots whose scheduled required time is equal to or longer than the reference time include a second rule for incorporating the batch set candidate lots into the group in ascending order of the required required time.

  According to this, for batch set candidate lots where the estimated required time to arrival is close to the processing facility that is smaller than the predetermined reference time, the probability of delay or trouble occurring in the middle is small, so the priorities according to the priorities In the group. In addition, for batch set candidate lots that are far away from the processing facility where the estimated required time until arrival is greater than the predetermined reference time, the probability of delay or trouble occurring in the middle increases, so the planned required time is reduced. Are included in the group in the order of close to.

  The unarrived lot in the batch processing control method can be flowed as it is according to the initial plan line without performing special flow control until it arrives at the processing facility.

However, in the batch processing control method, as described in claim 4, the batch processing control method is a batch processing control method for processing a plurality of lots made of carriers loaded with one or more workpieces in a processing facility. Batch group candidate groups with the same processing conditions that can be processed collectively by the facility are assigned a predetermined priority assigned to each lot from among the lots waiting in the processing facility and the lots that have not arrived at the processing facility. When the processing equipment is ready for processing, an in-process instruction is sent to the batch group based on the batch group candidate group that is finally created. carried out, said the non-arrival of the lot, to create a temporary plan line you delete a time that is pending in the capital before the treatment facility, the non-arrival of the lot, before It is more preferable to flow in accordance with an extraordinary plan line.

  According to this, the initial plan line of the unarrived lot is temporarily changed, the unarrived lot is flowed in accordance with the temporary plan line having no waiting time in the facility before the processing facility, and the unarrived lot is initially It is possible to pull in to the treatment facility earlier than the planned line.

  It is not efficient to create the temporary planning line for all unarrived lots, and the flow of lots becomes complicated.

  Therefore, as described in claim 5, the temporary planning line reserves and temporarily presses the batch set group based on the batch set candidate group, and for the temporary presser lot belonging to the batch set group, When a lot waiting in the processing facility is an arrival temporary presser lot, and a lot not arriving at the processing facility is an unarrival temporary presser lot, it is preferable to create the unarrived temporary presser lot.

  That is, based on the batch group candidate group, a temporary planning line is created only for the temporarily arrived non-arrival temporary presser lots that are scheduled to be in-processed as a batch group and then flowed according to the temporary planning line. Pull in as soon as possible. In this way, control is performed so that the non-arrival temporary presser lot arrives more reliably by the processing start time of the processing equipment.

  Further, in this case, as described in claim 6, from the temporary plan line, a temporary payout date and time of a facility where the unarrival temporary presser lot is currently located, and a temporary payout date and time of a facility immediately before the processing facility, The temporary lead time, which is the difference between the above, and the delay or advance with respect to the initial planned line of the unarrived temporary presser foot lot is defined as an intermediate progress, and the unscheduled intermediate progress is obtained by subtracting the temporary lead time from the intermediate progress. It is preferable to determine the in-process order in the previous work facility until the arrival temporary presser lot arrives at the processing facility.

  The temporary intermediate progress is an index indicating the delay or advance of the unarrived temporary presser lot instead of the intermediate progress indicating the delay or advance with respect to the conventional initial planned line. Then, as described above, the in-process order in the facility for the previous work of the unarrived temporary presser lot is determined based on the temporary intermediate progress. For example, if the unarrived temporary presser lot is behind the temporary plan line, Accelerate the order of work in progress. Thereby, it is possible to control the unarrival temporary presser lot so that it arrives more reliably until the processing start time of the processing equipment.

  As described in claim 7, since the reserved batch group is based on the latest batch group candidate group, it is preferably reviewed at a predetermined timing.

  In addition, as described in claim 8, for the unarrived temporary presser lot, a temporary presser waiting time corresponding to the number of carriers that have already arrived at the processing facility is set. If it is impossible to arrive at the processing equipment even after the temporary presser waiting time, the unarrived temporary presser lot is released, and the batch group consisting of only the arrived temporary presser lots, It is preferable to give an in-process instruction.

  By setting the above-mentioned temporary presser waiting time for unarrived temporary presser lots that are not sure to arrive at the processing equipment, the arrival temporary presser lots when the unarrived temporary presser lots have not finally arrived at the processing equipment are set. Wasteful waiting time can be suppressed.

Wherein in the batch processing control method work, for example, as described in claim 11, it may be a semiconductor wafer.

In the batch processing control method, for example, as described in claim 9 , the processing facility includes a continuous first processing facility and a second processing facility, and the processing of the first processing facility and the second processing facility. By setting the processing of the processing equipment as continuous processing, the batch processing control method described above can be applied in the same manner.

For example, as in claim 10 , the first processing facility is a cleaning facility, and the second processing facility is a diffusion facility.

  Needless to say, the batch processing control method can be similarly applied to a case where three or more continuous batch processings continue.

  In the manufacture of a semiconductor substrate, generally, before the diffusion process is performed, the semiconductor substrate is subjected to a cleaning process. In such a case, the processing in the cleaning facility and the processing in the diffusion facility are set as continuous processing, and in the previous stage of cleaning processing, creation of batch group candidate groups and reservation of batch group groups in the batch processing control method described above I do. According to this, it is possible to eliminate the stagnation expiration of the semiconductor substrate between the cleaning process and the diffusion process.

  As described above, the batch processing control method described above is a new batch processing control method that replaces the conventional method, and not only lots that have arrived at the processing facility but also unarrived lots are included in the batch group. It is a batch processing control method with high production capacity that can suppress a decrease in batch efficiency even if there is a delay or trouble with respect to the initial plan of the arrival lot.

  The invention described in claims 12 and 13 relates to a batch processing control system that implements the batch processing control method described above.

The invention according to claim 12 is a batch processing control system that collectively processes a plurality of lots made of carriers loaded with one or more workpieces in a processing facility, and has arrived at the store as the processing facility. A first processing facility into which the plurality of lots are loaded, and a second processing facility into which the plurality of lots are loaded after processing at the first processing facility. In the previous stage where the processing is performed , batch group candidate groups having the same processing conditions that can be collectively processed by the second processing facility are selected from the lots waiting in the store and the lots that have not arrived at the store . When the batch facility candidate group management device that selects according to a predetermined priority assigned to each lot and repeatedly creates it at a predetermined time interval and the processing equipment can be processed Batch set group based on the batch set candidate groups created finally, it is characterized by comprising and a work-in-progress instruction management apparatus for performing the work-in-progress indication.

  Thereby, the batch processing control method of Claim 1 can be implemented.

Further, the invention described in claim 13 is a batch processing control system that collectively processes a plurality of lots made of carriers loaded with one or more workpieces in a processing facility, and is capable of being collectively processed in the processing facility. A batch set candidate for selecting a batch set candidate group of processing conditions from a lot waiting in the processing facility and a lot not arriving at the processing facility according to a predetermined priority, and repeatedly creating it at a predetermined time interval A group management device and an in-process instruction management device for issuing an in-process instruction to a batch group based on the batch group candidate group that is finally created when the processing facility becomes processable. and will be, the work-in-progress instruction management device, said about the non-arrival of the lot, create a temporary plan line you delete a time that is pending in the capital before the treatment facility , The non-arrival of the lot, is characterized by flowing in accordance with the temporary plan line.

  Thereby, the batch processing control method according to claim 4 can be carried out.

  The effects obtained by the batch processing control system according to claims 12 and 13 are as described in the batch processing control method.

It is a figure explaining the outline | summary of a batch process control method for the example of the diffusion process in the manufacture process of a semiconductor wafer. (A) is the figure which showed each lot of the 1st batch group currently being processed in a spreading | diffusion facility, and the 2nd batch group currently being reserved to process next, (b) is the 1st batch group It is the figure which showed the time chart of the 2nd batch group. It is a figure showing composition of batch processing control system 100 which enforces a batch processing control method concerning the present invention. It is the figure which showed an example of the batch group candidate group creation subroutine which the batch group candidate group management apparatus 40 of FIG. 2 implements. It is the figure which showed the example of preparation of a batch group candidate group. FIG. 5 is a flowchart showing a procedure for creating a temporary plan line and calculating a temporary intermediate progress performed by the in-process instruction management device 50 of FIG. 2. It is a figure explaining creation of a temporary planning line and flow management of a non-arrival temporary presser lot by temporary intermediate progress, and is a figure showing a case where a non-arrival temporary presser lot is behind the original planned line. It is a figure explaining creation of a temporary plan line and flow management of a non-arrival temporary presser lot by temporary intermediate progress, and is a figure showing a case where a non-arrival temporary presser lot is progressing with respect to an initial planned line. It is the figure which showed the task flow which the in-process instruction | indication management apparatus 50 of FIG. 2 performs. It is an example of the temporary presser waiting time in a spreading | diffusion facility. FIG. 10 shows the results of comparison of batch efficiency between the conventional batch processing control method not having the function of the present invention and the batch processing control method according to the present invention.

  The present invention relates to a batch processing control method and a batch processing control system that collectively process a plurality of lots such as semiconductor wafers in a manufacturing process with a processing facility. DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.

  FIG. 1 is a diagram for explaining an outline of a batch processing control method, taking diffusion processing in the manufacturing process of a semiconductor wafer as an example. FIG. 1 (a) is a diagram showing each lot of the first batch group being processed in the diffusion facility and the second batch group being reserved for the next processing, and FIG. It is the figure which showed the time chart of 1 batch group and a 2nd batch group.

  FIG. 2 is a diagram showing the configuration of a batch processing control system 100 that implements the batch processing control method according to the present invention.

  FIG. 1A shows semiconductor wafers that are unloaded from a carrier and being processed together by a diffusion facility as a first batch group. In addition, as a second batch group under reservation to be processed next in the diffusion facility, there are carriers in lots 1 to 3 loaded with semiconductor wafers that have arrived at the store, and facilities A to C before performing the batch processing operation. The carriers of lots 4 to 6 are indicated by solid lines. As shown in FIG. 1B, the lots 4 to 6 that have not yet arrived at the store arrive at the store by a predetermined time before the diffusion process of the semiconductor wafers of the first batch group ends. After the processing of the first batch group is completed and the diffusion facility is vacant, the second batch group is immediately put into the process.

  The cleaning equipment and the diffusion equipment shown in FIG. 1A are continuous, and the wafer cleaning processing in the cleaning equipment and the wafer diffusion processing in the diffusion equipment are set as continuous processing for one batch group. ing. In other words, a series of operations in the store, the cleaning facility, and the diffusion facility in FIG. 1A are handled as one batch processing operation. Further, the diffusion facility shown in FIG. 1A is generally composed of a plurality of batch processing facilities having different maximum batch numbers.

  The batch processing control method according to the present invention efficiently configures a plurality of lots to be processed next in a batch processing facility as a batch set group (second batch set group in FIG. 1). This is a method for suppressing a decrease in the charging efficiency.

  The batch processing control method according to the present invention is a batch processing control method in which a plurality of lots made of carriers carrying one or more workpieces are collectively processed by a processing facility (diffusion facility in FIG. 1). Batch set candidate groups with the same processing conditions that can be processed in this way are the lots waiting in the processing facility (lots 1 to 3 in FIG. 1) and the lots that have not arrived at the processing facility (lots 4 to 6 in FIG. 1). Are selected according to a predetermined priority given to each lot, repeatedly created at a predetermined time interval, and finally the batch set created when the processing equipment becomes processable. It is characterized in that an in-process instruction is given to a batch group based on the candidate group.

  In the batch processing control method, as shown in FIG. 1, a plurality of lots such as semiconductor wafers mounted on a carrier and flowing one after another in a manufacturing process are collectively processed in a batch processing facility such as a diffusion facility (batch processing). ), A lot control method for batch processing.

  In the batch processing control method described above, when a batch set group of a plurality of lots to be processed together in a processing facility is formed, not only a lot that has arrived at the processing facility (store) and is in a waiting state but also has not arrived at the processing facility. Lots are also included in the composition. That is, in the batch processing control method described above, batch group candidate groups having the same processing conditions that can be collectively processed by the processing facility are classified into lots waiting in the processing facility and lots that have not arrived at the processing facility. It is selected according to a predetermined priority assigned to the lot, and is repeatedly created at a predetermined time interval shorter than the processing time in the processing facility. Then, when the processing facility becomes processable, an in-process instruction is given with the batch group candidate group finally created as a batch group.

  The batch group candidate groups are created in the batch group candidate group management apparatus 40 of the batch processing control system 100 shown in FIG. 2 described later, and are updated one after another at predetermined time intervals. For this reason, even if a lot that has not arrived at the processing facility does not arrive due to a trouble in the middle or is delayed, the batch group candidate group is updated to the latest lot structure at the creation timing that repeats at a predetermined time interval. Updated. When the processing facility becomes processable, an in-process instruction as a batch group is issued to the latest batch group candidate group by the in-process instruction management device 50 of the batch processing control system 100 in FIG. 2 to be described later. Made.

  As described above, according to the batch processing control method described above, the batch group candidate group is updated (reconfiguration of the lot structure) until immediately before the processing facility is in process, and the optimum lot at the time when the processing facility can be processed. An in-process instruction is given to the batch group candidate group having the configuration. For this reason, according to the said batch processing control method, the fall of the batch efficiency by the middle trouble of an arrival arrival lot can be suppressed. Therefore, the batch processing control method described above is a batch processing control method that configures a batch group only with lots that have arrived at a conventional processing facility, or a lot configuration that does not arrive at a processing facility even if a batch that has not arrived at the processing facility is incorporated into the batch group. Compared to the conventional batch processing control method that has not been updated, it has a high production capacity.

  In addition, since the batch processing control method searches and prepares the batch group candidate group in advance, compared to the conventional batch processing control method that searches for the batch group at the time when the processing facility becomes processable, The control load at the time of in-process instruction can also be reduced. In other words, in the conventional batch processing control method that does not have a function of searching for a batch group candidate group in advance, it may take time to determine a batch group to perform an in-process instruction, and unnecessary waiting time may occur. . According to the batch processing control method, it is possible to eliminate such a waiting time.

  As described above, the batch processing control method described above is a new batch processing control method that replaces the conventional method, and not only lots that have arrived at the processing facility but also unarrived lots are included in the batch group. Even if there is a delay or trouble with respect to the initial plan of the arrival lot, it is possible to provide a batch processing control method having a high production capacity that can suppress a decrease in batch efficiency.

  A batch processing control system 100 shown in FIG. 2 is a control system for carrying out the batch processing control method. The batch processing control system 100 in FIG. 2 is a five management device including a manufacturing process flow management device 10, a lot management device 20, an intermediate progress management device 30, a batch group candidate group management device 40, and an in-process instruction management device 50. It is configured. Each of the management devices 10 to 50 includes a computer (server) and a database (DB) that stores management information, and is configured to be able to communicate with each other. In the batch processing control system 100 of FIG. 2, the functions of the entire system are roughly divided into five management devices 10 to 50 provided for each function. However, the configuration is not limited to the configuration in FIG. 2, and for example, the functions of two or more management devices illustrated in FIG. 2 may be included in the same management device.

  In the batch processing control system 100 of FIG. 2, the manufacturing process flow management apparatus 10 is an apparatus that manages items related to each facility in the manufacturing process flow, such as the state of each facility in the manufacturing process and the work status in the facility. The lot management apparatus 20 is an apparatus that manages items related to the production plan for each lot, such as work conditions and flow planning lines in the production process for each lot. The intermediate progress management device 30 is a device that manages the delay and advance with respect to the plan line for each flowing lot.

  The batch group candidate group management device 40 is a management device unique to the batch processing control system 100 of FIG. 2 for carrying out the above-described batch processing control method, which the conventional batch processing control system does not have. The batch set candidate group management device 40 selects a batch set candidate group having the same processing conditions that can be processed collectively by the batch processing facility from among a lot waiting in the processing facility and a lot that has not arrived at the processing facility. Are selected according to the priorities and are repeatedly created at predetermined time intervals. Further, unlike the in-process instruction management device in the conventional batch processing control system, the in-process instruction management device 50 is finally created in the batch group candidate group management device 40 when the batch processing facility becomes processable. An in-process instruction is issued to the batch group based on the batch group candidate group. Furthermore, the in-process instruction management device 50 deletes not only the in-process instruction for the batch group, but also the waiting time in the equipment before the processing equipment for the lot that has not arrived at the batch processing equipment, as will be described later. Create a temporary planning line. Further, the flow of the unarrived lot is managed so as to flow according to the temporary plan line.

  Next, a preferable form is demonstrated about the detail of the above-mentioned batch processing control method.

  FIG. 3 is a diagram showing an example of a batch group candidate group creation subroutine executed by the batch group candidate group management apparatus 40 of FIG.

  FIG. 4 is a diagram showing an example of creating a batch group candidate group.

  The creation of the batch group candidate group in the batch processing control method described above preferably has the following steps as shown in the batch group candidate group creation subroutine of FIG. That is, a lot (for example, lots 1 to 3 in FIG. 1) waiting in the processing facility is searched, and a reference lot search step S41 in which the obtained lot is determined as a reference lot and a predetermined lot are determined from the reference lots. Priority reference lot determination step S42 for determining the highest priority lot as a priority reference lot, and searching for lots that can be batch-assembled from the reference lots with the same processing conditions as the priority reference lot. Batch group reference lot search step S43 for determining a lot as a batch group reference lot, and batches having the same processing conditions as the priority reference lot among the lots that have not arrived at the processing equipment (for example, lots 4 to 6 in FIG. 1) A batch set candidate lot search step S44 for searching for a lot that can be set and determining the obtained lot as a batch set candidate lot; Group standard lots are grouped together with priority standard lots according to the priority, and if the grouping does not satisfy the maximum number of workpieces that can be processed in the processing facility, batch candidate batches are incorporated into groups according to a predetermined incorporation rule, This configuration includes a batch group candidate group determination step S45 for determining a batch group candidate group.

  In the above configuration, in the first reference lot search step S41, lots that already belong to other batch group candidate groups are excluded from the reference lot. In batch set candidate lot search step S44, lots that satisfy the following conditions are excluded from the batch set candidate lots. In other words, lots that already belong to other batch group candidate groups, lots scheduled to be stopped by batch processing work, lots that cannot be processed by the same batch processing equipment due to limitations of batch processing equipment, etc., temporarily stopped This is a pending lot.

  The batch group candidate group having the above configuration is repeatedly generated at regular time intervals using the batch group candidate group creation subroutine of FIG. 3 by the batch group candidate group creation task in the batch group candidate group management device 40 of FIG. The created batch group candidate group information is stored in the database.

  In the above configuration, when creating a batch group candidate group, the batch group candidate group is assembled around the priority standard lot having the highest priority among the standard lots that have arrived at the processing facility.

  When the priority standard lot is determined, the processing conditions are determined, and therefore, among the standard lots that have already arrived at the processing facility, list the batch standard batches as batches that can be batched with the same processing conditions as the priority standard lot. Can do. In addition, from among the lots that have not arrived at the processing facility, batch set candidate lots can be listed as batches that can be batch set with the same processing conditions as the priority reference lot. The list of batch set reference lots and batch set candidate lots may be equal to or greater than the maximum number of workpieces that can be processed in the processing facility. Then, the batch group reference lot is first grouped together with the priority standard lot according to the priority, and when the grouping reaches the maximum processable number of workpieces in the processing facility, it is determined as a batch group candidate group. . If the grouping does not satisfy the maximum number of workpieces that can be processed in the processing facility, batch candidate batches that have not arrived are incorporated into a group according to a predetermined incorporation rule to determine a batch candidate group.

  As a rule for incorporating the batch set candidate lots, the batch set candidate lots may be set according to the priorities in the same manner as the batch set reference lots that have already arrived at the processing facility. However, for batch set candidate lots that have not arrived, there may be a delay or trouble with respect to the initial plan.

  In consideration of the above-mentioned possibility, the incorporation rule determines the distance to the processing facility by comparing the predetermined required time until the arrival at the processing facility with respect to the batch set candidate lot, and the planned required time. A first rule that incorporates batch set candidate lots having a time shorter than the reference time into a group according to the priority, and a second rule that incorporates batch set candidate lots whose scheduled required time is equal to or greater than the reference time into the group in ascending order of the required required time. It is preferable to have a configuration including rules.

That is, when batch candidate batches are incorporated, as shown below, after determining whether “far” or “close” with respect to the processing equipment of the batch candidate lots, they are incorporated into groups according to the incorporation rules.
1. To determine whether the batch processing facility is “far” or “near”, the reference time R set in advance within the reachable time range of the batch set candidate lot and the estimated required time A = (estimated arrival date-current date) are compared. Judgment is made as follows. When the scheduled required time A ≧ the reference time R, it is determined as “far”, and when the planned required time A <the reference time R, it is determined as “close”.
2. The following rules are set as the rules for incorporating batch candidate batches. As a first rule, lots that are “close” to the processing facility are incorporated in order of priority. As a second rule, lots that are “distant” from the processing facility are incorporated in the order of arrival date and time. If the scheduled arrival date and time are the same, the order of priority is assumed.

  According to this, for batch set candidate lots where the estimated required time to arrival is close to the processing facility that is smaller than the predetermined reference time, the probability of delay or trouble occurring in the middle is small, so the priorities according to the priorities Be included in the group. In addition, for batch set candidate lots that are far away from the processing facility where the estimated required time until arrival is greater than the predetermined reference time, the probability of delay or trouble occurring in the middle increases, so the planned required time is reduced. It is included in the group in the order close to.

  As shown in the batch group candidate group creation example in FIG. 4, the batch group candidate group created by the subroutine in FIG. 3 described above is configured with the same lot in the batch processing facility, and is stored in the batch processing facility store. The batch batch reference lot that has arrived has priority. In addition, in the batch group reference lot, the priority order of each lot is determined according to the priority obtained by quantifying each class such as in-process conditions according to a predetermined rule. The first rule and the second rule described above are applied to batch set candidate lots that have not arrived at the store of the batch processing facility. Note that the intermediate progress in the example of creating the batch group candidate group in FIG. 4 is an index indicating delay or advance with respect to the initial planned line.

  The unarrived lot in the batch processing control method can be flowed as it is according to the initial plan line without performing special flow control until it arrives at the processing facility.

  However, in the batch processing control method described above, it is more preferable to create a temporary plan line in which the waiting time is deleted in the facility before the processing facility, and to flow the unarrived lot according to the temporary plan line. .

  According to this, the initial plan line of the unarrived lot is temporarily changed, the unarrived lot is flowed in accordance with the temporary plan line having no waiting time in the facility before the processing facility, and the unarrived lot is initially It is possible to pull in to the treatment facility earlier than the planned line.

  It is not efficient to create the temporary planning line for all the lots that have not arrived at the processing facility, and the flow of the lots becomes complicated.

  Therefore, the temporary planning line reserves and temporarily presses a batch set group based on the batch set candidate group created in the batch set candidate group management device 40 of FIG. 2, and for the temporary presser lot belonging to the batch set group, It is preferable to create an unarrived temporary presser lot when a lot waiting in the processing facility is an arrival temporary presser lot and a lot that has not arrived at the processing facility is an unarrival temporary presser lot.

  In other words, the in-process instruction management device 50 in FIG. 2 has not yet been temporarily pressed for the next in-process instruction as a batch group based on the batch group candidate group created in the batch group candidate group management device 40 in FIG. Temporary planning lines are created only for the arrival temporary presser lot. Then, the non-arrival provisional presser lot is flowed according to the temporary plan line so as to be quickly drawn into the processing facility. Thus, the non-arrival provisional presser lot is controlled to arrive more reliably until the processing start time of the processing equipment.

  In this case, the temporary lead time, which is the difference between the temporary payout date and time of the equipment where the unarrived temporary presser lot is currently located, and the temporary payout date and time of the equipment immediately before the processing equipment is calculated from the temporary plan line. When the delay or advance with respect to the initial planned line of the arrival temporary presser lot is defined as intermediate progress, the preliminary work until the arrival of the unarrived temporary presser lot to the processing facility is made based on the temporary intermediate progress obtained by subtracting the temporary lead time from the intermediate progress. It is preferable to determine the order of work in progress at the facility.

  The temporary intermediate progress is an index indicating the delay or advance of the unarrived temporary presser lot instead of the intermediate progress indicating the delay or advance with respect to the conventional initial planned line. Then, as described above, the in-process order in the facility for the previous work of the unarrived temporary presser lot is determined based on the temporary intermediate progress. For example, if the unarrived temporary presser lot is behind the temporary plan line, Accelerate the order of work in progress. Thereby, it is possible to control the unarrival temporary presser lot so that it arrives more reliably until the processing start time of the processing equipment.

  FIG. 5 is a flowchart showing the procedure for creating the temporary plan line and calculating the temporary intermediate progress described above, which is performed by the in-process instruction management device 50 of FIG.

  FIG. 6 and FIG. 7 are diagrams for explaining the flow management of unarrived temporary presser foot lots based on the creation of a temporary planning line and the temporary intermediate progress. FIG. 6 is a diagram showing a case where the unarrived temporary presser lot is delayed with respect to the initial planned line, and FIG. 6 is a diagram showing a case where the unarrived temporary presser lot is advanced with respect to the initial planned line. is there.

  The above-described creation of the temporary planning line and the flow management of the non-arrival temporary presser lot by the temporary intermediate progress will be described more specifically with reference to FIGS. 2 and 5 to 7.

  The in-process instruction (dispatch) management device 50 in the batch processing control system of FIG. 2 makes an inquiry to the batch group candidate group management device 40 at a predetermined timing by the reservation execution task, and the batch group candidate group management device 40 creates A batch group is reserved based on the batch group candidate group. The lot belonging to the reserved batch group is a temporary presser lot. Temporary presser lots waiting in the batch processing facility (store) are called arrival temporary presser lots, and temporary presser lots that have not arrived at the batch processing facility (store) are called non-arrival temporary presser lots.

  The reservation function of the in-process instruction management device 50 based on the batch group candidate group created by the batch group candidate group management apparatus 40 allows the batch instructor management apparatus 50 to select a lot that can be batch-assembled when the in-process instruction management device 50 issues an in-process instruction. It is not necessary to determine whether a search or batch combination is possible, and the work load in the in-process instruction management device 50 and the waiting time for calculation can be suppressed.

  In order to collect unarrival temporary presser lots in the batch processing facility as soon as possible in time for the processing start time in the batch processing facility when there is an unarrived temporary presser lot in the batch group reserved by the in-process instruction management device 50 The work-in-progress management device 50 creates a temporary plan line for unarrived temporary presser foot lots as exemplified in FIGS. 6 and 7 by a reservation execution task.

  In a normal case, the work lead time L for each work is composed of a transport time M, a waiting time W, and a processing time D, and is given by an expression [work lead time L = transport time M + waiting time W + processing time D]. On the other hand, when creating a temporary plan line for a non-arrival provisional presser lot, it is assumed that there is no waiting time W, and a temporary plan line is created as [Temporary work lead time QL = Transfer time M + Processing time D]. Next, the temporary payout date and time of the current position (current work) of the unarrived temporary presser lot is calculated from the created temporary plan line, and the temporary payout date and time of the first previous work (work before the batch processing work) is calculated. The difference is calculated and the result is used as the temporary lead time Q.

  The procedure for creating the temporary planning line and calculating the temporary lead time will be described in more detail with reference to the flowchart of FIG.

  First, in step SR1, “scheduled work date and time” of the head process (the first work process in FIGS. 6 and 7) is acquired for the reserved batch process work.

  Next, in step SR2, the transfer time from the first previous work of the reserved batch processing work to the head process is acquired from the transfer time DB of the manufacturing process flow management apparatus 10 in FIG. 2, and in step SR3, the in-process schedule is acquired. The “temporary payout date” of the first previous work is obtained by subtracting the transfer time from the date and time.

  Next, in step SR4, the processing time of each work from the “temporary payout date / time” of the first previous work to the current work of the non-arrival temporary presser lot is acquired from the processing time DB of the manufacturing process flow management apparatus 10 in FIG. To do.

  Next, in step SR5, the transfer time of each work from the “temporary payout date / time” of the first previous work to the current work of the unarrived temporary presser lot is acquired from the transfer time DB of the manufacturing process flow management apparatus 10 in FIG. To do.

  Next, in step SR6, using the above processing time and transport time until the current work of the unarrived temporary presser lot, the current work is traced back to calculate the “temporary payout date” of the current work.

  Thereby, the temporary planning line of the non-arrival temporary presser lot shown by the broken line in FIGS. 6 and 7 can be created.

  Next, the temporary intermediate progress RS is calculated as an index indicating the delay or advance of the non-arrival temporary presser lot with respect to the temporary plan line created above.

  First, in step SR7, a temporary lead time Q of each unarrived temporary presser lot is calculated. As shown in FIGS. 6 and 7, the temporary lead time Q is the difference between the “temporary payout date” of the current work and the “temporary payout date” of the first previous work.

  Next, in step SR8, the temporary intermediate progress RS of each unarrived temporary presser lot is calculated.

  The delay or advance of the flowed lot with respect to the initial plan line is conventionally calculated as the intermediate progress S in the intermediate progress management device 30 of FIG. 2, and this intermediate progress S determines the work order in each facility. Used when. Regarding the management of the delay or advance of the unarrived temporary presser lot, the temporary lead time Q is further subtracted from the intermediate progress S indicating the delay or advance with respect to the conventional initial planned line, “temporary intermediate progress RS = intermediate progress S−temporary lead “Time Q” is used as a management index. Using this temporary intermediate progress RS, the in-process order in each facility of the non-arrival temporary presser lot is determined. As a result, it is possible to increase the in-process priority until the batch processing equipment work for the unarrived temporary presser lot, and to prevent the waiting time until all unarrived temporary presser lots scheduled for batch processing arrive as much as possible. To do.

  After the processing in the batch processing facility is completed, the unarrived temporary presser lot is returned to the initial plan line and the subsequent flow is managed. Further, when the batch processing facility in the subsequent process becomes a non-arrival temporary presser lot again, a new temporary planning line is created again.

  FIG. 8 is a diagram showing a task flow performed by the in-process instruction management device 50 of FIG.

  Prior to arrival of the unarrival temporary presser lot at the batch processing facility, the priority order of the lots in the batch group reserved by the in-process instruction management device 50 in FIG. As lots are added, the position and information of each lot change every moment. Therefore, the batch group that is reserved by the in-process instruction management device 50 needs to be based on the latest batch group candidate group that is repeatedly created by the batch group candidate group management device 40. Therefore, it is preferable that the in-process instruction management device 50 makes an inquiry to the batch group candidate group management device 40 at a predetermined timing, and is reviewed at the predetermined timing as in step S51 of FIG.

As the review timing of the reserved batch group, for example, the following timing is suitable.
1. 1. When a new lot arrives at the batch processing facility. 2. When batch set groups are not prepared within a predetermined temporary presser waiting time to be described later, unarrived temporary presser lots are released, and in-process batch processing equipment is started only by the incoming temporary presser lots. When the state of the batch processing facility is in a state where the next batch group can be processed Next, the in-process instruction management device 50 stores the processing facility for the reserved batch group in step S52 of FIG. It is determined whether there is an arrival provisional presser lot that has already arrived. If there is an arrival temporary presser lot in the store of the processing equipment, the process proceeds to the next step S53, where it is determined whether there is an unarrived temporary presser lot. On the other hand, when there is no arrival temporary presser lot in the processing facility store, the process returns to step S51, and the batch group is reviewed after a predetermined timing.

  In the next step S53, the in-process instruction management device 50 determines whether or not there is a non-arrival provisional presser lot that has not yet arrived at the processing facility store for the reserved batch group. If there is no unarrival provisional presser lot, all the provisional presser lots in the reserved batch group have already arrived, so an in-process instruction is issued for this, and processing in the batch processing facility is started. On the other hand, if there is a non-arrival temporary presser lot, the process proceeds to the next step S54, and a temporary plan line is created for each unarrived temporary presser lot. Further, in the next step S55, a temporary intermediate degree is calculated for each unarrived temporary presser lot, and the flow delay or advance of each unarrived temporary presser lot is managed.

  If any trouble (quality abnormality, etc.) occurs in the unarrived temporary presser lot, the flow of the unarrived temporary presser lot stops, and the processing of the reserved batch group cannot be started. In order to avoid this, a provisional press waiting time T corresponding to the number of carriers that have already arrived at the processing facility store is defined, and in step S56 in FIG. Judgment is made.

  FIG. 9 is an example of a temporary presser waiting time in the diffusion facility.

  If the arrival temporary presser lot does not exceed the temporary presser waiting time T in step S56 in FIG. 8, the process returns to step S51 while waiting for the unarrived temporary presser lot, and the batch group is reviewed at a predetermined timing. . On the other hand, if the unarrived temporary presser lot does not arrive at the store even after the temporary presser waiting time T has elapsed, in the next step S57, the unarrived temporary presser lot is canceled and the unarrived temporary presser lot is reserved. The batch processing equipment starts processing with the batch group configuration which is excluded from the group group and includes only the arrival temporary presser lot.

Specifically, the unarrival temporary presser lot canceling process is performed in the following procedure.
1. When a batch group group is reserved, if a non-arrival temporary presser lot is included, the current time (reservation time) is held, and the temporary presser waiting time (T1) corresponding to the number of arrived carriers is held.
2. When the batch assembly group review timing occurs, the temporary presser waiting time (T2) corresponding to the number of carriers that have arrived after the review is compared with the temporary presser wait time (T1) that is held first, The smaller value is held as a temporary presser waiting time (T3).
3. The current time is [1. When the time of (Reserved time held in step + Temporary presser waiting time (T3)) has passed, the non-arrival temporary presser lot is released from the reserved batch group, and the batch processing facility performs processing only with the incoming temporary presser lot. Start.

  As described above, in the batch processing control method described above, for the non-arrival temporary presser lot, a temporary presser waiting time is set according to the number of carriers that have arrived at the processing equipment, If it is not possible to arrive at the processing equipment even after the temporary presser waiting time, the unarrived temporary presser lot is canceled and an in-process instruction is sent to the batch group consisting of only the incoming temporary presser lots. Preferably it is done.

  By setting the above-mentioned temporary presser waiting time for unarrived temporary presser lots that are not sure to arrive at the processing equipment, the arrival temporary presser lots when the unarrived temporary presser lots have not finally arrived at the processing equipment are set. Wasteful waiting time can be suppressed.

  The workpiece in the batch processing control method is typically a semiconductor wafer, and the batch processing control method is suitable for lot management in batch processing such as diffusion equipment in semiconductor manufacturing. However, the present invention is not limited to this, and the batch processing control method can also be applied to lot management of other materials and parts in which batch processing is performed by, for example, heat treatment equipment. As described above, the batch processing control method is not limited to the case where a device such as a semiconductor (wafer) is manufactured (including trial manufacture), and any batch processing operation can be performed in production factories of various manufacturing industries. It is effective in the manufacturing process.

  In addition, the processing equipment in the batch processing control method may be equipment that performs one independent batch processing, such as a heat treatment equipment, that is not related to the preceding and following processes. However, the present invention is not limited to this, and the batch processing control method includes a first processing facility and a second processing facility in which the processing facilities are continuous, and the processing of the first processing facility and the processing of the second processing facility are continuous processing. By setting, the batch processing control method described above can be applied in the same manner. For example, as illustrated in FIG. 1, the first processing facility is a cleaning facility, and the second processing facility is a diffusion facility.

  In the manufacture of a semiconductor substrate, generally, before the diffusion process is performed, the semiconductor substrate is subjected to a cleaning process. In such a case, the processing in the cleaning facility and the processing in the diffusion facility are set as continuous processing, and in the previous stage of cleaning processing, creation of batch group candidate groups and reservation of batch group groups in the batch processing control method described above I do. According to this, it is possible to eliminate the stagnation expiration of the semiconductor substrate between the cleaning process and the diffusion process.

  Needless to say, the batch processing control method can be applied in the same manner even when three or more continuous batch processings continue.

  FIG. 10 shows a conventional batch processing control method that does not have the above-described function of the present invention and the present invention for 15 diffusion facilities having different maximum batch numbers constituting the diffusion facility of FIG. It is the result of comparing the batch efficiency with the batch processing control method according to.

  As is apparent from FIG. 10, the batch efficiency of the diffusion equipment can be increased by about 40 to 40% by introducing the batch processing control method and the batch processing control system of the present invention described above. Moreover, the operating rate of the diffusion facility can be improved by increasing the batch efficiency.

  As described above, according to the batch processing control method and the batch processing control system of the present invention, the batch efficiency can be improved without increasing the waiting time (lead time) in the store before the batch processing is performed. . Specifically, not only lots arriving at the batch processing facility store but also unarrived lots are expanded to the batch group group configuration range, and batch group candidate groups are repeatedly created at predetermined time intervals (FIG. 3). , FIG. 4). In addition, unarrived lots are scheduled and flowed in time for the processing start time of the batch processing facility. In the scheduling, the temporary planning line for the unarrived temporary presser lot is created and the temporary intermediate progress is calculated (FIGS. 5 to 7), the batch group group is reviewed, and the unarrived temporary presser lot is canceled by the temporary presser waiting time (see FIG. 8 and 9) and the like, it is possible to prevent an increase in waiting time (lead time) in the store before batch processing is performed. Thereby, the batch efficiency can be improved.

  As described above, the batch processing control method and the batch processing control system described above are a new batch processing control method and a batch processing control system that replace conventional ones, and include not only lots that have arrived at the processing facility but also unarrived lots. And a batch processing control method and a batch processing control system with high production capacity, which can be a constituent of a batch group and can suppress a decrease in batch efficiency even if there is a delay or trouble with the initial plan of an unarrived lot. It has become.

Moreover, since the use efficiency of equipment is improved by improving the batch efficiency by the batch processing control method and the batch processing control system, the generation of carbon dioxide (CO ₂ ) can be relatively suppressed.

DESCRIPTION OF SYMBOLS 100 Batch processing control system 10 Manufacturing process flow management apparatus 20 Lot management apparatus 30 Intermediate progress management apparatus 40 Batch group candidate group management apparatus 50 In-process instruction management apparatus

Claims (13)

A batch processing control method for processing a plurality of lots made of carriers carrying one or more workpieces together in a processing facility,
As the processing equipment, a store, a first processing equipment that carries in the plurality of lots that have arrived at the store, and a second that carries out the plurality of lots after processing at the first processing equipment. Have processing equipment,
In a stage before the first treatment in the processing equipment is performed, not arrived in the second processing batch set candidate group can process the same process conditions together with equipment, batch and said store pending in the said store Select from the lots according to the given priority given to each lot, create it repeatedly at given time intervals,
A batch processing control method, wherein when the processing facility becomes processable, an in-process instruction is given to a batch group based on the batch group candidate group that is finally created. The batch group candidate group is created as follows:
Searching for a lot in a waiting state in the store , and determining a reference lot for determining the obtained lot as a reference lot;
A priority reference lot determining step for determining the highest priority lot as the priority reference lot from among the reference lots;
A batch assembly reference lot search step for searching a lot that can be batch-assembled with the same processing conditions as the priority reference lot from the reference lot, and determining the obtained lot as a batch assembly reference lot;
A batch group candidate lot search step for searching a lot that can be batch-set with the same processing conditions as the priority reference lot from among the unarrived lots, and determining the obtained lot as a batch set candidate lot;
Group the batch set reference lots with the priority reference lots according to the priorities;
If the grouping does not satisfy the maximum number of workpieces that can be processed in the processing facility, the batch group candidate lots are determined by incorporating the batch group candidate lots into the group according to a predetermined incorporation rule. The batch processing control method according to claim 1, further comprising a determination step. A batch processing control method for processing a plurality of lots made of carriers carrying one or more workpieces together in a processing facility,
A batch group candidate group having the same processing conditions that can be processed collectively by the processing facility is selected from a lot waiting in the processing facility and a lot that has not yet arrived at the processing facility. Select according to priority, create repeatedly at predetermined time intervals,
When the processing facility is ready for processing, a batch group based on the batch group candidate group that is finally created is in-process instructed,
The batch group candidate group is created as follows:
Searching for a lot waiting in the processing facility and determining the obtained lot as a reference lot,
A priority reference lot determining step for determining the highest priority lot as the priority reference lot from among the reference lots;
A batch assembly reference lot search step for searching a lot that can be batch-assembled with the same processing conditions as the priority reference lot from the reference lot, and determining the obtained lot as a batch assembly reference lot;
A batch group candidate lot search step for searching a lot that can be batch-set with the same processing conditions as the priority reference lot from among the unarrived lots, and determining the obtained lot as a batch set candidate lot;
Group the batch set reference lots with the priority reference lots according to the priorities;
If the grouping does not satisfy the maximum number of workpieces that can be processed in the processing facility, the batch group candidate lots are determined by incorporating the batch group candidate lots into the group according to a predetermined incorporation rule. A decision step,
The incorporation rules are:
For the batch set candidate lot, compare the planned required time to arrive at the processing facility and a predetermined reference time, determine the distance to the processing facility,
A first rule that incorporates the batch set candidate lots into the group according to the priority, wherein the scheduled required time is less than the reference time;
The scheduled time is the batch set candidate lot more said reference time, scheduled time to the feature that is a second rule incorporated into the group in ascending order Luba pitch processing control method. A batch processing control method for processing a plurality of lots made of carriers carrying one or more workpieces together in a processing facility,
A batch group candidate group having the same processing conditions that can be processed collectively by the processing facility is selected from a lot waiting in the processing facility and a lot that has not yet arrived at the processing facility. Select according to priority, create repeatedly at predetermined time intervals,
When the processing facility is ready for processing, a batch group based on the batch group candidate group that is finally created is in-process instructed,
For the unarrived lot, create a temporary plan line that deletes the waiting time in the equipment before the processing equipment,
Wherein the non-arrival of the lot, features and to Luba pitch processing control method to flow in accordance with the temporary feature line. The temporary planning line is
Reserving and temporarily pressing the batch group based on the batch group candidate group, and for a temporary presser lot belonging to the batch group, a lot waiting in the processing facility arrives, and the processing facility 5. The batch processing control method according to claim 4, wherein the unarrived temporary presser lot is created when an unarrived lot is defined as an unarrived temporary presser lot. From the temporary planning line, calculate a temporary lead time that is the difference between the temporary payment date and time of the facility where the unarrived temporary presser lot is currently located and the temporary payment date and time of the previous equipment.
When the delay or advance of the unarrived temporary presser lot with respect to the initial planned line is defined as an intermediate progress, the temporary arrival of the unarrived temporary presser lot arrives at the processing facility by the temporary intermediate progress obtained by subtracting the temporary lead time from the intermediate progress. 6. The batch processing control method according to claim 5, wherein the in-process order in the previous work equipment is determined.   The batch processing control method according to claim 5 or 6, wherein the reserved batch group is reviewed at a predetermined timing. For the unarrival temporary presser lot, a temporary presser waiting time is set according to the number of carriers that have already arrived at the processing facility,
If the unarrived temporary presser lot cannot reach the processing facility even after the temporary presser waiting time has passed, the unarrived temporary presser lot is canceled and only the arrived temporary presser lot is configured. The batch processing control method according to claim 5, wherein an in-process instruction is issued to the batch group. The processing facility is composed of a continuous first processing facility and second processing facility,
Batch processing control method according to any one of claims 3 to 8, characterized in that you set the processing of the first processing facility processing as the second processing facility as a continuous process. Wherein the first processing facility, a washing installation, said second processing equipment, batch processing control method according to claim 9, wherein the diffusion equipment der Rukoto. The workpiece is a batch processing control method according to any one of claims 1 to 10 characterized in that it is a semiconductor wafer. A batch processing control system that collectively processes a plurality of lots made of carriers loaded with one or more workpieces in a processing facility,
As the processing equipment, a store, a first processing equipment that carries in the plurality of lots that have arrived at the store, and a second that carries out the plurality of lots after processing at the first processing equipment. Have processing equipment,
In a stage before the first treatment in the processing equipment is performed, not arrived in the second processing batch set candidate group can process the same process conditions together with equipment, batch and said store pending in the said store Batch group candidate group management device that selects from the lots according to a predetermined priority assigned to each lot and repeatedly creates them at a predetermined time interval;
When the processing facility is capable of processing, the batch group based on the batch group candidate group that is finally created has an in-process instruction management device for in-process instruction Feature batch processing control system. A batch processing control system that collectively processes a plurality of lots made of carriers loaded with one or more workpieces in a processing facility,
A batch group candidate group having the same processing conditions that can be processed collectively by the processing facility is selected according to a predetermined priority from a lot waiting in the processing facility and a lot that has not yet arrived at the processing facility. Batch group candidate group management device repeatedly created at a time interval of
When the processing equipment becomes processable, the batch set group based on the batch group candidate group that is finally created has an in-process instruction management device that performs an in-process instruction.
The in-process instruction management device is
For the unarrived lot, create a temporary plan line that deletes the waiting time in the equipment before the processing equipment,
Wherein the non-arrival of the lot, features and to Luba pitch process control system to flow in accordance with the temporary feature line.

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