JP5816183B2 - 導波路構造を有する自己混合干渉デバイス - Google Patents
導波路構造を有する自己混合干渉デバイス Download PDFInfo
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- JP5816183B2 JP5816183B2 JP2012534811A JP2012534811A JP5816183B2 JP 5816183 B2 JP5816183 B2 JP 5816183B2 JP 2012534811 A JP2012534811 A JP 2012534811A JP 2012534811 A JP2012534811 A JP 2012534811A JP 5816183 B2 JP5816183 B2 JP 5816183B2
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- 239000004065 semiconductor Substances 0.000 claims description 18
- 229910052710 silicon Inorganic materials 0.000 claims description 8
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- 238000011156 evaluation Methods 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
- G01B9/02028—Two or more reference or object arms in one interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02092—Self-mixing interferometers, i.e. feedback of light from object into laser cavity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P13/00—Indicating or recording presence, absence, or direction, of movement
- G01P13/02—Indicating direction only, e.g. by weather vane
- G01P13/04—Indicating positive or negative direction of a linear movement or clockwise or anti-clockwise direction of a rotational movement
- G01P13/045—Indicating positive or negative direction of a linear movement or clockwise or anti-clockwise direction of a rotational movement with speed indication
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
- G01P3/366—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light by using diffraction of light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/50—Systems of measurement based on relative movement of target
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/042—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
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- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Electromagnetism (AREA)
- Theoretical Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Human Computer Interaction (AREA)
- Optics & Photonics (AREA)
- Power Engineering (AREA)
- Semiconductor Lasers (AREA)
- Optical Integrated Circuits (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Description
Claims (11)
- 集積された光導波路構造を備える基板、該基板の表面上に配置されて、前記表面へ向けてレーザー放射線を放出する半導体レーザー光源、及び、該半導体レーザー光源の強度変化を検出するように備えられた光検出器を有する自己混合干渉デバイスであって、
前記集積された光導波路構造は、前記半導体レーザー光源と光学的に接続し、前記半導体レーザー光源により放出されるレーザー放射線を、前記基板の表面の射出光結合領域へ導光し、かつ、前記基板の外部の標的対象物から散乱されるレーザー放射線の一部を、前記半導体レーザー光源へ再入射するように導光するように設計され、
前記光導波路構造が、前記表面の一の位置へ入射するレーザー放射線を前記光導波路構造へ結合する結合構造を前記基板内に有する、
自己混合干渉デバイス。 - 前記レーザー光源がVCSELである、請求項1に記載の自己混合干渉デバイス。
- 前記光導波路構造は、シリコンが埋め込まれた光導波路構造である、請求項1又は2に記載の自己混合干渉デバイス。
- 前記基板又は光導波路構造が、前記表面の他の位置へ入射するレーザー放射線を前記光導波路構造へ結合する他の結合構造をさらに有し、
前記他の結合構造が、前記表面に対する法線と0°ではない角度をなして前記レーザー放射線を結合して射出するように設計される、
請求項1又は2に記載の自己混合干渉デバイス。 - 前記結合構造及び前記他の結合構造が、前記表面の外部に形成された凹型ミラー又は前記光導波路構造中に形成された偏向回折格子を有する、請求項4に記載の自己混合干渉デバイス。
- 前記結合構造及び前記他の結合構造が前記表面の外部に形成された凹型ミラーを有し、かつ、
前記他の結合構造は、前記表面に対する法線と0°ではない角度をなして結合して射出されるように前記レーザー放射線を偏向する光学素子をさらに有する、
請求項5に記載の自己混合干渉デバイス。 - 制御及び評価ユニットが、前記レーザー光源及び前記光検出器と電気的に接続し、かつ、
前記制御及び評価ユニットは、前記レーザー放射線を放出するように前記レーザー光源を制御し、かつ、前記標的対象物の距離及び/又は運動を決定するように前記光検出器の信号を評価するように設計される、
請求項1又は2に記載の自己混合干渉デバイス。 - 前記レーザー光源と前記射出光結合領域との間での前記光導波路構造の光学長が、2乃至20mmの範囲で選ばれる、請求項1又は2に記載の自己混合干渉デバイス。
- 1つ以上の他の集積された光導波路構造、前記基板の表面上に配置されて、前記表面へ向けて他のレーザー放射線を放出する1つ以上の他の半導体レーザー光源、及び、該他の半導体レーザー光源の強度変化を検出するように備えられた光検出器を有する請求項1又は2に記載の自己混合干渉デバイスであって、
前記他の集積された光導波路構造は、前記他の半導体レーザー光源と光学的に接続し、前記基板内に設けられ、前記他の半導体レーザー光源により放出されるレーザー放射線を、前記基板の表面の射出光結合領域へ導光し、かつ、前記基板の外部の標的対象物から散乱されるレーザー放射線の一部を、前記他の半導体レーザー光源へ再入射するように導光するように設計される、
自己混合干渉デバイス。 - 前記集積された光導波路構造、前記他の集積された光導波路構造、及び対応する射出光結合構造が、前記基板の表面に対して平行な面に沿って、かつ互いに直交する成分を有するように、前記レーザー放射線及び前記他のレーザー放射線を結合して射出するように設計される、請求項10に記載の自己混合干渉デバイス。
- 前記レーザー光源の2つ以上が、一の共通する半導体ダイ上の2つ以上のVCSELメサで構成される、請求項10に記載の自己混合干渉デバイス。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP09173915 | 2009-10-23 | ||
EP09173915.1 | 2009-10-23 | ||
PCT/IB2010/054708 WO2011048538A1 (en) | 2009-10-23 | 2010-10-18 | Self-mixing interference device with wave guide structure |
Publications (2)
Publication Number | Publication Date |
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JP2013508717A JP2013508717A (ja) | 2013-03-07 |
JP5816183B2 true JP5816183B2 (ja) | 2015-11-18 |
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Country Status (5)
Country | Link |
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US (1) | US9091747B2 (ja) |
EP (1) | EP2491336B1 (ja) |
JP (1) | JP5816183B2 (ja) |
CN (1) | CN102575925B (ja) |
WO (1) | WO2011048538A1 (ja) |
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2010
- 2010-10-18 WO PCT/IB2010/054708 patent/WO2011048538A1/en active Application Filing
- 2010-10-18 CN CN201080047707.8A patent/CN102575925B/zh active Active
- 2010-10-18 JP JP2012534811A patent/JP5816183B2/ja not_active Expired - Fee Related
- 2010-10-18 EP EP10782024A patent/EP2491336B1/en active Active
- 2010-10-18 US US13/500,678 patent/US9091747B2/en active Active
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Publication number | Publication date |
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JP2013508717A (ja) | 2013-03-07 |
US20120200858A1 (en) | 2012-08-09 |
WO2011048538A1 (en) | 2011-04-28 |
CN102575925B (zh) | 2015-12-09 |
EP2491336B1 (en) | 2013-03-27 |
US9091747B2 (en) | 2015-07-28 |
CN102575925A (zh) | 2012-07-11 |
EP2491336A1 (en) | 2012-08-29 |
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