JP5813425B2 - Surface treatment liquid for metal or alloy and surface treatment method using the same - Google Patents

Surface treatment liquid for metal or alloy and surface treatment method using the same Download PDF

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JP5813425B2
JP5813425B2 JP2011194456A JP2011194456A JP5813425B2 JP 5813425 B2 JP5813425 B2 JP 5813425B2 JP 2011194456 A JP2011194456 A JP 2011194456A JP 2011194456 A JP2011194456 A JP 2011194456A JP 5813425 B2 JP5813425 B2 JP 5813425B2
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宣広 山崎
宣広 山崎
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JCU Corp
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本発明は、金属または合金の表面処理に関し、更に詳細には、金属または合金に積層用、粘着用、感光用等の樹脂を強固に密着させることができる金属または合金用の表面処理液およびそれを用いた表面処理方法に関する。   The present invention relates to a surface treatment of a metal or an alloy, and more specifically, a surface treatment solution for a metal or an alloy capable of firmly adhering a resin for laminating, adhering, or photosensitive to the metal or the alloy, and the same. The present invention relates to a surface treatment method using the above.

現在、銅等の金属や銅等の合金(以下、単に「金属等」という)と、積層用、粘着用、感光用等の樹脂を用いてプリント基板が製造されている。   Currently, printed boards are manufactured using metals such as copper and alloys such as copper (hereinafter simply referred to as “metals”) and resins for laminating, adhering, and photosensitive.

このようなプリント基板を製造する際には、まず、金属等と樹脂を何層も重ねた積層板の金属等の表面に感光用の樹脂(ドライフィルムレジスト:DFR)を張り付け、露光、現像し、金属等の表面にDFRによる回路のマスクを形成する。次に、積層板の不要部分の金属等を薬品で溶解除去(エッチング)することにより回路を形成する。   When manufacturing such a printed circuit board, first, a photosensitive resin (Dry Film Resist: DFR) is attached to the surface of a metal plate or the like of a laminated board in which multiple layers of metal and resin are stacked, exposed and developed. Then, a DFR circuit mask is formed on the surface of metal or the like. Next, a circuit is formed by dissolving and removing (etching) unnecessary parts of the laminated plate with a chemical.

この回路形成の際に、DFRと金属等の表面とが強固に密着していないと、エッチング時にDFRが金属等の表面から浮き、回路が断線し、所望の回路が得られず不良となる。そのため、DFRと金属等の表面とを密着させる方法として、古くはバフ研磨、ブラシ研磨、スクラブ研磨あるいはベルトサンダー研磨のような機械的研磨によって金属等の表面を研磨処理する方法が採用されていた。   If the DFR and the surface of the metal or the like are not firmly adhered at the time of forming the circuit, the DFR floats from the surface of the metal or the like during etching, the circuit is disconnected, and a desired circuit cannot be obtained, resulting in a failure. Therefore, as a method of bringing DFR and the surface of metal into close contact with each other, a method of polishing the surface of metal or the like by mechanical polishing such as buff polishing, brush polishing, scrub polishing or belt sander polishing has been used in the past. .

しかしながら、プリント基板の高密度化、細線化、薄化が進み、特にフレキシブル回路基板に代表されるような薄物には、研磨機の構造上あるいは機械的な力を加えることによる基板の伸びによる寸法精度の低下が問題となり、機械研磨では対応できなくなった。そこで、機械的な研磨から薬品を使用した化学的研磨へと研磨方法が移行して来た。   However, printed circuit boards are becoming denser, thinner, and thinner, especially for thin objects such as flexible circuit boards, due to the structure of the polishing machine or the dimensions of the substrate due to mechanical force. Decrease in accuracy became a problem, and mechanical polishing could not cope. Therefore, the polishing method has shifted from mechanical polishing to chemical polishing using chemicals.

一方、化学的研磨でも、エッチングにより金属等の表面の粗化により、得られる仕上がり色調が変化してしまい、回路のでき上がりを検査する装置(自動光学検査装置:AOI)で外観不良と判断されることがあり、問題となっている。   On the other hand, even in chemical polishing, the finished color tone is changed due to the roughening of the surface of metal or the like by etching, and it is judged that the appearance is poor by an apparatus (automatic optical inspection apparatus: AOI) that inspects the completion of the circuit. Sometimes it is a problem.

また、金属等へのDFRの張り付け位置がずれた場合、一旦DFRを剥離除去し、再度表面粗化処理工程からやり直すが、化学的粗化処理は、繰り返し処理する度に、金属等の表面の粗化状態が強くなり、凹凸が深くなることにより、再加工した基板は、DFRを一度接着すると剥離するのが困難になるという問題や、更なる色調の変化によりAOI検査を通過できない状況が生じてしまうという問題がある。   In addition, when the DFR attachment position on the metal or the like is shifted, the DFR is once removed and removed, and the surface roughening process is performed again. As the roughened state becomes stronger and the unevenness becomes deeper, the reworked substrate becomes difficult to peel off once the DFR is bonded, and the situation where the AOI inspection cannot be passed due to further color change occurs. There is a problem that it ends up.

ところで、セミアディティブ工法に代表されるDFRをめっきレジストとして使用する場合、下地の銅シード層は1μm以下と非常に薄く、同箇所はエッチングをするとシード層が溶解除去されてしまうので、エッチング粗化ができず、現状は酸脱脂をすることがほとんどであり、DFRと金属等の高い密着性を得ることができない。   By the way, when DFR typified by the semi-additive method is used as a plating resist, the underlying copper seed layer is as thin as 1 μm or less, and etching is roughened because the seed layer is dissolved and removed when etching at the same location. At present, acid degreasing is mostly performed, and high adhesion between DFR and metal cannot be obtained.

そこで、金属等の表面をエッチング粗化することなく、DFR等を強固に密着させ得る表面に仕上げることのできる金属等の表面処理方法の開発が求められていた。   Therefore, there has been a demand for the development of a surface treatment method for metal or the like that can finish the surface of the metal or the like so that DFR or the like can be firmly adhered without etching roughening the surface.

このような技術としては、アゾール化合物と酸を含有する処理液(特許文献1)、特定の複素環式化合物を含有し、PHが4以下である処理液(特許文献2)、複数のアミノアゾールを組み合わせて含有する処理液(特許文献3)、過酸化水素、リン酸、アミノ基含有アゾールを含有する処理液(特許文献4)等が知られている。   Such techniques include a treatment liquid containing an azole compound and an acid (Patent Document 1), a treatment liquid containing a specific heterocyclic compound and having a pH of 4 or less (Patent Document 2), and a plurality of aminoazoles. A treatment liquid containing a combination of (Patent Document 3), a treatment liquid containing hydrogen peroxide, phosphoric acid, an amino group-containing azole (Patent Document 4), and the like are known.

しかしながら、特許文献1〜3に開示された技術では、金属等の表面にアゾール化合物等の造膜不均一が発生してムラが生じたり、また、処理加工に関する諸条件(時間・温度)についての記載がない為、アゾール化合物等の造膜厚と密着性の関連が得られていないため、前述した表面処理による品質低下等の問題を生じ、DFR等を強固に密着させ得る表面に仕上げるという目的を達成することはできなかった。また、特許文献4に開示された技術でも、過酸化水素と酸の存在により局部的な銅エッチングを発生させてしまい、品質低下等の問題を生じることがあり、DFR等を強固に密着させ得る表面に仕上げるという目的を達成することはできないことがあった。   However, in the techniques disclosed in Patent Documents 1 to 3, unevenness occurs due to non-uniform film formation of an azole compound or the like on the surface of a metal or the like, and various conditions (time and temperature) relating to processing Since there is no description, the relationship between the film thickness of the azole compound or the like and the adhesion are not obtained, so the problem of quality deterioration due to the surface treatment described above is caused, and the purpose is to finish the surface so that DFR or the like can be firmly adhered Could not be achieved. Further, even the technique disclosed in Patent Document 4 may cause local copper etching due to the presence of hydrogen peroxide and acid, which may cause problems such as deterioration in quality, and DFR or the like can be firmly adhered. The goal of finishing on the surface could not be achieved.

また、上記技術を実際のプリント基板の製造工程等に用いた場合、金属等の洗浄工程で用いられる水道水に含まれる塩素や、前の工程から持ち越される各種金属イオンにより、表面処理能力が落ちてきて、繰り返しの使用に耐えられないという問題があった。   In addition, when the above technology is used in the actual printed circuit board manufacturing process, the surface treatment capacity is reduced due to chlorine contained in tap water used in the metal cleaning process and various metal ions carried over from the previous process. There was a problem that it could not withstand repeated use.

特開2002−321310号公報JP 2002-321310 A 特開2008−45156号公報JP 2008-45156 A 特許第3909920号公報Japanese Patent No. 3909920 特開2009−299096号公報JP 2009-299096 A

従って、本発明は、金属等の表面をエッチング粗化することなく、積層用、粘着用、感光用等の樹脂を強固に密着させ得る表面に仕上げることができ、しかも、実際のプリント基板の製造工程等に用いた場合であっても、繰り返しの使用に耐えうる金属等の表面処理液や表面処理方法を提供することを課題とする。   Therefore, the present invention can be finished to a surface capable of firmly adhering a resin for laminating, adhering, photosensitive, etc. without roughening the surface of metal or the like, and manufacturing an actual printed circuit board. Even if it is a case where it uses for a process etc., it makes it a subject to provide surface treatment liquids and surface treatment methods, such as a metal which can endure repeated use.

本発明者は、上記課題を解決するために鋭意研究を重ねた結果、酸、アゾール化合物、金属イオンおよびハロゲンイオンを含有する水溶液が、金属等の表面をエッチング粗化することなく、積層用、粘着用、感光用等の樹脂を強固に密着させ得る表面に仕上げられることを見出した。また、上記の水溶液は、実際のプリント基板の製造工程等に用いた場合であっても、繰り返しの使用に耐えうることを見出し、本発明を完成させた。   As a result of intensive studies to solve the above problems, the present inventor obtained an aqueous solution containing an acid, an azole compound, a metal ion and a halogen ion without laminating the surface of the metal or the like, for laminating, It has been found that the surface can be finished so that the resin for adhesion, for photosensitivity, etc. can be firmly adhered. Further, the present invention has been completed by finding that the above aqueous solution can withstand repeated use even when used in an actual printed circuit board manufacturing process or the like.

すなわち、本発明は、酸、アゾール化合物、金属イオンおよびハロゲンイオンを含有する水溶液からなる金属または合金用の表面処理液である。   That is, the present invention is a surface treatment solution for a metal or alloy comprising an aqueous solution containing an acid, an azole compound, a metal ion and a halogen ion.

また、本発明は、上記表面処理液を、金属または合金に接触させることを特徴とする金属または合金の表面処理方法である。   Moreover, this invention is a surface treatment method of the metal or alloy characterized by making the said surface treatment liquid contact a metal or an alloy.

本発明は、金属または合金の表面をエッチング粗化することなく、積層用、粘着用、感光用等の樹脂を強固に且つ均一に密着させ得る表面に仕上げることができる。   The present invention can finish the surface of a metal or an alloy so that the resin for laminating, adhering, and photosensitive can be firmly and uniformly adhered without etching and roughening.

また、本発明は金属または合金への積層用、粘着用、感光用等の樹脂の張り付け時の失敗による再処理にも用いることができるので、資源の有効利用が図れる。   In addition, since the present invention can be used for reprocessing due to a failure in pasting a resin such as laminating, sticking, or photosensitive to a metal or alloy, resources can be effectively used.

更に、本発明は、実際のプリント基板の製造工程等に用いた場合であっても、繰り返しの使用に耐えうるので、資源の有効利用が図れる。   Furthermore, the present invention can withstand repeated use even when used in an actual printed circuit board manufacturing process or the like, so that resources can be effectively used.

本発明の金属または合金用の表面処理液(以下、「本発明処理液」という)は、酸、アゾール化合物、金属イオンおよびハロゲンイオンを含有する水溶液からなるものである。   The surface treatment liquid for metal or alloy of the present invention (hereinafter referred to as “treatment liquid of the present invention”) comprises an aqueous solution containing an acid, an azole compound, metal ions and halogen ions.

本発明処理液に用いられる酸としては、特に限定されず、例えば、リン酸、硫酸等の無機酸や酢酸等の有機酸等のオキソ酸が挙げられる。これらの酸の中でも硫酸等の無機酸のオキソ酸が好ましい。これらの酸は1種または2種以上を用いることができる。また、本発明処理液における酸の配合量は、特に限定されず、例えば、本発明処理液のpHを4以下、好ましくは2以下にする量である。具体的に酸として硫酸を用いる場合には、本発明処理液に1g/L〜200g/L、好ましくは3g/L〜100g/L、特に好ましくは5g/L〜50g/L含有させればよい。   The acid used in the treatment liquid of the present invention is not particularly limited, and examples thereof include inorganic acids such as phosphoric acid and sulfuric acid, and oxo acids such as organic acids such as acetic acid. Among these acids, oxo acids of inorganic acids such as sulfuric acid are preferable. These acids can be used alone or in combination of two or more. Moreover, the compounding quantity of the acid in this invention processing liquid is not specifically limited, For example, it is the quantity which makes pH of this invention processing liquid 4 or less, Preferably it is 2 or less. Specifically, when sulfuric acid is used as the acid, the treatment solution of the present invention may contain 1 g / L to 200 g / L, preferably 3 g / L to 100 g / L, particularly preferably 5 g / L to 50 g / L. .

本発明処理液に用いられるアゾール化合物としては、例えば、下記式(1)で示される5員環複素環式化合物が挙げられる。

Figure 0005813425
(式中、Rは水素基、メチル基、アミノ基またはニトロ基を表し、R〜Rはそれぞれ独立して窒素原子または炭素原子を表す。ここで、R〜Rのうちの一つだけが炭素原子を表すときには、当該炭素原子が保持する水素はメチル基またはアミノ基と置換されていてもよい。更に、RとRおよび/またはRとRは他の炭素環または複素環と共に縮合環を形成してもよい) Examples of the azole compound used in the treatment liquid of the present invention include a 5-membered heterocyclic compound represented by the following formula (1).
Figure 0005813425
(In the formula, R 1 represents a hydrogen group, a methyl group, an amino group or a nitro group, and R 2 to R 5 each independently represents a nitrogen atom or a carbon atom. Here, of R 2 to R 5 , When only one represents a carbon atom, the hydrogen carried by the carbon atom may be substituted with a methyl group or an amino group, and R 2 and R 3 and / or R 4 and R 5 may be other carbon atoms. A condensed ring may be formed together with a ring or a heterocyclic ring)

上記式(1)で示される5員環複素環式化合物の中でも、Rがアミノ基を表すものが好ましく、特に3−アミノテトラゾール、5−アミノテトラゾールが好ましい。これらのアゾール化合物は1種または2種以上を用いることができる。また、本発明処理液におけるアゾール化合物の配合量は、特に限定されず、例えば、0.01g/L〜飽和、好ましくは0.05g/L〜50g/L、特に好ましくは0.1g/L〜10g/Lである。 Among the 5-membered heterocyclic compounds represented by the above formula (1), those in which R 1 represents an amino group are preferable, and 3-aminotetrazole and 5-aminotetrazole are particularly preferable. These azole compounds can be used alone or in combination of two or more. Moreover, the compounding quantity of the azole compound in this invention processing liquid is not specifically limited, For example, 0.01 g / L-saturation, Preferably it is 0.05 g / L-50 g / L, Most preferably, it is 0.1 g / L- 10 g / L.

本発明処理液に用いられる金属イオンとしては、特に限定されず、例えば、本発明処理液で処理する金属または合金を構成する金属と同じ金属のイオンか、前記金属に対して貴な金属のイオンであればよい。具体的に、本発明処理液で処理する金属または合金を構成する金属がアルミニウムの場合には、アルミニウムイオンや銅イオンであればよく、銅の場合には、銅イオンであればよい。本発明処理液における金属イオンの配合量は、特に限定されず、0.1g/L〜飽和、好ましくは0.5g/L〜40g/L、特に好ましくは1g/L〜10g/Lである。なお、本発明処理液において金属イオンは、金属または合金上にアゾール化合物の均一な造膜を得るために必要である。   The metal ion used in the treatment liquid of the present invention is not particularly limited. For example, ions of the same metal as the metal constituting the metal or alloy to be treated with the treatment liquid of the present invention or ions of a noble metal with respect to the metal If it is. Specifically, in the case where the metal constituting the metal or alloy to be treated with the treatment liquid of the present invention is aluminum, aluminum ions or copper ions may be used, and in the case of copper, copper ions may be used. The compounding amount of the metal ions in the treatment liquid of the present invention is not particularly limited, and is 0.1 g / L to saturation, preferably 0.5 g / L to 40 g / L, particularly preferably 1 g / L to 10 g / L. In the treatment liquid of the present invention, metal ions are necessary for obtaining a uniform film formation of the azole compound on the metal or alloy.

本発明処理液に用いられるハロゲンイオンとしては、特に限定されず、例えば、臭素、ヨウ素、フッ素、塩素等のハロゲンのイオンが挙げられる。これらハロゲンイオンの中でも塩素イオンが好ましい。本発明処理液におけるハロゲンイオンの配合量は、0.0001g/L〜1g/L、好ましくは0.0005g/L〜0.1g/L、特に好ましくは0.001g/L〜0.01g/Lである。なお、本発明処理液においてハロゲンイオンは、アゾール化合物の斑のない均一な仕上がり表面を得るために必要である。   The halogen ion used in the treatment liquid of the present invention is not particularly limited, and examples thereof include halogen ions such as bromine, iodine, fluorine, and chlorine. Of these halogen ions, chlorine ions are preferred. The compounding amount of the halogen ions in the treatment liquid of the present invention is 0.0001 g / L to 1 g / L, preferably 0.0005 g / L to 0.1 g / L, particularly preferably 0.001 g / L to 0.01 g / L. It is. In the treatment liquid of the present invention, halogen ions are necessary for obtaining a uniform finished surface free from spots of the azole compound.

更に、本発明処理液には、上記成分の他に、本発明の効果を損なわない程度で、界面活性剤等を含有させることもできるが、上記成分のみで構成されることが好ましい。   Furthermore, in addition to the above components, the treatment liquid of the present invention may contain a surfactant or the like to the extent that the effects of the present invention are not impaired, but it is preferably composed of only the above components.

上記成分を含有する本発明処理液は、イオン交換水等の水に、上記成分または上記成分の原料となる化合物、例えば、金属イオンであれば、水溶性の金属化合物等、ハロゲンイオンであれば、水溶性のハロゲン化合物等を添加し、混合することにより調整することができる。   The treatment liquid of the present invention containing the above components can be added to water such as ion-exchanged water or the like, or a compound that is a raw material of the above components, for example, metal ions, water-soluble metal compounds, and the like, and halogen ions. It can be adjusted by adding a water-soluble halogen compound or the like and mixing them.

斯くして得られる本発明処理液は、金属または合金に接触させることにより表面処理を行うことができる。   The treatment liquid of the present invention thus obtained can be subjected to surface treatment by contacting with a metal or alloy.

本発明処理液で処理される金属または合金としては、例えば、鉄、アルミニウム、銅等の金属またはこれらの金属を含む合金が挙げられる。これらの金属または合金の中でも、銅または銅合金が好ましく、特に銅が好ましい。   Examples of the metal or alloy to be treated with the treatment liquid of the present invention include metals such as iron, aluminum and copper or alloys containing these metals. Among these metals or alloys, copper or a copper alloy is preferable, and copper is particularly preferable.

また、本発明処理液を金属または合金に接触させるには、通常の金属の表面処理に用いられる方法が、特に制限なく使用できる。具体的には、本発明処理液を容器に入れ、それに金属または合金を浸漬する方法や、本発明処理液を噴霧容器に入れ、金属または合金表面に噴霧する方法等が挙げられる。これらの処理の条件は、金属や合金の種類や表面の条件によって適宜設定すればよいが、例えば、本発明処理液の温度は10〜50℃、好ましくは20〜40℃にすれば良く、処理時間は5秒〜300秒、好ましくは10秒〜180秒、特に好ましくは10秒〜120秒である。   In order to bring the treatment liquid of the present invention into contact with a metal or an alloy, a method used for a normal metal surface treatment can be used without any particular limitation. Specific examples include a method in which the treatment liquid of the present invention is placed in a container and a metal or alloy is immersed in the container, and a method in which the treatment liquid of the present invention is placed in a spray container and sprayed on the surface of the metal or alloy. The conditions for these treatments may be appropriately set depending on the type of metal or alloy and the surface conditions. For example, the temperature of the treatment liquid of the present invention may be 10 to 50 ° C., preferably 20 to 40 ° C. The time is 5 seconds to 300 seconds, preferably 10 seconds to 180 seconds, particularly preferably 10 seconds to 120 seconds.

なお、本発明処理液で処理を行う好ましい態様としては、銅張積層板とDFRを用いたプリント配線基板の製造工程における以下の表面処理(1)〜(4)が挙げられる。
(1)銅張積層板の電解銅箔または圧延銅箔の銅および銅合金への表面処理
(2)銅張積層板上の電解銅めっきへの表面処理
(3)樹脂上の無電解銅めっきへの表面処理
(4)樹脂上のスパッタ銅への表面処理
In addition, as a preferable aspect which processes with this invention process liquid, the following surface treatments (1)-(4) in the manufacturing process of the printed wiring board using a copper clad laminated board and DFR are mentioned.
(1) Surface treatment of copper clad laminate on electrolytic copper foil or rolled copper foil to copper and copper alloy (2) Surface treatment on electrolytic copper plating on copper clad laminate (3) Electroless copper plating on resin (4) Surface treatment of sputtered copper on resin

上記のようにして本発明処理液で金属または合金に表面処理を行った後は、金属または合金を十分に洗浄し、乾燥させ、その後、積層用、粘着用、感光用等の樹脂を密着させればよい。   After the surface treatment is performed on the metal or alloy with the treatment liquid of the present invention as described above, the metal or alloy is thoroughly washed and dried, and thereafter, a resin for laminating, adhesive, photosensitive, etc. is adhered. Just do it.

また、本発明処理液で金属または合金に表面処理を行った後は、金属または合金の表面がエッチングされないため、金属または合金に積層用、粘着用、感光用等の樹脂を密着させた後、剥離し、再度前記樹脂を密着させる等の再加工もできる。   In addition, after the surface treatment of the metal or alloy with the treatment liquid of the present invention, the surface of the metal or alloy is not etched, so that the metal or alloy is adhered to a resin for laminating, adhesive, photosensitive, etc. Reworking such as peeling and re-adhering the resin can also be performed.

以下、本発明を実施例等により具体的に説明するが、本発明は以下の実施例等によって限定されるものではない。   EXAMPLES Hereinafter, although an Example etc. demonstrate this invention concretely, this invention is not limited by a following example etc.

実 施 例 1
硫酸(HSO)10g/L、5−アミノテトラゾール1g/L、硫酸銅・5水和物12g/L(銅イオン(Cu2+)として3g/L)、塩化ナトリウム0.00825g/L(塩素イオン(Cl)として0.005g/L)を含む水溶液を調製し、表面処理液とした(pH1.1)。この表面処理液を200mLガラスビーカーに入れ、液温を30℃に保ち、その液中に銅張積層板(日立化成工業社製、商品名:MCL−E67)の試験片(5cm×5cm)を30秒間浸漬し、表面処理を行った。この表面処理後、試験片を十分に水洗し、乾燥させた。これにより得られた試験片をサンプル1とした。また、表面処理を行った後、更に、試験片を新しいものに替え、表面処理を行うことを1セットとし、これを10回繰り返し行った。この表面処理を10回行った後の試験片をサンプル2とした。
Example 1
Sulfuric acid (H 2 SO 4 ) 10 g / L, 5-aminotetrazole 1 g / L, copper sulfate pentahydrate 12 g / L (3 g / L as copper ion (Cu 2+ )), sodium chloride 0.0025 g / L ( An aqueous solution containing 0.005 g / L) as a chloride ion (Cl ) was prepared and used as a surface treatment solution (pH 1.1). This surface treatment liquid is put into a 200 mL glass beaker, the liquid temperature is kept at 30 ° C., and a test piece (5 cm × 5 cm) of a copper clad laminate (manufactured by Hitachi Chemical Co., Ltd., trade name: MCL-E67) is placed in the liquid. The surface treatment was performed by dipping for 30 seconds. After this surface treatment, the test piece was sufficiently washed with water and dried. The test piece thus obtained was designated as Sample 1. In addition, after the surface treatment, the test piece was replaced with a new one, and the surface treatment was taken as one set, and this was repeated 10 times. The test piece after performing this surface treatment 10 times was designated as Sample 2.

実 施 例 2
5−アミノテトラゾールに代えて、1H−1,2,3トリアゾール1g/Lを用いた以外は、実施例1と同様にして表面処理液(pH1.1)を調製し、試験片に表面処理を行い、各サンプルを得た。
Example 2
A surface treatment solution (pH 1.1) was prepared in the same manner as in Example 1 except that 1H-1,2,3 triazole 1 g / L was used instead of 5-aminotetrazole. Each sample was obtained.

実 施 例 3
5−アミノテトラゾールに代えて、ベンゾトリアゾール1g/Lを用いた以外は、実施例1と同様にして表面処理液(pH1.1)を調製し、試験片に表面処理を行い、各サンプルを得た。
Example 3
A surface treatment solution (pH 1.1) was prepared in the same manner as in Example 1 except that 1 g / L of benzotriazole was used in place of 5-aminotetrazole, and each sample was obtained by subjecting the test piece to surface treatment. It was.

実 施 例 4
5−アミノテトラゾールに代えて、3−アミノトリアゾール1g/Lを用いた以外は、実施例1と同様にして表面処理液(pH1.1)を調製し、試験片に表面処理を行い、各サンプルを得た。
Example 4
A surface treatment solution (pH 1.1) was prepared in the same manner as in Example 1 except that 1-g / L of 3-aminotriazole was used instead of 5-aminotetrazole, and each sample was subjected to surface treatment. Got.

実 施 例 5
硫酸に代えて、酢酸(CHCOOH)50g/Lを用いた以外は、実施例1と同様にして表面処理液(pH1.8)を調製し、試験片に表面処理を行い、各サンプルを得た。
Example 5
A surface treatment solution (pH 1.8) was prepared in the same manner as in Example 1 except that 50 g / L of acetic acid (CH 3 COOH) was used instead of sulfuric acid. Obtained.

比 較 例 1
5−アミノテトラゾール1g/Lを含む水溶液を調製し、これを表面処理液とした(pH4.0)。この表面処理液を用いて実施例1と同様にして試験片に表面処理を行い、各サンプルを得た。
Comparative Example 1
An aqueous solution containing 1 g / L of 5-aminotetrazole was prepared and used as a surface treatment solution (pH 4.0). Using this surface treatment liquid, the sample was surface treated in the same manner as in Example 1 to obtain each sample.

比 較 例 2
硫酸50g/L、5−アミノテトラゾール1g/Lを含む水溶液を調製し、これを表面処理液とした(pH1.1)。この表面処理液を用いて実施例1と同様にして試験片に表面処理を行い、各サンプルを得た。
Comparative Example 2
An aqueous solution containing 50 g / L of sulfuric acid and 1 g / L of 5-aminotetrazole was prepared, and this was used as a surface treatment solution (pH 1.1). Using this surface treatment liquid, the sample was surface treated in the same manner as in Example 1 to obtain each sample.

比 較 例 3
硫酸40g/L、5−アミノテトラゾール0.5g/Lを含む水溶液を調製し、これを表面処理液とした(pH1以下)。この表面処理液を用いて実施例1と同様にして試験片に表面処理を行い、各サンプルを得た。
Comparative Example 3
An aqueous solution containing 40 g / L of sulfuric acid and 0.5 g / L of 5-aminotetrazole was prepared and used as a surface treatment solution (pH 1 or less). Using this surface treatment liquid, the sample was surface treated in the same manner as in Example 1 to obtain each sample.

比 較 例 4
硫酸200g/L、5−アミノテトラゾール1g/Lを含む水溶液を調製し、これを表面処理液とした(pH1以下)。この表面処理液を用いて実施例1と同様にして試験片に表面処理を行い、各サンプルを得た。
Comparative Example 4
An aqueous solution containing 200 g / L of sulfuric acid and 1 g / L of 5-aminotetrazole was prepared and used as a surface treatment solution (pH 1 or less). Using this surface treatment liquid, the sample was surface treated in the same manner as in Example 1 to obtain each sample.

比 較 例 5
硫酸を除き、5−アミノテトラゾール1g/L、銅10g/Lを含む水溶液を調製し、これを表面処理液とした(pH2.7)。この表面処理液を用いて実施例1と同様にして試験片に表面処理を行い、各サンプルを得た。
Comparative Example 5
An aqueous solution containing 5-aminotetrazole 1 g / L and copper 10 g / L was prepared by removing the sulfuric acid, and this was used as a surface treatment solution (pH 2.7). Using this surface treatment liquid, the sample was surface treated in the same manner as in Example 1 to obtain each sample.

比 較 例 6
5−アミノテトラゾール1g/L、硫酸5g/L、銅10g/Lを含む水溶液を調製し、これを表面処理液とした(pH1.5)。この表面処理液を用いて実施例1と同様にして試験片に表面処理を行い、各サンプルを得た。
Comparative Example 6
An aqueous solution containing 5-aminotetrazole 1 g / L, sulfuric acid 5 g / L, and copper 10 g / L was prepared, and this was used as a surface treatment solution (pH 1.5). Using this surface treatment liquid, the sample was surface treated in the same manner as in Example 1 to obtain each sample.

比 較 例 7
5−アミノテトラゾール1g/L、硫酸10g/L、塩素イオン0.005g/Lを含む水溶液を調製し、これを表面処理液とした(pH1.1)。この表面処理液を用いて実施例1と同様にして試験片に表面処理を行い、各サンプルを得た。
Comparative Example 7
An aqueous solution containing 5-aminotetrazole 1 g / L, sulfuric acid 10 g / L, and chlorine ions 0.005 g / L was prepared and used as a surface treatment solution (pH 1.1). Using this surface treatment liquid, the sample was surface treated in the same manner as in Example 1 to obtain each sample.

比 較 例 8
5−アミノテトラゾール1g/L、硫酸5g/L、銅40g/Lを含む水溶液を調製し、これを表面処理液とした(pH1.1)。この表面処理液を用いて実施例1と同様にして試験片に表面処理を行い、各サンプルを得た。
Comparative Example 8
An aqueous solution containing 5-aminotetrazole 1 g / L, sulfuric acid 5 g / L, and copper 40 g / L was prepared, and this was used as a surface treatment solution (pH 1.1). Using this surface treatment liquid, the sample was surface treated in the same manner as in Example 1 to obtain each sample.

試 験 例 1
上記実施例および比較例で得られたサンプルの仕上がり外観を目視で調べ、以下の評価基準で評価を行った。
<仕上がり外願の評価基準>
(評価) (内容)
○ : サンプル表面が均一な仕上がり色調である。
△ : サンプル表面の一部が不均一な仕上がり色調である。
× : サンプル表面が不均一な仕上がり色調であったり、サンプル表面に析出物が
生じた。
Test example 1
The finished appearance of the samples obtained in the above Examples and Comparative Examples was visually examined and evaluated according to the following evaluation criteria.
<Evaluation criteria for finished applications>
(Evaluation) (Content)
○: The sample surface has a uniform finished color tone.
Δ: A part of the sample surface has a non-uniform finished color tone.
×: The sample surface has a non-uniform finish color tone, or precipitates are formed on the sample surface.
occured.

また、上記実施例および比較例で得られたサンプルの表面に、粘着テープ(積水化学社製のポリエステルテープ、商品名:LITHOGRAPHIC)を圧着後、テープを剥離し、サンプルの銅表面に残存するテープ糊の転着状態を目視で調べ、以下の評価基準で評価を行った。
<テープ密着性の評価基準>
(評価) (内容)
○ : テープ糊の転着が全面均一である。
△ : テープ糊の転着が全面均一でなく、一部が欠損している。
× : テープ糊の転着が全面均一でなく、一部または全部が欠損している。
In addition, the pressure-sensitive adhesive tape (polyester tape manufactured by Sekisui Chemical Co., Ltd., trade name: LITHOGRAPHIC) is pressure-bonded to the surface of the sample obtained in the above examples and comparative examples, and then the tape is peeled off and remains on the copper surface of the sample. The transfer state of the glue was visually examined and evaluated according to the following evaluation criteria.
<Evaluation criteria for tape adhesion>
(Evaluation) (Content)
○: The transfer of the tape glue is uniform over the entire surface.
Δ: The transfer of the tape paste is not uniform over the entire surface, and a part thereof is missing.
X: Transfer of the tape paste is not uniform over the entire surface, and part or all of the tape paste is missing.

上記で調べたサンプルの表面の仕上り状態とテープ密着性に基づき、以下の総合判断をした。
<総合評価>
(評価) (内容)
○ : 仕上り外観およびテープ密着性共に良好である。
△ : 仕上り外観またはテープ密着性どちらか一方が良くない。
× : 仕上り外観およびテープ密着性共に悪い。
The following comprehensive judgment was made based on the surface finish of the sample examined above and the tape adhesion.
<Comprehensive evaluation>
(Evaluation) (Content)
○: Both finished appearance and tape adhesion are good.
Δ: Either finished appearance or tape adhesion is not good.
×: Both the finished appearance and the tape adhesion are poor.

Figure 0005813425
Figure 0005813425

表1の結果より、本発明にかかる実施例1〜5の表面処理液は、1回目は勿論のこと、10回繰り返して使用しても仕上り外観およびテープ密着性の双方を満足するものであった。   From the results in Table 1, the surface treatment liquids of Examples 1 to 5 according to the present invention satisfy both the finished appearance and the tape adhesion even when used repeatedly 10 times as well as the first. It was.

一方、酸、アゾール化合物、金属イオンおよびハロゲンイオンの全てを含有していない比較例1〜8の表面処理液は、1回目および10回目も仕上り外観およびテープ密着性の双方を満足するものではなかった。   On the other hand, the surface treatment liquids of Comparative Examples 1 to 8 which do not contain all of acid, azole compound, metal ion and halogen ion do not satisfy both the finished appearance and the tape adhesion even in the first and tenth times. It was.

試 験 例 2
実施例1と同様にして調製した表面処理液に、銅張積層板(日立化成工業社製、商品名:MCL−E67)の試験片(5cm×5cm)を30秒間浸漬し、表面処理を行った。その後、表面処理液中に溶出した銅量を表面処理前後の試験片の重量から算出した(n=3)。
Test example 2
A test piece (5 cm × 5 cm) of a copper clad laminate (manufactured by Hitachi Chemical Co., Ltd., trade name: MCL-E67) was immersed in a surface treatment solution prepared in the same manner as in Example 1 for 30 seconds. It was. Thereafter, the amount of copper eluted in the surface treatment liquid was calculated from the weight of the test piece before and after the surface treatment (n = 3).

表面処理液中に溶出した銅量は平均−0.003gと、測定範囲の誤差内であった。この結果から、本発明の表面処理液は銅をエッチングしないことがわかった。   The amount of copper eluted in the surface treatment solution averaged -0.003 g, which was within the measurement range error. From this result, it was found that the surface treatment liquid of the present invention did not etch copper.

実 施 例 6
実施例1と同様にして調製した表面処理液に、銅張積層板(日立化成工業社製、商品名:MCL−E67)の試験片(5cm×5cm)を120秒間浸漬し、表面処理を行った。表面処理後、試験片を十分に水洗し、乾燥させた。表面処理後の試験片の仕上がり外観およびテープ密着性を試験例1と同様にして評価したところ、何れも○の評価であった。
Example 6
A test piece (5 cm × 5 cm) of a copper clad laminate (manufactured by Hitachi Chemical Co., Ltd., trade name: MCL-E67) was immersed in a surface treatment solution prepared in the same manner as in Example 1 for 120 seconds. It was. After the surface treatment, the test piece was sufficiently washed with water and dried. When the finished appearance and tape adhesion of the test piece after the surface treatment were evaluated in the same manner as in Test Example 1, all were evaluated as “good”.

実 施 例 7
実施例1と同様にして調製した表面処理液に、アルミニウム箔の試験片(5cm×5cm)を30秒間浸漬し、表面処理を行った。表面処理後、試験片を十分に水洗し、乾燥させた。この表面処理後の試験片の外観は良好であった。
Example 7
An aluminum foil test piece (5 cm × 5 cm) was immersed in a surface treatment solution prepared in the same manner as in Example 1 for 30 seconds to perform surface treatment. After the surface treatment, the test piece was sufficiently washed with water and dried. The appearance of the test piece after the surface treatment was good.

本発明処理液は、著しい薄化が進むプリント基板の製造プロセスにおける金属表面の無エッチング無粗化による高密着仕上げ処理等に利用することができる。

以 上
The treatment liquid of the present invention can be used for a high adhesion finishing process by non-etching / roughening of a metal surface in a manufacturing process of a printed circuit board which is remarkably thinned.

that's all

Claims (7)

酸、下記式(1)
Figure 0005813425
(式中、R は水素基、メチル基、アミノ基またはニトロ基を表し、R 〜R はそれぞれ独立して窒素原子または炭素原子を表す。ここで、R 〜R のうちの一つだけが炭素原子を表すときには、当該炭素原子が保持する水素はメチル基またはアミノ基と置換されていてもよく、更に、R とR および/またはR とR は他の炭素環または複素環と共に縮合環を形成してもよい)
で示されるアゾール化合物、金属イオンおよびハロゲンイオンのみからなり、pHが2以下である水溶液からなる金属または合金用の表面処理液。
Acid, following formula (1)
Figure 0005813425
(In the formula, R 1 represents a hydrogen group, a methyl group, an amino group or a nitro group, and R 2 to R 5 each independently represents a nitrogen atom or a carbon atom. Here, of R 2 to R 5 , When only one represents a carbon atom, the hydrogen carried by the carbon atom may be substituted with a methyl group or an amino group, and R 2 and R 3 and / or R 4 and R 5 may be other carbon atoms. A condensed ring may be formed together with a ring or a heterocyclic ring)
The surface treatment liquid for metals or alloys which consists only of the azole compound shown by these , a metal ion, and a halogen ion, and consists of the aqueous solution whose pH is 2 or less.
式(1)で示されるアゾール化合物が、3−アミノテトラゾールおよび/または5−アミノテトラゾールである請求項1に記載の金属または合金用の表面処理液。 The surface treatment liquid for metal or alloy according to claim 1, wherein the azole compound represented by the formula (1) is 3-aminotetrazole and / or 5-aminotetrazole. 金属イオンが、銅である請求項1または2に記載の金属または合金用の表面処理液。   The surface treatment liquid for metal or alloy according to claim 1 or 2, wherein the metal ion is copper. ハロゲンイオンが、塩素イオンである請求項1〜3の何れかに記載の金属または合金用の表面処理液。   The surface treatment liquid for metal or alloy according to any one of claims 1 to 3, wherein the halogen ion is a chlorine ion. 銅または銅合金の表面処理をするものである請求項1〜4の何れかに記載の金属または合金用の表面処理液。   The surface treatment liquid for metal or alloy according to any one of claims 1 to 4, which is for surface treatment of copper or copper alloy. 請求項1〜4の何れかに記載の金属または合金用の表面処理液を、金属または合金に接触させることを特徴とする金属または合金の表面処理方法。   A surface treatment method for a metal or alloy according to any one of claims 1 to 4, wherein the surface treatment solution for metal or alloy is brought into contact with the metal or alloy. 銅または銅合金の表面処理をするものである請求項6記載の金属または合金の表面処理方法。
7. The surface treatment method for a metal or alloy according to claim 6, wherein the surface treatment is performed on copper or a copper alloy.
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