JP5804374B2 - Electrostatic actuator - Google Patents

Description

  The present invention relates to an electrostatic actuator using an electrostatic force generated by a voltage applied between electrodes, and more specifically, electrostatic energy is efficiently accumulated as mechanical elastic energy by devising the shape of a movable electrode and the like. The present invention relates to an electrostatic actuator that performs mechanical operation with high efficiency by elastic energy.

  An electrostatic actuator that applies a voltage between electrodes and uses an electrostatic force acting between the electrodes is used as a print head of an ink jet printer, another micro pump, or a micro drive mechanism. Such electrostatic actuators include those described in Patent Document 1 and Patent Document 2 below. Patent Document 1 describes an ink jet recording head in which a movable electrode and a fixed electrode are both formed of flat plate-like electrodes. Patent Document 2 describes a recording head of an ink jet recording apparatus in which both a movable electrode and a fixed electrode are constituted by flat electrodes, and these electrodes are arranged non-parallel.

  The operation of the electrostatic actuator using such flat electrodes will be described. FIG. 11 is a cross-sectional view showing the configuration of the pump 10 using an electrostatic actuator. The movable electrode 2 has a fixed peripheral portion, but the central portion can be displaced up and down by elastic deformation. A fixed electrode 3 is fixed to the bottom of the pump 10. In addition, an insulating coating 4 is formed on the upper surface of the fixed electrode 3 to prevent the movable electrode 2 and the fixed electrode 3 from being electrically short-circuited. The drive power supply 9 applies intermittent DC voltage to the movable electrode 2 and the fixed electrode 3.

  In a state where no voltage is applied to the movable electrode 2 and the fixed electrode 3, the movable electrode 2 is in a state parallel to the fixed electrode 3 as shown by a solid line. When a voltage is applied between the movable electrode 2 and the fixed electrode 3, the movable electrode 2 is attracted to the fixed electrode 3 side by an electrostatic attractive force due to the applied voltage, elastically deforms, and moves to a position indicated by a two-dot chain line. . Thus, by applying intermittent DC voltage from the drive power supply 9 between the movable electrode 2 and the fixed electrode 3, the movable electrode 2 vibrates in the vertical direction as indicated by the vertical arrows.

  When the movable electrode 2 vibrates, the volume of the fluid storage chamber 11 of the pump 10 varies, so that the fluid flows in from the inflow path 12 and then the fluid flows out from the outflow path 13. In addition, the inflow path 12 and the outflow path 13 are provided with a check valve or a difference in fluid resistance, so that the fluid is driven in a certain direction as indicated by arrows. In this way, the operation of the pump 10 is realized by the electrostatic actuator.

  In the electrostatic actuator as shown in FIG. 11, the movable electrode 2 is elastically deformed by the electrostatic attractive force caused by the applied voltage, and elastic energy is accumulated in the movable electrode 2. Next, if the voltage application between the movable electrode 2 and the fixed electrode 3 is stopped, the elastic energy accumulated in the movable electrode 2 causes a force to return the movable electrode 2 to its original position. Thus, the operation as an actuator is realized. That is, the greater the elastic energy accumulated in the movable electrode 2, the better the performance as an actuator.

JP-A-2-289351 Japanese Patent No. 3432346

  In the electrostatic actuator as shown in FIG. 11, consider a case where the voltage applied between the movable electrode 2 and the fixed electrode 3 is increased in order to expand the operating range of the actuator. FIG. 12 is a diagram showing a state where the voltage between the movable electrode 2 and the fixed electrode 3 is increased. The movable electrode 2 is further drawn toward the fixed electrode 3, and the central portion of the movable electrode 2 is in contact with the insulating coating 4 on the upper surface of the fixed electrode 3. This insulating coating 4 functions as means for restricting movement of the movable electrode 2 (movement restriction means).

In the movable electrode 2, a region where further movement is restricted by contact with the insulating coating 4 , in other words, a region where the movement has reached the terminal position is referred to as a movement terminal region 2 a. As shown in FIG. 12, the movable electrode 2 in the movement termination region 2a has a flat shape. The shape of the movable electrode 2 in this portion is almost the same as the shape when no voltage is applied. That is, except for the elastic deformation due to the pulling force acting on the entire movable electrode 2, the shape change due to the bending deformation is eliminated in the moving terminal region 2a.

Therefore, in this case, the elastic energy accumulated in the movable electrode 2 is reduced in the movement termination region 2a, and the corresponding amount is concentrated and accumulated in the peripheral portion of the movable electrode 2. As described above, in the conventional electrostatic actuator, even if the voltage applied between the electrodes is increased, the elastic energy accumulated in the moving terminal region 2a is reduced, and the electrostatic energy is efficiently converted into elastic energy. You can't accumulate. Further, since the elastic energy is concentrated and accumulated in the peripheral portion of the movable electrode 2, the elastic strain is also concentrated in that portion, which causes a problem from the viewpoint of the strength and durability of the movable electrode 2. The fatigue failure of the electrode tends to occur at the portion where the elastic strain is concentrated, and the reliability as an electrostatic actuator is lowered.

  Accordingly, the present invention provides an electrostatic actuator that efficiently accumulates electrostatic energy as mechanical elastic energy by devising the shape of a movable electrode or the like, and performs high-efficiency mechanical operation using the elastic energy. For the purpose. It is another object of the present invention to provide a highly reliable electrostatic actuator that reduces fatigue fracture and the like by dispersing and storing elastic energy accumulated in the movable electrode over the entire movable electrode.

In order to achieve the above object, an electrostatic actuator according to the present invention includes a movable electrode whose position and shape can be changed by elastic deformation, a fixed electrode disposed at a fixed position at a distance from the movable electrode, and the movable actuator. A movement restricting means for restricting movement of the movable electrode so as to prevent an electrical contact between the electrode and the fixed electrode; a voltage is applied between the movable electrode and the fixed electrode; And a driving power source for displacing in the fixed electrode direction. The movable electrode accumulates elastic energy due to elastic bending deformation in a movement termination region where movement reaches a termination position by contact with the fixed electrode via the movement limiting means , and the drive power supply A voltage larger than a voltage at which movement restriction by the movement restriction means is started is applied to the movable electrode between the movable electrode and the fixed electrode.

  In the electrostatic actuator described above, it is preferable that the movable electrode has a peripheral portion fixed at a fixed position, and the vicinity of the central portion can be displaced by elastic deformation.

  Further, in the above electrostatic actuator, the movable electrode may have a shape that is not constant and varies depending on the position.

In the electrostatic actuator, it is preferable that the movable electrode has a shape in which the movement termination region continuously increases as a voltage applied between the movable electrode and the fixed electrode increases .

In the electrostatic actuator described above, the movable electrode and the fixed electrode may be continuously arranged according to a position instead of a constant distance between the movable electrode and the fixed electrode when no voltage is applied by the driving power source. It is preferable that the shape changes .

The electrostatic actuator of the present invention is arranged at a fixed position with a movable member whose position and shape can be changed by elastic deformation, a movable electrode integrally provided on the movable member, and a distance from the movable member. having a fixed electrode that is, the voltage is applied between the movable electrode and the fixed electrode, and a driving power source for displacing the movable electrode to the fixed electrode direction by an electrostatic force. The movable member is disposed on the fixed electrode side with respect to the movable electrode, prevents electrical contact between the movable electrode and the fixed electrode, and restricts movement of the movable electrode by contact with the fixed electrode. The movable member accumulates elastic energy due to elastic bending deformation in a movement terminal region where the movement reaches a terminal position by contact with the fixed electrode, and the drive power supply A voltage larger than a voltage at which movement restriction due to contact between the movable member and the fixed electrode is started is applied between the movable electrode and the fixed electrode.

  In the electrostatic actuator described above, it is preferable that the movable member has a peripheral portion fixed at a fixed position, and the vicinity of the central portion can be displaced by elastic deformation.

  Further, in the above electrostatic actuator, the movable member may have a shape that is not constant and varies depending on the position.

In the electrostatic actuator, it is preferable that the movable member has a shape in which the movement termination region continuously increases as a voltage applied between the movable electrode and the fixed electrode increases .

Further, in the above electrostatic actuator, the movable member and the fixed electrode are not continuously constant according to the position but the distance between the movable member and the fixed electrode when no voltage is applied by the driving power source. It is preferable that the shape changes .

Further, the electrostatic actuator of the present invention includes a movable member whose position and shape can be changed by elastic deformation, a fixed electrode disposed at a fixed position at a distance from the movable member, and the fixed to the movable member. A movable electrode integrally provided on the electrode side; movement limiting means for restricting movement of the movable electrode so as to prevent electrical contact between the movable electrode and the fixed electrode; and the movable electrode and the fixed electrode And a driving power source that displaces the movable electrode in the direction of the fixed electrode by electrostatic force. The movable member accumulates elastic energy due to elastic bending deformation in a movement termination region where movement has reached a termination position by contact with the movable electrode and the fixed electrode via the movement limiting means, The drive power supply applies a voltage between the movable electrode and the fixed electrode that is greater than a voltage at which movement restriction by the movement restriction unit is started on the movable member.

In the electrostatic actuator, it is preferable that the movable member has a shape in which the movement termination region continuously increases as a voltage applied between the movable electrode and the fixed electrode increases.

Further, in the above electrostatic actuator, the movable member and the fixed electrode are not continuously constant according to the position but the distance between the movable member and the fixed electrode when no voltage is applied by the driving power source. It is preferable that the shape changes.

  Since this invention is comprised as mentioned above, there exist the following effects.

By generating elastic bending deformation in the movable terminal area of the movable electrode or movable member of the electrostatic actuator and accumulating elastic energy, the elastic energy can be distributed and accumulated in a wide area, and the accumulated elastic energy Can be increased. And the operating efficiency and performance of an electrostatic actuator can be improved. In addition, fatigue failure of the movable electrode or the movable member can be reduced, and the reliability of the electrostatic actuator can be improved.

In the case where the movement termination region of the movable electrode or the movable member continuously increases as the applied voltage increases, the operation amount of the electrostatic actuator can be easily controlled by the applied voltage.

FIG. 1 is a cross-sectional view showing a configuration of a pump 1 using the electrostatic actuator of the present invention. FIG. 2 is a diagram showing the operation of the electrostatic actuator of the present invention. FIG. 3 is a cross-sectional view showing a configuration of a pump 1a using an electrostatic actuator according to another embodiment of the present invention. FIG. 4 is a diagram illustrating the operation of another form of electrostatic actuator. FIG. 5 is a diagram showing a modification of the electrostatic actuator of the present invention. FIG. 6 is a view showing a modification of the electrostatic actuator of the present invention. FIG. 7 is a view showing a modification of the electrostatic actuator of the present invention. FIG. 8 is a view showing a modification of the electrostatic actuator of the present invention. FIG. 9 is a view showing a modification of the electrostatic actuator of the present invention. FIG. 10 is a view showing a modification of the electrostatic actuator of the present invention. FIG. 11 is a cross-sectional view showing a configuration of a pump 10 using a conventional electrostatic actuator. FIG. 12 is a diagram illustrating the operation of a conventional electrostatic actuator.

  Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a cross-sectional view showing a configuration of a pump 1 using the electrostatic actuator of the present invention. The peripheral part of the movable electrode 2 is fixed to the body of the pump 1, but the center part can be displaced up and down by elastic deformation. A fixed electrode 3 is fixed to the bottom of the pump 1. In addition, an insulating coating 4 is formed on the upper surface of the fixed electrode 3 to prevent the movable electrode 2 and the fixed electrode 3 from being electrically short-circuited. Even if the movable electrode 2 is displaced downward, it cannot be displaced further when it contacts the insulating coating 4. Thus, the insulating coating 4 functions as a movement restricting means that restricts the movement of the movable electrode 2.

  The movable electrode 2 is formed so as to have a cross-sectional shape as shown in the figure without external force acting. In other words, the upper surface has a planar shape, but the lower surface has a curved surface that is concave. Therefore, the thickness of the peripheral part of the movable electrode 2 is larger than the thickness of the central part. Further, since the upper surface of the fixed electrode 3 has a planar shape, the distance between both the movable electrode 2 and the fixed electrode 3 is not constant. The distance between the two electrodes in the peripheral part of the movable electrode 2 is smaller than the distance between the two electrodes in the central part.

  The drive power source 9 applies intermittent DC voltage between the movable electrode 2 and the fixed electrode 3. In a state where no voltage is applied between the movable electrode 2 and the fixed electrode 3, no electrostatic attractive force acts on the movable electrode 2, and the movable electrode 2 is in a state as shown in FIG. When a voltage is applied between the movable electrode 2 and the fixed electrode 3, the movable electrode 2 is attracted to the fixed electrode 3 side by an electrostatic attractive force due to the applied voltage and is elastically deformed and displaced. Thus, by applying intermittent DC voltage from the drive power supply 9 between the movable electrode 2 and the fixed electrode 3, the movable electrode 2 vibrates in the vertical direction as indicated by the vertical arrows.

  The voltage applied between the electrodes by the drive power supply 9 is not limited to an intermittent DC voltage, but may be an AC voltage whose polarity changes alternately. When a voltage is applied between the movable electrode 2 and the fixed electrode 3, an electrostatic attractive force acts between the electrodes regardless of the polarity. Therefore, the movable electrode 2 can also be vibrated by applying an AC voltage between the electrodes.

  When the movable electrode 2 vibrates, the volume of the fluid storage chamber 11 of the pump 1 varies, so that the fluid flows in from the inflow path 12 and then the fluid flows out from the outflow path 13. In addition, the inflow path 12 and the outflow path 13 are provided with a check valve or a difference in fluid resistance, so that the fluid is driven in a certain direction as indicated by arrows. In this way, the pump 1 using an electrostatic actuator can be realized.

  In the electrostatic actuator as shown in FIG. 1, the movable electrode 2 is elastically deformed by the electrostatic attractive force due to the applied voltage, and elastic energy is accumulated in the movable electrode 2. Next, if the voltage application between the movable electrode 2 and the fixed electrode 3 is stopped, the elastic energy accumulated in the movable electrode 2 causes a force to return the movable electrode 2 to its original position. Thus, the operation as an actuator is realized. In general, the greater the elastic energy accumulated in the movable electrode 2, the better the performance as an actuator.

  In this electrostatic actuator, a case where the voltage applied between the movable electrode 2 and the fixed electrode 3 is increased in order to expand the operating range of the actuator will be described. FIG. 2 is a diagram showing a state where the voltage between the movable electrode 2 and the fixed electrode 3 is increased. The movable electrode 2 is drawn toward the fixed electrode 3, and the central portion of the movable electrode 2 is in contact with the insulating coating 4 on the upper surface of the fixed electrode 3. This insulating coating 4 functions as means for restricting movement of the movable electrode 2 (movement restriction means).

In the movable electrode 2, a region where further movement is restricted by contact with the insulating coating 4 , in other words, a region where the movement has reached the terminal position is referred to as a movement terminal region 2 a. As shown in FIG. 2, the lower surface of the movable electrode 2 in the movement termination region 2a has a planar shape. The shape of the movable electrode 2 when the electrostatic attraction does not act is such that the upper surface is flat and the lower surface is concave, so that the movable electrode 2 in the movement termination region 2a is subjected to elastic bending deformation. That is, in addition to the elastic deformation due to the pulling force acting on the entire movable electrode 2, a shape change due to bending deformation occurs in the movement terminal region 2a.

Therefore, the elastic energy accumulated in the movable electrode 2 is also accumulated in the movement termination region 2a due to bending deformation. As described above, in the electrostatic actuator of the present invention, the elastic energy due to the bending deformation is accumulated also in the movement termination region 2a of the movable electrode 2, so that the elastic energy is distributed and accumulated in a wide region of the movable electrode 2. The elastic energy that can be accumulated can be increased. In addition, fatigue failure of the movable electrode 2 can be reduced and the reliability of the electrostatic actuator can be improved.

  In this embodiment, the insulating coating 4 is provided on the upper surface of the fixed electrode 3, but it is not always necessary to have such a configuration, and the insulating coating 4 is provided on the lower surface of the movable electrode 2. May be. Alternatively, the insulating coating 4 may be provided on both the upper surface of the fixed electrode 3 and the lower surface of the movable electrode 2.

  Next, an electrostatic actuator according to another embodiment of the present invention will be described. FIG. 3 is a cross-sectional view showing a configuration of a pump 1a using an electrostatic actuator according to another embodiment of the present invention. In the electrostatic actuator of FIG. 1, elastic energy is accumulated in the movable electrode 2 itself. However, the electrostatic actuator of FIG. 3 integrally includes the movable electrode 2 and the movable member 21, and these movable electrodes 2. The elastic energy is stored in the movable member 21.

  The movable electrode 2 is a thin plate-like metal plate, and is integrally fixed to the upper surface of the movable member 21. The movable member 21 is made of an electrically insulating elastic material. In this case, the movable member 21 itself functions as a movement limiting unit that limits the movement of the movable electrode 2. The movable electrode 2 and the movable member 21 have peripheral portions fixed to the main body of the pump 1a, but the central portion can be displaced up and down by elastic deformation. A fixed electrode 3 is fixed to the bottom of the pump 1a.

  The movable member 21 is formed so as to have a cross-sectional shape as illustrated in a state where no electrostatic attractive force is applied. In other words, the upper surface has a planar shape, but the lower surface has a curved surface that is concave. Therefore, the thickness of the peripheral part of the movable member 21 is larger than the thickness of the central part. Further, since the upper surface of the fixed electrode 3 has a planar shape, the distance between both the movable member 21 and the fixed electrode 3 is not constant. The distance between both members in the peripheral part of the movable member 21 is smaller than the distance between both members in the central part.

  The operation of the pump 1a, that is, the operation of the electrostatic actuator is the same as that of the pump 1 of FIG. FIG. 4 shows a case where the voltage applied between the movable electrode 2 and the fixed electrode 3 is increased in order to expand the operating range of the actuator. The movable electrode 2 and the movable member 21 are drawn toward the fixed electrode 3, and the central portion of the movable member 21 is in contact with the upper surface of the fixed electrode 3.

The lower surface of the movable member 21 in the movement termination region 2a has a planar shape. The shape of the movable member 21 when the electrostatic attraction does not act is such that the upper surface is flat and the lower surface is concave, so that the movable member 21 in the movement termination region 2a is subjected to elastic bending deformation. That is, in addition to the elastic deformation due to the pulling force acting on the entire movable member 21, a shape change due to bending deformation occurs in the movement terminal region 2a.

  Therefore, also in this form of the electrostatic actuator, the elastic energy accumulated in the movable electrode 2 and the movable member 21 can be distributed and accumulated in a wide area of the movable electrode 2 and the movable member 21, and can be accumulated. Energy can be increased. In addition, fatigue failure of the movable member 21 can be reduced, and the reliability of the electrostatic actuator can be improved.

  Next, various modifications of the movable electrode 2, the movable member 21, and the fixed electrode 3 will be described. The electrostatic actuator of the pump 1b shown in FIG. 5 has a configuration similar to the electrostatic actuator of FIG. Although the movable electrode 2 and the movable member 21 are provided integrally, the movable electrode 2 is provided on the lower surface rather than the upper surface of the movable member 21. An insulating film 4 is formed on the upper surface of the fixed electrode 3.

  The electrostatic actuator of the pump 1c shown in FIG. 6 is different in the shape of the movable electrode 2 from the electrostatic actuator of FIG. The movable electrode 2 in a state where the electrostatic attractive force does not act is formed in a curved shape such that the upper surface has a planar shape and the lower surface becomes a convex surface. Therefore, the thickness of the peripheral part of the movable electrode 2 is smaller than the thickness of the central part. Further, since the upper surface of the fixed electrode 3 has a planar shape, the distance between the electrodes in the peripheral portion of the movable electrode 2 is larger than the distance between the electrodes in the central portion.

  In the electrostatic actuator of the pump 1d shown in FIG. 7, the lower surface shape of the movable electrode 2 is a curved surface, and the upper surface shape of the fixed electrode 3 is also a curved surface. The lower surface of the movable electrode 2 has a curved surface shape that becomes a convex surface, and the upper surface of the fixed electrode 3 has a curved surface shape that also becomes a convex surface. The electrostatic actuator of the pump 1e shown in FIG. 8 has a movable electrode 2 having a flat plate shape as in the prior art. Instead, the upper surface shape of the fixed electrode 3 is a curved surface shape that becomes a convex surface.

  In the electrostatic actuator of the pump 1 f shown in FIG. 9, the upper surface shape of the movable electrode 2 is a flat surface, but the lower surface shape is a curved surface having a plurality of uneven portions. In the electrostatic actuator of the pump 1g shown in FIG. 10, the upper surface shape and the lower surface shape of the movable electrode 2 are curved surfaces having a plurality of uneven portions. That is, the movable electrode 2 is corrugated. As shown in FIG. 9 or 10, the amount of elastic energy accumulated due to bending deformation in the movable electrode 2 increases by increasing the number of the uneven portions.

Also in the modified examples shown in FIGS. 5 to 10, the movable electrode 2 and the movable member 21 in the movement termination region are subjected to elastic bending deformation and accumulate elastic energy due to the bending deformation. Thereby, elastic energy can be distributed and stored in a wide area, and the stored elastic energy can be increased. 6 to 10 store elastic energy in the movable electrode 2 itself, but the movable member 21 is provided integrally with the movable electrode 2 as shown in FIG. 3 or FIG. Elastic energy may be accumulated in the movable electrode 2 and the movable member 21.

As shown in the above embodiments and modifications, the shape of the movable electrode 2 or the movable member 21 and the shape of the fixed electrode 3 can be various. It is important that the movable electrode 2 or the movable member 21 undergoes an elastic bending deformation in the movement termination region. Therefore, the shape of the lower surface of the movable electrode 2 or the movable member 21 in a state where no electrostatic attractive force acts and the shape of the upper surface of the fixed electrode 3 are different from each other. Further, the distance between the lower surface of the movable electrode 2 or the movable member 21 and the upper surface of the fixed electrode 3 is not constant but varies depending on the position.

As described above, in the electrostatic actuator of the present invention, the elastic energy is accumulated in a wide region by causing elastic bending deformation in the movable terminal region of the movable electrode 2 or the movable member 21 to accumulate the elastic energy. And the elastic energy to be accumulated can be increased. And the operating efficiency and performance of an electrostatic actuator can be improved. Further, fatigue failure of the movable electrode 2 or the movable member 21 can be reduced, and the reliability of the electrostatic actuator can be improved.

Further, the shape of the movable electrode 2 or the movable member 21 is such that when the voltage applied between both electrodes is gradually increased, the movement termination region 2a continuously increases as the applied voltage increases. It has become. Therefore, the operation amount of the electrostatic actuator (for example, the capacity of the pump) can be easily controlled by the applied voltage.

  According to the electrostatic actuator of the present invention, elastic energy can be distributed and stored in a wide area, and the stored elastic energy can be increased to improve the operation efficiency and performance of the electrostatic actuator. Further, it is possible to reduce fatigue damage of the movable electrode or the movable member of the electrostatic actuator, and to improve the reliability of the electrostatic actuator.

DESCRIPTION OF SYMBOLS 1,1a Pump 2 Movable electrode 2a Movement termination | terminus area | region 3 Fixed electrode 4 Insulating film 9 Drive power supply 10 Pump 11 Fluid storage chamber 12 Inflow path 13 Outflow path 21 Movable member

Claims (13)

A movable electrode (2) whose position and shape can be changed by elastic deformation;
A fixed electrode (3) disposed at a fixed position at a distance from the movable electrode (2);
Movement limiting means (4) for limiting the movement of the movable electrode (2) so as to prevent electrical contact between the movable electrode (2) and the fixed electrode (3);
A driving power source (9) for applying a voltage between the movable electrode (2) and the fixed electrode (3) and displacing the movable electrode (2) in the direction of the fixed electrode (3) by electrostatic force; And
The movable electrode (2) has elastic energy due to elastic bending deformation in the movement termination region (2a) where the movement reaches the termination position by contact with the fixed electrode (3) via the movement limiting means (4). Is accumulated,
The drive power supply (9) applies a voltage higher than the voltage at which movement restriction by the movement restriction means (4) to the movable electrode (2) is started to the movable electrode (2) and the fixed electrode (3). An electrostatic actuator that is applied between the two. The electrostatic actuator according to claim 1,
The movable electrode (2) is an electrostatic actuator in which a peripheral portion is fixed at a fixed position, and the vicinity of the central portion can be displaced by elastic deformation. An electrostatic actuator according to claim 2, wherein
The movable electrode (2) is an electrostatic actuator in which the thickness is not constant but has a different shape depending on the position. The electrostatic actuator according to any one of claims 1 to 3,
The movable electrode (2) has a shape in which the movement termination region (2a) continuously increases as the voltage applied between the movable electrode (2) and the fixed electrode (3) increases. Actuator. The electrostatic actuator according to any one of claims 1 to 4, wherein
The movable electrode (2) and the fixed electrode (3) are not located at a constant distance between the movable electrode (2) and the fixed electrode (3) when no voltage is applied by the driving power source (9). An electrostatic actuator that has a shape that continuously changes in response to the. A movable member (21) whose position and shape can be changed by elastic deformation;
A movable electrode (2) provided integrally with the movable member (21);
A fixed electrode (3) disposed at a fixed position at a distance from the movable member (21) ;
A driving power source (9) for applying a voltage between the movable electrode (2) and the fixed electrode (3) and displacing the movable electrode (2) in the direction of the fixed electrode (3) by electrostatic force; And
The movable member (21) is disposed on the fixed electrode (3) side with respect to the movable electrode (2), and prevents electrical contact between the movable electrode (2) and the fixed electrode (3). The movement of the movable electrode (2) is restricted by contact with the fixed electrode (3),
The movable member (21) accumulates elastic energy due to elastic bending deformation in the movement termination region (2a) where the movement reaches the termination position by contact with the fixed electrode (3) ,
The drive power source (9) generates a voltage larger than a voltage at which movement limitation due to contact between the movable member (2) and the fixed electrode (3) is started, to the movable electrode (2) and the fixed electrode (3). An electrostatic actuator that is applied between the two. An electrostatic actuator according to claim 6, wherein
The movable member (21) is an electrostatic actuator in which a peripheral portion is fixed at a fixed position, and the vicinity of the central portion can be displaced by elastic deformation. The electrostatic actuator according to claim 7,
The movable member (21) is an electrostatic actuator in which the thickness is not constant but has a different shape depending on the position. It is an electrostatic actuator given in any 1 paragraph of Claims 6-8,
The movable member (21) has an electrostatic shape in which the movement termination region (2a) continuously increases as the voltage applied between the movable electrode (2) and the fixed electrode (3) increases. Actuator. The electrostatic actuator according to any one of claims 6 to 9,
In the movable member (21) and the fixed electrode (3), the distance between the movable member (21) and the fixed electrode (3) when the voltage is not applied by the driving power source is not constant, depending on the position. An electrostatic actuator that has a shape that changes continuously. A movable member (21) whose position and shape can be changed by elastic deformation;
  A fixed electrode (3) disposed at a fixed position at a distance from the movable member (21);
  A movable electrode (2) integrally provided on the fixed electrode (3) side with respect to the movable member (21);
  Movement limiting means (4) for limiting the movement of the movable electrode (2) so as to prevent electrical contact between the movable electrode (2) and the fixed electrode (3);
  A driving power source (9) for applying a voltage between the movable electrode (2) and the fixed electrode (3) and displacing the movable electrode (2) in the direction of the fixed electrode (3) by electrostatic force; And
  The movable member (21) is elastic in the movement termination region (2a) where the movement reaches the termination position by contact with the movable electrode (2) and the fixed electrode (3) via the movement limiting means (4). It stores elastic energy due to typical bending deformation,
  The drive power source (9) applies a voltage larger than the voltage at which movement restriction by the movement restriction means (4, 21) to the movable member (2) is started, to the movable electrode (2) and the fixed electrode (3). ) Electrostatic actuator that is applied between. An electrostatic actuator according to claim 11,
  The movable member (21) has an electrostatic shape in which the movement termination region (2a) continuously increases as the voltage applied between the movable electrode (2) and the fixed electrode (3) increases. Actuator. The electrostatic actuator according to any one of claims 11 and 12,
  In the movable member (21) and the fixed electrode (3), the distance between the movable member (21) and the fixed electrode (3) when the voltage is not applied by the driving power source is not constant, depending on the position. An electrostatic actuator that has a shape that changes continuously.

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