JP5795860B2 - Air filter device - Google Patents

Description

  The present invention relates to an air filter device, and more particularly, is used for forming a clean space such as a clean room, and is used for supplying clean air for protection of the device or equipment, and also in high-temperature clean air. The present invention relates to an air filter device used for a process such as a clean oven or a dryer for drying an article, a drying process or a firing process in manufacturing a flat panel display, or a special radioactive element exhaust or an incinerator exhaust gas apparatus.

  In particular, in recent years, it has become common to arrange an air filter device for cleaning the introduced air in clean rooms, clean ovens, or dryers used in the semiconductor manufacturing industry, pharmaceutical industry, food industry, and the like. . In addition, for example, there is an increasing need for purifying the introduced air even in processes that require higher temperatures such as film formation and fine pattern formation during flat panel display manufacturing.

  When the use environment is normal temperature, a laminated structure (see Patent Document 1) or a composite nonwoven fabric (see Patent Document 2) using a so-called nanofiber nonwoven fabric having a fiber diameter of 1-1000 nm as a filter medium is developed. It is coming.

  However, they are not necessarily suitable for high temperature applications. Glass fibers are suitable for high-temperature applications, and many glass fiber-based ones have been developed. However, conventional air filter devices for high air volume and high-pressure applications use glass or organic fibers as organic or inorganic binders. The combined filter media are folded in a zigzag shape and fold-folded, and a separator made of corrugated aluminum or stainless steel is sandwiched between the filter materials to form a zigzag filter unit. There are many configurations that are airtightly attached.

  However, due to the bending damage of the glass fiber accompanying this fold folding process, the filter medium strength decreases, the filter medium is torn, or the damaged glass fiber dust is detached or scattered by the air passing through the filter medium when using the filter device. As a result, there is a problem that high collection efficiency cannot be obtained and the dust removal function is deteriorated.

  In addition, since the conventional air filter device uses glass fibers having a small fiber diameter, there is a problem that the pressure loss at the time of ventilation is high, the large air volume treatment cannot be performed, and the power consumption at the time of use becomes high. there were.

  On the other hand, as means for improving dust collection efficiency and reducing pressure loss when using an air filter device, for example, ultrafine fibers called nanofibers and fine fibers having an average fiber diameter of 10 to 1000 nm are made air permeable. The same ultrafine fibers are deposited or laminated on the surface of the fine fiber layer of the base material for the purpose of maintaining the shape and improving the strength, and the method of providing on the surface of the base material having a glass fiber or synthetic fiber layer Thus, a method for forming a filter medium has been developed.

  However, since the ultrafine fiber layer is present on the surface of the air filter substrate, the ultrafine fiber layer is similarly damaged during fold folding, reducing the filter performance such as pressure loss and dust collection efficiency. There was a problem that.

  In addition, there is a problem that no ultrafine fiber material of an air filter device that can withstand high temperatures is found, and the ultrafine fiber layer is destroyed when used at high temperatures, so that the original function cannot be exhibited.

JP 2009-263818 A JP 2008-169521 A

  The present invention is intended to solve these problems, and one object of the present invention is to provide an air filter that takes advantage of the features of ultrafine fibers without fold-folding and, therefore, without damaging the ultrafine fibers. The device is to be provided.

  A further object of the present invention is to provide an air filter device that prevents the dust removal function from deteriorating due to the air passing through the air filter being damaged and scattered by air passing through the air filter because there is no fold folding process. It is something to try.

  Still another object of the present invention is to provide an air filter device capable of maintaining high collection efficiency even at high temperatures.

  One solution of the present invention is a glass substrate or synthetic fiber having a fiber diameter of 0.3 to 50 μm and a thickness of 0.1 to 1.0 mm (measured according to JIS P8118) as a base material having air permeability. Using a base material in which a nonwoven fabric or a woven fabric made of natural fibers is bonded with an organic binder or an inorganic binder, an ultrafine fiber layer having a fiber diameter of 0.01 to 0.5 μm, for example, is deposited or laminated on one surface of the base material. This is an air filter device using an air filter obtained by superimposing ultrafine fiber layers of the filter material.

  Another solution of the present invention is an air filter device in which the air filter formed as described above is integrally formed as a panel by sandwiching the peripheral edge portion with a coupling frame.

  Still another solution of the present invention is an air filter device in which the panels are connected to each other and arranged in a zigzag shape in a filter frame to form a filter unit, which is airtightly attached.

  Still another solution of the present invention is an air filter device in which the panels are connected to each other with a heat-resistant tape and arranged in a zigzag shape in a filter frame to form a filter unit, which is airtightly attached.

  Still another solution of the present invention is as follows: silica, alumina, glass fiber, carbon fiber, metal fiber, aramid fiber, polybenzimidazole fiber, polyimide fiber, polyamideimide fiber, polyetherimide fiber, poly Allylate fiber, polyparaphenylenebenzopisoxazole fiber, polyphenylene sulfide fiber, novoloid fiber, polyclar fiber, flame retardant acrylic fiber, flame retardant rayon fiber, flame retardant polyester fiber, flame retardant cotton fiber, flame retardant wool fiber or flame retardant treatment It is to use one or more selected from fibers that can prevent the spread of fire by heat melting even if not.

  Another solution of the present invention is that the material of the ultrafine fiber is silica, alumina, glass fiber, carbon fiber, metal fiber, aramid fiber, polybenzimidazole fiber, polyimide fiber, polyamideimide fiber, poly, as well as the base material. Etherimide fiber, polyarylate fiber, polyparaphenylenebenzopisoxazole fiber, polyphenylene sulfite fiber, novoloid fiber, polyclar fiber, flame retardant acrylic fiber, flame retardant rayon fabric, flame retardant polyester fiber, flame retardant cotton fiber, flame retardant wool That is, one or more selected from fibers or fibers that can prevent fire spread by heat melting without applying a flame retardant treatment.

  Here, the base material may be heat-resistant having air permeability and can hold and support the filter material. For example, a nonwoven fabric or a woven fabric made of glass fibers, synthetic fibers, natural fibers, or the like. That are bonded with an organic binder or an inorganic binder can be used. These may be used alone, or two or more of them may be laminated or used together. Moreover, even if it uses the material which does not have one part heat resistance, what is necessary is just to have heat resistance as a whole base material, and what was made to have heat resistance by post-processing may be used. In particular, the substrate preferably has a pressure loss of 10 Pa or less at a passing wind speed of 5.3 centimeters per second. Moreover, the organic fiber or inorganic fiber which has a flame retardance or nonflammability of L0I (limit oxygen index) 21 or more and is not thermoplastic is preferable.

  As a method for forming these substrates, a method using a wet papermaking method, a dry method, a spunbond method, a melt blow method, or the like is used.

  As an organic binder, organic binders, such as a melamine resin, a silicon resin, an epoxy resin, an acrylic resin, a urethane resin, can be used, for example.

  Examples of the inorganic binder include silica, talc, kaolin mineral, bentonite (including activated bentonite), diatomaceous earth, alumina (including activated alumina), a mixture of silica and alumina, aluminum silicate, hydrous magnesium silicate having a ribbon-like structure, and the like. An inorganic substance consisting of at least one selected from the group of synthetic zeolites can be used.

  The ultrafine fiber refers to a fiber having a single fiber diameter in the range of 0.01 to 0.5 μm as an example, and the form may be a fibrous form and is not particular about the length or the cross-sectional shape. .

  The ultrafine fiber layer used in the present invention is preferably produced by, for example, an electrospinning method, but the ultrafine fibers are preferably not in a bundle but in a state where the ultrafine fibers are dispersed. This is because when the fine fibers are in a bundled state, the average fiber diameter is small, but the pore diameter of the fiber layer composed of fibers having a larger pore diameter of the ultrafine fiber layer is not significantly different, and the filtration performance is high. This is because they tend to be inferior.

  Moreover, it is possible to carry out arbitrarily before or after applying a hardness adjusting agent such as polyvinyl alcohol, a charging agent, or the like as the base material or the ultrafine fiber.

  The operation of the above problem solving means is as follows.

  That is, the air filter is a non-woven fabric or a woven fabric made of glass fibers having a fiber diameter of 0.3 to 50 μm and a thickness of 0.1 to 1.0 mm, or synthetic fibers or natural fibers, and bonded with an organic binder or an inorganic binder. Two filter materials obtained by depositing or laminating ultrafine fibers having a fiber diameter of 0.01 to 0.5 μm on, for example, an electrospinning method on the breathable base material so that the respective ultrafine fiber layers are overlapped with each other. Since they are configured to face each other, dust in the sucked air is collected by the base material and the ultrafine fiber layer and passes as clean air. At this time, it is a filter material having an ultrafine fiber layer having a dense high density capturing function composed of a base material having a large dust holding capacity and an ultrafine fiber for the purpose of shape retention function and strength improvement, and the filter materials, Since the ultrafine fiber layer is an air filter configured to overlap with each other, it exhibits high collection efficiency with low pressure loss.

  In addition, since the air filter has a structure in which the peripheral edge portion is sandwiched by a coupling frame, the ultrafine fiber layer is protected against external force, and damage to the ultrafine fiber layer due to fold processing is prevented. Therefore, the function of the ultrafine fiber layer is not impaired.

  In addition, the base material is made of glass fiber, synthetic fiber or natural fiber using a binder that can withstand high temperatures, the bonding frame is made of metal such as stainless steel that can withstand high temperatures, and heat-resistant silicon that can withstand high temperatures is used as an adhesive. Since it is used, the air filter is not deformed by high-temperature air passing through the air filter, and fibers of the air filter are not broken and scattered, so that a predetermined collection function can be maintained for a long time.

(1) Since the filter material has a panel structure in which the ultrafine fiber layers are overlapped with each other and the peripheral edge thereof is sandwiched by a bonding frame, it can be stably held for a long time and can be maintained in a good state.

(2) Since the structure uses ultrafine fibers, it can exhibit high efficiency functions with low pressure loss.

(3) Using an air filter device in a dryer such as a clean oven, high-temperature clean air can be introduced without generating dust even when high-temperature air is passed.

(4) Since the air filter device of the present invention is not fold-folded and the strength of the air filter is not reduced as compared with the conventional air filter device, fibers of the air filter are scattered or the air filter is broken. Therefore, there is no fear that the dust removal function will deteriorate.

The perspective view which shows the external appearance of the air filter apparatus by this invention The perspective view which shows the air filter unit which connected and integrated the panel by this invention The perspective view which shows the upper board or lower board of the filter frame used for the air filter apparatus of this invention The perspective view which similarly shows the side plate of a filter frame The exploded perspective view of the panel of this invention Sectional view of the panel of the present invention Sectional drawing which shows the connection part of a part of air filter unit of this invention in cross section

  Hereinafter, an air filter device according to an embodiment of the present invention will be described with reference to the accompanying drawings.

  FIG. 1 shows an entire air filter device according to the present invention. For example, in a rectangular tube-like filter frame 1, a plurality of panels P are connected in a filter unit and arranged in a zigzag shape. It is installed airtight.

  The air filter device configured as described above will be described in detail below in accordance with its assembly procedure.

  First, as shown in the sectional view of FIG. 5, the air filter 2 is a long base material 3 having air permeability, that is, glass having a fiber diameter of 0.3 to 50 μm and a thickness of 0.1 to 1.0 mm. A non-woven fabric or woven fabric made of fibers or synthetic fibers or natural fibers is bonded with an organic binder or an inorganic binder to form a sheet-like base material 3. Subsequently, ultrafine fibers having a fiber diameter of 0.01 to 0.5 μm are deposited or laminated on one surface of the substrate 3 by an electrospinning method to integrally form the filter material 4. The long filter material sheet (not shown) formed in this way is cut into, for example, a predetermined dimension that forms a rectangle, and the filter material component 2A is formed.

  Next, as shown in FIGS. 4 and 5, the two filter material parts 2 </ b> A are opposed to each other so that the ultrafine fiber layers of the filter material 4 are overlapped to form an air filter 2, and a pair of stainless steel coupling frames 5 and 5, the peripheral edges are sandwiched and fixed to each other by a heat-resistant adhesive G such as a silicon adhesive. In this way, the panel P having a filtration function by itself is completed.

  Here, the coupling frames 5 and 5 are constituted by flat-plate frames as shown in the figure, and are coupled to each other via the filter medium 2 with the heat-resistant adhesive G. In addition, for example, it is possible to bend the coupling claws formed on at least one of the coupling frames 5 and 5 so as to be held between the coupling frames. is there.

  Next, the plurality of panels P thus formed are arranged in a zigzag pattern as clearly shown in FIG. In FIG. 2, only the panel P arranged in a zigzag shape is shown for the sake of clarity, and a heat-resistant tape and a heat-resistant adhesive for a connecting portion to be described later are omitted. That is, as shown in FIG. 6, a sectional view of a part of the filter unit U in which the long sides of the coupling frames 5 and 5 of the panel P are juxtaposed in close proximity to each other and the coupling portion is shown in cross section. The heat resistant tape T is bonded to each other between the opposing long sides (sides orthogonal to the paper surface) from both sides. A zigzag filter unit U is formed through the bonded portion in a state of being bonded together in this way. In this case, as shown in FIG. 6, a heat-resistant adhesive B is applied to the portion of the filter unit U that is formed in a zigzag projection so as to cover the heat-resistant tape T of the connecting portion, The frames 5 and 5 are more firmly connected. The filter unit U configured as described above is airtightly mounted in the filter frame 1 with a heat-resistant adhesive or the like. In addition, the heat-resistant tape T can be laminated not from both sides, but alternately from every other side, and it is possible to have a form that does not have heat-resistant tape on the part that is formed in a zigzag shape. And it is also possible to apply the heat-resistant adhesive material B directly to that portion to firmly connect the coupling frames 5 and 5 and thus the panel P.

  That is, as shown in FIG. 1 and FIGS. 3A and 3B, the outer peripheral frame of the filter frame 1 includes a left side plate 6, a right side plate 7, an upper plate 8, and a lower plate 9. The left side plate 6 and the right side plate 7 have the same shape, each of which has a pair of end portions folded outwardly into L-shaped pieces 10, 10 ', and the other pair of end portions L outward. It is formed of a flat plate having collar pieces 12 and 12 'which are formed into protrusions 11 and 11' which are bent into a mold and whose tips are bent inward into an L shape. Further, the upper plate 8 and the lower plate 9 have the same shape, and a pair of end portions are folded inwardly into L-shaped pieces 13 and 13 ′, and the other pair of end portions are formed on the side plate. It is comprised with the flat plate which has the tongue pieces 14 and 14 'which can contact | abut to the collar pieces 10 and 10'. When the left side plate 6, the right side plate 7, the upper plate 8, and the lower plate 9 are assembled into a rectangular tube shape, the collar pieces 10, 10 'and the tongue pieces 14, 14' are integrally in contact with each other. The mounting holes 15 and 15 ′ formed in each contact with each other when they come into contact with each other.

  A heat-resistant adhesive, for example, a silicon adhesive, is applied in advance to the inner surface of the lower plate 9 configured in this manner, and the above-described zigzag filter unit U is airtightly installed thereon. After the filter unit U is fixed to the lower plate 9 with silicon adhesive, the flanges 10 and 10 ′ of the left side plate 6 and the right side plate 7 are attached to the tongue pieces 14 and 14 ′ of the lower plate 9 through the attachment holes 15. Tighten with bolts not shown. At that time, by similarly applying a silicon adhesive to the inner surfaces of the left side plate 6 and the right side plate 7, both ends of the filter unit U can be hermetically fixed.

  After fixing the filter unit U to the lower plate 9, the left side plate 6 and the right side plate 7, hold the left side plate 6 and the right side plate 7 to invert the filter unit U, position it downward, and apply silicone adhesive on the inner surface The air filter device is installed on the upper plate 8 and the collar pieces 10 ′ of the side plate 6 and the right side plate 7 are fixed to the tongue pieces 14, 14 ′ of the upper plate 6 with bolts through the mounting holes 15 in the same manner. To complete.

Example 1
Below, an Example and a comparative example are contrasted and demonstrated.

  An air filter device was manufactured as follows.

  First, a base material in which 80% aramid fiber with a fiber diameter of 2.2 dtex and vinylon with a fiber diameter of 1.7 dtex are bonded with a melamine binder is prepared, and the fiber diameter is applied to one surface of the base material by electrospinning. A sheet of filter material 4 on which a 0.1 μm aramid ultrafine fiber layer was deposited or laminated was obtained.

  The sheet of filter material 4 is cut into a rectangle of a predetermined size to form a filter material part 2A, and the two filter material parts are superposed on the fine fiber layers of the filter material 4 to form an air filter 2. A panel P sandwiched between the inner peripheral edges of the pair of stainless steel connecting frames 5 and 5 and hermetically sandwiched and fixed by a silicon adhesive was obtained.

  Next, a zigzag air filter unit U is arranged in a state where these panels P are connected to each other, and the lower plate 9, the left plate 6 and the right plate 7 made of stainless steel are combined and fixed with a heat-resistant silicone sealant. Finally, the upper plate 8 was fixed to complete the air filter device.

(Comparative Example 1)
A filter medium made by bonding glass fibers with an inorganic binder is pleated, and a separator such as corrugated aluminum or stainless steel is inserted between the pleats of this filter medium, and this is stored and fixed to the filter frame via an adhesive. Completed air filter device for use.

  Next, a filter performance test was performed for each of the air filter devices of Example 1 and Comparative Example 1. The evaluation method was as follows.

(1) Initial pressure loss (Pa): The pressure loss was measured using a JIS duct with an air filter device outer dimension of 150 × 150 (mm). The air volume was 0.5 m ³ / min.

(2) Initial collection efficiency (counting method,%): The collection efficiency was measured using a JIS duct with an air filter device outer dimension of 150 × 150 (mm). The air volume was 0.5 m ³ / min.

  As a result, the initial collection efficiency was 99.97%. The initial pressure loss was 308 Pa in Comparative Example 1, whereas it was 152 Pa in Example 1. It was confirmed that a highly efficient function can be exhibited with a low pressure loss.

  Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the components without departing from the scope of the invention in the implementation stage, and a plurality of components disclosed in the embodiment. Various modifications can be made by an appropriate combination of the above.

  In addition, the air filter in which two fine filter layers used in the air filter device described in the present invention are laminated with each other is not only a super-high performance filter (HEPA) generally called, but also a ULPA filter. It can be used for high-performance filters and medium-performance filters, and even if various changes are made, the gist of the present invention is not changed.

  Even in a high temperature range, it exhibits a high efficiency function with a low pressure loss, and furthermore, there is no dust generation, gas generation, or fiber scattering from the air filter, and it can be used stably over a long period of time.

  The air filter device of the present invention is optimal and useful not only for general air conditioning in clean rooms and the like, but also for circulating air cleaning such as clean ovens and dryers or exhaust gas treatment of incinerators.

DESCRIPTION OF SYMBOLS 1 ... Filter frame 2 ... Air filter 2A ... Filter material component 3 ... Base material 4 ... Filter material 5 ... Bonding frame P ... Panel T ... Heat-resistant tape U ... Air filter unit B ... Heat-resistant adhesive 6 ... Left side plate 7 ... Right side plate 8 ... Upper plate 9 ... Lower plate 10, 10 '... Collar piece 11, 11' ... Projection piece 12, 12 '... Collar piece 13, 13' ... Collar piece 14, 14 '... Projection piece 15, 15' ... Mounting hole

Claims (1)

A base material having air permeability and two filter materials that are not fold-folded in a sheet form in which an ultrafine fiber layer having a fiber diameter of 0.01 to 0.5 μm is deposited or laminated on one side surface of the base material. In the air filter opposed so that the ultrafine fiber layers are overlapped with each other, the periphery of the air filter is clamped with a stainless steel coupling frame and then fixed with a heat-resistant adhesive, and the air filter clamped with the coupling frame is An air filter device arranged in a filter frame.

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