JP5783474B2 - Color filter - Google Patents

Description

  The present invention relates to a method of manufacturing a color filter having a light shielding portion and a colored portion provided between the light shielding portions. The present invention also relates to a color filter having a light shielding portion and a colored portion provided between the light shielding portions.

  In recent years, liquid crystal display devices and organic EL display devices have been put to practical use as flat displays. In these display devices, in general, a color filter is provided in order to extract only light having a desired wavelength from the light from the light source or to improve the color purity of the light from the light source.

  The color filter is provided on the base material, and includes a light-shielding portion that shields light from the light source, and a colored portion that is provided between the light-shielding portions and transmits only light having a desired wavelength among the light from the light source. I have. Such a method for manufacturing a color filter generally includes a step of forming a light shielding portion and a step of forming a colored portion provided between the light shielding portions.

  For example, in the color filter manufacturing method described in Patent Document 1, first, a light shielding portion is formed in a predetermined pattern on a substrate, and then a red colored portion, a green colored portion, and a blue colored portion are provided between the light shielding portions. Is formed. Among these, in the step of forming the light-shielding portion, first, a chromium thin film is formed on the substrate, and then a photosensitive resist is applied on the chromium thin film. Thereafter, the resist pattern is formed by exposing and developing the photosensitive resist through a predetermined mask, and then the chromium thin film is etched using the resist pattern as a mask to form a light-shielding portion having the predetermined pattern. The

  Further, in the step of forming the red colored portion, first, the red photosensitive resin constituting the red colored portion is applied onto the substrate, and then the red photosensitive resin is exposed through a predetermined mask. Development, thereby forming a red colored portion between the light shielding portions. Also in the process of forming the green colored part and the blue colored part, the green colored part and the blue colored part are formed between the light shielding parts by performing the coating process, the exposure process and the developing process in the same manner as in the process of forming the red colored part. Is formed.

JP 2007-171624 A

  In the color filter manufacturing method described in Patent Document 1, a coating process, an exposure process, and a development process are performed in a light shielding part forming process and a colored part forming process for each color. Since the same processing is repeated in this way, it can be considered that the time required for the production becomes long and the cost of the production equipment becomes high.

  The present invention has been made in consideration of such points, and an object thereof is to provide a color filter manufacturing method capable of manufacturing a color filter more easily.

  The present invention provides a method for producing a color filter having a light shielding portion and a first colored portion provided between the light shielding portions, a step of preparing a base material, and a first colored layer material on the base material. A step of applying, a step of exposing the first colored layer material so that the first colored layer material remains in a region corresponding to the light-shielding portion and the first colored portion of the substrate, and the first Applying a light shielding layer material on the colored layer material, exposing the light shielding layer material so that the light shielding layer material remains in a region corresponding to the light shielding portion of the substrate, and Developing a colored layer material and the light shielding layer material to form a light shielding portion including the light shielding layer and the first colored layer, and forming a first colored portion including the first colored layer; A color filter manufacturing method characterized by comprising

In the color filter manufacturing method according to the present invention, the color filter may have a light shielding portion and a first colored portion, a second colored portion, and a third colored portion provided between the light shielding portions.
In this case, the first colored layer material and the light shielding layer material are developed to form a light shielding portion including the light shielding layer and the first colored layer, and a first colored portion including the first colored layer is formed. After that, the second colored portion including the second colored layer may be formed, and the third colored portion including the third colored layer may be formed.
Alternatively, the first colored layer material and the light shielding layer material are developed to form a light shielding portion including the light shielding layer and the first colored layer, and to form a first colored portion including the first colored layer. Before, the 2nd colored part containing the 2nd colored layer may be formed, and the 3rd colored part containing the 3rd colored layer may be formed.
Alternatively, the first colored layer material and the light shielding layer material are developed to form a light shielding portion including the light shielding layer and the first colored layer, and to form a first colored portion including the first colored layer. Before, a second colored portion including a second colored layer is formed, and the first colored layer material and the light shielding layer material are developed to form a light shielding portion including the light shielding layer and the first colored layer. In addition to forming the first colored portion including the first colored layer, the third colored portion including the third colored layer may be formed.

  In the color filter manufacturing method according to the present invention, the first colored layer material may be composed of a negative photosensitive material that is cured by exposure. In this case, in the step of exposing the first colored layer material, the first colored layer material applied to a region corresponding to the light-shielding portion and the first colored portion of the substrate is exposed.

  In the color filter manufacturing method according to the present invention, the first colored layer material may be composed of a positive photosensitive material that is softened by exposure. In this case, in the step of exposing the first colored layer material, the first colored layer material applied to a region other than the region corresponding to the light shielding portion and the first colored portion of the substrate is exposed. The

  In the color filter manufacturing method according to the present invention, the light shielding layer material may be made of a negative photosensitive material that is cured by exposure. In this case, in the step of exposing the light shielding layer material, the light shielding layer material applied to a region corresponding to the light shielding portion of the substrate is exposed.

  In the color filter manufacturing method according to the present invention, the light shielding layer material may be made of a positive photosensitive material that is softened by exposure. In this case, in the step of exposing the light shielding layer material, the light shielding layer material applied to a region other than the region corresponding to the light shielding portion of the substrate is exposed.

  The present invention is a color filter having a base material and a light shielding layer and a first colored layer formed on the base material, and when the color filter is viewed from its normal direction, a light shielding portion that shields incident light; A first colored portion provided between the light shielding portions, and the first colored portion includes the base material and a first colored layer formed on the base material, and the light shielding portion includes: A color filter comprising: the base material; a first colored layer formed on the base material; and a light shielding layer formed on the first colored layer.

  The color filter according to the present invention may further include a second colored layer and a third colored layer formed on the substrate. In this case, when the color filter is viewed from the normal direction, the color filter is divided into a light shielding portion that shields incident light, and a first colored portion, a second colored portion, and a third colored portion provided between the light shielding portions, The second colored portion includes the base material and a second colored layer formed on the base material, and the third colored portion is formed on the base material and the base material. A third colored layer.

  A color filter manufacturing system according to the present invention is a system for manufacturing a color filter having a light shielding portion including a light shielding layer and a first colored layer, and a first colored layer provided between the light shielding portions. A core device for storing and transporting a base material for a color filter, and a first coloring treatment line connected to the core device, the coating device applying a first colored layer material on the base material And an exposure apparatus that exposes the first colored layer material so that the first colored layer material remains in a region corresponding to the light-shielding portion and the first colored portion of the substrate. A processing line, a processing line for a light shielding layer connected to the core device, a coating device for applying a material for the light shielding layer on the substrate, and the light shielding in a region corresponding to the light shielding portion of the substrate. Layer material remains A light-shielding layer processing line having an exposure device that exposes the light-shielding layer material and a developing device that develops the exposed light-shielding layer material, and the core device has the exposed The base material on which the first colored layer material is formed is transported from the first colored processing line to the light shielding layer processing line, and is exposed in the developing device of the light shielding layer processing line. In the color filter manufacturing system, the coloring layer material and the exposed light shielding layer material are both developed.

  In the color filter manufacturing system according to the present invention, the first coloring processing line may further include a developing device that develops the exposed material for the first colored layer. In this case, the first coloring processing line is provided with a bypass line that bypasses the developing device of the first coloring processing line and returns the base material that has passed through the exposure device of the first coloring processing line to the core device. It has been.

  In the color filter manufacturing system according to the present invention, the first coloring processing line may further include a baking apparatus that performs heat treatment on the base material that has passed through the developing device of the first coloring processing line. In this case, in the first coloring processing line, the base material that has passed through the exposure device of the first coloring processing line is returned to the core device, bypassing the developing device and the baking device of the first coloring processing line. A bypass line is provided.

  According to the present invention, the color filter manufacturing method includes a step of preparing a base material, a step of applying a first colored layer material on the base material, and a region corresponding to the light shielding portion and the first colored portion of the base material. A step of exposing the first colored layer material, a step of applying the light shielding layer material on the first colored layer material, and a region corresponding to the light shielding portion of the substrate. A step of exposing the light shielding layer material so that the light shielding layer material remains, and developing the first colored layer material and the light shielding layer material to form a light shielding portion including the light shielding layer and the first colored layer. And a step of forming a first colored portion including the first colored layer. Thus, according to the present invention, first, the exposed first colored layer material is formed on the substrate, and then the exposed first colored layer material is exposed on the exposed first colored layer material. Is formed. For this reason, the first colored layer material and the light shielding layer material can be simultaneously developed by one development process. For this reason, the frequency | count of a development process can be reduced compared with the case where the 1st colored layer material and the light shielding layer material are developed by separate development processes. As a result, the time required for production can be shortened, and the cost of the production equipment can be reduced.

  According to this invention, the color filter has a base material, the light shielding layer and the 1st colored layer which were formed on the base material. Further, when the color filter is viewed from the normal direction, the color filter is divided into a light shielding portion that shields incident light and a first colored portion provided between the light shielding portions. Among these, the light shielding part includes a base material, a first colored layer formed on the base material, and a light shielding layer formed on the first colored layer. For this reason, compared with the case where a light-shielding part does not contain a 1st colored layer, the optical density in a light-shielding part can be made high.

FIG. 1A is a longitudinal sectional view showing a color filter in the present embodiment, and FIG. 1B is a plan view showing the color filter according to the present embodiment. FIG. 2 is a diagram showing a color filter manufacturing system in the present embodiment. FIGS. 3A to 3D are views showing a color filter manufacturing method according to the present embodiment. FIGS. 4A to 4E are views showing a process of forming a first colored portion and a light shielding portion in the color filter manufacturing method according to the present embodiment. FIGS. 5A to 5D are views showing a color filter manufacturing method in a comparative form. 6A to 6D are diagrams showing a modification of the color filter manufacturing method in the present embodiment. FIGS. 7A to 7D are diagrams showing other modified examples of the color filter manufacturing method in the present embodiment.

  Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. First, the entire color filter 60 in the present embodiment will be described with reference to FIG.

Color Filter As shown in FIG. 1A, the color filter 60 includes a base material 70, a red colored layer (first colored layer) 71 formed in a predetermined pattern on the base material 70, and a red colored layer 71. It has a light shielding layer 74 formed in a predetermined pattern thereon, and a green colored layer (second colored layer) 72 and a blue colored layer (third colored layer) 73 formed between the red colored layers 71. .

Further, as shown in FIG. 1 (b), when viewed from the color filter 60 the normal direction (direction indicated by the arrow D _N in FIG. 1 (a)), the light-shielding for blocking light incident on the color filter 60 A portion 64 is divided into a red colored portion (first colored portion) 61, a green colored portion (second colored portion) 62, and a blue colored portion (third colored portion) 63 provided between the light shielding portions 64. . Among these, the red colored portion 61 includes a base material 70 and a red colored layer 71 formed on the base material 70 as shown in FIG. Similarly, the green colored portion 62 includes a base material 70 and a green colored layer 72 formed on the base material 70, and the blue colored portion 63 is formed on the base material 70 and the base material 70. And a blue colored layer 73 formed. As shown in FIG. 1A, the light shielding portion 64 includes a base material 70, a red colored layer 71 formed on the base material 70, and a light shielding layer 74 formed on the red colored layer 71. Is included.

  Next, each component of the color filter 60 will be described in detail.

  First, the base material 70 will be described. The material of the base material 70 is not particularly limited as long as it has light transparency and has predetermined stability, durability, and the like. As a material of the base material 70, for example, glass, polymer, or the like is used.

Next, the red colored layer 71, the green colored layer 72, and the blue colored layer 73 will be described. As will be described later, each colored layer 71, 72, 73 is first coated with a photosensitive resin in which a colorant such as a pigment or dye of each color is dispersed or dissolved on the substrate 70, and then the coated photosensitive resin. It is a layer formed by exposing and developing a functional resin.
Among these, examples of the colorant used in the red coloring layer 71 include perylene pigments, lake pigments, azo pigments, quinacridone pigments, anthraquinone pigments, anthracene pigments, and isoindoline pigments. These pigments may be used alone or in combination of two or more.
Examples of the colorant used for the green colored layer 72 include phthalocyanine pigments such as halogen polysubstituted phthalocyanine pigments or halogen polysubstituted copper phthalocyanine pigments, triphenylmethane basic dyes, isoindoline pigments, and isoindolinones. And pigments. These pigments or dyes may be used alone or in combination of two or more.
Examples of the colorant used for the blue colored layer 73 include copper phthalocyanine pigments, anthraquinone pigments, indanthrene pigments, indophenol pigments, cyanine pigments, dioxazine pigments, and the like. These pigments may be used alone or in combination of two or more.

As the photosensitive resin constituting each of the colored layers 71, 72, 73, either a negative photosensitive resin or a positive photosensitive resin can be used. In both the negative photosensitive resin and the positive photosensitive resin, a general negative photosensitive resin and a positive photosensitive resin, for example, an alkali-soluble photosensitive resin can be used.
For example, as the negative photosensitive resin, a chemically amplified photosensitive resin based on a crosslinked resin, specifically, a chemically amplified photosensitive resin obtained by adding a crosslinking agent to polyvinylphenol and further adding an acid generator, etc. Is mentioned. Also, for example, as an acrylic negative photosensitive resin, it has a photopolymerization initiator that generates at least a radical component when irradiated with ultraviolet rays, and has an acrylic group of C = C in the molecule. And a functional group (for example, a component having an acidic group in the case of development with an alkali solution) that can dissolve the unexposed portion by subsequent development can be used. Among the above-mentioned components having an acrylic group, relatively low molecular weight polyfunctional acrylic molecules include dipentaerythritol hexaacrylate (DPHA), dipentaerythritol pentaacrylate (DPPA), tetramethylpentatriacrylate (TMPTA) and the like. Can be mentioned. Moreover, as a high molecular weight polyfunctional acrylic molecule, the polymer etc. which introduce | transduced the acrylic group through the epoxy group to the one part carboxylic acid group part of a styrene-acrylic acid-benzylmethacrylate copolymer are mentioned.
Examples of the positive photosensitive resin include a chemically amplified photosensitive resin using a novolac resin as a base resin.
In the present embodiment, a negative photosensitive resin is used as the photosensitive resin constituting each of the colored layers 71, 72, 73.

Next, the light shielding layer 74 will be described. As will be described later, the light-shielding layer 74 is a layer formed by first applying a photosensitive resin containing light-shielding particles on the substrate 70, and then exposing and developing the applied photosensitive resin. is there.
As the light-shielding particles, particles capable of imparting a desired light-shielding property to the photosensitive resin are used. For example, carbon fine particles, metal oxides, inorganic pigments, organic pigments, and the like are used.
As the photosensitive resin constituting the light shielding layer 74, either a negative photosensitive resin or a positive photosensitive resin can be used. In both the negative photosensitive resin and the positive photosensitive resin, common negative photosensitive resin and positive photosensitive resin can be used as in the case of the colored layers 71, 72, and 73.
In the present embodiment, a negative photosensitive resin is used as the photosensitive resin constituting the light shielding layer 74.

  Although not shown, the color filter 60 may further include an overcoat layer that covers the colored layers 71, 72, 73 and the light shielding layer 74. The overcoat layer protects the colored layers 71, 72, 73 and the light shielding layer 74 from the outside, and prevents impurities contained in the colored layers 71, 72, 73 and the light shielding layer 74 from flowing out to the outside. It is. The overcoat layer is formed by laminating a plurality of layers, for example, and as a material of each layer, for example, a transparent photosensitive resin, a transparent thermosetting resin, or the like can be used. As a material of each layer, silicon, aluminum, zinc or tin oxide or oxynitride may be used.

  Although not shown, the color filter 60 further includes a spacer for maintaining a constant distance from a display substrate (a liquid crystal driving substrate, an organic EL substrate, etc.) arranged to face the color filter 60. May be. The spacer is generally formed in the light shielding portion 64. The method for forming the spacer is not particularly limited. For example, the spacer may be formed by laminating the green coloring layer 72 and the blue coloring layer 73 formed after the light shielding layer 74 on the light shielding layer 74. .

Color Filter Manufacturing System Next, the color filter manufacturing system 1 for manufacturing the color filter 60 will be described with reference to FIG. As shown in FIG. 1, the color filter manufacturing system 1 is a stacker that stores a plurality of base material-contained cassettes (not shown) or empty cassettes (not shown) in which a plurality of base materials 70 are stored. The crane-type core device 10 is connected to each of a plurality of base material loading / unloading positions (base material unloading position C1 and base material loading position C2) of the core device 10, and the base material stored in the core device 10 is stored. A plurality of processing lines 20, 30, 40, and 50 for performing various processes for manufacturing the color filter 60 on the base material 70 stored in the cassette. The core device 10 is installed so as to extend linearly on a horizontal installation surface, and each processing line 20, 30, 40, 50 is formed in an inverted U shape from the side of the core device 10 on the installation surface. It is installed so as to project laterally.

  As described above, in the color filter manufacturing system 1, the stacker crane type core device 10 is connected to each processing line 20, 30, 40, 50. Moreover, the core apparatus 10 has a stocker (not shown) for storing a plurality of cassettes, and a stacker crane (not shown) for transporting the cassettes stored in the stockers in the stocker. . Here, the stacker crane can travel in the left-right direction in FIG. For this reason, it is possible to perform the process by each process line 20, 30, 40, 50 in arbitrary order with respect to the base material 70 accommodated in the cassette.

  Among the processing lines 20, 30, 40, and 50 described above, the processing line 20 is the light shielding layer processing line 20 for forming the light shielding layer 74 in a predetermined pattern on the base material 70. As shown in FIG. 2, the light shielding layer processing line 20 includes a coating device 21 that applies a light shielding layer material 74 a onto a base material 70, and a hot plate that solidifies the applied light shielding layer material 74 a by heating ( HP) 22, a cold plate (CP) 23 that cools the heated substrate 70 and the light shielding layer material 74a, an exposure device 24 that exposes the light shielding layer material 74a in a predetermined pattern, and an exposed light shielding layer The developing device 25 that develops the material 74 a to form the light shielding layer 74 and the baking device 26 that heat-treats the formed light shielding layer 74 are provided.

  The processing line 30 is a first coloring processing line 30 for forming a red colored layer (first colored layer) 71 in a predetermined pattern on the substrate 70. As shown in FIG. 2, the first coloring processing line 30 includes a coating device 31 that applies a red colored layer material (first colored layer material) 71 a onto a base material 70, and a coated red colored layer. A hot plate (HP) 32 that solidifies the material 71a by heating, a cold plate (CP) 33 that cools the heated base material 70 and the red colored layer material 71a, and a red colored layer material 71a are exposed in a predetermined pattern. And an exposure device 34 for performing the above operation. As will be described later, the exposed red colored layer material 71a is developed by the developing device 25 together with the exposed light shielding layer material 74a, whereby the red colored layer 71 is formed.

  The processing line 40 is a second coloring processing line 40 for forming a green coloring layer (second coloring layer) 72 in a predetermined pattern on the base material 70. As shown in FIG. 2, the second coloring treatment line 40 includes a coating device 41 for coating a green colored layer material (second colored layer material) 72 a on a substrate 70, and a coated green colored layer. The hot plate (HP) 42 that solidifies the material 72a by heating, the cold plate (CP) 43 that cools the heated base material 70 and the green colored layer material 72a, and the green colored layer material 72a are exposed in a predetermined pattern. An exposure device 44 for developing, a developing device 45 for developing the exposed green colored layer material 72a to form the green colored layer 72, a baking device 46 for performing heat treatment on the formed green colored layer 72, have.

  The processing line 50 is a third coloring processing line 50 for forming a blue colored layer (third colored layer) 73 in a predetermined pattern on the substrate 70. Similarly to the second coloring processing line 40, the third coloring processing line 50 is also applied with a coating device 51 for applying a blue colored layer material (third colored layer material) 73a on the substrate 70, and the applied blue coloring. A hot plate (HP) 52 that solidifies the layer material 73a by heating, a cold plate (CP) 53 that cools the heated base material 70 and the blue colored layer material 73a, and the blue colored layer material 73a in a predetermined pattern An exposure device 54 for exposing in blue, a developing device 55 for developing the exposed blue colored layer material 73a to form the blue colored layer 73, and a baking device 56 for performing a heat treatment on the formed blue colored layer 73. And have.

  Although not shown, each processing line 20, 40, 50 may further include a cleaning device for cleaning (rinsing) the base material 70 after the development processing by the developing devices 25, 45, 55. Good. Moreover, in each processing line 20, 30, 40, 50, a drying apparatus, a further washing | cleaning apparatus, etc. may be provided suitably.

  Next, the operation of the present embodiment having such a configuration will be described. Here, the manufacturing method of the color filter 60 will be described first, and then the operation of the color filter 60 will be described.

Manufacturing Method of Color Filter A manufacturing process of the color filter 60 will be described with reference to FIGS. 2, 3A to 3D, and 4A to 4E.
FIG. 3A is a diagram illustrating processing performed by the first coloring processing line 30 of the color filter manufacturing system 1, and FIG. 3B illustrates processing performed by the light shielding layer processing line 20. FIG. 3C is a diagram illustrating a process performed by the second coloring process line 40, and FIG. 3D is a diagram illustrating a process performed by the third coloring process line 50. is there. 3 (a) to 3 (d), the right side shows the procedure of processing performed in each processing line, and the left side of the substrate 70 after processing by each processing line is performed. A longitudinal section is shown.
4 (a) to 4 (c) are diagrams showing the process performed by the first coloring process line 30 in more detail, and FIGS. 4 (d) to 4 (e) are the process lines 20 for the light shielding layer. It is a figure which shows the process implemented by this in detail. 4A to 4E, the right side shows a plan view of the base material 70 being processed as viewed from above, and the left side is a longitudinal sectional view of the base material 70 being processed. It is shown.

  First, the base material 70 is accommodated in the stocker of the core device 10 of the color filter manufacturing system 1. Next, the base material 70 in the stocker is transported into the first coloring treatment line 30 by the stacker crane of the core device 10.

(Processing by the first coloring processing line)
Next, as shown in FIG. 3A and FIG. 4A, the red colored layer material 71 a is applied onto the base material 70 by the coating device 31 of the first coloring processing line 30. The method for applying the red colored layer material 71a onto the base material 70 is not particularly limited, and a spin coating method, a casting method, a dipping method, a bar coating method, a blade coating method, a roll coating method, a gravure coating method, a flexo coating method. A printing method, a spray coating method, or the like can be used as appropriate.

  Thereafter, as shown in FIG. 3A, the applied red colored layer material 71a is solidified by heating with a hot plate 32, and then the heated substrate 70 and red colored layer are heated with a cold plate 33. The material 71a is cooled. The temperature at the time of heating or cooling is appropriately set according to the composition of the red colored layer material 71a.

Next, as shown in FIG. 3A and FIG. 4B, the exposure device 34 causes the base material 70 to be red in regions corresponding to the light shielding portion 64 and the red colored portion 61 of the color filter 60 described above. The red colored layer material 71a is exposed through the mask 81 so that the colored layer material 71a remains. In this way, the exposed red colored layer material 71a is formed on the base material 70 as shown on the left side of FIG.
In the present embodiment, as described above, a negative photosensitive resin is used as the photosensitive resin constituting the red colored layer material 71a (red colored layer 71). Therefore, in the step of exposing the red colored layer material 71a, the red colored layer material 71a applied to the regions corresponding to the light shielding portion 64 and the red colored portion 61 is exposed. As shown in FIG. 4A, the mask 81 includes an opening 81a formed in a region corresponding to the light shielding portion 64 and the red colored portion 61, and a shielding portion 81b formed in the other region. have.

(Treatment by shading layer processing line)
Thereafter, the base material 70 on which the exposed red colored layer material 71a is formed is conveyed from the first colored processing line 30 to the light shielding layer processing line 20 by the stacker crane of the core device 10. Next, as shown in FIGS. 3B and 4C, the light shielding layer material 74 a is applied onto the exposed red colored layer material 71 a by the coating device 21 of the light shielding layer processing line 20. . The method for applying the light shielding layer material 74a is not particularly limited, and various application methods can be used as appropriate as in the case of the red colored layer material 71a.

  After that, as shown in FIG. 3B, the applied light shielding layer material 74a is solidified by heating with the hot plate 22, and then the substrate 70 and the light shielding layer material heated with the cold plate 23 are heated. Cool 74a. The temperature at the time of heating or cooling is appropriately set according to the composition of the light shielding layer material 74a.

Next, as shown in FIGS. 3B and 4D, the light shielding layer material 74 a is applied to the region corresponding to the light shielding portion 64 of the color filter 60 in the base material 70 by the exposure device 24. The light shielding layer material 74a is exposed through the mask 84 so as to remain.
In the present embodiment, as described above, a negative photosensitive resin is used as the photosensitive resin constituting the light shielding layer material 74a (light shielding layer 74). Therefore, in the step of exposing the light shielding layer material 74a, the light shielding layer material 74a applied to the region corresponding to the light shielding portion 64 is exposed. As shown in FIG. 4D, the mask 84 has an opening 84a formed in a region corresponding to the light shielding portion 64 and a shielding portion 84b formed in the other region. .

Next, the exposed red colored layer material 71 a and the exposed light shielding layer material 74 a formed on the base material 70 are developed by the developing device 25. As a result, as shown in FIGS. 3B and 4E, the light shielding layer 74 and the red colored layer 71 are formed in the region corresponding to the light shielding portion 64, and at the same time, the region corresponding to the red colored portion 61. Thus, a red colored layer 71 is formed. The developing solution used in the developing treatment is not particularly limited, and a general developing solution capable of removing the unexposed negative photosensitive resin, for example, an alkaline aqueous solution is used. Examples of the alkaline substance contained in the alkaline aqueous solution include alkali metal hydroxides such as potassium hydroxide and alkali metal carbonates such as sodium carbonate.
Thereafter, the fired device 26 heat-treats the formed red colored layer 71 and the light shielding layer 74.

(Processing by the second coloring processing line)
Thereafter, the base material 70 is transported from the light shielding layer processing line 20 to the second coloring processing line 40 by the stacker crane of the core device 10. Next, as shown in FIG. 3C, the green coloring layer 72 is formed in the region corresponding to the green coloring portion 62 by the second coloring processing line 40.
In this case, as in the case of the processing by the light shielding layer processing line 20, first, the green coloring layer material 72 a is applied by the coating device 41, heated by the hot plate 42, and cooled by the cold plate 43. Thereafter, the green colored layer material 72a is exposed by the exposure device 44, developed by the developing device 45, and baked by the baking device 46. As a result, a green colored layer 72 is formed in a region corresponding to the green colored portion 62 as shown on the left side of FIG.
In addition, each process in the 2nd coloring process line 40 is substantially the same as each process in the above-mentioned process line 20 for light shielding layers, and detailed description is abbreviate | omitted.

(Processing by the third coloring processing line)
Thereafter, the base material 70 is transported from the second coloring processing line 40 to the third coloring processing line 50 by the stacker crane of the core device 10. Next, as shown in FIG. 3D, a blue coloring layer 73 is formed in a region corresponding to the blue coloring portion 63 by the third coloring processing line 50.
Also in this case, as in the case of the processing by the light shielding layer processing line 20, first, the blue colored layer material 73 a is applied by the coating device 51, heated by the hot plate 52, and cooled by the cold plate 53. . Thereafter, the exposure by the exposure device 54, the development by the developing device 55, and the baking by the baking device 56 are performed on the blue colored layer material 73a.
As a result, a blue colored layer 73 is formed in a region corresponding to the blue colored portion 63, as shown on the left side of FIG.
In addition, each process in the 3rd coloring process line 50 is also substantially the same as each process in the above-mentioned process line 20 for light shielding layers, and detailed description is abbreviate | omitted.

In this way, as shown on the left side of FIG. 3D, the light shielding portion 64 including the light shielding layer 74 and the red colored layer 71, the red colored portion 61 including the red colored layer 71, and the green colored layer 72 are provided. A color filter 60 having the green colored portion 62 including the blue colored portion 63 including the blue colored layer 73 is formed. In this case, in the present embodiment, as described above, the developing process and the baking process for the exposed light-shielding layer material 74a and the developing process and the baking process for the exposed red colored layer material 71a are light-shielding. Simultaneously in the layer processing line 20. For this reason, compared with the case where the development process and baking process for the exposed light shielding layer material 74a and the development process and baking process for the exposed red colored layer material 71a are performed in separate processing lines, respectively. The number of development processes and baking processes in the color filter manufacturing method can be reduced. Thereby, the time required for manufacturing the color filter 60 can be shortened.
Further, according to the present embodiment, in the color filter manufacturing system 1, it is not necessary to provide a developing device and a baking device in the first coloring processing line 30. For this reason, the cost for constructing the color filter manufacturing system 1 can be reduced.

Further, according to the present embodiment, as described above, the light shielding portion 64 of the color filter 60 includes the base material 70, the light shielding layer 74, and the red colored layer provided between the base material 70 and the light shielding layer 74. 71. For this reason, compared with the case where the red coloring layer 71 is not provided between the base material 70 and the light shielding layer 74, the optical density in the light shielding part 64 can be made high.
The optical density (OD value) is a value having a relationship represented by “OD value = −log T” with the light transmittance T. For example, when the light transmittance in the light shielding portion 64 is 0.01, the OD value is 2. Further, when the light transmittance in the light shielding portion 64 is 0.001, the OD value is 3. That is, the high optical density in the light shielding portion 64 means that the light transmittance in the light shielding portion 64 is small.

Comparison Mode Next, the effects of the present invention will be described in comparison with the comparison mode with reference to FIGS. FIGS. 5A to 5D are diagrams showing a color filter manufacturing method according to a comparative embodiment. In the comparison mode shown in FIGS. 5A to 5D, the same parts as those in the present embodiment shown in FIGS.

  First, the color filter 100 according to the comparative example will be described. As illustrated in FIG. 5D, the color filter 100 includes a light shielding portion 104 and a red colored portion 61, a green colored portion 62, and a blue colored portion 63 provided between the light shielding portions 104. Among these, the light shielding portion 104 includes a base material 70 and a light shielding layer 74 as shown in FIG. That is, the light-shielding portion 104 in the comparative form shown in FIG. 5D is different from the light-shielding portion 64 in the present embodiment shown in FIGS. 71 is not provided. For this reason, the OD value of the light shielding portion 104 in the comparative embodiment is smaller than the OD value of the light shielding portion 64 in the present embodiment.

  Next, with reference to FIGS. 5A to 5D, a color filter manufacturing method according to a comparative example will be described. First, as shown in FIG. 5A, a light shielding layer 74 is formed in a region corresponding to the light shielding portion 104. In this case, first, application of the light shielding layer material 74a, heating with a hot plate, and cooling with a cold plate are performed. Thereafter, an exposure process, a development process, and a baking process are performed on the light shielding layer material 74a. As a result, a light shielding layer 74 is formed in a region corresponding to the light shielding portion 104 as shown on the left side of FIG.

  Next, as shown in FIG. 5B, a red colored layer 71 is formed in a region corresponding to the red colored portion 61. In this case, first, application of the red colored layer material 71a, heating with a hot plate, and cooling with a cold plate are performed. Thereafter, an exposure process, a development process, and a baking process are performed on the red colored layer material 71a. As a result, a red colored layer 71 is formed in a region corresponding to the red colored portion 61 as shown on the left side of FIG.

  Thereafter, as in the case of the red colored layer 71 shown in FIG. 5B, a green colored layer 72 is formed in a region corresponding to the green colored portion 62 (see FIG. 5C), and then the blue colored A blue colored layer 73 is formed in a region corresponding to the portion 63 (see FIG. 5D). As a result, as shown on the left side of FIG. 5D, the color filter 100 in the comparative form is formed.

  As described above, according to the comparative embodiment, the developing process and the baking process for the exposed red colored layer material 71a and the developing process and the baking process for the exposed light shielding layer material 74a are performed separately. For this reason, according to the comparative form, in the process of forming the colored layers 71, 72, 73 and the shielding layer 74 on the base material 70, the development process and the baking process are each performed four times.

  In contrast, according to the present embodiment, as described above, first, the exposed red colored layer material 71a is formed on the base material 70, and then the exposed red colored layer material 71a. An exposed light shielding layer material 74a is formed on the substrate. Thereafter, the exposed red colored layer material 71a and the exposed light-shielding layer material 74a are simultaneously developed and fired simultaneously. For this reason, according to this Embodiment, in the process of forming each colored layer 71, 72, 73 and the shielding layer 74 on the base material 70, the development process and the baking process are each performed three times. That is, according to the present embodiment, the number of times of development processing and baking processing can be reduced by one each compared with the comparative embodiment. Thereby, the time required for manufacturing the color filter 60 can be shortened.

  In this embodiment, first, a red colored layer (first colored layer) 71 and a light shielding layer 74 are formed, and then a green colored layer (second colored layer) 72 and a blue colored layer (third colored layer). In this example, 73 is formed. However, the present invention is not limited to this, and it is only necessary that the exposed first colored layer material is formed on the base material 70 before the light shielding layer material is applied on the base material 70. As a result, the development process can be simultaneously performed on the first colored layer material and the light shielding layer material, and the baking process can be simultaneously performed. Hereinafter, a modified example of the present embodiment will be described with reference to FIG. 6 or FIG.

Referring to the modified example 6 of the embodiment (a) ~ (d), it will be described color filter manufacturing method according to a modification of this embodiment. In this case, first, a green coloring layer 72 is formed in a region corresponding to the green coloring portion 62 (see FIG. 6A), and then a blue coloring layer 73 is formed in a region corresponding to the blue coloring portion 63 (see FIG. 6A). (Refer FIG.6 (b)). The method for forming the colored layers 72 and 73 is the same as that in the present embodiment shown in FIGS.

  Next, as shown in FIG. 6C, a red colored layer material 71 a is applied onto the base material 70 and the colored layers 72 and 73 by the coating device 31. Thereafter, heating by the hot plate 32 and cooling by the cold plate 33 are performed on the red colored layer material 71a. Next, as shown in FIG. 6C, the red colored layer material 71a is exposed through the mask 81 so that the red colored layer material 71a remains in the region corresponding to the light shielding portion 64 and the red colored portion 61. .

  Next, as illustrated in FIG. 6D, the light shielding layer material 74 a is applied onto the exposed red colored layer material 71 a by the coating device 21. Thereafter, the light shielding layer material 74 a is heated by the hot plate 22 and cooled by the cold plate 23. Next, as illustrated in FIG. 6D, the light shielding layer material 74 a is exposed through the mask 84 so that the light shielding layer material 74 a remains in the region corresponding to the light shielding portion 64.

  Next, the exposed red colored layer material 71 a and the exposed light shielding layer material 74 a formed on the base material 70 are developed by the developing device 25. As a result, as shown on the left side of FIG. 6D, the light shielding layer 74 and the red colored layer 71 are formed in the region corresponding to the light shielding portion 64, and at the same time, the red colored layer is formed in the region corresponding to the red colored portion 61. 71 is formed. Thereafter, the fired device 26 heat-treats the formed red colored layer 71 and the light shielding layer 74.

  As described above, according to the present modification, the exposed red colored layer material 71a and the exposed light shielding layer material 74a are simultaneously developed and baked simultaneously. For this reason, compared with the case where the development process and the baking process for the exposed light-shielding layer material 74a and the development process and the baking process for the exposed red colored layer material 71a are performed separately, a color filter is manufactured. The number of development treatments and baking treatments in the method can be reduced.

Other Modifications of the Present Embodiment Next, a color filter manufacturing method in other modifications of the present embodiment will be described with reference to FIGS. 7 (a) to (d). The manufacturing method of the color filter shown in FIGS. 7A to 7D is different in that the blue colored layer 73 is formed after the red colored layer 71 and the light shielding layer 74 are formed. This is substantially the same as the modification of the present embodiment shown in (a) to (d). For this reason, also in the present modification, the exposed red colored layer material 71a and the exposed light shielding layer material 74a can be simultaneously developed and baked simultaneously. As a result, the color filter is compared with the case where the developing process and baking process for the exposed light shielding layer material 74a and the developing process and baking process for the exposed red colored layer material 71a are performed separately. The number of development processes and baking processes in the manufacturing method can be reduced.

  In each of the above embodiments, an example in which the first colored layer formed together with the light shielding layer 74 by one development process is formed of the red colored layer 71 is shown. However, the present invention is not limited to this, and the first colored layer may include the green colored layer 72 or the blue colored layer 73.

Further, in each of the above embodiments, the example in which the color filter 60 includes the three color layers 71, 72, and 73 is shown. However, the color filter is not limited to this, and the color filter may have only one colored layer. In this case, the colored layer is formed together with the light shielding layer 74 by a single development process.
Alternatively, the color filter may have two or more colored layers. In this case, one colored layer of the plurality of colored layers is formed together with the light shielding layer 74 by one development process.

Moreover, in each said embodiment, the photosensitive resin which comprises the red colored layer material (1st colored layer material) 71a showed the example which consists of negative photosensitive resin hardened | cured by exposure. However, the present invention is not limited to this, and the photosensitive resin constituting the red colored layer material (first colored layer material) 71a may be made of a positive photosensitive material that is softened by exposure. In this case, in the step of exposing the red colored layer material 71a, the red colored layer material 71a applied to a region other than the region corresponding to the light shielding portion 64 and the red colored portion 61 is exposed.
For this reason, the red coloring layer 71 can be formed in the area | region corresponding to the light-shielding part 64 and the red coloring part 61 by subsequent image development processing.

  Further, in each of the above-described embodiments, an example has been shown in which the photosensitive resin constituting the light shielding layer material 74a is made of a negative photosensitive resin that is cured by exposure. However, the present invention is not limited to this, and the photosensitive resin constituting the light shielding layer material 74a may be made of a positive photosensitive material that is softened by exposure. In this case, in the step of exposing the light shielding layer material 74a, the light shielding layer material 74a applied to a region other than the region corresponding to the light shielding portion 64 is exposed. For this reason, the light shielding layer 74 can be formed in a region corresponding to the light shielding portion 64 by a later development process.

  In each of the above embodiments, an example in which the developing device and the baking device are not provided in the first coloring processing line 30 is shown. However, the present invention is not limited to this, and the first coloring processing line 30 may include a developing device 35 and a baking device 36 as indicated by a dotted line in FIG. In this case, as shown in FIG. 2, the first coloring processing line 30 is provided with a bypass line 37 for returning the base material that has passed through the exposure apparatus 34 to the core apparatus. For this reason, the base material 70 on which the exposure processing for the red colored layer material 71 a is performed by the exposure device 34 is returned to the core device 10 by bypassing the developing device 35 and the baking device 36.

  In each of the above-described embodiments, the processing lines 20, 30, 40, and 50 are respectively provided with hot plates (HP) 22, 32, 42, and 52 for performing heat treatment, and cold plates (CP) 23 for performing cooling processing. , 33, 43, 53 are shown as examples. However, the present invention is not limited to this, and each processing line 20, 30, 40, 50 may not have a hot plate (HP) and a cold plate (CP). That is, in each processing line 20, 30, 40, 50, the heating process and the cooling process between the coating process and the exposure process may be omitted. For example, when the material applied on the substrate 70 is easily solidified, the heat treatment and the cooling treatment can be omitted.

DESCRIPTION OF SYMBOLS 1 Color filter manufacturing system 10 Core apparatus 20 Shading layer processing line 21 Coating apparatus 22 Hot plate 23 Cold plate 24 Exposure apparatus 25 Development apparatus 26 Baking apparatus 30 First coloring processing line 31 Coating apparatus 32 Hot plate 33 Cold plate 34 Exposure apparatus 37 Bypass line 40 Second coloring processing line 41 Coating device 42 Hot plate 43 Cold plate 44 Exposure device 45 Developing device 46 Baking device 50 Third coloring processing line 51 Coating device 52 Hot plate 53 Cold plate 54 Exposure device 55 Developing device 56 Baking Device 60 Color filter 61 Red colored portion 62 Green colored portion 63 Blue colored portion 64 Light shielding portion 70 Base material 71 Red colored layer 71a Red colored layer material 72 Green colored layer 72a Green Colored layer material 73 Blue colored layer 73a Blue colored layer material 74 Light-shielding layer 74a Light-shielding layer material 81 Red colored layer material mask 81a Mask opening 81b Mask shielding part 84 Light-shielding layer material mask 84a Mask Opening 84b Mask shielding part 100 Color filter 104 Light shielding part

Claims (4)

In a color filter having a base material, a light shielding layer formed on the base material, a first colored layer, a second colored layer, and a third colored layer,
When the color filter is viewed from the normal direction, the color filter is divided into a light shielding portion that shields incident light, and a first colored portion, a second colored portion, and a third colored portion provided between the light shielding portions, The first colored portion includes the base material, and a first colored layer formed on the base material,
The second colored portion includes the base material and a second colored layer formed on the base material,
The third colored portion includes the base material and a third colored layer formed on the base material,
The light shielding part includes the base material, a first colored layer formed on the base material, and a light shielding layer formed on the first colored layer,
The colors of the first colored layer, the second colored layer, and the third colored layer are different from each other,
The color filter further includes a spacer formed on the light-shielding portion in order to keep a constant distance from the display substrate arranged to face the color filter,
The color filter, wherein the spacer is formed by laminating the second colored layer and the third colored layer on the light shielding layer.   The color filter according to claim 1, wherein the light shielding layer is a layer provided only in the light shielding portion.   The color filter according to claim 1, wherein the light shielding layer includes light shielding particles made of carbon fine particles, a metal oxide, an inorganic pigment, or an organic pigment.   The color filter according to claim 3, wherein the light shielding particles are made of carbon fine particles or a metal oxide.

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