JP5780746B2 - 塗布液の塗布装置 - Google Patents

塗布液の塗布装置 Download PDF

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Publication number
JP5780746B2
JP5780746B2 JP2010277979A JP2010277979A JP5780746B2 JP 5780746 B2 JP5780746 B2 JP 5780746B2 JP 2010277979 A JP2010277979 A JP 2010277979A JP 2010277979 A JP2010277979 A JP 2010277979A JP 5780746 B2 JP5780746 B2 JP 5780746B2
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coating
stirring
coating liquid
container
application
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Expired - Fee Related
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JP2010277979A
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Japanese (ja)
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JP2012125677A5 (https=
JP2012125677A (ja
Inventor
鈴木　祐司
祐司 鈴木
今川　和彦
和彦 今川
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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Priority to JP2010277979A priority Critical patent/JP5780746B2/ja
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Publication of JP2012125677A5 publication Critical patent/JP2012125677A5/ja
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JP2010277979A 2010-12-14 2010-12-14 塗布液の塗布装置 Expired - Fee Related JP5780746B2 (ja)

Priority Applications (1)

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JP2010277979A JP5780746B2 (ja) 2010-12-14 2010-12-14 塗布液の塗布装置

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JP2010277979A JP5780746B2 (ja) 2010-12-14 2010-12-14 塗布液の塗布装置

Publications (3)

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JP2012125677A JP2012125677A (ja) 2012-07-05
JP2012125677A5 JP2012125677A5 (https=) 2014-02-06
JP5780746B2 true JP5780746B2 (ja) 2015-09-16

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JP2010277979A Expired - Fee Related JP5780746B2 (ja) 2010-12-14 2010-12-14 塗布液の塗布装置

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5917925B2 (ja) * 2012-01-27 2016-05-18 武蔵エンジニアリング株式会社 液滴形成装置および液滴形成方法
JP6055785B2 (ja) * 2012-02-06 2017-01-11 武蔵エンジニアリング株式会社 液体材料の吐出装置および吐出方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06151294A (ja) * 1992-11-05 1994-05-31 Hitachi Ltd ホトレジスト塗布装置
JP2006260708A (ja) * 2005-03-18 2006-09-28 Canon Inc 光ピックアップ装置及びその重心位置の調整方法
JP2009178690A (ja) * 2008-02-01 2009-08-13 Ricoh Printing Systems Ltd 吐出液の分散方法
JP2009018587A (ja) * 2008-07-25 2009-01-29 Microjet:Kk 吐出装置

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JP2012125677A (ja) 2012-07-05

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