JP5774434B2 - Laser processing equipment - Google Patents

Description

  The present invention relates to a laser processing apparatus that performs processing such as marking, drilling, cutting, and welding on a workpiece by irradiation with laser light.

  As one of laser processing apparatuses of this type, there is known an apparatus that performs desired processing on a workpiece by scanning the workpiece with a laser beam emitted from a laser light source through a galvano scanner. Here, the galvano scanner includes a galvano mirror that reflects the laser light emitted from the laser light source, and a galvano motor in which the galvano mirror is attached to a drive shaft (shaft portion). In the galvano scanner, the galvano mirror is rotated by driving the galvano motor, so that the laser beam reflected by the galvano mirror is scanned on the workpiece. Moreover, the galvano scanner usually includes a bearing that supports the shaft portion of the galvano motor. In addition, if this bearing is a sealing type, for example, it will be lubricated by internal lubricating oil.

  On the other hand, in such a laser processing apparatus, for example, when a plurality of workpieces are processed at the same position, the laser beam scanning operation may be repeated only in a very small part of the processable area. In such a case, since the shaft portion of the galvano motor rotates only in a limited angle range, it becomes difficult to spread the lubricating oil over the entire bearing that supports the shaft portion of the galvano motor. For this reason, unevenness of the lubricating oil occurs in the bearing, and there is a risk that the bearing will become loose due to this. In addition, when the unevenness of the lubricating oil occurs in this way, there is a possibility that the amount of wear locally increases in the portion where the lubricating oil is insufficient, which is also a factor that causes the rattling of the bearing. . When the bearing is rattled, the galvanometer mirror is rattled, which may reduce the processing accuracy.

  Therefore, in the laser processing apparatus described in Patent Document 1, the galvano mirror is rotated over the entire rotatable region at the time of activation, so that the lubricating oil is spread over the entire bearing. Thereby, since shakiness of a bearing can be suppressed, the appropriate operation | movement of a galvanometer mirror is maintained and it becomes possible to maintain a processing precision by extension.

JP 2003-191083 A

  By the way, if the galvanometer mirror is rotated over the entire rotatable range at the time of activation as in the laser processing apparatus described in Patent Document 1, the wear of the bearing is promoted during a period when the processing is not performed. . For this reason, there is a concern that the life of the galvano scanner may be shortened, and consequently the life of the laser processing apparatus may be shortened.

  The present invention has been made in view of such circumstances, and an object thereof is to provide a laser processing apparatus capable of extending the life while maintaining the processing accuracy.

  In order to solve the above-mentioned problem, the invention described in claim 1 includes a galvanometer mirror that reflects a laser beam emitted from a laser light source, and a shaft that is rotatably supported by a bearing and to which the galvanometer mirror is attached. And a driving means for rotating the galvanometer mirror by rotating the coaxial section, and rotating the galvanometer mirror through the driving means to reflect the laser beam reflected by the galvanometer mirror on the workpiece. In the laser processing apparatus that performs the desired processing on the workpiece by scanning with, the use frequency is integrated for each of a plurality of rotation positions set in advance with respect to the rotation position of the galvanometer mirror, When it is judged that there is a difference exceeding the predetermined value in the integrated value of the usage frequency of each adjacent rotation position, the adjacent value where the integrated value of the same usage frequency has a difference The refresh operation for rotating the galvano mirror section including the rotational position and summarized in that a control means for executing through the drive means.

  As described above, when the galvano mirror repeatedly rotates within a narrow rotation range, one of the factors that cause unevenness of the lubricating oil in the bearing that supports the shaft portion of the drive means is the rotation position of the galvano mirror. The rotation position with high use frequency and the rotation position with low use frequency are generated. Therefore, if the galvano mirror is rotated between the rotation position where the galvano mirror is frequently used and the rotation position where the galvano mirror is less frequently used, unevenness of the lubricating oil generated in the bearing can be suppressed. In this regard, according to the above configuration, when a difference exceeding a predetermined frequency occurs in the use frequency of each of the adjacent rotation positions among the plurality of rotation positions of the galvanometer mirror set in advance, the rotation positions are changed. Since the refresh operation for rotating the galvanometer mirror is performed within the range, the unevenness of the lubricating oil generated in the bearing can be suppressed. Thereby, rattling of the galvanometer mirror is suppressed, and as a result, machining accuracy can be maintained. Further, if the shaft portion is rotated in a range including a rotation position with high use frequency and a rotation position with low use frequency, the galvano mirror is rotated over the entire rotation range. In comparison, since the wear of the bearing can be suppressed, the life of the galvano scanner can be extended, and as a result, the life of the laser processing apparatus can be extended.

And in this case, according to the invention according to claim 2, whether or not a difference exceeding the predetermined value has occurred in each use frequency of the adjacent rotation positions,
A difference value is calculated for the integrated value of the usage frequencies of the adjacent rotation positions, and the difference value is compared with the predetermined value.
Alternatively, as in the invention according to claim 3,
-Is the integrated value of the frequency of use of each of the adjacent rotation positions and the upper limit threshold set for the integrated value, or is the lower limit threshold set for the integrated value? In comparison, the rotation position that is greater than or equal to the upper limit threshold and the rotation position that is less than or equal to the lower limit threshold are adjacent.
It is effective to adopt such a method. Accordingly, it is possible to easily determine whether or not there is a difference exceeding a predetermined value in the usage frequency of each of the adjacent rotation positions, and thus the invention according to claim 1 can be easily realized. Will be able to.

  According to a fourth aspect of the present invention, in the laser processing apparatus according to any one of the first to third aspects, the control means causes a difference in the integrated value of the use frequency when the refresh operation is performed. The gist is to rotate the galvanometer mirror a plurality of times in a section including adjacent rotating positions.

According to this configuration, the unevenness of the lubricating oil generated in the bearing can be more accurately suppressed, so that the processing accuracy can be maintained high.
According to a fifth aspect of the present invention, in the laser processing apparatus according to any one of the first to fourth aspects, a difference exceeding a predetermined value occurs in the integrated value of the usage frequencies of the adjacent rotational positions. And a warning means for issuing a warning notifying the replacement time on condition that any one of the integrated values of the use frequencies for each rotation position exceeds a preset use upper limit value. And

  According to this configuration, if any of the integrated values of the use frequencies for each rotation position exceeds the use upper limit value, an alarm is issued from the alarm means to notify the replacement time, so that the user can easily change the drive means replacement time. I can know. Therefore, convenience is improved.

  A sixth aspect of the present invention is the laser processing apparatus according to any one of the first to fifth aspects, wherein the control means has a plurality of rotations preset with respect to a rotation position of the galvanometer mirror. The gist is to obtain an integrated value of the use frequency for each position from coordinate data serving as scanning information of the laser beam.

According to this configuration, the usage frequency for each of the plurality of rotation positions of the galvanometer mirror can be easily integrated, so that the invention according to claims 1 to 5 can be easily realized.
A seventh aspect of the present invention is the laser processing apparatus according to any one of the first to fifth aspects, further comprising a rotational position detecting means for detecting a rotational position of the galvanometer mirror, wherein the control means is The gist of the present invention is to obtain a use frequency for each of a plurality of rotation positions preset with respect to the rotation position of the galvanometer mirror from a rotation angle detected by the rotation position detecting means.

  If the rotation position detection means for detecting the rotation position of the galvanometer mirror is further provided as in the same configuration, the rotation position of the galvanometer mirror can be detected with high accuracy. The use frequency for each rotation position can be detected more accurately. As a result, the refresh operation can be performed more appropriately, so that the unevenness of the lubricating oil generated in the bearing is further suppressed, and as a result, the processing accuracy can be maintained higher.

  According to the laser processing apparatus of the present invention, it is possible to extend the life while maintaining the processing accuracy.

The figure which shows typically the schematic structure about one Embodiment of the laser processing apparatus concerning this invention. The block diagram which shows the structure about the laser processing apparatus of the embodiment. The figure which shows the structure typically about the galvano scanner of the laser processing apparatus of the embodiment. The figure which shows typically the processable area | region about the laser processing apparatus of the embodiment. The figure which shows typically the printing aspect to a workpiece | work about the laser processing apparatus of the embodiment. The figure which shows the relationship between the setting position of the X coordinate and Y coordinate of a processable area | region, and the counter which a control apparatus has about the laser processing apparatus of the embodiment. The flowchart which shows the process sequence of the use frequency integration process by the laser processing apparatus of the embodiment. The figure which shows the increase aspect of the counter of a control apparatus about the laser processing apparatus of the embodiment. 6 is a flowchart showing a processing procedure of refresh processing by the laser processing apparatus of the embodiment. The graph which shows each value of counter CX (1) -CX (11) with a histogram about the laser processing apparatus of the embodiment. The graph which shows each value of counter CX (1) -CX (11) with a histogram about the other example of the laser processing apparatus concerning this invention. The graph which shows each value of counter CX (1) -CX (11) with a histogram about the other example of the laser processing apparatus concerning this invention.

  Hereinafter, an embodiment of a laser processing apparatus according to the present invention will be described with reference to FIGS. First, with reference to FIG. 1, the outline | summary of the laser processing apparatus concerning this embodiment is demonstrated.

  As shown in FIG. 1, in this laser processing apparatus, when a user operates an operation unit (operation means) 30 provided on the console 3 to input characters, figures, or the like to be printed on the workpiece W, an image image after printing is obtained. Is displayed on the display unit 31 of the console 3. When the user confirms the image and then operates the operation unit 30 to perform a print start operation, the controller 1 generates laser light. The laser light is incident on the head unit 2 from the controller 1 through the optical fiber 6 and is emitted from the window 4 of the head unit 2 toward the mounting table 8. And the character etc. are printed on the workpiece | work W by irradiating the workpiece | work W mounted in the mounting base 8 with the laser beam L radiate | emitted from the head part 2. FIG. The console 3 and the controller 1 are connected via an electric cable 7, and the drive of the console 3 is controlled by the controller 1. The controller 1 and the head unit 2 are connected via an electric cable 5, and the driving of the head unit 2 is controlled by the controller 1. Further, the controller 1 is provided with a power switch (not shown) so that the power of the laser processing apparatus can be turned on / off by operating the power switch.

Next, the configuration of the laser processing apparatus will be described in detail with reference to FIG.
As shown in FIG. 2, the controller 1 includes a laser light source 11 that emits laser light to the head unit 2 via an optical fiber 6, and a speaker 12 that serves as an alarm unit that issues an alarm to the user. The laser light source 11 is configured by a laser oscillator such as a YAG laser. The controller 1 includes a control device (control means) 10 that is configured by a microcomputer and controls driving of the laser light source 11 and the speaker 12. The control device 10 is also a part that controls driving of the display unit 31 by transmitting a drive signal to the display unit 31 of the console 3 via the electric cable 7. Further, the control device 10 is configured to receive input information input to the operation unit 30 of the console 3 through the electric cable 7. The control device 10 includes a non-volatile memory 10a, and marking information such as printable characters is stored in the memory 10a. This marking information includes information such as the coordinate values of the start point and end point of each line segment constituting the character, etc., and the thickness of the line segment formed by laser light irradiation.

  On the other hand, the head unit 2 reflects the laser beam incident from the controller 1 via the optical fiber 6 to a beam diameter, and the laser beam expanded by the beam expander 21 to reflect the workpiece W. A pair of galvanometer mirrors 22 and 23 to be scanned is provided.

  As shown in FIG. 3, the first galvanometer mirror 22 is attached to a shaft portion 24a of a first galvanometer motor 24 serving as a driving means. Note that the shaft portion 24a of the first galvano motor 24 is rotatably supported by a bearing 24b provided in the first galvano motor 24, so that the shaft portion 24a is disposed on the axis m1 in the drawing. That is, the first galvanometer mirror 22 is rotated in the forward and reverse directions around the axis line m <b> 1 by driving the first galvanometer motor 24. On the other hand, the second galvanometer mirror 23 is attached to a shaft portion 25a of a second galvanometer motor 25 as drive means. Note that the shaft portion 25a of the second galvano motor 25 is rotatably supported by a bearing 25b provided in the second galvano motor 25, so that the shaft line m1 and the axis line m2 which is a twisted position are placed on the shaft line m2. Has been placed. That is, the second galvanometer mirror 23 is rotated in the forward and reverse directions around the axis m <b> 2 by driving the second galvanometer motor 25. And as shown with a dashed-two dotted line in a figure, the 1st and 2nd galvanometer mirrors 22 and 23 reflect the laser beam L from the beam expander 21, and change the emitting direction. That is, the first galvanometer mirror 22 scans the laser light L in the X-axis direction in the drawing by rotating. Further, the second galvanometer mirror 23 scans the laser light L in the Y-axis direction in the drawing by rotating. As described above, in the head unit 2, the first and second galvanometer mirrors 22 and 23 are rotated by the first and second galvanometer motors 24 and 25, thereby performing two-dimensional scanning of the laser beam L on the workpiece W. It is possible. In the present embodiment, the irradiation range of the laser beam L is set to a region (processable region) A surrounded by a chain line in the drawing by scanning the laser beam L through the pair of galvanometer mirrors 22 and 23. Yes. Further, the bearings 24b and 25b are sealed types that are lubricated by the internal lubricating oil. Further, as shown in FIG. 2, the driving of the first and second galvano motors 24 and 25 is controlled by the control device 10 provided in the controller 1. The first and second galvano mirrors 22 and 23, the first and second galvano motors 24 and 25, and the control device 10 constitute a galvano scanner 9.

  On the other hand, the head unit 2 includes a condensing lens 26 that converges the laser light reflected by the pair of galvanometer mirrors 22 and 23 to a predetermined spot diameter in the workpiece W and increases the energy density suitable for the laser light. Then, the workpiece W is irradiated with the laser beam converged through the condenser lens 26, whereby the workpiece W is marked.

  In the laser processing apparatus configured as described above, for example, when the user operates the operation unit 30 to process the letter “A” on the workpiece W, the laser processing apparatus operates as follows. First, when the user inputs information necessary for printing, for example, input information such as characters to be printed and a processing start position on the workpiece W, to the operation unit 30, the input information is input to the control device 10 via the electric cable 7. Communicated. In the present embodiment, as shown in FIG. 4, the processable area A is set in a coordinate system in the X-axis direction and the Y-axis direction, and the processing start position is the value of the X coordinate in the XY coordinate system. And the value of the Y coordinate. Further, the positions that can be set as the machining start position are positions indicated by integer values in the X coordinate and the Y coordinate. That is, the machining start position is set as (1, 1) corresponding to the coordinate Ps in the drawing, for example.

  And control device 10 will read marking information from memory 10a based on information, such as a printing character contained in the input information, if input information is transmitted from operation part 30. Then, based on the read marking information and information on the machining start position included in the input information, coordinate data serving as scanning information of the laser beam when machining the workpiece W is generated. Here, for example, when the print character is “A” and the processing start position is the coordinate Ps illustrated in FIG. 4, the coordinate data is generated as shown in FIG. 5. That is, a non-line segment vector L0 having the current coordinate P0 as the start point and the coordinate Ps as the end point, a line segment vector L1 having the coordinate Ps as the start point and the coordinate P1 as the end point, and a line having the coordinate P1 as the start point and the coordinate P2 as the end point A segment vector L2, a non-segment vector L3 having a coordinate P2 as a start point and a coordinate P3 as an end point, and a line segment vector L4 having a coordinate P3 as a start point and a coordinate P4 as an end point are generated. In addition, the direction of the arrow of each line segment vector and non-line segment vector shown in FIG. Then, when the coordinate data is generated in this way, the control device 10 displays an image of marking based on the coordinate data on the display unit 31 and displays characters such as “Do you want to start printing?” On the display unit 31. . Thereafter, when detecting a printing start operation on the operation unit 30, the control device 10 starts printing on the workpiece W based on the coordinate data. At this time, the control device 10 first generates galvano data for controlling the rotation of the first and second galvanometer mirrors 22 and 23 based on the coordinate data. Thereafter, while controlling the driving of the first and second galvano motors 24 and 25 based on the galvano data, the laser light source 11 is in a period during which the irradiation position of the laser light L is moving the line segment vectors L1, L2, and L4. The laser beam L is emitted from the laser beam L, and the emission of the laser beam L from the laser light source 11 is stopped during other periods, thereby printing the letter “A” or the like on the workpiece W.

  On the other hand, every time printing is performed on the workpiece W, the control device 10 accumulates the usage frequency (number of times of use) of each position of the X coordinate and the Y coordinate based on the coordinate data corresponding to the character to be printed. The position where the use frequency is integrated is a position indicated by integers in the X coordinate and Y coordinate exemplified in FIG. That is, for the X coordinate, “−5”, “−4”, “−3”, “−2”, “−1”, “0”, “1”, “2”, “3”, “4” ”And“ 5 ”are accumulated for the number of times used. The Y coordinate is also “−5”, “−4”, “−3”, “−2”, “−1”, “0”, “1”, “2”, “3”, and “4”. ”And“ 5 ”are accumulated for the number of times used. Note that the control device 10 includes counters CX (1) to CX (11) corresponding to the set positions of the X-axis coordinates as shown in FIG. 6, and a counter CY (1) corresponding to the set positions of the Y-axis coordinates. ~ CY (11) are provided, and the number of uses is integrated using these counters. Further, in the present embodiment, paying attention to the fact that there is a correlation between each set position of the X coordinate and the rotation position of the first galvanometer mirror 22, each set position of the X coordinate is set to the first galvanometer. The mirror 22 is used to indicate a plurality of rotational positions. Each set position of the Y coordinate is used to indicate a plurality of rotational positions of the second galvanometer mirror 23.

  And the control apparatus 10 is based on the value of counter CX (1) -CX (11), CY (1) -CY (11), when the ON operation of the power switch provided in the controller 1 is detected. It is determined whether or not a difference exceeding a predetermined value ΔNth has occurred in the integrated value of the usage frequencies of the adjacent setting positions among the X coordinate and Y coordinate setting positions. When there is a difference exceeding the predetermined value ΔNth, refresh is performed to rotate the first and second galvanometer mirrors 22 and 23 in the adjacent set position section where the difference in the integrated value of the usage frequency occurs. Perform the action.

  Next, a process for integrating the use frequency of each set position of the X coordinate and the Y coordinate and a process for performing a refresh operation, which are executed through the control device 10, will be described in detail. First, the use frequency integration process will be described with reference to FIG.

  As shown in FIG. 7, in this process, it is monitored whether or not printing on the workpiece W has started (step S1). When printing on the workpiece is started (step S1: YES), the counters CX (1) to CX (11), CY (1) to CY ( 11) are each incremented (step S2). Specifically, when the coordinate data is the coordinate data illustrated in FIG. 5 above, for example, counters CX (7) to CX corresponding to the X coordinates “1” to “3” on the line segment vector L1. Each value of (9) is incremented by “1”. Further, the values of the counters CY (7) to CY (11) corresponding to Y coordinates “1” to “5” are also incremented by “1”, respectively. The counter values are similarly incremented for the line segment vectors L2 and L4 and the non-line segment vectors L0 and L3. It should be noted that the counter value is incremented only once at the turn-around point of the line segment vector and the non-line segment vector in order to avoid the counter value from being incremented redundantly. That is, for the coordinate P2, the value of the counter CX (11) corresponding to the X coordinate “5” is incremented by “1”. Thereby, for the coordinate data illustrated in FIG. 5, the value of each counter increases as shown in FIG.

Next, the refresh process will be described with reference to FIG. The process shown in FIG. 9 is executed when a power switch provided in the controller 1 is turned on.
As shown in FIG. 9, in this process, first, for each set position of the X coordinate and the Y coordinate, a difference value of the counter value is calculated for each adjacent set position (step S10). Specifically, for the counters CX (1) to CX (11), the difference value ΔCX (m) is calculated based on the following formula (1) (where m = 1 to 10).

ΔCX (m) ← | CX (m) −CX (m + 1) | (1)
For the counters CY (1) to CY (11), the difference value ΔCY (n) is calculated based on the following equation (2) (where n = 1 to 10).

ΔCY (n) ← | CY (n) −CY (n + 1) | (2)
Next, in step S11, it is determined whether or not any of the difference values ΔCX (m) and ΔCY (n) exceeds a predetermined value ΔNth, and the difference values ΔCX (m) and ΔCY (n) are determined. If any of these exceeds the predetermined value ΔNth (step S11: YES), a refresh operation is executed (step S12). Specifically, for example, when the value of the difference value ΔCX (7) exceeds a predetermined value ΔNth, the setting position where the difference value ΔCX (7) occurs, that is, the position of the X coordinate “1” and “ The area between “2” and “2” is set as the refresh interval. Then, the first irradiation is performed so that the irradiation position of the laser beam L reciprocates a plurality of times between the position corresponding to “1” of the X coordinate and the position corresponding to “2” without emitting the laser beam. The galvanometer mirror 22 is rotated a plurality of times. When there are a plurality of difference values exceeding the predetermined value ΔNth, the same processing is performed for the plurality of difference values. Further, the same processing is performed for the Y coordinate, and the second galvanometer mirror 23 is rotated.

  Then, following step S12, it is determined whether any of the counters CX (1) to CX (11) and CY (1) to CY (11) exceeds the use upper limit value Nmax (step S12). S13). The use upper limit value Nmax is a value larger than the predetermined value ΔNth and indicates the use upper limit values of the first and second galvano motors 24 and 25, and is stored in advance in the memory 10a of the control device 10. ing. When any of the counters CX (1) to CX (11) and CY (1) to CY (11) exceeds the use upper limit value Nmax (step S13: YES), the speaker 12 is replaced. An alarm for timing is issued (step S14).

  On the other hand, when all of the difference values ΔCX (m) and ΔCY (n) are equal to or smaller than the predetermined value ΔNth (step S11: NO), the processing after step S13 is executed without executing the refresh operation. Further, when all the values of the counters CX (1) to CX (11) and CY (1) to CY (11) are equal to or less than the use upper limit value Nmax (step S13: NO), the control device 10 performs this series. Terminate the process.

Next, an operation example (action) of the laser processing apparatus according to the present embodiment will be described with reference to FIG.
Assume that the values of the counters CX (1) to C (11) corresponding to the X coordinate are as shown in FIG. 10, for example, as a result of repeated machining of the workpiece by the laser machining apparatus. In this case, the value changes greatly between the counter CX (7) and the counter CX (8) and between the counter CX (10) and the counter CX (11). Thus, there is a large difference in the use frequency between the position “2” and the position “2” and between the position “4” and the position “5”. In other words, there is a large difference in the usage frequency of the rotation position of the first galvanometer mirror 22. This is a factor causing unevenness of the lubricating oil in the bearing 24b of the first galvano motor 24.

  In this regard, in this embodiment, when the user turns on the power of the laser processing apparatus, the difference value ΔCX (7) between the value of the counter CX (1) and the value of the counter CX (2), and the counter CX (4) If the difference value ΔCX (10) between the value of the counter and the value of the counter CX (5) exceeds the predetermined value ΔNth, the refresh operation is executed. Specifically, as shown in the figure, the section between the position “1” and the position “2” corresponding to the difference value ΔCX (7) and “4” corresponding to the difference value ΔCX (10). The section between the position “5” and the position “5” is set as the refresh section. Further, the first galvano mirror 22 is rotated by the first galvanomotor 24 so that the irradiation position of the laser beam L reciprocates a plurality of times in these refresh intervals without emitting the laser beam. Then, by driving the first galvano motor 24, unevenness of the lubricating oil generated in the bearing 24b is suppressed. Further, since the refresh operation is similarly performed on the second galvanometer mirror 23, unevenness of the lubricating oil generated in the bearing 25b of the second galvanometer motor 25 is also suppressed. Thereby, since the shakiness of the 1st and 2nd galvanometer mirrors 22 and 23 is suppressed, processing accuracy can be maintained by extension.

  Further, since the first and second galvanometer mirrors 22 and 23 rotate only in a section where the difference between the counter values exceeds the predetermined value ΔNth, the entire rotation range is provided as in the conventional laser processing apparatus. Compared with the case where the galvano mirror is rotated over, wear of the bearings 24b, 25b of the first and second galvano motors 24, 25 can be suppressed. Therefore, the lifetime of the galvano scanner 9 can be extended, and as a result, the lifetime of the laser processing apparatus can be extended.

  Furthermore, in the laser processing apparatus of the present embodiment, if any of the counters CX (1) to CX (11) and CY (1) to CY (11) exceeds the use upper limit value Nmax, in other words, When the frequency of use of the rotational positions of the first and second galvanometer mirrors 22 and 23 exceeds the use upper limit value Nmax, an alarm is issued from the speaker 12. Accordingly, the user can easily know the replacement time of the first and second galvano motors 24, 25, and the convenience is improved.

As described above, according to the laser processing apparatus according to the present embodiment, the following effects can be obtained.
(1) The frequency of use of the first and second galvanometer mirrors 22 and 23 is integrated for each set position of the preset X coordinate and Y coordinate, and the use of each adjacent set position among the set positions. It was determined whether or not a difference exceeding the predetermined value ΔNth had occurred in the frequency integration value. When there is a difference exceeding the predetermined value ΔNth, a refresh operation for rotating the first and second galvanometer mirrors 22 and 23 in the section of the set position where the difference in the integrated value of the same usage frequency occurs. It was decided to do. Thereby, since unevenness of the lubricating oil generated in the bearings 24b and 25b of the first and second galvano motors 24 and 25 can be suppressed, rattling of the first and second galvano mirrors 22 and 23 is prevented. As a result, the processing accuracy can be maintained. Further, since the wear of the bearings 24b and 25b can be suppressed, the life of the galvano scanner 9 can be extended, and as a result, the life of the laser processing apparatus can be extended.

  (2) A determination is made as to whether or not a difference exceeding a predetermined value ΔNth has occurred in the integrated value of the usage frequencies of the adjacent setting positions, and the difference value is calculated for the integrated values of the usage frequencies of the adjacent setting positions. The difference value is compared with the predetermined value ΔNth. As a result, it is possible to easily determine whether or not a difference exceeding the predetermined value ΔNth has occurred in the integrated value of the usage frequencies of the adjacent setting positions.

  (3) When executing the refresh operation, the first and second galvanometer mirrors 22 and 23 are rotated a plurality of times in the adjacent set position section where a difference occurs in the integrated value of the use frequency. As a result, unevenness of the lubricating oil generated in the bearings 24b and 25b of the first and second galvano motors 24 and 25 can be more accurately suppressed, so that the processing accuracy can be maintained high.

  (4) When any of the usage frequencies of the set positions of the X coordinate and the Y coordinate exceeds the use upper limit value Nmax, an alarm for notifying the replacement time is issued from the speaker 12 provided in the controller 1. Thereby, since the user can easily know the replacement time of the first and second galvano motors 24 and 25, the convenience is improved.

  (5) Using the coordinate data as the scanning information of the laser beam, the use frequency for each set position of the X coordinate and the Y coordinate is integrated. This makes it possible to easily integrate the use frequency for each set position of the X coordinate and the Y coordinate.

In addition, the said embodiment can also be implemented with the following forms which changed this suitably.
The determination as to whether or not a difference exceeding the predetermined value ΔNth has occurred in the integrated values of the usage frequencies of the adjacent setting positions is made with respect to the integrated values of the usage frequencies of the adjacent setting positions and the integrated values. You may carry out by comparing the set upper threshold and lower threshold. Specifically, as shown in FIG. 11, for example, an upper limit threshold value Nth1 and a lower limit threshold value Nth2 are set for the values of counters CX (1) to CX (11) corresponding to the X coordinate. Note that the upper limit threshold value Nth1 and the lower limit threshold value Nth2 are set so that the difference between them is the predetermined value ΔNth. As shown in the figure, when the value of the counter CX (7) is less than the lower limit threshold value Nth2 and the value of the counter CX (8) exceeds the upper limit threshold value Nth1, the counter CX (7 ) And the usage frequency integrated value at the position “2” corresponding to the counter CX (8) are determined to have a difference exceeding a predetermined value ΔNth. Similarly, the use frequency integrated value at the position “4” corresponding to the counter CX (10) and the use frequency integrated value at the position “5” corresponding to the counter CX (11) exceed the predetermined value ΔNth. Judge that there is a difference. These intervals are set as refresh intervals, and a refresh operation is executed. Even with such a method, it is possible to easily determine whether or not there is a difference exceeding a predetermined value between the usage frequencies of adjacent setting positions.

  In addition, the determination as to whether or not a difference exceeding the predetermined value ΔNth has occurred in the integrated value of the usage frequencies of the adjacent setting positions is made to the integrated value of the usage frequency and the integrated value of the adjacent setting positions. Alternatively, the comparison may be performed by comparing with one threshold value set for the user. Specifically, as shown in FIG. 12, for example, one threshold value Nth3 is set for the values of counters CX (1) to CX (11) corresponding to the X coordinate. As shown in the figure, when the value of the counter CX (7) is less than the threshold value Nth3 and the value of the counter CX (8) exceeds the threshold value Nth3, it corresponds to the counter CX (7). It is determined that there is a difference exceeding the predetermined value ΔNth between the integrated value of the use frequency at the position “1” and the integrated value of the use frequency at the position “2” corresponding to the counter CX (8). Similarly, the use frequency integrated value at the position “4” corresponding to the counter CX (10) and the use frequency integrated value at the position “5” corresponding to the counter CX (11) exceed the predetermined value ΔNth. Judge that there is a difference. These intervals are set as refresh intervals, and a refresh operation is executed. Even with such a method, it is possible to easily determine whether or not there is a difference exceeding a predetermined value between the usage frequencies of adjacent setting positions. The method of determining with this threshold value is not limited to this embodiment, and it is determined that a difference exceeding the predetermined value ΔNth is generated by providing a threshold value that is a predetermined value or more with respect to the average value of the integrated values of the entire rotation position. However, it is not limited to this.

  Further, the counters CX (1) to CX (11), CY (1) to CY are determined based on whether or not a difference exceeding the predetermined value ΔNth has occurred in the integrated value of the usage frequencies of the adjacent setting positions. (11) may be performed by using a known edge detection method, or may be determined from a graph shape that is an integrated value of the use frequency of the entire rotation position.

  Before starting the refresh operation, on the condition that a character such as “Do you want to perform the refresh operation?” Is displayed on the display unit 31 and the operation unit 30 is subsequently operated to start the refresh operation. A refresh operation may be started. According to such a configuration, since the user can start the refresh operation with his / her own intention by operating the operation unit 30, convenience is improved.

  In the above embodiment, the refresh process illustrated in FIG. 9 is performed when the power switch provided in the controller 1 is turned on. Instead, for example, the operation unit 30 is operated. Each time a printing start operation is performed, the refresh process may be performed immediately before the start of processing. Further, the refresh process may be performed at the end of printing or when the inspection mode of the laser processing apparatus is performed. The timing for performing the refresh process can be set to an appropriate timing as long as the laser processing apparatus is not performing the processing.

  In the above embodiment, paying attention to the fact that there is a correlation between each set position of the X coordinate and the rotation position of the first galvanometer mirror 22, each set position of the X coordinate is set to the first galvanometer mirror. It was decided to use it as indicating a plurality of 22 rotational positions. Instead, for example, as indicated by a broken line in FIG. 2, the first and second galvanometer mirrors 22 and 23 detected through first and second rotation position sensors 27 and 28 as rotation position detection means. The frequency of use for each of the plurality of rotation positions of the galvanometer mirrors 22 and 23 may be integrated based on the actual rotation position (rotation angle). As the first and second rotation position sensors 27 and 28, for example, those used by the control device 10 to control the rotation of the first and second galvanometer mirrors 22 and 23 can be used. . According to such a configuration, the rotation positions of the first and second galvanometer mirrors 22 and 23 can be detected with high accuracy, and therefore, the plurality of rotations of the first and second galvanometer mirrors 22 and 23 can be detected. It becomes possible to accurately detect the usage frequency for each position. As a result, the refresh operation can be performed more appropriately, so that the unevenness of the lubricating oil generated in the bearings 24b and 25b of the first and second galvano motors 24 and 25 is further suppressed, and as a result, the processing accuracy is improved. Can be kept higher.

  In the above embodiment, when the refresh operation is executed, the first and second galvanometer mirrors 22 and 23 are rotated a plurality of times in the interval between adjacent setting positions where a difference occurs in the integrated value of the usage frequency. These may be rotated only once.

  In the above embodiment, when there is a difference exceeding the predetermined value ΔNth in the integrated value of the usage frequencies of the two adjacent setting positions, the section between the two setting positions is set as the refresh period. Instead, a wider section including these two setting positions may be set as the refresh section. Specifically, as shown in FIG. 10, for example, when the difference value ΔCX (7) exceeds the predetermined value ΔNth, as shown by a broken line in the figure, the difference value ΔCX (7) corresponds to “ A section between the position “0” and the position “3” may be set as the refresh section, including the section between the position “1” and the position “2”.

  In the above embodiment, the values of the counters CX (1) to CX (11) and CY (1) to CY (11) are incremented based on the coordinate data, in other words, the first and second values are based on the coordinate data. The use frequency of the galvanometer mirrors 22 and 23 was integrated. Instead of this, for example, in order to control the driving of the first and second galvano motors 24, 25, the drive signal output from the control device 10 to the first and second galvano motors 24, 25 is used. The frequency of use of the first and second galvanometer mirrors 22 and 23 may be integrated.

  In the above-described embodiment, an alarm for notifying the replacement time is issued from the speaker 12 on the condition that a difference exceeding the predetermined value ΔNth has occurred in the integrated value of the usage frequencies of the set positions adjacent to the X coordinate and the Y coordinate. It was. Instead, it is determined that a difference exceeding the predetermined value ΔNth has occurred in the integrated value of the usage frequencies of the adjacent setting positions of the X coordinate and the Y coordinate, and any one of the usage frequencies of the respective setting positions. May exceed the use upper limit value Nmax, and an alarm for notifying the replacement time may be issued from the speaker 12. In addition, it is determined that a difference exceeding the predetermined value ΔNth has occurred in the integrated value of the usage frequencies of the set positions adjacent to each other in the X coordinate and the Y coordinate, and a difference has been determined in the usage frequency. On the condition that one of the usage frequencies of the two setting positions exceeds the usage upper limit value Nmax, an alarm for notifying the replacement time may be issued from the speaker 12.

  In the above embodiment, when the use frequency of each set position of the X coordinate and the Y coordinate exceeds the use upper limit value Nmax, a configuration is adopted in which an alarm for notifying the replacement time is issued from the speaker 12 provided in the controller 1. However, this configuration can be omitted.

  In the above embodiment, the bearings 24b and 25b are sealed type lubricated by the internal lubricating oil, but instead of this, the lubricating oil supplied from an appropriate place of the head portion 2 is used. The bearings 24b and 25b may be lubricated.

In the above embodiment, the speaker 12 is used as the warning means for issuing the replacement time. However, for example, an appropriate warning means such as a replacement indicator lamp may be used.
In the above embodiment, the first and second galvano motors 24 and 25 are used as the drive means for rotating the first and second galvanometer mirrors 22 and 23. However, the drive means is an appropriate actuator. Can be used.

  In the above embodiment, the laser processing apparatus according to the present invention is applied to a laser processing apparatus including a galvano scanner capable of two-dimensional scanning, but a galvano scanner capable of only one-dimensional scanning, and 3 The present invention can also be applied to a laser processing apparatus including a galvano scanner capable of dimensional scanning.

<Appendix>
Next, a technical idea that can be grasped from the above embodiment and its modifications will be additionally described.
(A) The laser processing apparatus according to any one of claims 1 to 7, further comprising operation means operated when starting the refresh operation. According to this configuration, the user can start the refresh operation with his / her own will by operating the operation unit, so that convenience is improved.

  A: Processable region, L: Laser beam, W: Workpiece, CX (1) to CX (11), CY (1) to CY (11) ... Counter, 1 ... Controller, 2 ... Head part, 3 ... Console, DESCRIPTION OF SYMBOLS 4 ... Window part, 5 ... Electric cable, 6 ... Optical fiber, 7 ... Electric cable, 8 ... Mounting stand, 9 ... Galvano scanner, 10 ... Control apparatus, 10a ... Memory, 11 ... Laser light source, 12 ... Speaker, 21 ... Beam expander, 22 ... first galvanometer mirror, 23 ... second galvanometer mirror, 24 ... first galvanometer motor, 24a, 25a ... shaft, 24b, 25b ... bearing, 25 ... second galvanometer motor, 26 ... Condensing lens, 27 ... First rotation position sensor, 28 ... Second rotation position sensor, 30 ... Operation section, 31 ... Display section.

Claims (7)

A galvanometer mirror that reflects laser light emitted from a laser light source, and a shaft portion that is rotatably supported by a bearing and to which the galvanometer mirror is attached, and rotates the coaxial portion to rotate the galvanometer mirror. A laser processing apparatus that rotates the galvanometer mirror through the drive means, scans the laser beam reflected by the galvanometer mirror on the workpiece, and performs desired processing on the workpiece;
The use frequency is integrated for each of a plurality of rotation positions set in advance with respect to the rotation position of the galvanometer mirror, and a predetermined value is added to the integrated value of the use frequencies of the adjacent rotation positions among the rotation positions. When it is determined that there is a difference exceeding the control value, a refresh operation for rotating the galvanometer mirror in a section including adjacent rotation positions where a difference in the integrated value of the same usage frequency is generated is executed through the driving means. A laser processing apparatus comprising: means. The determination as to whether or not a difference exceeding the predetermined value has occurred in the usage frequencies of the adjacent rotation positions is performed by calculating a difference value for the integrated values of the usage frequencies of the adjacent rotation positions. The laser processing apparatus according to claim 1, which is performed by comparing a difference value with the predetermined value. The determination as to whether or not a difference exceeding the predetermined value has occurred in the usage frequencies of the adjacent rotation positions is based on whether the integrated value of the usage frequencies of the adjacent rotation positions is the same as the integrated value. The rotation position that is equal to or greater than the set upper limit threshold value or equal to or less than the lower limit threshold value that is set for the integrated value, and the rotation position that is equal to or greater than the upper limit threshold value and the rotation position that is equal to or less than the lower limit threshold value are The laser processing apparatus according to claim 1, wherein the laser processing apparatus is performed based on whether or not they are adjacent to each other. The said control means rotates the said galvanometer mirror in multiple times in the area containing the adjacent rotation position in which the difference has arisen in the integrated value of the said use frequency at the time of execution of the said refresh operation | movement. The laser processing apparatus according to item. In the laser processing apparatus as described in any one of Claims 1-4,
It is determined that a difference exceeding a predetermined value has occurred in the integrated value of the usage frequencies of the adjacent rotational positions, and any of the integrated values of the usage frequencies for the respective rotational positions is set in advance. A laser processing apparatus, further comprising alarm means for issuing an alarm notifying the replacement time on condition that the upper limit value is exceeded. The said control means calculates | requires the integrated value of the use frequency for every some rotation position preset with respect to the rotation position of the said galvanometer mirror from the coordinate data used as the scanning information of the said laser beam. The laser processing apparatus as described in any one of these. Rotation position detection means for detecting the rotation position of the galvanometer mirror is further provided, and the control means is configured to use the frequency of use for each of a plurality of rotation positions set in advance with respect to the rotation position of the galvanometer mirror. The laser processing apparatus according to claim 1, wherein the laser processing apparatus is obtained from a rotation angle detected by the rotation position detection unit.

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