JP2005313204A - Laser aperture forming apparatus, laser machining apparatus and laser aperture forming method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser aperture forming apparatus, a laser machining apparatus and a laser aperture forming method in which an aperture can be rapidly formed in a work at high speed. <P>SOLUTION: A work W is moved by a loading table 2, and during the movement, the ON-OFF signal is given to a laser beam source 10 to perform the ON-OFF operation for spot irradiation when the work W is located at the position where an aperture of a desired diameter is formed. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a laser hole forming apparatus, a laser processing apparatus, and a laser hole forming method for forming a hole in a workpiece by irradiating a laser beam.

Conventionally, as a technique for forming a hole in an object to be processed using a laser beam, there is a technique disclosed in Patent Document 1 below. This is because a laser oscillator that emits laser light, a converging lens that converges the laser light emitted therefrom and irradiates a laser spot on the object to be processed, and the object to be processed is perpendicular to the irradiation direction of the laser light. And an XY table that is moved two-dimensionally along a flat surface. In order to form a hole at a predetermined position on the workpiece, first, with the laser oscillator turned off, the XY table is driven to a position where the laser spot can be irradiated at the formation position. Move. When the drive control is finished and stopped on the XY table, the laser oscillator is turned on to irradiate the laser hole at the formation position to form the hole. In addition, even when a plurality of holes are formed at different positions, after each position is adjusted using the XY table, the laser spot is irradiated when the XY table stops, and the holes are formed. I was trying to form.
JP-A-10-217485

  However, in the conventional configuration, it takes time until the XY table is driven and stabilized at a desired position. In addition, since hole formation by laser light is generally performed even on a relatively small workpiece, there are many cases where high adjustment accuracy is required for the XY table. Therefore, when a plurality of holes are formed, there is a problem that the processing time as a whole becomes long.

  Some also form holes of different diameters for the workpiece. This includes the laser oscillator and the converging lens, and a mounting table for moving the workpiece up and down along the irradiation direction of the laser light from the converging lens. By changing the position of the object to be processed by driving the mounting table, the size of the diameter of the laser spot irradiated on the object to be processed changes, so that holes with different diameters can be formed. is there. However, even in such a case, there is a problem that it takes a long time to adjust because the laser light is irradiated after the workpiece is adjusted to a predetermined position.

  A beam expander comprising a plurality of lenses is provided between the laser oscillator and the converging lens, thereby changing the beam diameter of the laser light emitted from the converging lens to form different diameters on the workpiece. There is also a way to do it. However, this requires a mechanism for precisely adjusting the distance between the plurality of lenses of the beam expander, which causes a problem of a significant increase in cost and an increase in the size of the apparatus. The problem that adjustment time becomes long arises.

  The present invention has been completed based on the above circumstances, and provides a laser hole forming apparatus, a laser processing apparatus, and a laser hole forming method capable of accurately and rapidly forming a hole in an object to be processed. The purpose is to do.

  As a means for achieving the above object, a laser hole forming apparatus according to the invention of claim 1 is a laser hole forming apparatus for forming a hole by irradiating a workpiece with a laser beam, wherein the laser beam A laser light source that outputs laser light from the laser light source as convergent light, laser control means that performs on / off control to cause the laser light source to output and stop the laser light, and the convergent lens The position of the laser beam convergence point and the object to be processed is relatively moved by moving at least a table on which the object to be processed arranged in front of the emission direction of the laser light emitted from the object is moved. A moving means; a position detecting means for outputting a position signal indicating the position of the object to be processed by the moving means; and a formation position at which the hole is to be formed on the object to be processed. Storage means for storing relation information for associating the position of the object to be processed corresponding to the formation position, and the laser control means is stored in the storage means during the movement of the object to be processed. On the basis of the relationship information and the position signal from the position detecting means, when it is determined that the object to be processed has reached a position corresponding to the hole forming position, on / off control of the laser light source is performed to control the object. The laser beam is irradiated with a spot on a workpiece.

For example, the following configurations A and B can be given as more specific configurations.
(Configuration A)
“A laser hole forming apparatus for forming holes by irradiating a workpiece with laser light,
A laser light source for outputting laser light;
A converging lens for emitting laser light from the laser light source as convergent light;
Laser control means for performing on / off control to cause the laser light source to output and stop the laser light;
A moving means for moving a table on which the object to be processed disposed in front of the emission direction of the laser beam emitted from the convergent lens is moved along the emission direction;
Position detecting means for outputting a position signal indicating the position of the object to be processed by the moving means;
Hole diameter setting means for setting a diameter of a hole to be formed in the workpiece,
Storage means for storing various hole diameters that can be set by the hole diameter setting means and relationship information that associates each position of the workpiece that can form the hole diameter;
The laser control means sets the object to be processed by the hole diameter setting means based on the relationship information stored in the storage means and the position signal from the position detection means during movement of the object to be processed. When it is determined that the position corresponding to the hole diameter is reached, on / off control of the laser light source is performed to spot-irradiate the laser beam onto the object to be processed. "

(Configuration B)
“A laser hole forming apparatus for forming holes by irradiating a workpiece with laser light,
A laser light source for outputting laser light;
A converging lens for emitting laser light from the laser light source as convergent light;
Laser control means for performing on / off control to cause the laser light source to output and stop the laser light;
A moving means for moving a table on which the object to be processed arranged in front of the emission direction of the laser beam emitted from the convergent lens is moved along a plane perpendicular to the emission direction;
Position detecting means for outputting a position signal indicating the position of the object to be processed by the moving means;
Forming position setting means for setting a forming position of a hole to be formed in the workpiece;
Storage means for storing relationship information for associating each formation position that can be set by the formation position setting means with each position of the workpiece that can form a hole at the formation position;
The laser control unit sets the workpiece to be processed by the formation position setting unit based on the relationship information stored in the storage unit and the position signal from the position detection unit during movement of the workpiece. When it is determined that the position corresponding to the formed position has been reached, the laser light source is spot-irradiated on the workpiece by performing on / off control of the laser light source. "

  A laser hole forming apparatus according to a second aspect of the present invention is the laser hole forming apparatus according to the first aspect, wherein the moving means reciprocates the table along a predetermined one-dimensional direction.

  A laser hole forming apparatus according to a third aspect of the present invention is the laser hole forming apparatus according to the first or second aspect, wherein the moving means reciprocates the table along a central axis direction of the converging lens. On the other hand, a galvano mirror that guides the converging lens while changing the direction of the laser light from the laser light source, and driving the galvano mirror to determine the irradiation position of the laser light on a plane perpendicular to the central axis of the converging lens And a galvano driving means that can be changed in a one-dimensional direction or a two-dimensional direction.

  According to a fourth aspect of the present invention, there is provided a laser processing apparatus, comprising: a laser light source that outputs laser light; a converging lens that emits laser light from the laser light source as convergent light; and output and stop of the laser light to the laser light source. Laser control means for performing on / off control, and the laser with respect to a workpiece to be moved relative to the convergence point of the laser light in front of the emission direction of the laser light emitted from the convergence lens. A laser processing apparatus for forming a hole by irradiating light, an input means for inputting a position signal indicating the position of the object to be processed, a formation position for forming the hole on the object to be processed, Storage means for storing relation information for associating the position of the object to be processed corresponding to the formation position, and the laser control means is configured to move the object to be processed during movement. Then, based on the relation information stored in the storage unit and the position signal input to the input unit, when it is determined that the workpiece has reached a position corresponding to the formation position of the hole, The laser light source is spot-irradiated on the workpiece by performing on / off control of the laser light source.

For example, the following configurations C and D can be given as more specific configurations.
(Configuration C)
"Laser light source that outputs laser light,
A converging lens for emitting laser light from the laser light source as convergent light;
Laser control means for performing on / off control for causing the laser light source to output and stop the laser light;
A laser processing apparatus that irradiates the laser beam to a workpiece that moves along the emission direction in front of the emission direction of the laser beam emitted from the convergent lens to form a hole,
An input means for inputting a position signal indicating the position of the workpiece;
Hole diameter setting means for setting a diameter of a hole to be formed in the workpiece,
Storage means for storing various hole diameters that can be set by the hole diameter setting means and relationship information that associates each position of the workpiece that can form the hole diameter;
The laser control means sets the object to be processed by the hole diameter setting means based on the relationship information stored in the storage means and the position signal input to the input means while the object to be processed is moving. When it is determined that a position corresponding to the hole diameter is reached, the laser light source is spot-irradiated on the workpiece by performing on / off control of the laser light source. "

(Configuration D)
"Laser light source that outputs laser light,
A converging lens for emitting laser light from the laser light source as convergent light;
Laser control means for performing on / off control for causing the laser light source to output and stop the laser light;
A laser processing apparatus for irradiating a laser beam to a workpiece that moves relatively along a plane perpendicular to the emission direction in front of the emission direction of the laser beam emitted from the convergent lens to form a hole. Because
An input means for inputting a position signal indicating the position of the workpiece;
Forming position setting means for setting a forming position of a hole to be formed in the workpiece;
Storage means for storing relationship information for associating each formation position that can be set by the formation position setting means with each position of the workpiece that can form a hole at the formation position;
The laser control unit is configured to determine whether the workpiece is the formation position setting unit based on the relationship information stored in the storage unit and the position signal input to the input unit during the movement of the workpiece. When it is determined that a position corresponding to a set formation position has been reached, the laser light source is spot-irradiated on the object to be processed by performing on / off control of the laser light source. "

  A laser processing apparatus according to a fifth aspect of the present invention is the laser processing apparatus according to the fourth aspect, wherein the workpiece is reciprocated along a predetermined one-dimensional direction.

  The laser processing apparatus according to a sixth aspect of the present invention is the laser processing apparatus according to the fourth or fifth aspect, wherein the object to be processed reciprocates along the central axis direction of the converging lens, A galvano mirror that guides the converging lens while changing the direction of the laser light from the laser light source, and drives the galvano mirror to position the irradiation position of the laser light in a one-dimensional direction on a plane perpendicular to the central axis of the converging lens or And galvano drive means that can be changed in a two-dimensional direction.

  A laser hole forming method according to a seventh aspect of the invention is a laser hole forming method for forming a hole by irradiating a workpiece with light from a laser light source as convergent light through a converging lens. The position of the workpiece is detected at any time while relatively moving the position of the laser beam convergence point and the workpiece by moving at least a table on which the workpiece is placed, and the workpiece is When the position at which the hole can be formed is reached at a desired position on the workpiece, the laser beam is output to the laser light source and stopped without stopping the movement of the workpiece. On-off control is performed to spot-irradiate the laser beam onto the workpiece.

In addition, as a more specific structure, the following structures E and F are mentioned, for example.
(Configuration E)
“A laser hole forming method for forming a hole by irradiating the object to be processed with convergent light as a convergent light from a laser light source,
While detecting the position of the object to be processed while moving the table on which the object to be processed is moved along the irradiation direction of the laser beam,
When the workpiece reaches a position where a hole having a desired diameter can be formed on the workpiece, the laser beam is output to the laser light source without stopping the movement of the workpiece. And a laser hole forming method of performing spot irradiation of the laser beam onto the object to be processed by performing on / off control of the stop thereof. "

(Configuration F)
“A laser hole forming method for forming a hole by irradiating the object to be processed with convergent light as a convergent light from a laser light source,
Detecting the position of the workpiece as needed while moving the table on which the workpiece is placed along a plane perpendicular to the irradiation direction of the laser beam,
When the workpiece reaches a position where a hole can be formed at a desired formation position on the workpiece, the movement of the workpiece is not stopped and the laser light source A laser hole forming method characterized in that the laser beam is spot-irradiated on the object to be processed by performing on / off control of output and its stop. "

  A laser hole forming method according to an eighth aspect of the present invention is the laser hole forming method according to the seventh aspect, wherein the table on which the workpiece is placed is reciprocated along a predetermined one-dimensional direction. And

  A laser hole forming method according to a ninth aspect of the present invention is the laser hole forming method according to the seventh or eighth aspect, wherein the table on which the object to be processed is placed is along the central axis direction of the converging lens. While reciprocally moving, the laser light from the laser light source is guided to the converging lens while changing its direction via the galvano mirror, and the galvano mirror is driven, so that the surface is perpendicular to the central axis of the converging lens. The method further includes a step of changing the irradiation position of the laser beam in a one-dimensional direction or a two-dimensional direction.

<Invention of claims 1, 4 and 7>
According to this configuration, the position of the workpiece is detected as needed while relatively moving the workpiece, and the workpiece reaches a position where a hole can be formed at a desired position on the workpiece. In some cases, the output of the laser beam to the laser light source and the on / off control of the stop are performed without stopping the movement of the workpiece. In other words, the hole can be formed at high speed because the hole is formed by spot irradiation with laser light while the workpiece is being moved without stopping. Further, in the conventional configuration in which the workpiece is stopped at a predetermined position, there is a possibility that mechanical vibration occurs at the stop position and a hole cannot be formed at a desired size or position. In contrast, in this configuration, since the hole is formed without stopping the object to be processed, mechanical vibration does not occur and accurate hole formation can be performed.

<Inventions of Claims 2, 5 and 8>
According to this configuration, the workpiece is periodically reciprocated (amplitude moved) along a predetermined one-dimensional direction. Therefore, the position signal indicating the position of the object to be processed also changes periodically. Based on this periodic change of the position signal, the timing at which the object to be processed reaches the position corresponding to the hole formation position is detected. In addition, since it is not necessary to stop the object to be processed, holes can be formed at high speed.

<Invention of Claims 3, 6 and 9>
According to this configuration, the object to be processed is periodically reciprocated (amplitude moved) along the central axis direction of the converging lens, and the converging lens changes the direction of the laser light from the laser light source via the galvanometer mirror. Then, by driving the galvanometer mirror, the irradiation position of the laser beam can be changed to a one-dimensional direction or a two-dimensional direction on a plane perpendicular to the central axis of the converging lens. Therefore, it is possible to form holes with different diameters at different positions on the workpiece.

<Invention of the above configurations A, C, E>
According to this configuration, the position of the workpiece is detected as needed while relatively moving the workpiece along the laser beam irradiation direction, and the workpiece has a hole with a desired diameter on the workpiece. When reaching a position where the laser beam can be formed, the output of the laser beam to the laser light source and on / off control of the stop are performed without stopping the movement of the workpiece. Therefore, high-precision and high-precision hole formation is possible when holes having different diameters are formed.

<Invention of the above configurations B, D, F>
According to this configuration, the position of the workpiece is detected as needed while relatively moving the workpiece along a plane perpendicular to the laser light irradiation direction, and the workpiece is desired on the workpiece. When the position where the hole can be formed is reached, the laser light source is output to the laser light source and the stop on / off control is performed without stopping the movement of the workpiece. Therefore, when forming holes at different positions on the surface perpendicular to the central axis of the converging lens, it is possible to form holes at high speed and with high accuracy.

<Embodiment 1>
A first embodiment of the present invention will be described with reference to FIGS.
1. Configuration of Laser Hole Forming System of This Embodiment This embodiment is a mounting table 2 on which a workpiece W (for example, a metal member, a resin member, or a glass member) as an object to be processed is placed, and the placement thereof The laser hole forming system 1 includes a laser processing apparatus 3 for forming a hole by irradiating a workpiece W placed on a table 2 with a laser beam 11.

(1) Configuration of Laser Processing Apparatus In FIG. 1, reference numeral 10 denotes a laser light source, and the direction of the laser light 11 emitted from the laser light source 11 is changed by a galvano scanner 20 (irradiation position changing means) on the workpiece W. Is irradiated. The galvano scanner 20 includes a pair of galvanometer mirrors 20V and 20W and a converging lens 20Z. One galvanometer mirror 20W can change the reflection angle in the vertical direction by the driving means 20Y, and the other galvanometer mirror 20V The reflection angle can be shifted in the lateral direction by the driving means 20X. With these two galvanometer mirrors 20V and 20W, the direction of the laser beam 11 can be adjusted in two orthogonal directions. As a result, the laser spot that is the irradiation point of the laser beam 11 can be moved to any position on the workpiece W. Become. The converging lens 20Z is composed of, for example, an fθ lens, and has a function of converging the laser beam 11 reflected by the galvanometer mirrors 20V and 20W to focus on the workpiece W.

  The driving means 20X and 20Y of the galvano scanner 20 are controlled by a controller 30 corresponding to the control means. The controller 30 is connected to a setting unit 31 such as a console. When a desired character / symbol / graphic or the like to be marked is set in the setting unit 31, the controller 30 supplies data to the galvano scanner 20 corresponding thereto. More specifically, the controller 30 is provided with a memory 32 that stores font data such as characters, symbols, and graphics. When a character to be marked is set, lines constituting the character and the like are set based on the font data. Minute data is read out, and based on this, coordinate data for determining the irradiation position on the work W is generated by a CPU (not shown), D / A converted, and supplied to each driving means 20X, 20Y of the galvano scanner 20 It has become.

  In the present embodiment, the laser beam machining apparatus 3 does not print characters or the like on the workpiece W but moves the laser spot of the laser beam 11 to a desired position on the workpiece W to form a hole by irradiation. Used. In the setting unit 31, the size and formation position of a desired hole to be formed in the workpiece W can be set for a plurality of holes (both having different diameters or the same ones). Yes. The setting of the diameter and the forming position may be a configuration in which an actual diameter or a forming position is designated by a numerical value, or a configuration in which a plurality of predetermined diameters or forming positions are selected. Good.

(2) Placement table The placement table 2 includes a table 40 provided so as to be movable along the emitting direction of the laser beam 11 from the laser processing device 3 (the vertical direction in FIG. 1), and the table 40. A cam mechanism 41 that moves up and down at a predetermined cycle and a position detection sensor 42 that detects the position of the table, that is, the workpiece W, are provided. Note that the position detection sensor 42 does not have to be built in the mounting table 2 as in the present embodiment, and may be a separate one. As the cam of the cam mechanism 41 rotates at a constant speed around the eccentric shaft, the table and the workpiece W move up and down at a constant cycle. And the position detection sensor 42 is comprised from the magnetic sensor which outputs the position signal according to the proximity | contact state with a table, for example, and outputs the sine wave-like position signal of the period according to the vertical motion of the table and the workpiece | work W. Become. This position signal is D / A converted and input to the controller 30.

2. Control by Controller Now, the laser hole forming system 1 of this embodiment forms a plurality of holes at different positions in a predetermined order, and each hole has a different diameter at a formation position where it should be formed. By irradiating the laser spot multiple times, a hole having a diameter set by the setting unit 31 is formed through.

  When the laser hole forming system 1 is activated, the controller 30 executes the control shown in the flowchart of FIG. First, in step S1, a driving signal is given to the mounting table 2 to drive it. As a result, the workpiece W starts to move up and down. Then, the acquisition of the position signal from the position detection sensor 42 is started in step S2, and it is detected whether the vibration operation of the mounting table 2 is stabilized based on the position signal acquired in step S3. Specifically, the controller 30 sequentially detects, for example, the period of a sine wave position signal from the position detection sensor 42, and determines that the vibration operation of the mounting table 2 is stabilized when the period becomes constant. To do. In addition, the structure which detects whether it agree | coincides with the preset setting period and determines that the vibration operation | movement of the mounting table 2 was stabilized when it corresponds may be sufficient.

  When the controller 30 determines that the vibration operation of the mounting table 2 is stable ("Y" in step S3), the controller 30 receives a position signal of a predetermined reference level in step S4 and then receives the position of the reference level. Until the signal is received, pulse counting is started based on a predetermined reference clock signal. In the present embodiment, the pulse count is started when the position signal of the maximum level is received, that is, when the workpiece W on the mounting table 2 reaches the highest position. Then, in a state where the laser light source 10 is turned off in step S5, the galvano scanner 20 is given and driven with coordinate data that can irradiate the laser spot to the formation position of each hole set by the setting unit 31.

  Here, as shown in FIG. 3, the memory 32 has each hole diameter (M1, M2...) Set by the setting unit 31 and each execution timing of a plurality of spot irradiations for opening each hole. (The position of the workpiece W) is stored in association with each other. The controller 30 reads the spot irradiation timing data corresponding to the hole diameter set by the setting unit 31 and initializes the spot irradiation frequency K (steps S6 and S7).

  Then, for example, when the diameter of the hole being processed is M1, the controller 30 counts two pulses from the reference timing (time point X in FIG. 4) at which the position signal at the maximum level is received as shown in FIG. An on / off signal is given to the laser light source 10 at each timing (time A in the figure), when counting 4 pulses (time B in the figure), and when counting 6 pulses (time C in the figure). The on / off operation is instantaneously performed (steps S8 to S11). As a result, as shown in FIG. 5, a laser spot having a diameter D <b> 1 having the same diameter as M <b> 1 is irradiated onto the workpiece W at time A, and the next time B when the workpiece W is slightly separated from the converging lens 20 </ b> Z. The laser spot of D2 (<D1) is irradiated. Then, at the point C when the workpiece W is further away from the convergent lens 20Z, a laser spot of D3 (<D2) is irradiated. When the workpiece W is made of a resin having high heat absorption, for example, if the laser spot having the same diameter is continuously irradiated a plurality of times, the hole may spread beyond the set hole diameter. On the other hand, the diameter of the set hole diameter can be formed by performing spot irradiation a plurality of times while gradually reducing the diameter of the laser spot as in this embodiment.

  Then, if there is a hole of the next order (“N” in step S12), the controller 30 performs the processing from the above steps S5 to S11 again to make a hole, and if there is a hole of the next order, it ends as it is. (“Y” in step S12).

3. Advantages of the present embodiment As described above, in the present embodiment, when the workpiece W comes to a position where a hole having a desired diameter can be formed in a state where the workpiece W is moved by the mounting table 2, the spot is formed. It is the structure which irradiates. Therefore, one or a plurality of holes can be formed at a higher speed than the conventional one that is stopped each time when performing spot irradiation.

  Further, in the configuration in which the workpiece W is stopped at a predetermined position as in the prior art, mechanical vibration occurs at the stop position, which may change the irradiation state of the laser spot, making it impossible to form a hole at a desired size or position. There is. On the other hand, in the present configuration, since the hole is formed without stopping the object to be processed, mechanical vibration hardly occurs and accurate drilling can be performed.

  Further, in the present embodiment, the workpiece W is periodically moved in amplitude, and the spot irradiation is performed by counting the time from the predetermined reference timing in this cycle until the workpiece W reaches a desired position. The timing of each spot irradiation can be easily taken, and more accurate drilling can be performed.

<Embodiment 2>
FIG. 6 shows a second embodiment (corresponding to the inventions of claims 3, 6 and 9). The difference from the above embodiment lies in the moving direction of the workpiece W, and the other points are the same as in the first embodiment. Therefore, the same reference numerals as those in the first embodiment are given and the redundant description is omitted, and only different points will be described next.

  The laser hole forming system of the present embodiment is for making a plurality of holes having the same diameter at different positions on the workpiece W. In the present embodiment, the laser spot position of the laser processing apparatus 3 is fixed. The mounting table 2 moves the mounted work W by an amplitude along a plane perpendicular to the central axis of the converging lens 20Z (for example, in the left-right direction in FIG. 1). Then, in step S21 of FIG. 6, the controller 30 performs spot irradiation corresponding to the hole formation position currently being processed based on the correspondence relationship between the hole formation positions stored in advance in the memory 32 and the spot irradiation timing. The timing data is read and the set hole processing order H is initialized. Next, in steps S23 and S24, when counting from the reference timing to the spot irradiation timing, spot irradiation is performed to make holes. And such a process is performed about all the holes which set (steps S23-S26).

  As described above, the workpiece W is amplitude-moved in a direction intersecting with the emission direction of the laser beam 11, and a plurality of holes are formed at different positions on the workpiece W by spot irradiation during the movement. Thereby, it is possible to perform drilling with high speed and high accuracy.

<Other embodiments>
The present invention is not limited to the embodiments described with reference to the above description and drawings. For example, the following embodiments are also included in the technical scope of the present invention, and further, within the scope not departing from the gist of the invention other than the following. Various modifications can be made.
(1) In the first embodiment, the workpiece W is moved in a direction along the emission direction of the laser light 11, and in the second embodiment, the workpiece W is moved along a plane orthogonal to the emission direction. The configuration is not limited thereto, and the workpiece W may be moved obliquely (for example, moved obliquely up and down in FIG. 1) along the direction intersecting the central axis of the convergent lens 20Z.

  (2) In the above-described embodiment, the workpiece W is moved in amplitude. However, the present invention is not limited to this and may be moved in one direction. Further, the movement is not limited to linear movement, and may be, for example, curved movement as long as movement.

  (3) In the first embodiment, the pulse count is started on the basis of the time when the workpiece W on the mounting table 2 reaches the highest position (endmost position in the second embodiment). The reference timing may be the time when the workpiece W comes to the center position of the vibration movement (the zero crossing time of the position signal) or the lowest time.

  (4) In the first embodiment, the plurality of spot irradiation timings for one hole may be configured to be performed within one cycle of movement of the workpiece W. However, the present invention is not limited to this, and each spot irradiation is performed. The structure performed for every period may be sufficient. For example, after the first spot irradiation, the second spot irradiation is performed in the next cycle. In addition, a configuration in which spot irradiation is performed separately for each period as described above may be applied to the second embodiment.

  (5) In the above embodiment, the laser processing apparatus 3 includes the pair of galvanometer mirrors 20V and 20W. However, the laser processing apparatus 3 is not limited thereto, and includes a single galvanometer mirror to move the laser spot in a one-dimensional manner. It may be allowed.

1 is an overall configuration diagram of a laser hole forming system according to Embodiment 1 of the present invention. Flow chart showing the control contents of the controller Explanatory diagram showing the data structure of the memory Schematic diagram showing the relationship between position signal level and each spot irradiation timing Schematic diagram showing the relationship between each spot irradiation and workpiece distance The flowchart which shows the control content of the controller of Embodiment 2.

Explanation of symbols

1. Laser hole forming system (laser hole forming device)
2. Mounting table (moving means)
DESCRIPTION OF SYMBOLS 3 ... Laser processing apparatus 10 ... Laser light source 11 ... Laser beam 20Z ... Converging lens 30 ... Controller (laser control means)
31 ... Setting part (hole diameter setting means, formation position setting means)
32 ... Memory (storage means)
41 ... Cam mechanism (moving means)
42 ... Position detection sensor (position detection means)
W ... Work (object to be processed)

Claims (9)

A laser hole forming apparatus for forming a hole by irradiating a workpiece with laser light,
A laser light source for outputting laser light;
A converging lens for emitting laser light from the laser light source as convergent light;
Laser control means for performing on / off control to cause the laser light source to output and stop the laser light;
The position of the convergence point of the laser light and the object to be processed is relatively moved by moving at least a table on which the object to be processed arranged in front of the emission direction of the laser light emitted from the convergence lens is moved. Moving means to move to,
Position detecting means for outputting a position signal indicating the position of the object to be processed by the moving means;
Storage means for storing relation information for associating a formation position where the hole is to be formed on the object to be processed and a position of the object to be processed corresponding to the formation position;
The laser control means corresponds to the position where the workpiece is formed on the basis of the relation information stored in the storage means and the position signal from the position detection means during the movement of the workpiece. A laser hole forming apparatus characterized in that, when it is determined that the position has reached, the laser light source is turned on / off to spot-irradiate the laser beam onto the workpiece. The laser hole forming apparatus according to claim 1, wherein the moving unit reciprocates the table along a predetermined one-dimensional direction. While the moving means reciprocates the table along the central axis direction of the convergent lens,
A galvanometer mirror that guides the converging lens while changing the direction of laser light from the laser light source;
Galvano driving means capable of driving the galvanometer mirror to change the irradiation position of the laser beam in a one-dimensional direction or a two-dimensional direction on a plane perpendicular to the central axis of the converging lens. The laser hole forming apparatus according to claim 1 or 2. A laser light source for outputting laser light;
A converging lens for emitting laser light from the laser light source as convergent light;
Laser control means for performing on / off control for causing the laser light source to output and stop the laser light;
A laser processing apparatus for irradiating an object to be processed, which moves relative to a convergence point of the laser light, in front of an emission direction of the laser light emitted from the convergence lens to form a hole; There,
An input means for inputting a position signal indicating the position of the workpiece;
Storage means for storing relation information for associating a formation position where the hole is to be formed on the object to be processed and a position of the object to be processed corresponding to the formation position;
The laser control unit is configured to move the workpiece to the hole formation position based on the relationship information stored in the storage unit and the position signal input to the input unit during movement of the workpiece. When it is determined that a corresponding position has been reached, an on / off control of the laser light source is performed to spot-irradiate the laser beam onto the workpiece. The laser processing apparatus according to claim 4, wherein the object to be processed reciprocates along a predetermined one-dimensional direction. While the object to be processed reciprocates along the central axis direction of the convergent lens,
A galvanometer mirror that guides the converging lens while changing the direction of laser light from the laser light source;
Galvano driving means capable of driving the galvanometer mirror to change the irradiation position of the laser beam in a one-dimensional direction or a two-dimensional direction on a plane perpendicular to the central axis of the converging lens. The laser processing apparatus according to claim 4 or 5. A laser hole forming method for forming a hole by irradiating a workpiece with light from a laser light source as convergent light through a converging lens,
Detecting the position of the object to be processed at any time while relatively moving the position of the laser beam convergence point and the object to be processed by moving at least a table on which the object to be processed is placed;
When the object to be processed reaches a position where the hole can be formed at a desired position on the object to be processed, the movement of the object to be processed is not stopped and the laser light source A laser hole forming method characterized in that the laser beam is spot-irradiated on the object to be processed by performing on / off control of output and its stop. 8. The laser hole forming method according to claim 7, wherein the table on which the workpiece is placed is reciprocated along a predetermined one-dimensional direction. While reciprocating the table on which the workpiece is placed along the central axis direction of the convergent lens,
The laser light from the laser light source is guided to the converging lens while changing its direction via a galvano mirror, and the galvano mirror is driven to irradiate the laser light on a plane perpendicular to the central axis of the converging lens. 9. The laser hole forming method according to claim 7, further comprising a step of changing the position in a one-dimensional direction or a two-dimensional direction.

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