JP5774024B2 - マイクロバルブ - Google Patents

マイクロバルブ Download PDF

Info

Publication number
JP5774024B2
JP5774024B2 JP2012547286A JP2012547286A JP5774024B2 JP 5774024 B2 JP5774024 B2 JP 5774024B2 JP 2012547286 A JP2012547286 A JP 2012547286A JP 2012547286 A JP2012547286 A JP 2012547286A JP 5774024 B2 JP5774024 B2 JP 5774024B2
Authority
JP
Japan
Prior art keywords
valve
gasket
microvalve
valve body
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2012547286A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013516582A5 (enExample
JP2013516582A (ja
Inventor
サンパー，ヴィクター
レンシュ，クリスチャン
ボールド，クリストフ
バラー，マルコ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of JP2013516582A publication Critical patent/JP2013516582A/ja
Publication of JP2013516582A5 publication Critical patent/JP2013516582A5/ja
Application granted granted Critical
Publication of JP5774024B2 publication Critical patent/JP5774024B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Lift Valve (AREA)
  • Fluid-Driven Valves (AREA)
JP2012547286A 2009-12-31 2010-12-30 マイクロバルブ Active JP5774024B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US29146409P 2009-12-31 2009-12-31
US61/291,464 2009-12-31
PCT/US2010/062453 WO2011082276A1 (en) 2009-12-31 2010-12-30 Microvalve

Publications (3)

Publication Number Publication Date
JP2013516582A JP2013516582A (ja) 2013-05-13
JP2013516582A5 JP2013516582A5 (enExample) 2015-01-08
JP5774024B2 true JP5774024B2 (ja) 2015-09-02

Family

ID=43821975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012547286A Active JP5774024B2 (ja) 2009-12-31 2010-12-30 マイクロバルブ

Country Status (6)

Country Link
US (1) US8753587B2 (enExample)
EP (1) EP2519763A1 (enExample)
JP (1) JP5774024B2 (enExample)
CN (1) CN102812276B (enExample)
BR (1) BR112012015840A2 (enExample)
WO (1) WO2011082276A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130066291A (ko) * 2011-12-12 2013-06-20 삼성전자주식회사 회수 가능한 세포 카운터 시스템
US9399216B2 (en) 2013-12-30 2016-07-26 General Electric Company Fluid transport in microfluidic applications with sensors for detecting fluid presence and pressure
US10076751B2 (en) 2013-12-30 2018-09-18 General Electric Company Systems and methods for reagent storage
JP6548356B2 (ja) * 2014-03-20 2019-07-24 キヤノンメディカルシステムズ株式会社 送液装置
WO2015191960A1 (en) * 2014-06-13 2015-12-17 Vistadeltek, Llc High conductance valve for fluids and vapors
US10088075B2 (en) * 2015-08-20 2018-10-02 Ok International Inc. Disposable diaphragm valve
JP6806374B2 (ja) * 2015-10-23 2021-01-06 国立研究開発法人科学技術振興機構 ナノ流体デバイス及び化学分析装置
US10525466B2 (en) 2016-09-16 2020-01-07 General Electric Company Compact valve array with actuation system
US11305278B2 (en) * 2016-10-07 2022-04-19 Boehringer Ingelheim Vetmedica Gmbh Cartridge for testing a biological sample
US10458553B1 (en) 2017-06-05 2019-10-29 Vistadeltek, Llc Control plate for a high conductive valve
US10364897B2 (en) 2017-06-05 2019-07-30 Vistadeltek, Llc Control plate for a high conductance valve
US10323754B2 (en) 2017-06-05 2019-06-18 Vistadeltek, Llc Control plate for a high conductive valve
US11248708B2 (en) 2017-06-05 2022-02-15 Illinois Tool Works Inc. Control plate for a high conductance valve
JP7226221B2 (ja) * 2019-09-24 2023-02-21 株式会社島津製作所 マイクロバルブ
CN114110253B (zh) * 2021-12-01 2024-05-10 苏州含光微纳科技有限公司 一种用于控制流体通断的微流控芯片阀门

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3779274A (en) * 1972-11-21 1973-12-18 Robertshaw Controls Co Pressure regulator
US4070004A (en) * 1976-03-01 1978-01-24 Waters Associates, Inc. Diaphragm valve
US5776103A (en) * 1995-10-11 1998-07-07 Science Incorporated Fluid delivery device with bolus injection site
US6129331A (en) * 1997-05-21 2000-10-10 Redwood Microsystems Low-power thermopneumatic microvalve
US5961492A (en) * 1997-08-27 1999-10-05 Science Incorporated Fluid delivery device with temperature controlled energy source
KR19990075617A (ko) * 1998-03-23 1999-10-15 윤종용 유량 조절 밸브
FR2782935B3 (fr) * 1998-09-08 2000-10-20 Biomerieux Sa Dispositif permettant des reactions, systeme de transfert entre dispositifs et procede de mise en oeuvre d'un tel systeme
US6406605B1 (en) 1999-06-01 2002-06-18 Ysi Incorporated Electroosmotic flow controlled microfluidic devices
DE19949912C2 (de) * 1999-10-16 2003-02-27 Karlsruhe Forschzent Vorrichtung für eine Kraftübersetzung, Verfahren zu deren Herstellung und deren Verwendung
US6729599B2 (en) * 2001-06-26 2004-05-04 Tini Alloy Company Liquid microvalve
JP3756429B2 (ja) * 2001-07-12 2006-03-15 Ｓｍｃ株式会社 流量制御弁
WO2006044458A2 (en) * 2004-10-13 2006-04-27 University Of Virginia Patent Foundation Electrostatic actuation for management of flow
DE102006006706A1 (de) 2006-02-13 2007-08-23 Rheinisch-Westfälische Technische Hochschule Aachen Mikroventil
DE102008002336A1 (de) * 2008-06-10 2009-12-24 Robert Bosch Gmbh Quetschventil und Verfahren zu dessen Herstellung
US8092761B2 (en) * 2008-06-20 2012-01-10 Silverbrook Research Pty Ltd Mechanically-actuated microfluidic diaphragm valve

Also Published As

Publication number Publication date
EP2519763A1 (en) 2012-11-07
CN102812276B (zh) 2014-04-02
US8753587B2 (en) 2014-06-17
BR112012015840A2 (pt) 2020-07-28
CN102812276A (zh) 2012-12-05
US20120267561A1 (en) 2012-10-25
WO2011082276A1 (en) 2011-07-07
JP2013516582A (ja) 2013-05-13

Similar Documents

Publication Publication Date Title
JP5774024B2 (ja) マイクロバルブ
JP2013516582A5 (enExample)
US20130199646A1 (en) Valve plug
US5496009A (en) Valve
US6431212B1 (en) Valve for use in microfluidic structures
CN103282706B (zh) 微泵或常闭式微阀
US9726301B2 (en) Device with rotary valve for the manipulation of liquids
US20120298233A1 (en) Microfluidic component for manipulating a fluid, and microfluidic chip
US20120181460A1 (en) Valves with Hydraulic Actuation System
JP2020532722A5 (enExample)
EP1334279A1 (en) Uni-directional flow microfluidic components
WO2018021277A1 (ja) オリフィス内蔵弁および圧力式流量制御装置
JP6111161B2 (ja) 流体取扱装置および流体取扱方法
CN103157523A (zh) 微流器件及其制造方法
KR20110072275A (ko) 미세 유체 소자 및 그 제조방법
CN1133080A (zh) 微细加工的阀门装置
US20130068325A1 (en) Valve, layer structure comprising a first and a second valve, micropump and method of producing a valve
CN113769798B (zh) 微流控芯片
KR20130069304A (ko) 미세 유체 소자 및 그 제조방법
Toh et al. Modular membrane valves for universal integration within thermoplastic devices
US20250242346A1 (en) Modular microvalves for microfluidic devices and methods of using the same
Hua et al. A compact chemical-resistant microvalve array using Parylene membrane and pneumatic actuation
WO2025166247A1 (en) Embedded valve for microfluidic devices
Browne et al. A PDMS pinch valve with zero dead volume as a valving module for rigid polymer lab chips
Bu et al. A microfluidic control system with re-usable micropump/valve actuator and injection moulded disposable polymer lab-on-a-slide

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20131114

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140805

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140812

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20141111

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150602

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150630

R150 Certificate of patent or registration of utility model

Ref document number: 5774024

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250